{"id":1664,"date":"2026-03-13T09:16:44","date_gmt":"2026-03-13T01:16:44","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1664"},"modified":"2026-03-13T09:53:47","modified_gmt":"2026-03-13T01:53:47","slug":"polishing-templates-for-glass-wafers-ceramic-substrates-key-considerations","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/polishing-templates-for-glass-wafers-ceramic-substrates-key-considerations\/","title":{"rendered":"\u73bb\u7483\u6676\u7247\u548c\u9676\u74f7\u57fa\u677f\u7684\u629b\u5149\u6a21\u677f\uff1a\u4e3b\u8981\u8003\u8651\u56e0\u7d20"},"content":{"rendered":"<!DOCTYPE html>\n<html lang=\"en\">\n<head>\n<meta charset=\"UTF-8\" \/>\n<meta name=\"viewport\" content=\"width=device-width, initial-scale=1.0\" \/>\n\n<meta name=\"description\" content=\"Engineering guide to polishing templates for glass wafers and ceramic substrates. Covers borosilicate, fused silica, alumina, AlN, and LTCC polishing \u2014 including non-standard thickness handling, pH compatibility, backing pad selection, and EER design.\" \/>\n<meta name=\"keywords\" content=\"glass wafer polishing template, ceramic substrate polishing template, fused silica polishing template, borosilicate glass polishing fixture, alumina polishing template, AlN substrate polishing, LTCC polishing template, glass substrate polishing fixture, ceramic wafer polishing\" \/>\n<link rel=\"canonical\" href=\"https:\/\/jeez-semicon.com\/blog\/Polishing-Templates-for-Glass-Wafers-Ceramic-Substrates-Key-Considerations\" \/>\n\n<meta property=\"og:title\" content=\"Polishing Templates for Glass Wafers &#038; Ceramic Substrates: Key Considerations\" \/>\n<meta property=\"og:description\" content=\"Template engineering for glass wafers and ceramic substrates: non-standard thickness, borosilicate vs fused silica slurry compatibility, alumina and AlN hardness challenges, LTCC polishing, and custom work-hole depth specification.\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:url\" content=\"https:\/\/jeez-semicon.com\/blog\/Polishing-Templates-for-Glass-Wafers-Ceramic-Substrates-Key-Considerations\" \/>\n\n<script type=\"application\/ld+json\">\n{\n  \"@context\": \"https:\/\/schema.org\",\n  \"@graph\": [\n    {\n      \"@type\": \"Article\",\n      \"headline\": \"Polishing Templates for Glass Wafers & Ceramic Substrates: Key Considerations\",\n      \"description\": \"Engineering guide to polishing template design for glass wafers and ceramic substrates, covering borosilicate, fused silica, alumina, AlN, and LTCC substrates with non-standard thickness handling, slurry compatibility, and EER design.\",\n      \"author\": { \"@type\": \"Organization\", \"name\": \"Jizhi Electronic Technology Co., Ltd.\", \"url\": \"https:\/\/jeez-semicon.com\" },\n      \"publisher\": { \"@type\": \"Organization\", \"name\": \"Jizhi Electronic Technology Co., Ltd.\", \"url\": \"https:\/\/jeez-semicon.com\" },\n      \"mainEntityOfPage\": { \"@type\": \"WebPage\", \"@id\": \"https:\/\/jeez-semicon.com\/blog\/Polishing-Templates-for-Glass-Wafers-Ceramic-Substrates-Key-Considerations\" }\n    },\n    {\n      \"@type\": \"FAQPage\",\n      \"mainEntity\": [\n        {\n          \"@type\": \"Question\",\n          \"name\": \"What makes polishing templates for glass wafers different from semiconductor wafer templates?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"Glass wafers differ from semiconductor wafers in three key ways that affect template design: non-standard thicknesses (0.3\u20132.0 mm versus the 0.5\u20130.8 mm typical for Si), wider incoming thickness variation (\u00b125\u201350 \u00b5m for glass vs \u00b15\u201310 \u00b5m for Si prime wafers), and a much wider range of chemical compositions with different polishing chemistry requirements. The most consequential difference for templates is non-standard thickness \u2014 every glass wafer polishing template requires custom work-hole depth calculation based on the specific incoming thickness, target final thickness, and expected backing pad compression, rather than using a standard depth from a catalog.\"\n          }\n        },\n        {\n          \"@type\": \"Question\",\n          \"name\": \"Can standard FR-4 polishing templates be used for glass wafer polishing?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"FR-4 is acceptable for borosilicate glass polishing using alkaline colloidal silica slurry (pH 9\u201312) where no HF-containing chemistry is used. However, fused silica polishing often uses mildly acidic slurries (pH 4\u20137) where FR-4 provides marginal service life. Any glass polishing process using HF, NH\u2084F, or fluoride-containing chemistry requires CXT-grade templates \u2014 HF attacks both FR-4 and G-10 rapidly and completely, dissolving the epoxy matrix within a few cycles. For production applications at any pH below 8, G-10 minimum is recommended even without fluoride chemistry.\"\n          }\n        },\n        {\n          \"@type\": \"Question\",\n          \"name\": \"What polishing template is used for alumina (Al\u2082O\u2083) ceramic substrates?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"Alumina ceramic substrate polishing typically uses diamond abrasive slurry at pH 4\u20138, which requires G-10 or CXT-grade carrier plate material. Alumina's hardness (Mohs 9.0, same as sapphire) demands harder backing pads (Shore A 65\u201380) and higher process pressures (3\u20136 psi) than silicon polishing. The irregular non-circular geometries common in ceramic substrate applications (rectangles, squares, custom shapes) require custom work-hole geometry machined to the specific substrate shape rather than a circular work-hole, which is a standard capability for custom polishing templates.\"\n          }\n        },\n        {\n          \"@type\": \"Question\",\n          \"name\": \"How is work-hole depth specified for glass wafers with non-standard thickness?\",\n          \"acceptedAnswer\": {\n            \"@type\": \"Answer\",\n            \"text\": \"Work-hole depth for glass wafers is calculated as: target final thickness + backing pad compression offset + template face recession (if applicable) - process-specific overpolish allowance. Because glass wafers have wider incoming thickness variation than semiconductor wafers, the work-hole depth must be calculated based on the nominal incoming thickness for the specific glass lot, and the polishing process recipe adjusted for each lot to account for lot-to-lot thickness variation. Providing your glass supplier's incoming thickness specification (nominal + tolerance) when ordering templates allows the work-hole depth to be correctly calculated for your process.\"\n          }\n        }\n      ]\n    }\n  ]\n}\n<\/script>\n\n<style>\n  @import url('https:\/\/fonts.googleapis.com\/css2?family=DM+Serif+Display:ital@0;1&family=DM+Sans:opsz,wght@9..40,300;9..40,400;9..40,500;9..40,600&family=JetBrains+Mono:wght@400;500&display=swap');\n\n  :root {\n    --navy:      #0a1628;\n    --navy-mid:  #112240;\n    --blue:      #1a56db;\n    --blue-lite: #3b82f6;\n    --cyan:      #06b6d4;\n    --slate:     #334155;\n    --muted:     #64748b;\n    --border:    #e2e8f0;\n    --bg:        #f8fafc;\n    --white:     #ffffff;\n    --accent:    #f59e0b;\n    --green:     #10b981;\n    --teal:      #0f766e;\n    --red:       #ef4444;\n    --glass:     #0369a1;   \/* sky blue for glass *\/\n    --ceramic:   #b45309;   \/* amber-brown for ceramic *\/\n    --fused:     #4f46e5;   \/* 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min-width: 18px; margin-top: 2px; flex-shrink: 0; }\n  .toc-list a:hover { color: var(--glass); }\n\n  \/* \u2500\u2500 Typography \u2500\u2500 *\/\n  h2 { font-family: 'DM Serif Display', serif; font-size: clamp(22px, 3.5vw, 30px); color: var(--navy); margin: 56px 0 18px; line-height: 1.25; scroll-margin-top: 24px; }\n  h3 { font-family: 'DM Sans', sans-serif; font-size: 19px; font-weight: 600; color: var(--navy-mid); margin: 36px 0 14px; scroll-margin-top: 24px; }\n  p { margin-bottom: 18px; }\n  a { color: var(--blue); text-decoration: underline; text-underline-offset: 3px; text-decoration-thickness: 1px; }\n  a:hover { color: var(--blue-lite); }\n  strong { font-weight: 600; color: var(--navy-mid); }\n  ul, ol { padding-left: 24px; margin-bottom: 18px; }\n  li { margin-bottom: 8px; }\n  hr.divider { border: none; border-top: 1px solid