{"id":1489,"date":"2026-03-04T10:21:35","date_gmt":"2026-03-04T02:21:35","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1489"},"modified":"2026-03-04T11:32:14","modified_gmt":"2026-03-04T03:32:14","slug":"cmp-slurry-defects-root-cause-analysis-quality-control-complete-engineering-guide","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-defects-root-cause-analysis-quality-control-complete-engineering-guide\/","title":{"rendered":"CMP \u6ce5\u6d46\u7f3a\u9677\uff1a\u6839\u672c\u539f\u56e0\u5206\u6790\u548c\u8d28\u91cf\u63a7\u5236 - \u5b8c\u6574\u5de5\u7a0b\u6307\u5357"},"content":{"rendered":"<!--\n  CLUSTER ARTICLE 7 \u2014 CMP SLURRY DEFECTS ANALYSIS & QUALITY CONTROL\n  Slug: \/cmp-slurry-defects\/\n  Focus KW: CMP slurry defects\n  Secondary KWs: CMP scratch defects, CMP particle contamination, CMP dishing erosion,\n                 CMP slurry quality control, post-CMP inspection, LPC slurry,\n                 CMP defect root cause analysis\n  ~3,000 words | Parent: \/cmp-slurry-complete-guide\/\n  Title    : CMP Slurry Defects: Root Cause Analysis & Quality Control Guide (2025)\n  Meta desc: Complete guide to CMP slurry defects \u2014 micro-scratch root causes,\n             particle agglomeration, dishing\/erosion, metal contamination, incoming QC\n             specifications, and post-CMP inspection methods.\n-->\n\n<style>\n.cmp-article*,.cmp-article *::before,.cmp-article *::after{box-sizing:border-box}\n.cmp-article{font-family:'Georgia','Times New Roman',serif;font-size:17px;line-height:1.85;color:#1a1a2e;max-width:860px;margin:0 auto;padding:0 20px 60px}\n.cmp-article h1{font-family:'Segoe UI','Helvetica Neue',Arial,sans-serif;font-size:clamp(26px,4vw,42px);font-weight:800;line-height:1.2;color:#0a0a23;margin:0 0 16px;letter-spacing:-.5px}\n.cmp-article h2{font-family:'Segoe UI','Helvetica Neue',Arial,sans-serif;font-size:clamp(19px,2.5vw,26px);font-weight:700;color:#0a2463;margin:52px 0 16px;padding-bottom:10px;border-bottom:3px solid #0a2463;letter-spacing:-.3px}\n.cmp-article h3{font-family:'Segoe UI','Helvetica Neue',Arial,sans-serif;font-size:clamp(16px,2vw,20px);font-weight:700;color:#163a8a;margin:36px 0 12px}\n.cmp-article p{margin:0 0 20px;color:#2d2d2d}\n.cmp-article a{color:#0a2463;text-decoration:underline;text-underline-offset:3px;font-weight:600;transition:color .2s}\n.cmp-article a:hover{color:#d4380d}\n.cmp-article ul,.cmp-article ol{margin:0 0 20px 24px;padding:0}\n.cmp-article li{margin-bottom:9px;color:#2d2d2d}\n\n\/* Hero \u2014 deep red \/ quality theme *\/\n.cmp-hero{background:linear-gradient(135deg,#1a0a0a 0%,#7f1d1d 50%,#991b1b 100%);border-radius:12px;padding:48px 40px;margin-bottom:40px;position:relative;overflow:hidden}\n.cmp-hero::before{content:'';position:absolute;top:-60px;right:-60px;width:260px;height:260px;background:rgba(255,255,255,.05);border-radius:50%}\n.cmp-hero h1{color:#fff}\n.cmp-hero .hero-intro{font-size:18px;color:rgba(255,255,255,.9);line-height:1.7;margin:0;font-family:'Segoe UI',Arial,sans-serif}\n\n\/* Breadcrumb *\/\n.cmp-breadcrumb{font-family:'Segoe UI',Arial,sans-serif;font-size:13.5px;color:#64748b;margin-bottom:28px}\n.cmp-breadcrumb a{color:#0a2463;font-weight:500;text-decoration:none}\n.cmp-breadcrumb a:hover{text-decoration:underline}\n.cmp-breadcrumb span{margin:0 6px}\n\n\/* Defect severity bar *\/\n.severity-bar{display:flex;border-radius:10px;overflow:hidden;margin:28px 0 36px;border:1px solid #e2e8f0}\n.sev-cell{flex:1;padding:16px 12px;text-align:center;border-right:1px solid rgba(255,255,255,.2)}\n.sev-cell:last-child{border-right:none}\n.sev-cell .sc-name{font-family:'Segoe UI',Arial,sans-serif;font-size:13px;font-weight:700;display:block;margin-bottom:4px}\n.sev-cell .sc-impact{font-family:'Segoe UI',Arial,sans-serif;font-size:11px;opacity:.88}\n.sev-cell.critical{background:#991b1b;color:#fff}\n.sev-cell.high{background:#c2410c;color:#fff}\n.sev-cell.medium{background:#b45309;color:#fff}\n.sev-cell.low{background:#166534;color:#fff}\n\n\/* TOC *\/\n.cmp-toc{background:#fff1f0;border:1px solid #fca5a5;border-left:5px solid #991b1b;border-radius:8px;padding:28px 32px;margin:0 0 44px}\n.cmp-toc h2{font-size:18px!important;font-family:'Segoe UI',Arial,sans-serif;color:#7f1d1d!important;margin:0 0 16px!important;padding:0!important;border:none!important}\n.cmp-toc ol{margin:0;padding-left:22px}\n.cmp-toc ol li{font-family:'Segoe UI',Arial,sans-serif;font-size:15px;margin-bottom:8px;color:#1a1a2e}\n.cmp-toc ol li a{color:#991b1b;font-weight:500;text-decoration:none}\n.cmp-toc ol li a:hover{text-decoration:underline}\n\n\/* Info Boxes *\/\n.cmp-box{border-radius:10px;padding:24px 28px;margin:28px 0}\n.cmp-box.blue{background:#eef2ff;border-left:5px solid #3b5bdb}\n.cmp-box.amber{background:#fffbeb;border-left:5px solid #f59e0b}\n.cmp-box.green{background:#ecfdf5;border-left:5px solid #10b981}\n.cmp-box.red{background:#fff1f0;border-left:5px solid #ef4444}\n.cmp-box.purple{background:#faf5ff;border-left:5px solid #7c3aed}\n.cmp-box .box-title{font-family:'Segoe UI',Arial,sans-serif;font-size:15px;font-weight:700;text-transform:uppercase;letter-spacing:.6px;margin:0 0 10px;color:#0a2463}\n\n\/* Tables *\/\n.cmp-table-wrap{overflow-x:auto;margin:24px 0 36px}\n.cmp-table{width:100%;border-collapse:collapse;font-family:'Segoe UI',Arial,sans-serif;font-size:14px}\n.cmp-table th{background:#0a2463;color:#fff;padding:12px 14px;text-align:left;font-weight:600;white-space:nowrap}\n.cmp-table td{padding:10px 14px;border-bottom:1px solid #e2e8f0;color:#2d2d2d;vertical-align:top;line-height:1.5}\n.cmp-table tr:nth-child(even) td{background:#f8faff}\n.cmp-table tr:hover td{background:#eef2ff}\n.cmp-table .sev-critical{color:#991b1b;font-weight:700}\n.cmp-table .sev-high{color:#c2410c;font-weight:700}\n.cmp-table .sev-medium{color:#b45309;font-weight:700}\n.cmp-table .sev-low{color:#166534;font-weight:700}\n\n\/* Defect Cards *\/\n.defect-card{border-radius:12px;border:1px solid #e2e8f0;padding:24px 26px;margin:24px 0;position:relative;overflow:hidden}\n.defect-card::before{content:'';position:absolute;top:0;left:0;width:5px;height:100%}\n.defect-card.scratch::before{background:#991b1b}\n.defect-card.agglo::before{background:#c2410c}\n.defect-card.metal::before{background:#7c3aed}\n.defect-card.dishing::before{background:#0891b2}\n.defect-card.erosion::before{background:#059669}\n.defect-card.corrosion::before{background:#b45309}\n.defect-card .dc-header{display:flex;align-items:flex-start;gap:14px;margin-bottom:12px}\n.defect-card .dc-icon{font-size:26px;width:48px;height:48px;background:#f8faff;border-radius:10px;display:flex;align-items:center;justify-content:center;flex-shrink:0}\n.defect-card .dc-title{font-family:'Segoe UI',Arial,sans-serif;font-size:18px;font-weight:800;color:#0a2463;margin:0 0 3px}\n.defect-card .dc-subtitle{font-family:'Segoe UI',Arial,sans-serif;font-size:13px;color:#64748b;margin:0}\n.defect-card .dc-tags{display:flex;flex-wrap:wrap;gap:7px;margin:10px 0 14px}\n.dc-tag{font-family:'Segoe UI',Arial,sans-serif;font-size:12px;border-radius:20px;padding:3px 10px;font-weight:600}\n.dc-tag.red{background:#fff1f0;border:1px solid #fca5a5;color:#991b1b}\n.dc-tag.blue{background:#eff6ff;border:1px solid #bfdbfe;color:#1e40af}\n.dc-tag.green{background:#f0fdf4;border:1px solid #bbf7d0;color:#166534}\n.dc-tag.gray{background:#f8faff;border:1px solid #e2e8f0;color:#374151}\n.dc-tag.purple{background:#faf5ff;border:1px solid #e9d5ff;color:#6b21a8}\n\n\/* QC Spec Grid *\/\n.qc-grid{display:grid;grid-template-columns:repeat(auto-fit,minmax(200px,1fr));gap:14px;margin:24px 0 36px}\n.qc-card{background:#fff;border:1px solid #e2e8f0;border-radius:10px;padding:18px 16px}\n.qc-card .qcc-param{font-family:'Segoe UI',Arial,sans-serif;font-size:13px;font-weight:700;color:#64748b;text-transform:uppercase;letter-spacing:.5px;margin-bottom:6px}\n.qc-card .qcc-spec{font-family:'Segoe UI',Arial,sans-serif;font-size:20px;font-weight:800;color:#0a2463;margin-bottom:4px}\n.qc-card .qcc-note{font-family:'Segoe UI',Arial,sans-serif;font-size:12px;color:#64748b;line-height:1.4}\n.qc-card.warn .qcc-spec{color:#991b1b}\n\n\/* RCA Flowchart (CSS) *\/\n.rca-flow{background:#f8faff;border:1px solid #e2e8f0;border-radius:10px;padding:24px;margin:24px 0 36px}\n.rca-flow .rca-title{font-family:'Segoe UI',Arial,sans-serif;font-size:14px;font-weight:700;color:#0a2463;margin:0 0 18px}\n.rca-step{background:#fff;border:1px solid #e2e8f0;border-radius:8px;padding:14px 16px;margin-bottom:10px;display:flex;gap:14px;align-items:flex-start}\n.rca-step .rs-num{font-family:'Segoe UI',Arial,sans-serif;font-size:18px;font-weight:800;color:#fff;background:#0a2463;border-radius:8px;width:36px;height:36px;display:flex;align-items:center;justify-content:center;flex-shrink:0}\n.rca-step .rs-content{font-family:'Segoe UI',Arial,sans-serif;font-size:14.5px;color:#1a1a2e}\n.rca-step .rs-content strong{display:block;font-size:15px;color:#0a2463;margin-bottom:3px}\n.rca-arrow{text-align:center;font-size:20px;color:#94a3b8;margin:2px 0}\n\n\/* Trust Bar *\/\n.cmp-trust{display:flex;align-items:center;gap:16px;background:#fff1f0;border:1px solid #fca5a5;border-radius:10px;padding:20px 24px;margin:40px 0 28px}\n.trust-avatar{width:52px;height:52px;background:#991b1b;border-radius:50%;display:flex;align-items:center;justify-content:center;font-size:22px;flex-shrink:0}\n.trust-text{font-family:'Segoe UI',Arial,sans-serif}\n.trust-text strong{display:block;font-size:15px;color:#7f1d1d}\n.trust-text span{font-size:13px;color:#64748b}\n\n\/* CTA *\/\n.cmp-cta{background:linear-gradient(135deg,#d4380d,#f5692e);border-radius:12px;padding:36px 40px;text-align:center;margin:48px 0;color:#fff}\n.cmp-cta h3{font-family:'Segoe UI',Arial,sans-serif;font-size:22px;font-weight:800;color:#fff!important;margin:0 0 10px!important}\n.cmp-cta p{color:rgba(255,255,255,.9);margin:0 0 20px;font-family:'Segoe UI',Arial,sans-serif}\n.cmp-cta a{display:inline-block;background:#fff;color:#d4380d!important;font-family:'Segoe UI',Arial,sans-serif;font-weight:800;font-size:15px;padding:13px 32px;border-radius:50px;text-decoration:none!important;transition:transform .2s,box-shadow .2s}\n.cmp-cta a:hover{transform:translateY(-2px);box-shadow:0 6px 20px rgba(0,0,0,.2)}\n\n\/* FAQ *\/\n.cmp-faq{margin:24px 0}\n.faq-item{border:1px solid #e2e8f0;border-radius:8px;margin-bottom:14px;overflow:hidden}\n.faq-question{background:#f8faff;padding:18px 22px;font-family:'Segoe UI',Arial,sans-serif;font-weight:700;color:#0a2463;font-size:15.5px;margin:0}\n.faq-answer{padding:18px 22px;background:#fff;font-size:15.5px;color:#2d2d2d;border-top:1px solid #e2e8f0}\n\n\/* Back to Pillar *\/\n.back-to-pillar{display:flex;align-items:center;gap:12px;background:#f0f4ff;border:1px