{"id":1227,"date":"2026-01-12T10:37:33","date_gmt":"2026-01-12T02:37:33","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1227"},"modified":"2026-01-12T10:46:47","modified_gmt":"2026-01-12T02:46:47","slug":"wax-free-cmp-polishing-pads-for-semiconductor-manufacturing","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/wax-free-cmp-polishing-pads-for-semiconductor-manufacturing\/","title":{"rendered":"\u534a\u5c0e\u4f53\u88fd\u9020\u7528\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9"},"content":{"rendered":"<p>&nbsp;<\/p>\n<h2>\u76ee\u6b21<\/h2>\n<ul>\n<li><a href=\"#definition\">1.\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9\u306e\u5b9a\u7fa9\u3068\u6280\u8853\u7684\u7bc4\u56f2<\/a><\/li>\n<li><a href=\"#product\">2.\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u88fd\u54c1\u5f62\u614b\u3068\u8a2d\u8a08\u610f\u56f3<\/a><\/li>\n<li><a href=\"#technology\">3.\u30b3\u30a2\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u5438\u7740\u306e\u57fa\u790e<\/a><\/li>\n<li><a href=\"#mechanism\">4.\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9\u306e\u5b9f\u969b<\/a><\/li>\n<li><a href=\"#comparison\">5.\u30ef\u30c3\u30af\u30b9\u30fb\u30d5\u30ea\u30fc\u3068\u30ef\u30c3\u30af\u30b9\u30fb\u30d9\u30fc\u30b9\u306eCMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30fb\u30d1\u30c3\u30c9<\/a><\/li>\n<li><a href=\"#application\">6.\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\u306eCMP\u30d7\u30ed\u30bb\u30b9\u3078\u306e\u7d71\u5408<\/a><\/li>\n<li><a href=\"#materials\">7.\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u30d1\u30c3\u30c9\u306e\u6750\u6599\u3068\u69cb\u9020\u57fa\u76e4<\/a><\/li>\n<\/ul>\n<hr \/>\n<h2 id=\"definition\">1.\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9\u306e\u5b9a\u7fa9\u3068\u6280\u8853\u7684\u7bc4\u56f2<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30fb\u30d1\u30c3\u30c9\u306f\u3001\u30b1\u30df\u30ab\u30eb\u30fb\u30e1\u30ab\u30cb\u30ab\u30eb\u5e73\u5766\u5316\u306e\u969b\u306b\u30ef\u30c3\u30af\u30b9\u3084\u63a5\u7740\u5264\u5c64\u3092\u4f7f\u7528\u305b\u305a\u306b\u52d5\u4f5c\u3059\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u305f\u30a6\u30a7\u30fc\u30cf\u4fdd\u6301\u304a\u3088\u3073\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30fb\u30a4\u30f3\u30bf\u30fc\u30d5\u30a7\u30fc\u30b9\u3067\u3059\u3002\u5f93\u6765\u306e\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306e\u30b7\u30b9\u30c6\u30e0\u3068\u306f\u7570\u306a\u308a\u3001\u3053\u306e\u30d1\u30c3\u30c9\u306f\u3001\u6a5f\u68b0\u7684\u306b\u652f\u914d\u3055\u308c\u308b\u5438\u7740\u3001\u5f3e\u6027\u9069\u5408\u6027\u3001\u304a\u3088\u3073\u5727\u529b\u306b\u3088\u308b\u754c\u9762\u5c01\u6b62\u306b\u4f9d\u5b58\u3057\u3066\u3001CMP\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u3092\u901a\u3057\u3066\u30a6\u30a7\u30fc\u30cf\u306e\u5b89\u5b9a\u6027\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002.<\/p>\n<p>\u30ef\u30c3\u30af\u30b9\u3092\u4f7f\u7528\u3057\u306a\u3044\u3053\u3068\u3067\u3001\u71b1\u8ca0\u8377\u3001\u5316\u5b66\u85ac\u54c1\u3078\u306e\u66b4\u9732\u3001\u52d5\u7684\u306a\u52d5\u304d\u306b\u5bfe\u3059\u308b\u30a6\u30a7\u30fc\u30cf\u4fdd\u6301\u306e\u6319\u52d5\u304c\u6839\u672c\u7684\u306b\u5909\u5316\u3057\u307e\u3059\u3002\u305d\u306e\u305f\u3081\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306eCMP\u7814\u78e8\u30d1\u30c3\u30c9\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u8584\u578b\u5316\u3001\u30d7\u30ed\u30bb\u30b9\u30a6\u30a3\u30f3\u30c9\u30a6\