{"id":1066,"date":"2026-01-05T15:58:35","date_gmt":"2026-01-05T07:58:35","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1066"},"modified":"2026-01-05T16:34:14","modified_gmt":"2026-01-05T08:34:14","slug":"how-to-choose-cmp-slurry","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/how-to-choose-cmp-slurry\/","title":{"rendered":"\u5982\u4f55\u9009\u62e9 CMP \u6ce5\u6d46"},"content":{"rendered":"<p>&nbsp;<\/p>\n<h2>\u534a\u5bfc\u4f53\u6676\u7247\u629b\u5149\u7684\u5de5\u7a0b\u7ea7\u51b3\u7b56\u6846\u67b6<\/h2>\n<p><!-- ================= TOC ================= --><\/p>\n<nav>\n<h2>\u76ee\u5f55<\/h2>\n<ul>\n<li><a href=\"#intro\">1.\u5bfc\u8a00<\/a><\/li>\n<li><a href=\"#first-principles\">2.\u6ce5\u6d46\u9009\u62e9\u7684\u7b2c\u4e00\u539f\u5219\u65b9\u6cd5<\/a><\/li>\n<li><a href=\"#material\">3.\u6676\u5706\u6750\u6599\u8003\u8651\u56e0\u7d20<\/a><\/li>\n<li><a href=\"#slurry-type\">4.\u6839\u636e CMP \u5de5\u827a\u5339\u914d\u6ce5\u6d46\u7c7b\u578b<\/a><\/li>\n<li><a href=\"#performance-metrics\">5.\u5173\u952e\u7ee9\u6548\u6307\u6807<\/a><\/li>\n<li><a href=\"#process-window\">6.\u5de5\u827a\u7a97\u53e3\u548c\u4fdd\u8bc1\u91d1\u5de5\u7a0b<\/a><\/li>\n<li><a href=\"#pad\">7.\u4e0e CMP \u7814\u78e8\u57ab\u7684\u517c\u5bb9\u6027<\/a><\/li>\n<li><a href=\"#defectivity\">8.\u7f3a\u9677\u548c\u4ea7\u91cf\u98ce\u9669\u8bc4\u4f30<\/a><\/li>\n<li><a href=\"#tool\">9.CMP \u5de5\u5177\u548c\u4ea4\u4ed8\u7cfb\u7edf\u7684\u5236\u7ea6\u56e0\u7d20<\/a><\/li>\n<li><a href=\"#hvm\">10.\u5927\u6279\u91cf\u5236\u9020\uff08HVM\uff09\u8003\u8651\u56e0\u7d20<\/a><\/li>\n<li><a href=\"#mistakes\">11.\u5e38\u89c1\u7684 CMP \u6ce5\u6d46\u9009\u62e9\u9519\u8bef<\/a><\/li>\n<li><a href=\"#qualification\">12.\u8d44\u683c\u8ba4\u8bc1\u548c\u63d0\u5347\u6218\u7565<\/a><\/li>\n<li><a href=\"#summary\">13.\u5de5\u7a0b\u603b\u7ed3<\/a><\/li>\n<\/ul>\n<\/nav>\n<hr \/>\n<p><!-- ================= Section 1 ================= --><\/p>\n<h2 id=\"intro\">1.\u5bfc\u8a00<\/h2>\n<p>\u9009\u62e9\u5408\u9002\u7684 CMP \u6d46\u6599\u662f\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\u6700\u91cd\u8981\u7684\u51b3\u7b56\u4e4b\u4e00\u3002\u4e0e\u8bb8\u591a\u8017\u6750\u4e0d\u540c\uff0c\u6d46\u6599\u7684\u9009\u62e9\u76f4\u63a5\u5f71\u54cd\u6750\u6599\u53bb\u9664\u7387 (MRR)\u3001\u5747\u5300\u6027\u3001\u7f3a\u9677\u7387\u3001\u4ea7\u91cf\u548c\u62e5\u6709\u6210\u672c\u3002.<\/p>\n<p>\u5728\u9ad8\u7ea7\u8282\u70b9\u4e0a\uff0c\u9009\u62e9\u4e0d\u5f53\u7684\u6d46\u6599\u4f1a\u5728\u707e\u96be\u6027\u6545\u969c\u663e\u73b0\u4e4b\u524d\u6084\u65e0\u58f0\u606f\u5730\u964d\u4f4e\u4ea7\u91cf\u3002.<\/p>\n<p>\u672c\u6587\u4ef6\u63d0\u4f9b\u4e86\u4e00\u79cd\u7ed3\u6784\u5316\u3001\u5de5\u7a0b\u9a71\u52a8\u7684\u65b9\u6cd5\uff0c\u7528\u4e8e\u6839\u636e\u6750\u6599\u79d1\u5b66\u3001\u5de5\u827a\u96c6\u6210\u548c\u751f\u4ea7\u5b9e\u9645\u60c5\u51b5\u9009\u62e9 CMP \u6ce5\u6d46\u3002.<\/p>\n<p>\u6709\u5173\u6ce5\u6d46\u7684\u57fa\u672c\u77e5\u8bc6\uff0c\u8bf7\u53c2\u9605\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-for-semiconductor-wafer-polishing\/\"><strong>\u7528\u4e8e\u534a\u5bfc\u4f53\u5236\u9020\u7684 CMP \u6ce5\u6d46<\/strong><\/a><\/p>\n<p><!