var(--border); margin: 48px 0 0; }\n\n  \/* \u2500\u2500 Callouts \u2500\u2500 *\/\n  .callout { border-radius: var(--radius); padding: 20px 24px; 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font-weight: 500; font-size: 13px; letter-spacing: .04em; }\n  tbody tr { border-bottom: 1px solid var(--border); transition: background .15s; }\n  tbody tr:hover { background: var(--bg); }\n  tbody td { padding: 13px 16px; vertical-align: top; }\n  tbody tr:last-child { border-bottom: none; }\n  tbody tr.row-highlight td { background: #eff6ff; }\n  tbody tr.row-warn td { background: #fffbeb; }\n  tbody tr.row-danger td { background: #fef2f2; }\n  tbody tr.row-green td { background: #f0fdf4; }\n\n  .badge { display: inline-block; padding: 2px 8px; border-radius: 4px; font-size: 11.5px; font-weight: 600; letter-spacing: .04em; text-transform: uppercase; }\n  .badge-green  { background: #d1fae5; color: #065f46; }\n  .badge-blue   { background: #dbeafe; color: #1e40af; }\n  .badge-amber  { background: #fef3c7; color: #92400e; }\n  .badge-red    { background: #fee2e2; color: #991b1b; }\n  .badge-slate  { background: #f1f5f9; color: #475569; }\n\n  \/* \u2500\u2500 Substrate section blocks 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.cta-banner p { color: rgba(255,255,255,.72); font-size: 16px; max-width: 520px; margin: 0 auto 28px; }\n  .cta-btn { display: inline-flex; align-items: center; gap: 8px; background: #7dd3fc; color: var(--navy); text-decoration: none; font-weight: 600; font-size: 15px; padding: 14px 32px; border-radius: 8px; transition: opacity .2s, transform .15s; }\n  .cta-btn:hover { opacity: .9; transform: translateY(-1px); color: var(--navy); }\n\n  .back-to-pillar { display: inline-flex; align-items: center; gap: 8px; background: var(--bg); border: 1px solid var(--border); color: var(--slate); text-decoration: none; font-size: 13.5px; font-weight: 500; padding: 10px 18px; border-radius: 8px; margin: 40px 0 0; transition: border-color .2s, color .2s; }\n  .back-to-pillar::before { content: '\u2190'; color: var(--blue); }\n  .back-to-pillar:hover { border-color: var(--blue); color: var(--blue); }\n<\/style>\n<\/head>\n<body>\n\n<div class=\"hero\">\n  <div class=\"hero-eyebrow\">\u73bb\u7483\u548c\u9676\u74f7\u57fa\u5e95<\/div>\n  <p class=\"hero-sub\">\u5728\u6240\u6709\u57fa\u6750\u7c7b\u522b\u4e2d\uff0c\u73bb\u7483\u548c\u9676\u74f7\u57fa\u6750\u7684\u539a\u5ea6\u8303\u56f4\u6700\u5e7f\uff0c\u5316\u5b66\u6027\u8d28\u6700\u591a\u6837\uff0c\u51e0\u4f55\u5f62\u72b6\u4e5f\u6700\u591a\u6837\u5316\u3002\u8981\u6b63\u786e\u4f7f\u7528\u629b\u5149\u6a21\u677f\uff0c\u5c31\u5fc5\u987b\u51c6\u786e\u4e86\u89e3\u60a8\u8981\u629b\u5149\u7684\u6750\u6599\uff0c\u4ee5\u53ca\u4e3a\u4ec0\u4e48\u5355\u4e00\u7684 \u201c\u73bb\u7483\u6a21\u677f \u201d\u89c4\u683c\u65e0\u6cd5\u6ee1\u8db3\u6240\u6709\u5e94\u7528\u7684\u8981\u6c42\u3002.<\/p>\n  <p class=\"hero-meta\">\n    <span>\u7531\u96c6\u667a\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\u63d0\u4f9b.<\/span>\n    <span>\u00b7<\/span>\n    <span>\u534a\u5bfc\u4f53\u629b\u5149\u4e13\u5bb6<\/span>\n    <span>\u00b7<\/span>\n    <span>13 \u5206\u949f\u9605\u8bfb<\/span>\n  <\/p>\n<\/div>\n\n<div class=\"page-wrap\">\n\n  <nav class=\"breadcrumb\">\n    <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Polishing-Templates-for-Semiconductor-Silicon-Wafer-Processing\/\" target=\"_blank\">\u2190 \u629b\u5149\u6a21\u677f\uff1a\u5b8c\u6574\u6307\u5357<\/a>\n    <span>\/<\/span>\n    \u73bb\u7483\u548c\u9676\u74f7\u629b\u5149\u6a21\u677f\n  <\/nav>\n\n  <nav class=\"toc-box\">\n    <h2>\u76ee\u5f55<\/h2>\n    <ol class=\"toc-list\">\n      <li><a href=\"#why-different\">\u73bb\u7483\u548c\u9676\u74f7\uff1a\u6700\u5e7f\u6cdb\u7684\u6a21\u677f\u53ef\u53d8\u8303\u56f4<\/a><\/li>\n      <li><a href=\"#thickness-challenge\">\u975e\u6807\u51c6\u539a\u5ea6\u7684\u6311\u6218<\/a><\/li>\n      <li><a href=\"#work-hole-formula\">\u73bb\u7483\u57fa\u677f\u5de5\u4f5c\u5b54\u6df1\u5ea6\u516c\u5f0f<\/a><\/li>\n      <li><a href=\"#borosilicate\">\u787c\u7845\u73bb\u7483\u6676\u7247<\/a><\/li>\n      <li><a href=\"#fused-silica\">\u7194\u878d\u77f3\u82f1\u6676\u7247<\/a><\/li>\n      <li><a href=\"#alumina\">\u6c27\u5316\u94dd\uff08Al\u2082O\u2083\uff09\u9676\u74f7\u57fa\u677f<\/a><\/li>\n      <li><a href=\"#aln\">\u6c2e\u5316\u94dd\uff08AlN\uff09\u57fa\u677f<\/a><\/li>\n      <li><a href=\"#ltcc\">LTCC \u548c\u539a\u819c\u9676\u74f7\u57fa\u677f<\/a><\/li>\n      <li><a href=\"#non-circular\">\u975e\u5706\u5f62\u548c\u5b9a\u5236\u5f62\u72b6\u57fa\u8d28<\/a><\/li>\n      <li><a href=\"#slurry-table\">\u6ce5\u6d46\u5316\u5b66\u548c\u6a21\u677f\u6750\u6599\u9009\u62e9\u8868<\/a><\/li>\n      <li><a href=\"#comparison\">\u5b8c\u6574\u89c4\u683c\u5bf9\u6bd4<\/a><\/li>\n      <li><a href=\"#faq\">\u5e38\u89c1\u95ee\u9898<\/a><\/li>\n    <\/ol>\n  <\/nav>\n\n  <!-- \u2550\u2550\u2550 SECTION 1 \u2550\u2550\u2550 -->\n  <h2 id=\"why-different\">\u73bb\u7483\u548c\u9676\u74f7\uff1a\u6700\u5e7f\u6cdb\u7684\u6a21\u677f\u53ef\u53d8\u8303\u56f4<\/h2>\n\n  <p>\u672c\u7cfb\u5217\u8ba8\u8bba\u7684\u6bcf\u4e00\u7c7b\u886c\u5e95--\u7845\u3001SiC\u3001\u7837\u5316\u9553\u3001InP\u3001\u84dd\u5b9d\u77f3--\u90fd\u81f3\u5c11\u6d89\u53ca\u4e00\u4e2a\u660e\u786e\u754c\u5b9a\u7684\u629b\u5149\u96be\u9898\u3002\u7845\u6a21\u677f\u9700\u8981\u4e25\u683c\u7684 TTV \u63a7\u5236\u3002\u78b3\u5316\u7845\u9700\u8981\u8010\u5316\u5b66\u6027\u3002\u7837\u5316\u9553\u548c\u78f7\u5316\u94df\u9700\u8981\u65ad\u88c2\u4fdd\u62a4\u3002\u5728\u6bcf\u79cd\u60c5\u51b5\u4e0b\uff0c\u90fd\u6709\u4e00\u4e2a\u660e\u786e\u7684\u4e3b\u8981\u5de5\u7a0b\u8981\u6c42\u6765\u9a71\u52a8\u6a21\u677f\u89c4\u683c\u3002.<\/p>\n\n  <p>\u73bb\u7483\u548c\u9676\u74f7\u57fa\u5e95\u6ca1\u6709\u5355\u4e00\u7684\u4e3b\u8981\u6311\u6218\u3002\u5728\u6240\u6709\u57fa\u677f\u7c7b\u522b\u4e2d\uff0c\u5b83\u4eec\u7684\u7269\u7406\u6027\u8d28\u3001\u5316\u5b66\u6210\u5206\u548c\u51e0\u4f55\u5f62\u72b6\u6700\u4e3a\u591a\u6837\uff0c\u800c\u4e14\u4e0d\u540c\u6750\u6599\u7684\u76f8\u5173\u6a21\u677f\u53c2\u6570\u4e5f\u6709\u5f88\u5927\u5dee\u5f02\u3002\u787c\u7845\u73bb\u7483\u7684\u629b\u5149\u6761\u4ef6\u4e0e\u7845\u51e0\u4e4e\u76f8\u540c\u3002\u7194\u878d\u77f3\u82f1\u9700\u8981\u9178\u6027\u6d46\u6599\u548c\u8010\u5316\u5b66\u8f7d\u677f\u3002\u6c27\u5316\u94dd\u9676\u74f7\u7684\u786c\u5ea6\u51e0\u4e4e\u4e0e\u84dd\u5b9d\u77f3\u76f8\u540c\u3002\u6c2e\u5316\u94dd\u5177\u6709\u4e0d\u540c\u5bfb\u5e38\u7684\u70ed\u654f\u611f\u6027\u3002LTCC \u662f\u4e00\u79cd\u590d\u5408\u6750\u6599\uff0c\u5176\u629b\u5149\u52a8\u529b\u5b66\u5b8c\u5168\u4e0d\u540c\u3002\u9676\u74f7\u57fa\u677f\u7ecf\u5e38\u662f\u975e\u5706\u5f62\u7684\uff0c\u9700\u8981\u5b9a\u5236\u5de5\u4f5c\u5b54\u7684\u51e0\u4f55\u5f62\u72b6\uff0c\u800c\u4e0d\u662f\u6676\u5706\u6240\u7528\u7684\u6807\u51c6\u5706\u5b54\u3002.<\/p>\n\n  <p>\u73bb\u7483\u548c\u9676\u74f7\u57fa\u677f\u51e0\u4e4e\u603b\u662f\u5177\u6709\u975e\u6807\u51c6\u7684\u539a\u5ea6\u548c\u5c3a\u5bf8\u89c4\u683c\uff0c\u4e0e\u534a\u5bfc\u4f53\u6676\u7247\u6807\u51c6\u4e0d\u540c\uff0c\u56e0\u6b64\u4e0d\u53ef\u907f\u514d\u5730\u8981\u8fdb\u884c\u5b9a\u5236\u5de5\u5b54\u6df1\u5ea6\u8ba1\u7b97\u3002\u4e86\u89e3 <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-to-Specify-a-Polishing-Template-6-Parameters-Engineers-Must-Define\/\" target=\"_blank\" class=\"text-link-pill\">6 \u53c2\u6570\u89c4\u8303\u6d41\u7a0b<\/a> \u8fd9\u5bf9\u73bb\u7483\u548c\u9676\u74f7\u5e94\u7528\u5c24\u4e3a\u91cd\u8981\uff0c\u56e0\u4e3a\u6bcf\u4e2a\u8ba2\u5355\u90fd\u662f\u91cf\u8eab\u5b9a\u5236\u7684\u3002.<\/p>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 2 \u2550\u2550\u2550 -->\n  <h2 id=\"thickness-challenge\">\u975e\u6807\u51c6\u539a\u5ea6\u7684\u6311\u6218<\/h2>\n\n  <p>\u534a\u5bfc\u4f53\u7845\u6676\u7247\u6309\u7167 SEMI \u6807\u51c6\u89c4\u5b9a\u7684\u4e25\u683c\u6807\u51c6\u5316\u539a\u5ea6\u751f\u4ea7\uff1a200 \u6beb\u7c73\u6676\u7247\u7684\u539a\u5ea6\u4e3a 725 \u5fae\u7c73\uff0c300 \u6beb\u7c73\u6676\u7247\u7684\u539a\u5ea6\u4e3a 775 \u5fae\u7c73\uff0c\u539f\u751f\u6676\u7247\u7684\u8fdb\u6599\u539a\u5ea6\u516c\u5dee\u4e3a \u00b125 \u5fae\u7c73\u3002\u6709\u4e86\u8fd9\u4e9b\u6807\u51c6\uff0c\u5c31\u53ef\u4ee5\u6839\u636e\u4ea7\u54c1\u76ee\u5f55\u8bbe\u8ba1\u6a21\u677f\u5de5\u4f5c\u5b54\u6df1\u5ea6\uff0c\u53ea\u9700\u6839\u636e\u7279\u5b9a\u7684\u8f7d\u6a21\u5934\u548c\u629b\u5149\u6761\u4ef6\u7a0d\u4f5c\u8c03\u6574\u5373\u53ef\u3002.