{"id":1917,"date":"2026-04-30T14:26:01","date_gmt":"2026-04-30T06:26:01","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1917"},"modified":"2026-04-30T15:00:53","modified_gmt":"2026-04-30T07:00:53","slug":"cmp-slurry-types-applications-selection-guide","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-slurry-types-applications-selection-guide\/","title":{"rendered":"CMP\u30b9\u30e9\u30ea\u30fc\uff1a\u7a2e\u985e\u3001\u7528\u9014\u3001\u9078\u629e\u30ac\u30a4\u30c9"},"content":{"rendered":"<!-- JEEZ | Cluster 1: CMP Slurry Types, Applications & Selection Guide -->\n<style>\n.jz*,.jz *::before,.jz *::after{box-sizing:border-box;margin:0;padding:0}\n.jz{font-family:'Segoe UI',Arial,sans-serif;font-size:16px;line-height:1.8;color:#1a1a2e;max-width:900px;margin:0 auto}\n.jz-hero{background:linear-gradient(135deg,#0f2544 0%,#1a4a8a 55%,#0e7c86 100%);border-radius:12px;padding:56px 44px;margin-bottom:44px;position:relative;overflow:hidden}\n.jz-hero::before{content:'';position:absolute;top:-60px;right:-60px;width:260px;height:260px;border-radius:50%;background:rgba(255,255,255,0.05)}\n.jz-hero-label{display:inline-block;background:rgba(255,255,255,0.15);color:#a8d8ea;font-size:12px;font-weight:600;letter-spacing:.12em;text-transform:uppercase;padding:5px 14px;border-radius:20px;margin-bottom:18px}\n.jz-hero h1{font-size:2.2em;font-weight:800;color:#fff;line-height:1.25;margin-bottom:16px;position:relative;z-index:1}\n.jz-hero p{font-size:1.02em;color:#c8dff0;max-width:640px;position:relative;z-index:1}\n.jz-hero-meta{margin-top:24px;display:flex;gap:20px;flex-wrap:wrap;position:relative;z-index:1}\n.jz-hero-meta span{font-size:13px;color:#a8c8e8}\n.jz-toc{background:#f0f6ff;border-left:4px solid #1a4a8a;border-radius:0 10px 10px 0;padding:26px 30px;margin-bottom:48px}\n.jz-toc-title{font-size:.75em;font-weight:700;letter-spacing:.1em;text-transform:uppercase;color:#1a4a8a;margin-bottom:14px}\n.jz-toc ol{padding-left:20px}\n.jz-toc li{margin-bottom:6px;font-size:.94em}\n.jz-toc a{color:#1a4a8a;text-decoration:none}\n.jz-toc a:hover{color:#0e7c86;text-decoration:underline}\n.jz h2{font-size:1.6em;font-weight:800;color:#0f2544;margin:52px 0 16px;padding-bottom:10px;border-bottom:2px solid #e0ebff}\n.jz h3{font-size:1.2em;font-weight:700;color:#1a4a8a;margin:32px 0 12px}\n.jz h4{font-size:1.03em;font-weight:700;color:#0e7c86;margin:20px 0 8px}\n.jz p{margin-bottom:16px}\n.jz a{color:#1a4a8a;text-decoration:underline;text-underline-offset:3px}\n.jz a:hover{color:#0e7c86}\n.jz ul,.jz ol{padding-left:24px;margin-bottom:16px}\n.jz li{margin-bottom:7px}\n.jz-hl{background:linear-gradient(135deg,#e8f4fd,#f0fffe);border:1px solid #b8d9f5;border-radius:10px;padding:22px 26px;margin:26px 0}\n.jz-hl 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ul{padding-left:16px}\n.jz-card li{font-size:.91em;color:#334;margin-bottom:5px}\n.jz-table-wrap{overflow-x:auto;margin:26px 0}\n.jz-table{width:100%;border-collapse:collapse;font-size:.91em}\n.jz-table thead tr{background:linear-gradient(90deg,#0f2544,#1a4a8a);color:#fff}\n.jz-table th{padding:12px 14px;text-align:left;font-weight:600;white-space:nowrap}\n.jz-table td{padding:10px 14px;border-bottom:1px solid #e4edf8;color:#334;vertical-align:top}\n.jz-table tbody tr:nth-child(even){background:#f5f9ff}\n.jz-table tbody tr:hover{background:#ebf3ff}\n.jz-fact{border-left:4px solid #0e7c86;padding:14px 20px;background:#f0fffe;border-radius:0 8px 8px 0;margin:22px 0;font-size:1em;color:#0f3a3a;font-style:italic}\n.jz-fact strong{font-style:normal;color:#064444}\n.jz-steps{margin:26px 0}\n.jz-step{display:flex;gap:16px;margin-bottom:18px;align-items:flex-start}\n.jz-step-num{flex-shrink:0;width:34px;height:34px;background:linear-gradient(135deg,#1a4a8a,#0e7c86);color:#fff;font-size:.83em;font-weight:700;border-radius:50%;display:flex;align-items:center;justify-content:center}\n.jz-step-body p{margin-bottom:0;font-size:.94em}\n.jz-step-body strong{color:#0f2544}\n.jz-cta{background:linear-gradient(135deg,#0f2544 0%,#1a4a8a 60%,#0e7c86 100%);border-radius:12px;padding:44px 36px;text-align:center;margin:56px 0 36px;position:relative;overflow:hidden}\n.jz-cta::before{content:'';position:absolute;top:-40px;right:-40px;width:180px;height:180px;border-radius:50%;background:rgba(255,255,255,0.05)}\n.jz-cta h2{font-size:1.6em;color:#fff;border:none;margin:0 0 12px;position:relative;z-index:1}\n.jz-cta p{color:#c8dff0;margin-bottom:24px;position:relative;z-index:1}\n.jz-btn{display:inline-block;background:#fff;color:#0f2544;font-weight:700;font-size:.93em;padding:12px 30px;border-radius:50px;text-decoration:none;transition:all .25s;position:relative;z-index:1;box-shadow:0 4px 14px rgba(0,0,0,.18)}\n.jz-btn:hover{background:#a8d8ea;color:#0f2544;transform:translateY(-1px)}\n.jz-btn-sec{display:inline-block;background:rgba(255,255,255,0.12);color:#e8f4ff;font-weight:600;font-size:.88em;padding:10px 24px;border-radius:50px;text-decoration:none;transition:all .25s;position:relative;z-index:1;border:1px solid rgba(255,255,255,0.3);margin-left:12px}\n.jz-btn-sec:hover{background:rgba(255,255,255,0.22);color:#fff}\n.jz-tags{display:flex;flex-wrap:wrap;gap:7px;margin:20px 0}\n.jz-tag{background:#e8f2ff;color:#1a4a8a;font-size:.77em;font-weight:600;padding:4px 11px;border-radius:20px;border:1px solid #c0d8f5}\n.jz-divider{border:none;border-top:1px solid #e0ebff;margin:38px 0}\n.jz-pillar-link{display:inline-flex;align-items:center;gap:8px;background:#e8f2ff;border:1px solid #b8d5f5;border-radius:8px;padding:10px 18px;text-decoration:none;color:#1a4a8a;font-size:.9em;font-weight:600;margin:10px 0 24px;transition:all .2s}\n.jz-pillar-link:hover{background:#d0e8ff;border-color:#1a4a8a}\n<\/style>\n\n<div class=\"jz\">\n\n<div class=\"jz-hero\">\n  <div class=\"jz-hero-label\">JEEZ\u30c6\u30af\u30cb\u30ab\u30eb\u30ac\u30a4\u30c9 - CMP\u30b9\u30e9\u30ea\u30fc<\/div>\n  <p>\u9178\u5316\u7269STI\u304b\u3089\u9285\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u3001\u30b3\u30d0\u30eb\u30c8\u3001\u6b21\u4e16\u4ee3\u91d1\u5c5e\u5316\u5b66\u7269\u8cea\u306b\u81f3\u308b\u307e\u3067\u3001\u5316\u5b66\u7684\u6a5f\u68b0\u7684\u5e73\u5766\u5316\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u3001\u9069\u683c\u6027\u8a55\u4fa1\u3001\u6700\u9069\u5316\u306e\u305f\u3081\u306e\u5b8c\u5168\u306a\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30ea\u30d5\u30a1\u30ec\u30f3\u30b9\u3002.<\/p>\n  <div class=\"jz-hero-meta\">\n    <span>2026\u5e744\u6708\u66f4\u65b0<\/span>\n    <span>\u8aad\u66f8\u6642\u9593\uff1a\uff5e20\u5206<\/span>\n    <span>\u270d\ufe0f JEEZ\u30c6\u30af\u30cb\u30ab\u30eb\u7de8\u96c6\u90e8<\/span>\n  <\/div>\n<\/div>\n\n<a class=\"jz-pillar-link\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/What-Are-CMP-Materials-Complete-Guide\/\" target=\"_blank\" rel=\"noopener noreferrer\">\n  \u2190 CMP\u30de\u30c6\u30ea\u30a2\u30eb\u306b\u623b\u308b\uff1a\u5b8c\u5168\u30ac\u30a4\u30c9\n<\/a>\n\n<nav class=\"jz-toc\" aria-label=\"\u76ee\u6b21\">\n  <div class=\"jz-toc-title\">\u76ee\u6b21<\/div>\n  <ol>\n    <li><a href=\"#slurry-intro\">CMP\u30b9\u30e9\u30ea\u30fc\u3068\u306f\u4f55\u304b\uff1f<\/a><\/li>\n    <li><a href=\"#slurry-anatomy\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u69cb\u9020\uff1a\u4e3b\u8981\u6210\u5206\u306e\u8aac\u660e<\/a><\/li>\n    <li><a href=\"#slurry-types\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u7528\u9014\u5225\u30bf\u30a4\u30d7<\/a><\/li>\n    <li><a href=\"#oxide-slurry\">\u9178\u5316\u7269\u3068STI\u30b9\u30e9\u30ea\u30fc\u306e\u30c7\u30a3\u30fc\u30d7\u30fb\u30c0\u30a4\u30d6<\/a><\/li>\n    <li><a href=\"#copper-slurry\">\u9285CMP\u30b9\u30e9\u30ea\u30fc\u306e\u30c7\u30a3\u30fc\u30d7\u30fb\u30c0\u30a4\u30d6<\/a><\/li>\n    <li><a href=\"#tungsten-slurry\">\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc\u306e\u30c7\u30a3\u30fc\u30d7\u30c0\u30a4\u30d6<\/a><\/li>\n    <li><a href=\"#barrier-slurry\">\u30d0\u30ea\u30a2\uff06\u30a2\u30c9\u30d0\u30f3\u30b9\u30c9\u30e1\u30bf\u30eb\u30b9\u30e9\u30ea\u30fc<\/a><\/li>\n    <li><a href=\"#selection-guide\">\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u306e\u67a0\u7d44\u307f<\/a><\/li>\n    <li><a href=\"#qualification\">\u30b9\u30e9\u30ea\u30fc\u306e\u8a8d\u5b9a\u30d7\u30ed\u30bb\u30b9<\/a><\/li>\n    <li><a href=\"#troubleshooting\">\u30b9\u30e9\u30ea\u30fc\u306b\u95a2\u3059\u308b\u4e00\u822c\u7684\u306a\u554f\u984c\u3068\u89e3\u6c7a\u7b56<\/a><\/li>\n    <li><a href=\"#faq\">\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/a><\/li>\n  <\/ol>\n<\/nav>\n\n<!-- Section 1 -->\n<section id=\"slurry-intro\">\n  <h2>1.CMP\u30b9\u30e9\u30ea\u30fc\u3068\u306f\u4f55\u304b\u3001\u306a\u305c\u91cd\u8981\u306a\u306e\u304b\uff1f<\/h2>\n  <p>CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u534a\u5c0e\u4f53\u30a6\u30a7\u30cf\u30fc\u306e\u5e73\u5766\u5316\u3092\u53ef\u80fd\u306b\u3059\u308b\u6db2\u4f53\u5316\u5b66\u6a5f\u68b0\u5a92\u4f53\u3067\u3059\u3002\u5316\u5b66\u7684\u6a5f\u68b0\u7684\u5e73\u5766\u5316\uff08CMP\uff09\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001\u56de\u8ee2\u3059\u308b\u7814\u78e8\u30d1\u30c3\u30c9\u3068\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u9593\u306b\u5c0e\u5165\u3055\u308c\u308b\u3001\u6ce8\u610f\u6df1\u304f\u8a2d\u8a08\u3055\u308c\u305f\u6c34\u6027\u30b3\u30ed\u30a4\u30c9\u61f8\u6fc1\u6db2\u3067\u3059\u3002\u5358\u7d14\u306a\u7814\u78e8\u5264\u306b\u3088\u308b\u7814\u78e8\u3068\u306f\u7570\u306a\u308a\u3001CMP\u30b9\u30e9\u30ea\u30fc\u306f2\u3064\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\u3092\u540c\u6642\u306b\u517c\u306d\u5099\u3048\u3066\u3044\u307e\u3059\uff1a <strong>\u5316\u5b66\u8edf\u5316<\/strong> \u53cd\u5fdc\u5316\u5b66\u306b\u3088\u308b\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u6539\u8cea\u3068 <strong>\u6a5f\u68b0\u7684\u6750\u6599\u9664\u53bb<\/strong> \u7825\u7c92\u306e\u63a5\u89e6\u3068\u6d41\u4f53\u529b\u5b66\u7684\u305b\u3093\u65ad\u529b\u306b\u3088\u3063\u3066\u3002.