solid #c7d5f5;border-radius:10px;padding:18px 24px;margin:48px 0 0;text-decoration:none!important;transition:background .2s}\n.back-to-pillar:hover{background:#e0e8ff}\n.back-to-pillar .btp-icon{font-size:24px;flex-shrink:0}\n.back-to-pillar .btp-text{font-family:'Segoe UI',Arial,sans-serif}\n.back-to-pillar .btp-label{font-size:12px;color:#64748b;display:block}\n.back-to-pillar .btp-title{font-size:15px;font-weight:700;color:#0a2463}\n\n@media(max-width:600px){\n  .cmp-hero{padding:32px 22px}\n  .cmp-cta{padding:28px 20px}\n  .cmp-toc{padding:22px 18px}\n  .severity-bar{flex-wrap:wrap}\n  .sev-cell{flex:0 0 50%}\n  .qc-grid{grid-template-columns:1fr 1fr}\n  .defect-card{padding:18px 16px}\n}\n<\/style>\n\n<article class=\"cmp-article\" itemscope itemtype=\"https:\/\/schema.org\/Article\">\n\n<div class=\"cmp-hero\">\n  <p class=\"hero-intro\">\u5728\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0cCMP \u7f3a\u9677\u4e0d\u4ec5\u4ec5\u662f\u8868\u9762\u7f3a\u9677\uff0c\u5b83\u8fd8\u76f4\u63a5\u5a01\u80c1\u5230\u8bbe\u5907\u7684\u826f\u7387\u3001\u53ef\u9760\u6027\u4ee5\u53ca\u4e4b\u524d\u6570\u4ee5\u4e07\u8ba1\u7684\u5de5\u827a\u6b65\u9aa4\u3002\u672c\u6307\u5357\u5bf9 CMP \u6d46\u6599\u5f15\u8d77\u7684\u6bcf\u79cd\u4e3b\u8981\u7f3a\u9677\u7c7b\u578b\u8fdb\u884c\u4e86\u5206\u7c7b\uff0c\u5c06\u6bcf\u79cd\u7f3a\u9677\u6620\u5c04\u5230\u5176\u6d46\u6599\u65b9\u9762\u7684\u6839\u672c\u539f\u56e0\uff0c\u5b9a\u4e49\u4e86\u9632\u6b62\u8fd9\u4e9b\u7f3a\u9677\u6240\u9700\u7684\u8fdb\u6599 QC \u89c4\u8303\uff0c\u5e76\u63d0\u4f9b\u4e86\u5148\u8fdb\u5de5\u5382\u73af\u5883\u4e2d\u4f7f\u7528\u7684\u7ed3\u6784\u5316\u6839\u672c\u539f\u56e0\u5206\u6790\u5de5\u4f5c\u6d41\u7a0b\u3002.<\/p>\n<\/div>\n\n<div class=\"cmp-trust\">\n  <div class=\"trust-avatar\">\ud83d\udcca<\/div>\n  <div class=\"trust-text\">\n    <strong>\u5409\u4e4b\u5c9b\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8- \u8d28\u91cf\u4e0e\u5de5\u827a\u5de5\u7a0b\u56e2\u961f<\/strong>\n    <span>CMP \u6ce5\u6d46\u4e13\u5bb6\uff0c\u6c5f\u82cf\u65e0\u9521\u3002\u6c5f\u82cf\u65e0\u9521 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/what-is-cmp-slurry-a-complete-guide-to-chemical-mechanical-planarization-slurry\/\">\u5b8c\u6574\u7684 CMP \u6ce5\u6d46\u6307\u5357<\/a> \u7cfb\u5217\u3002.<\/span>\n  <\/div>\n<\/div>\n\n<!-- Defect Severity Bar -->\n<div class=\"severity-bar\">\n  <div class=\"sev-cell critical\"><span class=\"sc-name\">\u26a0 \u5173\u952e<\/span><span class=\"sc-impact\">\u5fae\u5212\u75d5\/\u786c\u9897\u7c92<\/span><\/div>\n  <div class=\"sev-cell critical\"><span class=\"sc-name\">\u26a0 \u5173\u952e<\/span><span class=\"sc-impact\">\u91d1\u5c5e\u79bb\u5b50\u6c61\u67d3<\/span><\/div>\n  <div class=\"sev-cell high\"><span class=\"sc-name\">\u25b6 \u9ad8<\/span><span class=\"sc-impact\">\u805a\u96c6\/ LPC \u5cf0\u503c<\/span><\/div>\n  <div class=\"sev-cell high\"><span class=\"sc-name\">\u25b6 \u9ad8<\/span><span class=\"sc-impact\">\u6316\u6ce5\u548c\u4fb5\u8680<\/span><\/div>\n  <div class=\"sev-cell medium\"><span class=\"sc-name\">\u4e2d\u578b<\/span><span class=\"sc-impact\">\u8868\u9762\u8150\u8680\/\u70b9\u8680<\/span><\/div>\n  <div class=\"sev-cell low\"><span class=\"sc-name\">\u2713 \u4f4e<\/span><span class=\"sc-impact\">\u6b8b\u7559\u6ce5\u6d46\u9897\u7c92<\/span><\/div>\n<\/div>\n\n<div class=\"cmp-toc\">\n  <h2>\ud83d\udccb \u76ee\u5f55<\/h2>\n  <ol>\n    <li><a href=\"#defect-overview\">CMP \u7f3a\u9677\u5206\u7c7b\uff1a\u6ce5\u6d46\u8bf1\u53d1\u4e0e\u5de5\u827a\u8bf1\u53d1<\/a><\/li>\n    <li><a href=\"#micro-scratch\">\u7f3a\u9677 1\uff1a\u5fae\u5212\u75d5 - \u6839\u6e90\u4e0e\u9884\u9632<\/a><\/li>\n    <li><a href=\"#agglomeration\">\u7f3a\u9677 2\uff1a\u9897\u7c92\u805a\u96c6\u548c LPC \u5cf0\u503c<\/a><\/li>\n    <li><a href=\"#metal-contamination\">\u7f3a\u9677 3\uff1a\u91d1\u5c5e\u79bb\u5b50\u6c61\u67d3<\/a><\/li>\n    <li><a href=\"#dishing-erosion\">\u7f3a\u9677 4\uff1a\u6316\u6ce5\u548c\u4fb5\u8680\uff08\u6ce5\u6d46\u4fa7\u7684\u6839\u672c\u539f\u56e0\uff09<\/a><\/li>\n    <li><a href=\"#corrosion\">\u7f3a\u9677 5\uff1a\u8868\u9762\u8150\u8680\u3001\u70b9\u8680\u548c\u7535\u8680<\/a><\/li>\n    <li><a href=\"#residue\">\u7f3a\u9677 6\uff1a\u6b8b\u7559\u6ce5\u6d46\u9897\u7c92\u548c CMP \u540e\u7684\u6e05\u6d01\u5ea6<\/a><\/li>\n    <li><a href=\"#incoming-qc\">\u5165\u5883\u6ce5\u6d46\u8d28\u91cf\u63a7\u5236\uff1a\u89c4\u683c\u548c\u6d4b\u91cf\u65b9\u6cd5<\/a><\/li>\n    <li><a href=\"#rca\">CMP \u7f3a\u9677\u504f\u79bb\u7684\u6839\u672c\u539f\u56e0\u5206\u6790\u5de5\u4f5c\u6d41\u7a0b<\/a><\/li>\n    <li><a href=\"#inspection\">CMP \u540e\u68c0\u9a8c\uff1a\u5de5\u5177\u3001\u65b9\u6cd5\u548c\u7f3a\u9677\u5206\u7c7b<\/a><\/li>\n    <li><a href=\"#faq\">\u5e38\u89c1\u95ee\u9898<\/a><\/li>\n  <\/ol>\n<\/div>\n\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 1 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<h2 id=\"defect-overview\">1.CMP \u7f3a\u9677\u5206\u7c7b\uff1a\u6ce5\u6d46\u8bf1\u53d1\u4e0e\u5de5\u827a\u8bf1\u53d1<\/h2>\n\n<p>\u5e76\u975e\u6bcf\u4e2a CMP \u7f3a\u9677\u90fd\u6e90\u4e8e\u6d46\u6599\u3002\u6709\u6548\u7684\u6839\u672c\u539f\u56e0\u5206\u6790\u8981\u6c42\u9996\u5148\u786e\u5b9a\u7f3a\u9677\u662f\u6e90\u4e8e\u6d46\u6599\u8fd8\u662f\u6e90\u4e8e\u5de5\u827a\/\u8bbe\u5907--\u8fd9\u4e00\u533a\u522b\u51b3\u5b9a\u4e86\u7ea0\u6b63\u63aa\u65bd\u4ee5\u53ca\u4f9b\u5e94\u5546\u4e0e\u5de5\u827a\u6240\u6709\u6743\u7684\u754c\u9650\u3002\u4e0b\u9762\u7684\u5206\u7c7b\u6cd5\u6309\u4e3b\u8981\u539f\u56e0\u7c7b\u522b\u5bf9 CMP \u7f3a\u9677\u8fdb\u884c\u4e86\u5206\u7c7b\uff1a<\/p>\n\n<div class=\"cmp-table-wrap\">\n  <table class=\"cmp-table\">\n    <thead>\n      <tr><th>\u7f3a\u9677\u7c7b\u578b<\/th><th>\u539f\u4ea7\u5730<\/th><th>\u6ce5\u6d46\u4fa7\u56e0\u5b50<\/th><th>\u5de5\u827a\u4fa7\u56e0\u7d20<\/th><th>\u4e25\u91cd\u6027<\/th><\/tr>\n    <\/thead>\n    <tbody>\n      <tr><td><strong>\u5fae\u5c0f\u5212\u75d5<\/strong><\/td><td>\u6ce5\u6d46\u548c\u57ab\u5c42<\/td><td>LPC\u3001\u786c\u9897\u7c92\u3001\u56e2\u805a\u4f53<\/td><td>\u886c\u57ab\u4e0a\u91c9\u3001\u8c03\u8282\u5668\u78e8\u635f\u3001\u788e\u5c51<\/td><td class=\"sev-critical\">\u5173\u952e<\/td><\/tr>\n      <tr><td><strong>\u91d1\u5c5e\u79bb\u5b50\u6c61\u67d3<\/strong><\/td><td>\u6ce5\u6d46\uff08\u521d\u7ea7\uff09<\/td><td>\u6ce5\u6d46\u4e2d\u7684\u94c1\u3001\u94a0\u3001\u94be\u3001\u94dc\u75d5\u91cf\u91d1\u5c5e<\/td><td>\u914d\u9001\u7cfb\u7edf\u6ca5\u6ee4<\/td><td class=\"sev-critical\">\u5173\u952e<\/td><\/tr>\n      <tr><td><strong>\u9897\u7c92\u51dd\u805a<\/strong><\/td><td>\u6ce5\u6d46<\/td><td>pH \u503c\u504f\u79fb\u3001\u6e29\u5ea6\u9aa4\u5347\u3001\u5e74\u9f84<\/td><td>\u7a00\u91ca\u51b2\u51fb\u3001\u6df7\u5408\u6e4d\u6d41<\/td><td class=\"sev-high\">\u9ad8<\/td><\/tr>\n      <tr><td><strong>\u5782\u9493<\/strong><\/td><td>\u5de5\u827a + \u6ce5\u6d46<\/td><td>H\u2082O\u2082 \u8fc7\u591a\uff0cBTA \u4e0d\u8db3<\/td><td>\u629b\u5149\u8fc7\u5ea6\u3001\u886c\u57ab\u786c\u5ea6\u3001\u4e0b\u538b\u529b<\/td><td class=\"sev-high\">\u9ad8<\/td><\/tr>\n      <tr><td><strong>\u4fb5\u8680<\/strong><\/td><td>\u5de5\u827a + \u6ce5\u6d46<\/td><td>\u963b\u6321\u5c42\u6d46\u6599\u4e2d\u7684\u9ad8\u2082\u6c27\u5316\u7845 MRR<\/td><td>\u56fe\u6848\u5bc6\u5ea6\u3001\u8fc7\u5ea6\u629b\u5149<\/td><td class=\"sev-high\">\u9ad8<\/td><\/tr>\n      <tr><td><strong>\u8868\u9762\u8150\u8680\/\u70b9\u8680<\/strong><\/td><td>\u6ce5\u6d46<\/td><td>\u6c27\u5316\u5242\u5931\u8861\uff0c\u6291\u5236\u5242\u4e0d\u8db3<\/td><td>\u6c14\u57ab\u505c\u6ede\u3001\u5c40\u90e8\u538b\u529b<\/td><td class=\"sev-medium\">\u4e2d\u578b<\/td><\/tr>\n      <tr><td><strong>TaN \/ \u9694\u79bb\u5c42\u6b8b\u7559\u7269<\/strong><\/td><td>\u8fc7\u7a0b<\/td><td>\u4f4e TaN MRR \u6ce5\u6d46<\/td><td>\u8fc7\u5ea6\u629b\u5149\u4e0d\u8db3\uff0cWIWNU<\/td><td class=\"sev-high\">\u9ad8<\/td><\/tr>\n      <tr><td><strong>\u6b8b\u7559\u6ce5\u6d46\u9897\u7c92<\/strong><\/td><td>\u5de5\u827a\uff08\u6e05\u6d01\uff09<\/td><td>\u78e8\u6599\u9644\u7740\u529b\u5f3a\uff0c\u9897\u7c92\u5927<\/td><td>CMP \u540e\u7684\u6e05\u6d01\u5316\u5b66\u3001\u5237\u5b50\u78e8\u635f<\/td><td class=\"sev-low\">\u4f4e<\/td><\/tr>\n      <tr><td><strong>pH \u503c\u504f\u79fb\u635f\u5bb3<\/strong><\/td><td>\u6ce5\u6d46<\/td><td>pH \u503c\u8d85\u51fa\u89c4\u683c\u7684\u6279\u6b21\uff0c\u7f13\u51b2\u5668\u6545\u969c<\/td><td>\u6df7\u5408\u6bd4\u8bef\u5dee\u3001\u6c61\u67d3<\/td><td class=\"sev-high\">\u9ad8<\/td><\/tr>\n      <tr><td><strong>\u8131\u5c42<\/strong><\/td><td>\u5de5\u827a + \u6ce5\u6d46<\/td><td>\u673a\u68b0\u5e94\u529b\u8fc7\u5927 (ULK)<\/td><td>\u6613\u788e\u8584\u819c\u5806\u4e0a\u7684\u9ad8\u4e0b\u538b\u529b<\/td><td class=\"sev-critical\">\u5173\u952e<\/td><\/tr>\n    <\/tbody>\n  <\/table>\n<\/div>\n\n<div class=\"cmp-box blue\">\n  <p class=\"box-title\">\ud83d\udccc CMP \u7f3a\u9677\u7684 80\/20 \u89c4\u5219<\/p>\n  <p style=\"margin:0;\">\u6210\u719f\u548c\u5148\u8fdb\u8282\u70b9\u6676\u5706\u5382\u7684\u884c\u4e1a\u7ecf\u9a8c\u4e00\u81f4\u8868\u660e\uff0c\u7ea6 80% \u7684 CMP \u826f\u7387\u504f\u5dee\u53ef\u8ffd\u6eaf\u5230\u4ee5\u4e0b\u4e09\u4e2a\u6839\u672c\u539f\u56e0\u4e4b\u4e00\uff1a(1) \u5165\u6599\u6d46\u6599\u4e2d\u7684\u5927\u9897\u7c92\u8ba1\u6570 (LPC) \u5cf0\u503c\uff0c\u5bfc\u81f4\u5fae\u5212\u75d5\u4e8b\u4ef6\uff1b(2) \u6d46\u6599 pH \u503c\u504f\u5dee\u8d85\u51fa\u6307\u5b9a\u7a97\u53e3\uff0c\u5bfc\u81f4\u78e8\u6599\u7ed3\u5757\u6216\u8584\u819c\u8150\u8680\uff1b(3) \u6d46\u6599\u5b58\u50a8\/\u5206\u914d\u5f02\u5e38\uff0c\u5bfc\u81f4\u751f\u4ea7\u548c\u4f7f\u7528\u70b9\u4e4b\u95f4\u7684\u914d\u65b9\u9000\u5316\u3002\u7cfb\u7edf\u5316\u7684\u8fdb\u6599\u8d28\u91cf\u63a7\u5236\u53ef\u89e3\u51b3\u8fd9\u4e09\u7c7b\u95ee\u9898\uff0c\u4ece\u800c\u907f\u514d\u5927\u90e8\u5206\u56e0\u6d46\u6599\u5f15\u8d77\u7684\u4ea7\u91cf\u635f\u5931\u3002.<\/p>\n<\/div>\n\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 2 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<h2 id=\"micro-scratch\">2.