{"id":722,"date":"2025-12-05T10:03:26","date_gmt":"2025-12-05T02:03:26","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=722"},"modified":"2025-12-18T10:19:52","modified_gmt":"2025-12-18T02:19:52","slug":"introduction-to-cmp-technology","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/solution\/introduction-to-cmp-technology\/","title":{"rendered":"CMP\u6280\u8853\u7d39\u4ecb"},"content":{"rendered":"<p class=\"ds-markdown-paragraph\">CMP\uff08Chemical Mechanical Polishing\uff1a\u5316\u5b66\u7684\u6a5f\u68b0\u7684\u7814\u78e8\uff09\u306f\u73fe\u5728\u3001\u8fd1\u4ee3\u7684\u306a\u5de5\u696d\u751f\u7523\u306b\u304a\u3044\u3066\u3001\u30ef\u30fc\u30af\u30d4\u30fc\u30b9\u306e\u8868\u9762\u7814\u78e8\u3084\u96c6\u7a4d\u56de\u8def\u88fd\u9020\u306b\u304a\u3051\u308b\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u30b0\u30ed\u30fc\u30d0\u30eb\u306a\u5e73\u5766\u5316\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u552f\u4e00\u306e\u6280\u8853\u3067\u3042\u308b\u3002CMP\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u5316\u5b66\u7684\u304a\u3088\u3073\u6a5f\u68b0\u7684\u4f5c\u7528\u306b\u3088\u3063\u3066\u8868\u9762\u7814\u78e8\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002\u96c6\u7a4d\u56de\u8def\u6280\u8853\u3001\u30a6\u30a7\u30fc\u30cf\u30c1\u30c3\u30d7\u306e\u5e73\u5766\u5316\u3001\u822a\u7a7a\u5b87\u5b99\u6750\u6599\u3001\u91d1\u5c5e\u5de5\u696d\u3001\u5149\u96fb\u5b50\u5de5\u696d\u306b\u304a\u3051\u308b\u6750\u6599\u306e\u93e1\u9762\u7814\u78e8\u306a\u3069\u306b\u5e83\u304f\u5fdc\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">Jizhi Electronics CMP\u7814\u78e8\u30d7\u30ed\u30bb\u30b9\u306e\u6982\u7565\u56f3<\/p>\n<p><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-723\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2.png\" alt=\"\" width=\"700\" height=\"566\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27700%27%20height%3D%27566%27%20viewBox%3D%270%200%20700%20566%27%3E%3Crect%20width%3D%27700%27%20height%3D%27566%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2-177x142.png 177w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2-200x162.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2-300x243.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2-400x323.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2-600x485.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2.png 700w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/p>\n<p class=\"ds-markdown-paragraph\">\u7814\u78e8\u3059\u308b\u6750\u6599\u306e\u7a2e\u985e\u306b\u3088\u3063\u3066\u3001CMP\u306f\u4e3b\u306b3\u3064\u306e\u30ab\u30c6\u30b4\u30ea\u30fc\u306b\u5206\u3051\u3089\u308c\u308b\uff1a<br \/>\n(1) \u57fa\u677f\uff1a\u4e3b\u306b\u30b7\u30ea\u30b3\u30f3\u6750\u6599\u3002.<br \/>\n(2) \u91d1\u5c5e\uff1aAl\/Cu\u30e1\u30bf\u30eb\u914d\u7dda\u5c64\u3001\u62e1\u6563\u30d0\u30ea\u30a2\u5c64\u3001Ta\/Ti\/TiN\/TiNxCy\u306a\u3069\u306e\u63a5\u7740\u5c64\u3092\u542b\u3080\u3002.