{"id":1792,"date":"2026-04-07T15:55:50","date_gmt":"2026-04-07T07:55:50","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1792"},"modified":"2026-04-07T16:37:31","modified_gmt":"2026-04-07T08:37:31","slug":"ic1000-cmp-pad-specs-and-alternatives","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/ic1000-cmp-pad-specs-and-alternatives\/","title":{"rendered":"IC1000 CMP Pad: Full Specifications and High-Performance Alternatives"},"content":{"rendered":"<!-- ============================================================\r\n     CLUSTER 12 \u2014 IC1000 CMP Pad Specs and Alternatives | Jizhi Electronic Technology | April 2026 | \/blog\/IC1000-CMP-Pad-Specs-and-Alternatives\r\n     ============================================================ -->\r\n<p><style>\r\n@import url('https:\/\/fonts.googleapis.com\/css2?family=Sora:wght@300;400;500;600;700&family=IBM+Plex+Mono:wght@400;500&display=swap');\r\n:root{--c-surface:#ffffff;--c-border:#e2e6ef;--c-primary:#0b3d91;--c-primary-dark:#072d6e;--c-accent:#0090d4;--c-accent-light:#e6f5fd;--c-gold:#c8910a;--c-gold-light:#fdf5e0;--c-text:#1a1f2e;--c-muted:#5a6278;--c-tag-bg:#c8d9f5;--c-tag-text:#0a2057;--c-tag-border:#8aaee0;--radius:10px;--radius-lg:16px;--shadow-card:0 2px 12px rgba(11,61,145,.07);--shadow-hover:0 6px 28px rgba(11,61,145,.13);--font-body:'Sora',sans-serif;--font-mono:'IBM Plex Mono',monospace;--max-w:860px}\r\n.jz-art *{box-sizing:border-box;margin:0;padding:0}\r\n.jz-art{font-family:var(--font-body);color:var(--c-text);background:transparent;line-height:1.75;font-size:16px;max-width:var(--max-w);margin:0 auto}\r\n.jz-art a{color:var(--c-accent);text-decoration:none;transition:color .2s}\r\n.jz-art a:hover{color:var(--c-primary);text-decoration:underline}\r\n.jz-hero{background:linear-gradient(135deg,#072d6e 0%,#0b3d91 45%,#0a5db5 100%);border-radius:var(--radius-lg);padding:52px 48px 48px;margin-bottom:40px;position:relative;overflow:hidden}\r\n.jz-hero::before{content:'';position:absolute;right:-60px;top:-60px;width:340px;height:340px;background:rgba(0,144,212,.18);border-radius:50%}\r\n.jz-hero::after{content:'';position:absolute;right:80px;bottom:-80px;width:200px;height:200px;background:rgba(0,144,212,.10);border-radius:50%}\r\n.jz-hero-kicker{font-family:var(--font-mono);font-size:12px;letter-spacing:.12em;text-transform:uppercase;color:rgba(255,255,255,.75);margin-bottom:14px}\r\n.jz-hero h1{font-size:clamp(24px,4vw,38px);font-weight:700;color:#fff;line-height:1.22;margin-bottom:18px;position:relative;z-index:1}\r\n.jz-hero-lead{font-size:17px;color:rgba(255,255,255,.90);line-height:1.72;max-width:620px;position:relative;z-index:1;margin-bottom:28px}\r\n.jz-hero-meta{display:flex;flex-wrap:wrap;gap:20px;font-size:13px;color:rgba(255,255,255,.90);position:relative;z-index:1}\r\n.jz-hero-meta span{display:flex;align-items:center;gap:6px}\r\n.jz-tags{display:flex;flex-wrap:wrap;gap:8px;margin-bottom:36px}\r\n.jz-tag{background:var(--c-tag-bg);color:var(--c-tag-text);font-size:12px;font-weight:700;padding:4px 14px;border-radius:20px;border:1px solid var(--c-tag-border);letter-spacing:.01em}\r\n.jz-back{display:inline-flex;align-items:center;gap:7px;font-size:13px;font-family:var(--font-mono);color:var(--c-muted);margin-bottom:28px;padding:8px 14px;background:var(--c-surface);border:1px solid var(--c-border);border-radius:6px;text-decoration:none;transition:border-color .2s,color .2s}\r\n.jz-back:hover{border-color:var(--c-accent);color:var(--c-accent);text-decoration:none}\r\n.jz-back::before{content:'\u2190';font-size:13px}\r\n.jz-toc{background:var(--c-surface);border:1px solid var(--c-border);border-left:4px solid var(--c-primary);border-radius:var(--radius);padding:28px 32px;margin-bottom:44px;box-shadow:var(--shadow-card)}\r\n.jz-toc-title{font-size:14px;font-weight:600;text-transform:uppercase;letter-spacing:.08em;color:var(--c-primary);margin-bottom:16px;font-family:var(--font-mono)}\r\n.jz-toc ol{padding-left:20px;display:grid;grid-template-columns:1fr 1fr;gap:4px 32px}\r\n.jz-toc ol li{font-size:14px;line-height:1.65;color:var(--c-muted)}\r\n.jz-toc ol li a{color:var(--c-primary);font-weight:500}\r\n.jz-toc ol li a:hover{color:var(--c-accent)}\r\n@media(max-width:620px){.jz-toc ol{grid-template-columns:1fr}}\r\n.jz-art h2{font-size:clamp(20px,3vw,26px);font-weight:700;color:var(--c-primary-dark);line-height:1.3;margin:52px 0 16px;padding-top:8px;border-top:2px solid var(--c-border)}\r\n.jz-art h3{font-size:18px;font-weight:600;color:var(--c-text);margin:28px 0 10px}\r\n.jz-art h4{font-size:16px;font-weight:600;color:var(--c-primary);margin:20px 0 8px}\r\n.jz-art p{margin-bottom:18px;color:#1e2435}\r\n.jz-art ul,.jz-art