\u7f3a\u9677 1\uff1a\u5fae\u5212\u75d5 - \u6839\u6e90\u4e0e\u9884\u9632<\/h2>\n\n<div class=\"defect-card scratch\">\n  <div class=\"dc-header\">\n    <div class=\"dc-icon\">\ud83d\udd34<\/div>\n    <div>\n      <p class=\"dc-title\">\u5fae\u5212\u75d5<\/p>\n      <p class=\"dc-subtitle\">\u4ea7\u91cf\u5f71\u54cd\u6700\u5927\u7684 CMP \u6ce5\u6d46\u7f3a\u9677\uff1b\u9020\u6210\u81f4\u547d\u7f3a\u9677\u5bc6\u5ea6\u7684\u4e3b\u8981\u539f\u56e0<\/p>\n    <\/div>\n  <\/div>\n  <div class=\"dc-tags\">\n    <span class=\"dc-tag red\">\u4e25\u91cd\u6027\uff1a\u7d27\u6025<\/span>\n    <span class=\"dc-tag blue\">\u68c0\u67e5\uff1aKLA SP7 \/ \u65e5\u7acb LS9500<\/span>\n    <span class=\"dc-tag gray\">\u8584\u819c\u98ce\u9669\uff1a\u6c27\u5316\u7269\u3001\u94dc\u3001\u4f4e K \u503c\u3001\u6c2e\u5316\u7269<\/span>\n    <span class=\"dc-tag green\">\u9884\u9632\uff1aLPC \u89c4\u683c + POU \u8fc7\u6ee4<\/span>\n  <\/div>\n\n  <p>\u5fae\u5212\u75d5\u662f\u4e00\u79cd\u7ebf\u6027\u8868\u9762\u7f3a\u9677\uff0c\u5f53\u5355\u4e2a\u78e8\u7c92\u6216\u575a\u786c\u7684\u56e2\u5757\u5728\u710a\u76d8\u6cd5\u5411\u529b\u7684\u4f5c\u7528\u4e0b\u62d6\u8fc7\u6676\u7247\u8868\u9762\u65f6\uff0c\u4f1a\u5728\u8584\u819c\u4e0a\u5212\u51fa\u4e00\u9053\u6c9f\u69fd\u3002\u5728\u5148\u8fdb\u7684\u8282\u70b9\u4e0a\uff0c\u5212\u75d5\u88ab\u5f52\u7c7b\u4e3a \u201c\u81f4\u547d\u7f3a\u9677\u201d\uff0c\u56e0\u4e3a\u5212\u8fc7\u6709\u6e90\u5668\u4ef6\u7279\u5f81\uff08\u6805\u6781\u3001\u901a\u5b54\u3001\u89e6\u70b9\uff09\u7684\u5212\u75d5\u4f1a\u9020\u6210\u77ed\u8def\u3001\u5f00\u8def\u6216\u53ef\u9760\u6027\u6545\u969c\uff0c\u65e0\u6cd5\u5728\u4efb\u4f55\u4e0b\u6e38\u5de5\u827a\u6b65\u9aa4\u4e2d\u4fee\u590d\u3002\u5927\u591a\u6570 CMP \u7f3a\u9677\u53ef\u901a\u8fc7\u7edf\u8ba1\u5efa\u6a21\u5e76\u901a\u8fc7\u5de5\u827a\u8c03\u6574\u8fdb\u884c\u90e8\u5206\u4fee\u6b63\uff0c\u800c\u81f4\u547d\u5212\u75d5\u5219\u4e0d\u540c\uff0c\u5b83\u662f\u4e00\u79cd\u6c38\u4e45\u6027\u3001\u79bb\u6563\u7684\u826f\u7387\u635f\u5931\u4e8b\u4ef6\u3002.<\/p>\n\n  <h3>\u6839\u6e90\u7c7b\u522b<\/h3>\n\n  <p><strong>1.\u6ce5\u6d46\u4e2d\u7684\u5927\u9897\u7c92\u8ba1\u6570\uff08LPC\uff09\u3002.<\/strong> \u53ef\u80fd\u6027\u6700\u5927\u7684\u4e00\u4e2a\u6839\u672c\u539f\u56e0\u3002\u80f6\u4f53\u6d46\u6599\u7684\u8bbe\u8ba1 D50 \u4e3a 30-80 nm\uff0c\u4f46\u6bcf\u6279\u6d46\u6599\u4e2d\u90fd\u542b\u6709\u7edf\u8ba1\u610f\u4e49\u4e0a\u7684\u8f83\u5927\u9897\u7c92\u3002\u5728 LPC \u6d4b\u91cf\u4e2d\uff0c200-500 nm \u4ee5\u4e0a\u7684\u9897\u7c92\u88ab\u5f52\u7c7b\u4e3a \u201c\u5927\u9897\u7c92\u201d\uff0c\u7531\u4e8e\u6bcf\u4e2a\u7814\u78e8\u9897\u7c92\u7684\u63a5\u89e6\u529b\u7ea6\u4e3a F \u2245 d\u00b2\uff08\u9897\u7c92\u76f4\u5f84\u7684\u5e73\u65b9\uff09\uff0c\u56e0\u6b64\u5212\u4f24\u98ce\u9669\u5927\u5927\u589e\u52a0\u3002\u56e0\u6b64\uff0c\u5355\u4e2a 500 nm \u9897\u7c92\u7684\u63a5\u89e6\u529b\u7ea6\u4e3a 80 nm \u8bbe\u8ba1\u9897\u7c92\u7684 40 \u500d\uff0c\u5728\u7845\u6216\u4f4e K \u4ecb\u8d28\u4e2d\u4ea7\u751f\u7684\u6c9f\u69fd\u6df1\u5ea6\u53ef\u8f7b\u677e\u8d85\u8fc7 50 nm\uff0c\u5176\u6df1\u5ea6\u8db3\u4ee5\u5bfc\u81f4 EUV \u5370\u5237\u6b65\u9aa4\u5931\u8d25\u6216 10 nm \u4ee5\u4e0b\u4e92\u8fde\u77ed\u8def\u3002.<\/p>\n\n  <p><strong>2.\u78e8\u6599\u805a\u96c6\u4e8b\u4ef6\u3002.<\/strong> pH \u503c\u504f\u5dee\u3001\u6e29\u5ea6\u9aa4\u5347\u3001\u79bb\u5b50\u6c61\u67d3\u6216\u6d46\u6599\u8d85\u8fc7\u4fdd\u8d28\u671f\u90fd\u4f1a\u7834\u574f\u80f6\u4f53\u7a33\u5b9a\u6027\u3002\u5f53\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u6216\u94c8\u9897\u7c92\u53d1\u751f\u56e2\u805a\u65f6\uff0c\u5b83\u4eec\u4f1a\u5f62\u6210 200-2,000 \u7eb3\u7c73\u7684\u56e2\u5757--\u4ece\u5212\u75d5\u98ce\u9669\u7684\u89d2\u5ea6\u6765\u770b\uff0c\u8fd9\u5b9e\u9645\u4e0a\u662f \u201c\u5de8\u578b\u9897\u7c92\u201d--\u65e0\u6cd5\u901a\u8fc7\u4e13\u4e3a\u53bb\u9664\u5355\u9897\u7c92\u800c\u8bbe\u8ba1\u7684 200 \u7eb3\u7c73\u6807\u51c6 POU \u8fc7\u6ee4\u53bb\u9664\u3002\u5982\u679c\u672a\u5728\u53d7\u63a7\u6761\u4ef6\u4e0b\u6df7\u5408\u53cc\u7ec4\u5206\u6d46\u6599\u6210\u5206\uff0c\u5219\u5728\u6563\u88c5\u6d46\u6599\u5bb9\u5668\u3001\u5206\u914d\u73af\u8def\u6216 POU \u6df7\u5408\u533a\u4e2d\u90fd\u53ef\u80fd\u51fa\u73b0\u7ed3\u5757\u73b0\u8c61\u3002.<\/p>\n\n  <p><strong>3.\u57ab\u5b50\u788e\u5c51\u548c\u62a4\u53d1\u7d20\u6c61\u67d3\u3002.<\/strong> \u5e76\u975e\u6240\u6709\u5212\u75d5\u90fd\u6e90\u81ea\u6ce5\u6d46\u3002\u91d1\u521a\u77f3\u8c03\u8282\u76d8\u8131\u843d\uff08\u7834\u788e\u6216\u78e8\u635f\u7684\u91d1\u521a\u77f3\u78e8\u6599\u6389\u5165\u6d46\u6599-\u886c\u57ab\u754c\u9762\uff09\u4ee5\u53ca\u886c\u57ab\u78e8\u635f\u6216\u6c9f\u69fd\u8fb9\u7f18\u65ad\u88c2\u4ea7\u751f\u7684\u886c\u57ab\u788e\u7247\u90fd\u4f1a\u4ea7\u751f\u5212\u75d5\uff0c\u4ece CMP \u7f3a\u9677\u68c0\u6d4b\u540e\u7684\u5f62\u6001\u6765\u770b\uff0c\u8fd9\u4e9b\u5212\u75d5\u4e0e\u6e90\u81ea\u6d46\u6599\u7684\u5212\u75d5\u65e0\u6cd5\u533a\u5206\u3002\u8981\u533a\u5206\u6e90\u4e8e\u6d46\u6599\u7684\u5212\u75d5\u548c\u6e90\u4e8e\u8bbe\u5907\u7684\u5212\u75d5\uff0c\u9700\u8981\u5c06\u5212\u75d5\u7684\u65b9\u4f4d\u89d2\u65b9\u5411\u4e0e\u6676\u5706\u8f7d\u4f53\u7684\u65cb\u8f6c\u65b9\u5411\u8054\u7cfb\u8d77\u6765--\u6e90\u4e8e\u6d46\u6599\u7684\u5212\u75d5\u5728\u65b9\u4f4d\u89d2\u65b9\u5411\u4e0a\u5f80\u5f80\u662f\u968f\u673a\u7684\uff0c\u800c\u8c03\u7406\u5242\u5212\u75d5\u5f80\u5f80\u805a\u96c6\u5728\u7279\u5b9a\u7684\u65b9\u4f4d\u89d2\u5e26\u4e2d\u3002.<\/p>\n\n  <h3>\u9632\u5212\u7b49\u7ea7<\/h3>\n  <ol>\n    <li><strong>\u5373\u5c06\u5b9e\u65bd\u7684 LPC \u89c4\u8303\uff1a<\/strong> LPC (&gt;0.5 \u03bcm) \u226450\/mL \u662f\u6807\u51c6\u7684\u5148\u8fdb\u8282\u70b9\u5165\u6599\u89c4\u683c\u3002\u4e00\u4e9b\u5de5\u5382\u5c06 LPC\uff08&gt;0.2 \u03bcm\uff09\u2264200\/mL \u4f5c\u4e3a 5 \u7eb3\u7c73\u4ee5\u4e0b\u5e94\u7528\u7684\u9644\u52a0\u9884\u8b66\u6807\u51c6\u3002.<\/li>\n    <li><strong>\u4f7f\u7528\u70b9\uff08POU\uff09\u8fc7\u6ee4\uff1a<\/strong> 100-200 nm \u7684\u7edd\u5bf9 POU \u8fc7\u6ee4\u5668\u5b89\u88c5\u5728\u5206\u914d\u81c2\u4e4b\u524d\uff0c\u53ef\u53bb\u9664\u5206\u914d\u8fc7\u7a0b\u4e2d\u5f62\u6210\u7684\u7ed3\u5757\uff0c\u5373\u4f7f\u6563\u88c5\u6279\u6b21\u901a\u8fc7\u4e86\u8fdb\u6599 LPC\u3002\u8fc7\u6ee4\u5668\u5b8c\u6574\u6027\u76d1\u6d4b\uff08\u538b\u5dee\u3001\u6d41\u901f\uff09\u81f3\u5173\u91cd\u8981--\u9971\u548c\u7684 POU \u8fc7\u6ee4\u5668\u672c\u8eab\u5c31\u4f1a\u5c06\u6355\u83b7\u7684\u56e2\u805a\u7269\u6d41\u56de\u6d46\u6599\u6d41\u4e2d\u3002\u6709\u5173 POU \u8fc7\u6ee4\u5668\u9009\u62e9\u7684\u5168\u9762\u6307\u5bfc\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-filters-storage-handling-complete-engineering-guide\/\">CMP \u6ce5\u6d46\u8fc7\u6ee4\u5668\u3001\u50a8\u5b58\u548c\u5904\u7406<\/a> \u6587\u7ae0.<\/li>\n    <li><strong>\u6ce5\u6d46\u9f84\u671f\u7ba1\u7406\uff1a<\/strong> \u6839\u636e\u7a33\u5b9a\u6027\u6570\u636e\u786e\u5b9a\u5e76\u6267\u884c\u4f7f\u7528\u70b9\u6d46\u9f84\u9650\u5236\u3002\u5927\u591a\u6570\u5546\u7528 CMP \u6ce5\u6d46\u7684 POU \u7a33\u5b9a\u7a97\u53e3\u4e3a\u6df7\u5408\/\u7a00\u91ca\u540e 8-24 \u5c0f\u65f6\u3002\u7a97\u53e3\u671f\u8fc7\u540e\uff0c\u968f\u7740\u80f6\u4f53\u7a33\u5b9a\u6027\u7684\u964d\u4f4e\uff0cLPC \u901a\u5e38\u4f1a\u589e\u52a0\u3002.<\/li>\n    <li><strong>\u8c03\u8282\u5668\u76d8\u68c0\u67e5\u9891\u7387\uff1a<\/strong> \u5728\u89c4\u5b9a\u7684 PM \u95f4\u9694\u5185\u5bf9\u8c03\u8282\u5668\u5706\u76d8\u7684\u91d1\u521a\u77f3\u4fdd\u7559\u60c5\u51b5\u8fdb\u884c SEM \u68c0\u67e5\u3002\u5728\u91d1\u521a\u77f3\u8131\u843d\u6210\u4e3a\u751f\u4ea7\u98ce\u9669\u4e4b\u524d\uff0c\u4e00\u65e6\u53d1\u73b0\u91d1\u521a\u77f3\u8131\u843d\uff0c\u7acb\u5373\u66f4\u6362\u76d8\u7247\u3002.<\/li>\n  <\/ol>\n<\/div>\n\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 3 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<h2 id=\"agglomeration\">3.\u7f3a\u9677 2\uff1a\u9897\u7c92\u805a\u96c6\u548c LPC \u5cf0\u503c<\/h2>\n\n<div class=\"defect-card agglo\">\n  <div class=\"dc-header\">\n    <div class=\"dc-icon\">\ud83d\udfe0<\/div>\n    <div>\n      <p class=\"dc-title\">\u9897\u7c92\u51dd\u805a\u4e0e LPC \u5cf0\u503c<\/p>\n      <p class=\"dc-subtitle\">\u5fae\u5212\u75d5\u7684\u524d\u5146\uff1b\u5728\u53d1\u751f\u6676\u7247\u63a5\u89e6\u635f\u574f\u4e4b\u524d\u5c31\u53ef\u68c0\u6d4b\u5230<\/p>\n    <\/div>\n  <\/div>\n  <div class=\"dc-tags\">\n    <span class=\"dc-tag red\">\u4e25\u91cd\u6027\uff1a\u9ad8\uff08CRITICAL \u7684\u524d\u5146\uff09<\/span>\n    <span class=\"dc-tag blue\">\u68c0\u6d4b\uff1aDLS\u3001LPC \u8ba1\u6570\u5668\uff08Accusizer \/ PAMAS\uff09<\/span>\n    <span class=\"dc-tag gray\">\u89e6\u53d1\u56e0\u7d20\uff1apH \u503c\u3001\u6e29\u5ea6\u3001\u79bb\u5b50\u6c61\u67d3\u3001\u5e74\u9f84<\/span>\n    <span class=\"dc-tag green\">\u9884\u9632Zeta \u7535\u4f4d\u76d1\u6d4b\u3001POU \u8fc7\u6ee4<\/span>\n  <\/div>\n\n  <p>\u80f6\u4f53\u7a33\u5b9a\u6027--\u5373\u5355\u4e2a\u7814\u78e8\u9897\u7c92\u4fdd\u6301\u5355\u72ec\u5206\u6563\u800c\u4e0d\u805a\u96c6\u7684\u72b6\u6001--\u662f\u901a\u8fc7\u9897\u7c92\u4e4b\u95f4\u7684\u9759\u7535\u65a5\u529b\u6765\u7ef4\u6301\u7684\u3002\u80f6\u4f53\u9897\u7c92\u7684 zeta \u7535\u4f4d\uff08\u03b6\uff09\u53ef\u91cf\u5316\u8fd9\u79cd\u65a5\u529b\uff1a|\u03b6| &gt;30 mV \u7684\u5927\u5c0f\u53ef\u4e3a\u5927\u591a\u6570 CMP \u7814\u78e8\u6db2\u63d0\u4f9b\u8db3\u591f\u7684\u7a33\u5b9a\u6027\uff0c\u800c|\u03b6| &gt;40 mV \u5219\u662f\u9ad8\u7f3a\u9677\u7075\u654f\u5ea6\u5e94\u7528\u4e2d\u7814\u78e8\u6db2\u7684\u76ee\u6807\u503c\u3002\u5f53\u9759\u7535\u52bf\u5792\u964d\u4f4e\u5230\u4e34\u754c\u9608\u503c\u4ee5\u4e0b\u65f6\uff0c\u8303\u5fb7\u534e\u5438\u5f15\u529b\u5360\u4e3b\u5bfc\u5730\u4f4d\uff0c\u9897\u7c92\u5f00\u59cb\u805a\u96c6--\u56e2\u805a\u3002.<\/p>\n\n  <h3>\u805a\u96c6\u89e6\u53d1\u673a\u5236<\/h3>\n  <ul>\n    <li><strong>pH \u504f\u79bb\uff1a<\/strong> \u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u7684 zeta \u7535\u4f4d\u5728 pH \u503c 9.5-10.5 \u5de6\u53f3\u8fbe\u5230\u5cf0\u503c\u3002\u5728\u7b49\u7535\u70b9\uff08IEP\uff0c\u4e8c\u6c27\u5316\u7845\u7684 pH \u503c\u22482-3\uff09\uff0czeta \u7535\u4f4d\u63a5\u8fd1\u4e8e\u96f6\uff0c\u805a\u7ed3\u662f\u77ac\u95f4\u53d1\u751f\u4e14\u4e0d\u53ef\u9006\u7684\u3002\u5373\u4f7f pH \u503c\u4ece 10.0 \u5fae\u964d\u81f3 8.5\uff0c\u4e5f\u4f1a\u4f7f zeta \u7535\u4f4d\u964d\u4f4e 30-40%\uff0c\u4ece\u800c\u5927\u5927\u589e\u52a0\u5728\u5206\u914d\u505c\u7559\u65f6\u95f4\u5185\u7684\u56e2\u805a\u98ce\u9669\u3002.<\/li>\n    <li><strong>\u4e8c\u4ef7\u9633\u79bb\u5b50\u6c61\u67d3\uff1a<\/strong> Ca\u00b2\u207a \u548c Mg\u00b2\u207a \u79bb\u5b50\uff08\u4ece\u975e\u8d85\u7eaf\u6c34\u3001\u4e0d\u76f8\u5bb9\u7684\u5206\u914d\u6750\u6599\u6216\u6740\u83cc\u5242\u5206\u89e3\u4e2d\u5f15\u5165\uff09\u5728\u6d53\u5ea6\u4f4e\u81f3 1-5 ppm \u65f6\u4f1a\u4e2d\u548c\u4e8c\u6c27\u5316\u7845\u9897\u7c92\u8868\u9762\u7684\u8d1f\u7535\u8377\uff0c\u4f7f\u9759\u7535\u5c4f\u969c\u5d29\u6e83\u5e76\u5f15\u53d1\u5feb\u901f\u56e2\u805a\u3002\u8fd9\u662f\u6700\u9690\u853d\u7684\u805a\u7ed3\u5931\u6548\u6a21\u5f0f\u4e4b\u4e00\uff0c\u56e0\u4e3a\u6d46\u6599\u53ef\u80fd\u4f1a\u901a\u8fc7\u76ee\u89c6\u5916\u89c2\u68c0\u67e5\u548c\u6279\u91cf pH \u503c\u6d4b\u91cf\uff0c\u4f46\u5176\u4e2d\u542b\u6709\u7684\u9ad8\u6d53\u5ea6 LPC \u4f1a\u5728\u9996\u6b21\u63a5\u89e6\u7684\u6676\u7247\u4e0a\u4ea7\u751f\u5212\u75d5\u3002.