<br \/>\n(3) \u8a98\u96fb\u4f53\uff1aSiO2\/BPSG\/PSG\u306a\u3069\u306eILD\uff08\u5c64\u9593\u7d76\u7e01\u819c\uff09\u3001Si3N4\/SiOxNy\u306a\u3069\u306e\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u5c64\u3084\u30d0\u30ea\u30a2\u5c64\u3092\u542b\u3080\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">CMP\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306b\u542b\u307e\u308c\u308b\u5316\u5b66\u85ac\u54c1\u304c\u57fa\u6750\u306e\u8868\u9762\u3092\u9178\u5316\u3055\u305b\u3001\u6bd4\u8f03\u7684\u67d4\u3089\u304b\u3044\u9178\u5316\u5c64\u3092\u5f62\u6210\u3057\u307e\u3059\u3002\u3053\u306e\u9178\u5316\u819c\u306f\u3001\u6a5f\u68b0\u7684\u306a\u6469\u64e6\u306b\u3088\u3063\u3066\u9664\u53bb\u3055\u308c\u307e\u3059\u3002\u9178\u5316\u819c\u306e\u5f62\u6210\u3068\u6a5f\u68b0\u7684\u9664\u53bb\u306e\u7e70\u308a\u8fd4\u3057\u306b\u3088\u308a\u3001\u52b9\u679c\u7684\u306a\u7814\u78e8\u304c\u5b9f\u73fe\u3057\u307e\u3059\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">CMP\u6750\u6599\u306e\u4e2d\u3067\u3082\u3001\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u3068\u7814\u78e8\u30d1\u30c3\u30c9\u306f\u6700\u3082\u91cd\u8981\u306a\u6750\u6599\u3067\u3042\u308b\u3002\u305d\u306e\u4ed6\u306e\u7814\u78e8\u6750\u6599\u306b\u306f\u3001\u7814\u78e8\u30d8\u30c3\u30c9\u3001\u7814\u78e8\u30d7\u30ec\u30fc\u30c8\u3001\u691c\u67fb\u88c5\u7f6e\u3001\u6d17\u6d44\u88c5\u7f6e\u304c\u542b\u307e\u308c\u308b\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u7814\u78e8\u30b9\u30e9\u30ea\u30fc<br \/>\n\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u5316\u5b66\u6a5f\u68b0\u7814\u78e8\u306e\u54c1\u8cea\u3068\u52b9\u7387\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u91cd\u8981\u306a\u8981\u56e0\u3067\u3059\u3002\u305d\u306e\u6027\u80fd\u306f\u901a\u5e38\u3001\u6750\u6599\u9664\u53bb\u7387\uff08MRR\uff09\u3068\u8868\u9762\u7c97\u3055\uff08Ra\uff09\u3092\u6e2c\u5b9a\u3059\u308b\u3053\u3068\u3067\u8a55\u4fa1\u3055\u308c\u307e\u3059\u3002\u7d44\u6210\u7269\u306b\u306f\u4e00\u822c\u306b\u7814\u78e8\u5264\u3001\u9178\u5316\u5264\u3001\u305d\u306e\u4ed6\u306e\u6dfb\u52a0\u5264\u304c\u542b\u307e\u308c\u307e\u3059\u3002\u914d\u5408\u306f\u3001\u7814\u78e8\u3055\u308c\u308b\u6750\u6599\u306e\u7269\u7406\u5316\u5b66\u7684\u7279\u6027\u3068\u7814\u78e8\u6027\u80fd\u306e\u8981\u4ef6\u306b\u57fa\u3065\u3044\u3066\u9078\u629e\u3055\u308c\u307e\u3059\u3002.<\/p>\n<ul>\n<li>\n<p class=\"ds-markdown-paragraph\">CeO2\uff08\u9178\u5316\u30bb\u30ea\u30a6\u30e0\uff09\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\uff1a\u8edf\u8cea\u91d1\u5c5e\u3001\u30b7\u30ea\u30b3\u30f3\u306a\u3069\u306e\u7814\u78e8\u306b\u9069\u3057\u3066\u3044\u308b\u3002\u6700\u3082\u5e83\u304f\u4f7f\u308f\u308c\u3066\u3044\u308b\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u3067\u3001\u643a\u5e2f\u96fb\u8a71\u306e\u30b9\u30af\u30ea\u30fc\u30f3\u3001\u5149\u5b66\u30ac\u30e9\u30b9\u3001\u6db2\u6676\u30c7\u30a3\u30b9\u30d7\u30ec\u30a4\u3001\u30cf\u30fc\u30c9\u30c7\u30a3\u30b9\u30af\u306a\u3069\u