How can the improvement in polishing uniformity be quantified after using your finishing pads?
Improvement can be quantified through three key metrics:
-
TTV Improvement: Proprietary porous elastic layer design controls wafer total thickness variation to < 0.3 µm (40% improvement over conventional pads)
-
Removal Rate Uniformity: Micro-channel technology improves within-wafer non-uniformity (WIWNU) to > 95%
-
Defect Control: Flexible fiber surface structure reduces scratch defect density to < 0.05 counts/cm²
We offer free process audit services to provide customers with benchmark comparison reports.