{"id":1929,"date":"2026-04-30T14:30:13","date_gmt":"2026-04-30T06:30:13","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1929"},"modified":"2026-04-30T15:05:39","modified_gmt":"2026-04-30T07:05:39","slug":"cmp-materials-for-advanced-nodes-below-14nm","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-materials-for-advanced-nodes-below-14nm\/","title":{"rendered":"\u5148\u7aef\u30ce\u30fc\u30c9\uff0814nm\u4ee5\u4e0b\uff09\u7528CMP\u6750\u6599"},"content":{"rendered":"<!-- JEEZ | Cluster 5: CMP Materials for Advanced Nodes (Below 14 nm) -->\r\n<p><style>\r\n.jz*,.jz *::before,.jz *::after{box-sizing:border-box;margin:0;padding:0}\r\n.jz{font-family:'Segoe UI',Arial,sans-serif;font-size:16px;line-height:1.8;color:#1a1a2e;max-width:900px;margin:0 auto}\r\n.jz-hero{background:linear-gradient(135deg,#0f2544 0%,#1a4a8a 55%,#0e7c86 100%);border-radius:12px;padding:56px 44px;margin-bottom:44px;position:relative;overflow:hidden}\r\n.jz-hero::before{content:'';position:absolute;top:-60px;right:-60px;width:260px;height:260px;border-radius:50%;background:rgba(255,255,255,0.05)}\r\n.jz-hero-label{display:inline-block;background:rgba(255,255,255,0.15);color:#a8d8ea;font-size:12px;font-weight:600;letter-spacing:.12em;text-transform:uppercase;padding:5px 14px;border-radius:20px;margin-bottom:18px}\r\n.jz-hero h1{font-size:2.2em;font-weight:800;color:#fff;line-height:1.25;margin-bottom:16px;position:relative;z-index:1}\r\n.jz-hero p{font-size:1.02em;color:#c8dff0;max-width:640px;position:relative;z-index:1}\r\n.jz-hero-meta{margin-top:24px;display:flex;gap:20px;flex-wrap:wrap;position:relative;z-index:1}\r\n.jz-hero-meta span{font-size:13px;color:#a8c8e8}\r\n.jz-toc{background:#f0f6ff;border-left:4px solid #1a4a8a;border-radius:0 10px 10px 0;padding:26px 30px;margin-bottom:48px}\r\n.jz-toc-title{font-size:.75em;font-weight:700;letter-spacing:.1em;text-transform:uppercase;color:#1a4a8a;margin-bottom:14px}\r\n.jz-toc ol{padding-left:20px}\r\n.jz-toc li{margin-bottom:6px;font-size:.94em}\r\n.jz-toc a{color:#1a4a8a;text-decoration:none}\r\n.jz-toc a:hover{color:#0e7c86;text-decoration:underline}\r\n.jz h2{font-size:1.6em;font-weight:800;color:#0f2544;margin:52px 0 16px;padding-bottom:10px;border-bottom:2px solid #e0ebff}\r\n.jz h3{font-size:1.2em;font-weight:700;color:#1a4a8a;margin:32px 0 12px}\r\n.jz h4{font-size:1.03em;font-weight:700;color:#0e7c86;margin:20px 0 8px}\r\n.jz p{margin-bottom:16px}\r\n.jz a{color:#1a4a8a;text-decoration:underline;text-underline-offset:3px}\r\n.jz a:hover{color:#0e7c86}\r\n.jz ul,.jz ol{padding-left:24px;margin-bottom:16px}\r\n.jz li{margin-bottom:7px}\r\n.jz-hl{background:linear-gradient(135deg,#e8f4fd,#f0fffe);border:1px solid #b8d9f5;border-radius:10px;padding:22px 26px;margin:26px 0}\r\n.jz-hl 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0}\r\n.jz-tl-item{display:flex;gap:18px;margin-bottom:20px}\r\n.jz-tl-dot{flex-shrink:0;width:14px;height:14px;border-radius:50%;background:#1a4a8a;margin-top:6px;position:relative}\r\n.jz-tl-dot::after{content:'';position:absolute;left:6px;top:14px;width:2px;height:calc(100% + 10px);background:#c8d8f0}\r\n.jz-tl-item:last-child .jz-tl-dot::after{display:none}\r\n.jz-tl-body{font-size:.94em}\r\n.jz-tl-body strong{color:#0f2544;display:block;margin-bottom:2px}\r\n.jz-cta{background:linear-gradient(135deg,#0f2544 0%,#1a4a8a 60%,#0e7c86 100%);border-radius:12px;padding:44px 36px;text-align:center;margin:56px 0 36px;position:relative;overflow:hidden}\r\n.jz-cta h2{font-size:1.6em;color:#fff;border:none;margin:0 0 12px;position:relative;z-index:1}\r\n.jz-cta p{color:#c8dff0;margin-bottom:24px;position:relative;z-index:1}\r\n.jz-btn{display:inline-block;background:#fff;color:#0f2544;font-weight:700;font-size:.93em;padding:12px 30px;border-radius:50px;text-decoration:none;transition:all .25s;position:relative;z-index:1;box-shadow:0 4px 14px rgba(0,0,0,.18)}\r\n.jz-btn:hover{background:#a8d8ea;color:#0f2544;transform:translateY(-1px)}\r\n.jz-btn-sec{display:inline-block;background:rgba(255,255,255,0.12);color:#e8f4ff;font-weight:600;font-size:.88em;padding:10px 24px;border-radius:50px;text-decoration:none;transition:all .25s;position:relative;z-index:1;border:1px solid rgba(255,255,255,0.3);margin-left:12px}\r\n.jz-btn-sec:hover{background:rgba(255,255,255,0.22);color:#fff}\r\n.jz-tags{display:flex;flex-wrap:wrap;gap:7px;margin:20px 0}\r\n.jz-tag{background:#e8f2ff;color:#1a4a8a;font-size:.77em;font-weight:600;padding:4px 11px;border-radius:20px;border:1px solid #c0d8f5}\r\n.jz-divider{border:none;border-top:1px solid #e0ebff;margin:38px 0}\r\n.jz-pillar-link{display:inline-flex;align-items:center;gap:8px;background:#e8f2ff;border:1px solid #b8d5f5;border-radius:8px;padding:10px 18px;text-decoration:none;color:#1a4a8a;font-size:.9em;font-weight:600;margin:10px 0 24px;transition:all .2s}\r\n.jz-pillar-link:hover{background:#d0e8ff;border-color:#1a4a8a}\r\n<\/style><\/p>\r\n<div class=\"jz\">\r\n<div class=\"jz-hero\">\r\n<div class=\"jz-hero-label\">JEEZ\u30c6\u30af\u30cb\u30ab\u30eb\u30ac\u30a4\u30c9 - \u30a2\u30c9\u30d0\u30f3\u30b9\u30c9\u30ce\u30fc\u30c9CMP<\/div>\r\n<p>FinFET\u3001Gate-All-Around\u30013D NAND\u30013D-IC\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u306b\u5fc5\u8981\u306aCMP\u6d88\u8017\u54c1\u306b\u95a2\u3059\u308b\u5305\u62ec\u7684\u306a\u30c6\u30af\u30cb\u30ab\u30eb\u30ac\u30a4\u30c9\u3067\u3059\u3002\u65b0\u3057\u3044\u30e1\u30bf\u30eb\u30b1\u30df\u30b9\u30c8\u30ea\u3001\u8d85\u4f4e\u8a98\u96fb\u7387\u3078\u306e\u6311\u6226\u3001\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u5e73\u5766\u5316\u30012030\u5e74\u307e\u3067\u306e\u9032\u5316\u3059\u308b\u6750\u6599\u30ed\u30fc\u30c9\u30de\u30c3\u30d7\u3092\u7db2\u7f85\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<div class=\"jz-hero-meta\">2026\u5e744\u6708\u66f4\u65b0 \ud83d\udcc5 \u8aad\u4e86\u6642\u9593\uff1a\u301c22\u5206\u270d\ufe0f JEEZ\u30c6\u30af\u30cb\u30ab\u30eb\u7de8\u96c6\u30c1\u30fc\u30e0<\/div>\r\n<\/div>\r\n<a class=\"jz-pillar-link\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/What-Are-CMP-Materials-Complete-Guide\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2190 CMP\u30de\u30c6\u30ea\u30a2\u30eb\u306b\u623b\u308b\uff1a\u5b8c\u5168\u30ac\u30a4\u30c9<\/a><nav class=\"jz-toc\" aria-label=\"\u76ee\u6b21\">\r\n<div class=\"jz-toc-title\">\u76ee\u6b21<\/div>\r\n<ol>\r\n<li><a href=\"#an-intro\">\u5148\u9032\u30ce\u30fc\u30c9\u304cCMP\u6750\u6599\u306b\u591a\u304f\u3092\u6c42\u3081\u308b\u7406\u7531<\/a><\/li>\r\n<li><a href=\"#finfet\">FinFET\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\uff0814-7nm\uff09\u306b\u304a\u3051\u308bCMP\u306e\u8ab2\u984c<\/a><\/li>\r\n<li><a href=\"#gaa\">3nm\u4ee5\u4e0b\u306e\u30b2\u30fc\u30c8\u30fb\u30aa\u30fc\u30eb\u30fb\u30a2\u30e9\u30a6\u30f3\u30c9\uff08GAA\uff09\u3068CMP<\/a><\/li>\r\n<li><a href=\"#cobalt\">\u30b3\u30d0\u30eb\u30c8CMP\uff1a\u5316\u5b66\u3001\u8ab2\u984c\u3001\u6b20\u9665\u5236\u5fa1<\/a><\/li>\r\n<li><a href=\"#ruthenium\">\u30eb\u30c6\u30cb\u30a6\u30e0CMP\uff1a\u65b0\u305f\u306a\u30d5\u30ed\u30f3\u30c6\u30a3\u30a2<\/a><\/li>\r\n<li><a href=\"#molybdenum\">GAA\u30b2\u30fc\u30c8\u30d5\u30a3\u30eb\u7528\u30e2\u30ea\u30d6\u30c7\u30f3CMP<\/a><\/li>\r\n<li><a href=\"#lowk\">\u8d85\u4f4e\u8a98\u96fb\u7387CMP\uff1a\u6a5f\u68b0\u7684\u8106\u5f31\u6027\u3068\u9078\u629e\u6027<\/a><\/li>\r\n<li><a href=\"#3dnand\">3D NAND\u7528CMP\uff1a\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u3068\u591a\u5c64\u5316\u306e\u8981\u6c42<\/a><\/li>\r\n<li><a href=\"#3dic\">3D-IC\u3068\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u63a5\u5408\uff1a\u30b5\u30d6\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u7c97\u3055\u3078\u306e\u6311\u6226<\/a><\/li>\r\n<li><a href=\"#roadmap\">CMP\u30de\u30c6\u30ea\u30a2\u30eb\u30fb\u30ed\u30fc\u30c9\u30de\u30c3\u30d72026\u5e74\u304b\u30892030\u5e74<\/a><\/li>\r\n<li><a href=\"#faq\">\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/a><\/li>\r\n<\/ol>\r\n<\/nav>\r\n<section id=\"an-intro\">\r\n<h2>1.