{"id":1060,"date":"2026-01-05T15:56:52","date_gmt":"2026-01-05T07:56:52","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1060"},"modified":"2026-01-05T16:25:16","modified_gmt":"2026-01-05T08:25:16","slug":"cmp-slurry-filtration","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-filtration\/","title":{"rendered":"CMP\u30b9\u30e9\u30ea\u30fc\u308d\u904e"},"content":{"rendered":"<p>&nbsp;<\/p>\n<h2>\u534a\u5c0e\u4f53CMP\u306b\u304a\u3051\u308b\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u5236\u5fa1\u3001\u6b69\u7559\u307e\u308a\u4fdd\u8b77\u3001\u30d7\u30ed\u30bb\u30b9\u5b89\u5b9a\u6027<\/h2>\n<p><!-- ================= TOC ================= --><\/p>\n<nav>\n<h2>\u76ee\u6b21<\/h2>\n<ul>\n<li><a href=\"#introduction\">1.\u306f\u3058\u3081\u306b<\/a><\/li>\n<li><a href=\"#why-filtration-critical\">2.CMP\u306b\u304a\u3044\u3066\u308d\u904e\u304c\u91cd\u8981\u306a\u7406\u7531<\/a><\/li>\n<li><a href=\"#particle-sources\">3.CMP\u30b9\u30e9\u30ea\u30fc\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u7c92\u5b50\u6e90<\/a><\/li>\n<li><a href=\"#particle-defects\">4.\u7c92\u5b50\u5f84\u3068\u6b20\u9665\u30e1\u30ab\u30cb\u30ba\u30e0<\/a><\/li>\n<li><a href=\"#filter-types\">5.CMP\u30b9\u30e9\u30ea\u30fc\u30d5\u30a3\u30eb\u30bf\u30fc\u6280\u8853<\/a><\/li>\n<li><a href=\"#pore-selection\">6.\u30d5\u30a3\u30eb\u30bf\u30fc\u5b54\u5f84\u9078\u629e\u6226\u7565<\/a><\/li>\n<li><a href=\"#chemical-compatibility\">7.\u5316\u5b66\u7684\u9069\u5408\u6027\u3068\u30b9\u30e9\u30ea\u30fc\u306e\u5b89\u5b9a\u6027<\/a><\/li>\n<li><a href=\"#experimental-data\">8.\u5b9f\u9a13\u30c7\u30fc\u30bf\u3068\u308d\u904e\u6027\u80fd<\/a><\/li>\n<li><a href=\"#process-window\">9.\u308d\u904e\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6<\/a><\/li>\n<li><a href=\"#integration\">10.CMP\u30c4\u30fc\u30eb\u3068\u306e\u7d71\u5408<\/a><\/li>\n<li><a href=\"#failure-modes\">11.\u308d\u904e\u306e\u6545\u969c\u30e2\u30fc\u30c9\u3068RCA<\/a><\/li>\n<li><a href=\"#hvm\">12.HVM\u308d\u904e\u6226\u7565<\/a><\/li>\n<li><a href=\"#future\">13.\u4eca\u5f8c\u306e\u52d5\u5411<\/a><\/li>\n<\/ul>\n<\/nav>\n<hr \/>\n<p><!-- ================= Section 1 ================= --><\/p>\n<h2 id=\"introduction\">1.\u306f\u3058\u3081\u306b<\/h2>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u6ffe\u904e\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u6700\u3082\u904e\u5c0f\u8a55\u4fa1\u3055\u308c\u3066\u3044\u308b\u3082\u306e\u306e\u3001\u6b69\u7559\u307e\u308a\u3092\u5de6\u53f3\u3059\u308b\u8981\u7d20\u306e\u4e00\u3064\u3067\u3059\u3002\u30b9\u30e9\u30ea\u30fc\u306e\u914d\u5408\u306f\u5e83\u304f\u6ce8\u76ee\u3055\u308c\u3066\u3044\u307e\u3059\u304c\u3001\u6ffe\u904e\u30b7\u30b9\u30c6\u30e0\u306f\u6700\u7d42\u7684\u306b\u3001\u7814\u78e8\u7c92\u5b50\u304c\u5236\u5fa1\u3055\u308c\u305f\u307e\u307e\u304b\u3001\u6b20\u9665\u306e\u767a\u751f\u6e90\u3068\u306a\u308b\u304b\u3092\u6c7a\u5b9a\u3057\u307e\u3059\u3002.