{"id":919,"date":"2025-12-12T16:38:04","date_gmt":"2025-12-12T08:38:04","guid":{"rendered":"https:\/\/jeez-semicon.com\/?post_type=avada_faq&#038;p=919"},"modified":"2025-12-12T16:43:41","modified_gmt":"2025-12-12T08:43:41","slug":"what-special-properties-are-required-for-finishing-pads-when-processing-third-generation-semiconductor-materials-like-gallium-nitride-gan","status":"publish","type":"avada_faq","link":"https:\/\/jeez-semicon.com\/de\/faq-items\/what-special-properties-are-required-for-finishing-pads-when-processing-third-generation-semiconductor-materials-like-gallium-nitride-gan\/","title":{"rendered":"Welche besonderen Eigenschaften sind f\u00fcr Finishing Pads bei der Verarbeitung von Halbleitermaterialien der dritten Generation wie Galliumnitrid (GaN) erforderlich?"},"content":{"rendered":"<p class=\"ds-markdown-paragraph\">Drei besondere Voraussetzungen m\u00fcssen erf\u00fcllt sein:<\/p>\n<ul>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>Belastungsarmes Polieren<\/strong>: Der Elastizit\u00e4tsmodul des Substrats muss dem spr\u00f6den Charakter von GaN entsprechen (Bruchz\u00e4higkeit &lt; 2 MPa-m\u00b9\/\u00b2), um Mikrorisse zu vermeiden.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>Best\u00e4ndigkeit gegen stark alkalische Umgebungen<\/strong>: PTFE-modifiziertes Polyurethan erm\u00f6glicht stabilen Betrieb &gt; 200 Stunden in KOH-basierten Schl\u00e4mmen mit pH &gt; 12<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>Verbessertes W\u00e4rmemanagement<\/strong>: W\u00e4rmeleitf\u00e4higkeit &gt; 0,5 W\/m-K f\u00fcr eine schnelle Ableitung der lokalen Reibungsw\u00e4rme (GaN ist temperaturempfindlich)<br \/>\nJizhi Elektronik\u2019\u00a0<strong>GaN-spezifische Pad-Serie<\/strong>\u00a0wurde in der Massenproduktion von 6-Zoll-Wafern mit einer Verzugskontrolle &lt; 50 \u00b5m validiert.<\/p>\n<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>Three special requirements must be met: Low-stress polishing: Elastic substrate modulus must match GaN&#8217;s brittle nature (fracture toughness &lt; 2 MPa\u00b7m\u00b9\/\u00b2) to prevent micro-cracks Resistance to strong alkaline environments: PTFE-modified  &#8230;<\/p>","protected":false},"author":1,"featured_media":925,"menu_order":0,"comment_status":"open","ping_status":"closed","template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"faq_category":[],"class_list":["post-919","avada_faq","type-avada_faq","status-publish","format-standard","has-post-thumbnail","hentry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/de\/wp-json\/wp\/v2\/avada_faq\/919","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/de\/wp-json\/wp\/v2\/avada_faq"}],"about":[{"href":"https:\/\/jeez-semicon.com\/de\/wp-json\/wp\/v2\/types\/avada_faq"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/de\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/de\/wp-json\/wp\/v2\/comments?post=919"}],"version-history":[{"count":1,"href":"https:\/\/jeez-semicon.com\/de\/wp-json\/wp\/v2\/avada_faq\/919\/revisions"}],"predecessor-version":[{"id":920,"href":"https:\/\/jeez-semicon.com\/de\/wp-json\/wp\/v2\/avada_faq\/919\/revisions\/920"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/de\/wp-json\/wp\/v2\/media\/925"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/de\/wp-json\/wp\/v2\/media?parent=919"}],"wp:term":[{"taxonomy":"faq_category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/de\/wp-json\/wp\/v2\/faq_category?post=919"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}