\u5148\u9032\u30ce\u30fc\u30c9\u304cCMP\u6750\u6599\u306b\u591a\u304f\u3092\u6c42\u3081\u308b\u7406\u7531<\/h2>\r\n<p>\u30d7\u30ec\u30fc\u30ca\u30fcCMOS\u304b\u3089FinFET\u3001\u305d\u3057\u3066\u73fe\u5728\u306fGAA\uff08Gate-All-Around\uff09\u30ca\u30ce\u30b7\u30fc\u30c8\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3078\u306e\u79fb\u884c\u306f\u3001\u5358\u306b\u30c7\u30d0\u30a4\u30b9\u306e\u5bf8\u6cd5\u3092\u7e2e\u5c0f\u3057\u305f\u3060\u3051\u3067\u306a\u304f\u3001CMP\u304c\u52d5\u4f5c\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u5e7e\u4f55\u5b66\u7684\u3001\u5316\u5b66\u7684\u3001\u6a5f\u68b0\u7684\u74b0\u5883\u3092\u6839\u672c\u7684\u306b\u5909\u3048\u307e\u3057\u305f\u3002\u5404\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u3067\u306f\u3001\u65b0\u3057\u3044\u6750\u6599\u3001\u53b3\u3057\u3044\u9664\u53bb\u30d0\u30b8\u30a7\u30c3\u30c8\u3001\u3088\u308a\u9ad8\u3044\u30b9\u30c6\u30c3\u30d7\u30ab\u30a6\u30f3\u30c8\u8981\u4ef6\u304c\u5c0e\u5165\u3055\u308c\u3001\u6a19\u6e96\u7684\u306aCMP\u6d88\u8017\u54c1\u306f\u3001\u305d\u306e\u8a2d\u8a08\u306e\u9650\u754c\u3092\u8d85\u3048\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<div class=\"jz-stats\">\r\n<div class=\"jz-stat\">\r\n<div class=\"n\">&lt;5 nm<\/div>\r\n<div class=\"l\">2026\u5e744\u6708\u6642\u70b9\u3067\u91cf\u7523\u4e2d\u306e\u6700\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u30ce\u30fc\u30c9<\/div>\r\n<\/div>\r\n<div class=\"jz-stat\">\r\n<div class=\"n\">60+<\/div>\r\n<div class=\"l\">\u6700\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u306b\u304a\u3051\u308b\u30a6\u30a7\u30fc\u30cf\u3042\u305f\u308a\u306eCMP\u5de5\u7a0b\u6570\u3068\u3001180nm\u306b\u304a\u3051\u308b10\u5de5\u7a0b\u6570\u672a\u6e80\u3068\u306e\u6bd4\u8f03<\/div>\r\n<\/div>\r\n<div class=\"jz-stat\">\r\n<div class=\"n\">0.3 nm<\/div>\r\n<div class=\"l\">\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u5c64\u4f5c\u88fd\u306b\u304a\u3051\u308bCMP\u5f8c\u306e\u6700\u5927Ra\u76ee\u6a19\u5024<\/div>\r\n<\/div>\r\n<div class=\"jz-stat\">\r\n<div class=\"n\">5+<\/div>\r\n<div class=\"l\">28nm\uff5e3nm\u30ce\u30fc\u30c9\u306eBEOL\u306b\u65b0\u91d1\u5c5e\u7cfb\u3092\u5c0e\u5165<\/div>\r\n<\/div>\r\n<\/div>\r\n<p>3\u3064\u306e\u57fa\u672c\u7684\u306a\u30b7\u30d5\u30c8\u304c\u3001\u5148\u9032\u30ce\u30fc\u30c9CMP\u3092\u6210\u719f\u30ce\u30fc\u30c9CMP\u3088\u308a\u3082\u96e3\u3057\u3044\u3082\u306e\u306b\u3057\u3066\u3044\u308b\uff1a<\/p>\r\n<ul>\r\n<li><strong>\u53b3\u3057\u3044\u64a4\u53bb\u4e88\u7b97\uff1a<\/strong> 7nm\u4ee5\u4e0b\u3067\u306f\u3001\u5404\u30d5\u30a3\u30eb\u30e0\u306e\u5782\u76f4\u65b9\u5411\u306e\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u30d0\u30b8\u30a7\u30c3\u30c8\u306f1\u6841\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u5358\u4f4d\u3067\u6e2c\u5b9a\u3055\u308c\u308b\u300228nm\u30675nm\u30aa\u30fc\u30d0\u30fc\u30b7\u30e5\u30fc\u30c8\u3057\u305fCMP\u5de5\u7a0b\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u306b\u3068\u3063\u3066\u4e9b\u7d30\u306a\u554f\u984c\u3067\u3059\u304c\u30013nm\u3067\u30aa\u30fc\u30d0\u30fc\u30b7\u30e5\u30fc\u30c8\u3057\u305f\u5834\u5408\u3001\u30e1\u30bf\u30eb\u30e9\u30a4\u30ca\u30fc\u3092\u5b8c\u5168\u306b\u6d88\u8017\u3055\u305b\u305f\u308a\u3001\u30c7\u30d0\u30a4\u30b9\u69cb\u9020\u3092\u640d\u50b7\u3055\u305b\u305f\u308a\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u306e\u305f\u3081\u3001\u65e7\u4e16\u4ee3\u306e\u6d88\u8017\u54c1\u3067\u306f\u5bfe\u5fdc\u3067\u304d\u306a\u304b\u3063\u305f\u7d42\u70b9\u7cbe\u5ea6\u3068\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u6027\u304c\u8981\u6c42\u3055\u308c\u307e\u3059\u3002.<\/li>\r\n<li><strong>\u65b0\u3057\u3044\u6750\u6599\u30b7\u30b9\u30c6\u30e0\uff1a<\/strong> \u5404\u65b0\u898f\u30ce\u30fc\u30c9\u3067\u306f\u3001\u6a19\u6e96\u7684\u306aCMP\u30b9\u30e9\u30ea\u30fc\u304c\u8abf\u5408\u3055\u308c\u3066\u3044\u306a\u3044\u91d1\u5c5e\uff08Co\u3001Ru\u3001Mo\uff09\u3084\u8a98\u96fb\u4f53\uff08SiOC\u3001SiCN\u3001\u30cf\u30d5\u30cb\u30a6\u30e0\u30d9\u30fc\u30b9\u306ehigh-k\u819c\uff09\u304c\u5c0e\u5165\u3055\u308c\u3066\u3044\u308b\u3002\u65b0\u3057\u3044\u6750\u6599\u3054\u3068\u306b\u65b0\u3057\u3044CMP\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u3092\uff08\u591a\u304f\u306e\u5834\u5408\u3001\u30bc\u30ed\u304b\u3089\uff09\u958b\u767a\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u3001\u771f\u306b\u65b0\u3057\u3044\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u7814\u7a76\u958b\u767a\u306b\u306f2\uff5e4\u5e74\u3092\u8981\u3059\u308b\u3053\u3068\u3082\u3042\u308b\u3002.<\/li>\r\n<li><strong>\u9ad8\u5ea6\u306a\u69cb\u9020\u7269\u306e\u6a5f\u68b0\u7684\u8106\u5f31\u6027\uff1a<\/strong> \u8d85\u4f4e\u8a98\u96fb\u7387\u8a98\u96fb\u4f53\u306e\u30e4\u30f3\u30b0\u7387\u306f2\uff5e5GPa\u3068\u4f4e\u304f\u3001\u71b1SiO\u2082\u306e70GPa\u3088\u308a\u6841\u9055\u3044\u306b\u4f4e\u3044\u3002\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306e3D NAND\u69cb\u9020\u3084\u7a4d\u5c643D-IC\u306e\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306f\u3001\u5f93\u6765\u306e\u30d7\u30ec\u30fc\u30ca\u30fc\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u65e5\u5e38\u7684\u306aCMP\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u30ec\u30d9\u30eb\u3067\u5265\u96e2\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/li>\r\n<\/ul>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"finfet\">\r\n<h2>2.FinFET\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\uff0814-7nm\uff09\u306b\u304a\u3051\u308bCMP\u306e\u8ab2\u984c<\/h2>\r\n<p>22nm\uff08\u30a4\u30f3\u30c6\u30eb\uff09\u304a\u3088\u307316\/14nm\uff08TSMC\u3001\u30b5\u30e0\u30b9\u30f3\uff09\u3067\u91cf\u7523\u304c\u958b\u59cb\u3055\u308c\u305fFinFET\u6280\u8853\u306f\u3001\u975e\u5e73\u9762\u5f62\u72b6\u306e\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3092\u5c0e\u5165\u3057\u3001CMP\u306e\u65b0\u305f\u306a\u8ab2\u984c\u3092\u5373\u5ea7\u306b\u751f\u307f\u51fa\u3057\u305f\u3002\u57fa\u677f\u8868\u9762\u304b\u3089\u7acb\u3061\u4e0a\u304c\u308b\u7d30\u3044\u30b7\u30ea\u30b3\u30f3\u306e\u67f1\u3067\u3042\u308b\u30d5\u30a3\u30f3\u69cb\u9020\u306f\u3001\u5468\u56f2\u306e\u8a98\u96fb\u4f53\u6750\u6599\u3092\u5e73\u5766\u5316\u3059\u308b\u305f\u3081\u306eCMP\u5de5\u7a0b\u306b\u8010\u3048\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002\u30d5\u30a3\u30f3\u30a8\u30ea\u30a2\u306eILD CMP\u4e2d\u306b\u6a2a\u65b9\u5411\u306e\u5fdc\u529b\u3084\u904e\u5ea6\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u304c\u52a0\u308f\u308b\u3068\u3001\u30d5\u30a3\u30f3\u69cb\u9020\u81ea\u4f53\u304c\u640d\u50b7\u3057\u305f\u308a\u5265\u96e2\u3057\u305f\u308a\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\r\n<h3>FinFET CMP\u306e\u4e3b\u8981\u30b9\u30c6\u30c3\u30d7\u3068\u6d88\u8017\u54c1\u8981\u4ef6<\/h3>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>\u30d7\u30ed\u30bb\u30b9\u30b9\u30c6\u30c3\u30d7<\/th>\r\n<th>\u53d6\u308a\u5916\u3057\u305f\u30d5\u30a3\u30eb\u30e0<\/th>\r\n<th>\u91cd\u8981\u8981\u4ef6<\/th>\r\n<th>\u30b9\u30e9\u30ea\u30fc\u30bf\u30a4\u30d7<\/th>\r\n<th>\u30d1\u30c3\u30c9\u306e\u597d\u307f<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td>\u30d5\u30a3\u30f3\u3001CMP\u3092\u660e\u304b\u3059<\/td>\r\n<td>SiO\u2082 