{"id":1465,"date":"2026-03-03T11:00:59","date_gmt":"2026-03-03T03:00:59","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1465"},"modified":"2026-03-04T11:43:57","modified_gmt":"2026-03-04T03:43:57","slug":"cmp-slurry-types-explained-oxide-sti-copper-tungsten-beyond","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-types-explained-oxide-sti-copper-tungsten-beyond\/","title":{"rendered":"CMP \u6ce5\u6d46\u7c7b\u578b\u8bf4\u660e\uff1a\u6c27\u5316\u7269\u3001STI\u3001\u94dc\u3001\u94a8\u53ca\u5176\u4ed6"},"content":{"rendered":"<!--\n========================================================\n  CLUSTER ARTICLE 1 \u2014 CMP SLURRY TYPES\n  Target: WordPress post editor (paste in HTML\/Text mode)\n  SEO Target Keyword : CMP Slurry Types\n  Secondary KWs      : oxide CMP slurry, STI slurry,\n                       copper CMP slurry, tungsten CMP slurry,\n                       barrier CMP slurry, polysilicon CMP slurry\n  Word Count         : ~2,800 words\n  Pillar Back-link   : \/cmp-slurry-complete-guide\/\n  Cross-links        : \/cmp-slurry-composition\/\n                       \/copper-cmp-slurry\/\n                       \/cmp-slurry-advanced-nodes\/\n                       \/cmp-slurry-manufacturers\/\n  Schema             : Article + FAQPage JSON-LD\n========================================================\n-->\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n     SEO META HINTS (paste into Yoast \/ RankMath)\n     Title tag  : CMP Slurry Types Explained: Oxide, STI, Cu, W & More (2025)\n     Meta desc  : A complete guide to every type of CMP slurry \u2014\n                  oxide, STI, copper, tungsten, barrier, and polysilicon.\n                  Includes selection criteria, performance tables & process tips.\n     Slug       : \/cmp-slurry-types\/\n     Focus KW   : CMP slurry types\n     Parent page: \/cmp-slurry-complete-guide\/\n\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n\n<!-- \u2500\u2500 STYLES (identical design system to Pillar Page) \u2500\u2500 -->\n<style>\n.cmp-article *,\n.cmp-article *::before,\n.cmp-article *::after { box-sizing: border-box; }\n\n.cmp-article {\n  font-family: 'Georgia', 'Times New Roman', serif;\n  font-size: 17px;\n  line-height: 1.85;\n  color: #1a1a2e;\n  max-width: 860px;\n  margin: 0 auto;\n  padding: 0 20px 60px;\n}\n\n.cmp-article h1 {\n  font-family: 'Segoe UI', 'Helvetica Neue', Arial, sans-serif;\n  font-size: clamp(26px, 4vw, 42px);\n  font-weight: 800;\n  line-height: 1.2;\n  color: #0a0a23;\n  margin: 0 0 16px;\n  letter-spacing: -0.5px;\n}\n.cmp-article h2 {\n  font-family: 'Segoe UI', 'Helvetica Neue', Arial, sans-serif;\n  font-size: clamp(19px, 2.5vw, 26px);\n  font-weight: 700;\n  color: #0a2463;\n  margin: 52px 0 16px;\n  padding-bottom: 10px;\n  border-bottom: 3px solid #0a2463;\n  letter-spacing: -0.3px;\n}\n.cmp-article h3 {\n  font-family: 'Segoe UI', 'Helvetica Neue', Arial, sans-serif;\n  font-size: clamp(16px, 2vw, 20px);\n  font-weight: 700;\n  color: #163a8a;\n  margin: 36px 0 12px;\n}\n.cmp-article p { margin: 0 0 20px; color: #2d2d2d; }\n.cmp-article a {\n  color: #0a2463;\n  text-decoration: underline;\n  text-underline-offset: 3px;\n  font-weight: 600;\n  transition: color 0.2s;\n}\n.cmp-article a:hover { color: #d4380d; }\n.cmp-article ul, .cmp-article ol { margin: 0 0 20px 24px; padding: 0; }\n.cmp-article li { margin-bottom: 8px; color: #2d2d2d; }\n\n\/* Hero *\/\n.cmp-hero {\n  background: linear-gradient(135deg, #0a2463 0%, #1e3a8a 50%, #163a6a 100%);\n  border-radius: 12px;\n  padding: 48px 40px;\n  margin-bottom: 40px;\n  position: relative;\n  overflow: hidden;\n}\n.cmp-hero::before {\n  content:''; position:absolute; top:-60px; right:-60px;\n  width:260px; height:260px; background:rgba(255,255,255,0.05); border-radius:50%;\n}\n.cmp-hero::after {\n  content:''; position:absolute; bottom:-40px; left:-40px;\n  width:180px; height:180px; background:rgba(255,255,255,0.04); border-radius:50%;\n}\n.cmp-hero h1 { color:#fff; }\n.cmp-hero .hero-meta {\n  font-family:'Segoe UI',Arial,sans-serif; font-size:14px;\n  color:rgba(255,255,255,0.7); margin:0 0 20px; letter-spacing:0.5px;\n}\n.cmp-hero .hero-intro {\n  font-size:18px; color:rgba(255,255,255,0.88);\n  line-height:1.7; margin:0; font-family:'Segoe UI',Arial,sans-serif;\n}\n\n\/* Breadcrumb *\/\n.cmp-breadcrumb {\n  font-family:'Segoe UI',Arial,sans-serif; font-size:13.5px;\n  color:#64748b; margin-bottom:28px;\n}\n.cmp-breadcrumb a { color:#0a2463; font-weight:500; text-decoration:none; }\n.cmp-breadcrumb a:hover { text-decoration:underline; }\n.cmp-breadcrumb span { margin:0 6px; }\n\n\/* TOC *\/\n.cmp-toc {\n  background:#f0f4ff; border:1px solid #c7d5f5;\n  border-left:5px solid #0a2463; border-radius:8px;\n  padding:28px 32px; margin:0 0 44px;\n}\n.cmp-toc h2 {\n  font-size:18px !important; font-family:'Segoe UI',Arial,sans-serif;\n  color:#0a2463 !important; margin:0 0 16px !important;\n  padding:0 !important; border:none !important;\n}\n.cmp-toc ol { margin:0; padding-left:22px; }\n.cmp-toc ol li {\n  font-family:'Segoe UI',Arial,sans-serif; font-size:15px;\n  margin-bottom:8px; color:#1a1a2e;\n}\n.cmp-toc ol li a { color:#0a2463; font-weight:500; text-decoration:none; }\n.cmp-toc ol li a:hover { text-decoration:underline; color:#d4380d; }\n\n\/* Info Boxes *\/\n.cmp-box { border-radius:10px; padding:24px 28px; margin:28px 0; }\n.cmp-box.blue  { background:#eef2ff; border-left:5px solid #3b5bdb; }\n.cmp-box.amber { background:#fffbeb; border-left:5px solid #f59e0b; }\n.cmp-box.green { background:#ecfdf5; border-left:5px solid #10b981; }\n.cmp-box.red   { background:#fff1f0; border-left:5px solid #ef4444; }\n.cmp-box .box-title {\n  font-family:'Segoe UI',Arial,sans-serif; font-size:15px;\n  font-weight:700; text-transform:uppercase; letter-spacing:0.6px;\n  margin:0 0 10px; color:#0a2463;\n}\n\n\/* Tables *\/\n.cmp-table-wrap { overflow-x:auto; margin:24px 0 36px; }\n.cmp-table { width:100%; border-collapse:collapse; font-family:'Segoe UI',Arial,sans-serif; font-size:14.5px; }\n.cmp-table th { background:#0a2463; color:#fff; padding:12px 16px; text-align:left; font-weight:600; white-space:nowrap; }\n.cmp-table td { padding:11px 16px; border-bottom:1px solid #e2e8f0; color:#2d2d2d; vertical-align:top; }\n.cmp-table tr:nth-child(even) td { background:#f8faff; }\n.cmp-table tr:hover td { background:#eef2ff; }\n.badge {\n  display:inline-block; font-family:'Segoe UI',Arial,sans-serif;\n  font-size:11px; font-weight:700; padding:2px 8px;\n  border-radius:20px; text-transform:uppercase; letter-spacing:0.4px;\n}\n.badge.high   { background:#dcfce7; color:#166534; }\n.badge.medium { background:#fef9c3; color:#854d0e; }\n.badge.low    { background:#fee2e2; color:#991b1b; }\n\n\/* Type Cards *\/\n.type-card {\n  border:1px solid #d4ddf5; border-radius:12px;\n  padding:28px 30px; margin:32px 0;\n  position:relative; overflow:hidden;\n}\n.type-card::before {\n  content:''; position:absolute; top:0; left:0;\n  width:5px; height:100%; background:#0a2463;\n}\n.type-card.copper::before  { background:#d97706; }\n.type-card.tungsten::before{ background:#64748b; }\n.type-card.sti::before     { background:#7c3aed; }\n.type-card.oxide::before   { background:#0891b2; }\n.type-card.barrier::before { background:#059669; }\n.type-card.poly::before    { background:#dc2626; }\n.type-card.cobalt::before  { background:#db2777; }\n\n.type-card .type-header {\n  display:flex; align-items:center; gap:14px; margin-bottom:14px;\n}\n.type-card .type-icon {\n  width:44px; height:44px; border-radius:10px;\n  display:flex; align-items:center; justify-content:center;\n  font-size:22px; background:#f0f4ff; flex-shrink:0;\n}\n.type-card .type-title {\n  font-family:'Segoe UI',Arial,sans-serif;\n  font-size:19px; font-weight:800; color:#0a2463; margin:0;\n}\n.type-card .type-subtitle {\n  font-family:'Segoe UI',Arial,sans-serif;\n  font-size:13px; color:#64748b; margin:2px 0 0;\n}\n.type-card .type-specs {\n  display:flex; flex-wrap:wrap; gap:10px; margin:14px 0;\n}\n.type-card .spec-pill {\n  font-family:'Segoe UI',Arial,sans-serif; font-size:12.5px;\n  background:#f0f4ff; border:1px solid #c7d5f5;\n  border-radius:20px; padding:4px 12px; color:#0a2463; font-weight:600;\n}\n\n\/* Selection Matrix *\/\n.matrix-grid {\n  display:grid; grid-template-columns:repeat(auto-fit,minmax(200px,1fr));\n  gap:14px; margin:24px 0 36px;\n}\n.matrix-card {\n  background:#fff; border:1px solid #e2e8f0;\n  border-radius:10px; padding:18px 20px;\n}\n.matrix-card .mc-label {\n  font-family:'Segoe UI',Arial,sans-serif; font-size:12px;\n  font-weight:700; text-transform:uppercase; letter-spacing:0.5px;\n  color:#64748b; margin-bottom:6px;\n}\n.matrix-card .mc-value {\n  font-family:'Segoe UI',Arial,sans-serif; font-size:15px;\n  font-weight:700; color:#0a2463;\n}\n\n\/* Trust Bar *\/\n.cmp-trust {\n  display:flex; align-items:center; gap:16px;\n  background:#f8faff; border:1px solid #e2e8f0;\n  border-radius:10px; padding:20px 24px; margin:40px 0 28px;\n}\n.trust-avatar {\n  width:52px; height:52px; background:#0a2463; border-radius:50%;\n  display:flex; align-items:center; justify-content:center; font-size:22px; flex-shrink:0;\n}\n.trust-text { font-family:'Segoe UI',Arial,sans-serif; }\n.trust-text strong { display:block; font-size:15px; color:#0a2463; }\n.trust-text span { font-size:13px; color:#64748b; }\n\n\/* CTA *\/\n.cmp-cta {\n  background:linear-gradient(135deg,#d4380d,#f5692e);\n  