{"id":1634,"date":"2026-03-13T08:59:53","date_gmt":"2026-03-13T00:59:53","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1634"},"modified":"2026-03-13T10:03:30","modified_gmt":"2026-03-13T02:03:30","slug":"polishing-templates-for-semiconductor-silicon-wafer-processing-complete-guide","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/polishing-templates-for-semiconductor-silicon-wafer-processing-complete-guide\/","title":{"rendered":"\u7528\u4e8e\u534a\u5bfc\u4f53\u548c\u7845\u6676\u7247\u52a0\u5de5\u7684\u629b\u5149\u6a21\u677f\uff1a\u5b8c\u6574\u6307\u5357"},"content":{"rendered":"<!-- Schema.org Article + FAQ structured data -->\n<script type=\"application\/ld+json\">\n{\n  \"@context\": \"https:\/\/schema.org\",\n  \"@graph\": [\n    {\n      \"@type\": \"Article\",\n      \"headline\": \"Polishing Templates for Semiconductor & Silicon Wafer Processing: Complete Guide\",\n      \"description\": \"Comprehensive technical guide to polishing templates used in semiconductor wafer fabrication, covering materials, process compatibility, substrate types, and custom engineering.\",\n      \"author\": {\n        \"@type\": \"Organization\",\n        \"name\": \"Jizhi Electronic Technology Co., Ltd.\",\n        \"url\": \"https:\/\/jeez-semicon.com\"\n      },\n      \"publisher\": {\n        \"@type\": \"Organization\",\n        \"name\": \"Jizhi Electronic Technology Co., Ltd.\",\n        \"url\": \"https:\/\/jeez-semicon.com\"\n      },\n      \"mainEntityOfPage\": {\n        \"@type\": \"WebPage\",\n        \"@id\": \"https:\/\/jeez-semicon.com\/blog\/Polishing-Templates-for-Semiconductor-Silicon-Wafer-Processing\"\n      }\n    },\n    {\n      \"@type\": \"FAQPage\",\n      \"mainEntity\": [\n        {\n          \"@type\": \"Question\",\n          \"name\": \"What is a polishing template in semiconductor manufacturing?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"A polishing template is a precision fixture used in single-side wafer polishing to hold and support the wafer against the polishing pad. It typically consists of a rigid carrier plate (FR-4 or G-10 fiberglass) bonded to a porous backing pad, ensuring uniform pressure distribution and controlled edge profiles during the polishing process.\"\n          }\n        },\n        {\n          \"@type\": \"Question\",\n          \"name\": \"What materials are polishing templates made from?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"The most common materials are FR-4 and G-10 fiberglass composites, which offer excellent dimensional stability and chemical resistance. For aggressive SiC polishing environments, chemically resistant (CXT) grades with seamless single-shell construction are available to withstand KMnO\u2084-based slurries and extreme pH conditions.\"\n          }\n        },\n        {\n          \"@type\": \"Question\",\n          \"name\": \"Can polishing templates be used for SiC wafers?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"Yes. SiC wafers require chemically resistant polishing templates specifically engineered to withstand the highly acidic or alkaline slurries (including KMnO\u2084-based formulations) used in SiC CMP. Standard FR-4 templates may delaminate under these conditions; CXT-grade seamless templates are recommended for SiC applications.\"\n          }\n        },\n        {\n          \"@type\": \"Question\",\n          \"name\": \"What is a waxless polishing template?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"A waxless polishing template uses a pre-bonded porous backing pad that holds the wafer through capillary adhesion when wetted, eliminating the need for wax bonding and de-waxing steps. This reduces process time, avoids thermal stress on the wafer, and improves cleanroom contamination control.\"\n          }\n        },\n        {\n          \"@type\": \"Question\",\n          \"name\": \"How do I choose the right polishing template for my process?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"Key selection parameters include: wafer diameter and final target thickness, work-hole depth and diameter, substrate material (Si, SiC, GaAs, glass), slurry chemistry and pH range, polishing machine carrier head geometry, and whether waxless or edge-enhancement features are required. Custom engineering is available for non-standard specifications.\"\n          }\n        }\n      ]\n    }\n  ]\n}\n<\/script>\n\n<style>\n  \/* \u2500\u2500 Google Fonts \u2500\u2500 *\/\n  @import url('https:\/\/fonts.googleapis.com\/css2?family=DM+Serif+Display:ital@0;1&family=DM+Sans:wght@300;400;500;600&family=JetBrains+Mono:wght@400;500&display=swap');\n\n  :root {\n    --navy:      #0a1628;\n    --navy-mid:  #112240;\n    --blue:      #1a56db;\n    --blue-lite: #3b82f6;\n    --cyan:      #06b6d4;\n    --slate:     #334155;\n    --muted:     #64748b;\n    --border:    #e2e8f0;\n    --bg:        #f8fafc;\n    --white:     #ffffff;\n    --accent:    #f59e0b;\n    --green:     #10b981;\n    --radius:    10px;\n    --shadow:    0 4px 24px rgba(10,22,40,.08);\n    --shadow-lg: 0 12px 48px rgba(10,22,40,.14);\n  }\n\n  *, *::before, *::after { box-sizing: border-box; margin: 0; padding: 0; }\n\n  body {\n    font-family: 'DM Sans', sans-serif;\n    font-size: 16px;\n    line-height: 1.75;\n    color: var(--slate);\n    background: var(--white);\n    -webkit-font-smoothing: antialiased;\n  }\n\n  \/* \u2500\u2500 Layout \u2500\u2500 *\/\n  .page-wrap {\n    max-width: 880px;\n    margin: 0 auto;\n    padding: 0 24px 80px;\n  }\n\n  \/* \u2500\u2500 Hero \u2500\u2500 *\/\n  .hero {\n    background: linear-gradient(135deg, var(--navy) 0%, var(--navy-mid) 55%, #1e3a5f 100%);\n    color: var(--white);\n    padding: 72px 24px 64px;\n    text-align: center;\n    position: relative;\n    overflow: hidden;\n  }\n  .hero::before {\n    content: '';\n    position: absolute; inset: 0;\n    background: url(\"data:image\/svg+xml,%3Csvg width='60' height='60' viewBox='0 0 60 60' xmlns='http:\/\/www.w3.org\/2000\/svg'%3E%3Cg fill='none' fill-rule='evenodd'%3E%3Cg fill='%23ffffff' fill-opacity='0.03'%3E%3Ccircle cx='30' cy='30' r='28'\/%3E%3C\/g%3E%3C\/g%3E%3C\/svg%3E\") repeat;\n    pointer-events: none;\n  }\n  .hero-eyebrow {\n    display: inline-block;\n    font-family: 'JetBrains Mono', monospace;\n    font-size: 11px;\n    font-weight: 500;\n    letter-spacing: .14em;\n    text-transform: uppercase;\n    color: var(--cyan);\n    background: rgba(6,182,212,.12);\n    border: 1px solid rgba(6,182,212,.3);\n    border-radius: 4px;\n    padding: 4px 12px;\n    margin-bottom: 20px;\n  }\n  .hero h1 {\n    font-family: 'DM Serif Display', serif;\n    font-size: clamp(28px, 5vw, 48px);\n    line-height: 1.15;\n    color: var(--white);\n    max-width: 780px;\n    margin: 0 auto 20px;\n  }\n  .hero-sub {\n    font-size: 17px;\n    color: rgba(255,255,255,.72);\n    max-width: 620px;\n    margin: 0 auto 32px;\n    font-weight: 300;\n  }\n  .hero-meta {\n    font-family: 'JetBrains Mono', monospace;\n    font-size: 11px;\n    color: rgba(255,255,255,.4);\n    letter-spacing: .08em;\n  }\n  .hero-meta span { margin: 0 10px; }\n\n  \/* \u2500\u2500 TOC \u2500\u2500 *\/\n  .toc-box {\n    background: var(--bg);\n    border: 1px solid var(--border);\n    border-left: 4px solid var(--blue);\n    border-radius: var(--radius);\n    padding: 28px 32px;\n    margin: 40px 0;\n  }\n  .toc-box h2 {\n    font-family: 'DM Sans', sans-serif;\n    font-size: 13px;\n    font-weight: 600;\n    letter-spacing: .1em;\n    text-transform: uppercase;\n    color: var(--blue);\n    margin-bottom: 16px;\n  }\n  .toc-list {\n    list-style: none;\n    column-count: 2;\n    column-gap: 24px;\n  }\n  @media (max-width: 560px) { .toc-list { column-count: 1; } }\n  .toc-list li {\n    margin-bottom: 8px;\n    break-inside: avoid;\n  }\n  .toc-list a {\n    color: var(--slate);\n    text-decoration: none;\n    font-size: 14px;\n    font-weight: 400;\n    display: flex;\n    align-items: flex-start;\n    gap: 8px;\n    transition: color .2s;\n  }\n  .toc-list a::before {\n    content: counter(toc-item);\n    counter-increment: toc-item;\n    font-family: 'JetBrains Mono', monospace;\n    font-size: 11px;\n    color: var(--blue-lite);\n    min-width: 18px;\n    margin-top: 2px;\n  }\n  .toc-list { counter-reset: toc-item; }\n  .toc-list a:hover { color: var(--blue); }\n\n  \/* \u2500\u2500 Typography \u2500\u2500 *\/\n  h2 {\n    font-family: 'DM Serif Display', serif;\n    font-size: clamp(22px, 3.5vw, 30px);\n    color: var(--navy);\n    margin: 56px 0 18px;\n    line-height: 1.25;\n    scroll-margin-top: 24px;\n  }\n  h3 {\n    font-family: 'DM Sans', sans-serif;\n    font-size: 19px;\n    font-weight: 600;\n    color: var(--navy-mid);\n    margin: 36px 0 14px;\n    scroll-margin-top: 24px;\n  }\n  h4 {\n    font-family: 'DM Sans', sans-serif;\n    font-size: 16px;\n    font-weight: 600;\n    color: var(--slate);\n    margin: 24px 0 10px;\n  }\n  p { margin-bottom: 18px; }\n  a { color: var(--blue); text-decoration: underline; text-decoration-thickness: 1px; text-underline-offset: 3px; }\n  a:hover { color: var(--blue-lite); }\n  strong { font-weight: 600; color: var(--navy-mid); }\n  em { font-style: italic; }\n\n  \/* \u2500\u2500 Divider \u2500\u2500 *\/\n  .section-divider {\n    border: none;\n    border-top: 1px solid var(--border);\n    margin: 48px 0 0;\n  }\n\n  \/* \u2500\u2500 Info boxes \u2500\u2500 *\/\n  .callout {\n    border-radius: var(--radius);\n    padding: 20px 24px;\n    margin: 28px 0;\n    display: flex;\n    gap: 14px;\n    align-items: flex-start;\n  }\n  .callout-icon { font-size: 20px; flex-shrink: 0; margin-top: 1px; }\n  .callout-body { font-size: 15px; line-height: 1.65; }\n  .callout-body strong { display: block; font-size: 14px; letter-spacing: .05em; text-transform: uppercase; margin-bottom: 4px; }\n  .callout.info    { background: #eff6ff; border-left: 4px solid var(--blue); }\n  .callout.tip     { background: #f0fdf4; border-left: 4px solid var(--green); }\n  .callout.warning { background: #fffbeb; border-left: 4px solid var(--accent); }\n\n  \/* \u2500\u2500 Tables \u2500\u2500 *\/\n  .table-wrap { overflow-x: auto; margin: 28px 0; border-radius: var(--radius); box-shadow: var(--shadow); }\n  table { width: 100%; border-collapse: collapse; font-size: 14.5px; }\n  thead { background: var(--navy); color: var(--white); }\n  thead th { padding: 14px 16px; text-align: left; font-weight: 500; font-size: 13px; letter-spacing: .04em; }\n  tbody tr { border-bottom: 1px solid var(--border); transition: background .15s; }\n  tbody tr:hover { background: