{"id":1062,"date":"2026-01-05T15:57:33","date_gmt":"2026-01-05T07:57:33","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1062"},"modified":"2026-01-05T16:28:13","modified_gmt":"2026-01-05T08:28:13","slug":"cmp-slurry-filters","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-filters\/","title":{"rendered":"CMP \u6d46\u6599\u8fc7\u6ee4\u5668"},"content":{"rendered":"<p>&nbsp;<\/p>\n<h2>\u534a\u5bfc\u4f53 CMP \u4e2d\u7684\u8fc7\u6ee4\u4ecb\u8d28\u3001\u5916\u58f3\u8bbe\u8ba1\u548c\u4f7f\u7528\u70b9\u63a7\u5236<\/h2>\n<p><!-- ================= TOC ================= --><\/p>\n<nav>\n<h2>\u76ee\u5f55<\/h2>\n<ul>\n<li><a href=\"#overview\">1.CMP \u6d46\u6599\u8fc7\u6ee4\u5668\u6982\u8ff0<\/a><\/li>\n<li><a href=\"#filter-role\">2.\u8fc7\u6ee4\u5668\u5728 CMP \u4ea7\u91cf\u63a7\u5236\u4e2d\u7684\u4f5c\u7528<\/a><\/li>\n<li><a href=\"#filter-media\">3.\u6ee4\u7eb8\u6750\u6599<\/a><\/li>\n<li><a href=\"#rating\">4.\u7edd\u5bf9\u989d\u5b9a\u503c\u4e0e\u6807\u79f0\u989d\u5b9a\u503c<\/a><\/li>\n<li><a href=\"#pore-distribution\">5.\u5b54\u5f84\u5206\u5e03\u4e0e\u622a\u6d41\u884c\u4e3a<\/a><\/li>\n<li><a href=\"#housing\">6.\u8fc7\u6ee4\u5668\u5916\u58f3\u8bbe\u8ba1<\/a><\/li>\n<li><a href=\"#pou\">7.\u4f7f\u7528\u70b9\uff08POU\uff09\u8fc7\u6ee4<\/a><\/li>\n<li><a href=\"#chemical\">8.\u5316\u5b66\u517c\u5bb9\u6027\u548c\u53ef\u8403\u53d6\u6027<\/a><\/li>\n<li><a href=\"#performance\">9.\u6027\u80fd\u6570\u636e\u548c\u5bff\u547d\u6a21\u578b<\/a><\/li>\n<li><a href=\"#failure\">10.\u6545\u969c\u6a21\u5f0f\u4e0e\u6839\u6e90\u5206\u6790<\/a><\/li>\n<li><a href=\"#hvm\">11.HVM \u8fc7\u6ee4\u5668\u7ba1\u7406\u7b56\u7565<\/a><\/li>\n<li><a href=\"#selection\">12.\u5982\u4f55\u9009\u62e9 CMP \u6d46\u6599\u8fc7\u6ee4\u5668<\/a><\/li>\n<li><a href=\"#future\">13.\u672a\u6765\u8d8b\u52bf<\/a><\/li>\n<\/ul>\n<\/nav>\n<hr \/>\n<p><!-- ================= Section 1 ================= --><\/p>\n<h2 id=\"overview\">1.CMP \u6d46\u6599\u8fc7\u6ee4\u5668\u6982\u8ff0<\/h2>\n<p>CMP \u6d46\u6599\u8fc7\u6ee4\u5668\u662f\u7cbe\u5bc6\u90e8\u4ef6\uff0c\u8bbe\u8ba1\u7528\u4e8e\u53bb\u9664\u6d46\u6599\u8f93\u9001\u7cfb\u7edf\u4e2d\u7684\u8d85\u5927\u9897\u7c92\u3001\u7ed3\u5757\u548c\u5916\u6765\u6742\u8d28\u3002\u4e0e\u4e00\u822c\u7684\u6db2\u4f53\u8fc7\u6ee4\u4e0d\u540c\uff0cCMP \u8fc7\u6ee4\u5668\u5fc5\u987b\u5728\u5316\u5b66\u8150\u8680\u6027\u73af\u5883\u4e2d\u5de5\u4f5c\uff0c\u540c\u65f6\u4fdd\u6301\u8d85\u4f4e\u7684\u7f3a\u9677\u7387\u3002.<\/p>\n<p>\u5728\u5148\u8fdb\u7684\u534a\u5bfc\u4f53\u8282\u70b9\u4e2d\uff0c\u6ee4\u6ce2\u5668\u4e0d\u518d\u662f\u88ab\u52a8\u7684\u6d88\u8017\u54c1\uff0c\u800c\u662f\u4e3b\u52a8\u7684\u4ea7\u91cf\u4fc3\u8fdb\u56e0\u7d20\u3002.<\/p>\n<p>\u6709\u5173\u6ce5\u6d46\u7684\u57fa\u672c\u77e5\u8bc6\uff0c\u8bf7\u53c2\u9605\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-for-semiconductor-wafer-polishing\/\">CMP \u6ce5\u6d46\u77e5\u8bc6\u4e2d\u5fc3<\/a><\/p>\n<p><!