STI\u30d5\u30a3\u30eb<\/td>\r\n<td>\u7cbe\u5bc6\u306a\u30d5\u30a3\u30f3\u9ad8\u3055\u5236\u5fa1\uff08\u00b10.5nm\uff09<\/td>\r\n<td>\u9ad8\u9078\u629e\u6027\u6dfb\u52a0\u5264\u5165\u308a\u4f4eMRR\u30bb\u30ea\u30a2<\/td>\r\n<td>\u30df\u30c7\u30a3\u30a2\u30e0\u30cf\u30fc\u30c9\u3002<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u30b2\u30fc\u30c8\u7d76\u7e01\u4fdd\u8b77 CMP<\/td>\r\n<td>Poly-Si\u30c0\u30df\u30fc\u30b2\u30fc\u30c8<\/td>\r\n<td>\u9ad8\u8a98\u96fb\u7387\/\u30e1\u30bf\u30eb\u30b2\u30fc\u30c8\u3092\u8584\u304f\u305b\u305a\u306b\u6b62\u3081\u308b<\/td>\r\n<td>\u5e0c\u8584\u306a\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u3001\u975e\u5e38\u306b\u4f4e\u3044\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9<\/td>\r\n<td>\u30bd\u30d5\u30c8\u3001\u30ed\u30fc\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u30e1\u30bf\u30eb\u30b2\u30fc\u30c8CMP\uff08HKMG\uff09<\/td>\r\n<td>W\u3001TiN\u3001TaN<\/td>\r\n<td>\u30b2\u30fc\u30c8\u30ec\u30d9\u30eb\u307e\u3067\u306e\u30e1\u30bf\u30eb\u30d5\u30a3\u30eb\u5e73\u5766\u5316<\/td>\r\n<td>W\u30b9\u30e9\u30ea\u30fc\u307e\u305f\u306f\u30d0\u30ea\u30a2\u30b9\u30e9\u30ea\u30fc<\/td>\r\n<td>\u30cf\u30fc\u30c9\uff1b\u6a19\u6e96\u7684\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u5171\u540c\u30b3\u30f3\u30bf\u30af\u30c8 CMP<\/td>\r\n<td>\u30b3\u30d0\u30eb\u30c8\u30fb\u30aa\u30fc\u30d0\u30fc\u30d0\u30fc\u30c7\u30f3<\/td>\r\n<td>Co:\u8a98\u96fb\u9078\u629e\u6027; \u96fb\u89e3\u8150\u98df\u306a\u3057<\/td>\r\n<td>\u5171\u7279\u7570\u7684\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u88fd\u5264<\/td>\r\n<td>\u4e2d\u786c\u8cea\u307e\u305f\u306f\u30b9\u30bf\u30c3\u30af\u30c9\u30fb\u30b3\u30f3\u30dd\u30b8\u30c3\u30c8<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u5546\u8239\u4e09\u4e95\u306eILD\u5e73\u5766\u5316<\/td>\r\n<td>SiO\u2082, SiOC<\/td>\r\n<td>\u4e0b\u5c64\u306eFinFET\u3092\u4fdd\u8b77\u3059\u308b\u4f4e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9<\/td>\r\n<td>\u4f4eMRR\u5e0c\u91c8\u30b9\u30e9\u30ea\u30fc<\/td>\r\n<td>\u30bd\u30d5\u30c8\u304b\u3089\u30df\u30c7\u30a3\u30a2\u30e0\uff1b\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u4f4e\u6e1b<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<p>7nm\u306e\u30b3\u30f3\u30bf\u30af\u30c8\u30e1\u30bf\u30eb\u3068\u3057\u3066\u30b3\u30d0\u30eb\u30c8\u304c\u5c0e\u5165\u3055\u308c\u305f\uff08\u6700\u5148\u7aef\u306e\u30b3\u30f3\u30bf\u30af\u30c8\u3067\u306f\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306b\u53d6\u3063\u3066\u4ee3\u308f\u3089\u308c\u305f\uff09\u3053\u3068\u306f\u3001FinFET\u6642\u4ee3\u306b\u304a\u3051\u308b\u6700\u3082\u91cd\u8981\u306aCMP\u5316\u5b66\u7684\u5909\u9077\u306e\u3072\u3068\u3064\u3067\u3042\u3063\u305f\u3002\u30b3\u30d0\u30eb\u30c8\u306f\u786c\u5ea6\u304c\u4f4e\u304f\u3001\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u8150\u98df\u306b\u5f31\u3044\u305f\u3081\u3001\u307e\u3063\u305f\u304f\u65b0\u3057\u3044\u30b9\u30e9\u30ea\u30fc\u51e6\u65b9\u304c\u5fc5\u8981\u3068\u306a\u3063\u305f\u3002\u30b3\u30d0\u30eb\u30c8CMP\u5316\u5b66\u306e\u8a73\u7d30\u306b\u3064\u3044\u3066\u306f\u3001\u3053\u306e\u8a18\u4e8b\u306e\u30bb\u30af\u30b7\u30e7\u30f34\u3068\u3001\u30b9\u30e9\u30ea\u30fc\u5316\u5b66\u306b\u95a2\u3059\u308b\u3088\u308a\u5e83\u7bc4\u306a\u8b70\u8ad6\u3092\u53c2\u7167\u3055\u308c\u305f\u3044\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Slurry-Types-Applications-Selection-Guide\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u30b9\u30e9\u30ea\u30fc\u306e\u7a2e\u985e\u3001\u7528\u9014\u3001\u9078\u629e\u30ac\u30a4\u30c9<\/a>.<\/p>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"gaa\">\r\n<h2>3.3nm\u4ee5\u4e0b\u306e\u30b2\u30fc\u30c8\u30fb\u30aa\u30fc\u30eb\u30fb\u30a2\u30e9\u30a6\u30f3\u30c9\uff08GAA\uff09\u3068CMP<\/h2>\r\n<p>\u30b2\u30fc\u30c8\u30fb\u30aa\u30fc\u30eb\u30e9\u30a6\u30f3\u30c9\uff08GAA\uff09\u30ca\u30ce\u30b7\u30fc\u30c8\u30fb\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306f\u3001TSMC\uff08N3\uff09\u3001\u30b5\u30e0\u30b9\u30f3\uff083GAE\uff09\u3001\u30a4\u30f3\u30c6\u30eb\u30fb\u30d5\u30a1\u30a6\u30f3\u30c9\u30ea\uff0818A\uff09\u3067\u73fe\u5728\u91cf\u7523\u4e2d\u3067\u3042\u308a\u3001\u534a\u5c0e\u4f53\u53f2\u4e0a\u6700\u3082\u8907\u96d1\u306a\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u5f62\u72b6\u3067\u3042\u308b\u3002GAA\u3067\u306f\u3001\u6c34\u5e73\u306a\u30b7\u30ea\u30b3\u30f3\u307e\u305f\u306fSiGe\u30ca\u30ce\u30b7\u30fc\u30c8\uff08\u901a\u5e38\u3001\u539a\u30554\uff5e8nm\u30012\uff5e4\u500b\u306e\u30b0\u30eb\u30fc\u30d7\u3067\u5782\u76f4\u306b\u7a4d\u307f\u91cd\u306d\u3089\u308c\u308b\uff09\u304c\u3001\u56db\u65b9\u3092\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u3068\u91d1\u5c5e\u3067\u5b8c\u5168\u306b\u56f2\u307e\u308c\u3066\u304a\u308a\u3001\u512a\u308c\u305f\u9759\u96fb\u5236\u5fa1\u3092\u53ef\u80fd\u306b\u3059\u308b\u304c\u3001\u3053\u308c\u3089\u306e\u69cb\u9020\u3092\u660e\u3089\u304b\u306b\u3057\u3001\u5206\u96e2\u3057\u3001\u5e73\u5766\u5316\u3059\u308bCMP\u5de5\u7a0b\u306b\u306f\u4e26\u5916\u308c\u305f\u7cbe\u5ea6\u304c\u8981\u6c42\u3055\u308c\u308b\u3002.<\/p>\r\n<h3>\u30ca\u30ce\u30b7\u30fc\u30c8\u306b\u3088\u308bCMP\uff1a\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u6700\u3082\u8981\u6c42\u3055\u308c\u308b\u5e73\u5766\u5316\u5de5\u7a0b<\/h3>\r\n<p>\u30ca\u30ce\u30b7\u30fc\u30c8\u9664\u53bb\u30b9\u30c6\u30c3\u30d7\u3067\u306f\u3001GAA\u30bb\u30eb\u5217\u9593\u306b\u5806\u7a4d\u3057\u305fSiO\u2082\u307e\u305f\u306fSiOC\u5206\u96e2\u5145\u586b\u3092\u9664\u53bb\u3057\u3001300mm\u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u306b\u308f\u305f\u3063\u3066\u00b11\uff5e2nm\u306e\u6b8b\u7559\u819c\u539a\u516c\u5dee\u3092\u76ee\u6a19\u306b\u3001\u6700\u4e0a\u90e8\u306e\u30ca\u30ce\u30b7\u30fc\u30c8\u8868\u9762\u3067\u505c\u6b62\u3059\u308b\u3002\u3053\u308c\u3092\u9054\u6210\u3059\u308b\u306b\u306f<\/p>\r\n<ul>\r\n<li>\u30ca\u30ce\u30b7\u30fc\u30c8\u8868\u9762\u306e\u640d\u50b7\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b100nm\u4ee5\u4e0b\u306eD99\u7c92\u5b50\u5f84\u306e\u30ca\u30ce\u30bb\u30ea\u30a2\u30b9\u30e9\u30ea\u30fc<\/li>\r\n<li>SiO\u2082:Si\u2083N\u2084\u3068SiO\u2082:SiGe\u306e\u9078\u629e\u6027\u304c\u6975\u3081\u3066\u9ad8\u304f\u3001\u6700\u4e0a\u90e8\u306e\u30ca\u30ce\u30b7\u30fc\u30c8\u8868\u9762\u3068\u30b5\u30a4\u30c9\u30a6\u30a9\u30fc\u30eb\u30b9\u30da\u30fc\u30b5\u30fc\u3092\u4fdd\u6301\u3059\u308b\u3002<\/li>\r\n<li>\u30a6\u30a7\u30fc\u30cf\u5185\u306eMRR\u5747\u4e00\u6027\u304c\u9ad8\u3044\uff08&lt;1.5% 1\u03c3\uff09\u305f\u3081\u3001\u30ca\u30ce\u30b7\u30fc\u30c8\u8868\u9762\u304c\u904e\u5270\u306b\u7814\u78e8\u3055\u308c\u308b\u3053\u3068\u306a\u304f\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u53cd\u5bfe\u5074\u306b\u6b8b\u7559\u7269\u304c\u6b8b\u3089\u306a\u3044\u3002<\/li>\r\n<li>\u30b5\u30d6\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u306e\u611f\u5ea6\u3092\u6301\u3064\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u306e\u5149\u7d42\u70b9\u691c\u51fa\u306b\u3088\u308a\u3001\u30c8\u30ec\u30e9\u30f3\u30b9\u30fb\u30d0\u30b8\u30a7\u30c3\u30c8\u3092\u4f7f\u3044\u5207\u308b\u524d\u306bCMP\u30b9\u30c6\u30c3\u30d7\u3092\u505c\u6b62\u3059\u308b\u3002<\/li>\r\n<\/ul>\r\n<div class=\"jz-hl\">\r\n<p>GAA CMP\u30b9\u30c6\u30c3\u30d7\u7528\u306e\u30d1\u30c3\u30c9\u30fb\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u5e73\u5766\u5316\u306e\u52b9\u7387\uff08\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u6210\u819c\u5f8c\u306b\u6b8b\u308b\u5b9f\u8cea\u7684\u306a\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u30fc\u3092\u89e3\u6c7a\u3059\u308b\uff09\u3068\u6a5f\u68b0\u7684\u306a\u512a\u3057\u3055\uff08\u58ca\u308c\u3084\u3059\u3044\u30ca\u30ce\u30b7\u30fc\u30c8\u30fb\u30b9\u30bf\u30c3\u30af\u306b\u7834\u58ca\u7684\u306a\u6a2a\u65b9\u5411\u306e\u5fdc\u529b\u3092\u4e0e\u3048\u306a\u3044\uff09\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u3068\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002\u614e\u91cd\u306b\u9078\u629e\u3055\u308c\u305f\u30b5\u30d6\u30d1\u30c3\u30c9\u5727\u7e2e\u6027\u3092\u6301\u3064\u7a4d\u5c64\u8907\u5408\u30d1\u30c3\u30c9\u306f\u3001\u30ca\u30ce\u30b7\u30fc\u30c8\u9ad8\u3055\u306e\u534a\u5f84\u65b9\u5411\u306e\u4e0d\u5747\u4e00\u6027\u3092\u88dc\u6b63\u3059\u308b\u305f\u3081\u306e\u30de\u30eb\u30c1\u30be\u30fc\u30f3\u30ad\u30e3\u30ea\u30a2\u30d8\u30c3\u30c9\u5727\u529b\u8abf\u6574\u3068\u7d44\u307f\u5408\u308f\u3055\u308c\u305f\u3001\u597d\u307e\u3057\u3044\u69cb\u6210\u3067\u3042\u308b\u3002.