{"id":1298,"date":"2026-01-12T10:43:57","date_gmt":"2026-01-12T02:43:57","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1298"},"modified":"2026-01-12T10:49:50","modified_gmt":"2026-01-12T02:49:50","slug":"wax-free-vs-wax-polishing-pads-in-cmp-processing","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/wax-free-vs-wax-polishing-pads-in-cmp-processing\/","title":{"rendered":"CMP \u52a0\u5de5\u4e2d\u7684\u65e0\u8721\u629b\u5149\u57ab\u4e0e\u6709\u8721\u629b\u5149\u57ab\u7684\u6bd4\u8f83"},"content":{"rendered":"<p>\u5728\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\uff08CMP\uff09\u8fc7\u7a0b\u4e2d\uff0c\u629b\u5149\u57ab\u4e0d\u4ec5\u4ec5\u662f\u4e00\u4e2a\u6d88\u8017\u54c1\u8868\u9762\uff0c\u800c\u662f\u4e00\u4e2a\u5173\u952e\u7684\u5de5\u827a\u7ec4\u4ef6\uff0c\u5b83\u76f4\u63a5\u5f71\u54cd\u6676\u7247\u7684\u5e73\u5766\u5ea6\u3001\u6750\u6599\u53bb\u9664\u7387\uff08MRR\uff09\u3001\u7f3a\u9677\u7387\u3001\u4ea7\u91cf\u7a33\u5b9a\u6027\u548c\u603b\u4f53\u62e5\u6709\u6210\u672c\uff08CoO\uff09\u3002\u73b0\u6709\u7684\u629b\u5149\u57ab\u7ed3\u6784\u5305\u62ec, <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/wax-free-cmp-polishing-pads-for-semiconductor-manufacturing\/\" target=\"_blank\" rel=\"noopener\">\u65e0\u8721 CMP \u629b\u5149\u57ab<\/a> \u548c\u4f20\u7edf\u8721\u57fa\u629b\u5149\u57ab\u5728\u6676\u7247\u56fa\u5b9a\u3001\u529b\u4f20\u9012\u548c\u6c61\u67d3\u63a7\u5236\u65b9\u9762\u4ee3\u8868\u4e86\u4e24\u79cd\u6839\u672c\u4e0d\u540c\u7684\u7406\u5ff5\u3002.<\/p>\n<p>\u672c\u9875\u5bf9\u65e0\u8721\u629b\u5149\u57ab\u548c\u6709\u8721\u629b\u5149\u57ab\u8fdb\u884c\u4e86\u5de5\u7a0b\u5c42\u9762\u7684\u6bd4\u8f83\uff0c\u91cd\u70b9\u5173\u6ce8\u7ed3\u6784\u8bbe\u8ba1\u3001\u5438\u9644\u673a\u5236\u3001\u5de5\u827a\u884c\u4e3a\u3001\u7f3a\u9677\u98ce\u9669\u3001\u7ef4\u62a4\u590d\u6742\u6027\u548c\u957f\u671f\u5236\u9020\u7ecf\u6d4e\u6027\u3002\u76ee\u7684\u662f\u652f\u6301\u4ee5\u6570\u636e\u4e3a\u5bfc\u5411\u7684\u51b3\u7b56\uff0c\u800c\u975e\u9ad8\u5c42\u6b21\u7684\u5e02\u573a\u5ba3\u4f20\u3002.<\/p>\n<p><!