{"id":1914,"date":"2026-04-30T14:24:33","date_gmt":"2026-04-30T06:24:33","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1914"},"modified":"2026-04-30T15:03:45","modified_gmt":"2026-04-30T07:03:45","slug":"what-are-cmp-materials-complete-guide","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/what-are-cmp-materials-complete-guide\/","title":{"rendered":"CMP\u6750\u6599\uff1a\u534a\u5c0e\u4f53\u30a8\u30f3\u30b8\u30cb\u30a2\u3068\u8abf\u9054\u30c1\u30fc\u30e0\u306e\u305f\u3081\u306e\u5b8c\u5168\u30ac\u30a4\u30c9"},"content":{"rendered":"<!-- ============================================================\r\n     JEEZ \/ Jizhi Electronic Technology Co., Ltd.\r\n     Pillar Page: CMP Materials \u2014 Complete Guide (2026)\r\n     Target: WordPress Gutenberg \"Custom HTML\" block\r\n     ============================================================ -->\r\n<p><style>\r\n  \/* \u2500\u2500 Reset & Base \u2500\u2500 *\/\r\n  .jeez-pillar *,\r\n  .jeez-pillar *::before,\r\n  .jeez-pillar *::after { box-sizing: border-box; margin: 0; padding: 0; }\r\n\r\n  .jeez-pillar {\r\n    font-family: 'Segoe UI', Arial, sans-serif;\r\n    font-size: 16px;\r\n    line-height: 1.8;\r\n    color: #1a1a2e;\r\n    max-width: 900px;\r\n    margin: 0 auto;\r\n  }\r\n\r\n  \/* \u2500\u2500 Hero Banner \u2500\u2500 *\/\r\n  .jeez-hero {\r\n    background: linear-gradient(135deg, #0f2544 0%, #1a4a8a 55%, #0e7c86 100%);\r\n    border-radius: 12px;\r\n    padding: 60px 48px;\r\n    margin-bottom: 48px;\r\n    position: relative;\r\n    overflow: hidden;\r\n  }\r\n  .jeez-hero::before {\r\n    content: '';\r\n    position: absolute;\r\n    top: -60px; right: -60px;\r\n    width: 260px; height: 260px;\r\n    border-radius: 50%;\r\n    background: rgba(255,255,255,0.05);\r\n  }\r\n  .jeez-hero::after {\r\n    content: '';\r\n    position: absolute;\r\n    bottom: -80px; left: -40px;\r\n    width: 320px; height: 320px;\r\n    border-radius: 50%;\r\n    background: rgba(255,255,255,0.04);\r\n  }\r\n  .jeez-hero-label {\r\n    display: inline-block;\r\n    background: rgba(255,255,255,0.15);\r\n    color: #a8d8ea;\r\n    font-size: 12px;\r\n    font-weight: 600;\r\n    letter-spacing: 0.12em;\r\n    text-transform: uppercase;\r\n    padding: 5px 14px;\r\n    border-radius: 20px;\r\n    margin-bottom: 20px;\r\n  }\r\n  .jeez-hero h1 {\r\n    font-size: 2.4em;\r\n    font-weight: 800;\r\n    color: #ffffff;\r\n    line-height: 1.25;\r\n    margin-bottom: 18px;\r\n    position: relative;\r\n    z-index: 1;\r\n  }\r\n  .jeez-hero p {\r\n    font-size: 1.05em;\r\n    color: #c8dff0;\r\n    max-width: 640px;\r\n    position: relative;\r\n    z-index: 1;\r\n  }\r\n  .jeez-hero-meta {\r\n    margin-top: 28px;\r\n    display: flex;\r\n    gap: 24px;\r\n    flex-wrap: wrap;\r\n    position: relative;\r\n    z-index: 1;\r\n  }\r\n  .jeez-hero-meta span {\r\n    font-size: 13px;\r\n    color: #a8c8e8;\r\n    display: flex;\r\n    align-items: center;\r\n    gap: 6px;\r\n  }\r\n  .jeez-hero-meta svg {\r\n    width: 14px;\r\n    height: 14px;\r\n    fill: #6ab0d4;\r\n  }\r\n\r\n  \/* \u2500\u2500 Table of Contents \u2500\u2500 *\/\r\n  .jeez-toc {\r\n    background: #f0f6ff;\r\n    border-left: 4px solid #1a4a8a;\r\n    border-radius: 0 10px 10px 0;\r\n    padding: 28px 32px;\r\n    margin-bottom: 52px;\r\n  }\r\n  .jeez-toc-title {\r\n    font-size: 0.75em;\r\n    font-weight: 700;\r\n    letter-spacing: 0.1em;\r\n    text-transform: uppercase;\r\n    color: #1a4a8a;\r\n    margin-bottom: 16px;\r\n  }\r\n  .jeez-toc ol {\r\n    padding-left: 20px;\r\n  }\r\n  .jeez-toc li {\r\n    margin-bottom: 6px;\r\n    font-size: 0.95em;\r\n  }\r\n  .jeez-toc li a {\r\n    color: #1a4a8a;\r\n    text-decoration: none;\r\n    transition: color 0.2s;\r\n  }\r\n  .jeez-toc li a:hover { color: #0e7c86; text-decoration: underline; }\r\n  .jeez-toc ol ol {\r\n    margin-top: 6px;\r\n    padding-left: 18px;\r\n    list-style-type: lower-alpha;\r\n  }\r\n  .jeez-toc ol ol li { margin-bottom: 4px; font-size: 0.9em; color: #444; }\r\n\r\n  \/* \u2500\u2500 Section headings \u2500\u2500 *\/\r\n  .jeez-pillar h2 {\r\n    font-size: 1.65em;\r\n    font-weight: 800;\r\n    color: #0f2544;\r\n    margin: 56px 0 18px;\r\n    padding-bottom: 10px;\r\n    border-bottom: 2px solid #e0ebff;\r\n  }\r\n  .jeez-pillar h3 {\r\n    font-size: 1.22em;\r\n    font-weight: 700;\r\n    color: #1a4a8a;\r\n    margin: 34px 0 12px;\r\n  }\r\n  .jeez-pillar h4 {\r\n    font-size: 1.05em;\r\n    font-weight: 700;\r\n    color: #0e7c86;\r\n    margin: 22px 0 8px;\r\n  }\r\n  .jeez-pillar p { margin-bottom: 16px; }\r\n\r\n  \/* \u2500\u2500 Inline links \u2500\u2500 *\/\r\n  .jeez-pillar a {\r\n    color: #1a4a8a;\r\n    text-decoration: underline;\r\n    text-underline-offset: 3px;\r\n    transition: color 0.2s;\r\n  }\r\n  .jeez-pillar a:hover { color: #0e7c86; }\r\n\r\n  \/* \u2500\u2500 Highlight box \u2500\u2500 *\/\r\n  .jeez-highlight {\r\n    background: linear-gradient(135deg, #e8f4fd, #f0fffe);\r\n    border: 1px solid #b8d9f5;\r\n    border-radius: 10px;\r\n    padding: 24px 28px;\r\n    margin: 28px 0;\r\n  }\r\n  .jeez-highlight p:last-child { margin-bottom: 0; }\r\n\r\n  \/* \u2500\u2500 Info \/ callout boxes \u2500\u2500 *\/\r\n  .jeez-callout {\r\n    display: flex;\r\n    gap: 16px;\r\n    background: #fffbf0;\r\n    border: 1px solid #f0c040;\r\n    border-radius: 10px;\r\n    padding: 20px 24px;\r\n    margin: 28px 0;\r\n  }\r\n  .jeez-callout-icon { font-size: 22px; flex-shrink: 0; margin-top: 2px; }\r\n  .jeez-callout-body { font-size: 0.94em; color: #4a3800; }\r\n  .jeez-callout-body strong { color: #2a2000; }\r\n\r\n  \/* \u2500\u2500 Stat cards \u2500\u2500 *\/\r\n  .jeez-stats {\r\n    display: grid;\r\n    grid-template-columns: repeat(auto-fit, minmax(180px, 1fr));\r\n    gap: 16px;\r\n    margin: 32px 0;\r\n  }\r\n  .jeez-stat-card {\r\n    background: #ffffff;\r\n    border: 1px solid #dce8f8;\r\n    border-radius: 10px;\r\n    padding: 22px 20px;\r\n    text-align: center;\r\n    box-shadow: 0 2px 10px rgba(26,74,138,0.06);\r\n  }\r\n  .jeez-stat-card .stat-num {\r\n    font-size: 2em;\r\n    font-weight: 800;\r\n    color: #1a4a8a;\r\n    line-height: 1.1;\r\n  }\r\n  .jeez-stat-card .stat-label {\r\n    font-size: 0.82em;\r\n    color: #556;\r\n    margin-top: 6px;\r\n    line-height: 1.4;\r\n  }\r\n\r\n  \/* \u2500\u2500 Feature grid (two columns) \u2500\u2500 *\/\r\n  .jeez-grid-2 {\r\n    display: grid;\r\n    grid-template-columns: 1fr 1fr;\r\n    gap: 20px;\r\n    margin: 28px 0;\r\n  }\r\n  @media (max-width: 640px) { .jeez-grid-2 { grid-template-columns: 1fr; } }\r\n  .jeez-card {\r\n    background: #ffffff;\r\n    border: 1px solid #dce8f8;\r\n    border-radius: 10px;\r\n    padding: 22px 22px;\r\n    box-shadow: 0 2px 8px rgba(26,74,138,0.05);\r\n  }\r\n  .jeez-card h4 { margin-top: 0; }\r\n  .jeez-card ul { padding-left: 18px; }\r\n  .jeez-card li { margin-bottom: 6px; font-size: 0.93em; color: #334; }\r\n\r\n  \/* \u2500\u2500 Process steps \u2500\u2500 *\/\r\n  .jeez-steps { margin: 28px 0; }\r\n  .jeez-step {\r\n    display: flex;\r\n    gap: 18px;\r\n    margin-bottom: 20px;\r\n    align-items: flex-start;\r\n  }\r\n  .jeez-step-num {\r\n    flex-shrink: 0;\r\n    width: 36px; height: 36px;\r\n    background: linear-gradient(135deg, #1a4a8a, #0e7c86);\r\n    color: #fff;\r\n    font-size: 0.85em;\r\n    font-weight: 700;\r\n    border-radius: 50%;\r\n    display: flex; align-items: center; justify-content: center;\r\n  }\r\n  .jeez-step-body strong { color: #0f2544; }\r\n  .jeez-step-body p { margin-bottom: 0; font-size: 0.95em; }\r\n\r\n  \/* \u2500\u2500 Comparison table \u2500\u2500 *\/\r\n  .jeez-table-wrap { overflow-x: auto; margin: 28px 0; }\r\n  .jeez-table {\r\n    width: 100%;\r\n    border-collapse: collapse;\r\n    font-size: 0.92em;\r\n  }\r\n  .jeez-table thead tr {\r\n    background: linear-gradient(90deg, #0f2544, #1a4a8a);\r\n    color: #fff;\r\n  }\r\n  .jeez-table th {\r\n    padding: 13px 16px;\r\n    text-align: left;\r\n    font-weight: 600;\r\n    white-space: nowrap;\r\n  }\r\n  .jeez-table td {\r\n    padding: 11px 16px;\r\n    border-bottom: 1px solid #e4edf8;\r\n    color: #334;\r\n    vertical-align: top;\r\n  }\r\n  .jeez-table tbody tr:nth-child(even) { background: #f5f9ff; }\r\n  .jeez-table tbody tr:hover { background: #ebf3ff; }\r\n\r\n  \/* \u2500\u2500 Cluster link cards \u2500\u2500 *\/\r\n  .jeez-cluster-grid {\r\n    display: grid;\r\n    grid-template-columns: repeat(auto-fit, minmax(250px, 1fr));\r\n    gap: 16px;\r\n    margin: 32px 0;\r\n  }\r\n  .jeez-cluster-card {\r\n    display: block;\r\n    background: #ffffff;\r\n    border: 1px solid #c8ddf5;\r\n    border-radius: 10px;\r\n    padding: 20px 22px;\r\n    text-decoration: none;\r\n    transition: all 0.25s;\r\n    box-shadow: 0 2px 8px rgba(26,74,138,0.05);\r\n  }\r\n  .jeez-cluster-card:hover {\r\n    border-color: #1a4a8a;\r\n    box-shadow: 0 6px 18px rgba(26,74,138,0.14);\r\n    transform: translateY(-2px);\r\n  }\r\n  .jeez-cluster-card .cc-icon {\r\n    font-size: 24px;\r\n    margin-bottom: 10px;\r\n    display: block;\r\n  }\r\n  .jeez-cluster-card .cc-title {\r\n    font-size: 0.95em;\r\n    font-weight: 700;\r\n    color: #0f2544;\r\n    margin-bottom: 6px;\r\n    text-decoration: none;\r\n  }\r\n  .jeez-cluster-card .cc-desc {\r\n    font-size: 0.82em;\r\n    color: #667;\r\n    line-height: 1.5;\r\n  }\r\n  .jeez-cluster-card .cc-arrow {\r\n    display: inline-block;\r\n    margin-top: 10px;\r\n    font-size: 0.82em;\r\n    color: #1a4a8a;\r\n    font-weight: 600;\r\n  }\r\n\r\n  \/* \u2500\u2500 CTA Section \u2500\u2500 *\/\r\n  .jeez-cta {\r\n    background: linear-gradient(135deg, #0f2544 0%, #1a4a8a 60%, #0e7c86 100%);\r\n    border-radius: 12px;\r\n    padding: 48px 40px;\r\n    text-align: center;\r\n    margin: 60px 0 40px;\r\n    position: relative;\r\n    overflow: hidden;\r\n  }\r\n  .jeez-cta::before {\r\n    content: '';\r\n    position: absolute;\r\n    top: -40px; right: -40px;\r\n    width: 200px; height: 200px;\r\n    border-radius: 50%;\r\n    background: rgba(255,255,255,0.05);\r\n  }\r\n  .jeez-cta h2 {\r\n    font-size: 1.7em;\r\n    color: #fff;\r\n    border: none;\r\n    margin: 0 0 14px;\r\n    position: relative;\r\n    z-index: 1;\r\n  }\r\n  .jeez-cta p {\r\n    color: #c8dff0;\r\n    margin-bottom: 28px;\r\n    position: relative;\r\n    z-index: 1;\r\n    font-size: 1em;\r\n  }\r\n  .jeez-btn {\r\n    display: inline-block;\r\n    background: #ffffff;\r\n    color: #0f2544;\r\n    font-weight: 700;\r\n    font-size: 0.95em;\r\n    padding: 13px 32px;\r\n    border-radius: 50px;\r\n    text-decoration: none;\r\n    transition: all 0.25s;\r\n    position: relative;\r\n    z-index: 1;\r\n    box-shadow: 0 4px 14px rgba(0,0,0,0.18);\r\n  }\r\n  .jeez-btn:hover {\r\n    background: #a8d8ea;\r\n    color: #0f2544;\r\n    transform: translateY(-1px);\r\n    box-shadow: 0 6px 20px rgba(0,0,0,0.22);\r\n  }\r\n\r\n  \/* \u2500\u2500 Tag list \u2500\u2500 *\/\r\n  .jeez-tags {\r\n    display: flex; flex-wrap: wrap; gap: 8px; margin: 20px 0;\r\n  }\r\n  .jeez-tag {\r\n    background: #e8f2ff;\r\n    color: #1a4a8a;\r\n    font-size: 0.78em;\r\n    font-weight: 600;\r\n    padding: 4px 12px;\r\n    border-radius: 20px;\r\n    border: 1px solid #c0d8f5;\r\n  }\r\n\r\n  \/* \u2500\u2500 Divider \u2500\u2500 *\/\r\n  .jeez-divider {\r\n    border: none;\r\n    border-top: 1px solid #e0ebff;\r\n    margin: 40px 0;\r\n  }\r\n\r\n  \/* \u2500\u2500 Lists \u2500\u2500 *\/\r\n  .jeez-pillar ul, .jeez-pillar ol {\r\n    padding-left: 24px;\r\n    margin-bottom: 16px;\r\n  }\r\n  .jeez-pillar li { margin-bottom: 8px; }\r\n\r\n  \/* \u2500\u2500 Blockquote \/ key fact \u2500\u2500 *\/\r\n  .jeez-fact {\r\n    border-left: 4px solid #0e7c86;\r\n    padding: 16px 22px;\r\n    background: #f0fffe;\r\n    border-radius: 0 8px 8px 0;\r\n    margin: 24px 0;\r\n    font-size: 1.02em;\r\n    color: #0f3a3a;\r\n    font-style: italic;\r\n  }\r\n  .jeez-fact strong { font-style: normal; color: #064444; }\r\n<\/style><\/p>\r\n<div class=\"jeez-pillar\"><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       HERO BANNER\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<div class=\"jeez-hero\">\r\n<div class=\"jeez-hero-label\">JEEZ\u534a\u5c0e\u4f53\u6750\u6599<\/div>\r\n<p>\u30b1\u30df\u30ab\u30eb\u30fb\u30e1\u30ab\u30cb\u30ab\u30eb\u5e73\u5766\u5316\u6d88\u8017\u54c1\u306b\u3064\u3044\u3066\u77e5\u3063\u3066\u304a\u304f\u3079\u304d\u3059\u3079\u3066\u306e\u3053\u3068-\u57fa\u790e\u7684\u306a\u30d7\u30ed\u30bb\u30b9\u79d1\u5b66\u304b\u3089\u5148\u9032\u30ce\u30fc\u30c9\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u3001\u7422\u78e8\u30d1\u30c3\u30c9\u6280\u8853\u3001\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306e\u8a55\u4fa1\u3001\u7dcf\u6240\u6709\u30b3\u30b9\u30c8\u306e\u6700\u9069\u5316\u307e\u3067\u3002.