{"id":1058,"date":"2026-01-05T15:51:47","date_gmt":"2026-01-05T07:51:47","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1058"},"modified":"2026-01-05T16:22:08","modified_gmt":"2026-01-05T08:22:08","slug":"metal-cmp-slurry-for-semiconductor-wafer-polishing","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/metal-cmp-slurry-for-semiconductor-wafer-polishing\/","title":{"rendered":"\u7528\u4e8e\u534a\u5bfc\u4f53\u6676\u7247\u629b\u5149\u7684\u91d1\u5c5e CMP \u6ce5\u6d46"},"content":{"rendered":"<p>&nbsp;<\/p>\n<p><!-- ================= TOC ================= --><\/p>\n<nav>\n<h2>\u76ee\u5f55<\/h2>\n<ul>\n<li><a href=\"#introduction\">1.\u91d1\u5c5e CMP \u7b80\u4ecb<\/a><\/li>\n<li><a href=\"#why-metal-different\">2.\u4e3a\u4ec0\u4e48\u91d1\u5c5e CMP \u6709\u672c\u8d28\u533a\u522b<\/a><\/li>\n<li><a href=\"#classification\">3.\u91d1\u5c5e CMP \u6ce5\u6d46\u7c7b\u578b\u7684\u5206\u7c7b<\/a><\/li>\n<li><a href=\"#mechanisms\">4.\u4e0d\u540c\u91d1\u5c5e\u7684\u53bb\u9664\u673a\u5236<\/a><\/li>\n<li><a href=\"#slurry-architecture\">5.\u91d1\u5c5e CMP \u6ce5\u6d46\u6210\u5206\u7ed3\u6784<\/a><\/li>\n<li><a href=\"#metal-specific\">6.\u91d1\u5c5e\u4e13\u7528 CMP \u6ce5\u6d46\u7684\u6ce8\u610f\u4e8b\u9879<\/a><\/li>\n<li><a href=\"#engineering-parameters\">7.\u5de5\u7a0b\u53c2\u6570\u548c\u5b9e\u9a8c\u6570\u636e<\/a><\/li>\n<li><a href=\"#process-window\">8.\u6d41\u7a0b\u7a97\u53e3\u4e0e\u96c6\u6210\u63a7\u5236<\/a><\/li>\n<li><a href=\"#defects\">9.\u91d1\u5c5e CMP \u7f3a\u9677\u53ca\u6839\u6e90\u5206\u6790<\/a><\/li>\n<li><a href=\"#hvm\">10.\u5927\u6279\u91cf\u751f\u4ea7\u9762\u4e34\u7684\u6311\u6218<\/a><\/li>\n<li><a href=\"#selection\">11.\u91d1\u5c5e CMP \u7684\u6d46\u6599\u9009\u62e9\u7b56\u7565<\/a><\/li>\n<li><a href=\"#future\">12.\u91d1\u5c5e CMP \u6ce5\u6d46\u7684\u672a\u6765\u8d8b\u52bf<\/a><\/li>\n<\/ul>\n<\/nav>\n<hr \/>\n<p><!-- ================= Section 1 ================= --><\/p>\n<h2 id=\"introduction\">1.\u91d1\u5c5e CMP \u7b80\u4ecb<\/h2>\n<p>\u91d1\u5c5e\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\uff08CMP\uff09\u662f\u5148\u8fdb\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u96c6\u6210\u5ea6\u6700\u9ad8\u7684\u5173\u952e\u5de5\u827a\u4e4b\u4e00\u3002\u4e0e\u4ecb\u7535 CMP \u4e0d\u540c\uff0c\u91d1\u5c5e CMP \u6d89\u53ca\u7535\u5316\u5b66\u6d3b\u6027\u6750\u6599\uff0c\u5176\u8868\u9762\u72b6\u6001\u5bf9\u6d46\u6599\u5316\u5b66\u3001\u6c27\u5316\u8fd8\u539f\u6761\u4ef6\u548c\u673a\u68b0\u76f8\u4e92\u4f5c\u7528\u9ad8\u5ea6\u654f\u611f\u3002.