-- Table of Contents --><\/p>\n<nav>\n<h2>\u76ee\u5f55<\/h2>\n<ul>\n<li><a href=\"#structural-differences\">\u65e0\u8721\u548c\u6709\u8721\u57ab\u7684\u7ed3\u6784\u5dee\u5f02<\/a><\/li>\n<li><a href=\"#adsorption-mechanisms\">\u6676\u7247\u56fa\u5b9a\u548c\u5438\u9644\u673a\u5236<\/a><\/li>\n<li><a href=\"#process-performance\">CMP \u5de5\u827a\u6027\u80fd\u6bd4\u8f83<\/a><\/li>\n<li><a href=\"#defect-contamination\">\u7f3a\u9677\u548c\u6c61\u67d3\u98ce\u9669<\/a><\/li>\n<li><a href=\"#maintenance-cost\">\u7ef4\u62a4\u3001\u6d88\u8017\u54c1\u548c\u6210\u672c\u6a21\u578b<\/a><\/li>\n<li><a href=\"#decision-guidelines\">\u5de5\u7a0b\u51b3\u7b56\u6307\u5357<\/a><\/li>\n<li><a href=\"#application-scenarios\">\u5178\u578b\u5e94\u7528\u573a\u666f<\/a><\/li>\n<\/ul>\n<\/nav>\n<h2 id=\"structural-differences\">\u65e0\u8721\u548c\u6709\u8721\u57ab\u7684\u7ed3\u6784\u5dee\u5f02<\/h2>\n<p>\u65e0\u8721\u629b\u5149\u57ab\u4e0e\u8721\u57fa\u629b\u5149\u57ab\u4e4b\u95f4\u6700\u6839\u672c\u7684\u533a\u522b\u5728\u4e8e\u5982\u4f55\u5b9e\u73b0\u6676\u7247\u56fa\u5b9a\u5e76\u5c06\u5176\u6574\u5408\u5230\u629b\u5149\u57ab\u7ed3\u6784\u4e2d\u3002\u8fd9\u79cd\u7ed3\u6784\u4e0a\u7684\u5dee\u5f02\u51e0\u4e4e\u5f71\u54cd\u5230 CMP \u5de5\u827a\u884c\u4e3a\u7684\u65b9\u65b9\u9762\u9762\u3002.<\/p>\n<h3>\u8721\u57fa\u629b\u5149\u57ab\u7ed3\u6784<\/h3>\n<p>\u8721\u57fa\u7cfb\u7edf\u662f\u5728\u6676\u7247\u80cc\u9762\u548c\u629b\u5149\u8f7d\u4f53\u6216\u629b\u5149\u57ab\u8868\u9762\u4e4b\u95f4\u6d82\u4e0a\u4e00\u5c42\u70ed\u5851\u6027\u6216\u70ed\u56fa\u6027\u8721\u3002\u5178\u578b\u7684\u8721\u6750\u6599\u5305\u62ec\u8f6f\u5316\u6e29\u5ea6\u5728 60-90\u00b0C \u4e4b\u95f4\u7684\u70c3\u57fa\u8721\u6216\u805a\u5408\u7269\u6539\u6027\u8721\u6df7\u5408\u7269\u3002.<\/p>\n<ul>\n<li>\u4f5c\u4e3a\u7c98\u5408\u754c\u9762\u7684\u79bb\u6563\u8721\u5c42<\/li>\n<li>\u8721\u539a\u5ea6\u4e00\u822c\u4e3a 50-150 \u03bcm<\/li>\n<li>\u7c98\u5408\u65f6\u9700\u8981\u52a0\u70ed\uff0c\u56fa\u5b9a\u65f6\u9700\u8981\u51b7\u5374<\/li>\n<li>\u673a\u68b0\u987a\u5e94\u6027\u968f\u6e29\u5ea6\u53d8\u5316<\/li>\n<\/ul>\n<p>\u8fd9\u79cd\u65b9\u6cd5\u5728 CMP \u53e0\u5c42\u4e2d\u5f15\u5165\u4e86\u5bf9\u6e29\u5ea6\u654f\u611f\u7684\u975e\u5747\u5300\u5939\u5c42\uff0c\u76f4\u63a5\u5f71\u54cd\u4e86\u538b\u529b\u4f20\u8f93\u548c\u6676\u7247\u5e73\u9762\u5ea6\u63a7\u5236\u3002.<\/p>\n<h3>\u65e0\u8721\u629b\u5149\u57ab\u7ed3\u6784<\/h3>\n<p>\u65e0\u8721\u629b\u5149\u57ab\u5b8c\u5168\u6d88\u9664\u4e86\u8721\u5c42\uff0c\u800c\u662f\u5c06\u5438\u9644\u529f\u80fd\u76f4\u63a5\u96c6\u6210\u5230\u629b\u5149\u57ab\u4e3b\u4f53\u6216\u5e95\u5c42\u4e2d\u3002\u5438\u9644\u673a\u5236\u53ef\u5305\u62ec\u771f\u7a7a\u5fae\u901a\u9053\u3001\u6bdb\u7ec6\u5438\u529b\u6216\u5de5\u7a0b\u5fae\u5b54\u7ed3\u6784\u3002.