<\/p>\n  <p>\u3053\u306e\u4e8c\u91cd\u306e\u4f5c\u7528\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u3088\u308a\u3001CMP\u306f\u3001\u30b0\u30ed\u30fc\u30d0\u30eb\u306a\u5e73\u5766\u6027\u3068\u9ad8\u3044\u9078\u629e\u6027\u306e\u4e21\u65b9\u3092\u9054\u6210\u3059\u308b\u30e6\u30cb\u30fc\u30af\u306a\u80fd\u529b\u3092\u5099\u3048\u3066\u3044\u307e\u3059\u3002\u30a6\u30a7\u30fc\u30cf\u30ec\u30d9\u30eb\u306e\u30d7\u30ed\u30bb\u30b9\u3067\u3001\u3053\u306e\u3088\u3046\u306a\u80fd\u529b\u3092\u4f75\u305b\u6301\u3064\u3082\u306e\u306f\u4ed6\u306b\u306a\u304f\u3001CMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u6700\u3082\u6280\u8853\u7684\u306b\u8907\u96d1\u306a\u6d88\u8017\u54c1\u306e\u4e00\u3064\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n  <p>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u6027\u80fd\u306f\u3001\u540c\u6642\u306b\u3059\u3079\u3066\u3092\u6e80\u8db3\u3055\u305b\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u591a\u6b21\u5143\u7684\u306a\u4ed5\u69d8\u306b\u3088\u3063\u3066\u5b9a\u7fa9\u3055\u308c\u307e\u3059\u3002\u9ad8\u3044\u6750\u6599\u9664\u53bb\u7387\uff08MRR\uff09\u3092\u9054\u6210\u3057\u306a\u304c\u3089\u3082\u3001\u8a31\u5bb9\u3067\u304d\u306a\u3044\u30b9\u30af\u30e9\u30c3\u30c1\u6570\u3092\u767a\u751f\u3055\u305b\u308b\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u5546\u696d\u7684\u306b\u6210\u7acb\u3057\u307e\u305b\u3093\u3002\u540c\u69d8\u306b\u3001\u6b20\u9665\u6027\u80fd\u306f\u512a\u308c\u3066\u3044\u308b\u304c\u9078\u629e\u6027\u304c\u4e0d\u5341\u5206\u306a\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u5468\u8fba\u819c\u306e\u4fb5\u98df\u3092\u5f15\u304d\u8d77\u3053\u3059\u3002\u3053\u308c\u3089\u306e\u30c8\u30ec\u30fc\u30c9\u30aa\u30d5\u3092\u3046\u307e\u304f\u8abf\u6574\u3059\u308b\u3053\u3068\u304c\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316\u306e\u4e2d\u5fc3\u7684\u8ab2\u984c\u3067\u3059\u3002.<\/p>\n\n  <div class=\"jz-stats\">\n    <div class=\"jz-stat\"><div class=\"n\">~$5.8B<\/div><div class=\"l\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u4e16\u754c\u5e02\u5834\u30012026\u5e74\u306e\u63a8\u5b9a\u5024<\/div><\/div>\n    <div class=\"jz-stat\"><div class=\"n\">8-10%<\/div><div class=\"l\">AI\u3068\u5148\u9032\u30ce\u30fc\u30c9\u304c\u727d\u5f15\u3059\u308b2030\u5e74\u307e\u3067\u306e\u5e74\u5e73\u5747\u6210\u9577\u7387\u4e88\u6e2c<\/div><\/div>\n    <div class=\"jz-stat\"><div class=\"n\">30-60<\/div><div class=\"l\">\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30ed\u30b8\u30c3\u30af\u30fb\u30a6\u30a7\u30fc\u30cf1\u679a\u3042\u305f\u308a\u306eCMP\u30b9\u30c6\u30c3\u30d7 - \u305d\u308c\u305e\u308c\u306b\u7279\u5b9a\u306e\u30b9\u30e9\u30ea\u30fc\u304c\u5fc5\u8981<\/div><\/div>\n    <div class=\"jz-stat\"><div class=\"n\">&lt;50ppb\u672a\u6e80<\/div><div class=\"l\">\u6700\u5148\u7aef\u30b2\u30fc\u30c8CMP\u30b9\u30e9\u30ea\u30fc\u306e\u91d1\u5c5e\u4e0d\u7d14\u7269\u5236\u9650<\/div><\/div>\n  <\/div>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<!-- Section 2 -->\n<section id=\"slurry-anatomy\">\n  <h2>2.CMP\u30b9\u30e9\u30ea\u30fc\u306e\u69cb\u9020\uff1a\u4e3b\u8981\u6210\u5206\u306e\u8aac\u660e<\/h2>\n  <p>\u3069\u306eCMP\u30b9\u30e9\u30ea\u30fc\u88fd\u5264\u3082\u3001\u305d\u306e\u5bfe\u8c61\u7528\u9014\u306b\u304b\u304b\u308f\u3089\u305a\u3001\u540c\u3058\u57fa\u672c\u6210\u5206\u30af\u30e9\u30b9\u304b\u3089\u4f5c\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u5404\u6210\u5206\u304c\u4f55\u3092\u3059\u308b\u306e\u304b\u3001\u305d\u3057\u3066\u4ed6\u306e\u6210\u5206\u3068\u3069\u306e\u3088\u3046\u306b\u76f8\u4e92\u4f5c\u7528\u3059\u308b\u306e\u304b\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u306f\u3001\u6027\u80fd\u306b\u95a2\u3059\u308b\u554f\u984c\u306e\u30c8\u30e9\u30d6\u30eb\u30b7\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u3084\u3001\u7af6\u5408\u88fd\u54c1\u3092\u8a55\u4fa1\u3059\u308b\u969b\u306b\u5341\u5206\u306a\u60c5\u5831\u3092\u5f97\u305f\u4e0a\u3067\u6c7a\u65ad\u3092\u4e0b\u3059\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002.<\/p>\n\n  <div class=\"jz-grid2\">\n    <div class=\"jz-card\">\n      <h4>\u7814\u78e8\u7c92\u5b50<\/h4>\n      <ul>\n        <li>\u7269\u7406\u7684\u306a\u6750\u6599\u9664\u53bb\u3092\u884c\u3046\u3002<\/li>\n        <li>\u6700\u3082\u4e00\u822c\u7684\u306a\u30bf\u30a4\u30d7\uff1a\u30bb\u30ea\u30a2\uff08CeO\u2082\uff09\u3001\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\uff08SiO\u2082\uff09\u3001\u30a2\u30eb\u30df\u30ca\uff08Al\u2082O\u2083\uff09<\/li>\n        <li>\u7c92\u5b50\u5f84\u306f\u901a\u5e3820\uff5e150nm\u3001\u5206\u5e03\u5e45\uff08PDI\uff09\u306f\u53b3\u5bc6\u306b\u5236\u5fa1\u3055\u308c\u3066\u3044\u308b\u3002<\/li>\n        <li>\u6fc3\u5ea6\u306f\u901a\u5e380.5\uff5e10wt%\uff1b\u9ad8\u6fc3\u5ea6\u2260\u5e38\u306b\u9ad8MRR<\/li>\n        <li>\u8868\u9762\u96fb\u8377\uff08\u30bc\u30fc\u30bf\u96fb\u4f4d\uff09\u306f\u30b3\u30ed\u30a4\u30c9\u306e\u5b89\u5b9a\u6027\u3068\u30d1\u30c3\u30c9\u306e\u76f8\u4e92\u4f5c\u7528\u3092\u652f\u914d\u3059\u308b<\/li>\n      <\/ul>\n    <\/div>\n    <div class=\"jz-card\">\n      <h4>\u9178\u5316\u5264<\/h4>\n      <ul>\n        <li>\u91d1\u5c5e\u3084\u8a98\u96fb\u4f53\u819c\u306e\u8868\u9762\u3068\u53cd\u5fdc\u3057\u3001\u3088\u308a\u67d4\u3089\u304b\u3044\u9178\u5316\u819c\u3092\u5f62\u6210\u3059\u308b\u3002<\/li>\n        <li>H\u2082O\u2082\uff08\u904e\u9178\u5316\u6c34\u7d20\uff09\uff1aCu CMP\u306e\u6a19\u6e96\u3002<\/li>\n        <li>KIO\u2083\u3001Fe(NO\u2083)\u2083\uff1a\u4e00\u90e8\u306e\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u30b9\u30e9\u30ea\u30fc\u88fd\u5264\u306b\u4f7f\u7528\u3002<\/li>\n        <li>\u6fc3\u5ea6\u3092\u53b3\u5bc6\u306b\u7ba1\u7406\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b - \u9ad8\u3059\u304e\u308b\u3068\u904e\u5ea6\u306e\u8150\u98df\u3092\u5f15\u304d\u8d77\u3053\u3059<\/li>\n        <li>\u5b89\u5b9a\u6027\u3092\u6700\u5927\u5316\u3059\u308b\u305f\u3081\u3001\u4e00\u90e8\u306e\u30b9\u30e9\u30ea\u30fc\u30b7\u30b9\u30c6\u30e0\u3067\u306f\u4f7f\u7528\u6642\u306b\u6dfb\u52a0\u3059\u308b\u3002<\/li>\n      <\/ul>\n    <\/div>\n    <div class=\"jz-card\">\n      <h4>\u932f\u5316\uff0f\u30ad\u30ec\u30fc\u30c8\u5264<\/h4>\n      <ul>\n        <li>\u53ef\u6eb6\u6027\u91d1\u5c5e\u932f\u4f53\u3092\u5f62\u6210\u3057\u3001\u9664\u53bb\u3057\u305f\u7269\u8cea\u306e\u518d\u6790\u51fa\u3092\u9632\u3050<\/li>\n        <li>\u30af\u30a8\u30f3\u9178\u3001\u30b0\u30ea\u30b7\u30f3\u3001\u9285CMP\u306b\u3088\u304f\u4f7f\u308f\u308c\u308b\u30a2\u30df\u30ce\u9178<\/li>\n        <li>\u91cd\u91d1\u5c5e\u30a4\u30aa\u30f3\u5c01\u9396\u306e\u305f\u3081\u306eEDTA\u304a\u3088\u3073\u985e\u4f3c\u54c1<\/li>\n        <li>\u6fc3\u5ea6\u3068pH\u304c\u932f\u5f62\u6210\u52b9\u7387\u3092\u6c7a\u5b9a\u3059\u308b<\/li>\n        <li>\u5b8c\u5168\u306a\u9664\u53bb\u3092\u78ba\u5b9f\u306b\u3059\u308b\u305f\u3081\u3001CMP\u5f8c\u306e\u6e05\u6d44\u5316\u5b66\u7269\u8cea\u3068\u4e92\u63db\u6027\u304c\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002<\/li>\n      <\/ul>\n    <\/div>\n    <div class=\"jz-card\">\n      <h4>\u8150\u98df\u9632\u6b62\u5264<\/h4>\n      <ul>\n        <li>\u91d1\u5c5e\u8868\u9762\u306b\u8584\u3044\u4fdd\u8b77\u819c\u3092\u5f62\u6210\u3057\u3001\u30aa\u30fc\u30d0\u30fc\u30a8\u30c3\u30c1\u30f3\u30b0\u3084\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u30a2\u30bf\u30c3\u30af\u3092\u6291\u5236\u3059\u308b\u3002<\/li>\n        <li>BTA\uff08\u30d9\u30f3\u30be\u30c8\u30ea\u30a2\u30be\u30fc\u30eb\uff09\uff1a\u9285CMP\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u306e\u696d\u754c\u6a19\u6e96<\/li>\n        <li>TTZ\uff08\u30c8\u30ea\u30eb\u30c8\u30ea\u30a2\u30be\u30fc\u30eb\uff09\u3001\u30b3\u30d0\u30eb\u30c8\u304a\u3088\u3073\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb\u306b\u4f7f\u7528\u3055\u308c\u308b\u30a4\u30df\u30c0\u30be\u30fc\u30eb\u8a98\u5c0e\u4f53<\/li>\n        <li>\u96c6\u4e2d\u529b\u306f\u3001\u4fdd\u8b77\u3068MRR\u6291\u5236\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u53d6\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002<\/li>\n        <li>\u819c\u5f62\u6210\u901f\u5ea6\u8ad6\u306f\u30d1\u30c3\u30c9\u3068\u30a6\u30a7\u30cf\u30fc\u306e\u63a5\u89e6\u6642\u9593\u3068\u4e00\u81f4\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044<\/li>\n      <\/ul>\n    <\/div>\n    <div class=\"jz-card\">\n      <h4>pH\u30d0\u30c3\u30d5\u30a1\u30fc\u30b7\u30b9\u30c6\u30e0<\/h4>\n      <ul>\n        <li>\u30b9\u30e9\u30ea\u30fc\u6d74\u306e\u5bff\u547d\u3068\u30c4\u30fc\u30eb\u4e0a\u3067\u306e\u6ede\u7559\u671f\u9593\u4e2d\u3001\u5b89\u5b9a\u3057\u305fpH\u3092\u7dad\u6301\u3059\u308b\u3002<\/li>\n        <li>pH\u7bc4\u56f2\uff1a2\uff5e4\uff08\u9178\u6027\u3001W\/Co\uff09\u30017\uff5e9\uff08\u4e2d\u6027\/\u30a2\u30eb\u30ab\u30ea\u6027\u3001\u9178\u5316\u7269\/\u9285\uff09\u300110\uff5e12\uff08\u30a2\u30eb\u30ab\u30ea\u6027\u3001STI\uff09<\/li>\n        <li>pH\u30c9\u30ea\u30d5\u30c8\u304c\u00b10.5\u306e\u5834\u5408\u3001\u8457\u3057\u3044MRR\u30b7\u30d5\u30c8\u3068\u9078\u629e\u6027\u306e\u5909\u5316\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002<\/li>\n        <li>\u30a2\u30f3\u30e2\u30cb\u30a2\u3001KOH\u3001HNO\u2083\u3001\u30af\u30a8\u30f3\u9178\u306f\u4e00\u822c\u7684\u306b\u8abf\u6574\u5264\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u308b\u3002<\/li>\n      <\/ul>\n    <\/div>\n    <div class=\"jz-card\">\n      <h4>\u754c\u9762\u6d3b\u6027\u5264\u30fb\u5206\u6563\u5264<\/h4>\n      <ul>\n        <li>\u7c92\u5b50\u306e\u51dd\u96c6\u3092\u9632\u304e\u3001\u30b3\u30ed\u30a4\u30c9\u306e\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3059\u308b\u3002<\/li>\n        <li>\u30a2\u30cb\u30aa\u30f3\u6027\u3001\u30ab\u30c1\u30aa\u30f3\u6027\u3001\u975e\u30a4\u30aa\u30f3\u6027\u30bf\u30a4\u30d7\u3092\u30b9\u30e9\u30ea\u30fcpH\u306b\u5fdc\u3058\u3066\u9078\u629e\u3059\u308b\u3002<\/li>\n        <li>\u4e21\u89aa\u5a92\u6027\u754c\u9762\u6d3b\u6027\u5264\u3082\u30d1\u30c3\u30c9\u8868\u9762\u3092\u6fe1\u3089\u3057\u3001\u30b9\u30e9\u30ea\u30fc\u3092\u5747\u4e00\u306b\u5206\u6563\u3055\u305b\u307e\u3059\u3002<\/li>\n        <li>\u904e\u5270\u306a\u754c\u9762\u6d3b\u6027\u5264\u306f\u3001\u7814\u78e8\u5264\u3068\u8868\u9762\u306e\u63a5\u89e6\u3092\u59a8\u3052\u308b\u3053\u3068\u306b\u3088\u308a\u3001MRR\u3092\u4f4e\u4e0b\u3055\u305b\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002<\/li>\n        <li>CMP\u5f8c\u306e\u6d17\u6d44\u3067\u3001\u6709\u6a5f\u6b8b\u7559\u7269\u3092\u6b8b\u3055\u305a\u306b\u9664\u53bb\u3067\u304d\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002<\/li>\n      <\/ul>\n    <\/div>\n  <\/div>\n\n  <div class=\"jz-fact\">\n    <strong>\u91cd\u8981\u306a\u6d1e\u5bdf<\/strong> \u751f\u7523\u5de5\u7a0b\u306b\u304a\u3051\u308bCMP\u30b9\u30e9\u30ea\u30fc\u306e\u6027\u80fd\u3070\u3089\u3064\u304d\u306e\u6700\u3082\u4e00\u822c\u7684\u306a\u539f\u56e0\u306f\u3001\u4f9b\u7d66\u3055\u308c\u305f\u307e\u307e\u306e\u914d\u5408\u3067\u306f\u306a\u304f\u3001\u6e29\u5ea6\u504f\u5dee\u3001\u5e0c\u91c8\u30a8\u30e9\u30fc\u3001\u30b9\u30e9\u30ea\u30fc\u30e9\u30a4\u30f3\u306e\u7d4c\u5e74\u52a3\u5316\u3001\u4e0d\u9069\u5207\u306a\u518d\u5faa\u74b0\u7ba1\u7406\u306a\u3069\u306b\u8d77\u56e0\u3059\u308b\u5de5\u5177\u4e0a\u3067\u306e\u52a3\u5316\u3067\u3059\u3002\u6d74\u7ba1\u7406\u30d7\u30ed\u30c8\u30b3\u30eb\u304c\u53b3\u683c\u306b\u5b88\u3089\u308c\u3066\u3044\u306a\u3044\u5834\u5408\u3001\u5de5\u5177\u4e0a\u3067\u306e\u30b9\u30e9\u30ea\u30fc\u6027\u80fd\u306f\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306e\u8a8d\u5b9a\u30c7\u30fc\u30bf\u3068\u5927\u304d\u304f\u4e56\u96e2\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.\n  <\/div>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<!-- Section 3 -->\n<section id=\"slurry-types\">\n  <h2>3.CMP\u30b9\u30e9\u30ea\u30fc\u306e\u7528\u9014\u5225\u30bf\u30a4\u30d7<\/h2>\n  <p>CMP\u30b9\u30e9\u30ea\u30fc\u306b\u4e92\u63db\u6027\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u30bf\u30fc\u30b2\u30c3\u30c8\u30d5\u30a3\u30eb\u30e0\u3001\u4e0b\u5c64\u306e\u30b9\u30c8\u30c3\u30d7\u5c64\u3001\u30c7\u30d0\u30a4\u30b9\u69cb\u9020\u3001\u304a\u3088\u3073\u6027\u80fd\u8981\u4ef6\u306b\u3088\u3063\u3066\u5b9a\u7fa9\u3055\u308c\u308b\u5404\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u306f\u3001\u5c02\u7528\u306e\u30b9\u30e9\u30ea\u30fc\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u304c\u8981\u6c42\u3055\u308c\u307e\u3059\u3002\u4ee5\u4e0b\u306e\u8868\u306f\u3001\u6700\u65b0\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u4f7f\u7528\u3055\u308c\u308b\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u3092\u7db2\u7f85\u3057\u305f\u30ea\u30d5\u30a1\u30ec\u30f3\u30b9\u30de\u30c3\u30d7\u3067\u3059\u3002.<\/p>\n\n  <div class=\"jz-table-wrap\">\n    <table class=\"jz-table\">\n      <thead>\n        <tr><th>\u30b9\u30e9\u30ea\u30fc\u90e8\u9580<\/th><th>\u30bf\u30fc\u30b2\u30c3\u30c8\u30d5\u30a3\u30eb\u30e0<\/th><th>\u30b9\u30c8\u30c3\u30d7\u30ec\u30a4\u30e4\u30fc<\/th><th>\u7814\u78e8\u5264<\/th><th>pH\u7bc4\u56f2<\/th><th>\u4e3b\u8981\u306a\u9078\u629e\u6027\u306e\u8981\u4ef6<\/th><\/tr>\n      <\/thead>\n      <tbody>\n        <tr><td><strong>STI \u9178\u5316\u7269<\/strong><\/td><td>SiO\u2082\uff08HDP\u3001TEOS\uff09<\/td><td>Si\u2083N<\/td><td>\u30bb\u30ea\u30a2<\/td><td>5-9<\/td><td>SiO\u2082:SiN &gt; 100:1<\/td><\/tr>\n        <tr><td><strong>ILD\u5e73\u5766\u5316<\/strong><\/td><td>SiO\u2082\u3001FSG\u3001USG<\/td><td>\u306a\u3057\uff08\u6642\u9593\u5236\uff09<\/td><td>\u30bb\u30ea\u30a2\u307e\u305f\u306f\u30b7\u30ea\u30ab<\/td><td>7-10<\/td><td>\u5747\u4e00\u306a\u9664\u53bb\u7387<\/td><\/tr>\n        <tr><td><strong>\u30d7\u30ec\u30e1\u30bf\u30eb\u8a98\u96fb\u4f53<\/strong><\/td><td>BPSG\u3001PSG<\/td><td>Si\u3001\u30dd\u30eaSi<\/td><td>\u30b7\u30ea\u30ab<\/td><td>8-11<\/td><td>SiO\u2082:Si &gt; 50:1<\/td><\/tr>\n        <tr><td><strong>\u9285\u306e\u30d0\u30eb\u30af\uff08\u30b9\u30c6\u30c3\u30d71\uff09<\/strong><\/td><td>\u9285<\/td><td>\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb<\/td><td>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab<\/td><td>4-8<\/td><td>\u9285\uff1a\u30d0\u30ea\u30a2\uff1e50\uff1a1<\/td><\/tr>\n        <tr><td><strong>\u30d0\u30ea\u30a2\u30af\u30ea\u30a2\uff08\u30b9\u30c6\u30c3\u30d72\uff09<\/strong><\/td><td>Ta\/TaN\u3001TiN\u3001Co\u3001Ru<\/td><td>SiO\u2082<\/td><td>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab<\/td><td>5-9<\/td><td>\u30d0\u30ea\u30a2\u30fc\uff1a\u9178\u5316\u7269\u22521:1-5:1<\/td><\/tr>\n        <tr><td><strong>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3<\/strong><\/td><td>W<\/td><td>TiN, SiO\u2082<\/td><td>\u30a2\u30eb\u30df\u30ca\u307e\u305f\u306f\u30b7\u30ea\u30ab<\/td><td>2-5<\/td><td>W:TiN &gt; 20:1<\/td><\/tr>\n        <tr><td><strong>\u30b3\u30d0\u30eb\u30c8\u63a5\u70b9<\/strong><\/td><td>Co<\/td><td>TiN\u3001\u8a98\u96fb\u4f53<\/td><td>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab<\/td><td>4-7<\/td><td>\u30b3\u30d0\u30eb\u30c8:\u8a98\u96fb\u4f53 5:1-20:1<\/td><\/tr>\n        <tr><td><strong>\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3<\/strong><\/td><td>\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3<\/td><td>SiO\u2082, SiN<\/td><td>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab<\/td><td>9-12<\/td><td>Poly-Si:SiO\u2082\u30c1\u30e5\u30fc\u30ca\u30d6\u30eb<\/td><\/tr>\n        <tr><td><strong>\u6d45\u3044\u30dd\u30ea\uff0f\u30b2\u30fc\u30c8<\/strong><\/td><td>\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\uff08\u8584\u578b\uff09<\/td><td>\u9ad8\u8a98\u96fb\u7387\u8a98\u96fb\u4f53<\/td><td>\u5e0c\u91c8\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab<\/td><td>9-11<\/td><td>\u8d85\u4f4e\u30c0\u30e1\u30fc\u30b8\u8981\u4ef6<\/td><\/tr>\n        <tr><td><strong>\u30eb\u30c6\u30cb\u30a6\u30e0<\/strong><\/td><td>\u30eb<\/td><td>\u8a98\u96fb\u4f53<\/td><td>\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\uff0b\u9178\u5316\u5264<\/td><td>3-6<\/td><td>\u65b0\u8208\uff1b\u5316\u5b66\u306e\u6210\u719f<\/td><\/tr>\n        <tr><td><strong>\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30fb\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0<\/strong><\/td><td>SiO\u2082, SiCN<\/td><td>\u306a\u3057\uff08\u6700\u7d42\u9762\uff09<\/td><td>\u8d85\u9ad8\u7d14\u5ea6\u30b7\u30ea\u30ab<\/td><td>7-9<\/td><td>0.3nm\u4ee5\u4e0b\u306eRa\u304c\u5fc5\u8981<\/td><\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<!-- Section 4 -->\n<section id=\"oxide-slurry\">\n  <h2>4.\u9178\u5316\u7269\u3068STI\u30b9\u30e9\u30ea\u30fc\u306e\u30c7\u30a3\u30fc\u30d7\u30fb\u30c0\u30a4\u30d6<\/h2>\n  <p>\u9178\u5316\u819cCMP\u3001\u7279\u306b\u30b7\u30e3\u30ed\u30fc\u30c8\u30ec\u30f3\u30c1\u30fb\u30a2\u30a4\u30bd\u30ec\u30fc\u30b7\u30e7\u30f3\uff08STI\uff09\u306e\u5e73\u5766\u5316\u306f\u3001CMP\u30b9\u30e9\u30ea\u30fc\u306e\u5358\u4e00\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3068\u3057\u3066\u306f\u6700\u5927\u306e\u5206\u91ce\u3067\u3042\u308b\u3002STI\u306f\u3001\u96a3\u63a5\u3059\u308b\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u9593\u306e\u7d76\u7e01\u9818\u57df\u3092\u5b9a\u7fa9\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u3067\u3001FEOL\u30b7\u30fc\u30b1\u30f3\u30b9\u306e\u4e00\u756a\u6700\u521d\u306b\u5b9f\u884c\u3055\u308c\u307e\u3059\u3002\u6027\u80fd\u8981\u4ef6\u306f\u53b3\u3057\u3044\uff1aSi\u2083N_2084\u30cf\u30fc\u30c9\u30de\u30b9\u30af\u4e0a\u3067\u9ad8\u3044\u7cbe\u5ea6\u3068\u9078\u629e\u6027\u3067\u505c\u6b62\u3057\u306a\u304c\u3089\u3001SiO\u2082\u3092300mm\u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u3067\u8fc5\u901f\u304b\u3064\u5747\u4e00\u306b\u9664\u53bb\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n  <h3>\u30bb\u30ea\u30a2\u304cSTI CMP\u3092\u652f\u914d\u3059\u308b\u7406\u7531<\/h3>\n  <p>\u9178\u5316\u30bb\u30ea\u30a6\u30e0\uff08CeO\u2082\uff09\u7814\u78e8\u6750\u306f\u3001STI\u30b9\u30e9\u30ea\u30fc\u306b\u6700\u9069\u306a\u6750\u6599\u3067\u3059\u3002 <em>\u5316\u5b66\u7684\u6b6f\u7259\u52b9\u679c<\/em>. .