-- ================= Section 2 ================= --><\/p>\n<h2 id=\"first-principles\">2.\u6ce5\u6d46\u9009\u62e9\u7684\u7b2c\u4e00\u539f\u5219\u65b9\u6cd5<\/h2>\n<p>CMP \u53d7\u4ee5\u4e0b\u56e0\u7d20\u534f\u540c\u4f5c\u7528\u7684\u5f71\u54cd\uff1a<\/p>\n<ul>\n<li>\u673a\u68b0\u78e8\u635f<\/li>\n<li>\u5316\u5b66\u53cd\u5e94<\/li>\n<li>\u6c34\u52a8\u529b\u4f20\u8f93<\/li>\n<\/ul>\n<p>\u56e0\u6b64\uff0c\u6ce5\u6d46\u9009\u62e9\u5fc5\u987b\u4ece\u7b2c\u4e00\u539f\u5219\u5f00\u59cb\uff0c\u800c\u4e0d\u662f\u4ece\u4ea7\u54c1\u76ee\u5f55\u5f00\u59cb\u3002.<\/p>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1132\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal.jpg\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal.jpg\" alt=\"First-principles framework linking slurry chemistry and mechanical removal.\" width=\"716\" height=\"192\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27716%27%20height%3D%27192%27%20viewBox%3D%270%200%20716%20192%27%3E%3Crect%20width%3D%27716%27%20height%3D%27192%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal-200x54.jpg 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal-300x80.jpg 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal-400x107.jpg 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal-600x161.jpg 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/First-principles-framework-linking-slurry-chemistry-and-mechanical-removal.jpg 716w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 716px) 100vw, 716px\" \/><\/figure>\n<p><!-- ================= Section 3 ================= --><\/p>\n<h2 id=\"material\">3.\u6676\u5706\u6750\u6599\u8003\u8651\u56e0\u7d20<\/h2>\n<p>\u4e0d\u540c\u7684\u6750\u6599\u6240\u9700\u7684\u6ce5\u6d46\u5316\u5b66\u6210\u5206\u6839\u672c\u4e0d\u540c\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u6750\u6599<\/th>\n<th>\u4e3b\u8981\u6311\u6218<\/th>\n<th>\u9996\u9009\u6ce5\u6d46\u7279\u6027<\/th>\n<\/tr>\n<tr>\n<td>SiO\u2082<\/td>\n<td>\u5236\u670d\u62c6\u9664<\/td>\n<td>\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\uff0c\u78b1\u6027 pH \u503c<\/td>\n<\/tr>\n<tr>\n<td>\u94dc<\/td>\n<td>\u6253\u78e8\u548c\u8150\u8680<\/td>\n<td>\u53d7\u63a7\u6c27\u5316\u3001\u6291\u5236\u5242<\/td>\n<\/tr>\n<tr>\n<td>\u94a8<\/td>\n<td>\u786c\u5ea6<\/td>\n<td>\u5f3a\u6c27\u5316\u5242\u3001\u6c27\u5316\u94dd<\/td>\n<\/tr>\n<tr>\n<td>\u963b\u9694\u5c42<\/td>\n<td>\u9009\u62e9\u6027<\/td>\n<td>\u4f4e MRR\uff0c\u9ad8\u63a7\u5236<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6750\u6599\u9009\u62e9\u903b\u8f91\u4e0d\u4ec5\u8981\u8003\u8651\u9876\u5c42\uff0c\u8fd8\u8981\u8003\u8651\u5e95\u5c42\u548c\u76f8\u90bb\u8584\u819c\u3002.<\/p>\n<p><!-- ================= Section 4 ================= --><\/p>\n<h2 id=\"slurry-type\">4.\u6839\u636e CMP \u5de5\u827a\u5339\u914d\u6ce5\u6d46\u7c7b\u578b<\/h2>\n<p>\u6ce5\u6d46\u7c7b\u578b\u5fc5\u987b\u4e0e CMP \u6b65\u9aa4\u76ee\u6807\u76f8\u5339\u914d\u3002.