<\/p>\n\n  <p>\u73bb\u7483\u6676\u7247\u5e76\u4e0d\u662f\u6309\u7167\u8fd9\u4e9b\u6807\u51c6\u751f\u4ea7\u7684\u3002\u5b83\u4eec\u6765\u81ea\u4e0d\u540c\u7684\u4f9b\u5e94\u94fe--\u73bb\u7483\u5236\u9020\u5546\u6309\u7167\u5149\u5b66\u6216 MEMS \u89c4\u683c\u800c\u975e SEMI \u6807\u51c6\u751f\u4ea7--\u539a\u5ea6\u4ece 0.3 \u6beb\u7c73\u5230 2.0 \u6beb\u7c73\u4e0d\u7b49\uff0c\u8fdb\u6599\u516c\u5dee\u4e3a \u00b125 \u5fae\u7c73\u5230 \u00b1100 \u5fae\u7c73\uff0c\u5177\u4f53\u53d6\u51b3\u4e8e\u73bb\u7483\u7c7b\u578b\u548c\u5236\u9020\u5546\u3002\u9676\u74f7\u57fa\u677f\u7684\u53d8\u5316\u751a\u81f3\u66f4\u5927\uff1a\u7eff\u8272\u70e7\u7ed3\u9676\u74f7\u7684\u70e7\u7ed3\u540e\u539a\u5ea6\u53d8\u5316\u4e3a \u00b150-150 \u00b5m\uff0c\u5fc5\u987b\u5728\u6a21\u677f\u8bbe\u8ba1\u4e2d\u52a0\u4ee5\u8003\u8651\u3002.<\/p>\n\n  <p>\u56e0\u6b64\uff0c\u6bcf\u4e2a\u73bb\u7483\u548c\u9676\u74f7\u629b\u5149\u6a21\u677f\u5b9e\u9645\u4e0a\u90fd\u662f\u5b9a\u5236\u7684\u3002\u6ca1\u6709\u9002\u7528\u4e8e \u201c\u73bb\u7483\u6676\u7247 \u201d\u7684\u6807\u51c6\u5de5\u4f5c\u5b54\u6df1\u5ea6--\u6df1\u5ea6\u5fc5\u987b\u6839\u636e\u5165\u6599\u57fa\u677f\u539a\u5ea6\u3001\u76ee\u6807\u6700\u7ec8\u539a\u5ea6\u3001\u80cc\u886c\u57ab\u538b\u7f29\u4ee5\u53ca\u7279\u5b9a\u5e94\u7528\u7684\u5de5\u827a\u6761\u4ef6\u7684\u7ec4\u5408\u8fdb\u884c\u4e13\u95e8\u8ba1\u7b97\u3002\u8fd9\u4e0d\u662f\u4e00\u4e2a\u53ef\u4ee5\u7ed5\u8fc7\u7684\u590d\u6742\u95ee\u9898\uff1b\u8fd9\u662f\u8be5\u7c7b\u522b\u7684\u4e00\u4e2a\u57fa\u672c\u7279\u5f81\uff0c\u8981\u6c42\u5728\u8ba2\u8d2d\u6a21\u677f\u65f6\u63d0\u4f9b\u51c6\u786e\u7684\u57fa\u677f\u5c3a\u5bf8\u6570\u636e\u3002.<\/p>\n\n  <div class=\"callout warning\">\n    <span class=\"callout-icon\">\u26a0\ufe0f<\/span>\n    <div class=\"callout-body\">\n      <strong>\u8ba2\u8d2d\u65f6\u8bf7\u52a1\u5fc5\u63d0\u4f9b\u8fdb\u6599\u539a\u5ea6\u89c4\u683c<\/strong>\n      \u5bf9\u4e8e\u73bb\u7483\u548c\u9676\u74f7\u629b\u5149\u6a21\u677f\u800c\u8a00\uff0c\u8ba2\u8d27\u65f6\u9700\u8981\u63d0\u4f9b\u7684\u6700\u91cd\u8981\u7684\u4fe1\u606f\u5c31\u662f\u8fdb\u8d27\u57fa\u677f\u7684\u539a\u5ea6\uff1a\u6807\u79f0\u503c\u3001\u516c\u5dee\u548c\u6d4b\u91cf\u65b9\u6cd5\uff08\u603b\u539a\u5ea6\u53d8\u5316\u6216\u5355\u70b9\uff09\u3002\u6ca1\u6709\u8fd9\u4e9b\u6570\u636e\uff0c\u5c31\u65e0\u6cd5\u6b63\u786e\u6307\u5b9a\u5de5\u4f5c\u5b54\u6df1\u5ea6\u3002\u73bb\u7483\u6a21\u677f\u4e2d 20 \u00b5m \u7684\u5de5\u4f5c\u5b54\u6df1\u5ea6\u8bef\u5dee\uff08\u4f7f\u7528\u9519\u8bef\u7684\u6807\u79f0\u539a\u5ea6\u5f88\u5bb9\u6613\u9020\u6210\u8fd9\u79cd\u8bef\u5dee\uff09\u4f1a\u5728\u6574\u4e2a\u6676\u7247\u533a\u57df\u4ea7\u751f\u7cfb\u7edf TTV \u8bef\u5dee\uff0c\u800c\u8fd9\u79cd\u8bef\u5dee\u4ec5\u9760\u914d\u65b9\u8c03\u6574\u662f\u65e0\u6cd5\u7ea0\u6b63\u7684\u3002.\n    <\/div>\n  <\/div>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 3 \u2550\u2550\u2550 -->\n  <h2 id=\"work-hole-formula\">\u73bb\u7483\u548c\u9676\u74f7\u57fa\u5e95\u7684\u52a0\u5de5\u5b54\u6df1\u5ea6\u516c\u5f0f<\/h2>\n\n  <p>\u73bb\u7483\u548c\u9676\u74f7\u57fa\u5e95\u7684\u5de5\u5b54\u6df1\u5ea6\u8ba1\u7b97\u4e0e\u6240\u6709\u629b\u5149\u6a21\u677f\u7684\u57fa\u672c\u5173\u7cfb\u76f8\u540c\uff0c\u4f46\u8fd9\u4e9b\u57fa\u5e95\u7684\u539a\u5ea6\u53d8\u5316\u8f83\u5927\uff0c\u56e0\u6b64\u516c\u5f0f\u4e2d\u7684\u6bcf\u4e2a\u9879\u90fd\u66f4\u91cd\u8981\uff0c\u8ba1\u7b97\u9519\u8bef\u7684\u5f71\u54cd\u6bd4\u6807\u51c6\u5316\u7845\u6676\u5706\u66f4\u5927\u3002.<\/p>\n\n  <div class=\"thickness-diagram\">\n    <div class=\"td-title\">\u5de5\u4f5c\u5b54\u6df1\u5ea6\u8ba1\u7b97 - \u73bb\u7483\u548c\u9676\u74f7<\/div>\n    <div class=\"td-formula\">\n      <span class=\"term term-depth\">\u5de5\u4f5c\u5b54\u6df1\u5ea6<\/span>\n      <span class=\"td-eq\">=<\/span>\n      <span class=\"term term-final\">\u76ee\u6807\u6700\u7ec8\u539a\u5ea6<\/span>\n      <span class=\"td-eq\">+<\/span>\n      <span class=\"term term-comp\">\u57ab\u7247\u538b\u7f29\u504f\u79fb<\/span>\n      <span class=\"td-eq\">\u2212<\/span>\n      <span class=\"term term-over\">\u8fc7\u5ea6\u629b\u5149\u6d25\u8d34<\/span>\n    <\/div>\n    <div class=\"td-note\">\n      \u886c\u57ab\u538b\u7f29\u504f\u79fb\uff1a\u5728\u5de5\u827a\u538b\u529b\u4e0b\u6d78\u6ce1 10 \u5206\u949f\u540e\u6d4b\u91cf\u886c\u57ab\u539a\u5ea6\u635f\u5931--\u4e2d\u7b49\u786c\u5ea6\u886c\u57ab\u5728 3-5 psi \u6761\u4ef6\u4e0b\u901a\u5e38\u4e3a 5-20 \u00b5m\u3002.<br>\n      \u8fc7\u629b\u5149\u9884\u7559\u91cf\uff1a\u4e3a\u8fbe\u5230\u8868\u9762\u8d28\u91cf\u89c4\u683c\u800c\u53bb\u9664\u7684\u8d85\u8fc7\u76ee\u6807\u539a\u5ea6\u7684\u6750\u6599\u91cf--\u73bb\u7483\u6700\u7ec8\u629b\u5149\u7684\u9884\u7559\u91cf\u901a\u5e38\u4e3a 0-5 \u5fae\u7c73\u3002.\n    <\/div>\n  <\/div>\n\n  <h3>\u5b9e\u9645\u8ba1\u7b97\u793a\u4f8b<\/h3>\n  <p>\u8003\u8651\u4e00\u4e2a 150 \u6beb\u7c73\u7684\u787c\u7845\u73bb\u7483\u6676\u7247\uff0c\u8fdb\u6599\u6807\u79f0\u539a\u5ea6\u4e3a 700 \u5fae\u7c73\uff08\u516c\u5dee\u4e3a \u00b150 \u5fae\u7c73\uff09\uff0c\u76ee\u6807\u6700\u7ec8\u539a\u5ea6\u4e3a 500 \u5fae\u7c73\uff0c\u80cc\u57ab\u5728 3 \u78c5\/\u5e73\u65b9\u82f1\u5bf8\u538b\u529b\u4e0b\u7684\u538b\u7f29\u91cf\u4e3a 12 \u5fae\u7c73\uff0c\u8868\u9762\u629b\u5149\u7684\u8fc7\u629b\u5149\u4f59\u91cf\u4e3a 3 \u5fae\u7c73\uff1a<\/p>\n\n  <p><strong>\u5de5\u4f5c\u5b54\u6df1\u5ea6 = 500 + 12 - 3 = 509 \u00b5m<\/strong><\/p>\n\n  <p>\u8fdb\u6599\u539a\u5ea6 700 \u5fae\u7c73\u95f4\u63a5\u8fdb\u5165\u8ba1\u7b97\uff1a\u629b\u5149\u914d\u65b9\u53bb\u9664 700 - 500 = 200 \u5fae\u7c73\u7684\u6750\u6599\u3002509 \u5fae\u7c73\u7684\u6a21\u677f\u5de5\u4f5c\u5b54\u6df1\u5ea6\u53ef\u786e\u4fdd\u6676\u7247\u76f8\u5bf9\u4e8e\u629b\u5149\u57ab\u7684\u673a\u68b0\u4f4d\u7f6e\u6b63\u786e\uff0c\u4ee5\u8fbe\u5230\u6700\u7ec8 500 \u5fae\u7c73\u7684\u76ee\u6807\u539a\u5ea6\u3002\u00b150\u5fae\u7c73\u7684\u8fdb\u6599\u539a\u5ea6\u516c\u5dee\u610f\u5473\u7740\u5fc5\u987b\u8ddf\u8e2a\u6279\u6b21\u4e0e\u6279\u6b21\u4e4b\u95f4\u7684\u539a\u5ea6\u53d8\u5316--\u5982\u679c\u8fdb\u6599\u6279\u6b21\u540d\u4e49\u4e0a\u6bd4\u89c4\u683c\uff08670\u5fae\u7c73\uff09\u858430\u5fae\u7c73\uff0c\u5219\u540c\u4e00\u6a21\u677f\u5c06\u53ea\u53bb\u9664161\u5fae\u7c73\u800c\u4e0d\u662f200\u5fae\u7c73\uff0c\u4ee5\u8fbe\u5230509\u5fae\u7c73\u7684\u673a\u68b0\u6b62\u70b9\uff0c\u8fd9\u5c31\u9700\u8981\u8c03\u6574\u914d\u65b9\u65f6\u95f4\u6765\u8fdb\u884c\u8865\u507f\u3002.<\/p>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 4 \u2014 Borosilicate \u2550\u2550\u2550 -->\n  <h2 id=\"borosilicate\">\u787c\u7845\u73bb\u7483\u6676\u7247<\/h2>\n\n  <div class=\"sub-block\">\n    <div class=\"sub-block-head glass-head\">\n      <h3>\u787c\u7845\u73bb\u7483\uff08\u5982 Schott D263\u3001Corning 7740 \/ Pyrex\uff09<\/h3>\n      <div class=\"sub-apps\">\u5e94\u7528\uff1a\u5fae\u673a\u7535\u7cfb\u7edf\uff08MEMS\uff09\u57fa\u677f\u3001\u5fae\u6d41\u4f53\u3001\u6676\u5706\u7ea7\u5c01\u88c5\u3001\u7a7f\u900f\u73bb\u7483\u901a\u5b54\uff08TGV\uff09\u57fa\u677f<\/div>\n    <\/div>\n    <div class=\"sub-block-body\">\n\n      <div class=\"prop-grid\">\n        <div class=\"prop-item\"><div class=\"prop-label\">\u83ab\u6c0f\u786c\u5ea6<\/div><div class=\"prop-value\">~6.0<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u65ad\u88c2\u97e7\u6027<\/div><div class=\"prop-value caution\">0.7-0.9 MPa-m\u00bd<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">CTE<\/div><div class=\"prop-value\">3.3-4.0 \u00d7 10-\u2076\/\u00b0C<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u5178\u578b\u539a\u5ea6\u8303\u56f4<\/div><div class=\"prop-value caution\">0.3-1.1 \u6beb\u7c73\uff08\u975e\u6807\u51c6\uff09<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u4f20\u5165\u7684\u5178\u578b TTV<\/div><div class=\"prop-value caution\">\u00b125-50 \u5fae\u7c73<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u629b\u5149\u6d46 pH \u503c<\/div><div class=\"prop-value ok\">9-12\uff08\u78b1\u6027\u7845\uff09<\/div><\/div>\n      <\/div>\n\n      <p>\u4ece\u6a21\u677f\u8bbe\u8ba1\u7684\u89d2\u5ea6\u6765\u770b\uff0c\u787c\u7845\u73bb\u7483\u662f\u73bb\u7483\/\u9676\u74f7\u57fa\u677f\u4e2d\u6700\u5bbd\u677e\u7684\u4e00\u79cd\u3002\u5b83\u7684\u786c\u5ea6\u4e0e\u7845\u76f8\u5f53\uff0c\u65ad\u88c2\u97e7\u6027\u4e0e\u7845\u539f\u7247\u76f8\u4f3c\uff0c\u5176\u4e3b\u8981\u629b\u5149\u6d46\u6599\uff08pH \u503c\u4e3a 9-12 \u7684\u78b1\u6027\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\uff09\u5728\u4e2d\u7b49\u5faa\u73af\u6b21\u6570\u4e0b\u4e0e FR-4 \u8f7d\u677f\u517c\u5bb9\uff0c\u5728\u957f\u65f6\u95f4\u751f\u4ea7\u4e2d\u4e0e G-10 \u548c CXT \u5b8c\u5168\u517c\u5bb9\u3002.