{"id":1298,"date":"2026-01-12T10:43:57","date_gmt":"2026-01-12T02:43:57","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1298"},"modified":"2026-01-12T10:49:50","modified_gmt":"2026-01-12T02:49:50","slug":"wax-free-vs-wax-polishing-pads-in-cmp-processing","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/wax-free-vs-wax-polishing-pads-in-cmp-processing\/","title":{"rendered":"CMP\u52a0\u5de5\u306b\u304a\u3051\u308b\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u3068\u30ef\u30c3\u30af\u30b9\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u6bd4\u8f03"},"content":{"rendered":"<p>\u5316\u5b66\u7684\u6a5f\u68b0\u7684\u5e73\u5766\u5316\uff08CMP\uff09\u306b\u304a\u3044\u3066\u3001\u7814\u78e8\u30d1\u30c3\u30c9\u306f\u5358\u306a\u308b\u6d88\u8017\u54c1\u3067\u306f\u306a\u304f\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u5e73\u5766\u5ea6\u3001\u6750\u6599\u9664\u53bb\u7387\uff08MRR\uff09\u3001\u6b20\u9665\u7387\u3001\u6b69\u7559\u307e\u308a\u306e\u5b89\u5b9a\u6027\u3001\u304a\u3088\u3073\u5168\u4f53\u7684\u306a\u6240\u6709\u30b3\u30b9\u30c8\uff08CoO\uff09\u306b\u76f4\u63a5\u5f71\u97ff\u3059\u308b\u91cd\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u69cb\u6210\u8981\u7d20\u3067\u3059\u3002\u5229\u7528\u53ef\u80fd\u306a\u30d1\u30c3\u30c9\u69cb\u9020, <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/wax-free-cmp-polishing-pads-for-semiconductor-manufacturing\/\" target=\"_blank\" rel=\"noopener\">\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u7814\u78e8\u30d1\u30c3\u30c9<\/a> \u3068\u5f93\u6765\u306e\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306e\u7422\u78e8\u30d1\u30c3\u30c9\u306f\u3001\u30a6\u30a7\u30cf\u30fc\u306e\u56fa\u5b9a\u3001\u529b\u306e\u4f1d\u9054\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u306e2\u3064\u306e\u6839\u672c\u7684\u306b\u7570\u306a\u308b\u54f2\u5b66\u3092\u8868\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<p>\u3053\u306e\u30da\u30fc\u30b8\u3067\u306f\u3001\u69cb\u9020\u8a2d\u8a08\u3001\u5438\u7740\u30e1\u30ab\u30cb\u30ba\u30e0\u3001\u30d7\u30ed\u30bb\u30b9\u6319\u52d5\u3001\u6b20\u9665\u30ea\u30b9\u30af\u3001\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u306e\u8907\u96d1\u3055\u3001\u9577\u671f\u7684\u306a\u88fd\u9020\u7d4c\u6e08\u6027\u306b\u7126\u70b9\u3092\u5f53\u3066\u3001\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u7814\u78e8\u30d1\u30c3\u30c9\u3068\u30ef\u30c3\u30af\u30b9\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u6280\u8853\u30ec\u30d9\u30eb\u306e\u6bd4\u8f03\u3092\u884c\u3044\u307e\u3059\u3002\u305d\u306e\u76ee\u7684\u306f\u3001\u30de\u30fc\u30b1\u30c6\u30a3\u30f3\u30b0\u4e0a\u306e\u30cf\u30a4\u30ec\u30d9\u30eb\u306a\u4e3b\u5f35\u3067\u306f\u306a\u304f\u3001\u30c7\u30fc\u30bf\u306b\u57fa\u3065\u3044\u305f\u610f\u601d\u6c7a\u5b9a\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u3053\u3068\u3067\u3059\u3002.