{"id":1062,"date":"2026-01-05T15:57:33","date_gmt":"2026-01-05T07:57:33","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1062"},"modified":"2026-01-05T16:28:13","modified_gmt":"2026-01-05T08:28:13","slug":"cmp-slurry-filters","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-filters\/","title":{"rendered":"CMP\u30b9\u30e9\u30ea\u30fc\u30d5\u30a3\u30eb\u30bf\u30fc"},"content":{"rendered":"<p>&nbsp;<\/p>\n<h2>\u534a\u5c0e\u4f53CMP\u306b\u304a\u3051\u308b\u30d5\u30a3\u30eb\u30bf\u30fc\u30e1\u30c7\u30a3\u30a2\u3001\u30cf\u30a6\u30b8\u30f3\u30b0\u8a2d\u8a08\u3001\u304a\u3088\u3073\u4f7f\u7528\u30dd\u30a4\u30f3\u30c8\u5236\u5fa1<\/h2>\n<p><!-- ================= TOC ================= --><\/p>\n<nav>\n<h2>\u76ee\u6b21<\/h2>\n<ul>\n<li><a href=\"#overview\">1.CMP\u30b9\u30e9\u30ea\u30fc\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u6982\u8981<\/a><\/li>\n<li><a href=\"#filter-role\">2.CMP\u53ce\u91cf\u7ba1\u7406\u306b\u304a\u3051\u308b\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u5f79\u5272<\/a><\/li>\n<li><a href=\"#filter-media\">3.\u30d5\u30a3\u30eb\u30bf\u30fc\u30e1\u30c7\u30a3\u30a2\u6750\u6599<\/a><\/li>\n<li><a href=\"#rating\">4.\u7d76\u5bfe\u5b9a\u683c\u3068\u516c\u79f0\u5b9a\u683c<\/a><\/li>\n<li><a href=\"#pore-distribution\">5.\u5b54\u5f84\u5206\u5e03\u3068\u30ab\u30c3\u30c8\u30aa\u30d5\u6319\u52d5<\/a><\/li>\n<li><a href=\"#housing\">6.\u30d5\u30a3\u30eb\u30bf\u30fc\u30cf\u30a6\u30b8\u30f3\u30b0\u306e\u8a2d\u8a08<\/a><\/li>\n<li><a href=\"#pou\">7.\u30dd\u30a4\u30f3\u30c8\u30aa\u30d6\u30e6\u30fc\u30b9\uff08POU\uff09\u308d\u904e<\/a><\/li>\n<li><a href=\"#chemical\">8.\u5316\u5b66\u7684\u9069\u5408\u6027\u3068\u62bd\u51fa\u7269<\/a><\/li>\n<li><a href=\"#performance\">9.\u6027\u80fd\u30c7\u30fc\u30bf\u3068\u30e9\u30a4\u30d5\u30bf\u30a4\u30e0\u30e2\u30c7\u30ea\u30f3\u30b0<\/a><\/li>\n<li><a href=\"#failure\">10.\u6545\u969c\u30e2\u30fc\u30c9\u3068\u6839\u672c\u539f\u56e0\u5206\u6790<\/a><\/li>\n<li><a href=\"#hvm\">11.HVM\u30d5\u30a3\u30eb\u30bf\u30fc\u7ba1\u7406\u6226\u7565<\/a><\/li>\n<li><a href=\"#selection\">12.CMP\u30b9\u30e9\u30ea\u30fc\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u9078\u3073\u65b9<\/a><\/li>\n<li><a href=\"#future\">13.\u4eca\u5f8c\u306e\u52d5\u5411<\/a><\/li>\n<\/ul>\n<\/nav>\n<hr \/>\n<p><!-- ================= Section 1 ================= --><\/p>\n<h2 id=\"overview\">1.CMP\u30b9\u30e9\u30ea\u30fc\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u6982\u8981<\/h2>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u4f9b\u7d66\u30b7\u30b9\u30c6\u30e0\u304b\u3089\u7c97\u5927\u7c92\u5b50\u3001\u51dd\u96c6\u4f53\u3001\u7570\u7269\u306a\u3069\u3092\u9664\u53bb\u3059\u308b\u305f\u3081\u306b\u8a2d\u8a08\u3055\u308c\u305f\u7cbe\u5bc6\u90e8\u54c1\u3067\u3059\u3002\u4e00\u822c\u7684\u306a\u6db2\u4f53\u6ffe\u904e\u3068\u306f\u7570\u306a\u308a\u3001CMP\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