{"id":1923,"date":"2026-04-30T14:28:01","date_gmt":"2026-04-30T06:28:01","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1923"},"modified":"2026-04-30T15:04:39","modified_gmt":"2026-04-30T07:04:39","slug":"cmp-pad-conditioners-conditioning-process","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-pad-conditioners-conditioning-process\/","title":{"rendered":"CMP\u30d1\u30c3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u3068\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30d7\u30ed\u30bb\u30b9"},"content":{"rendered":"<!-- JEEZ | Cluster 3: CMP Pad Conditioners & Conditioning Process -->\r\n<p><style>\r\n.jz*,.jz *::before,.jz *::after{box-sizing:border-box;margin:0;padding:0}\r\n.jz{font-family:'Segoe UI',Arial,sans-serif;font-size:16px;line-height:1.8;color:#1a1a2e;max-width:900px;margin:0 auto}\r\n.jz-hero{background:linear-gradient(135deg,#0f2544 0%,#1a4a8a 55%,#0e7c86 100%);border-radius:12px;padding:56px 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.2s}\r\n.jz-pillar-link:hover{background:#d0e8ff;border-color:#1a4a8a}\r\n<\/style><\/p>\r\n<div class=\"jz\">\r\n<div class=\"jz-hero\">\r\n<div class=\"jz-hero-label\">JEEZ\u30c6\u30af\u30cb\u30ab\u30eb\u30ac\u30a4\u30c9 - \u30d1\u30c3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0<\/div>\r\n<p>\u30c7\u30a3\u30b9\u30af\u306e\u8a2d\u8a08\u3001\u7825\u7c92\u306e\u9078\u629e\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30e2\u30fc\u30c9\u3001\u30d1\u30e9\u30e1\u30fc\u30bf\u306e\u6700\u9069\u5316\u3001\u6240\u6709\u30b3\u30b9\u30c8\u3001\u5927\u91cfCMP\u88fd\u9020\u306b\u304a\u3051\u308b\u30d1\u30c3\u30c9\u5bff\u547d\u3068MRR\u306e\u5b89\u5b9a\u6027\u3092\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u6c7a\u5b9a\u304c\u3069\u306e\u3088\u3046\u306b\u5de6\u53f3\u3059\u308b\u304b\u306a\u3069\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30d1\u30c3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306b\u95a2\u3059\u308b\u6df1\u3044\u6280\u8853\u30ea\u30d5\u30a1\u30ec\u30f3\u30b9\u3002.<\/p>\r\n<div class=\"jz-hero-meta\">2026\u5e744\u670820\u65e5\u66f4\u65b0 \u23f1 \u8aad\u4e86\u6642\u9593\uff1a\u301c20\u5206\u270d\ufe0f JEEZ\u30c6\u30af\u30cb\u30ab\u30eb\u7de8\u96c6\u90e8<\/div>\r\n<\/div>\r\n<a class=\"jz-pillar-link\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/What-Are-CMP-Materials-Complete-Guide\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2190 CMP\u30de\u30c6\u30ea\u30a2\u30eb\u306b\u623b\u308b\uff1a\u5b8c\u5168\u30ac\u30a4\u30c9<\/a><nav class=\"jz-toc\" aria-label=\"\u76ee\u6b21\">\r\n<div class=\"jz-toc-title\">\u76ee\u6b21<\/div>\r\n<ol>\r\n<li><a href=\"#cond-why\">\u30d1\u30c3\u30c9\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u304c\u4e0d\u53ef\u6b20\u306a\u7406\u7531<\/a><\/li>\r\n<li><a href=\"#cond-mechanism\">\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\uff1a\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u304c\u30d1\u30c3\u30c9\u306e\u8cea\u611f\u3092\u56de\u5fa9\u3055\u305b\u308b\u30e1\u30ab\u30cb\u30ba\u30e0<\/a><\/li>\r\n<li><a href=\"#cond-types\">\u30d1\u30c3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u7a2e\u985e<\/a><\/li>\r\n<li><a href=\"#diamond-design\">\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30fb\u30c7\u30a3\u30b9\u30af<\/a><\/li>\r\n<li><a href=\"#modes\">\u539f\u4f4d\u7f6e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3068\u539f\u4f4d\u7f6e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0<\/a><\/li>\r\n<li><a href=\"#parameters\">\u4e3b\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc<\/a><\/li>\r\n<li><a href=\"#optimization\">\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u6700\u9069\u5316\uff1a\u4f59\u5206\u306a\u30d1\u30c3\u30c9\u6469\u8017\u306a\u3057\u306b\u5b89\u5b9a\u3057\u305fMRR\u3092\u9054\u6210<\/a><\/li>\r\n<li><a href=\"#coo\">\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3068\u6240\u6709\u30b3\u30b9\u30c8<\/a><\/li>\r\n<li><a href=\"#failure-modes\">\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u6545\u969c\u30e2\u30fc\u30c9\u3068\u691c\u51fa<\/a><\/li>\r\n<li><a href=\"#advanced\">\u30b5\u30d67nm\u30ce\u30fc\u30c9\u306e\u9ad8\u5ea6\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6226\u7565<\/a><\/li>\r\n<li><a href=\"#faq\">\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/a><\/li>\r\n<\/ol>\r\n<\/nav>\r\n<section id=\"cond-why\">\r\n<h2>1.\u30d1\u30c3\u30c9\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u304c\u4e0d\u53ef\u6b20\u306a\u7406\u7531<\/h2>\r\n<p>CMP\u7814\u78e8\u30d1\u30c3\u30c9\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u52a0\u5de5\u4e2d\u306b\u4e00\u5b9a\u306e\u8868\u9762\u72b6\u614b\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u6700\u521d\u306e\u30a6\u30a7\u30fc\u30cf\u304b\u3089\u3001\u7814\u78e8\u306e\u6a5f\u68b0\u7684\u30fb\u5316\u5b66\u7684\u74b0\u5883\u306f\u30d1\u30c3\u30c9\u8868\u9762\u3092\u5f90\u3005\u306b\u5909\u5316\u3055\u305b\u307e\u3059\u3002\u7814\u78e8\u7c92\u5b50\u3068\u53cd\u5fdc\u526f\u751f\u6210\u7269\u304c\u30d1\u30c3\u30c9\u306e\u5b54\u306b\u57cb\u3081\u8fbc\u307e\u308c\u307e\u3059\u3002\u30d1\u30c3\u30c9\u30dd\u30ea\u30de\u30fc\u8868\u9762\u306f\u3001\u7e70\u308a\u8fd4\u3055\u308c\u308b\u63a5\u89e6\u5fdc\u529b\u306b\u3088\u3063\u3066\u5727\u7e2e\u3055\u308c\u3001\u5e73\u6ed1\u5316\u3055\u308c\u307e\u3059\u3002\u30b9\u30e9\u30ea\u30fc\u306e\u6b8b\u6e23\u3068\u30dd\u30ea\u30de\u30fc\u306e\u65ad\u7247\u304c\u8868\u9762\u306e\u30a2\u30b9\u30da\u30ea\u30c6\u30a3\u306b\u84c4\u7a4d\u3055\u308c\u308b\u3002\u3053\u308c\u3089\u306e\u5f71\u97ff\u306e\u7d2f\u7a4d\u7d50\u679c\u306f <em>\u30d1\u30c3\u30c9\u30b0\u30ec\u30fc\u30b8\u30f3\u30b0<\/em> - \u30d1\u30c3\u30c9\u8868\u9762\u306e\u6f38\u9032\u7684\u306a\u5e73\u6ed1\u5316\u3068\u9ad8\u5bc6\u5ea6\u5316\u306b\u3088\u308a\u3001\u30d1\u30c3\u30c9\u3068\u30a6\u30a7\u30fc\u30cf\u306e\u5b9f\u8cea\u7684\u306a\u63a5\u89e6\u9762\u7a4d\u304c\u6e1b\u5c11\u3057\u3001\u7422\u78e8\u306e\u5b9f\u884c\u671f\u9593\u4e2d\u306b\u6750\u6599\u9664\u53bb\u7387\uff08MRR\uff09\u304c\u7740\u5b9f\u306b\u4f4e\u4e0b\u3057\u307e\u3059\u3002.<\/p>\r\n<p>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3092\u884c\u308f\u306a\u3044\u5834\u5408\u3001\u30cf\u30fc\u30c9CMP\u30d1\u30c3\u30c9\u306eMRR\u306f\u3001\u6700\u521d\u306e\u30d6\u30ec\u30fc\u30af\u30a4\u30f3\u72b6\u614b\u304b\u308920\uff5e30\u56de\u306e\u30a6\u30a7\u30fc\u30cf\u30d1\u30b9\u306740\uff5e60%\u4f4e\u4e0b\u3057\u307e\u3059\u3002\u3053\u306e\u3088\u3046\u306aMRR\u306e\u4f4e\u4e0b\u306f\u3001\u30e9\u30f3\u30fb\u30c4\u30fc\u30fb\u30e9\u30f3\u306eMRR\u3092\u76ee\u6a19\u306e\u00b15%\u4ee5\u5185\u306b\u7dad\u6301\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u751f\u7523\u8981\u4ef6\u3068\u306f\u5168\u304f\u76f8\u5bb9\u308c\u306a\u3044\u3002. <strong>\u30d1\u30c3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0<\/strong> \u306f\u3001\u7d99\u7d9a\u7684\u307e\u305f\u306f\u5b9a\u671f\u7684\u306b\u30d1\u30c3\u30c9\u8868\u9762\u3092\u30ea\u30d5\u30ec\u30c3\u30b7\u30e5\u3059\u308b\u3053\u3068\u3067\u3001\u3053\u306e\u8150\u6557\u3092\u9632\u3050\u30d7\u30ed\u30bb\u30b9\u3067\u3042\u308b\u3002\u3064\u307e\u308a\u3001\u6a5f\u68b0\u7684\u306b\u8276\u51fa\u3057\u3055\u308c\u305f\u8868\u9762\u5c64\u3092\u9664\u53bb\u3057\u3001\u6d3b\u6027\u306a\u51f9\u51f8\u3068\u958b\u6c17\u5b54\u3092\u6301\u3064\u65b0\u9bae\u306a\u30d1\u30c3\u30c9\u7d20\u6750\u3092\u518d\u3073\u9732\u51fa\u3055\u305b\u308b\u306e\u3067\u3042\u308b\u3002.