306e\u88fd\u54c1\u306e\u5316\u5b66\u6a5f\u68b0\u7814\u78e8\u306b\u3088\u304f\u5fdc\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\">Al2O3\uff08\u9178\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff09\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\uff1a\u9ad8\u786c\u5ea6\u3067\u4f4e\u30b3\u30b9\u30c8\u3002\u30a2\u30eb\u30df\u5408\u91d1\u3001\u30b9\u30c6\u30f3\u30ec\u30b9\u306a\u3069\u306e\u91d1\u5c5e\u6750\u6599\u3084\u30b5\u30d5\u30a1\u30a4\u30a2\u57fa\u677f\u306b\u591a\u304f\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\">SiO2\uff08\u9178\u5316\u30b1\u30a4\u7d20\uff09\u7814\u78e8\u7528\u30b9\u30e9\u30ea\u30fc\u3067\u3059\uff1a\u7c92\u5f84\u304c\u5c0f\u3055\u304f\u3001\u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u306e\u9ad8\u7d14\u5ea6\u7279\u6027\u3092\u6301\u3061\u3001\u534a\u5c0e\u4f53\u96c6\u7a4d\u56de\u8def\u3001\u30b5\u30d5\u30a1\u30a4\u30a2\u3001\u70ad\u5316\u30b1\u30a4\u7d20\u57fa\u677f\u306e\u7814\u78e8\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\">\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7814\u78e8\u7528\u30b9\u30e9\u30ea\u30fc\uff1a\u9ad8\u3044\u786c\u5ea6\u3068\u89d2\u3070\u3063\u305f\u7825\u7c92\u304c\u7279\u5fb4\u3067\u3001\u5149\u5b66\u7d50\u6676\u3001\u78c1\u6c17\u30d8\u30c3\u30c9\u3001\u30cf\u30fc\u30c9\u30c7\u30a3\u30b9\u30af\u3001\u8d85\u786c\u5408\u91d1\u3001\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306a\u3069\u306e\u786c\u3044\u6750\u6599\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<\/li>\n<\/ul>\n<p class=\"ds-markdown-paragraph\">\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306f\u52a0\u5de5\u6761\u4ef6\u306b\u3088\u3063\u3066\u3001\u7c97\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u3001\u4e2d\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u3001\u7cbe\u5bc6\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306b\u5206\u985e\u3055\u308c\u307e\u3059\u3002\u914d\u5408\u306f\u3001\u7814\u78e8\u3055\u308c\u308b\u6750\u6599\u306e\u7279\u6027\u306b\u57fa\u3065\u3044\u3066\u8abf\u6574\u3055\u308c\u3001\u6539\u5584\u3055\u308c\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u30d1\u30c3\u30c9<br \/>\n\u5316\u5b66\u6a5f\u68b0\u7814\u78e8\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001\u7814\u78e8\u30d1\u30c3\u30c9\u306f\u6b21\u306e\u3088\u3046\u306a\u5f79\u5272\u3092\u679c\u305f\u3059\uff1a<br \/>\n(1)\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u3092\u4fdd\u7ba1\u3057\u3001\u7814\u78e8\u30a8\u30ea\u30a2\u3078\u4f9b\u7d66\u3059\u308b\u3053\u3068\u3067\u3001\u7d99\u7d9a\u7684\u304b\u3064\u5747\u4e00\u306a\u7814\u78e8\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002.<br \/>\n(2)\u5fc5\u8981\u306a\u6a5f\u68b0\u7684\u8ca0\u8377\u3092\u53d6\u308a\u9664\u304f\u305f\u3081\u306b\u6750\u6599\u3092\u79fb\u52d5\u3055\u305b\u308b\u3002.<br \/>\n(3) \u7814\u78e8\u30a8\u30ea\u30a2\u304b\u3089\u526f\u7523\u7269\uff08\u9178\u5316\u751f\u6210\u7269\u3084\u7814\u78e8\u5c51\u306a\u3069\uff09\u3092\u9664\u53bb\u3057\u307e\u3059\u3002.