u3001\u8d85\u4f4e\u6b20\u9665\u7387\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u3001\u5316\u5b66\u7684\u306b\u30a2\u30b0\u30ec\u30c3\u30b7\u30d6\u306a\u74b0\u5883\u4e0b\u3067\u4f5c\u52d5\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n<p>\u6700\u5148\u7aef\u306e\u534a\u5c0e\u4f53\u30ce\u30fc\u30c9\u3067\u306f\u3001\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u3082\u306f\u3084\u53d7\u52d5\u7684\u306a\u6d88\u8017\u54c1\u3067\u306f\u306a\u304f\u3001\u80fd\u52d5\u7684\u306a\u6b69\u7559\u307e\u308a\u5411\u4e0a\u88c5\u7f6e\u3067\u3042\u308b\u3002.<\/p>\n<p>\u30b9\u30e9\u30ea\u30fc\u306e\u57fa\u790e\u77e5\u8b58\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u3092\u53c2\u7167\u306e\u3053\u3068\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-for-semiconductor-wafer-polishing\/\">CMP\u30b9\u30e9\u30ea\u30fc\u30ca\u30ec\u30c3\u30b8\u30cf\u30d6<\/a><\/p>\n<p><!-- ================= Section 2 ================= --><\/p>\n<h2 id=\"filter-role\">2.CMP\u53ce\u91cf\u7ba1\u7406\u306b\u304a\u3051\u308b\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u5f79\u5272<\/h2>\n<p>\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u30013\u3064\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\u3092\u901a\u3058\u3066CMP\u306e\u6027\u80fd\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\uff1a<\/p>\n<ul>\n<li>\u7c92\u5ea6\u5206\u5e03\u306e\u5b89\u5b9a\u5316<\/li>\n<li>\u30b9\u30af\u30e9\u30c3\u30c1\u8a98\u767a\u7c92\u5b50\u306e\u6291\u5236<\/li>\n<li>\u30b7\u30b9\u30c6\u30e0\u304b\u3089\u767a\u751f\u3059\u308b\u6c5a\u67d3\u304b\u3089\u306e\u4fdd\u8b77<\/li>\n<\/ul>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1122\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield.webp\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield.webp\" alt=\"Correlation between slurry filtration efficiency and wafer yield.\" width=\"1200\" height=\"600\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271200%27%20height%3D%27600%27%20viewBox%3D%270%200%201200%20600%27%3E%3Crect%20width%3D%271200%27%20height%3D%27600%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-200x100.webp 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-300x150.webp 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-400x200.webp 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-600x300.webp 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-768x384.webp 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-800x400.webp 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-1024x512.webp 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield.webp 1200w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1200px) 100vw, 1200px\" \/><figcaption>\u30b9\u30e9\u30ea\u30fc\u6ffe\u904e\u52b9\u7387\u3068\u30a6\u30a7\u30cf\u30fc\u6b69\u7559\u307e\u308a\u306e\u76f8\u95a2\u3002.<\/figcaption><\/figure>\n<p><!-- ================= Section 3 ================= --><\/p>\n<h2 id=\"filter-media\">3.