<\/p>\r\n<div class=\"jz-stats\">\r\n<div class=\"jz-stat\">\r\n<div class=\"n\">40-60%<\/div>\r\n<div class=\"l\">\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306a\u3057\u3067\u306eMRR\u4f4e\u4e0b - 20\uff5e30\u30a6\u30a7\u30fc\u30cf\u30d1\u30b9\u4ee5\u5185<\/div>\r\n<\/div>\r\n<div class=\"jz-stat\">\r\n<div class=\"n\">\u00b15%<\/div>\r\n<div class=\"l\">\u6700\u9069\u5316\u3055\u308c\u305f\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3067\u9054\u6210\u53ef\u80fd\u306a\u5178\u578b\u7684\u306a\u751f\u7523MRR\u5b89\u5b9a\u6027\u76ee\u6a19<\/div>\r\n<\/div>\r\n<div class=\"jz-stat\">\r\n<div class=\"n\">10-20%<\/div>\r\n<div class=\"l\">\u7a4d\u6975\u7684\u306a\u539f\u4f4d\u7f6e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3067\u5358\u4f4d\u6642\u9593\u5f53\u305f\u308a\u306b\u6d88\u8cbb\u3055\u308c\u308b\u30d1\u30c3\u30c9\u6750\u6599<\/div>\r\n<\/div>\r\n<div class=\"jz-stat\">\r\n<div class=\"n\">3-5\u00d7<\/div>\r\n<div class=\"l\">\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30d7\u30ed\u30b0\u30e9\u30e0\u306e\u6700\u9069\u5316\u306b\u3088\u308a\u30d1\u30c3\u30c9\u5bff\u547d\u306e\u5411\u4e0a\u304c\u53ef\u80fd<\/div>\r\n<\/div>\r\n<\/div>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"cond-mechanism\">\r\n<h2>2.\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\uff1a\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u304c\u30d1\u30c3\u30c9\u306e\u8cea\u611f\u3092\u56de\u5fa9\u3055\u305b\u308b\u30e1\u30ab\u30cb\u30ba\u30e0<\/h2>\r\n<p>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30d1\u30c3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306f\u3001\u786c\u3044\u7814\u78e8\u5264\u3067\u30dd\u30ea\u30a6\u30ec\u30bf\u30f3\u30fb\u30d1\u30c3\u30c9\u306e\u8868\u9762\u3092\u30de\u30a4\u30af\u30ed\u30fb\u30ab\u30c3\u30c8\u3057\u3001\u5149\u6ca2\u306e\u3042\u308b\u5916\u5c64\u3092\u9664\u53bb\u3057\u3066\u3001\u30a2\u30b9\u30da\u30ea\u30c6\u30a3\u3001\u958b\u6c17\u5b54\u3001\u30de\u30a4\u30af\u30ed\u30fb\u30c1\u30e3\u30f3\u30cd\u30eb\u304b\u3089\u306a\u308b\u65b0\u9bae\u306a\u30de\u30a4\u30af\u30ed\u30fb\u30c6\u30af\u30b9\u30c1\u30e3\u30fc\u306e\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u30fc\u3092\u4f5c\u308a\u51fa\u3059\u3053\u3068\u306b\u3088\u3063\u3066\u6a5f\u80fd\u3059\u308b\u3002\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u7825\u77f3\u306e\u30c9\u30ec\u30c3\u30b7\u30f3\u30b0\u306b\u4f3c\u3066\u3044\u308b\u3002.<\/p>\r\n<p>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30c7\u30a3\u30b9\u30af\u306f\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u3068\u30d7\u30e9\u30c6\u30f3\u306e\u4e21\u65b9\u304c\u56de\u8ee2\u3059\u308b\u9593\u3001\u5236\u5fa1\u3055\u308c\u305f\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\uff08\u901a\u5e38\u3001100 mm\u306e\u30c7\u30a3\u30b9\u30af\u30675\uff5e60 N\uff09\u3067\u56de\u8ee2\u3059\u308b\u30d1\u30c3\u30c9\u8868\u9762\u306b\u62bc\u3057\u4ed8\u3051\u3089\u308c\u307e\u3059\u3002\u30d1\u30c3\u30c9\u534a\u5f84\u3092\u6a2a\u5207\u308b\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u6383\u5f15\u904b\u52d5\u3068\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u3068\u30d7\u30e9\u30c6\u30f3\u9593\u306e\u76f8\u5bfe\u7684\u306a\u56de\u8ee2\u304c\u7d44\u307f\u5408\u308f\u3055\u308b\u3053\u3068\u3067\u3001\u30d1\u30c3\u30c9\u8868\u9762\u306e\u3059\u3079\u3066\u306e\u30be\u30fc\u30f3\u304c\u5747\u7b49\u306a\u7d2f\u7a4d\u9732\u5149\u3067\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3055\u308c\u307e\u3059\u3002.<\/p>\r\n<div class=\"jz-hl\">\r\n<p>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306b\u3088\u3063\u3066\u30d1\u30c3\u30c9\u304b\u3089\u9664\u53bb\u3055\u308c\u308b\u6750\u6599\u306f\u3001\u7422\u78e8\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u3063\u3066\u30a6\u30a7\u30fc\u30cf\u304b\u3089\u9664\u53bb\u3055\u308c\u308b\u6750\u6599\u3088\u308a\u3082\u306f\u308b\u304b\u306b\u5c0f\u3055\u304f\u3001\u901a\u5e38\u3001\u7422\u78e81\u6642\u9593\u5f53\u305f\u308a\u306e\u30d1\u30c3\u30c9\u6750\u6599\u306f1\uff5e5\u00b5m\u3067\u3042\u308b\u306e\u306b\u5bfe\u3057\u3001\u30a6\u30a7\u30fc\u30cf\u819c\u9664\u53bb\u306f100\uff5e600 nm\/\u5206\u3067\u3059\u3002\u305d\u308c\u306b\u3082\u304b\u304b\u308f\u3089\u305a\u3001\u3053\u306e\u308f\u305a\u304b\u3067\u306f\u3042\u308b\u304c\u7d99\u7d9a\u7684\u306a\u30d1\u30c3\u30c9\u306e\u4fb5\u98df\u306f\u3001\u751f\u7523\u4e2d\u306eCMP\u30d1\u30c3\u30c9\u306e\u5bff\u547d\u3092\u5236\u9650\u3059\u308b\u4e3b\u306a\u30e1\u30ab\u30cb\u30ba\u30e0\u3067\u3042\u308a\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30d1\u30e9\u30e1\u30fc\u30bf\u306f\u3001\u81ea\u7136\u306a\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u3092\u8d85\u3048\u3066\u30d1\u30c3\u30c9\u306e\u6469\u8017\u3092\u52a0\u901f\u3059\u308b\u3053\u3068\u306a\u304f\u3001\u9069\u5207\u306a\u30c6\u30af\u30b9\u30c1\u30e3\u4fee\u5fa9\u3092\u63d0\u4f9b\u3059\u308b\u3088\u3046\u306b\u9078\u629e\u3055\u308c\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/p>\r\n<\/div>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"cond-types\">\r\n<h2>3.\u30d1\u30c3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u7a2e\u985e<\/h2>\r\n<div class=\"jz-grid2\">\r\n<div class=\"jz-card\">\r\n<h4>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u5165\u308a\u30e1\u30bf\u30eb\u30fb\u30c7\u30a3\u30b9\u30af\uff08\u30b9\u30bf\u30f3\u30c0\u30fc\u30c9\uff09<\/h4>\r\n<ul>\r\n<li>\u534a\u5c0e\u4f53CMP\u3067\u6700\u3082\u4e00\u822c\u7684\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30bf\u30a4\u30d7<\/li>\r\n<li>Ni\u96fb\u6c17\u3081\u3063\u304d\u307e\u305f\u306f\u308d\u3046\u4ed8\u3051\u91d1\u5c5e\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u306b\u57cb\u3081\u8fbc\u307e\u308c\u305f\u5408\u6210\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7c92\u5b50<\/li>\r\n<li>\u8907\u6570\u306e\u7825\u7c92\u30b5\u30a4\u30ba\u304b\u3089\u9078\u629e\u53ef\u80fd\uff08\u901a\u5e38\u3001\u5e73\u5747\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30b5\u30a4\u30ba50\uff5e200\u03bcm\uff09<\/li>\r\n<li>\u30c7\u30a3\u30b9\u30af\u76f4\u5f84\uff1a300mm\u30a6\u30a7\u30fc\u30cf\u30fb\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u3067\u306f\u901a\u5e38100\uff5e114mm<\/li>\r\n<li>\u8010\u7528\u5e74\u6570\uff1a\u7825\u7c92\u3068\u7528\u9014\u306b\u3088\u308a500\uff5e3,000\u6642\u9593<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jz-card\">\r\n<h4>CVD\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30fb\u30c7\u30a3\u30b9\u30af<\/h4>\r\n<ul>\r\n<li>WC\u307e\u305f\u306fSi\u57fa\u677f\u4e0a\u306b\u5316\u5b66\u84b8\u7740\u6cd5\u306b\u3088\u308a\u6210\u819c\u3055\u308c\u305f\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u819c<\/li>\r\n<li>\u96fb\u7740\u30c7\u30a3\u30b9\u30af\u3088\u308a\u3082\u5747\u4e00\u306a\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u8868\u9762<\/li>\r\n<li>\u7a81\u8d77\u306e\u9ad8\u3055\u3092\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3059\u308b\u3053\u3068\u3067\u3001\u3088\u308a\u512a\u308c\u305f\u30d1\u30c3\u30c9\u30b9\u30af\u30e9\u30c3\u30c1\u4f4e\u6e1b\u3092\u5b9f\u73fe<\/li>\r\n<li>\u521d\u671f\u30b3\u30b9\u30c8\u306f\u9ad8\u3044\u304c\u3001\u5bff\u547d\u304c\u9577\u304f\u3001\u6027\u80fd\u304c\u5b89\u5b9a\u3057\u3066\u3044\u308b\u3053\u3068\u304c\u591a\u3044\u3002<\/li>\r\n<li>\u8d85\u4f4e\u6b20\u9665\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u6700\u9069\uff08Cu\u30d0\u30d5\u3001\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u5c64\u524d\u51e6\u7406\uff09<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jz-card\">\r\n<h4>\u30d6\u30e9\u30b7\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc<\/h4>\r\n<ul>\r\n<li>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30c7\u30a3\u30b9\u30af\u306e\u4ee3\u308f\u308a\u306b\u3001\u786c\u3044\u30dd\u30ea\u30de\u30fc\u88fd\u307e\u305f\u306f\u91d1\u5c5e\u88fd\u306e\u6bdb\u30d6\u30e9\u30b7\u3092\u4f7f\u7528\u3002<\/li>\r\n<li>\u7de9\u3084\u304b\u306a\u30c6\u30af\u30b9\u30c1\u30e3\u30fc\u5fa9\u5143 - \u30d1\u30c3\u30c9\u6750\u306e\u9664\u53bb\u306f\u6700\u5c0f\u9650<\/li>\r\n<li>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u304c\u5f37\u3059\u304e\u308b\u30bd\u30d5\u30c8\u30dd\u30ea\u30c6\u30c3\u30af\u30b9\u30bf\u30a4\u30d7\u306e\u30d1\u30c3\u30c9\u306b\u4f7f\u7528\u3002<\/li>\r\n<li>\u30a2\u30b9\u30da\u30ea\u30c6\u30a3\u306e\u518d\u5207\u524a\u3088\u308a\u3082\u3001\u57cb\u6ca1\u3057\u305f\u30b9\u30e9\u30ea\u30fc\u6b8b\u6e23\u306e\u9664\u53bb\u304c\u4e3b\u4f53<\/li>\r\n<li>\u4f4e\u30b3\u30b9\u30c8\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30c7\u30a3\u30b9\u30af\u306b\u6bd4\u3079\u5de5\u5177\u4f7f\u7528\u6642\u9593\u304c\u77ed\u3044\u3002<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jz-card\">\r\n<h4>\u9ad8\u5727\u30a6\u30a9\u30fc\u30bf\u30fc\u30b8\u30a7\u30c3\u30c8<\/h4>\r\n<ul>\r\n<li>\u30d1\u30c3\u30c9\u8868\u9762\u306b\u5411\u3051\u3089\u308c\u305f100\uff5e400 bar\u306e\u7d14\u6c34\u30b8\u30a7\u30c3\u30c8<\/li>\r\n<li>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u3092\u6469\u8017\u3055\u305b\u308b\u3053\u3068\u306a\u304f\u3001\u30b9\u30e9\u30ea\u30fc\u6b8b\u6e23\u3092\u6d17\u6d44\u3057\u3001\u8a70\u307e\u3063\u305f\u5b54\u3092\u958b\u304f<\/li>\r\n<li>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3068\u4e26\u3093\u3067\u3001\u88dc\u52a9\u7684\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30c6\u30af\u30cb\u30c3\u30af\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u308b\u3002<\/li>\r\n<li>\u8868\u9762\u306e\u51f9\u51f8\u306e\u9ad8\u3055\u306f\u5fa9\u5143\u3067\u304d\u307e\u305b\u3093 - \u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30c7\u30a3\u30b9\u30af\u3068\u7d44\u307f\u5408\u308f\u305b\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\r\n<li>Cu\u30b9\u30e9\u30ea\u30fc\u30d1\u30c3\u30c9\u306e\u6e05\u6d44\u5ea6\u7dad\u6301\u306b\u7279\u306b\u6709\u52b9<\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"diamond-design\">\r\n<h2>4.\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30fb\u30c7\u30a3\u30b9\u30af\u306e\u30c7\u30b6\u30a4\u30f3<\/h2>\r\n<p>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30fb\u30c7\u30a3\u30b9\u30af\u306e\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306f\u3001\u30d1\u30c3\u30c9\u306e\u30c6\u30af\u30b9\u30c1\u30e3\u30fc\u3092\u3069\u308c\u3060\u3051\u7a4d\u6975\u7684\u306b\u56de\u5fa9\u3055\u305b\u308b\u304b\u3001\u30d1\u30c3\u30c9\u306e\u534a\u5f84\u3092\u3069\u308c\u3060\u3051\u5747\u4e00\u306b\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3059\u308b\u304b\u3001\u3069\u308c\u3060\u3051\u9577\u6301\u3061\u3055\u305b\u308b\u304b\u3001\u305d\u3057\u3066\u30a6\u30a7\u30fc\u30cf\u306b\u50b7\u3092\u3064\u3051\u308b\u53ef\u80fd\u6027\u306e\u3042\u308b\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7c92\u5b50\u3092\u653e\u51fa\u3059\u308b\u30ea\u30b9\u30af\u304c\u3042\u308b\u304b\u3069\u3046\u304b\u3092\u6c7a\u5b9a\u3057\u307e\u3059\u3002\u91cd\u8981\u306a\u8a2d\u8a08\u30d1\u30e9\u30e1\u30fc\u30bf\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3059\uff1a<\/p>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>\u8a2d\u8a08\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\r\n<th>\u4ee3\u8868\u7684\u306a\u4ed5\u69d8<\/th>\r\n<th>\u30d7\u30ed\u30bb\u30b9\u3078\u306e\u5f71\u97ff<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td><strong>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7c92\u5ea6<\/strong><\/td>\r\n<td>50\uff5e80\u03bcm\uff08\u7d30\u76ee\uff09\u3001100\uff5e150\u03bcm\uff08\u4e2d\u76ee\uff09\u3001150\uff5e200\u03bcm\uff08\u7c97\u76ee\uff09<\/td>\r\n<td>\u7c92\u5ea6\u304c\u5927\u304d\u3044 = \u3088\u308a\u30a2\u30b0\u30ec\u30c3\u30b7\u30d6\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3001\u3088\u308a\u901f\u3044MRR\u56de\u5fa9\u3001\u3088\u308a\u901f\u3044\u30d1\u30c3\u30c9\u6469\u8017\u3002<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u6fc3\u5ea6\uff08\u5bc6\u5ea6\uff09<\/strong><\/td>\r\n<td>40\uff5e120\u500b\/cm\u00b2\u306e\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9<\/td>\r\n<td>\u9ad8\u5bc6\u5ea6 = \u3088\u308a\u5747\u4e00\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u8377\u91cd\u5206\u5e03\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c91\u500b\u3042\u305f\u308a\u306e\u5fdc\u529b\u4f4e\u6e1b\u3001\u3088\u308a\u9577\u3044\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u5bff\u547d<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u7a81\u51fa\u9ad8\u3055<\/strong><\/td>\r\n<td>\u5e73\u5747\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u5f8420-60%<\/td>\r\n<td>CVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u96fb\u6c17\u30e1\u30c3\u30ad\u30c7\u30a3\u30b9\u30af\u3088\u308a\u3082\u7a81\u51fa\u91cf\u306e\u5747\u4e00\u6027\u306b\u512a\u308c\u3066\u3044\u307e\u3059\u3002<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u7d20\u6750<\/strong><\/td>\r\n<td>Ni\u96fb\u6c17\u3081\u3063\u304d; Cu\/Ni\u308d\u3046\u4ed8\u3051; CVD\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9; PTFE\u63a5\u5408<\/td>\r\n<td>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u4fdd\u6301\u529b\u3092\u6c7a\u5b9a\u3059\u308b\u3002\u96fb\u6c17\u3081\u3063\u304d\u306f\u30b3\u30b9\u30c8\u306b\u5bfe\u3057\u3066\u4fdd\u6301\u529b\u304c\u9ad8\u3044\u3002<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30c7\u30a3\u30b9\u30af\u76f4\u5f84<\/strong><\/td>\r\n<td>100-114mm\uff08300mm\u5de5\u5177\uff09\uff1b50-75mm\uff08200mm\u5de5\u5177\uff09<\/td>\r\n<td>\u30c4\u30fc\u30eb\u30a2\u30fc\u30e0\u306e\u6383\u5f15\u7bc4\u56f2\u306b\u5408\u308f\u305b\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u8868\u9762\u30d1\u30bf\u30fc\u30f3\uff08\u30be\u30fc\u30f3\u30fb\u30ec\u30a4\u30a2\u30a6\u30c8\uff09<\/strong><\/td>\r\n<td>\u5747\u4e00\uff1b\u74b0\u72b6\u30be\u30fc\u30f3\uff1b\u30bb\u30af\u30bf\u30fc\u30be\u30fc\u30f3<\/td>\r\n<td>\u30be\u30fc\u30f3\u5316\u3055\u308c\u305f\u30ec\u30a4\u30a2\u30a6\u30c8\u306f\u3001\u30d1\u30c3\u30c9\u534a\u5f84\u65b9\u5411\u306e\u6469\u8017\u306e\u4e0d\u5747\u4e00\u6027\u3092\u88dc\u6b63\u3059\u308b\u305f\u3081\u306b\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u653b\u6483\u6027\u3092\u534a\u5f84\u65b9\u5411\u306b\u8abf\u6574\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<div class=\"jz-warn\">\r\n<div class=\"jz-warn-icon\">\u26a0\ufe0f<\/div>\r\n<div class=\"jz-warn-body\"><strong>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u8131\u843d\u30ea\u30b9\u30af\uff1a<\/strong> \u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7c92\u5b50\u304c\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30c7\u30a3\u30b9\u30af\u304b\u3089\u5265\u96e2\u3057\u3001\u30b9\u30e9\u30ea\u30fc\u306e\u6d41\u308c\u306b\u5dfb\u304d\u8fbc\u307e\u308c\u308b\u3068\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u4e0b\u306b\u904b\u3070\u308c\u3001\u81f4\u547d\u7684\u306a\u6df1\u3044\u50b7\u3092\u5f15\u304d\u8d77\u3053\u3057\u307e\u3059\u3002\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u8131\u843d\u306f\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30c7\u30a3\u30b9\u30af\u306e\u6700\u3082\u6df1\u523b\u306a\u6545\u969c\u30e2\u30fc\u30c9\u3067\u3059\u3002\u96fb\u89e3\u30e1\u30c3\u30ad\u30c7\u30a3\u30b9\u30af\u306f\u3001\u308d\u3046\u4ed8\u3051\u3084CVD\u306e\u4ee3\u66ff\u54c1\u3088\u308a\u3082\u8131\u843d\u306e\u5f71\u97ff\u3092\u53d7\u3051\u3084\u3059\u304f\u3001\u7279\u306bNi\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u304c\u90e8\u5206\u7684\u306b\u6469\u8017\u3059\u308b\u30c7\u30a3\u30b9\u30af\u5bff\u547d\u306e\u5f8c\u671f\u306b\u9855\u8457\u3067\u3059\u3002\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30fb\u30c7\u30a3\u30b9\u30af\u306f\u5e38\u306b\u5b9a\u671f\u7684\u306b\u691c\u67fb\u3057\u3001\u305f\u3068\u3048\u30c7\u30a3\u30b9\u30af\u304c\u5de8\u8996\u7684\u306b\u7121\u50b7\u306b\u898b\u3048\u3066\u3082\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u5bff\u547d\u306e\u4e0a\u9650\u3092\u8a2d\u5b9a\u3057\u3066\u304f\u3060\u3055\u3044\u3002.