{"id":1302,"date":"2026-01-12T10:46:20","date_gmt":"2026-01-12T02:46:20","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1302"},"modified":"2026-01-12T10:54:52","modified_gmt":"2026-01-12T02:54:52","slug":"cmp-polishing-pad-materials-and-structure-explained","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-polishing-pad-materials-and-structure-explained\/","title":{"rendered":"CMP \u7814\u78e8\u57ab\u6750\u6599\u548c\u7ed3\u6784\u8bf4\u660e"},"content":{"rendered":"<p>\u5728 CMP \u4e2d\uff0c\u629b\u5149\u57ab\u6750\u6599\u51b3\u5b9a\u4e86\u57fa\u672c\u7684\u673a\u68b0\u3001\u5316\u5b66\u548c\u6469\u64e6\u5b66\u76f8\u4e92\u4f5c\u7528\uff0c\u6700\u7ec8\u51b3\u5b9a\u4e86\u5e73\u9762\u5316\u6548\u7387\u3001\u7f3a\u9677\u7387\u548c\u5de5\u827a\u7a33\u5b9a\u6027\u3002\u5bf9\u4e8e <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/wax-free-cmp-polishing-pads-for-semiconductor-manufacturing\/\" target=\"_blank\" rel=\"noopener\">\u65e0\u8721 CMP \u629b\u5149\u57ab<\/a>, \u7531\u4e8e\u6676\u7247\u7684\u56fa\u5b9a\u3001\u529b\u7684\u4f20\u9012\u548c\u6d46\u6599\u7684\u76f8\u4e92\u4f5c\u7528\u662f\u7531\u886c\u57ab\u7684\u4f53\u79ef\u548c\u8868\u9762\u7279\u6027\u800c\u4e0d\u662f\u8f85\u52a9\u8721\u5c42\u76f4\u63a5\u51b3\u5b9a\u7684\uff0c\u56e0\u6b64\u6750\u6599\u7684\u9009\u62e9\u53d8\u5f97\u66f4\u52a0\u91cd\u8981\u3002.<\/p>\n<p>\u672c\u6587\u4ef6\u5bf9 CMP \u7814\u78e8\u57ab\u6750\u6599\u8fdb\u884c\u4e86\u6750\u6599\u529b\u5b66\u5c42\u9762\u7684\u5206\u6790\uff0c\u91cd\u70b9\u5173\u6ce8\u805a\u5408\u7269\u4f53\u7cfb\u3001\u5fae\u7ed3\u6784\u8bbe\u8ba1\u3001\u673a\u68b0\u53c2\u6570\u3001\u78e8\u635f\u884c\u4e3a\u53ca\u5176\u5bf9\u65e0\u8721\u7814\u78e8\u57ab\u7ed3\u6784\u7684\u5177\u4f53\u5f71\u54cd\u3002.<\/p>\n<nav>\n<h2>\u76ee\u5f55<\/h2>\n<ul>\n<li><a href=\"#material-overview\">CMP \u7814\u78e8\u57ab\u6750\u6599\u6982\u8ff0<\/a><\/li>\n<li><a href=\"#polymer-chemistry\">\u805a\u5408\u7269\u5316\u5b66\u4e0e\u57fa\u8d28\u8bbe\u8ba1<\/a><\/li>\n<li><a href=\"#microstructure\">\u5fae\u7ed3\u6784\u548c\u5b54\u9699\u5ea6\u5de5\u7a0b<\/a><\/li>\n<li><a href=\"#mechanical-properties\">\u673a\u68b0\u7279\u6027\u548c\u8f7d\u8377\u4f20\u9012<\/a><\/li>\n<li><a href=\"#slurry-interaction\">\u6750\u6599\u4e0e CMP \u6ce5\u6d46\u7684\u76f8\u4e92\u4f5c\u7528<\/a><\/li>\n<li><a href=\"#wear-lifetime\">\u78e8\u635f\u673a\u5236\u548c\u886c\u57ab\u5bff\u547d<\/a><\/li>\n<li><a href=\"#material-selection\">\u65e0\u8721\u62a4\u57ab\u6750\u6599\u9009\u62e9\u6307\u5357<\/a><\/li>\n<\/ul>\n<\/nav>\n<h2 id=\"material-overview\">CMP \u7814\u78e8\u57ab\u6750\u6599\u6982\u8ff0<\/h2>\n<p>CMP \u7814\u78e8\u57ab\u901a\u5e38\u7531\u5de5\u7a0b\u805a\u5408\u7269\u7cfb\u7edf\u5236\u6210\uff0c\u65e8\u5728\u5e73\u8861\u5f39\u6027\u3001\u786c\u5ea6\u3001\u8010\u5316\u5b66\u6027\u548c\u78e8\u635f\u7a33\u5b9a\u6027\u3002\u4e0e\u4f20\u7edf\u7684\u7814\u78e8\u6216\u6253\u78e8\u57ab\u4e0d\u540c\uff0cCMP \u7814\u78e8\u57ab\u5fc5\u987b\u5728\u6301\u7eed\u7684\u673a\u68b0\u548c\u5316\u5b66\u4fb5\u8680\u4e0b\u4fdd\u6301\u53ef\u63a7\u7684\u8868\u9762\u7ed3\u6784\u3002.<\/p>\n<p>\u6700\u5e38\u7528\u7684 CMP \u886c\u57ab\u6750\u6599\u7cfb\u5217\u5305\u62ec<\/p>\n<ul>\n<li>\u805a\u6c28\u916f\uff08PU\uff09\u548c\u805a\u6c28\u916f\u6df7\u5408\u7269<\/li>\n<li>\u805a\u6c28\u916f-\u5c3f\u7d20\u6df7\u5408\u7cfb\u7edf<\/li>\n<li>\u542b\u65e0\u673a\u6539\u6027\u5242\u7684\u586b\u5145\u805a\u5408\u7269\u590d\u5408\u6750\u6599<\/li>\n<\/ul>\n<p>\u5728\u65e0\u8721\u57ab\u4e2d\uff0c\u8fd9\u4e9b\u6750\u6599\u8fd8\u5fc5\u987b\u652f\u6301\u96c6\u6210\u7684\u5438\u9644\u7ed3\u6784\uff0c\u56e0\u6b64\u6574\u4e2a\u57ab\u539a\u5ea6\u7684\u5747\u5300\u6027\u3001\u6e17\u900f\u6027\u548c\u7ed3\u6784\u5b8c\u6574\u6027\u81f3\u5173\u91cd\u8981\u3002.<\/p>\n<h2 id=\"polymer-chemistry\">\u805a\u5408\u7269\u5316\u5b66\u4e0e\u57fa\u8d28\u8bbe\u8ba1<\/h2>\n<p>\u805a\u6c28\u916f\u7cfb\u7edf\u5728 CMP \u7814\u78e8\u57ab\u5236\u9020\u4e2d\u5360\u4e3b\u5bfc\u5730\u4f4d\uff0c\u8fd9\u662f\u56e0\u4e3a\u5b83\u4eec\u5177\u6709\u53ef\u8c03\u6574\u7684\u673a\u68b0\u6027\u80fd\u548c\u5728\u8f83\u5bbd pH \u503c\u8303\u56f4\u5185\u7684\u5316\u5b66\u7a33\u5b9a\u6027\u3002\u901a\u8fc7\u8c03\u6574\u786c\u6bb5\u4e0e\u8f6f\u6bb5\u7684\u6bd4\u4f8b\uff0c\u629b\u5149\u57ab\u8bbe\u8ba1\u4eba\u5458\u53ef\u4ee5\u7cbe\u786e\u63a7\u5236\u5f39\u6027\u6a21\u91cf\u3001\u56de\u5f39\u884c\u4e3a\u548c\u8010\u78e8\u6027\u3002.<\/p>\n<p>\u5178\u578b\u7684\u805a\u5408\u7269\u5316\u5b66\u53c2\u6570\u5305\u62ec<\/p>\n<ul>\n<li>\u786c\u6bb5\u5185\u5bb9\uff1a30-55%<\/li>\n<li>\u73bb\u7483\u8f6c\u5316\u6e29\u5ea6 (Tg)\uff1a-20\u00b0C \u81f3 +30\u00b0C<\/li>\n<li>\u4e3a\u63a7\u5236\u7c98\u5f39\u6027\u800c\u5b9a\u5236\u7684\u4ea4\u8054\u5bc6\u5ea6<\/li>\n<\/ul>\n<p>\u5bf9\u4e8e\u65e0\u8721\u5438\u9644\u57ab\uff0c\u805a\u5408\u7269\u57fa\u8d28\u8fd8\u5fc5\u987b\u5728\u5c40\u90e8\u771f\u7a7a\u6216\u6bdb\u7ec6\u529b\u4f5c\u7528\u4e0b\u4fdd\u6301\u5c3a\u5bf8\u7a33\u5b9a\uff0c\u9632\u6b62\u5438\u9644\u901a\u9053\u53d1\u751f\u5fae\u584c\u9677\u3002.<\/p>\n<p><!