<\/p>\n<p>\u6700\u5148\u7aef\u6280\u8853\u30ce\u30fc\u30c9\u3067\u306f\u3001100nm\u4ee5\u4e0b\u306e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u98db\u6563\u3067\u3055\u3048\u3001\u91d1\u5c5e\u30b9\u30af\u30e9\u30c3\u30c1\u3001\u8a98\u96fb\u4f53\u3048\u3050\u308a\u3001\u30e9\u30a4\u30f3\u30d6\u30ea\u30c3\u30b8\u306a\u3069\u306e\u81f4\u547d\u7684\u306a\u6b20\u9665\u306b\u3064\u306a\u304c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002\u3053\u306e\u3088\u3046\u306b\u3001\u6ffe\u904e\u306f\u5358\u306a\u308b\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u8981\u7d20\u3067\u306f\u306a\u304f\u3001\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u306e\u5909\u6570\u306a\u306e\u3067\u3059\u3002.<\/p>\n<p>\u3053\u306e\u30db\u30ef\u30a4\u30c8\u30da\u30fc\u30d1\u30fc\u306f\u3001\u7c92\u5b50\u7269\u7406\u5b66\u3001\u5316\u5b66\u7684\u5b89\u5b9a\u6027\u3001\u6b20\u9665\u30e1\u30ab\u30cb\u30ba\u30e0\u3001\u5927\u91cf\u751f\u7523\uff08HVM\uff09\u8981\u4ef6\u3092\u95a2\u9023\u4ed8\u3051\u306a\u304c\u3089\u3001CMP\u30b9\u30e9\u30ea\u30fc\u308d\u904e\u306e\u4f53\u7cfb\u7684\u306a\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306e\u67a0\u7d44\u307f\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002.<\/p>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u57fa\u790e\u77e5\u8b58\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u3092\u53c2\u7167\u306e\u3053\u3068\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-for-semiconductor-wafer-polishing\/\">CMP\u30b9\u30e9\u30ea\u30fc-\u534a\u5c0e\u4f53\u7814\u78e8\u6750\u6599<\/a><\/p>\n<p><!-- ================= Section 2 ================= --><\/p>\n<h2 id=\"why-filtration-critical\">2.CMP\u306b\u304a\u3044\u3066\u308d\u904e\u304c\u91cd\u8981\u306a\u7406\u7531<\/h2>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u308d\u904e\u306f\u30013\u3064\u306e\u91cd\u8981\u306a\u6a5f\u80fd\u3092\u679c\u305f\u3059\uff1a<\/p>\n<ul>\n<li>\u904e\u5927\u306a\u7825\u7c92\u51dd\u96c6\u4f53\u306e\u9664\u53bb<\/li>\n<li>\u30b9\u30e9\u30ea\u30fc\u30eb\u30fc\u30d7\u5185\u3067\u767a\u751f\u3059\u308b\u7570\u7269\u306e\u6355\u6349<\/li>\n<li>\u7c92\u5ea6\u5206\u5e03\uff08PSD\uff09\u306e\u5b89\u5b9a\u5316<\/li>\n<\/ul>\n<p>\u4ed6\u306e\u30a6\u30a7\u30c3\u30c8\u30d7\u30ed\u30bb\u30b9\u3068\u306f\u7570\u306a\u308a\u3001CMP\u306f\u30a6\u30a7\u30fc\u30cf\u3001\u30d1\u30c3\u30c9\u3001\u30b9\u30e9\u30ea\u30fc\u9593\u306e\u76f4\u63a5\u7684\u306a\u6a5f\u68b0\u7684\u63a5\u89e6\u4e0b\u3067\u4f5c\u52d5\u3057\u307e\u3059\u3002\u8a2d\u8a08\u3055\u308c\u305f\u7825\u7c92\u30b5\u30a4\u30ba\u3092\u8d85\u3048\u308b\u7c92\u5b50\u306f\u3001\u7814\u78e8\u5264\u304b\u3089\u30b9\u30af\u30e9\u30c3\u30c1\u30c4\u30fc\u30eb\u306b\u79fb\u884c\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1120\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Oversized-particles-causing-localized-stress-concentration-and-scratch-formation-during-CMP.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Oversized-particles-causing-localized-stress-concentration-and-scratch-formation-during-CMP.jpg\" alt=\"Oversized particles causing localized stress concentration and scratch formation during CMP.\" width=\"366\" height=\"200\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27366%27%20height%3D%27200%27%20viewBox%3D%270%200%20366%20200%27%3E%3Crect%20width%3D%27366%27%20height%3D%27200%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Oversized-particles-causing-localized-stress-concentration-and-scratch-formation-during-CMP-200x109.