{"id":1658,"date":"2026-03-13T09:16:34","date_gmt":"2026-03-13T01:16:34","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1658"},"modified":"2026-03-13T09:53:38","modified_gmt":"2026-03-13T01:53:38","slug":"sic-wafer-polishing-templates-chemically-resistant-solutions-for-silicon-carbide-processing","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/sic-wafer-polishing-templates-chemically-resistant-solutions-for-silicon-carbide-processing\/","title":{"rendered":"\u78b3\u5316\u7845\u6676\u7247\u629b\u5149\u6a21\u677f\uff1a\u78b3\u5316\u7845\u52a0\u5de5\u7684\u8010\u5316\u5b66\u89e3\u51b3\u65b9\u6848"},"content":{"rendered":"<!DOCTYPE html>\n<html lang=\"en\">\n<head>\n<meta charset=\"UTF-8\" \/>\n<meta name=\"viewport\" content=\"width=device-width, initial-scale=1.0\" \/>\n\n<meta name=\"description\" content=\"Engineering guide to polishing templates for silicon carbide (SiC) wafer processing. Covers CXT-grade chemical resistance, KMnO\u2084 slurry compatibility, high-pressure backing pad selection, EER design for SiC, and CMP process considerations for 4H-SiC and 6H-SiC substrates.\" \/>\n<meta name=\"keywords\" content=\"SiC wafer polishing template, silicon carbide polishing template, SiC CMP template, CXT polishing template, SiC wafer CMP, silicon carbide CMP slurry template, SiC polishing fixture, 4H-SiC polishing template, SiC substrate polishing, KMnO4 SiC CMP template\" \/>\n<link rel=\"canonical\" href=\"https:\/\/jeez-semicon.com\/blog\/SiC-Wafer-Polishing-Templates-Chemically-Resistant-Solutions-for-Silicon-Carbide-Processing\" \/>\n\n<meta property=\"og:title\" content=\"SiC Wafer Polishing Templates: Chemically Resistant Solutions for Silicon Carbide Processing\" \/>\n<meta property=\"og:description\" content=\"Why standard FR-4 templates fail in SiC CMP \u2014 and how CXT-grade chemically resistant templates solve the chemical compatibility, dimensional stability, and edge profile challenges of silicon carbide wafer processing.\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:url\" content=\"https:\/\/jeez-semicon.com\/blog\/SiC-Wafer-Polishing-Templates-Chemically-Resistant-Solutions-for-Silicon-Carbide-Processing\" \/>\n\n<script type=\"application\/ld+json\">\n{\n  \"@context\": \"https:\/\/schema.org\",\n  \"@graph\": [\n    {\n      \"@type\": \"Article\",\n      \"headline\": \"SiC Wafer Polishing Templates: Chemically Resistant Solutions for Silicon Carbide Processing\",\n      \"description\": \"Engineering guide covering CXT-grade polishing template requirements for silicon carbide wafer CMP, including chemical resistance against KMnO\u2084 and H\u2082O\u2082 slurries, high-pressure backing pad selection, EER design for SiC edge exclusion, and complete specification guidance.\",\n      \"author\": { \"@type\": \"Organization\", \"name\": \"Jizhi Electronic Technology Co., Ltd.\", \"url\": \"https:\/\/jeez-semicon.com\" },\n      \"publisher\": { \"@type\": \"Organization\", \"name\": \"Jizhi Electronic Technology Co., Ltd.\", \"url\": \"https:\/\/jeez-semicon.com\" },\n      \"mainEntityOfPage\": { \"@type\": \"WebPage\", \"@id\": \"https:\/\/jeez-semicon.com\/blog\/SiC-Wafer-Polishing-Templates-Chemically-Resistant-Solutions-for-Silicon-Carbide-Processing\" }\n    },\n    {\n      \"@type\": \"FAQPage\",\n      \"mainEntity\": [\n        {\n          \"@type\": \"Question\",\n          \"name\": \"Why do SiC wafers require special polishing templates?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"Silicon carbide is approximately 30 times harder than silicon (Mohs 9.5 vs 7.0) and requires CMP slurries containing strong oxidants \u2014 typically KMnO\u2084 at pH 2\u20134 or H\u2082O\u2082 at pH 3\u20135 \u2014 to achieve acceptable material removal rates. These slurry chemistries are chemically incompatible with standard FR-4 and G-10 fiberglass polishing templates, which delaminate within 40\u201360 cycles in these conditions. SiC processing also requires higher applied pressures (4\u20137 psi vs 2\u20134 psi for Si), which demand harder backing pads. Only CXT-grade chemically resistant templates with seamless construction provide the chemical stability and dimensional consistency needed for production SiC CMP.\"\n          }\n        },\n        {\n          \"@type\": \"Question\",\n          \"name\": \"What slurry chemistries are used in SiC CMP and how do they affect template selection?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"SiC CMP primarily uses two slurry chemistry families: KMnO\u2084-based alkaline oxidant slurries (pH 9\u201311) for Si-face CMP, and H\u2082O\u2082-based acidic slurries (pH 2\u20135) for C-face and mechanical planarization steps. Both chemistries are highly aggressive toward standard FR-4 and G-10 laminate materials due to the oxidant component. The KMnO\u2084 system additionally poses contamination risk from Mn ion leaching onto the wafer surface. CXT-grade templates are required for both slurry families, as their seamless inert matrix construction provides pH 2\u201313 resistance including strong oxidant stability.\"\n          }\n        },\n        {\n          \"@type\": \"Question\",\n          \"name\": \"What is the typical polishing cycle life of a CXT template in SiC CMP?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"CXT-grade templates in SiC CMP typically achieve 50\u2013120 polishing cycles before backing pad thickness drops below the replacement threshold, depending on the applied pressure (higher pressure accelerates pad wear), SiC substrate hardness, and slurry abrasive concentration. At 6 psi with standard diamond slurry, cycle life is typically 60\u201390 cycles. Compared to FR-4 templates which fail chemically at 40\u201360 cycles regardless of mechanical wear state, CXT templates' service life is determined purely by backing pad wear \u2014 a predictable and manageable consumable lifecycle.\"\n          }\n        },\n        {\n          \"@type\": \"Question\",\n          \"name\": \"Can the same polishing template be used for both Si-face and C-face SiC CMP?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"The carrier plate material (CXT-grade) is compatible with both Si-face and C-face SiC polishing chemistries. However, the backing pad specification and work-hole depth may differ between the two faces due to differences in target final thickness and preferred process pressure. If Si-face and C-face polishing use the same final target thickness and the same process pressure, the same template specification can serve both steps. In most production flows, Si-face and C-face use separate polishing machines and separate template lots are maintained for tracking and qualification reasons even when the geometry is identical.\"\n          }\n        }\n      ]\n    }\n  ]\n}\n<\/script>\n\n<style>\n  @import url('https:\/\/fonts.googleapis.com\/css2?family=DM+Serif+Display:ital@0;1&family=DM+Sans:opsz,wght@9..40,300;9..40,400;9..40,500;9..40,600&family=JetBrains+Mono:wght@400;500&display=swap');\n\n  :root {\n    --navy:      #0a1628;\n    --navy-mid:  #112240;\n    --blue:      #1a56db;\n    --blue-lite: #3b82f6;\n    --cyan:      #06b6d4;\n    --slate:     #334155;\n    --muted:     #64748b;\n    --border:    #e2e8f0;\n    --bg:        #f8fafc;\n    --white:     #ffffff;\n    --accent:    #f59e0b;\n    --green:     #10b981;\n    --teal:      #0f766e;\n    --red:       #ef4444;\n    --purple:    #7c3aed;\n    --sic:       #6d28d9;\n    --radius:    10px;\n    --shadow:    0 4px 24px rgba(10,22,40,.08);\n    --shadow-lg: 0 12px 48px rgba(10,22,40,.14);\n  }\n\n  *, *::before, *::after { box-sizing: border-box; margin: 0; padding: 0; }\n  body { font-family: 'DM Sans', sans-serif; font-size: 16px; line-height: 1.75; color: var(--slate); background: var(--white); -webkit-font-smoothing: antialiased; }\n  .page-wrap { max-width: 880px; margin: 0 auto; padding: 0 24px 80px; }\n\n  \/* \u2500\u2500 Hero \u2500\u2500 *\/\n  .hero { background: linear-gradient(135deg, #0d0a1e 0%, #1a0f38 50%, #260d52 100%); color: var(--white); padding: 72px 24px 64px; text-align: center; position: relative; overflow: hidden; }\n  .hero::before { content: ''; position: absolute; inset: 0; background: radial-gradient(ellipse at 20% 65%, rgba(109,40,217,.15) 0%, transparent 50%), radial-gradient(ellipse at 80% 20%, rgba(6,182,212,.08) 0%, transparent 45%); pointer-events: none; }\n  .hero-eyebrow { display: inline-block; font-family: 'JetBrains Mono', monospace; font-size: 11px; font-weight: 500; letter-spacing: .14em; text-transform: uppercase; color: #c4b5fd; background: rgba(109,40,217,.2); border: 1px solid rgba(109,40,217,.4); border-radius: 4px; padding: 4px 12px; margin-bottom: 20px; }\n  .hero h1 { font-family: 'DM Serif Display', serif; font-size: clamp(26px, 4.5vw, 44px); line-height: 1.15; color: var(--white); max-width: 800px; margin: 0 auto 20px; }\n  .hero-sub { font-size: 17px; color: rgba(255,255,255,.72); max-width: 640px; margin: 0 auto 32px; font-weight: 300; }\n  .hero-meta { font-family: 'JetBrains Mono', monospace; font-size: 11px; color: rgba(255,255,255,.4); letter-spacing: .08em; }\n  .hero-meta span { margin: 0 10px; }\n\n  \/* \u2500\u2500 Breadcrumb \u2500\u2500 *\/\n  .breadcrumb { padding: 14px 0; font-size: 13px; color: var(--muted); }\n  .breadcrumb a { color: var(--blue); text-decoration: none; }\n  .breadcrumb a:hover { text-decoration: underline; }\n  .breadcrumb span { margin: 0 6px; color: var(--border); }\n\n  \/* \u2500\u2500 TOC \u2500\u2500 *\/\n  .toc-box { background: var(--bg); border: 1px solid var(--border); border-left: 4px solid var(--sic); border-radius: var(--radius); padding: 28px 32px; margin: 32px 0 40px; }\n  .toc-box h2 { font-family: 'DM Sans', sans-serif; font-size: 13px; font-weight: 600; letter-spacing: .1em; text-transform: uppercase; color: var(--sic); margin-bottom: 16px; }\n  .toc-list { list-style: none; counter-reset: toc-item; column-count: 2; column-gap: 24px; }\n  @media (max-width: 580px) { .toc-list { column-count: 1; } }\n  .toc-list li { margin-bottom: 8px; break-inside: avoid; }\n  .toc-list a { color: var(--slate); text-decoration: none; font-size: 14px; display: flex; align-items: flex-start; gap: 8px; transition: color .2s; }\n  .toc-list a::before { content: counter(toc-item); counter-increment: toc-item; font-family: 'JetBrains Mono', monospace; font-size: 11px; color: var(--sic); min-width: 18px; margin-top: 2px; flex-shrink: 0; }\n  .toc-list a:hover { color: var(--sic); }\n\n  \/* \u2500\u2500 Typography \u2500\u2500 *\/\n  h2 { font-family: 'DM Serif Display', serif; font-size: clamp(22px, 3.5vw, 30px); color: var(--navy); margin: 56px 0 18px; line-height: 1.25; scroll-margin-top: 24px; }\n  h3 { font-family: 'DM Sans', sans-serif; font-size: 19px; font-weight: 600; color: var(--navy-mid); margin: 36px 0 14px; scroll-margin-top: 24px; }\n  p { margin-bottom: 18px; }\n  a { color: var(--blue); text-decoration: underline; text-underline-offset: 3px; text-decoration-thickness: 1px; }\n  a:hover { color: var(--blue-lite); }\n  strong { font-weight: 600; color: var(--navy-mid); }\n  ul, ol { padding-left: 24px; margin-bottom: 18px; }\n  ul li, ol li { margin-bottom: 8px; }\n  hr.divider { border: none; border-top: 1px solid var(--border); margin: 48px 0 0; }\n\n  \/* \u2500\u2500 Callouts \u2500\u2500 *\/\n  .callout { border-radius: var(--radius); padding: 20px 24px; margin: 28px 0; display: flex; gap: 14px; align-items: flex-start; }\n  .callout-icon { font-size: 20px; flex-shrink: 0; margin-top: 1px; }\n  .callout-body { font-size: 15px; line-height: 1.65; }\n  .callout-body strong { display: block; font-size: 13px; letter-spacing: .05em; text-transform: uppercase; margin-bottom: 4px; }\n  .callout.info    { background: #eff6ff; border-left: 4px solid var(--blue); }\n  .callout.tip     { background: #f0fdf4; border-left: 4px solid var(--green); }\n  .callout.warning { background: #fffbeb; border-left: 4px solid var(--accent); }\n  .callout.danger  { background: #fef2f2; border-left: 4px solid var(--red); }\n  .callout.sic     { background: #f5f3ff; border-left: 4px solid var(--sic); }\n\n  \/* \u2500\u2500 Tables \u2500\u2500 *\/\n  .table-wrap { overflow-x: auto; margin: 28px 0; border-radius: var(--radius); box-shadow: var(--shadow); }\n  table { width: 100%; border-collapse: collapse; font-size: 14.5px; }\n  thead { background: var(--navy); color: var(--white); }\n  thead th { padding: 14px 16px; text-align: left; font-weight: 500; font-size: 13px; letter-spacing: .04em; }\n  tbody tr { border-bottom: 1px solid var(--border); transition: background .15s; }\n  tbody tr:hover { background: var(--bg); }\n  tbody td { padding: 13px 16px; vertical-align: top; }\n  tbody tr:last-child { border-bottom: none; }\n  tbody tr.row-highlight td { background: #f5f3ff; }\n  tbody tr.row-warn td { background: #fffbeb; }\n  tbody tr.row-danger td { background: #fef2f2; }\n  tbody tr.row-green td { background: #f0fdf4; }\n\n  .badge { display: inline-block; padding: 2px 8px; border-radius: 4px; font-size: 11.5px; font-weight: 600; letter-spacing: .04em; text-transform: uppercase; }\n  .badge-green  { background: #d1fae5; color: #065f46; }\n  .badge-blue   { background: #dbeafe; color: #1e40af; }\n  .badge-amber  { background: #fef3c7; color: #92400e; }\n  .badge-red    { background: #fee2e2; color: #991b1b; }\n  .badge-purple { background: #ede9fe; color: #4c1d95; }\n  .badge-slate  { background: #f1f5f9; color: #475569; }\n\n  \/* \u2500\u2500 SiC vs Si comparison banner \u2500\u2500 *\/\n  .compare-banner {\n    display: grid; grid-template-columns: 1fr 1fr; gap: 0;\n    border: 1px solid var(--border); border-radius: var(--radius);\n    overflow: hidden; box-shadow: var(--shadow); margin: 28px 0;\n  }\n  @media (max-width: 560px) { .compare-banner { grid-template-columns: 1fr; } }\n  .compare-col { padding: 20px 22px; }\n  .compare-col.si-col  { background: #eff6ff; border-right: 1px solid var(--border); }\n  .compare-col.sic-col { background: #f5f3ff; }\n  .compare-col h4 { font-size: 13px; font-weight: 700; letter-spacing: .08em; text-transform: uppercase; margin-bottom: 12px; }\n  .compare-col.si-col  h4 { color: #1e40af; }\n  .compare-col.sic-col h4 { color: var(--sic); }\n  .compare-row { display: flex; justify-content: space-between; padding: 6px 0; border-bottom: 1px solid rgba(0,0,0,.06); font-size: 13.5px; }\n  .compare-row:last-child { border-bottom: none; }\n  .compare-row .ck { color: var(--muted); font-size: 12.5px; }\n  .compare-row .cv { font-weight: 600; color: var(--navy); font-size: 13px; }\n  .cv.challenge { color: var(--red); }\n  .cv.ok { color: var(--teal); }\n\n  \/* \u2500\u2500 Process flow comparison \u2500\u2500 *\/\n  .sic-flow { margin: 28px 0; }\n  .flow-step-sic {\n    display: flex; gap: 14px; align-items: flex-start;\n    padding: 14px 18px; border-bottom: 1px solid var(--border);\n    background: var(--white);\n  }\n  .flow-step-sic:first-child { border-radius: var(--radius) var(--radius) 0 0; border: 1px solid var(--border); }\n  .flow-step-sic:last-child  { border-radius: 0 0 var(--radius) var(--radius); border: 1px solid var(--border); border-top: none; }\n  .flow-step-sic:not(:first-child):not(:last-child) { border-left: 1px solid var(--border); border-right: 1px solid var(--border); }\n  .sic-step-tag {\n    font-family: 'JetBrains Mono', monospace; font-size: 11px; font-weight: 700;\n    padding: 4px 8px; border-radius: 5px; flex-shrink: 0; margin-top: 2px;\n    letter-spacing: .04em; text-transform: uppercase;\n  }\n  .tag-lapping  { background: #fef3c7; color: #78350f; }\n  .tag-cmp1     { background: #ede9fe; color: #4c1d95; }\n  .tag-cmp2     { background: #ddd6fe; color: #4c1d95; }\n  .tag-final    { background: #d1fae5; color: #064e3b; }\n  .tag-inspect  { background: #f1f5f9; color: #334155; }\n  .flow-body strong { display: block; font-size: 14.5px; color: var(--navy-mid); margin-bottom: 3px; }\n  .flow-body p { font-size: 13.5px; margin: 0; }\n  .flow-body .template-note {\n    display: inline-block; margin-top: 6px;\n    font-family: 'JetBrains Mono', monospace; font-size: 11px;\n    background: var(--navy); color: var(--cyan);\n    border-radius: 4px; padding: 2px 8px;\n  }\n\n  \/* \u2500\u2500 Failure timeline \u2500\u2500 *\/\n  .failure-tl { margin: 24px 0; }\n  .ftl-row { display: flex; gap: 14px; padding: 12px 0; border-bottom: 1px solid var(--border); align-items: flex-start; }\n  .ftl-row:last-child { border-bottom: none; }\n  .ftl-cycle { font-family: 'JetBrains Mono', monospace; font-size: 11px; font-weight: 700; padding: 3px 9px; border-radius: 5px; flex-shrink: 0; margin-top: 3px; white-space: nowrap; color: var(--white); }\n  .cyc-safe   { background: var(--green); }\n  .cyc-warn   { background: var(--accent); color: var(--navy); }\n  .cyc-danger { background: var(--red); }\n  .ftl-body strong { font-size: 14px; color: var(--navy-mid); display: block; margin-bottom: 3px; }\n  .ftl-body p { font-size: 13.5px; margin: 0; }\n\n  \/* \u2500\u2500 Spec summary card \u2500\u2500 *\/\n  .spec-card {\n    background: var(--navy);\n    border-radius: var(--radius); padding: 28px 32px; margin: 32px 0;\n    position: relative; overflow: hidden;\n  }\n  .spec-card::before { content: ''; position: absolute; inset: 0; background: radial-gradient(ellipse at 80% 20%, rgba(109,40,217,.2) 0%, transparent 55%); pointer-events: none; }\n  .spec-card-title { font-family: 'JetBrains Mono', monospace; font-size: 11px; font-weight: 600; letter-spacing: .1em; text-transform: uppercase; color: #c4b5fd; margin-bottom: 20px; }\n  .spec-grid { display: grid; grid-template-columns: repeat(auto-fill, minmax(200px, 1fr)); gap: 16px; }\n  .spec-item { }\n  .spec-item .sl { font-size: 11px; font-family: 'JetBrains Mono', monospace; text-transform: uppercase; letter-spacing: .07em; color: rgba(255,255,255,.45); margin-bottom: 4px; }\n  .spec-item .sv { font-size: 14px; font-weight: 600; color: var(--white); }\n  .spec-item .sv.highlight { color: #c4b5fd; }\n\n  \/* \u2500\u2500 Inline link pill \u2500\u2500 *\/\n  .text-link-pill { display: inline-flex; align-items: center; gap: 5px; background: #eff6ff; border: 1px solid #bfdbfe; color: var(--blue); text-decoration: none; font-size: 14px; font-weight: 500; padding: 3px 10px; border-radius: 20px; transition: background .15s; white-space: nowrap; }\n  .text-link-pill:hover { background: #dbeafe; color: var(--navy); }\n  .text-link-pill::after { content: '\u2197'; font-size: 10px; }\n\n  \/* \u2500\u2500 Related articles \u2500\u2500 *\/\n  .related-box { background: linear-gradient(135deg, var(--navy) 0%, var(--navy-mid) 100%); border-radius: var(--radius); padding: 28px 32px; margin: 44px 0; color: var(--white); }\n  .related-box h3 { font-family: 'DM Sans', sans-serif; font-size: 13px; font-weight: 600; letter-spacing: .1em; text-transform: uppercase; color: #c4b5fd; margin: 0 0 14px; }\n  .related-box p { color: rgba(255,255,255,.65); font-size: 14px; margin-bottom: 16px; }\n  .related-links { display: flex; flex-wrap: wrap; gap: 10px; }\n  .related-links a { display: inline-flex; align-items: center; gap: 6px; background: rgba(255,255,255,.08); border: 1px solid rgba(255,255,255,.15); color: rgba(255,255,255,.9); text-decoration: none; font-size: 13px; font-weight: 500; padding: 8px 14px; border-radius: 6px; transition: background .2s; }\n  .related-links a:hover { background: rgba(255,255,255,.16); color: #fff; }\n  .related-links a::before { content: '\u2197'; font-size: 11px; color: #c4b5fd; }\n\n  \/* \u2500\u2500 FAQ \u2500\u2500 *\/\n  .faq-item { border-bottom: 1px solid var(--border); padding: 20px 0; }\n  .faq-item:last-child { border-bottom: none; }\n  .faq-q { font-weight: 600; color: var(--navy-mid); font-size: 16px; margin-bottom: 10px; display: flex; gap: 10px; align-items: flex-start; }\n  .faq-q::before { content: 'Q'; font-family: 'JetBrains Mono', monospace; font-size: 12px; color: var(--white); background: var(--sic); border-radius: 4px; padding: 2px 6px; flex-shrink: 0; margin-top: 1px; }\n  .faq-a { font-size: 15px; color: var(--slate); padding-left: 32px; }\n\n  \/* \u2500\u2500 CTA \u2500\u2500 *\/\n  .cta-banner { background: linear-gradient(135deg, #1a0f38 0%, #0a1628 100%); border-radius: var(--radius); padding: 44px 40px; text-align: center; color: var(--white); margin: 56px 0 0; box-shadow: var(--shadow-lg); position: relative; overflow: hidden; }\n  .cta-banner::before { content: ''; position: absolute; inset: 0; background: radial-gradient(ellipse at 70% 40%, rgba(109,40,217,.2) 0%, transparent 60%); pointer-events: none; }\n  .cta-banner h2 { font-family: 'DM Serif Display', serif; font-size: clamp(22px, 3.5vw, 30px); color: var(--white); margin: 0 0 12px; }\n  .cta-banner p { color: rgba(255,255,255,.72); font-size: 16px; max-width: 520px; margin: 0 auto 28px; }\n  .cta-btn { display: inline-flex; align-items: center; gap: 8px; background: #c4b5fd; color: var(--navy); text-decoration: none; font-weight: 600; font-size: 15px; padding: 14px 32px; border-radius: 8px; transition: opacity .2s, transform .15s; }\n  .cta-btn:hover { opacity: .9; transform: translateY(-1px); color: var(--navy); }\n\n  .back-to-pillar { display: inline-flex; align-items: center; gap: 8px; background: var(--bg); border: 1px solid var(--border); color: var(--slate); text-decoration: none; font-size: 13.5px; font-weight: 500; padding: 10px 18px; border-radius: 8px; margin: 40px 0 0; transition: border-color .2s, color .2s; }\n  .back-to-pillar::before { content: '\u2190'; color: var(--blue); }\n  .back-to-pillar:hover { border-color: var(--blue); color: var(--blue); }\n<\/style>\n<\/head>\n<body>\n\n<div class=\"hero\">\n  <div class=\"hero-eyebrow\">\u78b3\u5316\u7845\u886c\u5e95\u5de5\u7a0b<\/div>\n  <p class=\"hero-sub\">\u78b3\u5316\u7845\u662f\u6700\u786c\u7684\u666e\u901a\u534a\u5bfc\u4f53\u57fa\u6750\uff0c\u9700\u8981\u5316\u5b66\u4fb5\u8680\u6027\u6700\u5f3a\u7684 CMP \u7814\u78e8\u6db2\u3002\u6807\u51c6\u629b\u5149\u6a21\u677f\u5728\u6570\u5468\u5185\u5c31\u4f1a\u5931\u6548\u3002\u672c\u6307\u5357\u4ecb\u7ecd\u78b3\u5316\u7845\u52a0\u5de5\u7684\u5b9e\u9645\u8981\u6c42\uff0c\u4ee5\u53ca\u4e3a\u4ec0\u4e48 CXT \u7ea7\u6a21\u677f\u662f\u552f\u4e00\u53ef\u884c\u7684\u751f\u4ea7\u89e3\u51b3\u65b9\u6848\u3002.<\/p>\n  <p class=\"hero-meta\">\n    <span>\u7531\u96c6\u667a\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\u63d0\u4f9b.<\/span>\n    <span>\u00b7<\/span>\n    <span>\u534a\u5bfc\u4f53\u629b\u5149\u4e13\u5bb6<\/span>\n    <span>\u00b7<\/span>\n    <span>13 \u5206\u949f\u9605\u8bfb<\/span>\n  <\/p>\n<\/div>\n\n<div class=\"page-wrap\">\n\n  <nav class=\"breadcrumb\">\n    <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Polishing-Templates-for-Semiconductor-Silicon-Wafer-Processing\/\" target=\"_blank\">\u2190 \u629b\u5149\u6a21\u677f\uff1a\u5b8c\u6574\u6307\u5357<\/a>\n    <span>\/<\/span>\n    \u78b3\u5316\u7845\u6676\u7247\u629b\u5149\u6a21\u677f\n  <\/nav>\n\n  <nav class=\"toc-box\">\n    <h2>\u76ee\u5f55<\/h2>\n    <ol class=\"toc-list\">\n      <li><a href=\"#sic-market\">\u78b3\u5316\u7845\u6676\u7247\u5e02\u573a\u4e0e\u629b\u5149\u6311\u6218<\/a><\/li>\n      <li><a href=\"#sic-vs-si\">\u78b3\u5316\u7845\u4e0e\u7845\uff1a\u52a0\u5de5\u5de5\u827a\u4e3a\u4f55\u5b58\u5728\u672c\u8d28\u533a\u522b<\/a><\/li>\n      <li><a href=\"#polishing-flow\">\u78b3\u5316\u7845\u6676\u7247\u629b\u5149\u5de5\u827a\u6d41\u7a0b<\/a><\/li>\n      <li><a href=\"#slurry-chemistry\">SiC CMP \u6ce5\u6d46\u5316\u5b66\u6027\u8d28\u4e0e\u6a21\u677f\u517c\u5bb9\u6027<\/a><\/li>\n      <li><a href=\"#why-fr4-fails\">\u4e3a\u4ec0\u4e48 FR-4 \u548c G-10 \u6a21\u677f\u5728 SiC CMP \u4e2d\u4f1a\u5931\u6548<\/a><\/li>\n      <li><a href=\"#cxt-solution\">CXT \u7ea7\u6a21\u677f\uff1a\u89e3\u51b3\u65b9\u6848\u67b6\u6784<\/a><\/li>\n      <li><a href=\"#backing-pad\">\u9ad8\u538b\u78b3\u5316\u7845\u629b\u5149\u80cc\u57ab\u7684\u9009\u62e9<\/a><\/li>\n      <li><a href=\"#edge-profile\">\u78b3\u5316\u7845\u57fa\u677f\u7684\u8fb9\u7f18\u8f6e\u5ed3\u548c EER \u8bbe\u8ba1<\/a><\/li>\n      <li><a href=\"#cycle-life\">\u6a21\u677f\u5468\u671f\u5bff\u547d\u548c\u66f4\u6362\u89c4\u5212<\/a><\/li>\n      <li><a href=\"#full-spec\">\u5b8c\u6574\u7684\u78b3\u5316\u7845\u6a21\u677f\u89c4\u683c\u53c2\u8003<\/a><\/li>\n      <li><a href=\"#qualification\">\u78b3\u5316\u7845\u629b\u5149\u6a21\u677f\u7684\u9274\u5b9a\u7b56\u7565<\/a><\/li>\n      <li><a href=\"#faq\">\u5e38\u89c1\u95ee\u9898<\/a><\/li>\n    <\/ol>\n  <\/nav>\n\n  <!-- \u2550\u2550\u2550 SECTION 1 \u2550\u2550\u2550 -->\n  <h2 id=\"sic-market\">\u78b3\u5316\u7845\u6676\u7247\u5e02\u573a\u4e0e\u629b\u5149\u6311\u6218<\/h2>\n\n  <p>\u78b3\u5316\u7845\uff08SiC\uff09\u5177\u6709\u5353\u8d8a\u7684\u51fb\u7a7f\u573a\u5f3a\uff083 MV\/cm \u5bf9\u7845 0.3 MV\/cm\uff09\u3001\u9ad8\u70ed\u5bfc\u7387\uff084.9 W\/cm-K \u5bf9 1.5 W\/cm-K\uff09\u548c\u5bbd\u5e26\u9699\uff084H-SiC \u4e3a 3.26 eV\uff09\uff0c\u53ef\u4f7f\u5668\u4ef6\u5728\u7845\u65e0\u6cd5\u8fbe\u5230\u7684\u6e29\u5ea6\u548c\u7535\u538b\u4e0b\u5de5\u4f5c\uff0c\u56e0\u6b64\u5df2\u6210\u4e3a\u7535\u529b\u7535\u5b50\u5668\u4ef6\u7684\u4e3b\u6d41\u5bbd\u5e26\u9699\u534a\u5bfc\u4f53\u886c\u5e95\u3002SiC MOSFET \u548c\u8096\u7279\u57fa\u4e8c\u6781\u7ba1\u5728\u7535\u52a8\u6c7d\u8f66\u9006\u53d8\u5668\u3001\u7535\u52a8\u6c7d\u8f66\u5145\u7535\u57fa\u7840\u8bbe\u65bd\u548c\u5de5\u4e1a\u7535\u673a\u9a71\u52a8\u5668\u4e2d\u7684\u5feb\u901f\u5e94\u7528\uff0c\u63a8\u52a8\u4e86\u6676\u5706\u4ea7\u91cf\u4ece 2015 \u5e74\u7684\u63a5\u8fd1\u96f6\u589e\u52a0\u5230 2024 \u5e74\u7684\u6bcf\u5e74\u6570\u767e\u4e07\u7247\uff0c\u9884\u8ba1\u5230 2020 \u5e74\u4ee3\u672b\u5c06\u7ee7\u7eed\u4fdd\u6301\u4e24\u4f4d\u6570\u7684\u5e74\u589e\u957f\u7387\u3002.<\/p>\n\n  <p>\u8fd9\u79cd\u589e\u957f\u5e26\u6765\u4e86\u6269\u5927 SiC \u7845\u7247\u629b\u5149\u80fd\u529b\u7684\u8feb\u5207\u5de5\u4e1a\u9700\u6c42\uff0c\u540c\u65f6\u4e5f\u4f7f\u5236\u9020\u5546\u9762\u4e34\u7740\u4e00\u4e2a\u57fa\u672c\u7684\u5de5\u827a\u6311\u6218\uff1aSiC \u7684\u786c\u5ea6\u548c\u5316\u5b66\u60f0\u6027\u6781\u9ad8\uff0c\u4f7f\u5176\u6210\u4e3a\u6700\u96be\u6309\u7167\u89c4\u683c\u8fdb\u884c\u629b\u5149\u7684\u534a\u5bfc\u4f53\u6750\u6599\u4e4b\u4e00\u3002\u5982\u679c\u4e0d\u4ece\u6839\u672c\u4e0a\u6539\u53d8\u7814\u78e8\u6db2\u7684\u5316\u5b66\u6210\u5206\u3001\u65bd\u52a0\u7684\u538b\u529b\u4ee5\u53ca\u5173\u952e\u7684\u629b\u5149\u6a21\u677f\u89c4\u683c\uff0c\u5c31\u65e0\u6cd5\u5c06\u76f4\u63a5\u9002\u7528\u4e8e\u7845\u7684\u629b\u5149\u5de5\u827a\u5e94\u7528\u4e8e\u78b3\u5316\u7845\u3002.<\/p>\n\n  <p>\u7406\u89e3 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Polishing-Templates-for-Semiconductor-Silicon-Wafer-Processing\/\" target=\"_blank\" class=\"text-link-pill\">\u629b\u5149\u6a21\u677f\u57fa\u7840<\/a> \u8fd9\u662f\u7406\u89e3\u4e3a\u4ec0\u4e48\u78b3\u5316\u7845\u9700\u8981\u4e00\u79cd\u5b8c\u5168\u4e0d\u540c\u7684\u6a21\u677f\u65b9\u6cd5\u7684\u5148\u51b3\u6761\u4ef6\uff0c\u800c\u6807\u51c6\u7845\u629b\u5149\u4f9b\u5e94\u5546\u5f80\u5f80\u65e0\u6cd5\u63d0\u4f9b\u8fd9\u79cd\u65b9\u6cd5\u3002.<\/p>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 2 \u2550\u2550\u2550 -->\n  <h2 id=\"sic-vs-si\">\u78b3\u5316\u7845\u4e0e\u7845\uff1a\u52a0\u5de5\u5de5\u827a\u4e3a\u4f55\u5b58\u5728\u672c\u8d28\u533a\u522b<\/h2>\n\n  <div class=\"compare-banner\">\n    <div class=\"compare-col si-col\">\n      <h4>\u7845 (Si) - \u53c2\u8003\u8d44\u6599<\/h4>\n      <div class=\"compare-row\"><span class=\"ck\">\u83ab\u6c0f\u786c\u5ea6<\/span><span class=\"cv\">~7.0<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">\u65ad\u88c2\u97e7\u6027<\/span><span class=\"cv\">0.7-0.9 MPa-m\u00bd<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">CMP \u6ce5\u6d46<\/span><span class=\"cv ok\">\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\uff0cpH \u503c 9-11<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">\u5178\u578b\u538b\u529b<\/span><span class=\"cv\">2-4 psi<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">\u53bb\u9664\u7387 (CMP)<\/span><span class=\"cv\">300-800 \u7eb3\u7c73\/\u5206\u949f<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">\u6a21\u677f\u6750\u6599<\/span><span class=\"cv ok\">FR-4 \u6216 G-10<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">\u751f\u6d3b\u6a21\u677f<\/span><span class=\"cv\">100-200 \u4e2a\u5faa\u73af<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">\u629b\u5149\u6c34\u6676\u9762<\/span><span class=\"cv\">(100), (110), (111)<\/span><\/div>\n    <\/div>\n    <div class=\"compare-col sic-col\">\n      <h4>\u78b3\u5316\u7845 (SiC) - \u6311\u6218<\/h4>\n      <div class=\"compare-row\"><span class=\"ck\">\u83ab\u6c0f\u786c\u5ea6<\/span><span class=\"cv challenge\">~9.5 (\u2248 30\u00d7 \u786c\u5ea6)<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">\u65ad\u88c2\u97e7\u6027<\/span><span class=\"cv challenge\">2.8-3.2 MPa-m\/\u00bd\uff08\u8106\u6027\uff09<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">CMP \u6ce5\u6d46<\/span><span class=\"cv challenge\">KMnO\u2084 \/ H\u2082O\u2082\uff0cpH 