ol{margin-bottom:18px;padding-left:22px;color:#1e2435}\r\n.jz-art li{margin-bottom:7px;line-height:1.7}\r\n.jz-callout{border-radius:var(--radius);padding:20px 24px;margin:28px 0;display:flex;gap:16px;align-items:flex-start}\r\n.jz-callout-icon{font-size:22px;flex-shrink:0;margin-top:1px}\r\n.jz-callout-body{flex:1;font-size:15px;line-height:1.65;color:#1e2435}\r\n.jz-callout-body strong{display:block;font-weight:600;margin-bottom:4px;font-size:14px;color:#1a1f2e}\r\n.jz-callout.info{background:#e8f4fd;border-left:4px solid var(--c-accent)}\r\n.jz-callout.tip{background:var(--c-gold-light);border-left:4px solid var(--c-gold)}\r\n.jz-callout.warn{background:#fff4e5;border-left:4px solid #e07b00}\r\n.jz-callout.success{background:#eaf5ee;border-left:4px solid #2e9e55}\r\n.jz-callout.cta{background:linear-gradient(135deg,#e8f4fd,#edf1fb);border-left:4px solid var(--c-primary)}\r\n.jz-table-wrap{overflow-x:auto;margin:28px 0;border-radius:var(--radius);box-shadow:var(--shadow-card)}\r\n.jz-table{width:100%;border-collapse:collapse;font-size:14px;background:var(--c-surface)}\r\n.jz-table thead th{background:var(--c-primary);color:#fff;font-weight:600;padding:12px 16px;text-align:left;font-size:13px;letter-spacing:.03em}\r\n.jz-table tbody tr:nth-child(even){background:#f3f6fc}\r\n.jz-table tbody td{padding:11px 16px;border-bottom:1px solid var(--c-border);color:#1e2435;vertical-align:top;line-height:1.6}\r\n.jz-table tbody tr:hover td{background:#eaf0fb}\r\n.jz-table .win{color:#1a6e35;font-weight:600}\r\n.jz-table .mid{color:#7a5c00;font-weight:500}\r\n.jz-table .lose{color:#963a00;font-weight:500}\r\n.jz-card-grid{display:grid;grid-template-columns:repeat(auto-fit,minmax(210px,1fr));gap:20px;margin:28px 0}\r\n.jz-card{background:var(--c-surface);border:1px solid var(--c-border);border-radius:var(--radius);padding:22px 20px;box-shadow:var(--shadow-card);transition:transform .22s,box-shadow .22s}\r\n.jz-card:hover{transform:translateY(-3px);box-shadow:var(--shadow-hover)}\r\n.jz-card-icon{font-size:26px;margin-bottom:12px}\r\n.jz-card h4{font-size:15px;font-weight:600;color:var(--c-primary-dark);margin-bottom:8px}\r\n.jz-card p{font-size:14px;color:var(--c-muted);line-height:1.6;margin-bottom:0}\r\n.jz-steps{display:flex;flex-direction:column;gap:0;margin:28px 0}\r\n.jz-step{display:flex;gap:20px;padding:22px 0;border-bottom:1px solid var(--c-border)}\r\n.jz-step:last-child{border-bottom:none}\r\n.jz-step-num{flex-shrink:0;width:40px;height:40px;background:var(--c-primary);color:#fff;border-radius:50%;display:flex;align-items:center;justify-content:center;font-weight:700;font-size:15px;margin-top:2px}\r\n.jz-step-body h4{font-size:16px;font-weight:600;color:#1a1f2e;margin-bottom:7px}\r\n.jz-step-body p{font-size:15px;color:#3a4255;margin-bottom:0;line-height:1.7}\r\n.jz-two-col{display:grid;grid-template-columns:1fr 1fr;gap:24px;margin:28px 0}\r\n@media(max-width:600px){.jz-two-col{grid-template-columns:1fr}}\r\n.jz-col-box{background:var(--c-surface);border:1px solid var(--c-border);border-radius:var(--radius);padding:22px 20px;box-shadow:var(--shadow-card)}\r\n.jz-col-box h4{font-size:15px;font-weight:600;margin-bottom:10px;color:var(--c-primary-dark)}\r\n.jz-col-box ul{padding-left:18px}\r\n.jz-col-box ul li{font-size:14px;color:#3a4255;margin-bottom:7px;line-height:1.6}\r\n.jz-stats{display:grid;grid-template-columns:repeat(auto-fit,minmax(148px,1fr));gap:16px;margin:28px 0}\r\n.jz-stat{background:var(--c-surface);border:1px solid var(--c-border);border-radius:var(--radius);padding:18px 16px;text-align:center;box-shadow:var(--shadow-card)}\r\n.jz-stat-num{font-size:26px;font-weight:700;color:var(--c-primary);font-family:var(--font-mono);line-height:1}\r\n.jz-stat-label{font-size:12px;color:var(--c-muted);margin-top:6px;line-height:1.4}\r\n.jz-trust{background:#f0f4ff;border-radius:var(--radius);padding:20px 24px;display:flex;align-items:center;gap:18px;margin:40px 0;border:1px solid #d0daee}\r\n.jz-trust-badge{background:var(--c-primary);color:#fff;border-radius:8px;padding:10px 14px;font-size:12px;font-weight:700;text-align:center;line-height:1.3;flex-shrink:0;font-family:var(--font-mono)}\r\n.jz-trust-text{font-size:14px;color:#3a4255;line-height:1.65}\r\n.jz-trust-text strong{color:var(--c-text)}\r\n.jz-link-chip{display:inline-flex;align-items:center;gap:5px;background:var(--c-accent-light);color:var(--c-accent);font-size:13px;font-weight:500;padding:3px 11px 3px 8px;border-radius:20px;border:1px solid #b3ddf5;text-decoration:none;transition:background .2s,color .2s}\r\n.jz-link-chip:hover{background:var(--c-accent);color:#fff;text-decoration:none}\r\n.jz-link-chip::before{content:'\u2192';font-size:11px}\r\n.jz-related{background:var(--c-surface);border:1px