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Oversized-particles-causing-localized-stress-concentration-and-scratch-formation-during-CMP-300x164.jpg 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Oversized-particles-causing-localized-stress-concentration-and-scratch-formation-during-CMP.jpg 366w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 366px) 100vw, 366px\" \/><figcaption>CMP\u4e2d\u306b\u5c40\u6240\u7684\u306a\u5fdc\u529b\u96c6\u4e2d\u3084\u30b9\u30af\u30e9\u30c3\u30c1\u5f62\u6210\u3092\u5f15\u304d\u8d77\u3053\u3059\u904e\u5927\u30b5\u30a4\u30ba\u306e\u7c92\u5b50\u3002.<\/figcaption><\/figure>\n<p><!-- ================= Section 3 ================= --><\/p>\n<h2 id=\"particle-sources\">3.CMP\u30b9\u30e9\u30ea\u30fc\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u7c92\u5b50\u6e90<\/h2>\n<h3>3.1 \u539f\u751f\u7814\u78e8\u5264\u306e\u51dd\u96c6<\/h3>\n<p>\u30b3\u30ed\u30a4\u30c9\u7814\u78e8\u5264\u306f\u71b1\u529b\u5b66\u7684\u306b\u6e96\u5b89\u5b9a\u3067\u3042\u308b\u3002pH\u3001\u30a4\u30aa\u30f3\u5f37\u5ea6\u3001\u305b\u3093\u65ad\u6761\u4ef6\u306e\u5909\u5316\u306f\u51dd\u96c6\u3092\u8a98\u767a\u3059\u308b\u3002.<\/p>\n<h3>3.2 \u5316\u5b66\u6790\u51fa<\/h3>\n<p>CMP\u4e2d\u306b\u6eb6\u89e3\u3057\u305f\u91d1\u5c5e\u30a4\u30aa\u30f3\u306f\u3001\u5c40\u6240\u7684\u306a\u5316\u5b66\u30b7\u30d5\u30c8\u304c\u8d77\u3053\u308b\u3068\u3001\u91d1\u5c5e\u306e\u6c34\u9178\u5316\u7269\u3084\u9178\u5316\u7269\u3068\u3057\u3066\u518d\u6c88\u6bbf\u3059\u308b\u3053\u3068\u304c\u3042\u308b\u3002.<\/p>\n<h3>3.3 \u30e1\u30ab\u30cb\u30ab\u30eb\u30fb\u30b8\u30a7\u30cd\u30ec\u30fc\u30b7\u30e7\u30f3<\/h3>\n<ul>\n<li>\u30d1\u30c3\u30c9\u306e\u7834\u7247<\/li>\n<li>\u5de5\u5177\u6469\u8017\u7c89<\/li>\n<li>\u30dd\u30f3\u30d7\u8a98\u8d77\u305b\u3093\u65ad\u7247<\/li>\n<\/ul>\n<h3>3.4 \u5916\u90e8\u6c5a\u67d3<\/h3>\n<p>\u4e0d\u9069\u5207\u306a\u53d6\u308a\u6271\u3044\u3001\u5bb9\u5668\u306e\u8131\u843d\u3001\u30d5\u30a3\u30eb\u30bf\u30fc\u30cf\u30a6\u30b8\u30f3\u30b0\u306e\u52a3\u5316\u306f\u3001\u7c92\u5b50\u306e\u4fb5\u5165\u306e\u4e00\u56e0\u3068\u306a\u308b\u3002.<\/p>\n<p><!-- ================= Section 4 ================= --><\/p>\n<h2 id=\"particle-defects\">4.\u7c92\u5b50\u5f84\u3068\u6b20\u9665\u30e1\u30ab\u30cb\u30ba\u30e0<\/h2>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u7c92\u5b50\u5f84<\/th>\n<th>\u4e00\u6b21\u6b20\u9665\u30e2\u30fc\u30c9<\/th>\n<th>\u53ce\u91cf\u3078\u306e\u5f71\u97ff<\/th>\n<\/tr>\n<tr>\n<td>&lt; 50 nm<\/td>\n<td>\u8868\u9762\u7c97\u3055<\/td>\n<td>\u4f4e\u3044<\/td>\n<\/tr>\n<tr>\n<td>50-150 nm<\/td>\n<td>\u30de\u30a4\u30af\u30ed\u30b9\u30af\u30e9\u30c3\u30c1<\/td>\n<td>\u4e2d\u7a0b\u5ea6<\/td>\n<\/tr>\n<tr>\n<td>150-300 nm<\/td>\n<td>\u76ee\u306b\u898b\u3048\u308b\u50b7<\/td>\n<td>\u9ad8\u3044<\/td>\n<\/tr>\n<tr>\n<td>&gt; 300 nm<\/td>\n<td>\u30ac\u30a6\u30b8\u30f3\u30b0\u3001\u30e9\u30a4\u30f3\u306e\u640d\u50b7<\/td>\n<td>\u30af\u30ea\u30c6\u30a3\u30ab\u30eb<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u3053\u306e\u95a2\u4fc2\u304c\u3001\u5148\u9032CMP\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u6ffe\u904e\u306e\u6839\u62e0\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n<p><!