u306e\u72ed\u5c0f\u5316\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u306e\u8981\u6c42\u306a\u3069\u3001\u5f93\u6765\u306e\u30ef\u30c3\u30af\u30b9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u306e\u9650\u754c\u3092\u8d85\u3048\u308b\u5148\u7aef\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u3001\u307e\u3059\u307e\u3059\u63a1\u7528\u3055\u308c\u308b\u3088\u3046\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n<p><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1304\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Overview-of-wax-free-CMP-polishing-pad-in-semiconductor-manufacturing.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Overview-of-wax-free-CMP-polishing-pad-in-semiconductor-manufacturing.jpg\" alt=\"Overview of wax-free CMP polishing pad in semiconductor manufacturing\" width=\"986\" height=\"698\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27986%27%20height%3D%27698%27%20viewBox%3D%270%200%20986%20698%27%3E%3Crect%20width%3D%27986%27%20height%3D%27698%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Overview-of-wax-free-CMP-polishing-pad-in-semiconductor-manufacturing-200x142.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Overview-of-wax-free-CMP-polishing-pad-in-semiconductor-manufacturing-300x212.jpg 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Overview-of-wax-free-CMP-polishing-pad-in-semiconductor-manufacturing-400x283.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Overview-of-wax-free-CMP-polishing-pad-in-semiconductor-manufacturing-600x425.jpg 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Overview-of-wax-free-CMP-polishing-pad-in-semiconductor-manufacturing-768x544.jpg 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Overview-of-wax-free-CMP-polishing-pad-in-semiconductor-manufacturing-800x566.jpg 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Overview-of-wax-free-CMP-polishing-pad-in-semiconductor-manufacturing.jpg 986w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 986px) 100vw, 986px\" \/><\/p>\n<p><!-- Image Placeholder --><\/p>\n<h2 id=\"product\">2.\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u88fd\u54c1\u5f62\u614b\u3068\u8a2d\u8a08\u610f\u56f3<\/h2>\n<p>\u88fd\u54c1\u306e\u89b3\u70b9\u304b\u3089\u898b\u308b\u3068\u3001\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u7814\u78e8\u30d1\u30c3\u30c9\u306f\u3001\u7570\u306a\u308bCMP\u30c4\u30fc\u30eb\u69cb\u9020\u3068\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u306b\u5bfe\u5fdc\u3059\u308b\u305f\u3081\u306b\u3001\u8907\u6570\u306e\u69cb\u9020\u5f62\u614b\u3067\u88fd\u9020\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u8a2d\u8a08\u306e\u8a73\u7d30\u306f\u69d8\u3005\u3067\u3059\u304c\u3001\u5168\u3066\u306e\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\u306f\u3001\u72a0\u7272\u7684\u7d50\u5408\u6750\u6599\u3092\u5c0e\u5165\u3059\u308b\u3053\u3068\u306a\u304f\u3001\u5b89\u5b9a\u3057\u305f\u30a6\u30a7\u30fc\u30cf\u5438\u7740\u3092\u63d0\u4f9b\u3059\u308b\u3068\u3044\u3046\u76ee\u7684\u3092\u5171\u6709\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<p>\u4e3b\u306a\u8a2d\u8a08\u4e0a\u306e\u8003\u616e\u4e8b\u9805\u306b\u306f\u3001\u30d1\u30c3\u30c9\u306e\u539a\u3055\u3001\u5727\u7e2e\u6027\u3001\u8868\u9762\u30c8\u30dd\u30ed\u30b8\u30fc\u3001\u30ad\u30e3\u30ea\u30a2\u30d8\u30c3\u30c9\u5727\u529b\u5206\u914d\u30b7\u30b9\u30c6\u30e0\u3068\u306e\u4e92\u63db\u6027\u306a\u3069\u304c\u3042\u308a\u307e\u3059\u3002\u88fd\u54c1\u69cb\u6210\u3068\u4ed5\u69d8\u306e\u8a73\u7d30\u306a\u5185\u8a33\u306f\u3001\u5c02\u7528\u306e\u88fd\u54c1\u30da\u30fc\u30b8\u306b\u8a18\u8f09\u3055\u308c\u3066\u3044\u307e\u3059\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/semiconductor\/wax-free-suction-pad\/\" target=\"_blank\" rel=\"noopener\">\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9<\/a>.