<\/p>\n<p><!-- Table of Contents --><\/p>\n<nav>\n<h2>\u76ee\u6b21<\/h2>\n<ul>\n<li><a href=\"#structural-differences\">\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u3068\u30ef\u30c3\u30af\u30b9\u30d1\u30c3\u30c9\u306e\u69cb\u9020\u306e\u9055\u3044<\/a><\/li>\n<li><a href=\"#adsorption-mechanisms\">\u30a6\u30a7\u30cf\u30fc\u306e\u4fdd\u6301\u3068\u5438\u7740\u30e1\u30ab\u30cb\u30ba\u30e0<\/a><\/li>\n<li><a href=\"#process-performance\">CMP\u30d7\u30ed\u30bb\u30b9\u306e\u6027\u80fd\u6bd4\u8f03<\/a><\/li>\n<li><a href=\"#defect-contamination\">\u6b20\u9665\u3068\u6c5a\u67d3\u306e\u30ea\u30b9\u30af<\/a><\/li>\n<li><a href=\"#maintenance-cost\">\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3001\u6d88\u8017\u54c1\u3001\u30b3\u30b9\u30c8\u30e2\u30c7\u30eb<\/a><\/li>\n<li><a href=\"#decision-guidelines\">\u6280\u8853\u7684\u610f\u601d\u6c7a\u5b9a\u306e\u30ac\u30a4\u30c9\u30e9\u30a4\u30f3<\/a><\/li>\n<li><a href=\"#application-scenarios\">\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30fb\u30b7\u30ca\u30ea\u30aa<\/a><\/li>\n<\/ul>\n<\/nav>\n<h2 id=\"structural-differences\">\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u3068\u30ef\u30c3\u30af\u30b9\u30d1\u30c3\u30c9\u306e\u69cb\u9020\u306e\u9055\u3044<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u3068\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306e\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u6700\u3082\u57fa\u672c\u7684\u306a\u9055\u3044\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u56fa\u5b9a\u3092\u3069\u306e\u3088\u3046\u306b\u5b9f\u73fe\u3057\u3001\u30d1\u30c3\u30c9\u69cb\u9020\u306b\u7d44\u307f\u8fbc\u3080\u304b\u306b\u3042\u308a\u307e\u3059\u3002\u3053\u306e\u69cb\u9020\u4e0a\u306e\u9055\u3044\u306f\u3001CMP\u30d7\u30ed\u30bb\u30b9\u306e\u52d5\u4f5c\u306e\u307b\u307c\u3059\u3079\u3066\u306e\u5074\u9762\u306b\u4f1d\u64ad\u3057\u307e\u3059\u3002.<\/p>\n<h3>\u30ef\u30c3\u30af\u30b9\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u69cb\u9020<\/h3>\n<p>\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u88cf\u9762\u3068\u7422\u78e8\u30ad\u30e3\u30ea\u30a2\u307e\u305f\u306f\u30d1\u30c3\u30c9\u8868\u9762\u306e\u9593\u306b\u5857\u5e03\u3055\u308c\u308b\u71b1\u53ef\u5851\u6027\u307e\u305f\u306f\u71b1\u786c\u5316\u6027\u30ef\u30c3\u30af\u30b9\u5c64\u306b\u4f9d\u5b58\u3057\u3066\u3044\u307e\u3059\u3002\u5178\u578b\u7684\u306a\u30ef\u30c3\u30af\u30b9\u6750\u6599\u306b\u306f\u3001\u8edf\u5316\u6e29\u5ea6\u304c60\uff5e90\u2103\u306e\u70ad\u5316\u6c34\u7d20\u7cfb\u30ef\u30c3\u30af\u30b9\u307e\u305f\u306f\u30dd\u30ea\u30de\u30fc\u5909\u6027\u30ef\u30c3\u30af\u30b9\u30d6\u30ec\u30f3\u30c9\u304c\u542b\u307e\u308c\u308b\u3002.