{"id":1046,"date":"2026-01-05T15:49:13","date_gmt":"2026-01-05T07:49:13","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1046"},"modified":"2026-01-05T16:09:04","modified_gmt":"2026-01-05T08:09:04","slug":"cmp-slurry-types-explained","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-types-explained\/","title":{"rendered":"CMP \u6ce5\u6d46\u7c7b\u578b\u8bf4\u660e"},"content":{"rendered":"<p>&nbsp;<\/p>\n<p><!-- ================= TOC ================= --><\/p>\n<nav>\n<h2>\u76ee\u5f55<\/h2>\n<ul>\n<li><a href=\"#introduction\">\u7b80\u4ecb\uff1a\u4e3a\u4ec0\u4e48 CMP \u6ce5\u6d46\u7c7b\u578b\u5f88\u91cd\u8981<\/a><\/li>\n<li><a href=\"#classification-logic\">CMP \u6ce5\u6d46\u5206\u7ea7\u903b\u8f91<\/a><\/li>\n<li><a href=\"#oxide-slurry\">\u6c27\u5316\u7269 CMP \u6ce5\u6d46<\/a><\/li>\n<li><a href=\"#copper-slurry\">\u94dc CMP \u6ce5\u6d46<\/a><\/li>\n<li><a href=\"#tungsten-slurry\">\u94a8 CMP \u6ce5\u6d46<\/a><\/li>\n<li><a href=\"#barrier-slurry\">\u9694\u79bb\u5c42\u548c\u786c\u8d28\u63a9\u6a21 CMP \u6ce5\u6d46<\/a><\/li>\n<li><a href=\"#dielectric-lowk\">\u4f4e\u4ecb\u7535\u5e38\u6570\u548c\u9ad8\u7ea7\u4ecb\u7535\u6d46\u6599<\/a><\/li>\n<li><a href=\"#node-driven\">\u8282\u70b9\u9a71\u52a8\u6ce5\u6d46\u7c7b\u578b<\/a><\/li>\n<li><a href=\"#process-window\">\u6ce5\u6d46\u7c7b\u578b\u4e0e\u5de5\u827a\u7a97\u53e3<\/a><\/li>\n<li><a href=\"#selection-matrix\">\u6ce5\u6d46\u9009\u62e9\u51b3\u7b56\u77e9\u9635<\/a><\/li>\n<li><a href=\"#failure-modes\">\u7279\u5b9a\u7c7b\u578b\u7684\u6545\u969c\u6a21\u5f0f<\/a><\/li>\n<\/ul>\n<\/nav>\n<hr \/>\n<p><!-- ================= Section 1 ================= --><\/p>\n<h2 id=\"introduction\">\u7b80\u4ecb\uff1a\u4e3a\u4ec0\u4e48 CMP \u6ce5\u6d46\u7c7b\u578b\u5f88\u91cd\u8981<\/h2>\n<p>\u5728\u5546\u4e1a\u6587\u732e\u4e2d\uff0cCMP \u6ce5\u6d46\u7c7b\u578b\u5f80\u5f80\u88ab\u8fc7\u5ea6\u7b80\u5316\uff0c\u7ecf\u5e38\u88ab\u7b80\u5316\u4e3a \u201c\u6c27\u5316\u7269\u6ce5\u6d46 \u201d\u6216 \u201c\u94dc\u6ce5\u6d46 \u201d\u7b49\u6807\u7b7e\u3002\u7136\u800c\uff0c\u5728\u771f\u5b9e\u7684\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u4e2d\uff0c\u6d46\u6599\u7c7b\u578b\u7684\u9009\u62e9\u76f4\u63a5\u51b3\u5b9a\u4e86\u53bb\u9664\u673a\u5236\u3001\u7f3a\u9677\u6a21\u5f0f\u3001\u96c6\u6210\u98ce\u9669\u4ee5\u53ca\u6700\u7ec8\u7684\u6210\u54c1\u7387\u3002.<\/p>\n<p>\u968f\u7740\u6280\u672f\u8282\u70b9\u7684\u7f29\u5c0f\u548c\u8bbe\u5907\u67b6\u6784\u7684\u65e5\u76ca\u5f02\u6784\u5316\uff0c\u5355\u4e00\u7684 \u201c\u901a\u7528 \u201d\u6d46\u6599\u5df2\u65e0\u6cd5\u6ee1\u8db3\u591a\u79cd\u5de5\u827a\u8981\u6c42\u3002\u73b0\u4ee3 CMP \u4f9d\u8d56\u4e8e\u9ad8\u5ea6\u4e13\u4e1a\u5316\u7684\u6d46\u6599\u7c7b\u578b\uff0c\u6bcf\u79cd\u6d46\u6599\u90fd\u9488\u5bf9\u72ed\u7a84\u7684\u64cd\u4f5c\u7a97\u53e3\u8fdb\u884c\u4e86\u4f18\u5316\u3002.<\/p>\n<p>\u672c\u6587\u4ef6\u4ee5\u6750\u6599\u79d1\u5b66\u3001\u8868\u9762\u5316\u5b66\u548c\u5927\u6279\u91cf\u5236\u9020 (HVM) \u7ecf\u9a8c\u4e3a\u57fa\u7840\uff0c\u5bf9 CMP \u6ce5\u6d46\u7c7b\u578b\u8fdb\u884c\u4e86\u767d\u76ae\u4e66\u7ea7\u522b\u7684\u5206\u7c7b\u3002.<\/p>\n<p>\u5982\u9700\u5168\u9762\u4e86\u89e3 CMP \u6ce5\u6d46\u7684\u57fa\u672c\u539f\u7406\uff0c\u8bf7\u53c2\u9605\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-for-semiconductor-wafer-polishing\/\">\u7528\u4e8e\u534a\u5bfc\u4f53\u5236\u9020\u7684 CMP \u6ce5\u6d46<\/a><\/p>\n<p><!