{"id":1052,"date":"2026-01-05T15:55:24","date_gmt":"2026-01-05T07:55:24","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1052"},"modified":"2026-01-05T16:11:37","modified_gmt":"2026-01-05T08:11:37","slug":"copper-cmp-slurry-for-advanced-semiconductor-manufacturing","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/copper-cmp-slurry-for-advanced-semiconductor-manufacturing\/","title":{"rendered":"\u5148\u7aef\u534a\u5c0e\u4f53\u88fd\u9020\u7528\u9285CMP\u30b9\u30e9\u30ea\u30fc"},"content":{"rendered":"<p>&nbsp;<\/p>\n<p><!-- ================= TOC ================= --><\/p>\n<nav>\n<h2>\u76ee\u6b21<\/h2>\n<ul>\n<li><a href=\"#introduction\">1.\u9285CMP\u306e\u7d39\u4ecb<\/a><\/li>\n<li><a href=\"#role\">2.BEOL\u7d71\u5408\u306b\u304a\u3051\u308b\u9285CMP\u30b9\u30e9\u30ea\u30fc\u306e\u5f79\u5272<\/a><\/li>\n<li><a href=\"#mechanism\">3.\u5316\u5b66\u7684\u30fb\u6a5f\u68b0\u7684\u9664\u53bb\u30e1\u30ab\u30cb\u30ba\u30e0<\/a><\/li>\n<li><a href=\"#composition\">4.\u9285 CMP \u30b9\u30e9\u30ea\u30fc\u7d44\u6210<\/a><\/li>\n<li><a href=\"#two-step\">5.\u4e8c\u6bb5\u968e\u9285CMP\u30b9\u30e9\u30ea\u30fc\u30b7\u30b9\u30c6\u30e0<\/a><\/li>\n<li><a href=\"#parameters\">6.\u4e3b\u8981\u5de5\u5b66\u30d1\u30e9\u30e1\u30fc\u30bf\u3068\u30c7\u30fc\u30bf\u7bc4\u56f2<\/a><\/li>\n<li><a href=\"#process-window\">7.\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u3068\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u30de\u30c3\u30d7<\/a><\/li>\n<li><a href=\"#defects\">8.\u6b20\u9665\u30e1\u30ab\u30cb\u30ba\u30e0\u3068\u6839\u672c\u539f\u56e0\u5206\u6790<\/a><\/li>\n<li><a href=\"#hvm\">9.\u5927\u91cf\u751f\u7523\uff08HVM\uff09\u306e\u8ab2\u984c<\/a><\/li>\n<li><a href=\"#selection\">10.\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u3068\u6700\u9069\u5316\u306e\u30ac\u30a4\u30c9\u30e9\u30a4\u30f3<\/a><\/li>\n<li><a href=\"#future\">11.\u9285CMP\u30b9\u30e9\u30ea\u30fc\u306e\u4eca\u5f8c\u306e\u52d5\u5411<\/a><\/li>\n<\/ul>\n<\/nav>\n<hr \/>\n<p><!-- ================= Section 1 ================= --><\/p>\n<h2 id=\"introduction\">1.\u9285CMP\u306e\u7d39\u4ecb<\/h2>\n<p>\u9285\u306f\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306b\u6bd4\u3079\u3066\u62b5\u6297\u7387\u304c\u4f4e\u304f\u3001\u30a8\u30ec\u30af\u30c8\u30ed\u30de\u30a4\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u8010\u6027\u306b\u512a\u308c\u3066\u3044\u308b\u305f\u3081\u3001\u6700\u5148\u7aef\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u4e3b\u8981\u306a\u914d\u7dda\u6750\u6599\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u9285\u306f\u5f93\u6765\u306e\u30d7\u30e9\u30ba\u30de\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0\u3067\u306f\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u3067\u304d\u306a\u3044\u305f\u3081\u3001CMP (Chemical Mechanical Planarization)\u304c\u9285\u30c0\u30de\u30b7\u30f3\u96c6\u7a4d\u306b\u4e0d\u53ef\u6b20\u306a\u30b9\u30c6\u30c3\u30d7\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n<p>\u9285CMP\u30b9\u30e9\u30ea\u30fc\u306f\u5358\u306a\u308b\u6d88\u8017\u54c1\u3067\u306f\u306a\u304f\u3001\u9664\u53bb\u7387\u3001\u9078\u629e\u6027\u3001\u6b20\u9665\u7387\u3001\u9577\u671f\u7684\u306a\u6b69\u7559\u307e\u308a\u5b89\u5b9a\u6027\u3092\u76f4\u63a5\u898f\u5b9a\u3059\u308b\u6d3b\u6027\u5316\u5b66\u30b7\u30b9\u30c6\u30e0\u3067\u3059\u3002.