{"id":739,"date":"2025-12-05T10:29:53","date_gmt":"2025-12-05T02:29:53","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=739"},"modified":"2025-12-05T10:29:53","modified_gmt":"2025-12-05T02:29:53","slug":"characteristics-and-selection-guide-for-cmp-wafer-polishing-slurry","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/ja\/blog\/characteristics-and-selection-guide-for-cmp-wafer-polishing-slurry\/","title":{"rendered":"CMP\u30a6\u30a7\u30fc\u30cf\u7814\u78e8\u7528\u30b9\u30e9\u30ea\u30fc\u306e\u7279\u6027\u3068\u9078\u629e\u30ac\u30a4\u30c9"},"content":{"rendered":"

\u30a6\u30a7\u30fc\u30cf\u88fd\u9020\u306e\u30b0\u30ed\u30fc\u30d0\u30eb\u306a\u5e73\u5766\u5316\u6bb5\u968e\u306b\u304a\u3044\u3066\u3001\u5316\u5b66\u7684\u6a5f\u68b0\u7814\u78e8\uff08CMP\uff09\u306f\u91cd\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u3067\u3059\u3002\u4e2d\u6838\u6d88\u8017\u54c1\u3067\u3042\u308bCMP\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u5e73\u5766\u5ea6\u3084\u6b20\u9665\u7387\u3068\u3044\u3063\u305f\u30a6\u30a7\u30cf\u30fc\u8868\u9762\u306e\u4e3b\u8981\u6307\u6a19\u3092\u76f4\u63a5\u6c7a\u5b9a\u3057\u3001\u6700\u7d42\u7684\u306a\u30c1\u30c3\u30d7\u6027\u80fd\u3068\u6b69\u7559\u307e\u308a\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u307e\u3059\u3002CMP \u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306e\u6838\u5fc3\u7684\u306a\u5229\u70b9\u3068\u9078\u629e\u57fa\u6e96\u306b\u57fa\u3065\u304d\u3001Jizhi Electronics \u306f\u534a\u5c0e\u4f53\u88fd\u9020\u4f01\u696d\u306b\u5b9f\u7528\u7684\u306a\u53c2\u8003\u8cc7\u6599\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002.<\/p>\n

\"\"<\/p>\n

I.CMP\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306e4\u3064\u306e\u30b3\u30a2\u7279\u6027<\/strong><\/p>\n

CMP\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u7814\u78e8\u5264\u3001\u9178\u5316\u5264\u3001\u30ad\u30ec\u30fc\u30c8\u5264\u306a\u3069\u306e\u6210\u5206\u304b\u3089\u8abf\u5408\u3055\u308c\u3001\u201c\u5316\u5b66\u7684\u8150\u98df \u201d\u3068 \u201c\u6a5f\u68b0\u7684\u7814\u78e8 \u201d\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u5fc5\u8981\u3068\u3059\u308b\u3002\u305d\u306e\u6838\u3068\u306a\u308b\u7279\u5fb4\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306b\u307e\u3068\u3081\u3089\u308c\u308b\uff1a<\/p>\n

    \n
  1. \n

    \u7cbe\u5bc6\u3067\u5236\u5fa1\u53ef\u80fd\u306a\u5316\u5b66\u3068\u6a5f\u68b0\u306e\u76f8\u4e57\u52b9\u679c<\/strong>
    \n\u7422\u78e8\u4e2d\u3001\u9178\u5316\u5264\u306f\u307e\u305a\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u6750\u6599\u3092\u9178\u5316\u3057\u3066\u9664\u53bb\u3057\u3084\u3059\u3044\u9178\u5316\u7269\u306b\u3057\u307e\u3059\u3002\u305d\u306e\u5f8c\u3001\u30ad\u30ec\u30fc\u30c8\u5264\u304c\u3053\u308c\u3089\u306e\u9178\u5316\u7269\u3068\u53ef\u6eb6\u6027\u306e\u932f\u4f53\u3092\u5f62\u6210\u3057\u3001\u305d\u306e\u5f8c\u3001\u7814\u78e8\u306b\u3088\u3063\u3066\u5265\u96e2\u3055\u308c\u307e\u3059\u3002\u9ad8\u54c1\u8cea\u306e\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u300c\u8150\u98df\u901f\u5ea6\u2252\u7814\u78e8\u901f\u5ea6\u300d\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u9054\u6210\u3057\u3001\u8868\u9762\u306e\u304f\u307c\u307f\u3084\u9664\u53bb\u52b9\u7387\u306e\u4f4e\u4e0b\u3068\u3044\u3063\u305f\u554f\u984c\u3092\u56de\u907f\u3057\u307e\u3059\u3002.<\/p>\n<\/li>\n