<\/p>\r\n<\/div>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"cobalt\">\r\n<h2>4.\u30b3\u30d0\u30eb\u30c8CMP\uff1a\u5316\u5b66\u3001\u8ab2\u984c\u3001\u6b20\u9665\u5236\u5fa1<\/h2>\r\n<p>\u30b3\u30d0\u30eb\u30c8\u306f\u300120 nm \u4ee5\u4e0b\u306e\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u30b5\u30a4\u30ba\u3067\u30d0\u30eb\u30af\u62b5\u6297\u7387\u304c\u4f4e\u3044\u305f\u3081\u3001\u6700\u3082\u8981\u6c42\u306e\u53b3\u3057\u3044\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306b\u53d6\u3063\u3066\u4ee3\u308f\u308a\u30017 nm \u4ee5\u4e0b\u306e\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u30ce\u30fc\u30c9\u306e\u30b3\u30f3\u30bf\u30af\u30c8\u304a\u3088\u3073\u30ed\u30fc\u30ab\u30eb\u914d\u7dda\u7528\u91d1\u5c5e\u3068\u3057\u3066\u597d\u3093\u3067\u4f7f\u7528\u3055\u308c\u308b\u3088\u3046\u306b\u306a\u308a\u307e\u3057\u305f\u3002\u3057\u304b\u3057\u3001\u30b3\u30d0\u30eb\u30c8\u306e\u7269\u7406\u7684\u30fb\u5316\u5b66\u7684\u7279\u6027\u306f\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u3068\u306f\u5927\u304d\u304f\u7570\u306a\u308a\u3001\u304b\u306a\u308a\u56f0\u96e3\u306aCMP\u74b0\u5883\u3092\u4f5c\u308a\u51fa\u3059\u3002.<\/p>\r\n<h3>\u30b3\u30d0\u30eb\u30c8CMP\u304c\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3CMP\u3088\u308a\u786c\u3044\u7406\u7531<\/h3>\r\n<ul>\r\n<li><strong>\u30b3\u30d0\u30eb\u30c8\u306f\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u3088\u308a\u305a\u3063\u3068\u67d4\u3089\u304b\u3044\u3002<\/strong> (Co\u306e\u30d3\u30c3\u30ab\u30fc\u30b9\u786c\u5ea6\uff5e1,000 MPa\u306b\u5bfe\u3057\u3001W\u306f\uff5e3,430 MPa\uff09\u3002\u3064\u307e\u308a\u3001W\u306eCMP\u3067\u306f\u65e5\u5e38\u7684\u306a\u7814\u78e8\u63a5\u89e6\u529b\u304c\u3001\u30b3\u30d0\u30eb\u30c8\u8868\u9762\u3067\u306f\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3084\u30b9\u30af\u30e9\u30c3\u30c1\u3092\u767a\u751f\u3055\u305b\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/li>\r\n<li><strong>\u30b3\u30d0\u30eb\u30c8\u306f\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u8150\u98df\u306e\u5f71\u97ff\u3092\u53d7\u3051\u3084\u3059\u3044\u3002<\/strong> \u7570\u7a2e\u91d1\u5c5e(\u7279\u306bTiN\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb)\u3068\u306e\u754c\u9762\u306b\u304a\u3051\u308b\u3002\u9178\u5316\u6027\u30b9\u30e9\u30ea\u30fc\u306e\u5b58\u5728\u4e0b\u3067\u306f\u3001Co\u3068TiN\u9593\u306e\u96fb\u6c17\u5316\u5b66\u7684\u306a\u96fb\u4f4d\u5dee\u306b\u3088\u308a\u3001\u63a5\u70b9\u5468\u56f2\u3067\u30b3\u30d0\u30eb\u30c8\u306e\u967d\u6975\u6eb6\u89e3\u304c\u4fc3\u9032\u3055\u308c\u3001\u6a19\u6e96\u7684\u306a\u5149\u5b66\u691c\u67fb\u3067\u306f\u89b3\u5bdf\u3067\u304d\u306a\u3044\u304c\u3001\u63a5\u70b9\u62b5\u6297\u3068\u4fe1\u983c\u6027\u3092\u4f4e\u4e0b\u3055\u305b\u308b\u5b54\u98df\u6b20\u9665\u304c\u767a\u751f\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/li>\r\n<li><strong>\u30b3\u30d0\u30eb\u30c8\u30a4\u30aa\u30f3\u6c5a\u67d3<\/strong> (Co\u00b2\u207a\u3001Co\u00b3\u207a\uff09\u306f\u3001CMP\u5f8c\u306e\u6d17\u6d44\u3067\u9664\u53bb\u3055\u308c\u306a\u3051\u308c\u3070\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u91d1\u5c5e\u6c5a\u67d3\u306e\u539f\u56e0\u3068\u306a\u308a\u307e\u3059\u3002Co\u306f\u30b7\u30ea\u30b3\u30f3\u4e2d\u306e\u6df1\u5c64\u30c8\u30e9\u30c3\u30d7\u3067\u3042\u308a\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u30fb\u30ec\u30d9\u30eb\u306b\u5b58\u5728\u3059\u308b\u3068\u6df1\u523b\u306a\u30c7\u30d0\u30a4\u30b9\u30fb\u30ea\u30fc\u30af\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002.<\/li>\r\n<\/ul>\r\n<h3>\u30b3\u30d0\u30eb\u30c8CMP\u30b9\u30e9\u30ea\u30fc\u8a2d\u8a08\u306e\u539f\u5247<\/h3>\r\n<p>\u3059\u306a\u308f\u3061\u3001\u7814\u78e8\u53ef\u80fd\u306aCoO\/Co(OH)\u2082\u5c64\u3092\u751f\u6210\u3059\u308b\u305f\u3081\u306e\u30b3\u30d0\u30eb\u30c8\u8868\u9762\u306e\u5341\u5206\u306a\u9178\u5316\uff08\u9069\u5207\u306aMRR\u306e\u305f\u3081\uff09\u3001Co\/TiN\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u754c\u9762\u306b\u304a\u3051\u308b\u8150\u98df\u6291\u5236\uff08\u5b54\u98df\u3092\u9632\u3050\u305f\u3081\uff09\u3001\u304a\u3088\u3073\u6eb6\u5b58\u30b3\u30d0\u30eb\u30c8\u30a4\u30aa\u30f3\u306e\u932f\u4f53\u5316\uff08\u518d\u6790\u51fa\u3092\u9632\u3050\u305f\u3081\uff09\u3067\u3042\u308b\u3002\u5178\u578b\u7684\u306a\u6eb6\u6db2\u306f<\/p>\r\n<ul>\r\n<li>\u7a4f\u3084\u304b\u306a\u9178\u5316\u5264\uff080.5\uff5e2wt%\u306eH\u2082O\u2082\u3001\u307e\u305f\u306f\u4f4e\u6fc3\u5ea6\u306e\u904e\u30e8\u30a6\u7d20\u9178\u5869\uff09 - \u66b4\u8d70\u8150\u98df\u3092\u5f15\u304d\u8d77\u3053\u3059\u3053\u3068\u306a\u304f\u3001Co\u9178\u5316\u7269\u3092\u5f62\u6210\u3059\u308b\u306e\u306b\u5341\u5206\u306a\u9069\u5ea6\u306a\u91cf<\/li>\r\n<li>TiN\u3068\u63a5\u89e6\u3059\u308bCo\u8868\u9762\u306b\u512a\u5148\u7684\u306b\u5438\u7740\u3059\u308b\u30b3\u30d0\u30eb\u30c8\u7279\u7570\u7684\u8150\u98df\u6291\u5236\u5264\uff08\u30a4\u30df\u30c0\u30be\u30fc\u30eb\u3001\u30d9\u30f3\u30be\u30c8\u30ea\u30a2\u30be\u30fc\u30eb\u8a98\u5c0e\u4f53\u3001\u307e\u305f\u306f\u72ec\u81ea\u306e\u8907\u7d20\u74b0\u5316\u5408\u7269<\/li>\r\n<li>Co\u30a4\u30aa\u30f3\u3092\u53ef\u6eb6\u5316\u3057\u3001\u518d\u6790\u51fa\u3092\u9632\u3050\u6709\u6a5f\u9178\u932f\u5316\u5264\uff08\u30af\u30a8\u30f3\u9178\u3001\u30ea\u30f3\u30b4\u9178<\/li>\r\n<li>\u8d85\u4f4e\u6b20\u9665\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\uff0820\uff5e50 nm\u3001D99 &lt;150 nm\uff09\u3092\u7814\u78e8\u5264\u3068\u3057\u3066\u4f7f\u7528\u3001pH4\uff5e7\u3067\u904b\u8ee2\u3002<\/li>\r\n<\/ul>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"ruthenium\">\r\n<h2>5.\u30eb\u30c6\u30cb\u30a6\u30e0CMP\uff1a\u65b0\u305f\u306a\u30d5\u30ed\u30f3\u30c6\u30a3\u30a2<\/h2>\r\n<p>\u30eb\u30c6\u30cb\u30a6\u30e0\uff08Ru\uff09\u306f\u30015nm \u4ee5\u4e0b\u306e\u30ce\u30fc\u30c9\u306b\u304a\u3051\u308b\u30b3\u30f3\u30bf\u30af\u30c8\u3001\u30ed\u30fc\u30ab\u30eb\u914d\u7dda\u3001\u304a\u3088\u3073\u30b2\u30fc\u30c8\u30d5\u30a3\u30eb\u7528\u306e\u6b21\u4e16\u4ee3\u91d1\u5c5e\u3068\u3057\u3066\u4f4d\u7f6e\u4ed8\u3051\u3089\u308c\u3066\u3044\u308b\u3002\u30b3\u30d0\u30eb\u30c8\u3068\u6bd4\u8f03\u3057\u3066\u512a\u308c\u3066\u3044\u308b\u70b9\u3068\u3057\u3066\u3001\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30b5\u30a4\u30ba\u3067\u306e\u4f4e\u3044\u62b5\u6297\u7387\u3001\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027\uff08Ru\u306e\u878d\u70b9\uff1a2,334 \u00b0C\u3001Co\u306e1,495 \u00b0C\uff09\u3001\u304a\u3088\u3073\u9ad8\u8a98\u96fb\u7387\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u3068\u306e\u4e92\u63db\u6027\u306e\u5411\u4e0a\u304c\u6319\u3052\u3089\u308c\u307e\u3059\u3002\u8907\u6570\u306e\u5927\u624b\u30d5\u30a1\u30a6\u30f3\u30c9\u30ea\u30fc\u304c\u30012nm\u4ee5\u964d\u306e\u30d7\u30ed\u30bb\u30b9\u4e16\u4ee3\u5411\u3051\u306bRu\u30d9\u30fc\u30b9\u306e\u30e1\u30bf\u30e9\u30a4\u30bc\u30fc\u30b7\u30e7\u30f3\u30fb\u30b9\u30ad\u30fc\u30e0\u3092\u958b\u793a\u3057\u3066\u3044\u308b\u3002.