var(--bg); }\n  tbody td { padding: 13px 16px; vertical-align: top; }\n  tbody tr:last-child { border-bottom: none; }\n  .badge {\n    display: inline-block;\n    padding: 2px 8px;\n    border-radius: 4px;\n    font-size: 11.5px;\n    font-weight: 600;\n    letter-spacing: .04em;\n    text-transform: uppercase;\n  }\n  .badge-green  { background: #d1fae5; color: #065f46; }\n  .badge-blue   { background: #dbeafe; color: #1e40af; }\n  .badge-amber  { background: #fef3c7; color: #92400e; }\n  .badge-red    { background: #fee2e2; color: #991b1b; }\n\n  \/* \u2500\u2500 Comparison Cards \u2500\u2500 *\/\n  .compare-grid {\n    display: grid;\n    grid-template-columns: 1fr 1fr;\n    gap: 20px;\n    margin: 28px 0;\n  }\n  @media (max-width: 560px) { .compare-grid { grid-template-columns: 1fr; } }\n  .compare-card {\n    border: 1px solid var(--border);\n    border-radius: var(--radius);\n    overflow: hidden;\n    box-shadow: var(--shadow);\n  }\n  .compare-card-head {\n    padding: 14px 20px;\n    font-weight: 600;\n    font-size: 14px;\n    color: var(--white);\n  }\n  .compare-card-head.blue  { background: var(--navy-mid); }\n  .compare-card-head.teal  { background: #0f766e; }\n  .compare-card ul { list-style: none; padding: 16px 20px; }\n  .compare-card ul li {\n    font-size: 14px;\n    padding: 6px 0;\n    border-bottom: 1px solid var(--border);\n    display: flex; gap: 8px; align-items: flex-start;\n  }\n  .compare-card ul li:last-child { border-bottom: none; }\n  .compare-card ul li::before { content: '\u2192'; color: var(--blue-lite); flex-shrink: 0; }\n\n  \/* \u2500\u2500 Spec Grid \u2500\u2500 *\/\n  .spec-grid {\n    display: grid;\n    grid-template-columns: repeat(auto-fill, minmax(200px,1fr));\n    gap: 16px;\n    margin: 28px 0;\n  }\n  .spec-card {\n    background: var(--bg);\n    border: 1px solid var(--border);\n    border-radius: var(--radius);\n    padding: 18px 20px;\n    text-align: center;\n  }\n  .spec-card .spec-value {\n    font-family: 'JetBrains Mono', monospace;\n    font-size: 22px;\n    font-weight: 500;\n    color: var(--navy);\n    display: block;\n    margin-bottom: 6px;\n  }\n  .spec-card .spec-label {\n    font-size: 12.5px;\n    color: var(--muted);\n    text-transform: uppercase;\n    letter-spacing: .07em;\n  }\n\n  \/* \u2500\u2500 Process steps \u2500\u2500 *\/\n  .step-list { list-style: none; margin: 24px 0; }\n  .step-list li {\n    display: flex;\n    gap: 18px;\n    align-items: flex-start;\n    margin-bottom: 20px;\n  }\n  .step-num {\n    width: 34px; height: 34px;\n    background: var(--navy);\n    color: var(--white);\n    border-radius: 50%;\n    display: flex; align-items: center; justify-content: center;\n    font-family: 'JetBrains Mono', monospace;\n    font-size: 13px;\n    font-weight: 500;\n    flex-shrink: 0;\n    margin-top: 2px;\n  }\n  .step-body { flex: 1; }\n  .step-body strong { display: block; font-size: 16px; color: var(--navy-mid); margin-bottom: 4px; }\n  .step-body p { font-size: 15px; margin: 0; }\n\n  \/* \u2500\u2500 Internal link cards \u2500\u2500 *\/\n  .link-cluster {\n    background: linear-gradient(135deg, var(--navy) 0%, var(--navy-mid) 100%);\n    border-radius: var(--radius);\n    padding: 28px 32px;\n    margin: 44px 0;\n    color: var(--white);\n  }\n  .link-cluster h3 {\n    font-family: 'DM Sans', sans-serif;\n    font-size: 13px;\n    font-weight: 600;\n    letter-spacing: .1em;\n    text-transform: uppercase;\n    color: var(--cyan);\n    margin: 0 0 16px;\n  }\n  .link-cluster p { color: rgba(255,255,255,.7); font-size: 14px; margin-bottom: 16px; }\n  .cluster-links { display: flex; flex-wrap: wrap; gap: 10px; }\n  .cluster-links a {\n    display: inline-flex;\n    align-items: center;\n    gap: 6px;\n    background: rgba(255,255,255,.08);\n    border: 1px solid rgba(255,255,255,.15);\n    color: rgba(255,255,255,.9);\n    text-decoration: none;\n    font-size: 13px;\n    font-weight: 500;\n    padding: 8px 14px;\n    border-radius: 6px;\n    transition: background .2s, border-color .2s;\n  }\n  .cluster-links a:hover { background: rgba(255,255,255,.16); border-color: rgba(255,255,255,.35); color: #fff; }\n  .cluster-links a::before { content: '\u2197'; font-size: 11px; color: var(--cyan); }\n\n  \/* \u2500\u2500 Inline link pill \u2500\u2500 *\/\n  .text-link-pill {\n    display: inline-flex;\n    align-items: center;\n    gap: 5px;\n    background: #eff6ff;\n    border: 1px solid #bfdbfe;\n    color: var(--blue);\n    text-decoration: none;\n    font-size: 14px;\n    font-weight: 500;\n    padding: 3px 10px;\n    border-radius: 20px;\n    transition: background .15s;\n    white-space: nowrap;\n  }\n  .text-link-pill:hover { background: #dbeafe; color: var(--navy); }\n  .text-link-pill::after { content: '\u2197'; font-size: 10px; }\n\n  \/* \u2500\u2500 CTA Banner \u2500\u2500 *\/\n  .cta-banner {\n    background: linear-gradient(135deg, #1e3a5f 0%, var(--navy) 100%);\n    border-radius: var(--radius);\n    padding: 44px 40px;\n    text-align: center;\n    color: var(--white);\n    margin: 56px 0 0;\n    box-shadow: var(--shadow-lg);\n    position: relative;\n    overflow: hidden;\n  }\n  .cta-banner::before {\n    content: '';\n    position: absolute; inset: 0;\n    background: radial-gradient(ellipse at 70% 50%, rgba(6,182,212,.12) 0%, transparent 60%);\n    pointer-events: none;\n  }\n  .cta-banner h2 {\n    font-family: 'DM Serif Display', serif;\n    font-size: clamp(22px, 3.5vw, 30px);\n    color: var(--white);\n    margin: 0 0 12px;\n  }\n  .cta-banner p {\n    color: rgba(255,255,255,.72);\n    font-size: 16px;\n    max-width: 520px;\n    margin: 0 auto 28px;\n  }\n  .cta-btn {\n    display: inline-flex;\n    align-items: center;\n    gap: 8px;\n    background: var(--cyan);\n    color: var(--navy);\n    text-decoration: none;\n    font-weight: 600;\n    font-size: 15px;\n    padding: 14px 32px;\n    border-radius: 8px;\n    transition: opacity .2s, transform .15s;\n  }\n  .cta-btn:hover { opacity: .9; transform: translateY(-1px); color: var(--navy); }\n\n  \/* \u2500\u2500 FAQ \u2500\u2500 *\/\n  .faq-item { border-bottom: 1px solid var(--border); padding: 20px 0; }\n  .faq-item:last-child { border-bottom: none; }\n  .faq-q {\n    font-weight: 600;\n    color: var(--navy-mid);\n    font-size: 16px;\n    margin-bottom: 10px;\n    display: flex;\n    gap: 10px;\n    align-items: flex-start;\n  }\n  .faq-q::before {\n    content: 'Q';\n    font-family: 'JetBrains Mono', monospace;\n    font-size: 12px;\n    font-weight: 700;\n    color: var(--white);\n    background: var(--blue);\n    border-radius: 4px;\n    padding: 2px 6px;\n    flex-shrink: 0;\n    margin-top: 1px;\n  }\n  .faq-a { font-size: 15px; color: var(--slate); padding-left: 32px; }\n\n  \/* \u2500\u2500 SEO Note box \u2500\u2500 *\/\n  .seo-note {\n    background: #fffbeb;\n    border: 1px dashed var(--accent);\n    border-radius: var(--radius);\n    padding: 20px 24px;\n    margin: 40px 0 0;\n    font-size: 13.5px;\n    color: #78350f;\n  }\n  .seo-note strong { display: block; font-size: 13px; letter-spacing: .08em; text-transform: uppercase; margin-bottom: 8px; color: #92400e; }\n  .seo-note ul { padding-left: 18px; }\n  .seo-note ul li { margin-bottom: 5px; }\n<\/style>\n\n<body>\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 HERO \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<div class=\"hero\">\n  <div class=\"hero-eyebrow\">\u534a\u5bfc\u4f53\u5de5\u827a\u8bbe\u5907<\/div>\n  <p class=\"hero-sub\">\u5de5\u7a0b\u5e08\u3001\u5de5\u827a\u8d1f\u8d23\u4eba\u548c\u91c7\u8d2d\u56e2\u961f\u9700\u8981\u4e86\u89e3\u7684\u4e00\u5207--\u4ece\u6750\u6599\u79d1\u5b66\u548c\u5de5\u827a\u529b\u5b66\u5230\u7279\u5b9a\u57fa\u6750\u9009\u62e9\u548c\u5b9a\u5236\u5de5\u7a0b\u3002.<\/p>\n  <p class=\"hero-meta\">\n    <span>\u7531\u96c6\u667a\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\u63d0\u4f9b.<\/span>\n    <span>\u00b7<\/span>\n    <span>\u534a\u5bfc\u4f53\u629b\u5149\u4e13\u5bb6<\/span>\n    <span>\u00b7<\/span>\n    <span>15 \u5206\u949f\u9605\u8bfb<\/span>\n  <\/p>\n<\/div>\n\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 PAGE BODY \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n<div class=\"page-wrap\">\n\n  <!-- \u2500\u2500 TOC \u2500\u2500 -->\n  <nav class=\"toc-box\" aria-label=\"\u76ee\u5f55\">\n    <h2>\u76ee\u5f55<\/h2>\n    <ol class=\"toc-list\">\n      <li><a href=\"#what-are\">\u4ec0\u4e48\u662f\u629b\u5149\u6a21\u677f\uff1f<\/a><\/li>\n      <li><a href=\"#how-they-work\">\u629b\u5149\u6a21\u677f\u7684\u5de5\u4f5c\u539f\u7406<\/a><\/li>\n      <li><a href=\"#materials\">\u6750\u6599\u9009\u9879\uff1aFR-4\u3001G-10 \u548c CXT<\/a><\/li>\n      <li><a href=\"#waxless\">\u65e0\u8721\u5b89\u88c5\u4e0e\u6709\u8721\u5b89\u88c5<\/a><\/li>\n      <li><a href=\"#process-types\">\u5de5\u827a\u517c\u5bb9\u6027\uff1aSSP\u3001DSP \u548c CMP<\/a><\/li>\n      <li><a href=\"#substrates\">\u7279\u5b9a\u57fa\u8d28\u7684\u8003\u8651\u56e0\u7d20<\/a><\/li>\n      <li><a href=\"#specifications\">\u4e3b\u8981\u89c4\u683c\u53c2\u6570<\/a><\/li>\n      <li><a href=\"#edge\">\u8fb9\u7f18\u8f6e\u5ed3\u63a7\u5236\u548c\u8fb9\u7f18\u589e\u5f3a<\/a><\/li>\n      <li><a href=\"#custom\">\u6807\u51c6\u4e0e\u5b9a\u5236\u629b\u5149\u6a21\u677f<\/a><\/li>\n      <li><a href=\"#maintenance\">\u7ef4\u62a4\u3001\u5bff\u547d\u548c\u6c61\u67d3\u63a7\u5236<\/a><\/li>\n      <li><a href=\"#faq\">\u5e38\u89c1\u95ee\u9898<\/a><\/li>\n    <\/ol>\n  <\/nav>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       SECTION 1 \u2014 WHAT ARE POLISHING TEMPLATES\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n  <h2 id=\"what-are\">\u4ec0\u4e48\u662f\u629b\u5149\u6a21\u677f\uff1f<\/h2>\n\n  <p>\u5728\u534a\u5bfc\u4f53\u6676\u5706\u5236\u9020\u4e2d\uff0c\u8868\u9762\u5e73\u9762\u5ea6\u4e0d\u662f\u8d28\u91cf\u5c5e\u6027\uff0c\u800c\u662f\u5de5\u827a\u524d\u63d0\u3002\u4ece\u6df1\u7d2b\u5916\u66dd\u5149\u5230\u8d85\u7d2b\u5916\u6210\u50cf\uff0c\u6bcf\u4e00\u4e2a\u4e0b\u6e38\u5149\u523b\u6b65\u9aa4\u90fd\u8981\u6c42\u6574\u4e2a\u6676\u7247\u8868\u9762\u8fbe\u5230\u4e9a\u7eb3\u7c73\u7ea7\u7684\u5e73\u6574\u5ea6\u3002\u8981\u5b9e\u73b0\u8fd9\u79cd\u5e73\u9762\u5ea6\uff0c\u9996\u5148\u8981\u8fdb\u884c\u673a\u68b0\u629b\u5149\uff0c\u800c\u6bcf\u4e00\u6b21\u629b\u5149\u64cd\u4f5c\u7684\u6838\u5fc3\u90fd\u662f\u4e00\u79cd\u770b\u4f3c\u7b80\u5355\u5374\u53c8\u7ecf\u8fc7\u4e25\u683c\u8bbe\u8ba1\u7684\u8017\u6750\uff1a\u629b\u5149\u7247\u3002 <strong>\u629b\u5149\u6a21\u677f<\/strong>.