{"id":1302,"date":"2026-01-12T10:46:20","date_gmt":"2026-01-12T02:46:20","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1302"},"modified":"2026-01-12T10:54:52","modified_gmt":"2026-01-12T02:54:52","slug":"cmp-polishing-pad-materials-and-structure-explained","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-polishing-pad-materials-and-structure-explained\/","title":{"rendered":"CMP\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u6750\u8cea\u3068\u69cb\u9020\u3092\u89e3\u8aac"},"content":{"rendered":"<p>CMP\u3067\u306f\u3001\u7422\u78e8\u30d1\u30c3\u30c9\u6750\u6599\u304c\u57fa\u672c\u7684\u306a\u6a5f\u68b0\u7684\u3001\u5316\u5b66\u7684\u3001\u304a\u3088\u3073\u30c8\u30e9\u30a4\u30dc\u30ed\u30b8\u30fc\u7684\u76f8\u4e92\u4f5c\u7528\u3092\u898f\u5b9a\u3057\u3001\u305d\u308c\u304c\u6700\u7d42\u7684\u306b\u5e73\u5766\u5316\u52b9\u7387\u3001\u6b20\u9665\u7387\u3001\u304a\u3088\u3073\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3092\u6c7a\u5b9a\u3057\u307e\u3059\u3002\u7814\u78e8\u30d1\u30c3\u30c9\u6750\u6599 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/wax-free-cmp-polishing-pads-for-semiconductor-manufacturing\/\" target=\"_blank\" rel=\"noopener\">\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u7814\u78e8\u30d1\u30c3\u30c9<\/a>, \u30a6\u30a7\u30cf\u30fc\u306e\u56fa\u5b9a\u3001\u529b\u306e\u4f1d\u9054\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u76f8\u4e92\u4f5c\u7528\u306f\u3001\u88dc\u52a9\u7684\u306a\u30ef\u30c3\u30af\u30b9\u5c64\u3067\u306f\u306a\u304f\u3001\u30d1\u30c3\u30c9\u306e\u30d0\u30eb\u30af\u3068\u8868\u9762\u306e\u7279\u6027\u306b\u3088\u3063\u3066\u76f4\u63a5\u652f\u914d\u3055\u308c\u308b\u305f\u3081\u3001\u6750\u6599\u306e\u9078\u629e\u304c\u3055\u3089\u306b\u91cd\u8981\u306b\u306a\u308a\u307e\u3059\u3002.<\/p>\n<p>\u3053\u306e\u6587\u66f8\u3067\u306f\u3001\u30dd\u30ea\u30de\u30fc\u7cfb\u3001\u5fae\u7d30\u69cb\u9020\u8a2d\u8a08\u3001\u6a5f\u68b0\u7684\u30d1\u30e9\u30e1\u30fc\u30bf\u3001\u6469\u8017\u6319\u52d5\u3001\u304a\u3088\u3073\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\u69cb\u9020\u3078\u306e\u5177\u4f53\u7684\u306a\u5f71\u97ff\u306b\u7126\u70b9\u3092\u5f53\u3066\u3001CMP\u7814\u78e8\u30d1\u30c3\u30c9\u6750\u6599\u306e\u6750\u6599\u30e1\u30ab\u30cb\u30ba\u30e0\u30ec\u30d9\u30eb\u306e\u5206\u6790\u3092\u884c\u3046\u3002.<\/p>\n<nav>\n<h2>\u76ee\u6b21<\/h2>\n<ul>\n<li><a href=\"#material-overview\">CMP\u7814\u78e8\u30d1\u30c3\u30c9\u6750\u6599\u306e\u6982\u8981<\/a><\/li>\n<li><a href=\"#polymer-chemistry\">\u30dd\u30ea\u30de\u30fc\u5316\u5b66\u3068\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u8a2d\u8a08<\/a><\/li>\n<li><a href=\"#microstructure\">\u5fae\u7d30\u69cb\u9020\u3068\u6c17\u5b54\u7387\u5de5\u5b66<\/a><\/li>\n<li><a href=\"#mechanical-properties\">\u6a5f\u68b0\u7684\u7279\u6027\u3068\u8377\u91cd\u4f1d\u9054<\/a><\/li>\n<li><a href=\"#slurry-interaction\">CMP\u30b9\u30e9\u30ea\u30fc\u3068\u6750\u6599\u306e\u76f8\u4e92\u4f5c\u7528<\/a><\/li>\n<li><a