<br \/>\n(4) \u3042\u308b\u539a\u3055\u306e\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u5c64\u3092\u5f62\u6210\u3057\u3001\u7814\u78e8\u4e2d\u306e\u5316\u5b66\u53cd\u5fdc\u3068\u6a5f\u68b0\u7684\u9664\u53bb\u306e\u5834\u3092\u63d0\u4f9b\u3059\u308b\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u7814\u78e8\u30d1\u30c3\u30c9\u306f\u6750\u8cea\u306b\u3088\u3063\u3066\u30cf\u30fc\u30c9\u30bf\u30a4\u30d7\u3068\u30bd\u30d5\u30c8\u30bf\u30a4\u30d7\u306b\u5206\u985e\u3055\u308c\u308b\u3002\u786c\u3044\u7422\u78e8\u30d1\u30c3\u30c9\u306f\u5de5\u4f5c\u7269\u8868\u9762\u306e\u5e73\u5766\u6027\u3092\u78ba\u4fdd\u3057\u3084\u3059\u304f\u3001\u67d4\u3089\u304b\u3044\u7422\u78e8\u30d1\u30c3\u30c9\u306f\u640d\u50b7\u5c64\u304c\u8584\u304f\u3001\u8868\u9762\u7c97\u3055\u306e\u5c0f\u3055\u3044\u7422\u78e8\u9762\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u4e00\u822c\u7684\u306a\u786c\u8cea\u7814\u78e8\u30d1\u30c3\u30c9\u306b\u306f\u3001\u7c97\u5e03\u30d1\u30c3\u30c9\u3001\u7e4a\u7dad\u5e03\u30d1\u30c3\u30c9\u3001\u30dd\u30ea\u30a8\u30c1\u30ec\u30f3\u30d1\u30c3\u30c9\u306a\u3069\u304c\u3042\u308b\u3002\u8edf\u8cea\u7422\u78e8\u30d1\u30c3\u30c9\u306b\u306f\u3001\u30dd\u30ea\u30a6\u30ec\u30bf\u30f3\u30d1\u30c3\u30c9\u3001\u8907\u5408\u7422\u78e8\u30d1\u30c3\u30c9\u3001\u30d5\u30ea\u30fc\u30b9\u5e03\u30d1\u30c3\u30c9\u306a\u3069\u304c\u3042\u308b\u3002\u5fae\u7d30\u306a\u4ed5\u4e0a\u3052\u9762\u306b\u306f\u3001\u30c0\u30f3\u30d4\u30f3\u30b0\u30af\u30ed\u30b9\u7422\u78e8\u30d1\u30c3\u30c9\u306e\u3088\u3046\u306a\u5fae\u7d30\u7422\u78e8\u30d1\u30c3\u30c9\u304c\u3088\u304f\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u73fe\u5728\u3001\u4e2d\u56fd\u306e\u4e2d\u30fb\u4f4e\u4fa1\u683c\u5e2fCMP\u5206\u91ce\u3067\u306f\u3001\u56fd\u7b56\u306e\u5f8c\u62bc\u3057\u3082\u3042\u308a\u3001\u6d77\u5916\u306e\u6280\u8853\u3084\u88fd\u54c1\u306b\u4ee3\u308f\u308b\u56fd\u7523\u54c1\u304c\u307b\u307c\u5b9f\u73fe\u3055\u308c\u3066\u3044\u308b\u3002\u3057\u304b\u3057\u3001\u30cf\u30a4\u30a8\u30f3\u30c9\u306e\u88c5\u7f6e\u3084\u6700\u5148\u7aef\u6280\u8853\u306b\u304a\u3044\u3066\u306f\u3001\u56fd\u969b\u7684\u306a\u5927\u4f01\u696d\u3068\u6bd4\u8f03\u3057\u3066\u5927\u304d\u306a\u9694\u305f\u308a\u304c\u6b8b\u3063\u3066\u3044\u308b\u3002CMP\u6280\u8853\u306b\u95a2\u3059\u308b\u7dbf\u5bc6\u306a\u7814\u7a76\u3092\u7d99\u7d9a\u3057\u3001\u72ec\u7acb\u3057\u305f\u77e5\u7684\u8ca1\u7523\u6a29\u3092\u6301\u3064\u4e3b\u8981\u6750\u6599\u3001\u88c5\u7f6e\u3001\u30d7\u30ed\u30bb\u30b9\u3092\u751f\u7523\u3057\u3001\u30cf\u30a4\u30a8\u30f3\u30c9CMP\u7814\u78e8\u6750\u6599\u306e\u72ec\u7acb\u3057\u305f\u6280\u8853\u3068\u7279\u8a31\u3092\u7372\u5f97\u3057\u3001\u5916\u56fd\u88fd\u7814\u78e8\u6d88\u8017\u54c1\u306e\u8cfc\u5165\u306b\u3088\u308b\u30b3\u30b9\u30c8\u30d7\u30ec\u30c3\u30b7\u30e3\u30fc\u3092\u8efd\u6e1b\u3059\u308b\u3053\u3068\u304c\u3001\u7814\u78e8\u696d\u754c\u306e\u3059\u3079\u3066\u306e\u5b9f\u52d9\u8005\u306e\u52aa\u529b\u3068\u767a\u5c55\u306e\u65b9\u5411\u6027\u3067\u3042\u308b\u3002.