<\/p>\n<ul>\n<li>\u63a5\u7740\u754c\u9762\u3068\u3057\u3066\u6a5f\u80fd\u3059\u308b\u500b\u5225\u306e\u30ef\u30c3\u30af\u30b9\u5c64<\/li>\n<li>\u30ef\u30c3\u30af\u30b9\u306e\u539a\u3055\u306f\u901a\u5e3850\uff5e150\u03bcm<\/li>\n<li>\u63a5\u7740\u306b\u306f\u52a0\u71b1\u3001\u56fa\u5b9a\u306b\u306f\u51b7\u5374\u304c\u5fc5\u8981<\/li>\n<li>\u6a5f\u68b0\u7684\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9\u306f\u6e29\u5ea6\u306b\u3088\u3063\u3066\u5909\u5316\u3059\u308b<\/li>\n<\/ul>\n<p>\u3053\u306e\u65b9\u6cd5\u3067\u306f\u3001CMP\u30b9\u30bf\u30c3\u30af\u306b\u4e0d\u5747\u4e00\u3067\u6e29\u5ea6\u306b\u654f\u611f\u306a\u4e2d\u9593\u819c\u304c\u5c0e\u5165\u3055\u308c\u3001\u5727\u529b\u4f1d\u9054\u3068\u30a6\u30a7\u30fc\u30cf\u306e\u5e73\u5766\u5ea6\u5236\u5fa1\u306b\u76f4\u63a5\u5f71\u97ff\u3059\u308b\u3002.<\/p>\n<h3>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u69cb\u9020<\/h3>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u7422\u78e8\u30d1\u30c3\u30c9\u306f\u3001\u30ef\u30c3\u30af\u30b9\u5c64\u3092\u5b8c\u5168\u306b\u9664\u53bb\u3057\u3001\u4ee3\u308f\u308a\u306b\u5438\u7740\u6a5f\u80fd\u3092\u30d1\u30c3\u30c9\u672c\u4f53\u307e\u305f\u306f\u30b5\u30d6\u5c64\u306b\u76f4\u63a5\u7d44\u307f\u8fbc\u3080\u3002\u5438\u7740\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u306f\u3001\u771f\u7a7a\u30de\u30a4\u30af\u30ed\u30c1\u30e3\u30cd\u30eb\u3001\u6bdb\u7d30\u7ba1\u5438\u5f15\u3001\u307e\u305f\u306f\u8a2d\u8a08\u3055\u308c\u305f\u30de\u30a4\u30af\u30ed\u30dd\u30fc\u30e9\u30b9\u69cb\u9020\u304c\u542b\u307e\u308c\u308b\u3002.<\/p>\n<ul>\n<li>\u5916\u90e8\u63a5\u7740\u5264\u3084\u7d50\u5408\u6750\u306a\u3057<\/li>\n<li>\u30d1\u30c3\u30c9\u30fb\u30de\u30a4\u30af\u30ed\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u306b\u7d71\u5408\u3055\u308c\u305f\u5438\u7740\u69cb\u9020<\/li>\n<li>\u30a6\u30a7\u30fc\u30cf\u3068\u30d1\u30c3\u30c9\u9593\u306e\u76f4\u63a5\u6a5f\u68b0\u7684\u7d50\u5408<\/li>\n<li>\u71b1\u7684\u306b\u5b89\u5b9a\u3057\u305f\u56fa\u5b9a\u6319\u52d5<\/li>\n<\/ul>\n<p>\u5438\u7740\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u30fc\u306b\u95a2\u3059\u308b\u3088\u308a\u6df1\u3044\u8b70\u8ad6\u306f\u3001\u4ee5\u4e0b\u3092\u53c2\u7167\u3055\u308c\u305f\u3044\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/how-wax-free-polishing-pads-work-in-cmp-processes\/\" target=\"_blank\" rel=\"noopener\">\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u5438\u7740\u7814\u78e8\u30d1\u30c3\u30c9\u6280\u8853<\/a>.<\/p>\n<p><!-- Image Placeholder --><\/p>\n<h2 id=\"adsorption-mechanisms\">\u30a6\u30a7\u30cf\u30fc\u306e\u4fdd\u6301\u3068\u5438\u7740\u30e1\u30ab\u30cb\u30ba\u30e0<\/h2>\n<p>\u30a6\u30a7\u30fc\u30cf\u306e\u56fa\u5b9a\u306f\u3001CMP\u4e2d\u306b\u7814\u78e8\u5727\u529b\u3001\u305b\u3093\u65ad\u529b\u3001\u304a\u3088\u3073\u30b9\u30e9\u30ea\u30fc\u306b\u8d77\u56e0\u3059\u308b\u6d41\u4f53\u529b\u5b66\u7684\u529b\u304c\u3069\u306e\u3088\u3046\u306b\u4f1d\u9054\u3055\u308c\u308b\u304b\u3092\u6c7a\u5b9a\u3057\u307e\u3059\u3002\u4fdd\u6301\u6a5f\u69cb\u306e\u9055\u3044\u306b\u3088\u308a\u3001\u7814\u78e8\u306e\u5747\u4e00\u6027\u3068\u6b20\u9665\u306e\u6319\u52d5\u306b\u6e2c\u5b9a\u53ef\u80fd\u306a\u3070\u3089\u3064\u304d\u304c\u751f\u3058\u307e\u3059\u3002.