{"id":1058,"date":"2026-01-05T15:51:47","date_gmt":"2026-01-05T07:51:47","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1058"},"modified":"2026-01-05T16:22:08","modified_gmt":"2026-01-05T08:22:08","slug":"metal-cmp-slurry-for-semiconductor-wafer-polishing","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/metal-cmp-slurry-for-semiconductor-wafer-polishing\/","title":{"rendered":"\u534a\u5c0e\u4f53\u30a6\u30a7\u30cf\u30fc\u7814\u78e8\u7528\u30e1\u30bf\u30ebCMP\u30b9\u30e9\u30ea\u30fc"},"content":{"rendered":"<p>&nbsp;<\/p>\n<p><!-- ================= TOC ================= --><\/p>\n<nav>\n<h2>\u76ee\u6b21<\/h2>\n<ul>\n<li><a href=\"#introduction\">1.\u30e1\u30bf\u30ebCMP\u5165\u9580<\/a><\/li>\n<li><a href=\"#why-metal-different\">2.\u30e1\u30bf\u30ebCMP\u304c\u6839\u672c\u7684\u306b\u7570\u306a\u308b\u7406\u7531<\/a><\/li>\n<li><a href=\"#classification\">3.\u30e1\u30bf\u30ebCMP\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u306e\u5206\u985e<\/a><\/li>\n<li><a href=\"#mechanisms\">4.\u7570\u306a\u308b\u91d1\u5c5e\u9593\u306e\u9664\u53bb\u30e1\u30ab\u30cb\u30ba\u30e0<\/a><\/li>\n<li><a href=\"#slurry-architecture\">5.\u30e1\u30bf\u30ebCMP\u30b9\u30e9\u30ea\u30fc\u7d44\u6210\u56f3<\/a><\/li>\n<li><a href=\"#metal-specific\">6.\u91d1\u5c5e\u7279\u6709\u306eCMP\u30b9\u30e9\u30ea\u30fc\u306b\u95a2\u3059\u308b\u8003\u5bdf<\/a><\/li>\n<li><a href=\"#engineering-parameters\">7.\u5de5\u5b66\u30d1\u30e9\u30e1\u30fc\u30bf\u3068\u5b9f\u9a13\u30c7\u30fc\u30bf<\/a><\/li>\n<li><a href=\"#process-window\">8.\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u3068\u7d71\u5408\u5236\u5fa1<\/a><\/li>\n<li><a href=\"#defects\">9.\u30e1\u30bf\u30ebCMP\u306e\u6b20\u9665\u3068\u6839\u672c\u539f\u56e0\u5206\u6790<\/a><\/li>\n<li><a href=\"#hvm\">10.\u5927\u91cf\u751f\u7523\u306e\u8ab2\u984c<\/a><\/li>\n<li><a href=\"#selection\">11.\u30e1\u30bf\u30ebCMP\u306e\u305f\u3081\u306e\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u6226\u7565<\/a><\/li>\n<li><a href=\"#future\">12.\u30e1\u30bf\u30ebCMP\u30b9\u30e9\u30ea\u30fc\u306e\u5c06\u6765\u52d5\u5411<\/a><\/li>\n<\/ul>\n<\/nav>\n<hr \/>\n<p><!-- ================= Section 1 ================= --><\/p>\n<h2 id=\"introduction\">1.\u30e1\u30bf\u30ebCMP\u5165\u9580<\/h2>\n<p>\u30e1\u30bf\u30ebCMP\uff08Chemical Mechanical Planarization\uff09\u306f\u3001\u6700\u5148\u7aef\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u6700\u3082\u91cd\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u306e\u4e00\u3064\u3067\u3042\u308b\u3002\u8a98\u96fb\u4f53CMP\u3068\u306f\u7570\u306a\u308a\u3001\u30e1\u30bf\u30ebCMP\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u5316\u5b66\u3001\u9178\u5316\u9084\u5143\u6761\u4ef6\u3001\u6a5f\u68b0\u7684\u76f8\u4e92\u4f5c\u7528\u306b\u5bfe\u3057\u3066\u8868\u9762\u72b6\u614b\u304c\u975e\u5e38\u306b\u654f\u611f\u306a\u96fb\u6c17\u5316\u5b66\u7684\u306b\u6d3b\u6027\u306a\u6750\u6599\u3092\u4f7f\u7528\u3057\u307e\u3059\u3002.