border-radius:12px; padding:36px 40px; text-align:center; margin:48px 0; color:#fff;\n}\n.cmp-cta h3 {\n  font-family:'Segoe UI',Arial,sans-serif; font-size:22px;\n  font-weight:800; color:#fff !important; margin:0 0 10px !important;\n}\n.cmp-cta p { color:rgba(255,255,255,0.9); margin:0 0 20px; font-family:'Segoe UI',Arial,sans-serif; }\n.cmp-cta a {\n  display:inline-block; background:#fff; color:#d4380d !important;\n  font-family:'Segoe UI',Arial,sans-serif; font-weight:800; font-size:15px;\n  padding:13px 32px; border-radius:50px; text-decoration:none !important;\n  letter-spacing:0.3px; transition:transform 0.2s,box-shadow 0.2s;\n}\n.cmp-cta a:hover { transform:translateY(-2px); box-shadow:0 6px 20px rgba(0,0,0,0.2); }\n\n\/* FAQ *\/\n.cmp-faq { margin:24px 0; }\n.faq-item { border:1px solid #e2e8f0; border-radius:8px; margin-bottom:14px; overflow:hidden; }\n.faq-question {\n  background:#f8faff; padding:18px 22px;\n  font-family:'Segoe UI',Arial,sans-serif; font-weight:700;\n  color:#0a2463; font-size:15.5px; margin:0;\n}\n.faq-answer {\n  padding:18px 22px; background:#fff; font-size:15.5px;\n  color:#2d2d2d; border-top:1px solid #e2e8f0;\n}\n\n\/* Back to Pillar *\/\n.back-to-pillar {\n  display:flex; align-items:center; gap:12px;\n  background:#f0f4ff; border:1px solid #c7d5f5; border-radius:10px;\n  padding:18px 24px; margin:48px 0 0; text-decoration:none !important;\n  transition:background 0.2s;\n}\n.back-to-pillar:hover { background:#e0e8ff; }\n.back-to-pillar .btp-icon { font-size:24px; flex-shrink:0; }\n.back-to-pillar .btp-text { font-family:'Segoe UI',Arial,sans-serif; }\n.back-to-pillar .btp-label { font-size:12px; color:#64748b; display:block; }\n.back-to-pillar .btp-title { font-size:15px; font-weight:700; color:#0a2463; }\n\n@media (max-width:600px){\n  .cmp-hero { padding:32px 22px; }\n  .type-card { padding:22px 18px; }\n  .cmp-cta { padding:28px 20px; }\n  .cmp-toc { padding:22px 18px; }\n}\n<\/style>\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n     ARTICLE BODY\n\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<article class=\"cmp-article\" itemscope itemtype=\"https:\/\/schema.org\/Article\">\n\n\n  <!-- Hero -->\n  <div class=\"cmp-hero\">\n    <p class=\"hero-intro\">\n      \u5e76\u975e\u6240\u6709\u7684 CMP \u7814\u78e8\u6db2\u90fd\u662f\u76f8\u540c\u7684\u3002\u6bcf\u4e2a\u534a\u5bfc\u4f53\u629b\u5149\u6b65\u9aa4\u90fd\u9700\u8981\u72ec\u7279\u914d\u5236\u7684\u7814\u78e8\u6db2--\u4e0d\u540c\u7684\u7814\u78e8\u5242\u5316\u5b66\u6210\u5206\u3001\u4e0d\u540c\u7684 pH \u503c\u548c\u4e0d\u540c\u7684\u9009\u62e9\u6027\u7279\u5f81\u3002\u672c\u6307\u5357\u8be6\u7ec6\u4ecb\u7ecd\u4e86\u6bcf\u79cd\u4e3b\u8981\u7684 CMP \u7814\u78e8\u6db2\u7c7b\u578b\uff0c\u5e76\u63d0\u4f9b\u4e86\u5de5\u827a\u5de5\u7a0b\u5e08\u548c\u91c7\u8d2d\u56e2\u961f\u8fdb\u884c\u6b63\u786e\u9009\u62e9\u6240\u9700\u7684\u6280\u672f\u6df1\u5ea6\u3002.\n    <\/p>\n  <\/div>\n\n  <!-- Trust Bar -->\n  <div class=\"cmp-trust\">\n    <div class=\"trust-avatar\">\u2697\ufe0f<\/div>\n    <div class=\"trust-text\">\n      <strong>\u5409\u4e4b\u5c9b\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8- \u5de5\u827a\u5de5\u7a0b\u56e2\u961f<\/strong>\n      <span>\u4f4d\u4e8e\u6c5f\u82cf\u65e0\u9521\u7684 CMP \u629b\u5149\u6d46\u6599\u4e13\u5bb6\u3002\u5185\u5bb9\u7531\u8d44\u6df1\u914d\u65b9\u5de5\u7a0b\u5e08\u5ba1\u6838\u3002\u5c5e\u4e8e <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/what-is-cmp-slurry-a-complete-guide-to-chemical-mechanical-planarization-slurry\/\">\u5b8c\u6574\u7684 CMP \u6ce5\u6d46\u6307\u5357<\/a> \u7cfb\u5217\u3002.<\/span>\n    <\/div>\n  <\/div>\n\n  <!-- TOC -->\n  <div class=\"cmp-toc\">\n    <h2>\ud83d\udccb \u76ee\u5f55<\/h2>\n    <ol>\n      <li><a href=\"#why-types-matter\">\u4e3a\u4ec0\u4e48\u9009\u62e9 CMP \u6ce5\u6d46\u7c7b\u578b\u5f88\u91cd\u8981<\/a><\/li>\n      <li><a href=\"#classification-framework\">\u5206\u7c7b\u6846\u67b6\uff1a\u5982\u4f55\u5bf9 CMP \u6ce5\u6d46\u8fdb\u884c\u5206\u7c7b<\/a><\/li>\n      <li><a href=\"#oxide-slurry\">\u6c27\u5316\u7269 CMP \u6ce5\u6d46\uff08ILD\uff09<\/a><\/li>\n      <li><a href=\"#sti-slurry\">STI CMP \u6ce5\u6d46<\/a><\/li>\n      <li><a href=\"#copper-slurry\">\u94dc CMP \u6ce5\u6d46<\/a><\/li>\n      <li><a href=\"#tungsten-slurry\">\u94a8 CMP \u6ce5\u6d46<\/a><\/li>\n      <li><a href=\"#barrier-slurry\">\u9694\u79bb\u5c42\/\u5185\u886c CMP \u6ce5\u6d46<\/a><\/li>\n      <li><a href=\"#polysilicon-slurry\">\u591a\u6676\u7845 CMP \u6ce5\u6d46<\/a><\/li>\n      <li><a href=\"#emerging-types\">\u65b0\u5174\u7c7b\u578b\uff1aCo\u3001Ru \u548c\u65e0\u7814\u78e8\u5242\u6ce5\u6d46<\/a><\/li>\n      <li><a href=\"#comparison-table\">\u5b8c\u6574\u5bf9\u7167\u8868<\/a><\/li>\n      <li><a href=\"#selection-guide\">\u5982\u4f55\u9009\u62e9\u6b63\u786e\u7684\u6ce5\u6d46\u7c7b\u578b<\/a><\/li>\n      <li><a href=\"#faq\">\u5e38\u89c1\u95ee\u9898<\/a><\/li>\n    <\/ol>\n  <\/div>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 1: WHY TYPES MATTER\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"why-types-matter\">1.\u4e3a\u4ec0\u4e48\u9009\u62e9 CMP \u6ce5\u6d46\u7c7b\u578b\u5f88\u91cd\u8981<\/h2>\n\n  <p>\n    \u5176\u6838\u5fc3\u662f, <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/what-is-cmp-slurry-a-complete-guide-to-chemical-mechanical-planarization-slurry\/\">CMP \u6ce5\u6d46<\/a> \u662f\u5b9e\u73b0\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\u7684\u6d88\u8017\u54c1--\u5728\u534a\u5bfc\u4f53\u5236\u9020\u7684\u6bcf\u4e2a\u4e3b\u8981\u6c89\u79ef\u6b65\u9aa4\u4e4b\u95f4\uff0c\u5c06\u6676\u7247\u8868\u9762\u5e73\u5766\u5316\u5230\u7eb3\u7c73\u7ea7\u5e73\u5766\u5ea6\u7684\u8fc7\u7a0b\u3002\u4f46\u662f\uff0c\u4e13\u4e3a\u629b\u5149\u4e8c\u6c27\u5316\u7845\u800c\u8bbe\u8ba1\u7684\u7814\u78e8\u6db2\u4f1a\u5bf9\u94dc\u9020\u6210\u707e\u96be\u6027\u7684\u8fc7\u5ea6\u629b\u5149\uff1b\u4e13\u4e3a\u53bb\u9664\u94a8\u585e\u800c\u8bbe\u8ba1\u7684\u7814\u78e8\u6db2\u4f1a\u7834\u574f\u8106\u5f31\u7684\u4f4e\u4ecb\u7535\u3002\u6240\u4f7f\u7528\u7684\u6d46\u6599\u7c7b\u578b\u5e76\u4e0d\u662f\u4e00\u4e2a\u6b21\u8981\u7684\u64cd\u4f5c\u7ec6\u8282\uff0c\u5b83\u662f\u51b3\u5b9a\u4ea7\u91cf\u3001\u541e\u5410\u91cf\u548c\u8bbe\u5907\u53ef\u9760\u6027\u7684\u57fa\u672c\u5de5\u827a\u53d8\u91cf\u3002.\n  <\/p>\n\n  <p>\n    \u91c7\u7528\u53f0\u79ef\u7535 N3 \u6216\u4e09\u661f SF3 \u6280\u672f\u7684\u73b0\u4ee3\u5c16\u7aef\u6676\u5706\u5382\u53ef\u90e8\u7f72 <strong>15 \u81f3 25 \u79cd\u4e0d\u540c\u7684 CMP \u6ce5\u6d46\u914d\u65b9<\/strong> \u4ece FEOL \u6676\u4f53\u7ba1\u9694\u79bb\u5230 BEOL \u591a\u5c42\u94dc\u4e92\u8fde\uff0c\u4e00\u76f4\u5230\u6676\u5706\u7ea7\u5c01\u88c5\uff0c\u8d2f\u7a7f\u6574\u4e2a\u5de5\u827a\u6d41\u7a0b\u3002\u6bcf\u79cd\u914d\u65b9\u90fd\u4e0e\u7279\u5b9a\u7684\u886c\u57ab\u7c7b\u578b\u3001\u8c03\u8282\u5242\u548c\u5de5\u5177\u8bbe\u7f6e\u5171\u540c\u8bbe\u8ba1\u3002\u5bf9\u4e8e\u4efb\u4f55\u8d1f\u8d23 CMP \u5de5\u827a\u6240\u6709\u6743\u7684\u5de5\u7a0b\u5e08\u6765\u8bf4\uff0c\u4e86\u89e3\u7814\u78e8\u6db2\u7c7b\u578b\u4e4b\u95f4\u7684\u533a\u522b - \u5b83\u4eec\u7684\u7814\u78e8\u5316\u5b66\u6027\u8d28\u3001pH \u503c\u673a\u5236\u3001\u9009\u62e9\u6027\u884c\u4e3a\u548c\u7f3a\u9677\u60c5\u51b5 - \u662f\u81f3\u5173\u91cd\u8981\u7684\u3002.\n  <\/p>\n\n  <div class=\"cmp-box blue\">\n    <p class=\"box-title\">\ud83d\udccc \u5173\u952e\u539f\u5219<\/p>\n    <p style=\"margin:0;\">CMP \u6ce5\u6d46\u7c7b\u578b\u4e3b\u8981\u7531\u4e09\u4e2a\u56e0\u7d20\u51b3\u5b9a\uff1a(1) \u8981\u53bb\u9664\u7684\u76ee\u6807\u8584\u819c\uff0c(2) \u5e95\u5c42\u505c\u6b62\u5c42\u8584\u819c\uff0c\u4ee5\u53ca (3) \u5b83\u4eec\u4e4b\u95f4\u6240\u9700\u7684\u9009\u62e9\u6027\u6bd4\u7387\u3002\u6b21\u8981\u56e0\u7d20\u5305\u62ec\u76ee\u6807 MRR\u3001\u7f3a\u9677\u7387\u9884\u7b97\u4ee5\u53ca\u4e0e\u4e0b\u6e38\u540e CMP \u6e05\u6d01\u5de5\u827a\u7684\u517c\u5bb9\u6027\u3002.<\/p>\n  <\/div>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 2: CLASSIFICATION FRAMEWORK\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"classification-framework\">2.\u5206\u7c7b\u6846\u67b6\uff1a\u5982\u4f55\u5bf9 CMP \u6ce5\u6d46\u8fdb\u884c\u5206\u7c7b<\/h2>\n\n  <p>\n    CMP \u6ce5\u6d46\u53ef\u6309\u4e24\u4e2a\u8f74\u8fdb\u884c\u5206\u7c7b\uff0c\u8fd9\u4e24\u4e2a\u8f74\u5171\u540c\u5b9a\u4e49\u4e86\u914d\u65b9\u7a7a\u95f4\uff1a\n  <\/p>\n\n  <h3>2.1 \u6309\u78e8\u6599\u7c7b\u578b<\/h3>\n  <p>\n    \u78e8\u6599\u9897\u7c92\u7684\u5316\u5b66\u6027\u8d28\u662f\u51b3\u5b9a\u673a\u68b0\u53bb\u9664\u80fd\u529b\u548c\u8868\u9762\u76f8\u4e92\u4f5c\u7528\u7684\u4e3b\u8981\u56e0\u7d20\u3002\u4e09\u79cd\u4e3b\u8981\u7684\u7814\u78e8\u6750\u6599--\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\uff08SiO\u2082\uff09\u3001\u6c27\u5316\u94c8\uff08CeO\u2082\uff09\u548c\u6c27\u5316\u94dd\uff08Al\u2082O\u2083\uff09--\u90fd\u6709\u5404\u81ea\u4e0d\u540c\u7684\u5e94\u7528\u9886\u57df\u3002\u7b2c\u56db\u7c7b\u662f\u5b8c\u5168\u4f9d\u9760\u5316\u5b66\u4f5c\u7528\u7684\u65e0\u78e8\u6599\u6d46\u6599\uff08AFS\uff09\u3002\u6709\u5173\u914d\u65b9\u7684\u8be6\u7ec6\u4fe1\u606f\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u4e13\u95e8\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-composition-abrasives-chemical-additives-formulation-principles\/\">CMP \u6ce5\u6d46\u6210\u5206\uff1a\u78e8\u6599\u3001\u5316\u5b66\u54c1\u548c\u914d\u65b9<\/a>.