{"id":1066,"date":"2026-01-05T15:58:35","date_gmt":"2026-01-05T07:58:35","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1066"},"modified":"2026-01-05T16:34:14","modified_gmt":"2026-01-05T08:34:14","slug":"how-to-choose-cmp-slurry","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/how-to-choose-cmp-slurry\/","title":{"rendered":"CMP\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u3073\u65b9"},"content":{"rendered":"<p>&nbsp;<\/p>\n<h2>\u534a\u5c0e\u4f53\u30a6\u30a7\u30cf\u30fc\u7814\u78e8\u306e\u305f\u3081\u306e\u6280\u8853\u30ec\u30d9\u30eb\u306e\u610f\u601d\u6c7a\u5b9a\u30d5\u30ec\u30fc\u30e0\u30ef\u30fc\u30af<\/h2>\n<p><!-- ================= TOC ================= --><\/p>\n<nav>\n<h2>\u76ee\u6b21<\/h2>\n<ul>\n<li><a href=\"#intro\">1.\u306f\u3058\u3081\u306b<\/a><\/li>\n<li><a href=\"#first-principles\">2.\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u306e\u7b2c\u4e00\u539f\u7406\u7684\u30a2\u30d7\u30ed\u30fc\u30c1<\/a><\/li>\n<li><a href=\"#material\">3.\u30a6\u30a7\u30fc\u30cf\u6750\u6599\u306b\u95a2\u3059\u308b\u8003\u5bdf<\/a><\/li>\n<li><a href=\"#slurry-type\">4.\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u3092CMP\u30d7\u30ed\u30bb\u30b9\u306b\u5408\u308f\u305b\u308b<\/a><\/li>\n<li><a href=\"#performance-metrics\">5.\u4e3b\u8981\u696d\u7e3e\u8a55\u4fa1\u6307\u6a19<\/a><\/li>\n<li><a href=\"#process-window\">6.\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u3068\u30de\u30fc\u30b8\u30f3\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0<\/a><\/li>\n<li><a href=\"#pad\">7.CMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30fb\u30d1\u30c3\u30c9\u3068\u306e\u4e92\u63db\u6027<\/a><\/li>\n<li><a href=\"#defectivity\">8.\u6b20\u9665\u3068\u6b69\u7559\u307e\u308a\u30ea\u30b9\u30af\u8a55\u4fa1<\/a><\/li>\n<li><a href=\"#tool\">9.CMP\u30c4\u30fc\u30eb\u3068\u30c7\u30ea\u30d0\u30ea\u30fc\u30b7\u30b9\u30c6\u30e0\u306e\u5236\u7d04<\/a><\/li>\n<li><a href=\"#hvm\">10.\u5927\u91cf\u751f\u7523\uff08HVM\uff09\u306b\u95a2\u3059\u308b\u8003\u5bdf<\/a><\/li>\n<li><a href=\"#mistakes\">11.\u3088\u304f\u3042\u308bCMP\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u306e\u9593\u9055\u3044<\/a><\/li>\n<li><a href=\"#qualification\">12.\u30af\u30aa\u30ea\u30d5\u30a3\u30b1\u30fc\u30b7\u30e7\u30f3\uff06\u30e9\u30f3\u30d7\u30a2\u30c3\u30d7\u6226\u7565<\/a><\/li>\n<li><a href=\"#summary\">13.\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30b5\u30de\u30ea\u30fc<\/a><\/li>\n<\/ul>\n<\/nav>\n<hr \/>\n<p><!-- ================= Section 1 ================= --><\/p>\n<h2 id=\"intro\">1.\u306f\u3058\u3081\u306b<\/h2>\n<p>\u9069\u5207\u306aCMP\u30b9\u30e9\u30ea\u30fc\u3092\u9078\u629e\u3059\u308b\u3053\u3068\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u6700\u3082\u91cd\u8981\u306a\u6c7a\u5b9a\u306e\u4e00\u3064\u3067\u3059\u3002\u591a\u304f\u306e\u6d88\u8017\u54c1\u3068\u306f\u7570\u306a\u308a\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u306f\u3001\u6750\u6599\u9664\u53bb\u7387\uff08MRR\uff09\u3001\u5747\u4e00\u6027\u3001\u6b20\u9665\u7387\u3001\u6b69\u7559\u307e\u308a\u3001\u6240\u6709\u30b3\u30b9\u30c8\u306b\u76f4\u63a5\u5f71\u97ff\u3057\u307e\u3059\u3002.