href=\"#wear-lifetime\">\u6469\u8017\u30e1\u30ab\u30cb\u30ba\u30e0\u3068\u30d1\u30c3\u30c9\u5bff\u547d<\/a><\/li>\n<li><a href=\"#material-selection\">\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\u306e\u7d20\u6750\u9078\u629e\u30ac\u30a4\u30c9\u30e9\u30a4\u30f3<\/a><\/li>\n<\/ul>\n<\/nav>\n<h2 id=\"material-overview\">CMP\u7814\u78e8\u30d1\u30c3\u30c9\u6750\u6599\u306e\u6982\u8981<\/h2>\n<p>CMP\u7814\u78e8\u30d1\u30c3\u30c9\u306f\u901a\u5e38\u3001\u5f3e\u6027\u3001\u786c\u5ea6\u3001\u8010\u85ac\u54c1\u6027\u3001\u6469\u8017\u5b89\u5b9a\u6027\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u8003\u616e\u3057\u3066\u8a2d\u8a08\u3055\u308c\u305f\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30dd\u30ea\u30de\u30fc\u30b7\u30b9\u30c6\u30e0\u304b\u3089\u88fd\u9020\u3055\u308c\u307e\u3059\u3002\u5f93\u6765\u306e\u30e9\u30c3\u30d4\u30f3\u30b0\u30d1\u30c3\u30c9\u3084\u30b0\u30e9\u30a4\u30f3\u30c7\u30a3\u30f3\u30b0\u30d1\u30c3\u30c9\u3068\u306f\u7570\u306a\u308a\u3001CMP\u30d1\u30c3\u30c9\u306f\u7d99\u7d9a\u7684\u306a\u6a5f\u68b0\u7684\u30fb\u5316\u5b66\u7684\u653b\u6483\u3092\u53d7\u3051\u3066\u3082\u3001\u5236\u5fa1\u3055\u308c\u305f\u30a2\u30b9\u30da\u30ea\u30c6\u30a3\u69cb\u9020\u3092\u7dad\u6301\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n<p>\u6700\u3082\u4e00\u822c\u7684\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308bCMP\u30d1\u30c3\u30c9\u6750\u6599\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u3082\u306e\u304c\u3042\u308b\uff1a<\/p>\n<ul>\n<li>\u30dd\u30ea\u30a6\u30ec\u30bf\u30f3\uff08PU\uff09\u304a\u3088\u3073PU\u30d6\u30ec\u30f3\u30c9<\/li>\n<li>\u30dd\u30ea\u30a6\u30ec\u30bf\u30f3-\u30a6\u30ec\u30a2\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30b7\u30b9\u30c6\u30e0<\/li>\n<li>\u7121\u6a5f\u6539\u8cea\u5264\u3092\u7528\u3044\u305f\u5145\u586b\u30dd\u30ea\u30de\u30fc\u8907\u5408\u6750\u6599<\/li>\n<\/ul>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\u3067\u306f\u3001\u3053\u308c\u3089\u306e\u7d20\u6750\u304c\u3055\u3089\u306b\u5438\u7740\u69cb\u9020\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u305f\u3081\u3001\u30d1\u30c3\u30c9\u306e\u539a\u307f\u5168\u4f53\u306b\u308f\u305f\u308b\u5747\u4e00\u6027\u3001\u900f\u904e\u6027\u3001\u69cb\u9020\u7684\u5b8c\u5168\u6027\u304c\u4e0d\u53ef\u6b20\u3068\u306a\u308b\u3002.<\/p>\n<h2 id=\"polymer-chemistry\">\u30dd\u30ea\u30de\u30fc\u5316\u5b66\u3068\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u8a2d\u8a08<\/h2>\n<p>\u30dd\u30ea\u30a6\u30ec\u30bf\u30f3\u30d9\u30fc\u30b9\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u8abf\u6574\u53ef\u80fd\u306a\u6a5f\u68b0\u7684\u7279\u6027\u3068\u5e83\u3044pH\u7bc4\u56f2\u306b\u308f\u305f\u308b\u5316\u5b66\u7684\u5b89\u5b9a\u6027\u306b\u3088\u308a\u3001CMP\u7814\u78e8\u30d1\u30c3\u30c9\u88fd\u9020\u306e\u4e3b\u6d41\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u30cf\u30fc\u30c9\u30bb\u30b0\u30e1\u30f3\u30c8\u3068\u30bd\u30d5\u30c8\u30bb\u30b0\u30e1\u30f3\u30c8\u306e