<\/li>\n    <li><strong>\u6e29\u5ea6\u504f\u5dee\uff1a<\/strong> \u6e29\u5ea6\u5347\u9ad8\uff08&gt;30\u00b0C\uff09\u4f1a\u589e\u52a0\u5e03\u6717\u8fd0\u52a8\u80fd\u91cf\uff0c\u4f7f\u7c92\u5b50\u5177\u6709\u514b\u670d\u6b8b\u4f59\u9759\u7535\u969c\u788d\u7684\u52a8\u80fd\u3002\u6e29\u5ea6\u504f\u79fb\u8fd8\u4f1a\u52a0\u901f Cu CMP \u6ce5\u6d46\u4e2d H\u2082O\u2082 \u7684\u5206\u89e3\uff0c\u6539\u53d8\u6c27\u5316\u5242\u7684\u6d3b\u6027\u548c pH \u503c\uff0c\u4ece\u800c\u4ea7\u751f\u590d\u5408\u7ed3\u5757\u98ce\u9669\u3002.<\/li>\n    <li><strong>\u4e24\u90e8\u5206\u6df7\u5408\u6e4d\u6d41<\/strong> \u8bb8\u591a\u73b0\u4ee3 CMP \u6ce5\u6d46\u90fd\u662f\u4f5c\u4e3a\u4e24\u90e8\u5206\u7cfb\u7edf\uff08\u7814\u78e8\u5242\u6d53\u7f29\u7269 + \u5316\u5b66\u6dfb\u52a0\u5242\u5305\uff09\u5728\u4f7f\u7528\u70b9\u6df7\u5408\u540e\u4ea4\u4ed8\u7684\u3002\u4e0d\u6b63\u786e\u7684\u6df7\u5408\u6bd4\u4f8b\u3001\u8fc7\u5feb\u7684\u6df7\u5408\u901f\u5ea6\u6216\u4e0d\u76f8\u5bb9 pH \u503c\u7684\u6df7\u5408\u6d41\u90fd\u4f1a\u9020\u6210\u77ac\u65f6\u7ed3\u5757\uff0c\u5e76\u5728\u5206\u914d\u73af\u8def\u4e2d\u6301\u7eed\u6570\u5c0f\u65f6\u3002.<\/li>\n  <\/ul>\n\n  <div class=\"cmp-box amber\">\n    <p class=\"box-title\">\u26a0\ufe0f Zeta \u7535\u4f4d\uff1a\u9884\u8b66\u6307\u6807<\/p>\n    <p style=\"margin:0;\">\u5bf9\u6bcf\u4e2a\u8fdb\u8d27\u6279\u6b21\u8fdb\u884c Zeta \u7535\u4f4d\u6d4b\u91cf\uff08Malvern Zetasizer \u6216\u540c\u7c7b\u4eea\u5668\uff09\u53ef\u63d0\u4f9b\u80f6\u4f53\u7a33\u5b9a\u6027\u98ce\u9669\u7684\u5148\u884c\u6307\u6807\uff0c\u8fd9\u662f LPC \u6d4b\u91cf\u672c\u8eab\u6240\u65e0\u6cd5\u63d0\u4f9b\u7684\u3002\u5982\u679c\u4e00\u4e2a\u6279\u6b21\u7684\u6807\u79f0 LPC \u503c\u4e3a-45 mV\uff08\u5386\u53f2\u57fa\u7ebf\uff09\uff0c\u4f46 zeta \u7535\u4f4d\u4ece-45 mV\uff08\u5386\u53f2\u57fa\u7ebf\uff09\u5411-30 mV \u53d8\u5316\uff0c\u90a3\u4e48\u5728\u8be5\u6279\u6b21\u8fdb\u5165\u751f\u4ea7\u5de5\u5177\u4e4b\u524d\uff0c\u5373\u4f7f LPC \u4ecd\u7136\u901a\u8fc7\u4e86\u9a8c\u6536\u6807\u51c6\uff0c\u4e5f\u5e94\u8be5\u5bf9\u5176\u8fdb\u884c\u6263\u7559\u548c\u8c03\u67e5\uff0c\u56e0\u4e3a\u7a33\u5b9a\u6027\u50a8\u5907\u7684\u964d\u4f4e\u610f\u5473\u7740 LPC \u53ef\u80fd\u4f1a\u5728\u5206\u9500\u8fc7\u7a0b\u4e2d\u8fc5\u901f\u98d9\u5347\u3002.<\/p>\n  <\/div>\n<\/div>\n\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 4 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<h2 id=\"metal-contamination\">4.\u7f3a\u9677 3\uff1a\u91d1\u5c5e\u79bb\u5b50\u6c61\u67d3<\/h2>\n\n<div class=\"defect-card metal\">\n  <div class=\"dc-header\">\n    <div class=\"dc-icon\">\ud83d\udfe3<\/div>\n    <div>\n      <p class=\"dc-title\">\u91d1\u5c5e\u79bb\u5b50\u6c61\u67d3<\/p>\n      <p class=\"dc-subtitle\">\u6805\u6781\u6c27\u5316\u7269\u53ef\u9760\u6027\u6740\u624b--\u53ea\u80fd\u901a\u8fc7 ICP-MS \u68c0\u6d4b\u5230\uff0c\u5149\u5b66\u68c0\u6d4b\u770b\u4e0d\u5230<\/p>\n    <\/div>\n  <\/div>\n  <div class=\"dc-tags\">\n    <span class=\"dc-tag red\">\u4e25\u91cd\u6027\uff1a\u5371\u6025\uff08\u6805\u6781\u6c27\u5316\uff09<\/span>\n    <span class=\"dc-tag purple\">\u68c0\u6d4b\uff1aICP-MS\uff08ppb \u7ea7\uff09<\/span>\n    <span class=\"dc-tag gray\">\u4e3b\u8981\u6c61\u67d3\u7269\uff1a\u94c1\u3001\u94a0\u3001\u94be\u3001\u94dc\u3001\u9499\u3001\u94dd<\/span>\n    <span class=\"dc-tag blue\">\u98ce\u9669\uff1aNBTI\/TDDB \u53ef\u9760\u6027\u6545\u969c<\/span>\n    <span class=\"dc-tag green\">\u89c4\u683c\uff1a&lt;5 ppb\/\u5143\u7d20\uff08\u9ad8\u7ea7\u8282\u70b9\uff09<\/span>\n  <\/div>\n\n  <p>\u91d1\u5c5e\u79bb\u5b50\u6c61\u67d3\u662f\u6700\u9690\u853d\u7684 CMP \u6ce5\u6d46\u7f3a\u9677\uff0c\u56e0\u4e3a\u6807\u51c6\u7684\u5149\u5b66\u548c\u7535\u5b50\u675f CMP \u540e\u68c0\u6d4b\u5de5\u5177\u5b8c\u5168\u770b\u4e0d\u5230\u5b83\u3002\u5728 CMP \u8fc7\u7a0b\u4e2d\u6c89\u79ef\u5728\u6676\u7247\u8868\u9762\u7684\u94c1\uff08Fe\uff09\u3001\u94a0\uff08Na\uff09\u3001\u94be\uff08K\uff09\u3001\u94dc\uff08Cu\uff09\u548c\u9499\uff08Ca\uff09\u79bb\u5b50\u4f1a\u5728\u968f\u540e\u7684\u70ed\u52a0\u5de5\u6b65\u9aa4\u4e2d\u8fc1\u79fb\u5230\u6805\u6781\u7535\u4ecb\u8d28\u4e2d\uff0c\u5f62\u6210\u6c27\u5316\u7269\u9677\u9631\u548c\u754c\u9762\u72b6\u6001\uff0c\u8868\u73b0\u4e3a\u8d1f\u504f\u7f6e\u6e29\u5ea6\u4e0d\u7a33\u5b9a\u6027\uff08NBTI\uff09\u6216\u65f6\u95f4\u76f8\u5173\u7535\u4ecb\u8d28\u51fb\u7a7f\uff08TDDB\uff09--\u8fd9\u4e9b\u53ef\u9760\u6027\u5931\u6548\u6a21\u5f0f\u901a\u5e38\u5728\u5668\u4ef6\u5230\u8fbe\u5ba2\u6237\u624b\u4e2d\u6570\u6708\u6216\u6570\u5e74\u540e\u624d\u4f1a\u51fa\u73b0\u3002.<\/p>\n\n  <h3>CMP \u6ce5\u6d46\u4e2d\u7684\u91d1\u5c5e\u6c61\u67d3\u6e90<\/h3>\n\n  <p><strong>\u539f\u6750\u6599\u6742\u8d28\u3002.<\/strong> \u6c14\u76f8\u6216\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u78e8\u6599\u662f\u7531\u56db\u6c2f\u5316\u7845 (SiCl\u2084) \u6216\u6b63\u7845\u9178\u56db\u4e59\u916f (TEOS) \u524d\u9a71\u4f53\u5408\u6210\u7684\uff0c\u6839\u636e\u5408\u6210\u7b49\u7ea7\u548c\u51c0\u5316\u4e25\u683c\u7a0b\u5ea6\u7684\u4e0d\u540c\uff0c\u5176\u4e2d\u53ef\u80fd\u542b\u6709ppb-ppm\u7ea7\u7684\u75d5\u91cf\u94c1\u548c\u94dd\u3002\u5148\u8fdb\u8282\u70b9\u7684 CMP \u6ce5\u6d46\u89c4\u683c\u901a\u5e38\u8981\u6c42\u6210\u54c1\u6ce5\u6d46\u4e2d\u94c1\u7684\u542b\u91cf\u5c0f\u4e8e 5 ppb\uff0c\u94dd\u7684\u542b\u91cf\u5c0f\u4e8e 5 ppb\u3002.<\/p>\n\n  <p><strong>\u914d\u7535\u7cfb\u7edf\u6ca5\u6ee4\u3002.<\/strong> \u4e0e\u91d1\u5c5e\u8868\u9762\uff08\u4e0d\u9508\u94a2\u914d\u4ef6\u3001\u9ec4\u94dc\u9600\u4f53\u3001\u94dc\u7ba1\uff09\u63a5\u89e6\u7684\u6ce5\u6d46\u4f1a\u6790\u51fa\u91d1\u5c5e\u79bb\u5b50\uff0c\u5176\u6790\u51fa\u91cf\u4e0e\u63a5\u89e6\u65f6\u95f4\u3001\u6e29\u5ea6\u548c pH \u503c\u6210\u6b63\u6bd4\u3002\u8fd9\u662f Cu CMP \u6ce5\u6d46\u914d\u9001\u4e2d Cu\u00b2\u207a \u7684\u4e00\u4e2a\u7279\u522b\u91cd\u8981\u7684\u6765\u6e90\uff0c\u6ce5\u6d46\u81ea\u8eab\u7684\u6c27\u5316\u5242\uff08H\u2082O\u2082\uff09\u4f1a\u8150\u8680\u672a\u6b63\u786e\u6307\u5b9a\u4e3a\u5185\u886c\u9ad8\u5bc6\u5ea6\u805a\u4e59\u70ef (HDPE) \u6216\u5168\u6c1f\u70f7\u6c27\u57fa (PFA) \u7684\u94dc\u914d\u9001\u90e8\u4ef6\u3002.<\/p>\n\n  <p><strong>\u6740\u83cc\u5242\u964d\u89e3\u3002.<\/strong> \u7528\u4e8e\u6ce5\u6d46\u50a8\u5b58\u7684\u5f02\u567b\u5511\u5549\u916e\u6740\u83cc\u5242\u542b\u6709\u786b\u548c\u6c2e\uff0c\u5728\u6e29\u5ea6\u6216 pH \u503c\u5347\u9ad8\u7684\u60c5\u51b5\u4e0b\uff0c\u5176\u5206\u89e3\u4ea7\u7269\u4f1a\u87af\u5408\u6ce5\u6d46\u5bb9\u5668\u58c1\u4e0a\u7684\u75d5\u91cf\u91d1\u5c5e\uff0c\u4ece\u800c\u5f15\u5165\u751f\u4ea7\u65f6\u539f\u59cb\u914d\u65b9\u4e2d\u4e0d\u5b58\u5728\u7684\u91d1\u5c5e\u6c61\u67d3\u3002.<\/p>\n\n  <h3>\u5404\u8282\u70b9\u7684\u91d1\u5c5e\u6c61\u67d3\u89c4\u683c<\/h3>\n  <div class=\"cmp-table-wrap\">\n    <table class=\"cmp-table\">\n      <thead><tr><th>\u8981\u7d20<\/th><th>\u98ce\u9669\u673a\u5236<\/th><th>\u89c4\u683c\uff1a\u226528 \u7eb3\u7c73<\/th><th>\u89c4\u683c7-14 \u7eb3\u7c73<\/th><th>\u89c4\u683c\uff1a \u22645nm<\/th><\/tr><\/thead>\n      <tbody>\n        <tr><td><strong>\u94c1<\/strong><\/td><td>\u6805\u6781\u6c27\u5316\u7269\u9631\u7684\u4ea7\u751f\uff1bH\u2082O\u2082\u5206\u89e3\u50ac\u5316\u5242<\/td><td>&lt;20 ppb<\/td><td>&lt;10 ppb<\/td><td>&lt;5 ppb<\/td><\/tr>\n        <tr><td><strong>Na<\/strong><\/td><td>\u6805\u6781 SiO\u2082\u4e2d\u7684\u79fb\u52a8\u79bb\u5b50\uff1b\u9608\u503c\u7535\u538b\u504f\u79fb<\/td><td>&lt;50 ppb<\/td><td>&lt;20 ppb<\/td><td>&lt;5 ppb<\/td><\/tr>\n        <tr><td><strong>K<\/strong><\/td><td>\u79fb\u52a8\u79bb\u5b50\uff1b\u4e0e Na \u7684\u673a\u5236\u76f8\u540c<\/td><td>&lt;50 ppb<\/td><td>&lt;20 ppb<\/td><td>&lt;5 ppb<\/td><\/tr>\n        <tr><td><strong>\u94dc<\/strong><\/td><td>\u7845\u4e2d\u7684\u6df1\u5c42\u9677\u9631\uff1b\u901a\u8fc7\u4ecb\u8d28\u7684\u5feb\u901f\u6269\u6563<\/td><td>&lt;10 ppb<\/td><td>&lt;5 ppb<\/td><td>&lt;2 ppb<\/td><\/tr>\n        <tr><td><strong>Al<\/strong><\/td><td>\u7845\/\u6c27\u5316\u7845\u2082\u754c\u9762\u6001\u751f\u6210<\/td><td>&lt;50 ppb<\/td><td>&lt;20 ppb<\/td><td>&lt;10 ppb<\/td><\/tr>\n        <tr><td><strong>\u9499\u3001\u9541<\/strong><\/td><td>\u9897\u7c92\u51dd\u805a\u89e6\u53d1\u5668\uff08\u4e8c\u4ef7\uff09<\/td><td>&lt;100 ppb<\/td><td>&lt;20 ppb<\/td><td>&lt;5 ppb<\/td><\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n<\/div>\n\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 5 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<h2 id=\"dishing-erosion\">5.\u7f3a\u9677 4\uff1a\u6316\u6ce5\u548c\u4fb5\u8680 - \u6ce5\u6d46\u4e00\u4fa7\u7684\u6839\u672c\u539f\u56e0<\/h2>\n\n<div class=\"defect-card dishing\">\n  <div class=\"dc-header\">\n    <div class=\"dc-icon\">\ud83d\udd35<\/div>\n    <div>\n      <p class=\"dc-title\">\u6316\u6ce5\u548c\u4fb5\u8680<\/p>\n      <p class=\"dc-subtitle\">\u94dc\u4e92\u8fde\u4e2d\u7684 RC \u5ef6\u8fdf\u6740\u624b--\u6d46\u6599\u4fa7\u63a7\u5236\u6746<\/p>\n    <\/div>\n  <\/div>\n  <div class=\"dc-tags\">\n    <span class=\"dc-tag red\">\u4e25\u91cd\u7a0b\u5ea6\uff1a\u9ad8<\/span>\n    <span class=\"dc-tag blue\">\u6d4b\u91cf\u539f\u5b50\u529b\u663e\u5fae\u955c\/\u6d4b\u9488\u8f6e\u5ed3\u4eea\/\u6563\u5c04\u8ba1<\/span>\n    <span class=\"dc-tag gray\">\u4e3b\u8584\u819c\uff1a\u94dc BEOL\uff08\u6240\u6709\u8282\u70b9\uff09<\/span>\n    <span class=\"dc-tag green\">\u5148\u8fdb\u7684\u8282\u70b9\u89c4\u683c\uff1a\u94bb\u5b54 &lt;20\u7eb3\u7c73\uff0c\u4fb5\u8680 &lt;15\u7eb3\u7c73<\/span>\n  <\/div>\n\n  <p>\u5728\u6211\u4eec\u7684\u300a\u94dc\u52a0\u5de5\u5de5\u827a\u5b66\u300b\u4e2d\uff0c\u5bf9\u94dc\u52a0\u5de5\u5de5\u827a\u4e2d\u7684\u94bb\u5b54\u548c\u4fb5\u8680\u8fdb\u884c\u4e86\u5e7f\u6cdb\u4ecb\u7ecd\u3002 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/copper-cmp-slurry-dual-damascene-process-formulation-defect-control-complete-engineering-guide\/\">\u94dc CMP \u6ce5\u6d46<\/a> \u6307\u5357\u3002\u672c\u8282\u7279\u522b\u5173\u6ce8\u6ce5\u6d46\u65b9\u9762\u7684\u53c2\u6570\uff0c\u8fd9\u4e9b\u53c2\u6570\u662f\u63a7\u5236\u8131\u6a21\u548c\u4fb5\u8680\u7684\u4e3b\u8981\u6760\u6746\uff0c\u6709\u522b\u4e8e\u5de5\u827a\/\u8bbe\u5907\u6760\u6746\uff08\u7814\u78e8\u57ab\u786c\u5ea6\u3001\u4e0b\u538b\u529b\u3001\u8fc7\u5ea6\u629b\u5149\u65f6\u95f4\uff09\u3002.<\/p>\n\n  <h3>\u6ce5\u6d46\u53c2\u6570<\/h3>\n  <ul>\n    <li><strong>\u6b65\u9aa4 2 \u6ce5\u6d46\u4e2d\u7684 H\u2082O\u2082 \u6d53\u5ea6\uff1a<\/strong> \u963b\u6321\u5c42\u6d46\u6599\u4e2d\u7684 H\u2082O\u2082\u6bcf\u589e\u52a0 0.1 wt%\uff0c\u51f9\u9677\u7279\u5f81\u4e2d\u94dc\u7684\u5316\u5b66\u6eb6\u89e3\u5c31\u4f1a\u589e\u52a0\u7ea6 3-5 nm\uff0c\u4e0e\u673a\u68b0\u629b\u5149\u65e0\u5173\u3002\u8fd9\u79cd\u5173\u7cfb\u4f7f\u5f97 H\u2082O\u2082 \u7684\u68c0\u6d4b\u7cbe\u5ea6\uff08\u00b13% \u76f8\u5bf9\u76ee\u6807\u503c\uff09\u6210\u4e3a\u6392\u6599\u63a7\u5236\u6700\u5173\u952e\u7684\u4f20\u5165\u8d28\u91cf\u63a7\u5236\u53c2\u6570\u4e4b\u4e00\u3002.