2-11<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">\u5178\u578b\u538b\u529b<\/span><span class=\"cv challenge\">4-7 \u78c5\/\u5e73\u65b9\u82f1\u5bf8\uff08\u9ad8 2 \u500d\uff09<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">\u53bb\u9664\u7387 (CMP)<\/span><span class=\"cv challenge\">5-50 \u7eb3\u7c73\/\u5206\u949f\uff08\u6162 10-100 \u500d\uff09<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">\u6a21\u677f\u6750\u6599<\/span><span class=\"cv challenge\">\u8981\u6c42 CXT \u7ea7<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">\u751f\u6d3b\u6a21\u677f<\/span><span class=\"cv challenge\">60-120 \u6b21\u5faa\u73af\uff08\u57ab\u7247\u9650\u5236\uff09<\/span><\/div>\n      <div class=\"compare-row\"><span class=\"ck\">\u629b\u5149\u6c34\u6676\u9762<\/span><span class=\"cv challenge\">Si \u9762 (0001)\uff0cC \u9762 (000-1)<\/span><\/div>\n    <\/div>\n  <\/div>\n\n  <p>\u8fd9\u4e9b\u5dee\u5f02\u90fd\u4f1a\u76f4\u63a5\u5f71\u54cd\u629b\u5149\u6a21\u677f\u7684\u89c4\u683c\u3002\u78b3\u5316\u7845\u7684\u786c\u5ea6\u6781\u9ad8\uff0c\u9700\u8981\u65bd\u52a0\u66f4\u9ad8\u7684\u538b\u529b\uff0c\u8fd9\u5c31\u9700\u8981\u6bd4\u6807\u51c6\u7845\u629b\u5149\u66f4\u575a\u786c\u7684\u5e95\u57ab\u548c\u66f4\u575a\u56fa\u7684\u8f7d\u677f\u3002CMP \u7814\u78e8\u6db2\u7684\u5316\u5b66\u6210\u5206\uff08\u6c27\u5316\u5242\u57fa\uff0c\u901a\u5e38\u5448\u5f3a\u9178\u6027\uff09\u4e0e FR-4 \u548c G-10 \u5c42\u538b\u677f\u6a21\u677f\u7684\u5316\u5b66\u6210\u5206\u4e0d\u76f8\u5bb9\u3002\u8f83\u6162\u7684\u6750\u6599\u53bb\u9664\u7387\u610f\u5473\u7740\u6bcf\u4e2a\u629b\u5149\u5468\u671f\u6240\u9700\u7684\u65f6\u95f4\u66f4\u957f\uff0c\u4f7f\u6a21\u677f\u66b4\u9732\u5728\u5316\u5b66\u6d46\u6db2\u4e2d\u7684\u65f6\u95f4\u662f\u5178\u578b\u7845\u629b\u5149\u5468\u671f\u7684 3-5 \u500d\uff0c\u4ece\u800c\u52a0\u901f\u4e86\u4efb\u4f55\u975e\u6297\u6027\u6a21\u677f\u6750\u6599\u7684\u5316\u5b66\u964d\u89e3\u3002.<\/p>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 3 \u2550\u2550\u2550 -->\n  <h2 id=\"polishing-flow\">\u78b3\u5316\u7845\u6676\u7247\u629b\u5149\u5de5\u827a\u6d41\u7a0b<\/h2>\n\n  <p>\u78b3\u5316\u7845\u6676\u7247\u5236\u9020\u6d89\u53ca\u591a\u6b65\u629b\u5149\u5e8f\u5217\uff0c\u6bcf\u4e00\u6b65\u90fd\u6709\u4e0d\u540c\u7684\u6750\u6599\u53bb\u9664\u76ee\u6807\u3001\u8868\u9762\u8d28\u91cf\u8981\u6c42\u548c\u5de5\u827a\u6761\u4ef6\u3002\u629b\u5149\u6a21\u677f\u5728\u6bcf\u4e2a\u6b65\u9aa4\u4e2d\u4e0e\u5de5\u827a\u7684\u76f8\u4e92\u4f5c\u7528\u5404\u4e0d\u76f8\u540c\uff0c\u4e86\u89e3\u6574\u4e2a\u6d41\u7a0b\u5c31\u80fd\u660e\u786e\u54ea\u4e9b\u6b65\u9aa4\u5bf9\u6a21\u677f\u81f3\u5173\u91cd\u8981\uff0c\u4ee5\u53ca\u4e3a\u4ec0\u4e48\u3002.<\/p>\n\n  <div class=\"sic-flow\">\n    <div class=\"flow-step-sic\">\n      <span class=\"sic-step-tag tag-lapping\">\u7814\u78e8<\/span>\n      <div class=\"flow-body\">\n        <strong>\u7c97\u7814\u78e8 - \u4ece\u5207\u5272\u597d\u7684\u94a2\u952d\u5207\u7247\u4e0a\u53bb\u9664\u6bdb\u576f<\/strong>\n        <p>\u6e05\u9664\u5207\u5272\u6676\u7247\u8868\u9762\u7684\u7ebf\u952f\u635f\u4f24\u3002\u5728\u9ad8\u538b\uff088-15 \u78c5\/\u5e73\u65b9\u82f1\u5bf8\uff09\u4e0b\u4f7f\u7528\u91d1\u521a\u77f3\u7814\u78e8\u6d46\u3002\u6750\u6599\u53bb\u9664\uff1a\u6bcf\u9762 50-150 \u5fae\u7c73\u3002\u8be5\u6b65\u9aa4\u901a\u5e38\u4f7f\u7528\u7814\u78e8\u677f\uff0c\u800c\u4e0d\u662f\u629b\u5149\u6a21\u677f\uff1b\u4ece CMP \u6b65\u9aa4\u5f00\u59cb\uff0c\u6a21\u677f\u5c31\u53d8\u5f97\u975e\u5e38\u91cd\u8981\u3002.<\/p>\n      <\/div>\n    <\/div>\n    <div class=\"flow-step-sic\">\n      <span class=\"sic-step-tag tag-cmp1\">CMP - \u7b2c 1 \u6b65<\/span>\n      <div class=\"flow-body\">\n        <strong>\u673a\u68b0\u5e73\u9762\u5316--\u6e05\u9664\u8868\u5c42\u4e0b\u635f\u4f24<\/strong>\n        <p>\u5728 4-7 \u78c5\/\u5e73\u65b9\u82f1\u5bf8\u7684\u538b\u529b\u4e0b\uff0c\u4f7f\u7528\u91d1\u521a\u77f3\u6216\u78b3\u5316\u7845\u78e8\u6599\u6d46\u6e05\u9664\u7814\u78e8\u540e\u7559\u4e0b\u7684\u8868\u9762\u4e0b\u635f\u4f24\u5c42\u3002\u76ee\u6807\u53bb\u9664\u91cf\uff1a5-20 \u00b5m\u3002\u8fd9\u662f\u4f7f\u7528\u629b\u5149\u6a21\u677f\u7684\u7b2c\u4e00\u6b65\uff0c\u4e0e\u7814\u78e8\u6db2\u7684\u5316\u5b66\u76f8\u5bb9\u6027\u662f\u5bf9\u6a21\u677f\u7684\u9996\u8981\u8981\u6c42\u3002.<\/p>\n        <span class=\"template-note\">\u9700\u8981 CXT \u7ea7\u6a21\u677f - \u90b5\u6c0f\u786c\u5ea6 A 70-80 \u7684\u886c\u57ab<\/span>\n      <\/div>\n    <\/div>\n    <div class=\"flow-step-sic\">\n      <span class=\"sic-step-tag tag-cmp2\">CMP - \u7b2c 2 \u6b65<\/span>\n      <div class=\"flow-body\">\n        <strong>\u5316\u5b66\u5e73\u6574--\u6c27\u5316\u5242\u6d46\u6599 CMP<\/strong>\n        <p>\u4f7f\u7528\u57fa\u4e8e KMnO\u2084\uff08Si-face\uff09\u6216 H\u2082O\u2082 \u7684\u6d46\u6599\uff0c\u5728 pH \u503c\u4e3a 2-11 \u7684\u6761\u4ef6\u4e0b\u8fdb\u884c\u6838\u5fc3 SiC CMP \u6b65\u9aa4\u3002\u53bb\u9664 1-5 \u00b5m\uff0c\u4ee5\u8fbe\u5230\u76ee\u6807\u8868\u9762\u7c97\u7cd9\u5ea6\uff08Ra &lt; 0.2 nm\uff09\u548c\u6676\u7247\u5e73\u6574\u5ea6\u3002\u5316\u5b66\u8150\u8680\u6027\u6700\u5f3a\u7684\u6b65\u9aa4--FR-4\/G-10 \u6a21\u677f\u5728\u6b64\u6b65\u9aa4\u4e2d\u4f1a\u8fc5\u901f\u5206\u5c42\u3002.<\/p>\n        <span class=\"template-note\">\u5fc5\u987b\u4f7f\u7528 CXT \u7ea7 - \u8010 KMnO\u2084 \/ H\u2082O\u2082 - \u5efa\u8bae\u4f7f\u7528 EER \u7ea7<\/span>\n      <\/div>\n    <\/div>\n    <div class=\"flow-step-sic\">\n      <span class=\"sic-step-tag tag-final\">\u6700\u7ec8\u629b\u5149<\/span>\n      <div class=\"flow-body\">\n        <strong>\u6700\u7ec8 CMP \/ epi-ready \u8868\u9762<\/strong>\n        <p>\u5728\u8f83\u4f4e\u538b\u529b\uff082-4 \u78c5\/\u5e73\u65b9\u82f1\u5bf8\uff09\u4e0b\u4f7f\u7528\u7cbe\u7ec6\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\u6d46\u6599\u5b9e\u73b0\u4e9a\u7eb3\u7c73\u7c97\u7cd9\u5ea6\u76ee\u6807\uff08Ra &lt; 0.1 \u7eb3\u7c73\uff09\u3002\u53ef\u4ee5\u4f7f\u7528\u76f8\u540c\u7684 CXT \u7ea7\u6a21\u677f\uff0c\u4f46\u886c\u57ab\u53ef\u4ee5\u66f4\u8f6f\u4e00\u4e9b\uff08\u90b5\u6c0f A 55-65\uff09\uff0c\u4ee5\u63d0\u9ad8\u964d\u4f4e\u5de5\u827a\u538b\u529b\u65f6\u7684\u538b\u529b\u5747\u5300\u6027\u3002.<\/p>\n        <span class=\"template-note\">CXT \u7ea7 - \u7528\u4e8e\u6700\u540e\u629b\u5149\u6b65\u9aa4\u7684\u8f83\u8f6f\u886c\u57ab<\/span>\n      <\/div>\n    <\/div>\n    <div class=\"flow-step-sic\">\n      <span class=\"sic-step-tag tag-inspect\">\u68c0\u67e5<\/span>\n      <div class=\"flow-body\">\n        <strong>\u629b\u5149\u540e\u68c0\u67e5 - TTV\u3001Ra\u3001\u7f3a\u9677\u5bc6\u5ea6<\/strong>\n        <p>\u68c0\u67e5\u6676\u7247\u7684 TTV\uff08150 \u6beb\u7c73\u78b3\u5316\u7845\u901a\u5e38\u5c0f\u4e8e 5 \u5fae\u7c73\uff09\u3001\u8868\u9762\u7c97\u7cd9\u5ea6\u3001\u5f2f\u66f2\u5ea6\u3001\u7fd8\u66f2\u5ea6\u548c\u6b63\u9762\u7f3a\u9677\u5bc6\u5ea6\u3002\u4e0e\u6a21\u677f\u76f8\u5173\u7684\u7f3a\u9677\uff08\u7ea4\u7ef4\u6c61\u67d3\u9020\u6210\u7684\u5212\u75d5\u3001\u710a\u76d8\u78e8\u635f\u9020\u6210\u7684 TTV \u6f02\u79fb\uff09\u4e5f\u5728\u6b64\u9636\u6bb5\u88ab\u8bc6\u522b\u51fa\u6765\u3002.<\/p>\n      <\/div>\n    <\/div>\n  <\/div>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 4 \u2550\u2550\u2550 -->\n  <h2 id=\"slurry-chemistry\">SiC CMP \u6ce5\u6d46\u5316\u5b66\u6027\u8d28\u4e0e\u6a21\u677f\u517c\u5bb9\u6027<\/h2>\n\n  <p>SiC CMP \u629b\u5149\u6a21\u677f\u6240\u9762\u4e34\u7684\u5316\u5b66\u6311\u6218\u6e90\u4e8e\u8981\u5728\u5316\u5b66\u60f0\u6027\u7684 SiC \u8868\u9762\u4e0a\u5b9e\u73b0\u6709\u610f\u4e49\u7684\u6750\u6599\u53bb\u9664\u7387\u6240\u9700\u7684\u6d46\u6599\u5316\u5b66\u6027\u8d28\u3002\u7845\u4e0e\u78b1\u6027\u4e8c\u6c27\u5316\u7845\u6d46\u6599\u53ef\u901a\u8fc7\u5e7f\u4e3a\u4eba\u77e5\u7684\u6c27\u5316-\u6c34\u5316\u673a\u5236\u81ea\u53d1\u53d1\u751f\u53cd\u5e94\uff0c\u800c\u78b3\u5316\u7845\u5219\u4e0d\u540c\uff0c\u5b83\u9700\u8981\u4e00\u79cd\u5f3a\u6c27\u5316\u5242\u5c06\u8868\u9762\u7684\u78b3\u5316\u7845\u5c42\u8f6c\u5316\u4e3a\u8f83\u8f6f\u7684\u6c27\u5316\u7269\u6216\u6c22\u6c27\u5316\u7269\u76f8\uff0c\u7136\u540e\u7814\u78e8\u9897\u7c92\u624d\u80fd\u4ee5\u673a\u68b0\u65b9\u5f0f\u5c06\u5176\u53bb\u9664\u3002SiC CMP \u751f\u4ea7\u4e2d\u4f7f\u7528\u7684\u4e24\u79cd\u6c27\u5316\u5242\u7cfb\u7edf\u90fd\u6709\u4e0d\u540c\u7684\u5316\u5b66\u517c\u5bb9\u6027\u8981\u6c42\u3002.<\/p>\n\n  <h3>\u57fa\u4e8e KMnO\u2084 \u7684\u6d46\u6599\uff08Si-Face CMP\uff09<\/h3>\n  <p>\u9ad8\u9530\u9178\u94be\uff08KMnO\u2084\uff09\u5728\u78b1\u6027\u4ecb\u8d28\uff08pH 9-11\uff09\u4e2d\u7684\u6d53\u5ea6\u4e3a 0.1-5 wt%\uff0c\u662f\u7845\u9762\uff080001\uff09SiC CMP \u7684\u4e3b\u8981\u6c27\u5316\u5242\u4f53\u7cfb\u3002KMnO\u2084 \u662f\u4e00\u79cd\u5f3a\u6c27\u5316\u5242\uff08\u6807\u51c6\u8fd8\u539f\u7535\u4f4d +1.51 V\uff09\uff0c\u53ef\u5c06 SiC \u8868\u9762\u8f6c\u5316\u4e3a\u6c34\u5408 SiO\u2082\/MnO\u2082 \u590d\u5408\u5c42\uff0c\u4fbf\u4e8e\u91d1\u521a\u77f3\u6216\u94c8\u78e8\u6599\u7684\u673a\u68b0\u53bb\u9664\u3002\u5f3a\u6c27\u5316\u6027\u5316\u5b66\u6210\u5206\u4e0e\u78b1\u6027 pH \u503c\u8303\u56f4\u7684\u7ed3\u5408\u4f7f\u8be5\u7cfb\u7edf\u540c\u65f6\u5bf9\u6a21\u677f\u7684\u73af\u6c27\u6811\u8102\u57fa\u4f53\uff08\u901a\u8fc7\u6c27\u5316\u5242\u4fb5\u8680\uff09\u548c\u7ea4\u7ef4-\u6811\u8102\u754c\u9762\uff08\u901a\u8fc7\u78b1\u6027\u6c34\u89e3\uff09\u4ea7\u751f\u4fb5\u8680\u4f5c\u7528\u3002\u6807\u51c6\u7684 FR-4 \u548c G-10 \u6a21\u677f\u5728\u8fd9\u79cd\u73af\u5883\u4e2d\u4f1a\u5728 20-40 \u4e2a\u5468\u671f\u5185\u5931\u6548\u3002.