<\/p>\n<ul>\n<li>\u65e0\u5916\u90e8\u7c98\u5408\u5242\u6216\u7c98\u5408\u6750\u6599<\/li>\n<li>\u5438\u9644\u7ed3\u6784\u4e0e\u886c\u57ab\u5fae\u7ed3\u6784\u878d\u4e3a\u4e00\u4f53<\/li>\n<li>\u6676\u7247\u4e0e\u710a\u76d8\u4e4b\u95f4\u7684\u76f4\u63a5\u673a\u68b0\u8026\u5408<\/li>\n<li>\u70ed\u7a33\u5b9a\u56fa\u5b9a\u884c\u4e3a<\/li>\n<\/ul>\n<p>\u5173\u4e8e\u5438\u9644\u7ed3\u6784\u7684\u66f4\u6df1\u5165\u8ba8\u8bba\uff0c\u8bf7\u53c2\u9605 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/how-wax-free-polishing-pads-work-in-cmp-processes\/\" target=\"_blank\" rel=\"noopener\">\u65e0\u8721\u5438\u9644\u629b\u5149\u57ab\u6280\u672f<\/a>.<\/p>\n<p><!-- Image Placeholder --><\/p>\n<h2 id=\"adsorption-mechanisms\">\u6676\u7247\u56fa\u5b9a\u548c\u5438\u9644\u673a\u5236<\/h2>\n<p>\u6676\u7247\u56fa\u5b9a\u51b3\u5b9a\u4e86\u629b\u5149\u538b\u529b\u3001\u526a\u5207\u529b\u548c\u7814\u78e8\u6db2\u5f15\u8d77\u7684\u6d41\u4f53\u52a8\u529b\u5728 CMP \u8fc7\u7a0b\u4e2d\u7684\u4f20\u9012\u65b9\u5f0f\u3002\u56fa\u5b9a\u673a\u5236\u7684\u4e0d\u540c\u4f1a\u5bfc\u81f4\u629b\u5149\u5747\u5300\u6027\u548c\u7f3a\u9677\u8868\u73b0\u51fa\u73b0\u53ef\u6d4b\u91cf\u7684\u5dee\u5f02\u3002.<\/p>\n<h3>\u8721\u57fa\u56fa\u5b9a\u884c\u4e3a<\/h3>\n<p>\u8721\u56fa\u5b9a\u4f9d\u8d56\u4e8e\u7c98\u5408\u5f3a\u5ea6\uff0c\u800c\u7c98\u5408\u5f3a\u5ea6\u662f\u8721\u7c98\u5ea6\u3001\u7c98\u5408\u6e29\u5ea6\u548c\u51b7\u5374\u901f\u5ea6\u7684\u51fd\u6570\u3002\u8fd9\u5c31\u5e26\u6765\u4e86\u51e0\u4e2a\u53d8\u91cf\uff1a<\/p>\n<ul>\n<li>\u7c98\u63a5\u5f3a\u5ea6\u968f\u6e29\u5ea6\u6f02\u79fb\u800c\u964d\u4f4e<\/li>\n<li>\u5c40\u90e8\u539a\u5ea6\u53d8\u5316\u5bfc\u81f4\u538b\u529b\u4e0d\u5747\u5300<\/li>\n<li>\u957f\u629b\u5149\u5468\u671f\u4e0b\u7684\u8721\u8815\u53d8<\/li>\n<\/ul>\n<p>\u56e0\u6b64\uff0c\u6676\u7247\u80cc\u9762\u7684\u5e73\u6574\u5ea6\u53ef\u80fd\u4f1a\u53d7\u5230\u5f71\u54cd\uff0c\u5c24\u5176\u662f\u5728\u957f\u65f6\u95f4\u6216\u591a\u6b65\u9aa4 CMP \u5de5\u827a\u4e2d\u3002.