<\/p>\n<p>\u968f\u7740\u8bbe\u5907\u7ed3\u6784\u5411\u66f4\u5c0f\u7684\u51e0\u4f55\u5c3a\u5bf8\u548c\u5f02\u8d28\u6750\u6599\u5806\u53d1\u5c55\uff0cCMP \u6ce5\u6d46\u5fc5\u987b\u540c\u65f6\u6ee1\u8db3\u53bb\u9664\u7387\u3001\u9009\u62e9\u6027\u3001\u7f3a\u9677\u63a7\u5236\u548c\u8150\u8680\u6291\u5236\u7b49\u65b9\u9762\u7684\u7ade\u4e89\u8981\u6c42\u3002.<\/p>\n<p>\u672c\u767d\u76ae\u4e66\u63d0\u4f9b\u4e86\u4e00\u4e2a\u7edf\u4e00\u7684\u5de5\u7a0b\u6846\u67b6\uff0c\u7528\u4e8e\u7406\u89e3\u591a\u79cd\u91d1\u5c5e\u6750\u6599\uff08\u5305\u62ec\u94dc\u3001\u94a8\u3001\u94dd\u3001\u94b4\u548c\u65b0\u5174\u7684\u948c\u7cfb\u7edf\uff09\u7684\u91d1\u5c5e CMP \u6ce5\u6d46\u884c\u4e3a\u3002.<\/p>\n<p>\u6709\u5173 CMP \u6ce5\u6d46\u57fa\u672c\u539f\u7406\u7684\u9ad8\u7ea7\u6982\u8ff0\uff0c\u8bf7\u53c2\u9605\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-for-semiconductor-wafer-polishing\/\">\u7528\u4e8e\u534a\u5bfc\u4f53\u5236\u9020\u7684 CMP \u6ce5\u6d46<\/a><\/p>\n<p><!-- ================= Section 2 ================= --><\/p>\n<h2 id=\"why-metal-different\">2.\u4e3a\u4ec0\u4e48\u91d1\u5c5e CMP \u6709\u672c\u8d28\u533a\u522b<\/h2>\n<p>\u91d1\u5c5e CMP \u4e0e\u6c27\u5316\u7269 CMP \u7684\u672c\u8d28\u533a\u522b\u5728\u4e8e\u4ee5\u4e0b\u56e0\u7d20\uff1a<\/p>\n<ul>\n<li>\u91d1\u5c5e\u5177\u6709\u7535\u5316\u5b66\u53cd\u5e94\u6027<\/li>\n<li>\u8868\u9762\u949d\u5316\u5c42\u52a8\u6001\u5f62\u6210\u548c\u6eb6\u89e3<\/li>\n<li>\u53bb\u9664\u7387\u901a\u5e38\u53d7\u5316\u5b66\u9650\u5236\u800c\u975e\u673a\u68b0\u9650\u5236<\/li>\n<\/ul>\n<p>\u5728\u91d1\u5c5e CMP \u4e2d\uff0c\u6d46\u6599\u5316\u5b66\u6210\u5206\u8d77\u7740\u79ef\u6781\u7684\u63a7\u5236\u4f5c\u7528\uff1a<\/p>\n<ul>\n<li>\u6c27\u5316\u7269\u5f62\u6210\u52a8\u529b\u5b66<\/li>\n<li>\u8868\u9762\u8150\u8680\u884c\u4e3a<\/li>\n<li>\u91d1\u5c5e\u4e0e\u710a\u76d8\u4e4b\u95f4\u7684\u754c\u9762\u7c98\u9644\u529b<\/li>\n<\/ul>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1112\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms.png\" alt=\"Fundamental differences between metal CMP and dielectric CMP mechanisms.\" width=\"752\" height=\"675\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27752%27%20height%3D%27675%27%20viewBox%3D%270%200%20752%20675%27%3E%3Crect%20width%3D%27752%27%20height%3D%27675%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms-200x180.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms-300x269.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms-400x359.