<\/p>\r\n<h3>\u30eb\u30c6\u30cb\u30a6\u30e0\u306e\u5316\u5b66\u7684\u4e0d\u6d3b\u6027\u3078\u306e\u6311\u6226<\/h3>\r\n<p>\u30eb\u30c6\u30cb\u30a6\u30e0\u306f\u3001\u307b\u3068\u3093\u3069\u306e\u6c34\u6027\u6761\u4ef6\u4e0b\u3067\u71b1\u529b\u5b66\u7684\u306b\u8cb4\u91d1\u5c5e\u3067\u3042\u308a\u3001\u9285\u3084\u30b3\u30d0\u30eb\u30c8\u3088\u308a\u3082\u306f\u308b\u304b\u306b\u8cb4\u91d1\u5c5e\u3067\u3042\u308b\u3002\u3053\u306e\u5316\u5b66\u7684\u4e0d\u6d3b\u6027\u306f\u30c7\u30d0\u30a4\u30b9\u306e\u4fe1\u983c\u6027\u306b\u306f\u6709\u5229\u3067\u3042\u308b\u304c\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u8868\u9762\u306e\u5316\u5b66\u53cd\u5fdc\u6027\u304c\u52b9\u679c\u7684\u306a\u6750\u6599\u9664\u53bb\u306e\u524d\u63d0\u6761\u4ef6\u3068\u306a\u308bCMP\u306b\u3068\u3063\u3066\u306f\u5927\u304d\u306a\u969c\u5bb3\u3068\u306a\u308b\u3002\u6a19\u6e96\u7684\u306a\u9285\u3068\u30b3\u30d0\u30eb\u30c8\u306eCMP\u30b9\u30e9\u30ea\u30fc\uff08H\u2082O\u2082\u30d9\u30fc\u30b9\u3001\u4e2d\u9178\u6027\uff09\u306f\u3001Ru\u8868\u9762\u3067\u7121\u8996\u3067\u304d\u308bMRR\u3092\u9054\u6210\u3059\u308b\u3002.<\/p>\r\n<p>\u52b9\u679c\u7684\u306aRu\u306e\u9178\u5316\u306b\u306f\u3001\u4f4epH\u306e\u975e\u5e38\u306b\u5f37\u3044\u9178\u5316\u5264\uff08\u904e\u30e8\u30a6\u7d20\u9178\u5869\u3001\u81ed\u7d20\u9178\u5869\u3001\u307e\u305f\u306fpH1\uff5e3\u306eCe\u2074\u207a\u7a2e\uff09\u307e\u305f\u306f\u96fb\u6c17\u5316\u5b66\u7684\u88dc\u52a9\u304c\u5fc5\u8981\u3067\u3042\u308b\u3002\u4e3b\u306a\u9178\u5316\u751f\u6210\u7269\u3067\u3042\u308bRuO\u2084\uff08\u56db\u9178\u5316\u30eb\u30c6\u30cb\u30a6\u30e0\uff09\u306f\u63ee\u767a\u6027\u3067\u6709\u6bd2\u306a\u5316\u5408\u7269\u3067\u3042\u308a\u3001\u9ad8\u3044\u9178\u5316\u5264\u6fc3\u5ea6\u3068\u6e29\u5ea6\u3067\u5f62\u6210\u3055\u308c\u308b\u305f\u3081\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5168\u6027\u3068\u6c5a\u67d3\u306e\u4e21\u65b9\u306e\u61f8\u5ff5\u304c\u751f\u3058\u308b\u3002\u9069\u5207\u306aRu MRR\u3092\u7dad\u6301\u3057\u306a\u304c\u3089RuO\u2084 \u751f\u6210\u30ea\u30b9\u30af\u3092\u7ba1\u7406\u3059\u308b\u3053\u3068\u304c\u3001Ru CMP\u5316\u5b66\u958b\u767a\u306e\u4e2d\u5fc3\u7684\u8ab2\u984c\u3067\u3042\u308b\u3002.<\/p>\r\n<p>2026\u5e744\u6708\u73fe\u5728\u3001Ru CMP\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u306f\u30e9\u30dc\u3067\u306e\u5b9f\u8a3c\u304b\u3089\u6700\u5148\u7aef\u30d5\u30a1\u30d6\u3067\u306e\u30d7\u30ed\u30bb\u30b9\u8a8d\u5b9a\u3078\u3068\u7a4d\u6975\u7684\u306b\u79fb\u884c\u3057\u3066\u3044\u307e\u3059\u3002JEEZ\u306fRu\u30b9\u30e9\u30ea\u30fc\u306e\u7814\u7a76\u958b\u767a\u306b\u53d6\u308a\u7d44\u3093\u3067\u304a\u308a\u3001Ru\u306e\u7d71\u5408\u306b\u53d6\u308a\u7d44\u3093\u3067\u3044\u308b\u30d5\u30a1\u30d6\u3068\u306e\u5171\u540c\u958b\u767a\u30d1\u30fc\u30c8\u30ca\u30fc\u30b7\u30c3\u30d7\u3092\u6b53\u8fce\u3057\u307e\u3059\u3002. <a href=\"https:\/\/jeez-semicon.com\/ja\/contact\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u304a\u5ba2\u69d8\u306e\u3054\u8981\u671b\u3092\u304a\u805e\u304b\u305b\u304f\u3060\u3055\u3044\u3002.<\/a><\/p>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"molybdenum\">\r\n<h2>6.GAA\u30b2\u30fc\u30c8\u30d5\u30a3\u30eb\u7528\u30e2\u30ea\u30d6\u30c7\u30f3CMP<\/h2>\r\n<p>\u30e2\u30ea\u30d6\u30c7\u30f3\uff08Mo\uff09\u306f\u3001GAA\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u30fb\u30b2\u30fc\u30c8\u7528\u306e\u4ee3\u66ff\u30e1\u30bf\u30eb\u30fb\u30d5\u30a3\u30eb\u3068\u3057\u3066\u5f37\u3044\u95a2\u5fc3\u3092\u96c6\u3081\u3066\u304a\u308a\u3001\u30df\u30c3\u30c9\u30ae\u30e3\u30c3\u30d7\u4ed8\u8fd1\u3067\u306e\u6a5f\u80fd\u3001\u826f\u597d\u306a\u71b1\u5b89\u5b9a\u6027\u3001\u304a\u3088\u3073\u5c0f\u578b\u3067\u306e\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306b\u6bd4\u3079\u3066\u4f4e\u3044\u30b2\u30fc\u30c8\u62b5\u6297\u304c\u7af6\u4e89\u529b\u3068\u306a\u3063\u3066\u3044\u308b\u3002\u30a4\u30f3\u30c6\u30eb\u306f\u540c\u793e\u306e18A\u30d7\u30ed\u30bb\u30b9\u3067Mo\u30b2\u30fc\u30c8\u30d5\u30a3\u30eb\u3092\u958b\u793a\u3057\u3066\u304a\u308a\u3001\u4ed6\u306e\u30d5\u30a1\u30a6\u30f3\u30c9\u30ea\u30822nm\u4ee5\u4e0b\u306e\u4e16\u4ee3\u5411\u3051\u306b\u8a55\u4fa1\u3057\u3066\u3044\u308b\u3002.<\/p>\r\n<p>Mo CMP\u306e\u5316\u5b66\u7684\u6027\u8cea\u306f\u3001\u4ed6\u306e\u91d1\u5c5eCMP\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3068\u306f\u660e\u3089\u304b\u306b\u7570\u306a\u308a\u307e\u3059\u3002\u9178\u5316\u30e2\u30ea\u30d6\u30c7\u30f3(MoO\u2083)\u306f\u3001\u30a2\u30eb\u30ab\u30ea\u6eb6\u6db2\u306b\u5bb9\u6613\u306b\u6eb6\u89e3\u3059\u308b\uff08MoO\u2084\u00b2-\u3092\u5f62\u6210\u3059\u308b\uff09\u305f\u3081\u3001\u5f37\u30a2\u30eb\u30ab\u30ea\u6027\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u7a4d\u6975\u7684\u306a\u7814\u78e8\u3092\u5fc5\u8981\u3068\u305b\u305a\u3001\u7d14\u7c8b\u306b\u5316\u5b66\u7684\u6eb6\u89e3\u306b\u3088\u3063\u3066\u9ad8\u3044Mo MRR\u3092\u9054\u6210\u3067\u304d\u308b\u3002\u5f37\u30a2\u30eb\u30ab\u30ea\u6027\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u7a4d\u6975\u7684\u306a\u7814\u78e8\u3092\u5fc5\u8981\u3068\u305b\u305a\u3001\u7d14\u7c8b\u306b\u5316\u5b66\u6eb6\u89e3\u306b\u3088\u3063\u3066\u9ad8\u3044Mo MRR\u3092\u9054\u6210\u3067\u304d\u308b\u3002\u3057\u304b\u3057\u3001\u3053\u306e\u540c\u3058\u6eb6\u89e3\u6027\u306f\u3001\u8868\u9762\u30d6\u30ed\u30c3\u30af\u6dfb\u52a0\u5264\u306b\u3088\u3063\u3066\u5316\u5b66\u30a8\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u3092\u6ce8\u610f\u6df1\u304f\u5236\u5fa1\u3057\u306a\u3051\u308c\u3070\u3001\u5e83\u3044Mo\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u306b\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u30fb\u30ea\u30b9\u30af\u3092\u3082\u305f\u3089\u3059\u3002.<\/p>\r\n<p>\u9178\u6027\u9178\u5316\u30b9\u30e9\u30ea\u30fc\uff08\u30da\u30eb\u30aa\u30ad\u30bd\u4e8c\u786b\u9178\u5869\u307e\u305f\u306f\u904e\u30e8\u30a6\u7d20\u9178\u5869\u306b\u3088\u308bpH2\uff5e4\uff09\u3082Mo CMP\u306b\u4f7f\u7528\u3067\u304d\u3001Mo\u3092\u6a5f\u68b0\u7684\u306b\u9664\u53bb\u53ef\u80fd\u306aMoO\u2082\u307e\u305f\u306fMoO\u2083\u8868\u9762\u5c64\u306b\u5909\u63db\u3059\u308b\u3002\u30a2\u30eb\u30ab\u30ea\u6eb6\u89e3\u5316\u5b66\u3068\u9178\u6027\u9178\u5316\u5316\u5b66\u306e\u3069\u3061\u3089\u3092\u9078\u629e\u3059\u308b\u304b\u306f\u3001\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u306e\u7279\u5b9a\u306e\u9078\u629e\u6027\u8981\u4ef6\u3001\u7279\u306b\u9ad8\u8a98\u96fb\u7387\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u3092\u8584\u304f\u3059\u308b\u3053\u3068\u306a\u304f\u304d\u308c\u3044\u306b\u6b62\u3081\u308b\u5fc5\u8981\u6027\u306b\u3088\u3063\u3066\u6c7a\u307e\u308a\u307e\u3059\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"lowk\">\r\n<h2>7.\u8d85\u4f4e\u8a98\u96fb\u7387CMP\uff1a\u6a5f\u68b0\u7684\u8106\u5f31\u6027\u3068\u9078\u629e\u6027<\/h2>\r\n<p>BEOL\u76f8\u4e92\u63a5\u7d9a\u306eRC\u9045\u5ef6\u3092\u4f4e\u6e1b\u3059\u308b\u305f\u3081\u306b\u5fc5\u8981\u306a\u8a98\u96fb\u7387\uff08k\uff09\u306e\u6f38\u9032\u7684\u306a\u4f4e\u6e1b\u306b\u3088\u308a\u3001\u30e4\u30f3\u30b0\u7387\u304c2\uff5e5GPa\u3068\u4f4e\u304f\u3001\u7834\u58ca\u976d\u6027\u304c\u30a8\u30a2\u30ed\u30b2\u30eb\u306b\u8fd1\u3044\u8d85\u4f4e\u8a98\u96fb\u7387\uff08ULK\uff09\u591a\u5b54\u8cea\u8a98\u96fb\u4f53\u819c\u30d5\u30a1\u30df\u30ea\u30fc\u304c\u751f\u307f\u51fa\u3055\u308c\u307e\u3057\u305f\u3002\u3053\u306e\u3088\u3046\u306a\u58ca\u308c\u3084\u3059\u3044\u8a98\u96fb\u4f53\u74b0\u5883\u306b\u304a\u3051\u308b\u9285\u3068\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb\u306e CMP \u306f\u3001\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u88fd\u9020\u306b\u304a\u3044\u3066\u6700\u3082\u6280\u8853\u7684\u8981\u6c42\u306e\u9ad8\u3044\u30d7\u30ed\u30bb\u30b9\u306e\u3072\u3068\u3064\u3067\u3059\u3002.