{"id":1468,"date":"2026-03-04T10:15:49","date_gmt":"2026-03-04T02:15:49","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1468"},"modified":"2026-03-04T11:39:33","modified_gmt":"2026-03-04T03:39:33","slug":"cmp-slurry-composition-abrasives-chemical-additives-formulation-principles","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-composition-abrasives-chemical-additives-formulation-principles\/","title":{"rendered":"CMP \u6ce5\u6d46\u6210\u5206\uff1a\u78e8\u6599\u3001\u5316\u5b66\u6dfb\u52a0\u5242\u548c\u914d\u65b9\u539f\u7406"},"content":{"rendered":"<!--\n========================================================\n  CLUSTER ARTICLE 2 \u2014 CMP SLURRY COMPOSITION\n  Target: WordPress post editor (paste in HTML\/Text mode)\n  SEO Target Keyword : CMP Slurry Composition\n  Secondary KWs      : CMP slurry abrasive particles,\n                       colloidal silica CMP, ceria slurry,\n                       CMP slurry additives, zeta potential CMP,\n                       CMP slurry formulation\n  Word Count         : ~3,000 words\n  Pillar Back-link   : \/cmp-slurry-complete-guide\/\n  Cross-links        : \/cmp-slurry-types\/\n                       \/copper-cmp-slurry\/\n                       \/cmp-slurry-advanced-nodes\/\n                       \/cmp-slurry-defects\/\n                       \/cmp-slurry-filters\/\n  Schema             : Article + FAQPage JSON-LD\n========================================================\n-->\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n     SEO META HINTS (paste into Yoast \/ RankMath)\n     Title tag  : CMP Slurry Composition: Abrasives, Chemicals & Formulation (2025)\n     Meta desc  : Deep-dive into CMP slurry composition \u2014 abrasive\n                  particle types, chemical additives, zeta potential,\n                  pH control, and formulation principles for semiconductor CMP.\n     Slug       : \/cmp-slurry-composition\/\n     Focus KW   : CMP slurry composition\n     Parent page: \/cmp-slurry-complete-guide\/\n\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n\n<style>\n.cmp-article *,\n.cmp-article *::before,\n.cmp-article *::after { box-sizing: border-box; }\n\n.cmp-article {\n  font-family: 'Georgia', 'Times New Roman', serif;\n  font-size: 17px;\n  line-height: 1.85;\n  color: #1a1a2e;\n  max-width: 860px;\n  margin: 0 auto;\n  padding: 0 20px 60px;\n}\n.cmp-article h1 {\n  font-family: 'Segoe UI', 'Helvetica Neue', Arial, sans-serif;\n  font-size: clamp(26px, 4vw, 42px);\n  font-weight: 800; line-height: 1.2; color: #0a0a23;\n  margin: 0 0 16px; letter-spacing: -0.5px;\n}\n.cmp-article h2 {\n  font-family: 'Segoe UI', 'Helvetica Neue', Arial, sans-serif;\n  font-size: clamp(19px, 2.5vw, 26px);\n  font-weight: 700; color: #0a2463;\n  margin: 52px 0 16px; padding-bottom: 10px;\n  border-bottom: 3px solid #0a2463; letter-spacing: -0.3px;\n}\n.cmp-article h3 {\n  font-family: 'Segoe UI', 'Helvetica Neue', Arial, sans-serif;\n  font-size: clamp(16px, 2vw, 20px);\n  font-weight: 700; color: #163a8a; margin: 36px 0 12px;\n}\n.cmp-article p { margin: 0 0 20px; color: #2d2d2d; }\n.cmp-article a {\n  color: #0a2463; text-decoration: underline;\n  text-underline-offset: 3px; font-weight: 600; transition: color 0.2s;\n}\n.cmp-article a:hover { color: #d4380d; }\n.cmp-article ul, .cmp-article ol { margin: 0 0 20px 24px; padding: 0; }\n.cmp-article li { margin-bottom: 8px; color: #2d2d2d; }\n\n\/* Hero *\/\n.cmp-hero {\n  background: linear-gradient(135deg, #0a2463 0%, #1e3a8a 50%, #163a6a 100%);\n  border-radius: 12px; padding: 48px 40px;\n  margin-bottom: 40px; position: relative; overflow: hidden;\n}\n.cmp-hero::before {\n  content:''; position:absolute; top:-60px; right:-60px;\n  width:260px; height:260px; background:rgba(255,255,255,0.05); border-radius:50%;\n}\n.cmp-hero::after {\n  content:''; position:absolute; bottom:-40px; left:-40px;\n  width:180px; height:180px; background:rgba(255,255,255,0.04); border-radius:50%;\n}\n.cmp-hero h1 { color: #fff; }\n.cmp-hero .hero-intro {\n  font-size: 18px; color: rgba(255,255,255,0.88);\n  line-height: 1.7; margin: 0; font-family: 'Segoe UI', Arial, sans-serif;\n}\n\n\/* Breadcrumb *\/\n.cmp-breadcrumb {\n  font-family: 'Segoe UI', Arial, sans-serif; font-size: 13.5px;\n  color: #64748b; margin-bottom: 28px;\n}\n.cmp-breadcrumb a { color: #0a2463; font-weight: 500; text-decoration: none; }\n.cmp-breadcrumb a:hover { text-decoration: underline; }\n.cmp-breadcrumb span { margin: 0 6px; }\n\n\/* TOC *\/\n.cmp-toc {\n  background: #f0f4ff; border: 1px solid #c7d5f5;\n  border-left: 5px solid #0a2463; border-radius: 8px;\n  padding: 28px 32px; margin: 0 0 44px;\n}\n.cmp-toc h2 {\n  font-size: 18px !important; font-family: 'Segoe UI', Arial, sans-serif;\n  color: #0a2463 !important; margin: 0 0 16px !important;\n  padding: 0 !important; border: none !important;\n}\n.cmp-toc ol { margin: 0; padding-left: 22px; }\n.cmp-toc ol li {\n  font-family: 'Segoe UI', Arial, sans-serif; font-size: 15px;\n  margin-bottom: 8px; color: #1a1a2e;\n}\n.cmp-toc ol li a { color: #0a2463; font-weight: 500; text-decoration: none; }\n.cmp-toc ol li a:hover { text-decoration: underline; color: #d4380d; }\n\n\/* Info Boxes *\/\n.cmp-box { border-radius: 10px; padding: 24px 28px; margin: 28px 0; }\n.cmp-box.blue  { background: #eef2ff; border-left: 5px solid #3b5bdb; }\n.cmp-box.amber { background: #fffbeb; border-left: 5px solid #f59e0b; }\n.cmp-box.green { background: #ecfdf5; border-left: 5px solid #10b981; }\n.cmp-box.red   { background: #fff1f0; border-left: 5px solid #ef4444; }\n.cmp-box .box-title {\n  font-family: 'Segoe UI', Arial, sans-serif; font-size: 15px;\n  font-weight: 700; text-transform: uppercase; letter-spacing: 0.6px;\n  margin: 0 0 10px; color: #0a2463;\n}\n\n\/* Tables *\/\n.cmp-table-wrap { overflow-x: auto; margin: 24px 0 36px; }\n.cmp-table {\n  width: 100%; border-collapse: collapse;\n  font-family: 'Segoe UI', Arial, sans-serif; font-size: 14.5px;\n}\n.cmp-table th {\n  background: #0a2463; color: #fff; padding: 12px 16px;\n  text-align: left; font-weight: 600; white-space: nowrap;\n}\n.cmp-table td {\n  padding: 11px 16px; border-bottom: 1px solid #e2e8f0;\n  color: #2d2d2d; vertical-align: top;\n}\n.cmp-table tr:nth-child(even) td { background: #f8faff; }\n.cmp-table tr:hover td { background: #eef2ff; }\n\n\/* Abrasive Cards *\/\n.abrasive-grid {\n  display: grid;\n  grid-template-columns: repeat(auto-fit, minmax(240px, 1fr));\n  gap: 16px; margin: 24px 0 36px;\n}\n.abrasive-card {\n  border-radius: 12px; padding: 24px 22px;\n  border: 1px solid #e2e8f0; position: relative; overflow: hidden;\n}\n.abrasive-card::after {\n  content: ''; position: absolute; top: 0; left: 0;\n  width: 100%; height: 4px;\n}\n.abrasive-card.silica  { border-top-color: #0891b2; }\n.abrasive-card.silica::after  { background: #0891b2; }\n.abrasive-card.ceria   { border-top-color: #7c3aed; }\n.abrasive-card.ceria::after   { background: #7c3aed; }\n.abrasive-card.alumina { border-top-color: #d97706; }\n.abrasive-card.alumina::after { background: #d97706; }\n.abrasive-card .ac-name {\n  font-family: 'Segoe UI', Arial, sans-serif;\n  font-size: 17px; font-weight: 800; color: #0a2463; margin: 0 0 4px;\n}\n.abrasive-card .ac-formula {\n  font-family: 'Segoe UI', Arial, sans-serif;\n  font-size: 13px; color: #64748b; margin: 0 0 14px;\n}\n.abrasive-card .ac-row {\n  display: flex; justify-content: space-between; align-items: center;\n  font-family: 'Segoe UI', Arial, sans-serif; font-size: 13px;\n  padding: 5px 0; border-bottom: 1px solid #f1f5f9; color: #374151;\n}\n.abrasive-card .ac-row:last-child { border: none; }\n.abrasive-card .ac-row strong { color: #0a2463; font-weight: 600; }\n\n\/* Additive Timeline *\/\n.additive-list { margin: 0 0 36px; padding: 0; list-style: none; }\n.additive-item {\n  display: flex; gap: 0; margin-bottom: 0; position: relative;\n}\n.additive-item::before {\n  content: ''; position: absolute;\n  left: 19px; top: 44px; bottom: -1px; width: 2px;\n  background: #e2e8f0; z-index: 0;\n}\n.additive-item:last-child::before { display: none; }\n.additive-dot {\n  flex-shrink: 0; width: 40px; height: 40px; border-radius: 50%;\n  background: #0a2463; color: #fff; display: flex;\n  align-items: center; justify-content: center;\n  font-size: 18px; margin-right: 18px; margin-top: 2px;\n  position: relative; z-index: 1;\n}\n.additive-body { flex: 1; padding-bottom: 28px; }\n.additive-body h4 {\n  font-family: 'Segoe UI', Arial, sans-serif; font-size: 16px;\n  font-weight: 700; color: #0a2463; margin: 6px 0 6px;\n}\n.additive-body .examples {\n  font-family: 'Segoe UI', Arial, sans-serif; font-size: 12.5px;\n  color: #fff; background: #3b5bdb; border-radius: 20px;\n  padding: 2px 10px; display: inline-block; margin-bottom: 8px;\n  font-weight: 600;\n}\n.additive-body p { font-size: 15.5px; margin: 0; color: #374151; }\n\n\/* Zeta Potential Visual *\/\n.zeta-bar-wrap {\n  background: #f8faff; border: 1px solid #e2e8f0;\n  border-radius: 10px; padding: 24px 28px; margin: 24px 0 36px;\n}\n.zeta-bar-label {\n  font-family: 'Segoe UI', Arial, sans-serif; font-size: 13px;\n  color: #64748b; margin-bottom: 10px; display: flex;\n  justify-content: space-between;\n}\n.zeta-bar-track {\n  height: 28px; border-radius: 14px; position: relative;\n  background: linear-gradient(to right,\n    #ef4444 0%, #f97316 18%, #facc15 28%,\n    #86efac 36%, #86efac 64%,\n    #facc15 72%, #f97316 82%, #ef4444 100%);\n  margin-bottom: 8px;\n}\n.zeta-bar-center {\n  position: absolute; left: 50%; top: 0; bottom: 0;\n  width: 2px; background: #fff; transform: translateX(-50%);\n}\n.zeta-zone-label {\n  font-family: 'Segoe UI', Arial, sans-serif; font-size: 12px;\n  display: flex; justify-content: space-between; color: #64748b;\n}\n.zeta-legend {\n  display: flex; flex-wrap: wrap; gap: 14px; margin-top: 14px;\n}\n.zeta-legend-item {\n  display: flex; align-items: center; gap: 