<\/div>\r\n<\/div>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"modes\">\r\n<h2>5.\u73fe\u5834\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3068\u73fe\u5834\u5916\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0<\/h2>\r\n<p>\u30d1\u30c3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306f\u3001\u57fa\u672c\u7684\u306b\u7570\u306a\u308b2\u3064\u306e\u30e2\u30fc\u30c9\u3067\u5b9f\u884c\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u305d\u308c\u305e\u308c\u306b\u660e\u78ba\u306a\u5229\u70b9\u3068\u30c8\u30ec\u30fc\u30c9\u30aa\u30d5\u304c\u3042\u308b\u3002\u3069\u3061\u3089\u3092\u9078\u629e\u3059\u308b\u304b\u3001\u3042\u308b\u3044\u306f\u4e21\u65b9\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u304b\u306f\u3001\u7279\u5b9a\u306e\u7528\u9014\u3001\u8981\u6c42\u3055\u308c\u308bMRR\u306e\u5b89\u5b9a\u6027\u3001\u76ee\u6a19\u6240\u6709\u30b3\u30b9\u30c8\u306b\u3088\u3063\u3066\u6c7a\u307e\u308b\u3002.<\/p>\r\n<div class=\"jz-grid2\">\r\n<div class=\"jz-card\">\r\n<h4>\u30a4\u30f3\u30b5\u30a4\u30c1\u30e5\uff08\u540c\u6642\uff09\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0<\/h4>\r\n<ul>\r\n<li>\u30a6\u30a7\u30fc\u30cf\u7814\u78e8\u4e2d\u306b\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30c7\u30a3\u30b9\u30af\u304c\u30d1\u30c3\u30c9\u8868\u9762\u3092\u540c\u6642\u306b\u30af\u30ea\u30fc\u30cb\u30f3\u30b0<\/li>\r\n<li>\u30d1\u30c3\u30c9\u306e\u30c6\u30af\u30b9\u30c1\u30e3\u30fc\u3092\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u5fa9\u5143\u3057\u7d9a\u3051\u308b<\/li>\r\n<li>\u6700\u3082\u5b89\u5b9a\u3057\u305f\u30e9\u30f3\u30fb\u30c8\u30a5\u30fb\u30e9\u30f3\u304a\u3088\u3073\u30e9\u30f3\u5185MRR\u3092\u9054\u6210<\/li>\r\n<li>\u30cf\u30fc\u30c9\u30d1\u30c3\u30c9\/\u9178\u5316\u7269\u304a\u3088\u3073W CMP\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u696d\u754c\u6a19\u6e96<\/li>\r\n<li>\u9ad8\u3044\u30d1\u30c3\u30c9\u6469\u8017\u7387 - \u7814\u78e8\u6642\u9593\u306e100%\u3067\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u304c\u6709\u52b9<\/li>\r\n<li>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30a2\u30fc\u30e0\u306e\u30b9\u30a4\u30fc\u30d7\u306f\u3001\u7834\u7247\u306b\u3088\u308b\u30a6\u30a7\u30cf\u30fc\u306e\u6c5a\u67d3\u3092\u907f\u3051\u308b\u305f\u3081\u306b\u8abf\u6574\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jz-card\">\r\n<h4>\u73fe\u5834\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0<\/h4>\r\n<ul>\r\n<li>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306f\u3001\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u4e2d\u3067\u306f\u306a\u304f\u3001\u30a6\u30a7\u30fc\u30cf\u30e9\u30f3\u3068\u30a6\u30a7\u30fc\u30cf\u30e9\u30f3\u306e\u9593\u306b\u884c\u308f\u308c\u307e\u3059\u3002<\/li>\r\n<li>\u30d1\u30c3\u30c9\u6469\u8017\u7387\u306e\u4f4e\u6e1b\uff08\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30c7\u30e5\u30fc\u30c6\u30a3\u30b5\u30a4\u30af\u30eb\uff1c100%\uff09<\/li>\r\n<li>\u904b\u8ee2\u3054\u3068\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u7528\u91cf\u3092\u3088\u308a\u6b63\u78ba\u306b\u5236\u5fa1\u53ef\u80fd<\/li>\r\n<li>\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u30a4\u30f3\u30bf\u30fc\u30d0\u30eb\u304c\u9577\u3059\u304e\u308b\u5834\u5408\u3001MRR\u306f\u30e9\u30f3\u5185\u3067\u30c9\u30ea\u30d5\u30c8\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002<\/li>\r\n<li>\u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\u3001\u8d85\u4f4e\u8a98\u96fb\u7387\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3001\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u5c64CMP\u306b\u4f7f\u7528\u3002<\/li>\r\n<li>in-situ\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3068\u7d44\u307f\u5408\u308f\u305b\u3066\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30d7\u30ed\u30c8\u30b3\u30fc\u30eb\u304c\u53ef\u80fd\u3002<\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<h3>\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30d7\u30ed\u30c8\u30b3\u30eb<\/h3>\r\n<p>\u591a\u304f\u306e\u5148\u9032\u30ce\u30fc\u30c9\u30d7\u30ed\u30bb\u30b9\u30d5\u30ed\u30fc\u3067\u306f\u3001\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3092\u4f4e\u6e1b\u3057\u305f\u539f\u4f4d\u7f6e\u3067\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\uff08MRR\u306e\u5b89\u5b9a\u6027\u3092\u7dad\u6301\uff09\u3068\u3001\u5b9a\u671f\u7684\u306a\u539f\u4f4d\u7f6e\u3067\u306e\u96c6\u4e2d\u7684\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\uff08\u539f\u4f4d\u7f6e\u3060\u3051\u3067\u306f\u30af\u30ea\u30a2\u3067\u304d\u306a\u3044\u7d2f\u7a4d\u7684\u306a\u30d1\u30c3\u30c9\u8ca0\u8377\u306b\u5bfe\u51e6\uff09\u3092\u7d44\u307f\u5408\u308f\u305b\u305f\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30a2\u30d7\u30ed\u30fc\u30c1\u3092\u63a1\u7528\u3057\u3066\u3044\u308b\u3002\u3053\u306e\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u6226\u7565\u306f\u3001\u540c\u7b49\u306eMRR\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u3001\u5b8c\u5168\u306a\u539f\u4f4d\u7f6e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3068\u6bd4\u8f03\u3057\u3066\u30d1\u30c3\u30c9\u5168\u4f53\u306e\u6469\u8017\u7387\u309215\uff5e25%\u524a\u6e1b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u3053\u308c\u306f\u30b9\u30b1\u30fc\u30eb\u30a2\u30c3\u30d7\u306b\u304a\u3044\u3066\u6709\u610f\u7fa9\u306a\u6240\u6709\u30b3\u30b9\u30c8\u306e\u5229\u70b9\u3068\u306a\u308b\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"parameters\">\r\n<h2>6.