<\/p>\n\n  <p>\u629b\u5149\u6a21\u677f\u662f\u5355\u9762\u6676\u7247\u629b\u5149\u673a\u4e2d\u4f7f\u7528\u7684\u4e00\u79cd\u7cbe\u5bc6\u5939\u5177\uff0c\u7528\u4e8e\u5728\u53d7\u63a7\u3001\u5747\u5300\u7684\u538b\u529b\u4e0b\u5c06\u88f8\u6676\u7247\u6216\u8bbe\u5907\u6676\u7247\u7262\u7262\u56fa\u5b9a\u5728\u629b\u5149\u57ab\u4e0a\u3002\u5728\u884c\u4e1a\u6587\u732e\u4e2d\u4e5f\u79f0\u4e3a <em>\u629b\u5149\u5939\u5177<\/em>, <em>\u6676\u7247\u8f7d\u4f53\u63d2\u4ef6<\/em>, \u6216 <em>\u5b89\u88c5\u6a21\u677f<\/em>, \u5b83\u662f\u673a\u5668\u7684\u8f7d\u7269\u5934\u548c\u6676\u7247\u4e4b\u95f4\u7684\u673a\u68b0\u63a5\u53e3\u3002.<\/p>\n\n  <p>\u4e0e\u63d0\u4f9b\u6574\u4f53\u4e0b\u538b\u529b\u7684\u53ef\u91cd\u590d\u4f7f\u7528\u91d1\u5c5e\u6216\u590d\u5408\u6750\u6599\u7ec4\u4ef6--\u627f\u8f7d\u5934\u4e0d\u540c\uff0c\u629b\u5149\u6a21\u677f\u662f\u4e00\u79cd\u534a\u6d88\u8017\u6027\u7ec4\u4ef6\uff0c\u5728\u53cd\u590d\u4f7f\u7528\u4e2d\u5176\u5c3a\u5bf8\u516c\u5dee\u4f1a\u964d\u4f4e\uff0c\u56e0\u6b64\u9700\u8981\u5b9a\u671f\u66f4\u6362\u3002\u629b\u5149\u6a21\u677f\u7684\u8bbe\u8ba1\u5bf9\u6700\u5173\u952e\u7684\u629b\u5149\u7ed3\u679c\u6709\u7740\u76f4\u63a5\u3001\u53ef\u6d4b\u91cf\u7684\u5f71\u54cd\uff1a\u603b\u539a\u5ea6\u53d8\u5316 (TTV)\u3001\u8868\u9762\u5e73\u6574\u5ea6 (SFQR)\u3001\u8fb9\u7f18\u6eda\u52a8\u548c\u8868\u9762\u7f3a\u9677\u5bc6\u5ea6\u3002.<\/p>\n\n  <div class=\"callout info\">\n    <span class=\"callout-icon\">\u2139\ufe0f<\/span>\n    <div class=\"callout-body\">\n      <strong>\u884c\u4e1a\u80cc\u666f<\/strong>\n      \u629b\u5149\u6a21\u677f\u9002\u7528\u4e8e\u6240\u6709\u4e3b\u8981\u7684\u5355\u9762\u629b\u5149 (SSP) \u5e73\u53f0\uff0c\u5305\u62ec Strasbaugh\u3001Speedfam\u3001Peter Wolters\u3001Lapmaster \u548c DISCO \u673a\u5668\u3002\u6a21\u677f\u7684\u51e0\u4f55\u5f62\u72b6\u4e0e\u7279\u5b9a\u7684\u673a\u5668\u6709\u5173\uff1b\u5728\u91c7\u8d2d\u4e4b\u524d\uff0c\u8bf7\u52a1\u5fc5\u9a8c\u8bc1\u4e0e\u60a8\u7684\u8f7d\u4f53\u5934\u8bbe\u8ba1\u7684\u517c\u5bb9\u6027\u3002.\n    <\/div>\n  <\/div>\n\n  <p>\u5728\u96c6\u667a\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\uff0c\u6211\u4eec\u4e3a\u5404\u79cd\u7c7b\u578b\u7684\u534a\u5bfc\u4f53\u886c\u5e95\uff08\u4ece\u4f20\u7edf\u7684 300 \u6beb\u7c73\u7845\u6676\u7247\u5230\u65b0\u5174\u7684 150 \u6beb\u7c73\u78b3\u5316\u7845 (SiC) \u886c\u5e95\uff09\u8bbe\u8ba1\u629b\u5149\u6a21\u677f\uff0c\u5c06\u6750\u6599\u79d1\u5b66\u4e13\u4e1a\u77e5\u8bc6\u4e0e\u4e25\u683c\u7684\u5c3a\u5bf8\u5236\u9020\u76f8\u7ed3\u5408\uff0c\u5728\u751f\u4ea7\u89c4\u6a21\u4e0a\u63d0\u4f9b\u4e00\u81f4\u7684\u6676\u7247\u5230\u6676\u7247\u5e73\u9762\u5ea6\u7ed3\u679c\u3002.<\/p>\n\n  <hr class=\"section-divider\" \/>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       SECTION 2 \u2014 HOW THEY WORK\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n  <h2 id=\"how-they-work\">\u629b\u5149\u6a21\u677f\u7684\u5de5\u4f5c\u539f\u7406\u529b\u5b66\u4e0e\u538b\u529b\u5206\u5e03<\/h2>\n\n  <p>\u8981\u4e86\u89e3\u629b\u5149\u6a21\u677f\u7684\u91cd\u8981\u6027\uff0c\u9700\u8981\u7b80\u5355\u4e86\u89e3\u4e00\u4e0b\u5355\u9762\u6676\u7247\u629b\u5149\u7684\u673a\u68b0\u539f\u7406\u3002\u5728\u6807\u51c6\u7684\u5355\u9762\u629b\u5149\u5de5\u827a\u4e2d\uff0c\u6676\u7247\u9762\u671d\u4e0b\u653e\u5728\u65cb\u8f6c\u7684\u629b\u5149\u57ab\u4e0a\uff0c\u800c\u8f7d\u4f53\u5934\u4ee5\u89c4\u5b9a\u7684\u8f7d\u8377\uff08\u901a\u5e38\u4ee5\u514b\/\u5e73\u65b9\u5398\u7c73\uff08g\/cm\u00b2\uff09\u8868\u793a\uff09\u5c06\u5176\u5411\u4e0b\u538b\u3002\u629b\u5149\u5242\uff08\u6d46\u6599\uff09\u6d41\u8fc7\u629b\u5149\u57ab\u8868\u9762\uff0c\u901a\u8fc7\u673a\u68b0\u78e8\u635f\u548c\u5316\u5b66\u6eb6\u89e3\u7684\u5171\u540c\u4f5c\u7528\u53bb\u9664\u6750\u6599\u3002.<\/p>\n\n  <p>\u629b\u5149\u6a21\u677f\u4f4d\u4e8e\u8f7d\u7247\u5934\u548c\u6676\u7247\u80cc\u9762\u4e4b\u95f4\u3002\u5b83\u5177\u6709\u4e09\u4e2a\u76f8\u4e92\u5173\u8054\u7684\u529f\u80fd\uff1a<\/p>\n\n  <ol style=\"padding-left: 24px; margin-bottom: 18px;\">\n    <li style=\"margin-bottom: 10px;\"><strong>\u538b\u529b\u518d\u5206\u914d\uff1a<\/strong> \u6a21\u677f\u7684\u5e95\u57ab\u662f\u4e0e\u521a\u6027\u8f7d\u677f\u7c98\u5408\u5728\u4e00\u8d77\u7684\u591a\u5b54\u987a\u5e94\u5c42\uff0c\u8d77\u7740\u538b\u529b\u7f13\u51b2\u5668\u7684\u4f5c\u7528\uff0c\u5c06\u8f7d\u7269\u5934\u7684\u70b9\u8f7d\u8377\u5206\u6563\u5230\u6574\u4e2a\u6676\u7247\u80cc\u9762\u7684\u5747\u5300\u538b\u529b\u573a\u4e2d\u3002\u538b\u529b\u4e0d\u5747\u5300\u662f\u6676\u5706\u5185\u539a\u5ea6\u53d8\u5316 (WIWT) \u7684\u4e3b\u8981\u9a71\u52a8\u56e0\u7d20\u3002.<\/li>\n    <li style=\"margin-bottom: 10px;\"><strong>\u6676\u7247\u56fa\u5b9a\uff1a<\/strong> \u6da6\u6e7f\u80cc\u57ab\u4ea7\u751f\u7684\u6bdb\u7ec6\u9644\u7740\u529b\u53ef\u5728\u6574\u4e2a\u629b\u5149\u5468\u671f\u4e2d\u5c06\u6676\u7247\u56fa\u5b9a\u5728\u539f\u4f4d\uff0c\u9632\u6b62\u6676\u7247\u5728\u73b0\u4ee3\u629b\u5149\u673a\u7684\u9ad8\u8f6c\u901f\u548c\u6a2a\u5411\u529b\u4f5c\u7528\u4e0b\u6253\u6ed1\u6216\u5f39\u51fa\u3002.<\/li>\n    <li style=\"margin-bottom: 10px;\"><strong>\u8fb9\u7f18\u51e0\u4f55\u63a7\u5236<\/strong> \u6a21\u677f\u7684\u6a2a\u622a\u9762\u8f6e\u5ed3--\u5c24\u5176\u662f\u5de5\u4f5c\u5b54\u69fd\u7684\u6df1\u5ea6\u548c\u89d2\u5ea6--\u76f4\u63a5\u51b3\u5b9a\u4e86\u6676\u7247\u5468\u8fb9\u7684\u629b\u5149\u538b\u529b\u68af\u5ea6\uff0c\u51b3\u5b9a\u4e86\u8fb9\u7f18\u662f\u6eda\u843d\u3001\u6eda\u8d77\u8fd8\u662f\u8fbe\u5230\u5e73\u6574\u7684\u8f6e\u5ed3\u3002\u8fd9\u662f\u6a21\u677f\u8bbe\u8ba1\u5728\u673a\u68b0\u65b9\u9762\u6700\u5fae\u5999\u7684\u5730\u65b9\u3002.<\/li>\n  <\/ol>\n\n  <p>\u521a\u6027\u8f7d\u677f\uff08\u6700\u5e38\u89c1\u7684\u662f FR-4 \u6216 G-10 \u73bb\u7483\u7ea4\u7ef4\u5c42\u538b\u677f\uff09\u662f\u8be5\u7cfb\u7edf\u7684\u5c3a\u5bf8\u652f\u67f1\u3002\u5176\u5e73\u9762\u5ea6\u516c\u5dee\u3001\u539a\u5ea6\u5747\u5300\u6027\u548c\u6750\u6599\u521a\u5ea6\u90fd\u51b3\u5b9a\u4e86\u80cc\u57ab\u7684\u538b\u529b\u5206\u5e03\u5982\u4f55\u5fe0\u5b9e\u5730\u4f20\u9012\u5230\u6676\u7247\u8868\u9762\u3002\u5373\u4f7f\u662f\u8f7d\u677f\u4e0a 10 \u5fae\u7c73\u7684\u5f2f\u66f2\uff0c\u4e5f\u4f1a\u5bfc\u81f4\u6676\u5706\u8868\u9762\u51fa\u73b0\u53ef\u6d4b\u91cf\u7684\u5e73\u9762\u5ea6\u4e0b\u964d\u3002.<\/p>\n\n  <div class=\"callout tip\">\n    <span class=\"callout-icon\">\ud83d\udca1<\/span>\n    <div class=\"callout-body\">\n      <strong>\u5de5\u7a0b\u6d1e\u5bdf<\/strong>\n      \u886c\u57ab\u7684\u538b\u7f29\u6a21\u91cf\u5fc5\u987b\u4e0e\u76ee\u6807\u6750\u6599\u53bb\u9664\u7387\u548c\u6676\u7247\u786c\u5ea6\u76f8\u5339\u914d\u3002\u592a\u786c\u7684\u886c\u57ab\u4f1a\u8fc7\u5ea6\u4f20\u9012\u8f7d\u7269\u5934\u7684\u4e0d\u5747\u5300\u6027\uff1b\u592a\u8f6f\u7684\u886c\u57ab\u4f1a\u5bfc\u81f4\u6676\u7247\u8fc7\u5ea6\u79fb\u52a8\u548c\u8fb9\u7f18\u6eda\u843d\u3002\u5409\u4e4b\u5c9b\u7684\u5de5\u7a0b\u5e08\u4f1a\u6839\u636e\u57fa\u677f\u7c7b\u578b\u548c\u5de5\u827a\u538b\u529b\u53c2\u6570\u6307\u5b9a\u80cc\u57ab\u786c\u5ea6\u3002.\n    <\/div>\n  <\/div>\n\n  <hr class=\"section-divider\" \/>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       SECTION 3 \u2014 MATERIALS\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n  <h2 id=\"materials\">\u6750\u6599\u9009\u9879\uff1aFR-4\u3001G-10 \u73bb\u7483\u7ea4\u7ef4\u548c\u8010\u5316\u5b66\u8150\u8680 (CXT) \u7b49\u7ea7<\/h2>\n\n  <p>\u8f7d\u677f\u6750\u6599\u662f\u629b\u5149\u6a21\u677f\u5de5\u7a0b\u4e2d\u6700\u91cd\u8981\u7684\u7ed3\u6784\u51b3\u5b9a\u56e0\u7d20\u3002\u534a\u5bfc\u4f53\u629b\u5149\u5e02\u573a\u4e0a\u4e3b\u8981\u6709\u4e09\u5927\u6750\u6599\u7cfb\u5217\uff0c\u6bcf\u79cd\u6750\u6599\u90fd\u6709\u5176\u72ec\u7279\u7684\u6027\u80fd\u5305\u7edc\u7ebf\u3002.<\/p>\n\n  <p>\u9009\u62e9\u5408\u9002\u7684\u6750\u6599\u9700\u8981\u5e73\u8861\u5c3a\u5bf8\u7a33\u5b9a\u6027\u3001\u4e0e\u7814\u78e8\u6db2\u7cfb\u7edf\u7684\u5316\u5b66\u517c\u5bb9\u6027\u3001\u53cd\u590d\u5faa\u73af\u4e0b\u7684\u673a\u68b0\u5f3a\u5ea6\u4ee5\u53ca\u629b\u5149\u73af\u5883\u7684\u6c61\u67d3\u98ce\u9669\u3002\u5982\u9700\u6df1\u5165\u6bd4\u8f83\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u4e13\u95e8\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/FR-4-vs-G-10-Fiberglass-Polishing-Templates-Material-Properties-Selection-Guide\/\" target=\"_blank\" class=\"text-link-pill\">FR-4 \u4e0e G-10 \u73bb\u7483\u7ea4\u7ef4\u629b\u5149\u6a21\u677f\u5bf9\u6bd4<\/a>.<\/p>\n\n  <h3>FR-4 \u73bb\u7483\u7ea4\u7ef4\u5c42\u538b\u677f<\/h3>\n  <p>FR-4 \u662f\u4e00\u79cd\u7528\u963b\u71c3\u73af\u6c27\u6811\u8102\u57fa\u4f53\u589e\u5f3a\u7684 NEMA \u7ea7\u73bb\u7483\u7ea4\u7ef4\u7f16\u7ec7\u7269\u3002\u7531\u4e8e\u5176\u51fa\u8272\u7684\u5c3a\u5bf8\u7a33\u5b9a\u6027\u3001\u7a33\u5b9a\u7684\u4ecb\u7535\u6027\u80fd\uff08\u6750\u6599\u5747\u5300\u6027\u7684\u4ee3\u8868\uff09\u4ee5\u53ca\u5728\u5927\u6279\u91cf\u7845\u5e94\u7528\u4e2d\u7684\u4f4e\u5355\u6b21\u6210\u672c\uff0c\u5b83\u662f\u7845\u7247\u629b\u5149\u4e2d\u4f7f\u7528\u6700\u5e7f\u6cdb\u7684\u8f7d\u677f\u6750\u6599\u3002.<\/p>\n\n  <p>\u7528\u4e8e\u629b\u5149\u5e94\u7528\u7684 FR-4 \u6a21\u677f\u6709\u4e00\u4e2a\u5173\u952e\u7684\u5236\u9020\u7ec6\u8282\uff1a\u6240\u6709\u8fb9\u7f18\u90fd\u5fc5\u987b\u7ecf\u8fc7\u7cbe\u52a0\u5de5\uff08\u901a\u5e38\u662f CNC \u94e3\u524a\u548c\u8fb9\u7f18\u5bc6\u5c01\u6216\u6d82\u5c42\uff09\uff0c\u4ee5\u9632\u6b62\u73bb\u7483\u7ea4\u7ef4\u788e\u7247\u8fdb\u5165\u629b\u5149\u73af\u5883\u3002\u5373\u4f7f\u662f\u4e9a\u5fae\u7c73\u7ea7\u7684\u73bb\u7483\u7ea4\u7ef4\u788e\u7247\u4e5f\u4f1a\u5728 300 \u6beb\u7c73\u539a\u7684\u7845\u7247\u4e0a\u9020\u6210\u707e\u96be\u6027\u7684\u5212\u75d5\u7f3a\u9677\u3002\u5409\u4e4b\u5c9b\u6a21\u677f\u5728\u88c5\u8fd0\u524d\u8981\u5728\u653e\u5927\u955c\u4e0b\u8fdb\u884c 100% \u8fb9\u7f18\u68c0\u6d4b\u3002.<\/p>\n\n  <h3>G-10 \u73bb\u7483\u7ea4\u7ef4\u5c42\u538b\u677f<\/h3>\n  <p>G-10 \u662f FR-4 \u7684\u975e\u963b\u71c3\u524d\u4f53\uff0c\u91c7\u7528\u76f8\u540c\u7684\u73bb\u7483\/\u73af\u6c27\u7f16\u7ec7\u7ed3\u6784\uff0c\u4f46\u4e0d\u542b\u5364\u5316\u963b\u71c3\u5242\u3002\u5b9e\u9645\u4e0a\uff0c\u4e0e FR-4 \u76f8\u6bd4\uff0cG-10 \u5bf9\u5f3a\u9178\u6027\u6d46\u6599\u7684\u8010\u5316\u5b66\u6027\u7565\u80dc\u4e00\u7b79\uff0c\u56e0\u4e3a\u73af\u6c27\u57fa\u4f53\u4e0d\u6613\u53d7\u9178\u5f15\u8d77\u7684\u81a8\u80c0\u5f71\u54cd\u3002\u5bf9\u4e8e\u4f7f\u7528\u4f20\u7edf\u78b1\u6027\u7845\u6d46\uff08pH \u503c\u4e3a 10-11\uff09\u8fdb\u884c\u7845\u629b\u5149\u7684\u60c5\u51b5\uff0c\u4e24\u8005\u7684\u6027\u80fd\u5dee\u5f02\u53ef\u4ee5\u5ffd\u7565\u4e0d\u8ba1\u3002\u5bf9\u4e8e\u5f31\u9178\u6027\u6d46\u6599\u7cfb\u7edf\uff0c\u901a\u5e38\u9996\u9009 G-10\u3002.