{"id":1056,"date":"2026-01-05T15:56:04","date_gmt":"2026-01-05T07:56:04","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1056"},"modified":"2026-01-05T16:19:16","modified_gmt":"2026-01-05T08:19:16","slug":"tungsten-cmp-slurry-for-semiconductor-manufacturing","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/tungsten-cmp-slurry-for-semiconductor-manufacturing\/","title":{"rendered":"\u534a\u5c0e\u4f53\u88fd\u9020\u7528\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc"},"content":{"rendered":"<p>&nbsp;<\/p>\n<p><!-- ================= TOC ================= --><\/p>\n<nav>\n<h2>\u76ee\u6b21<\/h2>\n<ul>\n<li><a href=\"#introduction\">1.\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u306e\u7d39\u4ecb<\/a><\/li>\n<li><a href=\"#application\">2.\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306b\u304a\u3051\u308b\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u306e\u5fdc\u7528<\/a><\/li>\n<li><a href=\"#material-properties\">3.CMP\u306b\u95a2\u9023\u3059\u308b\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306e\u6750\u6599\u7279\u6027<\/a><\/li>\n<li><a href=\"#removal-mechanism\">4.\u5316\u5b66\u7684\u30fb\u6a5f\u68b0\u7684\u9664\u53bb\u30e1\u30ab\u30cb\u30ba\u30e0<\/a><\/li>\n<li><a href=\"#slurry-architecture\">5.\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3 CMP \u30b9\u30e9\u30ea\u30fc\u7d44\u6210\u56f3<\/a><\/li>\n<li><a href=\"#kinetics\">6.\u5316\u5b66\u53cd\u5fdc\u901f\u5ea6\u8ad6\u3068\u5f8b\u901f\u6bb5\u968e<\/a><\/li>\n<li><a href=\"#engineering-parameters\">7.\u5de5\u5b66\u30d1\u30e9\u30e1\u30fc\u30bf\u3068\u5b9f\u9a13\u30c7\u30fc\u30bf<\/a><\/li>\n<li><a href=\"#process-window\">8.\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u3068\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u30de\u30c3\u30d7<\/a><\/li>\n<li><a href=\"#defects\">9.\u6b20\u9665\u30e1\u30ab\u30cb\u30ba\u30e0\u3068\u6839\u672c\u539f\u56e0\u5206\u6790<\/a><\/li>\n<li><a href=\"#hvm\">10.\u5927\u91cf\u751f\u7523\u306e\u8ab2\u984c<\/a><\/li>\n<li><a href=\"#selection\">11.\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u3068\u6700\u9069\u5316\u306e\u30ac\u30a4\u30c9\u30e9\u30a4\u30f3<\/a><\/li>\n<li><a href=\"#future\">12.\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc\u306e\u4eca\u5f8c\u306e\u52d5\u5411<\/a><\/li>\n<\/ul>\n<\/nav>\n<hr \/>\n<p><!-- ================= Section 1 ================= --><\/p>\n<h2 id=\"introduction\">1.\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u306e\u7d39\u4ecb<\/h2>\n<p>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306e\u5316\u5b66\u7684\u6a5f\u68b0\u7684\u5e73\u5766\u5316(CMP)\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u3001\u7279\u306b\u30b3\u30f3\u30bf\u30af\u30c8\u30d7\u30e9\u30b0\u3084\u30d3\u30a2\u30d5\u30a3\u30eb\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306f\u3001\u305d\u306e\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027\u3001\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u3068\u6bd4\u8f03\u3057\u3066\u4f4e\u3044\u62b5\u6297\u7387\u3001\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u3068\u306e\u4e92\u63db\u6027\u306b\u3088\u308a\u3001\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n<p>\u96fb\u6c17\u5316\u5b66\u7684\u9178\u5