<\/p>\r\n<h3>\u8d85\u4f4e\u8a98\u96fb\u7387CMP\u7279\u6709\u306e\u6545\u969c\u30e2\u30fc\u30c9<\/h3>\r\n<ul>\r\n<li><strong>\u8a98\u96fb\u4f53\u5265\u96e2\uff1a<\/strong> ULK\u819c\u3068\u30a8\u30c3\u30c1\u30b9\u30c8\u30c3\u30d7\uff08\u901a\u5e38\u306fSiCN\u307e\u305f\u306fSiCO\uff09\u306e\u754c\u9762\u306f\u3001\u76f8\u4e92\u63a5\u7d9a\u30b9\u30bf\u30c3\u30af\u5168\u4f53\u3067\u6700\u3082\u5f31\u3044\u6a5f\u68b0\u7684\u5e73\u9762\u3067\u3059\u3002\u904e\u5270\u306aCMP\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3084\u6a2a\u65b9\u5411\u306e\u305b\u3093\u65ad\u5fdc\u529b\u306f\u3001\u754c\u9762\u306e\u5265\u96e2\u3092\u5f15\u304d\u8d77\u3053\u3057\u3001\u305d\u308c\u304c\u6a2a\u65b9\u5411\u306b\u4f1d\u64ad\u3057\u3066\u76f8\u4e92\u63a5\u7d9a\u5c64\u306b\u30dc\u30a4\u30c9\u3092\u751f\u3058\u3055\u305b\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002.<\/li>\r\n<li><strong>\u8a98\u96fb\u4f53\u5185\u306e\u51dd\u96c6\u7834\u58ca\uff1a<\/strong> \u6700\u3082\u591a\u5b54\u8cea\u306aULK\u30d5\u30a3\u30eb\u30e0\uff08k &lt; 2.2\uff09\u306e\u5834\u5408\u3001\u30d5\u30a3\u30eb\u30e0\u81ea\u4f53\u304c\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3067\u51dd\u96c6\u7834\u58ca\u3057\u3001\u305d\u306e\u5f8c\u306e\u52a0\u5de5\u3067\u306f\u56de\u5fa9\u3067\u304d\u306a\u3044\u7c97\u304f\u3072\u3073\u5272\u308c\u305f\u8868\u9762\u3092\u4f5c\u308b\u3053\u3068\u304c\u3042\u308b\u3002.<\/li>\r\n<li><strong>\u958b\u3044\u305f\u5b54\u3078\u306e\u30b9\u30e9\u30ea\u30fc\u306e\u6d78\u900f\uff1a<\/strong> \u30b9\u30e9\u30ea\u30fc\u306e\u6db2\u76f8\u304cULK\u7d20\u6750\u306e\u958b\u6c17\u5b54\u7db2\u3092\u6fe1\u3089\u3057\u6d78\u900f\u3059\u308b\u3068\u3001\u7814\u78e8\u7c92\u5b50\u3084\u91d1\u5c5e\u30a4\u30aa\u30f3\u304c\u30d5\u30a3\u30eb\u30e0\u5185\u90e8\u306b\u904b\u3070\u308c\u3001\u8a98\u96fb\u7387\u306e\u4e0a\u6607\u3084\u30ea\u30fc\u30af\u3001\u4fe1\u983c\u6027\u306e\u4f4e\u4e0b\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/li>\r\n<\/ul>\r\n<p>ULK CMP\u306e\u6a19\u6e96\u7684\u306a\u7de9\u548c\u624b\u6cd5\u306f\u3001\u4f4e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\uff08\u901a\u5e38\u3001\u30a6\u30a7\u30fc\u30cf\u5727\u529b\u304c1.5 psi\u672a\u6e80\uff09\u3001\u4f4e\u5f3e\u6027\u7387\u306e\u30bd\u30d5\u30c8\u306a\u7422\u78e8\u30d1\u30c3\u30c9\u3001\u4f4e\u7814\u78e8\u5264\u6fc3\u5ea6\u3068\u754c\u9762\u6d3b\u6027\u5264\u7cfb\u3092\u6301\u3064\u30b9\u30e9\u30ea\u30fc\u914d\u5408\u3092\u7d44\u307f\u5408\u308f\u305b\u3001\u30aa\u30fc\u30d7\u30f3\u30dd\u30a2\u3078\u306e\u30b9\u30e9\u30ea\u30fc\u6d78\u900f\u3092\u4f4e\u6e1b\u3059\u308b\u3053\u3068\u3067\u3059\u3002\u3053\u308c\u3089\u306e\u5236\u7d04\u306b\u3088\u308a\u3001\u5229\u7528\u53ef\u80fd\u306aMRR\u306f\u8457\u3057\u304f\u5236\u9650\u3055\u308c\u3001\u30d7\u30ed\u30bb\u30b9\u30de\u30fc\u30b8\u30f3\u306e\u6e1b\u5c11\u3092\u88dc\u3046\u305f\u3081\u306b\u6ce8\u610f\u6df1\u3044\u7d42\u70b9\u5236\u5fa1\u304c\u5fc5\u8981\u3068\u306a\u308a\u307e\u3059\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"3dnand\">\r\n<h2>8.3D NAND\u7528CMP\uff1a\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u3068\u591a\u5c64\u5316\u306e\u8981\u6c42<\/h2>\r\n<p>\u5c64\u6570\u304c96\u5c64\uff082019\u5e74\u30d3\u30f3\u30c6\u30fc\u30b8\uff09\u304b\u3089300\u5c64\u4ee5\u4e0a\uff082026\u5e74\u306e\u4e3b\u8981\u88fd\u54c1\uff09\u306e\u30e1\u30e2\u30ea\u30bb\u30eb\u3092\u5782\u76f4\u306b\u7a4d\u5c64\u3059\u308b3D NAND\u30d5\u30e9\u30c3\u30b7\u30e5\u30e1\u30e2\u30ea\u306f\u3001\u88fd\u9020\u30b7\u30fc\u30b1\u30f3\u30b9\u306e\u8907\u6570\u306e\u30dd\u30a4\u30f3\u30c8\u3067CMP\u3092\u5fc5\u8981\u3068\u3059\u308b\u30023D NAND\u3067\u6700\u3082\u56f0\u96e3\u306aCMP\u5de5\u7a0b\u306f\u3001\u5404\u5c64\u306e\u6210\u819c\u5f8c\u306b\u9178\u5316\u7a92\u5316\u7269\uff08ON\uff09\u30b9\u30bf\u30c3\u30af\u307e\u305f\u306f\u9178\u5316\u7269-\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u30b9\u30bf\u30c3\u30af\u3092\u4ea4\u4e92\u306b\u5e73\u5766\u5316\u3059\u308b\u3053\u3068\u3068\u3001\u30b2\u30fc\u30c8\u7f6e\u63db\u5de5\u7a0b\u5f8c\u306b\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u307e\u305f\u306f\u30e2\u30ea\u30d6\u30c7\u30f3\u306e\u30ef\u30fc\u30c9\u30e9\u30a4\u30f3\u30d5\u30a3\u30eb\u6750\u6599\u3092\u9664\u53bb\u3059\u308b\u3053\u3068\u3067\u3042\u308b\u3002.<\/p>\r\n<div class=\"jz-hl\">\r\n<p>3D NAND\u69cb\u9020\u306e\u6975\u7aef\u306a\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\uff08\u6700\u5148\u7aef\u30c7\u30d0\u30a4\u30b9\u3067\u306f\u30a2\u30b9\u30da\u30af\u30c8\u6bd460:1\u3092\u8d85\u3048\u308b\u30c1\u30e3\u30cd\u30eb\u30db\u30fc\u30eb\uff09\u306f\u3001\u72ec\u7279\u306eCMP\u5883\u754c\u6761\u4ef6\u3092\u751f\u307f\u51fa\u3057\u307e\u3059\u3002\u69cb\u9020\u4e0a\u90e8\u306e\u7814\u78e8\u5727\u529b\u5206\u5e03\u3068\u5468\u8fba\u90e8\u306e\u5727\u529b\u5206\u5e03\u306f\u7570\u306a\u308a\u3001\u7814\u78e8\u4e2d\u306b\u30b9\u30e9\u30ea\u30fc\u304c\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306e\u5b54\u306b\u4fb5\u5165\u3059\u308b\u3068\u3001\u5f8c\u306b\u6b8b\u6e23\u3068\u306a\u308b\u7814\u78e8\u7c92\u5b50\u3092\u904b\u3076\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u30023D NAND\u7528CMP\u30b9\u30e9\u30ea\u30fc\u306e\u914d\u5408\u306f\u3001\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u3078\u306e\u6d78\u900f\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u3088\u3046\u7279\u5225\u306b\u8a2d\u8a08\u3055\u308c\u305f\u7c92\u5ea6\u5206\u5e03\u3068\u754c\u9762\u6d3b\u6027\u5264\u30d1\u30c3\u30b1\u30fc\u30b8\u3067\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\r\n<\/div>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"3dic\">\r\n<h2>9.3D-IC\u3068\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\uff1a\u30b5\u30d6\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u7c97\u3055\u3078\u306e\u6311\u6226<\/h2>\r\n<p>\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u306f\u3001\u9ad8\u5e2f\u57df\u5e45\u30e1\u30e2\u30ea\uff08HBM\uff09\u3001CMOS\u30a4\u30e1\u30fc\u30b8\u30bb\u30f3\u30b5\uff08CIS\uff09\u3001\u304a\u3088\u3073\u9ad8\u5ea6\u306a\u30ed\u30b8\u30c3\u30af\u30fb\u30aa\u30f3\u30fb\u30ed\u30b8\u30c3\u30af\u7a4d\u5c64\u3067\u4f7f\u7528\u3055\u308c\u308b\u3001\u6700\u9ad8\u5bc6\u5ea6\u306e3D-IC\u96c6\u7a4d\u3092\u53ef\u80fd\u306b\u3059\u308b\u6280\u8853\u3067\u3059\u3002\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u63a5\u5408\u3067\u306f\u3001\u63a5\u7740\u5264\u3084\u306f\u3093\u3060\u306e\u4e2d\u9593\u5c64\u306a\u3057\u3067\u3001\u8a98\u96fb\u4f53\u540c\u58eb\u306e\u76f4\u63a5\u63a5\u89e6\uff08SiO\u2082\u307e\u305f\u306fSiCN\u63a5\u5408\u9762\uff09\u3068\u9285\u540c\u58eb\u306e\u91d1\u5c5e\u30d1\u30c3\u30c9\u63a5\u89e6\u306b\u3088\u3063\u30662\u679a\u306e\u30a6\u30a7\u30cf\u30fc\u304c\u63a5\u5408\u3055\u308c\u307e\u3059\u3002\u63a5\u5408\u306f\u8868\u9762\u5316\u5b66\u3068\u71b1\u6d3b\u6027\u5316\u306b\u3088\u3063\u3066\u5f62\u6210\u3055\u308c\u3001\u305d\u306e\u54c1\u8cea\u306f\u4e21\u63a5\u5408\u9762\u306e\u5e73\u9762\u5ea6\u3068\u7c97\u3055\u306b\u6c7a\u5b9a\u7684\u306b\u4f9d\u5b58\u3057\u307e\u3059\u3002.