<\/p>\n\n  <h3>\u8010\u5316\u5b66\uff08CXT\uff09\u6750\u6599<\/h3>\n  <p>\u5bf9\u4e8e SiC\u3001GaAs \u548c\u5176\u4ed6\u9700\u8981\u9ad8\u4fb5\u8680\u6027\u6d46\u6599\u5316\u5b66\u6210\u5206\u7684\u57fa\u677f\u7c7b\u578b\uff08\u5305\u62ec\u57fa\u4e8e KMnO\u2084 \u7684\u6c27\u5316\u5242\u6d46\u6599\uff08\u901a\u5e38 pH \u503c\u4e3a 2-4\uff09\u6216\u5f3a\u78b1\u6027\u914d\u65b9\uff08pH \u503c\u4e3a 12 \u4ee5\u4e0a\uff09\uff09\uff0c\u6807\u51c6 FR-4 \u548c G-10 \u5c42\u538b\u677f\u662f\u4e0d\u591f\u7684\u3002\u8fd9\u4e9b\u73af\u5883\u4f1a\u5bfc\u81f4\u73af\u6c27\u57fa\u8d28\u9010\u6e10\u5206\u5c42\uff0c\u4ece\u800c\u5bfc\u81f4\u4e0d\u53ef\u9884\u77e5\u7684\u539a\u5ea6\u53d8\u5316\u3001\u80cc\u57ab\u8131\u7c98\u4ee5\u53ca\u8f7d\u677f\u6750\u6599\u8131\u843d\u9020\u6210\u7684\u6d46\u6599\u6c61\u67d3\u3002.<\/p>\n\n  <p>CXT \u7ea7\u6a21\u677f\u91c7\u7528\u65e0\u7f1d\u5355\u58f3\u7ed3\u6784\uff0c\u5b8c\u5168\u6d88\u9664\u4e86\u5c42\u538b\u677f\u5c42\u754c\u9762\uff0c\u5e76\u7ed3\u5408\u4e86\u5316\u5b66\u60f0\u6027\u57fa\u4f53\u6811\u8102\uff0c\u53ef\u8010\u53d7 SiC CMP \u4e2d\u9047\u5230\u7684\u5168\u90e8 pH \u5149\u8c31\uff0c\u4ece\u800c\u89e3\u51b3\u4e86\u8fd9\u4e00\u95ee\u9898\u3002\u6709\u5173\u5b8c\u6574\u7684\u5e94\u7528\u6307\u5bfc\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/SiC-Wafer-Polishing-Templates-Chemically-Resistant-Solutions-for-Silicon-Carbide-Processing\/\" target=\"_blank\" class=\"text-link-pill\">\u78b3\u5316\u7845\u6676\u7247\u629b\u5149\u6a21\u677f<\/a> \u8be6\u7ec6\u4ecb\u7ecd\u4e86\u8fd9\u4e00\u70b9\u3002.<\/p>\n\n  <div class=\"table-wrap\">\n    <table>\n      <thead>\n        <tr>\n          <th>\u8d22\u4ea7<\/th>\n          <th>FR-4<\/th>\n          <th>G-10<\/th>\n          <th>CXT \u7b49\u7ea7<\/th>\n        <\/tr>\n      <\/thead>\n      <tbody>\n        <tr>\n          <td><strong>\u4e3b\u8981\u5e94\u7528<\/strong><\/td>\n          <td>Si SSP \/ DSP<\/td>\n          <td>\u7845\u3001\u5f31\u9178\u6027\u6ce5\u6d46<\/td>\n          <td>SiC CMP\u3001\u7837\u5316\u9553<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>pH \u5de5\u4f5c\u8303\u56f4<\/strong><\/td>\n          <td>8 - 12<\/td>\n          <td>5 - 12<\/td>\n          <td>2 - 13<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u5c3a\u5bf8\u7a33\u5b9a\u6027<\/strong><\/td>\n          <td><span class=\"badge badge-green\">\u4f18\u79c0<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u4f18\u79c0<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u4f18\u79c0<\/span><\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u8fb9\u7f18\u7ea4\u7ef4\u98ce\u9669<\/strong><\/td>\n          <td><span class=\"badge badge-amber\">\u9700\u8981\u5bc6\u5c01<\/span><\/td>\n          <td><span class=\"badge badge-amber\">\u9700\u8981\u5bc6\u5c01<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u65e0\uff08\u65e0\u7f1d\uff09<\/span><\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u6ce5\u6d46\u517c\u5bb9\u6027<\/strong><\/td>\n          <td>\u4ec5\u78b1\u6027<\/td>\n          <td>\u78b1\u6027 + \u5f31\u9178\u6027<\/td>\n          <td>\u5168\u5149\u8c31<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u76f8\u5bf9\u6210\u672c<\/strong><\/td>\n          <td><span class=\"badge badge-green\">\u4f4e<\/span><\/td>\n          <td><span class=\"badge badge-blue\">\u4e2d\u5ea6<\/span><\/td>\n          <td><span class=\"badge badge-amber\">\u9ad8\u7ea7<\/span><\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u5178\u578b\u6676\u7247\u7c7b\u578b<\/strong><\/td>\n          <td>\u7845\uff08\u6240\u6709\u76f4\u5f84\uff09<\/td>\n          <td>\u7845\u3001\u73bb\u7483<\/td>\n          <td>\u78b3\u5316\u7845\u3001\u7837\u5316\u9553\u3001\u78f7\u5316\u94df<\/td>\n        <\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n\n  <!-- Cluster B link -->\n  <div class=\"link-cluster\">\n    <h3>\ud83d\udcd6\u6df1\u5ea6\u6316\u6398\uff1a\u6750\u6599\u4e0e\u5de5\u827a\u6587\u7ae0<\/h3>\n    <p>\u63a2\u7d22\u6211\u4eec\u6709\u5173\u6a21\u677f\u6750\u6599\u3001\u52a0\u5de5\u673a\u68b0\u548c\u5de5\u7a0b\u8bbe\u8ba1\u7684\u6280\u672f\u96c6\u7fa4\uff1a<\/p>\n    <div class=\"cluster-links\">\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/FR-4-vs-G-10-Fiberglass-Polishing-Templates-Material-Properties-Selection-Guide\/\" target=\"_blank\">FR-4 \u4e0e G-10 \u6750\u6599\u6307\u5357<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Role-of-Polishing-Templates-in-CMP-How-Fixture-Design-Impacts-Wafer-Flatness\/\" target=\"_blank\">CMP \u6d41\u7a0b\u4e2d\u7684\u6a21\u677f<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Waxless-Polishing-Templates-vs-Wax-Mounting-Cost-Quality-Process-Comparison\/\" target=\"_blank\">\u65e0\u8721\u5b89\u88c5\u4e0e\u6709\u8721\u5b89\u88c5<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-Polishing-Template-Edge-Design-Controls-Wafer-Edge-Profile-Reduces-Edge-Exclusion\/\" target=\"_blank\">\u8fb9\u7f18\u8bbe\u8ba1\u548c\u8fb9\u7f18\u8f6e\u5ed3\u63a7\u5236<\/a>\n    <\/div>\n  <\/div>\n\n  <hr class=\"section-divider\" \/>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       SECTION 4 \u2014 WAXLESS\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n  <h2 id=\"waxless\">\u65e0\u8721\u629b\u5149\u6a21\u677f\u4e0e\u4f20\u7edf\u8721\u9576\u5d4c\u5bf9\u6bd4<\/h2>\n\n  <p>\u629b\u5149\u6a21\u677f\u4ece\u88f8\u8f7d\u677f\u53d1\u5c55\u5230\u73b0\u4ee3\u65e0\u8721\u8bbe\u8ba1\uff0c\u662f\u8fc7\u53bb\u4e8c\u5341\u5e74\u6765\u7845\u6676\u7247\u629b\u5149\u9886\u57df\u6700\u5177\u5f71\u54cd\u529b\u7684\u5de5\u827a\u6539\u8fdb\u4e4b\u4e00\u3002\u8981\u4e86\u89e3\u5176\u4e2d\u7684\u539f\u56e0\uff0c\u6211\u4eec\u9700\u8981\u7b80\u5355\u4e86\u89e3\u4e00\u4e0b\u65e7\u65b9\u6cd5\u6240\u5e26\u6765\u7684\u95ee\u9898\u3002.<\/p>\n\n  <h3>\u4f20\u7edf\u8721\u88f1\u5de5\u827a<\/h3>\n  <p>\u5728\u4f20\u7edf\u7684\u8721\u8d34\u629b\u5149\u4e2d\uff0c\u6676\u7247\u80cc\u9762\u4f7f\u7528\u52a0\u70ed\u7684\u8721\u7c98\u5408\u5230\u9676\u74f7\u6216\u73bb\u7483\u5757\u4e0a\u3002\u629b\u5149\u540e\uff0c\u5fc5\u987b\u5bf9\u6676\u7247\u8fdb\u884c\u70ed\u8131\u7c98\uff0c\u7136\u540e\u8fdb\u884c\u5316\u5b66\u6e05\u6d17\u6b65\u9aa4\u4ee5\u53bb\u9664\u8721\u6b8b\u7559\u7269\uff0c\u7136\u540e\u518d\u8fdb\u884c\u8fdb\u4e00\u6b65\u52a0\u5de5\u3002\u8fd9\u4e00\u7cfb\u5217\u5de5\u5e8f\u5f15\u5165\u4e86\u591a\u79cd\u5931\u6548\u6a21\u5f0f\uff1a\u8721\u5c42\u539a\u5ea6\u4e0d\u5747\u4f1a\u5bfc\u81f4\u7cfb\u7edf TTV \u53d8\u5316\uff1b\u6d82\u8721\u548c\u9664\u8721\u8fc7\u7a0b\u4e2d\u7684\u70ed\u5faa\u73af\u4f1a\u4ea7\u751f\u77ac\u65f6\u5e94\u529b\uff0c\u5076\u5c14\u4f1a\u5bfc\u81f4\u6676\u7247\u7834\u635f\uff08\u5c24\u5176\u662f\u8584\u6676\u7247\u6216\u6613\u788e\u6676\u7247\uff09\uff1b\u6676\u7247\u80cc\u9762\u7684\u8721\u6b8b\u7559\u7269\u4f1a\u6210\u4e3a\u540e\u7eed\u6269\u6563\u548c\u690d\u5165\u6b65\u9aa4\u4e2d\u7684\u5fae\u7c92\u6c61\u67d3\u6e90\u3002.<\/p>\n\n  <h3>\u65e0\u8721\u6a21\u677f\u6cd5<\/h3>\n  <p>\u73b0\u4ee3\u65e0\u8721\u629b\u5149\u6a21\u677f\u5b8c\u5168\u53d6\u4ee3\u4e86\u8721\u7c98\u5408\u6b65\u9aa4\u3002\u4e0e\u8f7d\u677f\u7c98\u5408\u7684\u591a\u5b54\u5e95\u57ab\u53ef\u4f5c\u4e3a\u6bdb\u7ec6\u7ba1\u56fa\u5b9a\u8868\u9762\uff1a\u5728\u88c5\u8f7d\u524d\u7528\u53bb\u79bb\u5b50\u6c34\u6da6\u6e7f\u5e95\u57ab\u65f6\uff0c\u6676\u7247\u80cc\u9762\u901a\u8fc7\u8868\u9762\u5f20\u529b\u548c\u6bdb\u7ec6\u7ba1\u529b\u7c98\u9644\uff0c\u8db3\u4ee5\u5728\u6574\u4e2a\u629b\u5149\u5468\u671f\u4e2d\u4fdd\u6301\u56fa\u5b9a\uff0c\u4f46\u5728\u5e95\u57ab\u5e72\u71e5\u65f6\u6216\u5728\u629b\u5149\u540e\u4f7f\u7528\u8f7b\u67d4\u7684\u673a\u68b0\u8131\u6a21\u5242\u65f6\uff0c\u6676\u7247\u4f1a\u5e72\u51c0\u5730\u8131\u6a21\u3002\u65e0\u9700\u52a0\u70ed\uff0c\u65e0\u9700\u5316\u5b66\u54c1\uff0c\u65e0\u9700\u4e13\u95e8\u7684\u6e05\u6d01\u6b65\u9aa4\u3002.<\/p>\n\n  <p>\u8be5\u5de5\u827a\u4f18\u52bf\u663e\u8457\uff0c\u5e76\u5df2\u5728\u591a\u4e2a\u6676\u5706\u76f4\u5f84\u8282\u70b9\u7684\u751f\u4ea7\u89c4\u6a21\u4e2d\u5f97\u5230\u9a8c\u8bc1\u3002\u6709\u5173\u6210\u672c\u3001\u4ea7\u91cf\u548c\u5de5\u827a\u6d41\u7a0b\u7684\u5168\u9762\u6bd4\u8f83\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Waxless-Polishing-Templates-vs-Wax-Mounting-Cost-Quality-Process-Comparison\/\" target=\"_blank\" class=\"text-link-pill\">\u65e0\u8721\u5b89\u88c5\u4e0e\u6709\u8721\u5b89\u88c5\uff1a\u5168\u9762\u6bd4\u8f83<\/a>.<\/p>\n\n  <div class=\"compare-grid\">\n    <div class=\"compare-card\">\n      <div class=\"compare-card-head blue\">\u2697\ufe0f \u8721\u88f1<\/div>\n      <ul>\n        <li>\u9700\u8981\u6d82\u8721\u7ad9<\/li>\n        <li>\u5b89\u88c5\/\u62c6\u5378\u8fc7\u7a0b\u4e2d\u7684\u70ed\u5faa\u73af<\/li>\n        <li>\u629b\u5149\u540e\u5316\u5b66\u8131\u8721\u6b65\u9aa4<\/li>\n        <li>\u8721\u539a\u5ea6\u53d8\u5316 \u2192 TTV \u5f71\u54cd<\/li>\n        <li>\u8584\u6676\u7247\u7684\u7834\u635f\u98ce\u9669<\/li>\n        <li>\u4e0b\u6e38\u5de5\u827a\u4e2d\u7684\u8721\u6c61\u67d3<\/li>\n        <li>\u6d88\u8017\u54c1\u548c\u4eba\u5de5\u6210\u672c\u8f83\u9ad8<\/li>\n      <\/ul>\n    <\/div>\n    <div class=\"compare-card\">\n      <div class=\"compare-card-head teal\">\u2705 \u65e0\u8721\u6a21\u677f<\/div>\n      <ul>\n        <li>\u7b80\u5355\u7684\u6e7f\u8d1f\u8377\u5de5\u827a<\/li>\n        <li>\u6676\u7247\u4e0a\u65e0\u70ed\u5e94\u529b<\/li>\n        <li>\u629b\u5149\u540e\u65e0\u9700\u5316\u5b66\u6e05\u6d17<\/li>\n        <li>\u901a\u8fc7\u517c\u5bb9\u80cc\u57ab\u5b9e\u73b0\u5747\u5300\u538b\u529b<\/li>\n        <li>\u53ef\u5b89\u5168\u7528\u4e8e\u8584\u6676\u7247\u548c\u6613\u788e\u57fa\u5e95<\/li>\n        <li>\u6d88\u9664\u8721\u6c61\u67d3\u98ce\u9669<\/li>\n        <li>\u964d\u4f4e\u603b\u62e5\u6709\u6210\u672c<\/li>\n      <\/ul>\n    <\/div>\n  <\/div>\n\n  <hr class=\"section-divider\" \/>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       SECTION 5 \u2014 PROCESS TYPES\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n  <h2 id=\"process-types\">\u5de5\u827a\u517c\u5bb9\u6027\uff1aSSP\u3001DSP\u3001CMP \u548c\u7ffb\u8f6c\u629b\u5149<\/h2>\n\n  <p>\u629b\u5149\u6a21\u677f\u4e13\u4e3a\u5355\u9762\u629b\u5149\u7ed3\u6784\u800c\u8bbe\u8ba1\u3002\u867d\u7136\u6bcf\u79cd\u5de5\u827a\u53d8\u4f53\u90fd\u5177\u6709\u4e0a\u8ff0\u57fa\u672c\u529b\u5b66\u539f\u7406\uff0c\u4f46\u5728\u5c3a\u5bf8\u516c\u5dee\u3001\u6750\u6599\u517c\u5bb9\u6027\u548c\u5e95\u57ab\u89c4\u683c\u65b9\u9762\uff0c\u5bf9\u6a21\u677f\u7684\u8981\u6c42\u5374\u5927\u4e0d\u76f8\u540c\u3002.