<\/p>\n<table border=\"1\" cellspacing=\"0\" cellpadding=\"6\">\n<tbody>\n<tr>\n<th>\u30c7\u30b6\u30a4\u30f3\u9762<\/th>\n<th>\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306e\u76ee\u7684<\/th>\n<\/tr>\n<tr>\n<td>\u30d1\u30c3\u30c9\u539a<\/td>\n<td>\u5727\u529b\u306e\u5747\u4e00\u6027\u3068\u6a5f\u68b0\u7684\u5b89\u5b9a\u6027<\/td>\n<\/tr>\n<tr>\n<td>\u8868\u9762\u30c8\u30dd\u30ed\u30b8\u30fc<\/td>\n<td>\u63a5\u89e6\u9762\u7a4d\u306e\u5236\u5fa1\u3068\u7a7a\u6c17\u6392\u51fa<\/td>\n<\/tr>\n<tr>\n<td>\u5f3e\u6027\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9<\/td>\n<td>\u5438\u7740\u529b\u306e\u767a\u751f\u3068\u30a6\u30a7\u30cf\u30fc\u306e\u4fdd\u8b77<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 id=\"technology\">3.\u30b3\u30a2\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u5438\u7740\u306e\u57fa\u790e<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u6838\u5fc3\u306f\u3001\u5316\u5b66\u7684\u63a5\u7740\u3092\u6a5f\u68b0\u7684\u754c\u9762\u5236\u5fa1\u306b\u7f6e\u304d\u63db\u3048\u308b\u5438\u7740\u30e1\u30ab\u30cb\u30ba\u30e0\u3067\u3042\u308b\u3002\u5438\u7740\u529b\u306f\u3001\u5727\u529b\u306b\u3088\u308b\u9069\u5408\u6027\u3001\u754c\u9762\u30b7\u30fc\u30eb\u6027\u3001\u304a\u3088\u3073\u30d1\u30c3\u30c9\u3068\u30a6\u30a7\u30fc\u30cf\u306e\u754c\u9762\u3067\u767a\u751f\u3059\u308b\u6469\u64e6\u62b5\u6297\u306e\u7d44\u307f\u5408\u308f\u305b\u304b\u3089\u751f\u3058\u307e\u3059\u3002.<\/p>\n<p>\u30ef\u30c3\u30af\u30b9\u63a5\u7740\u3068\u306f\u7570\u306a\u308a\u3001\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30fb\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u5438\u7740\u5f37\u5ea6\u306f\u3001\u56fa\u5b9a\u3055\u308c\u305f\u6750\u6599\u7279\u6027\u3067\u306f\u306a\u304f\u3001\u52a0\u3048\u3089\u308c\u308b\u8377\u91cd\u3084\u5909\u5f62\u306b\u5bfe\u3059\u308b\u52d5\u7684\u306a\u53cd\u5fdc\u3067\u3042\u308b\u3002\u30d1\u30c3\u30c9\u306e\u5fae\u7d30\u69cb\u9020\u3084\u6c17\u5b54\u306e\u9023\u7d50\u6027\u306a\u3069\u3001\u57fa\u790e\u3068\u306a\u308b\u5438\u7740\u6280\u8853\u306b\u3064\u3044\u3066\u306f\u3001\u6280\u8853\u306e\u30da\u30fc\u30b8\u3067\u8a73\u3057\u304f\u8aac\u660e\u3057\u3066\u3044\u307e\u3059\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/wax-free-adsorption-polishing-pad-technology\/\" target=\"_blank\" rel=\"noopener\">\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u5438\u7740\u7814\u78e8\u30d1\u30c3\u30c9\u6280\u8853<\/a>.<\/p>\n<p><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1305\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Conceptual-illustration-of-wax-free-adsorption-mechanism.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Conceptual-illustration-of-wax-free-adsorption-mechanism.png\" alt=\"Conceptual illustration of wax-free adsorption mechanism\" width=\"1536\" height=\"1024\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271536%27%20height%3D%271024%27%20viewBox%3D%270%200%201536%201024%27%3E%3Crect%20width%3D%271536%27%20height%3D%271024%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Conceptual-illustration-of-wax-free-adsorption-mechanism-200x133.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Conceptual-illustration-of-wax-free-adsorption-mechanism-300x200.