<\/p>\n<p>\u30c7\u30d0\u30a4\u30b9\u30fb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u304c\u3088\u308a\u5c0f\u3055\u306a\u5f62\u72b6\u3084\u7570\u7a2e\u6750\u6599\u30b9\u30bf\u30c3\u30af\u3078\u3068\u9032\u5316\u3059\u308b\u306b\u3064\u308c\u3001CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u9664\u53bb\u901f\u5ea6\u3001\u9078\u629e\u6027\u3001\u6b20\u9665\u5236\u5fa1\u3001\u8150\u98df\u6291\u5236\u3068\u3044\u3063\u305f\u76f8\u53cd\u3059\u308b\u8981\u4ef6\u3092\u540c\u6642\u306b\u6e80\u305f\u3055\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002.<\/p>\n<p>\u3053\u306e\u30db\u30ef\u30a4\u30c8\u30da\u30fc\u30d1\u30fc\u306f\u3001\u9285\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u3001\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3001\u30b3\u30d0\u30eb\u30c8\u3001\u305d\u3057\u3066\u65b0\u8208\u306e\u30eb\u30c6\u30cb\u30a6\u30e0\u7cfb\u306a\u3069\u3001\u8907\u6570\u306e\u91d1\u5c5e\u6750\u6599\u306b\u304a\u3051\u308b\u91d1\u5c5eCMP\u30b9\u30e9\u30ea\u30fc\u306e\u6319\u52d5\u3092\u7406\u89e3\u3059\u308b\u305f\u3081\u306e\u3001\u7d71\u4e00\u3055\u308c\u305f\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306e\u30d5\u30ec\u30fc\u30e0\u30ef\u30fc\u30af\u3092\u63d0\u4f9b\u3059\u308b\u3002.<\/p>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u57fa\u672c\u7684\u306a\u6982\u8981\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u3092\u53c2\u7167\u306e\u3053\u3068\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-for-semiconductor-wafer-polishing\/\">\u534a\u5c0e\u4f53\u88fd\u9020\u7528CMP\u30b9\u30e9\u30ea\u30fc<\/a><\/p>\n<p><!-- ================= Section 2 ================= --><\/p>\n<h2 id=\"why-metal-different\">2.\u30e1\u30bf\u30ebCMP\u304c\u6839\u672c\u7684\u306b\u7570\u306a\u308b\u7406\u7531<\/h2>\n<p>\u30e1\u30bf\u30ebCMP\u304c\u9178\u5316\u7269CMP\u3068\u6839\u672c\u7684\u306b\u7570\u306a\u308b\u306e\u306f\u3001\u4ee5\u4e0b\u306e\u8981\u56e0\u306b\u3088\u308b\uff1a<\/p>\n<ul>\n<li>\u91d1\u5c5e\u306f\u96fb\u6c17\u5316\u5b66\u7684\u53cd\u5fdc\u6027\u3092\u793a\u3059<\/li>\n<li>\u8868\u9762\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u5c64\u306f\u52d5\u7684\u306b\u5f62\u6210\u30fb\u6eb6\u89e3\u3059\u308b<\/li>\n<li>\u9664\u53bb\u901f\u5ea6\u306f\u3001\u6a5f\u68b0\u7684\u306a\u5236\u9650\u3088\u308a\u3082\u5316\u5b66\u7684\u306a\u5236\u9650\u3092\u53d7\u3051\u308b\u3053\u3068\u304c\u591a\u3044\u3002<\/li>\n<\/ul>\n<p>\u30e1\u30bf\u30ebCMP\u3067\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u5316\u5b66\u7684\u6027\u8cea\u304c\u7a4d\u6975\u7684\u306b\u5236\u5fa1\u3055\u308c\u308b\uff1a<\/p>\n<ul>\n<li>\u9178\u5316\u7269\u306e\u5f62\u6210\u901f\u5ea6\u8ad6<\/li>\n<li>\u8868\u9762\u8150\u98df\u6319\u52d5<\/li>\n<li>\u91d1\u5c5e\u3068\u30d1\u30c3\u30c9\u306e\u754c\u9762\u63a5\u7740\u6027<\/li>\n<\/ul>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1112\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms.png\" alt=\"Fundamental differences between metal CMP and dielectric CMP mechanisms.\" width=\"752\" height=\"675\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27752%27%20height%3D%27675%27%20viewBox%3D%270%200%20752%20675%27%3E%3Crect%20width%3D%27752%27%20height%3D%27675%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms-200x180.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms-300x269.