\n  <\/p>\n\n  <h3>2.2 \u6309\u76ee\u6807\u8584\u819c\/\u5de5\u827a\u6b65\u9aa4\u5206\u7c7b<\/h3>\n  <p>\n    \u4ece\u5de5\u827a\u6574\u5408\u7684\u89d2\u5ea6\u6765\u770b\uff0c\u6d46\u6599\u6700\u5b9e\u9645\u7684\u5206\u7c7b\u65b9\u6cd5\u662f\u6309\u7167\u5176\u8bbe\u8ba1\u7528\u4e8e\u53bb\u9664\u7684\u8584\u819c\u8fdb\u884c\u5206\u7c7b\u3002\u8fd9\u662f\u5de5\u5382\u5de5\u827a\u5de5\u7a0b\u5e08\u5728\u4e3a\u7279\u5b9a CMP \u6b65\u9aa4\u6307\u5b9a\u6ce5\u6d46\u65f6\u4f7f\u7528\u7684\u5206\u7c7b\u7cfb\u7edf\uff0c\u4e5f\u662f\u672c\u6587\u5176\u4f59\u90e8\u5206\u6240\u9075\u5faa\u7684\u6846\u67b6\u3002.\n  <\/p>\n\n  <div class=\"cmp-table-wrap\">\n    <table class=\"cmp-table\">\n      <thead>\n        <tr>\n          <th>\u6ce5\u6d46\u7c7b\u522b<\/th>\n          <th>\u76ee\u6807\u7535\u5f71<\/th>\n          <th>\u505c\u6b62\u5c42<\/th>\n          <th>\u78e8\u6599<\/th>\n          <th>\u5178\u578b pH \u503c<\/th>\n        <\/tr>\n      <\/thead>\n      <tbody>\n        <tr>\n          <td>\u6c27\u5316\u7269\uff08ILD\uff09<\/td>\n          <td>TEOS SiO\u2082\u3001HDP \u6c27\u5316\u7269<\/td>\n          <td>\u65e0\uff08\u5b9a\u65f6\uff09\u6216 Si\u2083N\u2084<\/td>\n          <td>\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/td>\n          <td>10-11<\/td>\n        <\/tr>\n        <tr>\n          <td>STI<\/td>\n          <td>TEOS SiO\u2082<\/td>\n          <td>Si\u2083N\u2084<\/td>\n          <td>\u94c8 (CeO\u2082)<\/td>\n          <td>5-8<\/td>\n        <\/tr>\n        <tr>\n          <td>\u94dc\uff08\u6563\u88c5\uff09<\/td>\n          <td>\u94dc<\/td>\n          <td>TaN \/ Ta \u9694\u79bb\u5c42<\/td>\n          <td>\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/td>\n          <td>3-5<\/td>\n        <\/tr>\n        <tr>\n          <td>\u94a8<\/td>\n          <td>W<\/td>\n          <td>Ti \/ TiN<\/td>\n          <td>\u6c27\u5316\u94dd\u6216\u4e8c\u6c27\u5316\u7845<\/td>\n          <td>2-4<\/td>\n        <\/tr>\n        <tr>\n          <td>\u5c4f\u969c\/\u886c\u57ab<\/td>\n          <td>TaN\u3001Ta\u3001Ti<\/td>\n          <td>\u94dc\u3001\u6c27\u5316\u7845\u2082<\/td>\n          <td>\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/td>\n          <td>7-10<\/td>\n        <\/tr>\n        <tr>\n          <td>\u591a\u6676\u7845<\/td>\n          <td>\u591a\u6676\u7845<\/td>\n          <td>\u6805\u6781 SiO\u2082<\/td>\n          <td>\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/td>\n          <td>10-12<\/td>\n        <\/tr>\n        <tr>\n          <td>\u94b4\/\u948c<\/td>\n          <td>Co, Ru<\/td>\n          <td>\u89c6\u60c5\u51b5\u800c\u5b9a<\/td>\n          <td>\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/td>\n          <td>4-8<\/td>\n        <\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 3: OXIDE SLURRY\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"oxide-slurry\">3.\u6c27\u5316\u7269 CMP \u6ce5\u6d46\uff08ILD\uff09<\/h2>\n\n  <div class=\"type-card oxide\">\n    <div class=\"type-header\">\n      <div class=\"type-icon\">\ud83d\udd35<\/div>\n      <div>\n        <p class=\"type-title\">\u6c27\u5316\u7269\/ILD CMP \u6ce5\u6d46<\/p>\n        <p class=\"type-subtitle\">\u6309\u6676\u7247\u9762\u79ef\u8ba1\u7b97\u4ea7\u91cf\u6700\u9ad8\u7684 CMP \u6d46\u6599\u7ec6\u5206\u5e02\u573a<\/p>\n      <\/div>\n    <\/div>\n    <div class=\"type-specs\">\n      <span class=\"spec-pill\">\u78e8\u6599\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/span>\n      <span class=\"spec-pill\">pH \u503c\uff1a10-11<\/span>\n      <span class=\"spec-pill\">MRR: 1,000-3,000 \u00c5\/min<\/span>\n      <span class=\"spec-pill\">\u9009\u62e9\u6027\uff1a\u6c27\u5316\u7269\uff1a\u6c2e\u5316\u7269 5-10:1<\/span>\n      <span class=\"spec-pill\">\u7f3a\u9677\u98ce\u9669\uff1a <span class=\"badge low\">\u4f4e<\/span><\/span>\n    <\/div>\n  <\/div>\n\n  <p>\n    \u6c27\u5316\u7269 CMP \u6d46\u6599\u7528\u4e8e\u5c42\u95f4\u4ecb\u8d28 (ILD) \u8584\u819c\u7684\u5e73\u9762\u5316--\u4e3b\u8981\u662f\u901a\u8fc7 PECVD \u6216 HDP-CVD \u5728\u91d1\u5c5e\u4e92\u8fde\u5c42\u4e4b\u95f4\u6c89\u79ef\u7684\u57fa\u4e8e TEOS\uff08\u6b63\u7845\u9178\u56db\u4e59\u916f\uff09\u7684 SiO\u2082\u3002\u8fd9\u662f\u5386\u53f2\u4e0a\u7b2c\u4e00\u79cd CMP \u5e94\u7528\uff0c\u7531 IBM \u5728 20 \u4e16\u7eaa 80 \u5e74\u4ee3\u540e\u671f\u5b9e\u73b0\u5546\u4e1a\u5316\uff0c\u76ee\u524d\u4ecd\u662f CMP \u6d46\u6599\u5e02\u573a\u4e2d\u6309\u6d88\u8017\u91cf\u8ba1\u7b97\u7684\u6700\u5927\u7ec6\u5206\u5e02\u573a\u3002.\n  <\/p>\n\n  <h3>\u914d\u65b9\u7279\u70b9<\/h3>\n  <p>\n    \u6c27\u5316\u7269\u6d46\u6599\u4e3a\u78b1\u6027\uff08pH \u503c\u4e3a 10-11\uff09\uff0c\u4f7f\u7528\u6d53\u5ea6\u4e3a 5-15 wt% \u7684\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u78e8\u6599\u3002\u5728\u9ad8 pH \u503c\u6761\u4ef6\u4e0b\uff0cSiO\u2082 \u78e8\u6599\u8868\u9762\u548c\u6c27\u5316\u819c\u8868\u9762\u90fd\u5e26\u8d1f\u7535\uff0c\u8fd9\u4f3c\u4e4e\u4f1a\u9002\u5f97\u5176\u53cd--\u4f46\u5728\u6b64 pH \u503c\u6761\u4ef6\u4e0b\uff0c\u673a\u68b0\u629b\u5149\u4f5c\u7528\u5360\u4e3b\u5bfc\u5730\u4f4d\uff0c\u800c\u4e14\u78b1\u6027\u73af\u5883\u4f1a\u589e\u5f3a\u6c27\u5316\u7269\u6eb6\u89e3\u52a8\u529b\u5b66\uff08Si-O \u952e\u6c34\u89e3\uff09\uff0c\u4ece\u800c\u4f7f\u6c27\u5316\u7269 MRR \u8fbe\u5230 1,000-3,000 \u00c5\/min\u3002\u901a\u5e38\u4f7f\u7528 KOH \u6216 NH\u2084OH \u4f5c\u4e3a pH \u503c\u8c03\u8282\u5242\u548c\u4e8c\u6b21\u6eb6\u89e3\u5242\u3002.\n  <\/p>\n\n  <h3>\u6d41\u7a0b\u6574\u5408\u8bf4\u660e<\/h3>\n  <p>\n    \u6c27\u5316\u7269 ILD CMP \u901a\u5e38\u662f\u4e00\u4e2a\u5b9a\u65f6\u6b65\u9aa4--\u5f53\u8fbe\u5230\u9884\u5148\u786e\u5b9a\u7684\u53bb\u9664\u539a\u5ea6\u65f6\uff0c\u629b\u5149\u7ed3\u675f\uff0c\u5e76\u7531\u73b0\u573a\u5149\u5b66\u7aef\u70b9\u68c0\u6d4b\u7cfb\u7edf\u786e\u8ba4\u3002\u7531\u4e8e\u6ca1\u6709\u786c\u6b62\u5c42\uff0c\u6676\u5706\u5185\u5747\u5300\u6027\uff08WIWNU\uff09\u662f\u5de5\u827a\u63a7\u5236\u7684\u4e3b\u8981\u6311\u6218\uff1a\u4e2d\u5fc3\u5feb\u6216\u8fb9\u7f18\u5feb\u7684\u629b\u5149\u66f2\u7ebf\u8981\u6c42\u5bf9\u8f7d\u4f53\u5934\u533a\u538b\u529b\u548c\u4fdd\u6301\u73af\u529b\u8fdb\u884c\u5fae\u8c03\u3002\u5c31\u7f3a\u9677\u800c\u8a00\uff0c\u6c27\u5316\u7269\u6d46\u6599\u901a\u5e38\u662f\u6700\u5bbd\u5bb9\u7684\uff0c\u4f7f\u5176\u6210\u4e3a\u65b0\u7684 CMP \u5de5\u827a\u5de5\u7a0b\u5e08\u7684\u5207\u5165\u70b9\u3002.\n  <\/p>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 4: STI SLURRY\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"sti-slurry\">4.STI CMP \u6ce5\u6d46\uff08\u6d45\u6c9f\u9694\u79bb\uff09<\/h2>\n\n  <div class=\"type-card sti\">\n    <div class=\"type-header\">\n      <div class=\"type-icon\">\ud83d\udfe3<\/div>\n      <div>\n        <p class=\"type-title\">STI CMP \u6ce5\u6d46<\/p>\n        <p class=\"type-subtitle\">FEOL \u52a0\u5de5\u4e2d\u5bf9\u9009\u62e9\u6027\u8981\u6c42\u6700\u9ad8\u7684 CMP \u6b65\u9aa4<\/p>\n      <\/div>\n    <\/div>\n    <div class=\"type-specs\">\n      <span class=\"spec-pill\">\u78e8\u6599\uff1a\u94c8 (CeO\u2082)<\/span>\n      <span class=\"spec-pill\">pH \u503c\uff1a5-8<\/span>\n      <span class=\"spec-pill\">MRR \uff08\u6c27\u5316\u7269\uff09\uff1a1,500-4,000 \u00c5\/min<\/span>\n      <span class=\"spec-pill\">\u9009\u62e9\u6027\uff1aSiO\u2082:Si\u2083N\u2084 &gt;50:1 \u81f3 200:1<\/span>\n      <span class=\"spec-pill\">\u7f3a\u9677\u98ce\u9669\uff1a <span class=\"badge medium\">\u4e2d\u578b<\/span><\/span>\n    <\/div>\n  <\/div>\n\n  <p>\n    \u6d45\u6c9f\u69fd\u9694\u79bb (STI) CMP \u53ef\u4ee5\u8bf4\u662f\u7ebf\u524d\u7aef (FEOL) \u52a0\u5de5\u4e2d\u6280\u672f\u8981\u6c42\u6700\u9ad8\u7684\u7535\u4ecb\u8d28 CMP \u6b65\u9aa4\u3002\u5176\u76ee\u6807\u662f\u5c06\u6c89\u79ef\u5230\u6d45\u6c9f\u69fd\u9694\u79bb\u7ed3\u6784\u4e2d\u7684 TEOS \u586b\u9699\u6c27\u5316\u7269\u5e73\u9762\u5316\uff0c\u5e76\u6781\u5176\u7cbe\u786e\u5730\u505c\u6b62\u5728\u4fdd\u62a4\u6709\u6e90\u6676\u4f53\u7ba1\u533a\u57df\u7684 Si\u2083N\u2084 \u629b\u5149\u505c\u6b62\u5c42\u4e0a\u3002\u5728\u4f4e\u4e8e 10nm \u7684\u5148\u8fdb\u8282\u70b9\u4e0a\uff0cSTI CMP \u540e\u7684\u5269\u4f59\u8584\u819c\u603b\u9884\u7b97\u53ef\u7cbe\u786e\u5230 \u00b11nm - \u57fa\u672c\u4e0a\u4e0d\u5b58\u5728\u9009\u62e9\u6027\u5931\u6548\u7684\u4f59\u91cf\u3002.\n  <\/p>\n\n  <h3>\u4e3a\u4ec0\u4e48\u94c8\u5bf9\u6027\u4f20\u64ad\u611f\u67d3\u81f3\u5173\u91cd\u8981<\/h3>\n  <p>\n    STI \u7814\u78e8\u6db2\u7684\u663e\u8457\u7279\u70b9\u662f SiO\u2082:Si\u2083N\u2084 \u9009\u62e9\u6027\u6781\u9ad8\uff0c\u53ea\u6709\u4f7f\u7528\u6c27\u5316\u94c8\uff08\u94c8\uff09\u78e8\u6599\u624d\u80fd\u8fbe\u5230\u8fd9\u79cd\u6548\u679c\u3002\u5176\u673a\u7406\u4e0e\u673a\u68b0\u7814\u78e8\u6709\u7740\u672c\u8d28\u533a\u522b\uff1aCeO\u2082 \u9897\u7c92\u4e0e SiO\u2082 \u53d1\u751f\u5316\u5b66\u9f7f\u9f7f\u8f6e\u53cd\u5e94\uff0c\u5f62\u6210 Ce-O-Si \u8868\u9762\u952e\uff0c\u5927\u5927\u52a0\u901f\u4e86\u6c27\u5316\u7269\u7684\u6eb6\u89e3\uff0c\u800c Si\u2083N\u2084 \u8868\u9762\u5bf9\u8fd9\u4e00\u673a\u5236\u57fa\u672c\u65e0\u6548\uff0c\u4f7f\u7528\u5148\u8fdb\u7684\u9634\u79bb\u5b50\u805a\u5408\u7269\u590d\u5408\u6dfb\u52a0\u5242\uff0c\u53ef\u83b7\u5f97 50:1 \u5230 200:1 \u7684\u9009\u62e9\u6027\u6bd4\u7387\u3002.