-- ================= Section 2 ================= --><\/p>\n<h2 id=\"classification-logic\">CMP \u6ce5\u6d46\u5206\u7ea7\u903b\u8f91<\/h2>\n<p>CMP \u6ce5\u6d46\u7c7b\u578b\u53ef\u901a\u8fc7\u591a\u4e2a\u6b63\u4ea4\u7ef4\u5ea6\u8fdb\u884c\u5206\u7c7b\u3002\u4f9d\u8d56\u5355\u4e00\u5206\u7c7b\u8f74\u5f80\u5f80\u4f1a\u5bfc\u81f4\u9519\u8bef\u7684\u6ce5\u6d46\u9009\u62e9\u3002.<\/p>\n<h3>\u4e00\u7ea7\u5206\u7c7b\u5c3a\u5bf8<\/h3>\n<ul>\n<li><strong>\u76ee\u6807\u6750\u6599<\/strong> (\u6c27\u5316\u7269\u3001\u91d1\u5c5e\u3001\u5c4f\u969c\u3001\u7535\u4ecb\u8d28\uff09<\/li>\n<li><strong>\u5316\u5b66\u673a\u5236<\/strong> (\u6c27\u5316\u9a71\u52a8\u3001\u6eb6\u89e3\u9a71\u52a8\uff09\u3002<\/li>\n<li><strong>\u7814\u78e8\u7cfb\u7edf<\/strong> (\u7845\u77f3\u3001\u6c27\u5316\u94dd\u3001\u94c8\u3001\u6742\u5316\u77f3\uff09<\/li>\n<li><strong>\u6280\u672f\u8282\u70b9<\/strong> (\u4f20\u7edf\u8282\u70b9\u4e0e\u5148\u8fdb\u8282\u70b9\uff09<\/li>\n<li><strong>\u6574\u5408\u654f\u611f\u5ea6<\/strong> (\u4f4e K \u517c\u5bb9\u6027\u3001\u8150\u8680\u98ce\u9669\uff09<\/li>\n<\/ul>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1047\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework.jpg\" alt=\"CMP slurry classification framework\" width=\"886\" height=\"418\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27886%27%20height%3D%27418%27%20viewBox%3D%270%200%20886%20418%27%3E%3Crect%20width%3D%27886%27%20height%3D%27418%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework-200x94.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework-300x142.jpg 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework-400x189.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework-600x283.jpg 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework-768x362.jpg 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework-800x377.jpg 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-classification-framework.jpg 886w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 886px) 100vw, 886px\" \/><figcaption>\u5148\u8fdb\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u4f7f\u7528\u7684 CMP \u6ce5\u6d46\u7c7b\u578b\u7684\u591a\u7ef4\u5206\u7c7b\u6846\u67b6\u3002.<\/figcaption><\/figure>\n<p><!-- ================= Section 3 ================= --><\/p>\n<h2 id=\"oxide-slurry\">\u6c27\u5316\u7269 CMP \u6ce5\u6d46<\/h2>\n<h3>\u5e94\u7528\u8303\u56f4<\/h3>\n<p>\u6c27\u5316\u7269 CMP \u6ce5\u6d46\u4e3b\u8981\u7528\u4e8e\u5c42\u95f4\u4ecb\u8d28\uff08ILD\uff09\u5e73\u9762\u5316\u3001\u6d45\u6c9f\u69fd\u9694\u79bb\uff08STI\uff09\u548c\u91d1\u5c5e\u524d\u4ecb\u8d28\u6b65\u9aa4\u3002.<\/p>\n<h3>\u5178\u578b\u7ec4\u5408\u7ed3\u6784<\/h3>\n<ul>\n<li>\u78e8\u6599\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/li>\n<li>pH \u503c\uff1a\u78b1\u6027\uff089.5-11.5\uff09<\/li>\n<li>\u6dfb\u52a0\u5242\uff1a\u7f13\u51b2\u5242\u3001\u5206\u6563\u5242\u3001\u5fae\u91cf\u6291\u5236\u5242<\/li>\n<\/ul>\n<h3>\u5de5\u7a0b\u53c2\u6570\u8868<\/h3>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u5178\u578b\u8303\u56f4<\/th>\n<th>\u5f71\u54cd<\/th>\n<\/tr>\n<tr>\n<td>\u9897\u7c92\u5927\u5c0f\uff08D50\uff09<\/td>\n<td>30-70 \u7eb3\u7c73<\/td>\n<td>\u5212\u75d5\u4e0e