\u30d5\u30a3\u30eb\u30bf\u30fc\u30e1\u30c7\u30a3\u30a2\u6750\u6599<\/h2>\n<h3>3.1 PTFE\uff08\u30dd\u30ea\u30c6\u30c8\u30e9\u30d5\u30eb\u30aa\u30ed\u30a8\u30c1\u30ec\u30f3\uff09<\/h3>\n<p>PTFE\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u8010\u85ac\u54c1\u6027\u306b\u512a\u308c\u3001\u62bd\u51fa\u7269\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u305f\u3081\u3001\u91d1\u5c5eCMP\u30d7\u30ed\u30bb\u30b9\u306b\u6700\u9069\u3067\u3059\u3002.<\/p>\n<h3>3.2 PVDF\uff08\u30dd\u30ea\u30d5\u30c3\u5316\u30d3\u30cb\u30ea\u30c7\u30f3\uff09<\/h3>\n<p>PVDF\u306f\u5316\u5b66\u7684\u9069\u5408\u6027\u3068\u6a5f\u68b0\u7684\u5f37\u5ea6\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002.<\/p>\n<h3>3.3 \u30ca\u30a4\u30ed\u30f3<\/h3>\n<p>\u30ca\u30a4\u30ed\u30f3\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u9178\u5316\u7269CMP\u3067\u306f\u4e00\u822c\u7684\u306b\u4f7f\u7528\u3055\u308c\u308b\u304c\u3001\u4f4epH\u306e\u91d1\u5c5e\u7528\u9014\u3067\u306f\u9650\u754c\u304c\u3042\u308b\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u7d20\u6750<\/th>\n<th>\u8010\u85ac\u54c1\u6027<\/th>\n<th>\u62bd\u51fa\u7269<\/th>\n<th>\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/th>\n<\/tr>\n<tr>\n<td>PTFE<\/td>\n<td>\u7d20\u6674\u3089\u3057\u3044<\/td>\n<td>\u30a6\u30eb\u30c8\u30e9\u30fb\u30ed\u30fc<\/td>\n<td>Cu \/ W CMP<\/td>\n<\/tr>\n<tr>\n<td>PVDF<\/td>\n<td>\u975e\u5e38\u306b\u826f\u3044<\/td>\n<td>\u4f4e\u3044<\/td>\n<td>\u30e1\u30bf\u30ebCMP<\/td>\n<\/tr>\n<tr>\n<td>\u30ca\u30a4\u30ed\u30f3<\/td>\n<td>\u4e2d\u7a0b\u5ea6<\/td>\n<td>\u4e2d\u7a0b\u5ea6<\/td>\n<td>\u9178\u5316\u7269CMP<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 4 ================= --><\/p>\n<h2 id=\"rating\">4.\u7d76\u5bfe\u5b9a\u683c\u3068\u516c\u79f0\u5b9a\u683c<\/h2>\n<p>\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u5b54\u5f84\u306f\u3001\u6b20\u9665\u7387\u3068\u30b9\u30e9\u30ea\u30fc\u306e\u5bff\u547d\u306b\u76f4\u63a5\u5f71\u97ff\u3059\u308b\u3002.<\/p>\n<ul>\n<li><strong>\u516c\u79f0\u5b9a\u683c\uff1a<\/strong> \u6307\u5b9a\u3055\u308c\u305f\u30b5\u30a4\u30ba\u306e\u7c92\u5b50\u306e\u30d1\u30fc\u30bb\u30f3\u30c6\u30fc\u30b8\u3092\u6355\u6349\u3059\u308b<\/li>\n<li><strong>\u7d76\u5bfe\u8a55\u4fa1\uff1a<\/strong> \u898f\u5b9a\u30b5\u30a4\u30ba\u4ee5\u4e0a\u306e\u307b\u307c\u5b8c\u5168\u306a\u9664\u53bb\u3092\u4fdd\u8a3c<\/li>\n<\/ul>\n<p>CMP\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u7d76\u5bfe\u5b9a\u683c\u30d5\u30a3\u30eb\u30bf\u30fc\u304c\u5f37\u304f\u652f\u6301\u3055\u308c\u308b\u3002.<\/p>\n<p><!-- ================= Section 5 ================= --><\/p>\n<h2 id=\"pore-distribution\">5.\u5b54\u5f84\u5206\u5e03\u3068\u30ab\u30c3\u30c8\u30aa\u30d5\u6319\u52d5<\/h2>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1124\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity.jpg\" alt=\"Comparison of sharp vs broad pore size distribution and its impact on CMP defectivity.