\n  <\/p>\n\n  <p>\n    \u7845\u57fa\u6c27\u5316\u7269\u6d46\u6599\u7684\u5178\u578b SiO\u2082\uff1aSi\u2083N\u2084 \u9009\u62e9\u6027\u4ec5\u4e3a 5-10\uff1a1\uff0c\u8fd9\u5bf9\u4e8e\u6c2e\u5316\u7269\u635f\u8017\u5fc5\u987b\u4fdd\u6301\u5728 2-3 \u7eb3\u7c73\u4ee5\u4e0b\u7684 STI CMP \u6765\u8bf4\u662f\u5b8c\u5168\u4e0d\u591f\u7684\u3002\u56e0\u6b64\uff0c\u94c8\u57fa STI \u6ce5\u6d46\u5728 FEOL \u52a0\u5de5\u4e2d\u57fa\u672c\u4e0a\u662f\u4e0d\u53ef\u66ff\u4ee3\u7684\u914d\u65b9\u3002\u8fd9\u4e9b\u94c8\u6d46\u6599\u7684\u914d\u65b9\uff0c\u7279\u522b\u662f\u94c8\u9897\u7c92\u5927\u5c0f\u3001\u9634\u79bb\u5b50\u805a\u5408\u7269\u7c7b\u578b\uff08\u805a\u4e19\u70ef\u9178\u3001\u805a\u78fa\u9178\uff09\u548c pH \u503c\u4e4b\u95f4\u7684\u76f8\u4e92\u4f5c\u7528\uff0c\u662f STI \u6d46\u6599\u5f00\u53d1\u7684\u4e3b\u8981\u6280\u672f\u6218\u573a\u3002\u6709\u5173\u94c8\u9897\u7c92\u5316\u5b66\u7684\u66f4\u591a\u4fe1\u606f\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u4ee5\u4e0b\u6307\u5357 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-composition-abrasives-chemical-additives-formulation-principles\/\">CMP \u6ce5\u6d46\u6210\u5206<\/a>.\n  <\/p>\n\n  <div class=\"cmp-box amber\">\n    <p class=\"box-title\">\u26a0\ufe0f \u5173\u952e\u6d41\u7a0b\u6311\u6218<\/p>\n    <p style=\"margin:0;\">\u4e0e\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u914d\u65b9\u76f8\u6bd4\uff0c\u94c8\u57fa STI \u6d46\u6599\u66f4\u5bb9\u6613\u4ea7\u751f\u6676\u5706\u7ea7\u7f3a\u9677\uff08\u5fae\u5212\u75d5\u3001\u94c8\u6b8b\u7559\uff09\uff0c\u8fd9\u662f\u56e0\u4e3a\u94c8\u7684\u786c\u5ea6\u66f4\u9ad8\uff0c\u5bb9\u6613\u5f62\u6210\u56e2\u805a\u3002\u540e CMP \u6e05\u6d01\u5316\u5b66\u9009\u62e9\u548c\u4f7f\u7528\u70b9\u8fc7\u6ee4\u5bf9\u4e8e\u7ba1\u7406\u751f\u4ea7\u89c4\u6a21\u7684 STI \u6d46\u6599\u7f3a\u9677\u81f3\u5173\u91cd\u8981\u3002.<\/p>\n  <\/div>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 5: COPPER SLURRY\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"copper-slurry\">5.\u94dc CMP \u6ce5\u6d46<\/h2>\n\n  <div class=\"type-card copper\">\n    <div class=\"type-header\">\n      <div class=\"type-icon\">\ud83d\udfe0<\/div>\n      <div>\n        <p class=\"type-title\">\u94dc CMP \u6ce5\u6d46<\/p>\n        <p class=\"type-subtitle\">\u53cc\u5927\u9a6c\u58eb\u9769\u94dc\u4e92\u8fde\u7684\u591a\u6b65\u5316\u5b66\u53cd\u5e94<\/p>\n      <\/div>\n    <\/div>\n    <div class=\"type-specs\">\n      <span class=\"spec-pill\">\u78e8\u6599\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/span>\n      <span class=\"spec-pill\">pH \u503c\uff1a3-5\uff08\u6563\u88c5\uff09\/6-8\uff08\u9694\u79bb\u6b65\u9aa4\uff09<\/span>\n      <span class=\"spec-pill\">MRR (\u94dc)\uff1a3,000-8,000 \u00c5\/min<\/span>\n      <span class=\"spec-pill\">\u6c27\u5316\u5242\uff1aH\u2082O\u2082<\/span>\n      <span class=\"spec-pill\">\u7f3a\u9677\u98ce\u9669\uff1a <span class=\"badge high\">\u9ad8<\/span><\/span>\n    <\/div>\n  <\/div>\n\n  <p>\n    \u94dc CMP \u662f BEOL\uff08back-end-of-line\uff09\u4e92\u8fde\u5236\u9020\u4e2d\u5de5\u827a\u6700\u590d\u6742\u7684 CMP \u5e94\u7528\uff0c\u4e5f\u662f\u7f3a\u9677\u98ce\u9669\u6700\u9ad8\u7684\u5e94\u7528\u3002\u94dc\u53cc\u5c42\u5927\u9a6c\u58eb\u9769\u52a0\u5de5\uff08\u4ece 180 \u7eb3\u7c73\u5230 3 \u7eb3\u7c73\u7684\u6807\u51c6\u4e92\u8fde\u65b9\u6848\uff09\u81f3\u5c11\u9700\u8981\u4e24\u4e2a\u8fde\u7eed\u7684 CMP \u6b65\u9aa4\uff0c\u6bcf\u4e2a\u6b65\u9aa4\u7684\u6d46\u6599\u914d\u65b9\u90fd\u622a\u7136\u4e0d\u540c\u3002.\n  <\/p>\n\n  <p>\n    \u9274\u4e8e\u5176\u91cd\u8981\u6027\uff0c\u6211\u4eec\u4e13\u95e8\u4e3a\u6b64\u7f16\u5199\u4e86\u4e00\u4efd\u5b8c\u6574\u7684\u6df1\u5ea6\u6307\u5357\uff1a <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/copper-cmp-slurry-dual-damascene-process-formulation-defect-control-complete-engineering-guide\/\">\u94dc CMP \u6ce5\u6d46\uff1a\u5b8c\u6574\u5de5\u827a\u96c6\u6210\u6307\u5357<\/a>. .\u5728\u6b64\uff0c\u6211\u4eec\u5c06\u63d0\u4f9b\u57fa\u672c\u6982\u8ff0\u3002.\n  <\/p>\n\n  <h3>\u6b65\u9aa4 1\uff1a\u5927\u91cf\u9664\u94dc<\/h3>\n  <p>\n    \u5927\u5757\u94dc\u6b65\u9aa4\u4ee5\u9ad8 MRR\uff083,000-8,000 \u00c5\/min\uff09\u53bb\u9664\u5927\u90e8\u5206\u7535\u9540\u94dc\u8986\u76d6\u5c42\uff08\u901a\u5e38\u539a\u5ea6\u4e3a 500-1,500 nm\uff09\u3002\u6d46\u6599\u914d\u65b9\u4ee5\u8fc7\u6c27\u5316\u6c22\uff08H\u2082O\u2082\uff09\u4e3a\u6c27\u5316\u5242--\u5c06\u94dc\u8868\u9762\u8f6c\u5316\u4e3a Cu(OH)\u2082--\u7ed3\u5408\u87af\u5408\u5242\uff08\u5982\u7518\u6c28\u9178\u6216\u67e0\u6aac\u9178\uff09\u6765\u7edc\u5408\u6eb6\u89e3\u7684 Cu\u00b2\u207a \u79bb\u5b50\uff0c\u9632\u6b62\u518d\u6b21\u6c89\u79ef\u3002\u8150\u8680\u6291\u5236\u5242\uff08\u6700\u5e38\u89c1\u7684\u662f\u82ef\u5e76\u4e09\u6c2e\u5511\uff0cBTA\uff09\u53ef\u63a7\u5236\u94dc\u7684\u6eb6\u89e3\u901f\u5ea6\uff0c\u4ee5\u9632\u6b62\u5bbd\u751f\u4ea7\u7ebf\u4e2d\u7684\u5206\u5c42\u3002\u94dc\u4e0e TaN \u9694\u70ed\u7bb1\u7684\u9009\u62e9\u6027\u5fc5\u987b\u5927\u4e8e 100:1\uff0c\u4ee5\u9632\u6b62\u9694\u70ed\u7bb1\u65e9\u671f\u51fb\u7a7f\u3002.\n  <\/p>\n\n  <h3>\u6b65\u9aa4 2\uff1a\u62c6\u9664\u9694\u79bb\u5c42\/\u886c\u57ab<\/h3>\n  <p>\n    \u5728\u53bb\u9664\u5757\u72b6\u94dc\u540e\uff0c\u5fc5\u987b\u5728\u7b2c\u4e8c\u4e2a CMP \u6b65\u9aa4\u4e2d\u5c06\u573a\u6c27\u5316\u7269\u4e0a\u6b8b\u7559\u7684 TaN\/Ta \u9694\u79bb\u5c42\u548c\u94dc\/\u79cd\u5b50\u5c42\u5e73\u9762\u5316\u3002\u8fd9\u5c31\u8981\u6c42\u6d46\u6599\u5728\u94dc\u3001TaN \u548c SiO\u2082 \u4e4b\u95f4\u5177\u6709\u63a5\u8fd1\u7edf\u4e00\u7684\u9009\u62e9\u6027\uff0c\u8fd9\u4e0e\u5757\u72b6\u94dc\u7684\u9009\u62e9\u6027\u76ee\u6807\u6b63\u597d\u76f8\u53cd\u3002\u963b\u9694\u6de4\u6d46\u914d\u65b9\u4f7f\u7528\u63a5\u8fd1\u4e2d\u6027\u7684 pH \u503c\uff086-8\uff09\u3001\u4f4e\u6d53\u5ea6\u7684\u4e8c\u6c27\u5316\u7845\u7814\u78e8\u5242\u4ee5\u53ca\u7ecf\u8fc7\u7cbe\u5fc3\u5e73\u8861\u7684\u6c27\u5316\u5242\/\u6291\u5236\u5242\u7cfb\u7edf\uff0c\u4ee5 400-800 \u00c5\/min \u7684\u901f\u5ea6\u53bb\u9664 Ta\uff0c\u540c\u65f6\u6700\u5927\u9650\u5ea6\u5730\u51cf\u5c11 Cu \u629b\u5149\u548c SiO\u2082 \u4fb5\u8680\u3002\u6b64\u6b65\u9aa4\u4e2d\u7684\u6253\u78e8\u4f1a\u76f4\u63a5\u5f71\u54cd\u6574\u4e2a\u6a21\u5177\u91d1\u5c5e\u7ebf\u7684\u7535\u963b\u5747\u5300\u6027\u3002.\n  <\/p>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 6: TUNGSTEN SLURRY\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"tungsten-slurry\">6.\u94a8 CMP \u6ce5\u6d46<\/h2>\n\n  <div class=\"type-card tungsten\">\n    <div class=\"type-header\">\n      <div class=\"type-icon\">\u2699\ufe0f<\/div>\n      <div>\n        <p class=\"type-title\">\u94a8 CMP \u6ce5\u6d46<\/p>\n        <p class=\"type-subtitle\">\u7528\u4e8e W \u585e\u548c\u63a5\u89e6\u586b\u5145\u5e73\u9762\u5316\u7684\u9ad8 MRR \u6d46\u6599<\/p>\n      <\/div>\n    <\/div>\n    <div class=\"type-specs\">\n      <span class=\"spec-pill\">\u78e8\u6599\u6c27\u5316\u94dd\u6216\u6c14\u76f8\u4e8c\u6c27\u5316\u7845<\/span>\n      <span class=\"spec-pill\">pH \u503c\uff1a2-4<\/span>\n      <span class=\"spec-pill\">MRR (W)\uff1a 2,000-5,000 \u00c5\/min<\/span>\n      <span class=\"spec-pill\">\u6c27\u5316\u5242\uff1aH\u2082O\u2082\u3001Fe(NO\u2083)\u2083\u3001KIO\u2083<\/span>\n      <span class=\"spec-pill\">\u7f3a\u9677\u98ce\u9669\uff1a <span class=\"badge medium\">\u4e2d\u578b<\/span><\/span>\n    <\/div>\n  <\/div>\n\n  <p>\n    \u94a8 CMP \u6d46\u6599\u7528\u4e8e\u5e73\u9762\u5316\u8680\u523b\u901a\u5b54\u548c\u6c9f\u69fd\u4e2d\u901a\u8fc7 CVD \u94a8\u586b\u5145\u5f62\u6210\u7684 W \u63d2\u5934\u89e6\u70b9\u548c\u5c40\u90e8\u4e92\u8fde\u3002\u94a8 CMP \u662f\u4e00\u79cd FEOL\/MOL\uff08\u751f\u4ea7\u7ebf\u4e2d\u95f4\uff09\u5de5\u827a\u6b65\u9aa4\uff0c\u662f\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u78e8\u8680\u6027\u6700\u5f3a\u7684 CMP \u5e94\u7528\u4e4b\u4e00\uff0c\u539f\u56e0\u662f\u94a8\u7684\u786c\u5ea6\uff08\u83ab\u6c0f 7.5\uff09\u53ca\u5176\u5bb9\u6613\u5f62\u6210\u963b\u788d\u53bb\u9664\u7684\u539f\u751f\u6c27\u5316\u7269\u949d\u5316\u5c42\u3002.\n  <\/p>\n\n  <h3>\u914d\u65b9\u5316\u5b66<\/h3>\n  <p>\n    \u94a8\u6ce5\u6d46\u5448\u5f3a\u9178\u6027\uff08pH \u503c\u4e3a 2-4\uff09\uff0c\u9700\u8981\u4f7f\u7528\u6c27\u5316\u5242\u5c06\u94a8\u8868\u9762\u8f6c\u5316\u4e3a\u53ef\u6eb6\u6027\u94a8\u9178\u76d0\uff08WO\u2083 \/ WO\u2084\u00b2-\uff09\uff0c\u7136\u540e\u901a\u8fc7\u673a\u68b0\u65b9\u6cd5\u53bb\u9664\u3002\u4e00\u76f4\u4ee5\u6765\uff0c\u785d\u9178\u94c1\uff08Fe(NO\u2083)\u2083\uff09\u90fd\u662f\u6807\u51c6\u6c27\u5316\u5242\uff0c\u53ef\u63d0\u4f9b\u4e00\u81f4\u4e14\u53ef\u8c03\u7684 W MRR\u3002\u8fc7\u6c27\u5316\u6c22\uff08H\u2082O\u2082\uff09\u4f5c\u4e3a\u4e00\u79cd\u66f4\u73af\u4fdd\u7684\u66ff\u4ee3\u54c1\u5df2\u88ab\u5e7f\u6cdb\u91c7\u7528\uff0c\u4f46\u5b83\u9700\u8981\u66f4\u8c28\u614e\u7684 pH \u503c\u63a7\u5236\u624d\u80fd\u4fdd\u6301\u540c\u7b49\u6027\u80fd\u3002\u7898\u9178\u94be (KIO\u2083) \u5177\u6709\u5f88\u5f3a\u7684\u6c27\u5316\u80fd\u529b\uff0c\u91d1\u5c5e\u6c61\u67d3\u98ce\u9669\u6781\u4f4e\uff0c\u5728\u9ad8\u7eaf\u5ea6\u5e94\u7528\u4e2d\u5907\u53d7\u9752\u7750\u3002.\n  <\/p>\n  <p>\n    \u7528\u4e8e W CMP \u7684\u78e8\u6599\u9009\u62e9\u9700\u8981\u6743\u8861\u5229\u5f0a\uff1a\u6c27\u5316\u94dd\uff08Al\u2082O\u2083\uff09\u78e8\u6599\u56e0\u5176\u5353\u8d8a\u7684\u786c\u5ea6\u800c\u5177\u6709\u8f83\u9ad8\u7684 W MRR\uff0c\u4f46\u4f1a\u589e\u52a0\u5212\u4f24\u98ce\u9669\u548c CMP \u540e\u6e05\u6d17\u7684\u96be\u5ea6\u3002\u6c14\u76f8\u4e8c\u6c27\u5316\u7845\u6216\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u7684\u7f3a\u9677\u7387\u8f83\u4f4e\uff0c\u4f46 MRR \u7565\u6709\u964d\u4f4e\u3002\u73b0\u4ee3 W CMP \u6ce5\u6d46\u8d8a\u6765\u8d8a\u591a\u5730\u4f7f\u7528\u5177\u6709\u4f18\u5316\u6c27\u5316\u5242\u548c\u5206\u6563\u5242\u5316\u5b66\u6210\u5206\u7684\u4e8c\u6c27\u5316\u7845\u78e8\u6599\uff0c\u4ee5\u5b9e\u73b0\u9ad8 MRR\uff0c\u800c\u4e0d\u4f1a\u53d7\u5230\u6c27\u5316\u94dd\u7f3a\u9677\u7387\u7684\u5f71\u54cd\u3002.