solid var(--c-border);border-radius:var(--radius-lg);padding:32px 32px 28px;margin:48px 0 32px;box-shadow:var(--shadow-card)}\r\n.jz-related-title{font-size:14px;font-weight:600;text-transform:uppercase;letter-spacing:.08em;color:var(--c-primary);margin-bottom:20px;font-family:var(--font-mono)}\r\n.jz-related-grid{display:grid;grid-template-columns:repeat(auto-fill,minmax(230px,1fr));gap:14px}\r\n.jz-related-item{background:#f3f6fc;border-radius:8px;padding:14px 16px;border:1px solid var(--c-border);transition:background .2s,box-shadow .2s}\r\n.jz-related-item:hover{background:var(--c-accent-light);box-shadow:var(--shadow-card)}\r\n.jz-related-item a{font-size:14px;font-weight:500;color:var(--c-primary);text-decoration:none;line-height:1.45;display:block}\r\n.jz-related-item a:hover{color:var(--c-accent);text-decoration:none}\r\n.jz-related-cat{font-size:11px;font-family:var(--font-mono);color:var(--c-muted);margin-bottom:5px;letter-spacing:.05em}\r\n.jz-cta-banner{background:linear-gradient(135deg,#072d6e 0%,#0b3d91 60%,#0a5db5 100%);border-radius:var(--radius-lg);padding:44px 40px;text-align:center;margin:48px 0;position:relative;overflow:hidden}\r\n.jz-cta-banner::before{content:'';position:absolute;left:-40px;top:-40px;width:220px;height:220px;background:rgba(0,144,212,.15);border-radius:50%}\r\n.jz-cta-banner h2{color:#fff;font-size:clamp(20px,3vw,28px);margin-bottom:12px;border:none;padding-top:0;position:relative;z-index:1}\r\n.jz-cta-banner p{color:rgba(255,255,255,.90);font-size:16px;margin-bottom:28px;position:relative;z-index:1}\r\n.jz-btn{display:inline-block;padding:13px 32px;border-radius:8px;font-weight:600;font-size:15px;text-decoration:none;transition:transform .2s,box-shadow .2s}\r\n.jz-btn:hover{transform:translateY(-2px);text-decoration:none}\r\n.jz-btn-white{background:#fff;color:var(--c-primary)}\r\n.jz-btn-white:hover{box-shadow:0 4px 20px rgba(0,0,0,.18);color:var(--c-primary)}\r\n.jz-btn-outline{background:transparent;color:#fff;border:2px solid rgba(255,255,255,.6);margin-left:12px}\r\n.jz-btn-outline:hover{background:rgba(255,255,255,.12);color:#fff}\r\n.jz-faq{margin:28px 0}\r\n.jz-faq-item{border:1px solid var(--c-border);border-radius:var(--radius);margin-bottom:12px;overflow:hidden;background:var(--c-surface)}\r\n.jz-faq-q{padding:16px 20px;font-weight:600;font-size:15px;color:var(--c-primary-dark);display:flex;justify-content:space-between;align-items:center}\r\n.jz-faq-q::after{content:'+';font-size:20px;font-weight:300;color:var(--c-accent);flex-shrink:0}\r\n.jz-faq-a{padding:0 20px 16px;font-size:15px;color:#3a4255;line-height:1.75}\r\n@media(max-width:640px){.jz-hero{padding:36px 24px 32px}.jz-cta-banner{padding:32px 22px}.jz-related{padding:24px 18px}.jz-btn-outline{margin-left:0;margin-top:10px;display:inline-block}}\r\n<\/style><\/p>\r\n<div class=\"jz-art\"><a class=\"jz-back\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Polishing-Pads-The-Complete-Guide\/\" target=\"_blank\" rel=\"noopener\">Back to CMP Polishing Pads: The Complete Guide<\/a>\r\n<div class=\"jz-hero\">\r\n<div class=\"jz-hero-kicker\">Jizhi Electronic Technology \u2014 Sourcing Series<\/div>\r\n<p class=\"jz-hero-lead\">The definitive technical reference for the IC1000 CMP polishing pad \u2014 full specification breakdown, process performance characteristics, known limitations, and a systematic guide to qualifying performance-equivalent alternatives from domestic suppliers.<\/p>\r\n<div class=\"jz-hero-meta\">\ud83d\udcc5 April 2026\u23f1 12 min read\ud83c\udfed Jizhi Electronic Technology Co., Ltd.<\/div>\r\n<\/div>\r\n<div class=\"jz-tags\"><span class=\"jz-tag\">IC1000 CMP Pad<\/span> <span class=\"jz-tag\">IC1000 Specifications<\/span> <span class=\"jz-tag\">IC1000 Alternative<\/span> <span class=\"jz-tag\">CMP Pad Replacement<\/span> <span class=\"jz-tag\">\u9178\u5316\u7269CMP<\/span> <span class=\"jz-tag\">K-Groove Pad<\/span> <span class=\"jz-tag\">STI CMP<\/span><\/div>\r\n<div class=\"jz-trust\">\r\n<div class=\"jz-trust-badge\">IC1000<br \/>Equiv.<\/div>\r\n<div class=\"jz-trust-text\"><strong>Written by Jizhi Electronic Technology Co., Ltd.<\/strong> \u2014 manufacturer of IC1000-equivalent CMP polishing pads. IC1000\u2122 is a trademark of Entegris, Inc. Jizhi has no affiliation with Entegris. Specification data is drawn from publicly available Entegris technical literature and independent characterization. April 2026.