{"id":1046,"date":"2026-01-05T15:49:13","date_gmt":"2026-01-05T07:49:13","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1046"},"modified":"2026-01-05T16:09:04","modified_gmt":"2026-01-05T08:09:04","slug":"cmp-slurry-types-explained","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-types-explained\/","title":{"rendered":"CMP\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e"},"content":{"rendered":"<p>&nbsp;<\/p>\n<p><!-- ================= TOC ================= --><\/p>\n<nav>\n<h2>\u76ee\u6b21<\/h2>\n<ul>\n<li><a href=\"#introduction\">\u306f\u3058\u3081\u306bCMP\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u304c\u91cd\u8981\u306a\u7406\u7531<\/a><\/li>\n<li><a href=\"#classification-logic\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u5206\u985e\u30ed\u30b8\u30c3\u30af<\/a><\/li>\n<li><a href=\"#oxide-slurry\">\u9178\u5316\u7269CMP\u30b9\u30e9\u30ea\u30fc<\/a><\/li>\n<li><a href=\"#copper-slurry\">\u9285CMP\u30b9\u30e9\u30ea\u30fc<\/a><\/li>\n<li><a href=\"#tungsten-slurry\">\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc<\/a><\/li>\n<li><a href=\"#barrier-slurry\">\u30d0\u30ea\u30a2\uff06\u30cf\u30fc\u30c9\u30de\u30b9\u30af CMP\u30b9\u30e9\u30ea\u30fc<\/a><\/li>\n<li><a href=\"#dielectric-lowk\">\u4f4e\u8a98\u96fb\u7387\u30b9\u30e9\u30ea\u30fc<\/a><\/li>\n<li><a href=\"#node-driven\">\u30ce\u30fc\u30c9\u30fb\u30c9\u30ea\u30d6\u30f3\u30fb\u30b9\u30e9\u30ea\u30fc\u30fb\u30bf\u30a4\u30d7<\/a><\/li>\n<li><a href=\"#process-window\">\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7\u3068\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6<\/a><\/li>\n<li><a href=\"#selection-matrix\">\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u6c7a\u5b9a\u30de\u30c8\u30ea\u30c3\u30af\u30b9<\/a><\/li>\n<li><a href=\"#failure-modes\">\u30bf\u30a4\u30d7\u5225\u306e\u6545\u969c\u30e2\u30fc\u30c9<\/a><\/li>\n<\/ul>\n<\/nav>\n<hr \/>\n<p><!-- ================= Section 1 ================= --><\/p>\n<h2 id=\"introduction\">\u306f\u3058\u3081\u306bCMP\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u304c\u91cd\u8981\u306a\u7406\u7531<\/h2>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u306f\u3001\u5e02\u8ca9\u306e\u6587\u732e\u3067\u306f\u3057\u3070\u3057\u3070\u5358\u7d14\u5316\u3055\u308c\u3059\u304e\u3066\u304a\u308a\u3001\u201c\u9178\u5316\u7269\u30b9\u30e9\u30ea\u30fc \u201d\u3084 \u201c\u9285\u30b9\u30e9\u30ea\u30fc \u201d\u3068\u3044\u3063\u305f\u30e9\u30d9\u30eb\u306b\u7f6e\u304d\u63db\u3048\u3089\u308c\u3066\u3044\u308b\u3002\u3057\u304b\u3057\u3001\u5b9f\u969b\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u74b0\u5883\u3067\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7\u306e\u9078\u629e\u306f\u3001\u9664\u53bb\u30e1\u30ab\u30cb\u30ba\u30e0\u3001\u6b20\u9665\u30e2\u30fc\u30c9\u3001\u7d71\u5408\u30ea\u30b9\u30af\u3001\u3072\u3044\u3066\u306f\u6b69\u7559\u307e\u308a\u3092\u76f4\u63a5\u7684\u306b\u898f\u5b9a\u3057\u307e\u3059\u3002.