\u30b7\u30ea\u30ab\u3084\u30a2\u30eb\u30df\u30ca\u3068\u306f\u7570\u306a\u308a\u3001\u30bb\u30ea\u30a2\u7c92\u5b50\u306f\u63a5\u89e6\u754c\u9762\u3067\u4e8c\u9178\u5316\u30b1\u30a4\u7d20\u3068\u76f4\u63a5Ce-O-Si\u8868\u9762\u7d50\u5408\u3092\u5f62\u6210\u3059\u308b\u3002\u3053\u306e\u5316\u5b66\u7d50\u5408\u30e1\u30ab\u30cb\u30ba\u30e0\u306f\u3001\u3053\u306e\u53cd\u5fdc\u306b\u540c\u7a0b\u5ea6\u306b\u306f\u95a2\u4e0e\u3057\u306a\u3044Si\u2083N_2084\u3068\u6bd4\u8f03\u3057\u3066\u3001SiO\u2082\u306e\u9664\u53bb\u901f\u5ea6\u3092\u5287\u7684\u306b\u5897\u52a0\u3055\u305b\u308b\u3002\u305d\u306e\u7d50\u679c\u3001\u6700\u9069\u5316\u3055\u308c\u305f\u6761\u4ef6\u4e0b\u3067\u306f100:1\u3092\u8d85\u3048\u308b\u81ea\u7136SiO\u2082:Si\u2083N\u2084\u9078\u629e\u6027\u304c\u5f97\u3089\u308c\u3001\u30b7\u30ea\u30ab\u30d9\u30fc\u30b9\u306e\u30b9\u30e9\u30ea\u30fc\u304c\u9054\u6210\u3067\u304d\u308b\u5024\u3092\u306f\u308b\u304b\u306b\u8d85\u3048\u308b\u3002.<\/p>\n\n  <div class=\"jz-grid2\">\n    <div class=\"jz-card\">\n      <h4>\u30bb\u30ea\u30a2STI\u30b9\u30e9\u30ea\u30fc\u306e\u5229\u70b9<\/h4>\n      <ul>\n        <li>\u6dfb\u52a0\u5264\u306a\u3057\u3067\u9ad8\u3044\u56fa\u6709SiO\u2082\uff1aSiN\u9078\u629e\u6027<\/li>\n        <li>\u512a\u308c\u305f\u6bb5\u5dee\u89e3\u6d88\u52b9\u7387<\/li>\n        <li>\u5fc5\u8981\u306a\u7814\u78e8\u5264\u6fc3\u5ea6\u304c\u30b7\u30ea\u30ab\u3088\u308a\u4f4e\u3044\uff080.5\uff5e2wt%<\/li>\n        <li>CMP\u5f8c\u306e\u8868\u9762\u7c97\u3055\u304c\u826f\u597d\uff08&lt;0.15 nm Ra\u3092\u9054\u6210\u53ef\u80fd\uff09<\/li>\n        <li>\u30a2\u30d7\u30e9\u30a4\u30c9 \u30de\u30c6\u30ea\u30a2\u30eb\u30ba\u306eMirra\u304a\u3088\u3073Ebara\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u3067\u5e45\u5e83\u304f\u4f7f\u7528\u53ef\u80fd<\/li>\n      <\/ul>\n    <\/div>\n    <div class=\"jz-card\">\n      <h4>\u30bb\u30ea\u30a2STI\u30b9\u30e9\u30ea\u30fc\u306e\u8ab2\u984c<\/h4>\n      <ul>\n        <li>\u30bb\u30ea\u30a2\u7c92\u5b50\u306f\u786c\u304f\u3001\u51dd\u96c6\u3059\u308b\u3068\u30de\u30a4\u30af\u30ed\u30b9\u30af\u30e9\u30c3\u30c1\u6b20\u9665\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002<\/li>\n        <li>\u30a4\u30aa\u30f3\u6c5a\u67d3\u306b\u654f\u611f - \u6d74\u69fd\u306e\u7d14\u5ea6\u304c\u91cd\u8981<\/li>\n        <li>\u30bb\u30ea\u30a2\u306e\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306f\u4e2d\u56fd\u306e\u30ec\u30a2\u30a2\u30fc\u30b9\u751f\u7523\u306b\u5927\u304d\u304f\u4f9d\u5b58<\/li>\n        <li>\u6700\u9069\u306aCe-O-Si\u53cd\u5fdc\u306e\u305f\u3081\u306b\u306f\u3001\u6ce8\u610f\u6df1\u3044pH\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\uff08\u901a\u5e385\uff5e8\uff09\u304c\u5fc5\u8981\u3067\u3042\u308b\u3002<\/li>\n        <li>\u30d2\u30e5\u30fc\u30e0\u30c9\u30b7\u30ea\u30ab\u3084\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u306b\u6bd4\u3079\u3066\u539f\u6599\u30b3\u30b9\u30c8\u304c\u9ad8\u3044<\/li>\n      <\/ul>\n    <\/div>\n  <\/div>\n\n  <h3>\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u306e\u52b9\u679c\u3068WIWNU<\/h3>\n  <p>STI CMP\u306b\u304a\u3051\u308b\u6700\u3082\u6839\u5f37\u3044\u8ab2\u984c\u306e\u4e00\u3064\u306f\u3001\u30c0\u30a4\u5168\u4f53\u304a\u3088\u3073\u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u306e\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u306e\u3070\u3089\u3064\u304d\u306b\u8d77\u56e0\u3059\u308b\u30a6\u30a7\u30fc\u30cf\u5185\u4e0d\u5747\u4e00\u6027\uff08WIWNU\uff09\u306e\u7ba1\u7406\u3067\u3059\u3002\u9178\u5316\u819c\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u304c\u9ad8\u3044\u9818\u57df\u3067\u306f\u3001\u8ca0\u8377\u304c\u3088\u308a\u5e83\u3044\u63a5\u89e6\u9762\u7a4d\u306b\u5206\u6563\u3055\u308c\u308b\uff08\u5c40\u6240\u7684\u306a\u5727\u529b\u304c\u4f4e\u304f\u306a\u308b\uff09\u305f\u3081\u3001\u5e73\u5766\u5316\u304c\u9045\u304f\u306a\u308a\u307e\u3059\u3002\u3053\u306e\u5bc6\u5ea6\u4f9d\u5b58\u306e\u9664\u53bb\u901f\u5ea6\u306f\u3001CMP\u5f8c\u306e\u6b8b\u7559\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u30fc\u3001\u3044\u308f\u3086\u308b \u201c\u9178\u5316\u819c\u8ca0\u8377\u52b9\u679c \u201d\u306b\u3064\u306a\u304c\u308a\u307e\u3059\u3002\u201d<\/p>\n  <p>\u6700\u65b0\u306eSTI\u30b9\u30e9\u30ea\u30fc\u88fd\u5264\u306f\u3001Si\u2083N\u2084\u8868\u9762\u306b\u512a\u5148\u7684\u306b\u5438\u7740\u3059\u308b\u9078\u629e\u6027\u6dfb\u52a0\u5264\uff08\u901a\u5e38\u3001\u30a2\u30cb\u30aa\u30f3\u6027\u30dd\u30ea\u30de\u30fc\u307e\u305f\u306f\u30a2\u30df\u30ce\u9178\uff09\u306b\u3088\u3063\u3066\u3053\u306e\u554f\u984c\u306b\u5bfe\u51e6\u3057\u3001\u30bb\u30ea\u30a2\u306e\u81ea\u7136\u306a\u9078\u629e\u6027\u3092\u5897\u5e45\u3057\u3066\u3001\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u306e\u5909\u52d5\u306b\u5bfe\u3059\u308b\u30b9\u30e9\u30ea\u30fc\u306e\u5fdc\u7b54\u3092\u6539\u5584\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u6dfb\u52a0\u5264\u8abf\u6574\u30b9\u30e9\u30ea\u30fc\u3092\u3001\u5e73\u5766\u5316\u52b9\u7387\u3092\u9ad8\u3081\u308b\u305f\u3081\u306b\u8a2d\u8a08\u3055\u308c\u305f\u30d1\u30c3\u30c9\u30b7\u30b9\u30c6\u30e0\u3068\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u304c\u3001300 mm\u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u306710 nm\u672a\u6e80\u306e\u6b8b\u7559\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u30fc\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306e\u6a19\u6e96\u7684\u306a\u30a2\u30d7\u30ed\u30fc\u30c1\u3067\u3059\u3002.<\/p>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<!-- Section 5 -->\n<section id=\"copper-slurry\">\n  <h2>5.\u9285CMP\u30b9\u30e9\u30ea\u30fc\u30fb\u30c7\u30a3\u30fc\u30d7\u30fb\u30c0\u30a4\u30d6<\/h2>\n  <p>\u9285\u30c0\u30de\u30b7\u30f3 CMP \u306f\u3001180nm \u304b\u3089\u6700\u5148\u7aef\u307e\u3067\u306e\u3059\u3079\u3066\u306e\u30ed\u30b8\u30c3\u30af\u30fb\u30ce\u30fc\u30c9\u306b\u304a\u3051\u308b BEOL\uff08\u30d0\u30c3\u30af\u30fb\u30a8\u30f3\u30c9\u30fb\u30aa\u30d6\u30fb\u30e9\u30a4\u30f3\uff09\u914d\u7dda\u88fd\u9020\u306e\u4e3b\u529b\u3067\u3042\u308b 2 \u6bb5\u968e\u306e\u30d7\u30ed\u30bb\u30b9\u3067\u3059\u3002\u9285\u3001\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb\u3001\u8a98\u96fb\u4f53\u306a\u3069\u3001\u305d\u308c\u305e\u308c\u6a5f\u68b0\u7684\u30fb\u5316\u5b66\u7684\u7279\u6027\u304c\u5927\u304d\u304f\u7570\u306a\u308b\u8907\u6570\u306e\u6750\u6599\u3092\u540c\u6642\u306b\u7814\u78e8\u3059\u308b\u305f\u3081\u3001\u6700\u3082\u5316\u5b66\u7684\u306b\u8907\u96d1\u306aCMP\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u3072\u3068\u3064\u3067\u3082\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n  <h3>\u9285\u306e\u30c0\u30de\u30b7\u30f3CMP\u30b7\u30fc\u30af\u30a8\u30f3\u30b9<\/h3>\n  <div class=\"jz-steps\">\n    <div class=\"jz-step\">\n      <div class=\"jz-step-num\">1<\/div>\n      <div class=\"jz-step-body\"><p><strong>\u30d0\u30eb\u30af\u9285\u306e\u9664\u53bb\uff08\u30b9\u30c6\u30c3\u30d71\u30b9\u30e9\u30ea\u30fc\uff09\uff1a<\/strong> \u9ad8 MRR \u9285\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u96fb\u6c17\u3081\u3063\u304d\u306b\u3088\u3063\u3066\u6790\u51fa\u3057\u305f\u539a\u3044\u9285\u30aa\u30fc\u30d0\u30fc\u30d0\u30fc\u30c9\u3092\u9664\u53bb\u3057\u307e\u3059\u3002\u3053\u306e\u5de5\u7a0b\u306f\u3001\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb\u304c\u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u306b\u9732\u51fa\u3059\u308b\u307e\u3067\u884c\u308f\u308c\u307e\u3059\u3002\u76ee\u6a19MRR\uff1a\u9285\u306f300\uff5e600nm\/\u5206\u3001\u30d0\u30ea\u30a2\u306f\u30bc\u30ed\u306b\u8fd1\u3044\u3002.<\/p><\/div>\n    <\/div>\n    <div class=\"jz-step\">\n      <div class=\"jz-step-num\">2<\/div>\n      <div class=\"jz-step-body\"><p><strong>\u30d0\u30ea\u30a2\u30af\u30ea\u30a2\uff08\u30b9\u30c6\u30c3\u30d72\u306e\u30b9\u30e9\u30ea\u30fc\uff09\uff1a<\/strong> \u30d0\u30ea\u30a2\u30e1\u30bf\u30eb(Ta\/TaN\u3001TiN\u3001Co\u30e9\u30a4\u30ca\u30fc)\u306f\u6b8b\u7559\u9285\u3068\u4e00\u7dd2\u306b\u9664\u53bb\u3055\u308c\u308b\u3002\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u9285\u306e\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3068\u9178\u5316\u7269\u306e\u4fb5\u98df\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u306a\u304c\u3089\u3001\u30d0\u30ea\u30a2\u6750\u3092\u9664\u53bb\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002\u30d0\u30ea\u30a2\u3001\u9285\u3001SiO\u2082\u9593\u306e\u9078\u629e\u6027\u306f\u6ce8\u610f\u6df1\u304f\u30d0\u30e9\u30f3\u30b9\u3055\u308c\u308b\u3002.<\/p><\/div>\n    <\/div>\n    <div class=\"jz-step\">\n      <div class=\"jz-step-num\">3<\/div>\n      <div class=\"jz-step-body\"><p><strong>\u30aa\u30d7\u30b7\u30e7\u30f3\u306e\u30d0\u30d5\uff08\u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\uff0b\u5e0c\u91c8\u30b9\u30e9\u30ea\u30fc\uff09\uff1a<\/strong> \u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\u306b\u3088\u308b\u7b2c3\u306e\u4f4e\u5727\u30b9\u30c6\u30c3\u30d7\u306f\u3001\u6b8b\u7559\u30d0\u30ea\u30a2\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u3092\u9664\u53bb\u3057\u3001\u6b20\u9665\u4ed5\u69d8\u306b\u9069\u5408\u3059\u308b\u3088\u3046\u306b\u8868\u9762\u7c97\u3055\u3092\u4f4e\u6e1b\u3059\u308b\u3002\u3059\u3079\u3066\u306e\u30d7\u30ed\u30bb\u30b9\u30d5\u30ed\u30fc\u304c\u3053\u306e\u30b9\u30c6\u30c3\u30d7\u3092\u542b\u3080\u308f\u3051\u3067\u306f\u306a\u3044\u304c\u300114nm\u4ee5\u4e0b\u306e\u30ce\u30fc\u30c9\u3067\u306f\u307e\u3059\u307e\u3059\u4e00\u822c\u7684\u306b\u306a\u3063\u3066\u3044\u308b\u3002.