<\/p>\n<h3>\u30ef\u30c3\u30af\u30b9\u306b\u3088\u308b\u56fa\u5b9a\u884c\u52d5<\/h3>\n<p>\u30ef\u30c3\u30af\u30b9\u56fa\u5b9a\u306f\u63a5\u7740\u5f37\u5ea6\u306b\u4f9d\u5b58\u3057\u3066\u304a\u308a\u3001\u63a5\u7740\u5f37\u5ea6\u306f\u30ef\u30c3\u30af\u30b9\u306e\u7c98\u5ea6\u3001\u63a5\u7740\u6e29\u5ea6\u3001\u51b7\u5374\u901f\u5ea6\u306e\u95a2\u6570\u3067\u3042\u308b\u3002\u3053\u308c\u306b\u306f\u3044\u304f\u3064\u304b\u306e\u5909\u6570\u304c\u3042\u308b\uff1a<\/p>\n<ul>\n<li>\u63a5\u7740\u5f37\u5ea6\u306f\u6e29\u5ea6\u30c9\u30ea\u30d5\u30c8\u3068\u3068\u3082\u306b\u4f4e\u4e0b\u3059\u308b<\/li>\n<li>\u5c40\u6240\u7684\u306a\u539a\u307f\u306e\u3070\u3089\u3064\u304d\u304c\u5727\u529b\u306e\u4e0d\u5747\u4e00\u6027\u306b\u3064\u306a\u304c\u308b<\/li>\n<li>\u9577\u6642\u9593\u306e\u30dd\u30ea\u30c3\u30b7\u30e5\u30fb\u30b5\u30a4\u30af\u30eb\u3067\u306e\u30ef\u30c3\u30af\u30b9\u30fb\u30af\u30ea\u30fc\u30d7<\/li>\n<\/ul>\n<p>\u305d\u306e\u7d50\u679c\u3001\u7279\u306b\u9577\u6642\u9593\u306eCMP\u30d7\u30ed\u30bb\u30b9\u3084\u591a\u6bb5\u968e\u306eCMP\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u88cf\u9762\u306e\u5e73\u5766\u6027\u304c\u640d\u306a\u308f\u308c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/p>\n<h3>\u30ef\u30c3\u30af\u30b9\u3092\u4f7f\u308f\u306a\u3044\u5438\u7740\u56fa\u5b9a<\/h3>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u30d1\u30c3\u30c9\u306f\u3001\u5206\u6563\u3057\u305f\u5438\u7740\u529b\u306b\u3088\u3063\u3066\u30a6\u30a7\u30cf\u30fc\u306e\u4fdd\u6301\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002\u7c98\u7740\u5264\u306b\u3088\u308b\u63a5\u7740\u3068\u306f\u7570\u306a\u308a\u3001\u5438\u7740\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u5229\u70b9\u304c\u3042\u308a\u307e\u3059\uff1a<\/p>\n<ul>\n<li>\u5747\u4e00\u306a\u6cd5\u7dda\u529b\u5206\u5e03<\/li>\n<li>\u71b1\u30b5\u30a4\u30af\u30eb\u306a\u3057\u306e\u5373\u6642\u56fa\u5b9a<\/li>\n<li>\u30a6\u30a7\u30cf\u30fc\u5168\u4f53\u3067\u7e70\u308a\u8fd4\u3057\u53ef\u80fd\u306a\u4fdd\u6301\u529b<\/li>\n<\/ul>\n<p>\u5178\u578b\u7684\u306a\u5438\u7740\u5727\u529b\u306f\u3001\u30d1\u30c3\u30c9\u306e\u30c7\u30b6\u30a4\u30f3\u3001\u30de\u30a4\u30af\u30ed\u30c1\u30e3\u30f3\u30cd\u30eb\u306e\u5bc6\u5ea6\u3001\u771f\u7a7a\u69cb\u6210\u306b\u3088\u3063\u30665\uff5e25kPa\u306e\u7bc4\u56f2\u3067\u3042\u308b\u3002.<\/p>\n<p><!