<\/p>\n<p>\u9ad8\u5ea6\u306a\u30ce\u30fc\u30c9\u3067\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u304c\u4e0d\u9069\u5207\u3060\u3068\u3001\u81f4\u547d\u7684\u306a\u7834\u640d\u304c\u76ee\u306b\u898b\u3048\u308b\u3088\u3046\u306b\u306a\u308b\u305a\u3063\u3068\u524d\u306b\u3001\u6b69\u7559\u307e\u308a\u304c\u9759\u304b\u306b\u4f4e\u4e0b\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/p>\n<p>\u672c\u66f8\u306f\u3001\u6750\u6599\u79d1\u5b66\u3001\u30d7\u30ed\u30bb\u30b9\u7d71\u5408\u3001\u88fd\u9020\u306e\u73fe\u5b9f\u306b\u57fa\u3065\u3044\u3066CMP\u30b9\u30e9\u30ea\u30fc\u3092\u9078\u629e\u3059\u308b\u305f\u3081\u306e\u3001\u69cb\u9020\u5316\u3055\u308c\u305f\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u4e3b\u5c0e\u306e\u65b9\u6cd5\u8ad6\u3092\u63d0\u4f9b\u3059\u308b\u3082\u306e\u3067\u3042\u308b\u3002.<\/p>\n<p>\u30b9\u30e9\u30ea\u30fc\u306e\u57fa\u790e\u77e5\u8b58\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u3092\u53c2\u7167\u306e\u3053\u3068\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-for-semiconductor-wafer-polishing\/\"><strong>\u534a\u5c0e\u4f53\u88fd\u9020\u7528CMP\u30b9\u30e9\u30ea\u30fc<\/strong><\/a><\/p>\n<p><!-- ================= Section 2 ================= --><\/p>\n<h2 id=\"first-principles\">2.\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u306e\u7b2c\u4e00\u539f\u7406\u7684\u30a2\u30d7\u30ed\u30fc\u30c1<\/h2>\n<p>CMP\u306f\u3001\u4ee5\u4e0b\u306e\u76f8\u4e57\u7684\u76f8\u4e92\u4f5c\u7528\u306b\u3088\u3063\u3066\u652f\u914d\u3055\u308c\u3066\u3044\u308b\uff1a<\/p>\n<ul>\n<li>\u6a5f\u68b0\u7684\u6469\u8017<\/li>\n<li>\u5316\u5b66\u53cd\u5fdc<\/li>\n<li>\u6d41\u4f53\u529b\u5b66\u7684\u8f38\u9001<\/li>\n<\/ul>\n<p>\u3057\u305f\u304c\u3063\u3066\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u306f\u3001\u88fd\u54c1\u30ab\u30bf\u30ed\u30b0\u3067\u306f\u306a\u304f\u3001\u7b2c\u4e00\u539f\u5247\u304b\u3089\u59cb\u3081\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/p>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1132\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal.jpg\" alt=\"First-principles framework linking slurry chemistry and mechanical removal.\" width=\"716\" height=\"192\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27716%27%20height%3D%27192%27%20viewBox%3D%270%200%20716%20192%27%3E%3Crect%20width%3D%27716%27%20height%3D%27192%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal-200x54.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal-300x80.jpg 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal-400x107.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal-600x161.jpg 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal.jpg 716w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 716px) 100vw, 716px\" \/><\/figure>\n<p><!-- ================= Section 3 ================= --><\/p>\n<h2 id=\"material\">3.