<\/p>\r\n<div class=\"jeez-hero-meta\">\u6700\u7d42\u66f4\u65b0\u65e52026\u5e744\u6708 \u8aad\u4e86\u6642\u9593\uff1a \uff5e18\u5206 By JEEZ\u30c6\u30af\u30cb\u30ab\u30eb\u7de8\u96c6\u90e8<\/div>\r\n<\/div>\r\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       TABLE OF CONTENTS\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 --><nav class=\"jeez-toc\" aria-label=\"\u76ee\u6b21\">\r\n<div class=\"jeez-toc-title\">\u76ee\u6b21<\/div>\r\n<ol>\r\n<li><a href=\"#what-is-cmp\">CMP\u6559\u6750\u3068\u306f\uff1f<\/a><\/li>\r\n<li><a href=\"#why-cmp-matters\">\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066CMP\u304c\u91cd\u8981\u306a\u7406\u7531<\/a><\/li>\r\n<li><a href=\"#cmp-process\">CMP\u30d7\u30ed\u30bb\u30b9\u306e\u4ed5\u7d44\u307f<\/a><\/li>\r\n<li><a href=\"#cmp-slurry\">CMP\u30b9\u30e9\u30ea\u30fc - \u7a2e\u985e\u3001\u7d44\u6210\u3001\u9078\u629e<\/a>\r\n<ol>\r\n<li><a href=\"#slurry-types\">\u7528\u9014\u5225\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7<\/a><\/li>\r\n<li><a href=\"#slurry-abrasives\">\u7814\u78e8\u5264\u306e\u5316\u5b66\uff1a\u30bb\u30ea\u30a2\u5bfe\u30b7\u30ea\u30ab\u5bfe\u30a2\u30eb\u30df\u30ca<\/a><\/li>\r\n<li><a href=\"#slurry-selection\">\u6b63\u3057\u3044\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u3073\u65b9<\/a><\/li>\r\n<\/ol>\r\n<\/li>\r\n<li><a href=\"#cmp-pads\">CMP \u7814\u78e8\u30d1\u30c3\u30c9 - \u6280\u8853\u3068\u9078\u629e<\/a>\r\n<ol>\r\n<li><a href=\"#pad-types\">\u30d1\u30c3\u30c9\u306e\u7a2e\u985e\u30cf\u30fc\u30c9\u3001\u30bd\u30d5\u30c8\u3001\u30b9\u30bf\u30c3\u30af<\/a><\/li>\r\n<li><a href=\"#pad-properties\">\u6027\u80fd\u306b\u5f71\u97ff\u3059\u308b\u30ad\u30fc\u30d1\u30c3\u30c9\u306e\u7279\u6027<\/a><\/li>\r\n<li><a href=\"#pad-conditioning\">\u30d1\u30c3\u30c9\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3068\u5bff\u547d\u7ba1\u7406<\/a><\/li>\r\n<\/ol>\r\n<\/li>\r\n<li><a href=\"#advanced-nodes\">\u5148\u7aef\u30ce\u30fc\u30c9\uff0814nm\u4ee5\u4e0b\uff09\u7528CMP\u6750\u6599<\/a><\/li>\r\n<li><a href=\"#defects\">\u4e00\u822c\u7684\u306aCMP\u306e\u6b20\u9665\u3068\u305d\u306e\u9632\u6b62\u65b9\u6cd5<\/a><\/li>\r\n<li><a href=\"#suppliers\">CMP\u6750\u6599\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306e\u8a55\u4fa1<\/a><\/li>\r\n<li><a href=\"#market\">CMP\u6750\u6599\u5e02\u5834\u306e\u5c55\u671b 2026-2030<\/a><\/li>\r\n<li><a href=\"#deep-dives\">\u8a73\u7d30\u30c8\u30d4\u30c3\u30af\u30ac\u30a4\u30c9<\/a><\/li>\r\n<li><a href=\"#faq\">\u3088\u304f\u3042\u308b\u8cea\u554f<\/a><\/li>\r\n<\/ol>\r\n<\/nav><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       SECTION 1 \u2014 WHAT IS CMP\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<section id=\"what-is-cmp\">\r\n<h2>1.CMP\u7d20\u6750\u3068\u306f\uff1f<\/h2>\r\n<p><strong>CMP\u6750\u6599<\/strong> - \u3092\u610f\u5473\u3059\u308b\u3002 <em>\u5316\u5b66\u7684\u6a5f\u68b0\u7684\u5e73\u5766\u5316\u6750\u6599<\/em> - \u306f\u3001\u534a\u5c0e\u4f53\u30a6\u30a7\u30cf\u30fc\u88fd\u9020\u306b\u304a\u3051\u308bCMP\u30d7\u30ed\u30bb\u30b9\u3092\u53ef\u80fd\u306b\u3059\u308b\u6d88\u8017\u54c1\u304a\u3088\u3073\u534a\u8010\u4e45\u90e8\u54c1\u3067\u3042\u308b\u3002\u3053\u306e\u7528\u8a9e\u306b\u306f3\u3064\u306e\u4e3b\u8981\u306a\u88fd\u54c1\u30ab\u30c6\u30b4\u30ea\u30fc\u304c\u542b\u307e\u308c\u308b\uff1a <strong>CMP\u30b9\u30e9\u30ea\u30fc<\/strong> (\u5316\u5b66\u85ac\u54c1\u3068\u7814\u78e8\u7c92\u5b50\u3092\u542b\u3080\u7814\u78e8\u6db2\uff09\u3001, <strong>CMP\u7814\u78e8\u30d1\u30c3\u30c9<\/strong> (\u30a6\u30a7\u30cf\u30fc\u304c\u7814\u78e8\u3055\u308c\u308b\u30c6\u30af\u30b9\u30c1\u30e3\u30fc\u52a0\u5de5\u3055\u308c\u305f\u30dd\u30ea\u30de\u30fc\u8868\u9762\uff09\u3001\u304a\u3088\u3073 <strong>CMP\u30d1\u30c3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc<\/strong> (\u30d1\u30c3\u30c9\u8868\u9762\u306e\u30c6\u30af\u30b9\u30c1\u30e3\u30fc\u3092\u5fa9\u5143\u3059\u308b\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30c9\u30ec\u30b9\u306e\u30c7\u30a3\u30b9\u30af\u307e\u305f\u306f\u30d6\u30e9\u30b7\uff09\u3002.<\/p>\r\n<p>\u3053\u308c\u3089\u306e\u6750\u6599\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u304b\u3089\u4f59\u5206\u306a\u6750\u6599\u3092\u9664\u53bb\u3057\u3001\u6b21\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5c64\u3092\u6210\u819c\u3059\u308b\u524d\u306b\u3001\u6570\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u4ee5\u5185\u306e\u7cbe\u5ea6\u3067\u5168\u4f53\u7684\u306b\u5e73\u5766\u306a\u30c8\u30dd\u30ed\u30b8\u30fc\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u306b\u3001\u6b63\u78ba\u306b\u540c\u671f\u3057\u3066\u6a5f\u80fd\u3057\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002\u9ad8\u54c1\u8cea\u306eCMP\u6d88\u8017\u54c1\u306a\u3057\u3067\u306f\u300110nm\u4ee5\u4e0b\u306e\u30d7\u30ed\u30bb\u30b9\u30fb\u30ce\u30fc\u30c9\u3067\u8981\u6c42\u3055\u308c\u308b\u53b3\u3057\u3044\u30aa\u30fc\u30d0\u30fc\u30ec\u30a4\u30fb\u30d0\u30b8\u30a7\u30c3\u30c8\u3092\u6e80\u305f\u3059\u3053\u3068\u306f\u3067\u304d\u307e\u305b\u3093\u3002.<\/p>\r\n<div class=\"jeez-stats\">\r\n<div class=\"jeez-stat-card\">\r\n<div class=\"stat-num\">$9.2B+<\/div>\r\n<div class=\"stat-label\">2026\u5e74\u306eCMP\u6d88\u8017\u54c1\u306e\u4e16\u754c\u5e02\u5834\u898f\u6a21\uff08\u63a8\u5b9a\uff09<\/div>\r\n<\/div>\r\n<div class=\"jeez-stat-card\">\r\n<div class=\"stat-num\">30-60\u00d7<\/div>\r\n<div class=\"stat-label\">\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30ed\u30b8\u30c3\u30af\u30fb\u30a6\u30a7\u30fc\u30cf1\u679a\u3042\u305f\u308a\u306e\u5178\u578b\u7684\u306aCMP\u30b9\u30c6\u30c3\u30d7<\/div>\r\n<\/div>\r\n<div class=\"jeez-stat-card\">\r\n<div class=\"stat-num\">&lt;1 nm<\/div>\r\n<div class=\"stat-label\">\u5148\u884c\u30ce\u30fc\u30c9\u306eCMP\u5f8c\u306e\u8868\u9762\u7c97\u3055\u76ee\u6a19<\/div>\r\n<\/div>\r\n<div class=\"jeez-stat-card\">\r\n<div class=\"stat-num\">300 mm<\/div>\r\n<div class=\"stat-label\">\u91cf\u7523\u7528\u30a6\u30a7\u30fc\u30cf\u306e\u4e3b\u6d41\u76f4\u5f84<\/div>\r\n<\/div>\r\n<\/div>\r\n<p>\u3067 <strong>JEEZ<\/strong> Ltd. (Jizhi Electronic Technology Co., Ltd.)\u306f\u3001\u7cbe\u5bc6CMP\u30b9\u30e9\u30ea\u30fc\u3068CMP\u7814\u78e8\u30d1\u30c3\u30c9\u3092\u4e16\u754c\u4e2d\u306e\u5de5\u5834\u3001\u7814\u7a76\u6a5f\u95a2\u3001\u88c5\u7f6eOEM\u306b\u4f9b\u7d66\u3057\u3066\u3044\u307e\u3059\u3002\u5f53\u793e\u306e\u88fd\u54c1\u30e9\u30a4\u30f3\u306f\u3001\u6210\u719f\u3057\u305f28nm\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u304b\u3089\u3001\u6700\u3082\u8981\u6c42\u306e\u53b3\u3057\u3044\u30b5\u30d65nm\u304a\u3088\u30733D-IC\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u307e\u3067\u306e\u6280\u8853\u30ce\u30fc\u30c9\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jeez-divider\" \/><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       SECTION 2 \u2014 WHY CMP MATTERS\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<section id=\"why-cmp-matters\">\r\n<h2>2.\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066CMP\u304c\u91cd\u8981\u306a\u7406\u7531<\/h2>\r\n<p>\u73fe\u4ee3\u306e\u96c6\u7a4d\u56de\u8def\u306f\u3001FEOL\uff08Front-End-of-Line\uff09\u304a\u3088\u3073BEOL\uff08Back-End-of-Line\uff09\u30b7\u30fc\u30b1\u30f3\u30b9\u3068\u3057\u3066\u77e5\u3089\u308c\u308b\u30d7\u30ed\u30bb\u30b9\u3092\u901a\u3058\u3066\u3001\u30ec\u30a4\u30e4\u30fc\u3054\u3068\u306b\u69cb\u7bc9\u3055\u308c\u308b\u3002\u5404\u5c64\u306f\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3001\u7d76\u7e01\u30c8\u30ec\u30f3\u30c1\u3001\u91d1\u5c5e\u76f8\u4e92\u63a5\u7d9a\u3001\u8a98\u96fb\u4f53\u819c\u306a\u3069\u3001\u65b0\u3057\u3044\u5730\u5f62\u7684\u7279\u5fb4\u3092\u5c0e\u5165\u3057\u3001\u3053\u308c\u3089\u306e\u7279\u5fb4\u306e\u4e00\u3064\u4e00\u3064\u304c\u30a6\u30a7\u30cf\u8868\u9762\u306b\u9ad8\u3055\u306e\u3070\u3089\u3064\u304d\u3092\u751f\u3058\u3055\u305b\u308b\u3002.<\/p>\r\n<p>\u3053\u306e\u3088\u3046\u306a\u8868\u9762\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u30fc\u306e\u5897\u5927\u306f\u3001\u4fee\u6b63\u3055\u308c\u306a\u3044\u307e\u307e\u653e\u7f6e\u3055\u308c\u308b\u3068\u3001\u5148\u9032\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30c4\u30fc\u30eb\u306e\u7126\u70b9\u6df1\u5ea6\u3092\u3059\u3050\u306b\u8d85\u3048\u3066\u3057\u307e\u3044\u3001\u30d5\u30a9\u30fc\u30ab\u30b9\u30a8\u30e9\u30fc\u3001CD\uff08\u30af\u30ea\u30c6\u30a3\u30ab\u30eb\u30c7\u30a3\u30e1\u30f3\u30b7\u30e7\u30f3\uff09\u306e\u3070\u3089\u3064\u304d\u3001\u3072\u3044\u3066\u306f\u6b69\u7559\u307e\u308a\u306e\u4f4e\u4e0b\u3092\u5f15\u304d\u8d77\u3053\u3059\u3002CMP\u306f\u3001\u3053\u306e\u3088\u3046\u306a\u554f\u984c\u3092\u89e3\u6c7a\u3067\u304d\u308b\u552f\u4e00\u306e\u30a6\u30a7\u30fc\u30cf\u30ec\u30d9\u30eb\u306e\u30d7\u30ed\u30bb\u30b9\u3067\u3059\u3002 <em>\u30b0\u30ed\u30fc\u30d0\u30eb\u5e73\u5766\u5316<\/em> \u6b21\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u5de5\u7a0b\u306e\u524d\u306b\u3001\u8868\u9762\u306e\u9ad8\u3055\u306e\u3070\u3089\u3064\u304d\u3092\u30ea\u30bb\u30c3\u30c8\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002.<\/p>\r\n<div class=\"jeez-highlight\">\r\n<p>\u5e73\u5766\u5316\u3060\u3051\u3067\u306a\u304f\u3001CMP\u306f\u6b21\u306e\u3088\u3046\u306a\u5f79\u5272\u3082\u679c\u305f\u3059\u3002 <strong>\u6750\u6599\u9664\u53bb\u30b9\u30c6\u30c3\u30d7<\/strong> \u9285\u30c0\u30de\u30b7\u30f3\u914d\u7dda\u5f62\u6210\u3001STI\uff08Shallow Trench Isolation\uff09\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u30d3\u30a2\u30d5\u30a3\u30eb\u3001High-k\u30e1\u30bf\u30eb\u30b2\u30fc\u30c8\u96c6\u7a4d\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u3067\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3044\u305a\u308c\u306e\u5834\u5408\u3082\u3001\u5316\u5b66\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u6a5f\u68b0\u7684\u78e8\u8017\u306e\u7d44\u307f\u5408\u308f\u305b\u306b\u3088\u308a\u3001\u5c64\u56fa\u6709\u306e\u9078\u629e\u6027\u3067\u30aa\u30fc\u30d0\u30fc\u30d0\u30fc\u30c7\u30f3\u6750\u6599\u3092\u9664\u53bb\u3057\u3001\u76ee\u7684\u306e\u819c\u754c\u9762\u3067\u6b63\u78ba\u306b\u505c\u6b62\u3055\u305b\u307e\u3059\u3002.<\/p>\r\n<\/div>\r\n<h3>CMP\u304c\u4e0d\u53ef\u6b20\u306a\u4e3b\u306a\u30d7\u30ed\u30bb\u30b9\u30b9\u30c6\u30c3\u30d7<\/h3>\r\n<ul>\r\n<li><strong>STI\uff08\u30b7\u30e3\u30ed\u30fc\u30c8\u30ec\u30f3\u30c1\u30fb\u30a2\u30a4\u30bd\u30ec\u30fc\u30b7\u30e7\u30f3\uff09\uff1a<\/strong> \u30c8\u30ec\u30f3\u30c1\u4e0a\u306b\u5806\u7a4d\u3057\u305f\u4f59\u5206\u306aSiO\u2082\u3092\u9664\u53bb\u3057\u3001\u7a92\u5316\u30b7\u30ea\u30b3\u30f3\u30cf\u30fc\u30c9\u30de\u30b9\u30af\u4e0a\u3067\u505c\u6b62\u3059\u308b\u3002.<\/li>\r\n<li><strong>ILD\uff08\u5c64\u9593\u7d76\u7e01\u819c\uff09\u306e\u5e73\u5766\u5316\uff1a<\/strong> \u30e1\u30bf\u30eb\u914d\u7dda\u5c64\u9593\u306b\u5806\u7a4d\u3057\u305f\u9178\u5316\u819c\u3092\u5e73\u5766\u5316\u3059\u308b\u3002.<\/li>\r\n<li><strong>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\uff08W\uff09 CMP\uff1a<\/strong> \u30d3\u30a2\u30d5\u30a3\u30eb\u5f8c\u306e\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u6b8b\u6e23\u3092\u9664\u53bb\u3057\u3001TiN\u30d0\u30ea\u30a2\u3068\u8a98\u96fb\u4f53\u3092\u9732\u51fa\u3055\u305b\u308b\u3002.<\/li>\r\n<li><strong>\u9285\uff08Cu\uff09CMP\uff1a<\/strong> \u30d0\u30eb\u30af\u9285\u3092\u9664\u53bb\u3057\u3001\u305d\u306e\u4e0b\u306e\u30d0\u30ea\u30a2\u91d1\u5c5e\uff08Ta\/TaN\u3001TiN\u3001Co\uff09\u3092\u9664\u53bb\u3059\u308b2\u6bb5\u968e\u306e\u30d7\u30ed\u30bb\u30b9\u3002.<\/li>\r\n<li><strong>\u30b3\u30d0\u30eb\u30c8\uff08Co\uff09CMP\uff1a<\/strong> \u30b5\u30d67nm\u30ce\u30fc\u30c9\u306e\u9ad8\u5ea6\u306a\u30b3\u30f3\u30bf\u30af\u30c8\u304a\u3088\u3073\u30ed\u30fc\u30ab\u30eb\u76f8\u4e92\u63a5\u7d9a\u306b\u4f7f\u7528\u3055\u308c\u308b\u3053\u3068\u304c\u5897\u3048\u3066\u3044\u308b\u3002.<\/li>\r\n<li><strong>\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u3068\u30b2\u30fc\u30c8CMP\uff1a<\/strong> \u30b2\u30fc\u30c8-\u30e9\u30b9\u30c8HKMG\u7d71\u5408\u65b9\u5f0f\u3067\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/li>\r\n<li><strong>\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u5c64\u306e\u5e73\u5766\u5316\uff083D-IC \/ \u30a6\u30a7\u30cf\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\uff09\uff1a<\/strong> 0.3nm\u4ee5\u4e0b\u306e\u7c97\u3055\u3092\u5b9f\u73fe\u3057\u3001\u76f4\u63a5\u8a98\u96fb\u4f53\u63a5\u5408\u306b\u5bfe\u5fdc\u3002.<\/li>\r\n<\/ul>\r\n<p>\u6570\u767enm\/\u5206\u306e\u901f\u5ea6\u3067\u7a4d\u6975\u7684\u306b\u9178\u5316\u7269\u3092\u9664\u53bb\u3059\u308b\u3082\u306e\u304b\u3089\u3001\u6570\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u306e\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3084\u4fb5\u98df\u304c\u30c7\u30d0\u30a4\u30b9\u3092\u30c0\u30e1\u306b\u3059\u308b\u8d85\u512a\u3057\u3044\u6700\u7d42\u7814\u78e8\u307e\u3067\u3001CMP\u6d88\u8017\u54c1\u304c\u81a8\u5927\u306a\u6027\u80fd\u7bc4\u56f2\u3092\u30ab\u30d0\u30fc\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u7406\u7531\u306f\u3001\u3053\u3046\u3057\u305f\u7528\u9014\u306e\u5e83\u3055\u306b\u3042\u308b\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jeez-divider\" \/><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       SECTION 3 \u2014 HOW CMP WORKS\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<section id=\"cmp-process\">\r\n<h2>3.CMP\u30d7\u30ed\u30bb\u30b9\u306e\u4ed5\u7d44\u307f<\/h2>\r\n<p>CMP\u88c5\u7f6e\uff08\u30dd\u30ea\u30c3\u30b7\u30e3\u30fc\u307e\u305f\u306f\u30d7\u30e9\u30ca\u30e9\u30a4\u30b6\u30fc\u3068\u547c\u3070\u308c\u308b\u3053\u3068\u304c\u591a\u3044\uff09\u306f\u3001\u7814\u78e8\u30d1\u30c3\u30c9\u3092\u53d6\u308a\u4ed8\u3051\u308b\u56de\u8ee2\u30d7\u30e9\u30c6\u30f3\u3001\u30a6\u30a7\u30fc\u30cf\u3092\u4f0f\u305b\u3066\u4fdd\u6301\u3059\u308b\u30a6\u30a7\u30fc\u30cf\u30ad\u30e3\u30ea\u30a2\uff08\u7814\u78e8\u30d8\u30c3\u30c9\uff09\u3001\u304a\u3088\u3073\u65b0\u9bae\u306a\u30b9\u30e9\u30ea\u30fc\u3092\u5236\u5fa1\u3055\u308c\u305f\u6d41\u91cf\u3067\u4f9b\u7d66\u3059\u308b\u30b9\u30e9\u30ea\u30fc\u4f9b\u7d66\u30a2\u30fc\u30e0\u304b\u3089\u69cb\u6210\u3055\u308c\u307e\u3059\u3002\u30a6\u30a7\u30fc\u30cf\u3068\u30d7\u30e9\u30c6\u30f3\u306f\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u7570\u306a\u308b\u901f\u5ea6\u3067\u540c\u3058\u65b9\u5411\u306b\u56de\u8ee2\u3057\u3001\u30ad\u30e3\u30ea\u30a2\u3092\u901a\u3057\u3066\u5236\u5fa1\u3055\u308c\u305f\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u304c\u52a0\u3048\u3089\u308c\u307e\u3059\u3002.