{"id":1035,"date":"2026-01-05T15:53:45","date_gmt":"2026-01-05T07:53:45","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1035"},"modified":"2026-01-05T16:00:57","modified_gmt":"2026-01-05T08:00:57","slug":"cmp-slurry-composition-explained","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-composition-explained\/","title":{"rendered":"CMP\u30b9\u30e9\u30ea\u30fc\u306e\u7d44\u6210\u306b\u3064\u3044\u3066"},"content":{"rendered":"<p>&nbsp;<\/p>\n<p><!-- ================= Table of Contents ================= --><\/p>\n<nav>\n<h2>\u76ee\u6b21<\/h2>\n<ul>\n<li><a href=\"#introduction\">\u306f\u3058\u3081\u306b<\/a><\/li>\n<li><a href=\"#architecture\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u57fa\u672c\u69cb\u9020<\/a><\/li>\n<li><a href=\"#abrasives\">CMP\u30b9\u30e9\u30ea\u30fc\u4e2d\u306e\u7814\u78e8\u7c92\u5b50<\/a><\/li>\n<li><a href=\"#chemical-additives\">\u5316\u5b66\u6dfb\u52a0\u5264\u3068\u9178\u5316\u5264<\/a><\/li>\n<li><a href=\"#complexing-inhibitors\">\u932f\u5316\u5264\u3068\u8150\u98df\u6291\u5236\u5264<\/a><\/li>\n<li><a href=\"#ph-control\">pH\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3068\u5316\u5b66\u7684\u5b89\u5b9a\u6027<\/a><\/li>\n<li><a href=\"#stability-dispersion\">\u30b9\u30e9\u30ea\u30fc\u306e\u5b89\u5b9a\u6027\u3001\u5206\u6563\u6027\u3001\u4fdd\u5b58\u6027<\/a><\/li>\n<li><a href=\"#engineering-parameters\">\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc\u8868<\/a><\/li>\n<li><a href=\"#experimental-data\">\u5b9f\u9a13\u30c7\u30fc\u30bf\u3068\u6027\u80fd\u7bc4\u56f2<\/a><\/li>\n<li><a href=\"#process-window\">CMP\u30b9\u30e9\u30ea\u30fc\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u30a6\u30a3\u30f3\u30c9\u30a6\u5206\u6790<\/a><\/li>\n<li><a href=\"#failure-modes\">\u7d44\u6210\u306b\u95a2\u9023\u3057\u305f\u6545\u969c\u30e2\u30fc\u30c9<\/a><\/li>\n<li><a href=\"#ecosystem\">CMP\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u5185\u306eCMP\u30b9\u30e9\u30ea\u30fc\u306e\u7d44\u6210<\/a><\/li>\n<\/ul>\n<\/nav>\n<hr \/>\n<p><!-- ================= Section 1 ================= --><\/p>\n<h2 id=\"introduction\">\u306f\u3058\u3081\u306b<\/h2>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u7d44\u6210\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u5316\u5b66\u7684\u6a5f\u68b0\u7684\u5e73\u5766\u5316\u30d7\u30ed\u30bb\u30b9\u306e\u57fa\u672c\u7684\u306a\u6319\u52d5\u3092\u898f\u5b9a\u3059\u308b\u3002CMP\u306f\u3057\u3070\u3057\u3070\u5316\u5b66\u3068\u529b\u5b66\u306e\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u3068\u8868\u73fe\u3055\u308c\u307e\u3059\u304c\u3001\u3053\u306e2\u3064\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\u304c\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u3067\u3069\u306e\u3088\u3046\u306b\u76f8\u4e92\u4f5c\u7528\u3059\u308b\u304b\u3092\u6700\u7d42\u7684\u306b\u652f\u914d\u3059\u308b\u306e\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u914d\u5408\u3067\u3059\u3002.