-- ================= Section 2 ================= --><\/p>\n<h2 id=\"filter-role\">2.\u8fc7\u6ee4\u5668\u5728 CMP \u4ea7\u91cf\u63a7\u5236\u4e2d\u7684\u4f5c\u7528<\/h2>\n<p>\u8fc7\u6ee4\u5668\u901a\u8fc7\u4e09\u79cd\u673a\u5236\u5f71\u54cd CMP \u6027\u80fd\uff1a<\/p>\n<ul>\n<li>\u7a33\u5b9a\u7c92\u5ea6\u5206\u5e03<\/li>\n<li>\u6291\u5236\u5212\u75d5\u8bf1\u53d1\u7c92\u5b50<\/li>\n<li>\u9632\u6b62\u7cfb\u7edf\u4ea7\u751f\u6c61\u67d3<\/li>\n<\/ul>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1122\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield.webp\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield.webp\" alt=\"Correlation between slurry filtration efficiency and wafer yield.\" width=\"1200\" height=\"600\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271200%27%20height%3D%27600%27%20viewBox%3D%270%200%201200%20600%27%3E%3Crect%20width%3D%271200%27%20height%3D%27600%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-200x100.webp 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-300x150.webp 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-400x200.webp 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-600x300.webp 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-768x384.webp 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-800x400.webp 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield-1024x512.webp 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Correlation-between-slurry-filtration-efficiency-and-wafer-yield.webp 1200w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1200px) 100vw, 1200px\" \/><figcaption>\u6ce5\u6d46\u8fc7\u6ee4\u6548\u7387\u4e0e\u7845\u7247\u4ea7\u91cf\u4e4b\u95f4\u7684\u76f8\u5173\u6027\u3002.<\/figcaption><\/figure>\n<p><!-- ================= Section 3 ================= --><\/p>\n<h2 id=\"filter-media\">3.\u6ee4\u7eb8\u6750\u6599<\/h2>\n<h3>3.1 \u805a\u56db\u6c1f\u4e59\u70ef\uff08PTFE\uff09<\/h3>\n<p>\u805a\u56db\u6c1f\u4e59\u70ef\u8fc7\u6ee4\u5668\u5177\u6709\u51fa\u8272\u7684\u8010\u5316\u5b66\u6027\uff0c\u53ef\u8403\u53d6\u7269\u6781\u5c11\uff0c\u662f\u91d1\u5c5e CMP \u5de5\u827a\u7684\u7406\u60f3\u9009\u62e9\u3002.<\/p>\n<h3>3.2 \u805a\u504f\u4e8c\u6c1f\u4e59\u70ef\uff08PVDF\uff09<\/h3>\n<p>PVDF \u5728\u5316\u5b66\u517c\u5bb9\u6027\u548c\u673a\u68b0\u5f3a\u5ea6\u4e4b\u95f4\u53d6\u5f97\u4e86\u5e73\u8861\u3002.<\/p>\n<h3>3.3 \u5c3c\u9f99<\/h3>\n<p>\u5c3c\u9f99\u8fc7\u6ee4\u5668\u901a\u5e38\u7528\u4e8e\u6c27\u5316\u7269 CMP\uff0c\u4f46\u5728\u4f4e\u538b\u91d1\u5c5e\u5e94\u7528\u4e2d\u53d7\u5230\u9650\u5236\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u6750\u6599<\/th>\n<th>\u8010\u5316\u5b66\u6027<\/th>\n<th>\u53ef\u8403\u53d6\u7269<\/th>\n<th>\u5178\u578b\u5e94\u7528<\/th>\n<\/tr>\n<tr>\n<td>\u805a\u56db\u6c1f\u4e59\u70ef<\/td>\n<td>\u4f18\u79c0<\/td>\n<td>\u8d85\u4f4e<\/td>\n<td>\u94dc\/\u74e6 CMP<\/td>\n<\/tr>\n<tr>\n<td>PVDF<\/td>\n<td>\u975e\u5e38\u597d<\/td>\n<td>\u4f4e<\/td>\n<td>\u91d1\u5c5e CMP<\/td>\n<\/tr>\n<tr>\n<td>\u5c3c\u9f99<\/td>\n<td>\u4e2d\u5ea6<\/td>\n<td>\u4e2d\u5ea6<\/td>\n<td>\u6c27\u5316\u7269 CMP<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 4 ================= --><\/p>\n<h2 id=\"rating\">4.