<\/p>\n<p>\u9178\u5316\u7269CMP\u3068\u306f\u7570\u306a\u308a\u3001\u9285CMP\u306f\u5f37\u3044\u96fb\u6c17\u5316\u5b66\u7684\u76f8\u4e92\u4f5c\u7528\u3001\u8150\u98df\u30ea\u30b9\u30af\u3001\u8907\u96d1\u306a\u8868\u9762\u4e0d\u52d5\u614b\u5316\u73fe\u8c61\u3092\u4f34\u3046\u305f\u3081\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u8abf\u5408\u306f\u304b\u306a\u308a\u96e3\u3057\u304f\u306a\u308a\u307e\u3059\u3002.<\/p>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u57fa\u790e\u77e5\u8b58\u306b\u3064\u3044\u3066\u306f\u3001\u3053\u3061\u3089\u3092\u53c2\u7167\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-for-semiconductor-wafer-polishing\/\">\u534a\u5c0e\u4f53\u88fd\u9020\u7528CMP\u30b9\u30e9\u30ea\u30fc<\/a><\/p>\n<p><!-- ================= Section 2 ================= --><\/p>\n<h2 id=\"role\">2.BEOL\u7d71\u5408\u306b\u304a\u3051\u308b\u9285CMP\u30b9\u30e9\u30ea\u30fc\u306e\u5f79\u5272<\/h2>\n<p>\u5178\u578b\u7684\u306a\u9285\u306e\u30c7\u30e5\u30a2\u30eb\u30fb\u30c0\u30de\u30bb\u30f3\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001CMP\u30b9\u30e9\u30ea\u30fc\u306f\u7af6\u5408\u3059\u308b\u8907\u6570\u306e\u8981\u4ef6\u3092\u6e80\u305f\u3055\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\uff1a<\/p>\n<ul>\n<li>\u4f59\u5206\u306a\u9285\u306e\u6b8b\u571f\u3092\u52b9\u7387\u7684\u306b\u9664\u53bb<\/li>\n<li>\u8a98\u96fb\u4f53\u5c64\u3068\u30d0\u30ea\u30a2\u5c64\u306b\u5bfe\u3059\u308b\u9ad8\u3044\u9078\u629e\u6027<\/li>\n<li>\u8150\u98df\u3068\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u30a2\u30bf\u30c3\u30af\u306e\u6291\u5236<\/li>\n<li>\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3068\u6d78\u98df\u306e\u6700\u5c0f\u5316<\/li>\n<\/ul>\n<p>\u9285CMP\u30b9\u30e9\u30ea\u30fc\u306e\u6027\u80fd\u306f\u76f4\u63a5\u5f71\u97ff\u3092\u4e0e\u3048\u308b\uff1a<\/p>\n<ul>\n<li>\u30e9\u30a4\u30f3\u62b5\u6297\u306e\u5909\u52d5<\/li>\n<li>\u76f8\u4e92\u63a5\u7d9a\u306e\u4fe1\u983c\u6027<\/li>\n<li>\u30d3\u30a2\u62b5\u6297\u3068\u30a8\u30ec\u30af\u30c8\u30ed\u30de\u30a4\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u5bff\u547d<\/li>\n<\/ul>\n<p><!-- ================= Section 3 ================= --><\/p>\n<h2 id=\"mechanism\">3.\u5316\u5b66\u7684\u30fb\u6a5f\u68b0\u7684\u9664\u53bb\u30e1\u30ab\u30cb\u30ba\u30e0<\/h2>\n<p>\u9285\u306eCMP\u306f\u3001\u7d14\u7c8b\u306a\u6469\u8017\u3067\u306f\u306a\u304f\u3001\u5316\u5b66\u7684\u30fb\u6a5f\u68b0\u7684\u306a\u76f8\u4e57\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u3088\u3063\u3066\u652f\u914d\u3055\u308c\u308b\u3002.