<\/p>\n\n  <h3>\u57fa\u4e8e H\u2082O\u2082 \u7684\u6ce5\u6d46\uff08C \u9762\u548c\u673a\u68b0\u6b65\u9aa4\uff09<\/h3>\n  <p>\u8fc7\u6c27\u5316\u6c22\uff08H\u2082O\u2082\uff09\u5728\u9178\u6027\u4ecb\u8d28\uff08pH \u503c\u4e3a 2-5\uff09\u4e2d\u7684\u6d53\u5ea6\u4e3a 1-30 wt%\uff0c\u53ef\u7528\u4e8e C \u9762\uff08000-1\uff09CMP \u548c\u673a\u68b0\u5e73\u9762\u5316\u6b65\u9aa4\uff0c\u5728\u8fd9\u4e9b\u6b65\u9aa4\u4e2d\uff0c\u9700\u8981\u4f7f\u7528\u8f83\u6e29\u548c\u7684\u6c27\u5316\u5242\u3002H\u2082O\u2082 \u7684\u6d3b\u6027\u4f4e\u4e8e KMnO\u2084\uff0c\u4f46\u4e0e\u9178\u63a5\u89e6\u4f1a\u4ea7\u751f\u6c1f\u5316\u7269\u6216\u8fc7\u6c27\u5316\u7269\u81ea\u7531\u57fa\uff0c\u5bf9\u73af\u6c27\u6811\u8102\u57fa\u8d28\u5177\u6709\u9ad8\u5ea6\u8150\u8680\u6027\u3002\u4e0e\u78b1\u6027 KMnO\u2084 \u7cfb\u7edf\u76f8\u6bd4\uff0c\u9178\u6027 pH \u503c\u4e3a\u6c27\u5316\u5242\u653b\u51fb\u589e\u52a0\u4e86\u7b2c\u4e8c\u79cd\u964d\u89e3\u673a\u5236\uff0c\u52a0\u901f\u4e86\u6a21\u677f\u7684\u5931\u6548\u3002\u5728 H\u2082O\u2082 \u9178\u6027\u6d46\u6599\u4e2d\u7684 FR-4 \u548c G-10 \u6a21\u677f\u901a\u5e38\u5728 30-50 \u6b21\u5faa\u73af\u540e\u5c31\u4f1a\u5931\u6548\u3002.<\/p>\n\n  <div class=\"callout danger\">\n    <span class=\"callout-icon\">\u26a0\ufe0f<\/span>\n    <div class=\"callout-body\">\n      <strong>\u6765\u81ea FR-4 \u6a21\u677f\u7684 KMnO\u2084 \u6c61\u67d3\u98ce\u9669<\/strong>\n      \u9664\u4e86\u5c3a\u5bf8\u5931\u6548\u5916\uff0cFR-4 \u548c G-10 \u6a21\u677f\u5728 KMnO\u2084 \u6d46\u6599\u4e2d\u964d\u89e3\u65f6\uff0c\u968f\u7740\u6a21\u677f\u8868\u5c42\u7684\u8001\u5316\uff0c\u6c89\u79ef\u7684 MnO\u2082 \u53cd\u5e94\u4ea7\u7269\u4e2d\u7684\u9530\u79bb\u5b50\u4f1a\u6e17\u5165\u6d46\u6599\u4e2d\u3002\u78b3\u5316\u7845\u6676\u5706\u8868\u9762\u7684\u9530\u6c61\u67d3\u662f\u78b3\u5316\u7845 MOSFET \u5668\u4ef6\u53ef\u9760\u6027\u7684\u4e00\u4e2a\u5df2\u77e5\u95ee\u9898\uff0c\u5fc5\u987b\u63a7\u5236\u5728\u4e9appb \u7ea7\u3002\u9000\u5316\u7684 FR-4 \u6a21\u677f\u662f\u4e00\u4e2a\u76f4\u63a5\u7684\u9530\u6c61\u67d3\u6e90\uff0c\u65e0\u6cd5\u901a\u8fc7\u629b\u5149\u540e\u7684\u6e05\u6d01\u53bb\u9664\u3002CXT \u7ea7\u6a21\u677f\u5b8c\u5168\u6d88\u9664\u4e86\u8fd9\u4e00\u98ce\u9669\u3002.\n    <\/div>\n  <\/div>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 5 \u2550\u2550\u2550 -->\n  <h2 id=\"why-fr4-fails\">\u4e3a\u4ec0\u4e48 FR-4 \u548c G-10 \u6a21\u677f\u5728 SiC CMP \u4e2d\u4f1a\u5931\u6548 - \u5931\u6548\u5e8f\u5217<\/h2>\n\n  <p>\u6807\u51c6\u5c42\u538b\u6a21\u677f\u5728 SiC CMP \u4e2d\u7684\u5931\u6548\u5e76\u4e0d\u662f\u6e10\u8fdb\u5f0f\u7684\u6027\u80fd\u4e0b\u964d\uff0c\u800c\u662f\u5177\u6709\u660e\u786e\u987a\u5e8f\u7684\u6e10\u8fdb\u5f0f\u7ed3\u6784\u5931\u6548\u3002\u4e86\u89e3\u4e86\u8fd9\u4e00\u987a\u5e8f\uff0c\u5c31\u6709\u53ef\u80fd\u5728\u78b3\u5316\u7845\u5de5\u827a\u4e2d\u610f\u5916\u4f7f\u7528\u5c42\u538b\u6a21\u677f\u65f6\u8bc6\u522b\u51fa\u9884\u8b66\u4fe1\u53f7\uff0c\u5e76\u91cf\u5316\u5931\u6548\u98ce\u9669\u3002.<\/p>\n\n  <div class=\"failure-tl\">\n    <div class=\"ftl-row\">\n      <span class=\"ftl-cycle cyc-safe\">\u7b2c 1-10 \u5468\u671f<\/span>\n      <div class=\"ftl-body\">\n        <strong>\u65e0\u660e\u663e\u6545\u969c - \u6027\u80fd\u770b\u8d77\u6765\u6b63\u5e38<\/strong>\n        <p>\u73af\u6c27\u8868\u5c42\u5728\u521d\u59cb\u5faa\u73af\u4e2d\u63d0\u4f9b\u4e86\u8db3\u591f\u7684\u5316\u5b66\u5c4f\u969c\u3002TTV \u548c\u8868\u9762\u8d28\u91cf\u7b26\u5408\u89c4\u8303\u3002\u8fd9\u4e00\u65f6\u671f\u4f1a\u8ba9\u4eba\u8bef\u4ee5\u4e3a\u6a21\u677f\u662f\u517c\u5bb9\u7684--\u8fd9\u662f\u6700\u5371\u9669\u7684\u9636\u6bb5\uff0c\u56e0\u4e3a\u6f5c\u5728\u7684\u964d\u89e3\u662f\u770b\u4e0d\u89c1\u7684\u3002.<\/p>\n      <\/div>\n    <\/div>\n    <div class=\"ftl-row\">\n      <span class=\"ftl-cycle cyc-warn\">\u7b2c 10-25 \u5468\u671f<\/span>\n      <div class=\"ftl-body\">\n        <strong>\u8868\u9762\u892a\u8272\u548c\u5fae\u8131\u5c42<\/strong>\n        <p>MnO\u2082 \u6216\u6c27\u5316\u526f\u4ea7\u7269\u4f1a\u5c06\u627f\u8f7d\u677f\u8868\u9762\u67d3\u6210\u68d5\u9ed1\u8272\u3002\u5728 KMnO\u2084 \u6216 H\u2082O\u2082 \u6e17\u5165\u8868\u9762\u73af\u6c27\u5c42\u7684\u7ea4\u7ef4-\u6811\u8102\u754c\u9762\u5904\u5f00\u59cb\u51fa\u73b0\u5fae\u8131\u5c42\u3002\u968f\u7740\u5b54\u58c1\u73af\u6c27\u6811\u8102\u7684\u81a8\u80c0\uff0c\u5de5\u4f5c\u5b54\u76f4\u5f84\u5f00\u59cb\u6f02\u79fb\u3002TTV \u53ef\u80fd\u4ecd\u5728\u89c4\u683c\u8303\u56f4\u5185\u3002.<\/p>\n      <\/div>\n    <\/div>\n    <div class=\"ftl-row\">\n      <span class=\"ftl-cycle cyc-danger\">\u5468\u671f 25-45<\/span>\n      <div class=\"ftl-body\">\n        <strong>\u6d3b\u52a8\u8131\u5c42 - \u53ef\u89c1\u8d77\u6ce1<\/strong>\n        <p>\u5c42\u538b\u677f\u5c42\u4e4b\u95f4\u51fa\u73b0\u5206\u5c42\uff0c\u5728\u8f7d\u677f\u8868\u9762\u53ef\u89c1\u51f8\u8d77\u7684\u6c34\u6ce1\u3002\u5de5\u4f5c\u5b54\u76f4\u5f84\u504f\u5dee\u8d85\u8fc7 20 \u5fae\u7c73\uff0c\u5bfc\u81f4 TTV \u504f\u79fb\u3002\u73bb\u7483\u7ea4\u7ef4\u675f\u66b4\u9732\u5728\u5206\u5c42\u8fb9\u7f18\uff0c\u5e76\u5f00\u59cb\u8131\u843d\u5230\u6d46\u6599\u4e2d\u3002\u5212\u75d5\u7f3a\u9677\u6570\u91cf\u663e\u8457\u589e\u52a0\u3002.<\/p>\n      <\/div>\n    <\/div>\n    <div class=\"ftl-row\">\n      <span class=\"ftl-cycle cyc-danger\">45 \u5468\u4ee5\u4e0a<\/span>\n      <div class=\"ftl-body\">\n        <strong>\u5de5\u827a\u5371\u9669 - \u5fc5\u987b\u7acb\u5373\u62c6\u9664\u6a21\u677f<\/strong>\n        <p>\u5927\u5757\u8131\u5c42\u90e8\u5206\u4f1a\u6c61\u67d3\u6d46\u6db2\u69fd\u3002\u73bb\u7483\u7ea4\u7ef4\u548c\u6811\u8102\u788e\u7247\u4f1a\u5728\u6240\u6709\u6676\u7247\u4e0a\u9020\u6210\u4e25\u91cd\u7684\u5212\u75d5\u7f3a\u9677\u3002\u5982\u679c\u4f7f\u7528 KMnO\u2084\u6d46\u6599\uff0c\u6676\u5706\u8868\u9762\u4f1a\u53d7\u5230\u9530\u6c61\u67d3\u3002\u6a21\u677f\u7684\u7ed3\u6784\u5b8c\u6574\u6027\u4f1a\u53d7\u5230\u5f71\u54cd\uff0c\u5e76\u4e14\u7531\u4e8e\u5c42\u538b\u677f\u7684\u4e00\u81f4\u6027\u4e27\u5931\uff0c\u8f7d\u677f\u7684\u5f2f\u66f2\u5ea6\u4e5f\u4f1a\u589e\u52a0\u3002.<\/p>\n      <\/div>\n    <\/div>\n  <\/div>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 6 \u2550\u2550\u2550 -->\n  <h2 id=\"cxt-solution\">CXT \u7ea7\u6a21\u677f\uff1a\u89e3\u51b3\u65b9\u6848\u67b6\u6784<\/h2>\n\n  <p>CXT \u7ea7\u629b\u5149\u6a21\u677f\u4ece\u7ed3\u6784\u5c42\u9762\u800c\u4e0d\u662f\u901a\u8fc7\u8868\u9762\u5904\u7406\u6216\u6d82\u5c42\u65b9\u6cd5\u6765\u89e3\u51b3\u78b3\u5316\u7845\u517c\u5bb9\u6027\u95ee\u9898\u3002\u5176\u6839\u672c\u521b\u65b0\u5728\u4e8e\u5b8c\u5168\u53d6\u6d88\u4e86\u5c42\u538b\u7ed3\u6784 - CXT \u6a21\u677f\u7531\u65e0\u7f1d\u7684\u6574\u4f53\u6750\u6599\u5236\u6210\uff0c\u6ca1\u6709\u53ef\u80fd\u8131\u5c42\u7684\u5c42\u754c\u9762\uff0c\u4e5f\u6ca1\u6709\u53ef\u80fd\u5728\u52a0\u5de5\u8868\u9762\u8131\u843d\u7684\u73bb\u7483\u7ea4\u7ef4\u52a0\u56fa\u5c42\u3002.<\/p>\n\n  <h3>\u65e0\u7f1d\u7ed3\u6784\u4e3a\u4f55\u5bf9\u78b3\u5316\u7845\u81f3\u5173\u91cd\u8981<\/h3>\n  <p>\u5728\u78b3\u5316\u7845 CMP \u4e2d\u7834\u574f FR-4 \u548c G-10 \u6a21\u677f\u7684\u5206\u5c42\u5931\u6548\u6a21\u5f0f\u9700\u8981\u4e00\u4e2a\u5c42\u538b\u754c\u9762\uff0c\u5373\u7531\u73af\u6c27\u6811\u8102\u7c98\u5408\u7684\u73bb\u7483\u7ea4\u7ef4\u5c42\u4e4b\u95f4\u7684\u5e73\u9762\u8fb9\u754c\u3002\u5f53\u6c27\u5316\u5242\u5316\u5b66\u4fb5\u8680\u8be5\u754c\u9762\u65f6\uff0c\u7531\u4e8e\u5c42\u95f4\u526a\u5207\u5f3a\u5ea6\u8fdc\u4f4e\u4e8e\u6750\u6599\u7684\u5e73\u9762\u5185\u62c9\u4f38\u5f3a\u5ea6\uff0c\u5206\u5c42\u4f1a\u5728\u5c42\u95f4\u5e73\u9762\u5185\u4f20\u64ad\u3002\u5982\u679c\u6ca1\u6709\u8fd9\u4e2a\u754c\u9762\uff0c\u5c31\u4e0d\u5b58\u5728\u5206\u5c42\u5931\u6548\u6a21\u5f0f\u3002CXT \u6a21\u677f\u53ef\u4ee5\u5728\u5de5\u827a\u6761\u4ef6\u4e0b\u65e0\u9650\u671f\u5730\u6d78\u6ce1\u5728 KMnO\u2084 \u6216 H\u2082O\u2082 \u6d46\u6599\u4e2d\uff0c\u800c\u4e0d\u4f1a\u53d1\u751f\u4efb\u4f55\u7ed3\u6784\u53d8\u5316--\u552f\u4e00\u7684\u4f7f\u7528\u5bff\u547d\u9650\u5236\u662f\u886c\u57ab\u7684\u673a\u68b0\u78e8\u635f\uff0c\u8fd9\u662f\u4e00\u79cd\u4e0e\u5316\u5b66\u517c\u5bb9\u6027\u65e0\u5173\u7684\u53ef\u9884\u6d4b\u7684\u6d88\u8017\u54c1\u751f\u547d\u5468\u671f\u3002.<\/p>\n\n  <h3>\u8010\u5316\u5b66\u6027\u8303\u56f4<\/h3>\n  <p>CXT \u7ea7\u6750\u6599\u53ef\u5728 pH \u503c\u4e3a 2-13 \u7684\u6761\u4ef6\u4e0b\u4fdd\u6301\u5c3a\u5bf8\u7a33\u5b9a\u6027\u548c\u7ed3\u6784\u5b8c\u6574\u6027\uff0c\u5305\u62ec\u5728\u5f3a\u6c27\u5316\u5242\uff08KMnO\u2084\u3001H\u2082O\u2082\u3001HF\uff09\u3001\u5f3a\u9178\uff08H\u2082SO\u2084\u3001HNO\u2083\uff09\u548c\u5f3a\u78b1\uff08KOH\u3001NaOH\uff09\u5b58\u5728\u7684\u6761\u4ef6\u4e0b\u3002\u5c3a\u5bf8\u7a33\u5b9a\u6027\u7684\u6700\u9ad8\u4f7f\u7528\u6e29\u5ea6\u901a\u5e38\u4e3a 80\u00b0C\uff0c\u8fdc\u9ad8\u4e8e\u4efb\u4f55\u534a\u5bfc\u4f53\u629b\u5149\u5de5\u827a\u6e29\u5ea6\u3002\u6b64\u7535\u963b\u5305\u7edc\u7ebf\u6db5\u76d6\u4e86\u76ee\u524d\u751f\u4ea7\u4e2d\u4f7f\u7528\u7684\u6240\u6709 SiC CMP \u7814\u78e8\u6db2\u5316\u5b66\u6210\u5206\uff0c\u4ee5\u53ca\u6240\u6709\u6b63\u5728\u5f00\u53d1\u7684\u4e0b\u4e00\u4ee3 SiC \u7814\u78e8\u5316\u5b66\u6210\u5206\u3002.<\/p>\n\n  <h3>\u5c3a\u5bf8\u7a33\u5b9a\u6027\u4f18\u52bf<\/h3>\n  <p>\u9664\u4e86\u8010\u5316\u5b66\u6027\u4e4b\u5916\uff0cCXT \u6a21\u677f\u5728 SiC \u9ad8\u538b\u5de5\u827a\u6761\u4ef6\u4e0b\u7684\u5c3a\u5bf8\u7a33\u5b9a\u6027\u4f18\u4e8e FR-4 \u548c G-10\u3002CXT \u6750\u6599\u7684\u6a2a\u622a\u9762\u5747\u5300\uff0c\u7ea4\u7ef4\u548c\u6811\u8102\u57fa\u4f53\u4e4b\u95f4\u6ca1\u6709\u4e0d\u540c\u7684 CTE\uff0c\u6d88\u9664\u4e86\u5c42\u538b\u6750\u6599\u5728\u9ad8\u538b\u5faa\u73af\u673a\u68b0\u8d1f\u8f7d\u4e0b\u53ef\u80fd\u4ea7\u751f\u7684\u5fae\u88c2\u7eb9\u3002\u56e0\u6b64\uff0c\u5728\u6a21\u677f\u7684\u4f7f\u7528\u5bff\u547d\u671f\u95f4\uff0c\u5de5\u4f5c\u5b54\u6df1\u5ea6\u66f4\u52a0\u7a33\u5b9a\uff0c\u66f4\u6362\u5468\u671f\u4e4b\u95f4\u7684 TTV \u6f02\u79fb\u4e5f\u66f4\u5c0f\u3002.