<\/p>\n<p><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-724\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1.png\" alt=\"\" width=\"720\" height=\"548\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27720%27%20height%3D%27548%27%20viewBox%3D%270%200%20720%20548%27%3E%3Crect%20width%3D%27720%27%20height%3D%27548%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1-200x152.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1-300x228.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1-400x304.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1-600x457.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1.png 720w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 720px) 100vw, 720px\" \/><\/p>\n<p class=\"ds-markdown-paragraph\">Jizhi Electronics\u306eR&amp;D\u30c1\u30fc\u30e0-15\u5e74\u306e\u7d4c\u9a13\u8c4a\u5bcc\u306aCMP\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u51e6\u65b9\u30a8\u30f3\u30b8\u30cb\u30a2\u3001\u7814\u78e8\u306e\u8ab2\u984c\u3092\u514b\u670d\u3059\u308b\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059\uff01<\/p>\n<p><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-725\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2.png\" alt=\"\" width=\"720\" height=\"608\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27720%27%20height%3D%27608%27%20viewBox%3D%270%200%20720%20608%27%3E%3Crect%20width%3D%27720%27%20height%3D%27608%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2-200x169.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2-300x253.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2-400x338.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2-600x507.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2.png 720w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 720px) 100vw, 720px\" \/><\/p>","protected":false},"excerpt":{"rendered":"<p>CMP (Chemical Mechanical Polishing) is currently the only technology used in modern industrial manufacturing for surface polishing of workpieces and global planarization of wafer surfaces in integrated circuit manufacturing. The  &#8230;<\/p>","protected":false},"author":1,"featured_media":987,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[7],"tags":[],"class_list":["post-722","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-solution"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/722","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=722"}],"version-history":[{"count":1,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/722\/revisions"}],"predecessor-version":[{"id":726,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/722\/revisions\/726"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/987"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=722"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=722"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=722"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}