316\u3068\u4e0d\u52d5\u614b\u5316\u30c0\u30a4\u30ca\u30df\u30af\u30b9\u304c\u652f\u914d\u7684\u306a\u9285CMP\u3068\u306f\u7570\u306a\u308a\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u306f\u3001\u4e3b\u306b\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u9178\u5316\u7269\u306e\u5236\u5fa1\u3055\u308c\u305f\u5316\u5b66\u6eb6\u89e3\u306b\u4f9d\u5b58\u3057\u3066\u3044\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc\u306e\u51e6\u65b9\u306f\u3001\u7d14\u7c8b\u306b\u6a5f\u68b0\u7684\u306a\u7814\u78e8\u3088\u308a\u3082\u3001\u5316\u5b66\u7684\u306a\u901f\u5ea6\u8ad6\u3001\u9178\u5316\u7269\u306e\u6eb6\u89e3\u5ea6\u3001\u9078\u629e\u6027\u306e\u5236\u5fa1\u306b\u91cd\u70b9\u3092\u7f6e\u3044\u3066\u3044\u307e\u3059\u3002.<\/p>\n<p>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u30fb\u30a6\u30a3\u30f3\u30c9\u30a6\u304c\u72ed\u304f\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u5316\u5b66\u7684\u6027\u8cea\u3068\u4e0b\u6d41\u306e\u6b69\u7559\u307e\u308a\u3068\u306e\u9593\u306b\u5f37\u3044\u76f8\u95a2\u95a2\u4fc2\u304c\u3042\u308b\u305f\u3081\u3001\u30d7\u30ed\u30bb\u30b9\u30fb\u30a8\u30f3\u30b8\u30cb\u30a2\u306e\u9593\u3067\u306f\u3001\u6700\u3082\u5316\u5b66\u7684\u306b\u654f\u611f\u306aCMP\u5de5\u7a0b\u306e\u3072\u3068\u3064\u3068\u5e83\u304f\u307f\u306a\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u6982\u5ff5\u306b\u95a2\u3059\u308b\u57fa\u790e\u7684\u306a\u6982\u8981\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u3092\u53c2\u7167\u306e\u3053\u3068\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-for-semiconductor-wafer-polishing\/\">\u534a\u5c0e\u4f53\u88fd\u9020\u7528CMP\u30b9\u30e9\u30ea\u30fc<\/a><\/p>\n<p><!-- ================= Section 2 ================= --><\/p>\n<h2 id=\"application\">2.\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306b\u304a\u3051\u308b\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u306e\u5fdc\u7528<\/h2>\n<p>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u306f\u4e3b\u306b\u4ee5\u4e0b\u306e\u7528\u9014\u3067\u4f7f\u7528\u3055\u308c\u308b\uff1a<\/p>\n<ul>\n<li>\u30b3\u30f3\u30bf\u30af\u30c8\u30d7\u30e9\u30b0\u306e\u5e73\u5766\u5316<\/li>\n<li>\u30ed\u30b8\u30c3\u30af\u30fb\u30c7\u30d0\u30a4\u30b9\u3068\u30e1\u30e2\u30ea\u30fb\u30c7\u30d0\u30a4\u30b9\u306b\u304a\u3051\u308b\u30d3\u30a2\u30fb\u30d5\u30a3\u30ebCMP<\/li>\n<li>\u30b2\u30fc\u30c8\u30b3\u30f3\u30bf\u30af\u30c8\u3068\u30ed\u30fc\u30ab\u30eb\u914d\u7dda\u306e\u5e73\u5766\u5316<\/li>\n<\/ul>\n<p>\u5178\u578b\u7684\u306a\u7d71\u5408\u30b9\u30bf\u30c3\u30af\u306b\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u3082\u306e\u304c\u3042\u308b\uff1a<\/p>\n<ul>\n<li>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\uff08W\uff09\u5145\u586b<\/li>\n<li>\u30d0\u30ea\u30a2\u5c64\uff08Ti \/ TiN\uff09<\/li>\n<li>\u8a98\u96fb\u4f53\u5c64\uff08SiO<sub>2<\/sub>, \u30ed\u30fck)<\/li>\n<\/ul>\n<p>CMP\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u6d78\u98df\u3084\u30ea\u30bb\u30b9\u3092\u8a98\u767a\u3059\u308b\u3053\u3068\u306a\u304f\u3001\u30d0\u30ea\u30a2\u5c64\u3084\u8a98\u96fb\u4f53\u5c64\u4e0a\u3067\u78ba\u5b9f\u306b\u505c\u6b62\u3057\u306a\u304c\u3089\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306e\u30aa\u30fc\u30d0\u30fc\u30d0\u30fc\u30c9\u3092\u9664\u53bb\u3057\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002.