-- Image Placeholder --><\/p>\n<div><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-1321\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads.webp\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads.webp\" alt=\"Polymer chemistry and segment structure in CMP polishing pads\" width=\"1787\" height=\"1061\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%271787%27%20height%3D%271061%27%20viewBox%3D%270%200%201787%201061%27%3E%3Crect%20width%3D%271787%27%20height%3D%271061%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-200x119.webp 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-300x178.webp 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-400x237.webp 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-600x356.webp 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-768x456.webp 768w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-800x475.webp 800w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-1024x608.webp 1024w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-1200x712.webp 1200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads-1536x912.webp 1536w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2026\/01\/Polymer-chemistry-and-segment-structure-in-CMP-polishing-pads.webp 1787w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 1787px) 100vw, 1787px\" \/><\/div>\n<h2 id=\"microstructure\">\u5fae\u7ed3\u6784\u548c\u5b54\u9699\u5ea6\u5de5\u7a0b<\/h2>\n<p>\u5fae\u89c2\u7ed3\u6784\u53ef\u4ee5\u8bf4\u662f\u5f71\u54cd CMP \u7814\u78e8\u57ab\u6027\u80fd\u7684\u6700\u5173\u952e\u56e0\u7d20\u3002\u5b54\u5f84\u5206\u5e03\u3001\u5b54\u9699\u8fde\u901a\u6027\u548c\u8868\u9762\u7c97\u7cd9\u5ea6\u51e0\u4f55\u5f62\u72b6\u5171\u540c\u51b3\u5b9a\u4e86\u6d46\u6599\u8f93\u9001\u3001\u788e\u5c51\u6392\u7a7a\u548c\u5b9e\u9645\u63a5\u89e6\u9762\u79ef\u3002.<\/p>\n<p>\u65e0\u8721\u629b\u5149\u57ab\u901a\u5e38\u5177\u6709\u5de5\u7a0b\u5fae\u5b54\u7f51\u7edc\uff1a<\/p>\n<ul>\n<li>\u5e73\u5747\u5b54\u5f8410-80 \u03bcm<\/li>\n<li>\u53d7\u63a7\u5f00\u653e\u5b54\u9699\u738730-60%<\/li>\n<li>\u5b9a\u5411\u6216\u5404\u5411\u540c\u6027\u5b54\u9699\u8fde\u901a\u6027<\/li>\n<\/ul>\n<p>\u8fd9\u4e9b\u5fae\u7ed3\u6784\u5177\u6709\u53cc\u91cd\u529f\u80fd\uff1a\u65e2\u80fd\u5b9e\u73b0\u9ad8\u6548\u7684\u6d46\u6599\u8f93\u9001\uff0c\u53c8\u80fd\u652f\u6301\u57fa\u4e8e\u5438\u9644\u529b\u7684\u6676\u7247\u56fa\u5b9a\uff0c\u8be6\u60c5\u8bf7\u53c2\u89c1 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/wax-free-adsorption-polishing-pad-technology\/\" target=\"_blank\" rel=\"noopener\">\u65e0\u8721\u5438\u9644\u629b\u5149\u57ab\u6280\u672f<\/a>.