<\/p>\n<p>\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306e\u89b3\u70b9\u304b\u3089\u898b\u308b\u3068\u3001CMP\u30b9\u30e9\u30ea\u30fc\u306f\u6c4e\u7528\u5316\u5b66\u7269\u8cea\u3067\u306f\u306a\u3044\u3002\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u7c92\u5b50\u7269\u7406\u5b66\u3001\u8868\u9762\u5316\u5b66\u3001\u9759\u96fb\u6c17\u5b66\u3001\u30d7\u30ed\u30bb\u30b9\u30c0\u30a4\u30ca\u30df\u30af\u30b9\u306e\u8907\u96d1\u306a\u76f8\u4e92\u4f5c\u7528\u306b\u3088\u3063\u3066\u6027\u80fd\u304c\u6c7a\u5b9a\u3055\u308c\u308b\u3001\u9ad8\u5ea6\u306b\u8a2d\u8a08\u3055\u308c\u305f\u30b3\u30ed\u30a4\u30c9\u30b7\u30b9\u30c6\u30e0\u3067\u3059\u3002\u7d44\u6210\u306e\u308f\u305a\u304b\u306a\u5909\u5316\uff08\u6642\u306b\u306f100\u4e07\u5206\u306e1\u30ec\u30d9\u30eb\u306e\u5909\u5316\uff09\u306f\u3001\u6750\u6599\u9664\u53bb\u7387\u3001\u6b20\u9665\u5bc6\u5ea6\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u6b69\u7559\u307e\u308a\u306b\u6e2c\u5b9a\u53ef\u80fd\u306a\u5dee\u3092\u3082\u305f\u3089\u3059\u3002.<\/p>\n<p>\u30c7\u30d0\u30a4\u30b9\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u304c\u62e1\u5f35\u3092\u7d9a\u3051\u3001\u30d7\u30ed\u30bb\u30b9\u7d71\u5408\u304c\u8907\u96d1\u5316\u3059\u308b\u306b\u3064\u308c\u3001CMP\u30b9\u30e9\u30ea\u30fc\u7d44\u6210\u306f\u3001\u88dc\u52a9\u7684\u306a\u6d88\u8017\u54c1\u304b\u3089\u3001\u30d7\u30ed\u30bb\u30b9\u3092\u5b9f\u73fe\u3059\u308b\u91cd\u8981\u306a\u8981\u7d20\u3078\u3068\u9032\u5316\u3057\u3066\u3044\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u3001CMP\u30d7\u30ed\u30bb\u30b9\u30a8\u30f3\u30b8\u30cb\u30a2\u3001\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u30a8\u30f3\u30b8\u30cb\u30a2\u3001\u6b69\u7559\u307e\u308a\u5411\u4e0a\u30c1\u30fc\u30e0\u306b\u3068\u3063\u3066\u3001\u30b9\u30e9\u30ea\u30fc\u7d44\u6210\u3092\u57fa\u672c\u7684\u306a\u30ec\u30d9\u30eb\u3067\u7406\u89e3\u3059\u308b\u3053\u3068\u306f\u4e0d\u53ef\u6b20\u3067\u3059\u3002.<\/p>\n<p>\u3059\u3079\u3066\u306e\u7528\u9014\u306b\u304a\u3051\u308bCMP\u30b9\u30e9\u30ea\u30fc\u306e\u5305\u62ec\u7684\u306a\u6982\u8981\u306b\u3064\u3044\u3066\u306f\u3001\u67f1\u306e\u30da\u30fc\u30b8\u3092\u53c2\u7167\u3057\u3066\u304f\u3060\u3055\u3044\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-for-semiconductor-wafer-polishing\/\">\u534a\u5c0e\u4f53\u88fd\u9020\u7528CMP\u30b9\u30e9\u30ea\u30fc<\/a>.<\/p>\n<p><!-- ================= Section 2 ================= --><\/p>\n<h2 id=\"architecture\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u57fa\u672c\u69cb\u9020<\/h2>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u591a\u76f8\u306e\u5316\u5b66\u53cd\u5fdc\u6027\u30b3\u30ed\u30a4\u30c9\u7cfb\u3068\u3057\u3066\u6700\u3082\u3088\u304f\u7406\u89e3\u3055\u308c\u308b\u3002\u305d\u306e\u69cb\u9020\u306f\u3001\u8907\u6570\u306e\u6a5f\u80fd\u6027\u6dfb\u52a0\u5264\u3092\u542b\u3080\u6c34\u6027\u5316\u5b66\u5a92\u4f53\u4e2d\u306b\u61f8\u6fc1\u3055\u308c\u305f\u56fa\u4f53\u7814\u78e8\u7c92\u5b50\u304b\u3089\u69cb\u6210\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n<p>\u3053\u306e\