<\/p>\n<p>\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u30ce\u30fc\u30c9\u306e\u5fae\u7d30\u5316\u3068\u30c7\u30d0\u30a4\u30b9\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u30fc\u306e\u7570\u7a2e\u5316\u304c\u9032\u3080\u306b\u3064\u308c\u3001\u5358\u4e00\u306e\u300c\u6c4e\u7528\u300d\u30b9\u30e9\u30ea\u30fc\u3067\u306f\u3001\u3082\u306f\u3084\u8907\u6570\u306e\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u3092\u6e80\u305f\u3059\u3053\u3068\u306f\u3067\u304d\u307e\u305b\u3093\u3002\u73fe\u4ee3\u306eCMP\u306f\u3001\u305d\u308c\u305e\u308c\u304c\u72ed\u3044\u52d5\u4f5c\u7bc4\u56f2\u306b\u6700\u9069\u5316\u3055\u308c\u305f\u3001\u9ad8\u5ea6\u306b\u7279\u6b8a\u5316\u3055\u308c\u305f\u30b9\u30e9\u30ea\u30fc\u306b\u4f9d\u5b58\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<p>\u672c\u66f8\u306f\u3001\u6750\u6599\u79d1\u5b66\u3001\u8868\u9762\u5316\u5b66\u3001\u5927\u91cf\u751f\u7523\uff08HVM\uff09\u306e\u7d4c\u9a13\u306b\u57fa\u3065\u304d\u3001CMP\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u3092\u30db\u30ef\u30a4\u30c8\u30da\u30fc\u30d1\u30fc\u30ec\u30d9\u30eb\u3067\u5206\u985e\u3057\u305f\u3082\u306e\u3067\u3042\u308b\u3002.<\/p>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u57fa\u790e\u306b\u95a2\u3059\u308b\u5168\u4f53\u7684\u306a\u6982\u8981\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u3092\u53c2\u7167\u306e\u3053\u3068\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-for-semiconductor-wafer-polishing\/\">\u534a\u5c0e\u4f53\u88fd\u9020\u7528CMP\u30b9\u30e9\u30ea\u30fc<\/a><\/p>\n<p><!-- ================= Section 2 ================= --><\/p>\n<h2 id=\"classification-logic\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u5206\u985e\u30ed\u30b8\u30c3\u30af<\/h2>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u306f\u3001\u8907\u6570\u306e\u76f4\u4ea4\u3059\u308b\u6b21\u5143\u3092\u7528\u3044\u3066\u5206\u985e\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u5358\u4e00\u306e\u5206\u985e\u8ef8\u306b\u983c\u308b\u3068\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u3092\u8aa4\u308b\u3053\u3068\u304c\u3088\u304f\u3042\u308a\u307e\u3059\u3002.<\/p>\n<h3>\u4e00\u6b21\u5206\u985e\u5bf8\u6cd5<\/h3>\n<ul>\n<li><strong>\u5bfe\u8c61\u7d20\u6750<\/strong> (\u9178\u5316\u7269\u3001\u91d1\u5c5e\u3001\u30d0\u30ea\u30a2\u3001\u8a98\u96fb\u4f53\uff09<\/li>\n<li><strong>\u5316\u5b66\u7684\u30e1\u30ab\u30cb\u30ba\u30e0<\/strong> (\u9178\u5316\u99c6\u52d5\u578b\u3001\u6eb6\u89e3\u99c6\u52d5\u578b\uff09<\/li>\n<li><strong>\u7814\u78e8\u30b7\u30b9\u30c6\u30e0<\/strong> (\u30b7\u30ea\u30ab\u3001\u30a2\u30eb\u30df\u30ca\u3001\u30bb\u30ea\u30a2\u3001\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\uff09<\/li>\n<li><strong>\u6280\u8853\u30ce\u30fc\u30c9<\/strong> (\u30ec\u30ac\u30b7\u30fc\u30ce\u30fc\u30c9\u3068\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30ce\u30fc\u30c9\uff09<\/li>\n<li><strong>\u7d71\u5408\u611f\u5ea6<\/strong> (low-k\u76f8\u6eb6\u6027\u3001\u8150\u98df\u30ea\u30b9\u30af)<\/li>\n<\/ul>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1047\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework.jpg\" alt=\"CMP slurry classification framework\" width=\"886\" height=\"418\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27886%27%20height%3D%27418%27%20viewBox%3D%270%200%20886%20418%27%3E%3Crect%20width%3D%27886%27%20height%3D%27418%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework-200x94.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework-300x142.jpg 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework-400x189.