<\/div>\r\n<\/div>\r\n<div class=\"jz-toc\">\r\n<div class=\"jz-toc-title\">\u76ee\u6b21<\/div>\r\n<ol>\r\n<li><a href=\"#ic1000-history\">IC1000: History and Industry Status<\/a><\/li>\r\n<li><a href=\"#ic1000-specs\">Complete IC1000 Physical Specifications<\/a><\/li>\r\n<li><a href=\"#ic1000-variants\">IC1000 Product Family Variants<\/a><\/li>\r\n<li><a href=\"#ic1000-performance\">Process Performance Characteristics<\/a><\/li>\r\n<li><a href=\"#ic1000-limitations\">Known Limitations of IC1000-Type Pads<\/a><\/li>\r\n<li><a href=\"#qualification-protocol\">Alternative Qualification Protocol<\/a><\/li>\r\n<li><a href=\"#jizhi-equivalent\">Jizhi JZ-H60 Series: IC1000-Equivalent Specification<\/a><\/li>\r\n<li><a href=\"#faq\">FAQ<\/a><\/li>\r\n<\/ol>\r\n<\/div>\r\n<p>The IC1000 polyurethane CMP pad is the most widely qualified and universally referenced polishing pad in semiconductor manufacturing history. Originally developed by Rodel \u2014 subsequently acquired by Rohm and Haas Electronic Materials, then Cabot Microelectronics, and now Entegris \u2014 the IC1000 established the standard for closed-cell porous polyurethane hard CMP pads in the early 1990s and has maintained that position through decades of process technology evolution.<\/p>\r\n<p>Every other hard CMP pad on the market is implicitly or explicitly compared to IC1000 performance. Understanding IC1000&#8217;s specifications, capabilities, and limitations is therefore essential for any engineer making pad selection decisions \u2014 whether staying with IC1000 or evaluating alternatives. For the broader context of hard pad selection across CMP applications, see: <a class=\"jz-link-chip\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/Hard-vs-Soft-CMP-Polishing-Pads-Selection-Guide\/\" target=\"_blank\" rel=\"noopener\">Hard vs. Soft CMP Polishing Pads: Selection Guide<\/a>.<\/p>\r\n<h2 id=\"ic1000-history\">1. IC1000: History and Industry Status<\/h2>\r\n<p>The IC1000 emerged from Rodel&#8217;s polyurethane CMP pad development program in the early 1990s, at exactly the moment when IBM&#8217;s commercial introduction of CMP into IC manufacturing created urgent demand for production-grade polishing consumables. Rodel&#8217;s closed-cell polyurethane foam pad with hollow microsphere pores, machined concentric K-groove pattern, and stable PET backing became the standard for oxide ILD planarization at 0.5 \u00b5m design rules \u2014 a process position it has maintained through the transition to 0.25 \u00b5m, 0.18 \u00b5m, 0.13 \u00b5m, 90 nm, 65 nm, 45 nm, 28 nm, 16 nm, and beyond.<\/p>\r\n<p>The IC1000&#8217;s durability reflects genuine strengths: proven process performance across a vast range of applications, global qualification at virtually every semiconductor fab, extensive published characterization data, and a supplier (now Entegris) with demonstrated manufacturing consistency and global technical support. Its limitations \u2014 lot-to-lot Kp variation, pore debris generation, supply concentration, and Asia-Pacific import premiums \u2014 are equally well-documented and are driving accelerated qualification of domestic alternatives.<\/p>\r\n<h2 id=\"ic1000-specs\">2. Complete IC1000 Physical Specifications<\/h2>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\r\n<th>IC1000 Specification<\/th>\r\n<th>Test Method \/ Standard<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td><strong>Pad material<\/strong><\/td>\r\n<td>Closed-cell polyurethane foam, hollow microsphere pores<\/td>\r\n<td>FTIR spectroscopy, SEM cross-section<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>Shore D hardness<\/strong><\/td>\r\n<td>58\u201362 (nominal ~60)<\/td>\r\n<td>ASTM D2240, 5-point pad map<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>Compressibility<\/strong><\/td>\r\n<td>0.5\u20132.5%<\/td>\r\n<td>% thickness change under 25 kPa, 60 s dwell<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>Elastic recovery<\/strong><\/td>\r\n<td>&gt;70%<\/td>\r\n<td>% recovery 60 s after load removal<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>Mean pore diameter<\/strong><\/td>\r\n<td>25\u201345 \u00b5m<\/td>\r\n<td>Optical cross-section image analysis, 200\u00d7 magnification<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>Pore size CV<\/strong><\/td>\r\n<td>&lt;20% (within lot)<\/td>\r\n<td>Standard deviation \/ mean \u00d7 100, optical analysis<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>Standard groove pattern<\/strong><\/td>\r\n<td>Concentric K-groove<\/td>\r\n<td>Profilometer surface scan<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>Standard groove pitch<\/strong><\/td>\r\n<td>~2.0\u20133.0 mm (varies by SKU)<\/td>\r\n<td>Profilometer<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>Standard groove depth (new pad)<\/strong><\/td>\r\n<td>~0.5\u20130.6 mm<\/td>\r\n<td>Profilometer cross-section<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>Standard