<\/p>\n\n      <p>\u787c\u7845\u73bb\u7483\u5728\u6a21\u677f\u5de5\u7a0b\u65b9\u9762\u9762\u4e34\u7684\u4e3b\u8981\u6311\u6218\u4e0d\u662f\u5316\u5b66\u6216\u65ad\u88c2\u98ce\u9669\uff0c\u800c\u662f <strong>\u539a\u5ea6\u591a\u6837\u6027<\/strong>. .\u7528\u4e8e MEMS \u5e94\u7528\u7684\u787c\u7845\u73bb\u7483\u6676\u7247\u539a\u5ea6\u4ece 300 \u5fae\u7c73\uff08\u7528\u4e8e\u51cf\u8584\u57fa\u677f\uff09\u5230 1,100 \u5fae\u7c73\uff08\u7528\u4e8e\u521a\u6027\u8f7d\u4f53\u5e94\u7528\uff09\u4e0d\u7b49\uff0c\u800c\u534a\u5bfc\u4f53\u6676\u7247\u7684\u5178\u578b\u539a\u5ea6\u8303\u56f4\u4e3a 625-775 \u5fae\u7c73\u3002\u6bcf\u79cd\u539a\u5ea6\u90fd\u9700\u8981\u5b9a\u5236\u5de5\u5b54\u6df1\u5ea6\u8ba1\u7b97\u3002\u6b64\u5916\uff0c\u76f4\u901a\u73bb\u7483\u901a\u5b54 (TGV) \u57fa\u677f\u901a\u5e38\u5177\u6709\u6307\u5b9a\u7684\u76ee\u6807\u629b\u5149\u540e\u539a\u5ea6\uff0c\u516c\u5dee\u4e3a \u00b15 \u00b5m\uff0c\u4ee5\u63a7\u5236\u901a\u5b54\u6df1\u5ea6 - \u8fd9\u79cd\u5e73\u9762\u5ea6\u8981\u6c42\u4e0e\u5148\u8fdb\u534a\u5bfc\u4f53\u5e94\u7528\u7684\u5de5\u4f5c\u5b54\u6df1\u5ea6\u7cbe\u5ea6\u76f8\u540c\u3002.<\/p>\n\n      <div class=\"spec-mini\">\n        <div class=\"spec-mini-title title-glass\">\u787c\u7845\u73bb\u7483 - \u6a21\u677f\u89c4\u683c\u6982\u8981<\/div>\n        <div class=\"spec-mini-grid\">\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u8f7d\u4f53\u6750\u6599<\/div><div class=\"sv\">FR-4\uff08\u4ec5\u9650\u78b1\u6027\uff09\/ G-10<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5e95\u57ab\u90b5\u6c0f A<\/div><div class=\"sv\">55-70<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5de5\u827a\u538b\u529b<\/div><div class=\"sv\">2-4 psi<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5de5\u5b54\u95f4\u9699<\/div><div class=\"sv\">0.30-0.50 \u6beb\u7c73<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5efa\u8bae\u4f7f\u7528 EER\uff1f<\/div><div class=\"sv\">\u662f\uff0cEE &lt; 3 \u6beb\u7c73<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u6ce5\u6d46 pH \u5bb9\u9650<\/div><div class=\"sv\">8-12 (fr-4) \/ 6-12 (g-10)<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u6309\u952e\u81ea\u5b9a\u4e49\u8f93\u5165<\/div><div class=\"sv\">\u8f93\u5165\u539a\u5ea6 \u00b1 \u516c\u5dee<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5178\u578b\u5faa\u73af\u5bff\u547d<\/div><div class=\"sv\">100-200 \u4e2a\u5faa\u73af<\/div><\/div>\n        <\/div>\n      <\/div>\n\n    <\/div>\n  <\/div>\n\n  <!-- \u2550\u2550\u2550 SECTION 5 \u2014 Fused Silica \u2550\u2550\u2550 -->\n  <h2 id=\"fused-silica\">\u7194\u878d\u77f3\u82f1\u6676\u7247<\/h2>\n\n  <div class=\"sub-block\">\n    <div class=\"sub-block-head fused-head\">\n      <h3>\u7194\u878d\u77f3\u82f1\/\u7194\u878d\u77f3\u82f1\uff08\u65e0\u5b9a\u5f62\u4e8c\u6c27\u5316\u7845\uff09<\/h3>\n      <div class=\"sub-apps\">\u5e94\u7528\uff1a\u5149\u63a9\u819c\u576f\u6599\u3001\u7d2b\u5916\u7ebf\u5149\u5b66\u5143\u4ef6\u3001EUV \u5149\u523b\u5143\u4ef6\u3001\u7cbe\u5bc6\u5149\u5b66\u7a97\u53e3\u3001\u534a\u5bfc\u4f53\u5236\u7a0b\u5ba4<\/div>\n    <\/div>\n    <div class=\"sub-block-body\">\n\n      <div class=\"prop-grid\">\n        <div class=\"prop-item\"><div class=\"prop-label\">\u83ab\u6c0f\u786c\u5ea6<\/div><div class=\"prop-value\">~7.0<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u65ad\u88c2\u97e7\u6027<\/div><div class=\"prop-value caution\">0.75 MPa-m\u00bd<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">CTE<\/div><div class=\"prop-value ok\">0.55 \u00d7 10-\u2076\/\u00b0C\uff08\u975e\u5e38\u4f4e\uff09<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u5178\u578b\u539a\u5ea6\u8303\u56f4<\/div><div class=\"prop-value caution\">3-10 \u6beb\u7c73\uff08\u5149\u63a9\u819c\uff09<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u8868\u9762\u7c97\u7cd9\u5ea6\u76ee\u6807<\/div><div class=\"prop-value\">Ra &lt; 0.1 \u7eb3\u7c73\uff08\u5149\u63a9\u819c\uff09<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u629b\u5149\u6d46 pH \u503c<\/div><div class=\"prop-value caution\">4-8 (CeO\u2082 \/ SiO\u2082)<\/div><\/div>\n      <\/div>\n\n      <p>\u4e0e\u787c\u7845\u73bb\u7483\u76f8\u6bd4\uff0c\u7194\u878d\u77f3\u82f1\u9762\u4e34\u7740\u4e00\u7cfb\u5217\u4e0d\u540c\u7684\u6a21\u677f\u6311\u6218\u3002\u5176\u6781\u4f4e\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\uff080.55 \u00d7 10-\u2076\/\u00b0C\uff0c\u800c\u787c\u7845\u73bb\u7483\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u4e3a 3.3 \u00d7 10-\u2076\/\u00b0C\uff09\u4f7f\u5176\u5177\u6709\u8d85\u9ad8\u7684\u5c3a\u5bf8\u7a33\u5b9a\u6027--\u8fd9\u6b63\u662f\u5b83\u88ab\u7528\u4e8e\u5149\u63a9\u819c\u576f\u6599\u548c EUV \u5149\u523b\u5143\u4ef6\u7684\u539f\u56e0\uff0c\u5728\u8fd9\u4e9b\u5143\u4ef6\u4e2d\uff0c\u5fc5\u987b\u5728\u70ed\u5faa\u73af\u8fc7\u7a0b\u4e2d\u4fdd\u6301\u4e9a\u7eb3\u7c73\u7ea7\u7684\u5e73\u9762\u5ea6\u3002\u8fd9\u79cd\u4f4e CTE \u8fd8\u610f\u5473\u7740\u7194\u878d\u77f3\u82f1\u57fa\u5e95\u5bf9\u629b\u5149\u8fc7\u7a0b\u4e2d\u7684\u70ed\u5e94\u529b\u6781\u4e3a\u654f\u611f\uff1a\u629b\u5149\u8fc7\u7a0b\u4e2d\u57fa\u5e95\u4e0a\u7684\u4efb\u4f55\u6e29\u5ea6\u68af\u5ea6\u90fd\u4f1a\u4ea7\u751f\u4e0d\u540c\u7684\u81a8\u80c0\u5e94\u529b\uff0c\u8fd9\u79cd\u5e94\u529b\u4f1a\u5728\u5c40\u90e8\u8d85\u8fc7\u65ad\u88c2\u97e7\u6027\uff0c\u4ea7\u751f\u8089\u773c\u65e0\u6cd5\u770b\u5230\u7684\u8868\u9762\u4e0b\u88c2\u7eb9\uff0c\u4f46\u5728\u629b\u5149\u540e\u7684\u5e72\u6d89\u5e73\u9762\u5ea6\u6d4b\u91cf\u4e2d\u53ef\u4ee5\u68c0\u6d4b\u5230\u3002.<\/p>\n\n      <p>\u7194\u878d\u77f3\u82f1\u629b\u5149--\u7279\u522b\u662f\u5149\u63a9\u819c\u576f\u6599\u5e94\u7528--\u4f7f\u7528\u6c27\u5316\u94c8 (CeO\u2082) \u6d46\u6599\u6216\u6df7\u5408 CeO\u2082\/SiO\u2082 \u6d46\u6599\uff0cpH \u503c\u4e3a\u5f31\u9178\u6027\u81f3\u63a5\u8fd1\u4e2d\u6027\uff084-7\uff09\u3002\u8fd9\u4e00 pH \u503c\u8303\u56f4\u5bf9\u4e8e\u957f\u671f\u751f\u4ea7\u4e2d\u4f7f\u7528\u7684 FR-4 \u8f7d\u677f\u6765\u8bf4\u662f\u5fae\u4e0d\u8db3\u9053\u7684\uff0c\u6700\u4f4e\u8981\u6c42\u4e3a G-10\u3002\u5149\u63a9\u819c\u576f\u629b\u5149\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\u76ee\u6807\uff08Ra &lt; 0.1 nm\uff0c\u4e0e\u7845\u539f\u7247\u89c4\u683c\u76f8\u5f53\uff09\u5bf9\u6a21\u677f\u5e73\u9762\u5ea6\u7684\u8981\u6c42\u4e0e\u5148\u8fdb\u7684\u534a\u5bfc\u4f53 CMP \u76f8\u540c\u3002\u4e3a\u6ee1\u8db3\u8fd9\u4e9b\u8868\u9762\u89c4\u683c\u8981\u6c42\uff0c\u5de5\u5b54\u6df1\u5ea6\u7cbe\u5ea6\u4e3a \u00b13 \u00b5m\uff0c\u8f7d\u677f\u5f13\u5ea6\u4e3a \u22645 \u00b5m\u3002.<\/p>\n\n      <div class=\"callout info\">\n        <span class=\"callout-icon\">\u2139\ufe0f<\/span>\n        <div class=\"callout-body\">\n          <strong>\u5149\u63a9\u819c\u576f\u539a\u5ea6\uff1a\u975e\u6807\u51c6\u8bbe\u8ba1<\/strong>\n          \u6807\u51c6\u5149\u63a9\u819c\u576f\u6599\u4e3a 6025 \u683c\u5f0f\uff1a152.4 \u00d7 152.4 \u6beb\u7c73 \u00d7 6.35 \u6beb\u7c73\u539a\u3002\u8fd9\u4e2a 6.35 \u6beb\u7c73\uff08\u00bc \u82f1\u5bf8\uff09\u7684\u539a\u5ea6\u8fdc\u6bd4\u4efb\u4f55\u534a\u5bfc\u4f53\u6676\u7247\u539a\uff0c\u5e76\u4e14\u9700\u8981\u5de5\u4f5c\u5b54\u6df1\u5ea6\u89c4\u683c\uff0c\u800c\u6807\u51c6\u534a\u5bfc\u4f53\u629b\u5149\u6a21\u677f\u65e0\u6cd5\u63d0\u4f9b\u8fd9\u79cd\u89c4\u683c\u3002\u5149\u63a9\u819c\u576f\u629b\u5149\u6a21\u677f\u4e13\u4e3a\u8fd9\u79cd\u5f62\u5f0f\u800c\u8bbe\u8ba1\uff0c\u5177\u6709\u8f83\u6df1\u7684\u5de5\u4f5c\u5b54\u548c\u8f83\u786c\u7684\u886c\u57ab\uff0c\u9002\u5408\u629b\u5149\u8d1f\u8f7d\u4e0b\u8f83\u5927\u7684\u57fa\u5e95\u8d28\u91cf\u3002.\n        <\/div>\n      <\/div>\n\n      <div class=\"spec-mini\">\n        <div class=\"spec-mini-title title-fused\">\u7194\u878d\u77f3\u82f1 - \u6a21\u677f\u89c4\u683c\u6982\u8981<\/div>\n        <div class=\"spec-mini-grid\">\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u8f7d\u4f53\u6750\u6599<\/div><div class=\"sv\">G-10 \u6216 CXT<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5e95\u57ab\u90b5\u6c0f A<\/div><div class=\"sv\">60-75<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5de5\u827a\u538b\u529b<\/div><div class=\"sv\">1.5-4 psi<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u627f\u8f7d\u677f\u5f13<\/div><div class=\"sv\">\u2264 5 \u00b5m\uff08\u5149\u63a9\u819c\u7ea7\uff09<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5de5\u5b54\u6df1\u5ea6\u8303\u56f4.