-- ================= Section 5 ================= --><\/p>\n<h2 id=\"filter-types\">5.CMP\u30b9\u30e9\u30ea\u30fc\u30d5\u30a3\u30eb\u30bf\u30fc\u6280\u8853<\/h2>\n<h3>5.1 \u30c7\u30d7\u30b9\u30d5\u30a3\u30eb\u30bf\u30fc<\/h3>\n<p>\u30c7\u30d7\u30b9\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u3001\u30d5\u30a3\u30eb\u30bf\u30fc\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u5168\u4f53\u3067\u7c92\u5b50\u3092\u6355\u6349\u3057\u3001\u9ad8\u3044\u6c5a\u308c\u4fdd\u6301\u80fd\u529b\u3092\u767a\u63ee\u3057\u307e\u3059\u3002.<\/p>\n<h3>5.2 \u819c\u30d5\u30a3\u30eb\u30bf\u30fc<\/h3>\n<p>\u30e1\u30f3\u30d6\u30ec\u30f3\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u30b7\u30e3\u30fc\u30d7\u306a\u30ab\u30c3\u30c8\u30aa\u30d5\u7279\u6027\u3092\u6301\u3061\u3001\u6700\u7d42\u7684\u306a\u30dd\u30a4\u30f3\u30c8\u30fb\u30aa\u30d6\u30fb\u30e6\u30fc\u30b9\uff08POU\uff09\u308d\u904e\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n<h3>5.3 \u30d7\u30ea\u30fc\u30c4\u30d5\u30a3\u30eb\u30bf\u30fc<\/h3>\n<p>\u30d7\u30ea\u30fc\u30c4\u30c7\u30b6\u30a4\u30f3\u306f\u8868\u9762\u7a4d\u3092\u5897\u3084\u3057\u3001\u5727\u529b\u640d\u5931\u3092\u6e1b\u3089\u3057\u3066\u5bff\u547d\u3092\u5ef6\u3070\u3057\u307e\u3059\u3002.<\/p>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1116\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-depth-membrane-and-pleated-filter-structures.webp\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-depth-membrane-and-pleated-filter-structures.webp\" alt=\"Comparison of depth, membrane, and pleated filter structures.\" width=\"770\" height=\"584\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27770%27%20height%3D%27584%27%20viewBox%3D%270%200%20770%20584%27%3E%3Crect%20width%3D%27770%27%20height%3D%27584%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-depth-membrane-and-pleated-filter-structures-200x152.webp 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-depth-membrane-and-pleated-filter-structures-300x228.webp 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-depth-membrane-and-pleated-filter-structures-400x303.webp 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-depth-membrane-and-pleated-filter-structures-600x455.webp 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-depth-membrane-and-pleated-filter-structures-768x582.webp 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-depth-membrane-and-pleated-filter-structures.webp 770w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 770px) 100vw, 770px\" \/><figcaption>\u30c7\u30d7\u30b9\u3001\u30e1\u30f3\u30d6\u30ec\u30f3\u3001\u30d7\u30ea\u30fc\u30c4\u30d5\u30a3\u30eb\u30bf\u30fc\u69cb\u9020\u306e\u6bd4\u8f03\u3002.<\/figcaption><\/figure>\n<p><!-- ================= Section 6 ================= --><\/p>\n<h2 id=\"pore-selection\">6.\u30d5\u30a3\u30eb\u30bf\u30fc\u5b54\u5f84\u9078\u629e\u6226\u7565<\/h2>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30d7\u30ed\u30bb\u30b9\u30fb\u30ce\u30fc\u30c9<\/th>\n<th>\u7814\u78e8\u6750\u30b5\u30a4\u30ba<\/th>\n<th>\u63a8\u5968\u6bdb\u7a74\u30b5\u30a4\u30ba<\/th>\n<\/tr>\n<tr>\n<td>&gt; 90 nm<\/td>\n<td>100-200 nm<\/td>\n<td>1.0 \u00b5m<\/td>\n<\/tr>\n<tr>\n<td>45-28 nm<\/td>\n<td>50-100 nm<\/td>\n<td>0.5 \u00b5m<\/td>\n<\/tr>\n<tr>\n<td>&lt; 14 nm<\/td>\n<td>30\uff5e70 nm<\/td>\n<td>0.2 \u00b5m<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u904e\u5270\u6ffe\u904e\u306f\u7814\u78e8\u5264\u306e\u67af\u6e07\u3092\u62db\u304d\u3001\u904e\u5c11\u6ffe\u904e\u306f\u6b20\u9665\u3092\u5897\u52a0\u3055\u305b\u308b\u3002.