\u4e3b\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc<\/h2>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\r\n<th>\u5178\u578b\u7684\u306a\u7bc4\u56f2<\/th>\r\n<th>MRR\u3078\u306e\u5f71\u97ff<\/th>\r\n<th>\u30d1\u30c3\u30c9\u6469\u8017\u3078\u306e\u5f71\u97ff<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td><strong>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\uff08N\uff09<\/strong><\/td>\r\n<td>5-60 N<\/td>\r\n<td>\u2191 \u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9 \u2192 \u2191 MRR \u5fa9\u5e30\u901f\u5ea6<\/td>\r\n<td>\u2191 \u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9 \u2192 \u2191 \u30d1\u30c3\u30c9\u6469\u8017\u7387\uff08\u30ea\u30cb\u30a2\u306a\u95a2\u4fc2\uff09<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u56de\u8ee2\u901f\u5ea6\uff08RPM\uff09<\/strong><\/td>\r\n<td>10-100 RPM<\/td>\r\n<td>\u2191 RPM \u2192 \u2191 \u4e00\u6383\u3042\u305f\u308a\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30ab\u30d0\u30ec\u30c3\u30b8<\/td>\r\n<td>\u4e2d\u7a0b\u5ea6\u306e\u52b9\u679c\uff1b\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3068\u76f8\u4e92\u4f5c\u7528\u3059\u308b<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30a2\u30fc\u30e0\u6383\u5f15\u901f\u5ea6\uff08mm\/s\uff09<\/strong><\/td>\r\n<td>5-50 mm\/s<\/td>\r\n<td>\u2193 \u6383\u5f15\u7387 \u2192 \u30be\u30fc\u30f3\u3054\u3068\u306e\u6ede\u7559\u6642\u9593\u304c\u9577\u3044 \u2192 \u2191 \u30ed\u30fc\u30ab\u30ebMRR<\/td>\r\n<td>\u6383\u5f15\u901f\u5ea6\u304c\u9045\u3044\uff1d1\u30d1\u30b9\u3042\u305f\u308a\u306e\u30d1\u30c3\u30c9\u9664\u53bb\u91cf\u304c\u591a\u3044<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30d7\u30e9\u30c6\u30f3\u56de\u8ee2\u901f\u5ea6\uff08RPM\uff09<\/strong><\/td>\r\n<td>30-120 RPM<\/td>\r\n<td>\u30d7\u30e9\u30c6\u30f3\u56de\u8ee2\u6570\u304c\u9ad8\u3044 \u2192 1\u6383\u5f15\u3042\u305f\u308a\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30b3\u30f3\u30bf\u30af\u30c8\u6570\u304c\u591a\u3044<\/td>\r\n<td>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30fb\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u56fa\u5b9a\u6642\u306e\u52b9\u679c\u306f\u5c0f\u3055\u3044<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6642\u306e\u7d14\u6c34\u6d41\u91cf\uff08mL\/min\uff09<\/strong><\/td>\r\n<td>200-500 mL\/\u5206<\/td>\r\n<td>\u6c34\u306f\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3092\u6f64\u6ed1\u306b\u3059\u308b\u3002<\/td>\r\n<td>\u6c34\u91cf\u304c\u591a\u3044 \u2192 \u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30b5\u30a4\u30af\u30eb\u3042\u305f\u308a\u306e\u30d1\u30c3\u30c9\u6469\u8017\u304c\u5c11\u306a\u3044<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6642\u9593\/\u30c7\u30e5\u30fc\u30c6\u30a3\u30b5\u30a4\u30af\u30eb\uff08%\uff09<\/strong><\/td>\r\n<td>\u7814\u78e8\u6642\u959325-100%<\/td>\r\n<td>\u3088\u308a\u9ad8\u3044\u30c7\u30e5\u30fc\u30c6\u30a3\u30fb\u30b5\u30a4\u30af\u30eb \u2192 \u3088\u308a\u5b89\u5b9a\u3057\u305fMRR<\/td>\r\n<td>\u30c7\u30e5\u30fc\u30c6\u30a3\u30fb\u30b5\u30a4\u30af\u30eb\u304c\u9ad8\u3044 \u2192 \u30d1\u30c3\u30c9\u306e\u6469\u8017\u3082\u6bd4\u4f8b\u3057\u3066\u591a\u3044<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"optimization\">\r\n<h2>7.\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u6700\u9069\u5316\u4f59\u5206\u306a\u30d1\u30c3\u30c9\u6469\u8017\u306a\u3057\u306b\u5b89\u5b9a\u3057\u305fMRR\u3092\u9054\u6210\u3059\u308b<\/h2>\r\n<p>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u958b\u767a\u306e\u4e2d\u5fc3\u7684\u306a\u8ab2\u984c\u306f\u3001\u30a6\u30a7\u30fc\u30cf1\u679a\u5f53\u305f\u308a\u306e\u30d1\u30c3\u30c9\u6750\u6599\u306e\u6d88\u8cbb\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u306a\u304c\u3089\u3001MRR\u3092\u4ed5\u69d8\u5185\u306b\u7dad\u6301\u3059\u308b\u6700\u5c0f\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u91cf\uff08\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3001\u30c7\u30e5\u30fc\u30c6\u30a3\u30b5\u30a4\u30af\u30eb\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u7825\u7c92\u306e\u7d44\u307f\u5408\u308f\u305b\uff09\u3092\u898b\u3064\u3051\u308b\u3053\u3068\u3067\u3059\u3002\u904e\u5270\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306f\u30d1\u30c3\u30c9\u6750\u6599\u3092\u6d6a\u8cbb\u3057\u3001\u30d1\u30c3\u30c9\u5bff\u547d\u3092\u7e2e\u3081\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u8131\u843d\u3084\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u95a2\u9023\u306e\u6b20\u9665\u306e\u30ea\u30b9\u30af\u3092\u9ad8\u3081\u307e\u3059\u3002\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u4e0d\u8db3\u306fMRR\u306e\u30c9\u30ea\u30d5\u30c8\u3092\u5f15\u304d\u8d77\u3053\u3057\u3001\u6700\u7d42\u7684\u306b\u306f\u6b69\u7559\u307e\u308a\u306b\u5f71\u97ff\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u306e\u4e0d\u5b89\u5b9a\u5316\u306b\u3064\u306a\u304c\u308a\u307e\u3059\u3002.<\/p>\r\n<div class=\"jz-steps\">\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">1<\/div>\r\n<div class=\"jz-step-body\">\r\n<p><strong>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3092\u884c\u308f\u305a\u3001\u30d9\u30fc\u30b9\u30e9\u30a4\u30f3\u306eMRR\u5bfe\u30a6\u30a7\u30fc\u30cf\u679a\u6570\u66f2\u7dda\u3092\u78ba\u7acb\u3059\u308b\uff1a<\/strong> \u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3092\u7121\u52b9\u306b\u3057\u305f\u30d6\u30e9\u30f3\u30b1\u30c3\u30c8\u30a6\u30a7\u30cf\u30fc\u3092\u4f55\u679a\u3082\u4f5c\u6210\u3059\u308b\u3002MRR\u3068\u30a6\u30a7\u30fc\u30cf\u679a\u6570\u3092\u30d7\u30ed\u30c3\u30c8\u3057\u3001\u7279\u5b9a\u306e\u30d1\u30c3\u30c9\u3068\u30b9\u30e9\u30ea\u30fc\u306e\u7d44\u307f\u5408\u308f\u305b\u306b\u304a\u3051\u308b\u81ea\u7136\u306a\u30d1\u30c3\u30c9\u30b0\u30ec\u30fc\u30b8\u30f3\u30b0\u7387\u3092\u5b9a\u91cf\u5316\u3057\u307e\u3059\u3002\u3053\u306e\u66f2\u7dda\u306f\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u9593\u9694\u306e\u6700\u5927\u8a31\u5bb9\u5024\u3092\u5b9a\u7fa9\u3057\u307e\u3059\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">2<\/div>\r\n<div class=\"jz-step-body\">\r\n<p><strong>\u6700\u5c0f\u6709\u52b9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u91cf\u3092\u6c7a\u5b9a\u3059\u308b\uff1a<\/strong> \u4e00\u5b9a\u306e\u57fa\u6e96\u70b9\uff08\u4f8b\u3048\u3070\u300125\u30a6\u30a7\u30fc\u30cf\u30ed\u30c3\u30c8\u306e\u30a6\u30a7\u30fc\u30cf10\uff09\u3067MRR\u3092\u6e2c\u5b9a\u3057\u306a\u304c\u3089\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3068\u30c7\u30e5\u30fc\u30c6\u30a3\u30b5\u30a4\u30af\u30eb\u3092\u7cfb\u7d71\u7684\u306b\u5909\u5316\u3055\u305b\u308b\u3002\u57fa\u6e96\u70b9\u306b\u304a\u3051\u308bMRR\u3092\u76ee\u6a19\u306e\u00b15%\u4ee5\u5185\u306b\u7dad\u6301\u3059\u308b\u6700\u4f4e\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u7dda\u91cf\u3092\u7279\u5b9a\u3059\u308b\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">3<\/div>\r\n<div class=\"jz-step-body\">\r\n<p><strong>\u6700\u9069\u5316\u3055\u308c\u305f\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u91cf\u306b\u304a\u3051\u308b\u30d1\u30c3\u30c9\u306e\u6469\u8017\u7387\u3092\u8a55\u4fa1\u3059\u308b\uff1a<\/strong> \u6700\u9069\u5316\u3055\u308c\u305f\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30d1\u30e9\u30e1\u30fc\u30bf\u3067\u56fa\u5b9a\u30a6\u30a7\u30fc\u30cf\u30ed\u30c3\u30c8\u306e\u524d\u5f8c\u3067\u30d1\u30c3\u30c9\u539a\u3092\u6e2c\u5b9a\u3057\u307e\u3059\u3002\u30a6\u30a7\u30cf\u3042\u305f\u308a\u306e\u30d1\u30c3\u30c9\u9664\u53bb\u7387\u3092\u8a08\u7b97\u3057\u307e\u3059\u3002\u30d1\u30c3\u30c9\u306e\u5bff\u547d\u3092\u4e88\u6e2c\u3057\u3001\u4ea4\u63db\u30a6\u30a7\u30cf\u679a\u6570\u306e\u30c8\u30ea\u30ac\u30fc\u3092\u8a2d\u5b9a\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3057\u307e\u3059\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">4<\/div>\r\n<div class=\"jz-step-body\">\r\n<p><strong>\u30d1\u30c3\u30c9\u30e9\u30a4\u30d5\u5168\u4f53\u3067WIWNU\u3092\u691c\u8a3c\u3059\u308b\uff1a<\/strong> \u6700\u9069\u5316\u3055\u308c\u305f\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30ec\u30b7\u30d4\u3067\u3001\u4e88\u60f3\u3055\u308c\u308b\u30d1\u30c3\u30c9\u5bff\u547d\u3092\u901a\u3058\u3066\u30a6\u30a7\u30fc\u30cf\u5185\u5747\u4e00\u6027\u304c\u4ed5\u69d8\u5185\u306b\u4fdd\u305f\u308c\u3066\u3044\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3059\u308b\u3002WIWNU\u306fMRR\u304c\u9650\u754c\u306b\u9054\u3059\u308b\u524d\u306b\u52a3\u5316\u3059\u308b\u3053\u3068\u304c\u591a\u304f\u3001\u30a8\u30c3\u30b8\u5747\u4e00\u6027\u304c\u6700\u521d\u306b\u52a3\u5316\u3059\u308b\u30d1\u30e9\u30e1\u30fc\u30bf\u3067\u3042\u308b\u3053\u3068\u304c\u591a\u3044\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">5<\/div>\r\n<div