-- Table Placeholder --><\/p>\n<table border=\"1\">\n<tbody>\n<tr>\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n<th>\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306e\u30d1\u30c3\u30c9<\/th>\n<th>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30fb\u30d1\u30c3\u30c9<\/th>\n<\/tr>\n<tr>\n<td>\u56fa\u5b9a\u539f\u7406<\/td>\n<td>\u71b1\u63a5\u7740<\/td>\n<td>\u7269\u7406\u7684\u5438\u7740<\/td>\n<\/tr>\n<tr>\n<td>\u71b1\u611f\u5ea6<\/td>\n<td>\u9ad8\u3044<\/td>\n<td>\u4f4e\u3044<\/td>\n<\/tr>\n<tr>\n<td>\u56fa\u5b9a\u518d\u73fe\u6027<\/td>\n<td>\u30df\u30c7\u30a3\u30a2\u30e0<\/td>\n<td>\u9ad8\u3044<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 id=\"process-performance\">CMP\u30d7\u30ed\u30bb\u30b9\u306e\u6027\u80fd\u6bd4\u8f03<\/h2>\n<p>\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306e\u89b3\u70b9\u304b\u3089\u3001CMP\u306e\u6027\u80fd\u306f\u3001MRR\u306e\u5b89\u5b9a\u6027\u3001\u30a6\u30a7\u30fc\u30cf\u5185\u4e0d\u5747\u4e00\u6027\uff08WIWNU\uff09\u3001\u7d4c\u6642\u7684\u306a\u30d7\u30ed\u30bb\u30b9\u30c9\u30ea\u30d5\u30c8\u306a\u3069\u306e\u6e2c\u5b9a\u53ef\u80fd\u306a\u6307\u6a19\u3092\u7528\u3044\u3066\u8a55\u4fa1\u3055\u308c\u308b\u3002.<\/p>\n<h3>\u6750\u6599\u9664\u53bb\u7387\u306e\u5b89\u5b9a\u6027<\/h3>\n<p>\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u30ef\u30c3\u30af\u30b9\u306e\u8edf\u5316\u3001\u5727\u7e2e\u3001\u8377\u91cd\u4e0b\u3067\u306e\u7de9\u3084\u304b\u306a\u518d\u5206\u5e03\u306b\u3088\u308a\u3001\u3057\u3070\u3057\u3070MRR\u30c9\u30ea\u30d5\u30c8\u3092\u793a\u3059\u3002\u30ef\u30c3\u30af\u30b9\u3092\u4f7f\u7528\u3057\u306a\u3044\u30d1\u30c3\u30c9\u306f\u3001\u76f4\u63a5\u7684\u306a\u6a5f\u68b0\u7684\u7d50\u5408\u306b\u3088\u308a\u3001\u3088\u308a\u5b89\u5b9a\u3057\u305fMRR\u6319\u52d5\u3092\u793a\u3059\u3002.<\/p>\n<p>\u5178\u578b\u7684\u306aMRR\u306e\u5909\u5316\uff1a<\/p>\n<ul>\n<li>\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306e\u30d1\u30c3\u30c9\uff1a\u00b16-10%<\/li>\n<li>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\uff1a\u00b12\uff5e4%<\/li>\n<\/ul>\n<h3>\u5e73\u9762\u6027\u3068\u30a8\u30c3\u30b8\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/h3>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30fb\u30d1\u30c3\u30c9\u306f\u4e00\u822c\u306b\u3001\u5747\u4e00\u306a\u5727\u529b\u4f1d\u9054\u306b\u3088\u308a\u30a8\u30c3\u30b8\u306e\u6392\u9664\u5236\u5fa1\u304c\u6539\u5584\u3055\u308c\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u4f7f\u7528\u53ef\u80fd\u306a\u30a6\u30a7\u30fc\u30cf\u9762\u7a4d\u304c\u53b3\u3057\u304f\u5236\u9650\u3055\u308c\u308b\u5148\u7aef\u30ce\u30fc\u30c9\u306b\u3068\u3063\u3066\u975e\u5e38\u306b\u91cd\u8981\u3067\u3059\u3002.<\/p>\n<p><!