<\/p>\n<h3>\u65e0\u8721\u5438\u9644\u56fa\u5b9a<\/h3>\n<p>\u65e0\u8721\u886c\u57ab\u901a\u8fc7\u5206\u5e03\u5f0f\u5438\u9644\u529b\u5b9e\u73b0\u6676\u7247\u56fa\u5b9a\u3002\u4e0e\u7c98\u5408\u5242\u7c98\u5408\u4e0d\u540c\uff0c\u5438\u9644\u529b\u53ef\u63d0\u4f9b<\/p>\n<ul>\n<li>\u5747\u5300\u7684\u6cd5\u5411\u529b\u5206\u5e03<\/li>\n<li>\u65e0\u9700\u70ed\u5faa\u73af\u7acb\u5373\u56fa\u5b9a<\/li>\n<li>\u53ef\u91cd\u590d\u7684\u6676\u5706\u5939\u6301\u529b<\/li>\n<\/ul>\n<p>\u5178\u578b\u7684\u5438\u9644\u538b\u529b\u8303\u56f4\u4e3a 5-25 kPa\uff0c\u5177\u4f53\u53d6\u51b3\u4e8e\u5438\u9644\u57ab\u7684\u8bbe\u8ba1\u3001\u5fae\u901a\u9053\u5bc6\u5ea6\u548c\u771f\u7a7a\u914d\u7f6e\u3002.<\/p>\n<p><!-- Table Placeholder --><\/p>\n<table border=\"1\">\n<tbody>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u8721\u57ab<\/th>\n<th>\u65e0\u8721\u62a4\u57ab<\/th>\n<\/tr>\n<tr>\n<td>\u56fa\u5b9a\u539f\u7406<\/td>\n<td>\u70ed\u7c98\u5408\u5242\u7c98\u63a5<\/td>\n<td>\u7269\u7406\u5438\u9644<\/td>\n<\/tr>\n<tr>\n<td>\u70ed\u7075\u654f\u5ea6<\/td>\n<td>\u9ad8<\/td>\n<td>\u4f4e<\/td>\n<\/tr>\n<tr>\n<td>\u56fa\u5b9a\u91cd\u590d\u6027<\/td>\n<td>\u4e2d\u578b<\/td>\n<td>\u9ad8<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 id=\"process-performance\">CMP \u5de5\u827a\u6027\u80fd\u6bd4\u8f83<\/h2>\n<p>\u4ece\u5de5\u7a0b\u89d2\u5ea6\u6765\u770b\uff0cCMP \u6027\u80fd\u662f\u901a\u8fc7\u53ef\u6d4b\u91cf\u7684\u6307\u6807\u6765\u8bc4\u4f30\u7684\uff0c\u5982 MRR \u7a33\u5b9a\u6027\u3001\u6676\u7247\u5185\u4e0d\u5747\u5300\u6027 (WIWNU) \u548c\u968f\u65f6\u95f4\u53d8\u5316\u7684\u5de5\u827a\u6f02\u79fb\u3002.<\/p>\n<h3>\u6750\u6599\u53bb\u9664\u7387\u7a33\u5b9a\u6027<\/h3>\n<p>\u7531\u4e8e\u8721\u8f6f\u5316\u3001\u538b\u7f29\u548c\u8d1f\u8f7d\u4e0b\u7684\u9010\u6e10\u518d\u5206\u5e03\uff0c\u8721\u57fa\u7cfb\u7edf\u901a\u5e38\u4f1a\u51fa\u73b0 MRR \u6f02\u79fb\u3002\u65e0\u8721\u886c\u57ab\u5219\u7531\u4e8e\u76f4\u63a5\u673a\u68b0\u8026\u5408\u800c\u8868\u73b0\u51fa\u66f4\u7a33\u5b9a\u7684 MRR \u6027\u80fd\u3002.<\/p>\n<p>\u5178\u578b\u7684\u89c2\u5bdf\u5230\u7684 MRR \u53d8\u5316\uff1a<\/p>\n<ul>\n<li>\u8721\u57fa\u57ab\uff1a\u00b16-10%<\/li>\n<li>\u65e0\u8721\u57ab\uff1a\u00b12-4%<\/li>\n<\/ul>\n<h3>\u5e73\u9762\u5ea6\u548c\u8fb9\u7f18\u63a7\u5236<\/h3>\n<p>\u7531\u4e8e\u538b\u529b\u4f20\u9012\u5747\u5300\uff0c\u65e0\u8721\u886c\u57ab\u901a\u5e38\u80fd\u6539\u5584\u8fb9\u7f18\u6392\u963b\u63a7\u5236\uff0c\u8fd9\u5bf9\u4e8e\u53ef\u7528\u6676\u5706\u9762\u79ef\u53d7\u5230\u4e25\u683c\u9650\u5236\u7684\u5148\u8fdb\u8282\u70b9\u81f3\u5173\u91cd\u8981\u3002.<\/p>\n<p><!