<\/p><\/div>\n    <\/div>\n  <\/div>\n\n  <h3>\u9285CMP\u306e\u5316\u5b66\uff1aBTA\u30d0\u30e9\u30f3\u30b9<\/h3>\n  <p>\u9285 CMP \u30b9\u30e9\u30ea\u30fc\u306e\u5316\u5b66\u7684\u6027\u8cea\u306f\u3001\u51f9\u90e8\u306e\u9285\u8868\u9762\u3092\u30aa\u30fc\u30d0\u30fc\u30a8\u30c3\u30c1\u30f3\u30b0\u304b\u3089\u5b88\u308a\u306a\u304c\u3089\u3001\u540c\u6642\u306b\u9ad8\u3044\u9285 MRR \u3092\u9054\u6210\u3057\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002\u3053\u308c\u306f3\u3064\u306e\u5316\u5b66\u6210\u5206\u306e\u76f8\u4e92\u4f5c\u7528\u306b\u3088\u3063\u3066\u9054\u6210\u3055\u308c\u307e\u3059\uff1a<\/p>\n  <ul>\n    <li><strong>H\u2082O\u2082\uff08\u9178\u5316\u5264\uff09\uff1a<\/strong> \u9285\u91d1\u5c5e\u3092\u3088\u308a\u67d4\u3089\u304b\u3044Cu\u2082O\u307e\u305f\u306fCuO\u8868\u9762\u5c64\u306b\u5909\u3048\u3001\u7814\u78e8\u5264\u3068\u306e\u63a5\u89e6\u3067\u3088\u308a\u7c21\u5358\u306b\u9664\u53bb\u3067\u304d\u308b\u3088\u3046\u306b\u3059\u308b\u3002\u9178\u5316\u5264\u6fc3\u5ea6\u306f\u9285\u306eMRR\u3092\u76f4\u63a5\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3057\u307e\u3059\u304c\u3001\u9ad8\u3059\u304e\u308b\u3068\u7814\u78e8\u3055\u308c\u305f\u9285\u306e\u8868\u9762\u306b\u8352\u308c\u3084\u5b54\u98df\u3092\u5f15\u304d\u8d77\u3053\u3057\u307e\u3059\u3002.<\/li>\n    <li><strong>BTA\/\u30a2\u30be\u30fc\u30eb\u7cfb\u963b\u5bb3\u5264\uff1a<\/strong> \u9285\u8868\u9762\u306b\u8584\u3044\u4fdd\u8b77\u819c\uff08Cu-BTA\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u819c\uff09\u3092\u5f62\u6210\u3059\u308b\u3002\u3053\u306e\u76ae\u819c\u306f\u3001\u30d1\u30c3\u30c9\u304c\u5c40\u6240\u7684\u306a\u63a5\u89e6\u5727\u529b\u3092\u304b\u3051\u308b\u90e8\u5206\uff08\u3064\u307e\u308a\u9ad8\u3044\u90e8\u5206\uff09\u306e\u307f\u3001\u7814\u78e8\u5264\u306b\u3088\u3063\u3066\u6a5f\u68b0\u7684\u306b\u9664\u53bb\u3055\u308c\u307e\u3059\u3002\u9285\u306e\u51f9\u90e8\u3067\u306f\u3001BTA\u819c\u306f\u305d\u306e\u307e\u307e\u6b8b\u308a\u3001\u3055\u3089\u306a\u308b\u30b1\u30df\u30ab\u30eb\u30fb\u30a2\u30bf\u30c3\u30af\u3092\u6291\u3048\u3001\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3092\u6291\u5236\u3057\u307e\u3059\u3002.<\/li>\n    <li><strong>\u30b0\u30ea\u30b7\u30f3\u307e\u305f\u306f\u30af\u30a8\u30f3\u9178\uff08\u932f\u5316\u5264\uff09\uff1a<\/strong> \u5316\u5b66\u7684\u306b\u9178\u5316\u3055\u308c\u305f\u9285\u5c64\u3092\u6eb6\u89e3\u3057\u3001\u53ef\u6eb6\u6027\u306e\u9285\u932f\u4f53\u3092\u5f62\u6210\u3059\u308b\u3002.<\/li>\n  <\/ul>\n\n  <div class=\"jz-warn\">\n    <div class=\"jz-warn-icon\">\u26a0\ufe0f<\/div>\n    <div class=\"jz-warn-body\">\n      <strong>\u5b89\u5b9a\u8b66\u544a\uff1a<\/strong> \u904e\u9178\u5316\u6c34\u7d20\u306f\u9ad8\u6e29\u3067\u6025\u901f\u306b\u5206\u89e3\u3057\u3001\u5fae\u91cf\u91d1\u5c5e\u30a4\u30aa\u30f3\uff08\u7279\u306bFe\u00b3\u207a\u3068Cu\u00b2\u207a\uff09\u306b\u3088\u3063\u3066\u89e6\u5a92\u7684\u306b\u5206\u89e3\u3055\u308c\u308b\u3002H\u2082O\u2082\u3092\u542b\u3080\u9285CMP\u30b9\u30e9\u30ea\u30fc\u306f\u300125\u2103\u4ee5\u4e0b\u3067\u4fdd\u7ba1\u3057\u3001\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u304c\u6307\u5b9a\u3059\u308b\u30dd\u30c3\u30c8\u30e9\u30a4\u30d5\u306e\u7bc4\u56f2\u5185\u3067\u4f7f\u7528\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002\u591a\u304f\u306e\u5de5\u5834\u3067\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u5b89\u5b9a\u6027\u3092\u6700\u5927\u5316\u3059\u308b\u305f\u3081\u306b\u3001H\u2082O\u2082\u3092\u30d7\u30ec\u30df\u30c3\u30af\u30b9\u3059\u308b\u306e\u3067\u306f\u306a\u304f\u3001\u30dd\u30a4\u30f3\u30c8\u30fb\u30aa\u30d6\u30fb\u30e6\u30fc\u30b9\uff08POU\uff09\u3067\u6dfb\u52a0\u3057\u3066\u3044\u307e\u3059\u3002\u5f53\u793e\u306e <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Slurry-Storage-Handling-Safety\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u4fdd\u7ba1\u3001\u53d6\u308a\u6271\u3044\u3001\u5b89\u5168\u6027<\/a> \u30ac\u30a4\u30c9\u3092\u53c2\u7167\u3057\u3066\u304f\u3060\u3055\u3044\u3002.\n    <\/div>\n  <\/div>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<!-- Section 6 -->\n<section id=\"tungsten-slurry\">\n  <h2>6.\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u30b9\u30e9\u30ea\u30fc\u306e\u30c7\u30a3\u30fc\u30d7\u30c0\u30a4\u30d6<\/h2>\n  <p>\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u306f\u3001\u30b3\u30f3\u30bf\u30af\u30c8\u3084\u30d3\u30a2\u69cb\u9020\u306e\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u30d7\u30e9\u30b0\u30d5\u30a3\u30eb\u3092\u5e73\u5766\u5316\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\u30021990\u5e74\u4ee3\u521d\u982d\u306b0.35 \u00b5m\u30ce\u30fc\u30c9\u3067\u5c0e\u5165\u3055\u308c\u3001\u6700\u3082\u53e4\u304f\u3001\u6700\u3082\u6210\u719f\u3057\u305fCMP\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u4e00\u3064\u3067\u3059\u3002\u305d\u306e\u6210\u719f\u306b\u3082\u304b\u304b\u308f\u3089\u305a\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u306f\u6280\u8853\u7684\u306b\u53b3\u3057\u3044\u307e\u307e\u3067\u3059\uff1a\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u30d7\u30e9\u30b0\u306e\u30aa\u30fc\u30d0\u30fc\u30dd\u30ea\u30c3\u30b7\u30e5\u307e\u305f\u306f\u30ea\u30bb\u30b9\u3092\u5f15\u304d\u8d77\u3053\u3059\u3053\u3068\u306a\u304f\u3001\u4e0b\u5c64\u306eTiN\u30d0\u30ea\u30a2\u3068SiO\u2082\u8a98\u96fb\u4f53\u306b\u505c\u6b62\u3057\u306a\u304c\u3089\u3001\u9ad8\u3044W MRR\u3092\u9054\u6210\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n  <h3>W CMP\u7528\u9178\u5316\u5264\u5316\u5b66\u30aa\u30d7\u30b7\u30e7\u30f3<\/h3>\n  <div class=\"jz-grid2\">\n    <div class=\"jz-card\">\n      <h4>H\u2082O\u2082\u30d9\u30fc\u30b9\u306e\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u30b9\u30e9\u30ea\u30fc<\/h4>\n      <ul>\n        <li>\u73fe\u5728\u306e\u751f\u7523\u73fe\u5834\u3067\u6700\u3082\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b<\/li>\n        <li>\u30af\u30ea\u30fc\u30f3\u306a\u526f\u751f\u6210\u7269\uff08H\u2082O\u306e\u307f\uff09\uff1b\u9244\u30d9\u30fc\u30b9\u306e\u30b7\u30b9\u30c6\u30e0\u3088\u308a\u3082\u53d6\u308a\u6271\u3044\u304c\u5bb9\u6613<\/li>\n        <li>W MRR: 100-300 nm\/min (\u4ee3\u8868\u7684\u306a\u6761\u4ef6)<\/li>\n        <li>TiN\u3068SiO\u2082\u306b\u5bfe\u3059\u308b\u4e2d\u7a0b\u5ea6\u306e\u9078\u629e\u6027<\/li>\n        <li>\u91d1\u5c5e\u30a4\u30aa\u30f3\u6df7\u5165\u306b\u3088\u308bH\u2082O\u2082\u5206\u89e3\u3092\u53d7\u3051\u3084\u3059\u3044<\/li>\n      <\/ul>\n    <\/div>\n    <div class=\"jz-card\">\n      <h4>Fe(NO\u2083)\u2083\u30d9\u30fc\u30b9\u306e\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u30fb\u30b9\u30e9\u30ea\u30fc<\/h4>\n      <ul>\n        <li>\u9178\u5316\u5264\u3068\u3057\u3066\u306e\u785d\u9178\u9244(III)\uff1b\u6b74\u53f2\u7684\u306b\u6700\u521d\u306eW CMP\u30b1\u30df\u30b9\u30c8\u30ea\u30fc<\/li>\n        <li>H\u2082O\u2082\u7cfb\u3088\u308a\u9ad8\u3044MRR\uff1b\u826f\u597d\u306a\u9078\u629e\u6027\u5236\u5fa1<\/li>\n        <li>\u9244\u6c5a\u67d3\u30ea\u30b9\u30af - CMP\u5f8c\u306e\u53b3\u683c\u306a\u6d17\u6d44\u304c\u5fc5\u8981<\/li>\n        <li>Fe\u6c5a\u67d3\u306b\u654f\u611f\u306a\u305f\u3081\u3001\u5148\u9032\u30ed\u30b8\u30c3\u30af\u3067\u306f\u3042\u307e\u308a\u597d\u307e\u308c\u306a\u3044<\/li>\n        <li>\u4e00\u90e8\u306e\u6210\u719f\u30ce\u30fc\u30c9\/DRAM\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u306f\u307e\u3060\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b<\/li>\n      <\/ul>\n    <\/div>\n  <\/div>\n\n  <p>\u30a2\u30eb\u30df\u30ca\u7814\u78e8\u5264\u306f\u3001\u305d\u306e\u786c\u5ea6\u3068\u3001\u9178\u5316\u5264\u306b\u3088\u3063\u3066\u5f62\u6210\u3055\u308c\u305f\u7c98\u308a\u5f37\u3044WO\u2083\u8868\u9762\u5c64\u3092\u9664\u53bb\u3059\u308b\u6709\u52b9\u6027\u304c\u8a55\u4fa1\u3055\u308c\u3001W CMP\u306e\u4f1d\u7d71\u7684\u306a\u9078\u629e\u80a2\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u30a2\u30eb\u30df\u30ca\u306e\u9ad8\u3044\u786c\u5ea6\u306f\u9ad8\u3044\u30b9\u30af\u30e9\u30c3\u30c1\u30ea\u30b9\u30af\u3092\u3082\u305f\u3089\u3059\u305f\u3081\u3001\u591a\u304f\u306e\u6700\u5148\u7aef\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u306f\u3001\u540c\u7b49\u306eMRR\u3092\u9054\u6210\u3057\u306a\u304c\u3089\u8457\u3057\u304f\u512a\u308c\u305f\u6b20\u9665\u6027\u80fd\u3092\u5b9f\u73fe\u3067\u304d\u308b\u6700\u9069\u5316\u3055\u308c\u305f\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u914d\u5408\u306b\u79fb\u884c\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<!-- Section 7 -->\n<section id=\"barrier-slurry\">\n  <h2>7.\u30d0\u30ea\u30a2\uff06\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30e1\u30bf\u30eb\u30b9\u30e9\u30ea\u30fc<\/h2>\n  <p>\u534a\u5c0e\u4f53\u6280\u8853\u304c10 nm\u4ee5\u4e0b\u306e\u30ce\u30fc\u30c9\u307e\u3067\u9032\u6b69\u3057\u305f\u73fe\u5728\u3001CMP\u306f\u5f93\u6765\u306eCu\/W\/Ti\/Ta\u7cfb\u3092\u8d85\u3048\u308b\u5e45\u5e83\u3044\u91d1\u5c5e\u3092\u6271\u308f\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002\u30d0\u30ea\u30a2\u30fb\u30b9\u30e9\u30ea\u30fc\u3068\u30cb\u30e5\u30fc\u30e1\u30bf\u30eb\u30fb\u30b9\u30e9\u30ea\u30fc\u306f\u3001CMP\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u306e\u4e2d\u3067\u6700\u3082\u6025\u901f\u306b\u9032\u5316\u3057\u3066\u3044\u308b\u30d5\u30ed\u30f3\u30c6\u30a3\u30a2\u3067\u3059\u3002.