<\/p>\n<p><!-- ================= Section 7 ================= --><\/p>\n<h2 id=\"chemical-compatibility\">7.\u5316\u5b66\u7684\u9069\u5408\u6027\u3068\u30b9\u30e9\u30ea\u30fc\u306e\u5b89\u5b9a\u6027<\/h2>\n<p>\u30d5\u30a3\u30eb\u30bf\u30fc\u6750\u6599\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u6761\u4ef6\u4e0b\u3067\u3082\u5316\u5b66\u7684\u306b\u4e0d\u6d3b\u6027\u3067\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\uff1a<\/p>\n<ul>\n<li>\u9178\u5316\u5264\uff08H<sub>2<\/sub>O<sub>2<\/sub>, \u904e\u786b\u9178\u5869)<\/li>\n<li>\u4f4epH\uff08\u30e1\u30bf\u30ebCMP\uff09<\/li>\n<li>\u30ad\u30ec\u30fc\u30c8\u5264<\/li>\n<\/ul>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30d5\u30a3\u30eb\u30bf\u30fc\u7d20\u6750<\/th>\n<th>\u5316\u5b66\u7684\u9069\u5408\u6027<\/th>\n<th>\u5178\u578b\u7684\u306a\u4f7f\u7528\u4f8b<\/th>\n<\/tr>\n<tr>\n<td>PTFE<\/td>\n<td>\u7d20\u6674\u3089\u3057\u3044<\/td>\n<td>\u30e1\u30bf\u30ebCMP<\/td>\n<\/tr>\n<tr>\n<td>PVDF<\/td>\n<td>\u30b0\u30c3\u30c9<\/td>\n<td>Cu \/ W CMP<\/td>\n<\/tr>\n<tr>\n<td>\u30ca\u30a4\u30ed\u30f3<\/td>\n<td>\u4e2d\u7a0b\u5ea6<\/td>\n<td>\u9178\u5316\u7269CMP<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 8 ================= --><\/p>\n<h2 id=\"experimental-data\">8.\u5b9f\u9a13\u30c7\u30fc\u30bf\u3068\u308d\u904e\u6027\u80fd<\/h2>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1118\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Particle-count-reduction-as-a-function-of-filter-pore-size-in-Cu-CMP-slurry.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Particle-count-reduction-as-a-function-of-filter-pore-size-in-Cu-CMP-slurry.png\" alt=\"Particle count reduction as a function of filter pore size in Cu CMP slurry.\" width=\"1002\" height=\"870\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271002%27%20height%3D%27870%27%20viewBox%3D%270%200%201002%20870%27%3E%3Crect%20width%3D%271002%27%20height%3D%27870%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Particle-count-reduction-as-a-function-of-filter-pore-size-in-Cu-CMP-slurry-200x174.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Particle-count-reduction-as-a-function-of-filter-pore-size-in-Cu-CMP-slurry-300x260.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Particle-count-reduction-as-a-function-of-filter-pore-size-in-Cu-CMP-slurry-400x347.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Particle-count-reduction-as-a-function-of-filter-pore-size-in-Cu-CMP-slurry-600x521.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Particle-count-reduction-as-a-function-of-filter-pore-size-in-Cu-CMP-slurry-768x667.png 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Particle-count-reduction-as-a-function-of-filter-pore-size-in-Cu-CMP-slurry-800x695.png 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Particle-count-reduction-as-a-function-of-filter-pore-size-in-Cu-CMP-slurry.png 1002w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1002px) 100vw, 1002px\" \/><figcaption>\u9285CMP\u30b9\u30e9\u30ea\u30fc\u4e2d\u306e\u30d5\u30a3\u30eb\u30bf\u30fc\u5b54\u5f84\u306e\u95a2\u6570\u3068\u3057\u3066\u306e\u7c92\u5b50\u6570\u6e1b\u5c11\u3002.