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u306f\u3001\u7dca\u5bc6\u306b\u7d50\u5408\u3057\u305f4\u3064\u306e\u30b5\u30d6\u30b7\u30b9\u30c6\u30e0\u306b\u5206\u3051\u308b\u3053\u3068\u304c\u3067\u304d\u308b\uff1a<\/p>\n<ul>\n<li><strong>\u56fa\u76f8\uff1a<\/strong> \u6a5f\u68b0\u7684\u9664\u53bb\u3092\u62c5\u3046\u7814\u78e8\u7c92\u5b50<\/li>\n<li><strong>\u6db2\u76f8\uff1a<\/strong> \u8f38\u9001\u3068\u71b1\u5b89\u5b9a\u6027\u3092\u63d0\u4f9b\u3059\u308b\u6c34\u6027\u30ad\u30e3\u30ea\u30a2<\/li>\n<li><strong>\u53cd\u5fdc\u5316\u5b66\uff1a<\/strong> \u9178\u5316\u5264\u3068\u8868\u9762\u6539\u8cea\u5264<\/li>\n<li><strong>\u5236\u5fa1\u5316\u5b66\uff1a<\/strong> \u7de9\u885d\u5264\u3001\u6291\u5236\u5264\u3001\u5b89\u5b9a\u5264\u3001\u5206\u6563\u5264<\/li>\n<\/ul>\n<p>\u30b9\u30e9\u30ea\u30fc\u8abf\u5408\u306b\u304a\u3051\u308b\u8ab2\u984c\u306f\u3001\u500b\u3005\u306e\u6210\u5206\u3092\u9078\u629e\u3059\u308b\u3053\u3068\u3067\u306f\u306a\u304f\u3001\u9ad8\u3044\u526a\u65ad\u5fdc\u529b\u3001\u9023\u7d9a\u7684\u306a\u30b9\u30e9\u30ea\u30fc\u30ea\u30d5\u30ec\u30c3\u30b7\u30e5\u3001\u6e29\u5ea6\u5909\u52d5\u3001\u6c5a\u67d3\u30ea\u30b9\u30af\u3092\u542b\u3080\u5b9f\u969b\u306eCMP\u6761\u4ef6\u4e0b\u3067\u3001\u3053\u308c\u3089\u306e\u30b5\u30d6\u30b7\u30b9\u30c6\u30e0\u304c\u5b89\u5b9a\u3057\u305f\u52b9\u679c\u3092\u7dad\u6301\u3067\u304d\u308b\u3088\u3046\u306b\u3059\u308b\u3053\u3068\u3067\u3042\u308b\u3002.<\/p>\n<figure><figcaption><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1043\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Fundamental-architecture-of-CMP-slurry-showing-abrasive-particles-dispersed-in-a-chemically-active-aqueous-medium.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Fundamental-architecture-of-CMP-slurry-showing-abrasive-particles-dispersed-in-a-chemically-active-aqueous-medium.jpg\" alt=\"Fundamental architecture of CMP slurry showing abrasive particles dispersed in a chemically active aqueous medium\" width=\"550\" height=\"371\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27550%27%20height%3D%27371%27%20viewBox%3D%270%200%20550%20371%27%3E%3Crect%20width%3D%27550%27%20height%3D%27371%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Fundamental-architecture-of-CMP-slurry-showing-abrasive-particles-dispersed-in-a-chemically-active-aqueous-medium-200x135.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Fundamental-architecture-of-CMP-slurry-showing-abrasive-particles-dispersed-in-a-chemically-active-aqueous-medium-300x202.jpg 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Fundamental-architecture-of-CMP-slurry-showing-abrasive-particles-dispersed-in-a-chemically-active-aqueous-medium-400x270.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Fundamental-architecture-of-CMP-slurry-showing-abrasive-particles-dispersed-in-a-chemically-active-aqueous-medium.jpg 550w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 550px) 100vw, 550px\" \/><\/figcaption><\/figure>\n<p><!