\u7edd\u5bf9\u989d\u5b9a\u503c\u4e0e\u6807\u79f0\u989d\u5b9a\u503c<\/h2>\n<p>\u8fc7\u6ee4\u5668\u7684\u5b54\u5f84\u5927\u5c0f\u76f4\u63a5\u5f71\u54cd\u7f3a\u9677\u7387\u548c\u6ce5\u6d46\u5bff\u547d\u3002.<\/p>\n<ul>\n<li><strong>\u6807\u79f0\u989d\u5b9a\u503c\uff1a<\/strong> \u6355\u83b7\u4e00\u5b9a\u6bd4\u4f8b\u7684\u6307\u5b9a\u5c3a\u5bf8\u7684\u9897\u7c92<\/li>\n<li><strong>\u7edd\u5bf9\u7b49\u7ea7\uff1a<\/strong> \u4fdd\u8bc1\u51e0\u4e4e\u5b8c\u5168\u6e05\u9664\u6240\u8ff0\u5c3a\u5bf8\u4ee5\u4e0a\u7684\u90e8\u4ef6<\/li>\n<\/ul>\n<p>CMP \u6d41\u7a0b\u975e\u5e38\u9752\u7750\u7edd\u5bf9\u7b49\u7ea7\u7684\u8fc7\u6ee4\u5668\u3002.<\/p>\n<p><!-- ================= Section 5 ================= --><\/p>\n<h2 id=\"pore-distribution\">5.\u5b54\u5f84\u5206\u5e03\u4e0e\u622a\u6d41\u884c\u4e3a<\/h2>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1124\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity.jpg\" alt=\"Comparison of sharp vs broad pore size distribution and its impact on CMP defectivity.\" width=\"754\" height=\"842\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27754%27%20height%3D%27842%27%20viewBox%3D%270%200%20754%20842%27%3E%3Crect%20width%3D%27754%27%20height%3D%27842%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity-200x223.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity-269x300.jpg 269w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity-400x447.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity-600x670.jpg 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Comparison-of-sharp-vs-broad-pore-size-distribution-and-its-impact-on-CMP-defectivity.jpg 754w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 754px) 100vw, 754px\" \/><figcaption>\u5c16\u5b54\u4e0e\u5bbd\u5b54\u5f84\u5206\u5e03\u7684\u6bd4\u8f83\u53ca\u5176\u5bf9 CMP \u7f3a\u9677\u7387\u7684\u5f71\u54cd\u3002.<\/figcaption><\/figure>\n<p>\u5c16\u9510\u7684\u622a\u6b62\u884c\u4e3a\u964d\u4f4e\u4e86\u5927\u7c92\u5b50\u7a81\u7834\u7684\u6982\u7387\u3002.<\/p>\n<p><!-- ================= Section 6 ================= --><\/p>\n<h2 id=\"housing\">6.\u8fc7\u6ee4\u5668\u5916\u58f3\u8bbe\u8ba1<\/h2>\n<h3>6.1 \u4f4f\u623f\u6750\u6599<\/h3>\n<ul>\n<li>\u542b\u6c1f\u805a\u5408\u7269\uff08PFA\uff09<\/li>\n<li>\u9ad8\u7eaf\u5ea6\u805a\u4e19\u70ef<\/li>\n<\/ul>\n<h3>6.2 \u6d41\u8def\u4f18\u5316<\/h3>\n<p>\u5916\u58f3\u5185\u7684\u6b7b\u89d2\u4f1a\u589e\u52a0\u9897\u7c92\u79ef\u7d2f\u548c\u6c61\u67d3\u98ce\u9669\u3002.<\/p>\n<p><!-- ================= Section 7 ================= --><\/p>\n<h2 id=\"pou\">7.