<\/p>\n\n  <p>\u5728\u6240\u6709\u629b\u5149\u5e94\u7528\u4e2d\u5c06 CXT \u4e0e FR-4 \u548c G-10 \u8fdb\u884c\u6bd4\u8f83\u7684\u5b8c\u6574\u6750\u6599\u5de5\u7a0b\u6848\u4f8b\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/FR-4-vs-G-10-Fiberglass-Polishing-Templates-Material-Properties-Selection-Guide\/\" target=\"_blank\" class=\"text-link-pill\">FR-4 \u4e0e G-10 \u629b\u5149\u6a21\u677f\u6750\u6599\u6307\u5357<\/a>.<\/p>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 7 \u2550\u2550\u2550 -->\n  <h2 id=\"backing-pad\">\u9ad8\u538b\u78b3\u5316\u7845\u629b\u5149\u80cc\u57ab\u7684\u9009\u62e9<\/h2>\n\n  <p>SiC CMP \u7684\u5de5\u827a\u538b\u529b\u8f83\u9ad8\uff084-7 psi\uff0c\u800c\u7845 SSP \u4e3a 2-4 psi\uff09\uff0c\u5bf9\u886c\u57ab\u7684\u9009\u62e9\u63d0\u51fa\u4e86\u4e0e\u6807\u51c6\u7845\u629b\u5149\u4e0d\u540c\u7684\u8981\u6c42\u3002\u5728\u66f4\u9ad8\u7684\u538b\u529b\u4e0b\uff0c\u8f6f\u886c\u57ab\u4f1a\u8fc7\u5ea6\u538b\u7f29\uff0c\u5931\u53bb\u5bf9\u5de5\u4ef6\u5b54\u6df1\u5ea6\u7684\u5c3a\u5bf8\u63a7\u5236\uff0c\u800c\u5de5\u4ef6\u5b54\u6df1\u5ea6\u51b3\u5b9a\u4e86 TTV\uff0c\u800c\u6b63\u786e\u6307\u5b9a\u7684\u8f83\u786c\u886c\u57ab\u5219\u80fd\u5728\u8d1f\u8f7d\u4e0b\u4fdd\u6301\u539a\u5ea6\uff0c\u5e76\u5728\u6574\u4e2a\u629b\u5149\u5468\u671f\u4e2d\u63d0\u4f9b\u4e00\u81f4\u7684\u538b\u529b\u5206\u5e03\u3002.<\/p>\n\n  <div class=\"table-wrap\">\n    <table>\n      <thead>\n        <tr>\n          <th>\u78b3\u5316\u7845\u5de5\u827a\u6b65\u9aa4<\/th>\n          <th>\u538b\u529b\u8303\u56f4<\/th>\n          <th>\u5e95\u57ab\u90b5\u6c0f\u786c\u5ea6 A<\/th>\n          <th>\u886c\u57ab\u539a\u5ea6<\/th>\n          <th>\u7406\u7531<\/th>\n        <\/tr>\n      <\/thead>\n      <tbody>\n        <tr>\n          <td><strong>\u673a\u68b0\u5e73\u9762\u5316\uff08CMP-1\uff09<\/strong><\/td>\n          <td>5-7 \u78c5\/\u5e73\u65b9\u82f1\u5bf8<\/td>\n          <td><strong>A \u5cb8 70-80<\/strong><\/td>\n          <td>0.5-0.8 \u6beb\u7c73<\/td>\n          <td>\u9ad8\u538b\u8981\u6c42\u575a\u786c\u7684\u886c\u57ab\uff0c\u4ee5\u4fdd\u6301\u5de5\u4f5c\u5b54\u6df1\u5ea6\u63a7\u5236\u5e76\u9632\u6b62 TTV \u504f\u79fb<\/td>\n        <\/tr>\n        <tr class=\"row-highlight\">\n          <td><strong>\u6c27\u5316\u5242 CMP (KMnO\u2084 \/ H\u2082O\u2082)<\/strong><\/td>\n          <td>4-6 psi<\/td>\n          <td><strong>A \u533a 65-75<\/strong><\/td>\n          <td>0.6-0.9 \u6beb\u7c73<\/td>\n          <td>\u4e2d\u786c\u886c\u57ab\u517c\u987e\u4e86\u538b\u529b\u5747\u5300\u6027\u548c\u9ad8\u8d1f\u8f7d\u65f6\u6240\u9700\u7684\u786c\u5ea6<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u6700\u7ec8 CMP \/ epi-ready<\/strong><\/td>\n          <td>2-4 psi<\/td>\n          <td><strong>A \u533a 55-65<\/strong><\/td>\n          <td>0.7-1.0 \u6beb\u7c73<\/td>\n          <td>\u51cf\u5c11\u538b\u529b\u53ef\u4f7f\u886c\u57ab\u66f4\u8f6f\uff0c\u4ece\u800c\u63d0\u9ad8\u5747\u5300\u6027\uff1b\u6700\u540e\u4e00\u6b65 TTV \u4f18\u5316<\/td>\n        <\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n\n  <p>\u80cc\u57ab\u786c\u5ea6\u4e5f\u4e0e\u78b3\u5316\u7845\u629b\u5149\u5468\u671f\u957f\u6709\u5173\u3002\u5728 5 \u78c5\/\u5e73\u65b9\u82f1\u5bf8\u7684\u538b\u529b\u4e0b\u8fdb\u884c\u4e00\u6b21\u78b3\u5316\u7845 CMP \u5468\u671f\uff0c\u53bb\u9664 2 \u5fae\u7c73\u7684\u6750\u6599\u5927\u7ea6\u9700\u8981 10-30 \u5206\u949f\uff0c\u6bd4\u8fdb\u884c\u7c7b\u4f3c\u6750\u6599\u53bb\u9664\u7684\u7845 SSP \u5468\u671f\u957f 3-5 \u500d\u3002\u5728\u8fd9\u4e00\u5ef6\u957f\u7684\u5468\u671f\u4e2d\uff0c\u57ab\u7247\u5728\u6052\u5b9a\u8f7d\u8377\u4e0b\u7684\u538b\u7f29\u4f1a\u5bfc\u81f4\u539a\u5ea6\u9010\u6e10\u51cf\u5c0f\uff0c\u4ece\u800c\u6539\u53d8\u6709\u6548\u7684\u5de5\u4f5c\u5b54\u6df1\u5ea6\u3002\u5bf9\u4e8e\u78b3\u5316\u7845 CMP\uff0c\u6807\u51c6\u505a\u6cd5\u662f\u63cf\u8ff0\u52a0\u5de5\u538b\u529b\u4e0b\u80cc\u57ab\u538b\u7f29\u968f\u65f6\u95f4\u53d8\u5316\u7684\u60c5\u51b5\uff0c\u5e76\u5728\u5de5\u4f5c\u5b54\u6df1\u5ea6\u89c4\u683c\u4e2d\u8003\u8651\u7a33\u6001\u538b\u7f29\u504f\u79fb\u3002.<\/p>\n\n  <p>\u5173\u4e8e CMP \u5e94\u7528\u4e2d\u9009\u62e9\u886c\u57ab\u7684\u539f\u5219\uff0c\u5305\u62ec\u5728\u538b\u529b\u5747\u5300\u6027\u548c\u5e73\u9762\u5316\u6548\u7387\u4e4b\u95f4\u6743\u8861\u90b5\u6c0f A \u786c\u5ea6\uff0c\u6211\u4eec\u5728\u4ee5\u4e0b\u6587\u7ae0\u4e2d\u6709\u8be6\u7ec6\u4ecb\u7ecd <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Role-of-Polishing-Templates-in-CMP-How-Fixture-Design-Impacts-Wafer-Flatness\/\" target=\"_blank\" class=\"text-link-pill\">CMP \u4e2d\u7684\u629b\u5149\u6a21\u677f\u548c\u6676\u7247\u5e73\u9762\u5ea6<\/a>.<\/p>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 8 \u2550\u2550\u2550 -->\n  <h2 id=\"edge-profile\">\u78b3\u5316\u7845\u57fa\u677f\u7684\u8fb9\u7f18\u8f6e\u5ed3\u548c EER \u8bbe\u8ba1<\/h2>\n\n  <p>\u4e0e\u7845\u76f8\u6bd4\uff0c\u78b3\u5316\u7845\u6676\u5706\u7684\u8fb9\u7f18\u8f6e\u5ed3\u60c5\u51b5\u66f4\u5177\u6311\u6218\u6027\uff0c\u539f\u56e0\u6709\u4e8c\uff1a\u8f83\u9ad8\u7684\u5de5\u827a\u538b\u529b\u589e\u52a0\u4e86\u6676\u5706\u8fb9\u7f18\u7684\u710a\u76d8\u504f\u79fb\u91cf\uff08\u66f4\u5927\u7684\u538b\u529b\u610f\u5473\u7740\u66f4\u5927\u7684\u6eda\u843d\u529b\uff09\uff0c\u8f83\u957f\u7684\u629b\u5149\u5faa\u73af\u65f6\u95f4\u610f\u5473\u7740\u8fc7\u5ea6\u629b\u5149\u7684\u8fb9\u7f18\u533a\u57df\u5728\u5355\u4e2a\u5faa\u73af\u8fc7\u7a0b\u4e2d\u4f1a\u79ef\u7d2f\u66f4\u591a\u7684\u6750\u6599\u53bb\u9664\u5dee\u3002\u8fd9\u4e9b\u56e0\u7d20\u7ed3\u5408\u5728\u4e00\u8d77\uff0c\u5728\u6a21\u677f\u51e0\u4f55\u5f62\u72b6\u76f8\u540c\u7684\u60c5\u51b5\u4e0b\uff0c\u4e0e Si SSP \u76f8\u6bd4\uff0cSiC CMP \u4ea7\u751f\u4e86\u66f4\u5927\u7684\u8fb9\u7f18\u6eda\u843d\u9ad8\u5ea6\u548c\u66f4\u5bbd\u7684\u7981\u533a\u3002.<\/p>\n\n  <p>\u5982\u679c\u4e0d\u4f7f\u7528 EER\uff0c\u4f7f\u7528\u6807\u51c6\u6a21\u677f\u51e0\u4f55\u5f62\u72b6\u7684 150 mm SiC \u6676\u5706\u7684\u5178\u578b\u8fb9\u7f18\u6392\u65a5\u8303\u56f4\u4e3a 4-6 mm\uff0c\u5927\u4e8e\u7845\u7684\u5178\u578b\u8fb9\u7f18\u6392\u65a5\u8303\u56f4 3-5 mm\u3002\u5bf9\u4e8e\u6676\u7c92\u9760\u8fd1\u6676\u5706\u8fb9\u7f18\u5728\u7ecf\u6d4e\u4e0a\u975e\u5e38\u91cd\u8981\u7684\u78b3\u5316\u7845\u529f\u7387\u5668\u4ef6\u5e94\u7528\uff08\u78b3\u5316\u7845\u6676\u7c92\u7684\u751f\u4ea7\u6210\u672c\u5f88\u9ad8\uff0c\u6bcf\u4e2a\u53ef\u56de\u6536\u6676\u7c92\u90fd\u5f88\u91cd\u8981\uff09\uff0c\u8fd9\u79cd\u8fb9\u7f18\u6392\u65a5\u4ee3\u8868\u7740\u663e\u8457\u7684\u4ea7\u91cf\u635f\u5931\u3002\u4e0e\u540c\u7b49\u7845\u5e94\u7528\uff0850-150 \u5fae\u7c73\uff09\u76f8\u6bd4\uff0cSiC \u6a21\u677f\u7684\u8fb9\u7f18\u589e\u5f3a\u73af\u5177\u6709\u66f4\u9ad8\u7684 EER \u9ad8\u5ea6\uff08100-300 \u5fae\u7c73\uff09\uff0c\u4ee5\u8865\u507f\u5236\u7a0b\u538b\u529b\u5347\u9ad8\u65f6\u66f4\u9ad8\u7684\u6eda\u52a8\u529b\u3002.<\/p>\n\n  <p>\u7528\u4e8e\u78b3\u5316\u7845\u7684 EER \u8bbe\u8ba1\u8fd8\u5f97\u76ca\u4e8e\u65e0\u7f1d CXT \u7ed3\u6784\uff1a\u7531\u4e8e EER \u7684\u52a0\u5de5\u8868\u9762\u6ca1\u6709\u5c42\u538b\u677f\u5c42\u8131\u5c42\uff0c\u56e0\u6b64\u4e0e FR-4 \u6216 G-10 \u76f8\u6bd4\uff0cEER \u53ef\u4ee5\u52a0\u5de5\u51fa\u66f4\u590d\u6742\u7684\u51e0\u4f55\u5f62\u72b6\uff0c\u516c\u5dee\u66f4\u5c0f\uff0c\u800c\u4e14\u4e0d\u4f1a\u6709\u7ea4\u7ef4\u8131\u843d\u7684\u98ce\u9669\u3002\u5b8c\u6574\u7684 EER \u8bbe\u8ba1\u65b9\u6cd5\uff0c\u5305\u62ec\u56db\u4e2a\u51e0\u4f55\u53c2\u6570\u548c\u9274\u5b9a\u8fc7\u7a0b\uff0c\u8be6\u89c1\u6211\u4eec\u7684 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-Polishing-Template-Edge-Design-Controls-Wafer-Edge-Profile-Reduces-Edge-Exclusion\/\" target=\"_blank\" class=\"text-link-pill\">\u8fb9\u7f18\u8bbe\u8ba1\u548c\u8fb9\u7f18\u6392\u9664\u5de5\u7a0b\u6307\u5357<\/a>.<\/p>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 9 \u2550\u2550\u2550 -->\n  <h2 id=\"cycle-life\">\u6a21\u677f\u5468\u671f\u5bff\u547d\u548c\u66f4\u6362\u89c4\u5212<\/h2>\n\n  <p>\u5bf9\u4e8e\u78b3\u5316\u7845 CMP \u6a21\u677f\u800c\u8a00\uff0c\u5faa\u73af\u5bff\u547d\u5b8c\u5168\u53d6\u51b3\u4e8e\u80cc\u57ab\u7684\u673a\u68b0\u78e8\u635f--\u5f53\u575a\u786c\u7684\u78b3\u5316\u7845\u78e8\u6599\u9897\u7c92\u548c\u629b\u5149\u4f5c\u7528\u4f7f\u80cc\u57ab\u5316\u5408\u7269\u9010\u6e10\u53d8\u8584\u65f6\uff0c\u80cc\u57ab\u539a\u5ea6\u4f1a\u51cf\u5c11\u3002\u7531\u4e8e CXT \u7ea7\u6750\u6599\u6ca1\u6709\u5316\u5b66\u964d\u89e3\u5931\u6548\u6a21\u5f0f\uff0c\u56e0\u6b64\u6a21\u677f\u4e3b\u4f53\uff08\u8f7d\u677f\uff09\u5728 SiC CMP \u5316\u5b66\u53cd\u5e94\u4e2d\u7684\u4f7f\u7528\u5bff\u547d\u57fa\u672c\u4e0a\u662f\u65e0\u9650\u7684\u3002\u53ea\u6709\u80cc\u57ab\u662f\u9700\u8981\u66f4\u6362\u7684\u78e8\u635f\u90e8\u4ef6\u3002.<\/p>\n\n  <h3>\u5404\u5de5\u827a\u6b65\u9aa4\u7684\u5178\u578b\u5468\u671f\u5bff\u547d<\/h3>\n  <p>\u5728 5-6 psi \u538b\u529b\u4e0b\u4f7f\u7528\u6807\u51c6 KMnO\u2084\u91d1\u521a\u77f3\u6d46\u6599\uff1a60-90 \u4e2a\u629b\u5149\u5faa\u73af\u540e\uff0c\u629b\u5149\u57ab\u539a\u5ea6\u624d\u4f1a\u4e0b\u964d\u5230 \u00b115 \u00b5m \u7684\u5747\u5300\u6027\u4e34\u754c\u503c\u4ee5\u4e0b\uff0c\u4ece\u800c\u786e\u4fdd TTV \u6027\u80fd\u3002\u5728\u51cf\u538b\u6761\u4ef6\u4e0b\uff083-4 psi\uff0c\u6700\u540e CMP \u6b65\u9aa4\uff09\uff1a\u4e00\u822c\u4e3a 100-150 \u4e2a\u5468\u671f\u3002\u8fd9\u4e9b\u6570\u5b57\u660e\u663e\u77ed\u4e8e\u7845 SSP \u6a21\u677f\u5bff\u547d\uff08100-200 \u4e2a\u5468\u671f\uff09\uff0c\u56e0\u4e3a SiC \u7684\u786c\u5ea6\u66f4\u9ad8\uff0c\u5de5\u827a\u538b\u529b\u66f4\u5927\uff0c\u5bfc\u81f4\u6bcf\u4e2a\u5468\u671f\u7684\u710a\u76d8\u78e8\u635f\u901f\u5ea6\u5feb 2-3 \u500d\u3002.