-- ================= Section 3 ================= --><\/p>\n<h2 id=\"abrasives\">CMP\u30b9\u30e9\u30ea\u30fc\u4e2d\u306e\u7814\u78e8\u7c92\u5b50<\/h2>\n<p>\u7814\u78e8\u7c92\u5b50\u306fCMP\u30b9\u30e9\u30ea\u30fc\u306e\u6a5f\u68b0\u7684\u57fa\u76e4\u3092\u5f62\u6210\u3057\u307e\u3059\u304c\u3001\u305d\u306e\u6a5f\u80fd\u306f\u3057\u3070\u3057\u3070\u8aa4\u89e3\u3055\u308c\u3066\u3044\u307e\u3059\u3002CMP\u306b\u304a\u3044\u3066\u7814\u78e8\u5264\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u3092\u7a4d\u6975\u7684\u306b\u7814\u78e8\u3059\u308b\u3053\u3068\u3092\u76ee\u7684\u3068\u3057\u3066\u3044\u307e\u305b\u3093\u3002\u305d\u306e\u4ee3\u308f\u308a\u306b\u3001\u5316\u5b66\u7684\u306b\u4fee\u98fe\u3055\u308c\u305f\u8868\u9762\u5c64\u3092\u9664\u53bb\u3059\u308b\u5236\u5fa1\u3055\u308c\u305f\u6a5f\u68b0\u7684\u5264\u3068\u3057\u3066\u6a5f\u80fd\u3057\u307e\u3059\u3002.<\/p>\n<h3>\u4e00\u822c\u7684\u306a\u7814\u78e8\u6750<\/h3>\n<ul>\n<li>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab(SiO\u2082)<\/li>\n<li>\u30d2\u30e5\u30fc\u30e0\u30c9\u30b7\u30ea\u30ab<\/li>\n<li>\u30a2\u30eb\u30df\u30ca\uff08Al\u2082O\u2083\uff09<\/li>\n<li>\u30bb\u30ea\u30a2<\/li>\n<\/ul>\n<p>\u5404\u7814\u78e8\u5264\u306f\u3001\u305d\u308c\u305e\u308c\u7570\u306a\u308b\u786c\u5ea6\u3001\u8868\u9762\u5316\u5b66\u3001\u30a6\u30a7\u30fc\u30cf\u6750\u6599\u3068\u306e\u76f8\u4e92\u4f5c\u7528\u6319\u52d5\u3092\u793a\u3059\u3002\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u304a\u3088\u3073\u30e1\u30e2\u30ea\u30fc\u30ce\u30fc\u30c9\u3067\u306f\u3001\u30b9\u30af\u30e9\u30c3\u30c1\u50be\u5411\u304c\u4f4e\u304f\u3001\u7c92\u5ea6\u5206\u5e03\u304c\u3088\u304f\u5236\u5fa1\u3055\u308c\u3066\u3044\u308b\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u304c\u4f9d\u7136\u3068\u3057\u3066\u4e3b\u6d41\u3067\u3059\u3002.<\/p>\n<h3>\u7c92\u5ea6\u5206\u5e03\u3068\u6b20\u9665\u30ea\u30b9\u30af<\/h3>\n<p>\u5e73\u5747\u7c92\u5b50\u5f84\u306f\u4e00\u822c\u7684\u306b\u5831\u544a\u3055\u308c\u3066\u3044\u307e\u3059\u304c\u3001\u6b20\u9665\u5de5\u5b66\u306e\u89b3\u70b9\u304b\u3089\u306f\u7c92\u5b50\u5f84\u5206\u5e03\uff08PSD\uff09\u306e\u65b9\u304c\u306f\u308b\u304b\u306b\u91cd\u8981\u3067\u3059\u3002CMP\u30b9\u30e9\u30ea\u30fc\u306f\u901a\u5e38\u300120nm\uff5e100nm\u306e\u4e00\u6b21\u7c92\u5b50\u5f84\u3092\u63a1\u7528\u3057\u3066\u3044\u307e\u3059\u304c\u3001\u30b9\u30af\u30e9\u30c3\u30c1\u30fb\u30ea\u30b9\u30af\u3092\u6c7a\u5b9a\u3059\u308b\u306e\u306f\u5206\u5e03\u306e\u30c6\u30fc\u30eb\u90e8\u5206\u3067\u3059\u3002.<\/p>\n<p>\u305f\u3068\u30480.01%\u4ee5\u4e0b\u306e\u6fc3\u5ea6\u3067\u3042\u3063\u3066\u3082\u3001\u904e\u5927\u306a\u30b5\u30a4\u30ba\u306e\u7c92\u5b50\u3084\u51dd\u96c6\u4f53\u306f\u3001\u6b69\u7559\u307e\u308a\u306b\u76f4\u63a5\u5f71\u97ff\u3059\u308b\u5fae\u7d30\u306a\u50b7\u3084\u6df1\u3044\u6b20\u9665\u3092\u767a\u751f\u3055\u305b\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u3001\u6700\u65b0\u306eCMP\u30b9\u30e9\u30ea\u30fc\u306e\u4ed5\u69d8\u3067\u306f\u3001D50\u3068D99\u306e\u4e21\u65b9\u306e\u5024\u3092\u53b3\