<\/p>\n\n  <h3>\u30b3\u30d0\u30eb\u30c8\uff08Co\uff09 CMP<\/h3>\n  <p>TSMC\u3068\u30b5\u30e0\u30b9\u30f3\u306e\u3044\u304f\u3064\u304b\u306e\u30d7\u30ed\u30bb\u30b9\u30d5\u30ed\u30fc\u3067\u306f\u30017nm\u4ee5\u4e0b\u306e\u30b3\u30f3\u30bf\u30af\u30c8\u304a\u3088\u3073\u30ed\u30fc\u30ab\u30eb\u914d\u7dda\u7528\u91d1\u5c5e\u3068\u3057\u3066\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306b\u4ee3\u308f\u3063\u3066\u30b3\u30d0\u30eb\u30c8\u304c\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u30b3\u30d0\u30eb\u30c8CMP\u306b\u306f\u72ec\u7279\u306e\u8ab2\u984c\u304c\u3042\u308b\uff1aCo\u306fW\u3088\u308a\u304b\u306a\u308a\u8edf\u3089\u304b\u304f\u3001TiN\u3084\u8a98\u96fb\u4f53\u819c\u3068\u306e\u754c\u9762\u3067\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u8150\u98df\u306e\u5f71\u97ff\u3092\u53d7\u3051\u3084\u3059\u3044\u3002\u30b9\u30e9\u30ea\u30fc\u306b\u306f\u3001\u7a4f\u3084\u304b\u306a\u9178\u5316\u5264\u3001\u30b3\u30d0\u30eb\u30c8\u7279\u6709\u306e\u932f\u5316\u5264\u3001\u304a\u3088\u3073MRR\u3092\u8a31\u5bb9\u3067\u304d\u306a\u3044\u30ec\u30d9\u30eb\u307e\u3067\u6291\u5236\u3057\u306a\u3044\u8150\u98df\u9632\u6b62\u5264\u3092\u914d\u5408\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n  <h3>\u30eb\u30c6\u30cb\u30a6\u30e0\uff08Ru\uff09CMP<\/h3>\n  <p>\u30eb\u30c6\u30cb\u30a6\u30e0\u306f\u30015nm \u4ee5\u4e0b\u306e\u30ce\u30fc\u30c9\u306b\u304a\u3051\u308b\u30b3\u30f3\u30bf\u30af\u30c8\u3001\u30ed\u30fc\u30ab\u30eb\u914d\u7dda\u3001\u30b2\u30fc\u30c8\u30d5\u30a3\u30eb\u7528\u306e\u65b0\u3057\u3044\u91d1\u5c5e\u3067\u3042\u308a\u3001\u30ca\u30ce\u30e1\u30fc\u30bf\u5bf8\u6cd5\u3067\u306f W \u3084 Co \u3088\u308a\u3082\u30d0\u30eb\u30af\u62b5\u6297\u7387\u304c\u512a\u308c\u3066\u3044\u308b\u3002Ru\u306eCMP\u5316\u5b66\u306f\u73fe\u5728\u3001\u7814\u7a76\u958b\u767a\u74b0\u5883\u3067\u6210\u719f\u3057\u3064\u3064\u3042\u308b\uff1aRu\u306f\u5316\u5b66\u7684\u306b\u4e00\u822c\u7684\u306a\u9178\u5316\u5264\u306b\u8010\u6027\u304c\u3042\u308a\u3001\u6709\u7528\u306aMRR\u3092\u5f97\u308b\u306b\u306f\u9178\u5316\u529b\u306e\u5f37\u3044\u9178\u6027\u74b0\u5883\uff08\u901a\u5e38\u3001pH2\uff5e4\u306eKIO\u2084\u307e\u305f\u306fCe\u7cfb\u9178\u5316\u5264\u3092\u542b\u3080\uff09\u304c\u5fc5\u8981\u3067\u3042\u308b\u3002\u4e0b\u5c64\u306e\u8a98\u96fb\u4f53\u306b\u5bfe\u3059\u308bRu\u306e\u9078\u629e\u6027\u3092\u7ba1\u7406\u3059\u308b\u3053\u3068\u306f\u3001\u4f9d\u7136\u3068\u3057\u3066\u6d3b\u767a\u306a\u958b\u767a\u5206\u91ce\u3067\u3042\u308b\u3002.<\/p>\n\n  <h3>\u30e2\u30ea\u30d6\u30c7\u30f3\uff08Mo\uff09CMP<\/h3>\n  <p>\u30e2\u30ea\u30d6\u30c7\u30f3\u306f\u30013D NAND\u306e\u30ef\u30fc\u30c9\u30e9\u30a4\u30f3\u30d5\u30a3\u30eb\u7528\u9014\u306b\u304a\u3051\u308b\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306e\u4ee3\u66ff\u3084\u3001GAA\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u30b2\u30fc\u30c8\u30e1\u30bf\u30eb\u3068\u3057\u3066\u5927\u304d\u306a\u95a2\u5fc3\u3092\u96c6\u3081\u3066\u304a\u308a\u3001\u305d\u306e\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027\u3068\u52a0\u5de5\u6a5f\u80fd\u304c\u9b45\u529b\u3068\u306a\u3063\u3066\u3044\u308b\u3002Mo CMP\u306f\u3001\u9178\u5316\u529b\u306e\u5f37\u3044\u9178\u6027\u30b9\u30e9\u30ea\u30fc\u3092\u4f7f\u7528\u3059\u308b\u3002MoO\u2083\u306e\u6eb6\u89e3\u901f\u5ea6\u8ad6\u306fpH\u306b\u654f\u611f\u3067\u3001Mo\u3068\u5468\u56f2\u306eSiO\u2082\u307e\u305f\u306fSiN\u819c\u3068\u306e\u9593\u306e\u9078\u629e\u6027\u5236\u5fa1\u306e\u305f\u3081\u306e\u30ec\u30d0\u30fc\u3092\u4f5c\u308a\u51fa\u3059\u3002.<\/p>\n\n  <p>\u3053\u308c\u3089\u3059\u3079\u3066\u306e\u91d1\u5c5e\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u7814\u78e8\u6027\u80fd\u306e\u8a73\u7d30\u306a\u6bd4\u8f03\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u306e\u95a2\u9023\u8a18\u4e8b\u3092\u53c2\u7167\u306e\u3053\u3068\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Abrasives-Ceria-vs-Silica-vs-Alumina\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u7814\u78e8\u6750\u30bb\u30ea\u30a2\u5bfe\u30b7\u30ea\u30ab\u5bfe\u30a2\u30eb\u30df\u30ca<\/a>.<\/p>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<!-- Section 8 -->\n<section id=\"selection-guide\">\n  <h2>8.\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u306e\u67a0\u7d44\u307f<\/h2>\n  <p>\u65b0\u3057\u3044\u30d7\u30ed\u30bb\u30b9\u7528\u9014\u306bCMP\u30b9\u30e9\u30ea\u30fc\u3092\u9078\u629e\u3059\u308b\u306b\u306f\u3001\u69cb\u9020\u5316\u3055\u308c\u305f\u8a55\u4fa1\u624b\u6cd5\u304c\u5fc5\u8981\u3067\u3059\u3002\u4ee5\u4e0b\u306e\u30d5\u30ec\u30fc\u30e0\u30ef\u30fc\u30af\u306f\u3001\u5927\u624b\u30d5\u30a1\u30d6\u306e\u30d7\u30ed\u30bb\u30b9\u30a8\u30f3\u30b8\u30cb\u30a2\u304c\u4f7f\u7528\u3057\u3066\u304a\u308a\u3001JEEZ\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30a8\u30f3\u30b2\u30fc\u30b8\u30e1\u30f3\u30c8\u30d7\u30ed\u30bb\u30b9\u306e\u57fa\u790e\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n  <div class=\"jz-steps\">\n    <div class=\"jz-step\">\n      <div class=\"jz-step-num\">1<\/div>\n      <div class=\"jz-step-body\"><p><strong>\u30d7\u30ed\u30bb\u30b9\u4ed5\u69d8\u306e\u30a8\u30f3\u30d9\u30ed\u30fc\u30d7\u3092\u5b9a\u7fa9\u3059\u308b\uff1a<\/strong> \u76ee\u6a19\u3068\u3059\u308b\u76ae\u819c\u3001\u30b9\u30c8\u30c3\u30d7\u5c64\u3001\u30aa\u30fc\u30d0\u30fc\u30d0\u30fc\u30c9\u306e\u539a\u3055\u3001\u76ee\u6a19\u3068\u3059\u308bMRR\u3001\u8981\u6c42\u3055\u308c\u308b\u9078\u629e\u6027\u3001WIWNU\u30d0\u30b8\u30a7\u30c3\u30c8\uff08&lt;2% 1\u03c3\u304c\u5178\u578b\u7684\uff09\u3001\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3068\u30a8\u30ed\u30fc\u30b8\u30e7\u30f3\u306e\u9650\u754c\u3001\u6700\u5927\u8a31\u5bb9\u30b9\u30af\u30e9\u30c3\u30c1\/\u6b20\u9665\u5bc6\u5ea6\u3092\u6587\u66f8\u5316\u3059\u308b\u3002\u3053\u308c\u3089\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u8a8d\u5b9a\u306e\u5408\u5426\u57fa\u6e96\u3068\u306a\u308a\u307e\u3059\u3002.<\/p><\/div>\n    <\/div>\n    <div class=\"jz-step\">\n      <div class=\"jz-step-num\">2<\/div>\n      <div class=\"jz-step-body\"><p><strong>\u5019\u88dc\u3068\u306a\u308b\u5316\u5b66\u7269\u8cea\u3092\u30b9\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u3059\u308b\uff1a<\/strong> \u76ee\u6a19\u3068\u3059\u308b\u76ae\u819c\u3068\u505c\u6b62\u5c64\u306b\u57fa\u3065\u3044\u3066\u3001\u9069\u5207\u306a\u7814\u78e8\u5264\u306e\u7a2e\u985e\u3068\u9178\u5316\u5264\u306e\u5316\u5b66\u7d44\u6210\u3092\u7279\u5b9a\u3057\u307e\u3059\u3002\u8907\u6570\u306e\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306b\u88fd\u54c1\u30c7\u30fc\u30bf\u30b7\u30fc\u30c8\u3068\u8a8d\u5b9a\u30c7\u30fc\u30bf\u30bb\u30c3\u30c8\u3092\u8981\u6c42\u3059\u308b\u3002\u540c\u7b49\u306e\u30c4\u30fc\u30eb\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u304b\u3089\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u30de\u30c3\u30c1\u3057\u305f\u30c7\u30fc\u30bf\u3092\u63d0\u4f9b\u3067\u304d\u308b\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3092\u512a\u5148\u3059\u308b\u3002.<\/p><\/div>\n    <\/div>\n    <div class=\"jz-step\">\n      <div class=\"jz-step-num\">3<\/div>\n      <div class=\"jz-step-body\"><p><strong>\u30d6\u30e9\u30f3\u30b1\u30c3\u30c8\u30a6\u30a7\u30cf\u30fcDOE\u306e\u5b9f\u65bd\uff1a<\/strong> \u30d6\u30e9\u30f3\u30b1\u30c3\u30c8\u819c\u306eMRR\u3001WIWNU\u3001\u8868\u9762\u5f62\u72b6\uff08AFM\u7c97\u3055\uff09\u3092\u3001\u4e3b\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u5909\u6570\uff08\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3001\u30d7\u30e9\u30c6\u30f3\u901f\u5ea6\u3001\u30b9\u30e9\u30ea\u30fc\u6d41\u91cf\u3001\u30d1\u30c3\u30c9\u30bf\u30a4\u30d7\u3001\u30b9\u30e9\u30ea\u30fc\u6fc3\u5ea6\uff09\u306e\u95a2\u6570\u3068\u3057\u3066\u8a55\u4fa1\u3002\u76ee\u6a19\u3068\u3059\u308bMRR\u3068\u5747\u4e00\u6027\u306e\u305f\u3081\u306b\u3001\u30d7\u30ec\u30b9\u30c8\u30f3\u30b9\u30da\u30fc\u30b9\u5185\u306e\u30b9\u30a4\u30fc\u30c8\u30b9\u30dd\u30c3\u30c8\u3092\u7279\u5b9a\u3057\u307e\u3059\u3002.<\/p><\/div>\n    <\/div>\n    <div class=\"jz-step\">\n      <div class=\"jz-step-num\">4<\/div>\n      <div class=\"jz-step-body\"><p><strong>\u30d1\u30bf\u30fc\u30f3\u5316\u3055\u308c\u305f\u30a6\u30a7\u30cf\u306e\u8a55\u4fa1\uff1a<\/strong> \u30d1\u30bf\u30fc\u30f3\u5316\u3055\u308c\u305f\u8a8d\u5b9a\u30a6\u30a7\u30fc\u30cf\uff08SEMATECH 854\/956\u30de\u30b9\u30af\u307e\u305f\u306f\u540c\u7b49\u54c1\uff09\u4e0a\u3067\u5019\u88dc\u30b9\u30e9\u30ea\u30fc\u3092\u5b9f\u884c\u3057\u3001\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u3068\u30d5\u30a3\u30fc\u30c1\u30e3\u30b5\u30a4\u30ba\u306e\u7bc4\u56f2\u306b\u308f\u305f\u3063\u3066\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3001\u30a8\u30ed\u30fc\u30b8\u30e7\u30f3\u3001\u6b8b\u7559\u3092\u6e2c\u5b9a\u3057\u307e\u3059\u3002\u7d50\u679c\u3092\u4ed5\u69d8\u9650\u754c\u3068\u6bd4\u8f03\u3057\u307e\u3059\u3002.<\/p><\/div>\n    <\/div>\n    <div class=\"jz-step\">\n      <div class=\"jz-step-num\">5<\/div>\n      <div class=\"jz-step-body\"><p><strong>\u6b20\u9665\u3068\u6c5a\u67d3\u306e\u7279\u6027\u8a55\u4fa1\uff1a<\/strong> \u30d5\u30eb\u30a6\u30a7\u30fc\u30cf\u6b20\u9665\u691c\u67fb\uff08KLA 2930\u307e\u305f\u306f\u540c\u7b49\u54c1\uff09\u304a\u3088\u3073\u5fae\u91cf\u91d1\u5c5e\u5206\u6790\u306e\u305f\u3081\u306eVPD-ICPMS\u3092\u5b9f\u884c\u3059\u308b\u3002\u91d1\u5c5e\u4e0d\u7d14\u7269\u30ec\u30d9\u30eb\u3092\u3001\u95a2\u9023\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u30ec\u30d9\u30eb\u306eITRS\/IRDS\u8981\u4ef6\u3068\u6bd4\u8f03\u3059\u308b\uff08FEOL\u30b2\u30fc\u30c8CMP\u304c\u6700\u3082\u53b3\u3057\u3044\u5236\u9650\u3092\u6301\u3064\uff09\u3002.<\/p><\/div>\n    <\/div>\n    <div class=\"jz-step\">\n      <div class=\"jz-step-num\">6<\/div>\n      <div class=\"jz-step-body\"><p><strong>\u5b89\u5b9a\u6027\u8a66\u9a13\u3068\u4fdd\u5b58\u6027\u8a66\u9a13\uff1a<\/strong> \u4fdd\u7ba1\u6642\u9593\u3068\u6e29\u5ea6\u306e\u95a2\u6570\u3068\u3057\u3066\u3001\u7c92\u5ea6\u5206\u5e03\u3001pH\u3001MRR\u3092\u8a55\u4fa1\u3059\u308b\u3002\u88fd\u9020\u6240\u306e\u6700\u4f4e\u4fdd\u5b58\u671f\u9593\u8981\u4ef6\uff08\u901a\u5e38\u3001\u88fd\u9020\u65e5\u304b\u30896\uff5e12\u30f5\u6708\uff09\u3078\u306e\u9069\u5408\u3092\u78ba\u8a8d\u3059\u308b\u3002.