\u6bd4\u7387\u3092\u8abf\u6574\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30d1\u30c3\u30c9\u8a2d\u8a08\u8005\u306f\u5f3e\u6027\u7387\u3001\u53cd\u767a\u6319\u52d5\u3001\u8010\u6469\u8017\u6027\u3092\u6b63\u78ba\u306b\u5236\u5fa1\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n<p>\u5178\u578b\u7684\u306a\u9ad8\u5206\u5b50\u5316\u5b66\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3042\u308b\uff1a<\/p>\n<ul>\n<li>\u30cf\u30fc\u30c9\u30bb\u30b0\u30e1\u30f3\u30c8\u306e\u5185\u5bb930-55%<\/li>\n<li>\u30ac\u30e9\u30b9\u8ee2\u79fb\u6e29\u5ea6(Tg)-20\u00b0C\uff5e+30\u00b0C<\/li>\n<li>\u7c98\u5f3e\u6027\u5236\u5fa1\u306e\u305f\u3081\u306b\u8abf\u6574\u3055\u308c\u305f\u67b6\u6a4b\u5bc6\u5ea6<\/li>\n<\/ul>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u5438\u7740\u30d1\u30c3\u30c9\u3067\u306f\u3001\u30dd\u30ea\u30de\u30fc\u30de\u30c8\u30ea\u30af\u30b9\u306f\u5c40\u6240\u7684\u306a\u771f\u7a7a\u3084\u6bdb\u7d30\u7ba1\u529b\u306e\u4e0b\u3067\u3082\u5bf8\u6cd5\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3057\u3001\u5438\u7740\u30c1\u30e3\u30f3\u30cd\u30eb\u306e\u5fae\u5c0f\u306a\u5d29\u58ca\u3092\u9632\u3050\u5fc5\u8981\u304c\u3042\u308b\u3002.<\/p>\n<p><!-- Image Placeholder --><\/p>\n<div><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1321\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads.webp\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads.webp\" alt=\"Polymer chemistry and segment structure in CMP polishing pads\" width=\"1787\" height=\"1061\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271787%27%20height%3D%271061%27%20viewBox%3D%270%200%201787%201061%27%3E%3Crect%20width%3D%271787%27%20height%3D%271061%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-200x119.webp 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-300x178.webp 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-400x237.webp 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-600x356.webp 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-768x456.webp 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-800x475.webp 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-1024x608.webp 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-1200x712.webp 1200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-1536x912.webp 1536w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads.webp 1787w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1787px) 100vw, 1787px\" \/><\/div>\n<h2 id=\"microstructure\">\u5fae\u7d30\u69cb\u9020\u3068\u6c17\u5b54\u7387\u5de5\u5b66<\/h2>\n<p>\u5fae\u7d30\u69cb\u9020\u306f\u3001\u9593\u9055\u3044\u306a\u304fCMP\u30d1\u30c3\u30c9\u306e\u6027\u80fd\u3092\u5de6\u53f3\u3059\u308b\u6700\u3082\u91cd\u8981\u306a\u8981\u7d20\u3067\u3059\u3002\u7d30\u5b54\u5f84\u5206\u5e03\u3001\u7d30\u5b54\u306e\u9023\u901a\u6027\u3001\u8868\u9762\u306e\u51f9\u51f8\u5f62\u72b6\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u8f38\u9001\u3001\u7834\u7247\u306e\u6392\u51fa\u3001\u5b9f\u969b\u306e\u63a5\u89e6\u9762\u7a4d\u3092\u7dcf\u5408\u7684\u306b\u6c7a\u5b9a\u3057\u307e\u3059\u3002.