\" width=\"754\" height=\"842\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27754%27%20height%3D%27842%27%20viewBox%3D%270%200%20754%20842%27%3E%3Crect%20width%3D%27754%27%20height%3D%27842%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity-200x223.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity-269x300.jpg 269w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity-400x447.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity-600x670.jpg 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity.jpg 754w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 754px) 100vw, 754px\" \/><figcaption>\u30b7\u30e3\u30fc\u30d7\u306a\u5b54\u5f84\u5206\u5e03\u3068\u30d6\u30ed\u30fc\u30c9\u306a\u5b54\u5f84\u5206\u5e03\u306e\u6bd4\u8f03\u3068CMP\u6b20\u9665\u3078\u306e\u5f71\u97ff\u3002.<\/figcaption><\/figure>\n<p>\u30b7\u30e3\u30fc\u30d7\u306a\u30ab\u30c3\u30c8\u30aa\u30d5\u6319\u52d5\u306f\u3001\u5927\u7c92\u5b50\u306e\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u306e\u78ba\u7387\u3092\u4e0b\u3052\u308b\u3002.<\/p>\n<p><!-- ================= Section 6 ================= --><\/p>\n<h2 id=\"housing\">6.\u30d5\u30a3\u30eb\u30bf\u30fc\u30cf\u30a6\u30b8\u30f3\u30b0\u306e\u8a2d\u8a08<\/h2>\n<h3>6.1 \u4f4f\u5b85\u8cc7\u6750<\/h3>\n<ul>\n<li>\u30d5\u30c3\u7d20\u6a39\u8102\uff08PFA\uff09<\/li>\n<li>\u9ad8\u7d14\u5ea6\u30dd\u30ea\u30d7\u30ed\u30d4\u30ec\u30f3<\/li>\n<\/ul>\n<h3>6.2 \u6d41\u8def\u306e\u6700\u9069\u5316<\/h3>\n<p>\u30cf\u30a6\u30b8\u30f3\u30b0\u5185\u90e8\u306e\u30c7\u30c3\u30c9\u30be\u30fc\u30f3\u306f\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u84c4\u7a4d\u3068\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u306e\u30ea\u30b9\u30af\u3092\u5897\u5927\u3055\u305b\u308b\u3002.<\/p>\n<p><!-- ================= Section 7 ================= --><\/p>\n<h2 id=\"pou\">7.\u30dd\u30a4\u30f3\u30c8\u30aa\u30d6\u30e6\u30fc\u30b9\uff08POU\uff09\u308d\u904e<\/h2>\n<p>POU\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u304c\u7422\u78e8\u30d1\u30c3\u30c9\u306b\u5230\u9054\u3059\u308b\u76f4\u524d\u306b\u6700\u7d42\u7684\u306a\u7c92\u5b50\u5236\u5fa1\u3092\u884c\u3044\u307e\u3059\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u6240\u5728\u5730<\/th>\n<th>\u30d9\u30cd\u30d5\u30a3\u30c3\u30c8<\/th>\n<th>\u30ea\u30b9\u30af<\/th>\n<\/tr>\n<tr>\n<td>\u30d0\u30eb\u30af\u4f9b\u7d66<\/td>\n<td>\u5927\u5bb9\u91cf<\/td>\n<td>\u4e0b\u6d41\u306e\u6c5a\u67d3<\/td>\n<\/tr>\n<tr>\n<td>\u518d\u5faa\u74b0\u30eb\u30fc\u30d7<\/td>\n<td>\u5b89\u5b9a\u6027<\/td>\n<td>\u5bfe\u5fdc\u306e\u9045\u308c<\/td>\n<\/tr>\n<tr>\n<td>POU<\/td>\n<td>\u6700\u5927\u9650\u306e\u6b20\u9665\u7ba1\u7406<\/td>\n<td>\u983b\u7e41\u306a\u4ea4\u63db<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 8 ================= --><\/p>\n<h2 id=\"chemical\">8.