<\/p>\r\n<h3>\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u63a5\u7740\u5c64\u6e96\u5099\u306e\u305f\u3081\u306eCMP\u4ed5\u69d8<\/h3>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\r\n<th>\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30fb\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u30fb\u30bf\u30fc\u30b2\u30c3\u30c8<\/th>\r\n<th>\u5f93\u6765\u306eBEOL CMP\u30bf\u30fc\u30b2\u30c3\u30c8<\/th>\r\n<th>\u6bd4\u7387\uff08\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\uff0f\u30b3\u30f3\u30d9\u30f3\u30b7\u30e7\u30ca\u30eb\uff09<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td>\u8868\u9762\u7c97\u3055 Ra<\/td>\r\n<td>&lt;0.3 nm<\/td>\r\n<td>&lt;1-2 nm<\/td>\r\n<td>5\uff5e7\u500d\u30bf\u30a4\u30c8<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u8868\u9762\u7c92\u5b50\u6570\uff08&gt;50 nm\uff09<\/td>\r\n<td>&lt;10\/\u30a6\u30a7\u30cf<\/td>\r\n<td>&lt;50-100\/\u30a6\u30a7\u30cf<\/td>\r\n<td>5\uff5e10\u500d\u30bf\u30a4\u30c8<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>Cu\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0<\/td>\r\n<td>&lt;5 nm<\/td>\r\n<td>&lt;20-30 nm<\/td>\r\n<td>4\uff5e6\u500d\u30bf\u30a4\u30c8<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u8a98\u96fb\u4f53\u30b9\u30c6\u30c3\u30d7\u9ad8\u3055<\/td>\r\n<td>&lt;3 nm<\/td>\r\n<td>&lt;10-20 nm<\/td>\r\n<td>3\uff5e7\u500d\u30bf\u30a4\u30c8<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>CMP\u5f8c\u306e\u91d1\u5c5e\u6c5a\u67d3<\/td>\r\n<td>&lt;1\u00d710\u00b9\u2070\u539f\u5b50\/cm\u00b2\u3002<\/td>\r\n<td>&lt;1\u00d710\u00b9\u539f\u5b50\/cm\u00b2\u4ee5\u4e0b<\/td>\r\n<td>10\u500d\u30bf\u30a4\u30c8<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<p>\u3053\u308c\u3089\u306e\u4ed5\u69d8\u3092\u6e80\u305f\u3059\u306b\u306f\u30012wt%\u4ee5\u4e0b\u306e\u6fc3\u5ea6\u306e\u8d85\u9ad8\u7d14\u5ea630nm\u4ee5\u4e0b\u306e\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u30b9\u30e9\u30ea\u30fc\u3068\u3001\u8d85\u4f4e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\uff08&lt;1psi\uff09\u3067\u52d5\u4f5c\u3059\u308b\u30bd\u30d5\u30c8\u306a\u7422\u78e8\u30d1\u30c3\u30c9\u304c\u5fc5\u8981\u3067\u3059\u3002\u8868\u9762\u7c92\u5b50\u3068\u91d1\u5c5e\u6c5a\u67d3\u306e\u76ee\u6a19\u5024\u3092\u9054\u6210\u3059\u308b\u306b\u306f\u3001\u901a\u5e38SC1\uff08APM\uff09\u3001DHF\u3001\u30e1\u30ac\u30bd\u30cb\u30c3\u30af\u30ea\u30f3\u30b9\u3092\u542b\u3080\u591a\u6bb5\u968e\u306eCMP\u5f8c\u6d17\u6d44\u304c\u5fc5\u9808\u3067\u3059\u3002.<\/p>\r\n<p>\u3053\u306e\u7528\u9014\u306b\u304a\u3051\u308b\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u306e\u30ac\u30a4\u30c0\u30f3\u30b9\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u306e\u8a18\u4e8b\u3092\u53c2\u7167\u306e\u3053\u3068\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Abrasives-Ceria-vs-Silica-vs-Alumina\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u7814\u78e8\u6750\u30bb\u30ea\u30a2\u5bfe\u30b7\u30ea\u30ab\u5bfe\u30a2\u30eb\u30df\u30ca<\/a>, \u7279\u306b\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u306e\u30bb\u30af\u30b7\u30e7\u30f3\u3067\u306f\u3001\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u30b0\u30ec\u30fc\u30c9\u306e\u8d85\u9ad8\u7d14\u5ea6\u5909\u7a2e\u3092\u6271\u3063\u3066\u3044\u308b\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"roadmap\">\r\n<h2>10.CMP\u6750\u6599\u30ed\u30fc\u30c9\u30de\u30c3\u30d7\uff1a2026\u5e74\u304b\u30892030\u5e74<\/h2>\r\n<div class=\"jz-timeline\">\r\n<div class=\"jz-tl-item\">\r\n<div class=\"jz-tl-dot\">\u00a0<\/div>\r\n<div class=\"jz-tl-body\"><strong>2026\u5e74\uff1aRu\u3068Mo\u306e\u30b9\u30e9\u30ea\u30fc\u719f\u6210<\/strong> \u5546\u696d\u7528\u306eRu\u3068Mo\u306eCMP\u30b9\u30e9\u30ea\u30fc\u88fd\u54c1\u306f\u3001\u6700\u5148\u7aef\u30d5\u30a1\u30d6\u3067\u306e\u8a8d\u5b9a\u304b\u3089\u521d\u671f\u751f\u7523\u4f7f\u7528\u3078\u3068\u79fb\u884c\u3057\u3066\u3044\u308b\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-tl-item\">\r\n<div class=\"jz-tl-dot\">\u00a0<\/div>\r\n<div class=\"jz-tl-body\"><strong>2027: GAA\u30ca\u30ce\u30b7\u30fc\u30c8\u304cCMP\u6a19\u6e96\u5316\u3092\u660e\u3089\u304b\u306b\u3059\u308b<\/strong> 3nm\u30682nm\u306e\u30ca\u30ce\u30b7\u30fc\u30c8\u306e\u30d7\u30ed\u30bb\u30b9\u30ec\u30b7\u30d4\u306f\u3001TSMC\u3001\u30b5\u30e0\u30b9\u30f3\u3001\u30a4\u30f3\u30c6\u30eb\u30d5\u30a1\u30a6\u30f3\u30c9\u30ea\u30fc\u3067CMP\u304c\u6a19\u6e96\u5316\u3055\u308c\u3066\u3044\u308b\u3053\u3068\u3092\u660e\u3089\u304b\u306b\u3057\u3066\u3044\u308b\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-tl-item\">\r\n<div class=\"jz-tl-dot\">\u00a0<\/div>\r\n<div class=\"jz-tl-body\"><strong>2028: \u30d0\u30c3\u30af\u30b5\u30a4\u30c9\u30fb\u30d1\u30ef\u30fc\u30fb\u30c7\u30ea\u30d0\u30ea\u30fcCMP<\/strong> \u88cf\u9762\u30d1\u30ef\u30fc\u30ec\u30fc\u30eb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\uff08BSPDN\uff09\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u8584\u5316\u3001\u30d3\u30a2\u306e\u9732\u51fa\u3001\u88cf\u9762\u30e1\u30bf\u30e9\u30a4\u30bc\u30fc\u30b7\u30e7\u30f3\u306e\u5e73\u5766\u5316\u306e\u305f\u3081\u306e\u65b0\u305f\u306aCMP\u5de5\u7a0b\u3092\u5fc5\u8981\u3068\u3057\u307e\u3059\u3002\u8584\u5316\u30a6\u30a7\u30fc\u30cf\u306e\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u306b\u6700\u9069\u5316\u3055\u308c\u305f\u30b7\u30ea\u30b3\u30f3\u8584\u5316\u30b9\u30e9\u30ea\u30fc\u304a\u3088\u3073\u65b0\u3057\u3044\u30d1\u30c3\u30c9\u30b7\u30b9\u30c6\u30e0\u3092\u5c0e\u5165\u3057\u307e\u3059\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-tl-item\">\r\n<div class=\"jz-tl-dot\">\u00a0<\/div>\r\n<div class=\"jz-tl-body\"><strong>2029\uff5e2030\u5e74\uff1a1.4\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30682\u6b21\u5143\u6750\u6599\u306e\u7d71\u5408<\/strong> \u7814\u7a76\u74b0\u5883\u306b\u304a\u3051\u308b2\u6b21\u5143\u534a\u5c0e\u4f53\u30c1\u30e3\u30cd\u30eb\uff08MoS\u2082\u3001WSe\u2082\uff09\u306e\u305f\u3081\u306e\u6700\u521d\u306eCMP\u8ab2\u984c\u3001\u30b0\u30e9\u30d5\u30a7\u30f3\u62e1\u6563\u30d0\u30ea\u30a2CMP\u958b\u767a\u3001\u3053\u308c\u3089\u306e\u6975\u7aef\u306a\u5f62\u72b6\u30ec\u30d9\u30eb\u3067\u306e\u30b5\u30d6nm\u9664\u53bb\u7387\u5236\u5fa1\u306e\u305f\u3081\u306e\u96fb\u6c17\u5316\u5b66\u7684CMP\uff08ECMP\uff09\u306e\u6f5c\u5728\u7684\u5c0e\u5165\u3002.<\/div>\r\n<\/div>\r\n<\/div>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<section id=\"faq\">\r\n<h2>11.\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/h2>\r\n<h3>7nm\u30683nm\u306eCMP\u8981\u4ef6\u306e\u9055\u3044\u306f\u4f55\u3067\u3059\u304b\uff1f<\/h3>\r\n<p>7nm \u30ce\u30fc\u30c9\u3067\u306f\u3001\u4e3b\u306b\u30b3\u30d0\u30eb\u30c8\u30fb\u30b3\u30f3\u30bf\u30af\u30c8\u304c\u5c0e\u5165\u3055\u308c\u3001STI \u304a\u3088\u3073 ILD CMP \u306e\u9078\u629e\u6027\u8981\u4ef6\u304c\u53b3\u3057\u304f\u306a\u3063\u305f\u30023nm\uff08GAA\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\uff09\u3067\u306f\u3001\u8ab2\u984c\u306f\u5287\u7684\u306b\u30a8\u30b9\u30ab\u30ec\u30fc\u30c8\u3057\u307e\u3059\uff1aCMP\u306f\u30012 nm\u4ee5\u4e0b\u306e\u5782\u76f4\u7cbe\u5ea6\u3067\u30ca\u30ce\u30b7\u30fc\u30c8\u3092\u660e\u3089\u304b\u306b\u3057\u3001\u65b0\u898f\u91d1\u5c5e\uff08Ru\u307e\u305f\u306fMo\uff09\u3092\u30b2\u30fc\u30c8\u5145\u586b\u3057\u3001\u30e4\u30f3\u30b0\u7387\u304c5 GPa\u4ee5\u4e0b\u306e\u8d85\u4f4e\u8a98\u96fb\u7387\u74b0\u5883\u3092\u51e6\u7406\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u304f\u306a\u308a\u307e\u3059\u3002CMP\u306e\u30b9\u30c6\u30c3\u30d7\u6570\u30827nm\u30683nm\u306e\u9593\u3067\u7d0430\uff5e40%\u5897\u52a0\u3057\u3001\u5404\u30b9\u30c6\u30c3\u30d7\u306e\u6027\u80fd\u5dee\u306b\u3088\u308b\u30b3\u30b9\u30c8\u3068\u6b69\u7559\u307e\u308a\u3078\u306e\u5f71\u97ff\u304c\u3055\u3089\u306b\u5927\u304d\u304f\u306a\u308a\u307e\u3059\u3002.