u3057\u304f\u7ba1\u7406\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<h3>\u30bc\u30fc\u30bf\u96fb\u4f4d\u3068\u9759\u96fb\u5b89\u5b9a\u6027<\/h3>\n<p>\u7814\u78e8\u7c92\u5b50\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u4e2d\u3067\u306e\u5206\u6563\u5b89\u5b9a\u6027\u3092\u6c7a\u5b9a\u3059\u308b\u8868\u9762\u96fb\u8377\u3092\u6301\u3063\u3066\u3044\u307e\u3059\u3002\u30bc\u30fc\u30bf\u96fb\u4f4d\u306f\u3001\u3053\u306e\u8868\u9762\u96fb\u8377\u306e\u5b9a\u91cf\u7684\u306a\u5c3a\u5ea6\u3067\u3042\u308a\u3001\u5341\u5206\u306a\u9759\u96fb\u53cd\u767a\u3092\u78ba\u4fdd\u3059\u308b\u305f\u3081\u306b\u3001\u901a\u5e38\u00b130mV\u4ee5\u4e0a\u306b\u7dad\u6301\u3055\u308c\u308b\u3002.<\/p>\n<p>\u30bc\u30fc\u30bf\u96fb\u4f4d\u304c\u3053\u306e\u95be\u5024\u3092\u4e0b\u56de\u308b\u3068\u3001\u7279\u306bCMP\u88c5\u7f6e\u306e\u9ad8\u305b\u3093\u65ad\u6761\u4ef6\u4e0b\u3067\u306f\u3001\u7c92\u5b50\u306e\u51dd\u96c6\u304c\u307e\u3059\u307e\u3059\u8d77\u3053\u308a\u3084\u3059\u304f\u306a\u308b\u3002.<\/p>\n<figure><figcaption><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1040\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Relationship-between-zeta-potential-and-abrasive-particle-dispersion-stability.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Relationship-between-zeta-potential-and-abrasive-particle-dispersion-stability.png\" alt=\"Relationship between zeta potential and abrasive particle dispersion stability\" width=\"1200\" height=\"1008\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271200%27%20height%3D%271008%27%20viewBox%3D%270%200%201200%201008%27%3E%3Crect%20width%3D%271200%27%20height%3D%271008%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Relationship-between-zeta-potential-and-abrasive-particle-dispersion-stability-200x168.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Relationship-between-zeta-potential-and-abrasive-particle-dispersion-stability-300x252.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Relationship-between-zeta-potential-and-abrasive-particle-dispersion-stability-400x336.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Relationship-between-zeta-potential-and-abrasive-particle-dispersion-stability-600x504.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Relationship-between-zeta-potential-and-abrasive-particle-dispersion-stability-768x645.png 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Relationship-between-zeta-potential-and-abrasive-particle-dispersion-stability-800x672.png 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Relationship-between-zeta-potential-and-abrasive-particle-dispersion-stability-1024x860.png 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Relationship-between-zeta-potential-and-abrasive-particle-dispersion-stability.png 1200w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1200px) 100vw, 1200px\" \/><\/figcaption><\/figure>\n<p><!