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework-600x283.jpg 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework-768x362.jpg 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework-800x377.jpg 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework.jpg 886w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 886px) 100vw, 886px\" \/><figcaption>\u5148\u7aef\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u4f7f\u7528\u3055\u308c\u308bCMP\u30b9\u30e9\u30ea\u30fc\u306e\u591a\u6b21\u5143\u5206\u985e\u30d5\u30ec\u30fc\u30e0\u30ef\u30fc\u30af\u3002.<\/figcaption><\/figure>\n<p><!-- ================= Section 3 ================= --><\/p>\n<h2 id=\"oxide-slurry\">\u9178\u5316\u7269CMP\u30b9\u30e9\u30ea\u30fc<\/h2>\n<h3>\u9069\u7528\u7bc4\u56f2<\/h3>\n<p>\u9178\u5316\u7269CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u4e3b\u306b\u5c64\u9593\u7d76\u7e01\u819c\uff08ILD\uff09\u306e\u5e73\u5766\u5316\u3001\u30b7\u30e3\u30ed\u30fc\u30c8\u30ec\u30f3\u30c1\u30fb\u30a2\u30a4\u30bd\u30ec\u30fc\u30b7\u30e7\u30f3\uff08STI\uff09\u3001\u30d7\u30ec\u30e1\u30bf\u30eb\u8a98\u96fb\u4f53\u30b9\u30c6\u30c3\u30d7\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002.<\/p>\n<h3>\u5178\u578b\u7684\u306a\u30b3\u30f3\u30dd\u30b8\u30b7\u30e7\u30f3\u30fb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3<\/h3>\n<ul>\n<li>\u7814\u78e8\u5264\uff1a\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab<\/li>\n<li>pH\u30a2\u30eb\u30ab\u30ea\u6027\uff089.5\uff5e11.5\uff09<\/li>\n<li>\u6dfb\u52a0\u5264\uff1a\u7de9\u885d\u5264\u3001\u5206\u6563\u5264\u3001\u5fae\u91cf\u6dfb\u52a0\u5264<\/li>\n<\/ul>\n<h3>\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc\u8868<\/h3>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n<th>\u5178\u578b\u7684\u306a\u7bc4\u56f2<\/th>\n<th>\u30a4\u30f3\u30d1\u30af\u30c8<\/th>\n<\/tr>\n<tr>\n<td>\u7c92\u5b50\u5f84\uff08D50\uff09<\/td>\n<td>30\uff5e70 nm<\/td>\n<td>\u30b9\u30af\u30e9\u30c3\u30c1\u3068MRR\u306e\u30d0\u30e9\u30f3\u30b9<\/td>\n<\/tr>\n<tr>\n<td>MRR<\/td>\n<td>200-500 nm\/\u5206<\/td>\n<td>\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8<\/td>\n<\/tr>\n<tr>\n<td>WIWNU<\/td>\n<td>&lt;4%<\/td>\n<td>\u5e73\u9762\u6027\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u306e\u30a4\u30e9\u30b9\u30c8<\/h3>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1048\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window.jpg\" alt=\"Oxide CMP slurry process window\" width=\"850\" height=\"563\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27850%27%20height%3D%27563%27%20viewBox%3D%270%200%20850%20563%27%3E%3Crect%20width%3D%27850%27%20height%3D%27563%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window-200x132.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window-300x199.jpg 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window-400x265.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window-600x397.jpg 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window-768x509.jpg 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window-800x530.jpg 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window.jpg 850w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 850px) 100vw, 850px\" \/><figcaption>pH\u306e\u95a2\u6570\u3068\u3057\u3066MRR\u5bfe\u6b20\u9665\u5bc6\u5ea6\u3092\u793a\u3059\u9178\u5316\u7269CMP\u30b9\u30e9\u30ea\u30fc\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u306e\u4f8b\u3002.