<\/li>\n    <li><strong>BTA \u6d53\u5ea6\uff1a<\/strong> \u963b\u9694\u6ce5\u6d46\u4e2d\u7684 BTA \u542b\u91cf\u4e0d\u8db3\u662f\u6700\u76f4\u63a5\u7684\u6ce5\u6d46\u53ef\u63a7\u5265\u79bb\u9a71\u52a8\u56e0\u7d20\u3002BTA \u5728\u94dc\u51f9\u9677\u533a\u57df\u8d77\u7740\u9009\u62e9\u6027\u8150\u8680\u6291\u5236\u5242\u7684\u4f5c\u7528--\u5176\u6d53\u5ea6\u5fc5\u987b\u4fdd\u6301\u5728\u4e00\u4e2a\u72ed\u7a84\u7684\u6700\u4f73\u7a97\u53e3\u8303\u56f4\u5185\uff08\u901a\u5e38\u4e3a 50-200 ppm\uff09\uff0c\u5728\u6b64\u8303\u56f4\u5185\uff0c\u5b83\u65e2\u80fd\u6291\u5236\u5316\u5b66\u5265\u8680\uff0c\u53c8\u4e0d\u4f1a\u8fc7\u5ea6\u6291\u5236\u76ee\u6807\u673a\u68b0\u53bb\u9664\u7387\u3002.<\/li>\n    <li><strong>\u963b\u9694\u6ce5\u6d46\u7684 pH \u503c\uff1a<\/strong> pH \u503c\u65e2\u51b3\u5b9a\u4e86 H\u2082O\u2082 \u6c27\u5316\u901f\u7387\uff0c\u4e5f\u51b3\u5b9a\u4e86\u94dc\u8868\u9762\u7684 BTA \u5438\u9644\u5f3a\u5ea6\u3002 pH \u503c\u9ad8\u4e8e\u6700\u4f73\u8303\u56f4\u4f1a\u964d\u4f4e BTA \u5438\u9644\u6548\u7387\uff0c\u5373\u4f7f\u5728 BTA \u6d53\u5ea6\u8db3\u591f\u7684\u60c5\u51b5\u4e0b\uff0c\u4e5f\u4f1a\u589e\u52a0\u5206\u5c42\u3002.<\/li>\n  <\/ul>\n\n  <h3>\u6ce5\u6d46\u53c2\u6570\u5bf9\u4fb5\u8680\u7684\u5f71\u54cd<\/h3>\n  <ul>\n    <li><strong>\u963b\u6321\u5c42\u6d46\u6599\u4e2d\u7684\u6c27\u5316\u7845\u2082\/\u7535\u4ecb\u8d28 MRR\uff1a<\/strong> \u76f8\u5bf9\u4e8e\u6b65\u9aa4 2 \u6ce5\u6d46\u4e2d\u7684\u94dc\u53bb\u9664\u7387\uff0c\u4ecb\u8d28\u53bb\u9664\u7387\u8fc7\u9ad8\u4f1a\u9020\u6210\u5bc6\u96c6\u94dc\u9635\u5217\u533a\u57df\u7684\u8150\u8680\u3002\u963b\u6321\u5c42\u6d46\u6599\u7684 SiO\u2082:Cu \u9009\u62e9\u6027\u5fc5\u987b\u8c03\u6574\u5230\u63a5\u8fd1 1:1\uff1bSiO\u2082:Cu &gt;1.5:1 \u7684\u963b\u6321\u5c42\u6d46\u6599\u4f1a\u5728\u56fe\u6848\u5bc6\u5ea6\u8d85\u8fc7 40% \u65f6\u7cfb\u7edf\u6027\u5730\u4ea7\u751f\u4fb5\u8680\u8d85\u6807\u3002.<\/li>\n    <li><strong>\u963b\u9694\u6ce5\u6d46\u4e2d\u7684\u78e8\u6599\u7c92\u5ea6\uff1a<\/strong> \u76f8\u5bf9\u4e8e\u94dc\u7684 MRR\uff0c\u6b65\u9aa4 2 \u6ce5\u6d46\u4e2d\u8f83\u5927\u7684\u7814\u78e8\u9897\u7c92\u4f1a\u4e0d\u6210\u6bd4\u4f8b\u5730\u589e\u52a0\u7535\u4ecb\u8d28\u7684 MRR\uff0c\u56e0\u4e3a\u4e0e\u8f83\u8f6f\u7535\u4ecb\u8d28\u7684\u8f83\u5927\u63a5\u89e6\u9762\u79ef\u4ea7\u751f\u7684\u53bb\u9664\u7387\u9ad8\u4e8e\u4e0e\u8f83\u786c\u94dc\u8868\u9762\u7684\u53bb\u9664\u7387\u3002\u56e0\u6b64\uff0c\u63a7\u5236\u963b\u6321\u5c42\u6d46\u6599\u4e2d\u7684 D99 \u76f4\u63a5\u5173\u7cfb\u5230\u4fb5\u8680\u6027\u80fd\u3002.<\/li>\n  <\/ul>\n<\/div>\n\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 6 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<h2 id=\"corrosion\">6.\u7f3a\u9677 5\uff1a\u8868\u9762\u8150\u8680\u3001\u70b9\u8680\u548c\u7535\u8680<\/h2>\n\n<div class=\"defect-card corrosion\">\n  <div class=\"dc-header\">\n    <div class=\"dc-icon\">\ud83d\udfe1<\/div>\n    <div>\n      <p class=\"dc-title\">\u8868\u9762\u8150\u8680\u3001\u70b9\u8680\u548c\u7535\u8680<\/p>\n      <p class=\"dc-subtitle\">\u65e0\u673a\u68b0\u63a5\u89e6\u7684\u5316\u5b66\u6eb6\u89e3--\u201c\u9759\u6001\u8680\u523b \u201d\u5931\u6548\u6a21\u5f0f<\/p>\n    <\/div>\n  <\/div>\n  <div class=\"dc-tags\">\n    <span class=\"dc-tag red\">\u4e25\u91cd\u7a0b\u5ea6\uff1a\u4e2d\u5ea6-\u9ad8\u5ea6\uff08\u91d1\u5c5e\u5c42\uff09<\/span>\n    <span class=\"dc-tag blue\">\u68c0\u6d4b\uff1aSEM\u3001EDX\u3001AFM<\/span>\n    <span class=\"dc-tag gray\">\u8584\u819c\uff1a\u94dc\u3001\u94b4\u3001\u94a8\uff08\u9633\u6781\u6eb6\u89e3\uff09<\/span>\n    <span class=\"dc-tag purple\">\u6839\u672c\u539f\u56e0\uff1a\u6c27\u5316\u5242\/\u6291\u5236\u5242\u5931\u8861<\/span>\n  <\/div>\n\n  <p>\u8868\u9762\u8150\u8680\u548c\u70b9\u8680\u53d1\u751f\u5728\u6d46\u6599\u5316\u5b66\u6027\u8d28\u5bf9\u91d1\u5c5e\u819c\u4ea7\u751f\u51c0\u5316\u5b66\u6eb6\u89e3\u65f6\uff0c\u5373\u4f7f\u6ca1\u6709\u7814\u78e8\u673a\u68b0\u63a5\u89e6--\u5b9e\u9645\u4e0a\u662f\u5bf9\u76ee\u6807\u6216\u5468\u56f4\u91d1\u5c5e\u7279\u5f81\u7684\u6e7f\u8680\u523b\u3002\u8fd9\u4e0e\u534f\u540c CMP \u673a\u5236\u4e2d\u53d7\u63a7\u7684\u3001\u6709\u610f\u7684\u5316\u5b66\u6210\u5206\u4e0d\u540c\uff1b\u8150\u8680\u662f <em>\u5931\u63a7<\/em> \u629b\u5149\u6b65\u9aa4\u7ed3\u675f\u540e\u4ecd\u5728\u7ee7\u7eed\u7684\u5316\u5b66\u53bb\u9664\uff08\u5728\u6ce5\u6d46\u5751\u65f6\u95f4\u3001\u51b2\u6d17\u5ef6\u8fdf\u6216\u7ec8\u70b9\u68c0\u6d4b\u4e0d\u5145\u5206\u671f\u95f4\uff09\u3002.<\/p>\n\n  <h3>\u91d1\u5c5e\u754c\u9762\u7684\u7535\u5316\u5b66\u8150\u8680<\/h3>\n  <p>\u5f53\u4e24\u79cd\u4e0d\u540c\u7684\u91d1\u5c5e\u5728\u6c34\u6027\u7535\u89e3\u6db2\u4e2d\u53d1\u751f\u7535\u63a5\u89e6\u65f6\uff0c\u5c31\u4f1a\u5f62\u6210\u7535\u5076\uff0c\u9633\u6781\u8f83\u5f3a\u7684\u91d1\u5c5e\u4f1a\u4f18\u5148\u53d7\u5230\u8150\u8680\u3002\u5728\u534a\u5bfc\u4f53 CMP \u4e2d\uff0c\u6700\u91cd\u8981\u7684\u7535\u5076\u662f<\/p>\n  <ul>\n    <li><strong>Cu \/ TaN \u5728\u7b2c 2 \u6b65\u969c\u788d CMP\uff1a<\/strong> \u94dc\uff08\u5728\u78b1\u6027\u6761\u4ef6\u4e0b\u9633\u6781\u6027\u66f4\u5f3a\uff09\u4f1a\u4f18\u5148\u6eb6\u89e3\u5728\u94dc\/TaN \u63a5\u53e3\u4e0a\uff0c\u4ece\u800c\u5728\u901a\u5b54\u4fa7\u58c1\u548c\u63a5\u89e6\u8fb9\u7f18\u4ea7\u751f\u4f18\u5148\u70b9\u8680\uff0c\u800c\u8fd9\u6b63\u662f\u4e92\u8fde\u5668\u4ef6\u4e2d\u7535\u963b\u654f\u611f\u5ea6\u6700\u9ad8\u7684\u4f4d\u7f6e\u3002.<\/li>\n    <li><strong>MOL \u63a5\u89e6\u5f0f CMP \u7684 Co \/ TiN\uff1a<\/strong> \u5728\u5f88\u5bbd\u7684 pH \u503c\u8303\u56f4\u5185\uff0c\u94b4\u7684\u9633\u6781\u6027\u6bd4 TiN \u5f3a\uff0c\u4ece\u800c\u5bfc\u81f4\u94b4\u4f18\u5148\u6eb6\u89e3\uff0c\u5e76\u5728\u94b4\/TiN \u63a5\u89e6\u5468\u8fb9\u5f62\u6210\u5fae\u89c2\u70b9\u8680--\u8fd9\u5c31\u662f\u94b4 CMP \u7535\u5316\u5b66\u8150\u8680\u96be\u9898\u7684\u6839\u672c\u539f\u56e0\u3002 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-for-advanced-nodes-5nm-3nm-2nm-beyond-technical-challenges-innovations\/\">\u9ad8\u7ea7\u8282\u70b9 CMP<\/a> \u6587\u7ae0.<\/li>\n    <li><strong>\u94a8\u89e6\u70b9 CMP \u7684 W \/ Ti\uff1a<\/strong> \u5728\u9178\u6027\u77ff\u6d46\u73af\u5883\u4e2d\uff0c\u94a8\u76f8\u5bf9\u4e8e\u949b\u886c\u57ab\u800c\u8a00\u662f\u8f7b\u5fae\u9633\u6781\u6027\u7684\uff0c\u5982\u679c\u77ff\u6d46\u4e2d Fe\uff08NO\u2083\uff09\u2083 \u6c27\u5316\u5242\u7684\u6d53\u5ea6\u6ca1\u6709\u5f97\u5230\u7cbe\u786e\u63a7\u5236\uff0c\u5c31\u4f1a\u5728\u94a8\/\u949b\u754c\u9762\u4e0a\u4ea7\u751f\u5fae\u70b9\u8680\u3002.<\/li>\n  <\/ul>\n\n  <h3>\u9884\u9632\uff1a\u6291\u5236\u5242\u548c\u6c27\u5316\u5242\u7684\u5e73\u8861<\/h3>\n  <p>\u9632\u8150\u8680\u9700\u8981\u5bf9\u6c27\u5316\u5242\uff08\u63d0\u4f9b\u53bb\u9664 CMP \u6240\u9700\u7684\u53d7\u63a7\u6c27\u5316\uff09\u548c\u6291\u5236\u5242\uff08\u6291\u5236\u672a\u4e0e\u78e8\u6599\u63a5\u89e6\u533a\u57df\u7684\u5931\u63a7\u6eb6\u89e3\uff09\u8fdb\u884c\u5171\u540c\u4f18\u5316\u3002\u5173\u952e\u63a7\u5236\u53c2\u6570\u5305\u62ec\uff1a\u6c27\u5316\u5242\u6d53\u5ea6\u6279\u6b21\u95f4\u7cbe\u5ea6\uff08\u00b13% \u76f8\u5bf9\u503c\uff09\uff1b\u6291\u5236\u5242\u6d53\u5ea6\uff08BTA \u7528\u4e8e\u94dc\uff0c\u82ef\u5e76\u54aa\u5511\u884d\u751f\u7269\u7528\u4e8e\u94b4\uff09\uff1bpH \u503c\u63a7\u5236\uff08\u5148\u8fdb\u8282\u70b9\u7684\u76ee\u6807\u503c\u4e3a \u00b10.1\uff09\uff1b\u4ee5\u53ca\u6700\u5927\u9650\u5ea6\u5730\u7f29\u77ed \u201c\u9759\u6001\u8680\u523b\u65f6\u95f4\u201d\uff0c\u5728\u6b64\u671f\u95f4\uff0c\u6d46\u6599\u4e0e\u6676\u7247\u8868\u9762\u63a5\u89e6\u800c\u4e0d\u53d1\u751f\u57ab\u8fd0\u52a8\uff0c\u8fd9\u662f\u4e00\u9879\u5173\u952e\u7684\u5de5\u827a\u89c4\u7a0b\u8981\u6c42\uff0c\u5fc5\u987b\u72ec\u7acb\u4e8e\u6d46\u6599\u5316\u5b66\u8fdb\u884c\u63a7\u5236\u3002.<\/p>\n<\/div>\n\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 7 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<h2 id=\"residue\">7.\u7f3a\u9677 6\uff1a\u6b8b\u7559\u6ce5\u6d46\u9897\u7c92\u548c CMP \u540e\u7684\u6e05\u6d01\u5ea6<\/h2>\n\n<div class=\"defect-card erosion\">\n  <div class=\"dc-header\">\n    <div class=\"dc-icon\">\ud83d\udfe2<\/div>\n    <div>\n      <p class=\"dc-title\">\u6b8b\u7559\u6ce5\u6d46\u9897\u7c92<\/p>\n      <p class=\"dc-subtitle\">\u540e CMP \u6e05\u6d01\u5ea6--\u6d46\u6599\u5316\u5b66\u4e0e\u6e05\u6d01\u6a21\u5757\u6027\u80fd\u4e4b\u95f4\u7684\u754c\u9762<\/p>\n    <\/div>\n  <\/div>\n  <div class=\"dc-tags\">\n    <span class=\"dc-tag gray\">\u4e25\u91cd\u7a0b\u5ea6\uff1a\u4f4e\uff08\u53ef\u6e05\u7406\uff09\u81f3\u9ad8\uff08\u5982\u4e0d\u6e05\u9664\uff09<\/span>\n    <span class=\"dc-tag blue\">\u68c0\u67e5\uff1aSP7 \u6697\u573a\u6e05\u6d01\u540e\u7f3a\u9677\u56fe<\/span>\n    <span class=\"dc-tag green\">\u6e05\u6d01\uff1aPVA \u5237 + \u7a00 NH\u2084OH + \u8d85\u58f0\u6ce2<\/span>\n    <span class=\"dc-tag purple\">\u6ce5\u6d46\u56e0\u7d20\uff1a\u9897\u7c92\u8868\u9762\u7535\u8377\u3001\u9644\u7740\u529b<\/span>\n  <\/div>\n\n  <p>\u5728 CMP \u4e4b\u540e\uff0c\u6676\u7247\u8868\u9762\u4f1a\u8986\u76d6\u4e00\u5c42\u542b\u6709\u7814\u78e8\u9897\u7c92\u3001\u6eb6\u89e3\u91d1\u5c5e\u79bb\u5b50\u3001\u53cd\u5e94\u526f\u4ea7\u7269\u548c\u5316\u5b66\u6dfb\u52a0\u5242\u7684\u6d46\u6599\u8584\u819c\u3002\u540e CMP \u6e05\u6d01\uff08\u901a\u5e38\u662f\u7528\u7a00 NH\u2084OH \u6eb6\u6db2\u8fdb\u884c PVA \u5237\u64e6\u6d17 + \u8d85\u58f0\u6ce2\u6405\u62cc\uff09\u5fc5\u987b\u53bb\u9664\u6240\u6709\u8fd9\u4e9b\u6b8b\u7559\u7269\uff0c\u4f7f\u5176\u4f4e\u4e8e\u4e0b\u4e00\u5de5\u827a\u6b65\u9aa4\u7684\u8fdb\u6599\u68c0\u9a8c\u9608\u503c\u3002\u540e CMP \u8868\u9762\u7684\u6e05\u6d01\u5ea6\u662f\u6d46\u6599\u5316\u5b66\u6027\u8d28\u548c\u6e05\u6d01\u6a21\u5757\u5316\u5b66\u6027\u8d28\u7684\u5171\u540c\u4f5c\u7528\uff0c\u4e24\u8005\u90fd\u4e0d\u80fd\u5355\u72ec\u8fdb\u884c\u4f18\u5316\u3002.<\/p>\n\n  <p>\u5bf9 CMP \u540e\u6d01\u51c0\u5ea6\u5f71\u54cd\u6700\u5927\u7684\u6ce5\u6d46\u4fa7\u53c2\u6570\u662f <strong>\u78e8\u6599\u8868\u9762\u7535\u8377<\/strong> (\u9634\u79bb\u5b50\u4e8c\u6c27\u5316\u7845\u4e0e\u9633\u79bb\u5b50\u78e8\u6599\u76f8\u6bd4\uff0c\u66f4\u5bb9\u6613\u5728\u78b1\u6027\u6e05\u6d01\u5316\u5b66\u53cd\u5e94\u4e2d\u901a\u8fc7\u9759\u7535\u6392\u65a5\u4f5c\u7528\u4ece\u4e5f\u662f\u8d1f\u6781\u7684\u6676\u7247\u8868\u9762\u53bb\u9664\uff0c\u800c\u9633\u79bb\u5b50\u78e8\u6599\u4f1a\u9759\u7535\u7c98\u9644\u5728\u8d1f\u6781\u8868\u9762\u4e0a\uff09\uff1b; <strong>\u7c92\u5f84<\/strong> (\u8f83\u5927\u7684\u6b8b\u7559\u9897\u7c92\u901a\u8fc7\u8303\u5fb7\u534e\u529b\u7c98\u9644\u5f97\u66f4\u7262\u56fa\uff0c\u9700\u8981\u66f4\u5f3a\u529b\u7684\u6e05\u6d01\u5316\u5b66\u6216\u5237\u5b50\u63a5\u89e6\u529b\u624d\u80fd\u6e05\u9664\uff09\uff1b\u4ee5\u53ca <strong>BTA \u6b8b\u7559\u7269<\/strong> \u5728\u94dc CMP \u4e2d\uff08CMP \u540e\u94dc\u8868\u9762\u4e0a\u7684\u758f\u6c34\u6027 Cu-BTA \u590d\u5408\u7269\u5c42\u9700\u8981\u7279\u5b9a\u7684\u6e05\u6d01\u5316\u5b66\u836f\u5242\uff08\u542b\u7a00\u76d0\u9178\u6216\u67e0\u6aac\u9178\uff09\u6765\u7834\u574f\u590d\u5408\u7269\u5e76\u53bb\u9664 BTA\uff09\u3002.