<\/p>\n<h3>3.1 \u5316\u5b66\u7684\u9178\u5316<\/h3>\n<p>\u904e\u9178\u5316\u6c34\u7d20\u306e\u3088\u3046\u306a\u9178\u5316\u5264\u306f\u3001\u91d1\u5c5e\u9285\u3092\u3088\u308a\u67d4\u3089\u304b\u3044\u9178\u5316\u7269\u3084\u6c34\u9178\u5316\u7269\u5c64\u306b\u5909\u3048\u308b\uff1a<\/p>\n<p><em>\u9285 \u2192 \u9285<sup>+<\/sup> \/ Cu<sup>2+<\/sup> \u2192 CuO \/ Cu(OH)<sub>2<\/sub><\/em><\/p>\n<h3>3.2 \u932f\u4f53\u5f62\u6210\u3068\u6eb6\u89e3<\/h3>\n<p>\u932f\u5316\u5264\u306f\u6eb6\u89e3\u3057\u305f\u9285\u30a4\u30aa\u30f3\u3092\u5b89\u5b9a\u3055\u305b\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u3078\u306e\u518d\u6790\u51fa\u3092\u9632\u3050\u3002.<\/p>\n<h3>3.3 \u6a5f\u68b0\u7684\u9664\u53bb<\/h3>\n<p>\u7814\u78e8\u7c92\u5b50\u3068\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u30a2\u30b9\u30da\u30ea\u30c6\u30a3\u304c\u3001\u5316\u5b66\u7684\u306b\u6539\u8cea\u3055\u308c\u305f\u9285\u5c64\u3092\u6a5f\u68b0\u7684\u306b\u9664\u53bb\u3057\u307e\u3059\u3002.<\/p>\n<div class=\"fusion-video fusion-youtube\" style=\"--awb-max-width:600px;--awb-max-height:350px;\"><div class=\"video-shortcode\"><div class=\"fluid-width-video-wrapper\" style=\"padding-top:58.33%;\" ><iframe class=\"lazyload\" title=\"YouTube\u30d3\u30c7\u30aa\u30d7\u30ec\u30fc\u30e4\u30fc1\" src=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27350%27%20viewBox%3D%270%200%20600%20350%27%3E%3Crect%20width%3D%27600%27%20height%3D%27350%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-orig-src=\"https:\/\/www.youtube.com\/embed\/_gyNfwgMz5o?wmode=transparent&autoplay=0\" width=\"600\" height=\"350\" allowfullscreen allow=\"autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture;\"><\/iframe><\/div><\/div><\/div>\n<p><!-- ================= Section 4 ================= --><\/p>\n<h2 id=\"composition\">4.\u9285 CMP \u30b9\u30e9\u30ea\u30fc\u7d44\u6210<\/h2>\n<h3>4.1 \u7814\u78e8\u30b7\u30b9\u30c6\u30e0<\/h3>\n<p>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u306f\u3001\u30b9\u30af\u30e9\u30c3\u30c1\u50be\u5411\u304c\u4f4e\u304f\u3001\u8868\u9762\u5316\u5b66\u306e\u5236\u5fa1\u304c\u53ef\u80fd\u306a\u305f\u3081\u3001\u6700\u3082\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u7814\u78e8\u5264\u3067\u3059\u3002.<\/p>\n<h3>4.2 \u9178\u5316\u5264<\/h3>\n<ul>\n<li>\u904e\u9178\u5316\u6c34\u7d20\uff08H<sub>2<\/sub>O<sub>2<\/sub>)<\/li>\n<li>\u785d\u9178\u7b2c\u4e8c\u9244\uff08\u3042\u307e\u308a\u4e00\u822c\u7684\u3067\u306f\u306a\u3044\uff09<\/li>\n<\/ul>\n<h3>4.3 \u8907\u5408\u5316\u5264<\/h3>\n<ul>\n<li>\u30b0\u30ea\u30b7\u30f3<\/li>\n<li>\u30af\u30a8\u30f3\u9178<\/li>\n<li>\u30a2\u30f3\u30e2\u30cb\u30a6\u30e0\u5869<\/li>\n<\/ul>\n<h3>4.4 \u8150\u98df\u6291\u5236\u5264<\/h3>\n<p>\u30d9\u30f3\u30be\u30c8\u30ea\u30a2\u30be\u30fc\u30eb\uff08BTA\uff09\u306f\u6700\u3082\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u963b\u5bb3\u5264\u3067\u3001Cu-BTA\u8907\u5408\u4fdd\u8b77\u5c64\u3092\u5f62\u6210\u3059\u308b\u3002.<\/p>\n<p><!-- ================= Section 5 ================= --><\/p>\n<h2 id=\"two-step\">5.