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms-600x539.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Fundamental-differences-between-metal-CMP-and-dielectric-CMP-mechanisms.png 752w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 752px) 100vw, 752px\" \/><figcaption><\/figcaption><\/figure>\n<p><!-- ================= Section 3 ================= --><\/p>\n<h2 id=\"classification\">3.\u91d1\u5c5e CMP \u6ce5\u6d46\u7c7b\u578b\u7684\u5206\u7c7b<\/h2>\n<p>\u91d1\u5c5e CMP \u6ce5\u6d46\u53ef\u4ece\u591a\u4e2a\u5de5\u7a0b\u89d2\u5ea6\u8fdb\u884c\u5206\u7c7b\uff1a<\/p>\n<h3>3.1 \u6309\u76ee\u6807\u91d1\u5c5e\u5206\u7c7b<\/h3>\n<ul>\n<li>\u94dc (Cu)<\/li>\n<li>\u94a8 (W)<\/li>\n<li>\u94dd (Al)<\/li>\n<li>\u94b4\uff08Co\uff09<\/li>\n<li>\u948c (Ru)<\/li>\n<\/ul>\n<h3>3.2 \u6309\u5316\u5b66\u63a7\u5236\u6a21\u5f0f\u5206\u7c7b<\/h3>\n<ul>\n<li>\u6c27\u5316\u63a7\u5236\u6ce5\u6d46<\/li>\n<li>\u6eb6\u89e3\u63a7\u5236\u6ce5\u6d46<\/li>\n<li>\u949d\u5316\u63a7\u5236\u6ce5\u6d46<\/li>\n<\/ul>\n<h3>3.3 \u6309\u96c6\u6210\u654f\u611f\u5ea6\u5206\u7c7b<\/h3>\n<ul>\n<li>\u9ad8\u9009\u62e9\u6027 CMP\uff08\u963b\u6321\u5c42\uff09<\/li>\n<li>\u4f4e\u7f3a\u9677 CMP\uff08\u9ad8\u7ea7\u8282\u70b9\uff09<\/li>\n<\/ul>\n<p><!-- ================= Section 4 ================= --><\/p>\n<h2 id=\"mechanisms\">4.\u4e0d\u540c\u91d1\u5c5e\u7684\u53bb\u9664\u673a\u5236<\/h2>\n<p>\u867d\u7136\u6240\u6709\u91d1\u5c5e CMP \u5de5\u827a\u90fd\u6d89\u53ca\u5316\u5b66\u548c\u673a\u68b0\u6210\u5206\uff0c\u4f46\u4e3b\u8981\u7684\u53bb\u9664\u673a\u5236\u56e0\u91d1\u5c5e\u7c7b\u578b\u800c\u5f02\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u91d1\u5c5e<\/th>\n<th>\u4e3b\u5bfc\u673a\u5236<\/th>\n<th>\u5173\u952e\u5316\u5b66\u54c1\u63a7\u5236<\/th>\n<\/tr>\n<tr>\n<td>\u94dc<\/td>\n<td>\u6c27\u5316 + \u949d\u5316<\/td>\n<td>\u6291\u5236\u5242\u5438\u9644<\/td>\n<\/tr>\n<tr>\n<td>\u94a8<\/td>\n<td>\u6c27\u5316 + \u6eb6\u89e3<\/td>\n<td>pH \u503c\u548c\u6c27\u5316\u5242\u52a8\u529b\u5b66<\/td>\n<\/tr>\n<tr>\n<td>\u94dd\u8d28<\/td>\n<td>\u6c27\u5316\u7269\u78e8\u635f<\/td>\n<td>\u539f\u751f\u6c27\u5316\u7269\u7a33\u5b9a\u6027<\/td>\n<\/tr>\n<tr>\n<td>\u94b4<\/td>\n<td>\u53d7\u63a7\u8150\u8680<\/td>\n<td>\u6c27\u5316\u8fd8\u539f\u5e73\u8861<\/td>\n<\/tr>\n<tr>\n<td>\u948c<\/td>\n<td>\u8868\u9762\u6d3b\u5316<\/td>\n<td>\u50ac\u5316\u6c27\u5316<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 5 ================= --><\/p>\n<h2 id=\"slurry-architecture\">5.