<\/p>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30fb\u30d1\u30c3\u30c9\u306f\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u4eba\u5de5\u7684\u306b\u4f5c\u3089\u308c\u305f\u5fae\u591a\u5b54\u8cea\u30cd\u30c3\u30c8\u30ef\u30fc\u30af\u3092\u5099\u3048\u3066\u3044\u308b\uff1a<\/p>\n<ul>\n<li>\u5e73\u5747\u5b54\u5f8410-80 \u03bcm<\/li>\n<li>\u958b\u6c17\u5b54\u7387\u3092\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\uff1a30-60%<\/li>\n<li>\u65b9\u5411\u6027\u307e\u305f\u306f\u7b49\u65b9\u6027\u306e\u9593\u9699\u9023\u7d50\u6027<\/li>\n<\/ul>\n<p>\u3053\u308c\u3089\u306e\u5fae\u7d30\u69cb\u9020\u306f\u3001\u52b9\u7387\u7684\u306a\u30b9\u30e9\u30ea\u30fc\u4f9b\u7d66\u3092\u53ef\u80fd\u306b\u3059\u308b\u3068\u540c\u6642\u306b\u3001\u5438\u7740\u30d9\u30fc\u30b9\u306e\u30a6\u30a7\u30cf\u30fc\u4fdd\u6301\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u3068\u3044\u3046\u3001\u4e8c\u91cd\u306e\u6a5f\u80fd\u3092\u679c\u305f\u3059\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/wax-free-adsorption-polishing-pad-technology\/\" target=\"_blank\" rel=\"noopener\">\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u5438\u7740\u7814\u78e8\u30d1\u30c3\u30c9\u6280\u8853<\/a>.<\/p>\n<table border=\"1\">\n<tbody>\n<tr>\n<th>\u5fae\u7d30\u69cb\u9020\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n<th>\u5178\u578b\u7684\u306a\u7bc4\u56f2<\/th>\n<th>\u6a5f\u80fd<\/th>\n<\/tr>\n<tr>\n<td>\u5b54\u5f84<\/td>\n<td>10-80 \u03bcm<\/td>\n<td>\u30b9\u30e9\u30ea\u30fc\u306e\u8f38\u9001\u3068\u74e6\u792b\u306e\u9664\u53bb<\/td>\n<\/tr>\n<tr>\n<td>\u591a\u5b54\u6027<\/td>\n<td>30-60%<\/td>\n<td>\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9\u3068\u5438\u7740\u80fd\u529b<\/td>\n<\/tr>\n<tr>\n<td>\u30a2\u30b9\u30da\u30ea\u30c6\u30a3\u306e\u9ad8\u3055<\/td>\n<td>5-30 \u03bcm<\/td>\n<td>\u30b3\u30f3\u30bf\u30af\u30c8\u30e1\u30ab\u30cb\u30af\u30b9\u5236\u5fa1<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 id=\"mechanical-properties\">\u6a5f\u68b0\u7684\u7279\u6027\u3068\u8377\u91cd\u4f1d\u9054<\/h2>\n<p>\u6a5f\u68b0\u7684\u7279\u6027\u306f\u3001\u7814\u78e8\u5727\u529b\u304c\u30ad\u30e3\u30ea\u30a2\u304b\u3089\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u3078\u3069\u306e\u3088\u3046\u306b\u4f1d\u9054\u3055\u308c\u308b\u304b\u3092\u652f\u914d\u3057\u307e\u3059\u3002\u4e3b\u306a\u30d1\u30e9\u30e1\u30fc\u30bf\u306b\u306f\u3001\u786c\u5ea6\u3001\u5f3e\u6027\u7387\u3001\u7c98\u5f3e\u6027\u6e1b\u8870\u304c\u542b\u307e\u308c\u307e\u3059\u3002.