<\/p>\n<p><!-- ================= Section 3 ================= --><\/p>\n<h2 id=\"material-properties\">3.CMP\u306b\u95a2\u9023\u3059\u308b\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306e\u6750\u6599\u7279\u6027<\/h2>\n<p>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306e\u672c\u8cea\u7684\u306a\u6750\u6599\u7279\u6027\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u8a2d\u8a08\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30d7\u30ed\u30d1\u30c6\u30a3<\/th>\n<th>\u4fa1\u5024<\/th>\n<th>CMP\u3068\u306e\u95a2\u9023\u6027<\/th>\n<\/tr>\n<tr>\n<td>\u878d\u70b9<\/td>\n<td>3422 \u00b0C<\/td>\n<td>\u9ad8\u3044\u71b1\u5b89\u5b9a\u6027<\/td>\n<\/tr>\n<tr>\n<td>\u30e2\u30fc\u30b9\u786c\u5ea6<\/td>\n<td>7.5<\/td>\n<td>\u5316\u5b66\u7684\u8edf\u5316\u304c\u5fc5\u8981<\/td>\n<\/tr>\n<tr>\n<td>\u30cd\u30a4\u30c6\u30a3\u30d6\u9178\u5316\u7269<\/td>\n<td>WO<sub>3<\/sub><\/td>\n<td>\u30ad\u30fc\u53d6\u308a\u5916\u3057\u4e2d\u7d1a<\/td>\n<\/tr>\n<tr>\n<td>\u9178\u5316\u7269\u6eb6\u89e3\u5ea6<\/td>\n<td>\u4f4e\u3044\uff08\u4e2d\u6027pH\uff09<\/td>\n<td>\u9178\u6027\u30b9\u30e9\u30ea\u30fc\u306e\u8a2d\u8a08\u3092\u30c9\u30e9\u30a4\u30d6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306e\u7d14\u7c8b\u306a\u6a5f\u68b0\u7814\u78e8\u306f\u3001\u305d\u306e\u786c\u3055\u306e\u305f\u3081\u306b\u5b9f\u7528\u7684\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u52b9\u679c\u7684\u306aCMP\u306f\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u9178\u5316\u7269\u306e\u5f62\u6210\u3068\u6eb6\u89e3\u306b\u4f9d\u5b58\u3057\u307e\u3059\u3002.<\/p>\n<p><!-- ================= Section 4 ================= --><\/p>\n<h2 id=\"removal-mechanism\">4.\u5316\u5b66\u7684\u30fb\u6a5f\u68b0\u7684\u9664\u53bb\u30e1\u30ab\u30cb\u30ba\u30e0<\/h2>\n<h3>4.1 \u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u8868\u9762\u306e\u9178\u5316<\/h3>\n<p>\u9178\u6027\u306eCMP\u30b9\u30e9\u30ea\u30fc\u4e2d\u3067\u306f\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306f\u9178\u5316\u3055\u308c\u3066\u4e09\u9178\u5316\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\uff08WO<sub>3<\/sub>)\u3092\u9178\u5316\u5264\u3068\u53cd\u5fdc\u3055\u305b\u308b\u3002.<\/p>\n<p><em>W + 3H<sub>2<\/sub>O \u2192 WO<sub>3<\/sub> + 6H<sup>+<\/sup> + 6e<sup>-<\/sup><\/em><\/p>\n<h3>4.2 \u9178\u5316\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306e\u6eb6\u89e3<\/h3>\n<p>WO<sub>3<\/sub> \u306f\u3001\u4e2d\u6027\u304a\u3088\u3073\u30a2\u30eb\u30ab\u30ea\u6027\u6eb6\u6db2\u3078\u306e\u6eb6\u89e3\u5ea6\u306f\u9650\u5b9a\u7684\u3067\u3042\u308b\u304c\u3001\u9178\u6027\u6761\u4ef6\u4e0b\u3067\u306f\u6eb6\u89e3\u5ea6\u304c\u5897\u3057\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u9178\u5869\u3092\u5f62\u6210\u3059\u308b\u3002.<\/p>\n<h3>4.3 \u6a5f\u68b0\u7684\u9664\u53bb<\/h3>\n<p>\u5316\u5b66\u7684\u306b\u8edf\u5316\u3057\u305f\u9178\u5316\u76ae\u819c\u306f\u3001\u7a4f\u3084\u304b\u306a\u7814\u78e8\u4f5c\u7528\u3068\u30d1\u30c3\u30c9\u306e\u30a2\u30b9\u30da\u30ea\u30c6\u30a3\u306b\u3088\u3063\u3066\u9664\u53bb\u3055\u308c\u3001\u53cd\u5fdc\u3092\u7d99\u7d9a\u3059\u308b\u305f\u3081\u306e\u65b0\u9bae\u306a\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u8868\u9762\u304c\u9732\u51fa\u3057\u307e\u3059\u3002.