{"id":1940,"date":"2026-04-30T14:32:44","date_gmt":"2026-04-30T06:32:44","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1940"},"modified":"2026-04-30T15:02:00","modified_gmt":"2026-04-30T07:02:00","slug":"cmp-process-defects-causes-types-solutions","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/cmp-process-defects-causes-types-solutions\/","title":{"rendered":"CMP\u30d7\u30ed\u30bb\u30b9\u306e\u6b20\u9665\uff1a\u539f\u56e0\u3001\u7a2e\u985e\u3001\u89e3\u6c7a\u7b56"},"content":{"rendered":"<!-- JEEZ | Cluster 8: CMP Process Defects: Causes, Types & Solutions -->\n<style>\n.jz*,.jz *::before,.jz *::after{box-sizing:border-box;margin:0;padding:0}\n.jz{font-family:'Segoe UI',Arial,sans-serif;font-size:16px;line-height:1.8;color:#1a1a2e;max-width:900px;margin:0 auto}\n.jz-hero{background:linear-gradient(135deg,#0f2544 0%,#1a4a8a 55%,#0e7c86 100%);border-radius:12px;padding:56px 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li{font-size:.91em;color:#334;margin-bottom:5px}\n.jz-table-wrap{overflow-x:auto;margin:26px 0}\n.jz-table{width:100%;border-collapse:collapse;font-size:.91em}\n.jz-table thead tr{background:linear-gradient(90deg,#0f2544,#1a4a8a);color:#fff}\n.jz-table th{padding:12px 14px;text-align:left;font-weight:600;white-space:nowrap}\n.jz-table td{padding:10px 14px;border-bottom:1px solid #e4edf8;color:#334;vertical-align:top}\n.jz-table tbody tr:nth-child(even){background:#f5f9ff}\n.jz-table tbody tr:hover{background:#ebf3ff}\n.jz-fact{border-left:4px solid #0e7c86;padding:14px 20px;background:#f0fffe;border-radius:0 8px 8px 0;margin:22px 0;font-size:1em;color:#0f3a3a;font-style:italic}\n.jz-fact strong{font-style:normal;color:#064444}\n.jz-defect-card{background:#fff;border-radius:12px;padding:22px 24px;margin:18px 0;border:1px solid #dce8f8;box-shadow:0 2px 8px 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30px;border-radius:50px;text-decoration:none;transition:all .25s;position:relative;z-index:1;box-shadow:0 4px 14px rgba(0,0,0,.18)}\n.jz-btn:hover{background:#a8d8ea;color:#0f2544;transform:translateY(-1px)}\n.jz-btn-sec{display:inline-block;background:rgba(255,255,255,.12);color:#e8f4ff;font-weight:600;font-size:.88em;padding:10px 24px;border-radius:50px;text-decoration:none;transition:all .25s;position:relative;z-index:1;border:1px solid rgba(255,255,255,.3);margin-left:12px}\n.jz-btn-sec:hover{background:rgba(255,255,255,.22);color:#fff}\n.jz-tags{display:flex;flex-wrap:wrap;gap:7px;margin:20px 0}\n.jz-tag{background:#e8f2ff;color:#1a4a8a;font-size:.77em;font-weight:600;padding:4px 11px;border-radius:20px;border:1px solid #c0d8f5}\n.jz-divider{border:none;border-top:1px solid #e0ebff;margin:38px 0}\n.jz-pillar-link{display:inline-flex;align-items:center;gap:8px;background:#e8f2ff;border:1px solid #b8d5f5;border-radius:8px;padding:10px 18px;text-decoration:none;color:#1a4a8a;font-size:.9em;font-weight:600;margin:10px 0 24px;transition:all .2s}\n.jz-pillar-link:hover{background:#d0e8ff;border-color:#1a4a8a}\n<\/style>\n\n<div class=\"jz\">\n<div class=\"jz-hero\">\n  <div class=\"jz-hero-label\">JEEZ\u30c6\u30af\u30cb\u30ab\u30eb\u30ac\u30a4\u30c9 - CMP\u306e\u4e0d\u5177\u5408<\/div>\n  <p>CMP\u306e\u6b69\u7559\u307e\u308a\u3092\u5236\u9650\u3059\u308b\u6700\u3082\u4e00\u822c\u7684\u306a\u6b20\u9665\uff08\u30b9\u30af\u30e9\u30c3\u30c1\u3001\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3001\u6d78\u98df\u3001\u5265\u96e2\u3001\u8150\u98df\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u3001\u91d1\u5c5e\u6c5a\u67d3\uff09\u3092\u7279\u5b9a\u3001\u7279\u6027\u8a55\u4fa1\u3001\u9664\u53bb\u3059\u308b\u305f\u3081\u306e\u5b8c\u5168\u306a\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30ea\u30d5\u30a1\u30ec\u30f3\u30b9\u3002.<\/p>\n  <div class=\"jz-hero-meta\">\n    <span>2026\u5e744\u6708\u66f4\u65b0<\/span>\n    <span>\u8aad\u66f8\u6642\u9593\uff1a\uff5e20\u5206<\/span>\n    <span>\u270d\ufe0f JEEZ\u30c6\u30af\u30cb\u30ab\u30eb\u7de8\u96c6\u90e8<\/span>\n  <\/div>\n<\/div>\n\n<a class=\"jz-pillar-link\" href=\"https:\/\/jeez-semicon.com\/ja\/blog\/What-Are-CMP-Materials-Complete-Guide\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2190 CMP\u30de\u30c6\u30ea\u30a2\u30eb\u306b\u623b\u308b\uff1a\u5b8c\u5168\u30ac\u30a4\u30c9<\/a>\n\n<nav class=\"jz-toc\" aria-label=\"\u76ee\u6b21\">\n  <div class=\"jz-toc-title\">\u76ee\u6b21<\/div>\n  <ol>\n    <li><a href=\"#defect-intro\">CMP\u306e\u6b20\u9665\u304c\u6b69\u7559\u307e\u308a\u3068\u4fe1\u983c\u6027\u306b\u4e0e\u3048\u308b\u5f71\u97ff<\/a><\/li>\n    <li><a href=\"#scratch\">\u30b9\u30af\u30e9\u30c3\u30c1\uff1a\u6700\u3082\u4e00\u822c\u7684\u306aCMP\u306e\u6b20\u9665<\/a><\/li>\n    <li><a href=\"#dishing\">\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\uff1a\u5e45\u5e83\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u306b\u304a\u3051\u308b\u91d1\u5c5e\u306e\u904e\u5270\u9664\u53bb<\/a><\/li>\n    <li><a href=\"#erosion\">\u6d78\u98df\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u99c6\u52d5\u578b\u8a98\u96fb\u640d\u5931<\/a><\/li>\n    <li><a href=\"#delamination\">\u5265\u96e2\uff1a\u4f4e\u8a98\u96fb\u7387\u819c\u306e\u69cb\u9020\u7834\u58ca<\/a><\/li>\n    <li><a href=\"#corrosion\">\u8150\u98df\u3068\u5b54\u98df\u96fb\u6c17\u5316\u5b66\u7684\u653b\u6483<\/a><\/li>\n    <li><a href=\"#particles\">\u6b8b\u7559\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u3068CMP\u5f8c\u306e\u6d17\u6d44\u4e0d\u826f<\/a><\/li>\n    <li><a href=\"#metal-contam\">\u91d1\u5c5e\u6c5a\u67d3\uff1a\u30b5\u30a4\u30ec\u30f3\u30c8\u30fb\u30ad\u30e9\u30fc<\/a><\/li>\n    <li><a href=\"#rca\">CMP\u6b20\u9665\u306e\u6839\u672c\u539f\u56e0\u5206\u6790\u30d5\u30ec\u30fc\u30e0\u30ef\u30fc\u30af<\/a><\/li>\n    <li><a href=\"#prevention\">\u4f53\u7cfb\u7684\u6b20\u9665\u9632\u6b62\u30d7\u30ed\u30b0\u30e9\u30e0<\/a><\/li>\n    <li><a href=\"#faq\">\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/a><\/li>\n  <\/ol>\n<\/nav>\n\n<section id=\"defect-intro\">\n  <h2>1.CMP\u306e\u6b20\u9665\u304c\u6b69\u7559\u307e\u308a\u3068\u4fe1\u983c\u6027\u306b\u4e0e\u3048\u308b\u5f71\u97ff<\/h2>\n  <p>CMP\u306b\u95a2\u9023\u3059\u308b\u6b20\u9665\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u6b69\u7559\u307e\u308a\u640d\u5931\u306e\u6700\u5927\u30ab\u30c6\u30b4\u30ea\u30fc\u306e\u4e00\u3064\u3067\u3059\u3002\u7a7a\u9593\u7684\u306b\u30e9\u30f3\u30c0\u30e0\u3067\u30d7\u30ed\u30bb\u30b9\u30a4\u30d9\u30f3\u30c8\u99c6\u52d5\u578b\u306b\u306a\u308a\u304c\u3061\u306a\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3084\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u6b20\u9665\u3068\u306f\u7570\u306a\u308a\u3001CMP\u306e\u6b20\u9665\u306b\u306f\u591a\u304f\u306e\u5834\u5408\u3001\u30a6\u30a7\u30fc\u30cf\u4f4d\u7f6e\u3001\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u3001\u307e\u305f\u306f\u7814\u78e8\u6642\u9593\u306b\u95a2\u9023\u3059\u308b\u30d1\u30bf\u30fc\u30f3\u3068\u3044\u3063\u305f\u7cfb\u7d71\u7684\u306a\u8981\u7d20\u304c\u3042\u308a\u3001\u5358\u7d14\u306a\u88c5\u7f6e\u306e\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3067\u306f\u306a\u304f\u57fa\u672c\u7684\u306a\u30d7\u30ed\u30bb\u30b9\u306e\u5909\u66f4\u3092\u5fc5\u8981\u3068\u3059\u308b\u305f\u3081\u3001\u8a3a\u65ad\u304c\u5bb9\u6613\u3067\u3042\u308b\u3068\u540c\u6642\u306b\u6392\u9664\u304c\u56f0\u96e3\u3067\u3059\u3002.<\/p>\n  <p>CMP\u6b20\u9665\u306e\u5f71\u97ff\u306f\u3001\u5373\u5ea7\u306e\u6b69\u7559\u307e\u308a\u4f4e\u4e0b\uff08\u91d1\u5c5e\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u306e\u77ed\u7d61\u3084\u958b\u53e3\u306b\u3088\u308a\u3001\u96fb\u6c17\u30c6\u30b9\u30c8\u3067\u6a5f\u80fd\u4e0d\u826f\u3092\u5f15\u304d\u8d77\u3053\u3059\uff09\u304b\u3089\u3001\u6f5c\u5728\u7684\u306a\u4fe1\u983c\u6027\u4f4e\u4e0b\uff08\u30c7\u30d0\u30a4\u30b9\u52d5\u4f5c\u6761\u4ef6\u4e0b\u3067\u512a\u5148\u8150\u98df\u3084\u30a8\u30ec\u30af\u30c8\u30ed\u30de\u30a4\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u7d4c\u8def\u3092\u5f62\u6210\u3059\u308b\u30b5\u30d6\u30b9\u30ec\u30c3\u30b7\u30e7\u30eb\u30c9\u30fb\u30b9\u30af\u30e9\u30c3\u30c1\u30fb\u30c0\u30e1\u30fc\u30b8\uff09\u3001\u6c5a\u67d3\u306b\u8d77\u56e0\u3059\u308b\u9577\u671f\u7684\u306a\u30c7\u30d0\u30a4\u30b9\u52a3\u5316\uff08CMP\u304b\u3089\u306e\u91d1\u5c5e\u30a4\u30aa\u30f3\u304c\u30c7\u30d0\u30a4\u30b9\u306e\u6d3b\u6027\u9818\u57df\u306b\u62e1\u6563\u3057\u3001\u30c8\u30e9\u30c3\u30d7\u72b6\u614b\u3084pn\u63a5\u5408\u30ea\u30fc\u30af\u3092\u5f15\u304d\u8d77\u3053\u3059\uff09\u307e\u3067\u591a\u5c90\u306b\u308f\u305f\u308b\u3002.