\u4e8c\u6bb5\u968e\u9285CMP\u30b9\u30e9\u30ea\u30fc\u30b7\u30b9\u30c6\u30e0<\/h2>\n<p>\u73fe\u4ee3\u306e\u9285\u306eCMP\u306f\u3001\u901a\u5e382\u6bb5\u968e\u306e\u30b9\u30e9\u30ea\u30fc\u30a2\u30d7\u30ed\u30fc\u30c1\u3092\u63a1\u7528\u3057\u3066\u3044\u308b\uff1a<\/p>\n<h3>5.1 \u30d0\u30eb\u30af\u9285\u9664\u53bb\u30b9\u30e9\u30ea\u30fc<\/h3>\n<ul>\n<li>\u9ad8\u3044\u9178\u5316\u5264\u6fc3\u5ea6<\/li>\n<li>\u9ad8\u3044MRR<\/li>\n<li>\u4e3b\u306a\u76ee\u6a19\uff1a\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8<\/li>\n<\/ul>\n<h3>5.2 \u9285\u30d0\u30d5\uff0f\u30d0\u30ea\u30a2\u30b9\u30e9\u30ea\u30fc<\/h3>\n<ul>\n<li>\u4f4e\u3044\u9178\u5316\u5264\u6fc3\u5ea6<\/li>\n<li>\u9ad8\u3044\u9078\u629e\u6027<\/li>\n<li>\u7b2c\u4e00\u76ee\u6a19\uff1a\u30b5\u30fc\u30d5\u30a7\u30b9\u30fb\u30af\u30aa\u30ea\u30c6\u30a3<\/li>\n<\/ul>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n<th>\u30d0\u30eb\u30af\u9285\u30b9\u30e9\u30ea\u30fc<\/th>\n<th>\u9285\u30d0\u30d5\u30b9\u30e9\u30ea\u30fc<\/th>\n<\/tr>\n<tr>\n<td>MRR (nm\/min)<\/td>\n<td>300-800<\/td>\n<td>50-150<\/td>\n<\/tr>\n<tr>\n<td>\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\uff08nm\uff09<\/td>\n<td>&lt; 40<\/td>\n<td>&lt; 15<\/td>\n<\/tr>\n<tr>\n<td>\u9178\u5316\u5264\uff08wt%\uff09<\/td>\n<td>1-5<\/td>\n<td>&lt; 1<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 6 ================= --><\/p>\n<h2 id=\"parameters\">6.\u4e3b\u8981\u5de5\u5b66\u30d1\u30e9\u30e1\u30fc\u30bf\u3068\u30c7\u30fc\u30bf\u7bc4\u56f2<\/h2>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30e1\u30fc\u30c8\u30eb<\/th>\n<th>\u5178\u578b\u7684\u306a\u7bc4\u56f2<\/th>\n<th>\u5de5\u5b66\u7684\u610f\u7fa9<\/th>\n<\/tr>\n<tr>\n<td>pH<\/td>\n<td>3.5-6.0<\/td>\n<td>\u8150\u98df\u3068MRR\u306e\u6bd4\u8f03<\/td>\n<\/tr>\n<tr>\n<td>\u30bc\u30fc\u30bf\u96fb\u4f4d (mV)<\/td>\n<td>-30\u304b\u3089-50<\/td>\n<td>\u30b9\u30e9\u30ea\u30fc\u306e\u5b89\u5b9a\u6027<\/td>\n<\/tr>\n<tr>\n<td>\u30b9\u30af\u30e9\u30c3\u30c1\u5bc6\u5ea6<\/td>\n<td>&lt; 0.1 \/ \u30a6\u30a7\u30cf\u30fc<\/td>\n<td>\u53ce\u91cf\u3078\u306e\u5f71\u97ff<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 7 ================= --><\/p>\n<h2 id=\"process-window\">7.\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u3068\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u30de\u30c3\u30d7<\/h2>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1053\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Copper-CMP-slurry-pH-vs-MRR-process-.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Copper-CMP-slurry-pH-vs-MRR-process-.jpg\" alt=\"Copper CMP slurry pH vs MRR process\" width=\"500\" height=\"189\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27500%27%20height%3D%27189%27%20viewBox%3D%270%200%20500%20189%27%3E%3Crect%20width%3D%27500%27%20height%3D%27189%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Copper-CMP-slurry-pH-vs-MRR-process--200x76.