<\/p>\r\n<div class=\"jeez-steps\">\r\n<div class=\"jeez-step\">\r\n<div class=\"jeez-step-num\">1<\/div>\r\n<div class=\"jeez-step-body\">\r\n<p><strong>\u30b9\u30e9\u30ea\u30fc\u306e\u914d\u9054\uff1a<\/strong> \u7814\u78e8\u7c92\u5b50\u3068\u5316\u5b66\u85ac\u54c1\u3092\u542b\u3080\u65b0\u9bae\u306a\u30b9\u30e9\u30ea\u30fc\u3092\u30d1\u30c3\u30c9\u8868\u9762\u306b\u5410\u51fa\u3057\u307e\u3059\u3002\u30b9\u30e9\u30ea\u30fc\u306f\u30d1\u30c3\u30c9\u306e\u56de\u8ee2\u306b\u3088\u3063\u3066\u30a6\u30a7\u30fc\u30cf\u306e\u4e0b\u306b\u5f15\u304d\u8fbc\u307e\u308c\u3001\u30a6\u30a7\u30fc\u30cf\u3068\u30d1\u30c3\u30c9\u306e\u30a2\u30b9\u30da\u30ea\u30c6\u30a3\u306e\u9593\u306b\u8584\u3044\u6d41\u4f53\u529b\u5b66\u7684\u819c\u3092\u5f62\u6210\u3057\u307e\u3059\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jeez-step\">\r\n<div class=\"jeez-step-num\">2<\/div>\r\n<div class=\"jeez-step-body\">\r\n<p><strong>\u5316\u5b66\u7684\u8edf\u5316\uff1a<\/strong> \u30b9\u30e9\u30ea\u30fc\u4e2d\u306e\u6d3b\u6027\u5316\u5b66\u7269\u8cea\u304c\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u6750\u6599\u3068\u53cd\u5fdc\u3057\u3001\u5143\u306e\u30d5\u30a3\u30eb\u30e0\u3088\u308a\u3082\u6469\u8017\u3057\u3084\u3059\u3044\u3001\u3088\u308a\u67d4\u3089\u304b\u304f\u6a5f\u68b0\u7684\u9069\u5408\u6027\u306e\u9ad8\u3044\u9178\u5316\u7269\u307e\u305f\u306f\u6c34\u9178\u5316\u7269\u5c64\u3092\u5f62\u6210\u3059\u308b\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jeez-step\">\r\n<div class=\"jeez-step-num\">3<\/div>\r\n<div class=\"jeez-step-body\">\r\n<p><strong>\u6a5f\u68b0\u7684\u6469\u8017\uff1a<\/strong> \u7814\u78e8\u7c92\u5b50-\u5178\u578b\u7684\u306b\u306f\u30bb\u30ea\u30a2\uff08CeO\u2082\uff09\u3001\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\uff08SiO\u2082\uff09\u3001\u307e\u305f\u306f\u30a2\u30eb\u30df\u30ca\uff08Al\u2082O\u2083\uff09-\u306f\u3001\u5316\u5b66\u7684\u306b\u4fee\u98fe\u3055\u308c\u305f\u8868\u9762\u5c64\u3092\u7269\u7406\u7684\u306b\u9664\u53bb\u3059\u308b\u3002\u3053\u306e\u8907\u5408\u4f5c\u7528\u304c\u3001\u5358\u7d14\u306a\u30a8\u30c3\u30c1\u30f3\u30b0\u3067\u306f\u306a\u304f\u5e73\u5766\u5316\u3092\u3082\u305f\u3089\u3059\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jeez-step\">\r\n<div class=\"jeez-step-num\">4<\/div>\r\n<div class=\"jeez-step-body\">\r\n<p><strong>\u6750\u6599\u8f38\u9001\uff1a<\/strong> \u4f7f\u7528\u6e08\u307f\u30b9\u30e9\u30ea\u30fc\u3001\u9664\u53bb\u3055\u308c\u305f\u7c92\u5b50\u3001\u304a\u3088\u3073\u53cd\u5fdc\u526f\u751f\u6210\u7269\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u6d41\u308c\u3068\u30d1\u30c3\u30c9\u306e\u6e9d\u306b\u3088\u3063\u3066\u7814\u78e8\u754c\u9762\u304b\u3089\u904b\u3073\u53bb\u3089\u308c\u3001\u518d\u5806\u7a4d\u3084\u30b9\u30af\u30e9\u30c3\u30c1\u306b\u3088\u308b\u51dd\u96c6\u3092\u9632\u304e\u307e\u3059\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jeez-step\">\r\n<div class=\"jeez-step-num\">5<\/div>\r\n<div class=\"jeez-step-body\">\r\n<p><strong>\u30a8\u30f3\u30c9\u30dd\u30a4\u30f3\u30c8\u306e\u691c\u51fa\uff1a<\/strong> \u6700\u65b0\u306eCMP\u88c5\u7f6e\u306f\u3001\u6469\u64e6\u30c8\u30eb\u30af\u3001\u5149\u5b66\u53cd\u5c04\u7387\uff08ISRM\uff09\u3001\u307e\u305f\u306f\u6e26\u96fb\u6d41\u4fe1\u53f7\u3092\u76e3\u8996\u3057\u3066\u3001\u76ee\u6a19\u306e\u7814\u78e8\u6df1\u3055\u306b\u9054\u3057\u305f\u77ac\u9593\u3092\u691c\u51fa\u3057\u3001\u81ea\u52d5\u7684\u306b\u505c\u6b62\u3059\u308b\u304b\u3001\u6b21\u306e\u7814\u78e8\u30b9\u30c6\u30c3\u30d7\u306b\u79fb\u884c\u3057\u307e\u3059\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jeez-step\">\r\n<div class=\"jeez-step-num\">6<\/div>\r\n<div class=\"jeez-step-body\">\r\n<p><strong>CMP\u5f8c\u306e\u30af\u30ea\u30fc\u30f3\uff1a<\/strong> \u30a6\u30a7\u30fc\u30cf\u306f\u3001\u6b21\u306e\u30d7\u30ed\u30bb\u30b9\u5de5\u7a0b\u306b\u5165\u308b\u524d\u306b\u3001\u76f4\u3061\u306b\u30d6\u30e9\u30b7\u30b9\u30af\u30e9\u30d6\u6d17\u6d44\u3068\u30e1\u30ac\u30bd\u30cb\u30c3\u30af\u6d17\u6d44\u3092\u884c\u3044\u3001\u6b8b\u7559\u30b9\u30e9\u30ea\u30fc\u7c92\u5b50\u3068\u91d1\u5c5e\u30a4\u30aa\u30f3\u3092\u9664\u53bb\u3057\u307e\u3059\u3002CMP\u5f8c\u306e\u30af\u30ea\u30fc\u30f3\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u306f\u3001\u4f7f\u7528\u3055\u308c\u308b\u30b9\u30e9\u30ea\u30fc\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u3068\u5bc6\u63a5\u306b\u7d50\u3073\u3064\u3044\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<p>\u6750\u6599\u9664\u53bb\u7387(MRR)\u306f\u3001\u6b21\u306e\u3088\u3046\u306b\u652f\u914d\u3055\u308c\u308b\u3002 <strong>\u30d7\u30ec\u30b9\u30c8\u30f3\u65b9\u7a0b\u5f0f<\/strong>:\u3053\u3053\u3067P\u306f\u5370\u52a0\u5727\u529b\uff08\u5358\u4f4d\u9762\u7a4d\u5f53\u305f\u308a\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\uff09\u3001V\u306f\u30a6\u30a7\u30fc\u30cf\u3068\u30d1\u30c3\u30c9\u9593\u306e\u76f8\u5bfe\u901f\u5ea6\u3067\u3059\u3002\u5b9f\u969b\u306b\u306f\u3001\u6700\u65b0\u306e\u30de\u30eb\u30c1\u30be\u30fc\u30f3\u30ad\u30e3\u30ea\u30a2\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u3067\u72ec\u7acb\u3057\u305f\u5727\u529b\u5236\u5fa1\u3092\u53ef\u80fd\u306b\u3057\u3001\u30a8\u30c3\u30b8\u52b9\u679c\u3068\u30a6\u30a7\u30fc\u30cf\u306e\u53cd\u308a\u3092\u88dc\u6b63\u3057\u3066\u3001\u30a6\u30a7\u30fc\u30cf\u5185\u3067\u00b11\uff5e2%\u306e\u5747\u4e00\u6027\u3092\u9054\u6210\u3057\u307e\u3059\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jeez-divider\" \/><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       SECTION 4 \u2014 CMP SLURRY\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<section id=\"cmp-slurry\">\r\n<h2>4.CMP\u30b9\u30e9\u30ea\u30fc - \u7a2e\u985e\u3001\u7d44\u6210\u3068\u9078\u629e<\/h2>\r\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u5e73\u5766\u5316\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u6700\u3082\u91cd\u8981\u306a\u6d88\u8017\u54c1\u3067\u3059\u3002\u7814\u78e8\u7c92\u5b50\u3001pH\u8abf\u6574\u7528\u7de9\u885d\u5264\u3001\u9178\u5316\u5264\u3001\u932f\u5316\u5264\u3001\u8150\u98df\u9632\u6b62\u5264\u3001\u754c\u9762\u6d3b\u6027\u5264\u3001\u5834\u5408\u306b\u3088\u3063\u3066\u306f\u76ae\u819c\u5f62\u6210\u7528\u6dfb\u52a0\u5264\u306a\u3069\u3092\u542b\u3080\u3001\u6ce8\u610f\u6df1\u304f\u8a2d\u8a08\u3055\u308c\u305f\u6c34\u6027\u30b3\u30ed\u30a4\u30c9\u61f8\u6fc1\u6db2\u3067\u3059\u3002\u5404\u5316\u5b66\u6210\u5206\u306f\u3001\u6240\u671b\u306e\u9664\u53bb\u7387\u3001\u9078\u629e\u6027\u3001\u5e73\u5766\u6027\u3001\u6b20\u9665\u6027\u80fd\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u7279\u5b9a\u306e\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002.<\/p>\r\n<p>\u8aa4\u3063\u305f\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u3001\u3042\u308b\u3044\u306f\u9069\u5207\u306a\u30b9\u30e9\u30ea\u30fc\u3092\u4e0d\u5341\u5206\u306a\u7ba1\u7406\u6761\u4ef6\u4e0b\u3067\u4f7f\u7528\u3059\u308b\u3053\u3068\u306f\u3001CMP\u306e\u6b69\u7559\u307e\u308a\u4f4e\u4e0b\u306e\u6700\u3082\u4e00\u822c\u7684\u306a\u6839\u672c\u539f\u56e0\u306e\u4e00\u3064\u3067\u3059\u3002\u5f93\u3063\u3066\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u5316\u5b66\u7684\u6027\u8cea\u3092\u6df1\u304f\u7406\u89e3\u3059\u308b\u3053\u3068\u306f\u3001CMP\u6d88\u8017\u54c1\u3092\u6271\u3046\u30d7\u30ed\u30bb\u30b9\u30a8\u30f3\u30b8\u30cb\u30a2\u3084\u8abf\u9054\u62c5\u5f53\u8005\u306b\u3068\u3063\u3066\u3001\u57fa\u790e\u3068\u306a\u308b\u3082\u306e\u3067\u3059\u3002\u5f53\u793e\u306e <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Slurry-Types-Applications-Selection-Guide\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u3001\u7528\u9014\u3068\u9078\u629e<\/a> \u4e3b\u8981\u306a\u30b3\u30f3\u30bb\u30d7\u30c8\u3092\u4ee5\u4e0b\u306b\u8981\u7d04\u3059\u308b\u3002.<\/p>\r\n<h3 id=\"slurry-types\">4a.\u7528\u9014\u5225\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e<\/h3>\r\n<div class=\"jeez-table-wrap\">\r\n<table class=\"jeez-table\">\r\n<thead>\r\n<tr>\r\n<th>\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7<\/th>\r\n<th>\u5bfe\u8c61\u4f5c\u54c1<\/th>\r\n<th>\u4e3b\u7814\u78e8\u6750<\/th>\r\n<th>\u30ad\u30fc\u30b1\u30df\u30b9\u30c8\u30ea\u30fc<\/th>\r\n<th>\u30d7\u30ed\u30bb\u30b9\u30b9\u30c6\u30c3\u30d7<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td><strong>\u9178\u5316\u7269 \/ STI\u30b9\u30e9\u30ea\u30fc<\/strong><\/td>\r\n<td>SiO\u2082\uff08TEOS\u3001HDP\uff09<\/td>\r\n<td>\u30bb\u30ea\u30a2<\/td>\r\n<td>\u30a2\u30eb\u30ab\u30ea\u6027\u3001\u4f4e\u30a4\u30aa\u30f3\u5f37\u5ea6<\/td>\r\n<td>STI\u3001ILD\u5e73\u5766\u5316<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u9285\u30d0\u30eb\u30af\u30fb\u30b9\u30e9\u30ea\u30fc<\/strong><\/td>\r\n<td>Cu\uff08\u30aa\u30fc\u30d0\u30fc\u30d0\u30fc\u30c7\u30f3\uff09<\/td>\r\n<td>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab<\/td>\r\n<td>H\u2082O\u2082\u9178\u5316\u5264\u3001BTA\u963b\u5bb3\u5264\u3001\u6709\u6a5f\u9178\u932f\u5316\u5264<\/td>\r\n<td>\u9285\u30c0\u30de\u30b7\u30f3 \u30b9\u30c6\u30c3\u30d71<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30d0\u30ea\u30a2\uff0f\u30af\u30ea\u30a2\u30ea\u30f3\u30b0\u30b9\u30e9\u30ea\u30fc<\/strong><\/td>\r\n<td>Ta\u3001TaN\u3001TiN\u3001Co\u3001Ru<\/td>\r\n<td>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u307e\u305f\u306f\u30a2\u30eb\u30df\u30ca<\/td>\r\n<td>\u9069\u5ea6\u306apH\u3001\u9078\u629e\u30a8\u30c3\u30c1\u30f3\u30b0\u51e6\u65b9<\/td>\r\n<td>\u9285\u30c0\u30de\u30b7\u30f3 \u30b9\u30c6\u30c3\u30d7 2<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\uff08W\uff09\u30b9\u30e9\u30ea\u30fc<\/strong><\/td>\r\n<td>W\u3001TiN<\/td>\r\n<td>\u30a2\u30eb\u30df\u30ca\u307e\u305f\u306f\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab<\/td>\r\n<td>H\u2082O\u2082\uff0f\u9244\u7cfb\u9178\u5316\u5264\u3001\u9178\u6027pH<\/td>\r\n<td>W\u30d7\u30e9\u30b0\uff0fCMP\u7d4c\u7531<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30b3\u30d0\u30eb\u30c8\uff08Co\uff09\u30b9\u30e9\u30ea\u30fc<\/strong><\/td>\r\n<td>Co\u3001Co\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb<\/td>\r\n<td>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab<\/td>\r\n<td>pH 4-7\u3001\u5f31\u9178\u6027\u3001\u5171\u6df7\u5408\u5264<\/td>\r\n<td>\u30a2\u30c9\u30d0\u30f3\u30b9\u30c9\u30fb\u30b3\u30f3\u30bf\u30af\u30c8 \/ BEOL<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u30b9\u30e9\u30ea\u30fc<\/strong><\/td>\r\n<td>\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u3001SiN<\/td>\r\n<td>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab<\/td>\r\n<td>\u30a2\u30eb\u30ab\u30ea\u6027\u3001\u9ad8\u3044Si:SiN\u9078\u629e\u6027<\/td>\r\n<td>\u30b2\u30fc\u30c8CMP\u3001FEOL<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u63a5\u7740\u5c64\u30b9\u30e9\u30ea\u30fc<\/strong><\/td>\r\n<td>SiO\u2082, SiCN<\/td>\r\n<td>\u8d85\u9ad8\u7d14\u5ea6\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab<\/td>\r\n<td>\u4e2d\u6027\u306b\u8fd1\u3044pH\u3001\u975e\u5e38\u306b\u4f4e\u3044\u7c92\u5b50\u6fc3\u5ea6<\/td>\r\n<td>\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u63a5\u5408\uff083D-IC\uff09<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<h3 id=\"slurry-abrasives\">4b.\u7814\u78e8\u5264\u306e\u5316\u5b66\uff1a\u30bb\u30ea\u30a2\u5bfe\u30b7\u30ea\u30ab\u5bfe\u30a2\u30eb\u30df\u30ca<\/h3>\r\n<p>\u7814\u78e8\u7c92\u5b50\u306e\u9078\u629e\u306f\u3001\u6750\u6599\u9664\u53bb\u30e1\u30ab\u30cb\u30ba\u30e0\u3068\u6b20\u9665\u30ea\u30b9\u30af\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u306e\u4e21\u65b9\u3092\u6c7a\u5b9a\u3059\u308b\u305f\u3081\u3001\u30b9\u30e9\u30ea\u30fc\u8a2d\u8a08\u306b\u304a\u3044\u3066\u6700\u3082\u91cd\u8981\u306a\u552f\u4e00\u306e\u914d\u5408\u6c7a\u5b9a\u3067\u3042\u308b\u3068\u8a00\u3063\u3066\u3082\u904e\u8a00\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002.<\/p>\r\n<div class=\"jeez-grid-2\">\r\n<div class=\"jeez-card\">\r\n<h4>\u30bb\u30ea\u30a2<\/h4>\r\n<ul>\r\n<li>\u30b1\u30df\u30ab\u30eb\u30fb\u30c8\u30a5\u30fc\u30b9\u52b9\u679c\u306b\u3088\u308b\u512a\u308c\u305f\u9178\u5316\u7269\u9664\u53bb\u7387<\/li>\r\n<li>\u9ad8\u3044SiO\u2082\uff1aSi\u2083N\u2084\u9078\u629e\u6027 - STI\u306b\u6700\u9069<\/li>\r\n<li>\u5fc5\u8981\u306a\u7c92\u5b50\u8ca0\u8377\u304c\u4f4e\u3044\u2192\u540c\u7b49\u306eMRR\u3067\u6b20\u9665\u304c\u5c11\u306a\u3044<\/li>\r\n<li>\u30a4\u30aa\u30f3\u6c5a\u67d3\u306b\u654f\u611f\u3001\u53b3\u5bc6\u306a\u6d74\u7ba1\u7406\u304c\u5fc5\u8981<\/li>\r\n<li>\u30b7\u30ea\u30ab\u306b\u6bd4\u3079\u3066\u9ad8\u3044\u539f\u6599\u30b3\u30b9\u30c8<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jeez-card\">\r\n<h4>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab(SiO\u2082)<\/h4>\r\n<ul>\r\n<li>\u512a\u308c\u305f\u7c92\u5b50\u5747\u4e00\u6027\u3068\u7c92\u5f84\u5236\u5fa1\uff0820\uff5e120 nm\uff09<\/li>\r\n<li>\u4f4e\u6b20\u9665\u7387 - \u9285\u3001\u30d0\u30ea\u30a2\u3001\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0CMP\u306b\u597d\u9069<\/li>\r\n<li>\u5e83\u3044pH\u7bc4\u56f2\uff082\uff5e12\uff09\u3067\u5b89\u5b9a<\/li>\r\n<li>\u540c\u7b49\u306e\u7c92\u5b50\u8ca0\u8377\u3067\u30bb\u30ea\u30a2\u3088\u308a\u4f4e\u3044MRR<\/li>\r\n<li>\u6700\u3082\u6c4e\u7528\u6027\u306e\u9ad8\u3044\u7814\u78e8\u6750\u3067\u3001\u6700\u3082\u5e45\u5e83\u3044\u7528\u9014\u306b\u4f7f\u7528\u53ef\u80fd<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jeez-card\">\r\n<h4>\u30a2\u30eb\u30df\u30ca\uff08Al\u2082O\u2083\uff09<\/h4>\r\n<ul>\r\n<li>\u9ad8\u786c\u5ea6\uff08\u30e2\u30fc\u30b99\uff09\u2192\u7a4d\u6975\u7684\u306a\u91d1\u5c5e\u9664\u53bb<\/li>\r\n<li>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u306e\u6a19\u6e96\u3001\u30b5\u30d5\u30a1\u30a4\u30a2\u57fa\u677f\u7814\u78e8\u306b\u6709\u52b9<\/li>\r\n<li>\u30bd\u30d5\u30c8\u30d5\u30a3\u30eb\u30e0\u3067\u306f\u30b9\u30af\u30e9\u30c3\u30c1\u30ea\u30b9\u30af\u304c\u9ad8\u3044\u3002<\/li>\r\n<li>\u30d2\u30e5\u30fc\u30e0\u30c9\u7d50\u6676\u3068\u713c\u6210\u7d50\u6676\u304c\u3042\u308b<\/li>\r\n<li>\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u3067\u306f\u4e00\u822c\u7684\u3067\u306f\u306a\u3044\u304c\u3001\u5316\u5408\u7269\u534a\u5c0e\u4f53\u3067\u306f\u307e\u3060\u5e83\u304f\u4f7f\u308f\u308c\u3066\u3044\u308b<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jeez-card\">\r\n<h4>\u7279\u6b8a\u7814\u78e8\u6750<\/h4>\r\n<ul>\r\n<li><strong>\u30b8\u30eb\u30b3\u30cb\u30a2\uff08ZrO\u2082\uff09\uff1a<\/strong> \u5149\u5b66\u30ac\u30e9\u30b9\u304a\u3088\u3073\u773c\u93e1\u30ec\u30f3\u30ba\u7814\u78e8<\/li>\r\n<li><strong>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30b9\u30e9\u30ea\u30fc\uff1a<\/strong> SiC\u57fa\u677f\u3068GaN\u30a8\u30d4\u5c64\u306e\u5e73\u5766\u5316<\/li>\r\n<li><strong>Mn\u30c9\u30fc\u30d7\u30bb\u30ea\u30a2\uff1a<\/strong> \u5148\u7aef\u30ce\u30fc\u30c9\u3067\u306e\u6b21\u4e16\u4ee3\u4f4e\u6b20\u9665\u9178\u5316\u7269CMP<\/li>\r\n<li><strong>\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u7c92\u5b50\uff1a<\/strong> \u8abf\u6574\u53ef\u80fd\u306a\u9078\u629e\u6027\u306e\u305f\u3081\u306e\u30b3\u30a2\u30b7\u30a7\u30eb\u8a2d\u8a08<\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<p>\u30eb\u30c6\u30cb\u30a6\u30e0\u3084\u30e2\u30ea\u30d6\u30c7\u30f3\u306e\u3088\u3046\u306a\u65b0\u3057\u3044\u91d1\u5c5e\u819c\u3068\u306e\u76f8\u4e92\u4f5c\u7528\u3082\u542b\u3081\u3001\u3053\u308c\u3089\u306e\u7814\u78e8\u6750\u304c\u5148\u9032\u30ce\u30fc\u30c9\u7528\u9014\u3067\u5177\u4f53\u7684\u306b\u3069\u306e\u3088\u3046\u306b\u6a5f\u80fd\u3059\u308b\u304b\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u306e\u8a73\u7d30\u30ac\u30a4\u30c9\u3092\u3054\u89a7\u304f\u3060\u3055\u3044\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Materials-for-Advanced-Nodes-(Below-14nm)\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u5148\u9032\u30ce\u30fc\u30c9\u7528CMP\u6750\u6599<\/a>.