6px;\n  font-family: 'Segoe UI', Arial, sans-serif; font-size: 13px; color: #374151;\n}\n.zl-dot {\n  width: 12px; height: 12px; border-radius: 50%; flex-shrink: 0;\n}\n\n\/* Trust Bar *\/\n.cmp-trust {\n  display: flex; align-items: center; gap: 16px;\n  background: #f8faff; border: 1px solid #e2e8f0;\n  border-radius: 10px; padding: 20px 24px; margin: 40px 0 28px;\n}\n.trust-avatar {\n  width: 52px; height: 52px; background: #0a2463; border-radius: 50%;\n  display: flex; align-items: center; justify-content: center;\n  font-size: 22px; flex-shrink: 0;\n}\n.trust-text { font-family: 'Segoe UI', Arial, sans-serif; }\n.trust-text strong { display: block; font-size: 15px; color: #0a2463; }\n.trust-text span { font-size: 13px; color: #64748b; }\n\n\/* CTA *\/\n.cmp-cta {\n  background: linear-gradient(135deg, #d4380d, #f5692e);\n  border-radius: 12px; padding: 36px 40px; text-align: center; margin: 48px 0; color: #fff;\n}\n.cmp-cta h3 {\n  font-family: 'Segoe UI', Arial, sans-serif; font-size: 22px;\n  font-weight: 800; color: #fff !important; margin: 0 0 10px !important;\n}\n.cmp-cta p { color: rgba(255,255,255,0.9); margin: 0 0 20px; font-family: 'Segoe UI', Arial, sans-serif; }\n.cmp-cta a {\n  display: inline-block; background: #fff; color: #d4380d !important;\n  font-family: 'Segoe UI', Arial, sans-serif; font-weight: 800; font-size: 15px;\n  padding: 13px 32px; border-radius: 50px; text-decoration: none !important;\n  letter-spacing: 0.3px; transition: transform 0.2s, box-shadow 0.2s;\n}\n.cmp-cta a:hover { transform: translateY(-2px); box-shadow: 0 6px 20px rgba(0,0,0,0.2); }\n\n\/* FAQ *\/\n.cmp-faq { margin: 24px 0; }\n.faq-item { border: 1px solid #e2e8f0; border-radius: 8px; margin-bottom: 14px; overflow: hidden; }\n.faq-question {\n  background: #f8faff; padding: 18px 22px;\n  font-family: 'Segoe UI', Arial, sans-serif; font-weight: 700;\n  color: #0a2463; font-size: 15.5px; margin: 0;\n}\n.faq-answer {\n  padding: 18px 22px; background: #fff; font-size: 15.5px;\n  color: #2d2d2d; border-top: 1px solid #e2e8f0;\n}\n\n\/* Back to Pillar *\/\n.back-to-pillar {\n  display: flex; align-items: center; gap: 12px;\n  background: #f0f4ff; border: 1px solid #c7d5f5; border-radius: 10px;\n  padding: 18px 24px; margin: 48px 0 0; text-decoration: none !important;\n  transition: background 0.2s;\n}\n.back-to-pillar:hover { background: #e0e8ff; }\n.back-to-pillar .btp-icon { font-size: 24px; flex-shrink: 0; }\n.back-to-pillar .btp-text { font-family: 'Segoe UI', Arial, sans-serif; }\n.back-to-pillar .btp-label { font-size: 12px; color: #64748b; display: block; }\n.back-to-pillar .btp-title { font-size: 15px; font-weight: 700; color: #0a2463; }\n\n@media (max-width: 600px) {\n  .cmp-hero { padding: 32px 22px; }\n  .cmp-cta { padding: 28px 20px; }\n  .cmp-toc { padding: 22px 18px; }\n  .abrasive-grid { grid-template-columns: 1fr; }\n}\n<\/style>\n\n<article class=\"cmp-article\" itemscope itemtype=\"https:\/\/schema.org\/Article\">\n\n  <!-- Hero -->\n  <div class=\"cmp-hero\">\n    <p class=\"hero-intro\">\n      CMP \u6ce5\u6d46\u4e2d\u7a76\u7adf\u542b\u6709\u54ea\u4e9b\u6210\u5206--\u4e3a\u4ec0\u4e48\u6bcf\u79cd\u6210\u5206\u90fd\u5f88\u91cd\u8981\uff1f\u8fd9\u662f\u6709\u5173 CMP \u6ce5\u6d46\u6210\u5206\u7684\u6743\u5a01\u6280\u672f\u6307\u5357\uff1a\u78e8\u6599\u9897\u7c92\u79d1\u5b66\u3001\u5316\u5b66\u6dfb\u52a0\u5242\u529f\u80fd\u3001\u80f6\u4f53\u7a33\u5b9a\u6027\u7406\u8bba\uff0c\u4ee5\u53ca\u51b3\u5b9a\u6ce5\u6d46\u662f\u80fd\u63d0\u9ad8\u4ea7\u91cf\u8fd8\u662f\u4f1a\u7834\u574f\u4ea7\u91cf\u7684\u914d\u65b9\u539f\u5219\u3002.\n    <\/p>\n  <\/div>\n\n  <!-- Trust Bar -->\n  <div class=\"cmp-trust\">\n    <div class=\"trust-avatar\">\ud83d\udd2c<\/div>\n    <div class=\"trust-text\">\n      <strong>\u5409\u4e4b\u5c9b\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8- \u914d\u65b9\u5de5\u7a0b\u56e2\u961f<\/strong>\n      <span>CMP \u629b\u5149\u6d46\u6599\u4e13\u5bb6\uff0c\u6c5f\u82cf\u65e0\u9521\u3002\u6c5f\u82cf\u65e0\u9521 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/what-is-cmp-slurry-a-complete-guide-to-chemical-mechanical-planarization-slurry\/\">\u5b8c\u6574\u7684 CMP \u6ce5\u6d46\u6307\u5357<\/a> \u7cfb\u5217\u3002.<\/span>\n    <\/div>\n  <\/div>\n\n  <!-- TOC -->\n  <div class=\"cmp-toc\">\n    <h2>\ud83d\udccb \u76ee\u5f55<\/h2>\n    <ol>\n      <li><a href=\"#composition-overview\">\u6784\u6210\u6982\u8ff0\uff1a\u4e09\u8981\u7d20\u6846\u67b6<\/a><\/li>\n      <li><a href=\"#abrasive-particles\">\u78e8\u7c92\uff1a\u673a\u68b0\u5f15\u64ce<\/a><\/li>\n      <li><a href=\"#silica\">\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\uff08SiO\u2082\uff09 - \u6027\u80fd\u4e0e\u5e94\u7528<\/a><\/li>\n      <li><a href=\"#ceria\">\u6c27\u5316\u94c8\uff08CeO\u2082\uff09 - STI \u4e13\u5bb6<\/a><\/li>\n      <li><a href=\"#alumina\">\u6c27\u5316\u94dd\uff08Al\u2082O\u2083\uff09--\u9ad8\u78c1\u963b\u5de5\u4f5c\u6bcd\u673a<\/a><\/li>\n      <li><a href=\"#particle-parameters\">\u5173\u952e\u7c92\u5b50\u53c2\u6570\uff1a\u5c3a\u5bf8\u3001\u5f62\u72b6\u548c\u8868\u9762\u5316\u5b66\u6027\u8d28<\/a><\/li>\n      <li><a href=\"#chemical-additives\">\u590d\u5408\u5316\u5b66\u6dfb\u52a0\u5242\uff1a\u516d\u4e2a\u529f\u80fd\u7c7b\u522b<\/a><\/li>\n      <li><a href=\"#colloidal-stability\">\u80f6\u4f53\u7a33\u5b9a\u6027\uff1aZeta \u7535\u4f4d\u4e0e\u5206\u6563\u79d1\u5b66<\/a><\/li>\n      <li><a href=\"#ph-control\">pH \u503c\u63a7\u5236\uff1a\u4e3b\u53d8\u91cf<\/a><\/li>\n      <li><a href=\"#diw\">\u53bb\u79bb\u5b50\u6c34\u9690\u5f62\u8f7d\u4f53<\/a><\/li>\n      <li><a href=\"#formulation-tradeoffs\">\u914d\u65b9\u6743\u8861\uff1a\u4e3a\u4ec0\u4e48\u6bcf\u6b21\u6539\u53d8\u90fd\u4f1a\u4ea7\u751f\u540e\u679c<\/a><\/li>\n      <li><a href=\"#qc-specs\">\u4e0e\u6210\u5206\u76f8\u5173\u7684\u8d28\u91cf\u63a7\u5236\u89c4\u8303<\/a><\/li>\n      <li><a href=\"#faq\">\u5e38\u89c1\u95ee\u9898<\/a><\/li>\n    <\/ol>\n  <\/div>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 1: OVERVIEW\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"composition-overview\">1.\u6784\u6210\u6982\u8ff0\uff1a\u4e09\u8981\u7d20\u6846\u67b6<\/h2>\n\n  <p>\n    \u6bcf\u4e00\u4e2a <a href=\"\/zh\/cmp-slurry-complete-guide\/\">CMP \u6ce5\u6d46<\/a> - \u65e0\u8bba\u5e94\u7528\u3001\u8282\u70b9\u6216\u5236\u9020\u5546\u5982\u4f55\uff0c\u90fd\u662f\u7531\u76f8\u540c\u7684\u4e09\u4e2a\u57fa\u672c\u7ec4\u4ef6\u6784\u5efa\u800c\u6210\uff1a <strong>\u78e8\u7c92<\/strong>, a <strong>\u5316\u5b66\u6dfb\u52a0\u5242\u5305<\/strong>, \u548c <strong>\u8d85\u7eaf\u53bb\u79bb\u5b50\u6c34<\/strong> \u4f5c\u4e3a\u8f7d\u4f53\u4ecb\u8d28\u3002CMP \u6ce5\u6d46\u914d\u65b9\u7684\u5de5\u7a0b\u827a\u672f\u5728\u4e8e\u7cbe\u786e\u6307\u5b9a\u6bcf\u79cd\u6210\u5206\u5e76\u4f18\u5316\u5b83\u4eec\u4e4b\u95f4\u7684\u76f8\u4e92\u4f5c\u7528\uff0c\u4ee5\u5b9e\u73b0\u4e00\u7cfb\u5217\u7279\u5b9a\u7684\u5de5\u827a\u7ed3\u679c\uff1a\u76ee\u6807\u53bb\u9664\u7387\u3001\u9009\u62e9\u6027\u3001\u6676\u7247\u5185\u5747\u5300\u6027\u548c\u7f3a\u9677\u9884\u7b97\u3002.\n  <\/p>\n\n  <div class=\"cmp-table-wrap\">\n    <table class=\"cmp-table\">\n      <thead>\n        <tr>\n          <th>\u7ec4\u4ef6<\/th>\n          <th>\u5178\u578b\u91cd\u91cf %<\/th>\n          <th>\u4e3b\u8981\u529f\u80fd<\/th>\n          <th>\u4e3b\u8981\u89c4\u683c\u53c2\u6570<\/th>\n        <\/tr>\n      <\/thead>\n      <tbody>\n        <tr>\n          <td><strong>\u78e8\u6599\u9897\u7c92<\/strong><\/td>\n          <td>1-15 wt%<\/td>\n          <td>\u901a\u8fc7\u5fae\u5207\u5272\u548c\u7281\u8015\u673a\u68b0\u53bb\u9664\u6750\u6599<\/td>\n          <td>\u6750\u6599\u7c7b\u578b\u3001D50\u3001D99\u3001\u5f62\u72b6\u3001\u8868\u9762 OH \u5bc6\u5ea6\u3001Zeta \u7535\u4f4d<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u590d\u5408\u5316\u5b66\u6dfb\u52a0\u5242<\/strong><\/td>\n          <td>0.5-10 wt%<\/td>\n          <td>\u5316\u5b66\u8f6f\u5316\u3001\u6eb6\u89e3\u3001\u9009\u62e9\u6027\u63a7\u5236\u3001\u6291\u5236\u3001\u5206\u6563<\/td>\n          <td>\u6c27\u5316\u5242\u6d53\u5ea6\u3001\u87af\u5408\u5242\u7c7b\u578b\u3001\u6291\u5236\u5242\u6c34\u5e73\u3001\u8868\u9762\u6d3b\u6027\u5242 CMC\u3001pH \u7f13\u51b2\u80fd\u529b<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u53bb\u79bb\u5b50\u6c34\uff08DIW\uff09<\/strong><\/td>\n          <td>75-98 wt%<\/td>\n          <td>\u8f7d\u4f53\u4ecb\u8d28\uff1b\u53ef\u5b9e\u73b0\u78e8\u6599\u548c\u526f\u4ea7\u54c1\u7684\u5927\u89c4\u6a21\u8fd0\u8f93<\/td>\n          <td>\u7535\u963b\u7387\uff08&gt;17.5 M\u03a9-cm\uff09\u3001\u603b\u6709\u673a\u78b3\uff08&lt;5 ppb\uff09\u3001\u6eb6\u89e3\u6c27\u2082\u3001\u9897\u7c92\u8ba1\u6570<\/td>\n        <\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n\n  <div class=\"cmp-box blue\">\n    <p class=\"box-title\">\u534f\u540c\u539f\u7406<\/p>\n    <p style=\"margin:0;\">CMP \u7684\u53bb\u9664\u7387\u5e76\u4e0d\u662f\u7b80\u5355\u7684\u5316\u5b66\u8680\u523b\u548c\u673a\u68b0\u78e8\u635f\u7684\u603b\u548c\uff0c\u800c\u662f\u4e24\u8005\u534f\u540c\u4f5c\u7528\u7684\u4ea7\u7269\u3002\u5316\u5b66\u8f6f\u5316\u4f1a\u4ea7\u751f\u4e00\u5c42\u8584\u5f31\u7684\u8868\u5c42\uff0c\u78e8\u7c92\u53bb\u9664\u8868\u5c42\u7684\u6548\u7387\u8fdc\u8fdc\u9ad8\u4e8e\u5355\u72ec\u4f7f\u7528\u5176\u4e2d\u4e00\u79cd\u673a\u5236\u7684\u6548\u7387\u3002\u914d\u65b9\u5316\u5b66\u5bb6\u5728\u8bbe\u8ba1\u8fd9\u79cd\u534f\u540c\u4f5c\u7528\u65f6\u662f\u7ecf\u8fc7\u6df1\u601d\u719f\u8651\u7684\uff1a\u5355\u72ec\u6539\u53d8\u5176\u4e2d\u4e00\u79cd\u6210\u5206\u800c\u4e0d\u91cd\u65b0\u5e73\u8861\u53e6\u4e00\u79cd\u6210\u5206\uff0c\u901a\u5e38\u4f1a\u964d\u4f4e\u4e00\u79cd\u6216\u591a\u79cd\u6027\u80fd\u6307\u6807\u3002.<\/p>\n  <\/div>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 2: ABRASIVE PARTICLES\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"abrasive-particles\">2.