groove width<\/strong><\/td>\r\n<td>~0.3\u20130.5 mm<\/td>\r\n<td>Profilometer cross-section<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>Top pad thickness<\/strong><\/td>\r\n<td>~2.5 mm<\/td>\r\n<td>5-point contact gauge, \u00b10.05 mm tolerance<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>Backing<\/strong><\/td>\r\n<td>PET film (standard); foam subpad (stacked SKUs)<\/td>\r\n<td>Physical inspection, thickness gauge<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>PSA type<\/strong><\/td>\r\n<td>Pressure-sensitive adhesive, platen-mount<\/td>\r\n<td>Peel strength test<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>Available diameters<\/strong><\/td>\r\n<td>508 mm (20&#8243;), 762 mm (30&#8243;), custom<\/td>\r\n<td>Dimensional measurement<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<h2 id=\"ic1000-variants\">3. IC1000 Product Family Variants<\/h2>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>Variant<\/th>\r\n<th>Key Difference<\/th>\r\n<th>Best Application<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td><strong>IC1000 \/ Suba IV stacked<\/strong><\/td>\r\n<td>IC1000 hard top pad pre-bonded to Suba IV soft foam subpad (~3.0 mm total)<\/td>\r\n<td>300 mm oxide CMP \u2014 industry-standard configuration for advanced node ILD and STI<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>IC1000 A2<\/strong><\/td>\r\n<td>Wider groove pitch \u2014 higher MRR focus<\/td>\r\n<td>High-throughput mature-node oxide CMP where MRR is prioritized over uniformity<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>IC1000 A3<\/strong><\/td>\r\n<td>Finer groove pitch \u2014 better uniformity<\/td>\r\n<td>Applications with tighter WIWNU requirements where standard K-groove pitch is insufficient<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>IC1000 XY<\/strong><\/td>\r\n<td>Cartesian XY grid groove instead of K-groove<\/td>\r\n<td>Cu BEOL applications using IC1000 (non-preferred but occasionally used); processes needing bi-directional slurry flow<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>IC1000 with window<\/strong><\/td>\r\n<td>Transparent PU window insert for optical endpoint<\/td>\r\n<td>Any process step using in-situ optical film thickness monitoring on Reflexion GT or similar tools<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>IC1000 Perforated<\/strong><\/td>\r\n<td>Through-holes in addition to K-groove channels<\/td>\r\n<td>Processes requiring maximum slurry uptake with simultaneous endpoint detection capability<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<h2 id=\"ic1000-performance\">4. IC1000 Process Performance Characteristics<\/h2>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>CMP Application<\/th>\r\n<th>Typical MRR<\/th>\r\n<th>WIWNU (1\u03c3, typical)<\/th>\r\n<th>\u5099\u8003<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td>SiO\u2082 ILD (ceria slurry, 3 psi, 60 rpm platen)<\/td>\r\n<td class=\"win\">1,500\u20132,500 \u00c5\/min<\/td>\r\n<td>1.5\u20133.0%<\/td>\r\n<td>Standard reference recipe; broad fab acceptance<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>STI oxide (high-selectivity ceria, 4 psi)<\/td>\r\n<td class=\"win\">2,000\u20134,000 \u00c5\/min<\/td>\r\n<td>1.5\u20132.5%<\/td>\r\n<td>Excellent step-height reduction; preferred for STI at all nodes<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>W plug \/ via fill (H\u2082O\u2082 slurry, 3 psi)<\/td>\r\n<td class=\"win\">1,500\u20133,000 \u00c5\/min<\/td>\r\n<td>2.0\u20133.5%<\/td>\r\n<td>Good W-to-barrier selectivity; industry standard for W CMP<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>Cu bulk overburden removal<\/td>\r\n<td class=\"mid\">300\u2013600 \u00c5\/min<\/td>\r\n<td class=\"lose\">3.0\u20135.0%<\/td>\r\n<td>IC1000 suboptimal for Cu \u2014 too hard; soft pad preferred<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>Low-k dielectric<\/td>\r\n<td class=\"mid\">400\u2013800 \u00c5\/min<\/td>\r\n<td class=\"lose\">Risk of delamination<\/td>\r\n<td>Not recommended \u2014 shear force too high at standard pressure<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<h2 id=\"ic1000-limitations\">5. Known Limitations of IC1000-Type Pads<\/h2>\r\n<div class=\"jz-card-grid\">\r\n<div class=\"jz-card\">\r\n<div class=\"jz-card-icon\">\ud83d\udcca<\/div>\r\n<h4>Lot-to-Lot Kp Variation (8\u201315% CV)<\/h4>\r\n<p>Pore size distribution variance between lots causes Preston coefficient Kp to shift, requiring recipe pressure verification and adjustment with each new pad lot. Unavoidable with porous pad architecture. Poreless pads reduce this to below 3% CV.