-- ================= Section 4 ================= --><\/p>\n<h2 id=\"chemical-additives\">\u5316\u5b66\u6dfb\u52a0\u5264\u3068\u9178\u5316\u5264<\/h2>\n<p>\u5316\u5b66\u6dfb\u52a0\u5264\u306f\u3001CMP\u30b9\u30e9\u30ea\u30fc\u306e\u53cd\u5fdc\u6210\u5206\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002\u5316\u5b66\u6dfb\u52a0\u5264\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u6750\u6599\u306e\u6a5f\u68b0\u7684\u7279\u6027\u3092\u5909\u66f4\u3059\u308b\u8868\u9762\u53cd\u5fdc\u3092\u958b\u59cb\u3057\u3001\u6bd4\u8f03\u7684\u4f4e\u3044\u5727\u529b\u3067\u5236\u5fa1\u3055\u308c\u305f\u9664\u53bb\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002.<\/p>\n<h3>\u9178\u5316\u5264<\/h3>\n<p>\u9178\u5316\u5264\u306f\u3001\u91d1\u5c5eCMP\u30d7\u30ed\u30bb\u30b9\u306b\u4e0d\u53ef\u6b20\u3067\u3042\u308a\u3001\u5316\u5b66\u7684\u306b\u5909\u5316\u3057\u305f\u8584\u3044\u8868\u9762\u5c64\u3092\u5f62\u6210\u3059\u308b\u5f79\u5272\u3092\u679c\u305f\u3059\u3002\u4e00\u822c\u7684\u306a\u9178\u5316\u5264\u306b\u306f\u4ee5\u4e0b\u304c\u542b\u307e\u308c\u308b\uff1a<\/p>\n<ul>\n<li>\u904e\u9178\u5316\u6c34\u7d20(H\u2082O\u2082)<\/li>\n<li>\u785d\u9178\u7b2c\u4e8c\u9244<\/li>\n<li>\u30e8\u30a6\u7d20\u9178\u30ab\u30ea\u30a6\u30e0<\/li>\n<li>\u904e\u786b\u9178\u5869<\/li>\n<\/ul>\n<p>\u9178\u5316\u5264\u6fc3\u5ea6\u306f\u3001\u9178\u5316\u901f\u5ea6\u3001\u9178\u5316\u819c\u539a\u3001\u9664\u53bb\u901f\u5ea6\u306b\u76f4\u63a5\u5f71\u97ff\u3059\u308b\u3002\u3057\u304b\u3057\u3001\u904e\u5270\u306a\u9178\u5316\u5264\u6fc3\u5ea6\u306f\u3001\u3057\u3070\u3057\u3070\u8150\u98df\u3001\u5b54\u98df\u3001\u6b20\u9665\u306e\u5897\u52a0\u306b\u3064\u306a\u304c\u308b\u3002.<\/p>\n<div class=\"fusion-video fusion-youtube\" style=\"--awb-max-width:600px;--awb-max-height:350px;\"><div class=\"video-shortcode\"><div class=\"fluid-width-video-wrapper\" style=\"padding-top:58.33%;\" ><iframe class=\"lazyload\" title=\"YouTube\u30d3\u30c7\u30aa\u30d7\u30ec\u30fc\u30e4\u30fc1\" src=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27350%27%20viewBox%3D%270%200%20600%20350%27%3E%3Crect%20width%3D%27600%27%20height%3D%27350%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-orig-src=\"https:\/\/www.youtube.com\/embed\/2z4lq-Ms_OU?wmode=transparent&autoplay=0\" width=\"600\" height=\"350\" allowfullscreen allow=\"autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture;\"><\/iframe><\/div><\/div><\/div>\n<p><!-- ================= Section 5 ================= --><\/p>\n<h2 id=\"complexing-inhibitors\">\u932f\u5316\u5264\u3068\u8150\u98df\u6291\u5236\u5264<\/h2>\n<p>\u932f\u5316\u5264\u306f\u6eb6\u89e3\u3057\u305f\u91d1\u5c5e\u30a4\u30aa\u30f3\u3068\u7d50\u5408\u3057\u3001\u518d\u6790\u51fa\u3092\u9632\u304e\u3001\u30a6\u30a7\u30cf\u30fc\u8868\u9762\u4ed8\u8fd1\u306e\u5316\u5b66\u74b0\u5883\u3092\u5b89\u5b9a\u3055\u305b\u308b\u3002\u4e00\u822c\u7684\u306a\u932f\u5316\u5264\u306b\u306f\u3001\u30b0\u30ea\u30b7\u30f3\u3001\u30af\u30a8\u30f3\u9178\u3001\u30b7\u30e5\u30a6\u9178\u306a\u3069\u304c\u3042\u308b\u3002.