<\/p>\r\n<h3 id=\"slurry-selection\">4c.\u6b63\u3057\u3044CMP\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u3073\u65b9<\/h3>\r\n<p>\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u306b\u306f\u3001\u7af6\u5408\u3059\u308b\u4e00\u9023\u306e\u6027\u80fd\u76ee\u6a19\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u3068\u308b\u3053\u3068\u304c\u542b\u307e\u308c\u308b\u3002\u666e\u904d\u7684\u306a\u300c\u6700\u826f\u300d\u306e\u30b9\u30e9\u30ea\u30fc\u306f\u5b58\u5728\u305b\u305a\u3001\u6700\u9069\u306a\u88fd\u54c1\u306f\u5e38\u306b\u30d7\u30ed\u30bb\u30b9\u56fa\u6709\u3067\u3042\u308b\u3002\u8a55\u4fa1\u3059\u3079\u304d\u91cd\u8981\u306a\u30d1\u30e9\u30e1\u30fc\u30bf\u306b\u306f\u4ee5\u4e0b\u304c\u542b\u307e\u308c\u308b\uff1a<\/p>\r\n<ul>\r\n<li><strong>\u6750\u6599\u9664\u53bb\u7387\uff08MRR\uff09\uff1a<\/strong> \u76ee\u6a19MRR\u306f\u3001\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u8981\u4ef6\u3068\u30aa\u30fc\u30d0\u30fc\u30d0\u30fc\u30c7\u30f3\u306e\u539a\u3055\u306b\u3088\u3063\u3066\u8a2d\u5b9a\u3055\u308c\u308b\u3002\u4f4e\u3059\u304e\u308b\u3068\u30b5\u30a4\u30af\u30eb\u30bf\u30a4\u30e0\u304c\u60aa\u304f\u306a\u308a\u3001\u9ad8\u3059\u304e\u308b\u3068\u7d42\u70b9\u5236\u5fa1\u304c\u4fe1\u983c\u3067\u304d\u306a\u304f\u306a\u308b\u3002.<\/li>\r\n<li><strong>\u9078\u629e\u6027\uff1a<\/strong> \u30bf\u30fc\u30b2\u30c3\u30c8\u819c\u3068\u305d\u306e\u4e0b\u306e\u30b9\u30c8\u30c3\u30d7\u5c64\u306e\u9664\u53bb\u7387\u306e\u6bd4\u7387\uff08\u4f8b\u3048\u3070\u3001Cu\uff1a\u30d0\u30ea\u30a2\u3001SiO\u2082\uff1aSi\u2083N\u2084\uff09\u3002\u9078\u629e\u6027\u304c\u9ad8\u3044\u307b\u3069\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5e45\u304c\u5e83\u304c\u308b\u3002.<\/li>\r\n<li><strong>\u30a6\u30a8\u30cf\u5185\u5747\u4e00\u6027\uff08WIWNU\uff09\uff1a<\/strong> 300mm\u30a6\u30a7\u30fc\u30cf\u306e\u30e9\u30b8\u30a2\u30ebMRR\u306e\u3070\u3089\u3064\u304d\uff1b\u30af\u30e9\u30b9\u6700\u9ad8\u306e\u30b9\u30e9\u30ea\u30fc\u306f&lt;2% 1\u03c3\u3092\u9054\u6210\u3002.<\/li>\r\n<li><strong>\u6b20\u9665\uff1a<\/strong> \u8868\u9762\u691c\u67fb\u30c4\u30fc\u30eb\uff08KLA\u3001\u65e5\u7acb\uff09\u3067\u6e2c\u5b9a\u3057\u305f\u30b9\u30af\u30e9\u30c3\u30c1\u6570\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u6570\u3001\u91d1\u5c5e\u6c5a\u67d3\u30ec\u30d9\u30eb\u3002.<\/li>\r\n<li><strong>\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3068\u4fb5\u98df\uff1a<\/strong> \u7279\u5fb4\u3084\u6a21\u69d8\u304c\u5bc6\u96c6\u3057\u3066\u3044\u308b\u90e8\u5206\u304b\u3089\u6750\u6599\u3092\u53d6\u308a\u9664\u304f\u904e\u5270\u7814\u78e8\u306e\u4eba\u5de5\u7269\u3002.<\/li>\r\n<li><strong>\u5b89\u5b9a\u6027\u3068\u8cde\u5473\u671f\u9650\uff1a<\/strong> \u30b9\u30e9\u30ea\u30fc\u306e\u7c92\u5ea6\u5206\u5e03\u306f\u3001\u4fdd\u7ba1\u4e2d\u304a\u3088\u3073\u30c4\u30fc\u30eb\u5185\u30dd\u30c3\u30c8\u30e9\u30a4\u30d5\u3092\u901a\u3058\u3066\u5b89\u5b9a\u3057\u3066\u3044\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/li>\r\n<li><strong>CMP\u5f8c\u306e\u30af\u30ea\u30fc\u30f3\u306a\u4e92\u63db\u6027\uff1a<\/strong> \u30b9\u30e9\u30ea\u30fc\u306e\u5316\u5b66\u7684\u6027\u8cea\u306f\u3001\u5165\u624b\u53ef\u80fd\u306a\u30d6\u30e9\u30b7\u30b9\u30af\u30e9\u30d6\u3084\u30e1\u30ac\u30bd\u30cb\u30c3\u30af\u30af\u30ea\u30fc\u30f3\u306e\u5316\u5b66\u85ac\u54c1\u3067\u9664\u53bb\u3067\u304d\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/li>\r\n<\/ul>\r\n<div class=\"jeez-callout\">\r\n<div class=\"jeez-callout-icon\">\u26a0\ufe0f<\/div>\r\n<div class=\"jeez-callout-body\"><strong>\u91cd\u8981\u3060\uff1a<\/strong> \u30b9\u30e9\u30ea\u30fc\u306e\u6027\u80fd\u306f\u5358\u72ec\u3067\u306f\u8a55\u4fa1\u3055\u308c\u307e\u305b\u3093\u3002\u30d1\u30c3\u30c9\u306e\u786c\u5ea6\u3001\u6e9d\u30d1\u30bf\u30fc\u30f3\u3001\u304a\u3088\u3073\u8868\u9762\u30c6\u30af\u30b9\u30c1\u30e3\u306f\u3059\u3079\u3066\u3001\u30b9\u30e9\u30ea\u30fc\u304c\u7422\u78e8\u754c\u9762\u3078\u3001\u304a\u3088\u3073\u7422\u78e8\u754c\u9762\u304b\u3089\u3044\u304b\u306b\u52b9\u7387\u7684\u306b\u8f38\u9001\u3055\u308c\u308b\u304b\u306b\u5f71\u97ff\u3059\u308b\u305f\u3081\u3001\u30b9\u30e9\u30ea\u30fc\u3068\u30d1\u30c3\u30c9\u306e\u7d44\u307f\u5408\u308f\u305b\u306f\u4e00\u7dd2\u306b\u6700\u9069\u5316\u3055\u308c\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002\u5fc5\u305a\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306b\u7d44\u307f\u5408\u308f\u305b\u8a55\u4fa1\u30c7\u30fc\u30bf\u3092\u8981\u6c42\u3057\u3066\u304f\u3060\u3055\u3044\u3002.<\/div>\r\n<\/div>\r\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u5b89\u5168\u306a\u53d6\u308a\u6271\u3044\u3001\u4fdd\u7ba1\u6e29\u5ea6\u8981\u4ef6\u3001\u8caf\u8535\u5bff\u547d\u306e\u30d9\u30b9\u30c8\u30d7\u30e9\u30af\u30c6\u30a3\u30b9\u3001\u5ec3\u68c4\u898f\u5236\u306b\u95a2\u3059\u308b\u30ac\u30a4\u30c0\u30f3\u30b9\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u3092\u3054\u89a7\u304f\u3060\u3055\u3044\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Slurry-Storage-Handling-Safety\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u4fdd\u7ba1\u3001\u53d6\u308a\u6271\u3044\u3001\u5b89\u5168\u6027<\/a>.<\/p>\r\n<\/section>\r\n<hr class=\"jeez-divider\" \/><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       SECTION 5 \u2014 CMP POLISHING PADS\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<section id=\"cmp-pads\">\r\n<h2>5.CMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9 - \u6280\u8853\u3068\u9078\u629e<\/h2>\r\n<p>CMP\u7814\u78e8\u30d1\u30c3\u30c9\u306f\u3001CMP\u6d88\u8017\u54c1\u30b7\u30b9\u30c6\u30e0\u306e\u7b2c\u4e8c\u306e\u67f1\u3067\u3059\u3002\u30a6\u30a7\u30fc\u30cf\u306b\u63a5\u89e6\u3059\u308b\u6a5f\u68b0\u7684\u7814\u78e8\u9762\u3092\u63d0\u4f9b\u3057\u3001\u307e\u305f\u30b9\u30e9\u30ea\u30fc\u306e\u8f38\u9001\u5a92\u4f53\u3068\u3057\u3066\u3082\u6a5f\u80fd\u3057\u3001\u65b0\u9bae\u306a\u30b9\u30e9\u30ea\u30fc\u3092\u63a5\u89e6\u30be\u30fc\u30f3\u306b\u904b\u3073\u3001\u53cd\u5fdc\u526f\u751f\u6210\u7269\u3092\u9664\u53bb\u3057\u307e\u3059\u3002\u30d1\u30c3\u30c9\u306e\u9078\u629e\u306f\u3001\u9664\u53bb\u7387\u3001\u30a6\u30a7\u30fc\u30cf\u5185\u306e\u5747\u4e00\u6027\u3001\u6b20\u9665\u30ec\u30d9\u30eb\u3001\u304a\u3088\u3073\u30d1\u30c3\u30c9\u306e\u5bff\u547d\u306b\u5927\u304d\u306a\u5f71\u97ff\u3092\u4e0e\u3048\u307e\u3059\u3002.<\/p>\r\n<p>\u307b\u3068\u3093\u3069\u306e\u5e02\u8ca9\u306eCMP\u30d1\u30c3\u30c9\u306f <strong>\u30dd\u30ea\u30a6\u30ec\u30bf\u30f3<\/strong> - \u8010\u85ac\u54c1\u6027\u3001\u8abf\u6574\u53ef\u80fd\u306a\u6a5f\u68b0\u7684\u7279\u6027\u3001\u3088\u304f\u7406\u89e3\u3055\u308c\u305f\u7d30\u5b54\u69cb\u9020\u306e\u305f\u3081\u306b\u9078\u3070\u308c\u307e\u3057\u305f\u3002\u30d1\u30c3\u30c9\u306e\u5fae\u7d30\u69cb\u9020\u3001\u8868\u9762\u30c6\u30af\u30b9\u30c1\u30e3\u30fc\u3001\u30de\u30af\u30ed\u5f62\u72b6\uff08\u76f4\u5f84\u3001\u539a\u3055\u3001\u6e9d\u30d1\u30bf\u30fc\u30f3\uff09\u3001\u304a\u3088\u3073\u30d0\u30eb\u30af\u7c98\u5f3e\u6027\u7279\u6027\u306f\u3001\u7dcf\u4f53\u7684\u306b\u7422\u78e8\u6027\u80fd\u3092\u6c7a\u5b9a\u3057\u307e\u3059\u3002\u30d1\u30c3\u30c9\u6280\u8853\u306e\u5305\u62ec\u7684\u306a\u6280\u8853\u7684\u5185\u8a33\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u306e\u8a73\u7d30\u8a18\u4e8b\u3092\u53c2\u7167\u3057\u3066\u304f\u3060\u3055\u3044\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Polishing-Pads-Technologies-Comparison\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9\uff1a\u6280\u8853\u3068\u6bd4\u8f03<\/a>.<\/p>\r\n<h3 id=\"pad-types\">5a.\u30d1\u30c3\u30c9\u306e\u7a2e\u985e\u30cf\u30fc\u30c9\u3001\u30bd\u30d5\u30c8\u3001\u30b9\u30bf\u30c3\u30af<\/h3>\r\n<div class=\"jeez-grid-2\">\r\n<div class=\"jeez-card\">\r\n<h4>\u30cf\u30fc\u30c9\u30d1\u30c3\u30c9\uff08IC1000\u30bf\u30a4\u30d7\uff09<\/h4>\r\n<ul>\r\n<li>\u72ec\u7acb\u6c17\u6ce1\u30dd\u30ea\u30a6\u30ec\u30bf\u30f3\u30d5\u30a9\u30fc\u30e0\u3001\u30b7\u30e7\u30a2D\u786c\u5ea650\uff5e65<\/li>\r\n<li>\u9ad8\u3044\u5e73\u5766\u5316\u52b9\u7387 - \u6bb5\u5dee\u3092\u7d20\u65e9\u304f\u9664\u53bb<\/li>\r\n<li>\u9178\u5316\u819c\u3001W\u3001\u30d0\u30ea\u30a2CMP\u306e\u696d\u754c\u6a19\u6e96<\/li>\r\n<li>\u5c40\u6240\u7684\u306a\u30a6\u30a7\u30fc\u30cf\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u30fc\u306b\u5bfe\u3059\u308b\u30b3\u30f3\u30bf\u30af\u30c8\u9069\u5408\u6027\u306e\u4f4e\u4e0b<\/li>\r\n<li>MRR\u3092\u7dad\u6301\u3059\u308b\u306b\u306f\u983b\u7e41\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u304c\u5fc5\u8981<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jeez-card\">\r\n<h4>\u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\uff08\u30dd\u30ea\u30c6\u30c3\u30af\u30b9\u30bf\u30a4\u30d7\uff09<\/h4>\r\n<ul>\r\n<li>\u30d5\u30a7\u30eb\u30c8\u30d9\u30fc\u30b9\u307e\u305f\u306f\u30aa\u30fc\u30d7\u30f3\u30bb\u30eb\u30d5\u30a9\u30fc\u30e0\u3001\u30b7\u30e7\u30a2A\u786c\u5ea615\uff5e30<\/li>\r\n<li>\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u30fb\u30b3\u30f3\u30bf\u30af\u30c8\u2192\u4f4e\u6b20\u9665\u7387\u3001\u4f4e\u30b9\u30af\u30e9\u30c3\u30c1\u6570<\/li>\r\n<li>\u30d0\u30eb\u30af\u9664\u53bb\u5f8c\u306e\u30bb\u30ab\u30f3\u30c9\u30b9\u30c6\u30c3\u30d7\uff08\u30d0\u30d5\uff09\u30d1\u30c3\u30c9\u3068\u3057\u3066\u4f7f\u7528\u3002<\/li>\r\n<li>\u9ad8\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u30fc\u3067\u306f\u5e73\u5766\u5316\u52b9\u7387\u306b\u9650\u754c\u304c\u3042\u308b<\/li>\r\n<li>\u9285\u30d0\u30d5\u3068\u6700\u7d42\u7684\u306aSiO\u2082\u30b9\u30e0\u30fc\u30b9\u30a2\u30a6\u30c8\u306b\u597d\u9069<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jeez-card\">\r\n<h4>\u30b9\u30bf\u30c3\u30af\uff0f\u30b3\u30f3\u30dd\u30b8\u30c3\u30c8\u30fb\u30d1\u30c3\u30c9<\/h4>\r\n<ul>\r\n<li>\u5727\u7e2e\u6027\u306e\u30b5\u30d6\u30d1\u30c3\u30c9\u306b\u30e9\u30df\u30cd\u30fc\u30c8\u3055\u308c\u305f\u30cf\u30fc\u30c9\u30c8\u30c3\u30d7\u30d1\u30c3\u30c9<\/li>\r\n<li>\u30b5\u30d6\u30d1\u30c3\u30c9\u306e\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9\u304c\u30a6\u30a7\u30cf\u306e\u53cd\u308a\u3092\u88dc\u6b63<\/li>\r\n<li>\u5e73\u5766\u5316\u52b9\u7387\u3068\u30a8\u30c3\u30b8\u306e\u5747\u4e00\u6027\u3092\u4e21\u7acb<\/li>\r\n<li>\u5927\u91cf\u751f\u7523\u3067\u6700\u3082\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u69cb\u6210<\/li>\r\n<li>\u30b5\u30d6\u30d1\u30c3\u30c9\u306e\u7d20\u6750\uff08PE\u30d5\u30a9\u30fc\u30e0\u3001Suba\uff09\u306f\u5727\u7e2e\u6027\u3092\u8003\u616e\u3057\u3066\u9078\u629e\u3002<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jeez-card\">\r\n<h4>\u56fa\u5b9a\u7814\u78e8\u30d1\u30c3\u30c9\uff08FAP\uff09<\/h4>\r\n<ul>\r\n<li>\u30d1\u30c3\u30c9\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u306b\u57cb\u3081\u8fbc\u307e\u308c\u305f\u7814\u78e8\u7c92\u5b50 - \u5225\u500b\u306e\u30b9\u30e9\u30ea\u30fc\u306f\u4e0d\u8981<\/li>\r\n<li>STI\u5f8c\u304a\u3088\u3073\u5149\u5b66\u30b0\u30ec\u30fc\u30c9\u306e\u7422\u78e8\u306b\u304a\u3051\u308b\u5353\u8d8a\u3057\u305f\u5747\u4e00\u6027<\/li>\r\n<li>\u30b5\u30d5\u30a1\u30a4\u30a2\u3001SiC\u3001\u7279\u5b9a\u306e\u30ac\u30e9\u30b9\u57fa\u677f\u7528\u9014\u306b\u4f7f\u7528<\/li>\r\n<li>\u6d88\u8017\u54c1\u30b3\u30b9\u30c8\u304c\u9ad8\u3044\u3002<\/li>\r\n<li>\u9ad8\u5ea6\u306a\u30a6\u30a7\u30fc\u30cf\u63a5\u5408\u6e96\u5099\u3078\u306e\u95a2\u5fc3\u304c\u9ad8\u307e\u3063\u3066\u3044\u308b<\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<h3 id=\"pad-properties\">5b.\u6027\u80fd\u306b\u5f71\u97ff\u3059\u308b\u30ad\u30fc\u30d1\u30c3\u30c9\u306e\u7279\u6027<\/h3>\r\n<p>\u3053\u308c\u3089\u306e\u7269\u7406\u7684\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u3067\u3001\u30a8\u30f3\u30b8\u30cb\u30a2\u306f\u5341\u5206\u306a\u60c5\u5831\u3092\u5f97\u305f\u4e0a\u3067\u30d1\u30c3\u30c9\u306e\u9078\u5b9a\u3092\u6c7a\u5b9a\u3057\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u554f\u984c\u3092\u3088\u308a\u52b9\u679c\u7684\u306b\u30c8\u30e9\u30d6\u30eb\u30b7\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\uff1a<\/p>\r\n<div class=\"jeez-table-wrap\">\r\n<table class=\"jeez-table\">\r\n<thead>\r\n<tr>\r\n<th>\u30d7\u30ed\u30d1\u30c6\u30a3<\/th>\r\n<th>\u5178\u578b\u7684\u306a\u7bc4\u56f2<\/th>\r\n<th>\u30d7\u30ed\u30bb\u30b9\u3078\u306e\u5f71\u97ff<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td><strong>\u786c\u5ea6\uff08\u30b7\u30e7\u30a2D\uff09<\/strong><\/td>\r\n<td>40-65\uff08\u30cf\u30fc\u30c9\uff09\u300115-30\uff08\u30bd\u30d5\u30c8\uff09<\/td>\r\n<td>\u786c\u5ea6\u304c\u9ad8\u3044\u2192\u5e73\u5766\u5316\u304c\u9032\u3080\u3001\u786c\u5ea6\u304c\u4f4e\u3044\u2192\u6b20\u9665\u304c\u5c11\u306a\u3044<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u6c17\u5b54\u7387\uff08%\uff09<\/strong><\/td>\r\n<td>20-60%<\/td>\r\n<td>\u591a\u5b54\u8cea \u2192 \u30b9\u30e9\u30ea\u30fc\u4fdd\u6301\u6027\u304c\u5411\u4e0a\u3002<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u5b54\u5f84\uff08\u03bcm\uff09<\/strong><\/td>\r\n<td>20-80 \u03bcm<\/td>\r\n<td>\u30b9\u30e9\u30ea\u30fc\u8f38\u9001\u91cf\u3068\u30d1\u30c3\u30c9\u3068\u30a6\u30a7\u30cf\u30fc\u306e\u5b9f\u8cea\u63a5\u89e6\u9762\u7a4d\u306b\u5f71\u97ff<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u6e9d\u30d1\u30bf\u30fc\u30f3<\/strong><\/td>\r\n<td>\u30b3\u30f3\u30bb\u30f3\u30c8\u30ea\u30c3\u30af\u3001X-Y\u3001\u30e9\u30b8\u30a2\u30eb\u3001\u7a74\u3042\u304d<\/td>\r\n<td>\u30de\u30af\u30ed\u30b9\u30e9\u30ea\u30fc\u5206\u5e03\u3092\u5236\u5fa1\uff1b\u30a6\u30a7\u30fc\u30cf\u30a8\u30c3\u30b8\u306eWIWNU\u306b\u5f71\u97ff<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u5727\u7e2e\u6027<\/strong><\/td>\r\n<td>0.5-5%<\/td>\r\n<td>\u3088\u308a\u9ad8\u3044\u5727\u7e2e\u6027\u2192\u53cd\u308a\u30a6\u30a7\u30cf\u30fc\u306e\u5747\u4e00\u6027\u5411\u4e0a<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u8caf\u8535\u5f3e\u6027\u7387 (E\u2019)<\/strong><\/td>\r\n<td>\u5468\u6ce2\u6570\u4f9d\u5b58<\/td>\r\n<td>\u7c98\u5f3e\u6027\u5fdc\u7b54\u304c\u9ad8\u901f\u30d7\u30e9\u30c6\u30f3\u901f\u5ea6\u3067\u306e\u30d1\u30c3\u30c9\u6319\u52d5\u3092\u6c7a\u5b9a\u3059\u308b<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u8868\u9762\u306e\u51f9\u51f8\u306e\u9ad8\u3055<\/strong><\/td>\r\n<td>20-80 \u03bcm\uff08\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6e08\u307f\uff09<\/td>\r\n<td>\u30a6\u30a7\u30fc\u30cf\u3068\u306e\u63a5\u89e6\u9762\u7a4d\uff1b\u30a2\u30b9\u30da\u30ea\u30c6\u30a3\u306e\u4f4e\u4e0b\uff1d\u30b0\u30ec\u30fc\u30b8\u30f3\u30b0\uff1dMRR\u306e\u4f4e\u4e0b<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<h3 id=\"pad-conditioning\">5c.