{"id":1296,"date":"2026-01-12T10:40:16","date_gmt":"2026-01-12T02:40:16","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1296"},"modified":"2026-01-12T10:48:33","modified_gmt":"2026-01-12T02:48:33","slug":"wax-free-adsorption-polishing-pad-technology","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/wax-free-adsorption-polishing-pad-technology\/","title":{"rendered":"\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u5438\u7740\u7814\u78e8\u30d1\u30c3\u30c9\u6280\u8853"},"content":{"rendered":"<p>&nbsp;<\/p>\n<h2>\u76ee\u6b21<\/h2>\n<ul>\n<li><a href=\"#overview\">1.\u6280\u8853\u306e\u6982\u8981\u30ef\u30c3\u30af\u30b9\u63a5\u7740\u306e\u4ee3\u66ff\u3068\u3057\u3066\u306e\u5438\u7740<\/a><\/li>\n<li><a href=\"#fundamentals\">2.\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\u306b\u304a\u3051\u308b\u5438\u7740\u529b\u306e\u57fa\u672c\u7684\u306a\u6e90<\/a><\/li>\n<li><a href=\"#microstructure\">3.\u30d1\u30c3\u30c9\u5fae\u7d30\u69cb\u9020\u8a2d\u8a08\u3068\u5438\u7740\u52b9\u7387<\/a><\/li>\n<li><a href=\"#contact-mechanics\">4.\u30d1\u30c3\u30c9\u3068\u30a6\u30a7\u30cf\u30fc\u306e\u754c\u9762\u306b\u304a\u3051\u308b\u63a5\u89e6\u529b\u5b66<\/a><\/li>\n<li><a href=\"#parameter-control\">5.\u5438\u7740\u306b\u5f71\u97ff\u3059\u308b\u8abf\u6574\u53ef\u80fd\u306a\u5de5\u5b66\u7684\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc<\/a><\/li>\n<li><a href=\"#stability\">6.CMP\u904b\u8ee2\u6761\u4ef6\u4e0b\u3067\u306e\u5438\u7740\u5b89\u5b9a\u6027<\/a><\/li>\n<li><a href=\"#failure-modes\">7.\u5438\u7740\u52a3\u5316\u3068\u6545\u969c\u30e2\u30fc\u30c9<\/a><\/li>\n<li><a href=\"#system-context\">8.CMP\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u5438\u7740\u6280\u8853\u306e\u4f4d\u7f6e\u3065\u3051<\/a><\/li>\n<\/ul>\n<hr \/>\n<h2 id=\"overview\">1.\u6280\u8853\u306e\u6982\u8981\u30ef\u30c3\u30af\u30b9\u63a5\u7740\u306e\u4ee3\u66ff\u3068\u3057\u3066\u306e\u5438\u7740<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u5438\u7740\u7814\u78e8\u30d1\u30c3\u30c9\u6280\u8853\u306f\u3001CMP\u306b\u304a\u3051\u308b\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306e\u30a6\u30a7\u30cf\u30fc\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u306e\u56fa\u6709\u306e\u5236\u9650\u3092\u6392\u9664\u3059\u308b\u305f\u3081\u306b\u958b\u767a\u3055\u308c\u307e\u3057\u305f\u3002\u5f93\u6765\u306e\u30ef\u30c3\u30af\u30b9\u5c64\u306f\u3001\u7c98\u5f3e\u6027\u6319\u52d5\u3001\u71b1\u611f\u5ea6\u3001\u539a\u307f\u306e\u3070\u3089\u3064\u304d\u3001\u30b9\u30e9\u30ea\u30fc\u6210\u5206\u3068\u306e\u5316\u5b66\u7684\u76f8\u4e92\u4f5c\u7528\u3092\u3082\u305f\u3089\u3057\u307e\u3059\u3002\u5438\u7740\u30d9\u30fc\u30b9\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u6a5f\u68b0\u7684\u306b\u652f\u914d\u3055\u308c\u308b\u754c\u9762\u5236\u5fa1\u306b\u3088\u3063\u3066\u3053\u308c\u3089\u306e\u5909\u52d5\u8981\u56e0\u3092\u7f6e\u304d\u63db\u3048\u307e\u3059\u3002.