-- Video Placeholder --><\/p>\n<div><div class=\"fusion-video fusion-youtube\" style=\"--awb-max-width:600px;--awb-max-height:350px;\"><div class=\"video-shortcode\"><div class=\"fluid-width-video-wrapper\" style=\"padding-top:58.33%;\" ><iframe class=\"lazyload\" title=\"YouTube \u89c6\u9891\u64ad\u653e\u5668 1\" src=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27600%27%20height%3D%27350%27%20viewBox%3D%270%200%20600%20350%27%3E%3Crect%20width%3D%27600%27%20height%3D%27350%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-orig-src=\"https:\/\/www.youtube.com\/embed\/zCYxnyxAQDw?wmode=transparent&autoplay=0\" width=\"600\" height=\"350\" allowfullscreen allow=\"autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture;\"><\/iframe><\/div><\/div><\/div><\/div>\n<h2 id=\"defect-contamination\">\u7f3a\u9677\u548c\u6c61\u67d3\u98ce\u9669<\/h2>\n<p>\u7f3a\u9677\u63a7\u5236\u662f\u884c\u4e1a\u8f6c\u5411\u65e0\u8721 CMP \u7cfb\u7edf\u7684\u4e3b\u8981\u9a71\u52a8\u529b\u3002.<\/p>\n<h3>\u4e0e\u8721\u6709\u5173\u7684\u6c61\u67d3\u98ce\u9669<\/h3>\n<ul>\n<li>\u6676\u7247\u80cc\u9762\u7684\u8721\u6b8b\u7559\u7269<\/li>\n<li>\u6709\u673a\u6c61\u67d3\u7269\u8fc1\u79fb\u5230\u6b63\u9762<\/li>\n<li>\u9664\u8721\u8fc7\u7a0b\u4e2d\u4ea7\u751f\u7684\u5fae\u7c92<\/li>\n<\/ul>\n<p>\u8fd9\u4e9b\u98ce\u9669\u589e\u52a0\u4e86\u6e05\u6d17\u7684\u590d\u6742\u6027\uff0c\u5e76\u53ef\u80fd\u964d\u4f4e\u6210\u54c1\u7387\uff0c\u5c24\u5176\u662f\u5728\u94dc\u548c\u9ad8\u7ea7\u7535\u4ecb\u8d28 CMP \u6b65\u9aa4\u4e2d\u3002.<\/p>\n<h3>\u65e0\u8721\u6e05\u6d01\u4f18\u52bf<\/h3>\n<p>\u65e0\u8721\u7cfb\u7edf\u5b8c\u5168\u6d88\u9664\u4e86\u6709\u673a\u7c98\u5408\u5242\u6b8b\u7559\u7269\uff0c\u7b80\u5316\u4e86 CMP \u540e\u7684\u6e05\u6d01\u5de5\u4f5c\uff0c\u964d\u4f4e\u4e86\u7f3a\u9677\u5bc6\u5ea6\uff0c\u5c24\u5176\u662f\u5fae\u5212\u75d5\u548c\u6709\u673a\u8584\u819c\u3002.<\/p>\n<h2 id=\"maintenance-cost\">\u7ef4\u62a4\u3001\u6d88\u8017\u54c1\u548c\u6210\u672c\u6a21\u578b<\/h2>\n<p>\u867d\u7136\u8721\u57fa\u886c\u57ab\u5728\u521d\u6b21\u8d2d\u4e70\u65f6\u770b\u8d77\u6765\u6210\u672c\u8f83\u4f4e\uff0c\u4f46\u603b\u62e5\u6709\u6210\u672c\u5374\u663e\u793a\u51fa\u4e0d\u540c\u7684\u60c5\u51b5\u3002.