<\/p>\n<p>\u5178\u578b\u7684\u306a\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fcCMP\u30d1\u30c3\u30c9\u306e\u6a5f\u68b0\u7684\u7bc4\u56f2\uff1a<\/p>\n<ul>\n<li>\u30b7\u30e7\u30a2D\u786c\u5ea645-65<\/li>\n<li>\u5f3e\u6027\u7387\uff1a50\uff5e300MPa<\/li>\n<li>\u5727\u7e2e\u30bb\u30c3\u30c8&lt;10%<\/li>\n<\/ul>\n<p>\u30ef\u30c3\u30af\u30b9\u30d9\u30fc\u30b9\u306e\u30b7\u30b9\u30c6\u30e0\u3068\u6bd4\u3079\u3066\u3001\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u30d1\u30c3\u30c9\u306f\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u6563\u9038\u3092\u6291\u3048\u306a\u304c\u3089\u3088\u308a\u76f4\u63a5\u7684\u306a\u8377\u91cd\u4f1d\u9054\u3092\u5b9f\u73fe\u3057\u3001\u7279\u306b\u52d5\u7684\u306a\u7422\u78e8\u6761\u4ef6\u4e0b\u3067\u3001\u30a6\u30a7\u30fc\u30cf\u5185\u306e\u5747\u4e00\u6027\u3068\u30a8\u30c3\u30b8\u5236\u5fa1\u306e\u6539\u5584\u306b\u3064\u306a\u304c\u308a\u307e\u3059\u3002.<\/p>\n<p><!-- Video Placeholder --><\/p>\n<h2 id=\"slurry-interaction\">CMP\u30b9\u30e9\u30ea\u30fc\u3068\u6750\u6599\u306e\u76f8\u4e92\u4f5c\u7528<\/h2>\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u6a5f\u68b0\u7684\u6469\u8017\u3001\u30b1\u30df\u30ab\u30eb\u30fb\u30a2\u30bf\u30c3\u30af\u3001\u7c92\u5b50\u306e\u57cb\u3081\u8fbc\u307f\u3092\u901a\u3057\u3066\u3001\u30d1\u30c3\u30c9\u6750\u6599\u3068\u7d76\u3048\u305a\u76f8\u4e92\u4f5c\u7528\u3057\u307e\u3059\u3002\u30dd\u30ea\u30de\u30fc\u306e\u5316\u5b66\u7684\u6027\u8cea\u306f\u3001\u9178\u6027\u306e\u9285\u30b9\u30e9\u30ea\u30fc\u304b\u3089\u30a2\u30eb\u30ab\u30ea\u6027\u306e\u9178\u5316\u7269\u30b9\u30e9\u30ea\u30fc\u307e\u3067\u3001\u30b9\u30e9\u30ea\u30fc\u5316\u5b66\u7684\u6027\u8cea\u5168\u822c\u306b\u308f\u305f\u3063\u3066\u3001\u81a8\u6f64\u3001\u52a0\u6c34\u5206\u89e3\u3001\u8868\u9762\u52a3\u5316\u306b\u8010\u3048\u308b\u3082\u306e\u3067\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002.<\/p>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306e\u30d1\u30c3\u30c9\u7d20\u6750\u306f\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u5f37\u5316\u306e\u305f\u3081\u306b\u8868\u9762\u51e6\u7406\u3084\u30d5\u30a3\u30e9\u30fc\u3092\u7d44\u307f\u8fbc\u3093\u3067\u3044\u308b\uff1a<\/p>\n<ul>\n<li>\u8010\u85ac\u54c1\u6027<\/li>\n<li>\u8868\u9762\u30a8\u30cd\u30eb\u30ae\u30fc\u5236\u5fa1<\/li>\n<li>\u7c92\u5b50\u4ed8\u7740\u306e\u4f4e\u6e1b<\/li>\n<\/ul>\n<p>\u5b89\u5b9a\u3057\u305f\u30b9\u30e9\u30ea\u30fc\u76f8\u4e92\u4f5c\u7528\u306f\u3001\u4e88\u6e2c\u53ef\u80fd\u306aMRR\u3068\u3001\u30d1\u30c3\u30c9\u5bff\u547d\u306e\u5ef6\u9577\u306b\u4f34\u3046\u6b20\u9665\u306e\u4f4e\u6e1b\u306b\u76f4\u63a5\u8ca2\u732e\u3059\u308b\u3002.<\/p>\n<h2 id=\"wear-lifetime\">\u6469\u8017\u30e1\u30ab\u30cb\u30ba\u30e0\u3068\u30d1\u30c3\u30c9\u5bff\u547d<\/h2>\n<p>CMP\u306b\u304a\u3051\u308b\u30d1\u30c3\u30c9\u306e\u6469\u8017\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u7c92\u5b50\u306b\u3088\u308b\u6a5f\u68b0\u7684\u6469\u8017\u3001\u5316\u5b66\u7684\u52a3\u5316\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u7d44\u307f\u5408\u308f\u305b\u306b\u3088\u3063\u3066\u751f\u3058\u308b\u3002\u30ef\u30c3\u30af\u30b9\u3092\u4f7f\u7528\u3057\u306a\u3044\u30b7\u30b9\u30c6\u30e0\u3067\u306f\u3001\u30ef\u30c3\u30af\u30b9\u306b\u8d77\u56e0\u3059\u308b\u30b0\u30ec\u30fc\u30b8\u30f3\u30b0\u3084\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u304c\u306a\u3044\u305f\u3081\u3001\u6469\u8017\u6319\u52d5\u306f\u3088\u308a\u5747\u4e00\u3067\u3059\u3002.