<\/div><div class=\"sv\">\u00b1 3 \u5fae\u7c73<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u6ce5\u6d46 pH \u5bb9\u9650<\/div><div class=\"sv\">4-8<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u6e29\u5ea6\u654f\u611f\u6027<\/div><div class=\"sv\">\u9ad8 - \u57ab\u5b50\u63a7\u5236\u81f3\u5173\u91cd\u8981<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5178\u578b\u5faa\u73af\u5bff\u547d<\/div><div class=\"sv\">80-150 \u4e2a\u5faa\u73af<\/div><\/div>\n        <\/div>\n      <\/div>\n\n    <\/div>\n  <\/div>\n\n  <!-- \u2550\u2550\u2550 SECTION 6 \u2014 Alumina \u2550\u2550\u2550 -->\n  <h2 id=\"alumina\">\u6c27\u5316\u94dd\uff08Al\u2082O\u2083\uff09\u9676\u74f7\u57fa\u677f<\/h2>\n\n  <div class=\"sub-block\">\n    <div class=\"sub-block-head ceramic-head\">\n      <h3>\u6c27\u5316\u94dd\u9676\u74f7\uff0896-99.6% Al\u2082O\u2083)<\/h3>\n      <div class=\"sub-apps\">\u5e94\u7528\uff1a\u7535\u6e90\u6a21\u5757\u57fa\u677f\u3001\u5fae\u6ce2\u7535\u8def\u677f\u3001LED \u5c01\u88c5\u3001\u539a\u819c\u6df7\u5408\u7535\u8def\u3001\u4f20\u611f\u5668\u5916\u58f3<\/div>\n    <\/div>\n    <div class=\"sub-block-body\">\n\n      <div class=\"prop-grid\">\n        <div class=\"prop-item\"><div class=\"prop-label\">\u83ab\u6c0f\u786c\u5ea6<\/div><div class=\"prop-value danger\">9.0\uff08\u4e0e\u84dd\u5b9d\u77f3\u76f8\u540c\uff09<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u65ad\u88c2\u97e7\u6027<\/div><div class=\"prop-value caution\">3-4 MPa-m\u00bd<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">CTE<\/div><div class=\"prop-value\">6.5-8.0 \u00d7 10-\u2076\/\u00b0C<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u5178\u578b\u5c3a\u5bf8<\/div><div class=\"prop-value caution\">25\u00d725 \u6beb\u7c73\u81f3 100\u00d7100 \u6beb\u7c73<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u70e7\u7ed3\u540e TTV<\/div><div class=\"prop-value danger\">\u00b150-150\u5fae\u7c73\uff08\u5bbd\uff09<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u629b\u5149\u6ce5\u6d46<\/div><div class=\"prop-value caution\">\u91d1\u521a\u77f3\uff0cpH \u503c 4-8<\/div><\/div>\n      <\/div>\n\n      <p>\u6c27\u5316\u94dd\u9676\u74f7\u57fa\u677f\u662f\u7535\u5b50\u57fa\u677f\u5e02\u573a\u4e0a\u5e38\u89c4\u629b\u5149\u7684\u6700\u786c\u6750\u6599\u4e4b\u4e00\uff0c\u83ab\u6c0f\u786c\u5ea6\u4e3a 9.0\uff0c\u4e0e\u84dd\u5b9d\u77f3\u76f8\u5f53\uff0c\u53ea\u6709\u78b3\u5316\u7845\u548c\u91d1\u521a\u77f3\u8d85\u8fc7\u5b83\u3002\u8fd9\u79cd\u786c\u5ea6\u5bf9\u6a21\u677f\u89c4\u683c\u6709\u76f4\u63a5\u5f71\u54cd\uff1a\u80cc\u57ab\u786c\u5ea6\u5fc5\u987b\u8db3\u591f\u9ad8\uff0c\u624d\u80fd\u5728\u91d1\u521a\u77f3\u7814\u78e8\u6d46\u8fbe\u5230\u53ef\u63a5\u53d7\u7684\u53bb\u9664\u7387\u6240\u9700\u7684\u8f83\u9ad8\u5de5\u827a\u538b\u529b\uff083-6 psi\uff09\u4e0b\u4fdd\u6301\u538b\u529b\u5747\u5300\u6027\uff0c\u800c\u8f7d\u677f\u6750\u6599\u5fc5\u987b\u80fd\u8010\u53d7 FR-4 \u4e0d\u80fd\u8010\u53d7\u7684\u9178\u6027\u91d1\u521a\u77f3\u7814\u78e8\u6d46\u5316\u5b66\u8150\u8680\u3002.<\/p>\n\n      <p>\u6c27\u5316\u94dd\u9676\u74f7\u70e7\u7ed3\u540e\u7684\u539a\u5ea6\u53d8\u5316\u76f8\u5bf9\u8f83\u5927\uff0c\u6807\u51c6\u7ea7\u57fa\u5e95\u7684\u5178\u578b\u539a\u5ea6\u4e3a \u00b150-150 \u00b5m\uff0c\u800c\u534a\u5bfc\u4f53\u57fa\u5e95\u6676\u7247\u7684\u539a\u5ea6\u53d8\u5316\u4ec5\u4e3a \u00b15-10 \u00b5m\u3002\u8fd9\u79cd\u53d8\u5316\u5fc5\u987b\u8fdb\u884c\u6d4b\u91cf\uff0c\u5e76\u5728\u5de5\u5b54\u6df1\u5ea6\u89c4\u683c\u4e2d\u52a0\u4ee5\u8003\u8651\u3002\u8bb8\u591a\u6c27\u5316\u94dd\u629b\u5149\u5e94\u7528\u8981\u6c42\u629b\u5149\u540e\u7684\u76ee\u6807 TTV \u226410-20 \u00b5m\uff0c\u800c\u8fd9\u53ea\u6709\u5728\u6a21\u677f\u5de5\u4f5c\u5b54\u6df1\u5ea6\u4e0e\u5b9e\u9645\u8fdb\u5165\u7684\u57fa\u5e95\u539a\u5ea6\u5206\u5e03\u6b63\u786e\u5339\u914d\u7684\u60c5\u51b5\u4e0b\u624d\u80fd\u5b9e\u73b0\u3002\u4f7f\u7528\u6807\u79f0\u5de5\u4f5c\u5b54\u6df1\u5ea6\u800c\u4e0d\u9488\u5bf9\u6279\u6b21\u8fdb\u884c\u539a\u5ea6\u8c03\u6574\uff0c\u4f1a\u4ea7\u751f\u4e0e\u6279\u6b21\u5185\u539a\u5ea6\u53d8\u5316\u76f8\u5173\u7684\u7cfb\u7edf TTV \u6a21\u5f0f\u3002.<\/p>\n\n      <p>\u6c27\u5316\u94dd\u57fa\u677f\u8fd8\u7ecf\u5e38\u5177\u6709 <strong>\u975e\u5706\u51e0\u4f55\u5f62\u72b6<\/strong> - \u6b63\u65b9\u5f62\u3001\u957f\u65b9\u5f62\u548c\u81ea\u5b9a\u4e49\u5f62\u72b6 - \u9700\u8981\u81ea\u5b9a\u4e49\u5de5\u4f5c\u5b54\u5f62\u72b6\uff0c\u800c\u4e0d\u662f\u5706\u5f62\u53e3\u888b\u3002\u7b2c 9 \u8282\u5bf9\u6b64\u6709\u8be6\u7ec6\u4ecb\u7ecd\u3002.<\/p>\n\n      <div class=\"spec-mini\">\n        <div class=\"spec-mini-title title-ceramic\">\u6c27\u5316\u94dd\u9676\u74f7 - \u6a21\u677f\u89c4\u683c\u6982\u8981<\/div>\n        <div class=\"spec-mini-grid\">\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u8f7d\u4f53\u6750\u6599<\/div><div class=\"sv\">G-10 \u6216 CXT<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5e95\u57ab\u90b5\u6c0f A<\/div><div class=\"sv\">65-80<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5de5\u827a\u538b\u529b<\/div><div class=\"sv\">3-6 psi<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5de5\u4f5c\u5b54\u5f62\u72b6<\/div><div class=\"sv\">\u81ea\u5b9a\u4e49\uff08\u901a\u5e38\u4e3a\u975e\u5706\u5f62\uff09<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u70e7\u7ed3\u540e TTV \u8f93\u5165<\/div><div class=\"sv\">\u8ba2\u8d2d\u65f6\u9700\u8981<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u6ce5\u6d46 pH \u5bb9\u9650<\/div><div class=\"sv\">4-9<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5efa\u8bae\u4f7f\u7528 EER\uff1f<\/div><div class=\"sv\">\u662f\uff0c\u5982\u679c\u662f\u5706\u5f62\u57fa\u8d28<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5178\u578b\u5faa\u73af\u5bff\u547d<\/div><div class=\"sv\">60-120 \u4e2a\u5468\u671f<\/div><\/div>\n        <\/div>\n      <\/div>\n\n    <\/div>\n  <\/div>\n\n  <!-- \u2550\u2550\u2550 SECTION 7 \u2014 AlN \u2550\u2550\u2550 -->\n  <h2 id=\"aln\">\u6c2e\u5316\u94dd\uff08AlN\uff09\u57fa\u677f<\/h2>\n\n  <div class=\"sub-block\">\n    <div class=\"sub-block-head aln-head\">\n      <h3>\u6c2e\u5316\u94dd\uff08AlN\uff09<\/h3>\n      <div class=\"sub-apps\">\u5e94\u7528\uff1a\u5927\u529f\u7387 LED \u5c01\u88c5\u3001\u5c04\u9891\u529f\u7387\u653e\u5927\u5668\u57fa\u677f\u3001\u6fc0\u5149\u4e8c\u6781\u7ba1\u6563\u70ed\u5668\u3001SiC \u529f\u7387\u6a21\u5757\u8f7d\u4f53<\/div>\n    <\/div>\n    <div class=\"sub-block-body\">\n\n      <div class=\"prop-grid\">\n        <div class=\"prop-item\"><div class=\"prop-label\">\u83ab\u6c0f\u786c\u5ea6<\/div><div class=\"prop-value caution\">~7.0<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u5bfc\u70ed\u6027<\/div><div class=\"prop-value ok\">170-230 W\/m-K\uff08\u975e\u5e38\u9ad8\uff09<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u65ad\u88c2\u97e7\u6027<\/div><div class=\"prop-value caution\">2.5-3.5 MPa-m\u00bd<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">CTE<\/div><div class=\"prop-value ok\">4.5 \u00d7 10-\u2076\/\u00b0C<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u6c34\u89e3\u654f\u611f\u6027<\/div><div class=\"prop-value danger\">\u9ad8 - \u4e0e\u6c34\u53cd\u5e94<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u629b\u5149\u6ce5\u6d46<\/div><div class=\"prop-value caution\">\u975e\u6c34\u6216\u4f4e\u6c34<\/div><\/div>\n      <\/div>\n\n      <p>\u9009\u62e9\u6c2e\u5316\u94dd\u662f\u56e0\u4e3a\u5b83\u5177\u6709\u4f18\u5f02\u7684\u70ed\u4f20\u5bfc\u6027--170-230 W\/m-K \u7684\u70ed\u4f20\u5bfc\u6027\u662f\u6240\u6709\u5b9e\u7528\u7535\u5b50\u57fa\u5e95\u4e2d\u6700\u9ad8\u7684--\u8fd9\u4f7f\u5b83\u6210\u4e3a\u5927\u529f\u7387 LED \u5c01\u88c5\u548c\u5c04\u9891\u529f\u7387\u653e\u5927\u5668\u7684\u5fc5\u9700\u54c1\uff0c\u56e0\u4e3a\u6563\u70ed\u662f\u8bbe\u8ba1\u7684\u4e3b\u8981\u9650\u5236\u56e0\u7d20\u3002\u7531\u4e8e\u5176\u5173\u952e\u7684\u5316\u5b66\u7279\u6027\uff0c\u5b83\u7684\u629b\u5149\u8981\u6c42\u4e0e\u672c\u6307\u5357\u4e2d\u7684\u4efb\u4f55\u5176\u4ed6\u57fa\u5e95\u90fd\u4e0d\u540c\uff1aAlN \u4e0e\u6c34\u53d1\u751f\u6c34\u89e3\u53cd\u5e94 <em>AlN + 3H\u2082O \u2192 Al(OH)\u2083 + NH\u2083<\/em> - \u5728\u4efb\u4f55\u6c34\u6027\u629b\u5149\u73af\u5883\u4e2d\u90fd\u4f1a\u4ea7\u751f\u6c28\u6c14\u5e76\u6d88\u8017\u57fa\u6750\u8868\u9762\u3002\u8fd9\u79cd\u6c34\u89e3\u53cd\u5e94\u5e76\u4e0d\u662f\u4e00\u79cd\u7f13\u6162\u7684\u8150\u8680\u8fc7\u7a0b\uff1b\u5728\u5ba4\u6e29\u4e0b\u7684\u6807\u51c6\u6c34\u6d46\u4e2d\uff0c\u5b83\u7684\u901f\u5ea6\u8db3\u4ee5\u5728\u51e0\u5206\u949f\u5185\u9020\u6210\u53ef\u6d4b\u91cf\u7684\u8868\u9762\u635f\u4f24\u3002.