\u78e8\u6599\u9897\u7c92\uff1a\u673a\u68b0\u53d1\u52a8\u673a<\/h2>\n\n  <p>\n    \u78e8\u6599\u9897\u7c92\u662f CMP \u6ce5\u6d46\u7684\u673a\u68b0\u6838\u5fc3\u3002\u5b83\u4eec\u7684\u7269\u7406\u548c\u8868\u9762\u5316\u5b66\u7279\u6027\u51b3\u5b9a\u4e86\u6750\u6599\u53bb\u9664\u673a\u5236\u3001\u53ef\u5b9e\u73b0\u7684\u6700\u5927 MRR\u3001\u7f3a\u9677\u98ce\u9669\u6982\u51b5\uff0c\u4ee5\u53ca\uff08\u5c31\u94c8\u800c\u8a00\uff09\u5316\u5b66\u9009\u62e9\u6027\u884c\u4e3a\u3002\u5728\u534a\u5bfc\u4f53 CMP \u5e94\u7528\u9886\u57df\u4e2d\uff0c\u4e09\u79cd\u5546\u4e1a\u4e0a\u5360\u4e3b\u5bfc\u5730\u4f4d\u7684\u7814\u78e8\u6750\u6599\u5404\u6709\u5176\u72ec\u7279\u7684\u4f18\u52bf\u3002\u4e86\u89e3\u54ea\u79cd\u78e8\u6599\u7c7b\u578b\u4e0e\u54ea\u79cd\u5de5\u827a\u6b65\u9aa4\u76f8\u5bf9\u5e94\u662f\u4ece\u4e8b\u4ee5\u4e0b\u5de5\u4f5c\u7684\u4eba\u5458\u7684\u57fa\u7840\u77e5\u8bc6 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-types-explained-oxide-sti-copper-tungsten-beyond\/\">CMP \u6ce5\u6d46\u7c7b\u578b<\/a>.\n  <\/p>\n\n  <div class=\"abrasive-grid\">\n    <!-- Silica Card -->\n    <div class=\"abrasive-card silica\">\n      <p class=\"ac-name\">\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/p>\n      <p class=\"ac-formula\">SiO\u2082 - \u975e\u6676\u6001<\/p>\n      <div class=\"ac-row\"><span>\u9897\u7c92\u5927\u5c0f<\/span><strong>10-150 \u7eb3\u7c73<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u83ab\u6c0f\u786c\u5ea6<\/span><strong>6-7<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u5178\u578b pH \u503c\u8303\u56f4<\/span><strong>9-12\uff08\u6c27\u5316\u7269\uff09\/ 3-7\uff08\u91d1\u5c5e\uff09<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u7efc\u8ff0<\/span><strong>\u6eb6\u80f6-\u51dd\u80f6\u6216\u65af\u6258\u4f2f\u5de5\u827a<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u4e3b\u8981\u5e94\u7528<\/span><strong>\u6c27\u5316\u7269 ILD\u3001\u94dc\u3001\u5c4f\u969c\u3001\u805a\u7845\u6c27<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u7f3a\u9677\u98ce\u9669<\/span><strong>\u4f4e<\/strong><\/div>\n    <\/div>\n    <!-- Ceria Card -->\n    <div class=\"abrasive-card ceria\">\n      <p class=\"ac-name\">\u6c27\u5316\u94c8<\/p>\n      <p class=\"ac-formula\">CeO\u2082 - \u7acb\u65b9\u8424\u77f3<\/p>\n      <div class=\"ac-row\"><span>\u9897\u7c92\u5927\u5c0f<\/span><strong>20-300 \u7eb3\u7c73<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u83ab\u6c0f\u786c\u5ea6<\/span><strong>6<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u5178\u578b pH \u503c\u8303\u56f4<\/span><strong>5-8<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u7efc\u8ff0<\/span><strong>\u6c89\u6dc0\u6216\u70ed\u6db2<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u4e3b\u8981\u5e94\u7528<\/span><strong>STI, FEOL \u4ecb\u8d28<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u7f3a\u9677\u98ce\u9669<\/span><strong>\u4e2d\u578b\uff08\u6b8b\u7559\u7269\uff09<\/strong><\/div>\n    <\/div>\n    <!-- Alumina Card -->\n    <div class=\"abrasive-card alumina\">\n      <p class=\"ac-name\">\u6c27\u5316\u94dd<\/p>\n      <p class=\"ac-formula\">Al\u2082O\u2083 - \u03b1 \u6216 \u03b3 \u76f8<\/p>\n      <div class=\"ac-row\"><span>\u9897\u7c92\u5927\u5c0f<\/span><strong>50-500 \u7eb3\u7c73<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u83ab\u6c0f\u786c\u5ea6<\/span><strong>9<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u5178\u578b pH \u503c\u8303\u56f4<\/span><strong>2-5<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u7efc\u8ff0<\/span><strong>\u70df\u718f\u6216\u7145\u70e7<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u4e3b\u8981\u5e94\u7528<\/span><strong>\u94a8\u3001\u786c\u91d1\u5c5e<\/strong><\/div>\n      <div class=\"ac-row\"><span>\u7f3a\u9677\u98ce\u9669<\/span><strong>\u9ad8\uff08\u5212\u75d5\uff09<\/strong><\/div>\n    <\/div>\n  <\/div>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 3: COLLOIDAL SILICA\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"silica\">3.\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\uff08SiO\u2082\uff09\uff1a\u591a\u7528\u9014\u7684\u4e3b\u529b\u519b<\/h2>\n\n  <p>\n    \u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u662f\u8fc4\u4eca\u4e3a\u6b62\u534a\u5bfc\u4f53 CMP \u4e2d\u4f7f\u7528\u6700\u5e7f\u6cdb\u7684\u7814\u78e8\u5242\uff0c\u53ef\u7528\u4e8e\u6c27\u5316\u7269\u3001\u94dc\u3001\u963b\u6321\u5c42\u3001\u591a\u6676\u7845\u548c\u8bb8\u591a\u7279\u6b8a\u5e94\u7528\u3002\u5b83\u7684\u4e3b\u5bfc\u5730\u4f4d\u6e90\u4e8e\u56db\u4e2a\u5173\u952e\u4f18\u52bf\uff1a\u63a5\u8fd1\u7406\u60f3\u7684\u7403\u5f62\u9897\u7c92\u5f62\u6001\u3001\u4f18\u5f02\u7684\u6279\u6b21\u95f4\u7c92\u5ea6\u4e00\u81f4\u6027\u3001\u6613\u4e8e\u5b98\u80fd\u5316\u7684\u8868\u9762\u7845\u9187\uff08Si-OH\uff09\u5316\u5b66\u6027\u8d28\uff0c\u4ee5\u53ca\u4e0e\u6c27\u5316\u94dd\u76f8\u6bd4\u53ef\u5c06\u6676\u7247\u5212\u4f24\u98ce\u9669\u964d\u81f3\u6700\u4f4e\u7684\u4f4e\u786c\u5ea6\u3002.\n  <\/p>\n\n  <h3>\u5408\u6210\u4e0e\u7c92\u5b50\u5f62\u6001<\/h3>\n  <p>\n    \u534a\u5bfc\u4f53\u7ea7\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u4e3b\u8981\u901a\u8fc7\u6eb6\u80f6-\u51dd\u80f6\uff08St\u00f6ber\uff09\u5de5\u827a\u751f\u4ea7\uff1a\u70f7\u6c27\u57fa\u7845\u70f7\u524d\u4f53\uff08\u901a\u5e38\u4e3a TEOS - \u6b63\u7845\u9178\u56db\u4e59\u916f\uff09\u5728\u6c34\u6027\u9187\u4ecb\u8d28\u4e2d\u8fdb\u884c\u53d7\u63a7\u6c34\u89e3\u548c\u7f29\u5408\uff0c\u4ea7\u751f 10-150 \u7eb3\u7c73\u8303\u56f4\u5185\u7684\u5355\u5206\u6563\u3001\u8fd1\u4e4e\u5b8c\u7f8e\u7684\u7403\u5f62\u4e8c\u6c27\u5316\u7845\u9897\u7c92\u3002\u9897\u7c92\u5927\u5c0f\u7531\u524d\u4f53\u6d53\u5ea6\u3001\u53cd\u5e94\u6e29\u5ea6\u548c\u6dfb\u52a0\u987a\u5e8f\u63a7\u5236\u3002\u751f\u6210\u7684\u9897\u7c92\u8868\u9762\u5149\u6ed1\u3001\u81f4\u5bc6\uff0c\u5177\u6709\u9ad8\u5bc6\u5ea6\u7684\u6d3b\u6027\u7845\u9187\u57fa\u56e2\uff08Si-OH\uff0c\u901a\u5e38\u6bcf nm\u00b2 4-5\u4e2a\uff09\uff0c\u53ef\u8c03\u8282\u80f6\u4f53\u7a33\u5b9a\u6027\u4ee5\u53ca\u4e0e\u629b\u5149\u819c\u7684\u8868\u9762\u5316\u5b66\u4f5c\u7528\u3002.\n  <\/p>\n\n  <h3>\u8868\u9762\u5316\u5b66\u548c\u9009\u62e9\u6027\u8c03\u8282<\/h3>\n  <p>\n    \u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u5bcc\u542b\u7845\u9187\u7684\u8868\u9762\u53ef\u4ee5\u8fdb\u884c\u8868\u9762\u5b98\u80fd\u5316--\u9634\u79bb\u5b50\u57fa\u56e2\uff08-COO-\u3001-SO\u2083-\uff09\u6216\u9633\u79bb\u5b50\u57fa\u56e2\uff08-NH\u2083\u207a\uff09\u53ef\u4ee5\u63a5\u679d\u5230\u9897\u7c92\u8868\u9762\uff0c\u4ee5\u6539\u53d8 ZETA \u7535\u4f4d\u3001\u9009\u62e9\u6027\u884c\u4e3a\u4ee5\u53ca\u57ab\u7c92\u4e4b\u95f4\u7684\u76f8\u4e92\u4f5c\u7528\u3002\u4f8b\u5982\uff0c\u8868\u9762\u6539\u6027\u9634\u79bb\u5b50\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u5728\u5148\u8fdb\u7684 STI \u6d46\u6599\u914d\u65b9\u4e2d\u4e0e\u94c8\u4e00\u8d77\u7528\u4f5c\u8f85\u52a9\u7814\u78e8\u5242\uff0c\u4ee5\u51cf\u5c11\u4e0e\u94c8\u76f8\u5173\u7684\u5212\u75d5\u7f3a\u9677\uff0c\u540c\u65f6\u4fdd\u6301\u53ef\u63a5\u53d7\u7684\u9009\u62e9\u6027\u3002\u5728\u94dc CMP \u4e2d\uff0c\u4e8c\u6c27\u5316\u7845\u9897\u7c92\u8868\u9762\u7535\u8377\u7ecf\u8fc7\u7cbe\u5fc3\u7ba1\u7406\uff0c\u4ee5\u5c3d\u91cf\u51cf\u5c11 Cu\u00b2\u207a \u79bb\u5b50\u5728\u6676\u7247\u8868\u9762\u7684\u5438\u9644\u548c\u518d\u6c89\u79ef\u3002.\n  <\/p>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 4: CERIA\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"ceria\">4.\u6c27\u5316\u94c8\uff08CeO\u2082\uff09\uff1a\u79d1\u6280\u521b\u65b0\u4e13\u5bb6<\/h2>\n\n  <p>\n    \u6c27\u5316\u94c8\uff08\u4fd7\u79f0\u94c8\uff09\u5728 CMP \u78e8\u6599\u5b66\u4e2d\u5360\u6709\u72ec\u7279\u7684\u5730\u4f4d\uff0c\u56e0\u4e3a\u5b83\u7684\u53bb\u9664\u673a\u5236\u5e76\u975e\u7eaf\u7cb9\u7684\u673a\u68b0\u4f5c\u7528\u3002\u94c8\u9897\u7c92\u4e0e SiO\u2082\u8868\u9762\u53d1\u751f\u5316\u5b66\u9f7f\u72b6\u53cd\u5e94\uff0c\u4e0e\u5355\u7eaf\u7684\u673a\u68b0\u7814\u78e8\u76f8\u6bd4\uff0c\u53ef\u663e\u8457\u52a0\u5feb\u6c27\u5316\u7269\u7684\u53bb\u9664\uff0c\u800c Si\u2083N\u2084 \u963b\u6321\u5c42\u5bf9\u8fd9\u79cd\u673a\u5236\u57fa\u672c\u4e0a\u6ca1\u6709\u53cd\u5e94\u3002\u8fd9\u4f7f\u5f97\u94c8\u57fa\u6d46\u6599\u5177\u6709\u6781\u9ad8\u7684 SiO\u2082:Si\u2083N\u2084 \u9009\u62e9\u6027\uff0850:1 \u81f3 200:1\uff09\uff0c\u4f7f\u5176\u6210\u4e3a STI CMP \u7684\u72ec\u7279\u9009\u62e9--\u5728\u5148\u8fdb\u7684\u8282\u70b9\u4e0a\uff0c\u4efb\u4f55\u4e8c\u6c27\u5316\u7845\u57fa\u6d46\u6599\u90fd\u65e0\u6cd5\u6ee1\u8db3\u8fd9\u4e00\u8981\u6c42\u3002.\n  <\/p>\n\n  <h3>Ce-O-Si \u5316\u5b66\u9f7f\u673a\u5236<\/h3>\n  <p>\n    \u5728\u539f\u5b50\u5c42\u9762\u4e0a\uff0c\u94c8\u9897\u7c92\u4e0a\u7684\u2074\u207a \u8868\u9762\u4f4d\u70b9\u4e0e SiO\u2082 \u8868\u9762\u7684\u6865\u63a5\u6c27\u539f\u5b50\u5f62\u6210\u5f3a\u5927\u7684 Ce-O-Si \u952e\uff0c\u5728\u9897\u7c92\u548c\u8584\u819c\u4e4b\u95f4\u5f62\u6210\u5316\u5b66\u62f4\u7cfb\u3002\u5728\u5916\u52a0\u673a\u68b0\u5e94\u529b\uff08\u6765\u81ea\u886c\u57ab\u538b\u529b\u548c\u76f8\u5bf9\u8fd0\u52a8\uff09\u7684\u4f5c\u7528\u4e0b\uff0c\u8fd9\u79cd\u952e\u4f1a\u4f18\u5148\u65ad\u88c2\u6c27\u5316\u7269\u7684 Si-O-Si \u7f51\u7edc\uff0c\u800c\u4e0d\u662f Ce-O-Si \u952e\u672c\u8eab\uff0c\u4ece\u800c\u6709\u6548\u5730\u5c06 SiO\u2082 \u5206\u5b50\u788e\u7247\u4ece\u8868\u9762\u6495\u88c2\u3002\u8fd9\u79cd\u673a\u5236\u7684\u70ed\u529b\u5b66\u539f\u7406\uff08\u7531 Ce-O-Si \u548c Si-O-Si \u4e4b\u95f4\u7684\u952e\u89e3\u79bb\u80fd\u5dee\u51b3\u5b9a\uff09\u89e3\u91ca\u4e86\u4e3a\u4ec0\u4e48\u6c27\u5316\u7269 MRR \u9ad8\uff0c\u800c Si\u2083N\u2084 \u7684\u9009\u62e9\u6027\u9ad8\uff0c\u56e0\u4e3a Si-N \u952e\u5bf9\u94c8\u8868\u9762\u5316\u5b66\u57fa\u672c\u4e0a\u662f\u60f0\u6027\u7684\u3002.