<\/p>\r\n<\/div>\r\n<div class=\"jz-card\">\r\n<div class=\"jz-card-icon\">\ud83d\udd34<\/div>\r\n<h4>Pore Debris Generation<\/h4>\r\n<p>Conditioning fractures pore walls in the polyurethane matrix, releasing polymer debris particles onto the wafer surface. Manageable for hard oxide films but concerning for soft Cu BEOL and low-k applications. Primary driver for poreless pad adoption at advanced nodes.<\/p>\r\n<\/div>\r\n<div class=\"jz-card\">\r\n<div class=\"jz-card-icon\">\ud83d\udcb0<\/div>\r\n<h4>Pricing Premium and Supply Concentration<\/h4>\r\n<p>IC1000 pricing reflects Entegris&#8217;s dominant market position. Single-source supply from a US-headquartered manufacturer creates logistical vulnerability and pricing inflexibility for Asia-Pacific fabs \u2014 the primary driver of domestic alternative qualification programs.<\/p>\r\n<\/div>\r\n<div class=\"jz-card\">\r\n<div class=\"jz-card-icon\">\u23f1<\/div>\r\n<h4>Long Import Lead Times<\/h4>\r\n<p>8\u201316 week lead times for Western-brand pad imports to Asia, versus 3\u20137 days for in-stock domestic alternatives. In a pad-constrained supply situation, this difference can mean weeks of tool downtime.<\/p>\r\n<\/div>\r\n<\/div>\r\n<h2 id=\"qualification-protocol\">6. Alternative Qualification Protocol: Step-by-Step<\/h2>\r\n<p>Qualifying any alternative to IC1000 \u2014 domestic or otherwise \u2014 requires a structured protocol that isolates pad performance from other process variables. The following is the standard approach used by leading fabs.<\/p>\r\n<div class=\"jz-steps\">\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">1<\/div>\r\n<div class=\"jz-step-body\">\r\n<h4>Physical Specification Verification<\/h4>\r\n<p>Before any process testing, verify that the alternative pad meets IC1000 physical specifications: Shore D hardness (58\u201362, 5-point map), compressibility (0.5\u20132.5%), groove geometry (depth, width, pitch \u2014 profilometer measurement), and pad thickness uniformity (&lt;0.05 mm 5-point variation). A pad that fails to meet physical specifications will fail process qualification \u2014 eliminating off-spec pads before process testing saves significant engineering time.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">2<\/div>\r\n<div class=\"jz-step-body\">\r\n<h4>MRR Characterization at Locked Recipe<\/h4>\r\n<p>Polish 25 monitor wafers (fully broken-in pad, after Phase 1 stabilization) at the current IC1000 production recipe parameters without any adjustment. Record removal rate for each wafer. The alternative pad&#8217;s stable-state MRR must be within \u00b115% of the IC1000 baseline. If outside this range, a single down-force pressure adjustment is permitted to bring MRR within \u00b110% before proceeding.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">3<\/div>\r\n<div class=\"jz-step-body\">\r\n<h4>WIWNU and Uniformity Verification<\/h4>\r\n<p>Measure WIWNU (1\u03c3) across 49 or 121 sites per wafer for the same 25 monitor wafers. The alternative pad must deliver WIWNU within \u00b10.5% (1\u03c3) of the IC1000 baseline. Any recipe adjustment made in Step 2 must be factored into this comparison \u2014 the adjusted-recipe comparison is the valid one, not the fixed-recipe comparison.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">4<\/div>\r\n<div class=\"jz-step-body\">\r\n<h4>Post-CMP Defect Verification<\/h4>\r\n<p>Perform full-wafer KLA or Hitachi optical inspection on the qualification monitor wafers at the fab&#8217;s standard inspection recipe for this CMP step. Scratch density and particle count must be within \u00b120% of the IC1000 baseline. Any excursion \u2014 even one scratch category failing \u2014 requires root cause analysis before proceeding.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">5<\/div>\r\n<div class=\"jz-step-body\">\r\n<h4>Extended Lot-to-Lot Consistency Verification<\/h4>\r\n<p>Repeat Steps 2\u20134 on two additional lots from the alternative pad supplier. If MRR CV across 3 lots is below 8% and WIWNU CV below 3%, lot-to-lot consistency is acceptable for production. Document all results and obtain engineering sign-off before releasing the alternative pad to production use.<\/p>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<h2 id=\"jizhi-equivalent\">7. Jizhi JZ-H60 Series: IC1000-Equivalent Specification<\/h2>\r\n<p>Jizhi Electronic Technology&#8217;s JZ-H60 series is our IC1000-equivalent hard polyurethane pad, designed to deliver performance parity with IC1000 on oxide and W CMP applications at a significantly lower total cost of ownership for Asia-Pacific customers.<\/p>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\r\n<th>IC1000 (Reference)<\/th>\r\n<th>Jizhi JZ-H60<\/th>\r\n<th>Match?