<\/p>\n\n  <h3>\u5355\u9762\u629b\u5149 (SSP)<\/h3>\n  <p>SSP \u662f\u629b\u5149\u6a21\u677f\u6700\u5e38\u89c1\u7684\u5e94\u7528\u3002\u5355\u4e2a\u6676\u5706\uff08\u6216\u591a\u8154\u6a21\u677f\u4e0a\u7684\u4e00\u6279\u6676\u5706\uff09\u9762\u671d\u4e0b\u56fa\u5b9a\u5728\u5355\u4e2a\u5de5\u4f5c\u5b54\u4e2d\uff0c\u8f7d\u5934\u65bd\u52a0\u5747\u5300\u7684\u4e0b\u538b\u529b\u3002\u6a21\u677f\u5e73\u9762\u5ea6\u516c\u5dee\u901a\u5e38\u89c4\u5b9a\u4e3a\u6574\u4e2a\u8f7d\u677f\u5de5\u4f5c\u9762 \u2264 10 \u00b5m\uff0c\u5de5\u4f5c\u5b54\u6df1\u5ea6\u516c\u5dee\u5728 \u00b1 5 \u00b5m \u8303\u56f4\u5185\uff0c\u9002\u7528\u4e8e\u4f18\u8d28\u7845\u5e94\u7528\u3002.<\/p>\n\n  <h3>\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316 (CMP)<\/h3>\n  <p>CMP \u5c06\u5355\u9762\u629b\u5149\u6269\u5c55\u5230\u5668\u4ef6\u5c42\uff0c\u5728 300 \u6beb\u7c73\u7684\u6676\u7247\u4e0a\uff0c\u4ecb\u7535\u5c42\u3001\u91d1\u5c5e\u5c42\u548c\u963b\u6321\u5c42\u5fc5\u987b\u5e73\u9762\u5316\u5230\u57c3\u7ea7\u5747\u5300\u5ea6\u3002\u4e0e\u4f20\u7edf\u7684 SSP \u76f8\u6bd4\uff0cCMP \u629b\u5149\u6a21\u677f\u5fc5\u987b\u80fd\u591f\u627f\u53d7\u66f4\u5f3a\u7684\u6d46\u6599\u5316\u5b66\u6210\u5206\u3001\u66f4\u9ad8\u7684\u5e94\u7528\u538b\u529b\uff08\u9ad8\u8fbe 7 psi\uff09\u548c\u66f4\u9ad8\u7684\u65cb\u8f6c\u901f\u5ea6\u3002\u80cc\u57ab\u89c4\u683c\u5728 CMP \u4e2d\u5c24\u4e3a\u91cd\u8981--\u80cc\u57ab\u7684\u786c\u5ea6\u548c\u539a\u5ea6\u5747\u5300\u6027\u76f4\u63a5\u51b3\u5b9a\u4e86\u5e73\u9762\u5316\u6548\u7387\uff08\u9009\u62e9\u6027\u53bb\u9664\u9ad8\u5f62\u8c8c\u800c\u4e0d\u8fc7\u5ea6\u629b\u5149\u4f4e\u533a\u57df\u7684\u80fd\u529b\uff09\u3002\u6211\u4eec\u7684\u6280\u672f\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Role-of-Polishing-Templates-in-CMP-How-Fixture-Design-Impacts-Wafer-Flatness\/\" target=\"_blank\" class=\"text-link-pill\">\u629b\u5149\u6a21\u677f\u5728 CMP \u4e2d\u7684\u4f5c\u7528<\/a> \u6df1\u5165\u7814\u7a76\u4e86\u8fd9\u4e9b\u52a8\u6001\u53d8\u5316\u3002.<\/p>\n\n  <h3>\u53cc\u9762\u629b\u5149 (DSP) \u63a5\u53e3<\/h3>\n  <p>\u5728 DSP \u4e2d\uff0c\u6676\u5706\u4f4d\u4e8e\u4e0a\u4e0b\u629b\u5149\u57ab\u4e4b\u95f4\u7684\u8584\u8f7d\u4f53\u76d8\uff08\u901a\u5e38\u4e3a\u94a2\u6216\u9676\u74f7\uff09\u4e2d\uff0c\u8f7d\u4f53\u4f4d\u7f6e\u4e0d\u4f7f\u7528\u4f20\u7edf\u7684\u629b\u5149\u6a21\u677f\u3002\u7136\u800c\uff0c\u629b\u5149\u6a21\u677f\u53ef\u7528\u4e8e DSP \u540e\u4fee\u9970 SSP \u6b65\u9aa4\u4e2d\uff0c\u6b64\u65f6\u4e00\u4e2a\u9762\u9700\u8981\u91cd\u65b0\u629b\u5149\uff0c\u4ee5\u7ea0\u6b63 DSP \u671f\u95f4\u5f15\u5165\u7684\u8fb9\u7f18\u8f6e\u5ed3\u4e0d\u5bf9\u79f0\u3002\u5728\u8fd9\u79cd\u5e94\u7528\u4e2d\uff0c\u901a\u5e38\u4f1a\u589e\u52a0\u6a21\u677f\u80cc\u57ab\u7684\u8f6f\u5ea6\uff0c\u4ee5\u5c3d\u91cf\u51cf\u5c11\u5df2\u629b\u5149\u53cd\u9762\u7684\u673a\u68b0\u5e94\u529b\u3002.<\/p>\n\n  <h3>\u7ffb\u8f6c\u629b\u5149<\/h3>\n  <p>\u7ffb\u8f6c\u629b\u5149\u662f SSP \u7684\u4e00\u4e2a\u8865\u5145\u6b65\u9aa4\uff0c\u5728\u8fd9\u4e00\u6b65\u9aa4\u4e2d\uff0c\u539f\u5148\u629b\u5149\u7684\u9762\u88ab\u91cd\u65b0\u629b\u5149\uff08\u9762\u671d\u4e0a\uff09\uff0c\u4ee5\u7ea0\u6b63\u521d\u59cb SSP \u8fd0\u884c\u4e2d\u4ea7\u751f\u7684\u8fb9\u7f18\u6eda\u843d\u3002\u7ffb\u8f6c\u629b\u5149\u7684\u6a21\u677f\u8bbe\u8ba1\u4f18\u5148\u8003\u8651\u8fb9\u7f18\u51e0\u4f55\u63a7\u5236\uff0c\u800c\u4e0d\u662f\u6750\u6599\u53bb\u9664\u7387--\u901a\u5e38\u4f1a\u964d\u4f4e\u886c\u57ab\u6a21\u91cf\uff0c\u5e76\u4e14\u901a\u5e38\u4f1a\u6307\u5b9a\u8fb9\u7f18\u589e\u5f3a\u73af\u7279\u5f81\uff08\u89c1\u7b2c 8 \u8282\u6240\u8ff0\uff09\u3002.<\/p>\n\n  <hr class=\"section-divider\" \/>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       SECTION 6 \u2014 SUBSTRATES\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n  <h2 id=\"substrates\">\u7279\u5b9a\u57fa\u8d28\u7684\u8003\u8651\u56e0\u7d20<\/h2>\n\n  <p>\u6ca1\u6709\u4e00\u79cd\u6a21\u677f\u89c4\u683c\u662f\u6240\u6709\u57fa\u6750\u7c7b\u578b\u7684\u6700\u4f73\u9009\u62e9\u3002\u57fa\u5e95\u786c\u5ea6\u3001\u65ad\u88c2\u97e7\u6027\u3001\u5316\u5b66\u654f\u611f\u6027\u548c\u76ee\u6807\u8868\u9762\u89c4\u683c\u7684\u7ec4\u5408\uff0c\u63a8\u52a8\u7740\u6a21\u677f\u8bbe\u8ba1\u5404\u4e2a\u5c42\u9762\u7684\u5de5\u7a0b\u9009\u62e9\u3002\u4e0b\u9762\u6211\u4eec\u603b\u7ed3\u4e86\u73b0\u4ee3\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u9047\u5230\u7684\u4e3b\u8981\u57fa\u5e95\u7cfb\u5217\u7684\u4e3b\u8981\u8003\u8651\u56e0\u7d20\u3002.<\/p>\n\n  <!-- Cluster C link -->\n  <div class=\"link-cluster\">\n    <h3>\ud83d\udcd6 \u7279\u5b9a\u57fa\u8d28\u6df1\u6f5c<\/h3>\n    <p>\u6211\u4eec\u9488\u5bf9\u7279\u5b9a\u57fa\u6750\u7684\u6587\u7ae0\u4e3a\u6bcf\u79cd\u5e94\u7528\u63d0\u4f9b\u4e86\u5b8c\u6574\u7684\u6750\u6599\u548c\u5de5\u827a\u80cc\u666f\uff1a<\/p>\n    <div class=\"cluster-links\">\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/SiC-Wafer-Polishing-Templates-Chemically-Resistant-Solutions-for-Silicon-Carbide-Processing\/\" target=\"_blank\">\u78b3\u5316\u7845\u6676\u7247\u629b\u5149\u6a21\u677f<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Polishing-Templates-for-Compound-Semiconductor-Wafers-GaAs-InP-Sapphire\/\" target=\"_blank\">\u7837\u5316\u9553\/\u78f7\u5316\u94df\/\u84dd\u5b9d\u77f3\u6a21\u677f<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Polishing-Templates-for-Glass-Wafers-Ceramic-Substrates-Key-Considerations\/\" target=\"_blank\">\u73bb\u7483\u548c\u9676\u74f7\u57fa\u677f\u6a21\u677f<\/a>\n    <\/div>\n  <\/div>\n\n  <h3>\u7845 (Si) - \u57fa\u51c6\u7ebf<\/h3>\n  <p>\u76f4\u5f84\u4ece 100 \u6beb\u7c73\uff084 \u82f1\u5bf8\uff09\u5230 300 \u6beb\u7c73\uff0812 \u82f1\u5bf8\uff09\u7684\u7845\u6676\u7247\u662f\u4ea7\u91cf\u6700\u5927\u7684\u629b\u5149\u6a21\u677f\u5e94\u7528\u9886\u57df\u3002\u6807\u51c6\u7684 FR-4 \u6216 G-10 \u6a21\u677f\u4e0e\u78b1\u6027\u6d46\u6599\u517c\u5bb9\u7684\u886c\u57ab\u662f\u9ed8\u8ba4\u7684\u9009\u62e9\u3002300 \u6beb\u7c73\u7684\u4e3b\u8981\u5de5\u7a0b\u6311\u6218\u662f\u5c06\u8f7d\u677f\u5f2f\u66f2\u548c\u7fd8\u66f2\u4fdd\u6301\u5728 10 \u00b5m \u4ee5\u4e0b\uff0c\u4ee5\u9632\u6b62\u51fa\u73b0\u7cfb\u7edf\u6027\u7684\u57fa\u70b9\u5e73\u9762\u5ea6\u56fe\u6848\u3002\u5bf9\u4e8e\u524d\u6cbf\u903b\u8f91\uff085 nm \u8282\u70b9\u53ca\u4ee5\u4e0b\uff09\uff0c26 \u00d7 8 mm \u57fa\u5e95\u9762\u7a97\u53e3\u7684 SFQR \u89c4\u683c\u4e3a \u2264 25 nm\uff0c\u8fd9\u5bf9\u80cc\u886c\u57ab\u7684\u5747\u5300\u6027\u63d0\u51fa\u4e86\u975e\u5e38\u4e25\u683c\u7684\u8981\u6c42\u3002.<\/p>\n\n  <h3>\u78b3\u5316\u7845\uff08SiC\uff09--\u65b0\u51fa\u73b0\u7684\u6311\u6218<\/h3>\n  <p>\u78b3\u5316\u7845\u662f\u629b\u5149\u6a21\u677f\u5de5\u7a0b\u4e2d\u6280\u672f\u8981\u6c42\u6700\u9ad8\u7684\u57fa\u6750\u3002\u5b83\u7684\u83ab\u6c0f\u786c\u5ea6\u7ea6\u4e3a 9.5\uff08\u800c\u7845\u7684\u83ab\u6c0f\u786c\u5ea6\u4e3a 7\uff09\uff0c\u8fd9\u610f\u5473\u7740\u4f20\u7edf CMP \u7684\u6750\u6599\u53bb\u9664\u7387\u8981\u4f4e 30-50 \u500d\uff0c\u9700\u8981\u4f7f\u7528\u5f3a\u6c27\u5316\u5242\u7684\u9ad8\u78e8\u6599\u6d46\u6599--\u901a\u5e38\u662f pH \u503c\u4e3a 2-4 \u7684 KMnO\u2084 \u6216 H\u2082O\u2082 \u57fa\u914d\u65b9\u3002\u6807\u51c6 FR-4 \u6a21\u677f\u5728\u8fd9\u79cd\u73af\u5883\u4e0b\u4f1a\u8fc5\u901f\u5931\u6548\u3002CXT \u7ea7\u8010\u5316\u5b66\u6a21\u677f\u5177\u6709\u65e0\u7f1d\u7ed3\u6784\u3001\u6d46\u6599\u963b\u9694\u5de5\u4f5c\u5b54\u886c\u91cc\u548c\u9ad8\u786c\u5ea6\u886c\u57ab\uff0c\u53ef\u786e\u4fdd SiC \u6a21\u677f\u7684\u751f\u4ea7\u5bff\u547d\u3002.<\/p>\n\n  <p>\u968f\u7740\u7535\u529b\u7535\u5b50\u9700\u6c42\u4e0d\u65ad\u63a8\u52a8\u78b3\u5316\u7845\u5728\u7535\u52a8\u6c7d\u8f66\u52a8\u529b\u7cfb\u7edf\u548c\u5de5\u4e1a\u53d8\u6d41\u5668\u4e2d\u7684\u5e94\u7528\uff0c\u78b3\u5316\u7845\u629b\u5149\u6a21\u677f\u5e02\u573a\u6210\u4e3a\u534a\u5bfc\u4f53\u8017\u6750\u9886\u57df\u589e\u957f\u6700\u5feb\u7684\u7ec6\u5206\u5e02\u573a\u4e4b\u4e00\u3002\u9605\u8bfb\u6211\u4eec\u7684\u7efc\u5408\u6307\u5357 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/SiC-Wafer-Polishing-Templates-Chemically-Resistant-Solutions-for-Silicon-Carbide-Processing\/\" target=\"_blank\" class=\"text-link-pill\">\u78b3\u5316\u7845\u6676\u7247\u629b\u5149\u6a21\u677f<\/a> \u4ee5\u83b7\u5f97\u5b8c\u6574\u7684\u89c4\u683c\u548c\u9009\u62e9\u6307\u5bfc\u3002.<\/p>\n\n  <h3>\u7837\u5316\u9553\uff08GaAs\uff09\u548c\u5176\u4ed6\u5316\u5408\u7269\u534a\u5bfc\u4f53<\/h3>\n  <p>\u5316\u5408\u7269\u534a\u5bfc\u4f53\uff08\u7837\u5316\u9553\u3001InP\u3001\u7845\u57fa\u6c2e\u5316\u9553\uff09\u5c06\u65ad\u88c2\u97e7\u6027\u4f5c\u4e3a\u4e3b\u8981\u7684\u8bbe\u8ba1\u9650\u5236\u56e0\u7d20\u3002\u7837\u5316\u9553\u7684\u65ad\u88c2\u97e7\u6027\u7ea6\u4e3a\u7845\u7684\u56db\u5206\u4e4b\u4e00\uff0c\u56e0\u6b64\u5728\u5c40\u90e8\u538b\u529b\u5cf0\u503c\u4e0b\u6676\u5706\u7834\u88c2\u7684\u98ce\u9669\u5f88\u5927\u3002\u5316\u5408\u7269\u534a\u5bfc\u4f53\u5e94\u7528\u4e2d\u7684\u6a21\u677f\u80cc\u57ab\u9009\u62e9\u4f18\u5148\u8003\u8651\u67d4\u8f6f\u5ea6\u548c\u987a\u5e94\u6027\uff0c\u800c\u4e0d\u662f\u521a\u5ea6\uff0c\u5e76\u4e14\u4e13\u95e8\u8bbe\u8ba1\u4e86\u5de5\u4f5c\u5b54\u888b\u8f6e\u5ed3\uff0c\u4ee5\u6700\u5927\u9650\u5ea6\u5730\u51cf\u5c11\u8fb9\u7f18\u5e94\u529b\u96c6\u4e2d\u3002\u7528\u4e8e III-V \u629b\u5149\u7684\u6d46\u6599\u5316\u5b66\u6210\u5206\u901a\u5e38\u4ee5\u6eb4\u6216 H\u2082O\u2082\/\u67e0\u6aac\u9178\u4e3a\u57fa\u7840\uff0c\u8981\u6c42\u8f7d\u677f\u6750\u6599\u5177\u6709\u9002\u5ea6\u7684\u8010\u5316\u5b66\u6027\u3002.<\/p>\n\n  <h3>\u84dd\u5b9d\u77f3\u548c\u73bb\u7483\u57fa\u677f<\/h3>\n  <p>\u5149\u7535\u5b50\u3001\u5fae\u673a\u7535\u7cfb\u7edf\u548c\u663e\u793a\u5668\u5e94\u7528\u4e2d\u4f7f\u7528\u7684\u84dd\u5b9d\u77f3\uff08Al\u2082O\u2083\uff0c\u83ab\u6c0f\u786c\u5ea6 9\uff09\u548c\u7279\u79cd\u73bb\u7483\u57fa\u677f\u4e0e\u78b3\u5316\u7845\u7684\u786c\u5ea6\u4e00\u6837\uff0c\u4f46\u5374\u6ca1\u6709\u76f8\u540c\u7684\u6c27\u5316\u5242\u5316\u5b66\u8981\u6c42\u3002\u629b\u5149\u901a\u5e38\u4f7f\u7528\u4e2d\u6027\u81f3\u5f31\u9178\u6027 pH \u503c\u7684\u91d1\u521a\u77f3\u6d46\u6599\u6216\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u3002\u5e26\u6709\u4e2d\u7b49\u786c\u5ea6\u886c\u57ab\u7684 G-10 \u6a21\u677f\u662f\u6807\u51c6\u9009\u62e9\uff1bCXT \u6750\u6599\u53ef\u7528\u4e8e\u4fb5\u8680\u6027\u91d1\u521a\u77f3\u6d46\u6599\u914d\u65b9\u3002\u8be6\u7ec6\u6307\u5bfc\u89c1\u6211\u4eec\u7684\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Polishing-Templates-for-Glass-Wafers-Ceramic-Substrates-Key-Considerations\/\" target=\"_blank\" class=\"text-link-pill\">\u73bb\u7483\u548c\u9676\u74f7\u57fa\u5e95\u629b\u5149\u6a21\u677f<\/a>.