{"id":1279,"date":"2026-01-08T09:53:47","date_gmt":"2026-01-08T01:53:47","guid":{"rendered":"https:\/\/jeez-semicon.com\/?post_type=semiconductor&p=1279"},"modified":"2026-01-08T14:22:01","modified_gmt":"2026-01-08T06:22:01","slug":"oxide-slurry","status":"publish","type":"semiconductor","link":"https:\/\/jeez-semicon.com\/ja\/semiconductor\/oxide-slurry\/","title":{"rendered":"\u9178\u5316\u7269\u30b9\u30e9\u30ea\u30fc"},"content":{"rendered":"

\u9178\u5316\u7269\u7814\u78e8\u30b9\u30e9\u30ea\u30fc\u306e\u6a5f\u80fd<\/strong><\/h2>\n\n\n\n

\u9178\u5316\u7269\u6750\u6599\u306eCMP\u7814\u78e8\u306b\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3001\u7cbe\u5bc6\u306a\u8868\u9762\u5e73\u5766\u5316\u3068\u819c\u539a\u5236\u5fa1\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3001,
\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u9178\u5316\u30b7\u30ea\u30b3\u30f3\u5c64\u3084\u3001\u30c8\u30c3\u30d7\u30e1\u30bf\u30eb\u5c64\u3068\u9178\u5316\u30b7\u30ea\u30b3\u30f3\u306e\u9593\u306e\u9178\u5316\u819c\u306a\u3069\u30024\uff5e12\u30a4\u30f3\u30c1\u306e\u9178\u5316\u30b7\u30ea\u30b3\u30f3\u30b3\u30fc\u30c8\u30a6\u30a7\u30fc\u30cf\u306e\u9178\u5316\u819c\u7814\u78e8\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n

\u30aa\u30ad\u30b5\u30a4\u30c9\u30b9\u30e9\u30ea\u30fc\u306f\u3001\u7c92\u5f84\u306e\u63c3\u3063\u305f\u53b3\u9078\u3055\u308c\u305fSiO\u2082\u30b3\u30ed\u30a4\u30c0\u30eb\u30b7\u30ea\u30ab\u3092\u7814\u78e8\u5264\u3068\u3057\u3066\u4f7f\u7528\u3057\u3066\u304a\u308a\u3001\u8868\u9762\u7c97\u3055\u304c\u4f4e\u304f\u3001\u7c92\u5b50\u6b8b\u6e23\u306e\u5c11\u306a\u3044\u7814\u78e8\u7d50\u679c\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n\n\n\n

\u4f7f\u7528\u6642\u306e\u5e0c\u91c8\u7387\u3092\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u6700\u9069\u306a\u7814\u78e8\u6027\u80fd\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u56fd\u5185\u5916\u306e\u985e\u4f3c\u54c1\u306b\u6bd4\u3079\u3001\u6d17\u6d44\u304c\u5bb9\u6613\u3067\u8868\u9762\u7c97\u3055\u304c\u5c0f\u3055\u3044\u306e\u304c\u7279\u5fb4\u3067\u3059\u3002.<\/p>\n\n\n\n

\u88fd\u54c1\u306e\u7279\u5fb4<\/strong><\/h2>\n\n\n\n

\u30ca\u30ce\u30e1\u30fc\u30bf\u30fc\u30b0\u30ec\u30fc\u30c9\u306eSiO2\u7825\u7c92\u306f\u3001\u7c92\u5f84\u304c\u5747\u4e00\u3067\u5b89\u5b9a\u3057\u3001\u9664\u53bb\u7387\u304c\u5b89\u5b9a\u3057\u3001\u91d1\u5c5e\u30a4\u30aa\u30f3\u306e\u542b\u6709\u91cf\u304c\u5c11\u306a\u3044\u3002CMP\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u3001\u8868\u9762\u306e\u9178\u5316\u819c\u3092\u52b9\u679c\u7684\u306b\u9664\u53bb\u3057\u3001\u7406\u60f3\u7684\u306a\u5e73\u5766\u5ea6\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n