\u5316\u5b66\u7684\u9069\u5408\u6027\u3068\u62bd\u51fa\u7269<\/h2>\n<p>\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u30a4\u30aa\u30f3\u6c5a\u67d3\u3084\u6709\u6a5f\u6eb6\u51fa\u7269\u3092\u5c0e\u5165\u3057\u3066\u306f\u306a\u3089\u306a\u3044\u3002.<\/p>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1125\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters.png\" alt=\"TOC and metal ion extractables testing for CMP slurry filters.\" width=\"990\" height=\"670\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27990%27%20height%3D%27670%27%20viewBox%3D%270%200%20990%20670%27%3E%3Crect%20width%3D%27990%27%20height%3D%27670%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters-200x135.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters-300x203.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters-400x271.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters-600x406.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters-768x520.png 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters-800x541.png 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters.png 990w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 990px) 100vw, 990px\" \/><figcaption>CMP\u30b9\u30e9\u30ea\u30fc\u30d5\u30a3\u30eb\u30bf\u30fc\u306eTOC\u304a\u3088\u3073\u91d1\u5c5e\u30a4\u30aa\u30f3\u62bd\u51fa\u7269\u8a66\u9a13\u3002.<\/figcaption><\/figure>\n<p><!-- ================= Section 9 ================= --><\/p>\n<h2 id=\"performance\">9.\u6027\u80fd\u30c7\u30fc\u30bf\u3068\u30e9\u30a4\u30d5\u30bf\u30a4\u30e0\u30e2\u30c7\u30ea\u30f3\u30b0<\/h2>\n<p>\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u5bff\u547d\u306f\u3001\u4ee5\u4e0b\u306e\u6761\u4ef6\u306b\u3088\u3063\u3066\u6c7a\u307e\u308b\uff1a<\/p>\n<ul>\n<li>\u30b9\u30e9\u30ea\u30fc\u7c92\u5b50\u8ca0\u8377<\/li>\n<li>\u51dd\u96c6\u50be\u5411<\/li>\n<li>\u6d41\u91cf\u3068\u305b\u3093\u65ad\u5fdc\u529b<\/li>\n<\/ul>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30d5\u30a3\u30eb\u30bf\u30fc\u30b5\u30a4\u30ba<\/th>\n<th>\u5b54\u5f84<\/th>\n<th>\u4e00\u822c\u7684\u306a\u5bff\u547d<\/th>\n<\/tr>\n<tr>\n<td>10\u30a4\u30f3\u30c1<\/td>\n<td>0.2 \u00b5m<\/td>\n<td>300\uff5e500\u679a<\/td>\n<\/tr>\n<tr>\n<td>20\u30a4\u30f3\u30c1<\/td>\n<td>0.5 \u00b5m<\/td>\n<td>800\uff5e1200\u679a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 10 ================= --><\/p>\n<h2 id=\"failure\">10.\u6545\u969c\u30e2\u30fc\u30c9\u3068\u6839\u672c\u539f\u56e0\u5206\u6790<\/h2>\n<h3>10.1 \u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u7834\u88c2<\/h3>\n<p>\u904e\u5ea6\u306e\u5727\u529b\u5dee\u304c\u539f\u56e0\u3002.<\/p>\n<h3>10.2 \u30c1\u30e3\u30cd\u30ea\u30f3\u30b0<\/h3>\n<p>\u7c92\u5b50\u306e\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u306b\u3064\u306a\u304c\u308b\u4e0d\u5747\u4e00\u306a\u6d41\u308c\u3002.<\/p>\n<h3>10.3 \u5316\u5b66\u7684\u52a3\u5316<\/h3>\n<p>\u7e4a\u7dad\u306e\u8131\u843d\u3084\u6c5a\u67d3\u306b\u3064\u306a\u304c\u308b\u3002.