<\/p><\/div>\n    <\/div>\n    <div class=\"jz-step\">\n      <div class=\"jz-step-num\">7<\/div>\n      <div class=\"jz-step-body\"><p><strong>\u30ed\u30c3\u30c8\u9593\u306e\u6574\u5408\u6027\u76e3\u67fb\uff1a<\/strong> 3\u3064\u4ee5\u4e0a\u306e\u9023\u7d9a\u3057\u305f\u88fd\u9020\u30ed\u30c3\u30c8\u3092\u8981\u6c42\u3057\u3001\u4e3b\u8981\u306a\u30d1\u30e9\u30e1\u30fc\u30bf\uff08\u57fa\u6e96\u30a6\u30a7\u30cf\u30fc\u4e0a\u306eMRR\u3001\u7c92\u5b50\u5f84D50\u3068D90\u3001pH\uff09\u304c\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306e\u5206\u6790\u8a3c\u660e\u66f8\uff08CoA\uff09\u306e\u9650\u754c\u5185\u306b\u53ce\u307e\u3063\u3066\u3044\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3059\u308b\u3002\u4e00\u8cab\u6027\u306f\u3001\u3057\u3070\u3057\u3070\u7d76\u5bfe\u7684\u6027\u80fd\u3068\u540c\u3058\u304f\u3089\u3044\u91cd\u8981\u3067\u3042\u308b\u3002.<\/p><\/div>\n    <\/div>\n  <\/div>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<!-- Section 9 -->\n<section id=\"qualification\">\n  <h2>9.\u751f\u7523\u5de5\u7a0b\u306b\u304a\u3051\u308b\u30b9\u30e9\u30ea\u30fc\u306e\u8a8d\u5b9a\u30d7\u30ed\u30bb\u30b9<\/h2>\n  <p>\u65b0\u3057\u3044\u30b9\u30e9\u30ea\u30fc\u3092\u751f\u7523\u74b0\u5883\u306b\u5c0e\u5165\u3059\u308b\u306b\u306f\u3001\u5de5\u5834\u306e\u5909\u66f4\u7ba1\u7406\u30d7\u30ed\u30bb\u30b9\u3092\u901a\u3057\u305f\u6b63\u5f0f\u306a\u9069\u683c\u6027\u78ba\u8a8d\u304c\u5fc5\u8981\u3067\u3042\u308b\u3002\u6280\u8853\u7684\u306b\u65e2\u5b58\u306e\u3082\u306e\u3088\u308a\u512a\u308c\u305f\u30b9\u30e9\u30ea\u30fc\u3067\u3042\u3063\u3066\u3082\u3001\u6b69\u7559\u307e\u308a\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3092\u5b88\u308b\u305f\u3081\u306b\u8a2d\u8a08\u3055\u308c\u305f\u8a8d\u5b9a\u30b2\u30fc\u30c8\u3092\u901a\u904e\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002\u4e3b\u306a\u8a8d\u5b9a\u30de\u30a4\u30eb\u30b9\u30c8\u30fc\u30f3\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3059\uff1a<\/p>\n  <ul>\n    <li><strong>\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306e\u5206\u88c2\uff1a<\/strong> \u65b0\u3057\u3044\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u30d9\u30fc\u30b9\u30e9\u30a4\u30f3\u3068\u540c\u3058\u30a6\u30a7\u30fc\u30cf\u306e\u30b5\u30d6\u30bb\u30c3\u30c8\u3067\u4f7f\u7528\u3055\u308c\u308b\u305f\u3081\u3001\u540c\u4e00\u306e\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u4e0b\u3067\u6027\u80fd\u3092\u76f4\u63a5\u6bd4\u8f03\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002.<\/li>\n    <li><strong>\u62e1\u5f35\u30ed\u30c3\u30c8\u8cc7\u683c\uff1a<\/strong> \u6700\u521d\u306e\u30b9\u30d7\u30ea\u30c3\u30c8\u3067\u8a31\u5bb9\u3067\u304d\u308b\u7d50\u679c\u304c\u51fa\u305f\u5f8c\u3001\u65b0\u3057\u3044\u30b9\u30e9\u30ea\u30fc\u3092\u3088\u308a\u5927\u304d\u306a\u30ed\u30c3\u30c8\uff08\u901a\u5e3825\u679a\u4ee5\u4e0a\uff09\u3067\u4f7f\u7528\u3057\u3001\u7d71\u8a08\u7684\u306b\u610f\u5473\u306e\u3042\u308b\u6b20\u9665\u3068\u5747\u4e00\u6027\u306e\u30c7\u30fc\u30bf\u3092\u4f5c\u6210\u3057\u307e\u3059\u3002.<\/li>\n    <li><strong>\u4e0b\u6d41\u306e\u5229\u56de\u308a\u76f8\u95a2\uff1a<\/strong> \u65b0\u3057\u3044\u30b9\u30e9\u30ea\u30fc\u3067\u7814\u78e8\u3055\u308c\u305f\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u305d\u306e\u5f8c\u306e\u30d7\u30ed\u30bb\u30b9\u5de5\u7a0b\u3068\u96fb\u6c17\u7684\u30c6\u30b9\u30c8\u3092\u901a\u3058\u3066\u8ffd\u8de1\u3055\u308c\u3001CMP\u6027\u80fd\u306e\u5909\u5316\u304c\u6700\u7d42\u7684\u306a\u30c7\u30d0\u30a4\u30b9\u306e\u6b69\u7559\u307e\u308a\u306b\u5f71\u97ff\u3057\u306a\u3044\u3053\u3068\u304c\u78ba\u8a8d\u3055\u308c\u308b\u3002.<\/li>\n    <li><strong>\u4fe1\u983c\u6027\u753b\u9762\uff1a<\/strong> \u30b2\u30fc\u30c8\u30ec\u30d9\u30eb\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u306f\u3001\u52a0\u901f\u4fe1\u983c\u6027\u8a66\u9a13\uff08TDDB\u3001EM\uff09\u306b\u3088\u308a\u3001\u65b0\u3057\u3044\u30b9\u30e9\u30ea\u30fc\u304b\u3089\u306e\u5fae\u91cf\u91d1\u5c5e\u6c5a\u67d3\u304c\u30c7\u30d0\u30a4\u30b9\u306e\u9577\u671f\u4fe1\u983c\u6027\u3092\u4f4e\u4e0b\u3055\u305b\u306a\u3044\u3053\u3068\u3092\u78ba\u8a8d\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u304b\u3082\u3057\u308c\u306a\u3044\u3002.<\/li>\n    <li><strong>\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u76e3\u67fb\uff1a<\/strong> \u30b9\u30e9\u30ea\u30fc\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306e\u88fd\u9020\u73fe\u5834\u3001\u539f\u6599\u8abf\u9054\u3001QC\u624b\u9806\u3001\u4f9b\u7d66\u7d99\u7d9a\u8a08\u753b\u306f\u3001\u5b8c\u5168\u306a\u8a8d\u5b9a\u30d1\u30c3\u30b1\u30fc\u30b8\u306e\u4e00\u90e8\u3068\u3057\u3066\u5be9\u67fb\u3055\u308c\u308b\u3002.<\/li>\n  <\/ul>\n  <p>JEEZ\u306f\u3059\u3079\u3066\u306e\u30b9\u30e9\u30ea\u30fc\u88fd\u54c1\u306b\u5bfe\u3057\u3066\u3001\u8a8d\u5b9a\u57fa\u6e96\u30a6\u30a7\u30cfMRR\u30c7\u30fc\u30bf\u3001\u30ed\u30c3\u30c8\u9593\u6574\u5408\u6027\u30ec\u30dd\u30fc\u30c8\u3001\u5b8c\u5168\u306aCOA\u6587\u66f8\u3001\u304a\u3088\u3073\u8a8d\u5b9a\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u306b\u308f\u305f\u308b\u5c02\u4efb\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30b5\u30dd\u30fc\u30c8\u3092\u542b\u3080\u3001\u5305\u62ec\u7684\u306a\u8a8d\u5b9a\u30b5\u30dd\u30fc\u30c8\u30d1\u30c3\u30b1\u30fc\u30b8\u3092\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059\u3002. <a href=\"https:\/\/jeez-semicon.com\/ja\/contact\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u6280\u8853\u30c1\u30fc\u30e0\u3078\u306e\u304a\u554f\u3044\u5408\u308f\u305b<\/a> \u3092\u30af\u30ea\u30c3\u30af\u3057\u3001\u8cc7\u683c\u5be9\u67fb\u3092\u958b\u59cb\u3059\u308b\u3002.<\/p>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<!-- Section 10 -->\n<section id=\"troubleshooting\">\n  <h2>10.\u30b9\u30e9\u30ea\u30fc\u306b\u95a2\u3059\u308b\u4e00\u822c\u7684\u306a\u554f\u984c\u3068\u89e3\u6c7a\u7b56<\/h2>\n  <div class=\"jz-table-wrap\">\n    <table class=\"jz-table\">\n      <thead>\n        <tr><th>\u75c7\u72b6<\/th><th>\u6700\u3082\u8003\u3048\u3089\u308c\u308b\u6839\u672c\u539f\u56e0<\/th><th>\u8a3a\u65ad\u30b9\u30c6\u30c3\u30d7<\/th><th>\u662f\u6b63\u63aa\u7f6e<\/th><\/tr>\n      <\/thead>\n      <tbody>\n        <tr><td>\u6642\u9593\u7d4c\u904e\u3068\u3068\u3082\u306b\u4f4e\u4e0b\u3059\u308bMRR<\/td><td>\u30d1\u30c3\u30c9\u30b0\u30ec\u30fc\u30b8\u30f3\u30b0\uff1b\u30b9\u30e9\u30ea\u30fcH\u2082O\u2082\u5206\u89e3<\/td><td>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u7d42\u70b9\u3092\u30c1\u30a7\u30c3\u30af\u3059\u308b\u3002<\/td><td>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u983b\u5ea6\u3092\u5897\u3084\u3059\u3002<\/td><\/tr>\n        <tr><td>\u30d6\u30e9\u30f3\u30b1\u30c3\u30c8\u30fb\u30a6\u30a7\u30fc\u30cf\u306e\u30b9\u30af\u30e9\u30c3\u30c1\u6570\u304c\u591a\u3044<\/td><td>\u7c92\u5b50\u306e\u51dd\u96c6\u3001\u904e\u5927\u7c92\u5b50<\/td><td>PSD\uff08DLS\uff09\u306e\u6e2c\u5b9a\u3001\u30b9\u30e9\u30ea\u30fc\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u691c\u67fb<\/td><td>0.1 \u00b5m POU\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u4ea4\u63db\uff1b\u30b9\u30e9\u30ea\u30fc\u30d0\u30b9\u306e\u652a\u62cc\u3068\u518d\u5faa\u74b0\u306e\u30c1\u30a7\u30c3\u30af<\/td><\/tr>\n        <tr><td>\u904e\u5270\u306a\u9285\u306e\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0<\/td><td>\u904e\u5270\u7814\u78e8\u3001BTA\u6fc3\u5ea6\u4e0d\u8db3<\/td><td>\u30dd\u30ea\u30c3\u30b7\u30e5\u6642\u9593\u3092\u77ed\u7e2e\u3059\u308b\u3002<\/td><td>\u7d42\u70b9\u691c\u51fa\u306e\u5f37\u5316\u3001\u6ef4\u5b9a\u306b\u3088\u308bBTA\u6fc3\u5ea6\u306e\u691c\u8a3c<\/td><\/tr>\n        <tr><td>STI\u306e\u5747\u4e00\u6027\u304c\u60aa\u3044\uff08\u9178\u5316\u7269\u30ed\u30fc\u30c7\u30a3\u30f3\u30b0\u52b9\u679c\uff09<\/td><td>\u9078\u629e\u6027\u6dfb\u52a0\u5264\u304c\u4e0d\u5341\u5206\u3001\u30d1\u30c3\u30c9\u304c\u67d4\u3089\u304b\u3059\u304e\u308b<\/td><td>\u30a6\u30a7\u30cf\u5168\u4f53\u306eWIWNU\u30de\u30c3\u30d7\u3001\u6dfb\u52a0\u5264\u30ed\u30c3\u30c8\u306e\u30c1\u30a7\u30c3\u30af<\/td><td>\u9078\u629e\u6027\u6dfb\u52a0\u5264\u306e\u6fc3\u5ea6\u3092\u4e0a\u3052\u308b\u3002<\/td><\/tr>\n        <tr><td>\u30dd\u30b9\u30c8CMP\u30a6\u30a7\u30fc\u30cf\u306e\u91d1\u5c5e\u6c5a\u67d3<\/td><td>\u30b9\u30e9\u30ea\u30fc\u4e2d\u306e\u91d1\u5c5e\u4e0d\u7d14\u7269\u3001CMP\u5f8c\u306e\u4e0d\u5341\u5206\u306a\u6d17\u6d44<\/td><td>\u30a6\u30a7\u30cf\u30fc\u8868\u9762\u306eVPD-ICPMS\uff1b\u30b9\u30e9\u30ea\u30fcCOA\u306e\u30ec\u30d3\u30e5\u30fc<\/td><td>\u3088\u308a\u9ad8\u7d14\u5ea6\u306e\u30b9\u30e9\u30ea\u30fc\u30b0\u30ec\u30fc\u30c9\u306b\u5207\u308a\u66ff\u3048\u3001CMP\u5f8c\u306eDHF\u6d17\u6d44\u5de5\u7a0b\u3092\u5f37\u5316\u3059\u308b\u3002<\/td><\/tr>\n        <tr><td>MRR \u30ed\u30c3\u30c8\u9593\u5909\u52d5 &gt;5%<\/td><td>\u7814\u78e8\u5264\u306e\u7c92\u5ea6\u30c9\u30ea\u30d5\u30c8\u3001pH\u5909\u52d5<\/td><td>\u53d7\u5165\u30ed\u30c3\u30c8\u306e\u30ea\u30d5\u30a1\u30ec\u30f3\u30b9\u30fb\u30a6\u30a7\u30fc\u30cf\u306eMRR\u6e2c\u5b9a\u3001PSD\u3068pH\u306e\u30c1\u30a7\u30c3\u30af<\/td><td>\u53d7\u5165\u691c\u67fb\u4ed5\u69d8\u306e\u53b3\u683c\u5316\u3001\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3078\u306eCOA\u5236\u9650\u306e\u53b3\u683c\u5316\u8981\u8acb<\/td><\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n  <p>CMP\u5de5\u7a0b\u306e\u6b20\u9665\u3068\u305d\u306e\u6839\u672c\u539f\u56e0\u306b\u95a2\u3059\u308b\u5305\u62ec\u7684\u306a\u6271\u3044\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u306e\u5c02\u7528\u30ac\u30a4\u30c9\u3092\u3054\u89a7\u304f\u3060\u3055\u3044\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Process-Defects-Causes-Types-Solutions\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u30d7\u30ed\u30bb\u30b9\u306e\u6b20\u9665\uff1a\u539f\u56e0\u3001\u7a2e\u985e\u3001\u89e3\u6c7a\u7b56<\/a>.