<\/p>\n\n  <hr class=\"section-divider\" \/>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       SECTION 7 \u2014 SPECIFICATIONS\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n  <h2 id=\"specifications\">\u5173\u952e\u89c4\u8303\u53c2\u6570\uff1a\u5de5\u7a0b\u5e08\u5fc5\u987b\u5b9a\u4e49\u7684\u5185\u5bb9<\/h2>\n\n  <p>\u5728\u6307\u5b9a\u629b\u5149\u6a21\u677f\u65f6\uff0c\u65e0\u8bba\u662f\u4ece\u6807\u51c6\u76ee\u5f55\u4e2d\u9009\u62e9\uff0c\u8fd8\u662f\u63d0\u4ea4\u5b9a\u5236\u5de5\u7a0b\u8981\u6c42\uff0c\u90fd\u6709\u516d\u4e2a\u6838\u5fc3\u53c2\u6570\u51b3\u5b9a\u7740\u914d\u5408\u3001\u529f\u80fd\u548c\u5de5\u827a\u6027\u80fd\u3002\u5176\u4e2d\u4efb\u4f55\u4e00\u4e2a\u89c4\u683c\u4e0d\u660e\u786e\uff0c\u90fd\u662f\u5bfc\u81f4\u4e0e\u6a21\u677f\u76f8\u5173\u7684\u5de5\u827a\u504f\u5dee\u7684\u4e3b\u8981\u539f\u56e0\u3002\u6709\u5173\u89c4\u8303\u6d41\u7a0b\u7684\u5b8c\u6574\u4ecb\u7ecd\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u4ee5\u4e0b\u6307\u5357 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-to-Specify-a-Polishing-Template-6-Parameters-Engineers-Must-Define\/\" target=\"_blank\" class=\"text-link-pill\">\u5982\u4f55\u6307\u5b9a\u629b\u5149\u6a21\u677f<\/a>.<\/p>\n\n  <div class=\"spec-grid\">\n    <div class=\"spec-card\">\n      <span class=\"spec-value\">2\u2033\u2192600mm<\/span>\n      <span class=\"spec-label\">\u6676\u7247\u76f4\u5f84\u8303\u56f4<\/span>\n    <\/div>\n    <div class=\"spec-card\">\n      <span class=\"spec-value\">\u00b15 \u5fae\u7c73<\/span>\n      <span class=\"spec-label\">\u5de5\u5b54\u6df1\u5ea6\u516c\u5dee<\/span>\n    <\/div>\n    <div class=\"spec-card\">\n      <span class=\"spec-value\">\u226410 \u00b5m<\/span>\n      <span class=\"spec-label\">\u5f13\u5f62\u627f\u8f7d\u677f<\/span>\n    <\/div>\n    <div class=\"spec-card\">\n      <span class=\"spec-value\">2-13<\/span>\n      <span class=\"spec-label\">pH \u5de5\u4f5c\u8303\u56f4 (CXT)<\/span>\n    <\/div>\n    <div class=\"spec-card\">\n      <span class=\"spec-value\">\u22655 \u5e74<\/span>\n      <span class=\"spec-label\">\u6279\u6b21\u8ffd\u8e2a\u8bb0\u5f55<\/span>\n    <\/div>\n    <div class=\"spec-card\">\n      <span class=\"spec-value\">ISO 5<\/span>\n      <span class=\"spec-label\">\u65e0\u5c18\u88c5\u914d\u5ba4<\/span>\n    <\/div>\n  <\/div>\n\n  <ol style=\"padding-left: 24px; margin-bottom: 18px;\">\n    <li style=\"margin-bottom: 14px;\"><strong>\u6676\u7247\u76f4\u5f84\u548c\u6700\u7ec8\u76ee\u6807\u539a\u5ea6 (FTT)\uff1a<\/strong> \u5de5\u4f5c\u5b54\u76f4\u5f84\u5fc5\u987b\u63d0\u4f9b\u76f8\u5bf9\u4e8e\u6676\u7247\u5916\u5f84\u7684\u53ef\u63a7\u5f84\u5411\u95f4\u9699\uff08\u901a\u5e38\u4e3a 0.2-0.5 \u6beb\u7c73\uff09\u3002\u5de5\u4f5c\u5b54\u6df1\u5ea6\u6839\u636e\u629b\u5149\u6676\u7247\u7684\u6700\u7ec8\u76ee\u6807\u539a\u5ea6\u8fdb\u884c\u6821\u51c6\uff1b\u4e0d\u6b63\u786e\u7684\u6df1\u5ea6\u662f\u9020\u6210\u7cfb\u7edf TTV \u504f\u5dee\u7684\u6700\u5e38\u89c1\u539f\u56e0\u3002.<\/li>\n    <li style=\"margin-bottom: 14px;\"><strong>\u8f7d\u677f\u539a\u5ea6\u548c\u5e73\u6574\u5ea6<\/strong> \u6a21\u677f\u603b\u539a\u5ea6\uff08\u8f7d\u677f + \u886c\u57ab\uff09\u5fc5\u987b\u4e0e\u8f7d\u6a21\u5934\u7684\u6321\u73af\u548c\u538b\u529b\u8154\u7684\u51e0\u4f55\u5f62\u72b6\u76f8\u5339\u914d\u3002\u8f7d\u6837\u677f\u7684\u5e73\u9762\u5ea6\uff08\u5f13\u5f62\/\u7fd8\u66f2\uff09\u89c4\u5b9a\u4e3a\u6574\u4e2a\u5de5\u4f5c\u9762\u7684\u6700\u5927\u504f\u5dee\uff0c\u5bf9\u4e8e\u539f\u751f\u7845\u800c\u8a00\uff0c\u901a\u5e38\u2264 10 \u00b5m\u3002.<\/li>\n    <li style=\"margin-bottom: 14px;\"><strong>\u886c\u57ab\u7c7b\u578b\u548c\u786c\u5ea6<\/strong> \u5e95\u57ab\u7684\u90b5\u6c0f A \u786c\u5ea6\u3001\u539a\u5ea6\u548c\u5b54\u9699\u7387\u51b3\u5b9a\u4e86\u538b\u529b\u5206\u5e03\u548c\u6676\u7247\u4fdd\u6301\u529b\u3002\u8f83\u786c\u7684\u886c\u57ab\u9002\u5408\u9ad8\u53bb\u9664\u7387\u7684 SSP\uff1b\u8f83\u8f6f\u7684\u886c\u57ab\u9002\u5408 CMP \u548c\u8584\u6676\u7247\u5e94\u7528\u3002.<\/li>\n    <li style=\"margin-bottom: 14px;\"><strong>\u627f\u8f7d\u677f\u6750\u6599<\/strong> FR-4\u3001G-10 \u6216 CXT\uff0c\u8be6\u89c1\u7b2c 3 \u8282\u3002\u5fc5\u987b\u6839\u636e\u6ce5\u6d46\u5316\u5b66\u6210\u5206\u548c pH \u503c\u8303\u56f4\u8fdb\u884c\u6307\u5b9a\u3002.<\/li>\n    <li style=\"margin-bottom: 14px;\"><strong>\u8fb9\u7f18\u589e\u5f3a\u73af\uff1a<\/strong> \u6a21\u677f\u80cc\u9762\u662f\u5426\u9700\u8981\u73af\u5f62\u7279\u5f81\u6765\u6539\u53d8\u8fb9\u7f18\u629b\u5149\u538b\u529b\uff08\u8be6\u89c1\u7b2c 8 \u8282\uff09\u3002.<\/li>\n    <li style=\"margin-bottom: 14px;\"><strong>\u5de5\u4f5c\u5b54\u886c\u57ab\u6216\u63d2\u4ef6\uff1a<\/strong> \u5bf9\u4e8e\u4fb5\u8680\u6027\u6d46\u6599\u5316\u5b66\u6210\u5206\uff0c\u7c98\u63a5\u5728\u5de5\u4f5c\u5b54\u4fa7\u58c1\u4e0a\u7684\u8010\u5316\u5b66\u8150\u8680\u63d2\u4ef6\u53ef\u9632\u6b62\u6d46\u6599\u6a2a\u5411\u4fb5\u5165\u8f7d\u677f\u5c42\u538b\u677f\uff0c\u4ece\u800c\u5ef6\u957f\u6a21\u677f\u5bff\u547d\u5e76\u9632\u6b62\u8f7d\u677f\u6750\u6599\u964d\u89e3\u9020\u6210\u6c61\u67d3\u3002.<\/li>\n  <\/ol>\n\n  <div class=\"callout warning\">\n    <span class=\"callout-icon\">\u26a0\ufe0f<\/span>\n    <div class=\"callout-body\">\n      <strong>\u91cd\u8981\u89c4\u683c\u8b66\u544a<\/strong>\n      \u5de5\u5b54\u6df1\u5ea6\u662f\u76f8\u5bf9\u4e8e\u886c\u57ab\u5de5\u4f5c\u9762\u6d4b\u91cf\u7684\uff0c\u800c\u4e0d\u662f\u76f8\u5bf9\u4e8e\u627f\u8f7d\u677f\u9762\u6d4b\u91cf\u7684\u3002\u5728\u6700\u7ec8\u786e\u5b9a\u89c4\u683c\u4e4b\u524d\uff0c\u8bf7\u4e0e\u6a21\u677f\u4f9b\u5e94\u5546\u786e\u8ba4\u60a8\u7684\u6d4b\u91cf\u57fa\u51c6\u9762\u3002\u6b64\u57fa\u51c6\u9762\u4e2d\u7684 10 \u5fae\u7c73\u8bef\u5dee\u53ef\u76f4\u63a5\u8f6c\u5316\u4e3a 10 \u5fae\u7c73\u7684\u7cfb\u7edf TTV - \u6bcf\u4e2a\u6676\u5706\u76f4\u5f84\u4e0a\u7684\u5de5\u827a\u504f\u5dee\u3002.\n    <\/div>\n  <\/div>\n\n  <hr class=\"section-divider\" \/>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       SECTION 8 \u2014 EDGE PROFILE\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n  <h2 id=\"edge\">\u8fb9\u7f18\u8f6e\u5ed3\u63a7\u5236\u548c\u8fb9\u7f18\u589e\u5f3a\u8bbe\u8ba1<\/h2>\n\n  <p>\u6676\u5706\u8fb9\u7f18\u8f6e\u5ed3\u662f\u4e00\u79cd\u89c4\u683c\uff0c\u968f\u7740\u8bbe\u5907\u89c4\u6a21\u7684\u6269\u5927\uff0c\u5149\u523b\u9886\u57df\u8d8a\u6765\u8d8a\u63a5\u8fd1\u6676\u5706\u8fb9\u7f18\uff0c\u8fd9\u79cd\u89c4\u683c\u4e5f\u53d8\u5f97\u66f4\u52a0\u4e25\u683c\u3002\u5728 28 \u7eb3\u7c73\u53ca\u4ee5\u4e0b\u8282\u70b9\uff0c\u8fb9\u7f18\u6392\u9664\u533a--\u6676\u5706\u5468\u8fb9\u56e0\u5e73\u9762\u5ea6\u8f83\u5dee\u800c\u88ab\u6392\u9664\u5728\u5668\u4ef6\u56fe\u6848\u5316\u4e4b\u5916\u7684\u73af\u5f62\u533a\u57df--\u76f4\u63a5\u964d\u4f4e\u4e86\u6bcf\u4e2a\u6676\u5706\u7684\u82af\u7247\u4ea7\u91cf\u3002\u5728 300 \u6beb\u7c73\u6676\u5706\u4e0a\uff0c\u5c06\u8fb9\u7f18\u6392\u65a5\u533a\u4ece 3 \u6beb\u7c73\u51cf\u5c11\u5230 1 \u6beb\u7c73\uff0c\u53ef\u589e\u52a0\u7ea6 2% \u7684\u603b\u53ef\u7528\u6676\u7c92\u9762\u79ef--\u5728\u6676\u5706\u6210\u672c\u9ad8\u6602\u7684\u60c5\u51b5\u4e0b\uff0c\u8fd9\u65e0\u7591\u662f\u4e00\u6b21\u6709\u610f\u4e49\u7684\u826f\u7387\u63d0\u5347\u3002.<\/p>\n\n  <p>\u629b\u5149\u6a21\u677f\u7684\u51e0\u4f55\u5f62\u72b6\u662f\u63a7\u5236 SSP \u8fb9\u7f18\u8f6e\u5ed3\u7684\u4e3b\u8981\u5de5\u827a\u6760\u6746\u3002\u5176\u57fa\u672c\u673a\u7406\u662f\u4f17\u6240\u5468\u77e5\u7684\uff1a\u6676\u5706\u8fb9\u7f18\u7684\u629b\u5149\u538b\u529b\u662f\u6676\u5706\u5916\u5f84\u548c\u5de5\u4f5c\u5b54\u58c1\u4e4b\u95f4\u73af\u5f62\u533a\u57df\u5185\u6a21\u677f\u7ec4\u4ef6\u7684\u5c40\u90e8\u987a\u5e94\u6027\u548c\u521a\u5ea6\u7684\u51fd\u6570\u3002\u5982\u679c\u6a21\u677f\u5728\u8fd9\u4e00\u533a\u57df\u63d0\u4f9b\u7684\u652f\u6491\u529b\u4e0d\u8db3\uff0c\u629b\u5149\u57ab\u5c31\u4f1a\u5728\u6676\u7247\u8fb9\u7f18\u4e0b\u53d1\u751f\u504f\u79fb\uff0c\u9020\u6210\u5c40\u90e8\u63a5\u89e6\u538b\u529b\u964d\u4f4e\uff0c\u6750\u6599\u53bb\u9664\u7387\u76f8\u5e94\u964d\u4f4e\uff0c\u8868\u73b0\u4e3a\u8fb9\u7f18\u6eda\u843d\u3002.<\/p>\n\n  <h3>\u8fb9\u7f18\u589e\u5f3a\u73af (EER) \u6280\u672f<\/h3>\n  <p>\u8fb9\u7f18\u589e\u5f3a\u73af\u662f\u7cbe\u5bc6\u52a0\u5de5\u7684\u73af\u5f62\u7279\u5f81\uff0c\u7c98\u63a5\u6216\u96c6\u6210\u5230\u6a21\u677f\u7684\u80cc\u9762\uff08\u8fdc\u79bb\u629b\u5149\u57ab\u7684\u4e00\u9762\uff09\uff0c\u4e0e\u5de5\u4f5c\u5b54\u540c\u5fc3\u5b9a\u4f4d\u3002\u901a\u8fc7\u5728\u90bb\u8fd1\u6676\u7247\u5916\u5f84\u7684\u73af\u5f62\u533a\u57df\u589e\u52a0\u53d7\u63a7\u521a\u5ea6\uff0cEER \u6539\u53d8\u4e86\u538b\u529b\u5206\u5e03\uff0c\u4f7f\u8fb9\u7f18\u629b\u5149\u538b\u529b\u66f4\u63a5\u8fd1\u4e2d\u5fc3\u6676\u7247\u538b\u529b\u3002\u5176\u7ed3\u679c\u662f\u8fb9\u7f18\u8f6e\u5ed3\u66f4\u5e73\u6574\uff0c\u8fb9\u7f18\u6392\u9664\u89c4\u683c\u66f4\u4e25\u683c\uff0c\u6bcf\u4e2a\u6676\u7247\u7684\u53ef\u7528\u82af\u7247\u9762\u79ef\u66f4\u5927\u3002.<\/p>\n\n  <p>EER \u7684\u51e0\u4f55\u5f62\u72b6\uff08\u5185\u5f84\u3001\u5916\u5f84\u3001\u9ad8\u5ea6\u548c\u6750\u6599\uff09\u662f\u6839\u636e\u6676\u5706\u76f4\u5f84\u3001\u6700\u7ec8\u539a\u5ea6\u3001\u80cc\u886c\u57ab\u7b26\u5408\u6027\u548c\u76ee\u6807\u8fb9\u7f18\u8f6e\u5ed3\u89c4\u683c\uff08\u901a\u5e38\u8868\u793a\u4e3a\u8ddd\u6676\u5706\u8fb9\u7f18 1 \u6beb\u7c73\u5904\u7684\u6700\u5927\u8fb9\u7f18\u6eda\u843d\u9ad8\u5ea6\uff09\u5b9a\u5236\u8bbe\u8ba1\u7684\u3002\u6211\u4eec\u7684\u8be6\u7ec6\u6280\u672f\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-Polishing-Template-Edge-Design-Controls-Wafer-Edge-Profile-Reduces-Edge-Exclusion\/\" target=\"_blank\" class=\"text-link-pill\">\u8fb9\u7f18\u8bbe\u8ba1\u548c\u6676\u5706\u8fb9\u7f18\u6392\u9664<\/a> \u5305\u62ec\u5de5\u4f5c\u793a\u4f8b\uff0c\u4ee5\u53ca\u5177\u6709\u4ee3\u8868\u6027\u7684\u6676\u7247\/\u6a21\u677f\u7ec4\u5408\u7684 TTV \u548c\u8fb9\u7f18\u8f6e\u5ed3\u6570\u636e\u3002.<\/p>\n\n  <p>\u5728\u751f\u4ea7\u4e2d\u53d1\u73b0\u8fb9\u7f18\u8f6e\u5ed3\u95ee\u9898\u65f6\uff0c\u629b\u5149\u6a21\u677f\u5f80\u5f80\u662f\u9996\u5148\u8981\u8c03\u67e5\u7684\u5de5\u827a\u8981\u7d20\u3002\u6211\u4eec\u7684\u6545\u969c\u6392\u9664\u6307\u5357\u3001, <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Why-Is-Your-Wafer-Edge-Profile-Poor-5-Template-Related-Causes-Solutions\/\" target=\"_blank\" class=\"text-link-pill\">\u4e3a\u4ec0\u4e48\u60a8\u7684\u6676\u5706\u8fb9\u7f18\u8f6e\u5ed3\u4e0d\u4f73\uff1f<\/a>, \u8be5\u624b\u518c\u7cfb\u7edf\u5730\u9610\u8ff0\u4e86\u4e94\u79cd\u6700\u5e38\u89c1\u7684\u4e0e\u6a21\u677f\u76f8\u5173\u7684\u6839\u672c\u539f\u56e0\u53ca\u5176\u7ea0\u6b63\u63aa\u65bd\u3002.<\/p>\n\n  <hr class=\"section-divider\" \/>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       SECTION 9 \u2014 CUSTOM VS STANDARD\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n  <h2 id=\"custom\">\u6807\u51c6\u4e0e\u5b9a\u5236\u629b\u5149\u6a21\u677f\uff1a\u505a\u51fa\u6b63\u786e\u7684\u9009\u62e9<\/h2>\n\n  <p>\u629b\u5149\u6a21\u677f\u5e02\u573a\u5927\u81f4\u5206\u4e3a\u4e24\u79cd\u91c7\u8d2d\u9014\u5f84\uff1a\u6807\u51c6\u76ee\u5f55\u4ea7\u54c1\u548c\u5b9a\u5236\u6a21\u677f\u3002\u6bcf\u79cd\u4ea7\u54c1\u90fd\u6709\u5176\u72ec\u7279\u7684\u4ef7\u503c\u4e3b\u5f20\uff0c\u6b63\u786e\u7684\u9009\u62e9\u53d6\u51b3\u4e8e\u4ea7\u91cf\u3001\u6676\u5706\u89c4\u683c\u3001\u8bbe\u5907\u5e73\u53f0\u548c\u8ba1\u5212\u7075\u6d3b\u6027\u3002.