\n  <\/p>\n\n  <h3>\u94c8\u6d46\u6599\u4e2d\u7684\u7c92\u5ea6\u4e0e\u7f3a\u9677\u6743\u8861<\/h3>\n  <p>\n    \u94c8\u9897\u7c92\u5927\u5c0f\u5bf9\u6027\u80fd\u548c\u7f3a\u9677\u7387\u90fd\u6709\u5f88\u5927\u5f71\u54cd\u3002\u8f83\u5927\u7684\u94c8\u9897\u7c92\uff08100-300 nm\uff09\u53ef\u63d0\u4f9b\u8f83\u9ad8\u7684 MRR\uff0c\u4f46\u4f1a\u663e\u8457\u589e\u52a0\u5fae\u5212\u75d5\u7f3a\u9677\u7684\u98ce\u9669\u548c CMP \u540e\u94c8\u6b8b\u7559\u5728\u6676\u7247\u8868\u9762\u7684\u98ce\u9669\u3002\u8f83\u5c0f\u7684\u9897\u7c92\uff0820-80 nm\uff0c\u901a\u8fc7\u80f6\u4f53\u6216\u6e7f\u6cd5\u5408\u6210\u94c8\u8def\u7ebf\u5b9e\u73b0\uff09\u53ef\u964d\u4f4e\u5212\u75d5\u98ce\u9669\u548c CMP \u540e\u7684\u6e05\u6d01\u8d1f\u62c5\uff0c\u4f46\u9700\u8981\u66f4\u9ad8\u7684\u56fa\u4f53\u8d1f\u8f7d\u6216\u66f4\u957f\u7684\u629b\u5149\u65f6\u95f4\u624d\u80fd\u8fbe\u5230\u540c\u7b49\u7684 MRR\u3002\u8fd9\u79cd\u7c92\u5ea6-\u7f3a\u9677\u6743\u8861\u662f\u5148\u8fdb STI \u7814\u78e8\u6db2\u5f00\u53d1\u4e2d\u7684\u6838\u5fc3\u914d\u65b9\u6311\u6218\u3002\u6709\u5173\u94c8\u6b8b\u7559\u7269\u5982\u4f55\u5f71\u54cd CMP \u540e\u6e05\u6d01\u7684\u8ba8\u8bba\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u4ee5\u4e0b\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-defects-root-cause-analysis-quality-control-complete-engineering-guide\/\">CMP \u6ce5\u6d46\u7f3a\u9677\u5206\u6790\u4e0e\u8d28\u91cf\u63a7\u5236<\/a>.\n  <\/p>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 5: ALUMINA\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"alumina\">5.\u6c27\u5316\u94dd\uff08Al\u2082O\u2083\uff09\uff1a\u9ad8 MRR \u4e13\u5bb6<\/h2>\n\n  <p>\n    \u6c27\u5316\u94dd\u78e8\u6599\u7684\u83ab\u6c0f\u786c\u5ea6\u4e3a 9\uff0c\u662f\u4e09\u79cd\u4e3b\u8981 CMP \u78e8\u6599\u4e2d\u786c\u5ea6\u6700\u9ad8\u7684\u4e00\u79cd\uff0c\u9002\u7528\u4e8e\u9700\u8981\u5728\u673a\u68b0\u786c\u5ea6\u8584\u819c\u4e0a\u83b7\u5f97\u9ad8 MRR \u7684\u60c5\u51b5\uff1a\u4e3b\u8981\u7528\u4e8e\u94a8 CMP\uff08W \u585e\u548c\u63a5\u89e6\uff09\uff0c\u5076\u5c14\u4e5f\u7528\u4e8e\u94b4\u548c\u786c\u91d1\u5c5e\u629b\u5149\u3002\u03b1-\u6c27\u5316\u94dd\uff08\u521a\u7389\uff09\u662f\u70ed\u529b\u5b66\u7a33\u5b9a\u76f8\uff0c\u4e5f\u662f\u6700\u575a\u786c\u7684\uff1b\u03b3-\u6c27\u5316\u94dd\u662f\u5728\u8f83\u4f4e\u6e29\u5ea6\u4e0b\u901a\u8fc7\u6c14\u76f8\u5408\u6210\u751f\u4ea7\u7684\uff0c\u5176\u5f62\u6001\u66f4\u4e0d\u89c4\u5219\uff0c\u786c\u5ea6\u7a0d\u4f4e\uff0c\u4f46\u5728\u9178\u6027\u6d46\u6599\u73af\u5883\u4e2d\u7684\u5206\u6563\u7a33\u5b9a\u6027\u66f4\u597d\u3002.\n  <\/p>\n  <p>\n    \u6c27\u5316\u94dd\u7684\u4e3b\u8981\u5c40\u9650\u6027\u5728\u4e8e\u4e0e\u4e8c\u6c27\u5316\u7845\u6216\u94c8\u76f8\u6bd4\uff0c\u5176\u5212\u4f24\u98ce\u9669\u8f83\u9ad8\u3002\u9ad8\u786c\u5ea6\u3001\u4e0d\u89c4\u5219\u7684\u9897\u7c92\u5f62\u72b6\uff08\u5c24\u5176\u662f\u6c14\u76f8\u6cd5\u6c27\u5316\u94dd\uff09\u4ee5\u53ca\u5728\u4f4e pH \u503c\u4e0b\u7684\u56e2\u805a\u503e\u5411\uff0c\u4f7f\u6c27\u5316\u94dd\u6d46\u6599\u6210\u4e3a CMP \u78e8\u6599\u5de5\u5177\u5305\u4e2d\u7f3a\u9677\u98ce\u9669\u6700\u9ad8\u7684\u914d\u65b9\u7c7b\u522b\u3002\u5bf9\u4e8e\u751f\u4ea7\u7ea7\u6c27\u5316\u94dd\u6d46\u6599\u7684\u4f7f\u7528\uff0c\u57fa\u672c\u4e0a\u5fc5\u987b\u8fdb\u884c 0.5 \u5fae\u7c73\u6216\u66f4\u7ec6\u7684\u4f7f\u7528\u70b9\u8fc7\u6ee4\u3002\u8bb8\u591a\u73b0\u4ee3\u94a8 CMP \u914d\u65b9\u5df2\u8fc7\u6e21\u5230\u5177\u6709\u4f18\u5316\u6c27\u5316\u5242\u5316\u5b66\u6210\u5206\u7684\u9ad8\u6d53\u5ea6\u4e8c\u6c27\u5316\u7845\u78e8\u6599\uff0c\u4ece\u800c\u5728\u663e\u8457\u964d\u4f4e\u7f3a\u9677\u7387\u7684\u60c5\u51b5\u4e0b\u5b9e\u73b0\u4e86\u53ef\u6bd4\u7684 W MRR - \u6211\u4eec\u7684\u6307\u5357\u300a\u94a8 CMP\u300b\u4e2d\u4ecb\u7ecd\u4e86\u8fd9\u4e00\u8d8b\u52bf\u3002 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-filters-storage-handling-complete-engineering-guide\/\">CMP \u6ce5\u6d46\u8fc7\u6ee4\u5668\u548c\u5904\u7406<\/a>.\n  <\/p>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 6: PARTICLE PARAMETERS\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"particle-parameters\">6.\u5173\u952e\u7c92\u5b50\u53c2\u6570\uff1a\u5c3a\u5bf8\u3001\u5f62\u72b6\u548c\u6d53\u5ea6<\/h2>\n\n  <p>\n    \u9664\u4e86\u7814\u78e8\u6750\u6599\u7c7b\u578b\u5916\uff0c\u8fd8\u6709\u4e09\u4e2a\u9897\u7c92\u7ea7\u53c2\u6570\u51b3\u5b9a\u7740 CMP \u7684\u6027\u80fd\uff0c\u5fc5\u987b\u5728\u6bcf\u4e2a\u751f\u4ea7\u6279\u6b21\u4e2d\u4e25\u683c\u89c4\u5b9a\u548c\u63a7\u5236\uff1a\n  <\/p>\n\n  <h3>6.1 \u7c92\u5f84\u5206\u5e03\uff08PSD\uff09<\/h3>\n  <p>\n    \u7c92\u5ea6\u5206\u5e03\u662f CMP \u6ce5\u6d46\u6700\u91cd\u8981\u7684\u5165\u6599\u8d28\u91cf\u63a7\u5236\u53c2\u6570\u3002\u6709\u4e24\u4e2a\u503c\u81f3\u5173\u91cd\u8981\uff1a <strong>D50<\/strong> (\u4e2d\u503c\u9897\u7c92\u76f4\u5f84\uff0c\u51b3\u5b9a\u540d\u4e49 MRR \u548c\u9009\u62e9\u6027\u884c\u4e3a\uff09\u548c <strong>D99<\/strong> (\u9897\u7c92\u76f4\u5f84\u7684\u7b2c 99 \u767e\u5206\u4f4d\u6570\uff0c\u662f\u9884\u6d4b\u5212\u75d5\u7f3a\u9677\u98ce\u9669\u7684\u4e3b\u8981\u6307\u6807\uff09\u3002\u6d46\u6599\u7684 D50 \u503c\u53ef\u80fd\u4e3a 80 nm\uff0c\u5b8c\u5168\u5c45\u4e2d\uff0c\u4f46\u7531\u4e8e\u56e2\u805a\u5c3e\u90e8\uff0cD99 \u503c\u53ef\u80fd\u4e3a 450 nm\uff0c\u65e0\u8bba D50 \u503c\u5982\u4f55\uff0c\u8fd9\u4e9b\u5c3e\u90e8\u9897\u7c92\u90fd\u4f1a\u5728 300mm \u751f\u4ea7\u6676\u5706\u4e0a\u9020\u6210\u5212\u75d5\u3002\u5148\u8fdb\u8282\u70b9\u7684\u89c4\u683c\u901a\u5e38\u89c4\u5b9a D99  0.5 \u00b5m\uff09\u9650\u5236\u4e3a\u6bcf\u6beb\u5347 &lt; 100 \u4e2a\u9897\u7c92\u3002.\n  <\/p>\n\n  <h3>6.2 \u9897\u7c92\u5f62\u72b6<\/h3>\n  <p>\n    \u7403\u5f62\u9897\u7c92\uff08\u6eb6\u80f6-\u51dd\u80f6\u4e8c\u6c27\u5316\u7845\u5408\u6210\u7684\u7406\u60f3\u72b6\u6001\uff09\u53ef\u5c06\u78e8\u6599-\u8584\u819c\u63a5\u89e6\u70b9\u7684\u5e94\u529b\u96c6\u4e2d\u964d\u81f3\u6700\u4f4e\uff0c\u4ece\u800c\u5728\u7ed9\u5b9a\u538b\u529b\u4e0b\u51cf\u5c11\u5212\u75d5\u6df1\u5ea6\u548c\u5bbd\u5ea6\u3002\u4e0d\u89c4\u5219\u6216\u5207\u9762\u9897\u7c92\uff08\u5e38\u89c1\u4e8e\u6c14\u76f8\u6cd5\u4e8c\u6c27\u5316\u7845\u3001\u6c14\u76f8\u6cd5\u6c27\u5316\u94dd\u548c\u6c89\u6dc0\u94c8\uff09\u53ef\u4ea7\u751f\u66f4\u9ad8\u7684\u5c40\u90e8\u5e94\u529b\u96c6\u4e2d\uff0c\u4ece\u800c\u63d0\u9ad8 MRR\uff0c\u4f46\u4ee3\u4ef7\u662f\u5212\u75d5\u98ce\u9669\u589e\u52a0\u3002\u9488\u5bf9\u7f3a\u9677\u654f\u611f\u578b\u5e94\u7528\uff08ULK \u7535\u4ecb\u8d28\u3001\u963b\u6321\u5c42 CMP\uff09\u7684\u5148\u8fdb\u914d\u65b9\u6307\u5b9a\u4f7f\u7528\u9ad8\u7403\u5f62\u3001\u7a84 PSD \u80f6\u4f53\u4e8c\u6c27\u5316\u7845\uff0c\u4ee5\u5e73\u8861\u53bb\u9664\u6548\u7387\u548c\u7f3a\u9677\u7387\u3002.\n  <\/p>\n\n  <h3>6.3 \u78e8\u6599\u6d53\u5ea6<\/h3>\n  <p>\n    \u78e8\u6599\u91cd\u91cf\u767e\u5206\u6bd4\u63a7\u5236\u6676\u7247-\u710a\u76d8\u754c\u9762\u7684\u78e8\u6599\u9897\u7c92\u6570\u91cf\u5bc6\u5ea6\uff0c\u76f4\u63a5\u5f71\u54cd MRR\u3002\u5728\u4f4e\u6d53\u5ea6\u65f6\uff0cMRR \u4e0e\u6d53\u5ea6\u7684\u5173\u7cfb\u8fd1\u4f3c\u7ebf\u6027\uff0c\u4f46\u5728\u8f83\u9ad8\u8d1f\u8f7d\u65f6\uff08\u4e8c\u6c27\u5316\u7845\u7684\u8d1f\u8f7d\u901a\u5e38\u5927\u4e8e 8-10 wt%\uff09\uff0c\u78e8\u6599\u63a5\u89e6\u53d8\u5f97\u9971\u548c\uff0cMRR \u4e0e\u6d53\u5ea6\u7684\u5173\u7cfb\u5c31\u4f1a\u8d8b\u4e8e\u5e73\u7a33\u3002\u6d53\u5ea6\u8fc7\u9ad8\u4e0d\u4f1a\u8fdb\u4e00\u6b65\u63d0\u9ad8 MRR\uff0c\u4f46\u4f1a\u589e\u52a0\u6d46\u6599\u6210\u672c\u3001\u8fc7\u6ee4\u5668\u5835\u585e\u7387\u3001CMP \u540e\u6e05\u6d01\u8d1f\u62c5\uff0c\u4ee5\u53ca\u901a\u8fc7\u591a\u4f53\u63a5\u89e6\u4e8b\u4ef6\u5bfc\u81f4\u9897\u7c92\u5212\u4f24\u7684\u98ce\u9669\u3002\u6700\u4f73\u78e8\u6599\u6d53\u5ea6\u6839\u636e\u5177\u4f53\u5e94\u7528\u800c\u5b9a\uff0c\u5e76\u5728\u5de5\u827a\u5f00\u53d1\u8fc7\u7a0b\u4e2d\u4e0e\u710a\u76d8\u6c9f\u69fd\u6a21\u5f0f\u548c\u6d46\u6599\u6d41\u901f\u5171\u540c\u4f18\u5316\u3002.\n  <\/p>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 7: CHEMICAL ADDITIVES\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"chemical-additives\">7.\u590d\u5408\u5316\u5b66\u6dfb\u52a0\u5242\uff1a\u516d\u79cd\u529f\u80fd\u7c7b\u522b<\/h2>\n\n  <p>\n    \u5728\u73b0\u4ee3 CMP \u6ce5\u6d46\u4e2d\uff0c\u5316\u5b66\u590d\u5408\u6dfb\u52a0\u5242\u662f\u6700\u5148\u8fdb\u7684\u914d\u65b9\u79d1\u5b66\u6240\u5728\u3002\u7814\u78e8\u5242\u63d0\u4f9b\u673a\u68b0\u4f5c\u7528\uff0c\u800c\u5316\u5b66\u6dfb\u52a0\u5242\u7cfb\u7edf\u5219\u51b3\u5b9a\u9009\u62e9\u6027\u3001\u63a7\u5236\u8150\u8680\u3001\u7a33\u5b9a\u5206\u6563\uff0c\u5e76\u6700\u7ec8\u786e\u5b9a\u6ce5\u6d46\u7684\u6027\u80fd\u8303\u56f4\u3002\u5546\u7528 CMP \u6ce5\u6d46\u4e2d\u6709\u516d\u79cd\u4e0d\u540c\u529f\u80fd\u7684\u6dfb\u52a0\u5242\uff1a\n  <\/p>\n\n  <ul class=\"additive-list\">\n    <li class=\"additive-item\">\n      <div class=\"additive-dot\">\u26a1<\/div>\n      <div class=\"additive-body\">\n        <h4>1.\u6c27\u5316\u5242<\/h4>\n        <span class=\"examples\">H\u2082O\u2082 - KIO\u2083 - Fe(NO\u2083)\u2083 - CAN<\/span>\n        <p>\u6c27\u5316\u5242\u662f\u91d1\u5c5e CMP \u6ce5\u6d46\u7684\u5316\u5b66\u5f15\u64ce\u3002\u5b83\u4eec\u5c06\u91d1\u5c5e\u8868\u9762\uff08\u94dc\u3001\u94a8\u3001\u94b4\uff09\u8f6c\u5316\u4e3a\u8f83\u8f6f\u7684\u91d1\u5c5e\u6c27\u5316\u7269\u6216\u6c22\u6c27\u5316\u7269\u5c42\uff0c\u4ee5\u4fbf\u673a\u68b0\u5730\u8fdb\u884c\u78e8\u6599\u53bb\u9664\u3002H\u2082O\u2082 \u662f\u94dc CMP \u4e2d\u6700\u4e3b\u8981\u7684\u6c27\u5316\u5242\uff0c\u56e0\u4e3a\u5176\u5206\u89e3\u4ea7\u7269\uff08H\u2082O + O\u2082\uff09\u5e72\u51c0\uff0c\u800c\u4e14\u6d53\u5ea6\u53ef\u8c03\u3002\u785d\u9178\u94c1\u548c\u7898\u9178\u94be\u53ef\u7528\u4e8e\u94a8\u6d46\u6599\u3002\u5fc5\u987b\u4e25\u683c\u63a7\u5236\u6c27\u5316\u5242\u7684\u6d53\u5ea6\uff1a\u6d53\u5ea6\u8fc7\u4f4e\u4f1a\u5bfc\u81f4\u8868\u9762\u6c27\u5316\u4e0d\u5b8c\u5168\u548c MRR \u4f4e\u4e0b\uff1b\u6d53\u5ea6\u8fc7\u9ad8\u4f1a\u5bfc\u81f4\u8fc7\u5ea6\u8150\u8680\u3001\u7535\u8680\u70b9\u8680\u548c\u51f9\u9677\u91d1\u5c5e\u7279\u5f81\u4e2d\u7684\u789f\u5f62\u3002.<\/p>\n      <\/div>\n    <\/li>\n    <li class=\"additive-item\">\n      <div class=\"additive-dot\">\ud83d\udd17<\/div>\n      <div class=\"additive-body\">\n        <h4>2.