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Conceptual-illustration-of-wax-free-adsorption-mechanism-400x267.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Conceptual-illustration-of-wax-free-adsorption-mechanism-600x400.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Conceptual-illustration-of-wax-free-adsorption-mechanism-768x512.png 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Conceptual-illustration-of-wax-free-adsorption-mechanism-800x533.png 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Conceptual-illustration-of-wax-free-adsorption-mechanism-1024x683.png 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Conceptual-illustration-of-wax-free-adsorption-mechanism-1200x800.png 1200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Conceptual-illustration-of-wax-free-adsorption-mechanism.png 1536w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1536px) 100vw, 1536px\" \/><\/p>\n<p><!-- Image Placeholder --><\/p>\n<h2 id=\"mechanism\">4.\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9\u306e\u5b9f\u969b<\/h2>\n<p>\u5b9f\u969b\u306eCMP\u4f5c\u696d\u3067\u306f\u3001\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u7422\u78e8\u30d1\u30c3\u30c9\u306f\u9759\u7684\u306a\u4fdd\u6301\u5c64\u3067\u306f\u306a\u304f\u3001\u52d5\u7684\u306a\u6a5f\u68b0\u7684\u754c\u9762\u3068\u3057\u3066\u6a5f\u80fd\u3057\u307e\u3059\u3002\u5438\u7740\u306f\u30a6\u30a7\u30cf\u30fc\u306e\u30ed\u30fc\u30c7\u30a3\u30f3\u30b0\u4e2d\u306b\u5f90\u3005\u306b\u9032\u884c\u3057\u3001\u5727\u529b\u306e\u7acb\u3061\u4e0a\u304c\u308a\u4e2d\u306b\u5b89\u5b9a\u3057\u3001\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3001\u30d7\u30e9\u30c6\u30f3\u901f\u5ea6\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u6d41\u308c\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u5909\u6570\u306b\u53cd\u5fdc\u3057\u7d9a\u3051\u307e\u3059\u3002.<\/p>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u7422\u78e8\u30d1\u30c3\u30c9\u304c\u30a6\u30a7\u30cf\u30fc\u306e\u30ed\u30fc\u30c7\u30a3\u30f3\u30b0\u304b\u3089\u30ea\u30ea\u30fc\u30b9\u307e\u3067\u3069\u306e\u3088\u3046\u306b\u52d5\u4f5c\u3059\u308b\u304b\u306b\u3064\u3044\u3066\u3001\u30d7\u30ed\u30bb\u30b9\u30b7\u30fc\u30b1\u30f3\u30b9\u306b\u6cbf\u3063\u305f\u5b8c\u5168\u306a\u8aac\u660e\u306f\u3001\u5c02\u7528\u306e\u52d5\u4f5c\u539f\u7406\u30db\u30ef\u30a4\u30c8\u30da\u30fc\u30d1\u30fc\u306b\u8a18\u8f09\u3055\u308c\u3066\u3044\u307e\u3059\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/how-wax-free-polishing-pads-work-in-cmp-processes\/\" target=\"_blank\" rel=\"noopener\">CMP\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u6a5f\u80fd<\/a>. .\u3053\u306e\u5206\u96e2\u306b\u3088\u308a\u3001\u30d7\u30ed\u30bb\u30b9\u30a8\u30f3\u30b8\u30cb\u30a2\u306f\u3001\u88fd\u54c1\u3084\u6750\u6599\u306e\u8aac\u660e\u3068\u6df7\u540c\u3059\u308b\u3053\u3068\u306a\u304f\u3001\u30e1\u30ab\u30cb\u30ba\u30e0\u30ec\u30d9\u30eb\u306e\u6319\u52d5\u3092\u5206\u6790\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002.<\/p>\n<p><!-- Video Placeholder --><\/p>\n<h2><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1306\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-operation-using-wax-free-polishing-pads.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-operation-using-wax-free-polishing-pads.png\" alt=\"CMP operation using wax-free polishing pads\" width=\"850\" height=\"460\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27850%27%20height%3D%27460%27%20viewBox%3D%270%200%20850%20460%27%3E%3Crect%20width%3D%27850%27%20height%3D%27460%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-operation-using-wax-free-polishing-pads-200x108.