<\/p>\n\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 8 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<h2 id=\"incoming-qc\">8.\u5165\u5883\u6ce5\u6d46\u8d28\u91cf\u63a7\u5236\uff1a\u89c4\u683c\u548c\u6d4b\u91cf\u65b9\u6cd5<\/h2>\n\n<p>\u8fdb\u6599\u8d28\u91cf\u63a7\u5236\u662f\u9632\u6b62\u6d46\u6599\u5f15\u8d77\u7f3a\u9677\u504f\u79fb\u7684\u7b2c\u4e00\u9053\u6700\u7ecf\u6d4e\u6709\u6548\u7684\u5c4f\u969c\u3002\u4e0b\u8868\u5b9a\u4e49\u4e86\u5148\u8fdb\u8282\u70b9 CMP \u6ce5\u6d46\u7684\u7efc\u5408\u8fdb\u6599\u8d28\u91cf\u63a7\u5236\u89c4\u8303\u6846\u67b6\uff0c\u5305\u62ec\u6d4b\u91cf\u65b9\u6cd5\u3001\u8bbe\u5907\u4ee5\u53ca\u6bcf\u4e2a\u53c2\u6570\u53ef\u9632\u8303\u7684\u7f3a\u9677\u98ce\u9669\u3002.<\/p>\n\n<div class=\"qc-grid\">\n  <div class=\"qc-card warn\">\n    <div class=\"qcc-param\">LPC (&gt;0.5 \u03bcm)<\/div>\n    <div class=\"qcc-spec\">&lt;50\/mL<\/div>\n    <div class=\"qcc-note\">Accusizer 780 \/ PAMAS S4031\u3002\u4e3b\u8981\u5212\u75d5\u98ce\u9669\u6307\u6807\u3002\u5bf9\u4e8e AFS \u548c 3 \u7eb3\u7c73\u4ee5\u4e0b\u5e94\u7528\uff0c\u62e7\u7d27\u81f3 &lt;20\/mL\u3002.<\/div>\n  <\/div>\n  <div class=\"qc-card warn\">\n    <div class=\"qcc-param\">Zeta \u7535\u4f4d<\/div>\n    <div class=\"qcc-spec\">|\u03b6| &gt;35 mV<\/div>\n    <div class=\"qcc-note\">\u9a6c\u5c14\u6587 Zetasizer\u3002\u80f6\u4f53\u7a33\u5b9a\u6027\u6307\u6807\u3002\u8d8b\u52bf\u76d1\u63a7\u6279\u6b21\u4e4b\u95f4\u7684\u53d8\u5316\uff1b\u5982\u679c\u4ece\u57fa\u7ebf\u4e0b\u964d &gt;5 mV\uff0c\u5219\u6807\u8bb0\u4e3a\u4e0b\u964d\u3002.<\/div>\n  <\/div>\n  <div class=\"qc-card\">\n    <div class=\"qcc-param\">pH \u503c<\/div>\n    <div class=\"qcc-spec\">\u76ee\u6807 \u00b10.1<\/div>\n    <div class=\"qcc-note\">\u6821\u51c6 pH \u7535\u6781\u3002\u5728\u751f\u4ea7\u70b9\u548c\u4f7f\u7528\u70b9\u8fdb\u884c\u9a8c\u8bc1\u3002\u6f02\u79fb\u8868\u660e\u53d7\u5230\u6c61\u67d3\u6216\u5438\u6536\u4e86 CO\u2082\u3002.<\/div>\n  <\/div>\n  <div class=\"qc-card\">\n    <div class=\"qcc-param\">D50 \u7c92\u5f84<\/div>\n    <div class=\"qcc-spec\">\u76ee\u6807 \u00b15 \u7eb3\u7c73<\/div>\n    <div class=\"qcc-note\">DLS \uff08Malvern Mastersizer\uff09\u3002\u9a8c\u8bc1\u5e73\u5747\u7c92\u5ea6\u662f\u5426\u7b26\u5408\u89c4\u8303\u3002\u4e0e D50 \u76f8\u6bd4\uff0cD99 \u5bf9\u5212\u75d5\u98ce\u9669\u66f4\u4e3a\u91cd\u8981\u3002.<\/div>\n  <\/div>\n  <div class=\"qc-card warn\">\n    <div class=\"qcc-param\">D99 \u7c92\u5f84<\/div>\n    <div class=\"qcc-spec\">&lt;200 \u7eb3\u7c73<\/div>\n    <div class=\"qcc-note\">DLS \u6216\u7eb3\u7c73\u7c92\u5b50\u8ddf\u8e2a\u3002\u5bf9\u4e8e 5nm \u8282\u70b9\u4ee5\u4e0b\u7684\u6d46\u6599\uff0c\u4e25\u683c\u63a7\u5236\u5728 &lt;150 nm\u3002\u4e3b\u8981\u7684\u5927\u9897\u7c92\u5c3e\u90e8\u6307\u6807\u3002.<\/div>\n  <\/div>\n  <div class=\"qc-card warn\">\n    <div class=\"qcc-param\">\u94c1\u3001\u94a0\u3001\u94be\u3001\u94dc<\/div>\n    <div class=\"qcc-spec\">\u5404 &lt;5 ppb<\/div>\n    <div class=\"qcc-note\">ICP-MS (Agilent 7900)\u3002\u9ad8\u7ea7\u8282\u70b9\u89c4\u683c\u3002\u68c0\u6d4b\u6bcf\u4e2a\u6279\u6b21\u7684\u94c1\uff08H\u2082O\u2082\u50ac\u5316\u5242\uff09\u548c\u94dc\uff08\u6805\u6781\u6c27\u5316\u7269\u6740\u624b\uff09\u3002.<\/div>\n  <\/div>\n  <div class=\"qc-card\">\n    <div class=\"qcc-param\">\u6c27\u5316\u5242\u5316\u9a8c\uff08H\u2082O\u2082)<\/div>\n    <div class=\"qcc-spec\">\u00b13%\u76f8\u5bf9\u503c<\/div>\n    <div class=\"qcc-note\">\u9ad8\u9530\u9178\u76d0\u6ef4\u5b9a\u6cd5\u6216\u7d2b\u5916\u5206\u5149\u5149\u5ea6\u6cd5\u3002\u53ef\u63a7\u5236 MRR \u548c\u5206\u76d8\u3002\u5bf9\u6e29\u5ea6\u654f\u611f--\u5728\u53d7\u63a7\u6e29\u5ea6\u4e0b\u6d4b\u8bd5\u3002.<\/div>\n  <\/div>\n  <div class=\"qc-card\">\n    <div class=\"qcc-param\">\u78e8\u6599 wt%<\/div>\n    <div class=\"qcc-spec\">\u00b10.2 wt%<\/div>\n    <div class=\"qcc-note\">\u5e72\u71e5\u540e\u8fdb\u884c TGA\uff08\u70ed\u91cd\uff09\u6216\u91cd\u91cf\u6d4b\u5b9a\u3002\u63a7\u5236\u673a\u68b0\u53bb\u9664\u5bf9 MRR \u7684\u8d21\u732e\u3002.<\/div>\n  <\/div>\n  <div class=\"qc-card\">\n    <div class=\"qcc-param\">\u7c98\u5ea6<\/div>\n    <div class=\"qcc-spec\">\u76ee\u6807\u7684\u00b15%<\/div>\n    <div class=\"qcc-note\">\u5e03\u9c81\u514b\u83f2\u5c14\u5fb7\u7c98\u5ea6\u8ba1\u3002\u8868\u793a\u805a\u5408\u7269\/\u6dfb\u52a0\u5242\u6d53\u5ea6\u3002\u7c98\u5ea6\u660e\u663e\u53d8\u5316\u8bf4\u660e\u914d\u65b9\u6709\u8bef\u6216\u53d7\u5230\u6c61\u67d3\u3002.<\/div>\n  <\/div>\n  <div class=\"qc-card\">\n    <div class=\"qcc-param\">\u4fdd\u8d28\u671f\/\u6279\u9f84<\/div>\n    <div class=\"qcc-spec\">\u5728 CoA \u65e5\u671f\u5185<\/div>\n    <div class=\"qcc-note\">\u6838\u5b9e\u5206\u6790\u8bc1\u4e66\u4e0a\u7684\u751f\u4ea7\u65e5\u671f\u3002\u5bf9\u4e8e\u9ad8\u7ea7\u8282\u70b9\u5e94\u7528\uff0c\u4e0d\u63a5\u53d7 30 \u5929\u5185\u5230\u671f\u7684\u6279\u6b21\u3002.<\/div>\n  <\/div>\n<\/div>\n\n<div class=\"cmp-box green\">\n  <p class=\"box-title\">\u2705 \u5165\u6599\u6ce5\u6d46\u8d28\u91cf\u63a7\u5236\u7684\u7edf\u8ba1\u8fc7\u7a0b\u63a7\u5236<\/p>\n  <p style=\"margin:0;\">\u5148\u8fdb\u7684\u8282\u70b9\u5de5\u5382\u5bf9\u8fdb\u6599\u6d46\u6599\u8d28\u91cf\u63a7\u5236\u6570\u636e\u5b9e\u65bd SPC\uff0c\u800c\u4e0d\u4ec5\u4ec5\u662f\u901a\u8fc7\/\u672a\u901a\u8fc7\u4e8c\u5143\u9a8c\u6536\u3002\u5728\u9010\u6279\u56fe\u8868\u4e0a\u8ddf\u8e2a LPC\u3001zeta \u7535\u4f4d\u3001pH \u503c\u548c H\u2082O\u2082 \u5316\u9a8c\u7684\u6eda\u52a8\u5e73\u5747\u503c\u548c \u00b13\u03c3 \u63a7\u5236\u9650\uff0c\u53ef\u5728\u5355\u4e2a\u6279\u6b21\u89e6\u53d1\u786c\u6027\u89c4\u683c\u4e0d\u5408\u683c\u524d\u51e0\u5468\u68c0\u6d4b\u5230\u9010\u6e10\u6f02\u79fb\uff08\u8868\u660e\u4f9b\u5e94\u5546\u5de5\u827a\u53d1\u751f\u53d8\u5316\uff09\u3002\u5e94\u7528\u4e8e\u8d28\u91cf\u63a7\u5236\u6570\u636e\u6d41\u7684\u63a7\u5236\u56fe\u89c4\u5219\uff08\u7eb3\u5c14\u900a\u89c4\u5219\u6216\u897f\u7535\u89c4\u5219\uff09\u6bd4\u5355\u7eaf\u7684\u89c4\u683c\u9a8c\u6536\u80fd\u66f4\u65e9\u5730\u9884\u9632\u7f3a\u9677\u3002.<\/p>\n<\/div>\n\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 9 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<h2 id=\"rca\">9.CMP \u7f3a\u9677\u504f\u79bb\u7684\u6839\u672c\u539f\u56e0\u5206\u6790\u5de5\u4f5c\u6d41\u7a0b<\/h2>\n\n<div class=\"cmp-cta\">\n  <h3>\u9047\u5230 CMP \u7f3a\u9677\u6e38\u89c8\uff1f<\/h3>\n  <p>\u5409\u4e4b\u5c9b\u7535\u5b50\u79d1\u6280\u7684\u5e94\u7528\u5de5\u7a0b\u56e2\u961f\u53ef\u4e3a\u60a8\u7684\u5de5\u5382\u7684\u6d46\u6599\u9274\u5b9a\u548c\u751f\u4ea7\u504f\u5dee\u8c03\u67e5\u63d0\u4f9b\u7f3a\u9677\u6839\u6e90\u5206\u6790\u652f\u6301\u3002.<\/p>\n  <a href=\"https:\/\/jeez-semicon.com\/zh\/contact\/\">\u8bf7\u6c42\u5de5\u7a0b\u652f\u6301 \u2192<\/a>\n<\/div>\n\n<p>\u5f53\u901a\u8fc7\u540e CMP \u68c0\u6d4b\u53d1\u73b0 CMP \u7f3a\u9677\u5f02\u5e38\u65f6\uff08\u5212\u75d5\u6570\u91cf\u7a81\u7136\u589e\u52a0\u3001\u7f3a\u9677\u56fe\u4e0a\u7684 LPD \u5cf0\u503c\u6216\u5265\u843d\/\u4fb5\u8680\u8d85\u6807\uff09\uff0c\u4ee5\u4e0b\u7ed3\u6784\u5316\u7684\u6839\u672c\u539f\u56e0\u5206\u6790 (RCA) \u5de5\u4f5c\u6d41\u7a0b\u4e3a\u786e\u5b9a\u7ea0\u6b63\u63aa\u65bd\u548c\u9632\u6b62\u518d\u6b21\u53d1\u751f\u63d0\u4f9b\u4e86\u6700\u6709\u6548\u7684\u9014\u5f84\u3002.<\/p>\n\n<div class=\"rca-flow\">\n  <div class=\"rca-title\">\ud83d\udd0d CMP \u7f3a\u9677\u5207\u9664 RCA \u5de5\u4f5c\u6d41\u7a0b<\/div>\n\n  <div class=\"rca-step\">\n    <div class=\"rs-num\">1<\/div>\n    <div class=\"rs-content\"><strong>\u786e\u5b9a\u7f3a\u9677\u7279\u5f81<\/strong>\u6536\u96c6 CMP \u68c0\u6d4b\u540e\u7684\u6676\u7247\u56fe\u3001\u7f3a\u9677 SEM \u56fe\u50cf\u548c\u7f3a\u9677\u5206\u7c7b\u6570\u636e\u3002\u786e\u5b9a\uff1a\u7f3a\u9677\u7c7b\u578b\uff08\u5212\u75d5 vs. \u51f9\u5751 vs. \u9897\u7c92 vs. \u5730\u5f62\uff09\uff1b\u7a7a\u95f4\u5206\u5e03\uff08\u4e2d\u5fc3\u3001\u8fb9\u7f18\u3001\u65b9\u4f4d\u89d2\u6a21\u5f0f\uff09\uff1b\u4ee5\u53ca\u53d7\u5f71\u54cd\u6279\u6b21\uff08\u6279\u6b21 ID\u3001\u5de5\u5177\u3001\u6d46\u6599\u6279\u6b21\u3001\u57ab\u5c42\u6279\u6b21\uff09\u3002.<\/div>\n  <\/div>\n  <div class=\"rca-arrow\">\u2193<\/div>\n\n  <div class=\"rca-step\">\n    <div class=\"rs-num\">2<\/div>\n    <div class=\"rs-content\"><strong>\u9694\u79bb\u5230\u6ce5\u6d46\u4e0e\u8bbe\u5907\u539f\u4ea7\u5730<\/strong>\u5c06\u9996\u6b21\u51fa\u73b0\u7f3a\u9677\u7684\u6676\u5706\u4e0e\u4ee5\u4e0b\u5185\u5bb9\u8fdb\u884c\u4ea4\u53c9\u5bf9\u6bd4\uff1a(a) \u7845\u6d46\u6279\u6b21\u8f6c\u6362\u65f6\u95f4\uff1b(b) \u886c\u57ab\u66f4\u6362\/\u8c03\u8282\u5668\u66f4\u6362\u65f6\u95f4\uff1b(c) \u5de5\u5177 PM \u4e8b\u4ef6\u3002\u5212\u75d5\u65b9\u4f4d\u89d2\u65b9\u5411\u5206\u6790\uff1a\u968f\u673a = \u6e90\u81ea\u6d46\u6599\uff1b\u5e26\u72b6 = \u6e90\u81ea\u8bbe\u5907\uff08\u8c03\u8282\u5668\u8131\u843d\u3001\u710a\u76d8\u788e\u7247\uff09\u3002.<\/div>\n  <\/div>\n  <div class=\"rca-arrow\">\u2193<\/div>\n\n  <div class=\"rca-step\">\n    <div class=\"rs-num\">3<\/div>\n    <div class=\"rs-content\"><strong>\u68c0\u6d4b\u53ef\u7591\u6279\u6b21\u4e2d\u4fdd\u7559\u7684\u6ce5\u6d46\u6837\u672c<\/strong>\u4ece\u53ef\u7591\u6ce5\u6d46\u6279\u6b21\u4e2d\u63d0\u53d6\u4fdd\u7559\u7684\u8d28\u63a7\u6837\u54c1\uff08\u5305\u62ec\u672a\u5f00\u5c01\u7684\u6563\u88c5\u6837\u54c1\u548c POU \u6837\u54c1\uff08\u5982\u6709\uff09\uff09\u3002\u8fd0\u884c\uff1aLPC\u3001zeta \u7535\u4f4d\u3001pH \u503c\u3001H\u2082O\u2082 \u5206\u6790\u3001D99\u3002\u4e0e\u6536\u5230\u7684 QC \u6570\u636e\u548c\u89c4\u683c\u9650\u5236\u8fdb\u884c\u6bd4\u8f83\u3002\u5982\u679c\u6563\u88c5\u6837\u54c1\u548c POU \u6837\u54c1\u7684 LPC \u6216 zeta \u7535\u4f4d\u51fa\u73b0\u504f\u5dee\uff0c\u5219\u8868\u660e\u5206\u914d\u7cfb\u7edf\u4e2d\u51fa\u73b0\u4e86\u7ed3\u5757\u73b0\u8c61\u3002.<\/div>\n  <\/div>\n  <div class=\"rca-arrow\">\u2193<\/div>\n\n  <div class=\"rca-step\">\n    <div class=\"rs-num\">4<\/div>\n    <div class=\"rs-content\"><strong>\u68c0\u67e5\u914d\u7535\u7cfb\u7edf\u548c POU \u8fc7\u6ee4\u5668<\/strong>\u68c0\u67e5 POU \u8fc7\u6ee4\u5668\u538b\u5dee\u662f\u5426\u9971\u548c\uff08\u9971\u548c\u7684\u8fc7\u6ee4\u5668\u4f1a\u8131\u843d\u6355\u83b7\u7684\u7ed3\u5757\uff09\u3002\u68c0\u67e5\u914d\u6c34\u56de\u8def\u662f\u5426\u6709\u5fae\u751f\u7269\u751f\u957f\uff08\u6740\u83cc\u5242\u5931\u6548\uff09\u3001\u6c34\u57a2\u5806\u79ef\u6216\u5f15\u5165\u4e0d\u517c\u5bb9\u6750\u6599\u3002\u5728\u56de\u8def\u7684\u591a\u4e2a\u70b9\u5bf9\u6ce5\u6d46\u8fdb\u884c\u53d6\u6837\uff0c\u4ee5\u786e\u5b9a LPC \u589e\u52a0\u7684\u4f4d\u7f6e\u3002.