\u30a6\u30a7\u30fc\u30cf\u6750\u6599\u306b\u95a2\u3059\u308b\u8003\u5bdf<\/h2>\n<p>\u6750\u6599\u304c\u7570\u306a\u308c\u3070\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u5316\u5b66\u7684\u6027\u8cea\u3082\u6839\u672c\u7684\u306b\u7570\u306a\u308b\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u7d20\u6750<\/th>\n<th>\u4e3b\u8981\u8ab2\u984c<\/th>\n<th>\u597d\u307e\u3057\u3044\u30b9\u30e9\u30ea\u30fc\u306e\u7279\u5fb4<\/th>\n<\/tr>\n<tr>\n<td>SiO\u2082<\/td>\n<td>\u30e6\u30cb\u30d5\u30a9\u30fc\u30e0\u64a4\u53bb<\/td>\n<td>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u3001\u30a2\u30eb\u30ab\u30ea\u6027pH<\/td>\n<\/tr>\n<tr>\n<td>\u9285<\/td>\n<td>\u98df\u50b7\u3068\u8150\u98df<\/td>\n<td>\u9178\u5316\u5236\u5fa1\u3001\u6291\u5236\u5264<\/td>\n<\/tr>\n<tr>\n<td>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3<\/td>\n<td>\u786c\u5ea6<\/td>\n<td>\u5f37\u9178\u5316\u5264\u3001\u30a2\u30eb\u30df\u30ca<\/td>\n<\/tr>\n<tr>\n<td>\u30d0\u30ea\u30a2\u5c64<\/td>\n<td>\u9078\u629e\u6027<\/td>\n<td>\u4f4eMRR\u3001\u9ad8\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6750\u6599\u9078\u629e\u30ed\u30b8\u30c3\u30af\u306f\u3001\u6700\u4e0a\u5c64\u3060\u3051\u3067\u306a\u304f\u3001\u4e0b\u5c64\u3084\u96a3\u63a5\u3059\u308b\u819c\u3082\u8003\u616e\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/p>\n<p><!-- ================= Section 4 ================= --><\/p>\n<h2 id=\"slurry-type\">4.\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u3092CMP\u30d7\u30ed\u30bb\u30b9\u306b\u5408\u308f\u305b\u308b<\/h2>\n<p>\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u306f\u3001CMP\u30b9\u30c6\u30c3\u30d7\u306e\u76ee\u7684\u306b\u5408\u81f4\u3057\u3066\u3044\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/p>\n<ul>\n<li>\u30d0\u30eb\u30af\u9664\u53bb<\/li>\n<li>\u30af\u30ea\u30a2\u30b9\u30c6\u30c3\u30d7<\/li>\n<li>\u30d0\u30ea\u30a2\u30dd\u30ea\u30c3\u30b7\u30e5<\/li>\n<\/ul>\n<p>\u30d0\u30ea\u30a2\u30b9\u30c6\u30c3\u30d7\u306b\u9ad8RR\u30b9\u30e9\u30ea\u30fc\u3092\u4f7f\u3046\u306e\u306f\u3001\u3088\u304f\u3042\u308b\u3053\u3068\u3060\u304c\u3001\u30b3\u30b9\u30c8\u306e\u304b\u304b\u308b\u9593\u9055\u3044\u3060\u3002.<\/p>\n<p>\u53c2\u8003\u307e\u3067\u306b\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-types-explained\/\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e<\/a><\/p>\n<p><!-- ================= Section 5 ================= --><\/p>\n<h2 id=\"performance-metrics\">5.\u4e3b\u8981\u696d\u7e3e\u8a55\u4fa1\u6307\u6a19<\/h2>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30e1\u30fc\u30c8\u30eb<\/th>\n<th>\u306a\u305c\u91cd\u8981\u306a\u306e\u304b<\/th>\n<th>\u5178\u578b\u7684\u306a\u7bc4\u56f2<\/th>\n<\/tr>\n<tr>\n<td>MRR<\/td>\n<td>\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8<\/td>\n<td>100-5000 \u00c5\/\u5206<\/td>\n<\/tr>\n<tr>\n<td>WIWNU<\/td>\n<td>\u5747\u4e00\u6027<\/td>\n<td>&lt; 5%<\/td>\n<\/tr>\n<tr>\n<td>\u30b9\u30af\u30e9\u30c3\u30c1\u5bc6\u5ea6<\/td>\n<td>\u53ce\u91cf<\/td>\n<td>&lt; 0.1\/cm\u00b2<\/td>\n<\/tr>\n<tr>\n<td>\u9078\u629e\u6027<\/td>\n<td>\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u5236\u5fa1<\/td>\n<td>&gt; 5:1<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 6 ================= --><\/p>\n<h2 id=\"process-window\">6.\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u3068\u30de\u30fc\u30b8\u30f3\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0<\/h2>\n<p>\u6700\u9069\u306a\u30b9\u30e9\u30ea\u30fc\u3068\u306f\u3001\u6700\u9ad8\u306e\u30d4\u30fc\u30af\u6027\u80fd\u3092\u6301\u3064\u3082\u306e\u3067\u306f\u306a\u304f\u3001\u6700\u3082\u5b89\u5b9a\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u3092\u6301\u3064\u3082\u306e\u3067\u3042\u308b\u3002.