<\/p>\n\n  <div class=\"jz-stats\">\n    <div class=\"jz-stat\"><div class=\"n\">15-30%<\/div><div class=\"l\">CMP\u95a2\u9023\u6b20\u9665\u306b\u8d77\u56e0\u3059\u308b\u5168\u30d5\u30a1\u30d6\u6b69\u7559\u307e\u308a\u640d\u5931\u306e\u63a8\u5b9a\u5272\u5408<\/div><\/div>\n    <div class=\"jz-stat\"><div class=\"n\">&gt;50%<\/div><div class=\"l\">CMP\u6b20\u9665\u306e\u3046\u3061\u3001\u30b9\u30e9\u30ea\u30fc\u304a\u3088\u3073\u30d1\u30c3\u30c9\u9078\u629e\u306e\u6700\u9069\u5316\u3060\u3051\u3067\u9632\u6b62\u53ef\u80fd\u306a\u3082\u306e<\/div><\/div>\n    <div class=\"jz-stat\"><div class=\"n\">&lt;1ppb\u672a\u6e80<\/div><div class=\"l\">FEOL\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u6700\u5927\u8a31\u5bb9Cu\u6c5a\u67d3\u91cf<\/div><\/div>\n    <div class=\"jz-stat\"><div class=\"n\">0<\/div><div class=\"l\">\u5148\u7aef\u30ce\u30fc\u30c9\u751f\u7523\u3067\u30a6\u30a7\u30fc\u30cf1\u679a\u5f53\u305f\u308a\u8a31\u5bb9\u3067\u304d\u308b\u6df1\u3044\u30b9\u30af\u30e9\u30c3\u30c1\uff08\u6df1\u3055100nm\u4ee5\u4e0a<\/div><\/div>\n  <\/div>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<section id=\"scratch\">\n  <h2>2.\u30b9\u30af\u30e9\u30c3\u30c1\uff1a\u6700\u3082\u4e00\u822c\u7684\u306aCMP\u306e\u6b20\u9665<\/h2>\n\n  <div class=\"jz-defect-card\">\n    <div class=\"jz-defect-header\">\n      <div class=\"jz-defect-icon\">\u26a1<\/div>\n      <div class=\"jz-defect-title\">\u8868\u9762\u306e\u50b7<\/div>\n      <span class=\"jz-defect-severity sev-critical\">CRITICAL - \u5373\u5ea7\u306e\u53ce\u91cf\u640d\u5931\u30ea\u30b9\u30af<\/span>\n    <\/div>\n    <div class=\"jz-defect-body\">\n      <p>\u30b9\u30af\u30e9\u30c3\u30c1\u3068\u306f\u3001\u8868\u9762\u819c\u306e\u7834\u58ca\u976d\u6027\u3092\u8d85\u3048\u308b\u7814\u78e8\u63a5\u89e6\u306b\u3088\u3063\u3066\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306b\u751f\u3058\u308b\u7d30\u9577\u3044\u6a5f\u68b0\u7684\u640d\u50b7\u306e\u3053\u3068\u3067\u3059\u3002\u30b9\u30af\u30e9\u30c3\u30c1\u306b\u306f\u3001\u6d45\u3044\u30de\u30a4\u30af\u30ed\u30b9\u30af\u30e9\u30c3\u30c1\uff08\u6df1\u30555\uff5e30 nm\u3001\u660e\u8996\u91ce\u691c\u67fb\u3067\u691c\u51fa\u53ef\u80fd\uff09\u304b\u3089\u3001\u76f8\u4e92\u63a5\u7d9a\u3092\u5373\u5ea7\u306b\u30aa\u30fc\u30d7\u30f3\u307e\u305f\u306f\u30b7\u30e7\u30fc\u30c8\u3055\u305b\u308b\u6df1\u3044\u81f4\u547d\u7684\u306a\u30b9\u30af\u30e9\u30c3\u30c1\uff08\u6df1\u305550\uff5e500 nm\u4ee5\u4e0a\u3001\u901a\u5e38\u306e\u5149\u5b66\u691c\u67fb\u3067\u53ef\u8996\u53ef\u80fd\uff09\u307e\u3067\u3042\u308a\u307e\u3059\u3002.<\/p>\n    <\/div>\n  <\/div>\n\n  <h3>\u30b9\u30af\u30e9\u30c3\u30c1\u306e\u6839\u672c\u539f\u56e0\u3068\u30e1\u30ab\u30cb\u30ba\u30e0<\/h3>\n  <div class=\"jz-table-wrap\">\n    <table class=\"jz-table\">\n      <thead>\n        <tr><th>\u6839\u672c\u539f\u56e0<\/th><th>\u30e1\u30ab\u30cb\u30ba\u30e0<\/th><th>\u691c\u51fa\u65b9\u6cd5<\/th><th>\u30d7\u30e9\u30a4\u30de\u30ea\u30fc\u30fb\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3<\/th><\/tr>\n      <\/thead>\n      <tbody>\n        <tr><td><strong>\u904e\u5927\u306a\u7814\u78e8\u7c92\u5b50<\/strong><\/td><td>\u5358\u4e00\u306e\u5927\u304d\u306a\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\uff08D99\u30c6\u30fc\u30eb\uff09\u304c\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306b\u6df1\u3044\u6e9d\u3092\u4f5c\u308b<\/td><td>DLS\u7c92\u5ea6\u5206\u5e03\u6e2c\u5b9a\uff1b\u30a6\u30a7\u30cf\u6b20\u9665\u691c\u67fb\uff08KLA\/\u65e5\u7acb\uff09<\/td><td>PSD\u4ed5\u69d8\u306e\u5f37\u5316\u30010.1\uff5e0.2 \u00b5m POU\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u8ffd\u52a0<\/td><\/tr>\n        <tr><td><strong>\u7c92\u5b50\u51dd\u96c6<\/strong><\/td><td>\u8907\u6570\u306e\u5c0f\u3055\u306a\u7c92\u5b50\u304c\u51dd\u96c6\u3057\u3066\u5927\u304d\u306a\u30af\u30e9\u30b9\u30bf\u30fc\u3068\u306a\u308a\u30011\u3064\u306e\u7279\u5927\u7814\u78e8\u6750\u3068\u3057\u3066\u6a5f\u80fd\u3059\u308b\u3002<\/td><td>\u6df7\u5408\u5f8c\u306eDLS\u6e2c\u5b9a\uff1bPOU\u306e\u30a4\u30f3\u30e9\u30a4\u30f3\u6fc1\u5ea6\u30e2\u30cb\u30bf\u30fc<\/td><td>POU\u306e\u6df7\u5408\u9069\u5408\u6027\u3092\u30c1\u30a7\u30c3\u30af\u3059\u308b\uff1b\u30b9\u30e9\u30ea\u30fc\u6e29\u5ea6\u3092\u78ba\u8a8d\u3059\u308b\uff1b\u96fb\u89e3\u6db2\u306e\u6c5a\u67d3\u3092\u907f\u3051\u308b<\/td><\/tr>\n        <tr><td><strong>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u304b\u3089\u306e\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u8131\u843d<\/strong><\/td><td>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30fb\u30c7\u30a3\u30b9\u30af\u304b\u3089\u5265\u96e2\u3057\u305f\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7825\u7c92\u304c\u30b9\u30e9\u30ea\u30fc\u306e\u6d41\u308c\u306b\u5165\u308a\u8fbc\u307f\u3001\u81f4\u547d\u7684\u306a\u6df1\u3044\u50b7\u3092\u3064\u3051\u308b\u3002<\/td><td>\u7814\u78e8\u5f8c\u306e\u691c\u67fb\uff1b\u6df1\u3044\u50b7\u306e\u30af\u30e9\u30b9\u30bf\u30fc\u30fb\u30d1\u30bf\u30fc\u30f3\u304c\u4e00\u70b9\u767a\u751f\u3092\u793a\u3059<\/td><td>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30c7\u30a3\u30b9\u30af\u306e\u4ea4\u63db\u3001\u30b9\u30e9\u30ea\u30fc\u30e9\u30a4\u30f3\u306e\u70b9\u691c\u3068\u6d17\u6d44\u3001\u30c0\u30df\u30fc\u30a6\u30a7\u30fc\u30cf\u306e\u904b\u8ee2<\/td><\/tr>\n        <tr><td><strong>\u30d1\u30c3\u30c9\u306e\u7834\u7247<\/strong><\/td><td>\u7121\u7406\u306a\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u3067\u5265\u304c\u308c\u305f\u30d1\u30c3\u30c9\u7d20\u6750\u306e\u584a\u304c\u3001\u30a6\u30a7\u30cf\u30fc\u3092\u50b7\u3064\u3051\u3066\u3057\u307e\u3046\u3002<\/td><td>\u30a6\u30a7\u30cf\u6b20\u9665\u691c\u67fb\u3001\u30d1\u30c3\u30c9\u8868\u9762\u5916\u89b3\u691c\u67fb<\/td><td>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3092\u6e1b\u3089\u3059\uff1b\u30d1\u30c3\u30c9\u306b\u5265\u96e2\u304c\u306a\u3044\u304b\u70b9\u691c\u3059\u308b\uff1b\u30dd\u30ea\u30c3\u30b7\u30e5\u306e\u5727\u529b\u3092\u4e0b\u3052\u308b<\/td><\/tr>\n        <tr><td><strong>\u786c\u3044\u7c92\u5b50\u306b\u3088\u308b\u6c5a\u67d3\uff08\u5de5\u5177\uff09<\/strong><\/td><td>\u5de5\u5177\u90e8\u54c1\uff08\u30d9\u30a2\u30ea\u30f3\u30b0\u3001\u30d7\u30e9\u30c6\u30f3\uff09\u304b\u3089\u306e\u91d1\u5c5e\u7c92\u5b50\u3001\u4e7e\u71e5\u3057\u305f\u30b9\u30e9\u30ea\u30fc\u3001\u307e\u305f\u306f\u30d1\u30c3\u30c9\u306e\u7834\u7247\u304c\u84c4\u7a4d\u3057\u3001\u30b9\u30af\u30e9\u30c3\u30c1\u73fe\u8c61\u3092\u5f15\u304d\u8d77\u3053\u3059\u3002<\/td><td>\u6b20\u9665\u30ec\u30d3\u30e5\u30fcSEM\uff1b\u7c92\u5b50\u7d44\u6210\u306e\u305f\u3081\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u5206\u6563\u578bX\u7dda\uff08EDX\uff09<\/td><td>\u5b9a\u671f\u7684\u306a\u30c4\u30fc\u30eb\u306e\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3068\u6d17\u6d44\u3001\u30b9\u30e9\u30ea\u30fc\u30e9\u30a4\u30f3\u306e\u6d17\u6d44\u30b9\u30b1\u30b8\u30e5\u30fc\u30eb\u3001\u30a6\u30a7\u30fc\u30cf\u30a8\u30c3\u30b8\u306e\u9664\u5916\u691c\u67fb<\/td><\/tr>\n        <tr><td><strong>\u6f64\u6ed1\u4e0d\u8db3<\/strong><\/td><td>\u30b9\u30e9\u30ea\u30fc\u98e2\u9913\u307e\u305f\u306f\u7d14\u6c34\u4e0d\u8db3\u306b\u3088\u308b\u30c9\u30e9\u30a4\u30b3\u30f3\u30bf\u30af\u30c8\u6469\u64e6\u306e\u767a\u751f<\/td><td>\u30d7\u30e9\u30c6\u30f3\u306e\u6469\u64e6\u96fb\u6d41\uff08\u30c8\u30eb\u30af\uff09\u306b\u30b9\u30d1\u30a4\u30af\u304c\u306a\u3044\u304b\u76e3\u8996\u3059\u308b\uff1b\u30b9\u30e9\u30ea\u30fc\u6d41\u91cf\u3092\u30c1\u30a7\u30c3\u30af\u3059\u308b<\/td><td>\u30b9\u30e9\u30ea\u30fc\u6d41\u91cf\u3092\u5897\u3084\u3059\uff1bPOU\u30c7\u30a3\u30b9\u30da\u30f3\u30b9\u30ce\u30ba\u30eb\u306e\u72b6\u614b\u3092\u78ba\u8a8d\u3059\u308b\uff1b\u30d1\u30c3\u30c9\u306e\u6e9d\u306b\u8a70\u307e\u308a\u304c\u306a\u3044\u304b\u70b9\u691c\u3059\u308b<\/td><\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n\n  <div class=\"jz-warn\">\n    <div class=\"jz-warn-icon\">\u26a0\ufe0f<\/div>\n    <div class=\"jz-warn-body\">\n      <strong>\u6c7a\u5b9a\u7684\u306a\u9055\u3044\u3060\uff1a<\/strong> \u4ee5\u524d\u306f\u5b89\u5b9a\u3057\u3066\u3044\u305f\u30d7\u30ed\u30bb\u30b9\u3067\u3001\u30b9\u30af\u30e9\u30c3\u30c1\u6570\u304c \u6025\u6fc0\u306b\u5897\u52a0\u3057\u305f\u5834\u5408\u3001\u307b\u3068\u3093\u3069\u306e\u5834\u5408\u3001PSD\u306e\u7570\u306a \u308b\u65b0\u3057\u3044\u30b9\u30e9\u30ea\u30fc\u306e\u30ed\u30c3\u30c8\u3001\u5bff\u547d\u306b\u9054\u3057\u305f\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7 \u30ca\u30fc\u30fb\u30c7\u30a3\u30b9\u30af\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u304c\u6df7\u5165\u3057\u305f\u5de5\u5177 \u306e\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u3001\u307e\u305f\u306f\u30d7\u30ed\u30bb\u30b9\u30fb\u30d1\u30e9\u30e1\u30fc\u30bf\u306e\u30c9\u30ea\u30d5\u30c8 \u306a\u3069\u3001\u5358\u4e00\u306e\u6839\u672c\u539f\u56e0\u306e\u5909\u5316\u3092\u793a\u3057\u3066\u3044\u308b\u3002\u30b9\u30af\u30e9\u30c3\u30c1\u6570\u306e\u6025\u5897\u306f\u3001\u7d4c\u6642\u7684\u306b\u5e73\u5747\u5316\u3055\u308c\u308b\u901a\u5e38\u306e\u30d7\u30ed\u30bb\u30b9\u5909\u52d5\u3067\u306f\u306a\u304f\u3001\u6839\u672c\u539f\u56e0\u306e\u8abf\u67fb\u3092\u76f4\u3061\u306b\u5fc5\u8981\u3068\u3059\u308b\u30a2\u30e9\u30fc\u30e0\u3068\u3057\u3066\u6271\u3046\u3053\u3068\u3002.