<\/figcaption><\/figure>\n<p>\u5b9f\u9a13\u30c7\u30fc\u30bf\u306f\u4e00\u8cab\u3057\u3066\u30010.5\u03bcm\u4ee5\u4e0b\u306e\u6ffe\u904e\u304c\u30e1\u30bf\u30ebCMP\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u30b9\u30af\u30e9\u30c3\u30c1\u5bc6\u5ea6\u309270%\u4ee5\u4e0a\u6e1b\u5c11\u3055\u305b\u308b\u3053\u3068\u3092\u793a\u3057\u3066\u3044\u308b\u3002.<\/p>\n<p><!-- ================= Section 9 ================= --><\/p>\n<h2 id=\"process-window\">9.\u308d\u904e\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6<\/h2>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u6ffe\u904e\u306f\u3001\u72ed\u3044\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u306e\u30d0\u30e9\u30f3\u30b7\u30f3\u30b0\u306e\u4e2d\u3067\u904b\u8ee2\u3055\u308c\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\uff1a<\/p>\n<ul>\n<li>\u7c92\u5b50\u9664\u53bb\u52b9\u7387<\/li>\n<li>\u5727\u529b\u964d\u4e0b\u306e\u5b89\u5b9a\u6027<\/li>\n<li>\u30b9\u30e9\u30ea\u30fc\u306e\u5bff\u547d<\/li>\n<\/ul>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1119\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Trade-off-between-pore-size-defectivity-and-slurry-lifetime.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Trade-off-between-pore-size-defectivity-and-slurry-lifetime.png\" alt=\"Trade-off between pore size, defectivity, and slurry lifetime.\" width=\"850\" height=\"826\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27850%27%20height%3D%27826%27%20viewBox%3D%270%200%20850%20826%27%3E%3Crect%20width%3D%27850%27%20height%3D%27826%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Trade-off-between-pore-size-defectivity-and-slurry-lifetime-200x194.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Trade-off-between-pore-size-defectivity-and-slurry-lifetime-300x292.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Trade-off-between-pore-size-defectivity-and-slurry-lifetime-400x389.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Trade-off-between-pore-size-defectivity-and-slurry-lifetime-600x583.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Trade-off-between-pore-size-defectivity-and-slurry-lifetime-768x746.png 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Trade-off-between-pore-size-defectivity-and-slurry-lifetime-800x777.png 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Trade-off-between-pore-size-defectivity-and-slurry-lifetime.png 850w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 850px) 100vw, 850px\" \/><figcaption>\u5b54\u5f84\u3001\u6b20\u9665\u7387\u3001\u30b9\u30e9\u30ea\u30fc\u5bff\u547d\u306e\u30c8\u30ec\u30fc\u30c9\u30aa\u30d5\u3002.<\/figcaption><\/figure>\n<p><!-- ================= Section 10 ================= --><\/p>\n<h2 id=\"integration\">10.CMP\u30c4\u30fc\u30eb\u3068\u306e\u7d71\u5408<\/h2>\n<p>\u6ffe\u904e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u901a\u5e38\u3001\u5404\u6240\u306b\u7d44\u307f\u8fbc\u307e\u308c\u3066\u3044\u308b\uff1a<\/p>\n<ul>\n<li>\u30d0\u30eb\u30af\u30fb\u30b9\u30e9\u30ea\u30fc\u4f9b\u7d66<\/li>\n<li>\u518d\u5faa\u74b0\u30eb\u30fc\u30d7<\/li>\n<li>\u30dd\u30a4\u30f3\u30c8\u30fb\u30aa\u30d6\u30fb\u30e6\u30fc\u30b9\uff08POU\uff09<\/li>\n<\/ul>\n<p>POU\u6ffe\u904e\u306f\u6700\u3082\u76f4\u63a5\u7684\u306b\u6b20\u9665\u3092\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3067\u304d\u308b\u304c\u3001\u983b\u7e41\u306a\u76e3\u8996\u304c\u5fc5\u8981\u3067\u3042\u308b\u3002.