<\/p>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\u3067\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u4fdd\u6301\u529b\u306f\u3001\u5316\u5b66\u7684\u306a\u63a5\u7740\u529b\u3067\u306f\u306a\u304f\u3001\u5727\u529b\u306b\u3088\u308b\u9069\u5408\u6027\u3001\u754c\u9762\u5c01\u6b62\u3001\u6469\u64e6\u62b5\u6297\u306b\u3088\u3063\u3066\u751f\u6210\u3055\u308c\u307e\u3059\u3002\u3053\u306e\u30b7\u30d5\u30c8\u306f\u3001\u4fdd\u6301\u529b\u304c\u8377\u91cd\u3001\u6e29\u5ea6\u3001\u52d5\u304d\u306b\u3069\u306e\u3088\u3046\u306b\u53cd\u5fdc\u3059\u308b\u304b\u3092\u6839\u672c\u7684\u306b\u5909\u3048\u3001\u5438\u7740\u6280\u8853\u3092\u672c\u8cea\u7684\u306b\u3088\u308a\u4e88\u6e2c\u53ef\u80fd\u3067\u3001\u5148\u7aef\u534a\u5c0e\u4f53\u88fd\u9020\u306e\u305f\u3081\u306e\u30b9\u30b1\u30fc\u30e9\u30d6\u30eb\u306a\u3082\u306e\u306b\u3059\u308b\u3002.<\/p>\n<p><!-- Image Placeholder --><\/p>\n<h2 id=\"fundamentals\">2.\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\u306b\u304a\u3051\u308b\u5438\u7740\u529b\u306e\u57fa\u672c\u7684\u306a\u6e90<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u7422\u78e8\u30d1\u30c3\u30c9\u306b\u304a\u3051\u308b\u5438\u7740\u529b\u306f\u3001\u5358\u4e00\u306e\u7269\u7406\u73fe\u8c61\u306b\u7531\u6765\u3059\u308b\u3082\u306e\u3067\u306f\u306a\u304f\u3001\u8907\u6570\u306e\u6a5f\u68b0\u7684\u8981\u56e0\u306e\u8907\u5408\u52b9\u679c\u306b\u7531\u6765\u3059\u308b\u3002\u3053\u308c\u3089\u306e\u8981\u56e0\u306f\u3001\u30d1\u30c3\u30c9\u3068\u30a6\u30a7\u30cf\u30fc\u306e\u754c\u9762\u3067\u540c\u6642\u306b\u4f5c\u7528\u3057\u3001\u5370\u52a0\u5727\u529b\u306b\u5fdc\u3058\u3066\u52d5\u7684\u306b\u5909\u5316\u3057\u307e\u3059\u3002.<\/p>\n<p>\u5438\u7740\u529b\u306e\u4e3b\u306a\u8981\u56e0\u3068\u3057\u3066\u306f\u3001\u754c\u9762\u5727\u529b\u30b7\u30fc\u30eb\u6027\u3001\u5f3e\u6027\u5909\u5f62\u306b\u3088\u308b\u9069\u5408\u6027\u3001\u6a2a\u65b9\u5411\u306e\u52d5\u304d\u306b\u5bfe\u3059\u308b\u6469\u64e6\u62b5\u6297\u304c\u6319\u3052\u3089\u308c\u308b\u3002\u771f\u7a7a\u30c1\u30e3\u30c3\u30af\u3068\u306f\u7570\u306a\u308a\u3001\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30fb\u30d1\u30c3\u30c9\u306f\u5916\u7684\u306a\u5727\u529b\u5dee\u3092\u5fc5\u8981\u3068\u305b\u305a\u3001\u5438\u7740\u306f\u6a5f\u68b0\u7684\u306a\u63a5\u89e6\u6761\u4ef6\u304b\u3089\u81ea\u7136\u306b\u751f\u3058\u308b\u3002.<\/p>\n<table border=\"1\" cellspacing=\"0\" cellpadding=\"6\">\n<tbody>\n<tr>\n<th>\u5438\u7740\u8ca2\u732e\u8005<\/th>\n<th>\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0<\/th>\n<\/tr>\n<tr>\n<td>\u5727\u529b\u30b7\u30fc\u30eb<\/td>\n<td>\u8ca0\u8377\u306b\u3088\u308b\u754c\u9762\u7a7a\u6c17\u91cf\u306e\u6e1b\u5c11<\/td>\n<\/tr>\n<tr>\n<td>\u5f3e\u6027\u9069\u5408\u6027<\/td>\n<td>\u5909\u5f62\u306b\u3088\u308b\u5b9f\u8cea\u63a5\u89e6\u9762\u7a4d\u306e\u5897\u52a0<\/td>\n<\/tr>\n<tr>\n<td>\u6469\u64e6\u62b5\u6297<\/td>\n<td>\u56de\u8ee2\u6642\u306e\u6a2a\u529b\u6291\u5236<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 id=\"microstructure\">3.