\n    <\/div>\n  <\/div>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<section id=\"dishing\">\n  <h2>3.\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\uff1a\u5e83\u3044\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u306b\u304a\u3051\u308b\u91d1\u5c5e\u306e\u904e\u5270\u9664\u53bb<\/h2>\n\n  <div class=\"jz-defect-card\">\n    <div class=\"jz-defect-header\">\n      <div class=\"jz-defect-icon\">\ud83d\udd35<\/div>\n      <div class=\"jz-defect-title\">\u9285 \/ \u91d1\u5c5e\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0<\/div>\n      <span class=\"jz-defect-severity sev-high\">\u9ad8 - \u62b5\u6297\u5897\u52a0\u3001\u4fe1\u983c\u6027\u30ea\u30b9\u30af<\/span>\n    <\/div>\n    <div class=\"jz-defect-body\">\n      <p>\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3068\u306f\u3001CMP\u5f8c\u306b\u91d1\u5c5e\u8868\u9762\uff08\u6700\u3082\u4e00\u822c\u7684\u306a\u306e\u306f\u9285\uff09\u306b\u5f62\u6210\u3055\u308c\u308b\u51f9\u72b6\u306e\u304f\u307c\u307f\u306e\u3053\u3068\u3067\u3001\u91d1\u5c5e\u8868\u9762\u304c\u5468\u56f2\u306e\u8a98\u96fb\u4f53\u8868\u9762\u3088\u308a\u3082\u51f9\u3093\u3067\u3044\u308b\u3002\u3053\u308c\u306f\u3001CMP\u5de5\u7a0b\u304c\u3001\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u9632\u6b62\u819c\u3092\u5747\u4e00\u306b\u7dad\u6301\u3067\u304d\u306a\u3044\u5e83\u3044\u5f62\u72b6\u306b\u304a\u3044\u3066\u3001\u3088\u308a\u67d4\u3089\u304b\u304f\u4fdd\u8b77\u3055\u308c\u3066\u3044\u306a\u3044\u91d1\u5c5e\u8868\u9762\u3092\u512a\u5148\u7684\u306b\u9664\u53bb\u3059\u308b\u305f\u3081\u306b\u767a\u751f\u3057\u307e\u3059\u3002.<\/p>\n    <\/div>\n  <\/div>\n\n  <h3>\u9285\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u306e\u7269\u7406\u5b66<\/h3>\n  <p>\u9285CMP\u3067\u306f\u3001BTA\uff08\u30d9\u30f3\u30be\u30c8\u30ea\u30a2\u30be\u30fc\u30eb\uff09\u30a4\u30f3\u30d2\u30d3\u30bf\u30fc\u304c\u9285\u8868\u9762\u306b\u8584\u3044\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u819c\u3092\u5f62\u6210\u3057\u3001\u30b1\u30df\u30ab\u30eb\u30a2\u30bf\u30c3\u30af\u304b\u3089\u4fdd\u8b77\u3057\u307e\u3059\u3002\u5e45\u306e\u5e83\u3044\u9285\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\uff08\u901a\u5e3810 \u00b5m\u4ee5\u4e0a\uff09\u3067\u306f\u3001\u30d1\u30c3\u30c9\u306f\u7814\u78e8\u4e2d\u306b\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u306b\u9069\u5408\u3057\u3001\u5468\u56f2\u306e\u8a98\u96fb\u4f53\u304c\u9732\u51fa\u3057\u305f\u5f8c\u3067\u3082\u9285\u8868\u9762\u3068\u76f4\u63a5\u63a5\u89e6\u3057\u307e\u3059\u3002\u3053\u306e\u6bb5\u968e\u3067\u306f\u3001\u30d1\u30c3\u30c9\u3068\u306e\u7d99\u7d9a\u7684\u306a\u6a5f\u68b0\u7684\u63a5\u89e6\u306b\u3088\u308a\u3001\u9285\u4e2d\u5fc3\u90e8\u304b\u3089BTA\u819c\u304c\u9664\u53bb\u3055\u308c\u3001\u5316\u5b66\u9178\u5316\u5264\u304c\u4fdd\u8b77\u3055\u308c\u3066\u3044\u306a\u3044\u8868\u9762\u3092\u653b\u6483\u3057\u3001\u30c7\u30a3\u30c3\u30b7\u30e5\u5f62\u72b6\u3092\u5f62\u6210\u3057\u307e\u3059\u3002.<\/p>\n  <ul>\n    <li><strong>\u30b9\u30e9\u30ea\u30fc\u4fc2\u6570\uff1a<\/strong> \u9ad8\u3044\u9178\u5316\u5264\u6fc3\u5ea6\u306f\u3001\u4fdd\u8b77\u3055\u308c\u3066\u3044\u306a\u3044\u9285\u306e\u5316\u5b66\u30a8\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u3092\u5897\u52a0\u3055\u305b\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3092\u52a0\u901f\u3059\u308b\u3002BTA\u6fc3\u5ea6\u304c\u4e0d\u5341\u5206\u3060\u3068\u3001\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u819c\u306e\u5b89\u5b9a\u6027\u304c\u4f4e\u4e0b\u3059\u308b\u3002\u30b7\u30ea\u30ab\u7814\u78e8\u5264\u306e\u653b\u6483\u6027\u304c\u9ad8\u3044\u30b9\u30e9\u30ea\u30fc\u306f\u3001BTA\u3092\u6539\u8cea\u3059\u308b\u3088\u308a\u3082\u65e9\u304f\u6a5f\u68b0\u7684\u306b\u9664\u53bb\u3059\u308b\u3002.<\/li>\n    <li><strong>\u30d1\u30c3\u30c9\u8981\u56e0\uff1a<\/strong> \u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\u306f\u5e45\u306e\u5e83\u3044\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u306b\u3088\u308a\u6df1\u304f\u30d5\u30a3\u30c3\u30c8\u3057\u3001\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3092\u5897\u52a0\u3055\u305b\u308b\u3002\u30cf\u30fc\u30c9\u30d1\u30c3\u30c9\u306f\u3001\u3088\u308a\u5e73\u9762\u7684\u306a\u63a5\u89e6\u9762\u3092\u7dad\u6301\u3057\u3001\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3092\u6e1b\u5c11\u3055\u305b\u308b\u304c\u3001\u305d\u306e\u4ee3\u511f\u3068\u3057\u3066\u72ed\u3044\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u30a8\u30c3\u30b8\u3067\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u304c\u5927\u304d\u304f\u306a\u308b\u3002.<\/li>\n    <li><strong>\u30d7\u30ed\u30bb\u30b9\u8981\u56e0\uff1a<\/strong> \u904e\u7814\u78e8\uff08\u7d42\u70b9\u3092\u8d85\u3048\u308b\u904e\u5ea6\u306e\u6642\u9593\uff09\u306f\u3001\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u306e\u6700\u3082\u76f4\u63a5\u7684\u306a\u539f\u56e0\u3067\u3042\u308b\u3002in-situ\u5149\u5b66\u53cd\u5c04\u7387\u307e\u305f\u306f\u6e26\u96fb\u6d41\u30e2\u30cb\u30bf\u30fc\u3092\u4f7f\u7528\u3057\u305f\u53b3\u5bc6\u306a\u7d42\u70b9\u7ba1\u7406\u306f\u3001\u6700\u3082\u52b9\u679c\u7684\u306a\u5358\u4e00\u30d1\u30e9\u30e1\u30fc\u30bf\u88dc\u6b63\u3067\u3059\u3002.<\/li>\n  <\/ul>\n\n  <div class=\"jz-hl\">\n    <p><strong>\u30ce\u30fc\u30c9\u3054\u3068\u306e\u8a31\u5bb9\u5410\u51fa\u91cf\uff1a<\/strong> 28nm\u4ee5\u4e0a\u3067\u306f\u3001\u5e4520\uff5e30nm\u306eCu\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u304c\u4e00\u822c\u7684\u306b\u8a31\u5bb9\u3055\u308c\u308b\u300210nm\u4ee5\u4e0b\u3067\u306f\u3001\u305d\u306e\u9650\u754c\u306f10\uff5e15nm\u306b\u53b3\u3057\u304f\u306a\u308b\u3002\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30fb\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u30fb\u30ec\u30a4\u30e4 CMP \u3067\u306f\u3001Cu \u306e\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u306f 5 nm \u4ee5\u4e0b\u3067\u306a\u3051\u308c\u3070\u306a\u3089\u305a\u3001\u5f93\u6765\u306e\u9285 BEOL \u3068\u306f\u6839\u672c\u7684\u306b\u7570\u306a\u308b\u30d7\u30ed\u30bb\u30b9\u30fb\u30a2\u30d7\u30ed\u30fc\u30c1\uff08\u8d85\u4f4e\u30d5\u30a9\u30fc\u30b9\u3001\u62e1\u5f35\u30d0\u30d5\u30fb\u30b9\u30c6\u30c3\u30d7\uff09\u304c\u5fc5\u8981\u3068\u306a\u308a\u307e\u3059\u3002.<\/p>\n  <\/div>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<section id=\"erosion\">\n  <h2>4.\u4fb5\u98df\uff1a\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u99c6\u52d5\u578b\u8a98\u96fb\u640d\u5931<\/h2>\n\n  <div class=\"jz-defect-card\">\n    <div class=\"jz-defect-header\">\n      <div class=\"jz-defect-icon\">\ud83c\udf0a<\/div>\n      <div class=\"jz-defect-title\">\u8a98\u96fb\u4fb5\u98df<\/div>\n      <span class=\"jz-defect-severity sev-high\">\u9ad8 - \u30aa\u30fc\u30d0\u30fc\u30ec\u30a4\u4e88\u7b97\u3078\u306e\u5f71\u97ff\u3001\u4fe1\u983c\u6027<\/span>\n    <\/div>\n    <div class=\"jz-defect-body\">\n      <p>\u4fb5\u98df\u3068\u306f\u3001\u91d1\u5c5e\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u306e\u9ad8\u3044\u9818\u57df\u3067\u8a98\u96fb\u4f53\u819c\u304c\u8584\u304f\u306a\u308b\u3053\u3068\u3067\u3059\u3002\u30e1\u30bf\u30eb\u30a2\u30ec\u30a4\u304c\u5bc6\u96c6\u3057\u3066\u3044\u308b\u9818\u57df\u3067\u306f\u3001CMP\u8868\u9762\u306e\u5c40\u6240\u7684\u306a\u5b9f\u52b9\u786c\u5ea6\u304c\u4f4e\u304f\u306a\u308b\u305f\u3081\uff08\u8edf\u8cea\u9285\u3068\u786c\u8cea\u9178\u5316\u7269\u304c\u6df7\u5728\u3057\u3066\u3044\u308b\u305f\u3081\uff09\u3001\u7814\u78e8\u5727\u529b\u304c\u758e\u306a\u9818\u57df\u3084\u5b64\u7acb\u3057\u305f\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u9818\u57df\u3068\u306f\u7570\u306a\u308b\u5206\u5e03\u306b\u306a\u308a\u307e\u3059\u3002\u305d\u306e\u7d50\u679c\u3001\u5bc6\u306a\u9818\u57df\u3067\u306f\u758e\u306a\u9818\u57df\u3088\u308a\u3082\u8a98\u96fb\u4f53\u306e\u9664\u53bb\u304c\u901f\u304f\u306a\u308a\u3001\u30c0\u30a4\u5168\u4f53\u306b\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\u30fc\u306e\u3070\u3089\u3064\u304d\u304c\u6b8b\u308b\u305f\u3081\u3001\u5f8c\u7d9a\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u5de5\u7a0b\u3067\u30aa\u30fc\u30d0\u30fc\u30ec\u30a4\u304c\u52a3\u5316\u3057\u307e\u3059\u3002.