\n  <\/p>\n\n  <h3>\u505c\u6b62\u5c42\u884c\u4e3a<\/h3>\n  <p>\n    \u94a8 CMP \u5fc5\u987b\u505c\u5728\u94a8\u586b\u5145\u7269\u4e0b\u9762\u6c89\u79ef\u7684 Ti\/TiN \u9694\u79bb\u5c42\/\u7c98\u9644\u5c42\u4e0a\u3002\u6807\u51c6 W CMP \u6ce5\u6d46\u4e2d\u7684 W:TiN \u9009\u62e9\u6027\u7ea6\u4e3a 10:1 \u5230 20:1 - \u867d\u7136\u4e0d\u5982 STI \u9676\u74f7\u9009\u62e9\u6027\u7cbe\u786e\uff0c\u4f46\u8003\u8651\u5230 TiN \u76f8\u5bf9\u4e00\u81f4\u7684\u539a\u5ea6\u4ee5\u53ca\u4f7f\u7528\u5149\u5b66\u7aef\u70b9\u68c0\u6d4b\u8fdb\u884c\u9636\u8dc3\u68c0\u6d4b\uff0cTiN \u7684\u9009\u62e9\u6027\u5df2\u7ecf\u8db3\u591f\u3002\u8fc7\u5ea6\u53bb\u9664 TiN \u4f1a\u66b4\u9732\u5e95\u5c42\u7684 ILD \u6c27\u5316\u7269\uff0c\u5e76\u6709\u53ef\u80fd\u5bfc\u81f4\u4e0e\u76f8\u90bb\u7ed3\u6784\u7684\u63a5\u89e6\u77ed\u8def\u3002.\n  <\/p>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 7: BARRIER SLURRY\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"barrier-slurry\">7.\u9694\u79bb\u5c42\/\u5185\u886c CMP \u6ce5\u6d46<\/h2>\n\n  <div class=\"type-card barrier\">\n    <div class=\"type-header\">\n      <div class=\"type-icon\">\ud83d\udfe2<\/div>\n      <div>\n        <p class=\"type-title\">\u9694\u79bb\u5c42\/\u5185\u886c CMP \u6ce5\u6d46<\/p>\n        <p class=\"type-subtitle\">\u94dc\u91d1\u5c5e\u6c27\u5316\u8fd8\u539f\u5de5\u827a\u6b65\u9aa4 2\uff1a\u540c\u65f6\u5e73\u8861\u4e09\u79cd\u6750\u6599\u7684\u53bb\u9664\u6548\u679c<\/p>\n      <\/div>\n    <\/div>\n    <div class=\"type-specs\">\n      <span class=\"spec-pill\">\u7814\u78e8\u5242\uff1a\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\uff08\u4f4e\u6d53\u5ea6\uff09<\/span>\n      <span class=\"spec-pill\">pH \u503c\uff1a7-10<\/span>\n      <span class=\"spec-pill\">MRR (Ta)\uff1a400-800 \u00c5\/min<\/span>\n      <span class=\"spec-pill\">\u9009\u62e9\u6027\uff1a ~1:1:1 (Cu:Ta:SiO\u2082)<\/span>\n      <span class=\"spec-pill\">\u7f3a\u9677\u98ce\u9669\uff1a <span class=\"badge medium\">\u4e2d\u578b<\/span><\/span>\n    <\/div>\n  <\/div>\n\n  <p>\n    \u963b\u6321\u5c42 CMP \u6ce5\u6d46\u7528\u4e8e\u94dc\u53cc\u5927\u9a6c\u58eb\u9769 CMP \u5e8f\u5217\u7684\u7b2c\u4e8c\u6b65\u3002\u5728\u53bb\u9664\u94dc\u5757\u540e\uff0c\u573a\u4ecb\u8d28\u4e0a\u4f1a\u7559\u4e0b\u4e00\u4e2a\u590d\u5408\u8584\u819c\u5806\u6808--\u6b8b\u4f59\u8584\u94dc\u3001TaN\/Ta \u963b\u6321\u5c42\u548c\u94dc\u79cd\u5b50\u5c42\u3002\u963b\u6321\u5c42\u6d46\u6599\u5fc5\u987b\u4ee5\u53d7\u63a7\u7684\u3001\u63a5\u8fd1\u76f8\u7b49\u7684\u901f\u7387\u53bb\u9664\u6240\u6709\u4e09\u79cd\u6750\u6599\uff08\u94dc\u3001TaN\u3001SiO\u2082\uff09\uff0c\u4ee5\u83b7\u5f97\u5168\u5c40\u5e73\u9762\u8868\u9762\uff0c\u6700\u5927\u9650\u5ea6\u5730\u51cf\u5c11\u91d1\u5c5e\u7ebf\u4e0a\u7684\u9519\u4f4d\u548c\u5bc6\u96c6\u9635\u5217\u533a\u57df\u7684\u4fb5\u8680\u3002.\n  <\/p>\n\n  <p>\n    \u5728\u5148\u8fdb\u8282\u70b9\u4e0a\u5b9e\u73b0\u8fd9\u79cd\u8fd1\u4e4e\u7edf\u4e00\u7684\u591a\u6750\u6599\u9009\u62e9\u6027\uff0c\u540c\u65f6\u63a7\u5236\u5e73\u79fb\uff08&lt;30 nm\uff09\u548c\u4fb5\u8680\uff08&lt;20 nm\uff09\uff0c\u662f CMP \u6ce5\u6d46\u5316\u5b66\u4e2d\u6700\u5177\u6311\u6218\u6027\u7684\u914d\u65b9\u95ee\u9898\u4e4b\u4e00\u3002\u963b\u6321\u6d46\u6599\u7684\u5f00\u53d1\u5bf9\u7535\u4ecb\u8d28\u7c7b\u578b\u5c24\u5176\u654f\u611f--\u4ece TEOS SiO\u2082 \u8fc7\u6e21\u5230\u8d85\u4f4e K (ULK) \u591a\u5b54\u7535\u4ecb\u8d28\u4f1a\u5e26\u6765\u673a\u68b0\u8106\u6027\uff0c\u8fd9\u5c31\u9700\u8981\u91cd\u65b0\u914d\u7f6e\u78e8\u6599\u6d53\u5ea6\u3001\u786c\u5ea6\u548c\u65bd\u52a0\u538b\u529b\u3002.\n  <\/p>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 8: POLYSILICON SLURRY\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"polysilicon-slurry\">8.\u591a\u6676\u7845 CMP \u6ce5\u6d46<\/h2>\n\n  <div class=\"type-card poly\">\n    <div class=\"type-header\">\n      <div class=\"type-icon\">\ud83d\udd34<\/div>\n      <div>\n        <p class=\"type-title\">\u591a\u6676\u7845 CMP \u6ce5\u6d46<\/p>\n        <p class=\"type-subtitle\">\u6805\u6781\u5e73\u9762\u5316\u548c DRAM \u5355\u5143\u5236\u9020<\/p>\n      <\/div>\n    <\/div>\n    <div class=\"type-specs\">\n      <span class=\"spec-pill\">\u78e8\u6599\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/span>\n      <span class=\"spec-pill\">pH \u503c\uff1a10-12<\/span>\n      <span class=\"spec-pill\">MRR \uff08\u591a\u6676\u7845\uff09\uff1a800-2,000 \u00c5\/\u5206\u949f<\/span>\n      <span class=\"spec-pill\">\u9009\u62e9\u6027\uff1a\u805a\uff1a\u6c27\u5316\u7269 &gt;50:1<\/span>\n      <span class=\"spec-pill\">\u7f3a\u9677\u98ce\u9669\uff1a <span class=\"badge low\">\u4f4e<\/span><\/span>\n    <\/div>\n  <\/div>\n\n  <p>\n    \u591a\u6676\u7845 CMP \u6d46\u6599\u4e3b\u8981\u7528\u4e8e\u4e24\u79cd FEOL \u5e94\u7528\uff1aCMOS \u903b\u8f91\u4e2d\u7684\u6805\u7535\u6781\u5e73\u9762\u5316\uff08\u6805\u5148\u9ad8 K\/\u91d1\u5c5e\u6805\u65b9\u6848\uff09\u548c DRAM \u5236\u9020\u4e2d\u7684\u5355\u5143\u7535\u5bb9\u5668 CMP\u3002\u5728\u8fd9\u4e24\u79cd\u60c5\u51b5\u4e0b\uff0c\u7814\u78e8\u6db2\u90fd\u5fc5\u987b\u5728\u53bb\u9664\u591a\u6676\u7845\uff08poly-Si\uff09\u7684\u540c\u65f6\uff0c\u4ee5\u9ad8\u9009\u62e9\u6027\u505c\u5728\u5e95\u5c42\u6216\u5468\u56f4\u7684 SiO\u2082 \u6805\u6781\u6c27\u5316\u7269\u6216\u573a\u6c27\u5316\u7269\u8584\u819c\u4e0a\u3002.\n  <\/p>\n  <p>\n    \u805a\u7845\u6c27\u70f7\u548c\u4e8c\u6c27\u5316\u7845\u5728\u78b1\u6027\u6eb6\u6db2\u4e2d\u7684\u6eb6\u89e3\u901f\u7387\u968f pH \u503c\u7684\u53d8\u5316\u800c\u53d8\u5316\uff0c\u518d\u52a0\u4e0a\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u7814\u78e8\u5242\u548c\u80fa\u57fa\u6216\u5b63\u94f5\u6dfb\u52a0\u5242\u5305\uff0c\u53ef\u63d0\u9ad8\u805a\u7845\u6c27\u70f7\u7684\u8868\u9762\u53cd\u5e94\u901f\u5ea6\uff0c\u4ece\u800c\u5b9e\u73b0\u805a\u7845\u6c27\u70f7\u4e0e\u6c27\u5316\u7269\u7684\u9ad8\u9009\u62e9\u6027\uff08&gt;50:1\uff09\u3002\u5728 pH \u503c\u4e3a 10-12 \u65f6\uff0c\u591a\u6676\u7845\u8868\u9762\u53d7\u6c22\u6c27\u5316\u7269\u9a71\u52a8\u7684\u6eb6\u89e3\u901f\u5ea6\u660e\u663e\u5feb\u4e8e\u70ed\u751f\u957f\u7684\u6805\u6781\u6c27\u5316\u7845\uff0c\u4ece\u800c\u63d0\u4f9b\u4e86\u4e00\u79cd\u5929\u7136\u7684\u5316\u5b66\u9009\u62e9\u6027\uff0c\u8fd9\u79cd\u9009\u62e9\u6027\u53ef\u901a\u8fc7\u7cbe\u5fc3\u8bbe\u8ba1\u7684\u6dfb\u52a0\u5242\u5f97\u5230\u589e\u5f3a\u3002.\n  <\/p>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 9: EMERGING TYPES\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"emerging-types\">9.\u65b0\u5174\u7684 CMP \u6ce5\u6d46\u7c7b\u578b\uff1a\u94b4\u3001\u948c\u548c\u65e0\u78e8\u6599<\/h2>\n\n  <p>\n    \u968f\u7740\u534a\u5bfc\u4f53\u6280\u672f\u8fdb\u5165 3 \u7eb3\u7c73\u8282\u70b9\u53ca\u66f4\u9ad8\u9636\u6bb5\uff0c\u65b0\u7684\u5bfc\u4f53\u548c\u963b\u6321\u5c42\u6750\u6599\u4e0d\u65ad\u95ee\u4e16\uff0c\u8fd9\u5c31\u9700\u8981\u4ece\u6839\u672c\u4e0a\u91c7\u7528\u65b0\u7684\u7814\u78e8\u6db2\u5316\u5b66\u6210\u5206\u3002\u8fd9\u4e9b\u65b0\u5174\u7684\u7814\u78e8\u6db2\u7c7b\u578b\u4ee3\u8868\u4e86\u5f53\u524d CMP \u914d\u65b9\u7814\u7a76\u7684\u524d\u6cbf\u3002\u6211\u4eec\u7684\u4e13\u95e8\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-for-advanced-nodes-5nm-3nm-2nm-beyond-technical-challenges-innovations\/\">\u7528\u4e8e\u5148\u8fdb\u8282\u70b9\u7684 CMP \u6ce5\u6d46\uff1a\u6311\u6218\u4e0e\u521b\u65b0<\/a> \u5bf9\u8fd9\u4e00\u4e3b\u9898\u8fdb\u884c\u4e86\u5e7f\u6cdb\u6df1\u5165\u7684\u6280\u672f\u63a2\u8ba8\u3002.\n  <\/p>\n\n  <h3>9.1 \u94b4 CMP \u6ce5\u6d46<\/h3>\n\n  <div class=\"type-card cobalt\">\n    <div class=\"type-header\">\n      <div class=\"type-icon\">\ud83e\ude77<\/div>\n      <div>\n        <p class=\"type-title\">\u94b4 CMP \u6ce5\u6d46<\/p>\n        <p class=\"type-subtitle\">\u226410\u7eb3\u7c73\u8282\u70b9\u4e0a\u7684MOL\u89e6\u70b9\u548c\u5c40\u90e8\u4e92\u8fde<\/p>\n      <\/div>\n    <\/div>\n    <div class=\"type-specs\">\n      <span class=\"spec-pill\">\u78e8\u6599\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/span>\n      <span class=\"spec-pill\">pH \u503c\uff1a4-8<\/span>\n      <span class=\"spec-pill\">\u72b6\u6001\uff1a\u751f\u4ea7\uff08\u226410 \u7eb3\u7c73\uff09<\/span>\n      <span class=\"spec-pill\">\u7f3a\u9677\u98ce\u9669\uff1a <span class=\"badge high\">\u9ad8<\/span><\/span>\n    <\/div>\n  <\/div>\n\n  <p>\n    \u5728 10nm \u53ca\u4ee5\u4e0b\uff08\u82f1\u7279\u5c14 10nm\/7nm\u3001\u4e09\u661f SF4\/SF3\u3001\u53f0\u79ef\u7535 N7\/N5\uff09\u7684 MOL \u89e6\u70b9\u548c\u5c40\u90e8\u4e92\u8fde\u5e94\u7528\u4e2d\uff0c\u94b4\u5df2\u7ecf\u53d6\u4ee3\u4e86\u94a8\uff0c\u539f\u56e0\u662f\u94b4\u5728\u5c0f\u5c3a\u5bf8\u65f6\u7535\u963b\u7387\u8f83\u4f4e\uff0c\u800c\u4e14\u5728 20nm \u4ee5\u4e0b\u76f4\u5f84\u7684\u89e6\u70b9\u4e2d\u5177\u6709\u66f4\u597d\u7684\u95f4\u9699\u586b\u5145\u7279\u6027\u3002\u94b4 CMP \u6d46\u6599\u5177\u6709\u72ec\u7279\u7684\u914d\u65b9\u6311\u6218\uff1a\u94b4\u5728\u5f88\u5bbd\u7684 pH \u503c\u8303\u56f4\u5185\u90fd\u5177\u6709\u7535\u5316\u5b66\u6d3b\u6027\uff0c\u4e0e TiN \u6216 SiO\u2082 \u63a5\u89e6\u65f6\u5bb9\u6613\u53d1\u751f\u7535\u5316\u5b66\u8150\u8680\uff0c\u800c\u4e14\u5bf9\u6c27\u5316\u5242\u6d53\u5ea6\u975e\u5e38\u654f\u611f--\u6c27\u5316\u8fc7\u5ea6\u4f1a\u4ea7\u751f\u70b9\u8680\u7f3a\u9677\uff0c\u800c\u6c27\u5316\u4e0d\u8db3\u5219\u4f1a\u7559\u4e0b\u672a\u629b\u5149\u7684\u6b8b\u7559\u7269\u3002\u6210\u529f\u7684\u94b4 CMP \u9700\u8981\u4e25\u683c\u63a7\u5236 H\u2082O\u2082\u6d53\u5ea6\u3001\u4e13\u7528\u7f13\u8680\u5242\u548c\u4f18\u5316\u7684\u87af\u5408\u5242\uff0c\u4ee5\u7ba1\u7406\u6eb6\u6db2\u4e2d\u94b4\u207a\/\u94b4\u00b3\u207a\u7684\u79cd\u7c7b\u3002.