<\/p>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<!-- Section 11 FAQ -->\n<section id=\"faq\">\n  <h2>11.\u3088\u304f\u3042\u308b\u8cea\u554f<\/h2>\n  <h3>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u30b9\u30c6\u30c3\u30d71\u3068\u30b9\u30c6\u30c3\u30d72\u306e\u9055\u3044\u306f\u4f55\u3067\u3059\u304b\uff1f<\/h3>\n  <p>\u9285\u30c0\u30de\u30b7\u30f3CMP\u3067\u306f\u3001\u30b9\u30c6\u30c3\u30d71\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb\u5c64\u4e0a\u3067\u505c\u6b62\u3057\u3001\u30d0\u30eb\u30af\u9285\u30aa\u30fc\u30d0\u30fc\u30d0\u30fc\u30c7\u30f3\u3092\u8fc5\u901f\u306b\u9664\u53bb\u3059\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u305f\u9ad8RR\u88fd\u5264\u3067\u3059\u3002\u30b9\u30c6\u30c3\u30d72\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u9285\u306e\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3068\u8a98\u96fb\u4f53\u4fb5\u98df\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u306a\u304c\u3089\u3001\u9732\u51fa\u3057\u305f\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb\uff08Ta\/TaN\u3001TiN\u3001Co\u30e9\u30a4\u30ca\u30fc\uff09\u3092\u9664\u53bb\u3057\u307e\u3059\u3002\u30b9\u30c6\u30c3\u30d72\u30b9\u30e9\u30ea\u30fc\u306f\u901a\u5e38\u3001Cu\u9078\u629e\u6027\u306e\u5f37\u3044\u30b9\u30c6\u30c3\u30d71\u30b9\u30e9\u30ea\u30fc\u306b\u6bd4\u3079\u3001Cu\u3001\u30d0\u30ea\u30a2\u3001SiO\u2082\u9593\u306e\u9078\u629e\u6027\u306e\u30d0\u30e9\u30f3\u30b9\u304c\u53d6\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n  <h3>\u30b9\u30e9\u30ea\u30fc\u306epH\u306fCMP\u306e\u6027\u80fd\u306b\u3069\u306e\u3088\u3046\u306a\u5f71\u97ff\u3092\u4e0e\u3048\u307e\u3059\u304b\uff1f<\/h3>\n  <p>pH\u306f\u3001\u7814\u78e8\u7c92\u5b50\u306e\u8868\u9762\u96fb\u8377\uff08\u3057\u305f\u304c\u3063\u3066\u30b3\u30ed\u30a4\u30c9\u5b89\u5b9a\u6027\u3068\u51dd\u96c6\u50be\u5411\uff09\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u3078\u306e\u5316\u5b66\u7684\u653b\u6483\u306e\u901f\u5ea6\u3068\u30e1\u30ab\u30cb\u30ba\u30e0\u3001\u6291\u5236\u5264\u819c\u306e\u5f62\u6210\u901f\u5ea6\u8ad6\u3001\u304a\u3088\u3073\u9664\u53bb\u526f\u751f\u6210\u7269\u306e\u6eb6\u89e3\u6027\u306a\u3069\u3001\u30b9\u30e9\u30ea\u30fc\u6319\u52d5\u306e\u4e8b\u5b9f\u4e0a\u3042\u3089\u3086\u308b\u5074\u9762\u306b\u5f71\u97ff\u3059\u308b\u3002\u30bb\u30ea\u30a2 STI \u30b9\u30e9\u30ea\u30fc\u3067\u306f\u3001pH \u304c Ce-O-Si \u7d50\u5408\u5f62\u6210\u901f\u5ea6\u3092\u5236\u5fa1\u3059\u308b\u3002\u9285\u30b9\u30e9\u30ea\u30fc\u306e\u5834\u5408\u3001pH\u306fBTA\u30a4\u30f3\u30d2\u30d3\u30bf\u30fc\u819c\u306e\u5b8c\u5168\u6027\u306b\u5f71\u97ff\u3059\u308b\u3002\u76ee\u6a19\u5024\u304b\u3089\u00b10.3 pH\u5358\u4f4d\u306e\u30c9\u30ea\u30d5\u30c8\u3067\u3082\u3001\u611f\u5ea6\u306e\u9ad8\u3044\u88fd\u5264\u3067\u306f\u6e2c\u5b9a\u53ef\u80fd\u306aMRR\u3068\u9078\u629e\u6027\u306e\u5909\u5316\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/p>\n\n  <h3>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u518d\u5229\u7528\u3084\u518d\u5faa\u74b0\u306f\u53ef\u80fd\u3067\u3059\u304b\uff1f<\/h3>\n  <p>\u30b9\u30e9\u30ea\u30fc\u306e\u518d\u5faa\u74b0\u306f\u3001\u5316\u5b66\u85ac\u54c1\u30b3\u30b9\u30c8\u524a\u6e1b\u306e\u305f\u3081 \u306b\u4e00\u90e8\u306e\u5de5\u5834\u3067\u884c\u308f\u308c\u3066\u3044\u308b\u304c\u3001\u666e\u904d\u7684\u306b\u63a8\u5968\u3055\u308c \u3066\u3044\u308b\u308f\u3051\u3067\u306f\u306a\u3044\u3002\u518d\u5faa\u74b0\u3055\u308c\u305f\u30b9\u30e9\u30ea\u30fc\u306b\u306f\u3001\u84c4\u7a4d\u3057\u305f\u91d1\u5c5e\u30a4\u30aa\u30f3\u3001\u7814\u78e8\u3055\u308c\u305f\u30d1\u30c3\u30c9\u306e\u7834\u7247\u3001\u9178\u5316\u5264\u306e\u5206\u89e3\u751f\u6210\u7269\u304c\u542b\u307e\u308c\u3001\u6b20\u9665\u3084\u6c5a\u67d3\u30ea\u30b9\u30af\u3092\u5897\u5927\u3055\u305b\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002\u518d\u5faa\u74b0\u3092\u4f7f\u7528\u3059\u308b\u5834\u5408\u3001\u5fb9\u5e95\u7684\u306a\u308d\u904e\u3001pH\u30e2\u30cb \u30bf\u30ea\u30f3\u30b0\u3001\u9178\u5316\u5264\u6fc3\u5ea6\u306e\u30ea\u30d5\u30ec\u30c3\u30b7\u30e5\u304c\u5fc5\u8981\u3067\u3042\u308b\u3002\u307b\u3068\u3093\u3069\u306e\u5927\u91cf\u751f\u7523\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u5de5\u5834\u3067\u306f\u3001\u30a6\u30a7\u30cf\u30fc\u30d1\u30b9\u3054\u3068\u306b\u4e00\u8cab\u3057\u305f\u54c1\u8cea\u3092\u78ba\u4fdd\u3059\u308b\u305f\u3081\u3001\u8cab\u901a\u578b\u30b9\u30e9\u30ea\u30fc\u4f9b\u7d66\u304c\u63a1\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n  <h3>CMP\u30b9\u30e9\u30ea\u30fc\u306e\u4fdd\u5b58\u53ef\u80fd\u671f\u9593\u306f\uff1f<\/h3>\n  <p>\u8cde\u5473\u671f\u9650\u306f\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u306b\u3088\u3063\u3066\u7570\u306a\u308b\u3002\u307b\u3068\u3093\u3069\u306e\u9178\u5316\u7269\u3068\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u306e\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u6642\u3005\u7a4f\u3084\u304b\u306b\u652a\u62cc\u3057\u306a\u304c\u308915\uff5e25\u2103\u3067\u4fdd\u5b58\u3057\u305f\u5834\u5408\u3001\u88fd\u9020\u65e5\u304b\u308912\uff5e18\u30f6\u6708\u9593\u5b89\u5b9a\u3067\u3042\u308b\u3002\u30d7\u30ec\u30df\u30c3\u30af\u30b9\u3055\u308c\u305fH\u2082O\u2082\u3092\u542b\u3080\u9285\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u9178\u5316\u5264\u306e\u52a3\u5316\u306b\u3088\u308a\u4fdd\u5b58\u671f\u9593\u304c\u8457\u3057\u304f\u77ed\u3044\uff08\u3057\u3070\u3057\u30703\uff5e6\u30f6\u6708\uff09\u3002H\u2082O\u2082\u3092\u542b\u307e\u306a\u3044\u30b9\u30e9\u30ea\u30fc\u3092\u53d7\u3051\u53d6\u308a\u3001\u4f7f\u7528\u6642\u306b\u6dfb\u52a0\u3059\u308b\u3053\u3068\u3067\u3053\u308c\u306b\u5bfe\u51e6\u3059\u308b\u30d5\u30a1\u30d6\u3082\u3042\u308b\u3002\u5e38\u306b\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306eSDS\u3068\u88fd\u54c1\u56fa\u6709\u306e\u4fdd\u7ba1\u30ac\u30a4\u30c9\u30e9\u30a4\u30f3\u3092\u53c2\u7167\u3059\u308b\u3053\u3068\u3002.<\/p>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<div class=\"jz-tags\">\n  <span class=\"jz-tag\">CMP\u30b9\u30e9\u30ea\u30fc<\/span><span class=\"jz-tag\">\u9178\u5316\u7269CMP<\/span><span class=\"jz-tag\">\u9285CMP<\/span>\n  <span class=\"jz-tag\">\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP<\/span><span class=\"jz-tag\">\u30bb\u30ea\u30a2\u30b9\u30e9\u30ea\u30fc<\/span><span class=\"jz-tag\">STI CMP<\/span>\n  <span class=\"jz-tag\">\u534a\u5c0e\u4f53\u6d88\u8017\u54c1<\/span><span class=\"jz-tag\">JEEZ<\/span>\n<\/div>\n\n<div class=\"jz-cta\">\n  <h2>JEEZ\u306bCMP\u30b9\u30e9\u30ea\u30fc\u30b5\u30f3\u30d7\u30eb\u3092\u4f9d\u983c\u3059\u308b<\/h2>\n  <p>\u5f53\u793e\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30a8\u30f3\u30b8\u30cb\u30a2\u306f\u3001\u304a\u5ba2\u69d8\u306e\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u30d5\u30a3\u30eb\u30e0\u3001\u304a\u3088\u3073\u30c4\u30fc\u30eb\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u306b\u9069\u3057\u305f\u30b9\u30e9\u30ea\u30fc\u914d\u5408\u3092\u63d0\u6848\u3057\u3001\u5b8c\u5168\u306aCOA\u6587\u66f8\u3068\u30c6\u30af\u30cb\u30ab\u30eb\u30b5\u30dd\u30fc\u30c8\u3092\u6dfb\u4ed8\u3057\u305f\u9069\u683c\u306a\u30b5\u30f3\u30d7\u30eb\u3092\u51fa\u8377\u3057\u307e\u3059\u3002.<\/p>\n  <a href=\"https:\/\/jeez-semicon.com\/ja\/contact\/\" target=\"_blank\" rel=\"noopener noreferrer\" class=\"jz-btn\">\u30b9\u30e9\u30ea\u30fc\u30b5\u30f3\u30d7\u30eb\u306e\u30ea\u30af\u30a8\u30b9\u30c8<\/a>\n  <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/What-Are-CMP-Materials-Complete-Guide\/\" target=\"_blank\" rel=\"noopener noreferrer\" class=\"jz-btn-sec\">\u2190 CMP\u30de\u30c6\u30ea\u30a2\u30eb\u5b8c\u5168\u30ac\u30a4\u30c9<\/a>\n<\/div>\n\n<\/div>","protected":false},"excerpt":{"rendered":"<p>JEEZ\u30c6\u30af\u30cb\u30ab\u30eb\u30ac\u30a4\u30c9-CMP\u30b9\u30e9\u30ea\u30fc \u9178\u5316\u7269STI\u304b\u3089\u5148\u9032\u306e\u9285\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u3001\u30b3\u30d0\u30eb\u30c8\u3001\u6b21\u4e16\u4ee3\u30b9\u30e9\u30ea\u30fc\u307e\u3067\u3001\u5316\u5b66\u7684\u6a5f\u68b0\u7684\u5e73\u5766\u5316\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u3001\u5b9a\u6027\u3001\u6700\u9069\u5316\u306e\u305f\u3081\u306e\u5b8c\u5168\u306a\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30ea\u30d5\u30a1\u30ec\u30f3\u30b9\u3067\u3059\u3002<\/p>","protected":false},"author":1,"featured_media":1950,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1917","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1917","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1917"}],"version-history":[{"count":2,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1917\/revisions"}],"predecessor-version":[{"id":1919,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1917\/revisions\/1919"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1950"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1917"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1917"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1917"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}