<\/figcaption><\/figure>\n<p><!-- ================= Section 4 ================= --><\/p>\n<h2 id=\"copper-slurry\">\u9285CMP\u30b9\u30e9\u30ea\u30fc<\/h2>\n<p>\u9285CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u9285\u306e\u5316\u5b66\u53cd\u5fdc\u6027\u304c\u9ad8\u304f\u8150\u98df\u3057\u3084\u3059\u3044\u305f\u3081\u3001\u6700\u3082\u5316\u5b66\u7684\u306b\u8907\u96d1\u306a\u30bf\u30a4\u30d7\u306e\u30b9\u30e9\u30ea\u30fc\u306e\u3072\u3068\u3064\u3067\u3042\u308b\u3002.<\/p>\n<h3>\u4e8c\u6bb5\u968e\u9285CMP\u30b9\u30e9\u30ea\u30fc\u30b7\u30b9\u30c6\u30e0<\/h3>\n<ul>\n<li><strong>\u30d0\u30eb\u30afCu\u30b9\u30e9\u30ea\u30fc\uff1a<\/strong> \u9ad8MRR\u3001\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3055\u308c\u305f\u9178\u5316<\/li>\n<li><strong>Cu\u30d0\u30ea\u30a2\uff0f\u30d0\u30d5\u30b9\u30e9\u30ea\u30fc\uff1a<\/strong> \u4f4eMRR\u3001\u9ad8\u9078\u629e\u6027<\/li>\n<\/ul>\n<h3>\u4e3b\u8981\u5316\u5b66\u6210\u5206<\/h3>\n<ul>\n<li>\u9178\u5316\u5264\uff1aH<sub>2<\/sub>O<sub>2<\/sub> (1-5 wt%)<\/li>\n<li>\u932f\u5316\u5264\uff1a\u30b0\u30ea\u30b7\u30f3\u3001\u30af\u30a8\u30f3\u9178<\/li>\n<li>\u963b\u5bb3\u5264\uff1a\u30d9\u30f3\u30be\u30c8\u30ea\u30a2\u30be\u30fc\u30eb\uff08BTA\uff09<\/li>\n<\/ul>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30e1\u30fc\u30c8\u30eb<\/th>\n<th>\u30d0\u30eb\u30af\u9285<\/th>\n<th>\u9285\u30d0\u30d5<\/th>\n<\/tr>\n<tr>\n<td>MRR<\/td>\n<td>300-800 nm\/\u5206<\/td>\n<td>50-150 nm\/\u5206<\/td>\n<\/tr>\n<tr>\n<td>\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0<\/td>\n<td>&lt;40 nm<\/td>\n<td>&lt;15 nm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>&nbsp;<\/p>\n<p><!-- ================= Section 5 ================= --><\/p>\n<h2 id=\"tungsten-slurry\">\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc<\/h2>\n<p>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u7d14\u7c8b\u306a\u6a5f\u68b0\u7684\u6469\u8017\u3067\u306f\u306a\u304f\u3001\u5316\u5b66\u7684\u6eb6\u89e3\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u5927\u304d\u304f\u4f9d\u5b58\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<ul>\n<li>pH\uff1a\u9178\u6027\uff082\uff5e4\uff09<\/li>\n<li>\u9178\u5316\u5264\uff1a\u785d\u9178\u7b2c\u4e8c\u9244<\/li>\n<li>\u7814\u78e8\u5264\uff1a\u30d5\u30a1\u30a4\u30f3\u30b7\u30ea\u30ab\u307e\u305f\u306f\u30a2\u30eb\u30df\u30ca<\/li>\n<\/ul>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n<th>\u30ec\u30f3\u30b8<\/th>\n<\/tr>\n<tr>\n<td>MRR<\/td>\n<td>150-400 nm\/\u5206<\/td>\n<\/tr>\n<tr>\n<td>\u9178\u5316\u7269\u9078\u629e\u6027<\/td>\n<td>&gt;30:1<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 6 ================= --><\/p>\n<h2 id=\"barrier-slurry\">\u30d0\u30ea\u30a2\uff06\u30cf\u30fc\u30c9\u30de\u30b9\u30af CMP\u30b9\u30e9\u30ea\u30fc<\/h2>\n<p>\u30d0\u30ea\u30a2CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001Ta\u3001TaN\u3001TiN\u3001\u5148\u7aef\u30cf\u30fc\u30c9\u30de\u30b9\u30af\u306a\u3069\u306e\u6750\u6599\u3092\u5bfe\u8c61\u3068\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<p>\u3053\u308c\u3089\u306e\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u7d76\u5bfe\u7684\u306a\u9664\u53bb\u7387\u3088\u308a\u3082\u9078\u629e\u6027\u3092\u512a\u5148\u3059\u308b\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u7d20\u6750<\/th>\n<th>\u512a\u5148\u7814\u78e8\u5264<\/th>\n<th>\u30ea\u30b9\u30af<\/th>\n<\/tr>\n<tr>\n<td>Ta\/TaN<\/td>\n<td>\u30a2\u30eb\u30df\u30ca<\/td>\n<td>\u30de\u30a4\u30af\u30ed\u30b9\u30af\u30e9\u30c3\u30c1<\/td>\n<\/tr>\n<tr>\n<td>\u30c1\u30bf\u30f3<\/td>\n<td>\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9<\/td>\n<td>\u6d78\u98df<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 