\n  <\/p>\n\n  <h3>9.2 \u948c CMP \u6ce5\u6d46<\/h3>\n  <p>\n    \u948c\uff08Ru\uff09\u56e0\u5176\u6781\u4f4e\u7684\u4f53\u7535\u963b\u7387\uff087.1 \u00b5\u03a9-cm\uff09\u3001\u826f\u597d\u7684\u6297\u7535\u8fc1\u79fb\u6027\u4ee5\u53ca\u4e0e\u539a\u5ea6\u22641 \u7eb3\u7c73\u7684 ALD \u6c89\u79ef\u7684\u517c\u5bb9\u6027\uff0c\u6b63\u5728\u6210\u4e3a 3 \u7eb3\u7c73\u53ca\u4ee5\u4e0a\u7684\u4e0b\u4e00\u4ee3\u963b\u6321\u5c42\u3001\u886c\u57ab\u548c\u5c40\u90e8\u4e92\u8fde\u6750\u6599\u3002\u5927\u591a\u6570\u4e3b\u8981\u4f9b\u5e94\u5546\u4ecd\u5728\u79ef\u6781\u5f00\u53d1 Ru CMP \u6d46\u6599\uff1a\u948c\u7684\u539f\u751f\u6c27\u5316\u7269\uff08RuO\u2082\uff09\u60f0\u6027\u6781\u5f3a\uff0c\u800c\u4e14\u7535\u5316\u5b66\u884c\u4e3a\u590d\u6742\uff0c\u56e0\u6b64\u8981\u5728\u4e0d\u8fc7\u5ea6\u8150\u8680\u7684\u60c5\u51b5\u4e0b\u5b9e\u73b0\u9ad8\u800c\u7a33\u5b9a\u7684 MRR \u6781\u5177\u6311\u6218\u6027\u3002\u5728\u76ee\u524d\u7684\u7814\u7a76\u4e2d\uff0c\u4f7f\u7528\u4e13\u95e8\u7684\u9ad8\u7898\u9178\u76d0\u6216\u785d\u9178\u94c8\u94f5\u6c27\u5316\u5242\u8fdb\u884c\u63a5\u8fd1\u4e2d\u6027 pH \u503c\u7684\u6c27\u5316\u5f88\u6709\u524d\u666f\u3002.\n  <\/p>\n\n  <h3>9.3 \u65e0\u78e8\u6599\u6ce5\u6d46\uff08AFS\uff09<\/h3>\n  <p>\n    \u5bf9\u4e8e\u8d85\u7075\u654f\u5e94\u7528\uff08\u5305\u62ec EUV \u5149\u63a9\u819c\u576f\u629b\u5149\u3001SOI \u6676\u5706\u6700\u7ec8\u629b\u5149\u548c 2nm \u8282\u70b9 ULK \u5c42\u95f4\u4ecb\u8d28\u7cbe\u52a0\u5de5\uff09\uff0c\u7eaf\u7cb9\u4f9d\u9760\u5316\u5b66\u6eb6\u89e3\u7684\u65e0\u7814\u78e8\u5242\u6d46\u6599\u662f\u5b9e\u73b0\u4f4e\u4e8e 0.1 nm Ra \u8868\u9762\u7c97\u7cd9\u5ea6\u548c\u96f6\u9897\u7c92\u5fae\u5212\u75d5\u7684\u552f\u4e00\u9014\u5f84\u3002AFS \u914d\u65b9\u727a\u7272\u4e86\u51e0\u4e4e\u65e0\u7f3a\u9677\u8868\u9762\u7684 MRR\uff08&lt;200 \u00c5\/min\uff0c\u5178\u578b\u503c\uff09\uff0c\u4f7f\u5176\u53ea\u9002\u5408\u4f5c\u4e3a\u6700\u540e\u7684\u7cbe\u52a0\u5de5\u6b65\u9aa4\uff0c\u800c\u975e\u6279\u91cf\u53bb\u9664\u5de5\u827a\u3002.\n  <\/p>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 10: FULL COMPARISON TABLE\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"comparison-table\">10.\u5168 CMP \u6ce5\u6d46\u7c7b\u578b\u5bf9\u7167\u8868<\/h2>\n\n  <p>\u4f7f\u7528\u6b64\u53c2\u8003\u8868\u53ef\u5728\u5355\u4e00\u89c6\u56fe\u4e2d\u6bd4\u8f83\u6240\u6709\u4e3b\u8981 CMP \u6ce5\u6d46\u7c7b\u578b\u7684\u5173\u952e\u5de5\u827a\u53c2\u6570\u3002.<\/p>\n\n  <div class=\"cmp-table-wrap\">\n    <table class=\"cmp-table\">\n      <thead>\n        <tr>\n          <th>\u6ce5\u6d46\u7c7b\u578b<\/th>\n          <th>\u78e8\u6599<\/th>\n          <th>pH \u503c<\/th>\n          <th>\u5178\u578b\u7684 MRR<\/th>\n          <th>\u5173\u952e\u9009\u62e9\u6027<\/th>\n          <th>\u7f3a\u9677\u98ce\u9669<\/th>\n          <th>\u521d\u7ea7\u5de5\u827a<\/th>\n        <\/tr>\n      <\/thead>\n      <tbody>\n        <tr>\n          <td><strong>\u6c27\u5316\u7269 \/ ILD<\/strong><\/td>\n          <td>\u80f6\u4f53 SiO\u2082<\/td>\n          <td>10-11<\/td>\n          <td>1,000-3,000 \u00c5\/min<\/td>\n          <td>SiO\u2082:Si\u2083N\u2084 ~5:1<\/td>\n          <td><span class=\"badge low\">\u4f4e<\/span><\/td>\n          <td>ILD \u5e73\u9762\u5316\uff08BEOL\uff09<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>STI<\/strong><\/td>\n          <td>\u94c8 (CeO\u2082)<\/td>\n          <td>5-8<\/td>\n          <td>1,500-4,000 \u00c5\/min<\/td>\n          <td>SiO\u2082:Si\u2083N\u2084 &gt;50:1<\/td>\n          <td><span class=\"badge medium\">\u4e2d\u578b<\/span><\/td>\n          <td>FEOL \u6676\u4f53\u7ba1\u9694\u79bb<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u6563\u88c5\u94dc<\/strong><\/td>\n          <td>\u80f6\u4f53 SiO\u2082<\/td>\n          <td>3-5<\/td>\n          <td>3,000-8,000 \u00c5\/min<\/td>\n          <td>\u94dc:\u94bd &gt;100:1<\/td>\n          <td><span class=\"badge high\">\u9ad8<\/span><\/td>\n          <td>\u94dc\u53cc\u5927\u9a6c\u58eb\u9769\u6b65\u9aa4 1<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u969c\u788d<\/strong><\/td>\n          <td>\u80f6\u4f53 SiO\u2082\uff08\u4f4e\uff09<\/td>\n          <td>7-10<\/td>\n          <td>400-800 \u00c5\/min (Ta)<\/td>\n          <td>~1:1:1 \uff08Cu:Ta:\u6c27\u5316\u7269\uff09<\/td>\n          <td><span class=\"badge medium\">\u4e2d\u578b<\/span><\/td>\n          <td>\u94dc\u53cc\u5927\u9a6c\u58eb\u9769\u6b65\u9aa4 2<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u94a8<\/strong><\/td>\n          <td>Al\u2082O\u2083 \u6216 SiO\u2082<\/td>\n          <td>2-4<\/td>\n          <td>2,000-5,000 \u00c5\/min<\/td>\n          <td>W:TiN ~10-20:1<\/td>\n          <td><span class=\"badge medium\">\u4e2d\u578b<\/span><\/td>\n          <td>W \u63d2\u5934\/\u89e6\u70b9\uff08MOL\uff09<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u591a\u6676\u7845<\/strong><\/td>\n          <td>\u80f6\u4f53 SiO\u2082<\/td>\n          <td>10-12<\/td>\n          <td>800-2,000 \u00c5\/min<\/td>\n          <td>\u805a\u6c27\u5316\u7269 &gt;50:1<\/td>\n          <td><span class=\"badge low\">\u4f4e<\/span><\/td>\n          <td>\u6805\u6781 CMP \/ DRAM \u5355\u5143<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u94b4<\/strong><\/td>\n          <td>\u80f6\u4f53 SiO\u2082<\/td>\n          <td>4-8<\/td>\n          <td>1,000-3,000 \u00c5\/min<\/td>\n          <td>Co:TiN \u53d8\u91cf<\/td>\n          <td><span class=\"badge high\">\u9ad8<\/span><\/td>\n          <td>MOL \u89e6\u5934\uff08\u226410 \u7eb3\u7c73\uff09<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u65e0\u78e8\u6599<\/strong><\/td>\n          <td>\u65e0<\/td>\n          <td>\u89c6\u60c5\u51b5\u800c\u5b9a<\/td>\n          <td>&lt;200 \u00c5\/min<\/td>\n          <td>\u4e0d\u9002\u7528<\/td>\n          <td><span class=\"badge low\">\u6700\u4f4e\u9650\u5ea6<\/span><\/td>\n          <td>\u6700\u7ec8\u629b\u5149\/\u8d85\u7d2b\u5916\u576f\u6599<\/td>\n        <\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n\n  <!-- Mid-article CTA -->\n  <div class=\"cmp-cta\">\n    <h3>\u5bfb\u627e\u9002\u5408\u60a8\u5de5\u827a\u7684 CMP \u6ce5\u6d46\uff1f<\/h3>\n    <p>\u5409\u4e4b\u5c9b\u7535\u5b50\u79d1\u6280\u4e3a\u6c27\u5316\u7269\u3001STI\u3001\u91d1\u5c5e\u548c\u963b\u6321\u5c42\u5e94\u7528\u63d0\u4f9b CMP \u629b\u5149\u6d46\u6599\u89e3\u51b3\u65b9\u6848\u3002\u6211\u4eec\u7684\u5e94\u7528\u5de5\u7a0b\u5e08\u968f\u65f6\u51c6\u5907\u4e0e\u60a8\u8ba8\u8bba\u5177\u4f53\u7684\u5de5\u827a\u8981\u6c42\u3002.<\/p>\n    <a href=\"https:\/\/jeez-semicon.com\/zh\/contact\/\">\u7d22\u53d6\u6280\u672f\u6837\u672c \u2192<\/a>\n  <\/div>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 11: SELECTION GUIDE\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"selection-guide\">11.\u5982\u4f55\u9009\u62e9\u6b63\u786e\u7684 CMP \u6ce5\u6d46\u7c7b\u578b\uff1f\u51b3\u7b56\u6846\u67b6<\/h2>\n\n  <p>\n    \u4e3a\u65b0\u7684\u6216\u6539\u8fdb\u7684 CMP \u5de5\u827a\u6b65\u9aa4\u9009\u62e9\u6b63\u786e\u7684\u6d46\u6599\u7c7b\u578b\u9700\u8981\u9075\u5faa\u903b\u8f91\u51b3\u7b56\u6811\u3002\u4ee5\u4e0b\u6846\u67b6\u53ef\u6307\u5bfc\u5de5\u827a\u5de5\u7a0b\u5e08\u548c\u91c7\u8d2d\u4e13\u5bb6\u6309\u7167\u6b63\u786e\u7684\u987a\u5e8f\u89e3\u51b3\u5173\u952e\u95ee\u9898\u3002.\n  <\/p>\n\n  <h3>\u6b65\u9aa4 1 - \u786e\u5b9a\u76ee\u6807\u8584\u819c\u548c\u505c\u6b62\u5c42<\/h3>\n  <p>\n    \u76ee\u6807\u8584\u819c\u662f\u4e0d\u5bb9\u5ffd\u89c6\u7684\u8d77\u70b9\u3002\u786e\u8ba4\u8981\u629b\u5149\u7684\u786e\u5207\u8584\u819c\uff08\u4f8b\u5982\uff0cTEOS SiO\u2082 \u4e0e HDP SiO\u2082 \u4e0e\u65cb\u6d82\u6c27\u5316\u7269--\u6bcf\u79cd\u90fd\u6709\u4e0d\u540c\u7684\u5bc6\u5ea6\u548c\u629b\u5149\u54cd\u5e94\uff09\uff0c\u5e76\u786e\u5b9a\u5176\u6240\u9700\u8680\u523b\u9009\u62e9\u6027\u7684\u505c\u6b62\u5c42\u3002\u5982\u679c\u4e0d\u5b58\u5728\u786c\u6027\u505c\u6b62\u5c42\uff0c\u5219\u8ba1\u5212\u4f7f\u7528\u5149\u5b66\u7aef\u70b9\u652f\u6301\u8fdb\u884c\u5b9a\u65f6\u629b\u5149\u3002.\n  <\/p>\n\n  <h3>\u6b65\u9aa4 2 - \u786e\u5b9a\u6240\u9700\u7684\u9009\u62e9\u6027\u6bd4\u7387<\/h3>\n  <p>\n    \u8bf7\u53c2\u8003\u5de5\u827a\u96c6\u6210\u89c4\u8303\uff0c\u4e86\u89e3\u53ef\u63a5\u53d7\u7684\u6700\u5c0f\u6b62\u505c\u5c42\u5269\u4f59\u819c\u539a\u53ca\u5176\u5141\u8bb8\u7684\u53d8\u5316\u3002\u6839\u636e\u9884\u671f\u7684\u8fc7\u629b\u5149\u65f6\u95f4\uff08\u901a\u5e38\u4e3a 10-30%\uff09\u53cd\u5411\u8ba1\u7b97\u6240\u9700\u7684\u9009\u62e9\u6027\u6bd4\u7387\u3002\u6c2e\u5316\u7269\u635f\u5931\u9884\u7b97\u5c0f\u4e8e 2 \u7eb3\u7c73\u7684 STI \u5de5\u827a\u9700\u8981\u9009\u62e9\u6027 &gt;100:1\uff0c\u56e0\u6b64\u5fc5\u987b\u4f7f\u7528\u94c8\u6d46\u3002\u65e0\u505c\u6b62\u5c42\u7684\u6c27\u5316\u7269 ILD \u5de5\u827a\u4e0d\u9700\u8981\u9009\u62e9\u6027\u89c4\u683c - \u9002\u5408\u4f7f\u7528\u4e8c\u6c27\u5316\u7845\u6d46\u6599\u3002.\n  <\/p>\n\n  <h3>\u6b65\u9aa4 3 - \u8bbe\u7f6e MRR \u548c\u541e\u5410\u91cf\u8981\u6c42<\/h3>\n  <p>\n    \u6839\u636e\u76ee\u6807\u53bb\u9664\u539a\u5ea6\u548c CMP \u5de5\u5177\u5468\u671f\u65f6\u95f4\u9884\u7b97\u8ba1\u7b97\u6240\u9700\u7684 MRR\u3002\u8f83\u9ad8\u7684 MRR \u53ef\u7f29\u77ed\u629b\u5149\u65f6\u95f4\uff0c\u4f46\u4f1a\u964d\u4f4e WIWNU \u503c\u5e76\u589e\u52a0\u8131\u6a21\u98ce\u9669\u3002\u786e\u4fdd\u6240\u9009\u6ce5\u6d46\u7c7b\u578b\u80fd\u5728\u6240\u5b89\u88c5\u7684 CMP \u5de5\u5177\u5e73\u53f0\u53ef\u63a5\u53d7\u7684\u538b\u529b\u548c\u901f\u5ea6\u8bbe\u7f6e\u8303\u56f4\u5185\u63d0\u4f9b\u6240\u9700\u7684 MRR\u3002.