MRR \u4f59\u989d<\/td>\n<\/tr>\n<tr>\n<td>MRR<\/td>\n<td>200-500 \u7eb3\u7c73\/\u5206\u949f<\/td>\n<td>\u541e\u5410\u91cf<\/td>\n<\/tr>\n<tr>\n<td>WIWNU<\/td>\n<td>&lt;4%<\/td>\n<td>\u5e73\u9762\u5ea6\u63a7\u5236<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\u5de5\u827a\u7a97\u53e3\u63d2\u56fe<\/h3>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1048\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window.jpg\" alt=\"Oxide CMP slurry process window\" width=\"850\" height=\"563\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27850%27%20height%3D%27563%27%20viewBox%3D%270%200%20850%20563%27%3E%3Crect%20width%3D%27850%27%20height%3D%27563%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window-200x132.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window-300x199.jpg 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window-400x265.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window-600x397.jpg 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window-768x509.jpg 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window-800x530.jpg 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/Oxide-CMP-slurry-process-window.jpg 850w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 850px) 100vw, 850px\" \/><figcaption>\u6c27\u5316\u7269 CMP \u6ce5\u6d46\u5de5\u827a\u7a97\u53e3\u793a\u4f8b\uff0c\u663e\u793a MRR \u4e0e\u7f3a\u9677\u5bc6\u5ea6\u4e4b\u95f4\u7684\u5173\u7cfb\uff0c\u5373 pH \u503c\u7684\u51fd\u6570\u5173\u7cfb\u3002.<\/figcaption><\/figure>\n<p><!-- ================= Section 4 ================= --><\/p>\n<h2 id=\"copper-slurry\">\u94dc CMP \u6ce5\u6d46<\/h2>\n<p>\u94dc CMP \u6ce5\u6d46\u662f\u5316\u5b66\u6027\u8d28\u6700\u590d\u6742\u7684\u6ce5\u6d46\u7c7b\u578b\u4e4b\u4e00\uff0c\u56e0\u4e3a\u94dc\u5177\u6709\u5f88\u9ad8\u7684\u5316\u5b66\u53cd\u5e94\u6d3b\u6027\u548c\u6613\u8150\u8680\u6027\u3002.<\/p>\n<h3>\u4e24\u6b65\u94dc CMP \u6ce5\u6d46\u7cfb\u7edf<\/h3>\n<ul>\n<li><strong>\u6563\u88c5\u94dc\u6d46\uff1a<\/strong> \u9ad8 MRR\uff0c\u53ef\u63a7\u6c27\u5316<\/li>\n<li><strong>\u94dc\u963b\u9694\u5c42\/\u7f13\u51b2\u6ce5\u6d46\uff1a<\/strong> \u4f4e MRR\uff0c\u9ad8\u9009\u62e9\u6027<\/li>\n<\/ul>\n<h3>\u4e3b\u8981\u5316\u5b66\u6210\u5206<\/h3>\n<ul>\n<li>\u6c27\u5316\u5242\uff1aH<sub>2<\/sub>O<sub>2<\/sub> (1-5 wt%)<\/li>\n<li>\u7edc\u5408\u5242\u7518\u6c28\u9178\u3001\u67e0\u6aac\u9178<\/li>\n<li>\u6291\u5236\u5242\uff1a\u82ef\u5e76\u4e09\u5511\uff08BTA\uff09<\/li>\n<\/ul>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u516c\u5236<\/th>\n<th>\u6563\u88c5\u94dc<\/th>\n<th>Cu Buff<\/th>\n<\/tr>\n<tr>\n<td>MRR<\/td>\n<td>300-800 \u7eb3\u7c73\/\u5206\u949f<\/td>\n<td>50-150 \u7eb3\u7c73\/\u5206\u949f<\/td>\n<\/tr>\n<tr>\n<td>\u5782\u9493<\/td>\n<td>&lt;40\u7eb3\u7c73<\/td>\n<td>&lt;15 \u7eb3\u7c73<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>&nbsp;<\/p>\n<p><!-- ================= Section 5 ================= --><\/p>\n<h2 id=\"tungsten-slurry\">\u94a8 CMP \u6ce5\u6d46<\/h2>\n<p>\u94a8 CMP \u6ce5\u6d46\u4e3b\u8981\u4f9d\u9760\u5316\u5b66\u6eb6\u89e3\u673a\u5236\uff0c\u800c\u4e0d\u662f\u7eaf\u7cb9\u7684\u673a\u68b0\u78e8\u635f\u3002.