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-operation-using-wax-free-polishing-pads-300x162.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-operation-using-wax-free-polishing-pads-400x216.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-operation-using-wax-free-polishing-pads-600x325.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-operation-using-wax-free-polishing-pads-768x416.png 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-operation-using-wax-free-polishing-pads-800x433.png 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-operation-using-wax-free-polishing-pads.png 850w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 850px) 100vw, 850px\" \/><\/h2>\n<h2 id=\"comparison\">5.\u30ef\u30c3\u30af\u30b9\u30fb\u30d5\u30ea\u30fc\u3068\u30ef\u30c3\u30af\u30b9\u30fb\u30d9\u30fc\u30b9\u306eCMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30fb\u30d1\u30c3\u30c9<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306eCMP\u7814\u78e8\u30d1\u30c3\u30c9\u3068\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306eCMP\u7814\u78e8\u30d1\u30c3\u30c9\u3092\u6bd4\u8f03\u3059\u308b\u5834\u5408\u3001\u6839\u672c\u7684\u306a\u9055\u3044\u306f\u30a6\u30a7\u30cf\u30fc\u306e\u4fdd\u6301\u529b\u3092\u3069\u306e\u3088\u3046\u306b\u767a\u751f\u3055\u305b\u3001\u7dad\u6301\u3059\u308b\u304b\u306b\u3042\u308a\u307e\u3059\u3002\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u6e29\u5ea6\u3001\u30ef\u30c3\u30af\u30b9\u306e\u539a\u3055\u3001\u5316\u5b66\u85ac\u54c1\u3078\u306e\u66b4\u9732\u306b\u3088\u3063\u3066\u5909\u5316\u3059\u308b\u7c98\u7740\u529b\u306b\u4f9d\u5b58\u3057\u3066\u3044\u307e\u3059\u304c\u3001\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u6a5f\u68b0\u7684\u306b\u8abf\u7bc0\u3055\u308c\u305f\u5438\u7740\u529b\u306b\u4f9d\u5b58\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<p>\u3053\u306e\u9055\u3044\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3001\u6c5a\u67d3\u30ea\u30b9\u30af\u3001\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u306e\u5fc5\u8981\u6027\u3001\u5148\u7aef\u534a\u5c0e\u4f53\u30ce\u30fc\u30c9\u3068\u306e\u4e92\u63db\u6027\u306a\u3069\u306b\u5927\u304d\u306a\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u3002\u8a73\u7d30\u306a\u5074\u9762\u6bd4\u8f03\u306f <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/wax-free-vs-wax-polishing-pads-in-cmp-processing\/\" target=\"_blank\" rel=\"noopener\">\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u3068\u30ef\u30c3\u30af\u30b9\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u6bd4\u8f03<\/a>.<\/p>\n<table border=\"1\" cellspacing=\"0\" cellpadding=\"6\">\n<tbody>\n<tr>\n<th>\u30a2\u30b9\u30da\u30af\u30c8<\/th>\n<th>\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9<\/th>\n<th>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc<\/th>\n<\/tr>\n<tr>\n<td>\u4fdd\u6301\u6a5f\u69cb<\/td>\n<td>\u5316\u5b66\u7684\u63a5\u7740<\/td>\n<td>\u6a5f\u68b0\u7684\u5438\u7740<\/td>\n<\/tr>\n<tr>\n<td>\u71b1\u611f\u5ea6<\/td>\n<td>\u9ad8\u3044<\/td>\n<td>\u4f4e\u3044<\/td>\n<\/tr>\n<tr>\n<td>\u88cf\u9762\u6c5a\u67d3<\/td>\n<td>\u53ef\u80fd<\/td>\n<td>\u6700\u5c0f\u9650<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 id=\"application\">6.