<\/div>\n  <\/div>\n  <div class=\"rca-arrow\">\u2193<\/div>\n\n  <div class=\"rca-step\">\n    <div class=\"rs-num\">5<\/div>\n    <div class=\"rs-content\"><strong>\u5b9e\u65bd\u904f\u5236\u548c\u7ea0\u6b63\u884c\u52a8<\/strong>\u5982\u679c\u6e90\u4e8e\u6ce5\u6d46\uff1a\u68c0\u75ab\u53ef\u7591\u6279\u6b21\uff0c\u66f4\u6362 POU \u8fc7\u6ee4\u5668\uff0c\u51b2\u6d17\u5206\u914d\u73af\u8def\u3002\u5982\u679c\u6e90\u4e8e\u8bbe\u5907\uff1a\u68c0\u67e5\u8c03\u8282\u5668\u5706\u76d8\uff0c\u5bf9\u727a\u7272\u6676\u7247\u6267\u884c\u57ab\u78e8\u5408\uff0c\u68c0\u67e5\u538b\u76d8\u6e29\u5ea6\u5747\u5300\u6027\u3002\u4ee5\u73b0\u573a\u7684 8D \u6216 SCAR \u683c\u5f0f\u8bb0\u5f55\u65f6\u95f4\u8868\u3001\u6570\u636e\u548c\u7ea0\u6b63\u63aa\u65bd\uff0c\u4ee5\u4fbf\u901a\u77e5\u4f9b\u5e94\u5546\u3002.<\/div>\n  <\/div>\n  <div class=\"rca-arrow\">\u2193<\/div>\n\n  <div class=\"rca-step\">\n    <div class=\"rs-num\">6<\/div>\n    <div class=\"rs-content\"><strong>\u6838\u5b9e\u7ea0\u6b63\u63aa\u65bd\u7684\u6709\u6548\u6027<\/strong>\u5728\u6062\u590d\u5168\u9762\u751f\u4ea7\u4e4b\u524d\uff0c\u7528\u4fee\u6b63\u540e\u7684\u914d\u7f6e\u8fdb\u884c\u8bd5\u751f\u4ea7\u3002\u5c06 CMP \u68c0\u9a8c\u540e\u7684\u7f3a\u9677\u56fe\u4e0e\u6545\u969c\u524d\u7684\u57fa\u7ebf\u8fdb\u884c\u6bd4\u8f83\u3002\u786e\u8ba4 POU \u7684 LPC \u6062\u590d\u5230\u89c4\u683c\u8303\u56f4\u5185\u3002\u5982\u679c\u504f\u79fb\u63ed\u793a\u4e86\u4e4b\u524d\u672a\u68c0\u6d4b\u5230\u7684\u5de5\u827a\u57fa\u7ebf\u6f02\u79fb\uff0c\u5219\u66f4\u65b0 SPC \u63a7\u5236\u9650\u5236\u3002.<\/div>\n  <\/div>\n<\/div>\n\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 10 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<h2 id=\"inspection\">10.CMP \u540e\u68c0\u67e5\uff1a\u5de5\u5177\u3001\u65b9\u6cd5\u548c\u7f3a\u9677\u5206\u7c7b<\/h2>\n\n<p>\u540e CMP \u68c0\u6d4b\u662f\u5728\u7f3a\u9677\u6269\u6563\u5230\u4e0b\u6e38\u5de5\u827a\u6b65\u9aa4\u4e4b\u524d\u5c06\u5176\u6355\u83b7\u7684\u68c0\u6d4b\u5c42\u3002\u68c0\u6d4b\u5de5\u5177\u3001\u626b\u63cf\u914d\u65b9\u548c\u7f3a\u9677\u5206\u7c7b\u65b9\u6848\u7684\u9009\u62e9\u76f4\u63a5\u51b3\u5b9a\u4e86\u7531 CMP \u5f15\u8d77\u7684\u6210\u54c1\u7387\u635f\u5931\u4e2d\uff0c\u6709\u591a\u5c11\u90e8\u5206\u80fd\u88ab\u68c0\u6d4b\u51fa\u6765\u5e76\u91c7\u53d6\u76f8\u5e94\u63aa\u65bd\uff0c\u800c\u6709\u591a\u5c11\u90e8\u5206\u5219\u9003\u8fc7\u4e86\u6700\u7ec8\u6d4b\u8bd5\u3002.<\/p>\n\n<div class=\"cmp-table-wrap\">\n  <table class=\"cmp-table\">\n    <thead>\n      <tr><th>\u68c0\u67e5\u65b9\u6cd5<\/th><th>\u5de5\u5177\u793a\u4f8b<\/th><th>\u53ef\u68c0\u6d4b\u7f3a\u9677<\/th><th>\u6700\u5c0f\u53ef\u68c0\u6d4b\u5c3a\u5bf8<\/th><th>\u6700\u9002\u5408<\/th><\/tr>\n    <\/thead>\n    <tbody>\n      <tr>\n        <td><strong>\u6697\u573a\u6fc0\u5149\u6563\u5c04\uff08\u660e\u573a+\u659c\u573a\uff09<\/strong><\/td>\n        <td>KLA SP7\u3001\u65e5\u7acb LS9500\u3001AMAT Puma 9500<\/td>\n        <td>\u5212\u75d5\u3001\u9897\u7c92\u3001\u51f9\u5751\u3001\u7a7a\u6d1e<\/td>\n        <td>~20 \u7eb3\u7c73\uff08\u6700\u9ad8\u7075\u654f\u5ea6\u6a21\u5f0f\u4e0b\uff09<\/td>\n        <td>\u9ad8\u901a\u91cf 300 \u6beb\u7c73\u751f\u4ea7\u68c0\u6d4b\uff1b\u5212\u75d5\u548c LPD \u5730\u56fe<\/td>\n      <\/tr>\n      <tr>\n        <td><strong>\u57fa\u4e8e SEM \u7684\u5ba1\u67e5\uff08ADR\uff09<\/strong><\/td>\n        <td>KLA eDR-7xxx\u3001\u65e5\u7acb RS-6000<\/td>\n        <td>\u5212\u75d5\u5f62\u6001\u3001\u9897\u7c92\u7c7b\u578b\u3001\u51f9\u5751\u6df1\u5ea6\u3001\u6c61\u67d3\u8bc6\u522b<\/td>\n        <td>3-5 \u7eb3\u7c73\uff08\u626b\u63cf\u7535\u955c\u5206\u8fa8\u7387\uff09<\/td>\n        <td>\u7f3a\u9677\u5206\u7c7b\u3001\u5149\u5b66\u68c0\u6d4b\u540e\u7684 RCA\uff1b\u975e\u5728\u7ebf\u751f\u4ea7<\/td>\n      <\/tr>\n      <tr>\n        <td><strong>\u539f\u5b50\u529b\u663e\u5fae\u955c (AFM)<\/strong><\/td>\n        <td>\u5e03\u9c81\u514b Dimension\u3001KLA SurfscanPro<\/td>\n        <td>\u6253\u78e8\u3001\u4fb5\u8680\u3001\u8868\u9762\u7c97\u7cd9\u5ea6\u30015 \u7eb3\u7c73\u4ee5\u4e0b\u5212\u75d5<\/td>\n        <td>\u4e9a\u7eb3\u7c73\u9ad8\u5ea6\u5206\u8fa8\u7387<\/td>\n        <td>\u629b\u5149\/\u4fb5\u8680\u8ba1\u91cf\u5b66\uff1b\u6700\u7ec8\u629b\u5149\u8868\u9762\u8d28\u91cf\uff08\u8d85\u7d2b\u5916\u576f\u6599\u3001\u6df7\u5408\u63a5\u5408\uff09<\/td>\n      <\/tr>\n      <tr>\n        <td><strong>\u6563\u5c04\u6d4b\u91cf\/\u5f3a\u8feb\u75c7<\/strong><\/td>\n        <td>KLA Aleris\u3001Onto Nova<\/td>\n        <td>\u56fe\u6848\u9635\u5217\u4e2d\u7684\u6253\u78e8\u548c\u4fb5\u8680\uff08\u95f4\u63a5\u6cd5\uff09<\/td>\n        <td>\u6a21\u5f0f\u7ea7\uff08\u7edf\u8ba1\uff09<\/td>\n        <td>\u65e0\u9700\u7834\u574f\u6027\u6d4b\u8bd5\u5373\u53ef\u5bf9\u751f\u4ea7\u6a21\u5f0f\u8fdb\u884c\u5728\u7ebf\u5265\u8680\/\u4fb5\u8680\u76d1\u6d4b<\/td>\n      <\/tr>\n      <tr>\n        <td><strong>ICP-MS \u8868\u9762\u5206\u6790<\/strong><\/td>\n        <td>Agilent 7900 ICP-MS + VPD\uff08\u6c14\u76f8\u5206\u89e3\uff09<\/td>\n        <td>\u6676\u7247\u8868\u9762\u7684\u91d1\u5c5e\u79bb\u5b50\u6c61\u67d3<\/td>\n        <td>&lt;10\u2079 \u539f\u5b50\/\u5e73\u65b9\u5398\u7c73\uff08\u94c1\u4e3a 10\u00b3 \u539f\u5b50\/\u5e73\u65b9\u5398\u7c73\uff09<\/td>\n        <td>\u91d1\u5c5e\u6c61\u67d3\u9274\u5b9a\uff1b\u975e\u4f8b\u884c\u5728\u7ebf\uff08\u7834\u574f\u6027\u6837\u54c1\u9884\u5904\u7406\uff09<\/td>\n      <\/tr>\n      <tr>\n        <td><strong>\u692d\u504f\u4eea<\/strong><\/td>\n        <td>KLA ASET-F5x\u3001Woollam M-2000<\/td>\n        <td>CMP \u540e\u7684\u5269\u4f59\u8584\u819c\u539a\u5ea6\uff1bWIWNU \u6d4b\u91cf\u503c<\/td>\n        <td>\u00b11 \u7eb3\u7c73\u539a\u5ea6<\/td>\n        <td>MRR \u4e00\u81f4\u6027 (WIWNU) \u76d1\u6d4b\uff1b\u7ec8\u70b9\u9a8c\u8bc1<\/td>\n      <\/tr>\n    <\/tbody>\n  <\/table>\n<\/div>\n\n<div class=\"cmp-box purple\">\n  <p class=\"box-title\">\ud83d\udd2e \u7f3a\u9677\u5206\u7c7b\uff1a\u5c06\u5f62\u6001\u5b66\u4e0e\u6839\u6e90\u8054\u7cfb\u8d77\u6765<\/p>\n  <p style=\"margin:0;\">\u57fa\u4e8e\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c\u7684\u6709\u6548\u7f3a\u9677\u5206\u7c7b\u53ef\u5b9e\u73b0\u4ece\u7f3a\u9677\u5f62\u6001\u5230\u6839\u672c\u539f\u56e0\u5047\u8bbe\u7684\u76f4\u63a5\u6620\u5c04\uff1a <strong>\u5355\u7ebf\u5212\u75d5<\/strong> (V \u578b\u5256\u9762\uff0c\u957f\u5ea6\u5927\u4e8e 5 \u03bcm\uff09\u2192\u5355\u4e2a\u786c\u9897\u7c92\u6216\u56e2\u5757\u4e8b\u4ef6\uff1b; <strong>\u591a\u6761\u5e73\u884c\u5212\u75d5<\/strong> (\u540c\u4e00\u65b9\u4f4d\u89d2\uff09 \u2192 \u8c03\u8282\u5668\u76d8\u8131\u843d\u6216\u57ab\u7247\u788e\u7247\u62d6\u8fc7\u6676\u7247\uff1b; <strong>\u5706\u5f62\u5751\u9053\u9635\u5217<\/strong> (\u2300 50-200 nm\uff0c\u968f\u673a\u5206\u5e03) \u2192 \u8868\u9762\u8150\u8680\/\u7535\u8680\u70b9\u8680\uff1b; <strong>\u7535\u4ecb\u8d28\u4e0a\u7684\u6c2e\u5316\u94bd\u5c9b<\/strong> (EDX\u786e\u8ba4) \u2192 \u7b2c 2 \u6b65\u8fc7\u5ea6\u629b\u5149\u6216\u7b2c 2 \u6b65\u6d46\u6599\u7684 WIWNU \u4e0d\u5145\u5206\uff1b; <strong>\u96fe\u5ea6\/\u5fae\u7c97\u7cd9\u5ea6<\/strong> (\u65e0\u79bb\u6563\u7f3a\u9677\uff09 \u2192 pH \u503c\u504f\u79fb\u5bfc\u81f4\u8868\u9762\u6eb6\u89e3\u3002.<\/p>\n<\/div>\n\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 11 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<h2 id=\"faq\">11.\u5e38\u89c1\u95ee\u9898<\/h2>\n\n<div class=\"cmp-faq\" itemscope itemtype=\"https:\/\/schema.org\/FAQPage\">\n\n  <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n    <p class=\"faq-question\" itemprop=\"name\">\u9020\u6210 CMP \u6ce5\u6d46\u5fae\u5212\u75d5\u7684\u6700\u5e38\u89c1\u539f\u56e0\u662f\u4ec0\u4e48\uff1f<\/p>\n    <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n      <div itemprop=\"text\">\u9020\u6210\u5fae\u5212\u75d5\u6700\u5e38\u89c1\u7684\u6ce5\u6d46\u4fa7\u539f\u56e0\u662f\u5927\u9897\u7c92\u8ba1\u6570\uff08LPC\uff09\u5cf0\u503c--\u6ce5\u6d46\u4e2d 0.5 \u03bcm \u4ee5\u4e0a\u9897\u7c92\u6d53\u5ea6\u7684\u77ac\u95f4\u6216\u6279\u91cf\u5347\u9ad8\u3002LPC \u5cf0\u503c\u53ef\u80fd\u6e90\u4e8e\uff1a(1) \u6ce5\u6d46\u5236\u9020\u5546\u7684\u78e8\u6599\u5408\u6210\u6216\u8fc7\u6ee4\u4e0d\u8db3\uff1b(2) pH \u503c\u6f02\u79fb\u3001\u6e29\u5ea6\u504f\u5dee\u6216\u79bb\u5b50\u6c61\u67d3\u5bfc\u81f4\u5206\u914d\u7cfb\u7edf\u4e2d\u7684\u80f6\u4f53\u805a\u96c6\uff1b\u6216 (3) \u9971\u548c\u7684\u4f7f\u7528\u70b9\u8fc7\u6ee4\u5668\u5c06\u6355\u83b7\u7684\u9897\u7c92\u8131\u843d\u56de\u6ce5\u6d46\u6d41\u4e2d\u3002\u5bf9\u6bcf\u4e2a\u6279\u6b21\u8fdb\u884c\u7cfb\u7edf\u7684\u8fdb\u6599 LPC \u6d4b\u91cf\uff0c\u5e76\u7ed3\u5408 100-200 \u7eb3\u7c73\u7684 POU \u8fc7\u6ee4\uff0c\u53ef\u6d88\u9664\u5927\u591a\u6570\u6d46\u6599\u6e90\u5212\u75d5\u4e8b\u4ef6\u3002.<\/div>\n    <\/div>\n  <\/div>\n\n  <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n    <p class=\"faq-question\" itemprop=\"name\">\u6d46\u6599 pH \u503c\u5bf9 CMP \u7f3a\u9677\u7387\u6709\u4f55\u5f71\u54cd\uff1f<\/p>\n    <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n      <div itemprop=\"text\">\u6ce5\u6d46 pH \u503c\u901a\u8fc7\u4e24\u79cd\u4e0d\u540c\u7684\u673a\u5236\u5f71\u54cd\u7f3a\u9677\u7387\u3002\u9996\u5148\uff0cpH \u503c\u63a7\u5236\u80f6\u4f53\u7a33\u5b9a\u6027\uff1a\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u7684 zeta \u7535\u4f4d\u5728 pH \u503c\u7ea6 9.5-10 \u65f6\u8fbe\u5230\u5cf0\u503c\uff0c\u5728\u7b49\u7535\u70b9\uff08\u7ea6 pH 2-3\uff09\u63a5\u8fd1\u96f6\uff0c\u8fd9\u610f\u5473\u7740 pH \u503c\u504f\u79bb\u7b49\u7535\u70b9\u4f1a\u5bfc\u81f4\u5feb\u901f\u56e2\u805a\u548c\u76f8\u5e94\u7684 LPC \u5cf0\u503c\uff08\u5fae\u5212\u75d5\u7684\u524d\u5146\uff09\u3002\u5176\u6b21\uff0cpH \u503c\u63a7\u5236\u7740\u91d1\u5c5e CMP \u6ce5\u6d46\u4e2d\u6c27\u5316\u5242\u7684\u6d3b\u6027\u548c\u6291\u5236\u5242\u7684\u6709\u6548\u6027\uff1a\u5728\u94dc CMP \u4e2d\uff0cpH \u503c\u8d85\u51fa\u89c4\u5b9a\u7684 \u00b10.1 \u7a97\u53e3\u65f6\uff0cH\u2082O\u2082 \u6c27\u5316\u7387\u548c BTA \u5438\u9644\u5f3a\u5ea6\u4f1a\u540c\u65f6\u53d1\u751f\u53d8\u5316\uff0c\u4ece\u800c\u6539\u53d8\u76d8\u65cb\u548c\u8150\u8680\u5e73\u8861\u3002\u8fd9\u5c31\u662f\u5728\u5148\u8fdb\u8282\u70b9\u4e0a\u4ee5 \u00b10.1 \u7684\u7cbe\u5ea6\u76d1\u6d4b pH \u503c\u7684\u539f\u56e0\u3002.