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms-400x359.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms-600x539.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms.png 752w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 752px) 100vw, 752px\" \/><figcaption><\/figcaption><\/figure>\n<p><!-- ================= Section 3 ================= --><\/p>\n<h2 id=\"classification\">3.\u30e1\u30bf\u30ebCMP\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u306e\u5206\u985e<\/h2>\n<p>\u91d1\u5c5eCMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u8907\u6570\u306e\u5de5\u5b66\u7684\u6b21\u5143\u306b\u6cbf\u3063\u3066\u5206\u985e\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\uff1a<\/p>\n<h3>3.1 \u5bfe\u8c61\u91d1\u5c5e\u5225<\/h3>\n<ul>\n<li>\u9285\uff08Cu\uff09<\/li>\n<li>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\uff08W\uff09<\/li>\n<li>\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08Al\uff09<\/li>\n<li>\u30b3\u30d0\u30eb\u30c8<\/li>\n<li>\u30eb\u30c6\u30cb\u30a6\u30e0\uff08Ru\uff09<\/li>\n<\/ul>\n<h3>3.2 \u30b1\u30df\u30ab\u30eb\u30fb\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u30fb\u30e2\u30fc\u30c9\u5225<\/h3>\n<ul>\n<li>\u9178\u5316\u5236\u5fa1\u30b9\u30e9\u30ea\u30fc<\/li>\n<li>\u6eb6\u89e3\u5236\u5fa1\u30b9\u30e9\u30ea\u30fc<\/li>\n<li>\u4e0d\u52d5\u614b\u5316\u5236\u5fa1\u30b9\u30e9\u30ea\u30fc<\/li>\n<\/ul>\n<h3>3.3 \u7d71\u5408\u611f\u5ea6\u5225<\/h3>\n<ul>\n<li>\u9ad8\u9078\u629e\u6027CMP\uff08\u30d0\u30ea\u30a2\u30b9\u30c8\u30c3\u30d7\uff09<\/li>\n<li>\u4f4e\u6b20\u9665CMP\uff08\u5148\u9032\u30ce\u30fc\u30c9\uff09<\/li>\n<\/ul>\n<p><!-- ================= Section 4 ================= --><\/p>\n<h2 id=\"mechanisms\">4.\u7570\u306a\u308b\u91d1\u5c5e\u9593\u306e\u9664\u53bb\u30e1\u30ab\u30cb\u30ba\u30e0<\/h2>\n<p>\u3059\u3079\u3066\u306e\u91d1\u5c5eCMP\u30d7\u30ed\u30bb\u30b9\u306b\u306f\u5316\u5b66\u7684\u304a\u3088\u3073\u6a5f\u68b0\u7684\u306a\u8981\u7d20\u304c\u542b\u307e\u308c\u308b\u304c\u3001\u652f\u914d\u7684\u306a\u9664\u53bb\u30e1\u30ab\u30cb\u30ba\u30e0\u306f\u91d1\u5c5e\u306e\u7a2e\u985e\u306b\u3088\u3063\u3066\u7570\u306a\u308b\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30e1\u30bf\u30eb<\/th>\n<th>\u652f\u914d\u7684\u30e1\u30ab\u30cb\u30ba\u30e0<\/th>\n<th>\u4e3b\u8981\u5316\u5b66\u7269\u8cea\u7ba1\u7406<\/th>\n<\/tr>\n<tr>\n<td>\u9285<\/td>\n<td>\u9178\u5316\uff0b\u4e0d\u52d5\u614b\u5316<\/td>\n<td>\u963b\u5bb3\u5264\u306e\u5438\u7740<\/td>\n<\/tr>\n<tr>\n<td>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3<\/td>\n<td>\u9178\u5316\uff0b\u6eb6\u89e3<\/td>\n<td>pH\u3068\u9178\u5316\u5264\u306e\u52d5\u529b\u5b66<\/td>\n<\/tr>\n<tr>\n<td>\u30a2\u30eb\u30df\u30cb\u30a6\u30e0<\/td>\n<td>\u9178\u5316\u6469\u8017<\/td>\n<td>\u30cd\u30a4\u30c6\u30a3\u30d6\u9178\u5316\u7269\u306e\u5b89\u5b9a\u6027<\/td>\n<\/tr>\n<tr>\n<td>\u30b3\u30d0\u30eb\u30c8<\/td>\n<td>\u5236\u5fa1\u3055\u308c\u305f\u8150\u98df<\/td>\n<td>\u9178\u5316\u9084\u5143\u30d0\u30e9\u30f3\u30b9<\/td>\n<\/tr>\n<tr>\n<td>\u30eb\u30c6\u30cb\u30a6\u30e0<\/td>\n<td>\u8868\u9762\u6d3b\u6027\u5316<\/td>\n<td>\u89e6\u5a92\u9178\u5316<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 5 ================= --><\/p>\n<h2 id=\"slurry-architecture\">5.