<\/p>\n<p>\u30d9\u30f3\u30be\u30c8\u30ea\u30a2\u30be\u30fc\u30eb(BTA)\u306e\u3088\u3046\u306a\u8150\u98df\u6291\u5236\u5264\u306f\u3001\u904e\u5270\u306a\u91d1\u5c5e\u6eb6\u89e3\u3084\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u8150\u98df\u3092\u6291\u5236\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u308b\u3002\u9285\u306eCMP\u3067\u306f\u3001\u30a4\u30f3\u30d2\u30d3\u30bf\u30fc\u306e\u5438\u7740\u901f\u5ea6\u8ad6\u304c\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3068\u30a8\u30ed\u30fc\u30b8\u30e7\u30f3\u3092\u5236\u5fa1\u3059\u308b\u4e0a\u3067\u4e2d\u5fc3\u7684\u306a\u5f79\u5272\u3092\u679c\u305f\u3059\u3002.<\/p>\n<p><!-- ================= Section 6 ================= --><\/p>\n<h2 id=\"ph-control\">pH\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3068\u5316\u5b66\u7684\u5b89\u5b9a\u6027<\/h2>\n<p>pH is one of the most sensitive parameters in CMP slurry composition. It influences chemical reaction rates, abrasive surface charge, inhibitor adsorption, and slurry stability.<\/p>\n<p>Oxide CMP typically operates under alkaline conditions (pH 9\u201311), while metal CMP processes often require acidic to near-neutral environments.<\/p>\n<p><!-- ================= Section 7 ================= --><\/p>\n<h2 id=\"stability-dispersion\">\u30b9\u30e9\u30ea\u30fc\u306e\u5b89\u5b9a\u6027\u3001\u5206\u6563\u6027\u3001\u4fdd\u5b58\u6027<\/h2>\n<p>Slurry stability affects both shelf life and process repeatability. Stabilizers and dispersants are used to prevent particle aggregation and sedimentation over time.<\/p>\n<p>Temperature excursions, shear stress, and contamination can destabilize even well-formulated slurries, leading to removal rate drift and defect excursions.<\/p>\n<p><!-- ================= Section 8 ================= --><\/p>\n<h2 id=\"engineering-parameters\">\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc\u8868<\/h2>\n<h3>Abrasive Physical Properties<\/h3>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n<th>\u30b3\u30ed\u30a4\u30c0\u30eb\u30fb\u30b7\u30ea\u30ab<\/th>\n<th>\u30a2\u30eb\u30df\u30ca<\/th>\n<th>Ceria<\/th>\n<th>\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306e\u5f71\u97ff<\/th>\n<\/tr>\n<tr>\n<td>Particle Size (nm)<\/td>\n<td>20\u201380<\/td>\n<td>50-150<\/td>\n<td>30\u2013120<\/td>\n<td>Scratch probability<\/td>\n<\/tr>\n<tr>\n<td>\u30bc\u30fc\u30bf\u96fb\u4f4d (mV)<\/td>\n<td>-35 to -60<\/td>\n<td>+25 to +45<\/td>\n<td>-20 to -40<\/td>\n<td>Dispersion stability<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 9 ================= --><\/p>\n<h2 id=\"experimental-data\">\u5b9f\u9a13\u30c7\u30fc\u30bf\u3068\u6027\u80fd\u7bc4\u56f2<\/h2>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30e1\u30fc\u30c8\u30eb<\/th>\n<th>\u5178\u578b\u7684\u306a\u7bc4\u56f2<\/th>\n<th>\u5099\u8003<\/th>\n<\/tr>\n<tr>\n<td>MRR<\/td>\n<td>150\u2013350 nm\/min<\/td>\n<td>Tool and pad dependent<\/td>\n<\/tr>\n<tr>\n<td>WIWNU<\/td>\n<td>&lt;5%<\/td>\n<td>Strong slurry influence<\/td>\n<\/tr>\n<tr>\n<td>\u30b9\u30af\u30e9\u30c3\u30c1\u5bc6\u5ea6<\/td>\n<td>&lt;0.1 \/ wafer<\/td>\n<td>Driven by PSD