<\/p>\n    <\/div>\n  <\/div>\n\n  <h3>\u6d78\u98df\u3068\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\uff1a2\u3064\u306e\u6b20\u9665\u306e\u9055\u3044<\/h3>\n  <p>\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3068\u30a8\u30ed\u30fc\u30b8\u30e7\u30f3\u306f\u3057\u3070\u3057\u3070\u4e00\u7dd2\u306b\u8b70\u8ad6\u3055\u308c\u307e\u3059\u304c\u3001\u305d\u306e\u7269\u7406\u7684\u30e1\u30ab\u30cb\u30ba\u30e0\u3068\u6e2c\u5b9a\u65b9\u6cd5\u306e\u4e21\u65b9\u306b\u304a\u3044\u3066\u7570\u306a\u308b\u3082\u306e\u3067\u3059\u3002\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u306f\u3001\u91d1\u5c5e\u8868\u9762\u4e2d\u5fc3\u3068\u96a3\u63a5\u3059\u308b\u8a98\u96fb\u4f53\u8868\u9762\u3068\u306e\u9593\u306e\u9ad8\u3055\u306e\u5dee\u3068\u3057\u3066\u6e2c\u5b9a\u3055\u308c\u307e\u3059\u3002\u6d78\u98df\u306f\u3001\u5b64\u7acb\u3057\u305f\u8a98\u96fb\u4f53\u9818\u57df\u3068\u6bd4\u8f03\u3057\u305f\u30d1\u30bf\u30fc\u30f3\u30fb\u30a2\u30ec\u30a4\u9818\u57df\u306e\u8a98\u96fb\u4f53\u306e\u539a\u307f\u306e\u6e1b\u5c11\u3068\u3057\u3066\u6e2c\u5b9a\u3055\u308c\u307e\u3059\u3002\u3069\u3061\u3089\u3082\u30c0\u30a4\u5168\u4f53\u306e\u9ad8\u3055\u3070\u3089\u3064\u304d\u306b\u5bc4\u4e0e\u3057\u3001\u4ed5\u69d8\u5185\u3067\u72ec\u7acb\u306b\u5236\u5fa1\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n  <h3>\u7802\u9632\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3<\/h3>\n  <ul>\n    <li><strong>\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u6027\uff08Cu\uff1a\u9178\u5316\u7269\u6bd4\uff09\u3092\u9ad8\u3081\u308b\uff1a<\/strong> \u30b9\u30c6\u30c3\u30d72\u30d0\u30ea\u30a2\u30b9\u30e9\u30ea\u30fc\u4e2d\u306eCu:SiO\u2082\u9664\u53bb\u7387\u6bd4\u304c\u9ad8\u3044\u307b\u3069\u3001\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb\u5358\u4f4d\u30af\u30ea\u30a2\u30fc\u3042\u305f\u308a\u306e\u9178\u5316\u7269\u9664\u53bb\u91cf\u304c\u6e1b\u5c11\u3057\u3001\u30a8\u30ed\u30fc\u30b8\u30e7\u30f3\u3092\u76f4\u63a5\u4f4e\u6e1b\u3059\u308b\u3002.<\/li>\n    <li><strong>\u30c0\u30df\u30fc\u30d5\u30a3\u30eb\u3067\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u3092\u6700\u9069\u5316<\/strong> CAD \u30ec\u30a4\u30a2\u30a6\u30c8\u30fb\u30c4\u30fc\u30eb\u3067\u306f\u3001\u96fb\u6c17\u7684\u306b\u7d76\u7e01\u3055\u308c\u305f\u9285\u3084\u8a98\u96fb\u4f53\u306e\u30c0\u30df\u30fc\u30fb\u30d5\u30a3\u30eb\u69cb\u9020\u3092\u633f\u5165\u3059\u308b\u3053\u3068\u3067\u3001\u30c0\u30a4\u5168\u4f53\u306e\u5c40\u6240\u7684\u306a\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u3092\u6b63\u898f\u5316\u3057\u3001\u30a8\u30ed\u30fc\u30b8\u30e7\u30f3\u3092\u5f15\u304d\u8d77\u3053\u3059\u5bc6\u5ea6\u4f9d\u5b58\u306e\u9664\u53bb\u7387\u5909\u52d5\u3092\u4f4e\u6e1b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/li>\n    <li><strong>\u30aa\u30fc\u30d0\u30fc\u30dd\u30ea\u30c3\u30b7\u30e5\u306e\u6642\u9593\u3092\u77ed\u7e2e\u3059\u308b\uff1a<\/strong> \u6d78\u98df\u306f\u3001\u7d42\u70b9\u5f8c\u306e\u904e\u7814\u78e8\u6642\u9593\u3068\u5171\u306b\u307b\u307c\u76f4\u7dda\u7684\u306b\u5897\u52a0\u3059\u308b\u3002\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3092\u6e1b\u5c11\u3055\u305b\u308b\u540c\u3058\u7d42\u70b9\u6700\u9069\u5316\u306f\u3001\u6d78\u98df\u3082\u6e1b\u5c11\u3055\u305b\u308b\u3002.<\/li>\n    <li><strong>\u786c\u3081\u306e\u30d1\u30c3\u30c9\u3092\u4f7f\u3046\uff1a<\/strong> \u786c\u3044\u30d1\u30c3\u30c9\u306f\u3001\u8868\u9762\u4e0b\u306b\u4f55\u304c\u3042\u308d\u3046\u3068\u3001\u3088\u308a\u5747\u4e00\u306a\u63a5\u89e6\u5727\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u3001\u5c40\u6240\u7684\u306a\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u306e\u5f71\u97ff\u3092\u53d7\u3051\u306b\u304f\u3044\u3002\u3053\u306e\u305f\u3081\u3001\u9664\u53bb\u7387\u306e\u30d1\u30bf\u30fc\u30f3\u5bc6\u5ea6\u4f9d\u5b58\u6027\u304c\u6e1b\u5c11\u3057\u3001\u4fb5\u98df\u304c\u6e1b\u5c11\u3059\u308b\u3002.<\/li>\n  <\/ul>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<section id=\"delamination\">\n  <h2>5.\u5c64\u9593\u5265\u96e2\u4f4e\u8a98\u96fb\u7387\u819c\u306e\u69cb\u9020\u7834\u58ca<\/h2>\n\n  <div class=\"jz-defect-card\">\n    <div class=\"jz-defect-header\">\n      <div class=\"jz-defect-icon\">\ud83d\udca5<\/div>\n      <div class=\"jz-defect-title\">\u30d5\u30a3\u30eb\u30e0\u306e\u5265\u96e2<\/div>\n      <span class=\"jz-defect-severity sev-critical\">CRITICAL - \u30a6\u30a7\u30cf\u30fc\u30b9\u30af\u30e9\u30c3\u30d7\u30ea\u30b9\u30af<\/span>\n    <\/div>\n    <div class=\"jz-defect-body\">\n      <p>\u5c64\u9593\u5265\u96e2\u3068\u306f\u3001\u754c\u9762\u63a5\u7740\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u8d85\u3048\u308b\u305b\u3093\u65ad\u5fdc\u529b\u307e\u305f\u306f\u5f15\u5f35\u5fdc\u529b\u306b\u3088\u3063\u3066\u3001CMP\u4e2d\u306b\u30d5\u30a3\u30eb\u30e0\u5c64\u304c\u4e0b\u5730\u8868\u9762\u304b\u3089\u5b8c\u5168\u306b\u307e\u305f\u306f\u90e8\u5206\u7684\u306b\u5265\u96e2\u3059\u308b\u3053\u3068\u3067\u3059\u3002\u8d85\u4f4e\u8a98\u96fb\u7387(ULK)\u30d5\u30a3\u30eb\u30e0\u3084\u3001\u7570\u7a2e\u6750\u6599\u304c\u8584\u3044\u63a5\u7740\u5264\u3084\u8a98\u96fb\u4f53\u5c64\u9593\u819c\u3092\u4ecb\u3057\u3066\u63a5\u7740\u3055\u308c\u308b\u9ad8\u5ea6\u306a\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u69cb\u9020\u3067\u3088\u304f\u898b\u3089\u308c\u307e\u3059\u3002\u5c64\u9593\u5265\u96e2\u306f\u3001\u7814\u78e8\u4e2d\u306b\u30a6\u30a7\u30fc\u30cf\u3092\u6a2a\u65b9\u5411\u306b\u4f1d\u64ad\u3057\u3001\u5927\u898f\u6a21\u306a\u964d\u4f0f\u640d\u5931\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n    <\/div>\n  <\/div>\n\n  <h3>CMP\u8a98\u8d77\u5c64\u9593\u5265\u96e2\u306e\u529b\u5b66\u30e2\u30c7\u30eb<\/h3>\n  <p>CMP\u4e2d\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306f\u6cd5\u7dda\u529b\uff08\u30d1\u30c3\u30c9\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u306b\u3088\u308b\u5727\u7e2e\u529b\uff09\u3068\u63a5\u7dda\u305b\u3093\u65ad\u529b\uff08\u30d1\u30c3\u30c9\u3068\u30a6\u30a7\u30fc\u30cf\u9593\u306e\u76f8\u5bfe\u904b\u52d5\u306b\u3088\u308b\uff09\u306e\u4e21\u65b9\u3092\u53d7\u3051\u307e\u3059\u3002\u5f93\u6765\u306e\u9178\u5316\u819c\u3084\u91d1\u5c5e\u819c\u306e\u5834\u5408\u3001\u7814\u78e8\u4e2d\u306b\u767a\u751f\u3059\u308b\u526a\u65ad\u5fdc\u529b\u306f\u754c\u9762\u7834\u58ca\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u306f\u308b\u304b\u306b\u4e0b\u56de\u308a\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u30e4\u30f3\u30b0\u73872\uff5e5GPa\u306e\u8d85\u4f4e\u8a98\u96fb\u4f53\u819c\u3067\u306f\u3001\u819c\u306e\u525b\u6027\u304c\u4f4e\u3044\u305f\u3081\u305b\u3093\u65ad\u5fdc\u529b\u304c\u5897\u5e45\u3055\u308c\u3001\u754c\u9762\u63a5\u7740\u30a8\u30cd\u30eb\u30ae\u30fc\uff08\u7279\u306bULK\/\u30a8\u30c3\u30c1\u30b9\u30c8\u30c3\u30d7\u754c\u9762\uff09\u306f\u3001\u4ed6\u306e\u819c\u7a2e\u3067\u65e5\u5e38\u7684\u306b\u884c\u308f\u308c\u308b\u7814\u78e8\u6761\u4ef6\u306b\u8010\u3048\u308b\u306b\u306f\u4e0d\u5341\u5206\u306a\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n  <h3>\u5c64\u9593\u5265\u96e2\u9632\u6b62\u7b56<\/h3>\n  <ul>\n    <li><strong>CMP\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u3092\u9650\u754c\u95be\u5024\u4ee5\u4e0b\u306b\u3059\u308b\uff1a<\/strong> ULK CMP\u306e\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u306f\u3001\u63a5\u89e6\u5727\u529b\u3068\u76f8\u5bfe\u901f\u5ea6\u306e\u7a4d\uff08Preston\u30d1\u30e9\u30e1\u30fc\u30bf\uff09\u3092\u3001\u6a2a\u65b9\u5411\u306e\u305b\u3093\u65ad\u5fdc\u529b\u304c\u6700\u60aa\u306e\u5834\u5408\u306e\u754c\u9762\u63a5\u7740\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u4e0a\u56de\u308b\u5024\u4ee5\u4e0b\u306b\u4fdd\u3064\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u5178\u578b\u7684\u306aULK CMP\u306e\u30c0\u30a6\u30f3\u30d5\u30a9\u30fc\u30b9\u76ee\u6a19\u306f\u3001&lt;1.5 psi (10 kPa)\u3067\u3059\u3002.<\/li>\n    <li><strong>\u8d85\u67d4\u3089\u304b\u3044\u7814\u78e8\u30d1\u30c3\u30c9\u3092\u4f7f\u7528\u3057\u3066\u304f\u3060\u3055\u3044\uff1a<\/strong> \u30bd\u30d5\u30c8\u30d1\u30c3\u30c9\u306f\u7814\u78e8\u529b\u3092\u3088\u308a\u5747\u4e00\u306b\u5206\u6563\u3057\u3001\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u30a8\u30c3\u30b8\u3084\u30d1\u30bf\u30fc\u30f3\u5883\u754c\u3067\u306e\u30d4\u30fc\u30af\u305b\u3093\u65ad\u5fdc\u529b\u3092\u4f4e\u6e1b\u3057\u307e\u3059\u3002.<\/li>\n    <li><strong>\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316\u306b\u3088\u308a\u3001\u30d5\u30a3\u30eb\u30e0\u306e\u5bc6\u7740\u6027\u3092\u5411\u4e0a\u3055\u305b\u308b\uff1a<\/strong> \u6210\u819c\u6761\u4ef6\uff08\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u3001\u754c\u9762\u5bc6\u7740\u5c64\u3001Cu\u30b7\u30fc\u30c9\u5c64\u306e\u539a\u3055\uff09\u306f\u3001\u81e8\u754c\u754c\u9762\u306e\u5bc6\u7740\u30a8\u30cd\u30eb\u30ae\u30fc\u306b\u5f71\u97ff\u3059\u308b\u3002CMP\u30d7\u30ed\u30bb\u30b9\u8a2d\u8a08\u3068\u9023\u643a\u3057\u3066\u6210\u819c\u3092\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u304c\u3001\u6700\u3082\u5f37\u56fa\u306a\u9577\u671f\u7684\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3067\u3042\u308b\u3002.