7 ================= --><\/p>\n<h2 id=\"dielectric-lowk\">\u4f4e\u8a98\u96fb\u7387\u30b9\u30e9\u30ea\u30fc<\/h2>\n<p>\u4f4e\u8a98\u96fb\u7387CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u591a\u5b54\u6027\u8a98\u96fb\u4f53\u306e\u6a5f\u68b0\u7684\u8106\u5f31\u6027\u3068\u5316\u5b66\u7684\u611f\u53d7\u6027\u306e\u305f\u3081\u3001\u6700\u3082\u96c6\u7a4d\u5316\u306e\u5f71\u97ff\u3092\u53d7\u3051\u3084\u3059\u3044\u51e6\u65b9\u306e\u4e00\u3064\u3067\u3042\u308b\u3002.<\/p>\n<ul>\n<li>\u8d85\u4f4e\u7814\u78e8\u8ca0\u8377<\/li>\n<li>\u4e2d\u6027pH\u30b7\u30b9\u30c6\u30e0<\/li>\n<li>\u53b3\u5bc6\u306a\u30b9\u30af\u30e9\u30c3\u30c1\u5bc6\u5ea6\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/li>\n<\/ul>\n<p><!-- ================= Section 8 ================= --><\/p>\n<h2 id=\"node-driven\">\u30ce\u30fc\u30c9\u30fb\u30c9\u30ea\u30d6\u30f3\u30fb\u30b9\u30e9\u30ea\u30fc\u30fb\u30bf\u30a4\u30d7<\/h2>\n<p>\u30b9\u30e9\u30ea\u30fc\u306e\u30bf\u30a4\u30d7\u306f\u6280\u8853\u30ce\u30fc\u30c9\u3068\u3068\u3082\u306b\u9032\u5316\u3059\u308b\u3002\u9ad8\u5ea6\u306a\u30ce\u30fc\u30c9\u3067\u306f\u3001\u6b20\u9665\u7387\u3001\u9078\u629e\u6027\u3001\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u306e\u5e45\u3092\u3088\u308a\u53b3\u5bc6\u306b\u5236\u5fa1\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1049\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node.jpg\" alt=\"CMP slurry evolution by technology node\" width=\"1216\" height=\"663\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271216%27%20height%3D%27663%27%20viewBox%3D%270%200%201216%20663%27%3E%3Crect%20width%3D%271216%27%20height%3D%27663%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-200x109.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-300x164.jpg 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-400x218.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-600x327.jpg 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-768x419.jpg 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-800x436.jpg 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-1024x558.jpg 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-1200x654.jpg 1200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node.jpg 1216w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1216px) 100vw, 1216px\" \/><\/figure>\n<p><!-- ================= Section 9 ================= --><\/p>\n<h2 id=\"process-window\">\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7\u3068\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6<\/h2>\n<p>\u5404\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7\u306f\u3001pH\u3001\u9178\u5316\u5264\u6fc3\u5ea6\u3001\u7814\u6383\u6750\u8ca0\u8377\u3001\u30d1\u30c3\u30c9\u306e\u76f8\u4e92\u4f5c\u7528\u306b\u3088\u3063\u3066\u6c7a\u307e\u308b\u72ec\u81ea\u306e\u904b\u8ee2\u30a6\u30a3\u30f3\u30c9\u30a6\u3092\u5b9a\u7fa9\u3057\u307e\u3059\u3002.