class=\"jz-step-body\">\r\n<p><strong>\u30a2\u30c0\u30d7\u30c6\u30a3\u30d6\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3092\u5c0e\u5165\u3059\u308b\uff08\u30c4\u30fc\u30eb\u3067\u53ef\u80fd\u306a\u5834\u5408\uff09\uff1a<\/strong> \u5148\u9032\u306eCMP\u30c4\u30fc\u30eb\u306f\u3001\u6469\u64e6\u96fb\u6d41\u304c\u30b0\u30ec\u30fc\u30b8\u30f3\u30b0\u306e\u767a\u751f\u3092\u793a\u3059\u3068\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3092\u5897\u52a0\u3055\u305b\u3001MRR\u304c\u5b89\u5b9a\u3059\u308b\u3068\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3092\u6e1b\u5c11\u3055\u305b\u308b\u306a\u3069\u3001\u30d7\u30ed\u30bb\u30b9\u30d5\u30a3\u30fc\u30c9\u30d0\u30c3\u30af\u306b\u57fa\u3065\u3044\u3066\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u5909\u5316\u3055\u305b\u308b\u30ec\u30b7\u30d4\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3066\u3044\u307e\u3059\u3002\u9069\u5fdc\u578b\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306f\u3001\u56fa\u5b9a\u30ec\u30b7\u30d4\u306e\u30a2\u30d7\u30ed\u30fc\u30c1\u3088\u308a\u3082\u30d1\u30c3\u30c9\u5bff\u547d\u309220\uff5e30%\u5ef6\u3070\u3059\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"coo\">\r\n<h2>8.\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3068\u6240\u6709\u30b3\u30b9\u30c8<\/h2>\r\n<p>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u6c7a\u5b9a\u306f\u3001CMP\u4e8b\u696d\u306e\u7dcf\u30b3\u30b9\u30c8\u69cb\u9020\u306b\u9023\u9396\u7684\u306a\u5f71\u97ff\u3092\u53ca\u307c\u3059\u3002\u5b9a\u91cf\u5316\u3059\u3079\u304d\u4e3b\u306a\u30b3\u30b9\u30c8\u30c9\u30e9\u30a4\u30d0\u30fc\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3042\u308b\uff1a<\/p>\r\n<ul>\r\n<li><strong>\u30d1\u30c3\u30c9\u6d88\u8cbb\u7387\uff08\u03bcm\/\u30a6\u30a7\u30fc\u30cf\u30d1\u30b9\uff09\uff1a<\/strong> \u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u30a2\u30b0\u30ec\u30c3\u30b7\u30d6\u3055\u304c\u76f4\u63a5\u5f71\u97ff\u3057\u307e\u3059\u3002\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u304c10%\u6e1b\u5c11\u3059\u308b\u3054\u3068\u306b\u3001\u30d1\u30c3\u30c9\u306e\u6469\u8017\u7387\u306f\u901a\u5e388\uff5e12%\u6e1b\u5c11\u3057\u3001\u30d1\u30c3\u30c9\u306e\u30b3\u30b9\u30c8\u524a\u6e1b\u306b\u76f4\u7d50\u3059\u308b\u3002.<\/li>\r\n<li><strong>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30c7\u30a3\u30b9\u30af\u306e\u5bff\u547d\uff08\u6642\u9593\u307e\u305f\u306f\u30a6\u30a7\u30cf\u30fc\u30d1\u30b9\uff09\uff1a<\/strong> \u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u306f\u3001\u6307\u5b9a\u3055\u308c\u305f\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6642\u9593\u5185\u306b\u30d1\u30c3\u30c9\u306e\u30c6\u30af\u30b9\u30c1\u30e3\u30fc\u3092\u56de\u5fa9\u3067\u304d\u306a\u304f\u306a\u3063\u305f\u3089\u4ea4\u63db\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002\u30c7\u30a3\u30b9\u30af\u306e\u5bff\u547d\u306f\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6642\u9593\u3067\u6e2c\u5b9a\u3055\u308c\u3001\u6a19\u6e96\u7684\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30b7\u30fc\u30b1\u30f3\u30b9\u5f8c\u306e\u57fa\u6e96\u30d1\u30c3\u30c9\u7c97\u3055\u6e2c\u5b9a\u5024\u3092\u7528\u3044\u3066\u8ffd\u8de1\u3055\u308c\u308b\u3002.<\/li>\r\n<li><strong>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30a8\u30e9\u30fc\u306b\u3088\u308b\u53ce\u91cf\u30ea\u30b9\u30af\uff1a<\/strong> \u904e\u5ea6\u306b\u6469\u8017\u3057\u305f\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u304c\u30b9\u30e9\u30ea\u30fc\u306e\u6d41\u308c\u306b\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7c92\u5b50\u3092\u653e\u51fa\u3059\u308b\u3068\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u30ed\u30c3\u30c8\u5168\u4f53\u3092\u30b9\u30af\u30e9\u30c3\u30d7\u306b\u3059\u308b\u3088\u3046\u306a\u6df1\u3044\u50b7\u304c\u767a\u751f\u3057\u307e\u3059\u3002\u3053\u306e\u3088\u3046\u306a\u4e8b\u8c61\u304c1\u56de\u767a\u751f\u3057\u305f\u5834\u5408\u306e\u6b69\u7559\u307e\u308a\u30b3\u30b9\u30c8\u306f\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u4ea4\u63db\u30b3\u30b9\u30c8\u3092\u306f\u308b\u304b\u306b\u4e0a\u56de\u308a\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u5bff\u547d\u3092\u4fdd\u5b88\u7684\u306b\u7ba1\u7406\u3059\u308b\u3053\u3068\u306e\u6700\u3082\u5f37\u3044\u8ad6\u62e0\u3067\u3042\u308b\u3002.<\/li>\r\n<li><strong>\u30c4\u30fc\u30eb\u5229\u7528\u306e\u5f71\u97ff\uff1a<\/strong> \u30a2\u30b0\u30ec\u30c3\u30b7\u30d6\u3059\u304e\u308bIn-situ\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306f\u3001\u6b21\u306e\u30a6\u30a7\u30fc\u30cf\u3092\u30ed\u30fc\u30c9\u3059\u308b\u524d\u306b\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30a2\u30fc\u30e0\u304c\u6383\u5f15\u30b7\u30fc\u30b1\u30f3\u30b9\u3092\u5b8c\u4e86\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u305f\u3081\u3001\u6709\u52b9\u306a\u7422\u78e8\u30b5\u30a4\u30af\u30eb\u6642\u9593\u3092\u9577\u5f15\u304b\u305b\u307e\u3059\u3002MRR\u306e\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u6383\u5f15\u6642\u9593\u3092\u6700\u5c0f\u5316\u3059\u308b\u3053\u3068\u3067\u3001\u88c5\u7f6e\u306e\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u304c\u6700\u5927\u5316\u3055\u308c\u307e\u3059\u3002.<\/li>\r\n<\/ul>\r\n<div class=\"jz-fact\"><strong>\u30b3\u30b9\u30c8\u30d9\u30f3\u30c1\u30de\u30fc\u30af\uff1a<\/strong> 300mm\u306e\u91cf\u7523\u5de5\u5834\u3067\u3001CMP\u30c4\u30fc\u30eb\u30af\u30e9\u30b9\u30bf\u3042\u305f\u308a\u6708\u752310\u4e07\u679a\u306e\u30a6\u30a7\u30fc\u30cf\u30d1\u30b9\u3092\u5b9f\u884c\u3057\u3066\u3044\u308b\u5834\u5408\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u6700\u9069\u5316\u306b\u3088\u3063\u3066\u9054\u6210\u53ef\u80fd\u306a\u30d1\u30c3\u30c9\u306e\u6469\u8017\u738715%\u306e\u4f4e\u6e1b\u306f\u3001\u30d1\u30c3\u30c9\u306e\u7a2e\u985e\u3068\u5358\u4fa1\u306b\u3082\u3088\u308a\u307e\u3059\u304c\u3001\u30c4\u30fc\u30eb\u30af\u30e9\u30b9\u30bf\u3042\u305f\u308a\u5e74\u9593\u7d04$P200,000\uff5e$P400,000\u306e\u30d1\u30c3\u30c9\u30b3\u30b9\u30c8\u524a\u6e1b\u306b\u3064\u306a\u304c\u308a\u307e\u3059\u3002\u3053\u306e\u3053\u3068\u304b\u3089\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u6700\u9069\u5316\u306f\u3001CMP\u30d7\u30ed\u30bb\u30b9\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30c1\u30fc\u30e0\u306b\u3068\u3063\u3066\u3001\u6700\u3082\u30ea\u30bf\u30fc\u30f3\u306e\u9ad8\u3044\u30d7\u30ed\u30bb\u30b9\u6539\u5584\u6d3b\u52d5\u306e\u3072\u3068\u3064\u3068\u306a\u308a\u307e\u3059\u3002.<\/div>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"failure-modes\">\r\n<h2>9.