\u4f7f\u7528\u70b9\uff08POU\uff09\u8fc7\u6ee4<\/h2>\n<p>POU \u8fc7\u6ee4\u5668\u53ef\u5728\u6ce5\u6d46\u5230\u8fbe\u629b\u5149\u57ab\u4e4b\u524d\u5bf9\u9897\u7c92\u8fdb\u884c\u6700\u7ec8\u63a7\u5236\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u5730\u70b9<\/th>\n<th>\u76ca\u5904<\/th>\n<th>\u98ce\u9669<\/th>\n<\/tr>\n<tr>\n<td>\u5927\u5b97\u4f9b\u5e94<\/td>\n<td>\u5927\u5bb9\u91cf<\/td>\n<td>\u4e0b\u6e38\u6c61\u67d3<\/td>\n<\/tr>\n<tr>\n<td>\u518d\u5faa\u73af\u56de\u8def<\/td>\n<td>\u7a33\u5b9a\u6027<\/td>\n<td>\u5ef6\u8fdf\u54cd\u5e94<\/td>\n<\/tr>\n<tr>\n<td>POU<\/td>\n<td>\u6700\u5927\u9650\u5ea6\u5730\u63a7\u5236\u7f3a\u9677<\/td>\n<td>\u9891\u7e41\u66f4\u6362<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 8 ================= --><\/p>\n<h2 id=\"chemical\">8.\u5316\u5b66\u517c\u5bb9\u6027\u548c\u53ef\u8403\u53d6\u6027<\/h2>\n<p>\u8fc7\u6ee4\u5668\u4e0d\u5f97\u5f15\u5165\u79bb\u5b50\u6c61\u67d3\u6216\u6709\u673a\u6d78\u51fa\u7269\u3002.<\/p>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1125\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters.png\" alt=\"TOC and metal ion extractables testing for CMP slurry filters.\" width=\"990\" height=\"670\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27990%27%20height%3D%27670%27%20viewBox%3D%270%200%20990%20670%27%3E%3Crect%20width%3D%27990%27%20height%3D%27670%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters-200x135.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters-300x203.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters-400x271.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters-600x406.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters-768x520.png 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters-800x541.png 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/TOC-and-metal-ion-extractables-testing-for-CMP-slurry-filters.png 990w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 990px) 100vw, 990px\" \/><figcaption>\u5bf9 CMP \u6d46\u6599\u8fc7\u6ee4\u5668\u8fdb\u884c TOC \u548c\u91d1\u5c5e\u79bb\u5b50\u8403\u53d6\u7269\u6d4b\u8bd5\u3002.<\/figcaption><\/figure>\n<p><!-- ================= Section 9 ================= --><\/p>\n<h2 id=\"performance\">9.\u6027\u80fd\u6570\u636e\u548c\u5bff\u547d\u6a21\u578b<\/h2>\n<p>\u8fc7\u6ee4\u5668\u7684\u4f7f\u7528\u5bff\u547d\u53d6\u51b3\u4e8e<\/p>\n<ul>\n<li>\u6ce5\u6d46\u9897\u7c92\u88c5\u8f7d\u91cf<\/li>\n<li>\u805a\u96c6\u8d8b\u52bf<\/li>\n<li>\u6d41\u901f\u548c\u526a\u5207\u5e94\u529b<\/li>\n<\/ul>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u8fc7\u6ee4\u5668\u5c3a\u5bf8<\/th>\n<th>\u5b54\u5f84<\/th>\n<th>\u5178\u578b\u4f7f\u7528\u5bff\u547d<\/th>\n<\/tr>\n<tr>\n<td>10 \u82f1\u5bf8<\/td>\n<td>0.2 \u5fae\u7c73<\/td>\n<td>300-500 \u4e2a\u6676\u7247<\/td>\n<\/tr>\n<tr>\n<td>20 \u82f1\u5bf8<\/td>\n<td>0.5 \u5fae\u7c73<\/td>\n<td>800-1200 \u4e2a\u6676\u7247<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 10 ================= --><\/p>\n<h2 id=\"failure\">10.