<\/p>\n\n  <p>\u5982\u9700\u4e86\u89e3\u5982\u4f55\u9488\u5bf9\u5177\u4f53\u5e94\u7528\u8bc4\u4f30\u8fd9\u4e9b\u9009\u9879\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u6bd4\u8f83\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Standard-vs-Custom-Polishing-Templates-Which-Is-Right-for-Your-Wafer-Process\/\" target=\"_blank\" class=\"text-link-pill\">\u6807\u51c6\u4e0e\u5b9a\u5236\u629b\u5149\u6a21\u677f<\/a> \u63d0\u4f9b\u4e86\u4e00\u4e2a\u5305\u542b\u6210\u672c\u548c\u4ea4\u8d27\u65f6\u95f4\u6570\u636e\u7684\u7ed3\u6784\u5316\u51b3\u7b56\u6846\u67b6\u3002.<\/p>\n\n  <div class=\"compare-grid\">\n    <div class=\"compare-card\">\n      <div class=\"compare-card-head blue\">\ud83d\udce6 \u6807\u51c6\u6a21\u677f<\/div>\n      <ul>\n        <li>\u53ef\u7acb\u5373\u4ece\u5e93\u5b58\u4e2d\u83b7\u53d6<\/li>\n        <li>\u6807\u51c6\u76f4\u5f84\u7684\u5355\u4f4d\u6210\u672c\u66f4\u4f4e<\/li>\n        <li>\u6709\u7ecf\u8fc7\u9a8c\u8bc1\u7684\u6027\u80fd\u6570\u636e<\/li>\n        <li>\u9002\u7528\u4e8e\u5e38\u89c1\u7684 Si SSP \u5e94\u7528<\/li>\n        <li>\u83b7\u5f97\u751f\u4ea7\u8d44\u683c\u7684\u6700\u5feb\u9014\u5f84<\/li>\n        <li>\u4ec5\u9650\u4e8e\u4ea7\u54c1\u76ee\u5f55\u4e2d\u7684\u5de5\u4f5c\u5b54\u51e0\u4f55\u5f62\u72b6<\/li>\n      <\/ul>\n    <\/div>\n    <div class=\"compare-card\">\n      <div class=\"compare-card-head teal\">\u2699\ufe0f \u5b9a\u5236\u8bbe\u8ba1\u6a21\u677f<\/div>\n      <ul>\n        <li>\u9488\u5bf9\u7279\u5b9a\u6676\u7247\/\u8bbe\u5907\u7ec4\u5408\u8fdb\u884c\u4e86\u4f18\u5316<\/li>\n        <li>\u975e\u6807\u51c6\u5de5\u4f5c\u5b54\u6df1\u5ea6\/\u76f4\u5f84<\/li>\n        <li>\u9002\u7528\u4e8e\u4fb5\u8680\u6027\u5316\u5b66\u7269\u8d28\u7684 CXT \u6750\u6599<\/li>\n        <li>\u8fb9\u7f18\u589e\u5f3a\u73af\u6574\u5408<\/li>\n        <li>\u5b9a\u5236\u886c\u57ab\u89c4\u683c<\/li>\n        <li>\u5de5\u7a0b\u54a8\u8be2\u5305\u62ec<\/li>\n      <\/ul>\n    <\/div>\n  <\/div>\n\n  <h3>\u5409\u4e4b\u5c9b\u7684\u5b9a\u5236\u5de5\u7a0b\u6d41\u7a0b<\/h3>\n  <ul class=\"step-list\">\n    <li>\n      <span class=\"step-num\">01<\/span>\n      <div class=\"step-body\">\n        <strong>\u6280\u672f\u5165\u95e8<\/strong>\n        <p>\u63d0\u4ea4\u60a8\u7684\u6676\u7247\u89c4\u683c\u3001\u673a\u5668\u5e73\u53f0\u3001\u5f53\u524d\u6a21\u677f\u51e0\u4f55\u5f62\u72b6\uff08\u5982\u679c\u5df2\u77e5\uff09\u3001\u6d46\u6599\u5316\u5b66\u6210\u5206\u4ee5\u53ca\u76ee\u6807 TTV\/\u8fb9\u7f18\u8f6e\u5ed3\u8981\u6c42\u3002\u6211\u4eec\u7684\u5de5\u7a0b\u56e2\u961f\u4f1a\u5728 48 \u5c0f\u65f6\u5185\u8fdb\u884c\u5ba1\u6838\u3002.<\/p>\n      <\/div>\n    <\/li>\n    <li>\n      <span class=\"step-num\">02<\/span>\n      <div class=\"step-body\">\n        <strong>\u8bbe\u8ba1\u5efa\u8bae<\/strong>\n        <p>\u6211\u4eec\u4f1a\u751f\u6210\u8be6\u7ec6\u7684\u5c3a\u5bf8\u56fe\uff0c\u5e76\u6807\u660e\u6240\u6709\u5173\u952e\u53c2\u6570\uff0c\u5305\u62ec\u8f7d\u677f\u6750\u6599\u3001\u539a\u5ea6\u548c\u5e73\u9762\u5ea6\u516c\u5dee\u3001\u5de5\u4f5c\u5b54\u51e0\u4f55\u5f62\u72b6\u3001\u5e95\u57ab\u89c4\u683c\u4ee5\u53ca\u8fb9\u7f18\u589e\u5f3a\u73af\u8bbe\u8ba1\uff08\u5982\u9002\u7528\uff09\u3002.<\/p>\n      <\/div>\n    <\/li>\n    <li>\n      <span class=\"step-num\">03<\/span>\n      <div class=\"step-body\">\n        <strong>\u539f\u578b\u5236\u4f5c<\/strong>\n        <p>\u9996\u4ef6\u6a21\u677f\u5236\u4f5c\u5b8c\u6210\u540e\uff0c\u8981\u7ecf\u8fc7\u5168\u9762\u7684\u5c3a\u5bf8\u68c0\u6d4b\uff08\u5750\u6807\u6d4b\u91cf\u673a\u6d4b\u91cf\u5de5\u4f5c\u5b54\u6df1\u5ea6\u3001\u8f7d\u677f\u5f2f\u66f2\u5ea6\u548c\u80cc\u886c\u57ab\u539a\u5ea6\u5747\u5300\u6027\uff09\uff0c\u7136\u540e\u624d\u80fd\u88c5\u8fd0\u4f9b\u5ba2\u6237\u9274\u5b9a\u3002.<\/p>\n      <\/div>\n    <\/li>\n    <li>\n      <span class=\"step-num\">04<\/span>\n      <div class=\"step-body\">\n        <strong>\u6d41\u7a0b\u9274\u5b9a\u4e0e\u8fed\u4ee3<\/strong>\n        <p>\u5ba2\u6237\u8fd0\u884c\u5408\u683c\u6279\u6b21\u5e76\u62a5\u544a TTV\u3001SFQR \u548c\u8fb9\u7f18\u8f6e\u5ed3\u6570\u636e\u3002\u7ee7\u5fd7\u5de5\u7a0b\u5e08\u5206\u6790\u7ed3\u679c\uff0c\u5e76\u6839\u636e\u9700\u8981\u5bf9\u51e0\u4f55\u5f62\u72b6\u8fdb\u884c\u8fed\u4ee3--\u5bf9\u4e8e\u975e\u6807\u51c6\u5e94\u7528\uff0c\u901a\u5e38\u9700\u8981\u4e00\u5230\u4e24\u4e2a\u8bbe\u8ba1\u5faa\u73af\u3002.<\/p>\n      <\/div>\n    <\/li>\n    <li>\n      <span class=\"step-num\">05<\/span>\n      <div class=\"step-body\">\n        <strong>\u751f\u4ea7\u53d1\u5e03\u4e0e\u6279\u6b21\u8ffd\u8e2a<\/strong>\n        <p>\u5bf9\u5408\u683c\u7684\u8bbe\u8ba1\u8fdb\u884c\u9501\u5b9a\uff0c\u5e76\u8fdb\u884c\u5168\u9762\u7684\u4fee\u8ba2\u63a7\u5236\u3002\u6bcf\u4e2a\u751f\u4ea7\u6279\u6b21\u90fd\u6709\u4e00\u4e2a\u552f\u4e00\u7684\u6279\u53f7\uff0c\u8be5\u6279\u53f7\u53ef\u8ffd\u6eaf\u5230\u539f\u6750\u6599\u8bc1\u4e66\uff0c\u5e76\u81f3\u5c11\u4fdd\u7559\u4e94\u5e74\u3002.<\/p>\n      <\/div>\n    <\/li>\n  <\/ul>\n\n  <!-- Cluster A link -->\n  <div class=\"link-cluster\">\n    <h3>\ud83d\udcd6 \u91c7\u8d2d\u4e0e\u9074\u9009\u8d44\u6e90<\/h3>\n    <p>\u4e3a\u60a8\u7684\u6a21\u677f\u9009\u62e9\u548c\u91c7\u8d2d\u8fc7\u7a0b\u63d0\u4f9b\u652f\u6301\u7684\u6587\u7ae0\uff1a<\/p>\n    <div class=\"cluster-links\">\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Custom-Polishing-Templates-for-Silicon-Wafers-Tailored-to-Your-Carrier-Head-Specs\/\" target=\"_blank\">\u5b9a\u5236\u6a21\u677f\u5de5\u7a0b<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Standard-vs-Custom-Polishing-Templates-Which-Is-Right-for-Your-Wafer-Process\/\" target=\"_blank\">\u6807\u51c6\u4e0e\u5b9a\u5236\u6bd4\u8f83<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-to-Specify-a-Polishing-Template-6-Parameters-Engineers-Must-Define\/\" target=\"_blank\">6 \u53c2\u6570\u89c4\u683c\u6307\u5357<\/a>\n    <\/div>\n  <\/div>\n\n  <hr class=\"section-divider\" \/>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       SECTION 10 \u2014 MAINTENANCE\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n  <h2 id=\"maintenance\">\u7ef4\u62a4\u3001\u5bff\u547d\u548c\u6c61\u67d3\u63a7\u5236<\/h2>\n\n  <p>\u5373\u4f7f\u662f\u8bbe\u8ba1\u6700\u597d\u7684\u629b\u5149\u6a21\u677f\uff0c\u5982\u679c\u5728\u5176\u6574\u4e2a\u8fd0\u884c\u5bff\u547d\u671f\u95f4\u6ca1\u6709\u5f97\u5230\u9002\u5f53\u7684\u5904\u7406\u3001\u5b58\u50a8\u548c\u76d1\u63a7\uff0c\u5176\u6027\u80fd\u4e5f\u4f1a\u4e0b\u964d\u3002\u4e0e\u6a21\u677f\u76f8\u5173\u7684\u5de5\u827a\u504f\u5dee\u662f\u7845\u6676\u7247\u5de5\u5382\u4ea7\u91cf\u635f\u5931\u7684\u4e00\u4e2a\u6709\u636e\u53ef\u67e5\u7684\u6765\u6e90\uff0c\u800c\u5927\u591a\u6570\u504f\u5dee\u662f\u53ef\u4ee5\u901a\u8fc7\u7cfb\u7edf\u5316\u7684\u7ef4\u62a4\u5b9e\u8df5\u6765\u907f\u514d\u7684\u3002\u5982\u9700\u5168\u9762\u6307\u5bfc\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u4e13\u95e8\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-to-Extend-Polishing-Template-Lifespan-Best-Practices-for-Semiconductor-Fabs\/\" target=\"_blank\" class=\"text-link-pill\">\u5ef6\u957f\u629b\u5149\u6a21\u677f\u7684\u4f7f\u7528\u5bff\u547d<\/a> \u6db5\u76d6\u6574\u5957\u6700\u4f73\u5b9e\u8df5\u3002.<\/p>\n\n  <h3>\u4e86\u89e3\u6a21\u677f\u78e8\u635f\u673a\u5236<\/h3>\n  <p>\u629b\u5149\u6a21\u677f\u4e3b\u8981\u901a\u8fc7\u4e24\u79cd\u673a\u5236\u9000\u5316\u3002\u7b2c\u4e00\u79cd\u662f <em>\u5c3a\u5bf8\u78e8\u635f<\/em>\u5e95\u57ab\uff1a\u5e95\u57ab\u5728\u6bcf\u4e2a\u629b\u5149\u5468\u671f\u4e2d\u90fd\u4f1a\u538b\u7f29\u548c\u53d8\u8584\uff0c\u9010\u6e10\u6539\u53d8\u6709\u6548\u5de5\u4f5c\u5b54\u6df1\u5ea6\uff0c\u4ece\u800c\u6539\u53d8\u6676\u7247\u8868\u9762\u7684\u673a\u68b0\u6761\u4ef6\u3002\u5927\u591a\u6570\u6a21\u677f\u90fd\u6709\u4e00\u4e2a\u5468\u671f\u5bff\u547d\uff08\u6216\u5c3a\u5bf8\u89e6\u53d1\u70b9--\u901a\u5e38\u6700\u5927\u5141\u8bb8\u7684\u80cc\u886c\u57ab\u539a\u5ea6\u635f\u5931\u4e3a 50 \u5fae\u7c73\uff09\uff0c\u8d85\u8fc7\u5468\u671f\u5bff\u547d\u5c31\u4f1a\u62a5\u5e9f\u548c\u66f4\u6362\u3002\u7b2c\u4e8c\u79cd\u673a\u5236\u662f <em>\u5316\u5b66\u964d\u89e3<\/em> \u5bf9\u4e8e\u5728 pH \u503c\u5bb9\u8bb8\u8303\u56f4\u8fb9\u754c\u9644\u8fd1\u4f7f\u7528\u7684 FR-4 \u6a21\u677f\u800c\u8a00\uff0c\u8fd9\u4e00\u70b9\u6700\u4e3a\u91cd\u8981\u3002\u65e9\u671f\u8ff9\u8c61\u5305\u62ec\u5de5\u4f5c\u5b54\u8fb9\u7f18\u7684\u8868\u9762\u81a8\u80c0\u548c\u8f7d\u677f\u5916\u56f4\u7684\u660e\u663e\u5206\u5c42\u3002.<\/p>\n\n  <h3>\u50a8\u5b58\u548c\u5904\u7406\u6700\u4f73\u505a\u6cd5<\/h3>\n  <p>\u65b0\u7684\u629b\u5149\u6a21\u677f\u901a\u5e38\u5355\u72ec\u5bc6\u5c01\u5728\u6d01\u51c0\u5ba4\u517c\u5bb9\u7684\u5305\u88c5\u4e2d\uff08\u5728\u6c2e\u6c14\u73af\u5883\u4e0b\u70ed\u5c01\u7684\u805a\u4e59\u70ef\u888b\uff09\u3002\u5b83\u4eec\u5e94\u6c34\u5e73\u5b58\u653e\u5728\u6e29\u5ea6\u53d7\u63a7\u7684\u73af\u5883\u4e2d\uff0815-25\u00b0C\uff0c\u76f8\u5bf9\u6e7f\u5ea6 40-60%\uff09\uff0c\u907f\u514d\u7d2b\u5916\u7ebf\u7167\u5c04\u548c\u5316\u5b66\u84b8\u6c7d\u3002\u4e0d\u5efa\u8bae\u6c34\u5e73\u5806\u53e0\u8d85\u8fc7 5 \u5757\u6a21\u677f\uff0c\u56e0\u4e3a\u5728\u8d85\u8fc7 3 \u4e2a\u6708\u7684\u50a8\u5b58\u671f\u5185\uff0c\u7d2f\u79ef\u91cd\u91cf\u4f1a\u5bfc\u81f4\u8f7d\u677f\u6c38\u4e45\u5f2f\u66f2\u3002.<\/p>\n\n  <p>\u5c06\u6a21\u677f\u88c5\u8f7d\u5230\u8f7d\u7269\u5934\u65f6\uff0c\u8bf7\u52a1\u5fc5\u4f7f\u7528\u6307\u5b9a\u7684\u5b89\u88c5\u5939\u5177\uff0c\u5207\u52ff\u7528\u672a\u6234\u624b\u5957\u7684\u624b\u63a5\u89e6\u80cc\u57ab\u5de5\u4f5c\u9762\u3002\u80cc\u57ab\u4e0a\u7684\u6307\u7eb9\u6c61\u67d3\u662f\u5c40\u90e8\u538b\u529b\u53d8\u5316\u7684\u4e00\u4e2a\u6709\u636e\u53ef\u67e5\u7684\u6765\u6e90\uff0c\u5e76\u4e14\u4f1a\u5f15\u5165\u94a0\u79bb\u5b50\uff0c\u5728\u9ad8\u89c4\u683c\u7845\u6676\u7247\u4e0a\u9020\u6210\u8868\u9762\u67d3\u8272\u3002.