\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u6545\u969c\u30e2\u30fc\u30c9\u3068\u691c\u51fa<\/h2>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>\u6545\u969c\u30e2\u30fc\u30c9<\/th>\r\n<th>\u75c7\u72b6<\/th>\r\n<th>\u691c\u51fa\u65b9\u6cd5<\/th>\r\n<th>\u662f\u6b63\u63aa\u7f6e<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td><strong>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u8131\u843d<\/strong><\/td>\r\n<td>\u30a6\u30a7\u30fc\u30cf\u4e0a\u306e\u6df1\u3044\u5b64\u7acb\u30b9\u30af\u30e9\u30c3\u30c1\u3001\u691c\u67fb\u6642\u306e\u7a81\u7136\u306e\u30b9\u30af\u30e9\u30c3\u30c1\u6570\u306e\u6025\u5897<\/td>\r\n<td>\u7814\u78e8\u5f8c\u306e\u6b20\u9665\u691c\u67fb\uff08KLA\/\u65e5\u7acb\uff09\uff1b\u30d1\u30c3\u30c9\u8868\u9762\u306e\u6df1\u3044\u6e9d\u306e\u76ee\u8996\u691c\u67fb<\/td>\r\n<td>\u76f4\u3061\u306b\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u3092\u4ea4\u63db\u3057\u3001\u30b9\u30e9\u30ea\u30fc\u30e9\u30a4\u30f3\u3092\u70b9\u691c\u30fb\u6e05\u6383\u3057\u3001\u751f\u7523\u518d\u958b\u524d\u306b\u30c0\u30df\u30fc\u30a6\u30a7\u30fc\u30cf\u3092\u7a3c\u52d5\u3055\u305b\u308b\u3002<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u306e\u6469\u8017\uff0f\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u5f15\u304d\u629c\u304d<\/strong><\/td>\r\n<td>\u30ec\u30b7\u30d4\u8abf\u6574\u3067\u306f\u4fee\u6b63\u3067\u304d\u306a\u3044\u7de9\u3084\u304b\u306aMRR\u4f4e\u4e0b\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u5f8c\u306e\u30d1\u30c3\u30c9\u7c97\u3055\u306e\u4f4e\u4e0b<\/td>\r\n<td>\u6a19\u6e96\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30b7\u30fc\u30b1\u30f3\u30b9\u5f8c\u306e\u30d1\u30c3\u30c9Ra\u6e2c\u5b9a\uff1b\u30d9\u30fc\u30b9\u30e9\u30a4\u30f3\u3068\u306e\u6bd4\u8f03<\/td>\r\n<td>\u5bff\u547d\u304c\u6765\u305f\u3089\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u3092\u4ea4\u63db\u3059\u308b\u3002<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30c7\u30a3\u30b9\u30af\u30fb\u30ed\u30fc\u30c7\u30a3\u30f3\u30b0\uff08\u30d1\u30c3\u30c9\u30fb\u30c7\u30d6\u30ea\u306e\u57cb\u3081\u8fbc\u307f\uff09<\/strong><\/td>\r\n<td>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u52b9\u679c\u306e\u4f4e\u4e0b\u3001\u30a6\u30a7\u30fc\u30cf\u534a\u5f84\u306b\u6e21\u308b\u4e0d\u898f\u5247\u306aMRR<\/td>\r\n<td>\u5149\u5b66\u9855\u5fae\u93e1\u306b\u3088\u308b\u30c7\u30a3\u30b9\u30af\u8868\u9762\u306e\u76ee\u8996\u691c\u67fb\uff1b\u7d14\u6c34\u306b\u3088\u308b\u30ea\u30f3\u30b9\u691c\u67fb<\/td>\r\n<td>\u30c7\u30a3\u30b9\u30af\u3092\u7d14\u6c34\u3067\u6d17\u6d44\u3057\u3001\u30d6\u30e9 \u30b7\u3067\u304d\u308c\u3044\u306b\u3059\u308b\u3002<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30a2\u30fc\u30e0\u30b9\u30a4\u30fc\u30d7\u306e\u4e0d\u5747\u4e00\u6027<\/strong><\/td>\r\n<td>\u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u306e\u653e\u5c04\u72b6MRR\u52fe\u914d\uff1b\u30a8\u30c3\u30b8WIWNU\u52a3\u5316<\/td>\r\n<td>\u30d6\u30e9\u30f3\u30b1\u30c3\u30c8\u30fb\u30a6\u30a7\u30fc\u30cf\u306eMRR\u30de\u30c3\u30d4\u30f3\u30b0\uff1b\u534a\u5f84\u65b9\u5411\u306e\u539a\u3055\u5909\u5316\u3092\u793a\u3059\u30d1\u30c3\u30c9\u30fb\u30d7\u30ed\u30d5\u30a3\u30ed\u30e1\u30c8\u30ea\u30fc<\/td>\r\n<td>\u30a2\u30fc\u30e0\u30b9\u30a4\u30fc\u30d7\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u306e\u518d\u8f03\u6b63\u3001\u30a2\u30fc\u30e0\u30d9\u30a2\u30ea\u30f3\u30b0\u306e\u78e8\u8017\u30c1\u30a7\u30c3\u30af\u3001\u30b9\u30a4\u30fc\u30d7\u30ec\u30b7\u30d4\u306e\u66f4\u65b0<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u50be\u304d\uff0f\u3050\u3089\u3064\u304d<\/strong><\/td>\r\n<td>\u30d1\u30c3\u30c9\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u304c\u5747\u4e00\u3067\u306a\u3044\u3002<\/td>\r\n<td>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u5e73\u9762\u5ea6\u6e2c\u5b9a\u3001\u30d1\u30c3\u30c9\u8868\u9762\u306e\u5149\u5b66\u691c\u67fb<\/td>\r\n<td>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u30b8\u30f3\u30d0\u30eb\u30a2\u30bb\u30f3\u30d6\u30ea\u3092\u70b9\u691c\u30fb\u4ea4\u63db\u3057\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u53d6\u308a\u4ed8\u3051\u30c8\u30eb\u30af\u3092\u78ba\u8a8d\u3059\u308b\u3002<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"advanced\">\r\n<h2>10.\u30b5\u30d67nm\u30ce\u30fc\u30c9\u306e\u305f\u3081\u306e\u5148\u9032\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6226\u7565<\/h2>\r\n<p>CMP\u30d7\u30ed\u30bb\u30b9\u304c\u30b5\u30d67nm\u30ce\u30fc\u30c9\u30843D-IC\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u9032\u3080\u306b\u3064\u308c\u3066\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u8981\u4ef6\u306f\u307e\u3059\u307e\u3059\u53b3\u3057\u304f\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u30d7\u30ed\u30bb\u30b9\u306e\u53b3\u3057\u3044\u4ed5\u69d8\u306b\u5bfe\u5fdc\u3059\u308b\u305f\u3081\u3001\u6700\u5148\u7aef\u30d5\u30a1\u30d6\u3067\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u5148\u9032\u7684\u306a\u6226\u7565\u304c\u63a1\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<h3>\u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\u7528\u8d85\u4f4e\u8377\u91cd\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0<\/h3>\r\n<p>\u9285\u30d0\u30d5\u3084\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u5c64\u306eCMP\u306b\u4f7f\u7528\u3055\u308c\u308b\u30dd\u30ea\u30c6\u30c3\u30af\u30b9\u30bf\u30a4\u30d7\u306e\u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\u3067\u306f\u3001\u6a19\u6e96\u7684\u306a\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\uff0820\uff5e40N\uff09\u3067\u5f93\u6765\u306e\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3092\u884c\u3046\u306e\u306f\u5f37\u5f15\u3059\u304e\u307e\u3059\u3002\u5fae\u7c92\u5b50\u306eCVD\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30c7\u30a3\u30b9\u30af\u3092\u4f7f\u7528\u3057\u305f\u8d85\u4f4e\u30d5\u30a9\u30fc\u30b9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\uff085\uff5e10N\uff09\u306f\u3001\u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\u6750\u6599\u3092\u6025\u901f\u306b\u6d88\u8017\u3059\u308b\u3053\u3068\u306a\u304f\u3001\u30b9\u30e9\u30ea\u30fc\u4fdd\u6301\u3068MRR\u3092\u7dad\u6301\u3059\u308b\u306e\u306b\u5341\u5206\u306a\u30c6\u30af\u30b9\u30c1\u30e3\u30fc\u66f4\u65b0\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002\u3053\u306e\u30a2\u30d7\u30ed\u30fc\u30c1\u306f\u3001\u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\u306e\u4f7f\u7528\u91cf\u304c\u5897\u52a0\u3057\u3066\u3044\u308b\u5148\u7aef\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0CMP\u306b\u304a\u3044\u3066\u3001\u307e\u3059\u307e\u3059\u91cd\u8981\u306b\u306a\u3063\u3066\u304d\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<h3>\u96fb\u6c17\u5316\u5b66\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\uff08ECC\uff09<\/h3>\r\n<p>\u96fb\u6c17\u5316\u5b66\u7684\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306f\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30a2\u30bb\u30f3\u30d6\u30ea\u306b\u7d44\u307f\u8fbc\u307e\u308c\u305f\u30d0\u30a4\u30a2\u30b9\u96fb\u6975\u3092\u4f7f\u7528\u3057\u3066\u3001\u30d1\u30c3\u30c9\u8868\u9762\u306e\u6750\u6599\u3092\u9078\u629e\u7684\u306b\u6eb6\u89e3\u307e\u305f\u306f\u518d\u5806\u7a4d\u3055\u305b\u307e\u3059\u3002\u3053\u306e\u6280\u8853\u306f\u3001\u307e\u3060\u4e3b\u306b\u7814\u7a76\u958b\u767a\u3067\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u304c\u3001\u7d14\u7c8b\u306b\u6a5f\u68b0\u7684\u306a\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3068\u6bd4\u8f03\u3057\u3066\u3001\u3088\u308a\u5fae\u7d30\u306aMRR\u5236\u5fa1\u3068\u30d1\u30c3\u30c9\u6469\u8017\u306e\u4f4e\u6e1b\u306e\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u6a5f\u68b0\u7684\u306a\u529b\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u8d85\u4f4e\u8a98\u96fb\u7387CMP\u3067\u306f\u3001\u7279\u306b\u8208\u5473\u6df1\u3044\u6280\u8853\u3067\u3059\u3002.