<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td>Shore D hardness<\/td>\r\n<td>58\u201362<\/td>\r\n<td class=\"win\">58\u201362 (\u00b11.5 within lot)<\/td>\r\n<td class=\"win\">\u2713 Full match<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>Groove pattern<\/td>\r\n<td>K-groove (concentric)<\/td>\r\n<td class=\"win\">K-groove equivalent, 2.0\u20133.0 mm pitch<\/td>\r\n<td class=\"win\">\u2713 Equivalent<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>Groove depth (new)<\/td>\r\n<td>~0.55 mm<\/td>\r\n<td class=\"win\">0.52\u20130.58 mm<\/td>\r\n<td class=\"win\">\u2713 Within spec<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>Mean pore diameter<\/td>\r\n<td>25\u201345 \u00b5m<\/td>\r\n<td class=\"win\">28\u201342 \u00b5m<\/td>\r\n<td class=\"win\">\u2713 Within IC1000 range<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>Compressibility<\/td>\r\n<td>0.5\u20132.5%<\/td>\r\n<td class=\"win\">0.8\u20132.2%<\/td>\r\n<td class=\"win\">\u2713 Within spec<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>MRR lot-to-lot CV<\/td>\r\n<td>8\u201315%<\/td>\r\n<td class=\"win\">&lt;5% (polycarbonate PU backbone)<\/td>\r\n<td class=\"win\">\u2713 Better than IC1000<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>COA data per lot<\/td>\r\n<td>Standard COA<\/td>\r\n<td class=\"win\">Shore D map + pore distribution + MRR data<\/td>\r\n<td class=\"win\">\u2713 Exceeds IC1000<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>Standard lead time (Asia)<\/td>\r\n<td>8\u201316 weeks<\/td>\r\n<td class=\"win\">3\u20137 days (in-stock)<\/td>\r\n<td class=\"win\">\u2713 Major advantage<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>Unit cost (index)<\/td>\r\n<td>1.0\u00d7 (baseline)<\/td>\r\n<td class=\"win\">0.70\u20130.82\u00d7<\/td>\r\n<td class=\"win\">\u2713 18\u201330% lower<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<div class=\"jz-callout success\">\r\n<div class=\"jz-callout-icon\">\u2705<\/div>\r\n<div class=\"jz-callout-body\"><strong>JZ-H60 Available for Qualification Sampling<\/strong> Jizhi provides 3\u20135 pad qualification samples for customers conducting IC1000 equivalency qualification, along with a full process characterization data package (MRR at reference recipe, Shore D map, groove profilometry, and pore size distribution histogram). Window-compatible versions for endpoint detection tools are available. <a href=\"https:\/\/jeez-semicon.com\/ja\/contact\/\" target=\"_blank\" rel=\"noopener\">Request qualification samples \u2192<\/a><\/div>\r\n<\/div>\r\n<h2>8. Frequently Asked Questions<\/h2>\r\n<div class=\"jz-faq\">\r\n<div class=\"jz-faq-item\">\r\n<div class=\"jz-faq-q\">Is the IC1000 patent-protected? Can other suppliers legally manufacture equivalents?<\/div>\r\n<div class=\"jz-faq-a\">The original IC1000-specific patents covering the specific polyurethane formulation and manufacturing process have expired (most CMP pad patents from the 1990s expired by 2010\u20132015). What Entegris retains is the IC1000\u2122 trademark \u2014 which cannot be used by other suppliers to describe their products. However, the underlying technology (closed-cell porous PU foam with hollow microspheres, K-groove pattern) is freely reproducible. Jizhi and other suppliers manufacture IC1000-equivalent pads that match IC1000 specifications without infringing any current intellectual property.<\/div>\r\n<\/div>\r\n<div class=\"jz-faq-item\">\r\n<div class=\"jz-faq-q\">Should I inform my tool OEM if I switch from IC1000 to an equivalent pad?<\/div>\r\n<div class=\"jz-faq-a\">It depends on your process agreements and tool warranty terms. Some tool OEMs specify consumables by brand in their maintenance agreements \u2014 particularly for tools still under warranty. Review your tool maintenance agreement before switching. For most production tools more than 2\u20133 years old, consumable specifications are defined by performance criteria (removal rate, uniformity) rather than specific brand names, and switching to a qualified equivalent does not require OEM notification. When in doubt, perform the qualification and document the equivalency data before switching \u2014 the documentation provides the evidence of equivalency regardless of any agreement language.<\/div>\r\n<\/div>\r\n<div class=\"jz-faq-item\">\r\n<div class=\"jz-faq-q\">How does the IC1000\/Suba IV stacked pad compare to IC1000 alone?