\u6545\u969c\u6a21\u5f0f\u4e0e\u6839\u6e90\u5206\u6790<\/h2>\n<h3>10.1 \u8fc7\u6ee4\u5668\u7834\u88c2<\/h3>\n<p>\u7531\u538b\u5dee\u8fc7\u5927\u5f15\u8d77\u3002.<\/p>\n<h3>10.2 \u6e20\u9053<\/h3>\n<p>\u4e0d\u5747\u5300\u7684\u6d41\u52a8\u5bfc\u81f4\u9897\u7c92\u7a81\u7834\u3002.<\/p>\n<h3>10.3 \u5316\u5b66\u964d\u89e3<\/h3>\n<p>\u5bfc\u81f4\u7ea4\u7ef4\u8131\u843d\u548c\u6c61\u67d3\u3002.<\/p>\n<p><!-- ================= Section 11 ================= --><\/p>\n<h2 id=\"hvm\">11.HVM \u8fc7\u6ee4\u5668\u7ba1\u7406\u7b56\u7565<\/h2>\n<ul>\n<li>\u538b\u964d\u76d1\u6d4b<\/li>\n<li>\u57fa\u4e8e\u6676\u5706\u6570\u91cf\u7684\u66ff\u6362<\/li>\n<li>\u4f20\u5165\u6ee4\u6ce2\u5668\u8d44\u683c<\/li>\n<\/ul>\n<p>\u5728 HVM \u4e2d\uff0c\u8fc7\u6ee4\u5668\u5fc5\u987b\u88ab\u89c6\u4e3a\u8fc7\u7a0b\u63a7\u5236\u8bbe\u5907\uff0c\u800c\u4e0d\u662f\u6d88\u8017\u54c1\u3002.<\/p>\n<p><!-- ================= Section 12 ================= --><\/p>\n<h2 id=\"selection\">12.\u5982\u4f55\u9009\u62e9 CMP \u6d46\u6599\u8fc7\u6ee4\u5668<\/h2>\n<p>\u4e3b\u8981\u9009\u62e9\u6807\u51c6\uff1a<\/p>\n<ul>\n<li>\u6ce5\u6d46\u5316\u5b66\u517c\u5bb9\u6027<\/li>\n<li>\u6240\u9700\u7684\u7c92\u5b50\u622a\u6d41<\/li>\n<li>\u5de5\u5177\u96c6\u6210\u9650\u5236<\/li>\n<li>\u6240\u6709\u6743\u6210\u672c (CoO)<\/li>\n<\/ul>\n<p>\u8fc7\u6ee4\u5668\u5fc5\u987b\u4e0e\u6ce5\u6d46\u914d\u65b9\u548c CMP \u886c\u57ab\u7279\u6027\u5171\u540c\u4f18\u5316\u3002.<\/p>\n<p><!-- ================= Section 13 ================= --><\/p>\n<h2 id=\"future\">13.\u672a\u6765\u8d8b\u52bf<\/h2>\n<p>\u65b0\u51fa\u73b0\u7684\u8d8b\u52bf\u5305\u62ec<\/p>\n<ul>\n<li>\u96c6\u6210\u5f0f\u9897\u7c92\u4f20\u611f\u5668<\/li>\n<li>\u53ef\u8403\u53d6\u6027\u8f83\u4f4e\u7684\u805a\u5408\u7269<\/li>\n<li>\u8282\u70b9\u4e13\u7528\u8fc7\u6ee4\u5668\u6807\u51c6<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; Filter Media, Housing Design, and Point-of-Use Control in Semiconductor CMP Table of Contents 1. Overview of CMP Slurry Filters 2. Role of Filters in CMP Yield Control 3. Filter  &#8230;<\/p>","protected":false},"author":1,"featured_media":1083,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1062","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1062","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=1062"}],"version-history":[{"count":4,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1062\/revisions"}],"predecessor-version":[{"id":1126,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1062\/revisions\/1126"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/1083"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=1062"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=1062"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=1062"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}