\n  <\/p>\n\n  <h3>\u6b65\u9aa4 4 - \u8bc4\u4f30\u7f3a\u9677\u9884\u7b97<\/h3>\n  <p>\n    \u6709\u5173\u5141\u8bb8\u7684\u5212\u75d5\u5bc6\u5ea6\u3001LPC\uff08\u5927\u9897\u7c92\u8ba1\u6570\uff09\u548c\u91d1\u5c5e\u6c61\u67d3\u9650\u5236\uff0c\u8bf7\u54a8\u8be2\u60a8\u7684\u6210\u54c1\u7387\u6a21\u578b\u3002\u91d1\u5c5e CMP \u6b65\u9aa4\uff08\u94dc\u3001\u94b4\uff09\u901a\u5e38\u5177\u6709\u6700\u4e25\u683c\u7684\u7f3a\u9677\u7387\u9884\u7b97\u3002\u94c8\u6d46\u6599\uff08STI\uff09\u9700\u8981\u7279\u5b9a\u7684 CMP \u540e\u6e05\u6d01\u5316\u5b66\u65b9\u6cd5\u6765\u53bb\u9664\u6b8b\u7559\u7684\u94c8\u9897\u7c92\u3002\u8fd9\u4e9b\u8981\u6c42\u53ef\u80fd\u4f1a\u8fdb\u4e00\u6b65\u9650\u5236\u60a8\u7684\u6d46\u6599\u5019\u9009\u540d\u5355\u3002\u7f3a\u9677\u7ba1\u7406\u5728\u6211\u4eec\u7684\u4e13\u95e8\u6307\u5357\u4e2d\u6709\u6240\u4ecb\u7ecd\uff0c\u8be5\u6307\u5357\u7684\u5185\u5bb9\u5305\u62ec <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-defects-root-cause-analysis-quality-control-complete-engineering-guide\/\">CMP \u6ce5\u6d46\u7f3a\u9677\u5206\u6790\u4e0e\u8d28\u91cf\u63a7\u5236<\/a>.\n  <\/p>\n\n  <h3>\u6b65\u9aa4 5 - \u8bc4\u4f30\u5904\u7406\u548c\u57fa\u7840\u8bbe\u65bd\u7684\u517c\u5bb9\u6027<\/h3>\n  <p>\n    \u67d0\u4e9b\u6d46\u6599\u7c7b\u578b\u6709\u7279\u5b9a\u7684\u5904\u7406\u8981\u6c42\uff1a\u94c8\u548c\u6c27\u5316\u94dd\u78e8\u6599\u5bc6\u5ea6\u8f83\u5927\uff0c\u66f4\u5bb9\u6613\u6c89\u964d\uff0c\u9700\u8981\u5faa\u73af\u56de\u8def\uff1b\u542b H\u2082O\u2082 \u7684\u94dc\u6d46\u6599\u7684\u7f50\u88c5\u5bff\u547d\u6709\u9650\uff08\u5728\u5f00\u653e\u5f0f\u5206\u914d\u7cfb\u7edf\u4e2d\u5c0f\u4e8e 24 \u5c0f\u65f6\uff09\uff0c\u9700\u8981 N\u2082 \u5c4f\u853d\u8f93\u9001\u7cfb\u7edf\uff1b\u9ad8\u9178\u6027 W \u6d46\u6599\u9700\u8981\u8010\u8150\u8680\u7684\u7ba1\u6750\u548c\u914d\u4ef6\u6750\u6599\uff08PVDF\u3001PFA\uff09\u3002\u5728\u786e\u5b9a\u6d46\u6599\u7c7b\u578b\u9009\u62e9\u4e4b\u524d\uff0c\u8bf7\u8bc4\u4f30\u5de5\u5382\u73b0\u6709\u7684\u5316\u5b66\u673a\u68b0\u57fa\u7840\u8bbe\u65bd\u3002\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u6307\u5357 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-filters-storage-handling-complete-engineering-guide\/\">CMP \u6ce5\u6d46\u8fc7\u6ee4\u5668\u3001\u50a8\u5b58\u548c\u5904\u7406<\/a> \u6309\u6ce5\u6d46\u7c7b\u578b\u5206\u5217\u7684\u57fa\u7840\u8bbe\u65bd\u8981\u6c42\u3002.\n  <\/p>\n\n  <div class=\"matrix-grid\">\n    <div class=\"matrix-card\">\n      <div class=\"mc-label\">\u76ee\u6807\uff1aSiO\u2082 (ILD)<\/div>\n      <div class=\"mc-value\">\u2192 \u6c27\u5316\u7269\u6ce5\u6d46<br><small style=\"font-weight:400;font-size:13px;color:#64748b;\">\u78b1\u6027\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/small><\/div>\n    <\/div>\n    <div class=\"matrix-card\">\n      <div class=\"mc-label\">\u76ee\u6807\uff1aSi\u2082\uff0c\u505c\u5728 Si\u2083N\u2084\u4e0a<\/div>\n      <div class=\"mc-value\">\u2192 STI \u6ce5\u6d46<br><small style=\"font-weight:400;font-size:13px;color:#64748b;\">\u94c8\uff0c\u8fd1\u4e2d\u6027<\/small><\/div>\n    <\/div>\n    <div class=\"matrix-card\">\n      <div class=\"mc-label\">\u76ee\u6807\uff1a\u94dc\uff08\u6563\u88c5\uff09<\/div>\n      <div class=\"mc-value\">\u2192 \u94dc\u6d46<br><small style=\"font-weight:400;font-size:13px;color:#64748b;\">\u4e8c\u6c27\u5316\u7845 + H\u2082O\u2082\uff0c\u9178\u6027<\/small><\/div>\n    <\/div>\n    <div class=\"matrix-card\">\n      <div class=\"mc-label\">\u76ee\u6807TaN\/Ta \u5c4f\u969c<\/div>\n      <div class=\"mc-value\">\u2192 \u9694\u79bb\u6ce5\u6d46<br><small style=\"font-weight:400;font-size:13px;color:#64748b;\">\u4e8c\u6c27\u5316\u7845\uff0c\u8fd1\u4e2d\u6027<\/small><\/div>\n    <\/div>\n    <div class=\"matrix-card\">\n      <div class=\"mc-label\">\u76ee\u6807W \u63d2\u5934<\/div>\n      <div class=\"mc-value\">\u2192 W \u6ce5\u6d46<br><small style=\"font-weight:400;font-size:13px;color:#64748b;\">\u6c27\u5316\u94dd\/\u4e8c\u6c27\u5316\u7845\uff0c\u5f3a\u9178\u6027<\/small><\/div>\n    <\/div>\n    <div class=\"matrix-card\">\n      <div class=\"mc-label\">\u76ee\u6807\u591a\u6676\u7845\u6805\u6781<\/div>\n      <div class=\"mc-value\">\u2192 \u591a\u6676\u7845\u6d46\u6599<br><small style=\"font-weight:400;font-size:13px;color:#64748b;\">\u7845\u77f3\uff0c\u5f3a\u78b1\u6027<\/small><\/div>\n    <\/div>\n  <\/div>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 12: FAQ\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"faq\">12.\u5e38\u89c1\u95ee\u9898<\/h2>\n\n  <div class=\"cmp-faq\" itemscope itemtype=\"https:\/\/schema.org\/FAQPage\">\n\n    <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n      <p class=\"faq-question\" itemprop=\"name\">\u4e00\u79cd CMP \u6ce5\u6d46\u53ef\u7528\u4e8e\u591a\u79cd\u4e0d\u540c\u7c7b\u578b\u7684\u8584\u819c\u5417\uff1f<\/p>\n      <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n        <div itemprop=\"text\">\u4e00\u822c\u6765\u8bf4\uff0c\u5728\u57fa\u672c\u4e0d\u540c\u7684\u8584\u819c\u7c7b\u578b\u4e2d\u4f7f\u7528\u540c\u4e00\u79cd\u6d46\u6599\u662f CMP \u5f00\u53d1\u8fc7\u7a0b\u4e2d\u5e38\u89c1\u7684\u5931\u8d25\u539f\u56e0\u3002\u6bcf\u79cd\u6d46\u6599\u7c7b\u578b\u90fd\u9488\u5bf9\u7279\u5b9a\u76ee\u6807\u8584\u819c\u7684\u5316\u5b66\u53cd\u5e94\u6027\u548c\u673a\u68b0\u6027\u80fd\u8fdb\u884c\u4e86\u4f18\u5316\u3002\u4e0d\u8fc7\uff0c\u4e5f\u5b58\u5728\u4e00\u4e9b\u8fb9\u7f18\u5e94\u7528\u91cd\u53e0\uff1a\u5728\u9009\u62e9\u6027\u63a7\u5236\u5e76\u4e0d\u91cd\u8981\u7684\u5e94\u7528\u4e2d\uff0c\u67d0\u4e9b\u9009\u62e9\u6027\u964d\u4f4e\u7684\u914d\u5236\u6c27\u5316\u7269\u6d46\u6599\u53ef\u540c\u65f6\u629b\u5149 SiO\u2082 \u548c Si\u2083N\u2084\u3002\u201c\u901a\u7528 \u201d\u6216 \u201c\u591a\u819c \u201d\u7814\u78e8\u6db2\u4f5c\u4e3a\u4ea7\u54c1\u5b58\u5728\uff0c\u4f46\u4e0e\u4e13\u7528\u914d\u65b9\u76f8\u6bd4\uff0c\u901a\u5e38\u5728 MRR \u6216\u9009\u62e9\u6027\u65b9\u9762\u6709\u6240\u59a5\u534f\u3002.<\/div>\n      <\/div>\n    <\/div>\n\n    <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n      <p class=\"faq-question\" itemprop=\"name\">STI \u6ce5\u6d46\u548c\u6807\u51c6\u6c27\u5316\u7269\u6ce5\u6d46\u6709\u4ec0\u4e48\u533a\u522b\uff1f<\/p>\n      <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n        <div itemprop=\"text\">\u5173\u952e\u533a\u522b\u5728\u4e8e\u78e8\u6599\u7c7b\u578b\u548c\u7531\u6b64\u4ea7\u751f\u7684\u9009\u62e9\u6027\u3002\u6807\u51c6\u6c27\u5316\u7269\u7814\u78e8\u6db2\u4f7f\u7528\u7684\u662f\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\uff0c\u5176 SiO\u2082:Si\u2083N\u2084 \u9009\u62e9\u6027\u7ea6\u4e3a 5-10:1\u3002STI \u6ce5\u6d46\u4f7f\u7528\u6c27\u5316\u94c8\uff08\u94c8\uff09\u78e8\u6599\uff0c\u5b83\u4e0e SiO\u2082 \u53d1\u751f\u8868\u9762\u5316\u5b66\u53cd\u5e94\u673a\u5236\uff0c\u4f7f\u9009\u62e9\u6027\u6bd4\u7387\u8fbe\u5230 50:1 \u5230 200:1\u3002\u8fd9\u79cd\u9ad8\u9009\u62e9\u6027\u5bf9\u4e8e STI CMP \u81f3\u5173\u91cd\u8981\uff0c\u56e0\u4e3a\u5728\u6c27\u5316\u7269\u629b\u5149\u6b65\u9aa4\u4e2d\uff0c\u6c2e\u5316\u505c\u6b62\u5c42\u7684\u6d88\u8017\u91cf\u5fc5\u987b\u5c0f\u4e8e 2-3 nm\u3002\u5728 STI \u4e2d\u4f7f\u7528\u6807\u51c6\u6c27\u5316\u7269\u6d46\u6599\u4f1a\u6d88\u8017\u6c2e\u5316\u505c\u6b62\u5c42\uff0c\u635f\u574f\u6676\u4f53\u7ba1\u7684\u6709\u6e90\u533a\u3002.<\/div>\n      <\/div>\n    <\/div>\n\n    <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n      <p class=\"faq-question\" itemprop=\"name\">\u4e3a\u4ec0\u4e48\u94dc CMP \u9700\u8981\u4e24\u79cd\u4e0d\u540c\u7684\u6ce5\u6d46\uff1f<\/p>\n      <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n        <div itemprop=\"text\">\u94dc CMP \u9700\u8981\u4e24\u4e2a\u6b65\u9aa4\uff0c\u56e0\u4e3a\u5927\u91cf\u94dc\u53bb\u9664\u548c\u963b\u6321\u5c42\u53bb\u9664\u8fd9\u4e24\u4e2a\u76ee\u6807\u662f\u76f8\u4e92\u6392\u65a5\u7684\u3002\u6b65\u9aa4 1\uff08\u94dc\u6d46\uff09\u9700\u8981\u975e\u5e38\u9ad8\u7684\u94dc:\u963b\u6321\u5c42\u9009\u62e9\u6027\uff08&gt;100:1\uff09\uff0c\u4ee5\u4fbf\u5728\u4e0d\u635f\u574f\u8584\u7684 TaN\/Ta \u963b\u6321\u5c42\u7684\u60c5\u51b5\u4e0b\u5feb\u901f\u53bb\u9664\u94dc--\u6b64\u5904\u4f7f\u7528\u7684\u963b\u6321\u5c42\u6d46\u53bb\u9664\u94dc\u7684\u901f\u5ea6\u592a\u6162\u4e14\u4e0d\u5747\u5300\u3002\u6b65\u9aa4 2\uff08\u963b\u6321\u5c42\u6d46\u6599\uff09\u9700\u8981\u94dc\u3001TaN \u548c SiO\u2082\u4e4b\u95f4\u63a5\u8fd1\u7edf\u4e00\u7684\u9009\u62e9\u6027\uff0c\u4ee5\u4fbf\u5728\u4e0d\u8fc7\u5ea6\u629b\u5149\u51f9\u9677\u94dc\u7ebf\uff08\u51f9\u9677\uff09\u7684\u60c5\u51b5\u4e0b\u5bf9\u5269\u4f59\u53e0\u5c42\u8fdb\u884c\u5e73\u9762\u5316\u5904\u7406 - \u5927\u91cf\u7684\u94dc\u6d46\u6599\u4f1a\u5728\u6b64\u6b65\u9aa4\u4e2d\u9020\u6210\u4e25\u91cd\u7684\u51f9\u9677\u3002\u56e0\u6b64\uff0c\u53cc\u6d46\u6599\u987a\u5e8f\u4e0d\u662f\u9009\u62e9\u95ee\u9898\uff0c\u800c\u662f\u5de5\u827a\u7269\u7406\u95ee\u9898\u3002.