<\/p>\n<ul>\n<li>\u5927\u91cf\u6e05\u9664<\/li>\n<li>\u660e\u786e\u6b65\u9aa4<\/li>\n<li>\u5c4f\u969c\u629b\u5149\u5242<\/li>\n<\/ul>\n<p>\u5728\u963b\u9694\u6b65\u9aa4\u4e2d\u4f7f\u7528\u9ad8 MRR \u6ce5\u6d46\u662f\u4e00\u4e2a\u5e38\u89c1\u4f46\u4ee3\u4ef7\u9ad8\u6602\u7684\u9519\u8bef\u3002.<\/p>\n<p>\u4f9b\u53c2\u8003\uff1a<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-types-explained\/\">CMP \u6ce5\u6d46\u7c7b\u578b<\/a><\/p>\n<p><!-- ================= Section 5 ================= --><\/p>\n<h2 id=\"performance-metrics\">5.\u5173\u952e\u7ee9\u6548\u6307\u6807<\/h2>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u516c\u5236<\/th>\n<th>\u4e3a\u4f55\u91cd\u8981<\/th>\n<th>\u5178\u578b\u8303\u56f4<\/th>\n<\/tr>\n<tr>\n<td>MRR<\/td>\n<td>\u541e\u5410\u91cf<\/td>\n<td>100-5000 \u00c5\/min<\/td>\n<\/tr>\n<tr>\n<td>WIWNU<\/td>\n<td>\u7edf\u4e00\u6027<\/td>\n<td>&lt; 5%<\/td>\n<\/tr>\n<tr>\n<td>\u5212\u75d5\u5bc6\u5ea6<\/td>\n<td>\u4ea7\u91cf<\/td>\n<td>&lt; 0.1\/cm\u00b2<\/td>\n<\/tr>\n<tr>\n<td>\u9009\u62e9\u6027<\/td>\n<td>\u8f6e\u5ed3\u63a7\u5236<\/td>\n<td>&gt; 5:1<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 6 ================= --><\/p>\n<h2 id=\"process-window\">6.\u5de5\u827a\u7a97\u53e3\u548c\u4fdd\u8bc1\u91d1\u5de5\u7a0b<\/h2>\n<p>\u6700\u4f73\u6d46\u6599\u4e0d\u662f\u5cf0\u503c\u6027\u80fd\u6700\u9ad8\u7684\u6d46\u6599\uff0c\u800c\u662f\u7a33\u5b9a\u5de5\u827a\u7a97\u53e3\u6700\u5bbd\u7684\u6d46\u6599\u3002.<\/p>\n<figure><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1134\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process.webp\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process.webp\" alt=\"CMP slurry process\" width=\"1200\" height=\"1033\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271200%27%20height%3D%271033%27%20viewBox%3D%270%200%201200%201033%27%3E%3Crect%20width%3D%271200%27%20height%3D%271033%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-200x172.webp 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-300x258.webp 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-400x344.webp 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-600x517.webp 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-768x661.webp 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-800x689.webp 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process-1024x881.webp 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-process.webp 1200w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1200px) 100vw, 1200px\" \/><\/figure>\n<p>\u66f4\u5bbd\u7684\u7a97\u6237\u53ef\u4ee5\u5bb9\u5fcd\uff1a<\/p>\n<ul>\n<li>\u710a\u76d8\u8001\u5316<\/li>\n<li>\u5de5\u5177\u4e0e\u5de5\u5177\u4e4b\u95f4\u7684\u5dee\u5f02<\/li>\n<li>\u5c11\u91cf\u5316\u5b66\u6f02\u79fb<\/li>\n<\/ul>\n<p><!-- ================= Section 7 ================= --><\/p>\n<h2 id=\"pad\">7.