<\/p>\n<p><video controls=\"controls\" width=\"300\" height=\"150\"><source src=\"tungsten-cmp-removal-mechanism.mp4\" type=\"video\/mp4\" \/><\/video><\/p>\n<p><!-- ================= Section 5 ================= --><\/p>\n<h2 id=\"slurry-architecture\">5.\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3 CMP \u30b9\u30e9\u30ea\u30fc\u7d44\u6210\u56f3<\/h2>\n<h3>5.1 \u9178\u5316\u5264<\/h3>\n<ul>\n<li>\u785d\u9178\u7b2c\u4e8c\u9244\uff08Fe(NO<sub>3<\/sub>)<sub>3<\/sub>)<\/li>\n<li>\u904e\u9178\u5316\u6c34\u7d20\uff08\u9650\u5b9a\u4f7f\u7528\uff09<\/li>\n<\/ul>\n<h3>5.2 pH\u8abf\u6574\u5264<\/h3>\n<p>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc\u306f\u901a\u5e38\u3001\u5f37\u9178\u6027\u6761\u4ef6\u4e0b\u3067\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/p>\n<ul>\n<li>\u785d\u9178<\/li>\n<li>\u6709\u6a5f\u9178<\/li>\n<\/ul>\n<h3>5.3 \u7814\u78e8\u30b7\u30b9\u30c6\u30e0<\/h3>\n<ul>\n<li>\u30d5\u30a1\u30a4\u30f3\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab<\/li>\n<li>\u4f4e\u7814\u78e8\u8ca0\u8377\u3067\u50b7\u3092\u9632\u3050<\/li>\n<\/ul>\n<h3>5.4 \u963b\u5bb3\u5264\u3068\u9078\u629e\u6027\u4fee\u98fe\u5264<\/h3>\n<p>\u6dfb\u52a0\u5264\u306f\u3001\u30d0\u30ea\u30a2\u5c64\u306e\u5265\u96e2\u3092\u6291\u5236\u3057\u3001\u6eb6\u89e3\u901f\u5ea6\u3092\u5b89\u5b9a\u3055\u305b\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/p>\n<p><!-- ================= Section 6 ================= --><\/p>\n<h2 id=\"kinetics\">6.\u5316\u5b66\u53cd\u5fdc\u901f\u5ea6\u8ad6\u3068\u5f8b\u901f\u6bb5\u968e<\/h2>\n<p>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u3067\u306f\u3001\u901f\u5ea6\u3092\u5236\u9650\u3059\u308b\u5de5\u7a0b\u306f\u6a5f\u68b0\u7684\u3067\u306f\u306a\u304f\u5316\u5b66\u7684\u3067\u3042\u308b\u3053\u3068\u304c\u591a\u3044\u3002.<\/p>\n<ul>\n<li>\u9178\u5316\u901f\u5ea6\u304c\u6700\u5927MRR\u3092\u6c7a\u3081\u308b<\/li>\n<li>\u9178\u5316\u7269\u306e\u6eb6\u89e3\u901f\u5ea6\u304c\u5b9a\u5e38\u72b6\u614b\u306e\u9664\u53bb\u3092\u5236\u5fa1\u3059\u308b<\/li>\n<\/ul>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1107\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Schematic-illustrating-oxidation\u2013dissolution-balance-in-tungsten-CMP-slurry-scaled.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Schematic-illustrating-oxidation\u2013dissolution-balance-in-tungsten-CMP-slurry-scaled.png\" alt=\"Schematic illustrating oxidation\u2013dissolution balance in tungsten CMP slurry.\" width=\"2560\" height=\"1856\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%272560%27%20height%3D%271856%27%20viewBox%3D%270%200%202560%201856%27%3E%3Crect%20width%3D%272560%27%20height%3D%271856%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Schematic-illustrating-oxidation\u2013dissolution-balance-in-tungsten-CMP-slurry-200x145.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Schematic-illustrating-oxidation\u2013dissolution-balance-in-tungsten-CMP-slurry-300x217.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Schematic-illustrating-oxidation\u2013dissolution-balance-in-tungsten-CMP-slurry-400x290.