<\/div>\n    <\/div>\n  <\/div>\n\n  <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n    <p class=\"faq-question\" itemprop=\"name\">\u5148\u8fdb\u8282\u70b9 CMP \u6ce5\u6d46\u7684 LPC \u89c4\u683c\u662f\u4ec0\u4e48\uff1f<\/p>\n    <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n      <div itemprop=\"text\">\u901a\u8fc7 Accusizer \u6216 PAMAS \u5149\u906e\u853d\u8ba1\u6570\u5668\u6d4b\u91cf\uff0c\u5148\u8fdb\u8282\u70b9\uff080.5 \u03bcm\uff09\u226450 \u9897\u7c92\/\u6beb\u5347\u3002\u5bf9\u4e8e\u7f3a\u9677\u7387\u9884\u7b97\u6700\u4e25\u683c\u7684 5 \u7eb3\u7c73\u4ee5\u4e0b\u5e94\u7528\uff0c\u7279\u522b\u662f\u7528\u4e8e EUV \u63a9\u819c\u576f\u6599\u6216\u6df7\u5408\u63a5\u5408\u8868\u9762\u5236\u5907\u7684\u65e0\u7814\u78e8\u6d46\u6599\uff0c\u5de5\u5382\u53ef\u5c06\u5176\u9650\u5236\u4e3a LPC\uff08&gt;0.5 \u03bcm\uff09\u226420\/mL\uff0c\u5e76\u989d\u5916\u8981\u6c42 LPC\uff08&gt;0.2 \u03bcm\uff09\u2264200\/mL\u3002\u4f7f\u7528\u70b9 LPC\uff08\u5728\u5206\u914d\u73af\u8def\u4e4b\u540e\uff0c\u7d27\u63a5\u5206\u914d\u81c2\u4e4b\u524d\u6d4b\u91cf\uff09\u5e94\u4e0e\u8fdb\u8d27\u6279\u6b21 LPC \u5206\u5f00\u9a8c\u8bc1\uff0c\u56e0\u4e3a\u5373\u4f7f\u8fdb\u8d27\u6279\u6b21\u7b26\u5408\u89c4\u8303\uff0c\u5206\u914d\u5f15\u8d77\u7684\u7ed3\u5757\u4e5f\u4f1a\u4f7f POU LPC \u5347\u9ad8\u3002.<\/div>\n    <\/div>\n  <\/div>\n\n  <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n    <p class=\"faq-question\" itemprop=\"name\">\u5982\u4f55\u68c0\u6d4b CMP \u6ce5\u6d46\u4e2d\u7684\u91d1\u5c5e\u79bb\u5b50\u6c61\u67d3\uff1f<\/p>\n    <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n      <div itemprop=\"text\">CMP \u6ce5\u6d46\u4e2d\u7684\u91d1\u5c5e\u79bb\u5b50\u6c61\u67d3\u901a\u8fc7\u7535\u611f\u8026\u5408\u7b49\u79bb\u5b50\u4f53\u8d28\u8c31\u4eea (ICP-MS) \u8fdb\u884c\u6d4b\u91cf\uff0c\u8be5\u4eea\u5668\u53ef\u68c0\u6d4b\u51fa\u6d53\u5ea6\u4e3a\u4e07\u4ebf\u5206\u4e4b\u4e00 (ppt) \u7684\u75d5\u91cf\u5143\u7d20\uff0c\u8fdc\u8fdc\u4f4e\u4e8e\u5148\u8fdb\u8282\u70b9\u6ce5\u6d46\u6240\u8981\u6c42\u7684 ppb \u7ea7\u89c4\u683c\u3002\u5bf9\u4e8e\u8fdb\u5165\u7684\u6d46\u6599\u6279\u6b21\uff0c\u53ef\u76f4\u63a5\u5206\u6790\u6d46\u6599\u7684\u6d88\u5316\u6db2\u4f53\u6837\u672c\u3002\u5bf9\u4e8e CMP \u4e4b\u540e\u7684\u6676\u5706\u8868\u9762\u91d1\u5c5e\u6c61\u67d3\uff0c\u9ec4\u91d1\u6807\u51c6\u65b9\u6cd5\u662f\u6c14\u76f8\u5206\u89e3 ICP-MS (VPD-ICP-MS)\uff1a\u5c06\u6676\u5706\u8868\u9762\u6c27\u5316\u7269\u6eb6\u89e3\u5728 HF \u84b8\u6c7d\u4e2d\uff0c\u5728\u6676\u5706\u8868\u9762\u6536\u96c6\u4ea7\u751f\u7684\u6db2\u6ef4\uff0c\u7136\u540e\u7528 ICP-MS \u5206\u6790\u6536\u96c6\u7684\u6eb6\u6db2\u3002\u8fd9\u79cd\u65b9\u6cd5\u53ef\u4ee5\u68c0\u6d4b\u5230\u4f4e\u4e8e 10\u2079 \u539f\u5b50\/\u5e73\u65b9\u5398\u7c73\u7684\u94c1\u8868\u9762\u6d53\u5ea6\uff0c\u7ea6\u4e3a\u5355\u5c42\u7684 0.001\uff0c\u56e0\u6b64\u7075\u654f\u5ea6\u8db3\u4ee5\u6355\u6349\u5230\u4f1a\u5bfc\u81f4\u6805\u6781\u6c27\u5316\u7269 TDDB \u53ef\u9760\u6027\u5931\u6548\u7684\u75d5\u91cf\u6c61\u67d3\u3002.<\/div>\n    <\/div>\n  <\/div>\n\n  <div class=\"faq-item\" itemscope itemprop=\"mainEntity\" itemtype=\"https:\/\/schema.org\/Question\">\n    <p class=\"faq-question\" itemprop=\"name\">\u4ec0\u4e48\u662f zeta \u7535\u4f4d\uff1f\u4e3a\u4ec0\u4e48\u5b83\u5bf9 CMP \u6ce5\u6d46\u8d28\u91cf\u5f88\u91cd\u8981\uff1f<\/p>\n    <div class=\"faq-answer\" itemscope itemprop=\"acceptedAnswer\" itemtype=\"https:\/\/schema.org\/Answer\">\n      <div itemprop=\"text\">Zeta \u7535\u4f4d (\u03b6)\u662f\u6d46\u6599\u60ac\u6d6e\u6db2\u4e2d\u6bcf\u4e2a\u80f6\u4f53\u7814\u78e8\u9897\u7c92\u5468\u56f4\u7535\u53cc\u5c42\u8fb9\u754c\u7684\u7535\u52a8\u52bf\u3002\u5b83\u91cf\u5316\u4e86\u9897\u7c92\u4e4b\u95f4\u963b\u6b62\u5176\u805a\u96c6\u7684\u9759\u7535\u65a5\u529b\u3002\u5177\u4f53\u800c\u8a00|\u03b6| &gt;40 mV \u8868\u793a\u6d46\u6599\u7a33\u5b9a\u6027\u597d\uff0c\u7ed3\u5757\u98ce\u9669\u4f4e\uff1b|\u03b6| 25-40 mV \u4e4b\u95f4\u8868\u793a\u7a33\u5b9a\u6027\u4e2d\u7b49\uff0c\u5728\u6e29\u5ea6\u6216 pH \u503c\u538b\u529b\u4e0b\u7ed3\u5757\u98ce\u9669\u8f83\u9ad8\uff1b|\u03b6| &lt;25 mV \u8868\u793a\u7ed3\u5757\u98ce\u9669\u9ad8\uff0c\u9700\u8981\u5728\u751f\u4ea7\u4f7f\u7528\u524d\u7acb\u5373\u8fdb\u884c\u8c03\u67e5\u3002Zeta \u7535\u4f4d\u662f\u901a\u8fc7\u7a00\u91ca\u6d46\u6599\u4e0a\u7684\u7535\u6cf3\u5149\u6563\u5c04\uff08Malvern Zetasizer\u3001Brookhaven ZetaPALS\uff09\u6d4b\u91cf\u7684\u3002\u5b83\u662f\u56e2\u805a\u98ce\u9669\u7684\u5148\u884c\u6307\u6807\uff0c\u53ef\u5728 LPC \u8ba1\u6570\u5668\u68c0\u6d4b\u5230\u6240\u4ea7\u751f\u7684\u56e2\u805a\u7269\u4e4b\u524d\u63d0\u9192\u6ce8\u610f\u7a33\u5b9a\u6027\u95ee\u9898--\u4f7f\u5176\u6210\u4e3a\u5148\u8fdb\u8282\u70b9\u8d28\u91cf\u63a7\u5236\u7a0b\u5e8f\u4e2d LPC \u6d4b\u91cf\u7684\u91cd\u8981\u8865\u5145\u3002.<\/div>\n    <\/div>\n  <\/div>\n\n<\/div>\n\n<h2>\u7ed3\u8bba<\/h2>\n<p>CMP \u6ce5\u6d46\u7f3a\u9677\u63a7\u5236\u5f52\u6839\u7ed3\u5e95\u662f\u4e00\u4e2a\u7cfb\u7edf\u95ee\u9898--\u6a2a\u8de8\u6ce5\u6d46\u5236\u9020\u3001\u5206\u914d\u3001\u8fdb\u6599\u8d28\u91cf\u63a7\u5236\u3001\u5de5\u827a\u6574\u5408\u548c CMP \u540e\u68c0\u9a8c\uff0c\u94fe\u6761\u4e2d\u7684\u6bcf\u4e2a\u73af\u8282\u90fd\u53ef\u80fd\u9020\u6210\u6216\u9632\u6b62\u4ea7\u91cf\u635f\u5931\u3002\u672c\u6307\u5357\u4e2d\u6d89\u53ca\u7684\u7f3a\u9677--\u5fae\u5212\u75d5\u3001\u9897\u7c92\u7ed3\u5757\u3001\u91d1\u5c5e\u6c61\u67d3\u3001\u5206\u5c42\u3001\u4fb5\u8680\u548c\u7535\u5316\u5b66\u8150\u8680--\u90fd\u662f\u53ef\u4ee5\u901a\u8fc7\u4e25\u683c\u7684\u3001\u4ee5\u89c4\u8303\u4e3a\u5bfc\u5411\u7684\u8fdb\u6599\u8d28\u91cf\u63a7\u5236\uff0c\u7ed3\u5408\u4f7f\u7528\u70b9\u76d1\u63a7\u548c\u53d1\u751f\u504f\u5dee\u65f6\u7684\u7ed3\u6784\u5316 RCA \u6765\u9884\u9632\u7684\u3002.<\/p>\n<p>\u6709\u5173\u6bcf\u79cd\u7f3a\u9677\u7c7b\u578b\u80cc\u540e\u7684\u5177\u4f53\u6ce5\u6d46\u5316\u5b66\u80cc\u666f\uff0c\u8bf7\u91cd\u6e29\u6211\u4eec\u7684\u4ee5\u4e0b\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/copper-cmp-slurry-dual-damascene-process-formulation-defect-control-complete-engineering-guide\/\">\u94dc CMP \u6ce5\u6d46<\/a> \u548c <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-for-advanced-nodes-5nm-3nm-2nm-beyond-technical-challenges-innovations\/\">\u7528\u4e8e\u9ad8\u7ea7\u8282\u70b9\u7684 CMP \u6ce5\u6d46<\/a>. .\u6709\u5173\u9632\u6b62\u4ece\u751f\u4ea7\u5230\u4f7f\u7528\u70b9\u4e4b\u95f4\u7531\u914d\u9001\u5f15\u8d77\u7684\u8d28\u91cf\u4e0b\u964d\u7684\u6ce5\u6d46\u5904\u7406\u548c\u50a8\u5b58\u65b9\u6cd5\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u6307\u5357\uff0c\u4e86\u89e3\u66f4\u591a\u4fe1\u606f\u3002 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-slurry-filters-storage-handling-complete-engineering-guide\/\">CMP \u6ce5\u6d46\u8fc7\u6ee4\u5668\u3001\u50a8\u5b58\u548c\u5904\u7406<\/a>. .\u8981\u4e86\u89e3\u5b8c\u6574\u7684\u57fa\u7840\u6982\u8ff0\uff0c\u8bf7\u56de\u5230 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/what-is-cmp-slurry-a-complete-guide-to-chemical-mechanical-planarization-slurry\/\">\u5b8c\u6574\u7684 CMP \u6ce5\u6d46\u6307\u5357<\/a>.<\/p>\n\n<a class=\"back-to-pillar\" href=\"https:\/\/jeez-semicon.com\/zh\/blog\/what-is-cmp-slurry-a-complete-guide-to-chemical-mechanical-planarization-slurry\/\">\n  <span class=\"btp-icon\">\ud83c\udfe0<\/span>\n  <div class=\"btp-text\">\n    <span class=\"btp-label\">\u5b8c\u6574\u7684 CMP \u6ce5\u6d46\u7cfb\u5217<\/span>\n    <span class=\"btp-title\">\u2190 \u8fd4\u56de\uff1a\u4ec0\u4e48\u662f CMP \u6ce5\u6d46\uff1f\u5b8c\u6574\u6307\u5357<\/span>\n  <\/div>\n<\/a>\n\n\n<\/article>\n\n<script type=\"application\/ld+json\">\n{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"headline\":\"CMP Slurry Defects: Root Cause Analysis & Quality Control \u2014 Complete Engineering Guide (2025)\",\"description\":\"Complete guide to CMP slurry defects: micro-scratch root causes, particle agglomeration, metal contamination, dishing and erosion control, incoming QC specifications, and post-CMP inspection methods for semiconductor manufacturing.\",\"author\":{\"@type\":\"Organization\",\"name\":\"Jizhi Electronic Technology Co., Ltd.\"},\"publisher\":{\"@type\":\"Organization\",\"name\":\"Jizhi Electronic Technology Co., Ltd.\",\"logo\":{\"@type\":\"ImageObject\",\"url\":\"https:\/\/yourwebsite.com\/logo.png\"}},\"datePublished\":\"2025-06-01\",\"dateModified\":\"2025-06-01\",\"mainEntityOfPage\":\"https:\/\/yourwebsite.com\/cmp-slurry-defects\/\",\"isPartOf\":{\"@type\":\"WebPage\",\"@id\":\"https:\/\/yourwebsite.com\/cmp-slurry-complete-guide\/\"}},{\"@type\":\"FAQPage\",\"mainEntity\":[{\"@type\":\"Question\",\"name\":\"What is the most common cause of micro-scratches in CMP slurry?\",\"acceptedAnswer\":{\"@type\":\"Answer\",\"text\":\"The most common slurry-side cause is a large particle count (LPC) spike \u2014 particles above 0.5 \u00b5m from inadequate synthesis, distribution agglomeration, or a saturated POU filter shedding captured particles back into the slurry stream.\"}},{\"@type\":\"Question\",\"name\":\"What is the LPC specification for advanced node CMP slurry?\",\"acceptedAnswer\":{\"@type\":\"Answer\",\"text\":\"Standard advanced-node incoming spec is LPC (>0.5 \u00b5m) \u226450\/mL. Sub-5nm applications may tighten to \u226420\/mL. POU LPC should be verified separately from incoming bulk lot LPC.\"}},{\"@type\":\"Question\",\"name\":\"What is zeta potential and why does it matter for CMP slurry?\",\"acceptedAnswer\":{\"@type\":\"Answer\",\"text\":\"Zeta potential quantifies electrostatic repulsion between colloidal abrasive particles. |\u03b6| >40 mV indicates good stability; <25 mV indicates high agglomeration risk. It is a leading indicator of agglomeration that alerts to stability problems before LPC measurement detects the resulting agglomerates.\"}}]},{\"@type\":\"BreadcrumbList\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/yourwebsite.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"CMP Slurry Complete Guide\",\"item\":\"https:\/\/yourwebsite.com\/cmp-slurry-complete-guide\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"CMP Slurry Defects &#038; QC\",\"item\":\"https:\/\/yourwebsite.com\/cmp-slurry-defects\/\"}]}]}\n<\/script>","protected":false},"excerpt":{"rendered":"<p>In semiconductor manufacturing, a CMP defect is not merely a surface imperfection &#8212; it is a direct threat to device yield, reliability, and the tens of thousands of process steps  &#8230;<\/p>","protected":false},"author":1,"featured_media":1508,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1489","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1489","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=1489"}],"version-history":[{"count":5,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1489\/revisions"}],"predecessor-version":[{"id":1558,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1489\/revisions\/1558"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/1508"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=1489"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=1489"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=1489"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}