<\/li>\n    <li><strong>\u7814\u78e8\u4e2d\u306e\u30a2\u30b3\u30fc\u30b9\u30c6\u30a3\u30c3\u30af\u30a8\u30df\u30c3\u30b7\u30e7\u30f3\u3092\u30e2\u30cb\u30bf\u30fc\u3059\u308b\uff1a<\/strong> \u4e00\u90e8\u306eCMP\u88c5\u7f6e\u3067\u306f\u3001\u30a2\u30b3\u30fc\u30b9\u30c6\u30a3\u30c3\u30af\u30a8\u30df\u30c3\u30b7\u30e7\u30f3\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u304c\u53ef\u80fd\u3067\u3001\u5265\u96e2\u306b\u95a2\u9023\u3059\u308b\u9ad8\u5468\u6ce2\u4fe1\u53f7\u3092\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u691c\u51fa\u3067\u304d\u308b\u305f\u3081\u3001\u5373\u5ea7\u306b\u30d7\u30ed\u30bb\u30b9\u3092\u505c\u6b62\u3057\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u5b8c\u5168\u306a\u640d\u5931\u3092\u9632\u3050\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/li>\n  <\/ul>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<section id=\"corrosion\">\n  <h2>6.\u8150\u98df\u3068\u5b54\u98df\u96fb\u6c17\u5316\u5b66\u7684\u653b\u6483<\/h2>\n\n  <div class=\"jz-defect-card\">\n    <div class=\"jz-defect-header\">\n      <div class=\"jz-defect-icon\">\ud83d\udd34<\/div>\n      <div class=\"jz-defect-title\">\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u8150\u98df \/ \u5b54\u98df<\/div>\n      <span class=\"jz-defect-severity sev-high\">\u9ad8 - \u62b5\u6297\u5897\u52a0\u3001\u4fe1\u983c\u6027\u4f4e\u4e0b<\/span>\n    <\/div>\n    <div class=\"jz-defect-body\">\n      <p>CMP\u306b\u304a\u3051\u308b\u8150\u98df\u30d4\u30c3\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u63a5\u89e6\u3057\u3066\u3044\u308b2\u3064\u306e\u7570\u7a2e\u91d1\u5c5e\uff08\u4f8b\u3048\u3070\u3001\u9285\u3068TiN\u30d0\u30ea\u30a2\u3001\u30b3\u30d0\u30eb\u30c8\u3068TiN\uff09\u306e\u9593\u306e\u96fb\u6c17\u5316\u5b66\u7684\u306a\u96fb\u4f4d\u5dee\u304c\u3001\u305d\u306e\u5171\u6709\u754c\u9762\u306b\u304a\u3044\u3066\u3001\u3088\u308a\u96fb\u6c17\u5316\u5b66\u7684\u306b\u6d3b\u6027\u306a\u91d1\u5c5e\u306e\u967d\u6975\u6eb6\u89e3\u3092\u4fc3\u9032\u3059\u308b\u3068\u304d\u306b\u767a\u751f\u3059\u308b\u3002\u3053\u306e\u3088\u3046\u306a\u754c\u9762\u306b\u5f62\u6210\u3055\u308c\u308b\u30d4\u30c3\u30c8\u306f\u3001\u5c40\u6240\u7684\u306a\u62b5\u6297\u5897\u52a0\u3084\u5fdc\u529b\u96c6\u4e2d\u90e8\u4f4d\u3092\u4f5c\u308a\u51fa\u3057\u3001\u5373\u5ea7\u306e\u6b69\u7559\u307e\u308a\u3068\u9577\u671f\u7684\u306a\u30a8\u30ec\u30af\u30c8\u30ed\u30de\u30a4\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u306e\u4fe1\u983c\u6027\u3092\u4f4e\u4e0b\u3055\u305b\u307e\u3059\u3002.<\/p>\n    <\/div>\n  <\/div>\n\n  <h3>Cu\/TaN\u304a\u3088\u3073Co\/TiN\u754c\u9762\u306b\u304a\u3051\u308b\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u8150\u98df<\/h3>\n  <p>\u9285\u306e CMP \u3067\u306f\u3001\u30b9\u30c6\u30c3\u30d7 1(\u30d0\u30eb\u30af\u9285\u306e\u9664\u53bb)\u304b\u3089\u30b9\u30c6\u30c3\u30d7 2(\u30d0\u30ea\u30a2\u306e\u30af\u30ea\u30a2\u30ea\u30f3\u30b0)\u3078\u306e\u79fb\u884c\u3067\u3001\u9285\u3068\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb(TaN\u3001TiN)\u306e\u4e21\u65b9\u304c\u540c\u6642\u306b\u9178\u5316\u30b9\u30e9\u30ea\u30fc\u74b0\u5883\u306b\u3055\u3089\u3055\u308c\u308b\u671f\u9593\u304c\u751f\u3058\u307e\u3059\u3002\u9285\u3068TaN\u306e\u9593\u306e\u96fb\u6c17\u5316\u5b66\u7684\u306a\u96fb\u4f4d\u5dee\u306f\u3001\u305d\u308c\u305e\u308c\u306e\u30d3\u30a2\u3084\u30c8\u30ec\u30f3\u30c1\u306e\u5468\u56f2\u3067\u9285\u306e\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u6eb6\u89e3\u3092\u4fc3\u3057\u3001\u65ad\u9762TEM\u3067\u898b\u3048\u308b\u7279\u5fb4\u7684\u306a\u300c\u30ab\u30b9\u30d7\u8150\u98df\u300d\u3084\u300c\u5800\u300d\u6b20\u9665\u3092\u4f5c\u308a\u51fa\u3057\u307e\u3059\u3002.<\/p>\n  <p>\u30b3\u30d0\u30eb\u30c8CMP\uff087nm\u4ee5\u4e0b\u3067\u4f7f\u7528\uff09\u3067\u306f\u3001Co\/TiN\u754c\u9762\u3082\u540c\u69d8\u306b\u5f71\u97ff\u3092\u53d7\u3051\u3084\u3059\u3044\u3002\u30b3\u30d0\u30eb\u30c8\u306e\u6a19\u6e96\u7684\u306a\u96fb\u6975\u96fb\u4f4d\u306f\u9285\u3088\u308a\u3082\u30de\u30a4\u30ca\u30b9\u3067\u3042\u308b\u305f\u3081\u3001\u9178\u5316\u7684\u306a\u74b0\u5883\u3067\u306f\u30ac\u30eb\u30d0\u30cb\u30c3\u30af\u30a2\u30bf\u30c3\u30af\u3092\u3055\u3089\u306b\u53d7\u3051\u3084\u3059\u304f\u306a\u308b\u3002\u9285\u306b\u4f7f\u7528\u3055\u308c\u308b\u30a2\u30be\u30fc\u30eb\u5316\u5408\u7269\uff08BTA\u3001TTZ\uff09\u306f\u3001\u30b3\u30d0\u30eb\u30c8\u8868\u9762\u306b\u7279\u7570\u7684\u306b\u5b89\u5b9a\u3057\u305f\u4e0d\u52d5\u614b\u5316\u819c\u3092\u5f62\u6210\u3059\u308b\u6291\u5236\u5264\u3067\u88dc\u3046\u304b\u3001\u7f6e\u304d\u63db\u3048\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002.<\/p>\n\n  <h3>\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3<\/h3>\n  <ul>\n    <li>\u30b9\u30c6\u30c3\u30d72\u306e\u8150\u98df\u9632\u6b62\u5264\u6fc3\u5ea6\u3092\u4e0a\u3052\u308b \/ \u30d0\u30ea\u30a2\u30b9\u30e9\u30ea\u30fc<\/li>\n    <li>\u9178\u5316\u5264\u6fc3\u5ea6\u3092\u30d0\u30ea\u30a2\u9664\u53bb\u306b\u6709\u52b9\u306a\u6700\u5c0f\u30ec\u30d9\u30eb\u307e\u3067\u4e0b\u3052\u308b<\/li>\n    <li>\u30a6\u30a7\u30fc\u30cf\u304c\u30b9\u30c6\u30c3\u30d71\u3068\u30b9\u30c6\u30c3\u30d72\u306e\u9593\u306e\u79fb\u884c\u306b\u8cbb\u3084\u3059\u6642\u9593\u3092\u6700\u5c0f\u5316\u3059\u308b\u3002<\/li>\n    <li>Co CMP \u306e\u5834\u5408\uff1aCo \u7279\u7570\u7684\u963b\u5bb3\u5264\u3092\u4f7f\u7528\uff1bCo \u306e\u4e0d\u52d5\u614b\u5316\u3092\u4e0d\u5b89\u5b9a\u306b\u3059\u308b\u30b9\u30e9\u30ea\u30fc pH &gt;7 \u3092\u907f\u3051\u308b\u3002<\/li>\n    <li>CMP\u5f8c\u306e\u6d17\u6d44\u3092\u6700\u9069\u5316\u3057\u3001\u30a6\u30a7\u30fc\u30cf\u5f85\u3061\u6642\u9593\u306b\u30b9\u30e9\u30ea\u30fc\u6b8b\u6e23\u304c\u91d1\u5c5e\u8868\u9762\u3092\u5316\u5b66\u30a8\u30c3\u30c1\u30f3\u30b0\u3057\u7d9a\u3051\u308b\u524d\u306b\u9664\u53bb\u3059\u308b\u3002<\/li>\n  <\/ul>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<section id=\"particles\">\n  <h2>7.\u6b8b\u7559\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u3068CMP\u5f8c\u306e\u6d17\u6d44\u4e0d\u826f<\/h2>\n\n  <div class=\"jz-defect-card\">\n    <div class=\"jz-defect-header\">\n      <div class=\"jz-defect-icon\">\ud83d\udd34<\/div>\n      <div class=\"jz-defect-title\">CMP\u5f8c\u306e\u6b8b\u7559\u7c92\u5b50<\/div>\n      <span class=\"jz-defect-severity sev-high\">HIGH - \u4e0b\u6d41\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u306e\u6b69\u7559\u307e\u308a\u4f4e\u4e0b<\/span>\n    <\/div>\n    <div class=\"jz-defect-body\">\n      <p>CMP\u304a\u3088\u3073\u30dd\u30b9\u30c8CMP\u30af\u30ea\u30fc\u30f3\u5f8c\u306b\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306b\u6b8b\u7559\u3059\u308b\u30b9\u30e9\u30ea\u30fc\u7c92\u5b50\u306f\u3001\u305d\u306e\u5f8c\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u5de5\u7a0b\u306b\u304a\u3051\u308b\u6b20\u9665\uff08\u30b3\u30f3\u30bf\u30af\u30c8\u5c64\u306e\u30de\u30b9\u30af\u6b20\u9665\u3068\u3057\u3066\u6a5f\u80fd\u3059\u308b\u7c92\u5b50\uff09\u3001\u8a98\u96fb\u7387\u306e\u4e0a\u6607\uff08ULK\u819c\u8868\u9762\u306b\u57cb\u3081\u8fbc\u307e\u308c\u305f\u7c92\u5b50\uff09\u3001\u91d1\u5c5e\u6c5a\u67d3\uff08\u91d1\u5c5e\u9178\u5316\u7269\u7814\u78e8\u7c92\u5b50\u304c\u71b1\u51e6\u7406\u4e2d\u306b\u30c7\u30d0\u30a4\u30b9\u5c64\u306b\u30a4\u30aa\u30f3\u3092\u6eb6\u51fa\uff09\u306e\u539f\u56e0\u3068\u306a\u308b\u3002.<\/p>\n    <\/div>\n  <\/div>\n\n  <h3>CMP\u5f8c\u306e\u30af\u30ea\u30fc\u30f3\u30b1\u30df\u30b9\u30c8\u30ea\u30fc\u9069\u5408\u6027<\/h3>\n  <p>CMP\u5f8c\u306e\u6d17\u6d44\u306e\u6709\u52b9\u6027\u306f\u3001\u6d17\u6d44\u5264\u3068\u30b9\u30e9\u30ea\u30fc\u6b8b\u6e23\u306e\u5316\u5b66\u7684\u6027\u8cea\u3068\u306e\u76f8\u6027\u306b\u6c7a\u5b9a\u7684\u306b\u4f9d\u5b58\u3057\u307e\u3059\u3002\u91cd\u8981\u306a\u8003\u616e\u4e8b\u9805<\/p>\n  <ul>\n    <li><strong>\u30af\u30ea\u30fc\u30f3\u3068\u30b9\u30e9\u30ea\u30fc\u306epH\uff1a<\/strong> \u30a2\u30eb\u30ab\u30ea\u6027\u306e\u30b9\u30e9\u30ea\u30fcpH\u3067\u306f\u5b89\u5b9a\u3067\u5341\u5206\u306b\u5206\u6563\u3057\u3066\u3044\u308b\u30b7\u30ea\u30ab\u7c92\u5b50\u3082\u3001CMP\u5f8c\u306e\u30ea\u30f3\u30b9\u3067pH\u304c\u30b7\u30ea\u30ab\u306e\u7b49\u96fb\u70b9\uff08\uff5epH 2\uff09\u306b\u5411\u304b\u3063\u3066\u4f4e\u4e0b\u3059\u308b\u3068\u3001\u51dd\u96c6\u3057\u3066\u9664\u53bb\u304c\u56f0\u96e3\u306b\u306a\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002CMP\u5f8c\u306e\u6d17\u6d44\u30b7\u30fc\u30b1\u30f3\u30b9\u3067\u306f\u3001\u30d6\u30e9\u30b7\u30b9\u30af\u30e9\u30d3\u30f3\u30b0\u3084\u30e1\u30ac\u30bd\u30cb\u30c3\u30af\u30a8\u30cd\u30eb\u30ae\u30fc\u3067\u7269\u7406\u7684\u306b\u9664\u53bb\u3059\u308b\u307e\u3067\u3001\u6b8b\u7559\u7c92\u5b50\u306e\u30b3\u30ed\u30a4\u30c9\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3059\u308b\uff08\u51dd\u96c6\u3067\u306f\u306a\u304f\u5206\u6563\u72b6\u614b\u3092\u7dad\u6301\u3059\u308b\uff09\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/li>\n    <li><strong>BTA\u3068\u6709\u6a5f\u30a4\u30f3\u30d2\u30d3\u30bf\u30fc\u306e\u9664\u53bb\uff1a<\/strong> \u9285\u306e CMP \u3067\u4f7f\u7528\u3055\u308c\u308b BTA \u3084\u985e\u4f3c\u306e\u30a2\u30be\u30fc\u30eb\u7cfb\u963b\u5bb3\u5264\u306f\u3001\u9285\u306b\u5f37\u304f\u5438\u7740\u3057\u305f\u76ae\u819c\u3092\u5f62\u6210\u3057\u3001\u6c34\u6d17\u3044\u3060\u3051\u3067\u306f\u843d\u3061\u306a\u3044\u3002\u9664\u53bb\u306b\u306f\u3001\u30a2\u30eb\u30ab\u30ea\u6027\u6d17\u6d44\u5264\uff08APM\u3001\u5e0cNH\u2084OH\uff09\u307e\u305f\u306f\u7279\u5b9a\u306eBTA\u30ad\u30ec\u30fc\u30c8\u5264\u304c\u5fc5\u8981\u3067\u3059\u3002BTA\u306e\u9664\u53bb\u304c\u4e0d\u5b8c\u5168\u306a\u5834\u5408\u3001\u63a5\u89e6\u62b5\u6297\u306e\u5897\u52a0\u3084\u3001\u305d\u306e\u5f8c\u306e\u8a98\u96fb\u4f53\u6790\u51fa\u306b\u304a\u3051\u308b\u5bc6\u7740\u6027\u306e\u554f\u984c\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002.