<\/p>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1134\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process.webp\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process.webp\" alt=\"CMP slurry process\" width=\"1200\" height=\"1033\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271200%27%20height%3D%271033%27%20viewBox%3D%270%200%201200%201033%27%3E%3Crect%20width%3D%271200%27%20height%3D%271033%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-200x172.webp 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-300x258.webp 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-400x344.webp 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-600x517.webp 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-768x661.webp 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-800x689.webp 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-1024x881.webp 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process.webp 1200w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1200px) 100vw, 1200px\" \/><\/figure>\n<p>\u3088\u308a\u5e83\u3044\u7a93\u304c\u8a31\u5bb9\u3055\u308c\u308b\uff1a<\/p>\n<ul>\n<li>\u30d1\u30c3\u30c9\u306e\u7d4c\u5e74\u52a3\u5316<\/li>\n<li>\u30c4\u30fc\u30eb\u9593\u306e\u3070\u3089\u3064\u304d<\/li>\n<li>\u30de\u30a4\u30ca\u30fc\u5316\u5b66\u30c9\u30ea\u30d5\u30c8<\/li>\n<\/ul>\n<p><!-- ================= Section 7 ================= --><\/p>\n<h2 id=\"pad\">7.CMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30fb\u30d1\u30c3\u30c9\u3068\u306e\u4e92\u63db\u6027<\/h2>\n<p>\u30d1\u30c3\u30c9\u3068\u30b9\u30e9\u30ea\u30fc\u306e\u76f8\u6027\u304c\u5b9f\u969b\u306e\u6027\u80fd\u3092\u5de6\u53f3\u3059\u308b\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30d1\u30c3\u30c9\u30bf\u30a4\u30d7<\/th>\n<th>\u30b9\u30e9\u30ea\u30fc\u9069\u5408\u6027<\/th>\n<th>\u30ea\u30b9\u30af<\/th>\n<\/tr>\n<tr>\n<td>\u786c\u8cea\u30dd\u30ea\u30a6\u30ec\u30bf\u30f3<\/td>\n<td>\u9ad8\u3044<\/td>\n<td>\u50b7\u306e\u30ea\u30b9\u30af<\/td>\n<\/tr>\n<tr>\n<td>\u67d4\u3089\u304b\u3044\u591a\u5b54\u8cea\u30d1\u30c3\u30c9<\/td>\n<td>\u4e2d\u7a0b\u5ea6<\/td>\n<td>\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u30d1\u30c3\u30c9\u3092\u8003\u616e\u3057\u306a\u3044\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u306f\u4e0d\u5b8c\u5168\u3067\u3042\u308b\u3002.<\/p>\n<p><!-- ================= Section 8 ================= --><\/p>\n<h2 id=\"defectivity\">8.\u6b20\u9665\u3068\u6b69\u7559\u307e\u308a\u30ea\u30b9\u30af\u8a55\u4fa1<\/h2>\n<p>\u5404\u30b9\u30e9\u30ea\u30fc\u88fd\u5264\u306b\u306f\u7279\u5fb4\u7684\u306a\u6b20\u9665\u6307\u7d0b\u304c\u3042\u308b\u3002.<\/p>\n<ul>\n<li>\u50b7\u2192\u7814\u78e8\u30c6\u30fc\u30eb\u306e\u30ea\u30b9\u30af<\/li>\n<li>\u5b54\u98df\u2192\u9178\u5316\u5264\u904e\u5270<\/li>\n<li>\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u2192\u30a4\u30f3\u30d2\u30d3\u30bf\u30fc\u306e\u30a2\u30f3\u30d0\u30e9\u30f3\u30b9<\/li>\n<\/ul>\n<p>\u3053\u306e\u30d5\u30a3\u30f3\u30ac\u30fc\u30d7\u30ea\u30f3\u30c8\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u3067\u3001\u7a4d\u6975\u7684\u306a\u53ce\u91cf\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u304c\u53ef\u80fd\u306b\u306a\u308b\u3002.