\u30d1\u30c3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3068\u5bff\u547d\u7ba1\u7406<\/h3>\r\n<p>CMP\u30d1\u30c3\u30c9\u306f\u7422\u78e8\u4e2d\u3001\u4e00\u5b9a\u306e\u8868\u9762\u72b6\u614b\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u7814\u78e8\u30d7\u30ed\u30bb\u30b9\u306e\u6a5f\u68b0\u7684\u30fb\u5316\u5b66\u7684\u74b0\u5883\u306f\u3001\u30d1\u30c3\u30c9\u8868\u9762\u306e\u51f9\u51f8\u3092\u5f90\u3005\u306b\u5e73\u6ed1\u5316\u3057\u307e\u3059\u3002 <em>\u30d1\u30c3\u30c9\u30b0\u30ec\u30fc\u30b8\u30f3\u30b0<\/em> - \u3053\u306e\u305f\u3081\u3001\u30d1\u30c3\u30c9\u3068\u30a6\u30a7\u30fc\u30cf\u9593\u306e\u6709\u52b9\u63a5\u89e6\u9762\u7a4d\u304c\u6e1b\u5c11\u3057\u3001MRR\u304c\u4f4e\u4e0b\u3059\u308b\u3002. <strong>\u30d1\u30c3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0<\/strong> \u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u3092\u57cb\u3081\u8fbc\u3093\u3060\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30c7\u30a3\u30b9\u30af\u3092\u4f7f\u7528\u3057\u3001\u65b0\u9bae\u306a\u30df\u30af\u30ed\u306e\u30c6\u30af\u30b9\u30c1\u30e3\u30fc\u3092\u7814\u78e8\u3059\u308b\u3053\u3068\u3067\u3001\u30d1\u30c3\u30c9\u8868\u9762\u3092\u4fee\u5fa9\u3057\u307e\u3059\u3002.<\/p>\r\n<p>\u672c\u756a\u3067\u306f2\u3064\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30e2\u30fc\u30c9\u304c\u4f7f\u7528\u3055\u308c\u308b\uff1a<\/p>\r\n<ul>\r\n<li><strong>\u30a4\u30f3\u30b5\u30a4\u30c1\u30e5\uff08\u540c\u6642\uff09\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\uff1a<\/strong> \u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306f\u30a6\u30a7\u30fc\u30cf\u7814\u78e8\u3068\u540c\u6642\u306b\u4f5c\u52d5\u3057\u307e\u3059\u3002\u5b89\u5b9a\u3057\u305fMRR\u3092\u7dad\u6301\u3057\u307e\u3059\u304c\u3001\u30d1\u30c3\u30c9\u6469\u8017\u7387\u3068\u6240\u6709\u30b3\u30b9\u30c8\u306f\u5897\u52a0\u3057\u307e\u3059\u3002.<\/li>\r\n<li><strong>\u73fe\u5834\u3067\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\uff1a<\/strong> \u30d1\u30c3\u30c9\u306f\u30a6\u30a7\u30fc\u30cf\u30e9\u30f3\u3068\u30a6\u30a7\u30fc\u30cf\u30e9\u30f3\u306e\u9593\u306b\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3055\u308c\u308b\u3002\u30d1\u30c3\u30c9\u306e\u78e8\u8017\u306f\u5c11\u306a\u3044\u304c\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u9593\u9694\u304c\u9577\u3059\u304e\u308b\u3068\u3001MRR\u304c\u30e9\u30f3\u5185\u3067\u30c9\u30ea\u30d5\u30c8\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/li>\r\n<\/ul>\r\n<p>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u8a2d\u8a08\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7825\u7c92\u306e\u30b5\u30a4\u30ba\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3001\u6383\u5f15\u30d1\u30bf\u30fc\u30f3\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6642\u9593\u306f\u3059\u3079\u3066\u3001\u30d1\u30c3\u30c9\u3068\u30b9\u30e9\u30ea\u30fc\u3068\u76f8\u4e92\u4f5c\u7528\u3057\u3066\u3001\u5b9a\u5e38\u72b6\u614b\u306eMRR\u3068\u30d1\u30c3\u30c9\u5bff\u547d\u3092\u6c7a\u5b9a\u3057\u307e\u3059\u3002\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u9078\u629e\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316\u306b\u95a2\u3059\u308b\u6280\u8853\u7684\u306a\u8a73\u7d30\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u306e\u30ac\u30a4\u30c9\u3092\u53c2\u7167\u3057\u3066\u304f\u3060\u3055\u3044\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Pad-Conditioners-Conditioning-Process\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u30d1\u30c3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u3068\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30d7\u30ed\u30bb\u30b9<\/a>.<\/p>\r\n<div class=\"jeez-fact\"><strong>\u30b3\u30b9\u30c8\u306b\u95a2\u3059\u308b\u6d1e\u5bdf\uff1a<\/strong> \u7814\u78e8\u30d1\u30c3\u30c9\u306f\u901a\u5e38\u3001\u91cf\u7523\u5de5\u5834\u306b\u304a\u3051\u308bCMP\u6d88\u8017\u54c1\u30b3\u30b9\u30c8\u306e25\uff5e35%\u3092\u5360\u3081\u308b\u3002\u6700\u9069\u5316\u3055\u308c\u305f\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30d7\u30ed\u30b0\u30e9\u30e0\u3084\u3088\u308a\u9ad8\u54c1\u8cea\u306a\u30d1\u30c3\u30c9\u6750\u6599\u306b\u3088\u308a\u3001\u30d1\u30c3\u30c9\u306e\u5bff\u547d\u304c10%\u5ef6\u3073\u308c\u3070\u3001CMP\u30c4\u30fc\u30eb\u30af\u30e9\u30b9\u30bf\u5f53\u305f\u308a\u306e\u5e74\u9593\u6d88\u8017\u54c1\u30b3\u30b9\u30c8\u3092\u6570\u5341\u4e07\u30c9\u30eb\u524a\u6e1b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/div>\r\n<\/section>\r\n<hr class=\"jeez-divider\" \/><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       SECTION 6 \u2014 ADVANCED NODES\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<section id=\"advanced-nodes\">\r\n<h2>6.\u5148\u7aef\u30ce\u30fc\u30c9\u7528CMP\u6750\u6599\uff0814nm\u4ee5\u4e0b\uff09<\/h2>\r\n<p>\u30d7\u30ec\u30fc\u30ca\u578b\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u304b\u3089FinFET\u3001\u305d\u3057\u3066\u73fe\u5728\u306eGAA\uff08Gate-All-Around\uff09\u30ca\u30ce\u30b7\u30fc\u30c8\u30fb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u3078\u306e\u79fb\u884c\u306f\u3001CMP\u6d88\u8017\u54c1\u306b\u8ab2\u3055\u308c\u308b\u8981\u6c42\u3092\u6839\u672c\u7684\u306b\u5909\u3048\u307e\u3057\u305f\u3002\u30c7\u30d0\u30a4\u30b9\u306e\u5f62\u72b6\u304c10nm\u4ee5\u4e0b\u306b\u7e2e\u5c0f\u3057\u30013D\u7a4d\u5c64\uff083D NAND\u3001HBM\u30013D-IC\uff09\u304c\u4e3b\u6d41\u306b\u306a\u308b\u306b\u3064\u308c\u3001CMP\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u3088\u308a\u53b3\u3057\u3044\u9664\u53bb\u30d0\u30b8\u30a7\u30c3\u30c8\u3001\u3088\u308a\u4f4e\u3044\u6b20\u9665\u5bc6\u5ea6\u3001\u304a\u3088\u3073\u62e1\u5927\u3059\u308b\u30a8\u30ad\u30be\u30c1\u30c3\u30af\u6750\u6599\u306e\u30e1\u30cb\u30e5\u30fc\u3068\u306e\u4e92\u63db\u6027\u3067\u52d5\u4f5c\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\r\n<p>\u306b\u95a2\u3059\u308b\u5f0a\u793e\u306e\u5b8c\u5168\u306a\u30c6\u30af\u30cb\u30ab\u30eb\u30fb\u30ea\u30bd\u30fc\u30b9 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Materials-for-Advanced-Nodes-(Below-14nm)\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u5148\u7aef\u30ce\u30fc\u30c9\uff0814nm\u4ee5\u4e0b\uff09\u7528CMP\u6750\u6599<\/a> \u306f\u3053\u308c\u3089\u306e\u8ab2\u984c\u3092\u8a73\u3057\u304f\u53d6\u308a\u4e0a\u3052\u3066\u3044\u308b\u3002\u4e3b\u306a\u30c6\u30fc\u30de\u3092\u3053\u3053\u306b\u8981\u7d04\u3059\u308b\uff1a<\/p>\r\n<h3>\u65b0\u3057\u3044CMP\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u3092\u5fc5\u8981\u3068\u3059\u308b\u65b0\u3057\u3044\u91d1\u5c5e\u8584\u819c<\/h3>\r\n<p>\u5148\u9032\u30ed\u30b8\u30c3\u30af\u30fb\u30ce\u30fc\u30c9\u3067\u306f\u3001\u5f93\u6765\u306eCu\/W\/Ti\/Ta\u7cfb\u3092\u8d85\u3048\u308b\u91d1\u5c5e\u304c\u5c0e\u5165\u3055\u308c\u3064\u3064\u3042\u308b\u3002\u5404\u65b0\u6750\u6599\u306f\u3001\u76ee\u7684\u306b\u5fdc\u3058\u3066\u8a2d\u8a08\u3055\u308c\u305f\u30b9\u30e9\u30ea\u30fc\u5316\u5b66\u3092\u5fc5\u8981\u3068\u3059\u308b\uff1a<\/p>\r\n<ul>\r\n<li><strong>\u30b3\u30d0\u30eb\u30c8\uff08Co\uff09\uff1a<\/strong> Co\/TiN\u754c\u9762\u3067\u306e\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u8150\u98df\u3092\u8a98\u767a\u3059\u308b\u3053\u3068\u306a\u304f\u3001Co\u9664\u53bb\u3068\u4e0b\u5c64\u306e\u8a98\u96fb\u4f53\u6d78\u98df\u306e\u30d0\u30e9\u30f3\u30b9\u304c\u3068\u308c\u305f\u30b9\u30e9\u30ea\u30fc\u304c\u5fc5\u8981\u3002.<\/li>\r\n<li><strong>\u30eb\u30c6\u30cb\u30a6\u30e0\uff08Ru\uff09\uff1a<\/strong> \u5c0f\u3055\u3044\u5bf8\u6cd5\u3067\u3088\u308a\u4f4e\u3044\u62b5\u6297\u7387\u306e\u305f\u3081\u30015 nm\u4ee5\u4e0b\u306e\u30b3\u30f3\u30bf\u30af\u30c8\u3084\u30ed\u30fc\u30ab\u30eb\u76f8\u4e92\u63a5\u7d9a\u3067W\u306b\u53d6\u3063\u3066\u4ee3\u308f\u308b\u6709\u529b\u5019\u88dc\u3067\u3042\u308b\u3002.<\/li>\r\n<li><strong>\u30e2\u30ea\u30d6\u30c7\u30f3\uff08Mo\uff09\uff1a<\/strong> GAA\u30c7\u30d0\u30a4\u30b9\u306e\u4ee3\u66ff\u30e9\u30a4\u30ca\u30fc\u30e1\u30bf\u30eb\u304a\u3088\u3073\u30b2\u30fc\u30c8\u5145\u586b\u6750\u3068\u3057\u3066\u6ce8\u76ee\u3055\u308c\u3066\u3044\u308b\u3002.<\/li>\r\n<li><strong>\u9ad8\u8a98\u96fb\u4f53\uff08HfO\u2082\u3001ZrO\u2082\u3001La\u2082O\u2083\uff09\uff1a<\/strong> \u9ad8\u8a98\u96fb\u7387\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u306eCMP\u3067\u306f\u3001\u8a98\u96fb\u4f53\u8584\u819c\u5316\u3092\u907f\u3051\u308b\u305f\u3081\u3001\u975e\u5e38\u306b\u4f4e\u901f\u3067\u5236\u5fa1\u53ef\u80fd\u306a\u9664\u53bb\u901f\u5ea6\u304c\u8981\u6c42\u3055\u308c\u307e\u3059\u3002.<\/li>\r\n<\/ul>\r\n<h3>3D-IC\u3068\u30a6\u30a7\u30fc\u30cf\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u306e\u5e73\u5766\u5316<\/h3>\r\n<p>\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\uff082\u679a\u306e\u30a6\u30a7\u30fc\u30cf\u3092\u8a98\u96fb\u4f53\u5bfe\u8a98\u96fb\u4f53\u3001\u91d1\u5c5e\u5bfe\u91d1\u5c5e\u306e\u76f4\u63a5\u63a5\u89e6\u3067\u63a5\u5408\u3059\u308b\uff09\u306f\u3001CMP\u5f8c\u306e\u8868\u9762\u7c97\u3055\u304c0.3nm Ra\u4ee5\u4e0b\u3067\u3042\u308a\u3001\u8868\u9762\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u6c5a\u67d3\u304c\u307b\u307c\u30bc\u30ed\u3067\u3042\u308b\u3053\u3068\u304c\u8981\u6c42\u3055\u308c\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u8981\u4ef6\u306f\u3001\u5f93\u6765\u306eCMP\u306e\u8981\u4ef6\u3092\u306f\u308b\u304b\u306b\u8d85\u3048\u308b\u3082\u306e\u3067\u3042\u308a\u3001\u6b21\u306e\u3053\u3068\u304c\u8981\u6c42\u3055\u308c\u307e\u3059\uff1a<\/p>\r\n<ul>\r\n<li>\u7c92\u5ea6\u5206\u5e03\u306e\u72ed\u3044\u8d85\u5e0c\u8584\u30fb\u8d85\u9ad8\u7d14\u5ea6\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u30b9\u30e9\u30ea\u30fc<\/li>\r\n<li>\u9069\u5408\u6027\u304c\u9ad8\u304f\u3001\u6b20\u9665\u306e\u767a\u751f\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u305f\u30bd\u30d5\u30c8\u306a\u7422\u78e8\u30d1\u30c3\u30c9<\/li>\r\n<li>SC1\/SC2\u307e\u305f\u306f\u5e0c\u8584HF\u30b7\u30fc\u30b1\u30f3\u30b9\u3092\u4f7f\u7528\u3057\u305fCMP\u5f8c\u30af\u30ea\u30fc\u30f3\u30d7\u30ed\u30bb\u30b9\u306e\u62e1\u5f35<\/li>\r\n<\/ul>\r\n<h3>CMP\u6b69\u6570\u63a8\u79fb<\/h3>\r\n<p>\u6700\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u30fb\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u6700\u7d42\u30e1\u30bf\u30e9\u30a4\u30bc\u30fc\u30b7\u30e7\u30f3\u306b\u5230\u9054\u3059\u308b\u307e\u3067\u306b\u3001\u30a6\u30a7\u30fc\u30cf1\u679a\u5f53\u305f\u308a30\u304b\u308960\u4ee5\u4e0a\u306eCMP\u5de5\u7a0b\u3092\u7d4c\u308b\u3053\u3068\u306b\u306a\u308b\u3002\u3053\u306e\u5287\u7684\u306a\u5897\u52a0\uff08180nm\u30d7\u30ed\u30bb\u30b9\u3067\u306f10\u30b9\u30c6\u30c3\u30d7\u672a\u6e80\uff09\u306f\u3001\u30b9\u30c6\u30c3\u30d7\u3054\u3068\u306e\u6b20\u9665\u5bc6\u5ea6\u3001\u5747\u4e00\u6027\u3001\u6d88\u8017\u54c1\u306e\u4e00\u8cab\u6027\u306e\u308f\u305a\u304b\u306a\u6539\u5584\u304c\u3001\u5168\u4f53\u7684\u306a\u6b69\u7559\u307e\u308a\u3068\u30b3\u30b9\u30c8\u306b\u8907\u5408\u7684\u306a\u5f71\u97ff\u3092\u53ca\u307c\u3059\u3053\u3068\u3092\u610f\u5473\u3057\u307e\u3059\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jeez-divider\" \/><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       SECTION 7 \u2014 CMP DEFECTS\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<section id=\"defects\">\r\n<h2>7.\u4e00\u822c\u7684\u306aCMP\u306e\u6b20\u9665\u3068\u305d\u306e\u9632\u6b62\u65b9\u6cd5<\/h2>\r\n<p>CMP\u95a2\u9023\u306e\u6b20\u9665\u306f\u3001\u534a\u5c0e\u4f53\u5de5\u5834\u3067\u767a\u751f\u3059\u308b\u6b69\u7559\u307e\u308a\u306b\u5f71\u97ff\u3059\u308b\u4e8b\u8c61\u306e\u304b\u306a\u308a\u306e\u90e8\u5206\u3092\u5360\u3081\u3066\u3044\u308b\u3002\u5404\u6b20\u9665\u306e\u6839\u672c\u539f\u56e0\u3092\u7406\u89e3\u3057\u3001\u305d\u308c\u3092\u4f4e\u6e1b\u3059\u308b\u305f\u3081\u306e\u624b\u6bb5\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u306f\u3001\u3042\u3089\u3086\u308b\u30ce\u30fc\u30c9\u306e\u30d7\u30ed\u30bb\u30b9\u30a8\u30f3\u30b8\u30cb\u30a2\u306b\u3068\u3063\u3066\u4e0d\u53ef\u6b20\u3067\u3059\u3002\u5f53\u793e\u306e\u5305\u62ec\u7684\u306a <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Process-Defects-Causes-Types-Solutions\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u30d7\u30ed\u30bb\u30b9\u306e\u6b20\u9665\uff1a\u539f\u56e0\u3001\u7a2e\u985e\u3001\u89e3\u6c7a\u7b56<\/a> \u306f\u5b8c\u5168\u306a\u5de5\u5b66\u7684\u6cbb\u7642\u3092\u63d0\u4f9b\u3059\u308b\u3002.