<\/p>\n<table border=\"1\">\n<tbody>\n<tr>\n<th>\u5fae\u89c2\u7ed3\u6784\u53c2\u6570<\/th>\n<th>\u5178\u578b\u8303\u56f4<\/th>\n<th>\u529f\u80fd<\/th>\n<\/tr>\n<tr>\n<td>\u5b54\u5f84<\/td>\n<td>10-80 \u03bcm<\/td>\n<td>\u6ce5\u6d46\u8fd0\u8f93\u548c\u788e\u7247\u6e05\u9664<\/td>\n<\/tr>\n<tr>\n<td>\u5b54\u9699\u7387<\/td>\n<td>30-60%<\/td>\n<td>\u5408\u89c4\u6027\u548c\u5438\u9644\u80fd\u529b<\/td>\n<\/tr>\n<tr>\n<td>\u671d\u6c14\u9ad8\u5ea6<\/td>\n<td>5-30 \u03bcm<\/td>\n<td>\u63a5\u89e6\u673a\u68b0\u63a7\u5236<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 id=\"mechanical-properties\">\u673a\u68b0\u7279\u6027\u548c\u8f7d\u8377\u4f20\u9012<\/h2>\n<p>\u673a\u68b0\u7279\u6027\u51b3\u5b9a\u4e86\u629b\u5149\u538b\u529b\u5982\u4f55\u4ece\u8f7d\u4f53\u4f20\u9012\u5230\u6676\u7247\u8868\u9762\u3002\u5173\u952e\u53c2\u6570\u5305\u62ec\u786c\u5ea6\u3001\u5f39\u6027\u6a21\u91cf\u548c\u7c98\u5f39\u6027\u963b\u5c3c\u3002.<\/p>\n<p>\u5178\u578b\u7684\u65e0\u8721 CMP \u7814\u78e8\u57ab\u673a\u68b0\u8303\u56f4\uff1a<\/p>\n<ul>\n<li>\u90b5\u6c0f\u786c\u5ea6 D45-65<\/li>\n<li>\u5f39\u6027\u6a21\u91cf\uff1a50-300 \u5146\u5e15<\/li>\n<li>\u538b\u7f29\u96c6\uff1a&lt;10%<\/li>\n<\/ul>\n<p>\u4e0e\u8721\u57fa\u7cfb\u7edf\u76f8\u6bd4\uff0c\u65e0\u8721\u886c\u57ab\u53ef\u63d0\u4f9b\u66f4\u76f4\u63a5\u7684\u8d1f\u8f7d\u4f20\u9012\uff0c\u540c\u65f6\u51cf\u5c11\u80fd\u91cf\u6d88\u8017\uff0c\u4ece\u800c\u6539\u5584\u6676\u7247\u5185\u7684\u5747\u5300\u6027\u548c\u8fb9\u7f18\u63a7\u5236\uff0c\u5c24\u5176\u662f\u5728\u52a8\u6001\u629b\u5149\u6761\u4ef6\u4e0b\u3002.<\/p>\n<p><!-- Video Placeholder --><\/p>\n<h2 id=\"slurry-interaction\">\u6750\u6599\u4e0e CMP \u6ce5\u6d46\u7684\u76f8\u4e92\u4f5c\u7528<\/h2>\n<p>CMP \u6ce5\u6d46\u4f1a\u901a\u8fc7\u673a\u68b0\u78e8\u635f\u3001\u5316\u5b66\u4fb5\u8680\u548c\u9897\u7c92\u5d4c\u5165\u7b49\u65b9\u5f0f\u4e0e\u886c\u57ab\u6750\u6599\u4e0d\u65ad\u53d1\u751f\u4f5c\u7528\u3002\u4ece\u9178\u6027\u94dc\u6d46\u5230\u78b1\u6027\u6c27\u5316\u7269\u914d\u65b9\u7684\u5404\u79cd\u6d46\u6599\u5316\u5b66\u6210\u5206\u4e2d\uff0c\u805a\u5408\u7269\u5316\u5b66\u6210\u5206\u90fd\u5fc5\u987b\u5177\u6709\u6297\u81a8\u80c0\u3001\u6297\u6c34\u89e3\u548c\u6297\u8868\u9762\u964d\u89e3\u7684\u6027\u80fd\u3002.<\/p>\n<p>\u65e0\u8721\u886c\u57ab\u6750\u6599\u901a\u5e38\u91c7\u7528\u8868\u9762\u5904\u7406\u6216\u586b\u5145\u7269\u6765\u589e\u5f3a\u6548\u679c\uff1a<\/p>\n<ul>\n<li>\u8010\u5316\u5b66\u6027<\/li>\n<li>\u8868\u9762\u80fd\u91cf\u63a7\u5236<\/li>\n<li>\u51cf\u5c11\u9897\u7c92\u7c98\u9644<\/li>\n<\/ul>\n<p>\u7a33\u5b9a\u7684\u6d46\u6599\u76f8\u4e92\u4f5c\u7528\u76f4\u63a5\u6709\u52a9\u4e8e\u5b9e\u73b0\u53ef\u9884\u6d4b\u7684 MRR \u548c\u8f83\u4f4e\u7684\u7f3a\u9677\u7387\uff0c\u4ece\u800c\u5ef6\u957f\u886c\u57ab\u7684\u4f7f\u7528\u5bff\u547d\u3002.