{"id":1767,"date":"2026-04-07T15:55:02","date_gmt":"2026-04-07T07:55:02","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=1767"},"modified":"2026-04-07T16:33:42","modified_gmt":"2026-04-07T08:33:42","slug":"hard-vs-soft-cmp-polishing-pads-selection-guide","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/hard-vs-soft-cmp-polishing-pads-selection-guide\/","title":{"rendered":"\u786c\u8d28\u4e0e\u8f6f\u8d28 CMP \u629b\u5149\u57ab\uff1a\u6743\u5a01\u9009\u62e9\u6307\u5357"},"content":{"rendered":"<!-- ============================================================\r\n     CLUSTER 4 \u2014 Hard vs. Soft CMP Polishing Pads: Selection Guide\r\n     Jizhi Electronic Technology Co., Ltd.\r\n     jeez-semicon.com  |  April 2026\r\n     Paste into WordPress Gutenberg \u2192 Custom HTML block\r\n     URL: \/blog\/Hard-vs-Soft-CMP-Polishing-Pads-Selection-Guide\r\n     ============================================================ -->\r\n<p><style>\r\n@import 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0;border-radius:var(--radius);box-shadow:var(--shadow-card)}\r\n.jz-table{width:100%;border-collapse:collapse;font-size:14px;background:var(--c-surface)}\r\n.jz-table thead th{background:var(--c-primary);color:#fff;font-weight:600;padding:12px 16px;text-align:left;font-size:13px;letter-spacing:.03em}\r\n.jz-table thead th.col-hard{background:#0b3d91}\r\n.jz-table thead th.col-soft{background:#0078b0}\r\n.jz-table tbody tr:nth-child(even){background:#f3f6fc}\r\n.jz-table tbody td{padding:11px 16px;border-bottom:1px solid var(--c-border);color:#1e2435;vertical-align:top;line-height:1.6}\r\n.jz-table tbody tr:hover td{background:#eaf0fb}\r\n.jz-table .win{color:#1a6e35;font-weight:600}\r\n.jz-table .mid{color:#7a5c00;font-weight:500}\r\n.jz-table .lose{color:#963a00;font-weight:500}\r\n\r\n\/* VS Split cards *\/\r\n.jz-vs-wrap{display:grid;grid-template-columns:1fr 1fr;gap:0;margin:28px 0;border:1px solid var(--c-border);border-radius:var(--radius-lg);overflow:hidden;box-shadow:var(--shadow-card)}\r\n.jz-vs-col{padding:28px 24px}\r\n.jz-vs-col-hard{background:linear-gradient(160deg,#f0f5ff 0%,#e6eefa 100%);border-right:1px solid var(--c-border)}\r\n.jz-vs-col-soft{background:linear-gradient(160deg,#f0f9ff 0%,#e2f3fa 100%)}\r\n.jz-vs-label{font-family:var(--font-mono);font-size:11px;font-weight:700;letter-spacing:.1em;text-transform:uppercase;margin-bottom:10px}\r\n.jz-vs-label-hard{color:#0b3d91}\r\n.jz-vs-label-soft{color:#006fa0}\r\n.jz-vs-title{font-size:18px;font-weight:700;margin-bottom:16px;line-height:1.25}\r\n.jz-vs-title-hard{color:#072d6e}\r\n.jz-vs-title-soft{color:#004e75}\r\n.jz-vs-list{list-style:none;padding:0;margin:0}\r\n.jz-vs-list li{font-size:14px;color:#2a3248;padding:6px 0;border-bottom:1px solid rgba(11,61,145,.08);display:flex;gap:8px;align-items:flex-start;line-height:1.55}\r\n.jz-vs-list li:last-child{border-bottom:none}\r\n.jz-vs-list li::before{flex-shrink:0;margin-top:1px}\r\n.jz-vs-list.pros li::before{content:'\u2713';color:#1a6e35;font-weight:700}\r\n.jz-vs-list.cons