<\/p>\r\n<div class=\"jeez-table-wrap\">\r\n<table class=\"jeez-table\">\r\n<thead>\r\n<tr>\r\n<th>\u6b20\u9665\u306e\u7a2e\u985e<\/th>\r\n<th>\u4e3b\u306a\u539f\u56e0<\/th>\r\n<th>\u5f71\u97ff\u3092\u53d7\u3051\u308b\u30d7\u30ed\u30bb\u30b9<\/th>\r\n<th>\u4e88\u9632\u6226\u7565<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td><strong>\u50b7<\/strong><\/td>\r\n<td>\u904e\u5927\u7c92\u5b50\u3001\u51dd\u96c6\u3057\u305f\u7814\u78e8\u6750\u3001\u30d1\u30c3\u30c9\u5c51<\/td>\r\n<td>\u3059\u3079\u3066\u306eCMP\u30b9\u30c6\u30c3\u30d7<\/td>\r\n<td>\u30b9\u30e9\u30ea\u30fc\u308d\u904e\u3001\u7c92\u5ea6\u8abf\u6574\u3001\u30d1\u30c3\u30c9\u691c\u67fb<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0<\/strong><\/td>\r\n<td>\u5e83\u3044\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u5185\u306e\u91d1\u5c5e\u306e\u904e\u5270\u7814\u78e8<\/td>\r\n<td>Cu\u3001W\u3001Co CMP<\/td>\r\n<td>\u7d42\u70b9\u5236\u5fa1\u3001\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u6027\u306e\u6700\u9069\u5316<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u6d78\u98df<\/strong><\/td>\r\n<td>\u9ad8\u5bc6\u5ea6\u30d1\u30bf\u30fc\u30f3\u90e8\u3067\u306e\u8a98\u96fb\u4f53\u306e\u8584\u5316<\/td>\r\n<td>\u9285CMP \u30b9\u30c6\u30c3\u30d72\u3001\u9178\u5316\u7269CMP<\/td>\r\n<td>\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u6027\u306e\u8abf\u6574\u3001\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u306e\u6b63\u898f\u5316<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u8150\u98df \/ \u5b54\u98df<\/strong><\/td>\r\n<td>\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u8150\u98df\u3001\u30a2\u30b0\u30ec\u30c3\u30b7\u30d6\u30b9\u30e9\u30ea\u30fcpH<\/td>\r\n<td>\u9285CMP\u3001\u9285CMP<\/td>\r\n<td>BTA\u307e\u305f\u306f\u30a2\u30be\u30fc\u30eb\u963b\u5bb3\u5264\u3001pH\u306e\u6700\u9069\u5316<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30c7\u30e9\u30df\u30cd\u30fc\u30b7\u30e7\u30f3<\/strong><\/td>\r\n<td>\u4f4e\u8a98\u96fb\u7387\u819c\u306e\u904e\u5270\u306a\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9<\/td>\r\n<td>\u8d85\u4f4ek CMP<\/td>\r\n<td>\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u306e\u4f4e\u6e1b\u3001\u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\u3001\u5f3e\u6027\u7387\u306e\u30de\u30c3\u30c1\u30f3\u30b0<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u6b8b\u7559\u7c92\u5b50<\/strong><\/td>\r\n<td>CMP\u5f8c\u306e\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u304c\u4e0d\u5b8c\u5168<\/td>\r\n<td>\u3059\u3079\u3066\u306eCMP\u30b9\u30c6\u30c3\u30d7<\/td>\r\n<td>\u30d6\u30e9\u30b7\u3068\u30b9\u30af\u30e9\u30d6\u306e\u76f8\u6027\u3001\u30e1\u30ac\u30bd\u30cb\u30c3\u30af\u5468\u6ce2\u6570\u306e\u6700\u9069\u5316<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u91d1\u5c5e\u6c5a\u67d3<\/strong><\/td>\r\n<td>\u30b9\u30e9\u30ea\u30fc\u307e\u305f\u306f\u30d1\u30c3\u30c9\u304b\u3089\u306e\u91d1\u5c5e\u30a4\u30aa\u30f3\u6d78\u51fa<\/td>\r\n<td>FEOL\u3001\u30b2\u30fc\u30c8CMP<\/td>\r\n<td>\u8d85\u9ad8\u7d14\u5ea6\u6750\u6599\u3001\u30dd\u30b9\u30c8CMP SC1\/DHF\u30af\u30ea\u30fc\u30f3<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<p>\u3053\u308c\u3089\u306e\u6b20\u9665\u306e\u591a\u304f\u306f\u76f8\u4e92\u306b\u95a2\u9023\u3057\u3066\u3044\u308b\u3002\u4f8b\u3048\u3070\u3001\u9285\u306e\u9664\u53bb\u7387\u3092\u5411\u4e0a\u3055\u305b\u308b\u305f\u3081\u306b\u30b9\u30e9\u30ea\u30fc\u9178\u5316\u5264\u6fc3\u5ea6\u3092\u4e0a\u3052\u308b\u3068\u3001\u8150\u98df\u5b54\u98df\u306e\u30ea\u30b9\u30af\u3082\u5897\u52a0\u3059\u308b\u3002\u3057\u305f\u304c\u3063\u3066\u3001\u52b9\u679c\u7684\u306a\u6b20\u9665\u7ba1\u7406\u306b\u306f\u3001\u30b9\u30e9\u30ea\u30fc-\u30d1\u30c3\u30c9-\u30d7\u30ed\u30bb\u30b9\u30fb\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc\u306e\u76f8\u4e92\u4f5c\u7528\u7a7a\u9593\u306b\u5bfe\u3059\u308b\u30b7\u30b9\u30c6\u30e0\u30fb\u30ec\u30d9\u30eb\u306e\u30a2\u30d7\u30ed\u30fc\u30c1\u304c\u5fc5\u8981\u3067\u3042\u308b\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jeez-divider\" \/><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       SECTION 8 \u2014 SUPPLIERS\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<section id=\"suppliers\">\r\n<h2>8.CMP\u6750\u6599\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306e\u8a55\u4fa1<\/h2>\r\n<p>CMP\u6750\u6599\u306e\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306f\u30c8\u30c3\u30d7\u30af\u30e9\u30b9\u306b\u96c6\u4e2d\u3057\u3066\u304a\u308a\u3001\u4e00\u63e1\u308a\u306e\u30b0\u30ed\u30fc\u30d0\u30eb\u30e1\u30fc\u30ab\u30fc\u304c\u6700\u5148\u7aef\u306e\u30d5\u30a1\u30d6\u306b\u5927\u534a\u306e\u91cf\u3092\u4f9b\u7d66\u3057\u3066\u3044\u308b\u3002\u3057\u304b\u3057\u3001\u7af6\u4e89\u74b0\u5883\u306f\u904e\u53bb10\u5e74\u9593\u3067\u5927\u304d\u304f\u62e1\u5927\u3057\u3001\u6709\u80fd\u306a\u5730\u57df\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3084\u6280\u8853\u306b\u7279\u5316\u3057\u305f\u6311\u6226\u8005\u304c\u3001\u591a\u304f\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30ab\u30c6\u30b4\u30ea\u30fc\u306b\u5f37\u529b\u306a\u9078\u629e\u80a2\u3092\u63d0\u4f9b\u3057\u3066\u3044\u308b\u3002.<\/p>\r\n<p>\u3053\u306e\u8a18\u4e8b\u3067\u306e\u5206\u6790 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/Top-CMP-Materials-Suppliers-2025-Comparison\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u30c8\u30c3\u30d7CMP\u6750\u6599\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\uff1a2026\u5e74\u6bd4\u8f03<\/a> \u306f\u3001\u30b9\u30e9\u30ea\u30fc\u3001\u30d1\u30c3\u30c9\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u5404\u5206\u91ce\u306b\u304a\u3051\u308b\u4e3b\u8981\u30d7\u30ec\u30fc\u30e4\u30fc\u3092\u7d39\u4ecb\u3057\u3066\u3044\u308b\u3002CMP\u6750\u6599\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3092\u8a55\u4fa1\u3059\u308b\u969b\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u57fa\u6e96\u3092\u4f53\u7cfb\u7684\u306b\u9069\u7528\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\uff1a<\/p>\r\n<h3>\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u8a55\u4fa1\u306e\u67a0\u7d44\u307f<\/h3>\r\n<div class=\"jeez-grid-2\">\r\n<div class=\"jeez-card\">\r\n<h4>\u6280\u8853\u529b<\/h4>\r\n<ul>\r\n<li>\u7279\u5b9a\u306e\u30d7\u30ed\u30bb\u30b9\u30fb\u30ce\u30fc\u30c9\u304a\u3088\u3073\u6750\u6599\u306b\u308f\u305f\u308b\u88fd\u54c1\u30ab\u30d0\u30ec\u30c3\u30b8<\/li>\r\n<li>\u793e\u5185R&amp;D\u304a\u3088\u3073\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30fb\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30ea\u30bd\u30fc\u30b9<\/li>\r\n<li>\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u56fa\u6709\u306e\u8cc7\u683c\u30c7\u30fc\u30bf\u306e\u5165\u624b\u53ef\u80fd\u6027<\/li>\r\n<li>\u6700\u5148\u7aef\u30ce\u30fc\u30c9\uff087nm\u672a\u6e80\uff09\u3067\u306e\u5b9f\u7e3e<\/li>\r\n<li>\u30ab\u30b9\u30bf\u30e0\u51e6\u65b9\u306e\u958b\u767a\u80fd\u529b<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jeez-card\">\r\n<h4>\u54c1\u8cea\u3068\u4e00\u8cab\u6027<\/h4>\r\n<ul>\r\n<li>\u30ed\u30c3\u30c8\u9593\u306e\u7c92\u5ea6\u5206\u5e03\u306e\u3070\u3089\u3064\u304d\uff08CV &lt;5%\u304c\u671b\u307e\u3057\u3044\uff09<\/li>\r\n<li>\u91cd\u8981\u91d1\u5c5e\u4e0d\u7d14\u7269\u306e\u8a8d\u8a3c\u7d14\u5ea6\u30ec\u30d9\u30eb\uff08&lt;ppb\uff09<\/li>\r\n<li>ISO 9001 \/ IATF\u8a8d\u8a3c\u3001SEMI S2 \/ S8\u6e96\u62e0<\/li>\r\n<li>\u900f\u660e\u306aCOA\uff08\u5206\u6790\u8a3c\u660e\u66f8\uff09\u306e\u767a\u884c<\/li>\r\n<li>\u51fa\u8377\u6761\u4ef6\u4e0b\u3067\u306e\u4fdd\u5b58\u671f\u9593\u304a\u3088\u3073\u5b89\u5b9a\u6027\u30c7\u30fc\u30bf<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jeez-card\">\r\n<h4>\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306e\u4fe1\u983c\u6027<\/h4>\r\n<ul>\r\n<li>\u5de5\u5834\u6240\u5728\u5730\u306b\u95a2\u9023\u3057\u305f\u5730\u7406\u7684\u88fd\u9020\u30d5\u30c3\u30c8\u30d7\u30ea\u30f3\u30c8<\/li>\r\n<li>\u5b89\u5168\u5728\u5eab\u3068\u30ea\u30fc\u30c9\u30bf\u30a4\u30e0\u30fb\u30b3\u30df\u30c3\u30c8\u30e1\u30f3\u30c8<\/li>\r\n<li>\u30b7\u30f3\u30b0\u30eb\u30fb\u30bd\u30fc\u30b9\u3068\u30c7\u30e5\u30a2\u30eb\u30fb\u30bd\u30fc\u30b9\u306e\u539f\u6750\u6599\u6226\u7565<\/li>\r\n<li>\u4e8b\u696d\u7d99\u7d9a\u3068\u707d\u5bb3\u5fa9\u65e7\u8a08\u753b<\/li>\r\n<li>\u8f38\u51fa\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9\u3068\u898f\u5236\u72b6\u6cc1<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jeez-card\">\r\n<h4>\u7dcf\u6240\u6709\u30b3\u30b9\u30c8<\/h4>\r\n<ul>\r\n<li>\u5358\u4fa1\u5bfe\u30a6\u30a7\u30fc\u30cf\u30d1\u30b9\u3042\u305f\u308a\u306e\u5b9f\u52b9\u30b3\u30b9\u30c8<\/li>\r\n<li>\u30a6\u30a7\u30fc\u30cf1\u679a\u5f53\u305f\u308a\u306e\u6d88\u8017\u54c1\u5bff\u547d\u3068\u30d1\u30c3\u30c9\uff0f\u30b9\u30e9\u30ea\u30fc\u6d88\u8cbb\u91cf<\/li>\r\n<li>\u30c4\u30fc\u30eb\u8a8d\u5b9a\u8cbb\u7528\u3068\u30b9\u30b1\u30b8\u30e5\u30fc\u30eb<\/li>\r\n<li>\u6280\u8853\u30b5\u30dd\u30fc\u30c8\u304a\u3088\u3073\u30d5\u30a3\u30fc\u30eb\u30c9\u30fb\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30fb\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u8cbb\u7528<\/li>\r\n<li>\u5ec3\u68c4\u7269\u51e6\u7406\u304a\u3088\u3073\u74b0\u5883\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9\u8cbb\u7528<\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<p><strong>JEEZ<\/strong> \u306f\u3001\u30a2\u30b8\u30a2\u5168\u57df\u3067\u88fd\u9020\u304a\u3088\u3073\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u80fd\u529b\u3092\u7dad\u6301\u3057\u3001\u5317\u7c73\u3001\u6b27\u5dde\u3001\u6771\u5357\u30a2\u30b8\u30a2\u306e\u5de5\u5834\u306b\u30b5\u30fc\u30d3\u30b9\u3092\u63d0\u4f9b\u3059\u308b\u30b0\u30ed\u30fc\u30d0\u30eb\u30ed\u30b8\u30b9\u30c6\u30a3\u30af\u30b9\u3092\u5099\u3048\u3066\u3044\u307e\u3059\u3002\u5f53\u793e\u306e\u30b9\u30e9\u30ea\u30fc\u304a\u3088\u3073\u7814\u78e8\u30d1\u30c3\u30c9\u306f\u3001\u30a2\u30d7\u30e9\u30a4\u30c9 \u30de\u30c6\u30ea\u30a2\u30eb\u30ba\u306eMirra \/ Reflexion\u3001\u834f\u539f\u88fd\u4f5c\u6240\u306eFREX\u3001KCTECH\u306eKU\u30b7\u30ea\u30fc\u30ba\u306a\u3069\u3001\u4e3b\u8981\u306aCMP\u88c5\u7f6e\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u306b\u5bfe\u5fdc\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jeez-divider\" \/><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       SECTION 9 \u2014 MARKET OUTLOOK\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<section id=\"market\">\r\n<h2>9.CMP\u6750\u6599\u5e02\u5834\u306e\u5c55\u671b 2026-2030<\/h2>\r\n<p>\u4e16\u754c\u306eCMP\u6d88\u8017\u54c1\u5e02\u5834\u306f\u3001AI\u30a2\u30af\u30bb\u30e9\u30ec\u30fc\u30bf\u30c1\u30c3\u30d7\u306e\u9700\u8981\u3001HBM\u30e1\u30e2\u30ea\u306e\u62e1\u5927\u3001\u6700\u5148\u7aef\u30d5\u30a1\u30d6\u3067\u306e\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u30ce\u30fc\u30c9\u306e\u7acb\u3061\u4e0a\u304c\u308a\u306b\u3088\u308b\u56de\u5fa9\u30b5\u30a4\u30af\u30eb\u3092\u7d4c\u3066\u3001\u529b\u5f37\u3044\u8db3\u53d6\u308a\u30672026\u5e74\u3092\u8fce\u3048\u305f\u3002\u5f53\u793e\u306e\u5168\u5206\u6790\u306f\u4ee5\u4e0b\u306e\u8a18\u4e8b\u3067\u3054\u89a7\u3044\u305f\u3060\u3051\u307e\u3059\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Materials-Market-Trends-Outlook-2025-2030\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u6750\u6599\u5e02\u5834\uff1a\u52d5\u5411\u3068\u5c55\u671b 2025-2030<\/a>.<\/p>\r\n<div class=\"jeez-highlight\">\r\n<p><strong>2026\u5e74\u306e\u4e3b\u306a\u5e02\u5834\u727d\u5f15\u8981\u56e0\uff1a<\/strong> AI\u30c8\u30ec\u30fc\u30cb\u30f3\u30b0\u7528\u30cf\u30fc\u30c9\u30a6\u30a7\u30a2\uff08H100\/B200\u30af\u30e9\u30b9GPU\u304a\u3088\u3073\u30ab\u30b9\u30bf\u30e0ASIC\uff09\u306f\u3001TSV\u5e73\u5766\u5316\u3068\u518d\u914d\u7dda\u5c64\u5f62\u6210\u306e\u305f\u3081\u306e\u5e83\u7bc4\u306aCMP\u5de5\u7a0b\u3092\u4f34\u3046\u9ad8\u5ea6\u306a\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u3092\u5fc5\u8981\u3068\u3059\u308b\u3002\u9ad8\u5e2f\u57df\u5e45\u30e1\u30e2\u30ea\uff08HBM3\u304a\u3088\u3073HBM3E\uff09\u306e\u30b9\u30bf\u30c3\u30ad\u30f3\u30b0\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u3042\u305f\u308a\u306eCMP\u96c6\u7d04\u7684\u306a\u30a6\u30a7\u30fc\u30cf\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u5de5\u7a0b\u6570\u3092\u5897\u52a0\u3055\u305b\u307e\u3059\u3002\u4e00\u65b9\u3001TSMC\u3001\u30b5\u30e0\u30b9\u30f3\u3001\u30a4\u30f3\u30c6\u30eb\u30d5\u30a1\u30a6\u30f3\u30c9\u30ea\u30fc\u306b\u304a\u3051\u308b2nm GAA\u30ce\u30fc\u30c9\u306e\u7acb\u3061\u4e0a\u304c\u308a\u306f\u3001Ru\u3001Co\u3001Mo\u5bfe\u5fdc\u30b9\u30e9\u30ea\u30fc\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u306e\u65b0\u305f\u306a\u9700\u8981\u3092\u727d\u5f15\u3057\u3066\u3044\u308b\u3002.<\/p>\r\n<\/div>\r\n<div class=\"jeez-stats\">\r\n<div class=\"jeez-stat-card\">\r\n<div class=\"stat-num\">~8%<\/div>\r\n<div class=\"stat-label\">CMP\u30b9\u30e9\u30ea\u30fc\u5e02\u5834\u306eCAGR\u4e88\u6e2c\u30012026-2030\u5e74<\/div>\r\n<\/div>\r\n<div class=\"jeez-stat-card\">\r\n<div class=\"stat-num\">~6%<\/div>\r\n<div class=\"stat-label\">CMP\u30d1\u30c3\u30c9\u5e02\u5834\u306eCAGR\u4e88\u6e2c\u30012026-2030\u5e74<\/div>\r\n<\/div>\r\n<div class=\"jeez-stat-card\">\r\n<div class=\"stat-num\">3D-IC<\/div>\r\n<div class=\"stat-label\">\u6570\u91cf\u30d9\u30fc\u30b9\u3067\u6700\u3082\u6025\u6210\u9577\u3057\u3066\u3044\u308bCMP\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30fb\u30bb\u30b0\u30e1\u30f3\u30c8<\/div>\r\n<\/div>\r\n<div class=\"jeez-stat-card\">\r\n<div class=\"stat-num\">200 mm<\/div>\r\n<div class=\"stat-label\">\u30d1\u30ef\u30fc\u3001RF\u3001\u8eca\u8f09\u7528\u30c1\u30c3\u30d7\u306e\u9700\u8981\u56de\u5fa9<\/div>\r\n<\/div>\r\n<\/div>\r\n<h3>\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u3068\u5730\u653f\u5b66\u7684\u8003\u5bdf<\/h3>\r\n<p>\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u3084\u6750\u6599\u3001\u7279\u306b\u7c73\u56fd\u3068\u65e5\u672c\u304b\u3089\u306e\u8f38\u51fa\u898f\u5236\u306f\u3001\u4e2d\u56fd\u3084\u305d\u306e\u4ed6\u306e\u5730\u57df\u306b\u304a\u3051\u308bCMP\u6d88\u8017\u54c1\u306e\u73fe\u5730\u5316\u52aa\u529b\u3092\u52a0\u901f\u3055\u305b\u3066\u3044\u308b\u3002\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306e\u5236\u7d04\u4e0b\u3067\u64cd\u696d\u3057\u3066\u3044\u308b\u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u5834\u306f\u3001\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306e\u591a\u69d8\u5316\u3092\u7a4d\u6975\u7684\u306b\u9032\u3081\u3066\u304a\u308a\u3001\u5148\u7aef\u30ce\u30fc\u30c9\u88fd\u9020\u306e\u6280\u8853\u7684\u8981\u6c42\u3092\u6e80\u305f\u3059\u3053\u3068\u306e\u3067\u304d\u308b\u512a\u79c0\u306a\u5730\u57df\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3092\u7372\u5f97\u3059\u308b\u6a5f\u4f1a\u3092\u5275\u51fa\u3057\u3066\u3044\u308b\u3002.