\u87af\u5408\u5242\/\u7edc\u5408\u5242<\/h4>\n        <span class=\"examples\">\u7518\u6c28\u9178 - \u67e0\u6aac\u9178 - \u4e59\u4e8c\u80fa\u56db\u4e59\u9178 - \u6c28\u57fa\u9178<\/span>\n        <p>\u87af\u5408\u5242\u4e0e\u6c27\u5316\u53cd\u5e94\u4ea7\u751f\u7684\u6eb6\u89e3\u91d1\u5c5e\u9633\u79bb\u5b50\uff08Cu\u00b2\u207a\u3001W\u2076\u207a\u3001Fe\u00b3\u207a\uff09\u5f62\u6210\u7a33\u5b9a\u7684\u53ef\u6eb6\u6027\u7edc\u5408\u7269\uff0c\u9632\u6b62\u518d\u6b21\u6c89\u6dc0\u5e76\u91cd\u65b0\u6c89\u79ef\u5230\u629b\u5149\u6676\u7247\u8868\u9762\u3002\u5728\u94dc CMP \u4e2d\uff0c\u7518\u6c28\u9178\u4f1a\u5728\u9178\u6027 pH \u503c\u4e0b\u5f62\u6210\u53ef\u6eb6\u6027\u94dc-\u7518\u6c28\u9178\u7edc\u5408\u7269\uff0c\u4fdd\u6301\u6eb6\u89e3\u94dc\u5728\u6eb6\u6db2\u4e2d\u7684\u6d41\u52a8\u6027\uff0c\u4ece\u800c\u6709\u6548\u53bb\u9664\u94dc\u6d46\u6d41\u51fa\u7269\u4e2d\u7684\u94dc\u3002\u5982\u679c\u6ca1\u6709\u6709\u6548\u7684\u87af\u5408\u4f5c\u7528\uff0c\u91d1\u5c5e\u79bb\u5b50\u7684\u518d\u6c89\u79ef\u4f1a\u5bfc\u81f4\u7535\u4ecb\u8d28\u8868\u9762\u6c61\u67d3\u5e76\u964d\u4f4e\u8bbe\u5907\u6027\u80fd\u3002.<\/p>\n      <\/div>\n    <\/li>\n    <li class=\"additive-item\">\n      <div class=\"additive-dot\">\ud83d\udee1\ufe0f<\/div>\n      <div class=\"additive-body\">\n        <h4>3.\u7f13\u8680\u5242<\/h4>\n        <span class=\"examples\">BTA - \u7532\u57fa\u4e09\u5511 - \u82ef\u5e76\u54aa\u5511<\/span>\n        <p>\u8150\u8680\u6291\u5236\u5242\u53ef\u4fdd\u62a4\u5df2\u5e73\u9762\u5316\u7684\u51f9\u9677\u91d1\u5c5e\u7279\u5f81\uff08\u94dc\u7ebf\u3001\u94a8\u585e\uff09\uff0c\u4f7f\u5176\u5728 CMP \u7684\u8fc7\u629b\u5149\u9636\u6bb5\u4e0d\u4f1a\u7ee7\u7eed\u53d1\u751f\u5316\u5b66\u6eb6\u89e3\u3002\u82ef\u5e76\u4e09\u5511\uff08BTA\uff09\u662f\u5178\u578b\u7684\u94dc\u8150\u8680\u6291\u5236\u5242\uff1a\u5b83\u5438\u9644\u5728\u94dc\u8868\u9762\uff0c\u5f62\u6210\u758f\u6c34\u7684 Cu-BTA \u590d\u5408\u7269\u5355\u5c42\uff0c\u4f7f\u94dc\u949d\u5316\uff0c\u9632\u6b62\u8fdb\u4e00\u6b65\u7684\u6c27\u5316\u4fb5\u8680\u3002\u5fc5\u987b\u5c0f\u5fc3\u5e73\u8861 BTA \u7684\u6d53\u5ea6--\u8fc7\u4f4e\u4f1a\u5bfc\u81f4\u94dc\u8fc7\u5ea6\u8150\u8680\u548c\u5206\u5c42\uff1b\u8fc7\u9ad8\u5219\u4f1a\u964d\u4f4e\u5e73\u9762\u5316\u533a\u57df\u7684 MRR\uff0c\u5e76\u589e\u52a0 CMP \u540e\u6e05\u6d01\u7684\u96be\u5ea6\u3002.<\/p>\n      <\/div>\n    <\/li>\n    <li class=\"additive-item\">\n      <div class=\"additive-dot\">\ud83c\udf0a<\/div>\n      <div class=\"additive-body\">\n        <h4>4.\u8868\u9762\u6d3b\u6027\u5242\u548c\u5206\u6563\u5242<\/h4>\n        <span class=\"examples\">\u805a\u4e19\u70ef\u9178 - \u805a\u78fa\u9178\u76d0 - \u975e\u79bb\u5b50\u8868\u9762\u6d3b\u6027\u5242<\/span>\n        <p>\u8868\u9762\u6d3b\u6027\u5242\u548c\u805a\u5408\u7269\u5206\u6563\u5242\u5177\u6709\u591a\u79cd\u4f5c\u7528\uff1a\u5b83\u4eec\u53ef\u4ee5\u7a33\u5b9a\u7814\u78e8\u9897\u7c92\u7684\u5206\u6563\uff0c\u9632\u6b62\u56e2\u805a\uff08\u7acb\u4f53\u7a33\u5b9a\uff09\uff1b\u6539\u53d8\u629b\u5149\u57ab\u8868\u9762\u7684\u6da6\u6e7f\u6027\uff0c\u63d0\u9ad8\u6d46\u6599\u8f93\u9001\u7684\u5747\u5300\u6027\uff1b\u5f71\u54cd\u6676\u7247-\u629b\u5149\u57ab\u754c\u9762\u7684\u6d41\u4f53\u819c\u539a\u5ea6\u548c\u7c98\u5ea6\u3002\u9634\u79bb\u5b50\u805a\u4e19\u70ef\u9178\uff08PAA\uff09\u4f5c\u4e3a\u4e00\u79cd\u9009\u62e9\u6027\u589e\u5f3a\u6dfb\u52a0\u5242\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8e\u94c8\u57fa STI \u7814\u78e8\u6db2\u4e2d--PAA \u4f1a\u4f18\u5148\u5438\u9644\u5728\u7845\u2083N\u2084 \u8868\u9762\uff0c\u5f62\u6210\u7acb\u4f53\u5c4f\u969c\uff0c\u8fdb\u4e00\u6b65\u6291\u5236\u6c2e\u5316\u7269\u7684\u53bb\u9664\uff0c\u5e76\u5728\u4f18\u5316\u914d\u65b9\u4e2d\u5c06 SiO\u2082:Si\u2083N\u2084 \u7684\u9009\u62e9\u6027\u63d0\u9ad8\u5230 &gt;200:1\u3002.<\/p>\n      <\/div>\n    <\/li>\n    <li class=\"additive-item\">\n      <div class=\"additive-dot\">\u2696\ufe0f<\/div>\n      <div class=\"additive-body\">\n        <h4>5. pH \u7f13\u51b2\u5242\u548c\u8c03\u8282\u5242<\/h4>\n        <span class=\"examples\">KOH - NH\u2084OH - HNO\u2083 - \u918b\u9178\/\u918b\u9178\u76d0\u7f13\u51b2\u6db2<\/span>\n        <p>pH \u503c\u662f\u540c\u65f6\u5f71\u54cd\u6eb6\u89e3\u52a8\u529b\u5b66\u3001\u8868\u9762\u7535\u8377\u3001\u80f6\u4f53\u7a33\u5b9a\u6027\u548c\u6291\u5236\u5242\u6709\u6548\u6027\u7684\u4e3b\u8981\u53d8\u91cf\u3002\u5927\u591a\u6570 CMP \u6ce5\u6d46\u90fd\u662f\u6309\u7167\u7279\u5b9a\u7684 pH \u503c\u8bbe\u5b9a\u503c\u914d\u5236\u7684\uff1a\u78b1\u6027\uff08pH \u503c\u4e3a 9-12 \uff09\u7528\u4e8e\u6c27\u5316\u7269\u548c\u591a\u6676\u7845\u6ce5\u6d46\uff0c\u4ee5\u6700\u5927\u9650\u5ea6\u5730\u63d0\u9ad8\u6c22\u6c27\u5316\u7845\u7684\u6eb6\u89e3\u5ea6\uff1b\u9178\u6027\uff08pH \u503c\u4e3a 2-5 \uff09\u7528\u4e8e\u91d1\u5c5e\u6ce5\u6d46\uff0c\u4ee5\u4fdd\u6301\u6c27\u5316\u5242\u7684\u6d3b\u6027\u548c\u91d1\u5c5e\u79bb\u5b50\u7684\u6eb6\u89e3\u5ea6\u3002\u7f13\u51b2\u4f53\u7cfb\uff08\u5f31\u9178\/\u5171\u8f6d\u78b1\u5bf9\uff09\u53ef\u5728\u6d46\u6599\u8001\u5316\u548c\u63a5\u89e6\u6eb6\u89e3\u526f\u4ea7\u7269\u671f\u95f4\u4fdd\u6301 pH \u503c\u7a33\u5b9a\uff0c\u8fd9\u5bf9\u6279\u6b21\u95f4\u7684\u5de5\u827a\u91cd\u73b0\u6027\u81f3\u5173\u91cd\u8981\u3002.<\/p>\n      <\/div>\n    <\/li>\n    <li class=\"additive-item\">\n      <div class=\"additive-dot\">\ud83e\udda0<\/div>\n      <div class=\"additive-body\">\n        <h4>6.\u6740\u83cc\u5242<\/h4>\n        <span class=\"examples\">\u5f02\u567b\u5511\u5549\u916e\u884d\u751f\u7269 - \u5b63\u94f5\u76d0\u5316\u5408\u7269<\/span>\n        <p>\u5546\u7528 CMP \u6d46\u6599\u662f\u542b\u6709\u6709\u673a\u6dfb\u52a0\u5242\u7684\u6c34\u6027\u4f53\u7cfb\uff0c\u662f\u50a8\u5b58\u671f\u95f4\u5fae\u751f\u7269\u751f\u957f\u7684\u7406\u60f3\u73af\u5883\uff0c\u5c24\u5176\u662f\u5728\u505c\u7559\u65f6\u95f4\u8f83\u957f\u7684\u5206\u914d\u7cfb\u7edf\u4e2d\u3002\u6ce5\u6d46\u4e2d\u7684\u7ec6\u83cc\u6216\u771f\u83cc\u751f\u957f\u4f1a\u5bfc\u81f4 pH \u503c\u6f02\u79fb\uff08\u56e0\u4e3a\u4f1a\u4ea7\u751f\u6709\u673a\u9178\uff09\u3001\u8868\u9762\u6d3b\u6027\u5242\u8017\u7aed\u548c\u9897\u7c92\u7d6e\u51dd\uff0c\u5176\u4e2d\u4efb\u4f55\u4e00\u79cd\u60c5\u51b5\u90fd\u4f1a\u5bfc\u81f4\u5f71\u54cd\u4ea7\u91cf\u7684\u5de5\u827a\u504f\u5dee\u3002\u6740\u83cc\u5242\u7684\u6dfb\u52a0\u91cf\u4f4e\u4e8e 1000 ppm\uff0c\u53ef\u5728\u6d46\u6599\u7684\u4fdd\u8d28\u671f\u5185\u9632\u6b62\u5fae\u751f\u7269\u5b9a\u690d\uff0c\u540c\u65f6\u4e0d\u4f1a\u5f71\u54cd\u914d\u65b9\u7684\u7535\u5316\u5b66\u6216\u80f6\u4f53\u7279\u6027\u3002.<\/p>\n      <\/div>\n    <\/li>\n  <\/ul>\n\n  <!-- Mid-article CTA -->\n  <div class=\"cmp-cta\">\n    <h3>\u9700\u8981\u7cbe\u786e\u914d\u5236\u7684 CMP \u6ce5\u6d46\uff1f<\/h3>\n    <p>\u5409\u4e4b\u5c9b\u7535\u5b50\u79d1\u6280\u63d0\u4f9b\u7684 CMP \u629b\u5149\u6d46\u6599\u5177\u6709\u53ef\u63a7\u7684\u78e8\u6599 PSD\u3001\u4f18\u5316\u7684\u6dfb\u52a0\u5242\u5316\u5b66\u6210\u5206\u548c\u4e25\u683c\u7684\u6279\u6b21\u8d28\u91cf\u63a7\u5236\uff0c\u53ef\u6ee1\u8db3\u60a8\u7684\u7279\u5b9a\u5de5\u827a\u8981\u6c42\u3002.<\/p>\n    <a href=\"https:\/\/jeez-semicon.com\/zh\/contact\/\">\u7533\u8bf7\u6280\u672f\u54a8\u8be2 \u2192<\/a>\n  <\/div>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 8: COLLOIDAL STABILITY\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"colloidal-stability\">8.\u80f6\u4f53\u7a33\u5b9a\u6027\uff1aZeta \u7535\u4f4d\u4e0e\u5206\u6563\u79d1\u5b66<\/h2>\n\n  <p>\n    CMP \u6d46\u6599\u7684\u597d\u574f\u53d6\u51b3\u4e8e\u5176\u80f6\u4f53\u7a33\u5b9a\u6027\uff0c\u5373\u78e8\u6599\u9897\u7c92\u5728\u6c34\u6027\u8f7d\u4f53\u4e2d\u4fdd\u6301\u5747\u5300\u5206\u6563\u800c\u4e0d\u6c89\u964d\u3001\u7ed3\u5757\u6216\u5f62\u6210\u51dd\u80f6\u72b6\u56e2\u5757\u7684\u80fd\u529b\u3002\u80f6\u4f53\u4e0d\u7a33\u5b9a\u6027\u662f\u9020\u6210\u751f\u4ea7\u4e2d CMP \u504f\u79fb\u7684\u6700\u5e38\u89c1\u6839\u6e90\uff1a\u56e2\u805a\u9897\u7c92\u4f1a\u6210\u4e3a\u4ea7\u751f\u7f3a\u9677\u7684\u8fc7\u5927\u9897\u7c92\uff0c\u5bfc\u81f4\u5fae\u5c0f\u5212\u75d5\u548c\u4ea7\u91cf\u4e0b\u964d\u3002.\n  <\/p>\n\n  <h3>Zeta \u7535\u4f4d\uff1a\u7a33\u5b9a\u6027\u6307\u6807<\/h3>\n  <p>\n    Zeta \u7535\u4f4d\uff08\u03b6\uff09\u662f\u60ac\u6d6e\u6db2\u4e2d\u9897\u7c92\u5468\u56f4\u6ed1\u52a8\u9762\u4e0a\u7684\u7535\u52a8\u52bf\uff0c\u662f\u9897\u7c92\u95f4\u9759\u7535\u65a5\u529b\u7684\u53ef\u6d4b\u91cf\u4ee3\u8868\u3002\u5f53\u7c92\u5b50\u5e26\u6709\u9ad8\u8868\u9762\u7535\u8377\uff08\u5f3a\u6b63\u7535\u8377\u6216\u5f3a\u8d1f\u7535\u8377\uff09\u65f6\uff0c\u7c92\u5b50\u95f4\u7684\u9759\u7535\u65a5\u529b\u4f1a\u963b\u6b62\u7c92\u5b50\u9760\u8fd1\u548c\u805a\u96c6\u3002\u5f53 zeta \u7535\u4f4d\u8d8b\u8fd1\u4e8e\u96f6\uff08\u7b49\u7535\u70b9\uff0cIEP\uff09\u65f6\uff0c\u9759\u7535\u65a5\u529b\u6d88\u5931\uff0c\u8303\u5fb7\u534e\u5438\u5f15\u529b\u5360\u4e3b\u5bfc\u5730\u4f4d\uff0c\u4ece\u800c\u5bfc\u81f4\u5feb\u901f\u805a\u7ed3\u3002.\n  <\/p>\n\n  <!