<\/p>\n<p><!-- ================= Section 11 ================= --><\/p>\n<h2 id=\"failure-modes\">11.\u308d\u904e\u306e\u6545\u969c\u30e2\u30fc\u30c9\u3068\u6839\u672c\u539f\u56e0\u5206\u6790<\/h2>\n<h3>11.1 \u6025\u6fc0\u306a\u5727\u529b\u640d\u5931\u306e\u5897\u52a0<\/h3>\n<p>\u904e\u5ea6\u306e\u7c92\u5b50\u8ca0\u8377\u307e\u305f\u306f\u30b9\u30e9\u30ea\u30fc\u306e\u4e0d\u5b89\u5b9a\u6027\u3092\u793a\u3059\u3002.<\/p>\n<h3>11.2 \u7a81\u7136\u306e\u30b9\u30af\u30e9\u30c3\u30c1\u30fb\u30a8\u30af\u30b9\u30ab\u30fc\u30b8\u30e7\u30f3<\/h3>\n<p>\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u7834\u88c2\u3084\u30d0\u30a4\u30d1\u30b9\u306e\u6f0f\u308c\u304c\u539f\u56e0\u3067\u3042\u308b\u3053\u3068\u304c\u591a\u3044\u3002.<\/p>\n<h3>11.3 MRR\u30c9\u30ea\u30d5\u30c8<\/h3>\n<p>\u904e\u6ffe\u904e\u3068\u7814\u78e8\u5264\u306e\u67af\u6e07\u3092\u793a\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/p>\n<p><!-- ================= Section 12 ================= --><\/p>\n<h2 id=\"hvm\">12.HVM\u308d\u904e\u6226\u7565<\/h2>\n<ul>\n<li>\u591a\u6bb5\u308d\u904e\u69cb\u9020<\/li>\n<li>\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u5727\u529b\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0<\/li>\n<li>\u5b9a\u671f\u7684\u306a\u30d5\u30a3\u30eb\u30bf\u30fc\u4ea4\u63db<\/li>\n<\/ul>\n<p>HVM\u306e\u6210\u529f\u306f\u3001\u308d\u904e\u3092\u6d88\u8017\u54c1\u3067\u306f\u306a\u304f\u30d7\u30ed\u30bb\u30b9\u5909\u6570\u3068\u3057\u3066\u6271\u3046\u3053\u3068\u306b\u304b\u304b\u3063\u3066\u3044\u308b\u3002.<\/p>\n<p><!-- ================= Section 13 ================= --><\/p>\n<h2 id=\"future\">13.\u4eca\u5f8c\u306e\u52d5\u5411<\/h2>\n<p>\u4eca\u5f8c\u306eCMP\u30b9\u30e9\u30ea\u30fc\u308d\u904e\u306e\u958b\u767a\u306b\u306f\u4ee5\u4e0b\u304c\u542b\u307e\u308c\u308b\uff1a<\/p>\n<ul>\n<li>\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u691c\u77e5\u6a5f\u80fd\u4ed8\u304d\u30b9\u30de\u30fc\u30c8\u30d5\u30a3\u30eb\u30bf\u30fc<\/li>\n<li>\u4f4e\u62bd\u51fa\u7269\u6750\u6599<\/li>\n<li>\u30ce\u30fc\u30c9\u56fa\u6709\u306e\u6ffe\u904e\u57fa\u6e96<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>&nbsp; Particle Control, Yield Protection, and Process Stability in Semiconductor CMP Table of Contents 1. Introduction 2. Why Filtration Is Critical in CMP 3. Particle Sources in CMP Slurry Systems  &#8230;<\/p>","protected":false},"author":1,"featured_media":1082,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1060","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1060","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1060"}],"version-history":[{"count":4,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1060\/revisions"}],"predecessor-version":[{"id":1121,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1060\/revisions\/1121"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1082"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1060"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1060"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1060"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}