<\/p>\r\n<p>\u30bb\u30ea\u30a2\uff08CeO\u2082\uff09\u7814\u78e8\u5264\u751f\u7523\u306f\u4e2d\u56fd\u306b\u96c6\u4e2d\u3057\u3066\u304a\u308a\u3001\u4e16\u754c\u306e\u9178\u5316\u30bb\u30ea\u30a6\u30e0\u751f\u7523\u91cf\u306e\u5927\u534a\u3092\u5360\u3081\u3066\u3044\u308b\u3002\u88fd\u9020\u6240\u3068\u30b9\u30e9\u30ea\u30fc\u8abf\u5408\u696d\u8005\u306f\u3001\u5408\u6210\u30bb\u30ea\u30a2\u751f\u7523\u30eb\u30fc\u30c8\u3001\u30bb\u30ea\u30a2\u3092\u542b\u307e\u306a\u3044\u9178\u5316\u7269\u30b9\u30e9\u30ea\u30fc\u306e\u4ee3\u66ff\u54c1\u3001\u4f9b\u7d66\u30ea\u30b9\u30af\u3092\u7ba1\u7406\u3059\u308b\u305f\u3081\u306e\u6226\u7565\u7684\u5728\u5eab\u30d0\u30c3\u30d5\u30a1\u30fc\u3092\u6a21\u7d22\u3057\u3066\u3044\u308b\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jeez-divider\" \/><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       SECTION 10 \u2014 DEEP-DIVE CLUSTER LINKS\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<section id=\"deep-dives\">\r\n<h2>10.\u8a73\u7d30\u306a\u30c8\u30d4\u30c3\u30af\u30ac\u30a4\u30c9<\/h2>\r\n<p>\u3053\u306e\u30da\u30fc\u30b8\u3067\u306f\u3001CMP\u6750\u6599\u306e\u5305\u62ec\u7684\u306a\u6982\u8981\u3092\u3054\u7d39\u4ecb\u3057\u307e\u3059\u3002\u4ee5\u4e0b\u306e\u5404\u5c02\u9580\u30c8\u30d4\u30c3\u30af\u306b\u306f\u3001\u305d\u308c\u305e\u308c\u5c02\u7528\u306e\u30ac\u30a4\u30c9\u304c\u3042\u308a\u3001\u5f53\u793e\u306e\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30c1\u30fc\u30e0\u304c\u3001\u6280\u8853\u7684\u306a\u8a73\u7d30\u3001\u30d7\u30ed\u30bb\u30b9\u30c7\u30fc\u30bf\u3001\u9078\u629e\u57fa\u6e96\u306b\u3064\u3044\u3066\u8a73\u3057\u304f\u89e3\u8aac\u3057\u3066\u3044\u307e\u3059\u3002\u73fe\u5728\u306e\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u306b\u6700\u3082\u95a2\u9023\u6027\u306e\u9ad8\u3044\u30c8\u30d4\u30c3\u30af\u3092\u3054\u89a7\u304f\u3060\u3055\u3044\uff1a<\/p>\r\n<div class=\"jeez-cluster-grid\"><a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Slurry-Types-Applications-Selection-Guide\/\" target=\"_blank\" rel=\"noopener noreferrer\"> <span class=\"cc-icon\">\ud83e\uddea<\/span><\/a>\r\n<div class=\"cc-title\">CMP\u30b9\u30e9\u30ea\u30fc\uff1a\u7a2e\u985e\u3001\u7528\u9014\u3001\u9078\u629e\u30ac\u30a4\u30c9<\/div>\r\n<div class=\"cc-desc\">\u9178\u5316\u7269\u3001\u9285\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u3001\u30b3\u30d0\u30eb\u30c8\u3001\u30d0\u30ea\u30a2\u30b9\u30e9\u30ea\u30fc\u306e\u5b8c\u5168\u306a\u5185\u8a33\u3002\u914d\u5408\u79d1\u5b66\u3001\u9078\u629e\u57fa\u6e96\u3001\u9069\u683c\u6027\u8a55\u4fa1\u65b9\u6cd5\u3002.<\/div>\r\n<a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Slurry-Types-Applications-Selection-Guide\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span class=\"cc-arrow\">\u30ac\u30a4\u30c9\u3092\u8aad\u3080<\/span> <\/a> <a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Polishing-Pads-Technologies-Comparison\/\" target=\"_blank\" rel=\"noopener noreferrer\"> <span class=\"cc-icon\">\ud83d\udd35<\/span><\/a>\r\n<div class=\"cc-title\">CMP\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9\uff1a\u6280\u8853\u3068\u6bd4\u8f03<\/div>\r\n<div class=\"cc-desc\">\u786c\u8cea\u30d1\u30c3\u30c9\u3001\u8edf\u8cea\u30d1\u30c3\u30c9\u3001\u7a4d\u5c64\u30d1\u30c3\u30c9\u3001\u56fa\u5b9a\u7814\u78e8\u30d1\u30c3\u30c9\u3092\u6bd4\u8f03\u3002\u6e9d\u30d1\u30bf\u30fc\u30f3\u5de5\u5b66\u3001\u30d1\u30c3\u30c9\u6163\u3089\u3057\u30d7\u30ed\u30c8\u30b3\u30eb\u3001\u5bff\u547d\u30e2\u30c7\u30ea\u30f3\u30b0\u3002.<\/div>\r\n<a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Polishing-Pads-Technologies-Comparison\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span class=\"cc-arrow\">\u30ac\u30a4\u30c9\u3092\u8aad\u3080<\/span> <\/a> <a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Pad-Conditioners-Conditioning-Process\/\" target=\"_blank\" rel=\"noopener noreferrer\"> <span class=\"cc-icon\">\ud83d\udc8e<\/span><\/a>\r\n<div class=\"cc-title\">CMP\u30d1\u30c3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u3068\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30d7\u30ed\u30bb\u30b9<\/div>\r\n<div class=\"cc-desc\">\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u306e\u8a2d\u8a08\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30d1\u30e9\u30e1\u30fc\u30bf\u3001in-situ\u3068ex-situ\u306e\u6226\u7565\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u304c\u30d1\u30c3\u30c9\u306e\u5bff\u547d\u3068\u6240\u6709\u30b3\u30b9\u30c8\u3092\u3069\u306e\u3088\u3046\u306b\u5de6\u53f3\u3059\u308b\u304b\u3002.<\/div>\r\n<a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Pad-Conditioners-Conditioning-Process\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span class=\"cc-arrow\">\u30ac\u30a4\u30c9\u3092\u8aad\u3080<\/span> <\/a> <a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Abrasives-Ceria-vs-Silica-vs-Alumina\/\" target=\"_blank\" rel=\"noopener noreferrer\"> <span class=\"cc-icon\">\u2697\ufe0f<\/span><\/a>\r\n<div class=\"cc-title\">CMP\u7814\u78e8\u6750\u30bb\u30ea\u30a2\u5bfe\u30b7\u30ea\u30ab\u5bfe\u30a2\u30eb\u30df\u30ca<\/div>\r\n<div class=\"cc-desc\">MRR\u3001\u6b20\u9665\u5bc6\u5ea6\u3001\u9078\u629e\u6027\u3001\u5148\u9032\u30ce\u30fc\u30c9\u9069\u5408\u6027\u3002.<\/div>\r\n<a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Abrasives-Ceria-vs-Silica-vs-Alumina\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span class=\"cc-arrow\">\u30ac\u30a4\u30c9\u3092\u8aad\u3080<\/span> <\/a> <a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Materials-for-Advanced-Nodes-(Below-14nm)\/\" target=\"_blank\" rel=\"noopener noreferrer\"> <span class=\"cc-icon\">\ud83d\udd2c<\/span><\/a>\r\n<div class=\"cc-title\">\u5148\u7aef\u30ce\u30fc\u30c9\uff0814nm\u4ee5\u4e0b\uff09\u7528CMP\u6750\u6599<\/div>\r\n<div class=\"cc-desc\">FinFET\u3001GAA\u30013D NAND\u3001\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0CMP\u306e\u8ab2\u984c\u3002\u30b3\u30d0\u30eb\u30c8\u3001\u30eb\u30c6\u30cb\u30a6\u30e0\u3001\u30e2\u30ea\u30d6\u30c7\u30f3\u306e\u30b9\u30e9\u30ea\u30fc\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u30680.3nm\u4ee5\u4e0b\u306e\u7c97\u3055\u30bf\u30fc\u30b2\u30c3\u30c8\u3002.<\/div>\r\n<a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Materials-for-Advanced-Nodes-(Below-14nm)\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span class=\"cc-arrow\">\u30ac\u30a4\u30c9\u3092\u8aad\u3080<\/span> <\/a> <a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/Top-CMP-Materials-Suppliers-2025-Comparison\/\" target=\"_blank\" rel=\"noopener noreferrer\"> <span class=\"cc-icon\">\ud83c\udfed<\/span><\/a>\r\n<div class=\"cc-title\">\u30c8\u30c3\u30d7CMP\u6750\u6599\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\uff1a2026\u5e74\u6bd4\u8f03<\/div>\r\n<div class=\"cc-desc\">\u30ad\u30e3\u30dc\u30c3\u30c8\u3001\u5bcc\u58eb\u898b\u3001DuPont\/Qnity\u3001\u5bcc\u58eb\u30d5\u30a4\u30eb\u30e0\u3001\u30d0\u30a4\u30d6\u30e9\u30f3\u30c8\u3001JEEZ\u3092\u3001\u88fd\u54c1\u306e\u5e45\u5e83\u3055\u3001\u5148\u9032\u30ce\u30fc\u30c9\u80fd\u529b\u3001\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306e\u5f3e\u529b\u6027\u306e\u89b3\u70b9\u304b\u3089\u5ba2\u89b3\u7684\u306b\u6bd4\u8f03\u3002.<\/div>\r\n<a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/Top-CMP-Materials-Suppliers-2025-Comparison\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span class=\"cc-arrow\">\u30ac\u30a4\u30c9\u3092\u8aad\u3080<\/span> <\/a> <a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Materials-Market-Trends-Outlook-2025-2030\/\" target=\"_blank\" rel=\"noopener noreferrer\"> <span class=\"cc-icon\">\ud83d\udcc8<\/span><\/a>\r\n<div class=\"cc-title\">CMP\u6750\u6599\u5e02\u5834\uff1a\u52d5\u5411\u3068\u5c55\u671b 2025-2030<\/div>\r\n<div class=\"cc-desc\">\u5e02\u5834\u898f\u6a21\u3001\u6210\u9577\u30c9\u30e9\u30a4\u30d0\u30fc\uff08AI\u3001HBM\u3001GAA\u30e9\u30f3\u30d7\uff09\u3001\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u30fb\u30ea\u30b9\u30af\u5206\u6790\u3001\u8f38\u51fa\u898f\u5236\u304c\u5730\u57df\u306eCMP\u4f9b\u7d66\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306b\u4e0e\u3048\u308b\u5f71\u97ff\u3002.<\/div>\r\n<a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Materials-Market-Trends-Outlook-2025-2030\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span class=\"cc-arrow\">\u30ac\u30a4\u30c9\u3092\u8aad\u3080<\/span> <\/a> <a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Process-Defects-Causes-Types-Solutions\/\" target=\"_blank\" rel=\"noopener noreferrer\"> <span class=\"cc-icon\">\ud83d\udd0d<\/span><\/a>\r\n<div class=\"cc-title\">CMP\u30d7\u30ed\u30bb\u30b9\u306e\u6b20\u9665\uff1a\u539f\u56e0\u3001\u7a2e\u985e\u3001\u89e3\u6c7a\u7b56<\/div>\r\n<div class=\"cc-desc\">\u30b9\u30af\u30e9\u30c3\u30c1\u3001\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3001\u30a8\u30ed\u30fc\u30b8\u30e7\u30f3\u3001\u5265\u96e2\u3001\u91d1\u5c5e\u6c5a\u67d3\u306b\u95a2\u3059\u308b\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30ac\u30a4\u30c9 - \u6839\u672c\u539f\u56e0\u5206\u6790\u30d5\u30ec\u30fc\u30e0\u30ef\u30fc\u30af\u3068\u662f\u6b63\u51e6\u7f6e\u30ed\u30fc\u30c9\u30de\u30c3\u30d7\u4ed8\u304d\u3002.<\/div>\r\n<a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Process-Defects-Causes-Types-Solutions\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span class=\"cc-arrow\">\u30ac\u30a4\u30c9\u3092\u8aad\u3080<\/span> <\/a> <a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Slurry-Storage-Handling-Safety\/\" target=\"_blank\" rel=\"noopener noreferrer\"> <span class=\"cc-icon\">\ud83d\udee1\ufe0f<\/span><\/a>\r\n<div class=\"cc-title\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u4fdd\u7ba1\u3001\u53d6\u308a\u6271\u3044\u3001\u5b89\u5168\u6027<\/div>\r\n<div class=\"cc-desc\">CMP\u5316\u5b66\u6d88\u8017\u54c1\u306e\u6e29\u5ea6\u8981\u4ef6\u3001\u8caf\u8535\u5bff\u547d\u5236\u9650\u3001\u652a\u62cc\u30d7\u30ed\u30c8\u30b3\u30eb\u3001SDS\u30b3\u30f3\u30d7\u30e9\u30a4\u30a2\u30f3\u30b9\u3001\u6d41\u51fa\u5bfe\u5fdc\u3001\u5ec3\u68c4\u7269\u51e6\u7406\u898f\u5236\u3002.<\/div>\r\n<a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Slurry-Storage-Handling-Safety\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span class=\"cc-arrow\">\u30ac\u30a4\u30c9\u3092\u8aad\u3080<\/span> <\/a> <a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Materials-FAQ-20-Common-Questions-Answered\/\" target=\"_blank\" rel=\"noopener noreferrer\"> <span class=\"cc-icon\">\u2753<\/span><\/a>\r\n<div class=\"cc-title\">CMP\u6559\u6750\u306b\u95a2\u3059\u308bFAQ\uff1a\u3088\u304f\u3042\u308b20\u306e\u8cea\u554f\u306b\u304a\u7b54\u3048\u3057\u307e\u3059<\/div>\r\n<div class=\"cc-desc\">CMP\u30b9\u30e9\u30ea\u30fc\u3068\u306f\u4f55\u304b\u3089\u3067\u304d\u3066\u3044\u308b\u306e\u304b\uff1f\u201c \u304b\u3089 \u201d\u9285CMP\u306e\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3092\u6e1b\u3089\u3059\u306b\u306f\uff1f\u201c \u307e\u3067\u3001CMP\u6d88\u8017\u54c1\u306b\u95a2\u3059\u308b\u3088\u304f\u3042\u308b\u8cea\u554f\u306b\u7d20\u65e9\u304f\u304a\u7b54\u3048\u3057\u307e\u3059\u3002\u201d<\/div>\r\n<a class=\"jeez-cluster-card\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Materials-FAQ-20-Common-Questions-Answered\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span class=\"cc-arrow\">\u30ac\u30a4\u30c9\u3092\u8aad\u3080<\/span> <\/a><\/div>\r\n<\/section>\r\n<hr class=\"jeez-divider\" \/><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       SECTION 11 \u2014 FAQ\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<section id=\"faq\">\r\n<h2>11.\u3088\u304f\u3042\u308b\u8cea\u554f<\/h2>\r\n<h3>CMP\u30b9\u30e9\u30ea\u30fc\u306f\u4f55\u3067\u3067\u304d\u3066\u3044\u308b\u306e\u304b\uff1f<\/h3>\r\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u7814\u78e8\u7c92\u5b50\uff08\u6700\u3082\u4e00\u822c\u7684\u306a\u306e\u306f\u30bb\u30ea\u30a2\u3001\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u3001\u30a2\u30eb\u30df\u30ca\uff09\u3001pH\u7de9\u885d\u5264\u3001\u9178\u5316\u5264\uff08\u9285\u30b9\u30e9\u30ea\u30fc\u306e\u904e\u9178\u5316\u6c34\u7d20\u306a\u3069\uff09\u3001\u5316\u5b66\u932f\u5316\u5264\u307e\u305f\u306f\u30ad\u30ec\u30fc\u30c8\u5264\u3001\u8150\u98df\u9632\u6b62\u5264\u3001\u754c\u9762\u6d3b\u6027\u5264\u3092\u542b\u3080\u6c34\u6027\u61f8\u6fc1\u6db2\u3067\u3059\u3002\u9178\u5316\u7269\u30b9\u30e9\u30ea\u30fc\u3001\u9285\u30b9\u30e9\u30ea\u30fc\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u30fb\u30b9\u30e9\u30ea\u30fc\u306f\u305d\u308c\u305e\u308c\u3001\u5bfe\u8c61\u3068\u306a\u308b\u76ae\u819c\u3084\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u306b\u6700\u9069\u5316\u3055\u308c\u305f\u3001\u7570\u306a\u308b\u5316\u5b66\u7684\u6027\u8cea\u3092\u6301\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<h3>CMP\u3068\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u9055\u3044\u306f\u4f55\u3067\u3059\u304b\uff1f<\/h3>\r\n<p>\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\uff08\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u3001RIE\uff09\u306f\u3001\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30de\u30b9\u30af\u3067\u5b9a\u7fa9\u3055\u308c\u305f\u65b9\u5411\u30d1\u30bf\u30fc\u30f3\u3067\u9078\u629e\u7684\u306b\u6750\u6599\u3092\u9664\u53bb\u3059\u308b\u7570\u65b9\u6027\u6750\u6599\u9664\u53bb\u30d7\u30ed\u30bb\u30b9\u3067\u3059\u3002CMP\u306f\u3001\u30b0\u30ed\u30fc\u30d0\u30eb\u3067\u7b49\u65b9\u7684\u306a\u6750\u6599\u9664\u53bb\u30d7\u30ed\u30bb\u30b9\u3067\u3042\u308a\u3001\u6700\u521d\u306b\u6700\u3082\u9ad8\u3044\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u30dd\u30a4\u30f3\u30c8\u306b\u4f5c\u7528\u3057\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u304c\u5e73\u5766\u306b\u306a\u308b\u307e\u3067\u9ad8\u3055\u306e\u3070\u3089\u3064\u304d\u3092\u5f90\u3005\u306b\u6e1b\u5c11\u3055\u305b\u307e\u3059\u3002CMP\u306f\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u30de\u30b9\u30af\u3092\u5fc5\u8981\u3068\u305b\u305a\u3001\u30d1\u30bf\u30fc\u30f3\u5f62\u6210\u3067\u306f\u306a\u304f\u3001\u7279\u306b\u5e73\u5766\u5316\u3068\u30d0\u30eb\u30af\u6750\u6599\u9664\u53bb\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002.