-- Video Placeholder --><\/p>\n<div><div class=\"fusion-video fusion-youtube\" style=\"--awb-max-width:600px;--awb-max-height:350px;\"><div class=\"video-shortcode\"><div class=\"fluid-width-video-wrapper\" style=\"padding-top:58.33%;\" ><iframe class=\"lazyload\" title=\"YouTube\u30d3\u30c7\u30aa\u30d7\u30ec\u30fc\u30e4\u30fc1\" src=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27350%27%20viewBox%3D%270%200%20600%20350%27%3E%3Crect%20width%3D%27600%27%20height%3D%27350%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-orig-src=\"https:\/\/www.youtube.com\/embed\/zCYxnyxAQDw?wmode=transparent&autoplay=0\" width=\"600\" height=\"350\" allowfullscreen allow=\"autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture;\"><\/iframe><\/div><\/div><\/div><\/div>\n<h2 id=\"defect-contamination\">\u6b20\u9665\u3068\u6c5a\u67d3\u306e\u30ea\u30b9\u30af<\/h2>\n<p>\u6b20\u9665\u7ba1\u7406\u306f\u3001\u696d\u754c\u304c\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u30b7\u30b9\u30c6\u30e0\u306b\u79fb\u884c\u3059\u308b\u5927\u304d\u306a\u539f\u52d5\u529b\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n<h3>\u30ef\u30c3\u30af\u30b9\u95a2\u9023\u306e\u6c5a\u67d3\u30ea\u30b9\u30af<\/h3>\n<ul>\n<li>\u30a6\u30a7\u30fc\u30cf\u88cf\u9762\u306e\u30ef\u30c3\u30af\u30b9\u6b8b\u7559\u7269<\/li>\n<li>\u30d5\u30ed\u30f3\u30c8\u5074\u306b\u79fb\u52d5\u3059\u308b\u6709\u6a5f\u6c5a\u67d3<\/li>\n<li>\u30ef\u30c3\u30af\u30b9\u9664\u53bb\u6642\u306e\u7c92\u5b50\u767a\u751f<\/li>\n<\/ul>\n<p>\u3053\u3046\u3057\u305f\u30ea\u30b9\u30af\u306f\u6d17\u6d44\u306e\u8907\u96d1\u3055\u3092\u5897\u3057\u3001\u7279\u306b\u9285\u3084\u9ad8\u5ea6\u306a\u8a98\u96fb\u4f53CMP\u5de5\u7a0b\u3067\u306f\u6b69\u7559\u307e\u308a\u3092\u4f4e\u4e0b\u3055\u305b\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/p>\n<h3>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u6e05\u6f54\u3055\u306e\u5229\u70b9<\/h3>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u6709\u6a5f\u63a5\u7740\u5264\u306e\u6b8b\u7559\u7269\u3092\u5b8c\u5168\u306b\u9664\u53bb\u3057\u3001CMP\u5f8c\u306e\u6d17\u6d44\u3092\u7c21\u7d20\u5316\u3057\u3001\u6b20\u9665\u5bc6\u5ea6\u3001\u7279\u306b\u30de\u30a4\u30af\u30ed\u30b9\u30af\u30e9\u30c3\u30c1\u3084\u6709\u6a5f\u819c\u3092\u4f4e\u6e1b\u3057\u307e\u3059\u3002.<\/p>\n<h2 id=\"maintenance-cost\">\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3001\u6d88\u8017\u54c1\u3001\u30b3\u30b9\u30c8\u30e2\u30c7\u30eb<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306e\u30d1\u30c3\u30c9\u306f\u3001\u8cfc\u5165\u5f53\u521d\u306f\u4f4e\u30b3\u30b9\u30c8\u3067\u3042\u308b\u3088\u3046\u306b\u898b\u3048\u308b\u304b\u3082\u3057\u308c\u306a\u3044\u304c\u3001\u7dcf\u6240\u6709\u30b3\u30b9\u30c8\u3067\u898b\u308b\u3068\u7570\u306a\u308b\u3053\u3068\u304c\u308f\u304b\u308b\u3002.