<\/p>\n\n      <p>\u56e0\u6b64\uff0cAlN \u629b\u5149\u9700\u8981 <strong>\u975e\u6c34\u6027\u629b\u5149\u4ecb\u8d28<\/strong> (\u6709\u673a\u6eb6\u5242\u578b\u91d1\u521a\u77f3\u60ac\u6d6e\u6db2\uff09\u6216 <strong>\u949d\u5316\u6c34\u6d46<\/strong> \u5728\u8fdb\u884c pH \u503c\u8c03\u8282\u548c\u6291\u5236\u5242\u5316\u5b66\u5904\u7406\u65f6\uff0c\u5e94\u5c3d\u91cf\u51cf\u5c11\u57fa\u6750\u8868\u9762\u7684\u6c34\u6d3b\u6027\u3002\u8fd9\u79cd\u5316\u5b66\u8981\u6c42\u51b3\u5b9a\u4e86\u8f7d\u677f\u6750\u6599\uff1a\u6807\u51c6\u7684\u6c34\u6027\u6d46\u6599\u6291\u5236\u5242\u7cfb\u7edf\u901a\u5e38\u4f7f\u7528 pH \u503c\u4e3a 4-6 \u7684\u6709\u673a\u9178\u949d\u5316\u5242\uff0c\u8fd9\u4e0e FR-4 \u4e0d\u517c\u5bb9\u3002\u975e\u6c34\u6027\u629b\u5149\u4ecb\u8d28\u53ef\u80fd\u4e0e G-10 \u517c\u5bb9\uff0c\u4f46\u9700\u8981\u9a8c\u8bc1\uff1b\u65e0\u8bba\u5177\u4f53\u7684\u6d46\u6599\u5316\u5b66\u6027\u8d28\u5982\u4f55\uff0cCXT \u7ea7\u90fd\u662f\u751f\u4ea7 AlN \u629b\u5149\u7684\u5b89\u5168\u9009\u62e9\u3002.<\/p>\n\n      <p>\u9488\u5bf9 AlN \u7684\u6a21\u677f\u8bbe\u8ba1\u8fd8\u53ef\u4ece\u6700\u5927\u9650\u5ea6\u5730\u7f29\u77ed\u57fa\u5e95\u5728\u629b\u5149\u540e\u7684\u6da6\u6e7f\u65f6\u95f4\u4e2d\u83b7\u76ca\u3002AlN \u629b\u5149\u6a21\u677f\u5e94\u6307\u5b9a\u91c7\u7528\u5149\u6ed1\u3001\u65e0\u5b54\u7684\u8f7d\u677f\u8868\u9762\uff08CXT \u7b26\u5408\u8fd9\u4e00\u8981\u6c42\uff1bG-10 \u56e0\u66b4\u9732\u7684\u7ea4\u7ef4\u800c\u5177\u6709\u7a0d\u9ad8\u7684\u8868\u9762\u5b54\u9699\u7387\uff09\uff0c\u4ee5\u5c3d\u91cf\u51cf\u5c11\u6a21\u677f\u8868\u9762\u7684\u6d46\u6599\u6ede\u7559\uff0c\u4ece\u800c\u5ef6\u957f\u629b\u5149\u5468\u671f\u7ed3\u675f\u540e AlN \u7684\u6c34\u89e3\u66b4\u9732\u65f6\u95f4\u3002.<\/p>\n\n      <div class=\"spec-mini\">\n        <div class=\"spec-mini-title title-aln\">\u6c2e\u5316\u94dd\u57fa\u677f - \u6a21\u677f\u89c4\u683c\u6982\u8981<\/div>\n        <div class=\"spec-mini-grid\">\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u8f7d\u4f53\u6750\u6599<\/div><div class=\"sv\">CXT\uff08\u5f3a\u70c8\u63a8\u8350\uff09<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5e95\u57ab\u90b5\u6c0f A<\/div><div class=\"sv\">55-70<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5de5\u827a\u538b\u529b<\/div><div class=\"sv\">2-4 psi<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u6ce5\u6d46\u7c7b\u578b<\/div><div class=\"sv\">\u975e\u6c34\u6216\u949d\u5316<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u8868\u9762\u7eb9\u7406\u8981\u6c42.<\/div><div class=\"sv\">\u4f4e\u5b54\u9699\u7387\u627f\u8f7d\u9762<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u629b\u5149\u540e\u534f\u8bae<\/div><div class=\"sv\">\u7acb\u5373\u51b2\u6d17\u81f3\u5173\u91cd\u8981<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5de5\u4f5c\u5b54\u5f62\u72b6<\/div><div class=\"sv\">\u5b9a\u5236\uff08\u901a\u5e38\u4e3a\u77e9\u5f62\uff09<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5178\u578b\u5faa\u73af\u5bff\u547d<\/div><div class=\"sv\">80-150 \u4e2a\u5faa\u73af<\/div><\/div>\n        <\/div>\n      <\/div>\n\n    <\/div>\n  <\/div>\n\n  <!-- \u2550\u2550\u2550 SECTION 8 \u2014 LTCC \u2550\u2550\u2550 -->\n  <h2 id=\"ltcc\">LTCC \u548c\u539a\u819c\u9676\u74f7\u57fa\u677f<\/h2>\n\n  <div class=\"sub-block\">\n    <div class=\"sub-block-head ltcc-head\">\n      <h3>LTCC \u548c\u539a\u819c\u9676\u74f7\uff08\u4f4e\u6e29\u5171\u70e7\u9676\u74f7\uff09<\/h3>\n      <div class=\"sub-apps\">\u5e94\u7528\uff1a\u5c04\u9891\u6a21\u5757\u3001\u5929\u7ebf\u5c01\u88c5\u30015G \u524d\u7aef\u6a21\u5757\u3001\u591a\u5c42\u5fae\u6ce2\u7535\u8def\u3001\u6c7d\u8f66\u96f7\u8fbe<\/div>\n    <\/div>\n    <div class=\"sub-block-body\">\n\n      <div class=\"prop-grid\">\n        <div class=\"prop-item\"><div class=\"prop-label\">\u83ab\u6c0f\u786c\u5ea6<\/div><div class=\"prop-value ok\">~5.0-6.0\uff08\u8f83\u8f6f\u9676\u74f7\uff09<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u7ec4\u6210<\/div><div class=\"prop-value\">\u73bb\u7483\u9676\u74f7\u590d\u5408\u6750\u6599<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u91d1\u5c5e\u5316\u5c42<\/div><div class=\"prop-value caution\">\u94f6\u6216\u91d1\u57cb\u5bfc\u4f53<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u706b\u707e\u540e\u7684\u6536\u7f29<\/div><div class=\"prop-value danger\">\u00b10.1-0.5% \u53d8\u5316<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u5178\u578b\u9762\u677f\u5c3a\u5bf8<\/div><div class=\"prop-value\">114\u00d7114 \u6beb\u7c73\u6807\u51c6<\/div><\/div>\n        <div class=\"prop-item\"><div class=\"prop-label\">\u6ce2\u5170\u76ee\u6807<\/div><div class=\"prop-value\">\u7528\u4e8e\u7c98\u63a5\u7684\u8868\u9762\u5e73\u9762\u5ea6<\/div><\/div>\n      <\/div>\n\n      <p>LTCC \u57fa\u677f\u662f\u57cb\u6709\u91d1\u5c5e\u5bfc\u4f53\uff08\u901a\u5e38\u4e3a\u94f6\u6216\u91d1\uff09\u7684\u5171\u70e7\u73bb\u7483\u9676\u74f7\u590d\u5408\u6750\u6599\uff0c\u4ee5\u9762\u677f\u5f62\u5f0f\u751f\u4ea7\uff0c\u7136\u540e\u8fdb\u884c\u5355\u5c42\u5904\u7406\u3002\u5b83\u4eec\u7684\u629b\u5149\u8981\u6c42\u4e0d\u540c\u4e8e\u672c\u6307\u5357\u4e2d\u7684\u5176\u4ed6\u9676\u74f7\uff0c\u56e0\u4e3a LTCC \u540c\u65f6\u542b\u6709\u73bb\u7483\u9676\u74f7\u57fa\u4f53 <em>\u548c<\/em> \u629b\u5149\u5fc5\u987b\u5728\u4e0d\u4f18\u5148\u53bb\u9664\u9676\u74f7\u6216\u91d1\u5c5e\u7684\u60c5\u51b5\u4e0b\u5b9e\u73b0\u8868\u9762\u5e73\u9762\u5ea6--\u8fd9\u662f\u4e00\u4e2a\u4e0e CMP \u5927\u9a6c\u58eb\u9769\u91d1\u5c5e\u5e73\u9762\u5316\u7c7b\u4f3c\u7684\u9009\u62e9\u6027\u629b\u5149\u95ee\u9898\u3002.<\/p>\n\n      <p>\u70e7\u7ed3\u540e\u7684 LTCC \u9762\u677f\u7531\u4e8e\u73bb\u7483\u9676\u74f7\u57fa\u4f53\u4e0e\u5d4c\u5165\u91d1\u5c5e\u5c42\u7684\u70e7\u7ed3\u6536\u7f29\u7387\u4e0d\u540c\u800c\u4ea7\u751f\u8868\u9762\u5f62\u8c8c\u3002\u629b\u5149\u7684\u76ee\u7684\u662f\u5c06\u6574\u4e2a\u9762\u677f\u4e0a\u7684\u8fd9\u79cd\u5f62\u8c8c\u5e73\u9762\u5316\u5230 \u00b15-10 \u00b5m \u4ee5\u5185\uff0c\u4ee5\u5b9e\u73b0\u53ef\u9760\u7684\u82af\u7247\u7c98\u63a5\u548c\u4e92\u8fde\u5de5\u827a\u3002\u7531\u4e8e LTCC \u6bd4\u7eaf\u6c27\u5316\u94dd\u66f4\u8f6f\uff08\u83ab\u6c0f ~5-6 \u800c\u6c27\u5316\u94dd\u4e3a 9\uff09\uff0c\u56e0\u6b64\u9002\u5408\u91c7\u7528\u8f83\u4f4e\u7684\u5de5\u827a\u538b\u529b\uff081.5-3 psi\uff09\u548c\u8f83\u8f6f\u7684\u886c\u57ab\uff08\u90b5\u6c0f A 50-65\uff09--\u8f83\u786c\u7684\u886c\u57ab\u5728\u8f83\u9ad8\u538b\u529b\u4e0b\u4f1a\u4f18\u5148\u53bb\u9664\u8f83\u8f6f\u7684\u73bb\u7483\u9676\u74f7\u57fa\u4f53\u800c\u4e0d\u662f\u91d1\u5c5e\u5bfc\u4f53\uff0c\u4ece\u800c\u4f7f\u5e73\u9762\u5ea6\u95ee\u9898\u6076\u5316\u800c\u4e0d\u662f\u5f97\u5230\u89e3\u51b3\u3002.<\/p>\n\n      <p>LTCC \u9762\u677f\u683c\u5f0f\uff08114 \u00d7 114 \u6beb\u7c73\u6216\u5b9a\u5236\u5c3a\u5bf8\uff09\u662f\u975e\u5706\u5f62\u548c\u975e\u6807\u51c6\u7684\uff0c\u9700\u8981\u5728\u629b\u5149\u6a21\u677f\u4e2d\u5b9a\u5236\u77e9\u5f62\u5de5\u4f5c\u5b54\u7684\u51e0\u4f55\u5f62\u72b6\u3002\u5de5\u4f5c\u5b54\u6df1\u5ea6\u5fc5\u987b\u6839\u636e\u70e7\u7ed3\u540e\u7684\u9762\u677f\u539a\u5ea6\u6765\u6307\u5b9a\uff0c\u800c\u9762\u677f\u539a\u5ea6\u672c\u8eab\u4f1a\u968f\u5171\u70e7\u5c42\u6570\u548c\u70e7\u7ed3\u6279\u6b21\u6761\u4ef6\u800c\u53d8\u5316\u3002\u5efa\u8bae\u4ece\u6bcf\u4e2a\u751f\u4ea7\u6279\u6b21\u7684\u81f3\u5c11 5 \u5757\u6837\u677f\u4e0a\u83b7\u53d6\u70e7\u540e\u539a\u5ea6\u6d4b\u91cf\u503c\uff0c\u7528\u4e8e\u6307\u5b9a\u5de5\u4f5c\u5b54\u6df1\u5ea6\u3002.