\u4e0e CMP \u7814\u78e8\u57ab\u7684\u517c\u5bb9\u6027<\/h2>\n<p>\u57ab\u5c42\u4e0e\u6ce5\u6d46\u7684\u517c\u5bb9\u6027\u51b3\u5b9a\u4e86\u5b9e\u9645\u6027\u80fd\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u57ab\u5b50\u7c7b\u578b<\/th>\n<th>\u6ce5\u6d46\u517c\u5bb9\u6027<\/th>\n<th>\u98ce\u9669<\/th>\n<\/tr>\n<tr>\n<td>\u786c\u8d28\u805a\u6c28\u916f<\/td>\n<td>\u9ad8<\/td>\n<td>\u5212\u4f24\u98ce\u9669<\/td>\n<\/tr>\n<tr>\n<td>\u591a\u5b54\u8f6f\u57ab<\/td>\n<td>\u4e2d\u5ea6<\/td>\n<td>\u5782\u9493<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u4e0d\u8003\u8651\u57ab\u5c42\u7684\u6ce5\u6d46\u9009\u62e9\u662f\u4e0d\u5b8c\u6574\u7684\u3002.<\/p>\n<p><!-- ================= Section 8 ================= --><\/p>\n<h2 id=\"defectivity\">8.\u7f3a\u9677\u548c\u4ea7\u91cf\u98ce\u9669\u8bc4\u4f30<\/h2>\n<p>\u6bcf\u79cd\u6ce5\u6d46\u914d\u65b9\u90fd\u6709\u5176\u7279\u6709\u7684\u7f3a\u9677\u6307\u7eb9\u3002.<\/p>\n<ul>\n<li>\u5212\u75d5 \u2192 \u78e8\u5c3e\u98ce\u9669<\/li>\n<li>\u70b9\u8680 \u2192 \u6c27\u5316\u5242\u8fc7\u91cf<\/li>\n<li>\u9493\u9975 \u2192 \u6291\u5236\u5242\u5931\u8861<\/li>\n<\/ul>\n<p>\u4e86\u89e3\u4e86\u8fd9\u4e00\u6307\u7eb9\uff0c\u5c31\u80fd\u4e3b\u52a8\u63a7\u5236\u4ea7\u91cf\u3002.<\/p>\n<p><!-- ================= Section 9 ================= --><\/p>\n<h2 id=\"tool\">9.CMP \u5de5\u5177\u548c\u4ea4\u4ed8\u7cfb\u7edf\u7684\u5236\u7ea6\u56e0\u7d20<\/h2>\n<p>\u6ce5\u6d46\u5fc5\u987b\u4e0e\u4e0b\u5217\u7269\u8d28\u76f8\u5bb9<\/p>\n<ul>\n<li>\u6d41\u901f\u9650\u5236<\/li>\n<li>\u8fc7\u6ee4\u5668\u5b54\u5f84<\/li>\n<li>\u518d\u5faa\u73af\u7cfb\u7edf<\/li>\n<\/ul>\n<p>\u6709\u5173\u8fc7\u6ee4\u7684\u6ce8\u610f\u4e8b\u9879\uff0c\u8bf7\u53c2\u89c1<br \/>\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-filtration\/\">CMP \u6ce5\u6d46\u8fc7\u6ee4<\/a><\/p>\n<p><!-- ================= Section 10 ================= --><\/p>\n<h2 id=\"hvm\">10.\u5927\u6279\u91cf\u5236\u9020\uff08HVM\uff09\u8003\u8651\u56e0\u7d20<\/h2>\n<p>HVM \u6d46\u6599\u7684\u9009\u62e9\u4f18\u5148\u8003\u8651\u7a33\u5b9a\u6027\uff0c\u800c\u4e0d\u662f\u5cf0\u503c\u6027\u80fd\u3002.<\/p>\n<table border=\"1\" cellpadding=\"8\">\n<tbody>\n<tr>\n<th>\u7cfb\u6570<\/th>\n<th>\u5de5\u7a0b\u91cd\u70b9<\/th>\n<\/tr>\n<tr>\n<td>\u6279\u6b21\u4e00\u81f4\u6027<\/td>\n<td>\u5730\u5757\u95f4\u63a7\u5236<\/td>\n<\/tr>\n<tr>\n<td>\u4fdd\u8d28\u671f<\/td>\n<td>\u8001\u5316\u6f02\u79fb\u6700\u5c0f<\/td>\n<\/tr>\n<tr>\n<td>\u4f9b\u5e94\u53ef\u9760\u6027<\/td>\n<td>\u53cc\u91cd\u91c7\u8d2d\u51c6\u5907<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><!-- ================= Section 11 ================= --><\/p>\n<h2 id=\"mistakes\">11.\u5e38\u89c1\u7684 CMP \u6ce5\u6d46\u9009\u62e9\u9519\u8bef<\/h2>\n<ul>\n<li>\u8ffd\u6c42\u6700\u5927\u7684 MRR<\/li>\n<li>\u5ffd\u7565\u8fc7\u6ee4\u9650\u5236<\/li>\n<li>\u4f4e\u4f30\u57ab\u5b50\u7684\u76f8\u4e92\u4f5c\u7528<\/li>\n<li>\u8df3\u8fc7\u957f\u671f\u8001\u5316\u8bd5\u9a8c<\/li>\n<\/ul>\n<p>\u5927\u591a\u6570\u4ea7\u91cf\u504f\u5dee\u90fd\u6e90\u4e8e\u8fd9\u4e9b\u672c\u53ef\u907f\u514d\u7684\u9519\u8bef\u3002.<\/p>\n<p><!-- ================= Section 12 ================= --><\/p>\n<h2 id=\"qualification\">12.