<\/p>\n\n  <h3>\u76d1\u6d4b\u548c\u66f4\u6362\u89e6\u53d1\u5668<\/h3>\n  <p>SiC CMP \u6a21\u677f\u7684\u6b63\u786e\u66f4\u6362\u89e6\u53d1\u70b9\u4e0d\u662f\u56fa\u5b9a\u7684\u5468\u671f\u6570\uff0c\u800c\u662f\u6d4b\u91cf\u7684\u886c\u57ab\u539a\u5ea6\u6807\u51c6 - \u901a\u5e38\u662f\u65b0\u886c\u57ab\u6807\u79f0\u539a\u5ea6\u7684\u6700\u5c0f\u7edd\u5bf9\u539a\u5ea6\u4e3a 70-80%\uff0c\u6574\u4e2a\u886c\u57ab\u533a\u57df\u7684\u6700\u5927\u539a\u5ea6\u4e0d\u5747\u5300\u5ea6\u4e3a \u00b120 \u00b5m\u3002\u5728\u7edf\u8ba1\u8fc7\u7a0b\u63a7\u5236\u56fe\u4e0a\u8ddf\u8e2a TTV \u4e0e\u6a21\u677f\u5faa\u73af\u6b21\u6570\u7684\u51fd\u6570\u5173\u7cfb\uff0c\u53ef\u63d0\u4f9b\u7531\u886c\u57ab\u78e8\u635f\u5f15\u8d77\u7684 TTV \u6f02\u79fb\u7684\u65e9\u671f\u9884\u8b66\uff0c\u901a\u5e38\u5728\u8fbe\u5230\u5c3a\u5bf8\u4e34\u754c\u503c\u524d 10-15 \u4e2a\u5faa\u73af\u3002.<\/p>\n\n  <div class=\"callout tip\">\n    <span class=\"callout-icon\">\ud83d\udca1<\/span>\n    <div class=\"callout-body\">\n      <strong>\u7528\u4e8e\u78b3\u5316\u7845\u751f\u4ea7\u7684\u6a21\u677f\u5468\u671f\u8bb0\u5f55<\/strong>\n      \u7531\u4e8e SiC CMP \u5468\u671f\u957f\uff08\u6bcf\u4e2a\u5468\u671f 10-30 \u5206\u949f\uff09\uff0c\u6a21\u677f\u4ef7\u683c\u6602\u8d35\uff0c\u56e0\u6b64\u6309\u6a21\u677f\u5e8f\u5217\u53f7\u8bb0\u5f55\u89c4\u8303\u7684\u5468\u671f\u8ba1\u6570\u5bf9 SiC \u751f\u4ea7\u5c24\u4e3a\u91cd\u8981\u3002\u6a21\u677f\u8ddf\u8e2a\u7cfb\u7edf\u53ef\u8bb0\u5f55\u6bcf\u4e2a\u6a21\u677f\u6279\u6b21\u7684\u5468\u671f\u8ba1\u6570\u3001TTV \u6570\u636e\u548c\u6ce5\u6d46\u69fd\u6279\u6b21\uff0c\u4ece\u800c\u51c6\u786e\u9884\u6d4b\u66f4\u6362\u65f6\u95f4\uff0c\u5e76\u6d88\u9664\u56e0\u8ddf\u8e2a\u4e0d\u8db3\u800c\u9020\u6210\u7684\u8ba1\u5212\u5916 TTV \u504f\u79fb\u3002.\n    <\/div>\n  <\/div>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 10 \u2550\u2550\u2550 -->\n  <h2 id=\"full-spec\">\u5b8c\u6574\u7684\u78b3\u5316\u7845\u629b\u5149\u6a21\u677f\u89c4\u8303\u53c2\u8003<\/h2>\n\n  <p>\u4ee5\u4e0b\u89c4\u8303\u6458\u8981\u5c06\u672c\u6307\u5357\u4e2d\u8ba8\u8bba\u7684 SiC \u7279\u5b9a\u8981\u6c42\u6574\u5408\u4e3a\u4e00\u4e2a\u5355\u4e00\u53c2\u8003\uff0c\u4f9b\u6307\u5b9a SiC CMP \u629b\u5149\u6a21\u677f\u7684\u5de5\u7a0b\u5e08\u4f7f\u7528\u3002\u6709\u5173\u9002\u7528\u4e8e\u6240\u6709\u6a21\u677f\u7c7b\u578b\u7684\u5b8c\u6574 6 \u53c2\u6570\u89c4\u8303\u65b9\u6cd5\uff0c\u8bf7\u53c2\u9605\u6211\u4eec\u7684 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-to-Specify-a-Polishing-Template-6-Parameters-Engineers-Must-Define\/\" target=\"_blank\" class=\"text-link-pill\">6 \u53c2\u6570\u89c4\u683c\u6307\u5357<\/a>.<\/p>\n\n  <div class=\"spec-card\">\n    <div class=\"spec-card-title\">\u2b21 SiC CMP \u629b\u5149\u6a21\u677f - \u89c4\u8303\u53c2\u8003<\/div>\n    <div class=\"spec-grid\">\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u6676\u7247\u76f4\u5f84<\/div>\n        <div class=\"sv\">100 \u6beb\u7c73\u3001150 \u6beb\u7c73\uff08\u6807\u51c6\uff09\uff1b200 \u6beb\u7c73\uff08\u65b0\u5174\uff09<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u627f\u8f7d\u677f\u6750\u6599<\/div>\n        <div class=\"sv highlight\">CXT \u7ea7\uff08\u5f3a\u5236\u6027\uff09<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u8010\u9178\u78b1\u6027<\/div>\n        <div class=\"sv highlight\">pH 2-13 + \u6c27\u5316\u5242\u7a33\u5b9a<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u5efa\u7b51<\/div>\n        <div class=\"sv\">\u65e0\u7f1d - \u65e0\u5c42\u538b\u677f\u63a5\u53e3<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u5de5\u5b54\u6df1\u5ea6\u516c\u5dee<\/div>\n        <div class=\"sv\">\u80cc\u57ab\u8868\u9762 \u00b1 5 \u00b5m<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u627f\u8f7d\u677f\u5f13<\/div>\n        <div class=\"sv\">\u2264 10 \u5fae\u7c73\uff08\u6807\u51c6\uff09\uff1b \u2264 5 \u5fae\u7c73\uff08\u9ad8\u7ea7\uff09<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u5e95\u57ab\u786c\u5ea6\uff08CMP-1\uff09<\/div>\n        <div class=\"sv\">A \u5cb8 70-80<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u5e95\u57ab\u786c\u5ea6\uff08CMP-2\uff09<\/div>\n        <div class=\"sv\">A \u533a 65-75<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u5e95\u57ab\u786c\u5ea6\uff08\u6700\u7ec8\uff09<\/div>\n        <div class=\"sv\">A \u533a 55-65<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u9700\u8981 EER \u5417\uff1f<\/div>\n        <div class=\"sv\">\u662f\uff0cEE \u76ee\u6807 &lt; 3 \u6beb\u7c73<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">EER \u9ad8\u5ea6\u8303\u56f4<\/div>\n        <div class=\"sv\">100-300 \u5fae\u7c73<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u6d01\u51c0\u5ba4\u88c5\u914d<\/div>\n        <div class=\"sv\">ISO 5 \/ \u7b49\u7ea7 100<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u8fb9\u7f18\u5bc6\u5c01<\/div>\n        <div class=\"sv\">\u4e0d\u9700\u8981\uff08\u65e0\u7f1d - \u65e0\u5149\u7ea4\uff09<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u5178\u578b\u5faa\u73af\u5bff\u547d<\/div>\n        <div class=\"sv\">60-120 \u6b21\u5faa\u73af\uff08\u57ab\u7247\u9650\u5236\uff09<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u4fdd\u7559\u53ef\u8ffd\u6eaf\u6027<\/div>\n        <div class=\"sv\">\u2265 5 \u5e74<\/div>\n      <\/div>\n      <div class=\"spec-item\">\n        <div class=\"sl\">\u6587\u4ef6<\/div>\n        <div class=\"sv\">CoC + \u6750\u6599\u8bc1\u4e66 + CMM \u62a5\u544a<\/div>\n      <\/div>\n    <\/div>\n  <\/div>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 11 \u2550\u2550\u2550 -->\n  <h2 id=\"qualification\">\u78b3\u5316\u7845\u629b\u5149\u6a21\u677f\u7684\u9274\u5b9a\u7b56\u7565<\/h2>\n\n  <p>\u65b0 SiC CMP \u629b\u5149\u6a21\u677f\u7684\u9274\u5b9a\u8981\u6c42\u91c7\u7528\u7ed3\u6784\u5316\u65b9\u6cd5\uff0c\u4f9d\u6b21\u9a8c\u8bc1\u5316\u5b66\u517c\u5bb9\u6027\u3001\u5c3a\u5bf8\u7cbe\u5ea6\u548c\u5de5\u827a\u6027\u80fd\uff0c\u8fd9\u53cd\u6620\u4e86\u6545\u969c\u6a21\u5f0f\u7684\u4f18\u5148\u7b49\u7ea7\u3002\u5728\u4e3a\u671f 12 \u5468\u7684\u9274\u5b9a\u8ba1\u5212\u4e2d\uff0c\u5982\u679c\u6a21\u677f\u5728\u7b2c 3 \u5468\u51fa\u73b0\u5316\u5b66\u5931\u6548\uff0c\u90a3\u4e48\u8be5\u8ba1\u5212\u5c31\u4f1a\u6bc1\u4e8e\u4e00\u65e6\uff1b\u5982\u679c\u6750\u6599\u4e0d\u80fd\u901a\u8fc7\u5316\u5b66\u9274\u5b9a\uff0c\u90a3\u4e48\u5c3a\u5bf8\u548c\u5de5\u827a\u9274\u5b9a\u5c31\u6beb\u65e0\u610f\u4e49\u3002.<\/p>\n\n  <h3>\u7b2c 1 \u9636\u6bb5\uff1a\u5316\u5b66\u517c\u5bb9\u6027\u9a8c\u8bc1\uff081-2 \u5468\uff09<\/h3>\n  <p>\u5728\u4efb\u4f55\u629b\u5149\u8fd0\u884c\u4e4b\u524d\uff0c\u90fd\u8981\u901a\u8fc7\u52a0\u901f\u6d78\u6ce1\u6d4b\u8bd5\u6765\u9a8c\u8bc1\u6a21\u677f\u6279\u6b21\u4e0e\u751f\u4ea7\u6d46\u6599\u5316\u5b66\u6210\u5206\u7684\u517c\u5bb9\u6027\u3002\u5c06\u5408\u683c\u6279\u6b21\u4e2d\u7684\u4e09\u5757\u6a21\u677f\u6d78\u5165\u751f\u4ea7\u6d46\u6599\uff08\u6216\u5de5\u827a\u6e29\u5ea6\u4e0b\u5177\u6709\u4ee3\u8868\u6027\u7684\u6d46\u6599\u69fd\u6a21\u62df\u6db2\uff09\u4e2d 100 \u5c0f\u65f6\uff0c\u76f8\u5f53\u4e8e 50-80 \u4e2a SiC CMP \u5468\u671f\u3002\u5728\u6d78\u6ce1\u6d4b\u8bd5\u524d\u540e\u8fdb\u884c\u5c3a\u5bf8\u6d4b\u91cf\uff08\u8f7d\u677f\u5f27\u5ea6\u3001\u5de5\u4f5c\u5b54\u76f4\u5f84\uff09\u3002\u96f6\u5206\u5c42\u3001\u5c3a\u5bf8\u53d8\u5316\u5c0f\u4e8e 2 \u00b5m\u3001\u8f7d\u677f\u8868\u9762\u65e0\u89c6\u89c9\u9000\u5316\u662f\u5408\u683c\u6807\u51c6\u3002CXT \u7ea7\u6a21\u677f\u59cb\u7ec8\u80fd\u901a\u8fc7\u8be5\u6d4b\u8bd5\uff1bFR-4 \u548c G-10 \u6a21\u677f\u5219\u5728 20-40 \u5c0f\u65f6\u5185\u65e0\u6cd5\u901a\u8fc7\u8be5\u6d4b\u8bd5\u3002.<\/p>\n\n  <h3>\u7b2c 2 \u9636\u6bb5\uff1a\u5c3a\u5bf8\u548c\u70ed\u8f6c\u5370\u9274\u5b9a\uff082-4 \u5468\uff09<\/h3>\n  <p>\u901a\u8fc7\u7b2c\u4e00\u9636\u6bb5\u7684\u6a21\u677f\u8fdb\u5165\u629b\u5149\u9274\u5b9a\u9636\u6bb5\u3002\u5728\u989d\u5b9a\u5de5\u827a\u6761\u4ef6\u4e0b\uff0c\u5bf9\u6bcf\u4e2a\u6a21\u677f\u4e0a\u7684 5-10 \u5757\u78b3\u5316\u7845\u6676\u7247\u8fdb\u884c\u629b\u5149\u3002\u6839\u636e\u4ea7\u54c1\u89c4\u683c\u6d4b\u91cf TTV\u3001\u8868\u9762\u7c97\u7cd9\u5ea6\u548c\u8fb9\u7f18\u8f6e\u5ed3\u3002\u5efa\u7acb TTV \u4e0e\u6a21\u677f\u5468\u671f\u6570\u51fd\u6570\u7684 SPC \u63a7\u5236\u56fe\u3002\u6d4b\u91cf\u6bcf\u4e2a\u5468\u671f\u7684 TTV \u6f02\u79fb\u7387\uff0c\u5e76\u7528\u4e8e\u9884\u6d4b\u6a21\u677f\u66f4\u6362\u5468\u671f\u3002.<\/p>\n\n  <h3>\u7b2c 3 \u9636\u6bb5\uff1a\u751f\u4ea7\u8d44\u683c\u6269\u5c55\uff084-8 \u5468\uff09<\/h3>\n  <p>\u6a21\u677f\u5728\u751f\u4ea7\u6761\u4ef6\u4e0b\u8fd0\u884c\u6574\u4e2a\u9884\u8ba1\u5faa\u73af\u5bff\u547d\uff0c\u5e76\u5728\u89c4\u5b9a\u7684\u95f4\u9694\u68c0\u67e5\u70b9\u8fdb\u884c\u8fc7\u7a0b\u4e2d TTV \u6d4b\u91cf\u3002\u76ee\u7684\u662f\u9a8c\u8bc1\u66f4\u6362\u89e6\u53d1\u89c4\u8303--\u786e\u8ba4 TTV \u6027\u80fd\u5728\u80cc\u886c\u57ab\u539a\u5ea6\u8fbe\u5230\u66f4\u6362\u9608\u503c\u7684\u5faa\u73af\u6b21\u6570\u5185\u4fdd\u6301\u5728\u89c4\u8303\u8303\u56f4\u5185\uff0c\u5e76\u4e14 TTV \u5728\u8d85\u8fc7\u8be5\u70b9\u65f6\u4f1a\u660e\u663e\u6076\u5316\u3002\u8be5\u9636\u6bb5\u53ef\u63d0\u4f9b\u5fc5\u8981\u7684\u6570\u636e\uff0c\u4ee5\u4fbf\u6709\u628a\u63e1\u5730\u5236\u5b9a\u751f\u4ea7\u6a21\u677f\u66f4\u6362\u8ba1\u5212\u3002.<\/p>\n\n  <div class=\"callout info\">\n    <span class=\"callout-icon\">\u2139\ufe0f<\/span>\n    <div class=\"callout-body\">\n      <strong>\u9996\u6b21\u83b7\u5f97 SiC \u6a21\u677f\u8d44\u683c\uff1f\u6211\u4eec\u4e3a\u6d41\u7a0b\u63d0\u4f9b\u652f\u6301\u3002.<\/strong>\n      \u5bf9\u4e8e\u9996\u6b21\u9274\u5b9a SiC CMP \u629b\u5149\u6a21\u677f\u7684\u5ba2\u6237\uff0c\u5409\u4e4b\u5c9b\u53ef\u5728\u6240\u6709\u4e09\u4e2a\u9274\u5b9a\u9636\u6bb5\u63d0\u4f9b\u5168\u9762\u7684\u5de5\u7a0b\u652f\u6301\uff0c\u5305\u62ec\u6d46\u6599\u517c\u5bb9\u6027\u786e\u8ba4\u3001\u7279\u5b9a SiC FTT \u7684\u5de5\u5b54\u6df1\u5ea6\u8ba1\u7b97\uff0c\u4ee5\u53ca\u57fa\u4e8e\u8fb9\u7f18\u8f6e\u5ed3\u6570\u636e\u7684 EER \u51e0\u4f55\u5f62\u72b6\u5efa\u8bae\u3002\u5728\u5f00\u59cb\u60a8\u7684\u9274\u5b9a\u8ba1\u5212\u4e4b\u524d\uff0c\u8bf7\u8054\u7cfb\u6211\u4eec\uff0c\u4ee5\u786e\u4fdd\u5728\u6295\u5165\u6d4b\u8bd5\u6676\u5706\u4e4b\u524d\uff0c\u6a21\u677f\u89c4\u683c\u5df2\u5f97\u5230\u5145\u5206\u9a8c\u8bc1\u3002.