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Copper-CMP-slurry-pH-vs-MRR-process--300x113.jpg 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Copper-CMP-slurry-pH-vs-MRR-process--400x151.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Copper-CMP-slurry-pH-vs-MRR-process-.jpg 500w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 500px) 100vw, 500px\" \/><figcaption>\u9664\u53bb\u7387\u3068\u8150\u98df\u30ea\u30b9\u30af\u306e\u30c8\u30ec\u30fc\u30c9\u30aa\u30d5\u3092\u793a\u3059\u9285CMP\u30b9\u30e9\u30ea\u30fc\u30d7\u30ed\u30bb\u30b9\u306e\u30a6\u30a3\u30f3\u30c9\u30a6\u3002.<\/figcaption><\/figure>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1054\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxidizer-concentration-vs-defect-density.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxidizer-concentration-vs-defect-density.png\" alt=\"Oxidizer concentration vs defect density\" width=\"829\" height=\"629\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27829%27%20height%3D%27629%27%20viewBox%3D%270%200%20829%20629%27%3E%3Crect%20width%3D%27829%27%20height%3D%27629%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxidizer-concentration-vs-defect-density-200x152.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxidizer-concentration-vs-defect-density-300x228.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxidizer-concentration-vs-defect-density-400x303.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxidizer-concentration-vs-defect-density-600x455.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxidizer-concentration-vs-defect-density-768x583.png 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxidizer-concentration-vs-defect-density-800x607.png 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxidizer-concentration-vs-defect-density.png 829w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 829px) 100vw, 829px\" \/><figcaption>\u904e\u5ea6\u306e\u9178\u5316\u5264\u6fc3\u5ea6\u3067\u306f\u6b20\u9665\u5bc6\u5ea6\u304c\u5897\u52a0\u3059\u308b\u3002.<\/figcaption><\/figure>\n<p><!-- ================= Section 8 ================= --><\/p>\n<h2 id=\"defects\">8.\u6b20\u9665\u30e1\u30ab\u30cb\u30ba\u30e0\u3068\u6839\u672c\u539f\u56e0\u5206\u6790<\/h2>\n<h3>8.1 \u30c7\u30a3\u30c3\u30b7\u30f3\u30b0<\/h3>\n<p>\u9285\u7dda\u3068\u5468\u56f2\u306e\u8a98\u96fb\u4f53\u3068\u306e\u9593\u306e\u9664\u53bb\u901f\u5ea6\u306e\u5dee\u306b\u3088\u3063\u3066\u767a\u751f\u3059\u308b\u3002.<\/p>\n<h3>8.2 \u8150\u98df\u3068\u5b54\u98df<\/h3>\n<p>\u901a\u5e38\u3001\u6291\u5236\u5264\u306e\u88ab\u8986\u304c\u4e0d\u5341\u5206\u3067\u3042\u3063\u305f\u308a\u3001\u9178\u5316\u5264\u306e\u6fc3\u5ea6\u304c\u9ad8\u3059\u304e\u305f\u308a\u3059\u308b\u3053\u3068\u304c\u539f\u56e0\u3002.<\/p>\n<h3>8.3 \u50b7<\/h3>\n<p>\u7814\u78e8\u5264\u306ePSD\u30c6\u30fc\u30eb\u3068\u30b9\u30e9\u30ea\u30fc\u306e\u51dd\u96c6\u306b\u3088\u3063\u3066\u99c6\u52d5\u3055\u308c\u308b\u3002.<\/p>\n<p><!-- ================= Section 9 ================= --><\/p>\n<h2 id=\"hvm\">9.