\u8d44\u683c\u8ba4\u8bc1\u548c\u63d0\u5347\u6218\u7565<\/h2>\n<p>\u7ed3\u6784\u5316\u7684\u8d44\u683c\u8ba1\u5212\u5305\u62ec<\/p>\n<ol>\n<li>\u5b9e\u9a8c\u5ba4\u89c4\u6a21\u7b5b\u9009<\/li>\n<li>\u77ed\u56de\u8def\u5de5\u5177\u6d4b\u8bd5<\/li>\n<li>\u6269\u5c55\u7f3a\u9677\u76d1\u6d4b<\/li>\n<li>HVM \u8bd5\u8fd0\u884c<\/li>\n<\/ol>\n<figure><figcaption><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1135\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow.webp\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow.webp\" alt=\"CMP slurry qualification flow\" width=\"857\" height=\"317\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27857%27%20height%3D%27317%27%20viewBox%3D%270%200%20857%20317%27%3E%3Crect%20width%3D%27857%27%20height%3D%27317%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow-200x74.webp 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow-300x111.webp 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow-400x148.webp 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow-600x222.webp 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow-768x284.webp 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow-800x296.webp 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/CMP-slurry-qualification-flow.webp 857w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 857px) 100vw, 857px\" \/><\/figcaption><\/figure>\n<p><!-- ================= Section 13 ================= --><\/p>\n<h2 id=\"summary\">13.\u5de5\u7a0b\u603b\u7ed3<\/h2>\n<p>\u9009\u62e9 CMP \u6d46\u6599\u662f\u4e00\u9879\u5de5\u7a0b\u51b3\u7b56\uff0c\u800c\u975e\u91c7\u8d2d\u9009\u62e9\u3002\u6700\u4f73\u6d46\u6599\u5e94\u5728\u660e\u786e\u5b9a\u4e49\u7684\u5de5\u827a\u7a97\u53e3\u5185\u5e73\u8861\u6027\u80fd\u3001\u7a33\u5b9a\u6027\u3001\u7f3a\u9677\u7387\u548c\u53ef\u5236\u9020\u6027\u3002.<\/p>\n<p>\u4e25\u8c28\u7684\u9009\u62e9\u65b9\u6cd5\u53ef\u964d\u4f4e\u6536\u76ca\u98ce\u9669\u3001\u52a0\u5feb\u6295\u4ea7\u901f\u5ea6\u5e76\u964d\u4f4e\u603b\u62e5\u6709\u6210\u672c\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; An Engineering-Level Decision Framework for Semiconductor Wafer Polishing Table of Contents 1. Introduction 2. First-Principles Approach to Slurry Selection 3. Wafer Material Considerations 4. Matching Slurry Type to CMP  &#8230;<\/p>","protected":false},"author":1,"featured_media":1085,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1066","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1066","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=1066"}],"version-history":[{"count":5,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1066\/revisions"}],"predecessor-version":[{"id":1136,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1066\/revisions\/1136"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/1085"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=1066"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=1066"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=1066"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}