  2. \n

    \u4f4e\u6b20\u9665\uff0b\u9ad8\u8868\u9762\u54c1\u8cea<\/strong><\/p>\n

      \n
    • \n

      \u5148\u9032\u7684\u306a\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\u3067\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u6b20\u9665\uff08\u30b9\u30af\u30e9\u30c3\u30c1\u3001\u6b8b\u6e23\u306a\u3069\uff09\u306b\u5bfe\u3059\u308b\u8981\u6c42\u304c\u975e\u5e38\u306b\u9ad8\u304f\u306a\u308a\u307e\u3059\u3002\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u8edf\u8cea\u7814\u78e8\u5264\uff08\u6709\u6a5f\u30b7\u30ea\u30ab\u30be\u30eb\u306a\u3069\uff09\u3092\u63a1\u7528\u3057\u3001\u754c\u9762\u6d3b\u6027\u5264\u51e6\u65b9\u3092\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u6a5f\u68b0\u7684\u640d\u50b7\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u3001\u6b8b\u7559\u7269\u306e\u6d17\u6d44\u6027\u3092\u5411\u4e0a\u3055\u305b\u3001\u8868\u9762\u7c97\u3055\u304c\u4ed5\u69d8\u306b\u9069\u5408\u3059\u308b\u3088\u3046\u306b\u3057\u307e\u3059\uff08\u5fae\u7d30\u7814\u78e8\u6bb5\u968e\u3067Ra\u306f<0.1nm\u306b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\uff09\u3002.<\/p>\n<\/li>\n<\/ul>\n<\/li>\n

    • \n

      \u9664\u53bb\u7387\u3068\u9078\u629e\u6027\u306e\u67d4\u8edf\u306a\u8abf\u6574<\/strong>
      \n\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u306e\u7814\u78e8\u306b\u306f\u9ad8\u3044\u9664\u53bb\u7387\uff08\u30a6\u30a7\u30fc\u30cf\u306e\u53cd\u308a\u3092\u7d20\u65e9\u304f\u9664\u53bb\u3059\u308b\u305f\u3081\uff09\u304c\u8981\u6c42\u3055\u308c\u3001\u91d1\u5c5e\uff0f\u8a98\u96fb\u4f53\u5c64\u306e\u7814\u78e8\u306b\u306f\u9ad8\u3044\u9078\u629e\u6027\uff08\u4f8b\u3048\u3070\u3001\u300c\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0\u300d\u3092\u907f\u3051\u308b\u305f\u3081\u306bCu\/SiO2\u9078\u629e\u6027\u304c10:1\u4ee5\u4e0a\uff09\u304c\u8981\u6c42\u3055\u308c\u307e\u3059\u3002\u9178\u5316\u5264\u6fc3\u5ea6\u3068pH\u5024\u3092\u8abf\u6574\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30b9\u30e9\u30ea\u30fc\u3092\u3055\u307e\u3056\u307e\u306a\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u306b\u6b63\u78ba\u306b\u9069\u5408\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n<\/li>\n

    • \n

      \u5b89\u5b9a\u3057\u305f\u4e92\u63db\u6027\u3068\u4fdd\u8a3c<\/strong>
      \n\u3053\u306e\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u91cd\u91d1\u5c5e\u3084\u63ee\u767a\u6027\u6709\u6a5f\u5316\u5408\u7269\u3092\u542b\u307e\u305a\u3001\u523a\u6fc0\u6027\u304c\u4f4e\u3044\u305f\u3081\u3001\u534a\u5c0e\u4f53\u696d\u754c\u306e\u74b0\u5883\u8981\u4ef6\u3092\u6e80\u305f\u3057\u3066\u3044\u307e\u3059\u3002\u307e\u305f\u3001\u512a\u308c\u305f\u30d0\u30c3\u30c1\u9593\u5b89\u5b9a\u6027\uff08\u30d0\u30c3\u30c1\u9593\u306e\u9664\u53bb\u7387\u504f\u5dee\uff1c5%\uff09\u3092\u6709\u3057\u3001\u6d88\u8017\u54c1\u306e\u3070\u3089\u3064\u304d\u306b\u3088\u308b\u91cf\u7523\u6642\u306e\u6b69\u7559\u307e\u308a\u5909\u52d5\u3092\u9632\u304e\u307e\u3059\u3002.<\/p>\n<\/li>\n<\/ol>\n