\u91d1\u5c5e CMP \u6ce5\u6d46\u6210\u5206\u7ed3\u6784<\/h2>\n<h3>5.1 \u7814\u78e8\u7cfb\u7edf<\/h3>\n<ul>\n<li>\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\uff08\u7f3a\u9677\u98ce\u9669\u4f4e\uff09<\/li>\n<li>\u6c27\u5316\u94dd\uff08\u786c\u5ea6\u9ad8\uff0c\u5212\u4f24\u98ce\u9669\u8f83\u9ad8\uff09<\/li>\n<li>\u6df7\u5408\u78e8\u6599\u7cfb\u7edf<\/li>\n<\/ul>\n<h3>5.2 \u6c27\u5316\u5242<\/h3>\n<ul>\n<li>\u8fc7\u6c27\u5316\u6c22<\/li>\n<li>\u94c1\u76d0<\/li>\n<li>\u8fc7\u786b\u9178\u76d0\uff08\u9ad8\u7ea7\u91d1\u5c5e\uff09<\/li>\n<\/ul>\n<h3>5.3 \u590d\u914d\u5236\u5242<\/h3>\n<p>\u7edc\u5408\u5242\u53ef\u7a33\u5b9a\u6eb6\u89e3\u7684\u91d1\u5c5e\u79bb\u5b50\uff0c\u9632\u6b62\u91cd\u65b0\u6c89\u79ef\u3002.<\/p>\n<h3>5.4 \u6291\u5236\u5242\u548c\u7f13\u8680\u5242<\/h3>\n<p>\u5bf9\u4e8e\u94dc\u3001\u94b4\u548c\u948c CMP \u800c\u8a00\uff0c\u9632\u6b62\u7535\u5316\u5b66\u8150\u8680\u81f3\u5173\u91cd\u8981\u3002.<\/p>\n<p><!-- ================= Section 6 ================= --><\/p>\n<h2 id=\"metal-specific\">6.\u91d1\u5c5e\u4e13\u7528 CMP \u6ce5\u6d46\u7684\u6ce8\u610f\u4e8b\u9879<\/h2>\n<h3>6.1 CMP \u94dd\u6d46<\/h3>\n<p>\u94dd\u7684 CMP \u4f9d\u8d56\u4e8e\u53bb\u9664 Al<sub>2<\/sub>O<sub>3<\/sub> \u901a\u5e38\u9700\u8981\u4ed4\u7ec6\u63a7\u5236\u78e8\u6599\u786c\u5ea6\u3002.<\/p>\n<h3>6.2 \u94b4 CMP \u6ce5\u6d46<\/h3>\n<p>\u94b4 CMP \u6ce5\u6d46\u5fc5\u987b\u517c\u987e\u9ad8\u5316\u5b66\u53cd\u5e94\u6027\u548c\u8150\u8680\u6291\u5236\u6027\u3002.<\/p>\n<h3>6.3 \u948c CMP \u6ce5\u6d46<\/h3>\n<p>\u7531\u4e8e\u5176\u50ac\u5316\u8868\u9762\u884c\u4e3a\uff0c\u948c CMP \u662f\u6700\u5177\u6311\u6218\u6027\u7684\u65b0\u5174\u91d1\u5c5e CMP \u7cfb\u7edf\u4e4b\u4e00\u3002.<\/p>\n<p><!-- ================= Section 7 ================= --><\/p>\n<h2 id=\"engineering-parameters\">7.\u5de5\u7a0b\u53c2\u6570\u548c\u5b9e\u9a8c\u6570\u636e<\/h2>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u5178\u578b\u8303\u56f4<\/th>\n<th>\u5de5\u7a0b\u5f71\u54cd<\/th>\n<\/tr>\n<tr>\n<td>pH \u503c<\/td>\n<td>2.0-7.0<\/td>\n<td>\u53d6\u51b3\u4e8e\u91d1\u5c5e\u7684\u7a33\u5b9a\u6027<\/td>\n<\/tr>\n<tr>\n<td>MRR<\/td>\n<td>100-800 \u7eb3\u7c73\/\u5206\u949f<\/td>\n<td>\u541e\u5410\u91cf\u4e0e\u63a7\u5236<\/td>\n<\/tr>\n<tr>\n<td>\u9009\u62e9\u6027<\/td>\n<td>&gt; 20:1<\/td>\n<td>\u5c4f\u969c\u4fdd\u62a4<\/td>\n<\/tr>\n<tr>\n<td>\u5212\u75d5\u5bc6\u5ea6<\/td>\n<td>&lt; 0.1 \/ \u6676\u5706<\/td>\n<td>\u4ea7\u91cf<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 8 ================= --><\/p>\n<h2 id=\"process-window\">8.