<\/p>\n<ul>\n<li>pH \u503c\uff1a\u9178\u6027\uff082-4\uff09<\/li>\n<li>\u6c27\u5316\u5242\u785d\u9178\u94c1<\/li>\n<li>\u78e8\u6599\u7ec6\u7845\u77f3\u6216\u6c27\u5316\u94dd<\/li>\n<\/ul>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u8303\u56f4<\/th>\n<\/tr>\n<tr>\n<td>MRR<\/td>\n<td>150-400 \u7eb3\u7c73\/\u5206\u949f<\/td>\n<\/tr>\n<tr>\n<td>\u6c27\u5316\u7269\u9009\u62e9\u6027<\/td>\n<td>&gt;30:1<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 6 ================= --><\/p>\n<h2 id=\"barrier-slurry\">\u9694\u79bb\u5c42\u548c\u786c\u8d28\u63a9\u6a21 CMP \u6ce5\u6d46<\/h2>\n<p>\u963b\u6321\u5c42 CMP \u6d46\u6599\u7684\u76ee\u6807\u6750\u6599\u5305\u62ec Ta\u3001TaN\u3001TiN \u548c\u9ad8\u7ea7\u786c\u63a9\u819c\u3002.<\/p>\n<p>\u8fd9\u4e9b\u6ce5\u6d46\u4f18\u5148\u8003\u8651\u9009\u62e9\u6027\uff0c\u800c\u4e0d\u662f\u7edd\u5bf9\u53bb\u9664\u7387\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u6750\u6599<\/th>\n<th>\u9996\u9009\u78e8\u6599<\/th>\n<th>\u98ce\u9669<\/th>\n<\/tr>\n<tr>\n<td>Ta\/TaN<\/td>\n<td>\u6c27\u5316\u94dd<\/td>\n<td>\u5fae\u5c0f\u5212\u75d5<\/td>\n<\/tr>\n<tr>\n<td>TiN<\/td>\n<td>\u6df7\u5408\u52a8\u529b<\/td>\n<td>\u4fb5\u8680<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 7 ================= --><\/p>\n<h2 id=\"dielectric-lowk\">\u4f4e\u4ecb\u7535\u5e38\u6570\u548c\u9ad8\u7ea7\u4ecb\u7535\u6d46\u6599<\/h2>\n<p>\u7531\u4e8e\u591a\u5b54\u7535\u4ecb\u8d28\u7684\u673a\u68b0\u8106\u5f31\u6027\u548c\u5316\u5b66\u654f\u611f\u6027\uff0c\u4f4e k CMP \u6ce5\u6d46\u7c7b\u578b\u662f\u5bf9\u96c6\u6210\u6700\u654f\u611f\u7684\u914d\u65b9\u4e4b\u4e00\u3002.<\/p>\n<ul>\n<li>\u8d85\u4f4e\u78e8\u6599\u8d1f\u8377<\/li>\n<li>\u4e2d\u6027 pH \u7cfb\u7edf<\/li>\n<li>\u4e25\u683c\u7684\u5212\u75d5\u5bc6\u5ea6\u63a7\u5236<\/li>\n<\/ul>\n<p><!-- ================= Section 8 ================= --><\/p>\n<h2 id=\"node-driven\">\u8282\u70b9\u9a71\u52a8\u6ce5\u6d46\u7c7b\u578b<\/h2>\n<p>\u6d46\u6599\u7c7b\u578b\u968f\u7740\u6280\u672f\u8282\u70b9\u800c\u53d1\u5c55\u3002\u5148\u8fdb\u7684\u8282\u70b9\u8981\u6c42\u5bf9\u7f3a\u9677\u7387\u3001\u9009\u62e9\u6027\u548c\u5de5\u827a\u7a97\u53e3\u5bbd\u5ea6\u8fdb\u884c\u66f4\u4e25\u683c\u7684\u63a7\u5236\u3002.<\/p>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1049\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node.jpg\" alt=\"CMP slurry evolution by technology node\" width=\"1216\" height=\"663\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271216%27%20height%3D%27663%27%20viewBox%3D%270%200%201216%20663%27%3E%3Crect%20width%3D%271216%27%20height%3D%27663%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-200x109.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-300x164.jpg 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-400x218.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-600x327.jpg 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-768x419.jpg 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-800x436.jpg 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-1024x558.jpg 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node-1200x654.jpg 1200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-evolution-by-technology-node.jpg 1216w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1216px) 100vw, 1216px\" \/><\/figure>\n<p><!