<\/p>\r\n<h3>CMP\u30d1\u30c3\u30c9\u306f\u30cf\u30fc\u30c9\u3068\u30bd\u30d5\u30c8\u306e\u3069\u3061\u3089\u3092\u9078\u3079\u3070\u3044\u3044\u306e\u3067\u3059\u304b\uff1f<\/h3>\r\n<p>\u786c\u8cea\u30d1\u30c3\u30c9\u306f\u3001\u5168\u4f53\u7684\u306a\u5e73\u5766\u5316\u52b9\u7387\u3092\u512a\u5148\u3059\u308b\u5834\u5408\u306b\u597d\u307e\u308c\u307e\u3059\u3002\u786c\u8cea\u30d1\u30c3\u30c9\u306f\u3001\u6700\u3082\u9ad8\u3044\u5730\u5f62\u70b9\u3068\u4e3b\u306b\u63a5\u89e6\u3057\u3001\u4f4e\u3044\u90e8\u5206\u3088\u308a\u3082\u901f\u304f\u9664\u53bb\u3057\u307e\u3059\u3002\u9285\u30d0\u30d5\u7814\u78e8\u3084\u6700\u7d42\u9178\u5316\u7269\u306e\u5e73\u6ed1\u5316\u306a\u3069\u3001\u6b20\u9665\u306e\u6700\u5c0f\u5316\u3068\u8868\u9762\u4ed5\u4e0a\u3052\u306e\u54c1\u8cea\u3092\u512a\u5148\u3059\u308b\u5834\u5408\u306f\u3001\u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\u304c\u597d\u307e\u308c\u307e\u3059\u3002\u6700\u5148\u7aef\u306e\u751f\u7523CMP\u30d7\u30ed\u30bb\u30b9\u306e\u591a\u304f\u306f\u3001\u5e73\u5766\u5316\u3068\u5747\u4e00\u6027\u3092\u540c\u6642\u306b\u30d0\u30e9\u30f3\u30b9\u3055\u305b\u308b\u305f\u3081\u306b\u3001\u7a4d\u5c64\u30d1\u30c3\u30c9\u69cb\u6210\uff08\u786c\u8cea\u30c8\u30c3\u30d7\u30d1\u30c3\u30c9\uff0b\u5727\u7e2e\u6027\u30b5\u30d6\u30d1\u30c3\u30c9\uff09\u3092\u63a1\u7528\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<h3>CMP\u306e\u3072\u3063\u304b\u304d\u50b7\u306e\u539f\u56e0\u306f\u4f55\u3067\u3059\u304b\uff1f<\/h3>\r\n<p>\u30b9\u30af\u30e9\u30c3\u30c1\u306e\u6700\u3082\u4e00\u822c\u7684\u306a\u539f\u56e0\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u4e2d\u306e\u5927\u304d\u306a\u307e\u305f\u306f\u51dd\u96c6\u3057\u305f\u7814\u78e8\u7c92\u5b50\u3001\u30d1\u30c3\u30c9\u7834\u7247\u3001\u307e\u305f\u306f\u30b9\u30e9\u30ea\u30fc\u5206\u914d\u30b7\u30b9\u30c6\u30e0\u304b\u3089\u5c0e\u5165\u3055\u308c\u305f\u6c5a\u67d3\u7c92\u5b50\u3067\u3042\u308b\u3002\u9632\u6b62\u7b56\u3068\u3057\u3066\u306f\u30010.1\uff5e1\u03bcm\u30ab\u30c3\u30c8\u30aa\u30d5\u3067\u306e\u30b9\u30e9\u30ea\u30fc\u306e\u30dd\u30a4\u30f3\u30c8\u30fb\u30aa\u30d6\u30fb\u30e6\u30fc\u30b9\u6ffe\u904e\u3001\u30b9\u30e9\u30ea\u30fc\u30e9\u30a4\u30f3\u306e\u5b9a\u671f\u7684\u306a\u691c\u67fb\u3068\u6d17\u6d44\u3001\u30b9\u30e9\u30ea\u30fc\u88fd\u9020\u6642\u306e\u53b3\u5bc6\u306a\u7c92\u5ea6\u5206\u5e03\u7ba1\u7406\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7834\u7247\u306e\u653e\u51fa\u3092\u9632\u3050\u305f\u3081\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30c7\u30a3\u30b9\u30af\u306e\u5b8c\u5168\u6027\u306e\u76e3\u8996\u306a\u3069\u304c\u3042\u308b\u3002.<\/p>\r\n<h3>CMP\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u5bff\u547d\u306f\uff1f<\/h3>\r\n<p>\u30d1\u30c3\u30c9\u306e\u5bff\u547d\u306f\u3001\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3001\u30c4\u30fc\u30eb\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30d7\u30ed\u30b0\u30e9\u30e0\u3001\u30d1\u30c3\u30c9\u306e\u30bf\u30a4\u30d7\u306b\u3088\u3063\u3066\u5927\u304d\u304f\u7570\u306a\u308a\u307e\u3059\u3002\u5927\u91cf\u751f\u7523\u3067\u306f\u3001\u9178\u5316\u819cCMP\u306b\u4f7f\u7528\u3055\u308c\u308b\u30cf\u30fc\u30c9\u30d1\u30c3\u30c9\u306f\u3001\u901a\u5e38500\uff5e2,000\u30a6\u30a7\u30fc\u30cf\u30d1\u30b9\u3067\u4ea4\u63db\u3055\u308c\u307e\u3059\u3002\u9285CMP\u306b\u4f7f\u7528\u3055\u308c\u308b\u30bd\u30d5\u30c8\u30d0\u30d5\u30d1\u30c3\u30c9\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u304c\u7de9\u3084\u304b\u306a\u305f\u3081\u3001\u3088\u308a\u9577\u6301\u3061\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u30d1\u30c3\u30c9\u306e\u5bff\u547d\u306f\u3001MRR\u306e\u5b89\u5b9a\u6027\u3001\u30a6\u30a7\u30fc\u30cf\u5185\u306e\u4e0d\u5747\u4e00\u6027\u306e\u50be\u5411\u3001\u304a\u3088\u3073\u5b9a\u671f\u7684\u306a\u30d1\u30c3\u30c9\u539a\u3055\u306e\u6e2c\u5b9a\u306b\u3088\u3063\u3066\u6c7a\u5b9a\u3055\u308c\u307e\u3059\u3002\u307b\u3068\u3093\u3069\u306e\u5de5\u5834\u30d7\u30ed\u30bb\u30b9\u30a8\u30f3\u30b8\u30cb\u30a2\u306f\u3001\u771f\u306e\u30d1\u30c3\u30c9\u4e0d\u826f\u304c\u767a\u751f\u3059\u308b\u524d\u306b\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u3001\u4fdd\u5b88\u7684\u306a\u4ea4\u63db\u30c8\u30ea\u30ac\u30fc\u3092\u8a2d\u5b9a\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<h3>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u74b0\u5883\u9762\u304a\u3088\u3073\u5b89\u5168\u9762\u3067\u306e\u8003\u616e\u70b9\u306f\uff1f<\/h3>\r\n<p>CMP\u30b9\u30e9\u30ea\u30fc\u306b\u306f\u3001\u3055\u307e\u3056\u307e\u306a\u30cf\u30b6\u30fc\u30c9\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u3092\u6301\u3064\u5316\u5b66\u5264\u304c\u542b\u307e\u308c\u3066\u3044\u308b\u3002\u904e\u9178\u5316\u6c34\u7d20\u306a\u3069\u306e\u9178\u5316\u5264\u306f\u53cd\u5fdc\u6027\u304c\u9ad8\u3044\u305f\u3081\u3001\u6709\u6a5f\u7269\u304b\u3089\u96e2\u3057\u3066\u4fdd\u7ba1\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002\u91d1\u5c5e\u3092\u542b\u3080\u30b9\u30e9\u30ea\u30fc\uff08\u7279\u306b\u9244\u7cfb\u89e6\u5a92\u3084\u5faa\u74b0\u5f0f\u6d74\u5316\u5b66\u304b\u3089\u306e\u9285\u30a4\u30aa\u30f3\u3092\u542b\u3080\u3082\u306e\uff09\u306f\u3001\u76ae\u819a\u3084\u76ee\u306b\u89e6\u308c\u306a\u3044\u3088\u3046\u306b\u614e\u91cd\u306b\u53d6\u308a\u6271\u3046\u5fc5\u8981\u304c\u3042\u308a\u3001\u5730\u57df\u306e\u898f\u5236\u306b\u5f93\u3063\u3066\u6709\u5bb3\u5ec3\u68c4\u7269\u3068\u3057\u3066\u51e6\u5206\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u3059\u3079\u3066\u306eJEEZ\u30b9\u30e9\u30ea\u30fc\u88fd\u54c1\u306b\u306f\u3001\u5305\u62ec\u7684\u306a\u5b89\u5168\u30c7\u30fc\u30bf\u30b7\u30fc\u30c8\uff08SDS\uff09\u3068\u4fdd\u7ba1\u306b\u95a2\u3059\u308b\u63a8\u5968\u4e8b\u9805\u304c\u6dfb\u4ed8\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u8a73\u7d30\u306a\u30ac\u30a4\u30c0\u30f3\u30b9\u306f <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Slurry-Storage-Handling-Safety\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u4fdd\u7ba1\u3001\u53d6\u308a\u6271\u3044\u3001\u5b89\u5168\u6027<\/a>.<\/p>\r\n<h3>CMP\u6750\u6599\u306f\u5316\u5408\u7269\u534a\u5c0e\u4f53\u57fa\u677f\uff08GaAs\u3001SiC\u3001GaN\uff09\u306b\u3082\u4f7f\u7528\u3067\u304d\u307e\u3059\u304b\uff1f<\/h3>\r\n<p>\u306f\u3044\u3001\u3057\u304b\u3057\u7279\u6b8a\u306a\u914d\u5408\u304c\u5fc5\u8981\u3067\u3059\u3002\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3084EV\u30a4\u30f3\u30d0\u30fc\u30bf\u30fc\u306b\u4f7f\u7528\u3055\u308c\u308bSiC\u57fa\u677f\u3067\u306f\u3001SiC\u306e\u786c\u5ea6\u304c\u6975\u3081\u3066\u9ad8\u3044\uff08\u30e2\u30fc\u30b9\u786c\u5ea69.5\uff09\u305f\u3081\u3001\u9178\u5316\u5264\u5165\u308a\u306e\u30a2\u30eb\u30ab\u30ea\u6027\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u30b9\u30e9\u30ea\u30fc\u3084\u3001\u6700\u7d42\u6bb5\u968e\u3067\u306f\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7814\u78e8\u5264\u5165\u308a\u306e\u30b9\u30e9\u30ea\u30fc\u304c\u5fc5\u8981\u3068\u306a\u308b\u3002GaN\u30a8\u30d4\u5c64\u3067\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u79fb\u52d5\u5ea6\u3092\u4f4e\u4e0b\u3055\u305b\u308b\u8868\u9762\u4e0b\u306e\u640d\u50b7\u3092\u907f\u3051\u308b\u305f\u3081\u3001\u30b9\u30e9\u30ea\u30fc\u306epH\u3068\u7814\u78e8\u5264\u306e\u786c\u5ea6\u3092\u6ce8\u610f\u6df1\u304f\u5236\u5fa1\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002GaAs\u7422\u78e8\u3067\u306f\u3001\u6a5f\u68b0\u7684\u7814\u78e8\u306b\u52a0\u3048\u3066\u3001\u81ed\u7d20\u30e1\u30bf\u30ce\u30fc\u30eb\u307e\u305f\u306fHNO\u2083\/HF\u30d9\u30fc\u30b9\u306e\u5316\u5b66\u85ac\u54c1\u304c\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002JEEZ\u3067\u306f\u3001\u5316\u5408\u7269\u534a\u5c0e\u4f53\u306e\u304a\u5ba2\u69d8\u5411\u3051\u306b\u3001\u7528\u9014\u306b\u5fdc\u3058\u305f\u30a2\u30c9\u30d0\u30a4\u30b9\u3092\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/contact\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u6280\u8853\u30c1\u30fc\u30e0\u3078\u306e\u304a\u554f\u3044\u5408\u308f\u305b<\/a> \u3054\u76f8\u8ac7\u304f\u3060\u3055\u3044\u3002.<\/p>\r\n<h3>CMP\u306f3D-IC\u3084\u30c1\u30c3\u30d7\u30ec\u30c3\u30c8\u30fb\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u306b\u3069\u306e\u3088\u3046\u306b\u9069\u5408\u3059\u308b\u306e\u304b\uff1f<\/h3>\r\n<p>\u5148\u7aef\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u306b\u304a\u3044\u3066\u3001CMP \u306f\u307e\u3059\u307e\u3059\u4e2d\u5fc3\u7684\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002TSV (Through-Silicon Via)\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001CMP \u306f\u30d3\u30a2\u30fb\u30aa\u30fc\u30d7\u30cb\u30f3\u30b0\u306e\u4e0a\u306b\u3042\u308b\u9285\u306e\u30aa\u30fc\u30d0\u30fc\u30d0\u30fc\u30c9\u3092\u9664\u53bb\u3057\u3001\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u306e\u524d\u306b\u6700\u7d42\u7684\u306a\u5e73\u5766\u5316\u3092\u884c\u3044\u307e\u3059\u30023D-IC\u30b9\u30bf\u30c3\u30ad\u30f3\u30b0\u306e\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\uff08HBM\u3084\u5148\u9032\u7684\u306a\u30ed\u30b8\u30c3\u30af\u30aa\u30f3\u30ed\u30b8\u30c3\u30af\u96c6\u7a4d\u306b\u4f7f\u7528\uff09\u3067\u306f\u3001CMP\u306f\u30dc\u30a4\u30c9\u306e\u306a\u3044\u5ba4\u6e29\u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u3092\u53ef\u80fd\u306b\u3059\u308b\u305f\u3081\u3001\u4e21\u65b9\u306e\u9178\u5316\u7269\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u9762\u306e\u8868\u9762\u7c97\u3055\u3092\u30b5\u30d6\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u306b\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u306e\u3088\u3046\u306a\u8981\u6c42\u306b\u306f\u3001\u6700\u9ad8\u6027\u80fd\u306e\u30b9\u30e9\u30ea\u30fc\u3084\u30d1\u30c3\u30c9\u304c\u5fc5\u8981\u3067\u3042\u308a\u3001CMP\u6750\u6599\u958b\u767a\u306e\u6025\u6210\u9577\u5206\u91ce\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jeez-divider\" \/><!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       TAGS\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<div class=\"jeez-tags\"><span class=\"jeez-tag\">CMP\u30de\u30c6\u30ea\u30a2\u30eb<\/span> <span class=\"jeez-tag\">CMP\u30b9\u30e9\u30ea\u30fc<\/span> <span class=\"jeez-tag\">\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9<\/span> <span class=\"jeez-tag\">\u5316\u5b66\u7684\u6a5f\u68b0\u7684\u5e73\u5766\u5316<\/span> <span class=\"jeez-tag\">\u534a\u5c0e\u4f53\u6d88\u8017\u54c1<\/span> <span class=\"jeez-tag\">\u30a6\u30a7\u30cf\u30fc\u88fd\u9020<\/span> <span class=\"jeez-tag\">\u30a2\u30c9\u30d0\u30f3\u30b9\u30c9\u30fb\u30ce\u30fc\u30c9CMP<\/span> <span class=\"jeez-tag\">\u9285CMP<\/span> <span class=\"jeez-tag\">\u9178\u5316\u7269CMP<\/span> <span class=\"jeez-tag\">3D-IC<\/span> <span class=\"jeez-tag\">JEEZ<\/span><\/div>\r\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n       CTA\r\n  \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<div class=\"jeez-cta\">\r\n<h2>CMP\u30d7\u30ed\u30bb\u30b9\u3092\u6700\u9069\u5316\u3059\u308b\u6e96\u5099\u306f\u3067\u304d\u3066\u3044\u307e\u3059\u304b\uff1f<\/h2>\r\n<p>JEEZ\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30a8\u30f3\u30b8\u30cb\u30a2\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u30c1\u30fc\u30e0\u3068\u76f4\u63a5\u9023\u643a\u3057\u3001\u304a\u5ba2\u69d8\u306e\u30c4\u30fc\u30eb\u3001\u30ce\u30fc\u30c9\u3001\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u8981\u4ef6\u306b\u5408\u308f\u305b\u305fCMP\u30b9\u30e9\u30ea\u30fc\u304a\u3088\u3073\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u9078\u5b9a\u3001\u8a8d\u5b9a\u3001\u6700\u9069\u5316\u3092\u884c\u3044\u307e\u3059\u3002\u6700\u5148\u7aef\u30ce\u30fc\u30c9\u3067\u306e\u65b0\u30d7\u30ed\u30bb\u30b9\u306e\u8a55\u4fa1\u3067\u3042\u308c\u3001\u6210\u719f\u3057\u305f\u6280\u8853\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u3067\u306e\u6d88\u8017\u54c1\u30b3\u30b9\u30c8\u306e\u524a\u6e1b\u3067\u3042\u308c\u3001JEEZ\u306b\u306f\u304a\u5ba2\u69d8\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u88fd\u54c1\u30dd\u30fc\u30c8\u30d5\u30a9\u30ea\u30aa\u3068\u5c02\u9580\u77e5\u8b58\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\r\n<a class=\"jeez-btn\" href=\"https:\/\/jeez-semicon.com\/ja\/contact\/\" target=\"_blank\" rel=\"noopener noreferrer\">JEEZ CMP\u30a8\u30ad\u30b9\u30d1\u30fc\u30c8\u3078\u306e\u304a\u554f\u3044\u5408\u308f\u305b<\/a><\/div>\r\n<\/div>\r\n<!-- END .jeez-pillar -->","protected":false},"excerpt":{"rendered":"<p>JEEZ Semiconductor Materials \u30b1\u30df\u30ab\u30eb\u30fb\u30e1\u30ab\u30cb\u30ab\u30eb\u5e73\u5766\u5316\u6d88\u8017\u54c1\u306b\u3064\u3044\u3066\u77e5\u3063\u3066\u304a\u304f\u3079\u304d\u3059\u3079\u3066\u306e\u3053\u3068-\u57fa\u790e\u7684\u306a\u30d7\u30ed\u30bb\u30b9\u79d1\u5b66\u304b\u3089\u3001\u5148\u9032\u30ce\u30fc\u30c9\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u3001\u7814\u78e8\u30d1\u30c3\u30c9\u6280\u8853\u3001\u30b5\u30d7\u30e9\u30a4\u30e4\u306e\u8a55\u4fa1\u3001\u305d\u3057\u3066\u30c8\u30fc\u30bf\u30eb\u30b3\u30b9\u30c8\u307e\u3067\u3002<\/p>","protected":false},"author":1,"featured_media":1949,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1914","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1914","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1914"}],"version-history":[{"count":3,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1914\/revisions"}],"predecessor-version":[{"id":1960,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1914\/revisions\/1960"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1949"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1914"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1914"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1914"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}