li::before{content:'\u2717';color:#963a00;font-weight:700}\r\n@media(max-width:580px){.jz-vs-wrap{grid-template-columns:1fr}.jz-vs-col-hard{border-right:none;border-bottom:1px solid var(--c-border)}}\r\n\r\n\/* Application map card *\/\r\n.jz-app-grid{display:grid;grid-template-columns:repeat(auto-fit,minmax(240px,1fr));gap:16px;margin:28px 0}\r\n.jz-app-card{background:var(--c-surface);border:1px solid var(--c-border);border-radius:var(--radius);padding:18px 20px;box-shadow:var(--shadow-card)}\r\n.jz-app-card-head{display:flex;align-items:center;gap:10px;margin-bottom:12px}\r\n.jz-app-badge{font-size:11px;font-weight:700;font-family:var(--font-mono);padding:3px 9px;border-radius:4px;letter-spacing:.06em}\r\n.jz-app-badge-hard{background:#d8e5ff;color:#0a2057}\r\n.jz-app-badge-soft{background:#cdeffa;color:#003d5c}\r\n.jz-app-badge-stack{background:#d8f0e0;color:#0d3d1e}\r\n.jz-app-title{font-size:14px;font-weight:600;color:#1a1f2e}\r\n.jz-app-desc{font-size:13px;color:#3a4255;line-height:1.6}\r\n\r\n\/* Decision tree *\/\r\n.jz-tree{margin:28px 0;border:1px solid var(--c-border);border-radius:var(--radius-lg);overflow:hidden;box-shadow:var(--shadow-card)}\r\n.jz-tree-row{display:flex;align-items:stretch;border-bottom:1px solid var(--c-border)}\r\n.jz-tree-row:last-child{border-bottom:none}\r\n.jz-tree-q{flex:3;padding:16px 20px;background:#f5f8ff;font-size:14px;font-weight:600;color:#1a1f2e;display:flex;align-items:center;border-right:1px solid var(--c-border)}\r\n.jz-tree-yes{flex:2;padding:14px 16px;background:#eaf5ee;font-size:13px;color:#1a5c2e;display:flex;align-items:center;gap:6px;border-right:1px solid var(--c-border)}\r\n.jz-tree-no{flex:2;padding:14px 16px;background:#fff4e5;font-size:13px;color:#7a3a00;display:flex;align-items:center;gap:6px}\r\n.jz-tree-yes::before{content:'Yes \u2192';font-weight:700;flex-shrink:0}\r\n.jz-tree-no::before{content:'No \u2192';font-weight:700;flex-shrink:0}\r\n@media(max-width:620px){.jz-tree-row{flex-direction:column}.jz-tree-q{border-right:none;border-bottom:1px solid var(--c-border)}.jz-tree-yes{border-right:none;border-bottom:1px solid var(--c-border)}}\r\n\r\n\/* Steps *\/\r\n.jz-steps{counter-reset:step;display:flex;flex-direction:column;gap:0;margin:28px 0}\r\n.jz-step{display:flex;gap:20px;padding:22px 0;border-bottom:1px solid var(--c-border)}\r\n.jz-step:last-child{border-bottom:none}\r\n.jz-step-num{flex-shrink:0;width:40px;height:40px;background:var(--c-primary);color:#fff;border-radius:50%;display:flex;align-items:center;justify-content:center;font-weight:700;font-size:15px;margin-top:2px}\r\n.jz-step-body h4{font-size:16px;font-weight:600;color:#1a1f2e;margin-bottom:7px}\r\n.jz-step-body p{font-size:15px;color:#3a4255;margin-bottom:0;line-height:1.7}\r\n\r\n\/* Stats *\/\r\n.jz-stats{display:grid;grid-template-columns:repeat(auto-fit,minmax(148px,1fr));gap:16px;margin:28px 0}\r\n.jz-stat{background:var(--c-surface);border:1px solid var(--c-border);border-radius:var(--radius);padding:18px 