<\/div>\n      <\/div>\n    <\/div>\n\n    <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n      <p class=\"faq-question\" itemprop=\"name\">\u94a8 CMP \u662f\u5426\u4ecd\u9002\u7528\u4e8e\u5148\u8fdb\u8282\u70b9\uff1f<\/p>\n      <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n        <div itemprop=\"text\">\u662f\u7684\uff0c\u5373\u4f7f\u5728\u6700\u524d\u6cbf\u7684\u8282\u70b9\u4e0a\uff0c\u94a8 CMP \u4ecd\u5177\u6709\u5f88\u9ad8\u7684\u76f8\u5173\u6027\uff0c\u5c3d\u7ba1\u5176\u5e94\u7528\u60c5\u51b5\u6b63\u5728\u53d1\u751f\u53d8\u5316\u3002\u5728 10 \u7eb3\u7c73\u53ca\u4ee5\u4e0b\u903b\u8f91\u5668\u4ef6\uff08\u82f1\u7279\u5c14\u3001\u53f0\u79ef\u7535\u3001\u4e09\u661f\uff09\u7684 MOL \u89e6\u70b9\u4e2d\uff0c\u94b4\u5df2\u53d6\u4ee3\u4e86\u94a8\uff0c\u4f46\u94a8\u4ecd\u5e7f\u6cdb\u5e94\u7528\u4e8e DRAM \u4f4d\u7ebf\u89e6\u70b9\u30013D NAND \u5b57\u7ebf\u8fde\u63a5\u548c\u67d0\u4e9b\u6805\u6781\u5e94\u7528\u3002\u6b64\u5916\uff0c\u94a8\u5728\u4e09\u7ef4 NAND \u9ad8\u5bbd\u6bd4\u586b\u5145\u5e94\u7528\uff08HARC\uff09\u4e2d\u7684\u5e94\u7528\u4e5f\u8d8a\u6765\u8d8a\u5e7f\u6cdb\uff0c\u8fd9\u4e5f\u662f CMP \u5e02\u573a\u4e2d\u589e\u957f\u6700\u5feb\u7684\u7ec6\u5206\u5e02\u573a\u4e4b\u4e00\u3002\u5c3d\u7ba1\u903b\u8f91\u8fc7\u6e21\u5230\u94b4\uff0c\u4f46\u53d7 3D NAND \u4ea7\u80fd\u6269\u5f20\u7684\u9a71\u52a8\uff0c\u5168\u7403\u94a8\u6d46\u6599\u6d88\u8d39\u91cf\u9884\u8ba1\u5c06\u589e\u957f\u5230 2030 \u5e74\u3002.<\/div>\n      <\/div>\n    <\/div>\n\n    <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n      <p class=\"faq-question\" itemprop=\"name\">\u5982\u4f55\u77e5\u9053\u54ea\u79cd CMP \u6d46\u6599\u7c7b\u578b\u7b26\u5408\u65b0\u5de5\u827a\u8282\u70b9\u7684\u8981\u6c42\uff1f<\/p>\n      <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n        <div itemprop=\"text\">\u51fa\u53d1\u70b9\u603b\u662f\u5de5\u827a\u6574\u5408\u89c4\u8303\uff1a\u76ee\u6807\u8584\u819c\u3001\u505c\u6b62\u5c42\u3001\u53bb\u9664\u91cf\u548c\u5269\u4f59\u8584\u819c\u9884\u7b97\u3002\u7531\u6b64\uff0c\u6240\u9700\u7684\u6d46\u6599\u7c7b\u522b\u901a\u5e38\u5f88\u660e\u786e\uff08\u89c1\u4e0a\u6587\u7b2c 11 \u8282\u4e2d\u7684\u51b3\u7b56\u6846\u67b6\uff09\u3002\u5728\u8fd9\u4e00\u7c7b\u522b\u4e2d\uff0c\u6d46\u6599\u7684\u9009\u62e9\u548c\u9274\u5b9a\u6d89\u53ca\u5bf9\u5408\u683c\u4f9b\u5e94\u5546\u63d0\u4f9b\u7684 2-3 \u79cd\u5019\u9009\u914d\u65b9\u8fdb\u884c\u57fa\u51c6\u6d4b\u8bd5\uff0c\u9996\u5148\u662f\u7a7a\u767d\u6676\u7247\u6d4b\u8bd5\uff08MRR\u3001\u9009\u62e9\u6027\uff09\uff0c\u7136\u540e\u662f\u56fe\u6848\u6676\u7247\u6d4b\u8bd5\uff08WIWNU\u3001\u5206\u5c42\u3001\u4fb5\u8680\u3001\u7f3a\u9677\u7387\uff09\uff0c\u6700\u540e\u662f\u5b8c\u6574\u5de5\u827a\u6d41\u7a0b\u9274\u5b9a\u3002\u76f4\u63a5\u4e0e\u6d46\u6599\u4f9b\u5e94\u5546\u7684\u5e94\u7528\u5de5\u7a0b\u56e2\u961f\u5408\u4f5c--\u4ed6\u4eec\u4e86\u89e3\u60a8\u7684\u5de5\u5177\u5e73\u53f0\u548c\u96c6\u6210\u65b9\u6848--\u53ef\u5927\u5927\u7f29\u77ed\u9274\u5b9a\u5468\u671f\u3002.<\/div>\n      <\/div>\n    <\/div>\n\n  <\/div>\n\n  <!-- Conclusion -->\n  <h2>\u7ed3\u8bba<\/h2>\n  <p>\n    CMP \u6ce5\u6d46\u7c7b\u578b\u7684\u9009\u62e9\u662f\u534a\u5bfc\u4f53 CMP \u5de5\u7a0b\u4e2d\u6700\u91cd\u8981\u7684\u5de5\u827a\u51b3\u7b56\u4e4b\u4e00\u3002\u4ece\u6c27\u5316\u7269\u548c STI \u5230\u94dc\u3001\u94a8\u3001\u963b\u6321\u5c42\u3001\u591a\u6676\u7845\uff0c\u4ee5\u53ca\u65b0\u5174\u7684\u94b4\u548c\u948c\u914d\u65b9\uff0c\u6bcf\u4e00\u79cd\u7814\u78e8\u6db2\u7c7b\u578b\u90fd\u4ee3\u8868\u4e86\u4e00\u79cd\u9488\u5bf9\u7279\u5b9a\u6750\u6599\u3001\u9009\u62e9\u6027\u8981\u6c42\u548c\u7f3a\u9677\u9650\u5236\u800c\u4f18\u5316\u7684\u72ec\u7279\u5316\u5b66\u6210\u5206\u3002\u6ca1\u6709\u4e00\u79cd\u914d\u65b9\u80fd\u6ee1\u8db3\u6240\u6709\u5e94\u7528\u7684\u8981\u6c42\uff0c\u800c\u4e3a\u7279\u5b9a CMP \u6b65\u9aa4\u9009\u62e9\u9519\u8bef\u7684\u6d46\u6599\u7c7b\u578b\u662f\u5bfc\u81f4\u5de5\u827a\u504f\u5dee\u3001\u4ea7\u91cf\u635f\u5931\u548c\u96c6\u6210\u5931\u8d25\u7684\u4e3b\u8981\u539f\u56e0\u3002.\n  <\/p>\n  <p>\n    \u901a\u8fc7\u4e86\u89e3\u5206\u7c7b\u6846\u67b6\u3001\u6bcf\u79cd\u7c7b\u578b\u7684\u57fa\u672c\u5316\u5b66\u6210\u5206\u4ee5\u53ca\u672c\u6307\u5357\u4e2d\u6982\u8ff0\u7684\u9009\u62e9\u6807\u51c6\uff0c\u5de5\u827a\u5de5\u7a0b\u5e08\u53ef\u4ee5\u66f4\u81ea\u4fe1\u3001\u66f4\u9ad8\u6548\u5730\u505a\u51fa CMP \u6d46\u6599\u51b3\u7b56\u3002\u5982\u9700\u5168\u9762\u4e86\u89e3 CMP \u6d46\u6599\u7684\u57fa\u672c\u539f\u7406--\u5de5\u827a\u529b\u5b66\u3001\u6210\u5206\u79d1\u5b66\u3001\u4f9b\u5e94\u5546\u60c5\u51b5\u548c\u5e02\u573a\u8d8b\u52bf--\u8bf7\u53c2\u9605\u300aCMP \u6d46\u6599\u300b\u3002 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/what-is-cmp-slurry-a-complete-guide-to-chemical-mechanical-planarization-slurry\/\">\u5b8c\u6574\u7684 CMP \u6ce5\u6d46\u6307\u5357<\/a>. .\u8981\u6df1\u5165\u4e86\u89e3\u78e8\u6599\u9897\u7c92\u548c\u914d\u65b9\u6dfb\u52a0\u5242\u7684\u5316\u5b66\u6027\u8d28\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u6587\u7ae0\uff1a\"\u78e8\u6599\u9897\u7c92\u548c\u914d\u65b9\u6dfb\u52a0\u5242\u7684\u5316\u5b66\u6027\u8d28\"\u3002 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-composition-abrasives-chemical-additives-formulation-principles\/\">CMP \u6ce5\u6d46\u6210\u5206\uff1a\u78e8\u6599\u3001\u5316\u5b66\u54c1\u548c\u914d\u65b9<\/a>.\n  <\/p>\n\n  <!-- Back to Pillar -->\n  <a class=\"back-to-pillar\" href=\"https:\/\/jeez-semicon.com\/zh\/blog\/what-is-cmp-slurry-a-complete-guide-to-chemical-mechanical-planarization-slurry\/\">\n    <span class=\"btp-icon\">\ud83c\udfe0<\/span>\n    <div class=\"btp-text\">\n      <span class=\"btp-label\">\u5b8c\u6574\u7684 CMP \u6ce5\u6d46\u7cfb\u5217<\/span>\n      <span class=\"btp-title\">\u2190 \u8fd4\u56de\uff1a\u4ec0\u4e48\u662f CMP \u6ce5\u6d46\uff1f\u5b8c\u6574\u6307\u5357<\/span>\n    <\/div>\n  <\/a>\n\n\n\n<\/article>\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n     STRUCTURED DATA JSON-LD\n     Paste into <head> via Yoast \/ RankMath \/ plugin\n\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<script type=\"application\/ld+json\">\n{\n  \"@context\": \"https:\/\/schema.org\",\n  \"@graph\": [\n    {\n      \"@type\": \"Article\",\n      \"headline\": \"CMP Slurry Types Explained: Oxide, STI, Copper, Tungsten & More (2025)\",\n      \"description\": \"A complete guide to every type of CMP slurry \u2014 oxide ILD, STI, copper bulk and barrier, tungsten, polysilicon, cobalt, and abrasive-free. Includes full comparison table, selection framework, and process engineering tips.\",\n      \"author\": {\n        \"@type\": \"Organization\",\n        \"name\": \"Jizhi Electronic Technology Co., Ltd.\"\n      },\n      \"publisher\": {\n        \"@type\": \"Organization\",\n        \"name\": \"Jizhi Electronic Technology Co., Ltd.\",\n        \"logo\": {\n          \"@type\": \"ImageObject\",\n          \"url\": \"https:\/\/yourwebsite.com\/logo.png\"\n        }\n      },\n      \"datePublished\": \"2025-06-01\",\n      \"dateModified\": \"2025-06-01\",\n      \"mainEntityOfPage\": \"https:\/\/yourwebsite.com\/cmp-slurry-types\/\",\n      \"isPartOf\": {\n        \"@type\": \"WebPage\",\n        \"@id\": \"https:\/\/yourwebsite.com\/cmp-slurry-complete-guide\/\"\n      }\n    },\n    {\n      \"@type\": \"FAQPage\",\n      \"mainEntity\": [\n        {\n          \"@type\": \"Question\",\n          \"name\": \"What is the difference between STI slurry and standard oxide slurry?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"STI slurry uses cerium oxide (ceria) abrasive and achieves SiO\u2082:Si\u2083N\u2084 selectivity of 50:1 to 200:1, essential for stopping precisely on the nitride etch stop layer. Standard oxide slurry uses colloidal silica and achieves only 5\u201310:1 selectivity, which is insufficient for STI CMP at advanced nodes.\"\n          }\n        },\n        {\n          \"@type\": \"Question\",\n          \"name\": \"Why does copper CMP require two different slurries?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"Step 1 bulk Cu slurry needs >100:1 Cu:barrier selectivity for fast copper removal. Step 2 barrier slurry needs near-unity selectivity across Cu, TaN, and SiO\u2082 to minimize dishing and erosion. These requirements are mutually exclusive, requiring two different formulations in sequence.\"\n          }\n        },\n        {\n          \"@type\": \"Question\",\n          \"name\": \"Is tungsten CMP still relevant at advanced nodes?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"Yes. While cobalt has replaced tungsten in logic MOL contacts at 10nm and below, tungsten CMP remains essential for DRAM contacts, 3D NAND word line connections, and high-aspect-ratio fill applications. 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Each semiconductor polishing step demands a uniquely formulated slurry \u2014 different abrasive chemistry, different pH, different selectivity profile. This guide breaks down every  &#8230;<\/p>","protected":false},"author":1,"featured_media":1503,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1465","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1465","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=1465"}],"version-history":[{"count":7,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1465\/revisions"}],"predecessor-version":[{"id":1564,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1465\/revisions\/1564"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/1503"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=1465"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=1465"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=1465"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}