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Schematic-illustrating-oxidation\u2013dissolution-balance-in-tungsten-CMP-slurry-600x435.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Schematic-illustrating-oxidation\u2013dissolution-balance-in-tungsten-CMP-slurry-768x557.png 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Schematic-illustrating-oxidation\u2013dissolution-balance-in-tungsten-CMP-slurry-800x580.png 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Schematic-illustrating-oxidation\u2013dissolution-balance-in-tungsten-CMP-slurry-1024x742.png 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Schematic-illustrating-oxidation\u2013dissolution-balance-in-tungsten-CMP-slurry-1200x870.png 1200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Schematic-illustrating-oxidation\u2013dissolution-balance-in-tungsten-CMP-slurry-1536x1114.png 1536w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Schematic-illustrating-oxidation\u2013dissolution-balance-in-tungsten-CMP-slurry-scaled.png 2560w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 2560px) 100vw, 2560px\" \/><\/figure>\n<p><!-- ================= Section 7 ================= --><\/p>\n<h2 id=\"engineering-parameters\">7.\u5de5\u5b66\u30d1\u30e9\u30e1\u30fc\u30bf\u3068\u5b9f\u9a13\u30c7\u30fc\u30bf<\/h2>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n<th>\u5178\u578b\u7684\u306a\u7bc4\u56f2<\/th>\n<th>\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306e\u5f71\u97ff<\/th>\n<\/tr>\n<tr>\n<td>pH<\/td>\n<td>1.5-3.5<\/td>\n<td>\u9178\u5316\u7269\u306e\u6eb6\u89e3\u5ea6\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/td>\n<\/tr>\n<tr>\n<td>MRR<\/td>\n<td>150-400 nm\/\u5206<\/td>\n<td>\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8<\/td>\n<\/tr>\n<tr>\n<td>W:\u9178\u5316\u7269\u9078\u629e\u6027<\/td>\n<td>&gt; 30:1<\/td>\n<td>\u30b9\u30c8\u30c3\u30d7\u30fb\u30ec\u30a4\u30e4\u30fc\u30fb\u30d7\u30ed\u30c6\u30af\u30b7\u30e7\u30f3<\/td>\n<\/tr>\n<tr>\n<td>WIWNU<\/td>\n<td>&lt; 6%<\/td>\n<td>\u5e73\u9762\u6027\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 8 ================= --><\/p>\n<h2 id=\"process-window\">8.\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u3068\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u30de\u30c3\u30d7<\/h2>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1109\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Tungsten-CMP-slurry-process-window-showing-removal-rate-versus-corrosion-and-barrier-attack.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Tungsten-CMP-slurry-process-window-showing-removal-rate-versus-corrosion-and-barrier-attack.jpg\" alt=\"Tungsten CMP slurry process window showing removal rate versus corrosion and barrier attack.\" width=\"267\" height=\"200\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27267%27%20height%3D%27200%27%20viewBox%3D%270%200%20267%20200%27%3E%3Crect%20width%3D%27267%27%20height%3D%27200%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Tungsten-CMP-slurry-process-window-showing-removal-rate-versus-corrosion-and-barrier-attack-200x150.