      II.\u30d7\u30ed\u30bb\u30b9\u6bb5\u968e\u306b\u3088\u308b\u9069\u5207\u306a\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e<\/strong><\/p>\n

      \u30a6\u30a7\u30cf\u30fc\u306e\u52a0\u5de5\u6bb5\u968e\u304c\u7570\u306a\u308b\u3068\u3001\u7422\u78e8\u30b9\u30e9\u30ea\u30fc\u306b\u6c42\u3081\u3089\u308c\u308b\u8981\u4ef6\u3082\u5927\u304d\u304f\u7570\u306a\u308a\u307e\u3059\u3002\u7684\u3092\u7d5e\u3063\u305f\u9078\u629e\u304c\u9375\u3068\u306a\u308a\u307e\u3059\uff1a<\/p>\n

        \n
      1. \n

        \u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u7814\u78e8\uff08\u7c97\u7814\u78e8\uff0b\u7cbe\u5bc6\u7814\u78e8\uff09<\/strong><\/p>\n

          \n
        • \n

          \u5fc5\u8981\u6761\u4ef6<\/strong>\u00a0\u7c97\u7814\u78e8\u3067\u306f\u9ad8\u3044\u9664\u53bb\u7387\u3001\u7cbe\u7814\u78e8\u3067\u306f\u4f4e\u7c97\u5ea6\u3001\u30ce\u30fc\u30c0\u30e1\u30fc\u30b8\u3002.<\/p>\n<\/li>\n

        • \n

          \u63a8\u5968\u30bf\u30a4\u30d7\uff1a<\/strong>\u00a0\u7c97\u7814\u78e8\u7528\u30a2\u30eb\u30ab\u30eaSiO2\u7825\u7c92\u30b9\u30e9\u30ea\u30fc\u3001\u7cbe\u7814\u78e8\u7528\u8edf\u8cea\u6709\u6a5f\u30b7\u30ea\u30ab\u30be\u30eb\u30b9\u30e9\u30ea\u30fc\u3002.<\/p>\n<\/li>\n

        • \n

          \u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u30b7\u30ca\u30ea\u30aa\uff1a<\/strong>\u00a08\/12\u30a4\u30f3\u30c1\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u306e\u6700\u7d42\u7814\u78e8\u3092\u884c\u3044\u3001\u305d\u306e\u5f8c\u306e\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u3068\u8584\u819c\u84b8\u7740\u306e\u57fa\u790e\u3092\u7bc9\u304f\u3002.<\/p>\n<\/li>\n

        • \"\"<\/li>\n<\/ul>\n<\/li>\n
        • \n

          \u8a98\u96fb\u4f53\u5c64\u7814\u78e8\uff08SiO2\/Si3N4\uff09<\/strong><\/p>\n

            \n
          • \n

            \u5fc5\u8981\u6761\u4ef6<\/strong>\u00a0\u9ad8\u3044\u9664\u53bb\u7387\u3001\u4f4e\u3044\u6b20\u9665\u3001\u91d1\u5c5e\u5c64\u306b\u5bfe\u3059\u308b\u9ad8\u3044\u9078\u629e\u6027\u3002.<\/p>\n<\/li>\n

          • \n

            \u63a8\u5968\u30bf\u30a4\u30d7\uff1a<\/strong>\u00a0\u30a2\u30eb\u30ab\u30ea\u6027\u30b3\u30ed\u30a4\u30c9SiO2\u7422\u78e8\u30b9\u30e9\u30ea\u30fc\u3002\u4f4e\u8a98\u96fb\u7387\u7422\u78e8\u306b\u306f\u3001\u4f4e\u786c\u5ea6\u306e\u7825\u7c92\u3068\u5f31\u30a2\u30eb\u30ab\u30ea\u6027\u7cfb\u306e\u30b9\u30e9\u30ea\u30fc\u3092\u9078\u629e\u3059\u308b\u3002.<\/p>\n<\/li>\n