<\/p>\r\n<h3>\u6a19\u6e96\u7684\u306aCMP\u30b9\u30e9\u30ea\u30fc\u3092\u30b3\u30d0\u30eb\u30c8\u3084\u30eb\u30c6\u30cb\u30a6\u30e0\u306b\u4f7f\u7528\u3067\u304d\u307e\u3059\u304b\uff1f<\/h3>\r\n<p>\u6a19\u6e96\u7684\u306a\u9285\u3084\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u306eCMP\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u30b3\u30d0\u30eb\u30c8\u3084\u30eb\u30c6\u30cb\u30a6\u30e0\u306b\u306f\u9069\u3055\u306a\u3044\u3002\u30b3\u30d0\u30eb\u30c8\u306b\u306f\u3001\u30b3\u30d0\u30eb\u30c8\u56fa\u6709\u306e\u8150\u98df\u9632\u6b62\u5264\u3068\u3001Co\/TiN\u754c\u9762\u3067\u306e\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u8150\u98df\u30ea\u30b9\u30af\u306b\u5bfe\u3057\u3066\u30d0\u30e9\u30f3\u30b9\u306e\u53d6\u308c\u305f\u7a4f\u3084\u304b\u306a\u9178\u5316\u5264\u3092\u542b\u3080\u3001\u7279\u5225\u306b\u8abf\u5408\u3055\u308c\u305f\u30b9\u30e9\u30ea\u30fc\u304c\u5fc5\u8981\u3067\u3042\u308b\u3002\u30eb\u30c6\u30cb\u30a6\u30e0\u306b\u306f\u3001\u4ed6\u306e\u5e02\u8ca9\u306eCMP\u7528\u9014\u3068\u306f\u5168\u304f\u7570\u306a\u308b\u3001\u5f37\u304f\u9178\u5316\u3059\u308b\u9178\u6027\u306e\u5316\u5b66\u85ac\u54c1\uff08\u904e\u30e8\u30a6\u7d20\u9178\u5869\u307e\u305f\u306fCe\u2074\u207a\u30d9\u30fc\u30b9\uff09\u304c\u5fc5\u8981\u3067\u3059\u3002\u3053\u308c\u3089\u306e\u91d1\u5c5e\u306b\u8aa4\u3063\u305f\u30b9\u30e9\u30ea\u30fc\u5316\u5b66\u85ac\u54c1\u3092\u4f7f\u7528\u3059\u308b\u3068\u3001\u6df1\u523b\u306a\u6b20\u9665\u4e8b\u8c61\u3001\u6c5a\u67d3\u3001\u307e\u305f\u306f\u30d7\u30ed\u30bb\u30b9\u6642\u9593\u4e88\u7b97\u5185\u3067\u76ae\u819c\u3092\u5b8c\u5168\u306b\u9664\u53bb\u3067\u304d\u306a\u3044\u30ea\u30b9\u30af\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\r\n<h3>\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30fb\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0 CMP \u306f\u3001\u6a19\u6e96\u7684\u306a\u9285 CMP \u3068\u4f55\u304c\u9055\u3046\u306e\u3067\u3059\u304b\uff1f<\/h3>\r\n<p>\u6839\u672c\u7684\u306a\u9055\u3044\u306f\u3001\u8981\u6c42\u3055\u308c\u308b\u8868\u9762\u54c1\u8cea\u3067\u3059\u3002\u6a19\u6e96\u7684\u306a\u9285\u306eBEOL CMP\u306f\u3001\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\uff1c20-30 nm\u3001\u30b9\u30af\u30e9\u30c3\u30c1\u6570\u306f\u30a6\u30a7\u30cf\u3042\u305f\u308a\u6570\u5341\u500b\u3092\u76ee\u6a19\u3068\u3057\u3066\u3044\u307e\u3059\u3002\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0CMP\u306f\u3001\u9285\u306e\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u30925 nm\u4ee5\u4e0b\u3001\u8868\u9762\u7c97\u3055\u30920.3 nm Ra\u4ee5\u4e0b\u300150 nm\u4ee5\u4e0a\u306e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u3092\u30a6\u30a7\u30fc\u30cf\u3042\u305f\u308a10\u500b\u4ee5\u4e0b\u306b\u3057\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002\u3053\u308c\u3089\u306e\u76ee\u6a19\u3092\u9054\u6210\u3059\u308b\u306b\u306f\u3001\u8d85\u5e0c\u8584\u30ca\u30ce\u30b7\u30ea\u30ab\u30b9\u30e9\u30ea\u30fc\u3001\u8d85\u4f4e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3067\u306e\u30bd\u30d5\u30c8\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9\u3001\u5f93\u6765\u306eCMP\u30af\u30ea\u30fc\u30f3\u30a2\u30c3\u30d7\u3088\u308a\u3082\u30a6\u30a7\u30fc\u30cf\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u306b\u8fd1\u3044\u591a\u6bb5\u968e\u306eCMP\u5f8c\u6d17\u6d44\u30b7\u30fc\u30b1\u30f3\u30b9\u304c\u5fc5\u8981\u3067\u3059\u3002.<\/p>\r\n<h3>3nm\u30ed\u30b8\u30c3\u30af\u30fb\u30a6\u30a7\u30fc\u30cf\u306eCMP\u5de5\u7a0b\u6570\u306f\uff1f<\/h3>\r\n<p>\u5b8c\u5168\u306b\u51e6\u7406\u3055\u308c\u305f3nm\u30ed\u30b8\u30c3\u30af\u30fb\u30a6\u30a7\u30fc\u30cf\uff08FEOL\u3001MOL\u3001BEOL\u304b\u3089\u6700\u7d42\u30e1\u30bf\u30e9\u30a4\u30bc\u30fc\u30b7\u30e7\u30f3\u5c64\u307e\u3067\u3092\u542b\u3080\uff09\u306b\u306f\u3001\u7279\u5b9a\u306e\u30d7\u30ed\u30bb\u30b9\u30d5\u30ed\u30fc\u3068\u96c6\u7a4d\u30b9\u30ad\u30fc\u30e0\u306b\u3082\u3088\u308b\u304c\u3001\u7d0450\uff5e70\u306eCMP\u30d7\u30ed\u30bb\u30b9\u5de5\u7a0b\u304c\u5fc5\u8981\u3067\u3042\u308b\u300210nm\u3067\u306f\u7d0430\uff5e40\u30b9\u30c6\u30c3\u30d7\u300128nm\u3067\u306f15\uff5e20\u30b9\u30c6\u30c3\u30d7\u3001180nm\u3067\u306f10\u30b9\u30c6\u30c3\u30d7\u672a\u6e80\u3067\u3042\u308b\u3002CMP\u5de5\u7a0b\u304c1\u3064\u5897\u3048\u308b\u3054\u3068\u306b\u3001\u6b20\u9665\u3001\u4e0d\u5747\u4e00\u6027\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u306b\u3088\u308b\u6b69\u7559\u307e\u308a\u4f4e\u4e0b\u306e\u53ef\u80fd\u6027\u304c\u751f\u3058\u308b\u305f\u3081\u3001\u5148\u7aef\u30ce\u30fc\u30c9\u306eCMP\u6d88\u8017\u54c1\u306e\u6027\u80fd\u57fa\u6e96\u306f\u3001\u6210\u719f\u30ce\u30fc\u30c9\u306b\u6bd4\u3079\u3066\u975e\u5e38\u306b\u53b3\u3057\u304f\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\r\n<\/section>\r\n<hr class=\"jz-divider\" \/>\r\n<div class=\"jz-tags\"><span class=\"jz-tag\">\u30a2\u30c9\u30d0\u30f3\u30b9\u30c9\u30fb\u30ce\u30fc\u30c9CMP<\/span><span class=\"jz-tag\">FinFET CMP<\/span><span class=\"jz-tag\">GAA CMP<\/span> <span class=\"jz-tag\">\u30b3\u30d0\u30eb\u30c8CMP<\/span><span class=\"jz-tag\">\u30eb\u30c6\u30cb\u30a6\u30e0CMP<\/span><span class=\"jz-tag\">3D-IC CMP<\/span> <span class=\"jz-tag\">\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30fb\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0<\/span><span class=\"jz-tag\">3D NAND<\/span><span class=\"jz-tag\">JEEZ<\/span><\/div>\r\n<div class=\"jz-cta\">\r\n<h2>\u5148\u9032\u30ce\u30fc\u30c9CMP\u958b\u767a\u3067JEEZ\u3068\u63d0\u643a<\/h2>\r\n<p>JEEZ\u306f\u3001Co CMP\u3084\u65b0\u8208Ru\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u306e\u958b\u767a\u3092\u542b\u3080\u300114nm\u4ee5\u4e0b\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u9069\u3057\u305f\u5148\u9032\u30ce\u30fc\u30c9CMP\u30b9\u30e9\u30ea\u30fc\u304a\u3088\u3073\u30d1\u30c3\u30c9\u88fd\u54c1\u3092\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059\u3002\u6280\u8853\u7684\u306a\u3054\u76f8\u8ac7\u306f\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30c1\u30fc\u30e0\u307e\u3067\u304a\u554f\u3044\u5408\u308f\u305b\u304f\u3060\u3055\u3044\u3002.<\/p>\r\n<a class=\"jz-btn\" href=\"https:\/\/jeez-semicon.com\/ja\/contact\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u5148\u9032\u30ce\u30fc\u30c9CMP\u306e\u30cb\u30fc\u30ba\u306b\u3064\u3044\u3066\u3054\u76f8\u8ac7\u304f\u3060\u3055\u3044\u3002<\/a> <a class=\"jz-btn-sec\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/What-Are-CMP-Materials-Complete-Guide\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2190 CMP\u30de\u30c6\u30ea\u30a2\u30eb\u5b8c\u5168\u30ac\u30a4\u30c9<\/a><\/div>\r\n<\/div>","protected":false},"excerpt":{"rendered":"<p>JEEZ\u30c6\u30af\u30cb\u30ab\u30eb\u30ac\u30a4\u30c9 - \u5148\u7aef\u30ce\u30fc\u30c9CMP FinFET\u3001\u30b2\u30fc\u30c8\u30aa\u30fc\u30eb\u30a2\u30e9\u30a6\u30f3\u30c9\u30013D NAND\u30013D-IC\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u306eCMP\u6d88\u8017\u54c1\u8981\u4ef6\u306b\u95a2\u3059\u308b\u5305\u62ec\u7684\u306a\u30c6\u30af\u30cb\u30ab\u30eb\u30ac\u30a4\u30c9\u3067\u3059\u3002<\/p>","protected":false},"author":1,"featured_media":1954,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1929","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1929","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1929"}],"version-history":[{"count":4,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1929\/revisions"}],"predecessor-version":[{"id":1962,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1929\/revisions\/1962"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1954"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1929"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1929"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1929"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}