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Tungsten-CMP-slurry-process-window-showing-removal-rate-versus-corrosion-and-barrier-attack.jpg 267w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 267px) 100vw, 267px\" \/><figcaption>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc\u30d7\u30ed\u30bb\u30b9\u306e\u8150\u98df\u3068\u30d0\u30ea\u30a2\u30a2\u30bf\u30c3\u30af\u306b\u5bfe\u3059\u308b\u9664\u53bb\u7387\u3092\u793a\u3059\u30a6\u30a3\u30f3\u30c9\u30a6\u3002.<\/figcaption><\/figure>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1110\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Relationship-between-oxidizer-concentration-and-tungsten-removal-rate.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Relationship-between-oxidizer-concentration-and-tungsten-removal-rate.png\" alt=\"Relationship between oxidizer concentration and tungsten removal rate.\" width=\"720\" height=\"1043\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27720%27%20height%3D%271043%27%20viewBox%3D%270%200%20720%201043%27%3E%3Crect%20width%3D%27720%27%20height%3D%271043%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Relationship-between-oxidizer-concentration-and-tungsten-removal-rate-200x290.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Relationship-between-oxidizer-concentration-and-tungsten-removal-rate-207x300.png 207w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Relationship-between-oxidizer-concentration-and-tungsten-removal-rate-400x579.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Relationship-between-oxidizer-concentration-and-tungsten-removal-rate-600x869.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Relationship-between-oxidizer-concentration-and-tungsten-removal-rate-707x1024.png 707w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Relationship-between-oxidizer-concentration-and-tungsten-removal-rate.png 720w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 720px) 100vw, 720px\" \/><figcaption>\u9178\u5316\u5264\u6fc3\u5ea6\u3068\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u9664\u53bb\u7387\u306e\u95a2\u4fc2\u3002.<\/figcaption><\/figure>\n<p>\u6700\u9069\u306a\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u306f\u4e00\u822c\u7684\u306b\u72ed\u304f\u3001\u53b3\u5bc6\u306a\u5316\u5b66\u7269\u8cea\u7ba1\u7406\u3068\u5f37\u56fa\u306a\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u304c\u5fc5\u8981\u3068\u306a\u308b\u3002.<\/p>\n<p><!-- ================= Section 9 ================= --><\/p>\n<h2 id=\"defects\">9.\u6b20\u9665\u30e1\u30ab\u30cb\u30ba\u30e0\u3068\u6839\u672c\u539f\u56e0\u5206\u6790<\/h2>\n<h3>9.1 \u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u30fb\u30ea\u30bb\u30b9<\/h3>\n<p>\u904e\u5ea6\u306e\u7814\u78e8\u3084\u904e\u5ea6\u306e\u5316\u5b66\u6eb6\u89e3\u304c\u539f\u56e0\u3002.<\/p>\n<h3>9.2 \u30d0\u30ea\u30a2\u5c64\u306e\u8e8d\u9032<\/h3>\n<p>\u9078\u629e\u6027\u304c\u4e0d\u5341\u5206\u306a\u5834\u5408\u306b\u767a\u751f\u3057\u3001Ti\/TiN\u5c64\u304c\u9732\u51fa\u3059\u308b\u3002.<\/p>\n<h3>9.3 \u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306b\u3088\u308b\u50b7<\/h3>\n<p>\u7814\u78e8\u5264\u306e\u51dd\u96c6\u3084\u4e0d\u5341\u5206\u306a\u308d\u904e\u304c\u539f\u56e0\u3002.<\/p>\n<p><!-- ================= Section 10 ================= --><\/p>\n<h2 id=\"hvm\">10.