-- Zeta Potential Visual Bar -->\n  <div class=\"zeta-bar-wrap\">\n    <p style=\"font-family:'Segoe UI',Arial,sans-serif;font-size:14px;font-weight:700;color:#0a2463;margin:0 0 12px;\">CMP \u6ce5\u6d46\u7684 Zeta \u7535\u4f4d\u7a33\u5b9a\u56fe<\/p>\n    <div class=\"zeta-bar-label\">\n      <span>-100\u6beb\u4f0f<\/span><span>-60\u6beb\u4f0f<\/span><span>-25 mV<\/span>\n      <span style=\"font-weight:700;color:#166534;\">\u7a33\u5b9a\u533a<\/span>\n      <span>+25 mV<\/span><span>+60 mV<\/span><span>+100 mV<\/span>\n    <\/div>\n    <div class=\"zeta-bar-track\">\n      <div class=\"zeta-bar-center\"><\/div>\n    <\/div>\n    <div class=\"zeta-zone-label\">\n      <span>\u2b05 \u5f3a\u70c8\u53cd\u5bf9<\/span>\n      <span style=\"color:#166534;font-weight:600;\">\u2713 \u7a33\u5b9a (&gt;\u00b125 mV)<\/span>\n      <span>\u5f3a\u70c8\u80af\u5b9a \u27a1<\/span>\n    <\/div>\n    <div class=\"zeta-legend\">\n      <div class=\"zeta-legend-item\"><div class=\"zl-dot\" style=\"background:#ef4444;\"><\/div> \u4e0d\u7a33\u5b9a\uff08&lt;\u00b110 mV\uff09--\u805a\u96c6\u98ce\u9669<\/div>\n      <div class=\"zeta-legend-item\"><div class=\"zl-dot\" style=\"background:#facc15;\"><\/div> \u8fb9\u7f18\uff08\u00b110-25 mV\uff09--\u5bc6\u5207\u76d1\u6d4b<\/div>\n      <div class=\"zeta-legend-item\"><div class=\"zl-dot\" style=\"background:#86efac;\"><\/div> \u7a33\u5b9a\uff08\u00b125-60 mV\uff09--\u4ea7\u91cf\u53ef\u63a5\u53d7<\/div>\n      <div class=\"zeta-legend-item\"><div class=\"zl-dot\" style=\"background:#166534;\"><\/div> \u9ad8\u5ea6\u7a33\u5b9a\uff08&gt;\u00b160 mV\uff09--\u6700\u4f73\u72b6\u6001<\/div>\n    <\/div>\n  <\/div>\n\n  <p>\n    \u5bf9\u4e8e\u751f\u4ea7\u578b CMP \u6ce5\u6d46\uff0czeta \u7535\u4f4d\u89c4\u683c\u901a\u5e38\u8bbe\u5b9a\u4e3a \u2265 \u00b130 mV\uff0c\u9996\u9009 \u2265 \u00b140 mV\u3002\u7531\u4e8e\u8868\u9762\u7845\u9187\u57fa\u56e2\u7684\u53bb\u8d28\u5b50\u5316\u4f5c\u7528\uff0c\u78b1\u6027 pH \u503c\uff089-11\uff09\u4e0b\u7684\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u6d46\u6599\u7684 zeta \u7535\u4f4d\u901a\u5e38\u4e3a -40 \u81f3 -60 mV\u3002Ceria \u6ce5\u6d46\u5728\u63a5\u8fd1\u4e2d\u6027 pH \u503c\u65f6\u7684\u7a33\u5b9a\u6027\u8868\u73b0\u66f4\u4e3a\u590d\u6742--CeO\u2082 \u7684\u7b49\u7535\u70b9\u63a5\u8fd1 pH \u503c 6-7\uff0c\u8fd9\u610f\u5473\u7740\u5728\u5de5\u4f5c\u70b9\u9644\u8fd1\u7684\u5fae\u5c0f pH \u503c\u504f\u79fb\u90fd\u4f1a\u5bfc\u81f4 zeta \u7535\u4f4d\u5f52\u96f6\u5e76\u5f15\u53d1\u5feb\u901f\u56e2\u805a\u3002\u8fd9\u5c31\u662f\u4e3a\u4ec0\u4e48\u9676\u74f7\u6d46\u6599\u4e2d\u7684 pH \u503c\u63a7\u5236\u5c24\u4e3a\u91cd\u8981\uff0c\u4e5f\u662f\u4e3a\u4ec0\u4e48 STI \u6d46\u6599\u914d\u65b9\u4f7f\u7528\u805a\u5408\u7269\u5206\u6563\u5242\uff08\u7acb\u4f53\u7a33\u5b9a\uff09\u4f5c\u4e3a\u9759\u7535\u6392\u65a5\u4e4b\u5916\u7684\u591a\u4f59\u7a33\u5b9a\u673a\u5236\u3002.\n  <\/p>\n\n  <div class=\"cmp-box amber\">\n    <p class=\"box-title\">\u26a0\ufe0f \u7a00\u91ca\u5bf9\u7a33\u5b9a\u6027\u7684\u5f71\u54cd<\/p>\n    <p style=\"margin:0;\">\u8bb8\u591a CMP \u6d46\u6599\u4ee5\u6d53\u7f29\u6d46\u6599\uff082\u00d7-5\u00d7\uff09\u7684\u5f62\u5f0f\u4f9b\u5e94\uff0c\u5e76\u5728\u4f7f\u7528\u65f6\u7528\u53bb\u79bb\u5b50\u6c34\u7a00\u91ca\u3002\u7a00\u91ca\u4f1a\u6539\u53d8\u6d46\u6599\u7684\u79bb\u5b50\u5f3a\u5ea6\u3001pH \u503c\u548c\u7f13\u51b2\u80fd\u529b\uff0c\u6240\u6709\u8fd9\u4e9b\u90fd\u4f1a\u5f71\u54cd zeta \u7535\u4f4d\u548c\u7a33\u5b9a\u6027\u3002\u8bf7\u52a1\u5fc5\u5728 <em>\u7a00\u91ca\uff0c\u4f7f\u7528\u6d53\u5ea6<\/em> \u56e0\u4e3a\u7a33\u5b9a\u6027\u95ee\u9898\u5f80\u5f80\u5728\u9ad8\u6d53\u5ea6\u65f6\u88ab\u63a9\u76d6\u3002.<\/p>\n  <\/div>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 9: pH CONTROL\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"ph-control\">9. pH \u503c\u63a7\u5236\uff1aCMP \u914d\u65b9\u7684\u4e3b\u8981\u53d8\u91cf<\/h2>\n\n  <p>\n    \u5728 CMP \u6ce5\u6d46\u914d\u65b9\u4e2d\uff0c\u6ca1\u6709\u4efb\u4f55\u4e00\u4e2a\u53c2\u6570\u80fd\u6bd4 pH \u503c\u540c\u65f6\u4ea7\u751f\u66f4\u5e7f\u6cdb\u7684\u5f71\u54cd\u3002pH \u503c\u63a7\u5236\u7740\uff1a\u6c27\u5316\u7269\u548c\u91d1\u5c5e\u6eb6\u89e3\u52a8\u529b\u5b66\uff08\u666e\u96f7\u65af\u987f\u7684\u5316\u5b66\u672f\u8bed\uff09\u3001\u7814\u78e8\u9897\u7c92\u8868\u9762\u7535\u8377\u548c\u80f6\u4f53\u7a33\u5b9a\u6027\u3001\u6c27\u5316\u5242\u6d3b\u6027\u548c\u534a\u8870\u671f\u3001\u7f13\u8680\u5242\u5438\u9644\u6548\u679c\u3001\u87af\u5408\u5242\u79cd\u7c7b\u548c\u91d1\u5c5e\u79bb\u5b50\u7edc\u5408\u6548\u7387\uff0c\u4ee5\u53ca\u8868\u9762\u6d3b\u6027\u5242\u5728\u6676\u7247-\u710a\u76d8\u754c\u9762\u4e0a\u7684\u884c\u4e3a\u3002\u6d46\u6599 pH \u503c\u54ea\u6015\u6539\u53d8 0.5 \u4e2a\u5355\u4f4d\uff0c\u4e5f\u4f1a\u540c\u65f6\u6539\u53d8 20%\u7684 MRR\u30012 \u500d\u7684\u9009\u62e9\u6027\u548c\u80f6\u4f53\u7a33\u5b9a\u6027\uff0c\u4ece\u800c\u4f7f pH \u503c\u6210\u4e3a\u5165\u6599\u6d46\u6599\u8d28\u91cf\u63a7\u5236\u4e2d\u6700\u4e25\u683c\u7684\u63a7\u5236\u53c2\u6570\u3002.\n  <\/p>\n\n  <div class=\"cmp-table-wrap\">\n    <table class=\"cmp-table\">\n      <thead>\n        <tr>\n          <th>pH \u503c\u8c03\u8282<\/th>\n          <th>\u5178\u578b\u5e94\u7528<\/th>\n          <th>\u6eb6\u89e3\u673a\u5236<\/th>\n          <th>\u8003\u8651\u7a33\u5b9a\u6027<\/th>\n        <\/tr>\n      <\/thead>\n      <tbody>\n        <tr>\n          <td><strong>\u5f3a\u9178\u6027\uff08pH \u503c 2-4\uff09<\/strong><\/td>\n          <td>\u94a8 CMP\u3001\u90e8\u5206\u94b4 CMP<\/td>\n          <td>\u5f3a\u6c27\u5316\u5242\u7684\u91d1\u5c5e\u6c27\u5316\u4f5c\u7528\uff1bWO\u2084\u00b2- \u7684\u5f62\u6210<\/td>\n          <td>\u6c27\u5316\u94dd\u7a33\u5b9a\uff1b\u4e8c\u6c27\u5316\u7845\u63a5\u8fd1 IEP - \u4f7f\u7528\u9633\u79bb\u5b50\u5206\u6563\u5242<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u5f31\u9178\u6027\uff08pH \u503c 4-6\uff09<\/strong><\/td>\n          <td>\u94dc\u5757 CMP\uff0c\u90e8\u5206 Co\/Ru CMP<\/td>\n          <td>\u94dc\u6c27\u5316\u6210 Cu\u00b2\u207a\uff1b\u5f62\u6210\u87af\u5408\u7269<\/td>\n          <td>\u4e8c\u6c27\u5316\u7845\u63a5\u8fd1 IEP - \u9700\u8981\u5173\u952e\u7684\u805a\u5408\u7269\u7a33\u5b9a\u5242<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u8fd1\u4e2d\u6027\uff08pH \u503c 6-8\uff09<\/strong><\/td>\n          <td>STI\uff08\u94c8\uff09\uff0c\u5c4f\u969c CMP<\/td>\n          <td>\u94c8\u9f7f\u673a\u5236\uff08STI\uff09\uff1b\u9002\u5ea6\u91d1\u5c5e\u6eb6\u89e3\uff08\u5c4f\u969c\uff09<\/td>\n          <td>IEP \u9644\u8fd1\u7684\u94c8--\u7acb\u4f53\u805a\u5408\u7269\u7a33\u5b9a\u5fc5\u4e0d\u53ef\u5c11<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u5f31\u78b1\u6027\uff08pH \u503c 8-10\uff09<\/strong><\/td>\n          <td>\u5c4f\u969c\u629b\u5149\uff0c\u90e8\u5206\u6c27\u5316\u7269 CMP<\/td>\n          <td>SiO\u2082 \u5f00\u59cb\u6c34\u89e3\uff1b\u9700\u8981\u91d1\u5c5e\u6291\u5236\u5242<\/td>\n          <td>\u4e8c\u6c27\u5316\u7845\u8fdc\u9ad8\u4e8e IEP - \u9759\u7535\u7a33\u5b9a\u6027\u6781\u4f73<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u5f3a\u78b1\u6027\uff08pH \u503c 10-12\uff09<\/strong><\/td>\n          <td>\u6c27\u5316\u7269 ILD\u3001\u591a\u6676\u7845 CMP<\/td>\n          <td>Si-O-Si \u5feb\u901f\u6c34\u89e3\uff1bKOH\/NH\u2084OH \u6eb6\u89e3<\/td>\n          <td>\u4e8c\u6c27\u5316\u7845\u9ad8\u5ea6\u7a33\u5b9a\uff08\u03b6 \u2248 -50 \u81f3 -60 mV\uff09<\/td>\n        <\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 10: DIW\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"diw\">10.\u53bb\u79bb\u5b50\u6c34\uff1a\u65e0\u5f62\u7684\u8f7d\u4f53<\/h2>\n\n  <p>\n    \u8d85\u7eaf\u53bb\u79bb\u5b50\u6c34\u5360\u6d46\u6599\u603b\u4f53\u79ef\u7684 75-98%\uff0c\u662f\u8fc4\u4eca\u4e3a\u6b62\u8d28\u91cf\u6700\u5927\u7684\u6210\u5206\uff0c\u4f46\u5728\u914d\u65b9\u8ba8\u8bba\u4e2d\u5374\u7ecf\u5e38\u88ab\u5ffd\u89c6\u3002\u53bb\u79bb\u5b50\u6c34\u8f7d\u4f53\u7684\u8d28\u91cf\u4ece\u4e09\u4e2a\u65b9\u9762\u76f4\u63a5\u5f71\u54cd\u6d46\u6599\u6027\u80fd\uff1a\n  <\/p>\n  <ul>\n    <li><strong>\u79bb\u5b50\u5f3a\u5ea6\u63a7\u5236<\/strong> \u52a3\u8d28\u6c34\u4e2d\u7684\u6eb6\u89e3\u79bb\u5b50\u4f1a\u589e\u52a0\u6d46\u6599\u7684\u79bb\u5b50\u5f3a\u5ea6\uff0c\u538b\u7f29\u78e8\u6599\u9897\u7c92\u5468\u56f4\u7684\u7535\u53cc\u5c42\uff0c\u964d\u4f4e zeta \u7535\u4f4d\u3002\u5373\u4f7f\u662f\u51e0 ppm \u7684 Na\u207a\u3001K\u207a \u6216 Ca\u00b2\u207a \u79bb\u5b50\uff0c\u4e5f\u4f1a\u7834\u574f\u4ee5\u8fb9\u7f18 zeta \u7535\u4f4d\u914d\u5236\u7684\u94c8\u6216\u9178\u6027\u4e8c\u6c27\u5316\u7845\u6d46\u6599\u7684\u7a33\u5b9a\u6027\u3002SEMI \u7ea7 DIW\uff08\u7535\u963b\u7387\u5927\u4e8e 17.5 M\u03a9-cm\uff09\u53ef\u786e\u4fdd\u6d46\u6599\u79bb\u5b50\u5f3a\u5ea6\u4e2d\u7684\u6e38\u79bb\u79bb\u5b50\u542b\u91cf\u4e3a\u96f6\u3002.<\/li>\n    <li><strong>\u6709\u673a\u6c61\u67d3\uff1a<\/strong> DIW \u8f7d\u4f53\u4e2d\u7684\u603b\u6709\u673a\u78b3 (TOC) \u5fc5\u987b\u63a7\u5236\u5728 5 ppb \u4ee5\u4e0b\uff0c\u4ee5\u9632\u6b62\u6709\u673a\u6742\u8d28\u5e72\u6270\u8868\u9762\u53cd\u5e94\u3001\u901a\u8fc7\u7ade\u4e89\u53cd\u5e94\u6d88\u8017\u6c27\u5316\u5242\u6216\u5728\u6676\u7247\u8868\u9762\u5f62\u6210 CMP \u540e\u6709\u673a\u6b8b\u7559\u7269\u3002\u5728\u4f7f\u7528\u56de\u7528\u51b2\u6d17\u6c34\u7684\u751f\u4ea7\u73af\u5883\u4e2d\uff0cTOC \u8d85\u8fc7 20 ppb \u662f\u9020\u6210\u6d46\u6599\u6279\u6b21\u95f4\u5dee\u5f02\u7684\u5e38\u89c1\u539f\u56e0\u3002.<\/li>\n    <li><strong>\u6eb6\u89e3\u6c27\u548c CO\u2082\uff1a<\/strong> \u6eb6\u89e3\u6c27\u4f1a\u5bfc\u81f4\u91d1\u5c5e\u8868\u9762\u7684\u80cc\u666f\u6c27\u5316\uff0c\u4e0e\u914d\u5236\u7684\u6c27\u5316\u5242\u65e0\u5173\uff1b\u6eb6\u89e3\u7684 CO\u2082 \u4f1a\u5f62\u6210\u78b3\u9178 (H\u2082CO\u2083)\uff0c\u5e76\u964d\u4f4e\u6d46\u6599\u7684 pH \u503c\uff0c\u5c24\u5176\u662f\u5728\u78b1\u6027\u6c27\u5316\u7269\u6d46\u6599\u914d\u65b9\u4e2d\uff0c\u5373\u4f7f pH \u503c\u4e0b\u964d\u5f88\u5c0f\uff0c\u4e5f\u4f1a\u4f7f MRR \u964d\u4f4e 10-15%\u3002.<\/li>\n  <\/ul>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 11: FORMULATION TRADEOFFS\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"formulation-tradeoffs\">11.\u914d\u65b9\u6743\u8861\uff1a\u4e3a\u4ec0\u4e48\u6bcf\u4e00\u6b21\u6539\u53d8\u90fd\u4f1a\u4ea7\u751f\u540e\u679c<\/h2>\n\n  <p>\n    \u4ece\u6839\u672c\u4e0a\u8bb2\uff0cCMP \u6ce5\u6d46\u914d\u65b9\u662f\u4e00\u4e2a\u591a\u53d8\u91cf\u4f18\u5316\u95ee\u9898\uff0c\u5176\u76ee\u6807\u5177\u6709\u5f88\u5f3a\u7684\u8026\u5408\u6027\u3002\u4e86\u89e3\u4e3b\u8981\u7684\u6743\u8861\u8f74\u6709\u52a9\u4e8e\u5de5\u827a\u5de5\u7a0b\u5e08\u9884\u6d4b\u4efb\u4f55\u914d\u65b9\u53d8\u5316\u7684\u4e8c\u9636\u6548\u5e94\uff0c\u5e76\u5728\u9274\u5b9a\u6216\u6545\u969c\u6392\u9664\u8fc7\u7a0b\u4e2d\u4e0e\u6d46\u6599\u4f9b\u5e94\u5546\u8fdb\u884c\u66f4\u6709\u6548\u7684\u6c9f\u901a\u3002.