\u30e1\u30bf\u30ebCMP\u30b9\u30e9\u30ea\u30fc\u7d44\u6210\u56f3<\/h2>\n<h3>5.1 \u7814\u78e8\u30b7\u30b9\u30c6\u30e0<\/h3>\n<ul>\n<li>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\uff08\u4f4e\u6b20\u9665\u30ea\u30b9\u30af\uff09<\/li>\n<li>\u30a2\u30eb\u30df\u30ca\uff08\u9ad8\u786c\u5ea6\u3001\u30b9\u30af\u30e9\u30c3\u30c1\u30ea\u30b9\u30af\u304c\u9ad8\u3044\uff09<\/li>\n<li>\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u7814\u78e8\u30b7\u30b9\u30c6\u30e0<\/li>\n<\/ul>\n<h3>5.2 \u9178\u5316\u5264<\/h3>\n<ul>\n<li>\u904e\u9178\u5316\u6c34\u7d20<\/li>\n<li>\u9244\u5869<\/li>\n<li>\u904e\u786b\u9178\u5869\uff08\u5148\u7aef\u91d1\u5c5e\uff09<\/li>\n<\/ul>\n<h3>5.3 \u8907\u5408\u5316\u5264<\/h3>\n<p>\u932f\u5316\u5264\u306f\u6eb6\u89e3\u3057\u305f\u91d1\u5c5e\u30a4\u30aa\u30f3\u3092\u5b89\u5b9a\u5316\u3055\u305b\u3001\u518d\u6790\u51fa\u3092\u9632\u3050\u3002.<\/p>\n<h3>5.4 \u30a4\u30f3\u30d2\u30d3\u30bf\u30fc\u3068\u8150\u98df\u6291\u5236\u5264<\/h3>\n<p>Cu\u3001Co\u3001Ru\u306eCMP\u3067\u306f\u3001\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u30a2\u30bf\u30c3\u30af\u3092\u9632\u3050\u3053\u3068\u304c\u91cd\u8981\u3002.<\/p>\n<p><!-- ================= Section 6 ================= --><\/p>\n<h2 id=\"metal-specific\">6.\u91d1\u5c5e\u7279\u6709\u306eCMP\u30b9\u30e9\u30ea\u30fc\u306b\u95a2\u3059\u308b\u8003\u5bdf<\/h2>\n<h3>6.1 \u30a2\u30eb\u30df\u30cb\u30a6\u30e0CMP\u30b9\u30e9\u30ea\u30fc<\/h3>\n<p>\u30a2\u30eb\u30df\u30cb\u30a6\u30e0CMP\u306f\u3001Al\u306e\u9664\u53bb\u306b\u4f9d\u5b58\u3057\u3066\u3044\u308b\u3002<sub>2<\/sub>O<sub>3<\/sub> \u5c64\u304c\u3042\u308a\u3001\u3057\u3070\u3057\u3070\u7814\u78e8\u5264\u306e\u786c\u5ea6\u3092\u6ce8\u610f\u6df1\u304f\u7ba1\u7406\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002.<\/p>\n<h3>6.2 \u30b3\u30d0\u30eb\u30c8CMP\u30b9\u30e9\u30ea\u30fc<\/h3>\n<p>\u30b3\u30d0\u30eb\u30c8CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u9ad8\u3044\u5316\u5b66\u53cd\u5fdc\u6027\u3068\u8150\u98df\u6291\u5236\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u53d6\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002.<\/p>\n<h3>6.3 \u30eb\u30c6\u30cb\u30a6\u30e0CMP\u30b9\u30e9\u30ea\u30fc<\/h3>\n<p>\u30eb\u30c6\u30cb\u30a6\u30e0CMP\u306f\u3001\u89e6\u5a92\u7684\u306a\u8868\u9762\u6319\u52d5\u306b\u3088\u308a\u3001\u6700\u3082\u56f0\u96e3\u306a\u65b0\u8208\u91d1\u5c5eCMP\u30b7\u30b9\u30c6\u30e0\u306e\u3072\u3068\u3064\u3067\u3042\u308b\u3002.<\/p>\n<p><!-- ================= Section 7 ================= --><\/p>\n<h2 id=\"engineering-parameters\">7.\u5de5\u5b66\u30d1\u30e9\u30e1\u30fc\u30bf\u3068\u5b9f\u9a13\u30c7\u30fc\u30bf<\/h2>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n<th>\u5178\u578b\u7684\u306a\u7bc4\u56f2<\/th>\n<th>\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306e\u5f71\u97ff<\/th>\n<\/tr>\n<tr>\n<td>pH<\/td>\n<td>2.0-7.0<\/td>\n<td>\u91d1\u5c5e\u306b\u4f9d\u5b58\u3059\u308b\u5b89\u5b9a\u6027<\/td>\n<\/tr>\n<tr>\n<td>MRR<\/td>\n<td>100-800 nm\/\u5206<\/td>\n<td>\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u5bfe\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/td>\n<\/tr>\n<tr>\n<td>\u9078\u629e\u6027<\/td>\n<td>&gt; 20:1<\/td>\n<td>\u30d0\u30ea\u30a2\u4fdd\u8b77<\/td>\n<\/tr>\n<tr>\n<td>\u30b9\u30af\u30e9\u30c3\u30c1\u5bc6\u5ea6<\/td>\n<td>&lt; 0.1 \/ \u30a6\u30a7\u30cf\u30fc<\/td>\n<td>\u53ce\u91cf<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 8 ================= --><\/p>\n<h2 id=\"process-window\">8.