<\/p>\n<p><!-- ================= Section 9 ================= --><\/p>\n<h2 id=\"tool\">9.CMP\u30c4\u30fc\u30eb\u3068\u30c7\u30ea\u30d0\u30ea\u30fc\u30b7\u30b9\u30c6\u30e0\u306e\u5236\u7d04<\/h2>\n<p>\u30b9\u30e9\u30ea\u30fc\u306f\u9069\u5408\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\uff1a<\/p>\n<ul>\n<li>\u6d41\u91cf\u5236\u9650<\/li>\n<li>\u30d5\u30a3\u30eb\u30bf\u30fc\u5b54\u5f84<\/li>\n<li>\u518d\u5faa\u74b0\u30b7\u30b9\u30c6\u30e0<\/li>\n<\/ul>\n<p>\u6ffe\u904e\u306b\u95a2\u3059\u308b\u8003\u616e\u4e8b\u9805\u306b\u3064\u3044\u3066\u306f\u3001\u3053\u3061\u3089\u3092\u53c2\u7167\u306e\u3053\u3068\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-filtration\/\">CMP\u30b9\u30e9\u30ea\u30fc\u308d\u904e<\/a><\/p>\n<p><!-- ================= Section 10 ================= --><\/p>\n<h2 id=\"hvm\">10.\u5927\u91cf\u751f\u7523\uff08HVM\uff09\u306b\u95a2\u3059\u308b\u8003\u5bdf<\/h2>\n<p>HVM\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u306f\u3001\u30d4\u30fc\u30af\u6027\u80fd\u3088\u308a\u3082\u5b89\u5b9a\u6027\u3092\u512a\u5148\u3059\u308b\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u30d5\u30a1\u30af\u30bf\u30fc<\/th>\n<th>\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30d5\u30a9\u30fc\u30ab\u30b9<\/th>\n<\/tr>\n<tr>\n<td>\u30d0\u30c3\u30c1\u4e00\u8cab\u6027<\/td>\n<td>\u30ed\u30c3\u30c8\u9593\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/td>\n<\/tr>\n<tr>\n<td>\u8cde\u5473\u671f\u9650<\/td>\n<td>\u6700\u5c0f\u9650\u306e\u30a8\u30fc\u30b8\u30f3\u30b0\u30fb\u30c9\u30ea\u30d5\u30c8<\/td>\n<\/tr>\n<tr>\n<td>\u4f9b\u7d66\u306e\u4fe1\u983c\u6027<\/td>\n<td>\u30c7\u30e5\u30a2\u30eb\u30bd\u30fc\u30b7\u30f3\u30b0\u306e\u6e96\u5099<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 11 ================= --><\/p>\n<h2 id=\"mistakes\">11.\u3088\u304f\u3042\u308bCMP\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u306e\u9593\u9055\u3044<\/h2>\n<ul>\n<li>\u6700\u5927MRR\u3092\u8ffd\u3044\u6c42\u3081\u308b<\/li>\n<li>\u6ffe\u904e\u306e\u5236\u7d04\u3092\u7121\u8996\u3059\u308b<\/li>\n<li>\u30d1\u30c3\u30c9\u306e\u76f8\u4e92\u4f5c\u7528\u3092\u904e\u5c0f\u8a55\u4fa1<\/li>\n<li>\u9577\u671f\u719f\u6210\u30c6\u30b9\u30c8\u306e\u30b9\u30ad\u30c3\u30d7<\/li>\n<\/ul>\n<p>\u53ce\u91cf\u8d85\u904e\u306e\u307b\u3068\u3093\u3069\u306f\u3001\u3053\u3046\u3057\u305f\u56de\u907f\u53ef\u80fd\u306a\u30a8\u30e9\u30fc\u306b\u8d77\u56e0\u3059\u308b\u3002.<\/p>\n<p><!-- ================= Section 12 ================= --><\/p>\n<h2 id=\"qualification\">12.\u30af\u30aa\u30ea\u30d5\u30a3\u30b1\u30fc\u30b7\u30e7\u30f3\uff06\u30e9\u30f3\u30d7\u30a2\u30c3\u30d7\u6226\u7565<\/h2>\n<p>\u69cb\u9020\u5316\u3055\u308c\u305f\u8cc7\u683c\u8a8d\u5b9a\u8a08\u753b\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u3082\u306e\u304c\u3042\u308b\uff1a<\/p>\n<ol>\n<li>\u30e9\u30dc\u30b9\u30b1\u30fc\u30eb\u30b9\u30af\u30ea\u30fc\u30cb\u30f3\u30b0<\/li>\n<li>\u30b7\u30e7\u30fc\u30c8\u30eb\u30fc\u30d7\u30fb\u30c4\u30fc\u30eb\u30fb\u30c6\u30b9\u30c8<\/li>\n<li>\u62e1\u5f35\u6b20\u9665\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0<\/li>\n<li>HVM\u30d1\u30a4\u30ed\u30c3\u30c8\u30fb\u30e9\u30f3<\/li>\n<\/ol>\n<figure><figcaption><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1135\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow.webp\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow.webp\" alt=\"CMP