<\/li>\n    <li><strong>\u30e1\u30ac\u30bd\u30cb\u30c3\u30af\u306e\u5468\u6ce2\u6570\u30de\u30c3\u30c1\u30f3\u30b0\uff1a<\/strong> 0.8\uff5e1.5MHz\u306e\u30e1\u30ac\u30bd\u30cb\u30c3\u30af\u6d17\u6d44\u3067\u306f\u3001\u30ad\u30e3\u30d3\u30c6\u30fc\u30b7\u30e7\u30f3\u306b\u3088\u308b\u904b\u52d5\u91cf\u79fb\u52d5\u306b\u3088\u308a\u3001\uff5e50nm\u4ee5\u4e0a\u306e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u3092\u52b9\u679c\u7684\u306b\u9664\u53bb\u3067\u304d\u307e\u3059\u3002\u3088\u308a\u5c0f\u3055\u306a\u7c92\u5b50\uff08CMP\u306b\u3088\u308b\u30b7\u30ea\u30ab\u7247\u3092\u542b\u3080\uff09\u3084\u3001\u30e1\u30ac\u30bd\u30cb\u30c3\u30af\u30ad\u30e3\u30d3\u30c6\u30fc\u30b7\u30e7\u30f3\u304c\u6a5f\u68b0\u7684\u640d\u50b7\u306e\u539f\u56e0\u3068\u306a\u308b20 nm\u4ee5\u4e0b\u306e\u5f62\u72b6\u306b\u3064\u3044\u3066\u306f\u3001\u4f4e\u5468\u6ce2\u307e\u305f\u306f\u30d1\u30eb\u30b9\u72b6\u306e\u30e1\u30ac\u30bd\u30cb\u30c3\u30af\u30e2\u30fc\u30c9\u304c\u5fc5\u8981\u3068\u306a\u308b\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002.<\/li>\n  <\/ul>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<section id=\"metal-contam\">\n  <h2>8.\u91d1\u5c5e\u6c5a\u67d3\uff1a\u30b5\u30a4\u30ec\u30f3\u30c8\u30fb\u30ad\u30e9\u30fc<\/h2>\n\n  <div class=\"jz-defect-card\">\n    <div class=\"jz-defect-header\">\n      <div class=\"jz-defect-icon\">\u2697\ufe0f<\/div>\n      <div class=\"jz-defect-title\">\u91d1\u5c5e\u30a4\u30aa\u30f3\u6c5a\u67d3<\/div>\n      <span class=\"jz-defect-severity sev-critical\">CRITICAL - \u9577\u671f\u7684\u306a\u4fe1\u983c\u6027\u3001FEOL\u5229\u56de\u308a<\/span>\n    <\/div>\n    <div class=\"jz-defect-body\">\n      <p>CMP\u30b9\u30e9\u30ea\u30fc\u3084\u30d1\u30c3\u30c9\u304b\u3089\u306e\u91d1\u5c5e\u6c5a\u67d3\u306f\u3001\u5149\u5b66\u691c\u67fb\u3084\u96fb\u5b50\u30d3\u30fc\u30e0\u691c\u67fb\u3067\u306f\u898b\u3048\u306a\u3044\u304c\u300110\u00b9\u2070atoms\/cm\u00b2\u4ee5\u4e0b\u306e\u6fc3\u5ea6\u3067\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u3084\u4fe1\u983c\u6027\u3092\u58ca\u6ec5\u7684\u306b\u52a3\u5316\u3055\u305b\u308b\u305f\u3081\u3001\u6700\u3082\u72e1\u733e\u306a\u6b20\u9665\u306e\u4e00\u3064\u3067\u3042\u308b\u3002\u9285\u3001\u9244\u3001\u30cb\u30c3\u30b1\u30eb\u3001\u30af\u30ed\u30e0\u306f\u3001\u30df\u30c3\u30c9\u30ae\u30e3\u30c3\u30d7\u306e\u30c8\u30e9\u30c3\u30d7\u72b6\u614b\u3092\u4f5c\u308a\u51fa\u3057\u3001\u63a5\u5408\u30ea\u30fc\u30af\u3092\u5897\u52a0\u3055\u305b\u3001\u5c11\u6570\u30ad\u30e3\u30ea\u30a2\u306e\u5bff\u547d\u3092\u4f4e\u4e0b\u3055\u305b\u308b\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u30ec\u30d9\u30eb\u3067\u6700\u3082\u6709\u5bb3\u306a\u6c5a\u67d3\u7269\u8cea\u3067\u3059\u3002.<\/p>\n    <\/div>\n  <\/div>\n\n  <h3>CMP\u306b\u304a\u3051\u308b\u91d1\u5c5e\u6c5a\u67d3\u306e\u539f\u56e0<\/h3>\n  <ul>\n    <li><strong>\u30b9\u30e9\u30ea\u30fc\u539f\u6599\u306e\u4e0d\u7d14\u7269\uff1a<\/strong> \u7814\u78e8\u5264\u7c92\u5b50\uff08\u7279\u306b\u4e00\u90e8\u306e\u4f9b\u7d66\u6e90\u306e\u30a2\u30eb\u30df\u30ca\uff09\u306b\u306f\u3001FEOL\u7528\u9014\u3067\u306f\u8a31\u5bb9\u3067\u304d\u306a\u3044ppm\u30ec\u30d9\u30eb\u306e\u9244\u3001\u30af\u30ed\u30e0\u3001\u30cb\u30c3\u30b1\u30eb\u304c\u542b\u307e\u308c\u3066\u3044\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u30b9\u30e9\u30ea\u30fc\u306eCOA\u91d1\u5c5e\u542b\u6709\u91cf\u306f\u3001\u8a72\u5f53\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u30ec\u30d9\u30eb\u306eSEMI C\u57fa\u6e96\u306b\u7167\u3089\u3057\u3066\u5e38\u306b\u78ba\u8a8d\u3057\u3066\u304f\u3060\u3055\u3044\u3002.<\/li>\n    <li><strong>\u7814\u78e8\u9762\u304b\u3089\u306e\u91d1\u5c5e\u6eb6\u89e3\uff1a<\/strong> \u7814\u78e8\u3055\u308c\u305f\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u304b\u3089\u6eb6\u51fa\u3057\u305f\u9285\u30a4\u30aa\u30f3\u3001\u30b3\u30d0\u30eb\u30c8\u30a4\u30aa\u30f3\u3001\u307e\u305f\u306f\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb\u30a4\u30aa\u30f3\uff08Ta\u3001Ti\uff09\u306f\u3001\u5e0c\u91c8\u3068CMP\u5f8c\u306e\u6d17\u6d44\u306b\u3088\u3063\u3066\u901f\u3084\u304b\u306b\u9664\u53bb\u3055\u308c\u306a\u3051\u308c\u3070\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u4ed6\u306e\u9818\u57df\u306b\u5438\u7740\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u7279\u306b\u9285\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u6e29\u5ea6\u3067\u30b7\u30ea\u30b3\u30f3\u4e2d\u306b\u6025\u901f\u306b\u62e1\u6563\u3059\u308b\u305f\u3081\u3001\u52b9\u679c\u7684\u306a\u30dd\u30b9\u30c8CMP DHF\u30af\u30ea\u30fc\u30f3\u306b\u3088\u3063\u3066\u3001\u8868\u9762\u6fc3\u5ea6\u304cppb\u4ee5\u4e0b\u306b\u306a\u308b\u307e\u3067\u9664\u53bb\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/li>\n    <li><strong>\u30c4\u30fc\u30eb\u30cf\u30fc\u30c9\u30a6\u30a7\u30a2\u306e\u6c5a\u67d3\uff1a<\/strong> \u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u88fd\u30b9\u30e9\u30ea\u30fc\u4f9b\u7d66\u90e8\u54c1\u306f\u3001\u30b9\u30e9\u30ea\u30fc \u306e\u6d41\u308c\u306bFe\u3084Ni\u30a4\u30aa\u30f3\u3092\u6eb6\u51fa\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002\u30aa\u30fc\u30ebPVDF\u307e\u305f\u306f\u30aa\u30fc\u30eb\u30dd\u30ea\u30d7\u30ed\u30d4\u30ec\u30f3\u306e\u30b9\u30e9\u30ea\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3092\u4f7f\u7528\u3059\u308b\u3053\u3068\u3067\u3001\u3053\u306e\u539f\u56e0\u3092\u6392\u9664\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/li>\n    <li><strong>\u30d1\u30c3\u30c9\u6dfb\u52a0\u5264\uff1a<\/strong> \u30d1\u30c3\u30c9\u306e\u914d\u5408\u306b\u3088\u3063\u3066\u306f\u3001\u91d1\u5c5e\u3092\u542b\u3080\u786c\u5316\u5264\u307e\u305f\u306f\u89e6\u5a92\u3092\u542b\u3080\u3082\u306e\u304c\u3042\u308b\u3002\u7279\u306b\u3001\u9244\u6c5a\u67d3\u9650\u5ea6\u304c\u30b5\u30d6ppb\u306e\u7bc4\u56f2\u306b\u3042\u308bFEOL\u30b2\u30fc\u30c8CMP\u7528\u9014\u3067\u306f\u3001\u91d1\u5c5e\u62bd\u51fa\u7269\u306b\u95a2\u3059\u308b\u30d1\u30c3\u30c9\u306eCOA\u3092\u78ba\u8a8d\u3057\u3066\u304f\u3060\u3055\u3044\u3002.<\/li>\n  <\/ul>\n  <p>\u91d1\u5c5e\u7d14\u5ea6\u8981\u4ef6\u3092\u30ab\u30d0\u30fc\u3059\u308b\u30b9\u30e9\u30ea\u30fc\u8abf\u9054\u306e\u30ac\u30a4\u30c0\u30f3\u30b9\u306b\u3064\u3044\u3066\u306f\u3001\u4ee5\u4e0b\u3092\u53c2\u7167\u306e\u3053\u3068\u3002 <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/CMP-Abrasives-Ceria-vs-Silica-vs-Alumina\/\" target=\"_blank\" rel=\"noopener noreferrer\">CMP\u7814\u78e8\u6750<\/a> \u306e\u8a18\u4e8b\u3092\u53c2\u7167\u3055\u308c\u305f\u3044\u3002.<\/p>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<section id=\"rca\">\n  <h2>9.CMP\u6b20\u9665\u306e\u6839\u672c\u539f\u56e0\u5206\u6790\u30d5\u30ec\u30fc\u30e0\u30ef\u30fc\u30af<\/h2>\n  <p>CMP\u5f8c\u306e\u691c\u67fb\u3067\u65b0\u3057\u3044\u30bf\u30a4\u30d7\u306e\u6b20\u9665\u3084\u6b20\u9665\u6570\u306e\u5897\u52a0\u304c\u691c\u51fa\u3055\u308c\u305f\u5834\u5408\u3001\u69cb\u9020\u5316\u3055\u308c\u305f\u6839\u672c\u539f\u56e0\u5206\u6790\uff08RCA\uff09\u30a2\u30d7\u30ed\u30fc\u30c1\u306b\u3088\u308a\u3001\u662f\u6b63\u63aa\u7f6e\u307e\u3067\u306e\u6642\u9593\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u3001\u8aa4\u8a3a\u306e\u30ea\u30b9\u30af\u3092\u4f4e\u6e1b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n\n  <div class=\"jz-table-wrap\">\n    <table class=\"jz-table\">\n      <thead>\n        <tr><th>RCA\u30b9\u30c6\u30c3\u30d7<\/th><th>\u30a2\u30af\u30b7\u30e7\u30f3<\/th><th>\u30c4\u30fc\u30eb\uff0f\u30e1\u30bd\u30c3\u30c9<\/th><\/tr>\n      <\/thead>\n      <tbody>\n        <tr><td><strong>1.