          • \n

            \u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u30b7\u30ca\u30ea\u30aa\uff1a<\/strong>\u00a0\u30b7\u30e3\u30ed\u30fc\u30c8\u30ec\u30f3\u30c1\u30fb\u30a2\u30a4\u30bd\u30ec\u30fc\u30b7\u30e7\u30f3\uff08STI\uff09\u3068\u5c64\u9593\u7d76\u7e01\u819c\uff08ILD\uff09\u306e\u5e73\u5766\u5316\u3002.<\/p>\n<\/li>\n<\/ul>\n<\/li>\n

          • \n

            \u91d1\u5c5e\u5c64\u7814\u78e8(Cu\/W)<\/strong><\/p>\n

              \n
            • \n

              \u5fc5\u8981\u6761\u4ef6<\/strong>\u00a0\u9ad8\u91d1\u5c5e\u9664\u53bb\u7387\u3001\u9ad8\u9078\u629e\u6027\u3001\u4f4e\u6b8b\u6e23\u3002.<\/p>\n<\/li>\n

            • \n

              \u63a8\u5968\u30bf\u30a4\u30d7\uff1a<\/strong>\u00a0Cu\u7814\u78e8\u7528\u9178\u6027SiO2\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\uff1bW\u7814\u78e8\u7528\u9178\u6027Al2O3\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u3002.<\/p>\n<\/li>\n

            • \n

              \u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u30b7\u30ca\u30ea\u30aa\uff1a<\/strong>\u00a0\u91d1\u5c5e\u76f8\u4e92\u63a5\u7d9a\u30e9\u30a4\u30f3\u3001\u30b3\u30f3\u30bf\u30af\u30c8\u30db\u30fc\u30eb\/\u30d3\u30a2\u306e\u7814\u78e8\u3002.<\/p>\n<\/li>\n<\/ul>\n<\/li>\n

            • \n

              \u5148\u7aef\u30ce\u30fc\u30c9\u7528\u7279\u6b8a\u7814\u78e8\uff087nm\u4ee5\u4e0b\uff09<\/strong><\/p>\n

                \n
              • \n

                \u5fc5\u8981\u6761\u4ef6<\/strong>\u00a0\u8d85\u4f4e\u6b20\u9665\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u5e73\u5766\u6027\u3001\u6975\u8584\u819c\u3068\u306e\u4e92\u63db\u6027\u3002.<\/p>\n<\/li>\n

              • \n

                \u63a8\u5968\u30bf\u30a4\u30d7\uff1a<\/strong>\u00a0\u539f\u5b50\u5c64\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u3001\u7814\u78e8\u5264\u30d5\u30ea\u30fc\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u3002.<\/p>\n<\/li>\n

              • \n

                \u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u30b7\u30ca\u30ea\u30aa\uff1a<\/strong>\u00a0\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u30c1\u30c3\u30d7\u30843D NAND\u30e1\u30e2\u30ea\u30c1\u30c3\u30d7\u306e\u91cd\u8981\u306a\u5c64\u3092\u7814\u78e8\u3059\u308b\u3002.<\/p>\n<\/li>\n

              • \"\"<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n

                III.\u30a6\u30a7\u30fc\u30cf\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u9078\u629e\u306e3\u3064\u306e\u30d2\u30f3\u30c8<\/strong><\/p>\n

                  \n
                1. \n

                  \u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\u3068\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u3092\u5408\u308f\u305b\u308b\uff1a<\/strong>\u00a0\u5148\u7aef\u30ce\u30fc\u30c9\uff08\u4f8b\u3048\u30705nm\uff09\u306e\u5834\u5408\u306f\u3001\u9ad8\u7d14\u5ea6\u3067\u7c92\u5b50\u5f84\u306e\u7d30\u304b\u3044\u30b9\u30e9\u30ea\u30fc\u3092\u9078\u629e\u3059\u308b\u300212\u30a4\u30f3\u30c1\u30a6\u30a7\u30fc\u30cf\u306e\u5834\u5408\u3001\u30a8\u30c3\u30b8\u52b9\u679c\u3092\u907f\u3051\u308b\u305f\u3081\u3001\u5747\u4e00\u306a\u30ab\u30d0\u30ec\u30c3\u30b8\u306b\u6ce8\u610f\u3059\u308b\u3002.<\/p>\n<\/li>\n