tail<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 10 ================= --><\/p>\n<h2 id=\"process-window\">CMP\u30b9\u30e9\u30ea\u30fc\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u30a6\u30a3\u30f3\u30c9\u30a6\u5206\u6790<\/h2>\n<figure><figcaption><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1044\" src=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%272042%27%20height%3D%27688%27%20viewBox%3D%270%200%202042%20688%27%3E%3Crect%20width%3D%272042%27%20height%3D%27688%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Example-CMP-slurry-process-window-showing-optimal-balance-between-removal-rate-and-defect-density.gif\" alt=\"Example CMP slurry process window showing optimal balance between removal rate and defect density.\" width=\"2042\" height=\"688\" \/><\/figcaption><\/figure>\n<p>pH values below 3 often result in excessive corrosion, while pH values above 7 may suppress oxidation and destabilize removal rates.<\/p>\n<p><!-- ================= Section 11 ================= --><\/p>\n<h2 id=\"failure-modes\">\u7d44\u6210\u306b\u95a2\u9023\u3057\u305f\u6545\u969c\u30e2\u30fc\u30c9<\/h2>\n<h3>Scratch Excursions<\/h3>\n<p>Typically caused by oversized particles or slurry instability under high shear conditions.<\/p>\n<h3>Corrosion and Pitting<\/h3>\n<p>Associated with excessive oxidizer concentration or insufficient inhibitor coverage.<\/p>\n<h3>Removal Rate Drift<\/h3>\n<p>Often linked to slurry aging, oxidizer depletion, or pH drift.<\/p>\n<p><!-- ================= Section 12 ================= --><\/p>\n<h2 id=\"ecosystem\">CMP\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u5185\u306eCMP\u30b9\u30e9\u30ea\u30fc\u306e\u7d44\u6210<\/h2>\n<p>CMP slurry composition must be evaluated as part of the broader CMP ecosystem, including polishing pads, filtration systems, and tool architecture.<\/p>\n<p>For slurry filtration considerations, see:<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-filtration\/\">CMP\u30b9\u30e9\u30ea\u30fc\u308d\u904e<\/a>.<\/p>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; Table of Contents Introduction Fundamental Architecture of CMP Slurry Abrasive Particles in CMP Slurry Chemical Additives and Oxidizers Complexing Agents and Corrosion Inhibitors pH Control and Chemical Stability Slurry  &#8230;<\/p>","protected":false},"author":1,"featured_media":1075,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1035","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1035","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1035"}],"version-history":[{"count":7,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1035\/revisions"}],"predecessor-version":[{"id":1099,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1035\/revisions\/1099"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1075"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1035"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1035"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1035"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}