\u6b20\u9665\u306e\u7279\u5fb4<\/strong><\/td><td>\u30a6\u30a7\u30cf\u5168\u4f53\u306e\u6b20\u9665\u30de\u30c3\u30d7\u306e\u53ce\u96c6\u3001\u30b5\u30a4\u30ba\u3001\u5f62\u614b\u3001\u7a7a\u9593\u5206\u5e03\u306e\u6e2c\u5b9a<\/td><td>KLA\/\u65e5\u7acb\u5149\u5b66\u691c\u67fb; SEM\u30ec\u30d3\u30e5\u30fc; \u6b20\u9665\u5206\u985e(ADC)<\/td><\/tr>\n        <tr><td><strong>2.\u6b20\u9665\u30b7\u30b0\u30cd\u30c1\u30e3\u306e\u7279\u5b9a<\/strong><\/td><td>\u6b20\u9665\u304c\u30e9\u30f3\u30c0\u30e0\u304b\u3001\u30b7\u30b9\u30c6\u30de\u30c6\u30a3\u30c3\u30af\uff08\u30a8\u30c3\u30b8\/\u30bb\u30f3\u30bf\u30fc\uff09\u304b\u3001\u5468\u671f\u7684\uff08\u5de5\u5177\u56de\u8ee2\u306b\u95a2\u9023\uff09\u304b\u3092\u5224\u65ad\u3059\u308b\u3002<\/td><td>\u6b20\u9665\u30de\u30c3\u30d7\u30aa\u30fc\u30d0\u30fc\u30ec\u30a4\u89e3\u6790\u3001\u30a6\u30a7\u30fc\u30cf\u9593\u76f8\u95a2<\/td><\/tr>\n        <tr><td><strong>3.\u30d7\u30ed\u30bb\u30b9\u30fb\u30a4\u30d9\u30f3\u30c8\u3068\u306e\u95a2\u9023<\/strong><\/td><td>\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u8a18\u9332\u3001\u30b9\u30e9\u30ea\u30fc\u30ed\u30c3\u30c8\u306e\u5909\u66f4\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u4ea4\u63db\u5c65\u6b74\u3001\u30ec\u30b7\u30d4\u306e\u5909\u66f4\u3092\u30c1\u30a7\u30c3\u30af\u3059\u308b\u3002<\/td><td>FMEA\u3001\u5909\u66f4\u7ba1\u7406\u8a18\u9332\u3001MRR\u304a\u3088\u3073WIWNU\u306eSPC\u30c1\u30e3\u30fc\u30c8<\/td><\/tr>\n        <tr><td><strong>4.\u6b20\u9665\u7d44\u6210\u306e\u5206\u6790<\/strong><\/td><td>\u6b20\u9665\u7c92\u5b50\u306eEDX\/EDS\u306b\u3088\u308b\u5316\u5b66\u7d44\u6210\u306e\u7279\u5b9a\u3001\u30b9\u30e9\u30ea\u30fc\u7531\u6765\u304b\u5de5\u5177\u7531\u6765\u304b\u306e\u5224\u5b9a<\/td><td>SEM-EDX\uff1b\u91d1\u5c5e\u6c5a\u67d3\u306eToF-SIMS\uff1b\u8868\u9762\u91d1\u5c5e\u306eVPD-ICPMS<\/td><\/tr>\n        <tr><td><strong>5.\u5206\u5272\u5b9f\u9a13\u306e\u5b9f\u65bd<\/strong><\/td><td>\u500b\u3005\u306e\u30d7\u30ed\u30bb\u30b9\u5909\u6570\uff08\u65b0\u3057\u3044\u30b9\u30e9\u30ea\u30fc\u306e\u30ed\u30c3\u30c8\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u4ea4\u63db\u3001\u30d1\u30c3\u30c9\u306e\u4ea4\u63db\uff09\u3092\u5358\u72ec\u3067\u30c6\u30b9\u30c8\u3057\u3001\u6839\u672c\u539f\u56e0\u5909\u6570\u3092\u7279\u5b9a\u3059\u308b\u3002<\/td><td>\u30d6\u30e9\u30f3\u30b1\u30c3\u30c8\u30a6\u30a7\u30fc\u30cf\u3067\u306e\u8a2d\u8a08\u5b9f\u9a13(DOE); 1\u5ea6\u306b1\u3064\u306e\u5909\u6570(OVAT)\u3067\u8fc5\u901f\u306a\u5bfe\u5fdc<\/td><\/tr>\n        <tr><td><strong>6.\u4fee\u6b63\u306e\u5b9f\u65bd\u3068\u691c\u8a3c<\/strong><\/td><td>\u662f\u6b63\u63aa\u7f6e\u3092\u9069\u7528\u3057\u3001\u30d5\u30eb\u751f\u7523\u306b\u623b\u3059\u524d\u306b\u3001\u8907\u6570\u306e\u30a6\u30a7\u30cf\u30fc\u3067\u6b20\u9665\u6570\u304c\u57fa\u6e96\u5024\u306b\u623b\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3059\u308b\u3002<\/td><td>5\u679a\u4ee5\u4e0a\u306e\u30a6\u30a7\u30cf\u30fc\u306e\u6b20\u9665\u691c\u67fb\u3001\u30d9\u30fc\u30b9\u30e9\u30a4\u30f3\u3068\u306e\u7d71\u8a08\u7684\u6bd4\u8f03<\/td><\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<section id=\"prevention\">\n  <h2>10.\u4f53\u7cfb\u7684\u6b20\u9665\u9632\u6b62\u30d7\u30ed\u30b0\u30e9\u30e0<\/h2>\n  <p>CMP\u306e\u6b20\u9665\u7ba1\u7406\u306b\u304a\u3051\u308b\u6700\u3082\u8cbb\u7528\u5bfe\u52b9\u679c\u306e\u9ad8\u3044\u30a2\u30d7\u30ed\u30fc\u30c1\u306f\u3001\u691c\u51fa\u3068\u662f\u6b63\u51e6\u7f6e\u3088\u308a\u3082\u4e88\u9632\u3067\u3042\u308b\u3002CMP\u306e\u4f53\u7cfb\u7684\u306a\u6b20\u9665\u9632\u6b62\u30d7\u30ed\u30b0\u30e9\u30e0\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u8981\u7d20\u3092\u542b\u3081\u308b\u3079\u304d\u3067\u3042\u308b\uff1a<\/p>\n  <ul>\n    <li><strong>\u5165\u56fd\u5be9\u67fb\uff1a<\/strong> PSD\u6e2c\u5b9a\uff08DLS\uff09\u3001pH\u691c\u8a3c\u3001\u91d1\u5c5e\u4e0d\u7d14\u7269\u30a2\u30c3\u30bb\u30a4\uff08ICP-MS\u306b\u3088\u308b\u30b9\u30dd\u30c3\u30c8\u30c1\u30a7\u30c3\u30af\uff09\u3001\u30ea\u30d5\u30a1\u30ec\u30f3\u30b9\u30fb\u30a6\u30a7\u30fc\u30cf\u306eMRR\u30c6\u30b9\u30c8\u3092\u542b\u3080\u53d7\u5165\u691c\u67fb\u4ed5\u69d8\u3092\u3001\u53d7\u5165\u30b9\u30e9\u30ea\u30fc\u304a\u3088\u3073\u30d1\u30c3\u30c9\u30fb\u30ed\u30c3\u30c8\u3054\u3068\u306b\u78ba\u7acb\u3059\u308b\u3002\u4ed5\u69d8\u304b\u3089\u5916\u308c\u305f\u30ed\u30c3\u30c8\u306f\u3001\u30c4\u30fc\u30eb\u306b\u5230\u9054\u3059\u308b\u524d\u306b\u4e0d\u5408\u683c\u3068\u3059\u308b\u3002.<\/li>\n    <li><strong>\u30dd\u30a4\u30f3\u30c8\u30fb\u30aa\u30d6\u30fb\u30e6\u30fc\u30b9\u6ffe\u904e\uff1a<\/strong> \u3059\u3079\u3066\u306e\u30b9\u30e9\u30ea\u30fc\u4f9b\u7d66\u30e9\u30a4\u30f3\u306b0.1\uff5e0.2 \u00b5m\u306e\u7d76\u5bfe\u5b9a\u683c\u30a4\u30f3\u30e9\u30a4\u30f3\u30d5\u30a3\u30eb\u30bf\u30fc\u3092\u4f7f\u7528\u7b87\u6240\u306b\u8a2d\u7f6e\u3059\u308b\u3002\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u4e0a\u6d41\u3068\u4e0b\u6d41\u3067\u7c92\u5b50\u6570\u3092\u6e2c\u5b9a\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u6027\u80fd\u3092\u6bce\u6708\u691c\u8a3c\u3059\u308b\u3053\u3068\u3002.<\/li>\n    <li><strong>\u30b9\u30e9\u30ea\u30fc\u30e9\u30a4\u30f3\u306e\u7ba1\u7406\uff1a<\/strong> \u5b9a\u671f\u7684\u306a\u7d14\u6c34\u306b\u3088\u308b\u5b8c\u5168\u6d17\u6d44\u3001\u30d0\u30a4\u30aa\u30d5\u30a3\u30eb\u30e0\u3001\u4e7e\u71e5\u3057\u305f\u30b9\u30e9\u30ea\u30fc\u306e\u5806\u7a4d\u7269\u3001\u5fae\u5c0f\u4e80\u88c2\u306e\u5f62\u6210\u306a\u3069\u3001\u5fae\u7c92\u5b50\u3092\u6d41\u308c\u306b\u6392\u51fa\u3059\u308b\u53ef\u80fd\u6027\u306e\u3042\u308b\u30b9\u30e9\u30ea\u30fc\u4f9b\u7d66\u30e9\u30a4\u30f3\u306e\u4e88\u9632\u7684\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u30b9\u30b1\u30b8\u30e5\u30fc\u30eb\u3092\u78ba\u7acb\u3059\u308b\u3002.<\/li>\n    <li><strong>\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306e\u30e9\u30a4\u30d5\u30b5\u30a4\u30af\u30eb\u7ba1\u7406\uff1a<\/strong> \u30c7\u30a3\u30b9\u30af1\u679a\u3042\u305f\u308a\u306e\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6642\u9593\u3092\u8a18\u9332\u3059\u308b\uff1b\u6700\u5927\u8a8d\u5b9a\u5bff\u547d\u306e80%\u3067\u4e8b\u524d\u4ea4\u63db\u3092\u5b9f\u65bd\u3059\u308b\uff1b\u53d6\u308a\u4ed8\u3051\u524d\u306b10\u500d\u306e\u30eb\u30fc\u30da\u3067\u30c7\u30a3\u30b9\u30af\u8868\u9762\u3092\u691c\u67fb\u3057\u3001\u65e2\u5b58\u306e\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u640d\u5931\u30be\u30fc\u30f3\u3092\u691c\u51fa\u3059\u308b\u3002.<\/li>\n    <li><strong>\u91cd\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u51fa\u529b\u306eSPC\uff1a<\/strong> MRR\u3001WIWNU\u3001CMP\u5f8c\u306e\u6b20\u9665\u6570\u306b\u3064\u3044\u3066\u3001\u8b66\u544a\u3068\u5236\u5fa1\u9650\u754c\u3092\u5b9a\u7fa9\u3057\u305f\u7d71\u8a08\u7684\u5de5\u7a0b\u7ba1\u7406\u3092\u5b9f\u65bd\u3002\u5236\u5fa1\u4e0d\u80fd\u72b6\u614b\u306e\u81ea\u52d5\u30a2\u30e9\u30fc\u30e0\u306b\u3088\u308a\u3001\u6b69\u7559\u307e\u308a\u3078\u306e\u91cd\u5927\u306a\u5f71\u97ff\u304c\u84c4\u7a4d\u3059\u308b\u524d\u306b\u8fc5\u901f\u306a\u5bfe\u5fdc\u304c\u53ef\u80fd\u3002.<\/li>\n    <li><strong>CMP\u5f8c\u306e\u30af\u30ea\u30fc\u30f3\u306a\u6700\u9069\u5316\uff1a<\/strong> \u30b9\u30e9\u30ea\u30fc\u914d\u5408\u304c\u5909\u66f4\u3055\u308c\u305f\u308a\u3001\u65b0\u3057\u3044\u88c5\u7f6e\u30ec\u30d9\u30eb\u304c\u5c0e\u5165\u3055\u308c\u305f\u308a\u3059\u308b\u305f\u3073\u306b\u3001CMP\u5f8c\u306e\u6d17\u6d44\u52b9\u679c\u3092\u518d\u8a55\u4fa1\u3059\u308b\u3002\u6d17\u6d44\u306e\u6709\u52b9\u6027\u306f\u3001\u91d1\u5c5e\u306b\u3064\u3044\u3066\u306fVPD-ICPMS\u3067\u3001\u307e\u305f\u6d17\u6d44\u5f8c\u306e\u691c\u67fb\u5de5\u7a0b\u3067\u306f\u7c92\u5b50\u6570\u3067\u8a55\u4fa1\u3059\u308b\u3002.<\/li>\n  <\/ul>\n  <p>JEEZ\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u304a\u3088\u3073\u30d1\u30c3\u30c9\u88fd\u54c1\u3092\u4f7f\u7528\u3059\u308b\u969b\u306e\u6b20\u9665\u524a\u6e1b\u306e\u305f\u3081\u306b\u3001\u8a73\u7d30\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30ce\u30fc\u30c8\u3068\u30d7\u30ed\u30bb\u30b9\u6700\u9069\u5316\u30ac\u30a4\u30c0\u30f3\u30b9\u3092\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059\u3002. <a href=\"https:\/\/jeez-semicon.com\/ja\/contact\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u6280\u8853\u30c1\u30fc\u30e0\u3078\u306e\u304a\u554f\u3044\u5408\u308f\u305b<\/a> \u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u56fa\u6709\u306e\u4e0d\u5177\u5408\u30c8\u30e9\u30d6\u30eb\u30b7\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u30b5\u30dd\u30fc\u30c8\u306e\u305f\u3081\u3002.<\/p>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<section id=\"faq\">\n  <h2>11.