<\/p>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1050\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window-.webp\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window-.webp\" alt=\"CMP slurry type process window\" width=\"1200\" height=\"624\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271200%27%20height%3D%27624%27%20viewBox%3D%270%200%201200%20624%27%3E%3Crect%20width%3D%271200%27%20height%3D%27624%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--200x104.webp 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--300x156.webp 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--400x208.webp 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--600x312.webp 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--768x399.webp 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--800x416.webp 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--1024x532.webp 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window-.webp 1200w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1200px) 100vw, 1200px\" \/><\/figure>\n<p><!-- ================= Section 10 ================= --><\/p>\n<h2 id=\"selection-matrix\">\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u6c7a\u5b9a\u30de\u30c8\u30ea\u30c3\u30af\u30b9<\/h2>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u7533\u3057\u8fbc\u307f<\/th>\n<th>\u63a8\u5968\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7<\/th>\n<th>\u30ad\u30fc\u30b3\u30f3\u30b9\u30c8\u30ec\u30a4\u30f3\u30c8<\/th>\n<\/tr>\n<tr>\n<td>STI<\/td>\n<td>\u9178\u5316\u7269\u30b9\u30e9\u30ea\u30fc<\/td>\n<td>\u30b9\u30af\u30e9\u30c3\u30c1\u5bc6\u5ea6<\/td>\n<\/tr>\n<tr>\n<td>\u30af\u30fc\u30fb\u30d9\u30aa\u30fc\u30eb<\/td>\n<td>\u9285\u30b9\u30e9\u30ea\u30fc<\/td>\n<td>\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u30fb\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 11 ================= --><\/p>\n<h2 id=\"failure-modes\">\u30bf\u30a4\u30d7\u5225\u306e\u6545\u969c\u30e2\u30fc\u30c9<\/h2>\n<h3>\u9178\u5316\u7269\u30b9\u30e9\u30ea\u30fc<\/h3>\n<p>PSD\u30c6\u30fc\u30eb\u304b\u3089\u306e\u30de\u30a4\u30af\u30ed\u30b9\u30af\u30e9\u30c3\u30c1<\/p>\n<h3>\u9285\u30b9\u30e9\u30ea\u30fc<\/h3>\n<p>\u8150\u98df\u3001\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u5b54\u98df<\/p>\n<h3>\u30d0\u30ea\u30a2\u30b9\u30e9\u30ea\u30fc<\/h3>\n<p>\u9078\u629e\u6027\u306e\u4f4e\u4e0b\u3001\u4fb5\u98df<\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; Table of Contents Introduction: Why CMP Slurry Types Matter CMP Slurry Classification Logic Oxide CMP Slurry Copper CMP Slurry Tungsten CMP Slurry Barrier &amp; Hard Mask CMP Slurry Low-k  &#8230;<\/p>","protected":false},"author":1,"featured_media":1076,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1046","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1046","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1046"}],"version-history":[{"count":4,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1046\/revisions"}],"predecessor-version":[{"id":1105,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1046\/revisions\/1105"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1076"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1046"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1046"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1046"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}