<\/div>\r\n<div class=\"jz-faq-a\">The Suba IV subpad laminated beneath the IC1000 top pad adds a layer of bulk compliance (Shore A ~35\u201350) that helps the stacked system conform to wafer-scale bow and warp on 300 mm production wafers. The practical effect is 0.5\u20131.5% (1\u03c3) improvement in WIWNU compared to IC1000 alone on bowed wafers, at no significant cost in planarization efficiency \u2014 because the compliant layer is beneath the hard polishing surface, not replacing it. The stacked configuration is standard at advanced fabs for all 300 mm oxide CMP steps. Jizhi supplies the JZ-H60 in both standalone and stacked (with JZ-S38 soft subpad) configurations.<\/div>\r\n<\/div>\r\n<div class=\"jz-faq-item\">\r\n<div class=\"jz-faq-q\">What is the expected process qualification timeline for switching from IC1000 to JZ-H60?<\/div>\r\n<div class=\"jz-faq-a\">A typical qualification timeline for process engineers experienced with CMP pad qualification: Weeks 1\u20132 \u2014 physical specification verification and break-in protocol; Weeks 3\u20136 \u2014 MRR, WIWNU, and defect verification on monitor wafers (3 lots); Weeks 7\u201310 \u2014 extended production lot run for statistical validation; Weeks 11\u201312 \u2014 documentation, engineering sign-off, and production release. Total: approximately 10\u201312 weeks from pad receipt to production release. This timeline assumes no significant process excursions during qualification. Jizhi&#8217;s application engineering team supports remote and on-site troubleshooting during the qualification campaign at no additional charge.<\/div>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-related\">\r\n<div class=\"jz-related-title\">\ud83d\udcda Continue Reading<\/div>\r\n<div class=\"jz-related-grid\">\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">PILLAR<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Polishing-Pads-The-Complete-Guide\/\" target=\"_blank\" rel=\"noopener\">CMP Polishing Pads: The Complete Guide<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">SOURCING<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Polishing-Pad-Brands-Comparison\/\" target=\"_blank\" rel=\"noopener\">CMP Polishing Pad Brands Comparison<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">SELECTION<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/Hard-vs-Soft-CMP-Polishing-Pads-Selection-Guide\/\" target=\"_blank\" rel=\"noopener\">Hard vs. Soft CMP Polishing Pads: Selection Guide<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">PROCUREMENT<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Polishing-Pad-Price-Factors-and-Buying-Guide\/\" target=\"_blank\" rel=\"noopener\">CMP Polishing Pad Price Factors and Buying Guide<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">PROCESS<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Material-Removal-Rate-and-Pad-Parameters\/\" target=\"_blank\" rel=\"noopener\">CMP Material Removal Rate and Pad Parameters<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">OPERATIONS<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Pad-Conditioning-and-Lifespan-Management\/\" target=\"_blank\" rel=\"noopener\">CMP Pad Conditioning and Lifespan Management<\/a><\/div>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-cta-banner\">\r\n<h2>IC1000-Equivalent Performance. Domestic Reliability. 3\u20137 Day Delivery.<\/h2>\r\n<p>Jizhi&#8217;s JZ-H60 series delivers Shore D 58\u201362, K-groove specification, and lot-to-lot MRR CV below 5% \u2014 with full characterization data and qualification support included. Ready for your IC1000 equivalency qualification today.<\/p>\r\n<a class=\"jz-btn jz-btn-white\" href=\"https:\/\/jeez-semicon.com\/ja\/semi-categories\/polishing-pad\/\" target=\"_blank\" rel=\"noopener\">View JZ-H60 Series<\/a> <a class=\"jz-btn jz-btn-outline\" href=\"https:\/\/jeez-semicon.com\/ja\/contact\/\" target=\"_blank\" rel=\"noopener\">Request Qualification Samples<\/a><\/div>\r\n<\/div>\r\n\r\n\r\n\r\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>Back to CMP Polishing Pads: The Complete Guide Jizhi Electronic Technology \u2014 Sourcing Series The definitive technical reference for the IC1000 CMP polishing pad \u2014 full specification breakdown, process performance  &#8230;<\/p>","protected":false},"author":1,"featured_media":1817,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1792","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1792","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1792"}],"version-history":[{"count":3,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1792\/revisions"}],"predecessor-version":[{"id":1825,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1792\/revisions\/1825"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1817"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1792"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1792"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1792"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}