<\/p>\r\n<h3>\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u30d1\u30c3\u30c9\u8868\u9762\u5f62\u72b6\u6e2c\u5b9a<\/h3>\r\n<p>\u5148\u9032\u7684\u306aCMP\u30c4\u30fc\u30eb\u306b\u306f\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u4e2d\u306b\u30d1\u30c3\u30c9\u7c97\u3055\u3068\u30a2\u30b9\u30da\u30ea\u30c6\u30a3\u9ad8\u3055\u3092\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u6e2c\u5b9a\u3059\u308b\u305f\u3081\u306b\u3001\u30ec\u30fc\u30b6\u30fc\u30b9\u30da\u30c3\u30af\u30eb\u3001\u767d\u8272\u5149\u5e72\u6e09\u8a08\u3001\u30a2\u30b3\u30fc\u30b9\u30c6\u30a3\u30c3\u30af\u30a8\u30df\u30c3\u30b7\u30e7\u30f3\u30bb\u30f3\u30b5\u30fc\u3092\u4f7f\u7528\u3057\u305f\u3001\u305d\u306e\u5834\u3067\u306e\u30d1\u30c3\u30c9\u8868\u9762\u8a08\u6e2c\u304c\u7d44\u307f\u8fbc\u307e\u308c\u59cb\u3081\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u30c7\u30fc\u30bf\u306f\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u5236\u5fa1\u30eb\u30fc\u30d7\u3092\u9589\u3058\u3001\u30ec\u30b7\u30d4\u3092\u56fa\u5b9a\u6642\u9593\u30d9\u30fc\u30b9\u306e\u30d7\u30ed\u30b0\u30e9\u30e0\u3067\u5b9f\u884c\u3059\u308b\u306e\u3067\u306f\u306a\u304f\u3001\u5b9f\u969b\u306e\u30d1\u30c3\u30c9\u8868\u9762\u306e\u72b6\u614b\u306b\u9069\u5fdc\u3055\u305b\u308b\u3053\u3068\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u8a08\u6e2c\u306b\u3088\u308a\u3001\u65e9\u671f\u5c0e\u5165\u4f01\u696d\u3067\u306f25-40%\u306e\u30d1\u30c3\u30c9\u5bff\u547d\u5411\u4e0a\u304c\u5b9f\u8a3c\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<p>\u30b3\u30d0\u30eb\u30c8\u3001\u30eb\u30c6\u30cb\u30a6\u30e0\u3001\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30fb\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u30fb\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u8981\u4ef6\u306e\u5909\u5316\u306a\u3069\u3001\u5148\u7aef\u30ce\u30fc\u30c9\u306eCMP\u6750\u6599\u306b\u95a2\u3059\u308b\u5177\u4f53\u7684\u306a\u8ab2\u984c\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u306e\u30ac\u30a4\u30c9\u3092\u3054\u89a7\u304f\u3060\u3055\u3044\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Materials-for-Advanced-Nodes-(Below-14nm)\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u5148\u7aef\u30ce\u30fc\u30c9\uff0814nm\u4ee5\u4e0b\uff09\u7528CMP\u6750\u6599<\/a>.<\/p>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"faq\">\r\n<h2>11.\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/h2>\r\n<h3>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30fb\u30c7\u30a3\u30b9\u30af\u306e\u4ea4\u63db\u6642\u671f\u306e\u76ee\u5b89\u306f\uff1f<\/h3>\r\n<p>\u4ea4\u63db\u306e\u4e3b\u306a\u304d\u3063\u304b\u3051\u306f\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u52b9\u679c\u306e\u6e2c\u5b9a\u53ef\u80fd\u306a\u4f4e\u4e0b\u3067\u3059\u3002\u901a\u5e38\u3001\u57fa\u6e96\u30d1\u30c3\u30c9\u30b5\u30f3\u30d7\u30eb\u306e\u6a19\u6e96\u7684\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30b7\u30fc\u30b1\u30f3\u30b9\u5f8c\u306b\u9054\u6210\u3055\u308c\u308b\u30d1\u30c3\u30c9\u7c97\u3055\uff08Ra\uff09\u3092\u3001\u65b0\u3057\u3044\u30c7\u30a3\u30b9\u30af\u306e\u57fa\u6e96\u5024\u3068\u6bd4\u8f03\u3057\u3066\u5b9a\u91cf\u5316\u3057\u307e\u3059\u3002\u9054\u6210\u53ef\u80fd\u306a\u30d1\u30c3\u30c9Ra\u304c20-30%\u4f4e\u4e0b\u3059\u308b\u3053\u3068\u306f\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u5207\u65ad\u9762\u304c\u6709\u52b9\u95be\u5024\u4ee5\u4e0b\u306b\u6469\u8017\u3057\u3066\u3044\u308b\u3053\u3068\u3092\u793a\u3059\u3002\u307b\u3068\u3093\u3069\u306e\u5de5\u5834\u3067\u306f\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u8131\u843d\u30ea\u30b9\u30af\u3092\u6700\u5c0f\u5316\u3059\u308b\u305f\u3081\u306b\u3001\u6027\u80fd\u30c7\u30fc\u30bf\u306b\u95a2\u4fc2\u306a\u304f\u3001\u4e88\u9632\u63aa\u7f6e\u3068\u3057\u3066\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u6700\u5927\u5bff\u547d\u5236\u9650\uff08\u4f8b\u3048\u3070\u30011,000\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6642\u9593\uff09\u3092\u5b9f\u65bd\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<h3>\u79c1\u306e\u7528\u9014\u306b\u5408\u3063\u305f\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u306f\uff1f<\/h3>\r\n<p>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u306f\u3001\u30d1\u30c3\u30c9\u306e\u5168\u5bff\u547d\u671f\u9593\u306b\u308f\u305f\u3063\u3066MRR\u3092\u76ee\u6a19\u306e\u00b15%\u4ee5\u5185\u306b\u7dad\u6301\u3059\u308b\u6700\u5c0f\u5024\u3067\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002\u6700\u9069\u5024\u306f\u3001\u8907\u6570\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u30fb\u30ec\u30d9\u30eb\u3067MRR\u5b89\u5b9a\u6027\u5b9f\u9a13\u3092\u884c\u3044\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30b5\u30a4\u30af\u30eb\u9593\u306e\u30a6\u30a7\u30fc\u30cf\u30fb\u30ab\u30a6\u30f3\u30c8\u9593\u9694\u5185\u306b\u4ed5\u69d8\u9650\u754c\u307e\u3067MRR\u306e\u6e1b\u8870\u3092\u9632\u3050\u6700\u4f4e\u30d5\u30a9\u30fc\u30b9\u3092\u7279\u5b9a\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u5b9f\u9a13\u7684\u306b\u6c7a\u5b9a\u3055\u308c\u307e\u3059\u3002\u4ee3\u8868\u7684\u306a\u5024\u306f\u3001\u30cf\u30fc\u30c9\u30d1\u30c3\u30c9\u3092\u4f7f\u7528\u3057\u305f\u9178\u5316\u819c\u304a\u3088\u3073W CMP\u3067\u306f10\uff5e25 N\u3001\u9285\u30d0\u30d5\u7528\u9014\u306e\u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\u3067\u306f5\uff5e15 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class=\"jz-divider\" \/>\r\n<div class=\"jz-tags\"><span class=\"jz-tag\">CMP\u30d1\u30c3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc<\/span><span class=\"jz-tag\">\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc<\/span><span class=\"jz-tag\">\u30d1\u30c3\u30c9\u30fb\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0<\/span> <span class=\"jz-tag\">\u73fe\u5834\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0<\/span><span class=\"jz-tag\">MRR\u306e\u5b89\u5b9a\u6027<\/span><span class=\"jz-tag\">CMP\u6d88\u8017\u54c1<\/span> <span class=\"jz-tag\">\u534a\u5c0e\u4f53CMP<\/span><span class=\"jz-tag\">JEEZ<\/span><\/div>\r\n<div class=\"jz-cta\">\r\n<h2>JEEZ CMP\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u5c02\u9580\u5bb6\u306b\u76f8\u8ac7\u3059\u308b<\/h2>\r\n<p>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u6700\u9069\u5316\u306f\u3001CMP\u306e\u30b3\u30b9\u30c8\u524a\u6e1b\u306b\u6700\u3082\u6709\u52b9\u306a\u624b\u6bb5\u306e\u4e00\u3064\u3067\u3059\u3002\u5f53\u793e\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30fb\u30a8\u30f3\u30b8\u30cb\u30a2\u306f\u3001\u73fe\u5728\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30fb\u30ec\u30b7\u30d4\u3068\u30d1\u30c3\u30c9\u5bff\u547d\u30c7\u30fc\u30bf\u3092\u30ec\u30d3\u30e5\u30fc\u3057\u3001\u6539\u5584\u306e\u6a5f\u4f1a\u3092\u7279\u5b9a\u3057\u307e\u3059\u3002.<\/p>\r\n<a class=\"jz-btn\" href=\"https:\/\/jeez-semicon.com\/ja\/contact\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u306e\u5c02\u9580\u5bb6\u306b\u76f8\u8ac7\u3059\u308b<\/a> <a class=\"jz-btn-sec\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/What-Are-CMP-Materials-Complete-Guide\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2190 CMP\u30de\u30c6\u30ea\u30a2\u30eb\u5b8c\u5168\u30ac\u30a4\u30c9<\/a><\/div>\r\n<\/div>","protected":false},"excerpt":{"rendered":"<p>JEEZ\u30c6\u30af\u30cb\u30ab\u30eb\u30ac\u30a4\u30c9-\u30d1\u30c3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0 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