<\/p>\n\n  <h3>\u8fc7\u7a0b\u76d1\u63a7<\/h3>\n  <p>\u5b9e\u65bd\u4e0e\u6279\u6b21\u8ddf\u8e2a\u6302\u94a9\u7684\u6a21\u677f\u76d1\u63a7\u534f\u8bae\u662f\u9632\u6b62\u6027\u80fd\u9010\u6e10\u504f\u79fb\u800c\u4e0d\u88ab\u53d1\u73b0\u7684\u6700\u6709\u6548\u65b9\u6cd5\u3002\u63a8\u8350\u7684\u76d1\u63a7\u6307\u6807\u5305\u62ec\uff1a\u6bcf\u6b21\u629b\u5149\u540e\u5728\u56db\u4e2a\u5f84\u5411\u4f4d\u7f6e\u6d4b\u91cf\u886c\u57ab\u539a\u5ea6\uff1b\u4f7f\u7528\u7edf\u8ba1\u8fc7\u7a0b\u63a7\u5236 (SPC) \u5236\u56fe\u76d1\u63a7\u629b\u5149\u540e TTV \u8d8b\u52bf\uff1b\u4f7f\u7528\u53c2\u8003\u8868\u9762\u677f\u548c\u5343\u5206\u8868\u5b9a\u671f\u9a8c\u8bc1\u8f7d\u677f\u5e73\u6574\u5ea6\u3002\u6211\u4eec\u7684\u6587\u7ae0 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Contamination-Control-in-Polishing-Templates-Clean-Room-Assembly-Particle-Prevention\/\" target=\"_blank\" class=\"text-link-pill\">\u629b\u5149\u6a21\u677f\u7684\u6c61\u67d3\u63a7\u5236<\/a> \u63d0\u4f9b\u4e86\u4e00\u4e2a\u7ed3\u6784\u5316\u6846\u67b6\uff0c\u53ef\u5c06\u6a21\u677f\u72b6\u6001\u76d1\u6d4b\u96c6\u6210\u5230\u5de5\u5382\u7684\u6574\u4f53\u629b\u5149\u5de5\u827a\u63a7\u5236\u7cfb\u7edf\u4e2d\u3002.<\/p>\n\n  <!-- Cluster D link -->\n  <div class=\"link-cluster\">\n    <h3>\ud83d\udcd6 \u64cd\u4f5c\u548c\u6545\u969c\u6392\u9664\u8d44\u6e90<\/h3>\n    <p>\u7ef4\u62a4\u6a21\u677f\u6027\u80fd\u548c\u89e3\u51b3\u6d41\u7a0b\u95ee\u9898\u7684\u5b9e\u7528\u6307\u5357\uff1a<\/p>\n    <div class=\"cluster-links\">\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-to-Extend-Polishing-Template-Lifespan-Best-Practices-for-Semiconductor-Fabs\/\" target=\"_blank\">\u5ef6\u957f\u6a21\u677f\u5bff\u547d<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Contamination-Control-in-Polishing-Templates-Clean-Room-Assembly-Particle-Prevention\/\" target=\"_blank\">\u6c61\u67d3\u63a7\u5236\u6307\u5357<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Why-Is-Your-Wafer-Edge-Profile-Poor-5-Template-Related-Causes-Solutions\/\" target=\"_blank\">\u8fb9\u7f18\u8f6e\u5ed3\u6545\u969c\u6392\u9664<\/a>\n    <\/div>\n  <\/div>\n\n  <hr class=\"section-divider\" \/>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       SECTION 11 \u2014 FAQ\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n  <h2 id=\"faq\">\u5e38\u89c1\u95ee\u9898<\/h2>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">\u4ec0\u4e48\u662f\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u629b\u5149\u6a21\u677f\uff1f<\/div>\n    <div class=\"faq-a\">\u629b\u5149\u6a21\u677f\u662f\u4e00\u79cd\u7cbe\u5bc6\u5939\u5177\uff0c\u7528\u4e8e\u5355\u9762\u6676\u7247\u629b\u5149\u673a\uff0c\u5c06\u6676\u7247\u56fa\u5b9a\u5e76\u652f\u6491\u5728\u629b\u5149\u57ab\u4e0a\u3002\u5b83\u7531\u4e00\u4e2a\u521a\u6027\u8f7d\u677f\uff08\u901a\u5e38\u4e3a FR-4 \u6216 G-10 \u73bb\u7483\u7ea4\u7ef4\uff09\u548c\u4e00\u4e2a\u591a\u5b54\u886c\u57ab\u7ec4\u6210\u3002\u5b83\u7684\u4e3b\u8981\u529f\u80fd\u662f\u5728\u6574\u4e2a\u6676\u7247\u80cc\u9762\u5747\u5300\u5206\u5e03\u629b\u5149\u538b\u529b\uff0c\u901a\u8fc7\u6bdb\u7ec6\u7ba1\u9644\u7740\u529b\u4fdd\u6301\u6676\u7247\u7684\u4f4d\u7f6e\uff0c\u5e76\u63a7\u5236\u51b3\u5b9a\u6676\u7247\u8fb9\u7f18\u8f6e\u5ed3\u7684\u8fb9\u7f18\u538b\u529b\u68af\u5ea6\u3002.<\/div>\n  <\/div>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">\u629b\u5149\u6a21\u677f\u662f\u7528\u4ec0\u4e48\u6750\u6599\u5236\u6210\u7684\uff1f<\/div>\n    <div class=\"faq-a\">\u8f7d\u6d41\u677f\u901a\u5e38\u7531 FR-4 \u6216 G-10 \u73bb\u7483\u7ea4\u7ef4\u5c42\u538b\u677f\u5236\u6210\u3002FR-4 \u662f\u4f7f\u7528\u78b1\u6027\u6d46\u6599\uff08pH \u503c\u4e3a 8-12\uff09\u7684\u7845 SSP \u7684\u6807\u51c6\u6750\u6599\u3002G-10 \u5728\u5f31\u9178\u6027\u73af\u5883\uff08pH \u503c\u4e3a 5-12\uff09\u4e0b\u7684\u8010\u5316\u5b66\u6027\u7a0d\u597d\u3002\u5bf9\u4e8e SiC\u3001GaAs \u548c\u5176\u4ed6\u9700\u8981\u4fb5\u8680\u6027 CMP \u5316\u5b66\u7269\u8d28\uff08pH \u503c\u4e3a 2-13\uff09\u7684\u57fa\u6750\uff0c\u5219\u4f7f\u7528\u5177\u6709\u65e0\u7f1d\u5355\u58f3\u7ed3\u6784\u7684 CXT \u7ea7\u8010\u5316\u5b66\u6750\u6599\u3002.<\/div>\n  <\/div>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">\u629b\u5149\u6a21\u677f\u53ef\u4ee5\u7528\u4e8e\u78b3\u5316\u7845\u6676\u7247\u5417\uff1f<\/div>\n    <div class=\"faq-a\">\u662f\u7684\uff0c\u4f46\u6807\u51c6\u7684 FR-4 \u6216 G-10 \u6a21\u677f\u4e0d\u9002\u5408 SiC CMP\u3002SiC \u629b\u5149\u4e2d\u4f7f\u7528\u7684\u9ad8\u9178\u6027 KMnO\u2084 \u57fa\u6d46\u6599\u4f1a\u4fb5\u8680\u6807\u51c6\u5c42\u538b\u677f\u7684\u73af\u6c27\u57fa\u8d28\u3002CXT \u7ea7\u6a21\u677f\u5177\u6709\u65e0\u7f1d\u7ed3\u6784\u548c\u6ce5\u6d46\u963b\u9694\u5de5\u4f5c\u5b54\u886c\u91cc\uff0c\u662f\u4e13\u4e3a SiC CMP \u73af\u5883\u8bbe\u8ba1\u7684\u3002\u5409\u4e4b\u5c9b\u53ef\u63d0\u4f9b\u5168\u7cfb\u5217\u7b26\u5408 SiC \u6807\u51c6\u7684\u629b\u5149\u6a21\u677f\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u4e13\u7528\u7f51\u7ad9\u3002 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/SiC-Wafer-Polishing-Templates-Chemically-Resistant-Solutions-for-Silicon-Carbide-Processing\/\" target=\"_blank\">\u78b3\u5316\u7845\u629b\u5149\u6a21\u677f\u6307\u5357<\/a> \u89c4\u683c\u3002.<\/div>\n  <\/div>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">\u4ec0\u4e48\u662f\u65e0\u8721\u629b\u5149\u6a21\u677f\uff0c\u4e3a\u4ec0\u4e48\u9996\u9009\u65e0\u8721\u629b\u5149\u6a21\u677f\uff1f<\/div>\n    <div class=\"faq-a\">\u65e0\u8721\u629b\u5149\u6a21\u677f\u4f7f\u7528\u9884\u5148\u7c98\u5408\u7684\u591a\u5b54\u886c\u57ab\uff0c\u5728\u6e7f\u6da6\u65f6\u901a\u8fc7\u6bdb\u7ec6\u7ba1\u7c98\u5408\u529b\u56fa\u5b9a\u6676\u7247\uff0c\u5b8c\u5168\u6d88\u9664\u4e86\u4f20\u7edf\u629b\u5149\u4e2d\u7684\u8721\u7c98\u5408\u548c\u8131\u8721\u6b65\u9aa4\u3002\u5176\u4f18\u70b9\u5305\u62ec\u5728\u88c5\u8f7d\/\u5378\u8f7d\u6676\u7247\u65f6\u65e0\u70ed\u5e94\u529b\uff0c\u65e0\u5316\u5b66\u8131\u8721\u6e05\u6d01\u6b65\u9aa4\uff0c\u6d88\u9664\u4e86\u4e0b\u6e38\u5de5\u827a\u4e2d\u7684\u8721\u6c61\u67d3\uff0c\u5e76\u964d\u4f4e\u4e86\u603b\u62e5\u6709\u6210\u672c\u3002\u65e0\u8721\u6a21\u677f\u73b0\u5df2\u6210\u4e3a\u7845\u6676\u7247 SSP \u7684\u884c\u4e1a\u6807\u51c6\u3002.<\/div>\n  <\/div>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">\u5982\u4f55\u4e3a\u6211\u7684\u5de5\u827a\u9009\u62e9\u5408\u9002\u7684\u629b\u5149\u6a21\u677f\uff1f<\/div>\n    <div class=\"faq-a\">\u516d\u4e2a\u53c2\u6570\u81f3\u5173\u91cd\u8981\uff1a(1) \u6676\u5706\u76f4\u5f84\u548c\u6700\u7ec8\u76ee\u6807\u539a\u5ea6\uff1b(2) \u4e0e\u6d46\u6599 pH \u503c\u76f8\u5339\u914d\u7684\u8f7d\u677f\u6750\u6599\uff1b(3) \u4e0e\u5de5\u827a\u538b\u529b\u548c\u57fa\u677f\u786c\u5ea6\u76f8\u5339\u914d\u7684\u886c\u57ab\u786c\u5ea6\uff1b(4) \u76f8\u5bf9\u4e8e\u6700\u7ec8\u6676\u5706\u539a\u5ea6\u7684\u5de5\u4f5c\u5b54\u6df1\u5ea6\u516c\u5dee\uff1b(5) \u57fa\u4e8e\u8fb9\u7f18\u8f6e\u5ed3\u89c4\u683c\u7684\u8fb9\u7f18\u589e\u5f3a\u73af\u8981\u6c42\uff1b(6) \u8f7d\u5934\u51e0\u4f55\u5f62\u72b6\u517c\u5bb9\u6027\u3002\u6211\u4eec\u7684 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-to-Specify-a-Polishing-Template-6-Parameters-Engineers-Must-Define\/\" target=\"_blank\">\u89c4\u683c\u6307\u5357<\/a> \u8be6\u7ec6\u4ecb\u7ecd\u4e86\u6bcf\u4e2a\u53c2\u6570\u3002.<\/div>\n  <\/div>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">\u629b\u5149\u6a21\u677f\u7684\u4f7f\u7528\u5bff\u547d\u6709\u591a\u957f\uff1f<\/div>\n    <div class=\"faq-a\">\u6a21\u677f\u5bff\u547d\u53d6\u51b3\u4e8e\u5e94\u7528\u3002\u5728\u4f7f\u7528\u78b1\u6027\u6d46\u6599\u7684\u6807\u51c6\u7845 SSP \u4e2d\uff0cFR-4 \u6a21\u677f\u901a\u5e38\u53ef\u652f\u6301 50-200 \u6b21\u629b\u5149\u5faa\u73af\uff0c\u7136\u540e\u624d\u9700\u8981\u66f4\u6362\u886c\u57ab\u3002SiC CMP \u6a21\u677f\u7684\u5bff\u547d\u5219\u4f1a\u56e0\u7814\u78e8\u6d46\u6599\u6761\u4ef6\u800c\u7f29\u77ed\u3002\u6240\u6709\u5409\u4e4b\u5c9b\u6a21\u677f\u90fd\u5305\u542b\u57fa\u4e8e\u80cc\u57ab\u539a\u5ea6\u76d1\u6d4b\u7684\u7279\u5b9a\u6279\u6b21\u5faa\u73af\u5bff\u547d\u5efa\u8bae\u3002\u8bf7\u53c2\u9605\u6211\u4eec\u7684\u6307\u5357 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-to-Extend-Polishing-Template-Lifespan-Best-Practices-for-Semiconductor-Fabs\/\" target=\"_blank\">\u5ef6\u957f\u6a21\u677f\u5bff\u547d<\/a> \u76d1\u6d4b\u534f\u8bae\u548c\u66f4\u6362\u6807\u51c6\u3002.<\/div>\n  <\/div>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">\u5409\u4e4b\u5c9b\u629b\u5149\u6a21\u677f\u662f\u5728\u4ec0\u4e48\u6d01\u51c0\u5ba4\u7ea7\u522b\u4e2d\u7ec4\u88c5\u7684\uff1f<\/div>\n    <div class=\"faq-a\">\u6240\u6709\u5409\u4e4b\u5c9b\u629b\u5149\u6a21\u677f\u5747\u5728 ISO 5 \u7ea7\uff08100 \u7ea7\uff09\u6d01\u51c0\u5ba4\u73af\u5883\u4e2d\u7ec4\u88c5\u3002\u6bcf\u6279\u539f\u6750\u6599\u7684\u53ef\u8ffd\u6eaf\u8bb0\u5f55\u81f3\u5c11\u4fdd\u5b58\u4e94\u5e74\u3002\u6a21\u677f\u5355\u72ec\u5bc6\u5c01\u5728\u6c2e\u6c14\u51c0\u5316\u7684\u805a\u4e59\u70ef\u888b\u4e2d\uff0c\u91c7\u7528\u9632\u9759\u7535\u3001\u6e7f\u5ea6\u53ef\u63a7\u7684\u5305\u88c5\u8fd0\u8f93\u3002.<\/div>\n  <\/div>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       CTA\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n  <div class=\"cta-banner\">\n    <h2>\u83b7\u53d6\u629b\u5149\u6a21\u677f\u9700\u6c42\u62a5\u4ef7<\/h2>\n    <p>\u8bf7\u544a\u8bc9\u6211\u4eec\u60a8\u7684\u6676\u7247\u76f4\u5f84\u3001\u57fa\u677f\u6750\u6599\u3001\u6d46\u6599\u5316\u5b66\u6210\u5206\u548c\u76ee\u6807\u5e73\u9762\u5ea6\u89c4\u683c - \u6211\u4eec\u7684\u96c6\u667a\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\u56e2\u961f\u5c06\u5728 48 \u5c0f\u65f6\u5185\u7ed9\u51fa\u6709\u7ade\u4e89\u529b\u7684\u62a5\u4ef7\u548c\u6280\u672f\u5efa\u8bae\u3002.<\/p>\n    <a href=\"https:\/\/jeez-semicon.com\/zh\/contact\/\" class=\"cta-btn\" target=\"_blank\">\n      \u8054\u7cfb\u6211\u4eec\u83b7\u53d6\u62a5\u4ef7 \u2192\n    <\/a>\n  <\/div>\n\n  <!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\n       SEO EDITOR NOTES (REMOVE BEFORE PUBLISHING)\n       \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\n\n\n<\/div><!-- \/.page-wrap -->\n\n<\/body>","protected":false},"excerpt":{"rendered":"<p>Semiconductor Process Equipment Everything engineers, process owners, and procurement teams need to know \u2014 from material science and process mechanics to substrate-specific selection and custom engineering. By Jizhi Electronic Technology  &#8230;<\/p>","protected":false},"author":1,"featured_media":1681,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1634","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1634","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=1634"}],"version-history":[{"count":5,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1634\/revisions"}],"predecessor-version":[{"id":1695,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1634\/revisions\/1695"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/1681"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=1634"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=1634"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=1634"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}