<\/p>\n<p><!-- ================= Section 11 ================= --><\/p>\n<h2 id=\"hvm\">11.HVM\u30d5\u30a3\u30eb\u30bf\u30fc\u7ba1\u7406\u6226\u7565<\/h2>\n<ul>\n<li>\u5727\u529b\u964d\u4e0b\u306e\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0<\/li>\n<li>\u30a6\u30a7\u30fc\u30cf\u30ab\u30a6\u30f3\u30c8\u306b\u57fa\u3065\u304f\u4ea4\u63db<\/li>\n<li>\u7740\u4fe1\u30d5\u30a3\u30eb\u30bf\u30fc\u8cc7\u683c<\/li>\n<\/ul>\n<p>HVM\u3067\u306f\u3001\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u6d88\u8017\u54c1\u3067\u306f\u306a\u304f\u3001\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u88c5\u7f6e\u3068\u3057\u3066\u6271\u308f\u308c\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/p>\n<p><!-- ================= Section 12 ================= --><\/p>\n<h2 id=\"selection\">12.CMP\u30b9\u30e9\u30ea\u30fc\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u9078\u3073\u65b9<\/h2>\n<p>\u4e3b\u306a\u9078\u8003\u57fa\u6e96<\/p>\n<ul>\n<li>\u30b9\u30e9\u30ea\u30fc\u5316\u5b66\u9069\u5408\u6027<\/li>\n<li>\u5fc5\u8981\u306a\u7c92\u5b50\u30ab\u30c3\u30c8\u30aa\u30d5<\/li>\n<li>\u30c4\u30fc\u30eb\u7d71\u5408\u306e\u5236\u7d04<\/li>\n<li>\u6240\u6709\u30b3\u30b9\u30c8\uff08CoO\uff09<\/li>\n<\/ul>\n<p>\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u914d\u5408\u3068CMP\u30d1\u30c3\u30c9\u306e\u7279\u6027\u306b\u5408\u308f\u305b\u3066\u6700\u9069\u5316\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002.<\/p>\n<p><!-- ================= Section 13 ================= --><\/p>\n<h2 id=\"future\">13.\u4eca\u5f8c\u306e\u52d5\u5411<\/h2>\n<p>\u65b0\u305f\u306a\u30c8\u30ec\u30f3\u30c9\u3068\u3057\u3066\u306f\u4ee5\u4e0b\u304c\u6319\u3052\u3089\u308c\u308b\uff1a<\/p>\n<ul>\n<li>\u7d71\u5408\u7c92\u5b50\u30bb\u30f3\u30b5\u30fc<\/li>\n<li>\u4f4e\u62bd\u51fa\u6027\u30dd\u30ea\u30de\u30fc<\/li>\n<li>\u30ce\u30fc\u30c9\u56fa\u6709\u306e\u30d5\u30a3\u30eb\u30bf\u30fc\u898f\u683c<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; Filter Media, Housing Design, and Point-of-Use Control in Semiconductor CMP Table of Contents 1. Overview of CMP Slurry Filters 2. Role of Filters in CMP Yield Control 3. Filter  &#8230;<\/p>","protected":false},"author":1,"featured_media":1083,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1062","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1062","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1062"}],"version-history":[{"count":4,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1062\/revisions"}],"predecessor-version":[{"id":1126,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1062\/revisions\/1126"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1083"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1062"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1062"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1062"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}