\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u3068\u7d71\u5408\u5236\u5fa1<\/h2>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1114\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity.png\" alt=\"Multi-metal CMP slurry process window illustrating trade-offs between MRR, selectivity, and defectivity.\" width=\"1850\" height=\"1031\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271850%27%20height%3D%271031%27%20viewBox%3D%270%200%201850%201031%27%3E%3Crect%20width%3D%271850%27%20height%3D%271031%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-200x111.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-300x167.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-400x223.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-600x334.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-768x428.png 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-800x446.png 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-1024x571.png 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-1200x669.png 1200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-1536x856.png 1536w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity.png 1850w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1850px) 100vw, 1850px\" \/><\/figure>\n<p>\u30e1\u30bf\u30ebCMP\u306e\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u306f\u3001\u4e00\u822c\u7684\u306b\u9178\u5316\u7269CMP\u3088\u308a\u3082\u72ed\u304f\u3001\u3088\u308a\u53b3\u5bc6\u306a\u5316\u5b66\u7684\u30fb\u6a5f\u68b0\u7684\u5236\u5fa1\u304c\u8981\u6c42\u3055\u308c\u308b\u3002.<\/p>\n<p><!-- ================= Section 9 ================= --><\/p>\n<h2 id=\"defects\">9.\u30e1\u30bf\u30ebCMP\u306e\u6b20\u9665\u3068\u6839\u672c\u539f\u56e0\u5206\u6790<\/h2>\n<h3>9.1 \u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3068\u6d78\u98df<\/h3>\n<p>\u91d1\u5c5e\u3068\u5468\u56f2\u306e\u8a98\u96fb\u4f53\u3068\u306e\u9593\u306e\u9664\u53bb\u7387\u306e\u4e0d\u4e00\u81f4\u306b\u3088\u308a\u767a\u751f\u3059\u308b\u3002.<\/p>\n<h3>9.2 \u8150\u98df\u3068\u5b54\u98df<\/h3>\n<p>\u9178\u5316\u5264\u306e\u6fc3\u5ea6\u304c\u9ad8\u3059\u304e\u308b\u304b\u3001\u6291\u5236\u5264\u304c\u5341\u5206\u306b\u884c\u304d\u6e21\u3063\u3066\u3044\u306a\u3044\u3053\u3068\u304c\u539f\u56e0\u3002.<\/p>\n<h3>9.3 \u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306b\u3088\u308b\u50b7<\/h3>\n<p>\u7814\u78e8\u5264\u306e\u51dd\u96c6\u3084\u6ffe\u904e\u306e\u975e\u52b9\u7387\u3092\u4f34\u3046\u3002.<\/p>\n<p><!-- ================= Section 10 ================= --><\/p>\n<h2 id=\"hvm\">10.