\u30d1\u30c3\u30c9\u5fae\u7d30\u69cb\u9020\u8a2d\u8a08\u3068\u5438\u7740\u52b9\u7387<\/h2>\n<p>\u30d1\u30c3\u30c9\u306e\u5fae\u7d30\u69cb\u9020\u306f\u3001\u5438\u7740\u52b9\u7387\u3092\u6c7a\u5b9a\u3059\u308b\u4e0a\u3067\u6c7a\u5b9a\u7684\u306a\u5f79\u5272\u3092\u679c\u305f\u3059\u3002\u8868\u9762\u306e\u51f9\u51f8\u5f62\u72b6\u3001\u5b54\u5f84\u5206\u5e03\u3001\u5b54\u306e\u9023\u7d50\u6027\u306f\u3001\u7a7a\u6c17\u304c\u3069\u306e\u3088\u3046\u306b\u7f6e\u63db\u3055\u308c\u308b\u304b\u3001\u5727\u529b\u304c\u3069\u306e\u3088\u3046\u306b\u4f1d\u9054\u3055\u308c\u308b\u304b\u3001\u8377\u91cd\u4e0b\u3067\u63a5\u89e6\u9762\u7a4d\u304c\u3069\u306e\u3088\u3046\u306b\u5909\u5316\u3059\u308b\u304b\u306b\u7dcf\u5408\u7684\u306b\u5f71\u97ff\u3059\u308b\u3002.<\/p>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u5438\u7740\u7528\u306b\u8a2d\u8a08\u3055\u308c\u305f\u30d1\u30c3\u30c9\u306f\u3001\u901a\u5e38\u3001\u7a7a\u6c17\u6392\u51fa\u3068\u69cb\u9020\u7684\u5b8c\u5168\u6027\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u3068\u308b\u305f\u3081\u306b\u3001\u5236\u5fa1\u3055\u308c\u305f\u5fae\u7d30\u5b54\u3092\u63a1\u7528\u3057\u3066\u3044\u308b\u3002\u904e\u5ea6\u306b\u958b\u653e\u3055\u308c\u305f\u69cb\u9020\u306f\u30b7\u30fc\u30eb\u52b9\u7387\u3092\u4f4e\u4e0b\u3055\u305b\u3001\u904e\u5ea6\u306b\u5bc6\u306a\u69cb\u9020\u306f\u5909\u5f62\u3084\u5438\u7740\u306e\u767a\u9054\u3092\u963b\u5bb3\u3059\u308b\u3002.<\/p>\n<p><!-- Image Placeholder --><\/p>\n<div style=\"border: 1px dashed #999; padding: 20px; margin: 20px 0;\"><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1324\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Microstructure-schematic-of-wax-free-adsorption-polishing-pad.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Microstructure-schematic-of-wax-free-adsorption-polishing-pad.png\" alt=\"Microstructure schematic of wax-free adsorption polishing pad\" width=\"710\" height=\"335\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27710%27%20height%3D%27335%27%20viewBox%3D%270%200%20710%20335%27%3E%3Crect%20width%3D%27710%27%20height%3D%27335%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Microstructure-schematic-of-wax-free-adsorption-polishing-pad-200x94.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Microstructure-schematic-of-wax-free-adsorption-polishing-pad-300x142.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Microstructure-schematic-of-wax-free-adsorption-polishing-pad-400x189.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Microstructure-schematic-of-wax-free-adsorption-polishing-pad-600x283.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Microstructure-schematic-of-wax-free-adsorption-polishing-pad.png 710w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 710px) 100vw, 710px\" \/><\/div>\n<table border=\"1\" cellspacing=\"0\" cellpadding=\"6\">\n<tbody>\n<tr>\n<th>\u5fae\u7d30\u69cb\u9020\u306e\u7279\u5fb4<\/th>\n<th>\u6a5f\u80fd\u7684\u30a4\u30f3\u30d1\u30af\u30c8<\/th>\n<\/tr>\n<tr>\n<td>\u8868\u9762\u7c97\u3055<\/td>\n<td>\u6700\u521d\u306e\u63a5\u89e6\u3068\u7a7a\u6c17\u306e\u6392\u51fa\u3092\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/td>\n<\/tr>\n<tr>\n<td>\u5b54\u5f84<\/td>\n<td>\u907f\u96e3\u3068\u8377\u91cd\u30b5\u30dd\u30fc\u30c8\u306e\u30d0\u30e9\u30f3\u30b9<\/td>\n<\/tr>\n<tr>\n<td>\u7d30\u5b54\u306e\u9023\u7d50\u6027<\/td>\n<td>\u5747\u4e00\u306a\u5727\u529b\u5206\u5e03\u304c\u53ef\u80fd<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 id=\"contact-mechanics\">4.