<\/p>\n<p>\u4e00\u822c\u7684\u306a\u6469\u8017\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u3082\u306e\u304c\u3042\u308b\uff1a<\/p>\n<ul>\n<li>\u5f90\u3005\u306b\u5e73\u5766\u5316\u3059\u308b\u30a2\u30b9\u30da\u30ea\u30c6\u30a3<\/li>\n<li>\u9593\u9699\u58c1\u306e\u4fb5\u98df<\/li>\n<li>\u5316\u5b66\u7269\u8cea\u66b4\u9732\u4e0b\u3067\u306e\u30dd\u30ea\u30de\u30fc\u9396\u5207\u65ad<\/li>\n<\/ul>\n<p>\u3046\u307e\u304f\u8a2d\u8a08\u3055\u308c\u305f\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\u306f\u3001\u76f4\u7dda\u7684\u306a\u6469\u8017\u7387\u3068\u4e88\u6e2c\u53ef\u80fd\u306a\u5bff\u547d\u672b\u671f\u6319\u52d5\u3092\u793a\u3057\u3001\u4e88\u9632\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u8a08\u753b\u3092\u7c21\u7d20\u5316\u3057\u307e\u3059\u3002.<\/p>\n<h2 id=\"material-selection\">\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u30d1\u30c3\u30c9\u306e\u7d20\u6750\u9078\u629e\u30ac\u30a4\u30c9\u30e9\u30a4\u30f3<\/h2>\n<p>\u30ef\u30c3\u30af\u30b9\u30d5\u30ea\u30fc\u306eCMP\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u6750\u6599\u9078\u629e\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u3068\u7d71\u5408\u306e\u5236\u7d04\u306e\u4e21\u65b9\u306b\u5408\u308f\u305b\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u4e3b\u306a\u691c\u8a0e\u4e8b\u9805\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3059\uff1a<\/p>\n<ul>\n<li>\u30bf\u30fc\u30b2\u30c3\u30c8\u6750\u6599\u30b9\u30bf\u30c3\u30af\uff08Cu\u3001\u9178\u5316\u7269\u3001Low-k\uff09<\/li>\n<li>\u30b9\u30e9\u30ea\u30fc\u5316\u5b66\u3068\u7814\u78e8\u5264<\/li>\n<li>\u5727\u529b\u3068\u901f\u5ea6\u306e\u64cd\u4f5c\u30a6\u30a3\u30f3\u30c9\u30a6<\/li>\n<li>\u671b\u307e\u3057\u3044\u30d1\u30c3\u30c9\u5bff\u547d\u3068\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6226\u7565<\/li>\n<\/ul>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>In CMP, polishing pad materials define the fundamental mechanical, chemical, and tribological interactions that ultimately determine planarization efficiency, defectivity, and process stability. For wax-free CMP polishing pads, material selection becomes  &#8230;<\/p>","protected":false},"author":1,"featured_media":1320,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1302","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1302","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1302"}],"version-history":[{"count":4,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1302\/revisions"}],"predecessor-version":[{"id":1341,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1302\/revisions\/1341"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1320"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1302"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1302"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1302"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}