<\/p>\n<h3>\u8721\u57fa\u7cfb\u7edf\u6210\u672c<\/h3>\n<ul>\n<li>\u8721\u6750\u6599\u6d88\u8017\u91cf<\/li>\n<li>\u4f9b\u6696\u548c\u5236\u51b7\u80fd\u6e90<\/li>\n<li>\u5176\u4ed6\u6e05\u6d01\u6b65\u9aa4<\/li>\n<li>\u505c\u673a\u65f6\u95f4\u589e\u52a0<\/li>\n<\/ul>\n<h3>\u65e0\u8721\u7cfb\u7edf\u7ecf\u6d4e\u5b66<\/h3>\n<p>\u65e0\u8721\u886c\u57ab\u51cf\u5c11\u4e86\u8f85\u52a9\u6d88\u8017\u54c1\uff0c\u7b80\u5316\u4e86\u5de5\u827a\u6d41\u7a0b\uff0c\u56e0\u6b64\u5c3d\u7ba1\u886c\u57ab\u7684\u521d\u59cb\u4ef7\u683c\u8f83\u9ad8\uff0c\u4f46\u957f\u671f\u8fd0\u8425\u6210\u672c\u5374\u8f83\u4f4e\u3002.<\/p>\n<h2 id=\"decision-guidelines\">\u5de5\u7a0b\u51b3\u7b56\u6307\u5357<\/h2>\n<p>\u5e94\u8003\u8651\u65e0\u8721\u629b\u5149\u57ab\u548c\u6709\u8721\u629b\u5149\u57ab\u4e4b\u95f4\u7684\u9009\u62e9\uff1a<\/p>\n<ul>\n<li>\u8282\u70b9\u6280\u672f\u548c\u5e73\u9762\u5ea6\u8981\u6c42<\/li>\n<li>\u7f3a\u9677\u5bc6\u5ea6\u654f\u611f\u6027<\/li>\n<li>\u5de5\u827a\u6e29\u5ea6\u7a97\u53e3<\/li>\n<li>\u8bbe\u5907\u517c\u5bb9\u6027<\/li>\n<\/ul>\n<p>\u5bf9\u4e8e\u4ee5\u5148\u8fdb\u903b\u8f91\u3001\u5185\u5b58\u6216\u9ad8\u4ea7\u94dc CMP \u4e3a\u76ee\u6807\u7684\u5de5\u5382\u6765\u8bf4\uff0c\u65e0\u8721\u57ab\u6b63\u9010\u6e10\u6210\u4e3a\u9ed8\u8ba4\u9009\u62e9\u3002.<\/p>\n<h2 id=\"application-scenarios\">\u5178\u578b\u5e94\u7528\u573a\u666f<\/h2>\n<p>\u65e0\u8721\u629b\u5149\u57ab\u901a\u5e38\u5728\u4ee5\u4e0b\u9886\u57df\u88ab\u91c7\u7528\uff1a<\/p>\n<ul>\n<li>\u94dc CMP<\/li>\n<li>\u4f4e\u4ecb\u7535 CMP<\/li>\n<li>\u5148\u8fdb\u7684\u5305\u88c5\u5de5\u827a<\/li>\n<\/ul>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>In chemical mechanical planarization (CMP), the polishing pad is not merely a consumable surface but a critical process component that directly affects wafer flatness, material removal rate (MRR), defectivity, yield  &#8230;<\/p>","protected":false},"author":1,"featured_media":1315,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1298","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1298","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=1298"}],"version-history":[{"count":5,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1298\/revisions"}],"predecessor-version":[{"id":1335,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1298\/revisions\/1335"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/1315"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=1298"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=1298"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=1298"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}