\n  <\/p>\n\n  <div class=\"cmp-table-wrap\">\n    <table class=\"cmp-table\">\n      <thead>\n        <tr>\n          <th>\u5982\u679c\u60a8\u589e\u52a0...<\/th>\n          <th>MRR<\/th>\n          <th>\u9009\u62e9\u6027<\/th>\n          <th>\u7f3a\u9677<\/th>\n          <th>\u7a33\u5b9a\u6027<\/th>\n        <\/tr>\n      <\/thead>\n      <tbody>\n        <tr>\n          <td>\u78e8\u6599\u6d53\u5ea6 \u2191<\/td>\n          <td>\u2191 \u589e\u52a0<\/td>\n          <td>\u2192 \u4e2d\u6027\/\u8f7b\u5fae \u2193<\/td>\n          <td>\u2191 \u589e\u52a0\uff08\u5212\u75d5\uff09<\/td>\n          <td>\u2193 \u53ef\u80fd\u51cf\u5c11<\/td>\n        <\/tr>\n        <tr>\n          <td>\u78e8\u6599\u7c92\u5ea6 (D50) \u2191<\/td>\n          <td>\u2191 \u589e\u52a0<\/td>\n          <td>\u2192 \u4e2d\u6027<\/td>\n          <td>\u2191\u2191 \u663e\u8457\u589e\u52a0<\/td>\n          <td>\u2193 \u6c89\u964d\u901f\u5ea6\u66f4\u5feb<\/td>\n        <\/tr>\n        <tr>\n          <td>\u6c27\u5316\u5242\u6d53\u5ea6 \u2191 \uff08\u91d1\u5c5e\uff09<\/td>\n          <td>\u2191 \u589e\u52a0\uff08\u81f3\u9ad8\u539f\uff09<\/td>\n          <td>\u2191 \u53ef\u80fd\u6539\u5584<\/td>\n          <td>\u2191 \u70b9\u8680\/\u8150\u8680\u98ce\u9669<\/td>\n          <td>\u2193 H\u2082O\u2082 \u5206\u89e3 \u2191<\/td>\n        <\/tr>\n        <tr>\n          <td>\u6291\u5236\u5242\uff08BTA\uff09\u6d53\u5ea6 \u2191<\/td>\n          <td>\u2193 \u51cf\u5c11<\/td>\n          <td>\u2193 \u4e0e\u505c\u673a\u76f8\u6bd4\uff0c\u51cf\u5c11\u94dc\u7684\u53bb\u9664\u91cf<\/td>\n          <td>\u2193 \u51cf\u5c11\u88c5\u76d8<\/td>\n          <td>\u2192 \u4e2d\u6027<\/td>\n        <\/tr>\n        <tr>\n          <td>\u9634\u79bb\u5b50\u5206\u6563\u5242\uff08PAA\uff09 \u2191 \uff08\u94c8\uff09<\/td>\n          <td>\u2193 \u7565\u6709\u4e0b\u964d<\/td>\n          <td>\u2191\u2191 \u5927\u5e45\u589e\u52a0 (STI)<\/td>\n          <td>\u2193 \u51cf\u5c11\u94c8\u5212\u75d5<\/td>\n          <td>\u2191 \u6539\u5584\uff08\u7acb\u4f53\uff09<\/td>\n        <\/tr>\n        <tr>\n          <td>pH \u2191\uff08\u78b1\u6027\u65b9\u5411\uff09<\/td>\n          <td>\u2191 \u6c27\u5316\u7269\/\u591a\u805a\u7269\uff1b \u2193 \u91d1\u5c5e<\/td>\n          <td>\u53d6\u51b3\u4e8e\u8bed\u5883<\/td>\n          <td>\u2193 \uff08\u51cf\u5c11\u91d1\u5c5e\u8150\u8680\uff09<\/td>\n          <td>\u2191 \u63d0\u9ad8\u767d\u70ad\u9ed1\u7684\u7a33\u5b9a\u6027<\/td>\n        <\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n\n  <p>\n    \u8fd9\u79cd\u76f8\u4e92\u4f9d\u5b58\u7684\u5173\u7cfb\u5c31\u662f\u4e3a\u4ec0\u4e48 CMP \u6d46\u6599\u7684\u9274\u5b9a\u662f\u4e00\u4e2a\u8017\u65f6\u7684\u3001\u7ecf\u9a8c\u6027\u7684\u8fc7\u7a0b\uff0c\u5373\u4f7f\u5bf9\u5316\u5b66\u6210\u5206\u975e\u5e38\u4e86\u89e3\uff1a\u4e00\u4e2a\u5de5\u5382\u7684\u7279\u5b9a\u5de5\u5177\u3001\u886c\u57ab\u548c\u96c6\u6210\u65b9\u6848\u7684\u6700\u4f73\u914d\u65b9\u70b9\u53ef\u80fd\u4e0e\u53e6\u4e00\u4e2a\u5de5\u5382\u7684\u4e0d\u540c\uff0c\u5c3d\u7ba1\u76ee\u6807\u8584\u819c\u548c\u6807\u79f0\u5de5\u827a\u6761\u4ef6\u76f8\u540c\u3002\u8fd9\u4e5f\u89e3\u91ca\u4e86\u4e3a\u4ec0\u4e48\u6d46\u6599\u91cd\u65b0\u914d\u5236\uff08\u5373\u4f7f\u8868\u9762\u4e0a\u6210\u5206\u53d8\u5316\u4e0d\u5927\uff09\u9700\u8981\u5728\u5ba2\u6237\u5de5\u5382\u8fdb\u884c\u5168\u9762\u91cd\u65b0\u9a8c\u8bc1\u540e\u624d\u80fd\u4f7f\u7528\u3002\u6709\u5173\u94b4\u548c\u948c\u7b49\u65b0\u6750\u6599\u5e26\u6765\u7684\u5148\u8fdb\u8282\u70b9\u6311\u6218\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u4ee5\u4e0b\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-for-advanced-nodes-5nm-3nm-2nm-beyond-technical-challenges-innovations\/\">\u7528\u4e8e\u9ad8\u7ea7\u8282\u70b9\u7684 CMP \u6ce5\u6d46<\/a>.\n  <\/p>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 12: QC SPECS\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"qc-specs\">12.\u4e0e\u6210\u5206\u76f8\u5173\u7684\u8d28\u91cf\u63a7\u5236\u89c4\u8303<\/h2>\n\n  <p>\n    \u6bcf\u6279 CMP \u6ce5\u6d46\u5728\u6295\u5165\u751f\u4ea7\u524d\u90fd\u5e94\u6839\u636e\u4e00\u7ec4\u4e0e\u6210\u5206\u76f8\u5173\u7684 QC \u53c2\u6570\u8fdb\u884c\u9a8c\u8bc1\u3002\u4e0b\u8868\u603b\u7ed3\u4e86\u4e0e\u6ce5\u6d46\u6210\u5206\u5c5e\u6027\u76f8\u5173\u7684\u6807\u51c6\u8fdb\u6599\u8d28\u91cf\u63a7\u5236\u89c4\u8303\u5957\u4ef6\uff1a\n  <\/p>\n\n  <div class=\"cmp-table-wrap\">\n    <table class=\"cmp-table\">\n      <thead>\n        <tr>\n          <th>\u8d28\u91cf\u63a7\u5236\u53c2\u6570<\/th>\n          <th>\u5173\u8054\u5408\u6210\u5c5e\u6027<\/th>\n          <th>\u6d4b\u91cf\u65b9\u6cd5<\/th>\n          <th>\u5178\u578b\u63a5\u53d7\u89c4\u683c<\/th>\n        <\/tr>\n      <\/thead>\n      <tbody>\n        <tr>\n          <td>pH \u503c<\/td>\n          <td>\u7f13\u51b2\u7cfb\u7edf\u3001\u6c27\u5316\u5242\u9178\u78b1\u5e73\u8861<\/td>\n          <td>\u6821\u51c6\u8fc7\u7684 pH \u8ba1\uff08NIST \u53ef\u8ffd\u6eaf\uff09<\/td>\n          <td>\u76ee\u6807 \u00b1 0.15 pH \u5355\u4f4d<\/td>\n        <\/tr>\n        <tr>\n          <td>D50 \u7c92\u5f84<\/td>\n          <td>\u78e8\u6599\u5408\u6210\u6d53\u5ea6<\/td>\n          <td>DLS\uff08\u52a8\u6001\u5149\u6563\u5c04\uff09<\/td>\n          <td>\u76ee\u6807 \u00b1 10 \u7eb3\u7c73<\/td>\n        <\/tr>\n        <tr>\n          <td>D99 \u7c92\u5f84<\/td>\n          <td>\u7ed3\u5757\u5c3e\u90e8\/\u5927\u9897\u7c92\u6570\u91cf<\/td>\n          <td>DLS \u6216 MALS\uff08\u591a\u89d2\u5ea6\u5149\u6563\u5c04\uff09<\/td>\n          <td>&lt; 200 nm\uff08\u4e8c\u6c27\u5316\u7845\uff09\uff1b&lt; 400 nm\uff08\u94c8\uff09<\/td>\n        <\/tr>\n        <tr>\n          <td>\u5927\u9897\u7c92\u8ba1\u6570\uff08LPC\uff09<\/td>\n          <td>\u56e2\u805a\u4f53\u6570\u91cf\uff08&gt;0.5 \u5fae\u7c73\uff09<\/td>\n          <td>\u5355\u7c92\u5b50\u5149\u5b66\u4f20\u611f\uff08SPOS\uff09<\/td>\n          <td>0.5 \u5fae\u7c73\uff09<\/td>\n        <\/tr>\n        <tr>\n          <td>Zeta \u7535\u4f4d<\/td>\n          <td>\u8868\u9762\u7535\u8377\/\u80f6\u4f53\u7a33\u5b9a\u72b6\u6001<\/td>\n          <td>\u7535\u6cf3\u5149\u6563\u5c04\uff08ELS\uff09<\/td>\n          <td>&gt; \u00b130 mV\uff08\u53d6\u51b3\u4e8e\u89c4\u683c\uff09<\/td>\n        <\/tr>\n        <tr>\n          <td>\u6c27\u5316\u5242\u6d53\u5ea6<\/td>\n          <td>H\u2082O\u2082 \u6216\u5176\u4ed6\u6c27\u5316\u5242\u68c0\u6d4b<\/td>\n          <td>\u7898\u91cf\u6ef4\u5b9a\u6cd5\u6216\u7d2b\u5916\u53ef\u89c1\u5206\u5149\u5149\u5ea6\u6cd5<\/td>\n          <td>\u76ee\u6807 \u00b1 5% \u76f8\u5bf9\u503c<\/td>\n        <\/tr>\n        <tr>\n          <td>\u75d5\u91cf\u91d1\u5c5e\u79bb\u5b50\uff08ICP-MS\uff09<\/td>\n          <td>\u539f\u6750\u6599\/\u52a0\u5de5\u8bbe\u5907\u4e2d\u7684\u6742\u8d28<\/td>\n          <td>ICP-MS \uff08\u94c1\u3001\u94a0\u3001\u94be\u3001\u9499\u3001\u94dd\u3001\u94dc\uff09<\/td>\n          <td>\u6bcf\u79cd\u5143\u7d20 &lt; 5 ppb\uff08BEOL \u4e34\u754c\u503c\uff09<\/td>\n        <\/tr>\n        <tr>\n          <td>\u6c27\u5316\u7269 MRR\uff08\u53c2\u8003\u6676\u5706\uff09<\/td>\n          <td>\u7efc\u5408\u5316\u5b66\u6d3b\u6027\u68c0\u67e5<\/td>\n          <td>\u629b\u5149\u70ed\u6c27\u5316\u7269\u6bef\u6676\u7247<\/td>\n          <td>\u76ee\u6807 \u00b1 10% \u6807\u79f0 MRR<\/td>\n        <\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n\n  <p>\n    \u8fd9\u4e9b\u89c4\u683c\u5171\u540c\u4e3a\u6bcf\u4e2a\u8fdb\u8d27\u6279\u6b21\u63d0\u4f9b\u591a\u7ef4\u8d28\u91cf\u6307\u7eb9\u3002\u636e\u7edf\u8ba1\uff0c\u901a\u8fc7\u6240\u6709\u4e2a\u522b\u89c4\u683c\u7684\u6279\u6b21\u6bd4\u4ec5\u901a\u8fc7\u90e8\u5206\u68c0\u67e5\u7684\u6279\u6b21\u66f4\u6709\u53ef\u80fd\u4ea7\u751f\u7b26\u5408\u89c4\u683c\u7684\u6676\u5706\u7ea7 CMP \u7ed3\u679c\u3002\u5c06\u8fdb\u8d27\u6279\u6b21\u8d28\u91cf\u63a7\u5236\u6570\u636e\u4e0e\u751f\u4ea7\u6676\u5706\u7f3a\u9677\u68c0\u6d4b\u6570\u636e\u8054\u7cfb\u8d77\u6765\uff0c\u662f\u5efa\u7acb\u5065\u5168\u7684 CMP SPC\uff08\u7edf\u8ba1\u8fc7\u7a0b\u63a7\u5236\uff09\u8ba1\u5212\u7684\u57fa\u7840\uff0c\u8fd9\u4e5f\u662f\u6211\u4eec\u7684\u4e13\u95e8\u6307\u5357\u7684\u4e3b\u9898\u3002 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-defects-root-cause-analysis-quality-control-complete-engineering-guide\/\">CMP \u6ce5\u6d46\u7f3a\u9677\u5206\u6790\u4e0e\u8d28\u91cf\u63a7\u5236<\/a>.\n  <\/p>\n\n  <!-- \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\n       SECTION 13: FAQ\n  \u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500\u2500 -->\n  <h2 id=\"faq\">13.\u5e38\u89c1\u95ee\u9898<\/h2>\n\n  <div class=\"cmp-faq\" itemscope itemtype=\"https:\/\/schema.org\/FAQPage\">\n\n    <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n      <p class=\"faq-question\" itemprop=\"name\">CMP \u6ce5\u6d46\u4e2d\u7684\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u548c\u6c14\u76f8\u4e8c\u6c27\u5316\u7845\u6709\u4ec0\u4e48\u533a\u522b\uff1f<\/p>\n      <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n        <div itemprop=\"text\">\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u662f\u901a\u8fc7\u6e7f\u6cd5\u6eb6\u80f6-\u51dd\u80f6\u5408\u6210\u6cd5\u751f\u4ea7\u7684\uff0c\u5176\u9897\u7c92\u81f4\u5bc6\uff0c\u63a5\u8fd1\u5b8c\u7f8e\u7403\u5f62\uff0c\u5c3a\u5bf8\u5206\u5e03\u7a84\uff0c\u8868\u9762\u5149\u6ed1\uff0c\u662f\u4f4e\u7f3a\u9677 CMP \u5e94\u7528\uff08\u6c27\u5316\u7269 ILD\u3001\u94dc\u3001\u963b\u6321\u5c42\uff09\u7684\u7406\u60f3\u9009\u62e9\u3002\u6c14\u76f8\u6cd5\u4e8c\u6c27\u5316\u7845\u662f\u901a\u8fc7\u6c14\u76f8\u706b\u7130\u6c34\u89e3 SiCl\u2084\u800c\u5236\u5f97\u7684\uff0c\u53ef\u751f\u6210\u5177\u6709\u4e0d\u89c4\u5219\u5f62\u6001\u548c\u66f4\u5927\u8868\u9762\u79ef\u7684\u9ad8\u5b54\u9699\u94fe\u805a\u9897\u7c92\u3002\u7531\u4e8e\u6c14\u76f8\u6cd5\u4e8c\u6c27\u5316\u7845\u5177\u6709\u8f83\u9ad8\u7684\u5212\u75d5\u98ce\u9669\u548c\u7ed3\u5757\u503e\u5411\uff0c\u56e0\u6b64\u5728\u534a\u5bfc\u4f53 CMP \u4e2d\u4f7f\u7528\u8f83\u5c11\uff0c\u4f46\u5728\u73bb\u7483\u548c\u5149\u5b66\u629b\u5149\u4e2d\u5374\u6709\u5e94\u7528\uff0c\u56e0\u4e3a\u5176\u9ad8\u8868\u9762\u79ef\u53ef\u63d0\u9ad8\u5316\u5b66\u53cd\u5e94\u6d3b\u6027\u3002.