\u5927\u91cf\u751f\u7523\uff08HVM\uff09\u306e\u8ab2\u984c<\/h2>\n<p>\u9285\u306eCMP\u30b9\u30e9\u30ea\u30fc\u306e\u591a\u304f\u306f\u3001\u7814\u7a76\u958b\u767a\u898f\u6a21\u3067\u306f\u826f\u597d\u306a\u6027\u80fd\u3092\u793a\u3059\u304c\u3001HVM\u6761\u4ef6\u4e0b\u3067\u306f\u305d\u306e\u305f\u3081\u306b\u5931\u6557\u3059\u308b\uff1a<\/p>\n<ul>\n<li>\u305b\u3093\u65ad\u8a98\u8d77\u51dd\u96c6<\/li>\n<li>\u30d5\u30a3\u30eb\u30bf\u30fc\u30fb\u30ed\u30fc\u30c7\u30a3\u30f3\u30b0\u52b9\u679c<\/li>\n<li>\u5de5\u5177\u9593\u306e\u3070\u3089\u3064\u304d<\/li>\n<\/ul>\n<p>\u9811\u5f37\u306a\u9285 CMP \u30b9\u30e9\u30ea\u30fc\u306f\u3001\u9577\u671f\u306e\u518d\u5faa\u74b0\u671f\u9593\u306b\u308f\u305f\u3063\u3066\u5b89\u5b9a\u3057\u305f\u6027\u80fd\u3092\u793a\u3055\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/p>\n<p><!-- ================= Section 10 ================= --><\/p>\n<h2 id=\"selection\">10.\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u3068\u6700\u9069\u5316\u306e\u30ac\u30a4\u30c9\u30e9\u30a4\u30f3<\/h2>\n<ul>\n<li>\u512a\u5148\u9806\u4f4d\u306e\u5b9a\u7fa9\uff1a\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u5bfe\u8868\u9762\u54c1\u8cea<\/li>\n<li>\u7814\u78e8\u30d1\u30c3\u30c9\u3068\u30b9\u30e9\u30ea\u30fc\u306e\u76f8\u6027\u3092\u5408\u308f\u305b\u308b<\/li>\n<li>\u6700\u60aa\u306e\u6761\u4ef6\u4e0b\u3067\u306e\u8150\u98df\u30de\u30fc\u30b8\u30f3\u306e\u691c\u8a3c<\/li>\n<\/ul>\n<p><!-- ================= Section 11 ================= --><\/p>\n<h2 id=\"future\">11.\u9285CMP\u30b9\u30e9\u30ea\u30fc\u306e\u4eca\u5f8c\u306e\u52d5\u5411<\/h2>\n<p>\u4eca\u5f8c\u306e\u9285CMP\u30b9\u30e9\u30ea\u30fc\u958b\u767a\u306e\u7126\u70b9\u306f\uff1a<\/p>\n<ul>\n<li>\u30b5\u30d65nm\u30ce\u30fc\u30c9\u306e\u4f4e\u6b20\u9665\u7387<\/li>\n<li>\u74b0\u5883\u8ca0\u8377\u306e\u4f4e\u6e1b<\/li>\n<li>\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30fb\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u30fb\u30d7\u30ed\u30bb\u30b9\u3068\u306e\u9069\u5408\u6027<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>&nbsp; Table of Contents 1. Introduction to Copper CMP 2. Role of Copper CMP Slurry in BEOL Integration 3. Chemical\u2013Mechanical Removal Mechanism 4. Copper CMP Slurry Composition Architecture 5. Two-Step  &#8230;<\/p>","protected":false},"author":1,"featured_media":1078,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1052","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1052","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1052"}],"version-history":[{"count":5,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1052\/revisions"}],"predecessor-version":[{"id":1106,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1052\/revisions\/1106"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1078"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1052"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1052"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1052"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}