\u30d1\u30c3\u30c9\u3068\u30a6\u30a7\u30cf\u30fc\u306e\u754c\u9762\u306b\u304a\u3051\u308b\u63a5\u89e6\u529b\u5b66<\/h2>\n<p>\u63a5\u89e6\u529b\u5b66\u306e\u89b3\u70b9\u304b\u3089\u3001\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u5438\u7740\u30d1\u30c3\u30c9\u306f\u3001\u5851\u6027\u6d41\u52d5\u3088\u308a\u3082\u5f3e\u6027\u5909\u5f62\u304c\u652f\u914d\u7684\u306a\u9818\u57df\u3067\u52d5\u4f5c\u3057\u307e\u3059\u3002\u30d1\u30c3\u30c9\u6750\u6599\u306f\u3001\u7814\u78e8\u5727\u529b\u3092\u5747\u4e00\u306b\u4f1d\u9054\u3059\u308b\u306e\u306b\u5341\u5206\u306a\u525b\u6027\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u3001\u30a6\u30a7\u30fc\u30cf\u88cf\u9762\u306e\u5f62\u72b6\u306b\u9069\u5408\u3059\u308b\u306e\u306b\u5341\u5206\u306a\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9\u304c\u5fc5\u8981\u3067\u3059\u3002.<\/p>\n<p>\u8377\u91cd\u304c\u5897\u52a0\u3059\u308b\u306b\u3064\u308c\u3066\u3001\u5b9f\u8cea\u63a5\u89e6\u9762\u7a4d\u306f\u975e\u7dda\u5f62\u7684\u306b\u6210\u9577\u3057\u3001\u5438\u7740\u529b\u3068\u6469\u64e6\u5b89\u5b9a\u6027\u306e\u4e21\u65b9\u304c\u5411\u4e0a\u3059\u308b\u3002\u3053\u306e\u6319\u52d5\u306f\u3001\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306e\u63a5\u7740\u30b7\u30b9\u30c6\u30e0\u306b\u306f\u306a\u3044\u7279\u5fb4\u3067\u3042\u308a\u3001\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u306b\u5fdc\u3058\u3066\u5438\u7740\u529b\u3092\u81ea\u5df1\u8abf\u6574\u3059\u308b\u3053\u3068\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002.<\/p>\n<h2 id=\"parameter-control\">5.\u5438\u7740\u306b\u5f71\u97ff\u3059\u308b\u8abf\u6574\u53ef\u80fd\u306a\u5de5\u5b66\u7684\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u5438\u7740\u6280\u8853\u306e\u4e3b\u306a\u5229\u70b9\u306e\u4e00\u3064\u306f\u3001\u305d\u306e\u8abf\u6574\u53ef\u80fd\u6027\u3067\u3042\u308b\u3002\u5438\u7740\u6319\u52d5\u306f\u3001CMP\u30c4\u30fc\u30eb\u306e\u30cf\u30fc\u30c9\u30a6\u30a7\u30a2\u3092\u5909\u66f4\u3059\u308b\u3053\u3068\u306a\u304f\u3001\u6750\u6599\u306e\u914d\u5408\u3084\u69cb\u9020\u8a2d\u8a08\u306b\u3088\u3063\u3066\u8a2d\u8a08\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n<table border=\"1\" cellspacing=\"0\" cellpadding=\"6\">\n<tbody>\n<tr>\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n<th>\u5178\u578b\u7684\u306a\u7bc4\u56f2<\/th>\n<th>\u5438\u7740\u3078\u306e\u5f71\u97ff<\/th>\n<\/tr>\n<tr>\n<td>\u5f3e\u6027\u7387<\/td>\n<td>10\uff5e50MPa<\/td>\n<td>\u5909\u5f62\u3068\u63a5\u89e6\u6210\u9577\u3092\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/td>\n<\/tr>\n<tr>\n<td>\u30d1\u30c3\u30c9\u539a<\/td>\n<td>1.0-3.0 mm<\/td>\n<td>\u5727\u529b\u5206\u5e03\u306b\u5f71\u97ff<\/td>\n<\/tr>\n<tr>\n<td>\u8868\u9762\u7c97\u3055\uff08Ra\uff09<\/td>\n<td>3-10 \u03bcm<\/td>\n<td>\u521d\u671f\u5c01\u5370\u306b\u5f71\u97ff<\/td>\n<\/tr>\n<tr>\n<td>\u591a\u5b54\u6027<\/td>\n<td>20-50%<\/td>\n<td>\u30b7\u30fc\u30ea\u30f3\u30b0\u3068\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9\u306e\u30d0\u30e9\u30f3\u30b9<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 id=\"stability\">6.CMP\u904b\u8ee2\u6761\u4ef6\u4e0b\u3067\u306e\u5438\u7740\u5b89\u5b9a\u6027<\/h2>\n<p>CMP\u4e2d\u3001\u5438\u7740\u6280\u8853\u306f\u6a5f\u68b0\u7684\u3001\u71b1\u7684\u3001\u5316\u5b66\u7684\u30b9\u30c8\u30ec\u30b9\u306e\u8907\u5408\u6761\u4ef6\u4e0b\u3067\u3082\u5b89\u5b9a\u3057\u305f\u72b6\u614b\u3092\u7dad\u6301\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u5438\u7740\u30d1\u30c3\u30c9\u306f\u3001\u71b1\u306b\u654f\u611f\u306a\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u5c64\u304c\u5b58\u5728\u3057\u306a\u3044\u305f\u3081\u3001\u4e00\u822c\u7684\u306aCMP\u52d5\u4f5c\u6e29\u5ea6\u306b\u304a\u3044\u3066\u5b89\u5b9a\u3057\u305f\u6319\u52d5\u3092\u793a\u3057\u307e\u3059\u3002.<\/p>\n<p>\u3055\u3089\u306b\u3001\u5438\u7740\u529b\u306f\u5370\u52a0\u5727\u529b\u306b\u6bd4\u4f8b\u3059\u308b\u305f\u3081\u3001\u904e\u6e21\u7684\u306a\u8377\u91cd\u3084\u901f\u5ea6\u306e\u5909\u52d5\u304c\u3042\u3063\u3066\u3082\u30a6\u30a7\u30fc\u30cf\u4fdd\u6301\u529b\u304c\u6025\u6fc0\u306b\u4f4e\u4e0b\u3059\u308b\u3053\u3068\u306f\u306a\u304f\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u30ed\u30d0\u30b9\u30c8\u6027\u5411\u4e0a\u306b\u8ca2\u732e\u3057\u307e\u3059\u3002.<\/p>\n<h2 id=\"failure-modes\">7.\u5438\u7740\u52a3\u5316\u3068\u6545\u969c\u30e2\u30fc\u30c9<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u5438\u7740\u6280\u8853\u306f\u3001\u30ef\u30c3\u30af\u30b9\u306b\u95a2\u9023\u3059\u308b\u591a\u304f\u306e\u30ea\u30b9\u30af\u3092\u6392\u9664\u3059\u308b\u304c\u3001\u30d1\u30c3\u30c9\u306e\u8868\u9762\u72b6\u614b\u3001\u5b54\u69cb\u9020\u3001\u5f3e\u6027\u7279\u6027\u304c\u8a2d\u8a08\u9650\u754c\u304b\u3089\u5916\u308c\u308b\u3068\u3001\u5438\u7740\u6027\u80fd\u304c\u4f4e\u4e0b\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002\u4e00\u822c\u7684\u306a\u52a3\u5316\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u306f\u3001\u8868\u9762\u306e\u8276\u51fa\u3057\u3001\u5b54\u306e\u76ee\u8a70\u307e\u308a\u3001\u904e\u5ea6\u306e\u6469\u8017\u306a\u3069\u304c\u3042\u308b\u3002.<\/p>\n<p>\u3053\u308c\u3089\u306e\u6545\u969c\u30e2\u30fc\u30c9\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u3067\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u8907\u96d1\u3055\u3092\u5897\u3059\u3053\u3068\u306a\u304f\u4e88\u9632\u4fdd\u5168\u6226\u7565\u3092\u5b9f\u65bd\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002.