\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\u306eCMP\u30d7\u30ed\u30bb\u30b9\u3078\u306e\u7d71\u5408<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u8584\u7247\u5316\u3001\u5e73\u5766\u5316\u3001\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u306a\u3069\u3001\u3055\u307e\u3056\u307e\u306a\u7528\u9014\u306eCMP\u30d7\u30ed\u30bb\u30b9\u306b\u7d44\u307f\u8fbc\u307e\u308c\u3066\u3044\u307e\u3059\u3002\u305d\u306e\u6a5f\u68b0\u7684\u4fdd\u6301\u6319\u52d5\u306f\u3001\u3088\u308a\u5b89\u5b9a\u3057\u305f\u5727\u529b\u4f1d\u9054\u3068\u30a6\u30a7\u30fc\u30cf\u9593\u306e\u4e00\u8cab\u6027\u306e\u5411\u4e0a\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002.<\/p>\n<p>\u30b9\u30e9\u30ea\u30fc\u9069\u5408\u6027\u3084\u6b69\u7559\u307e\u308a\u3078\u306e\u5f71\u97ff\u306a\u3069\u3001\u30d7\u30ed\u30bb\u30b9\u30ec\u30d9\u30eb\u3067\u306e\u8003\u616e\u4e8b\u9805\u306b\u3064\u3044\u3066\u306f\u3001\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30da\u30fc\u30b8\u3067\u8a73\u3057\u304f\u8aac\u660e\u3057\u3066\u3044\u307e\u3059\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/wax-free-polishing-pads-in-cmp-process-applications\/\" target=\"_blank\" rel=\"noopener\">CMP\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9<\/a>.<\/p>\n<h2 id=\"materials\">7.\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u30d1\u30c3\u30c9\u306e\u6750\u6599\u3068\u69cb\u9020\u57fa\u76e4<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u6027\u80fd\u306f\u3001\u6700\u7d42\u7684\u306b\u306f\u6750\u6599\u306e\u9078\u629e\u3068\u5185\u90e8\u69cb\u9020\u306b\u652f\u914d\u3055\u308c\u307e\u3059\u3002\u5f3e\u6027\u7387\u3001\u6c17\u5b54\u69cb\u9020\u3001\u8868\u9762\u7c97\u3055\u3001\u6469\u8017\u6319\u52d5\u306f\u3001\u5438\u7740\u52b9\u7387\u3001\u5bff\u547d\u3001\u7814\u78e8\u5b89\u5b9a\u6027\u3092\u7dcf\u5408\u7684\u306b\u6c7a\u5b9a\u3057\u307e\u3059\u3002.<\/p>\n<p>CMP\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u6750\u6599\u3068\u69cb\u9020\u8a2d\u8a08\u306e\u539f\u5247\u306b\u95a2\u3059\u308b\u5305\u62ec\u7684\u306a\u8b70\u8ad6\u306f\u3001\u6b21\u306e\u30b5\u30a4\u30c8\u3067\u63d0\u4f9b\u3055\u308c\u3066\u3044\u308b\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-polishing-pad-materials-and-structure-explained\/\" target=\"_blank\" rel=\"noopener\">CMP\u7814\u78e8\u30d1\u30c3\u30c9\u6750\u6599<\/a>, \u3053\u3053\u3067\u306f\u3001\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30fb\u30d1\u30c3\u30c9\u304c\u3001\u3088\u308a\u5e83\u7bc4\u306aCMP\u30d1\u30c3\u30c9\u6280\u8853\u3068\u306e\u95a2\u9023\u3067\u5206\u6790\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; Table of Contents 1. Definition and Technical Scope of Wax-Free CMP Polishing Pads 2. Product Forms and Design Intent of Wax-Free Polishing Pads 3. Core Technology: Wax-Free Adsorption Fundamentals  &#8230;<\/p>","protected":false},"author":1,"featured_media":1307,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1227","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1227","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1227"}],"version-history":[{"count":5,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1227\/revisions"}],"predecessor-version":[{"id":1332,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1227\/revisions\/1332"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1307"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1227"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1227"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1227"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}