<\/p>\n\n      <div class=\"spec-mini\">\n        <div class=\"spec-mini-title title-ltcc\">LTCC - \u6a21\u677f\u89c4\u683c\u6458\u8981<\/div>\n        <div class=\"spec-mini-grid\">\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u8f7d\u4f53\u6750\u6599<\/div><div class=\"sv\">G-10 \u6216 FR-4\uff08pH \u503c 7-10\uff09<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5e95\u57ab\u90b5\u6c0f A<\/div><div class=\"sv\">50-65<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5de5\u827a\u538b\u529b<\/div><div class=\"sv\">1.5-3 psi<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5de5\u4f5c\u5b54\u5f62\u72b6<\/div><div class=\"sv\">\u77e9\u5f62\uff08\u5b9a\u5236\uff09<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u539a\u5ea6\u8f93\u5165<\/div><div class=\"sv\">\u9700\u8981\u8fdb\u884c\u706b\u707e\u540e\u6d4b\u91cf<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u6ce5\u6d46 pH \u503c<\/div><div class=\"sv\">7-10\uff08\u63a5\u8fd1\u4e2d\u6027\uff09<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5173\u952e\u6307\u6807<\/div><div class=\"sv\">\u8868\u9762\u5e73\u9762\u5ea6 \u2264 \u00b110 \u00b5m<\/div><\/div>\n          <div class=\"spec-mini-item\"><div class=\"sl\">\u5178\u578b\u5faa\u73af\u5bff\u547d<\/div><div class=\"sv\">100-200 \u4e2a\u5faa\u73af<\/div><\/div>\n        <\/div>\n      <\/div>\n\n    <\/div>\n  <\/div>\n\n  <!-- \u2550\u2550\u2550 SECTION 9 \u2550\u2550\u2550 -->\n  <h2 id=\"non-circular\">\u975e\u5706\u5f62\u548c\u5b9a\u5236\u5f62\u72b6\u57fa\u8d28<\/h2>\n\n  <p>\u73bb\u7483\u548c\u9676\u74f7\u629b\u5149\u5ba2\u6237\u6700\u5e38\u63d0\u51fa\u7684\u6a21\u677f\u5de5\u7a0b\u95ee\u9898\u4e4b\u4e00\u6d89\u53ca\u975e\u5706\u5f62\u57fa\u677f\u5f62\u72b6\u3002\u6839\u636e\u5b9a\u4e49\uff0c\u534a\u5bfc\u4f53\u6676\u7247\u662f\u5706\u5f62\u7684\uff0c\u6574\u4e2a\u6807\u51c6\u629b\u5149\u6a21\u677f\u751f\u6001\u7cfb\u7edf\u90fd\u662f\u56f4\u7ed5\u5706\u5f62\u5de5\u4f5c\u5b54\u5efa\u7acb\u7684\u3002\u4f46\u73bb\u7483\u548c\u9676\u74f7\u57fa\u677f\u901a\u5e38\u662f\u6b63\u65b9\u5f62\u3001\u957f\u65b9\u5f62\u548c\u5b9a\u5236\u591a\u8fb9\u5f62\uff0c\u8fd9\u4e9b\u57fa\u677f\u9700\u8981\u5b9a\u5236\u5de5\u4f5c\u5b54\u7684\u51e0\u4f55\u5f62\u72b6\uff0c\u800c\u5b9a\u5236\u5de5\u4f5c\u5b54\u7684\u51e0\u4f55\u5f62\u72b6\u662f\u4e13\u4e1a\u6a21\u677f\u5236\u9020\u5546\u7684\u6807\u51c6\u505a\u6cd5\uff0c\u4f46\u4ea7\u54c1\u7ebf\u4ec5\u6db5\u76d6\u534a\u5bfc\u4f53\u6676\u7247\u7684\u4f9b\u5e94\u5546\u5374\u65e0\u6cd5\u63d0\u4f9b\u3002.<\/p>\n\n  <div class=\"shape-grid\">\n    <div class=\"shape-card\">\n      <div class=\"shape-icon\">\u2b1c<\/div>\n      <div class=\"shape-name\">\u65b9\u5f62<\/div>\n      <div class=\"shape-note\">\u5e38\u7528\u4e8e\u9676\u74f7\u57fa\u677f\u3001LTCC \u9762\u677f<\/div>\n    <\/div>\n    <div class=\"shape-card\">\n      <div class=\"shape-icon\">\u25ac<\/div>\n      <div class=\"shape-name\">\u77e9\u5f62<\/div>\n      <div class=\"shape-note\">LTCC\u3001\u529f\u7387\u6a21\u5757\u57fa\u677f<\/div>\n    <\/div>\n    <div class=\"shape-card\">\n      <div class=\"shape-icon\">\u2b21<\/div>\n      <div class=\"shape-name\">\u516d\u89d2\u5f62<\/div>\n      <div class=\"shape-note\">\u5149\u5b66\u7a97\u53e3\u3001\u7279\u6b8a\u5143\u4ef6<\/div>\n    <\/div>\n    <div class=\"shape-card\">\n      <div class=\"shape-icon\">\ud83d\udd32<\/div>\n      <div class=\"shape-name\">\u591a\u8154<\/div>\n      <div class=\"shape-note\">\u6bcf\u4e2a\u8f7d\u4f53\u6709\u591a\u4e2a\u5c0f\u9676\u74f7<\/div>\n    <\/div>\n    <div class=\"shape-card\">\n      <div class=\"shape-icon\">\u2b55<\/div>\n      <div class=\"shape-name\">\u5706\u5f62<\/div>\n      <div class=\"shape-note\">\u6807\u51c6 - \u6240\u6709\u57fa\u8d28<\/div>\n    <\/div>\n    <div class=\"shape-card\">\n      <div class=\"shape-icon\">\ud83d\udd37<\/div>\n      <div class=\"shape-name\">\u5b9a\u5236<\/div>\n      <div class=\"shape-note\">\u5de5\u7a0b\u56fe\u7eb8\u4e0a\u7684\u4efb\u4f55\u5f62\u72b6<\/div>\n    <\/div>\n  <\/div>\n\n  <h3>\u975e\u5706\u5f62\u5de5\u4f5c\u5b54\u7684\u5de5\u7a0b\u8981\u6c42<\/h3>\n  <p>\u975e\u5706\u5f62\u5de5\u4f5c\u5b54\u9700\u8981\u4e0e\u5706\u5f62\u5de5\u4f5c\u5b54\u76f8\u540c\u7684\u95f4\u9699\u5de5\u7a0b--\u57fa\u5e95\u5468\u8fb9\u4e0e\u5de5\u4f5c\u5b54\u58c1\u4e4b\u95f4\u7684\u95f4\u9699\u5fc5\u987b\u4e3a 0.25-0.50 \u6beb\u7c73\uff0c\u4ee5\u9632\u6b62\u629b\u5149\u65f6\u8fb9\u7f18\u63a5\u89e6\uff0c\u540c\u65f6\u9650\u5236\u57fa\u5e95\u7684\u6a2a\u5411\u79fb\u52a8\u3002\u5bf9\u4e8e\u77e9\u5f62\u57fa\u5e95\uff0c\u8fd9\u610f\u5473\u7740\u6307\u5b9a\u5de5\u4f5c\u5b54\u5c3a\u5bf8\u4e3a\u57fa\u5e95\u957f + 0.50 mm \u00d7 \u57fa\u5e95\u5bbd + 0.50 mm\u3002\u8f6c\u89d2\u51e0\u4f55\u5f62\u72b6\u9700\u8981\u4e00\u4e2a\u534a\u5f84\uff08\u901a\u5e38\u4e3a 0.5-1.0 \u6beb\u7c73\uff09\uff0c\u4ee5\u5339\u914d\u57fa\u5e95\u7684\u8f6c\u89d2\u5012\u89d2\uff0c\u6216\u9632\u6b62\u5728\u5468\u671f\u6027\u629b\u5149\u8d1f\u8f7d\u4e0b\u53ef\u80fd\u5bfc\u81f4\u8f7d\u677f\u5f00\u88c2\u7684\u5c16\u9510\u5185\u89d2\u5e94\u529b\u96c6\u4e2d\u3002.<\/p>\n\n  <p>\u7528\u4e8e\u5c0f\u578b\u9676\u74f7\u57fa\u5e95\u7684\u591a\u8154\u6a21\u677f\uff08\u4f8b\u5982\uff0c\u540c\u65f6\u5bb9\u7eb3\u516d\u4e2a 25 \u00d7 25 \u6beb\u7c73\u6c27\u5316\u94dd\u57fa\u5e95\u7684\u8f7d\u4f53\uff09\u9700\u8981\u7cbe\u786e\u7684\u8154\u95f4\u8ddd\u548c\u6240\u6709\u8154\u7684\u7b49\u5de5\u5b54\u6df1\u5ea6\u3002\u5404\u8154\u6df1\u5ea6\u7684\u4e00\u81f4\u6027\uff08\u5355\u4e2a\u8f7d\u4f53\u4e0a\u6700\u6df1\u548c\u6700\u6d45\u8154\u4e4b\u95f4\u7684\u5dee\u5f02\u4e0d\u8d85\u8fc7 5 \u5fae\u7c73\uff09\u76f4\u63a5\u63a7\u5236\u7740\u540c\u65f6\u629b\u5149\u7684\u57fa\u5e95\u4e4b\u95f4\u7684 TTV \u4e00\u81f4\u6027\uff0c\u5e76\u5728\u53d1\u8d27\u524d\u901a\u8fc7\u5750\u6807\u6d4b\u91cf\u673a\u5bf9\u6bcf\u4e2a\u8154\u8fdb\u884c\u6d4b\u91cf\u6765\u9a8c\u8bc1\u3002\u5bf9\u4e8e\u975e\u5706\u5f62\u591a\u8154\u6a21\u677f\uff0c\u5728\u8ba2\u8d27\u65f6\u63d0\u4f9b\u57fa\u677f\u548c\u6240\u9700\u8154\u4f53\u5e03\u5c40\u7684\u5de5\u7a0b\u5c3a\u5bf8\u56fe\u662f\u6307\u5b9a\u6a21\u677f\u51e0\u4f55\u5f62\u72b6\u7684\u6700\u6709\u6548\u65b9\u6cd5\u3002.<\/p>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 10 \u2550\u2550\u2550 -->\n  <h2 id=\"slurry-table\">\u6ce5\u6d46\u5316\u5b66\u548c\u6a21\u677f\u6750\u6599\u9009\u62e9\u8868<\/h2>\n\n  <div class=\"table-wrap\">\n    <table>\n      <thead>\n        <tr>\n          <th>\u57fa\u8d28<\/th>\n          <th>\u6ce5\u6d46\u5316\u5b66<\/th>\n          <th>pH \u503c\u8303\u56f4<\/th>\n          <th>FR-4<\/th>\n          <th>G-10<\/th>\n          <th>CXT<\/th>\n        <\/tr>\n      <\/thead>\n      <tbody>\n        <tr class=\"row-green\">\n          <td><strong>\u787c\u7845\u73bb\u7483<\/strong><\/td>\n          <td>\u78b1\u6027\u80f6\u4f53\u4e8c\u6c27\u5316\u7845<\/td>\n          <td>9-12<\/td>\n          <td><span class=\"badge badge-green\">\u53ef\u4ee5\u63a5\u53d7<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u826f\u597d<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u63a8\u8350<\/span><\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u787c\u7845\u73bb\u7483<\/strong><\/td>\n          <td>CeO\u2082\uff0c\u5f31\u9178\u6027<\/td>\n          <td>5-8<\/td>\n          <td><span class=\"badge badge-amber\">\u8fb9\u7f18<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u826f\u597d<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u63a8\u8350<\/span><\/td>\n        <\/tr>\n        <tr class=\"row-warn\">\n          <td><strong>\u787c\u7845\u73bb\u7483<\/strong><\/td>\n          <td>NH\u2084F \/ BHF\uff08\u8680\u523b\u629b\u5149\u5242\uff09<\/td>\n          <td>4-6<\/td>\n          <td><span class=\"badge badge-red\">\u4e0d\u9002\u5408<\/span><\/td>\n          <td><span class=\"badge badge-red\">\u4e0d\u9002\u5408<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u9700\u8981<\/span><\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u7194\u878d\u77f3\u82f1<\/strong><\/td>\n          <td>CeO\u2082 \/ SiO\u2082 \u9178\u6027<\/td>\n          <td>4-7<\/td>\n          <td><span class=\"badge badge-amber\">\u8fb9\u7f18<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u826f\u597d<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u63a8\u8350<\/span><\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u6c27\u5316\u94dd\u9676\u74f7<\/strong><\/td>\n          <td>\u91d1\u521a\u77f3\u78e8\u6599\uff0c\u9178\u6027<\/td>\n          <td>4-8<\/td>\n          <td><span class=\"badge badge-red\">\u4e0d\u9002\u5408<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u826f\u597d<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u63a8\u8350<\/span><\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u6c2e\u5316\u94dd\u57fa\u677f<\/strong><\/td>\n          <td>\u975e\u6c34\u6027\/\u949d\u5316<\/td>\n          <td>4-7<\/td>\n          <td><span class=\"badge badge-red\">\u4e0d\u9002\u5408<\/span><\/td>\n          <td><span class=\"badge badge-amber\">\u8fb9\u7f18<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u9700\u8981<\/span><\/td>\n        <\/tr>\n        <tr class=\"row-green\">\n          <td><strong>LTCC \/ \u539a\u819c<\/strong><\/td>\n          <td>\u8fd1\u4e2d\u6027\u4e8c\u6c27\u5316\u7845<\/td>\n          <td>7-10<\/td>\n          <td><span class=\"badge badge-green\">\u53ef\u4ee5\u63a5\u53d7<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u826f\u597d<\/span><\/td>\n          <td><span class=\"badge badge-green\">\u63a8\u8350<\/span><\/td>\n        <\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 SECTION 11 \u2550\u2550\u2550 -->\n  <h2 id=\"comparison\">\u5b8c\u6574\u89c4\u683c\u5bf9\u6bd4<\/h2>\n\n  <div class=\"table-wrap\">\n    <table>\n      <thead>\n        <tr>\n          <th>\u53c2\u6570<\/th>\n          <th>\u787c\u7845\u73bb\u7483<\/th>\n          <th>\u7194\u878d\u77f3\u82f1<\/th>\n          <th>\u6c27\u5316\u94dd<\/th>\n          <th>AlN<\/th>\n          <th>LTCC<\/th>\n        <\/tr>\n      <\/thead>\n      <tbody>\n        <tr>\n          <td><strong>\u627f\u8f7d\u677f<\/strong><\/td>\n          <td>FR-4 \/ G-10<\/td>\n          <td>G-10 \/ CXT<\/td>\n          <td>G-10 \/ CXT<\/td>\n          <td>CXT<\/td>\n          <td>FR-4 \/ G-10<\/td>\n        <\/tr>\n        <tr class=\"row-highlight\">\n          <td><strong>\u5e95\u57ab\u90b5\u6c0f A<\/strong><\/td>\n          <td>55-70<\/td>\n          <td>60-75<\/td>\n          <td>65-80<\/td>\n          <td>55-70<\/td>\n          <td>50-65<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u5de5\u827a\u538b\u529b<\/strong><\/td>\n          <td>2-4 psi<\/td>\n          <td>1.5-4 psi<\/td>\n          <td>3-6 psi<\/td>\n          <td>2-4 psi<\/td>\n          <td>1.5-3 psi<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u5de5\u4f5c\u5b54\u5f62\u72b6<\/strong><\/td>\n          <td>\u5706\u5f62<\/td>\n          <td>\u5706\u5f62\/\u65b9\u5f62<\/td>\n          <td>\u81ea\u5b9a\u4e49\u8981\u6c42<\/td>\n          <td>\u81ea\u5b9a\u4e49\u8981\u6c42<\/td>\n          <td>\u77e9\u5f62<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u539a\u5ea6\u8f93\u5165\u81f3\u5173\u91cd\u8981\uff1f<\/strong><\/td>\n          <td><span class=\"badge badge-red\">\u662f--\u59cb\u7ec8<\/span><\/td>\n          <td><span class=\"badge badge-red\">\u662f--\u59cb\u7ec8<\/span><\/td>\n          <td><span class=\"badge badge-red\">\u662f--\u59cb\u7ec8<\/span><\/td>\n          <td><span class=\"badge badge-red\">\u662f--\u59cb\u7ec8<\/span><\/td>\n          <td><span class=\"badge badge-red\">\u662f - \u706b\u707e\u540e<\/span><\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u6c1f\u5316\u5b66\uff1f<\/strong><\/td>\n          <td>\u53ef\u80fd - \u4ec5\u9650 CXT<\/td>\n          <td>\u7f55\u89c1<\/td>\n          <td>\u6ca1\u6709<\/td>\n          <td>\u6ca1\u6709<\/td>\n          <td>\u6ca1\u6709<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u4e3b\u8981\u6311\u6218<\/strong><\/td>\n          <td>\u539a\u5ea6\u591a\u6837\u6027<\/td>\n          <td>Ra &lt; 0.1 nm \u89c4\u683c<\/td>\n          <td>\u786c\u5ea6 + \u51e0\u4f55\u5f62\u72b6<\/td>\n          <td>\u6c34\u89e3\u98ce\u9669<\/td>\n          <td>\u91d1\u5c5e + \u9676\u74f7\u5171\u540c\u53bb\u9664<\/td>\n        <\/tr>\n        <tr>\n          <td><strong>\u5178\u578b\u5faa\u73af\u5bff\u547d<\/strong><\/td>\n          <td>100-200<\/td>\n          <td>80-150<\/td>\n          <td>60-120<\/td>\n          <td>80-150<\/td>\n          <td>100-200<\/td>\n        <\/tr>\n      <\/tbody>\n    <\/table>\n  <\/div>\n\n  <!-- Related articles -->\n  <div class=\"related-box\">\n    <h3>\ud83d\udcd6 \u76f8\u5173\u6280\u672f\u6587\u7ae0<\/h3>\n    <p>\u901a\u8fc7\u8fd9\u4e9b\u6307\u5357\uff0c\u5b8c\u5584\u60a8\u5bf9\u7279\u5b9a\u57fa\u6750\u629b\u5149\u6a21\u677f\u7684\u4e86\u89e3\uff1a<\/p>\n    <div class=\"related-links\">\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Polishing-Templates-for-Semiconductor-Silicon-Wafer-Processing\/\" target=\"_blank\">\u629b\u5149\u6a21\u677f\uff1a\u5b8c\u6574\u6307\u5357<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-to-Specify-a-Polishing-Template-6-Parameters-Engineers-Must-Define\/\" target=\"_blank\">6 \u53c2\u6570\u89c4\u683c\u6307\u5357<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/FR-4-vs-G-10-Fiberglass-Polishing-Templates-Material-Properties-Selection-Guide\/\" target=\"_blank\">FR-4 vs G-10 vs CXT \u6750\u6599<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/SiC-Wafer-Polishing-Templates-Chemically-Resistant-Solutions-for-Silicon-Carbide-Processing\/\" target=\"_blank\">\u78b3\u5316\u7845\u629b\u5149\u6a21\u677f<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Polishing-Templates-for-Compound-Semiconductor-Wafers-GaAs-InP-Sapphire\/\" target=\"_blank\">\u7837\u5316\u9553\/\u78f7\u5316\u94df\/\u84dd\u5b9d\u77f3\u6a21\u677f<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-Polishing-Template-Edge-Design-Controls-Wafer-Edge-Profile-Reduces-Edge-Exclusion\/\" target=\"_blank\">\u8fb9\u7f18\u8f6e\u5ed3\u548c EER \u8bbe\u8ba1<\/a>\n      <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Custom-Polishing-Templates-for-Silicon-Wafers-Tailored-to-Your-Carrier-Head-Specs\/\" target=\"_blank\">\u5b9a\u5236\u6a21\u677f\u5de5\u7a0b<\/a>\n    <\/div>\n  <\/div>\n\n  <hr class=\"divider\" \/>\n\n  <!-- \u2550\u2550\u2550 FAQ \u2550\u2550\u2550 -->\n  <h2 id=\"faq\">\u5e38\u89c1\u95ee\u9898<\/h2>\n\n  <div class=\"faq-item\">\n    <div class=\"faq-q\">\u73bb\u7483\u6676\u7247\u7684\u629b\u5149\u6a21\u677f\u4e0e\u534a\u5bfc\u4f53\u6676\u7247\u6a21\u677f\u6709\u4f55\u4e0d\u540c\uff1f<\/div>\n    <div class=\"faq-a\">\u6700\u663e\u8457\u7684\u5dee\u5f02\u662f\u975e\u6807\u51c6\u539a\u5ea6\u3002\u73bb\u7483\u6676\u7247\u7684\u539a\u5ea6\u4e3a 0.3-2.0 \u6beb\u7c73\uff0c\u5165\u6599\u53d8\u5316\u4e3a \u00b125-100 \u5fae\u7c73\uff0c\u8fdc\u8fdc\u8d85\u51fa\u4e86\u534a\u5bfc\u4f53\u6676\u7247\u7684\u6807\u51c6\u5316 SEMI \u539a\u5ea6\u548c\u4e25\u683c\u516c\u5dee\u3002\u6bcf\u4e2a\u73bb\u7483\u629b\u5149\u6a21\u677f\u90fd\u9700\u8981\u6839\u636e\u7279\u5b9a\u7684\u8fdb\u6599\u539a\u5ea6\u3001\u76ee\u6807\u6700\u7ec8\u539a\u5ea6\u548c\u5e94\u7528\u4e2d\u7684\u80cc\u57ab\u538b\u7f29\u60c5\u51b5\uff0c\u8fdb\u884c\u5b9a\u5236\u7684\u5de5\u5b54\u6df1\u5ea6\u8ba1\u7b97\u3002\u7b2c\u4e8c\u4e2a\u5173\u952e\u533a\u522b\u662f\u6d46\u6599\u5316\u5b66\u6027\u8d28\uff1a\u73bb\u7483\u629b\u5149\u7684 pH \u503c\u5728 4-12 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\u5728\u6c34\u4e2d\u53d1\u751f\u6c34\u89e3\uff1aAlN + 3H\u2082O \u2192 Al(OH)\u2083 + NH\u2083\u3002\u8fd9\u79cd\u53cd\u5e94\u901f\u5ea6\u6781\u5feb\uff0c\u5728\u6807\u51c6\u6c34\u6027\u6d46\u6599\u4e2d\u51e0\u5206\u949f\u5185\u5c31\u80fd\u5bf9 AlN \u57fa\u5e95\u9020\u6210\u660e\u663e\u7684\u8868\u9762\u635f\u4f24\u3002\u975e\u6c34\u6027\u629b\u5149\u4ecb\u8d28\uff08\u57fa\u4e8e\u6709\u673a\u6eb6\u5242\u7684\u91d1\u521a\u77f3\u60ac\u6d6e\u6db2\uff09\u53ef\u5b8c\u5168\u907f\u514d\u8fd9\u79cd\u53cd\u5e94\u3002\u949d\u5316\u6c34\u6027\u4f53\u7cfb\u4f7f\u7528 pH \u503c\u63a7\u5236\u548c\u6709\u673a\u6291\u5236\u5242\u6765\u964d\u4f4e\u57fa\u6750\u8868\u9762\u7684\u6c34\u6d3b\u6027\uff0c\u5e76\u5c06\u6c34\u89e3\u901f\u5ea6\u51cf\u6162\u5230\u53ef\u63a5\u53d7\u7684\u6c34\u5e73\u3002\u65e0\u8bba\u9009\u62e9\u54ea\u79cd\u6d46\u6599\uff0c\u90fd\u5efa\u8bae\u4f7f\u7528 CXT \u7ea7\u6a21\u677f\u6765\u5904\u7406 AlN\uff0c\u56e0\u4e3a\u8f7d\u677f\u8868\u9762\u7eb9\u7406\u5fc5\u987b\u6700\u5927\u9650\u5ea6\u5730\u51cf\u5c11\u629b\u5149\u7ed3\u675f\u540e\u6d46\u6599\u7684\u6ede\u7559\uff0c\u56e0\u4e3a\u6d46\u6599\u6ede\u7559\u4f1a\u5ef6\u957f AlN \u7684\u6c34\u89e3\u66b4\u9732\u65f6\u95f4\u3002.<\/div>\n  <\/div>\n\n  <!-- CTA -->\n  <div class=\"cta-banner\">\n    <h2>\u83b7\u53d6\u73bb\u7483\u6216\u9676\u74f7\u629b\u5149\u6a21\u677f\u62a5\u4ef7<\/h2>\n    <p>\u6211\u4eec\u7684\u5de5\u7a0b\u56e2\u961f\u5c06\u8ba1\u7b97\u51fa\u6b63\u786e\u7684\u5de5\u4f5c\u5b54\u6df1\u5ea6\uff0c\u5e76\u5728 48 \u5c0f\u65f6\u5185\u63d0\u4f9b\u6709\u7ade\u4e89\u529b\u7684\u62a5\u4ef7\u3002.<\/p>\n    <a href=\"https:\/\/jeez-semicon.com\/zh\/contact\/\" class=\"cta-btn\" target=\"_blank\">\n      \u8054\u7cfb\u6211\u4eec\u83b7\u53d6\u62a5\u4ef7 \u2192\n    <\/a>\n  <\/div>\n\n  <a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Polishing-Templates-for-Semiconductor-Silicon-Wafer-Processing\/\" target=\"_blank\" 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