slurry qualification flow\" width=\"857\" height=\"317\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27857%27%20height%3D%27317%27%20viewBox%3D%270%200%20857%20317%27%3E%3Crect%20width%3D%27857%27%20height%3D%27317%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow-200x74.webp 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow-300x111.webp 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow-400x148.webp 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow-600x222.webp 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow-768x284.webp 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow-800x296.webp 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow.webp 857w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 857px) 100vw, 857px\" \/><\/figcaption><\/figure>\n<p><!-- ================= Section 13 ================= --><\/p>\n<h2 id=\"summary\">13.\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30b5\u30de\u30ea\u30fc<\/h2>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u306f\u3001\u8cfc\u5165\u306e\u9078\u629e\u3067\u306f\u306a\u304f\u3001\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306e\u6c7a\u5b9a\u3067\u3059\u3002\u6700\u9069\u306a\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u660e\u78ba\u306b\u5b9a\u7fa9\u3055\u308c\u305f\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u5185\u3067\u3001\u6027\u80fd\u3001\u5b89\u5b9a\u6027\u3001\u6b20\u9665\u7387\u3001\u88fd\u9020\u6027\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u3068\u308b\u3082\u306e\u3067\u3059\u3002.<\/p>\n<p>\u898f\u5f8b\u3042\u308b\u9078\u629e\u65b9\u6cd5\u306f\u3001\u6b69\u7559\u307e\u308a\u30ea\u30b9\u30af\u3092\u4f4e\u6e1b\u3057\u3001\u7acb\u3061\u4e0a\u3052\u3092\u52a0\u901f\u3055\u305b\u3001\u7dcf\u6240\u6709\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3059\u308b\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; An Engineering-Level Decision Framework for Semiconductor Wafer Polishing Table of Contents 1. Introduction 2. First-Principles Approach to Slurry Selection 3. Wafer Material Considerations 4. Matching Slurry Type to CMP  &#8230;<\/p>","protected":false},"author":1,"featured_media":1085,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1066","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1066","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1066"}],"version-history":[{"count":5,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1066\/revisions"}],"predecessor-version":[{"id":1136,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1066\/revisions\/1136"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1085"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1066"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1066"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1066"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}