<\/p>\n<table border=\"1\" cellspacing=\"0\" cellpadding=\"6\">\n<tbody>\n<tr>\n<th>\u6545\u969c\u30e2\u30fc\u30c9<\/th>\n<th>\u6839\u672c\u7684\u306a\u539f\u56e0<\/th>\n<\/tr>\n<tr>\n<td>\u5438\u7740\u306e\u4f4e\u6e1b<\/td>\n<td>\u8868\u9762\u5e73\u6ed1\u5316\u307e\u305f\u306f\u6bdb\u7a74\u8a70\u307e\u308a<\/td>\n<\/tr>\n<tr>\n<td>\u5747\u4e00\u3067\u306a\u3044\u30db\u30fc\u30eb\u30c7\u30a3\u30f3\u30b0<\/td>\n<td>\u5c40\u6240\u7684\u306a\u5f3e\u6027\u7387\u306e\u5909\u5316<\/td>\n<\/tr>\n<tr>\n<td>\u65e9\u3059\u304e\u308b\u30ea\u30ea\u30fc\u30b9<\/td>\n<td>\u30d1\u30c3\u30c9\u306e\u904e\u5ea6\u306e\u78e8\u8017<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 id=\"system-context\">8.CMP\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u5438\u7740\u6280\u8853\u306e\u4f4d\u7f6e\u3065\u3051<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u5438\u7740\u7814\u78e8\u30d1\u30c3\u30c9\u6280\u8853\u306f\u3001\u3088\u308a\u5e83\u7bc4\u306aCMP\u30b7\u30b9\u30c6\u30e0\u30fb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u306e\u4e2d\u3067\u57fa\u790e\u7684\u306a\u8981\u7d20\u3068\u3057\u3066\u6a5f\u80fd\u3057\u307e\u3059\u3002\u3053\u306e\u6280\u8853\u306f\u3001\u30a6\u30a7\u30cf\u30fc\u306e\u5b89\u5b9a\u6027\u3001\u5727\u529b\u4f1d\u9054\u3001\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9\u306e\u518d\u73fe\u6027\u306b\u76f4\u63a5\u5f71\u97ff\u3059\u308b\u3068\u540c\u6642\u306b\u3001\u9ad8\u5ea6\u306aCMP\u30ec\u30b7\u30d4\u3068\u306e\u7d71\u5408\u3092\u7c21\u7d20\u5316\u3057\u307e\u3059\u3002.<\/p>\n<p>CMP\u904b\u8ee2\u4e2d\u306b\u5438\u7740\u6319\u52d5\u304c\u3069\u306e\u3088\u3046\u306b\u5909\u5316\u3059\u308b\u304b\u306b\u3064\u3044\u3066\u306e\u30d7\u30ed\u30bb\u30b9\u30b7\u30fc\u30b1\u30f3\u30b9\u306b\u3088\u308b\u8aac\u660e\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u3092\u53c2\u7167\u306e\u3053\u3068\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/how-wax-free-polishing-pads-work-in-cmp-processes\/\" target=\"_blank\" rel=\"noopener\">\u30ef\u30c3\u30af\u30b9\u4e0d\u8981\u306e\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9\u306e\u4ed5\u7d44\u307f<\/a>. .\u30b7\u30b9\u30c6\u30e0\u30ec\u30d9\u30eb\u306e\u6982\u8981\u3068\u95a2\u9023\u30c8\u30d4\u30c3\u30af\u3078\u306e\u30ca\u30d3\u30b2\u30fc\u30b7\u30e7\u30f3\u306b\u3064\u3044\u3066\u306f\u3001\u30da\u30fc\u30b8 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/wax-free-cmp-polishing-pads-for-semiconductor-manufacturing\/\">\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30fb\u30d1\u30c3\u30c9<\/a>.<\/p>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; Table of Contents 1. Technology Overview: Adsorption as a Replacement for Wax Bonding 2. Fundamental Sources of Adsorption Force in Wax-Free Pads 3. Pad Microstructure Design and Adsorption Efficiency  &#8230;<\/p>","protected":false},"author":1,"featured_media":1323,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1296","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1296","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1296"}],"version-history":[{"count":4,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1296\/revisions"}],"predecessor-version":[{"id":1333,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1296\/revisions\/1333"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1323"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1296"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1296"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1296"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}