\n    <\/div>\n  <\/div>\n\n  <!-- Related articles -->\n  <div class=\"related-box\">\n    <h3>\ud83d\udcd6 \u76f8\u5173\u6280\u672f\u6587\u7ae0<\/h3>\n    <p>\u63a2\u7d22\u534a\u5bfc\u4f53\u629b\u5149\u6a21\u677f\u5de5\u7a0b\u7684\u5b8c\u6574\u77e5\u8bc6\u5e93\uff1a<\/p>\n    <div class=\"related-links\">\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Polishing-Templates-for-Semiconductor-Silicon-Wafer-Processing\/\" target=\"_blank\">\u629b\u5149\u6a21\u677f\uff1a\u5b8c\u6574\u6307\u5357<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/FR-4-vs-G-10-Fiberglass-Polishing-Templates-Material-Properties-Selection-Guide\/\" target=\"_blank\">FR-4 vs G-10 vs CXT \u6750\u6599<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Role-of-Polishing-Templates-in-CMP-How-Fixture-Design-Impacts-Wafer-Flatness\/\" target=\"_blank\">CMP \u548c\u6676\u7247\u5e73\u9762\u5ea6\u6a21\u677f<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-Polishing-Template-Edge-Design-Controls-Wafer-Edge-Profile-Reduces-Edge-Exclusion\/\" target=\"_blank\">\u8fb9\u7f18\u8f6e\u5ed3\u548c EER \u8bbe\u8ba1<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-to-Specify-a-Polishing-Template-6-Parameters-Engineers-Must-Define\/\" target=\"_blank\">6 \u53c2\u6570\u89c4\u683c\u6307\u5357<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Waxless-Polishing-Templates-vs-Wax-Mounting-Cost-Quality-Process-Comparison\/\" target=\"_blank\">\u65e0\u8721\u5b89\u88c5\u4e0e\u6709\u8721\u5b89\u88c5<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Polishing-Templates-for-Compound-Semiconductor-Wafers-GaAs-InP-Sapphire\/\" target=\"_blank\">\u7837\u5316\u9553\/\u78f7\u5316\u94df\/\u84dd\u5b9d\u77f3\u6a21\u677f<\/a>\n    <\/div>\n  <\/div>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 FAQ \u2550\u2550\u2550 -->\n  <h2 id=\"faq\">\u5e38\u89c1\u95ee\u9898<\/h2>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">\u4e3a\u4ec0\u4e48\u78b3\u5316\u7845\u6676\u7247\u9700\u8981\u7279\u6b8a\u7684\u629b\u5149\u6a21\u677f\uff1f<\/div>\n    <div class=\"faq-a\">\u78b3\u5316\u7845\u7684\u786c\u5ea6\u7ea6\u4e3a\u7845\u7684 30 \u500d\uff0c\u9700\u8981\u542b\u6709\u5f3a\u6c27\u5316\u5242\uff08pH \u503c\u4e3a 2-11 \u65f6\u4e3a KMnO\u2084\uff0cpH \u503c\u4e3a 2-5 \u65f6\u4e3a H\u2082O\u2082\uff09\u7684 CMP \u6ce5\u6d46\u624d\u80fd\u8fbe\u5230\u53ef\u63a5\u53d7\u7684\u53bb\u9664\u7387\u3002\u8fd9\u4e9b\u5316\u5b66\u5242\u4e0e\u6807\u51c6\u7684 FR-4 \u548c G-10 \u5c42\u538b\u6a21\u677f\u4e0d\u517c\u5bb9\uff0c\u5728\u8fd9\u4e9b\u6761\u4ef6\u4e0b\uff0c\u5b83\u4eec\u4f1a\u5728 20-45 \u4e2a\u5468\u671f\u5185\u5206\u5c42\uff0c\u5e76\u4f7f\u73bb\u7483\u7ea4\u7ef4\u548c\u6811\u8102\u9897\u7c92\u6c61\u67d3\u6d46\u6599\u3002SiC \u7684\u5de5\u827a\u538b\u529b\uff084-7 psi\uff09\u8f83\u9ad8\uff0c\u56e0\u6b64\u9700\u8981\u6bd4\u7845 SSP \u66f4\u786c\u7684\u886c\u57ab\u3002\u53ea\u6709 CXT \u7ea7\u65e0\u7f1d\u6a21\u677f\u624d\u80fd\u63d0\u4f9b SiC CMP \u751f\u4ea7\u6240\u9700\u7684\u5316\u5b66\u7a33\u5b9a\u6027\u548c\u673a\u68b0\u6027\u80fd\u3002.<\/div>\n  <\/div>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">SiC CMP \u4e2d\u4f7f\u7528\u4e86\u54ea\u4e9b\u6d46\u6599\u5316\u5b66\u6210\u5206\uff0c\u5b83\u4eec\u5bf9\u6a21\u677f\u9009\u62e9\u6709\u4f55\u5f71\u54cd\uff1f<\/div>\n    <div class=\"faq-a\">SiC CMP \u4e3b\u8981\u4f7f\u7528\u4e24\u79cd\u6d46\u6599\u7cfb\u5217\uff1a\u7528\u4e8e\u7845\u9762 CMP \u7684 KMnO\u2084 \u57fa\u6d46\u6599\uff08pH \u503c 9-11\uff09\u548c\u7528\u4e8e C \u9762\u548c\u673a\u68b0\u5e73\u9762\u5316\u6b65\u9aa4\u7684 H\u2082O\u2082 \u57fa\u9178\u6027\u6d46\u6599\uff08pH \u503c 2-5\uff09\u3002\u7531\u4e8e\u542b\u6709\u6c27\u5316\u5242\u6210\u5206\uff0c\u8fd9\u4e24\u79cd\u7269\u8d28\u5bf9 FR-4 \u548c G-10 \u73af\u6c27\u57fa\u8d28\u90fd\u5177\u6709\u5f88\u5f3a\u7684\u4fb5\u8680\u6027\u3002\u5982\u679c\u6a21\u677f\u53d1\u751f\u964d\u89e3\uff0cKMnO\u2084 \u8fd8\u4f1a\u5e26\u6765\u9530\u79bb\u5b50\u6c61\u67d3\u7684\u98ce\u9669\u3002CXT \u7ea7\u6a21\u677f\u5728\u6574\u4e2a pH \u503c 2-13 \u8303\u56f4\u5185\u90fd\u80fd\u62b5\u5fa1\u8fd9\u4e24\u79cd\u5316\u5b66\u7269\u8d28\uff0c\u5177\u6709\u5f88\u5f3a\u7684\u6c27\u5316\u5242\u7a33\u5b9a\u6027\uff0c\u662f\u751f\u4ea7 SiC CMP \u7684\u552f\u4e00\u53ef\u884c\u7684\u8f7d\u677f\u6750\u6599\u3002.<\/div>\n  <\/div>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">\u5728 SiC CMP \u4e2d\uff0cCXT \u6a21\u677f\u7684\u629b\u5149\u5468\u671f\u5bff\u547d\u4e00\u822c\u6709\u591a\u957f\uff1f<\/div>\n    <div class=\"faq-a\">\u5728 SiC CMP \u4e2d\u4f7f\u7528\u7684 CXT \u7ea7\u6a21\u677f\u901a\u5e38\u53ef\u8fbe\u5230 60-120 \u6b21\u629b\u5149\u5faa\u73af\uff0c\u7136\u540e\u886c\u57ab\u539a\u5ea6\u624d\u4f1a\u4e0b\u964d\u5230\u66f4\u6362\u4e34\u754c\u503c\u4ee5\u4e0b\u3002\u5728 5-6 psi \u538b\u529b\u4e0b\uff0c\u4f7f\u7528\u6807\u51c6\u91d1\u521a\u77f3\/KMnO\u2084 \u7802\u6d46\uff0c\u5178\u578b\u5bff\u547d\u4e3a 60-90 \u4e2a\u5468\u671f\u3002\u5728\u538b\u529b\u8f83\u4f4e\u7684\u6700\u7ec8 CMP \u6b65\u9aa4\u4e2d\uff0c\u53ef\u8fbe\u5230 100-150 \u4e2a\u5468\u671f\u3002\u4e0e FR-4 \u6a21\u677f\u5728 20-45 \u6b21\u5faa\u73af\u540e\u4f1a\u51fa\u73b0\u5316\u5b66\u5931\u6548\u4e0d\u540c\uff0cCXT \u6a21\u677f\u7684\u4f7f\u7528\u5bff\u547d\u5b8c\u5168\u7531\u886c\u57ab\u7684\u673a\u68b0\u78e8\u635f\u51b3\u5b9a\uff0c\u8fd9\u662f\u4e00\u79cd\u53ef\u9884\u6d4b\u3001\u53ef\u76d1\u63a7\u7684\u8017\u6750\u751f\u547d\u5468\u671f\u3002.<\/div>\n  <\/div>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">\u540c\u4e00\u629b\u5149\u6a21\u677f\u662f\u5426\u53ef\u7528\u4e8e Si \u9762\u548c C \u9762 SiC CMP\uff1f<\/div>\n    <div class=\"faq-a\">CXT \u8f7d\u677f\u6750\u6599\u4e0e Si \u9762\u548c C \u9762\u6d46\u6599\u5316\u5b66\u6210\u5206\u517c\u5bb9\u3002\u5982\u679c\u4e24\u4e2a\u9762\u4f7f\u7528\u76f8\u540c\u7684\u6700\u7ec8\u76ee\u6807\u539a\u5ea6\u548c\u76f8\u540c\u7684\u6807\u79f0\u5de5\u827a\u538b\u529b\uff0c\u5219\u76f8\u540c\u7684\u6a21\u677f\u51e0\u4f55\u5f62\u72b6\u53ef\u540c\u65f6\u7528\u4e8e\u4e24\u4e2a\u6b65\u9aa4\u3002\u5728\u5927\u591a\u6570\u751f\u4ea7\u73af\u5883\u4e2d\uff0cSi-face \u548c C-face \u629b\u5149\u5728\u4e0d\u540c\u7684\u673a\u5668\u4e0a\u8fd0\u884c\uff0c\u5373\u4f7f\u51e0\u4f55\u5f62\u72b6\u76f8\u540c\uff0c\u4e5f\u8981\u4fdd\u7559\u4e0d\u540c\u7684\u6a21\u677f\u6279\u6b21\uff0c\u4ee5\u4fbf\u8fdb\u884c\u5408\u683c\u8ffd\u6eaf\u548c\u5468\u671f\u8ba1\u6570\u8ddf\u8e2a\u3002.<\/div>\n  <\/div>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">\u4f7f\u7528 EER \u6a21\u677f\u53ef\u4ee5\u5728 SiC \u6676\u5706\u4e0a\u5b9e\u73b0\u600e\u6837\u7684\u8fb9\u7f18\u6392\u9664\uff1f<\/div>\n    <div class=\"faq-a\">\u901a\u8fc7\u4f18\u5316\u8fb9\u7f18\u589e\u5f3a\u73af\u8bbe\u8ba1\uff0c\u5728 150 \u6beb\u7c73\u78b3\u5316\u7845\u6676\u7247\u4e0a\u53ef\u5b9e\u73b0 1.5-2.5 \u6beb\u7c73\u7684\u8fb9\u7f18\u7981\u533a\uff0c\u800c\u6ca1\u6709 EER \u7684\u5178\u578b\u503c\u4e3a 4-6 \u6beb\u7c73\u3002\u78b3\u5316\u7845\u6240\u9700\u7684 EER \u9ad8\u5ea6\u8f83\u5927\uff08100-300 \u5fae\u7c73\uff0c\u800c\u7845\u4e3a 50-150 \u5fae\u7c73\uff09\uff0c\u8fd9\u53cd\u6620\u4e86\u8f83\u9ad8\u7684\u5de5\u827a\u538b\u529b\u4f1a\u4ea7\u751f\u8f83\u5f3a\u7684\u8fb9\u7f18\u6eda\u843d\u529b\u3002EER \u7684\u51e0\u4f55\u5f62\u72b6\u6839\u636e\u5177\u4f53\u5e94\u7528\u800c\u5b9a\uff0c\u5e76\u9700\u8981\u57fa\u4e8e\u7b2c\u4e00\u7c92\u5b50\u8fb9\u7f18\u8f6e\u5ed3\u6d4b\u91cf\u6570\u636e\u7684\u9274\u5b9a\u8fed\u4ee3\u5468\u671f\u3002.<\/div>\n  <\/div>\n\n  <!-- CTA -->\n  <div class=\"cta-banner\">\n    <h2>\u83b7\u53d6\u78b3\u5316\u7845\u629b\u5149\u6a21\u677f\u9700\u6c42\u62a5\u4ef7<\/h2>\n    <p>\u8bf7\u63d0\u4f9b\u60a8\u7684 SiC \u57fa\u5e95\u76f4\u5f84\u3001CMP \u5de5\u827a\u6b65\u9aa4\u3001\u6d46\u6599\u5316\u5b66\u6210\u5206\u548c TTV \u76ee\u6807 - \u6211\u4eec\u7684\u5de5\u7a0b\u56e2\u961f\u5c06\u5728 48 \u5c0f\u65f6\u5185\u786e\u8ba4 CXT \u7ea7\u6a21\u677f\u89c4\u683c\u5e76\u63d0\u4f9b\u6709\u7ade\u4e89\u529b\u7684\u62a5\u4ef7\u3002.<\/p>\n    <a href=\"https:\/\/jeez-semicon.com\/zh\/contact\/\" class=\"cta-btn\" target=\"_blank\">\n      \u8054\u7cfb\u6211\u4eec\u83b7\u53d6\u62a5\u4ef7 \u2192\n    <\/a>\n  <\/div>\n\n  <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Polishing-Templates-for-Semiconductor-Silicon-Wafer-Processing\/\" target=\"_blank\" class=\"back-to-pillar\">\n    \u8fd4\u56de\u629b\u5149\u6a21\u677f\uff1a\u5b8c\u6574\u6307\u5357\n  <\/a>\n\n<\/div>\n<\/body>\n<\/html>","protected":false},"excerpt":{"rendered":"<p>SiC Substrate Engineering Silicon carbide is the hardest common semiconductor substrate and demands the most chemically aggressive CMP slurries. Standard polishing templates fail within weeks. This guide covers what SiC  &#8230;<\/p>","protected":false},"author":1,"featured_media":1688,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1658","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1658","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=1658"}],"version-history":[{"count":2,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1658\/revisions"}],"predecessor-version":[{"id":1660,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1658\/revisions\/1660"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/1688"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=1658"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=1658"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=1658"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}