<\/div>\n      <\/div>\n    <\/div>\n\n    <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n      <p class=\"faq-question\" itemprop=\"name\">\u4e3a\u4ec0\u4e48\u94c8 CMP \u6ce5\u6d46\u5728\u6676\u7247\u4e0a\u7559\u4e0b\u7684\u6b8b\u7559\u7269\u6bd4\u4e8c\u6c27\u5316\u7845\u6b8b\u7559\u7269\u66f4\u96be\u6e05\u7406\uff1f<\/p>\n      <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n        <div itemprop=\"text\">\u94c8\u6b8b\u7559\u7269\u7684\u9644\u7740\u662f\u7531\u5bfc\u81f4\u5176\u9ad8\u9009\u62e9\u6027\u7684 Ce-O-Si \u5316\u5b66\u952e\u673a\u5236\u9a71\u52a8\u7684\u3002\u5728\u629b\u5149\u8fc7\u7a0b\u4e2d\u4e0e\u6676\u7247\u6c27\u5316\u7269\u8868\u9762\u5f62\u6210 Ce-O-Si \u952e\u7684\u94c8\u9897\u7c92\u4e0d\u4f1a\u7b80\u5355\u5730\u88ab\u6c34\u51b2\u6d17\u6389\uff0c\u800c\u662f\u4e0e\u8868\u9762\u53d1\u751f\u5316\u5b66\u952e\u5408\u3002\u94c8\u6d46\u6599\u7684 CMP \u540e\u6e05\u6d17\u901a\u5e38\u9700\u8981\u7a00 HF\uff08\u4ee5\u6eb6\u89e3\u56fa\u5b9a\u94c8\u7684 SiO\u2082 \u8868\u5c42\uff09\u6216\u7279\u5b9a\u7684\u94c8\u87af\u5408\u5316\u5b66\u7269\u8d28\u3002\u94c8\u6b8b\u7559\u7269\u7684\u9644\u7740\u529b\u660e\u663e\u9ad8\u4e8e\u4e8c\u6c27\u5316\u7845\u9897\u7c92\uff0c\u540e\u8005\u4e3b\u8981\u901a\u8fc7\u8303\u5fb7\u534e\u529b\u548c\u9759\u7535\u529b\u9644\u7740\uff0c\u78b1\u6027\u5237\u6d17\u548c\u8d85\u58f0\u6ce2\u6e05\u6d17\u53ef\u5c06\u5176\u53bb\u9664\u3002.<\/div>\n      <\/div>\n    <\/div>\n\n    <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n      <p class=\"faq-question\" itemprop=\"name\">CMP \u6ce5\u6d46\u5728\u8fc7\u9ad8\u6e29\u5ea6\u4e0b\u50a8\u5b58\u4f1a\u53d1\u751f\u4ec0\u4e48\u60c5\u51b5\uff1f<\/p>\n      <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n        <div itemprop=\"text\">\u50a8\u5b58\u6e29\u5ea6\u5347\u9ad8\u4f1a\u52a0\u901f\u51e0\u79cd\u964d\u89e3\u673a\u5236\uff1a(1) \u91d1\u5c5e CMP \u6ce5\u6d46\u4e2d\u7684\u6c22\u2082O\u2082\u5206\u89e3\u901f\u5ea6\u52a0\u5feb--\u5728 35\u00b0C \u4e0b\u50a8\u5b58\u7684\u6ce5\u6d46\u53ef\u80fd\u4f1a\u5728\u6570\u5468\u5185\u635f\u5931 30-40% \u7684\u6c27\u5316\u5242\u6d53\u5ea6\uff1b(2) \u7845\u78e8\u6599\u9897\u7c92\u4f1a\u53d1\u751f\u5965\u65af\u7279\u74e6\u5c14\u5fb7\u719f\u5316--\u5c0f\u9897\u7c92\u6eb6\u89e3\uff0c\u5927\u9897\u7c92\u957f\u5927\uff0c\u4ece\u800c\u4f7f D50 \u4e0a\u79fb\uff0cPSD \u6269\u5927\uff1b(3) \u805a\u5408\u7269\u5206\u6563\u5242\u4f1a\u53d1\u751f\u70ed\u964d\u89e3\uff0c\u4ece\u800c\u964d\u4f4e\u5176\u6548\u679c\u5e76\u7834\u574f\u5206\u6563\u4f53\u7684\u7a33\u5b9a\u6027\uff1b (4) \u5982\u679c\u6740\u83cc\u5242\u7684\u4fdd\u62a4\u4f5c\u7528\u5fae\u4e4e\u5176\u5fae\uff0c\u5fae\u751f\u7269\u7684\u751f\u957f\u7387\u5728 25\u00b0C \u4ee5\u4e0a\u4f1a\u5448\u6307\u6570\u589e\u957f\u300230\u00b0C \u4ee5\u4e0a\u7684\u50a8\u5b58\u6e29\u5ea6\u4f1a\u4f7f\u6d46\u6599\u7684\u4fdd\u8d28\u671f\u5931\u6548\uff0c\u56e0\u6b64\u5728\u6ca1\u6709\u4f9b\u5e94\u5546\u660e\u786e\u6307\u5bfc\u7684\u60c5\u51b5\u4e0b\uff0c\u7edd\u4e0d\u5141\u8bb8\u8fdb\u884c\u50a8\u5b58\u3002.<\/div>\n      <\/div>\n    <\/div>\n\n    <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n      <p class=\"faq-question\" itemprop=\"name\">\u5982\u4f55\u6d4b\u91cf CMP \u6ce5\u6d46\u8fdb\u5165\u8d28\u91cf\u63a7\u5236\u4e2d\u5fc3\u65f6\u7684 zeta \u7535\u4f4d\uff1f<\/p>\n      <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n        <div itemprop=\"text\">\u7528\u4e8e CMP \u6ce5\u6d46\u8d28\u91cf\u63a7\u5236\u7684 Zeta \u7535\u4f4d\u901a\u5e38\u901a\u8fc7\u7535\u6cf3\u5149\u6563\u5c04 (ELS) \u8fdb\u884c\u6d4b\u91cf\uff0cELS \u4e5f\u79f0\u4e3a\u6fc0\u5149\u591a\u666e\u52d2\u7535\u6cf3 - \u4e0e DLS \u7528\u4e8e\u7c92\u5ea6\u6d4b\u91cf\u7684\u5206\u6790\u5e73\u53f0\uff08\u5982 Malvern Zetasizer\u3001Brookhaven ZetaPALS\uff09\u76f8\u540c\u3002\u7a00\u91ca\u7684\u6d46\u72b6\u6837\u54c1\uff08\u901a\u5e38\u4e3a 0.01-0.1 wt% \u56fa\u4f53\uff09\u88ab\u653e\u7f6e\u5728\u5e26\u7535\u6781\u7684\u6d4b\u91cf\u6c60\u4e2d\uff1b\u4ea4\u53d8\u7535\u573a\u9a71\u52a8\u9897\u7c92\u7535\u6cf3\u8fd0\u52a8\uff0c\u6563\u5c04\u6fc0\u5149\u7684\u591a\u666e\u52d2\u504f\u79fb\u7528\u4e8e\u8ba1\u7b97\u7535\u6cf3\u8fc1\u79fb\u7387\uff0c\u5e76\u901a\u8fc7\u4ea8\u5229\u65b9\u7a0b\u5c06\u5176\u8f6c\u6362\u4e3a zeta \u7535\u4f4d\u3002\u5728\u5b9e\u9645\u4f7f\u7528\u6d53\u5ea6\u7684 pH \u503c\u4e0b\u8fdb\u884c\u6d4b\u91cf\u81f3\u5173\u91cd\u8981--\u4e00\u5b9a\u8981\u5728\u4e0e\u751f\u4ea7\u4f7f\u7528\u70b9\u6761\u4ef6\u76f8\u540c\u7684\u7a00\u91ca\u4ecb\u8d28\u4e2d\u5236\u5907\u6d4b\u91cf\u6837\u54c1\u3002.<\/div>\n      <\/div>\n    <\/div>\n\n    <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n      <p class=\"faq-question\" itemprop=\"name\">CMP \u6ce5\u6d46\u6dfb\u52a0\u5242\u4f1a\u6c61\u67d3\u6676\u7247\u5e76\u5f71\u54cd\u8bbe\u5907\u6027\u80fd\u5417\uff1f<\/p>\n      <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n        <div itemprop=\"text\">\u662f - CMP \u6ce5\u6d46\u6c61\u67d3\u662f\u516c\u8ba4\u7684\u5668\u4ef6\u53ef\u9760\u6027\u98ce\u9669\uff0c\u5c24\u5176\u662f\u5bf9\u6805\u6781\u6c27\u5316\u7269\u5b8c\u6574\u6027\u548c\u91d1\u5c5e\u4e92\u8fde\u53ef\u9760\u6027\u800c\u8a00\u3002\u4e3b\u8981\u7684\u6c61\u67d3\u9014\u5f84\u6709(1) \u6765\u81ea\u4e0d\u7eaf\u539f\u6750\u6599\u6216\u5236\u7a0b\u8bbe\u5907\u7684\u75d5\u91cf\u91d1\u5c5e\u79bb\u5b50\u6c61\u67d3\uff08\u94c1\u3001\u94dc\u3001\u954d\u3001\u94be\uff09\uff0c\u5b83\u4eec\u4f1a\u6269\u6563\u5230\u6805\u6781\u6c27\u5316\u7269\u4e2d\u5e76\u4ea7\u751f\u7535\u8377\u9677\u9631\uff1b(2) \u7535\u4ecb\u8d28\u8868\u9762\u7684\u6709\u673a\u6dfb\u52a0\u5242\u6b8b\u7559\u7269\uff08BTA\u3001\u87af\u5408\u5242\u3001\u8868\u9762\u6d3b\u6027\u5242\uff09\uff0c\u5982\u679c\u4e0d\u901a\u8fc7 CMP \u540e\u6e05\u6d17\u53bb\u9664\uff0c\u4f1a\u4ea7\u751f\u754c\u9762\u5076\u6781\u5b50\uff0c\u4ece\u800c\u6539\u53d8\u6676\u4f53\u7ba1\u9608\u503c\u7535\u538b\uff1b(3) \u629b\u5149\u8fc7\u7a0b\u4e2d\u5d4c\u5165\u4f4e K \u7535\u4ecb\u8d28\u7684\u7814\u78e8\u9897\u7c92\u6b8b\u7559\u7269\uff0c\u4f1a\u4ea7\u751f\u6f0f\u7535\u8def\u5f84\u3002\u4e25\u683c\u7684\u8fdb\u6599 ICP-MS \u91d1\u5c5e\u5206\u6790\uff08\u5bf9\u4e8e BEOL \u4e34\u754c\u6d46\u6599\uff0c\u6bcf\u79cd\u5143\u7d20\u7684\u76ee\u6807\u503c\u5c0f\u4e8e 5 ppb\uff09\u548c\u6709\u6548\u7684 CMP \u540e\u6e05\u6d17\u534f\u8bae\u662f\u4e3b\u8981\u7684\u7f13\u89e3\u63aa\u65bd\u3002.<\/div>\n      <\/div>\n    <\/div>\n\n  <\/div>\n\n  <!-- Conclusion -->\n  <h2>\u7ed3\u8bba<\/h2>\n  <p>\n    CMP \u6ce5\u6d46\u6210\u5206\u4e0d\u662f\u4e00\u4e2a\u7b80\u5355\u7684\u914d\u65b9--\u5b83\u662f\u4e00\u4e2a\u7cbe\u786e\u8bbe\u8ba1\u7684\u7cfb\u7edf\uff0c\u5176\u4e2d\u7684\u6bcf\u4e2a\u6210\u5206\u90fd\u4f1a\u76f8\u4e92\u5f71\u54cd\uff0c\u800c\u4e14\u6700\u4f73\u914d\u65b9\u70b9\u4f1a\u968f\u7740\u76ee\u6807\u8584\u819c\u3001\u5de5\u827a\u8282\u70b9\u6216\u5de5\u5177\u914d\u7f6e\u7684\u6bcf\u6b21\u53d8\u5316\u800c\u53d8\u5316\u3002\u78e8\u6599\u7c7b\u578b\u51b3\u5b9a\u4e86\u57fa\u672c\u7684\u53bb\u9664\u673a\u5236\u548c\u9009\u62e9\u6027\u884c\u4e3a\uff1b\u5316\u5b66\u6dfb\u52a0\u5242\u7ec4\u5408\u51b3\u5b9a\u4e86\u52a8\u529b\u5b66\u3001\u6291\u5236\u4f5c\u7528\u548c\u5206\u6563\u7a33\u5b9a\u6027\uff1b\u53bb\u79bb\u5b50\u6c34\u8f7d\u4f53\u7684\u8d28\u91cf\u51b3\u5b9a\u4e86\u80f6\u4f53\u6027\u80fd\uff1bpH \u503c\u5219\u540c\u65f6\u534f\u8c03\u6240\u6709\u8fd9\u4e9b\u56e0\u7d20\u3002.\n  <\/p>\n  <p>\n    \u5bf9\u4e8e\u5de5\u827a\u5de5\u7a0b\u5e08\u6765\u8bf4\uff0c\u4e86\u89e3\u7ec4\u6210\u539f\u7406\u53ef\u4ee5\u5728 CMP \u6027\u80fd\u51fa\u73b0\u504f\u5dee\u65f6\u66f4\u5feb\u5730\u8bca\u65ad\u51fa\u6839\u672c\u539f\u56e0\u3002\u5bf9\u4e8e\u91c7\u8d2d\u56e2\u961f\u6765\u8bf4\uff0c\u5b83\u63d0\u4f9b\u4e86\u7cbe\u786e\u6307\u5b9a\u6d46\u6599\u8981\u6c42\u548c\u81ea\u4fe1\u8bc4\u4f30\u4f9b\u5e94\u5546\u8d28\u91cf\u58f0\u660e\u7684\u8bcd\u6c47\u3002\u8981\u4e86\u89e3\u8fd9\u4e9b\u7ec4\u6210\u539f\u7406\u5982\u4f55\u8f6c\u5316\u4e3a\u9002\u7528\u4e8e\u5404\u7c7b CMP \u5e94\u7528\u7684\u7279\u5b9a\u914d\u65b9\uff0c\u8bf7\u6d4f\u89c8\u6211\u4eec\u7684\u6307\u5357\uff0c\u5185\u5bb9\u5982\u4e0b <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-types-explained-oxide-sti-copper-tungsten-beyond\/\">CMP \u6ce5\u6d46\u7c7b\u578b\uff1a\u6c27\u5316\u7269\u3001STI\u3001\u94dc\u3001\u94a8\u53ca\u5176\u4ed6<\/a>. .\u6709\u5173\u65b0\u578b\u6750\u6599\u5c06\u914d\u65b9\u79d1\u5b66\u63a8\u5411\u6781\u9650\u7684\u5148\u8fdb\u8282\u70b9\u6311\u6218\uff0c\u8bf7\u8bbf\u95ee\u6211\u4eec\u7684\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-for-advanced-nodes-5nm-3nm-2nm-beyond-technical-challenges-innovations\/\">\u7528\u4e8e\u9ad8\u7ea7\u8282\u70b9\u7684 CMP \u6ce5\u6d46<\/a>.\n  <\/p>\n\n  <!-- Back to Pillar -->\n  <a class=\"back-to-pillar\" href=\"https:\/\/jeez-semicon.com\/zh\/blog\/what-is-cmp-slurry-a-complete-guide-to-chemical-mechanical-planarization-slurry\/\">\n    <span class=\"btp-icon\">\ud83c\udfe0<\/span>\n    <div class=\"btp-text\">\n      <span class=\"btp-label\">\u5b8c\u6574\u7684 CMP \u6ce5\u6d46\u7cfb\u5217<\/span>\n      <span class=\"btp-title\">\u2190 \u8fd4\u56de\uff1a\u4ec0\u4e48\u662f CMP \u6ce5\u6d46\uff1f\u5b8c\u6574\u6307\u5357<\/span>\n    <\/div>\n  <\/a>\n\n<\/article>\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n     STRUCTURED DATA JSON-LD\n\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<script type=\"application\/ld+json\">\n{\n  \"@context\": \"https:\/\/schema.org\",\n  \"@graph\": [\n    {\n      \"@type\": \"Article\",\n      \"headline\": \"CMP Slurry Composition: Abrasives, Chemical Additives & Formulation Principles (2025)\",\n      \"description\": \"Deep-dive into CMP slurry composition \u2014 abrasive particle types (silica, ceria, alumina), chemical additive functions, zeta 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