\u5927\u91cf\u751f\u7523\u306e\u8ab2\u984c<\/h2>\n<p>\u30e1\u30bf\u30ebCMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u30e6\u30cb\u30fc\u30af\u306aHVM\u306e\u8ab2\u984c\u306b\u76f4\u9762\u3057\u3066\u3044\u307e\u3059\uff1a<\/p>\n<ul>\n<li>\u518d\u5faa\u74b0\u4e2d\u306e\u5316\u5b66\u7269\u8cea\u306e\u6e1b\u5c11<\/li>\n<li>\u30d1\u30c3\u30c9\u306e\u30a8\u30fc\u30b8\u30f3\u30b0\u52b9\u679c<\/li>\n<li>\u30c4\u30fc\u30eb\u9593\u306e\u3070\u3089\u3064\u304d<\/li>\n<\/ul>\n<p>\u30b9\u30e9\u30ea\u30fc\u88fd\u5264\u306f\u3001\u9577\u6642\u9593\u306e\u904b\u8ee2\u6761\u4ef6\u4e0b\u3067\u5805\u7262\u6027\u3092\u793a\u3055\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/p>\n<p><!-- ================= Section 11 ================= --><\/p>\n<h2 id=\"selection\">11.\u30e1\u30bf\u30ebCMP\u306e\u305f\u3081\u306e\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u6226\u7565<\/h2>\n<ul>\n<li>\u652f\u914d\u7684\u306a\u9664\u53bb\u30e1\u30ab\u30cb\u30ba\u30e0\u3092\u7279\u5b9a\u3059\u308b<\/li>\n<li>\u9078\u629e\u6027\u306e\u512a\u5148\u9806\u4f4d\u3092\u5b9a\u7fa9\u3059\u308b<\/li>\n<li>\u8150\u98df\u30de\u30fc\u30b8\u30f3\u306e\u691c\u8a3c<\/li>\n<\/ul>\n<p>\u91d1\u5c5e\u7279\u6709\u306e\u30ac\u30a4\u30c0\u30f3\u30b9\u306b\u3064\u3044\u3066\u306f\u3001\u3053\u3061\u3089\u3092\u53c2\u7167\uff1a<\/p>\n<ul>\n<li><a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/copper-cmp-slurry-for-advanced-semiconductor-manufacturing\/\">\u9285CMP\u30b9\u30e9\u30ea\u30fc<\/a><\/li>\n<li><a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/tungsten-cmp-slurry-for-semiconductor-manufacturing\/\">\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc<\/a><\/li>\n<\/ul>\n<p><!-- ================= Section 12 ================= --><\/p>\n<h2 id=\"future\">12.\u30e1\u30bf\u30ebCMP\u30b9\u30e9\u30ea\u30fc\u306e\u5c06\u6765\u52d5\u5411<\/h2>\n<p>\u4eca\u5f8c\u306e\u30e1\u30bf\u30ebCMP\u30b9\u30e9\u30ea\u30fc\u958b\u767a\u306e\u7126\u70b9\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3042\u308b\uff1a<\/p>\n<ul>\n<li>\u5148\u7aef\u76f8\u4e92\u63a5\u7d9a\u306e\u305f\u3081\u306e\u4ee3\u66ff\u91d1\u5c5e<\/li>\n<li>5nm\u4ee5\u4e0b\u306e\u30ce\u30fc\u30c9\u3067\u3088\u308a\u4f4e\u3044\u6b20\u9665\u7387<\/li>\n<li>\u74b0\u5883\u7684\u306b\u6301\u7d9a\u53ef\u80fd\u306a\u5316\u5b66\u7269\u8cea<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; Table of Contents 1. Introduction to Metal CMP 2. Why Metal CMP Is Fundamentally Different 3. Classification of Metal CMP Slurry Types 4. Removal Mechanisms Across Different Metals 5.  &#8230;<\/p>","protected":false},"author":1,"featured_media":1081,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1058","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1058","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1058"}],"version-history":[{"count":5,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1058\/revisions"}],"predecessor-version":[{"id":1115,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1058\/revisions\/1115"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1081"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1058"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1058"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1058"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}