                2. \n

                  \u30b3\u30b9\u30c8\u3068\u30b5\u30d7\u30e9\u30a4\u30c1\u30a7\u30fc\u30f3\u306e\u30d0\u30e9\u30f3\u30b9<\/strong>\u00a0\u5927\u91cf\u751f\u7523\u306e\u5834\u5408\u3001\u7c97\u7814\u78e8\u7528\u306e\u30b3\u30b9\u30c8\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u306e\u9ad8\u3044\u56fd\u7523\u30b9\u30e9\u30ea\u30fc\u3068\u3001\u7cbe\u7814\u78e8\u7528\u306e\u8f38\u5165\u307e\u305f\u306f\u56fd\u7523\u9ad8\u7d1aCMP\u30b9\u30e9\u30ea\u30fc\u3092\u67d4\u8edf\u306b\u7d44\u307f\u5408\u308f\u305b\u308b\uff08\u73fe\u5728\u306e\u7cbe\u7814\u78e8\u7528\u30b9\u30e9\u30ea\u30fc\u306e\u56fd\u7523\u4ee3\u66ff\u54c1\u306f\u3001\u56fd\u969b\u30d6\u30e9\u30f3\u30c9\u3068\u540c\u7b49\u306e\u6027\u80fd\u3092\u6301\u3063\u3066\u3044\u308b\uff09\u3002\u307e\u305f\u3001\u5b89\u5b9a\u3057\u305f\u4f9b\u7d66\u80fd\u529b\u3092\u78ba\u4fdd\u3059\u308b\u3002.<\/p>\n<\/li>\n

                3. \n

                  \u7279\u6b8a\u5de5\u7a0b\u306e\u305f\u3081\u306e\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\uff1a<\/strong>\u00a0SiC\/GaN\u306e\u3088\u3046\u306a\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u3092\u7814\u78e8\u3059\u308b\u5834\u5408\u306f\u3001\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3068\u5354\u529b\u3057\u3066\u30ab\u30b9\u30bf\u30e0\u51e6\u65b9\uff08\u4f8b\u3048\u3070\u3001SiC\u7814\u78e8\u7528\u306e\u9ad8\u786c\u5ea6\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7825\u7c92\u30b9\u30e9\u30ea\u30fc\uff09\u3092\u884c\u3046\u3002.<\/p>\n<\/li>\n<\/ol>\n

                  \u534a\u5c0e\u4f53\u5206\u91ce\u306b\u7279\u5316\u3057\u305f\u4f01\u696d\u3068\u3057\u3066\u3001\u65e5\u829d\u96fb\u5b50\u306fCMP\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u304c\u30a6\u30a7\u30cf\u30fc\u88fd\u9020\u306e\u6b69\u7559\u307e\u308a\u306b\u4e0e\u3048\u308b\u91cd\u8981\u306a\u5f71\u97ff\u3092\u6df1\u304f\u7406\u89e3\u3057\u3066\u3044\u307e\u3059\u3002\u696d\u754c\u30d7\u30ed\u30bb\u30b9\u306b\u5bfe\u3059\u308b\u6df1\u3044\u6d1e\u5bdf\u529b\u3092\u751f\u304b\u3057\u3001\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306e\u9078\u629e\u30b3\u30f3\u30b5\u30eb\u30c6\u30a3\u30f3\u30b0\u3084\u30d7\u30ed\u30bb\u30b9\u9069\u5fdc\u30c6\u30b9\u30c8\u306a\u3069\u306e\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3055\u308c\u305f\u30b5\u30fc\u30d3\u30b9\u3092\u304a\u5ba2\u69d8\u306b\u63d0\u4f9b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u534a\u5c0e\u4f53\u4f01\u696d\u306e\u30cb\u30fc\u30ba\u306b\u7684\u78ba\u306b\u5bfe\u5fdc\u3057\u3001\u751f\u7523\u52b9\u7387\u3092\u6700\u9069\u5316\u3057\u3001\u5148\u7aef\u88fd\u9020\u306e\u9053\u3092\u7740\u5b9f\u306b\u6b69\u3080\u304a\u624b\u4f1d\u3044\u3092\u3059\u308b\u3053\u3068\u3092\u76ee\u6307\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

                  In the global planarization stage of wafer manufacturing, Chemical Mechanical Polishing (CMP) is a critical process. As a core consumable, CMP polishing slurry directly determines key wafer surface metrics such …<\/p>","protected":false},"author":1,"featured_media":740,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,58],"tags":[],"class_list":["post-739","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-dynamics"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/739","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/comments?post=739"}],"version-history":[{"count":1,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/739\/revisions"}],"predecessor-version":[{"id":743,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/posts\/739\/revisions\/743"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/740"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=739"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=739"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=739"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}