\u6d41\u7a0b\u7a97\u53e3\u4e0e\u96c6\u6210\u63a7\u5236<\/h2>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1114\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity.png\" alt=\"Multi-metal CMP slurry process window illustrating trade-offs between MRR, selectivity, and defectivity.\" width=\"1850\" height=\"1031\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271850%27%20height%3D%271031%27%20viewBox%3D%270%200%201850%201031%27%3E%3Crect%20width%3D%271850%27%20height%3D%271031%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-200x111.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-300x167.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-400x223.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-600x334.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-768x428.png 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-800x446.png 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-1024x571.png 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-1200x669.png 1200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity-1536x856.png 1536w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Multi-metal-CMP-slurry-process-window-illustrating-trade-offs-between-MRR-selectivity-and-defectivity.png 1850w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1850px) 100vw, 1850px\" \/><\/figure>\n<p>\u91d1\u5c5e CMP \u5de5\u827a\u7a97\u53e3\u901a\u5e38\u6bd4\u6c27\u5316\u7269 CMP \u66f4\u7a84\uff0c\u9700\u8981\u66f4\u4e25\u683c\u7684\u5316\u5b66\u548c\u673a\u68b0\u63a7\u5236\u3002.<\/p>\n<p><!-- ================= Section 9 ================= --><\/p>\n<h2 id=\"defects\">9.\u91d1\u5c5e CMP \u7f3a\u9677\u53ca\u6839\u6e90\u5206\u6790<\/h2>\n<h3>9.1 \u6316\u6398\u548c\u4fb5\u8680<\/h3>\n<p>\u7531\u4e8e\u91d1\u5c5e\u548c\u5468\u56f4\u7535\u4ecb\u8d28\u7684\u53bb\u9664\u7387\u4e0d\u5339\u914d\u800c\u4ea7\u751f\u3002.<\/p>\n<h3>9.2 \u8150\u8680\u548c\u70b9\u8680<\/h3>\n<p>\u539f\u56e0\u662f\u6c27\u5316\u5242\u6d53\u5ea6\u8fc7\u9ad8\u6216\u6291\u5236\u5242\u8986\u76d6\u9762\u4e0d\u8db3\u3002.<\/p>\n<h3>9.3 \u5fae\u7c92\u5f15\u8d77\u7684\u5212\u75d5<\/h3>\n<p>\u4e0e\u78e8\u6599\u7ed3\u5757\u6216\u8fc7\u6ee4\u6548\u7387\u4f4e\u4e0b\u6709\u5173\u3002.<\/p>\n<p><!-- ================= Section 10 ================= --><\/p>\n<h2 id=\"hvm\">10.