\u5927\u91cf\u751f\u7523\u306e\u8ab2\u984c<\/h2>\n<p>\u30d1\u30a4\u30ed\u30c3\u30c8\u30fb\u30b9\u30b1\u30fc\u30eb\u3067\u306f\u826f\u597d\u306a\u6027\u80fd\u3092\u793a\u3059\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc\u3082\u3001HVM\u3067\u306f\u3057\u3070\u3057\u3070\u8ab2\u984c\u306b\u76f4\u9762\u3059\u308b\uff1a<\/p>\n<ul>\n<li>\u518d\u5faa\u74b0\u4e2d\u306e\u9178\u5316\u5264\u306e\u67af\u6e07<\/li>\n<li>\u30c4\u30fc\u30eb\u30e9\u30f3\u30bf\u30a4\u30e0\u306e\u5ef6\u9577\u306b\u3088\u308bpH\u30c9\u30ea\u30d5\u30c8<\/li>\n<li>\u30d5\u30a3\u30eb\u30bf\u30fc\u30fb\u30ed\u30fc\u30c7\u30a3\u30f3\u30b0\u52b9\u679c<\/li>\n<\/ul>\n<p>\u5805\u7262\u306a\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc\u306e\u8a2d\u8a08\u306f\u3001\u9577\u6642\u9593\u306e\u904b\u8ee2\u6761\u4ef6\u4e0b\u3067\u5b89\u5b9a\u3057\u305f\u52d5\u529b\u5b66\u3092\u5b9f\u8a3c\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002.<\/p>\n<p><!-- ================= Section 11 ================= --><\/p>\n<h2 id=\"selection\">11.\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u3068\u6700\u9069\u5316\u306e\u30ac\u30a4\u30c9\u30e9\u30a4\u30f3<\/h2>\n<ul>\n<li>\u751f\u306eMRR\u3088\u308a\u3082\u9078\u629e\u6027\u3092\u512a\u5148\u3059\u308b<\/li>\n<li>\u6700\u60aa\u306epH\u30c9\u30ea\u30d5\u30c8\u4e0b\u3067\u306e\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u306e\u691c\u8a3c<\/li>\n<li>\u30b9\u30e9\u30ea\u30fc\u306e\u5316\u5b66\u7684\u6027\u8cea\u3068\u30d1\u30c3\u30c9\u306e\u7a7a\u9699\u7387\u3092\u4e00\u81f4\u3055\u305b\u308b<\/li>\n<\/ul>\n<p><!-- ================= Section 12 ================= --><\/p>\n<h2 id=\"future\">12.\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc\u306e\u4eca\u5f8c\u306e\u52d5\u5411<\/h2>\n<p>\u4eca\u5f8c\u306e\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc\u306e\u958b\u767a\u306f\u3001\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u8981\u56e0\u306b\u3088\u3063\u3066\u63a8\u9032\u3055\u308c\u308b\uff1a<\/p>\n<ul>\n<li>\u30b3\u30f3\u30bf\u30af\u30c8\u5bf8\u6cd5\u306e\u7e2e\u5c0f<\/li>\n<li>\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u69cb\u9020<\/li>\n<li>\u5148\u9032\u306e\u30ed\u30b8\u30c3\u30af\u30fb\u30ce\u30fc\u30c9\u3084\u30e1\u30e2\u30ea\u30fc\u30fb\u30ce\u30fc\u30c9\u3068\u306e\u7d71\u5408<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; Table of Contents 1. Introduction to Tungsten CMP 2. Tungsten CMP Applications in Semiconductor Devices 3. Material Properties of Tungsten Relevant to CMP 4. Chemical\u2013Mechanical Removal Mechanism 5. Tungsten  &#8230;<\/p>","protected":false},"author":1,"featured_media":1080,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1056","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1056","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1056"}],"version-history":[{"count":4,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1056\/revisions"}],"predecessor-version":[{"id":1111,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1056\/revisions\/1111"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1080"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1056"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1056"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1056"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}