<\/p>\n<h3>\u30ef\u30c3\u30af\u30b9\u30fb\u30d9\u30fc\u30b9\u306e\u30b7\u30b9\u30c6\u30e0\u30fb\u30b3\u30b9\u30c8<\/h3>\n<ul>\n<li>\u30ef\u30c3\u30af\u30b9\u539f\u6599\u6d88\u8cbb\u91cf<\/li>\n<li>\u51b7\u6696\u623f\u30a8\u30cd\u30eb\u30ae\u30fc<\/li>\n<li>\u8ffd\u52a0\u306e\u6d17\u6d44\u624b\u9806<\/li>\n<li>\u30c0\u30a6\u30f3\u30bf\u30a4\u30e0\u306e\u5897\u52a0<\/li>\n<\/ul>\n<h3>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u7d4c\u6e08\u6027<\/h3>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\u306f\u3001\u88dc\u52a9\u6d88\u8017\u54c1\u3092\u524a\u6e1b\u3057\u3001\u30d7\u30ed\u30bb\u30b9\u30d5\u30ed\u30fc\u3092\u7c21\u7d20\u5316\u3059\u308b\u3002.<\/p>\n<h2 id=\"decision-guidelines\">\u6280\u8853\u7684\u610f\u601d\u6c7a\u5b9a\u306e\u30ac\u30a4\u30c9\u30e9\u30a4\u30f3<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u3068\u30ef\u30c3\u30af\u30b9\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u9078\u629e\u306f\u8003\u616e\u3059\u3079\u304d\u3067\u3042\u308b\uff1a<\/p>\n<ul>\n<li>\u30ce\u30fc\u30c9\u6280\u8853\u3068\u5e73\u9762\u6027\u306e\u8981\u4ef6<\/li>\n<li>\u6b20\u9665\u5bc6\u5ea6\u611f\u5ea6<\/li>\n<li>\u30d7\u30ed\u30bb\u30b9\u6e29\u5ea6\u30a6\u30a3\u30f3\u30c9\u30a6<\/li>\n<li>\u6a5f\u5668\u306e\u4e92\u63db\u6027<\/li>\n<\/ul>\n<p>\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u3001\u30e1\u30e2\u30ea\u30fc\u3001\u9ad8\u6b69\u7559\u307e\u308a\u9285 CMP \u3092\u30bf\u30fc\u30b2\u30c3\u30c8\u3068\u3059\u308b\u5de5\u5834\u3067\u306f\u3001\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30fb\u30d1\u30c3\u30c9\u304c\u65e2\u5b9a \u306e\u9078\u629e\u80a2\u306b\u306a\u308a\u3064\u3064\u3042\u308a\u307e\u3059\u3002.<\/p>\n<h2 id=\"application-scenarios\">\u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30fb\u30b7\u30ca\u30ea\u30aa<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u7814\u78e8\u30d1\u30c3\u30c9\u306f\u3001\u4e00\u822c\u7684\u306b\u63a1\u7528\u3055\u308c\u3066\u3044\u308b\uff1a<\/p>\n<ul>\n<li>\u9285CMP<\/li>\n<li>\u4f4e\u8a98\u96fb\u7387CMP<\/li>\n<li>\u9ad8\u5ea6\u306a\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u30fb\u30d7\u30ed\u30bb\u30b9<\/li>\n<\/ul>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>In chemical mechanical planarization (CMP), the polishing pad is not merely a consumable surface but a critical process component that directly affects wafer flatness, material removal rate (MRR), defectivity, yield  &#8230;<\/p>","protected":false},"author":1,"featured_media":1315,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1298","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1298","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1298"}],"version-history":[{"count":5,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1298\/revisions"}],"predecessor-version":[{"id":1335,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1298\/revisions\/1335"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1315"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1298"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1298"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1298"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}