\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/h2>\n\n  <h3>\u9285CMP\u306e\u30b9\u30af\u30e9\u30c3\u30c1\u6b20\u9665\u306e\u6700\u3082\u4e00\u822c\u7684\u306a\u539f\u56e0\u306f\u4f55\u3067\u3059\u304b\uff1f<\/h3>\n  <p>\u9285\u306e CMP \u306b\u304a\u3044\u3066\u3001\u751f\u7523\u73fe\u5834\u3067\u6700\u3082\u4e00\u822c\u7684\u306a\u30b9\u30af\u30e9\u30c3\u30c1\u306e\u6839\u672c\u539f\u56e0\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3042\u308b\uff1a(2) \u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u30fb\u30c7\u30a3\u30b9\u30af\u306e\u6469\u8017\u304c\u5bff\u547d\u306b\u8fd1\u3065\u304d\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7c92\u5b50\u306e\u8131\u843d\u306e\u30ea\u30b9\u30af\u304c\u9ad8\u307e\u3063\u3066\u3044\u308b\u30020.1\u00b5m\u3067\u306ePOU\u308d\u904e\u306f\u30013\u3064\u306e\u6839\u672c\u7684\u539f\u56e0\u3059\u3079\u3066\u306b\u5bfe\u3059\u308b\u6700\u3082\u8cbb\u7528\u5bfe\u52b9\u679c\u306e\u9ad8\u3044\u552f\u4e00\u306e\u5bfe\u7b56\u3067\u3059\u3002.<\/p>\n\n  <h3>\u7814\u78e8\u30a6\u30a7\u30fc\u30cf\u4e0a\u306e\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u3068\u30a8\u30ed\u30fc\u30b8\u30e7\u30f3\u3092\u3069\u306e\u3088\u3046\u306b\u898b\u5206\u3051\u308c\u3070\u3088\u3044\u3067\u3059\u304b\uff1f<\/h3>\n  <p>\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u306f\u3001\u5e45\u306e\u5e83\u30441\u3064\u306e\u91d1\u5c5e\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u3092\u6a2a\u5207\u308b\u30d7\u30ed\u30d5\u30a3\u30ed\u30e1\u30c8\u30ea\u30fc\uff08AFM\u307e\u305f\u306f\u30b9\u30bf\u30a4\u30e9\u30b9\uff09\u306b\u3088\u3063\u3066\u6e2c\u5b9a\u3055\u308c\u3001\u91d1\u5c5e\u4e2d\u5fc3\u3068\u96a3\u63a5\u3059\u308b\u8a98\u96fb\u4f53\u8868\u9762\u3068\u306e\u9593\u306e\u9ad8\u3055\u306e\u5dee\u3092\u6e2c\u5b9a\u3057\u307e\u3059\u3002\u6d78\u98df\u306f\u3001\u30a8\u30ea\u30d7\u30bd\u30e1\u30c8\u30ea\u30fc\u307e\u305f\u306f\u8584\u819c\u6e2c\u5b9a\u3092\u4f7f\u7528\u3057\u3066\u3001\u9ad8\u5bc6\u5ea6\u306e\u91d1\u5c5e\u30a2\u30ec\u30a4\u9818\u57df\uff08\u4f8b\u3048\u3070\u300150%\u307e\u305f\u306f70%\u5bc6\u5ea6\uff09\u306e\u8a98\u96fb\u4f53\u539a\u3055\u3092\u3001\u8fd1\u304f\u306e\u5b64\u7acb\u3057\u305f\u8a98\u96fb\u4f53\u9818\u57df\u306e\u8a98\u96fb\u4f53\u539a\u3055\u3068\u6bd4\u8f03\u3059\u308b\u3053\u3068\u306b\u3088\u3063\u3066\u6e2c\u5b9a\u3055\u308c\u307e\u3059\u3002\u534a\u5f84\u65b9\u5411\u306eMRR\u4e0d\u5747\u4e00\u6027\u3068\u306e\u6df7\u540c\u3092\u907f\u3051\u308b\u305f\u3081\u3001\u4e21\u65b9\u306e\u6e2c\u5b9a\u306f\u30a6\u30a7\u30cf\u4e0a\u306e\u540c\u3058\u534a\u5f84\u3067\u884c\u3046\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n  <h3>CMP\u306b\u3088\u308b\u91d1\u5c5e\u6c5a\u67d3\u306f\u3001\u6a19\u6e96\u7684\u306a\u30a6\u30a7\u30fc\u30cf\u691c\u67fb\u30c4\u30fc\u30eb\u3067\u691c\u51fa\u3067\u304d\u307e\u3059\u304b\uff1f<\/h3>\n  <p>\u76f4\u63a5\u3067\u306f\u306a\u3044\u3002\u30c7\u30d0\u30a4\u30b9\u306e\u4fe1\u983c\u6027\u304c\u61f8\u5ff5\u3055\u308c\u308b\u30ec\u30d9\u30eb\u306e\u91d1\u5c5e\u6c5a\u67d3\uff0810\u2079\uff5e10\u00b9\u00b9 atoms\/cm\u00b2\uff09\u306f\u3001\u5149\u5b66\u691c\u67fb\u30c4\u30fc\u30eb\u3084\u96fb\u5b50\u30d3\u30fc\u30e0\u691c\u67fb\u30c4\u30fc\u30eb\u306e\u691c\u51fa\u9650\u754c\u3092\u306f\u308b\u304b\u306b\u4e0b\u56de\u308a\u307e\u3059\u3002\u6a19\u6e96\u7684\u306a\u7279\u6027\u8a55\u4fa1\u6cd5\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u5168\u4f53\u304b\u3089\u91d1\u5c5e\u30a4\u30aa\u30f3\u3092\u53ce\u96c6\u30fb\u6fc3\u7e2e\u3057\u3066\u8cea\u91cf\u5206\u6790\u3059\u308b\u6c17\u76f8\u5206\u89e3ICPMS\uff08VPD-ICPMS\uff09\u3068\u3001\u975e\u7834\u58ca\u3067\u8868\u9762\u91d1\u5c5e\u3092\u5b9a\u91cf\u5316\u3059\u308b\u5168\u53cd\u5c04\u86cd\u5149X\u7dda\uff08TXRF\uff09\u3067\u3042\u308b\u3002\u4e21\u624b\u6cd5\u306f\u3001\u91d1\u5c5e\u6c5a\u67d3\u304c\u61f8\u5ff5\u3055\u308c\u308b\u3042\u3089\u3086\u308b\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u304a\u3044\u3066\u3001CMP\u8a8d\u5b9a\u30d7\u30ed\u30c8\u30b3\u30eb\u306e\u4e00\u90e8\u3068\u306a\u308b\u3079\u304d\u3067\u3042\u308b\u3002.<\/p>\n\n  <h3>\u30a6\u30a7\u30cf\u30fc\u4e0a\u306b\u5186\u5f27\u3084\u30ea\u30f3\u30b0\u306e\u3088\u3046\u306a\u5468\u671f\u7684\u306a\u30b9\u30af\u30e9\u30c3\u30c1\u30d1\u30bf\u30fc\u30f3\u304c\u3067\u304d\u308b\u539f\u56e0\u306f\u4f55\u3067\u3059\u304b\uff1f<\/h3>\n  <p>\u5468\u671f\u7684\u306a\u5186\u5f27\u72b6\u306e\u30b9\u30af\u30e9\u30c3\u30c1\u30d1\u30bf\u30fc\u30f3\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u306b\u8d77\u56e0\u3059\u308b\u30b9\u30af\u30e9\u30c3\u30c1\u3067\u306f\u306a\u304f\u3001\u5de5\u5177\u306b\u8d77\u56e0\u3059\u308b\u30b9\u30af\u30e9\u30c3\u30c1\u30d1\u30bf\u30fc\u30f3\u306e\u5178\u578b\u7684\u306a\u7279\u5fb4\u3067\u3059\u3002\u5186\u5f27\u72b6\u306e\u30b9\u30af\u30e9\u30c3\u30c1\u30d1\u30bf\u30fc\u30f3\u306f\u3001\u4e00\u822c\u7684\u306b\u3001\u4e00\u5b9a\u306e\u534a\u5f84\u4f4d\u7f6e\u3067\u30d1\u30c3\u30c9\u8868\u9762\u306b\u5806\u7a4d\u3057\u305f\u786c\u8cea\u7c92\u5b50\u304c\u3001\u30a6\u30a7\u30fc\u30cf\u304c\u305d\u306e\u4e0a\u3092\u56de\u8ee2\u3059\u308b\u305f\u3073\u306b\u30b9\u30af\u30e9\u30c3\u30c1\u5186\u5f27\u3092\u5f62\u6210\u3059\u308b\u3053\u3068\u306b\u8d77\u56e0\u3057\u307e\u3059\u3002\u5186\u5f27\u306e\u534a\u5f84\u306f\u3001\u30d7\u30e9\u30c6\u30f3\u4e2d\u5fc3\u304b\u3089\u306e\u6c5a\u67d3\u7c92\u5b50\u306e\u534a\u5f84\u65b9\u5411\u306e\u8ddd\u96e2\u306b\u5bfe\u5fdc\u3057\u307e\u3059\u3002\u3053\u306e\u30d1\u30bf\u30fc\u30f3\u306e\u6839\u672c\u539f\u56e0\u7a76\u660e\u306e\u6700\u521d\u306e\u30b9\u30c6\u30c3\u30d7\u306f\u3001\u57cb\u3081\u8fbc\u307e\u308c\u305f\u786c\u8cea\u7c92\u5b50\u306e\u30d1\u30c3\u30c9\u8868\u9762\u306e\u76ee\u8996\u691c\u67fb\u3067\u3042\u308a\u3001\u6b21\u3044\u3067\u30c7\u30a3\u30b9\u30da\u30f3\u30b9\u30fb\u30ce\u30ba\u30eb\u3067\u306e\u4e7e\u71e5\u3057\u305f\u30b9\u30e9\u30ea\u30fc\u306e\u5806\u7a4d\u7269\u306e\u30b9\u30e9\u30ea\u30fc\u30e9\u30a4\u30f3\u691c\u67fb\u3067\u3059\u3002.<\/p>\n<\/section>\n\n<hr class=\"jz-divider\"\/>\n\n<div class=\"jz-tags\">\n  <span class=\"jz-tag\">CMP\u306e\u6b20\u9665<\/span><span class=\"jz-tag\">CMP\u30b9\u30af\u30e9\u30c3\u30c1<\/span><span class=\"jz-tag\">\u9285\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0<\/span>\n  <span class=\"jz-tag\">CMP\u4fb5\u98df<\/span><span class=\"jz-tag\">\u91d1\u5c5e\u6c5a\u67d3<\/span><span class=\"jz-tag\">CMP\u5229\u56de\u308a<\/span>\n  <span class=\"jz-tag\">\u30dd\u30b9\u30c8CMP\u30af\u30ea\u30fc\u30f3<\/span><span class=\"jz-tag\">JEEZ<\/span>\n<\/div>\n\n<div class=\"jz-cta\">\n  <h2>\u5c02\u9580\u5bb6\u306b\u3088\u308bCMP\u6b20\u9665\u30c8\u30e9\u30d6\u30eb\u30b7\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u30fb\u30b5\u30dd\u30fc\u30c8<\/h2>\n  <p>JEEZ\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30a8\u30f3\u30b8\u30cb\u30a2\u306f\u3001\u30b9\u30e9\u30ea\u30fc\u304a\u3088\u3073\u30d1\u30c3\u30c9\u88fd\u54c1\u3092\u4f7f\u7528\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001\u73fe\u5730\u8a2a\u554f\u3001\u30ea\u30d5\u30a1\u30ec\u30f3\u30b9\u30a6\u30a7\u30cf\u30c6\u30b9\u30c8\u3001\u6839\u672c\u539f\u56e0\u89e3\u6790\u306e\u6587\u66f8\u5316\u306a\u3069\u3001\u4e0d\u5177\u5408\u306e\u30c8\u30e9\u30d6\u30eb\u30b7\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u30cf\u30f3\u30ba\u30aa\u30f3\u3067\u30b5\u30dd\u30fc\u30c8\u3057\u307e\u3059\u3002.<\/p>\n  <a href=\"https:\/\/jeez-semicon.com\/ja\/contact\/\" target=\"_blank\" rel=\"noopener noreferrer\" class=\"jz-btn\">\u6b20\u9665\u30c8\u30e9\u30d6\u30eb\u30b7\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u30fb\u30b5\u30dd\u30fc\u30c8\u3092\u4f9d\u983c\u3059\u308b<\/a>\n  <a href=\"https:\/\/jeez-semicon.com\/ja\/blog\/What-Are-CMP-Materials-Complete-Guide\/\" target=\"_blank\" rel=\"noopener noreferrer\" class=\"jz-btn-sec\">\u2190 CMP\u30de\u30c6\u30ea\u30a2\u30eb\u5b8c\u5168\u30ac\u30a4\u30c9<\/a>\n<\/div>\n<\/div>","protected":false},"excerpt":{"rendered":"<p>JEEZ Technical Guide \u00b7 CMP Defects A complete engineering reference for identifying, characterizing, and eliminating the most common CMP yield-limiting defects \u2014 scratches, dishing, erosion, delamination, corrosion, particles, and metal  &#8230;<\/p>","protected":false},"author":1,"featured_media":1957,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1940","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1940","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=1940"}],"version-history":[{"count":2,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1940\/revisions"}],"predecessor-version":[{"id":1942,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/1940\/revisions\/1942"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1957"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1940"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1940"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1940"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}