JIZHI Electronics Oxide Slurry\u306f\u3001\u56fd\u5185\u5916\u306e\u985e\u4f3c\u88fd\u54c1\u3068\u6bd4\u8f03\u3057\u3066\u3001\u6d17\u6d44\u304c\u5bb9\u6613\u3067\u8868\u9762\u7c97\u3055\u304c\u5c0f\u3055\u3044\u3068\u3044\u3046\u7279\u5fb4\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n\n

\n
\"\"<\/figure>\n<\/div>\n\n\n

\u9078\u629e\u6027\u306e\u6bd4\u8f03<\/strong><\/h2>\n\n\n
\n
\"\"<\/figure>\n<\/div>\n\n\n

\u9178\u5316\u7269\u30b9\u30e9\u30ea\u30fc\u7814\u78e8\u6db2\u306e\u7279\u5fb4\uff1a<\/strong><\/h2>\n\n\n\n

1.\u9ad8\u7814\u78e8\u30ec\u30fc\u30c8
2.S\u3068\u9178\u5316\u7269\u306e\u6bd4\u7387\u30921:1\u306b\u9078\u629e
3.Low \u91d1\u5c5e\u7c92\u5b50\u306e\u542b\u6709\u91cf
(\u7dcf\u91d1\u5c5e\u542b\u6709\u91cf\u306f\u8f38\u5165\u54c1\u3068\u540c\u7b49\uff09<\/p>\n\n\n\n

\n
\n\n \n \n \n \n \n \n \n \n \n \n
\u9805\u76ee<\/th>\n \u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n <\/tr>\n <\/thead>\n
\u6a5f\u68b0<\/td>\n \u83ef\u9802<\/td>\n <\/tr>\n
\u30c6\u30b9\u30c8\u30a6\u30a7\u30cf\u30fc<\/td>\n 6\u6642\u9593<\/td>\n <\/tr>\n
\u7d20\u6750<\/td>\n Si\u5145\u586bPSG<\/td>\n <\/tr>\n
Ra (nm)<\/td>\n 0.26<\/td>\n <\/tr>\n
R.R\uff08A\/\u5206\uff09<\/td>\n 5523<\/td>\n <\/tr>\n
\u30ec\u30f3\u30b8 (A)<\/td>\n 6%<\/td>\n <\/tr>\n
\u30c7\u30a3\u30c3\u30b7\u30f3\u30b0<\/td>\n -100\u304b\u3089200<\/td>\n <\/tr>\n <\/tbody>\n<\/table>\n<\/div>\n\n\n\n
\n
\"\"<\/figure>\n<\/div><\/div>\n<\/div>\n\n\n
\n
\"\"<\/figure>\n<\/div>\n\n\n

CMP\u5f8c\u306e\u8868\u9762\u7c97\u3055Ra\u306f0.3nm\u3067\u3001\u6a19\u6e96\u7bc4\u56f2\u5185\u3067\u3042\u308b\u3002.<\/strong><\/h2>\n\n\n\n

<\/p>","protected":false},"excerpt":{"rendered":"

Function of Oxide Polishing Slurry Widely used for CMP polishing of oxide materials to achieve precise surface planarization and thickness control,such as silicon oxide layers on wafer surfaces or oxide …<\/p>","protected":false},"featured_media":1294,"template":"","categories":[],"tags":[],"semicategories":[50],"class_list":["post-1279","semiconductor","type-semiconductor","status-publish","has-post-thumbnail","hentry","semicategories-polishing_slurry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/semiconductor\/1279","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/semiconductor"}],"about":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/types\/semiconductor"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media\/1294"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/media?parent=1279"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/categories?post=1279"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/tags?post=1279"},{"taxonomy":"semicategories","embeddable":true,"href":"https:\/\/jeez-semicon.com\/ja\/wp-json\/wp\/v2\/semicategories?post=1279"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}