-- ================= Section 9 ================= --><\/p>\n<h2 id=\"process-window\">\u6ce5\u6d46\u7c7b\u578b\u4e0e\u5de5\u827a\u7a97\u53e3<\/h2>\n<p>\u6bcf\u79cd\u6ce5\u6d46\u7c7b\u578b\u90fd\u6709\u4e00\u4e2a\u72ec\u7279\u7684\u64cd\u4f5c\u7a97\u53e3\uff0c\u7531 pH \u503c\u3001\u6c27\u5316\u5242\u6d53\u5ea6\u3001\u78e8\u6599\u8d1f\u8f7d\u548c\u57ab\u7247\u76f8\u4e92\u4f5c\u7528\u51b3\u5b9a\u3002.<\/p>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1050\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window-.webp\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window-.webp\" alt=\"CMP slurry type process window\" width=\"1200\" height=\"624\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271200%27%20height%3D%27624%27%20viewBox%3D%270%200%201200%20624%27%3E%3Crect%20width%3D%271200%27%20height%3D%27624%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--200x104.webp 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--300x156.webp 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--400x208.webp 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--600x312.webp 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--768x399.webp 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--800x416.webp 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window--1024x532.webp 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/CMP-slurry-type-process-window-.webp 1200w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1200px) 100vw, 1200px\" \/><\/figure>\n<p><!-- ================= Section 10 ================= --><\/p>\n<h2 id=\"selection-matrix\">\u6ce5\u6d46\u9009\u62e9\u51b3\u7b56\u77e9\u9635<\/h2>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u5e94\u7528<\/th>\n<th>\u63a8\u8350\u6ce5\u6d46\u7c7b\u578b<\/th>\n<th>\u5173\u952e\u5236\u7ea6\u56e0\u7d20<\/th>\n<\/tr>\n<tr>\n<td>STI<\/td>\n<td>\u6c27\u5316\u7269\u6ce5\u6d46<\/td>\n<td>\u5212\u75d5\u5bc6\u5ea6<\/td>\n<\/tr>\n<tr>\n<td>Cu BEOL<\/td>\n<td>\u94dc\u6d46<\/td>\n<td>\u9493\u9975\u63a7\u5236<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 11 ================= --><\/p>\n<h2 id=\"failure-modes\">\u7279\u5b9a\u7c7b\u578b\u7684\u6545\u969c\u6a21\u5f0f<\/h2>\n<h3>\u6c27\u5316\u7269\u6ce5\u6d46<\/h3>\n<p>PSD \u5c3e\u90e8\u7684\u5fae\u5c0f\u5212\u75d5<\/p>\n<h3>\u94dc\u6d46<\/h3>\n<p>\u8150\u8680\u3001\u7535\u8680\u70b9\u8680<\/p>\n<h3>\u9694\u79bb\u6ce5\u6d46<\/h3>\n<p>\u9009\u62e9\u6027\u4e27\u5931\u3001\u4fb5\u8680<\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; Table of Contents Introduction: Why CMP Slurry Types Matter CMP Slurry Classification Logic Oxide CMP Slurry Copper CMP Slurry Tungsten CMP Slurry Barrier &amp; Hard Mask CMP Slurry Low-k  &#8230;<\/p>","protected":false},"author":1,"featured_media":1076,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1046","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1046","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=1046"}],"version-history":[{"count":4,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1046\/revisions"}],"predecessor-version":[{"id":1105,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1046\/revisions\/1105"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/1076"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=1046"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=1046"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=1046"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}