<\/p>\n<h2 id=\"wear-lifetime\">\u78e8\u635f\u673a\u5236\u548c\u886c\u57ab\u5bff\u547d<\/h2>\n<p>\u5728 CMP \u4e2d\uff0c\u7814\u78e8\u57ab\u7684\u78e8\u635f\u662f\u7531\u6d46\u6599\u9897\u7c92\u7684\u673a\u68b0\u78e8\u635f\u3001\u5316\u5b66\u964d\u89e3\u548c\u91d1\u521a\u77f3\u8c03\u8282\u5171\u540c\u9020\u6210\u7684\u3002\u5728\u65e0\u8721\u7cfb\u7edf\u4e2d\uff0c\u7531\u4e8e\u6ca1\u6709\u8721\u5f15\u8d77\u7684\u4e0a\u91c9\u6216\u6c61\u67d3\uff0c\u56e0\u6b64\u78e8\u635f\u884c\u4e3a\u66f4\u52a0\u5747\u5300\u3002.<\/p>\n<p>\u5e38\u89c1\u7684\u78e8\u635f\u673a\u5236\u5305\u62ec<\/p>\n<ul>\n<li>\u8868\u9762\u9010\u6e10\u53d8\u5e73<\/li>\n<li>\u5b54\u58c1\u4fb5\u8680<\/li>\n<li>\u5316\u5b66\u66b4\u9732\u4e0b\u7684\u805a\u5408\u7269\u94fe\u65ad\u88c2<\/li>\n<\/ul>\n<p>\u7cbe\u5fc3\u8bbe\u8ba1\u7684\u65e0\u8721\u57ab\u5177\u6709\u7ebf\u6027\u78e8\u635f\u7387\u548c\u53ef\u9884\u6d4b\u7684\u62a5\u5e9f\u884c\u4e3a\uff0c\u4ece\u800c\u7b80\u5316\u4e86\u9884\u9632\u6027\u7ef4\u62a4\u8ba1\u5212\u3002.<\/p>\n<h2 id=\"material-selection\">\u65e0\u8721\u62a4\u57ab\u6750\u6599\u9009\u62e9\u6307\u5357<\/h2>\n<p>\u65e0\u8721 CMP \u7814\u78e8\u57ab\u7684\u6750\u6599\u9009\u62e9\u5e94\u7b26\u5408\u5de5\u827a\u8981\u6c42\u548c\u96c6\u6210\u9650\u5236\u3002\u4e3b\u8981\u8003\u8651\u56e0\u7d20\u5305\u62ec<\/p>\n<ul>\n<li>\u76ee\u6807\u6750\u6599\u5806\u6808\uff08\u94dc\u3001\u6c27\u5316\u7269\u3001\u4f4e K\uff09<\/li>\n<li>\u6ce5\u6d46\u5316\u5b66\u548c\u78e8\u6599<\/li>\n<li>\u538b\u529b\u548c\u901f\u5ea6\u64cd\u4f5c\u7a97\u53e3<\/li>\n<li>\u6240\u9700\u7684\u886c\u57ab\u5bff\u547d\u548c\u8c03\u8282\u7b56\u7565<\/li>\n<\/ul>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>In CMP, polishing pad materials define the fundamental mechanical, chemical, and tribological interactions that ultimately determine planarization efficiency, defectivity, and process stability. For wax-free CMP polishing pads, material selection becomes  &#8230;<\/p>","protected":false},"author":1,"featured_media":1320,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1302","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1302","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=1302"}],"version-history":[{"count":4,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1302\/revisions"}],"predecessor-version":[{"id":1341,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1302\/revisions\/1341"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/1320"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=1302"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=1302"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=1302"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}