\u5927\u6279\u91cf\u751f\u4ea7\u9762\u4e34\u7684\u6311\u6218<\/h2>\n<p>\u91d1\u5c5e CMP \u6ce5\u6d46\u9762\u4e34\u7740\u72ec\u7279\u7684 HVM \u6311\u6218\uff1a<\/p>\n<ul>\n<li>\u518d\u5faa\u73af\u8fc7\u7a0b\u4e2d\u7684\u5316\u5b66\u6d88\u8017<\/li>\n<li>\u886c\u57ab\u8001\u5316\u6548\u679c<\/li>\n<li>\u5de5\u5177\u4e0e\u5de5\u5177\u4e4b\u95f4\u7684\u5dee\u5f02<\/li>\n<\/ul>\n<p>\u6ce5\u6d46\u914d\u65b9\u5fc5\u987b\u8bc1\u660e\u5728\u957f\u65f6\u95f4\u8fd0\u884c\u6761\u4ef6\u4e0b\u7684\u7a33\u5b9a\u6027\u3002.<\/p>\n<p><!-- ================= Section 11 ================= --><\/p>\n<h2 id=\"selection\">11.\u91d1\u5c5e CMP \u7684\u6d46\u6599\u9009\u62e9\u7b56\u7565<\/h2>\n<ul>\n<li>\u786e\u5b9a\u4e3b\u8981\u6e05\u9664\u673a\u5236<\/li>\n<li>\u5b9a\u4e49\u9009\u62e9\u6027\u4f18\u5148\u7ea7<\/li>\n<li>\u9a8c\u8bc1\u8150\u8680\u4f59\u91cf<\/li>\n<\/ul>\n<p>\u6709\u5173\u7279\u5b9a\u91d1\u5c5e\u7684\u6307\u5bfc\uff0c\u8bf7\u53c2\u89c1<\/p>\n<ul>\n<li><a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/copper-cmp-slurry-for-advanced-semiconductor-manufacturing\/\">\u94dc CMP \u6ce5\u6d46<\/a><\/li>\n<li><a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/tungsten-cmp-slurry-for-semiconductor-manufacturing\/\">\u94a8 CMP \u6ce5\u6d46<\/a><\/li>\n<\/ul>\n<p><!-- ================= Section 12 ================= --><\/p>\n<h2 id=\"future\">12.\u91d1\u5c5e CMP \u6ce5\u6d46\u7684\u672a\u6765\u8d8b\u52bf<\/h2>\n<p>\u672a\u6765\u91d1\u5c5e CMP \u6ce5\u6d46\u7684\u5f00\u53d1\u91cd\u70b9\u662f\uff1a<\/p>\n<ul>\n<li>\u7528\u4e8e\u9ad8\u7ea7\u4e92\u8fde\u5668\u4ef6\u7684\u66ff\u4ee3\u91d1\u5c5e<\/li>\n<li>5 \u7eb3\u7c73\u4ee5\u4e0b\u8282\u70b9\u7684\u7f3a\u9677\u7387\u8f83\u4f4e<\/li>\n<li>\u73af\u5883\u53ef\u6301\u7eed\u5316\u5b66<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; Table of Contents 1. Introduction to Metal CMP 2. Why Metal CMP Is Fundamentally Different 3. Classification of Metal CMP Slurry Types 4. Removal Mechanisms Across Different Metals 5.  &#8230;<\/p>","protected":false},"author":1,"featured_media":1081,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1058","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1058","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=1058"}],"version-history":[{"count":5,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1058\/revisions"}],"predecessor-version":[{"id":1115,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1058\/revisions\/1115"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/1081"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=1058"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=1058"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=1058"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}