16px;text-align:center;box-shadow:var(--shadow-card)}\r\n.jz-stat-num{font-size:26px;font-weight:700;color:var(--c-primary);font-family:var(--font-mono);line-height:1}\r\n.jz-stat-label{font-size:12px;color:var(--c-muted);margin-top:6px;line-height:1.4}\r\n\r\n\/* Trust bar *\/\r\n.jz-trust{background:#f0f4ff;border-radius:var(--radius);padding:20px 24px;display:flex;align-items:center;gap:18px;margin:40px 0;border:1px solid #d0daee}\r\n.jz-trust-badge{background:var(--c-primary);color:#fff;border-radius:8px;padding:10px 14px;font-size:12px;font-weight:700;text-align:center;line-height:1.3;flex-shrink:0;font-family:var(--font-mono)}\r\n.jz-trust-text{font-size:14px;color:#3a4255;line-height:1.65}\r\n.jz-trust-text strong{color:var(--c-text)}\r\n\r\n\/* Link chip *\/\r\n.jz-link-chip{display:inline-flex;align-items:center;gap:5px;background:var(--c-accent-light);color:var(--c-accent);font-size:13px;font-weight:500;padding:3px 11px 3px 8px;border-radius:20px;border:1px solid #b3ddf5;text-decoration:none;transition:background .2s,color .2s}\r\n.jz-link-chip:hover{background:var(--c-accent);color:#fff;text-decoration:none}\r\n.jz-link-chip::before{content:'\u2192';font-size:11px}\r\n\r\n\/* Related *\/\r\n.jz-related{background:var(--c-surface);border:1px solid var(--c-border);border-radius:var(--radius-lg);padding:32px 32px 28px;margin:48px 0 32px;box-shadow:var(--shadow-card)}\r\n.jz-related-title{font-size:14px;font-weight:600;text-transform:uppercase;letter-spacing:.08em;color:var(--c-primary);margin-bottom:20px;font-family:var(--font-mono)}\r\n.jz-related-grid{display:grid;grid-template-columns:repeat(auto-fill,minmax(230px,1fr));gap:14px}\r\n.jz-related-item{background:#f3f6fc;border-radius:8px;padding:14px 16px;border:1px solid var(--c-border);transition:background .2s,box-shadow .2s}\r\n.jz-related-item:hover{background:var(--c-accent-light);box-shadow:var(--shadow-card)}\r\n.jz-related-item a{font-size:14px;font-weight:500;color:var(--c-primary);text-decoration:none;line-height:1.45;display:block}\r\n.jz-related-item a:hover{color:var(--c-accent);text-decoration:none}\r\n.jz-related-cat{font-size:11px;font-family:var(--font-mono);color:var(--c-muted);margin-bottom:5px;letter-spacing:.05em}\r\n\r\n\/* CTA *\/\r\n.jz-cta-banner{background:linear-gradient(135deg,#072d6e 0%,#0b3d91 60%,#0a5db5 100%);border-radius:var(--radius-lg);padding:44px 40px;text-align:center;margin:48px 0;position:relative;overflow:hidden}\r\n.jz-cta-banner::before{content:'';position:absolute;left:-40px;top:-40px;width:220px;height:220px;background:rgba(0,144,212,.15);border-radius:50%}\r\n.jz-cta-banner h2{color:#fff;font-size:clamp(20px,3vw,28px);margin-bottom:12px;border:none;padding-top:0;position:relative;z-index:1}\r\n.jz-cta-banner p{color:#ffffff;font-size:16px;margin-bottom:28px;position:relative;z-index:1}\r\n.jz-btn{display:inline-block;padding:13px 32px;border-radius:8px;font-weight:600;font-size:15px;text-decoration:none;transition:transform .2s,box-shadow .2s}\r\n.jz-btn:hover{transform:translateY(-2px);text-decoration:none}\r\n.jz-btn-white{background:#fff;color:var(--c-primary)}\r\n.jz-btn-white:hover{box-shadow:0 4px 20px rgba(0,0,0,.18);color:var(--c-primary)}\r\n.jz-btn-outline{background:transparent;color:#fff;border:2px solid rgba(255,255,255,.6);margin-left:12px}\r\n.jz-btn-outline:hover{background:rgba(255,255,255,.12);color:#fff}\r\n\r\n\/* FAQ *\/\r\n.jz-faq{margin:28px 0}\r\n.jz-faq-item{border:1px solid var(--c-border);border-radius:var(--radius);margin-bottom:12px;overflow:hidden;background:var(--c-surface)}\r\n.jz-faq-q{padding:16px 20px;font-weight:600;font-size:15px;color:var(--c-primary-dark);display:flex;justify-content:space-between;align-items:center}\r\n.jz-faq-q::after{content:'+';font-size:20px;font-weight:300;color:var(--c-accent);flex-shrink:0}\r\n.jz-faq-a{padding:0 20px 16px;font-size:15px;color:#3a4255;line-height:1.75}\r\n\r\n@media(max-width:640px){\r\n  .jz-hero{padding:36px 24px 32px}\r\n  .jz-cta-banner{padding:32px 22px}\r\n  .jz-related{padding:24px 18px}\r\n  .jz-btn-outline{margin-left:0;margin-top:10px;display:inline-block}\r\n}\r\n<\/style><\/p>\r\n<div class=\"jz-art\"><!-- Back to Pillar --> <a class=\"jz-back\" href=\"https:\/\/jeez-semicon.com\/zh\/blog\/CMP-Polishing-Pads-The-Complete-Guide\/\" target=\"_blank\" rel=\"noopener\">\u8fd4\u56de CMP \u629b\u5149\u57ab\uff1a\u5b8c\u5168\u6307\u5357<\/a> <!-- Hero -->\r\n<div class=\"jz-hero\">\r\n<div class=\"jz-hero-kicker\">\u673a\u667a\u7535\u5b50\u6280\u672f - \u9009\u578b\u6307\u5357\u7cfb\u5217<\/div>\r\n<p class=\"jz-hero-lead\">\u4e00\u672c\u4e25\u8c28\u7684\u5e94\u7528\u6307\u5357\uff0c\u6307\u5bfc\u5982\u4f55\u5728\u786c\u8d28\u548c\u8f6f\u8d28 CMP \u7814\u78e8\u57ab\u4e4b\u95f4\u505a\u51fa\u9009\u62e9--\u5185\u5bb9\u5305\u62ec\u6743\u8861\u7684\u57fa\u672c\u7269\u7406\u539f\u7406\u3001\u5de5\u827a\u6b65\u9aa4\u5efa\u8bae\u3001\u5806\u53e0\u7814\u78e8\u57ab\u7b56\u7565\uff0c\u4ee5\u53ca\u4f9b\u5de5\u5382\u5de5\u7a0b\u5e08\u4f7f\u7528\u7684\u5b9e\u7528\u51b3\u7b56\u6846\u67b6\u3002.<\/p>\r\n<div class=\"jz-hero-meta\">2026 \u5e74 4 \u6708\ud83d\udcc5\u23f1 15 \u5206\u949f\u9605\u8bfb\ud83c\udfed \u5409\u89c6\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\u3002.<\/div>\r\n<\/div>\r\n<!-- Tags -->\r\n<div class=\"jz-tags\"><span class=\"jz-tag\">\u786c\u8d28 CMP \u886c\u57ab<\/span> <span class=\"jz-tag\">\u8f6f\u8d28 CMP \u886c\u57ab<\/span> <span class=\"jz-tag\">\u710a\u76d8\u9009\u62e9\u6307\u5357<\/span> <span class=\"jz-tag\">\u5e73\u9762\u5316\u6548\u7387<\/span> <span class=\"jz-tag\">WIWNU<\/span> <span class=\"jz-tag\">\u5806\u53e0\u57ab<\/span> <span class=\"jz-tag\">\u90b5\u6c0f D \u786c\u5ea6<\/span> <span class=\"jz-tag\">Cu BEOL<\/span><\/div>\r\n<!-- Trust bar -->\r\n<div class=\"jz-trust\">\r\n<div class=\"jz-trust-badge\">\u8fc7\u7a0b<br \/>\u5df2\u9a8c\u8bc1<\/div>\r\n<div class=\"jz-trust-text\"><strong>\u4f5c\u8005\uff1a\u96c6\u667a\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8.<\/strong> - CMP \u7814\u78e8\u57ab\u5236\u9020\u5546\uff0c\u4e3a\u6676\u5706\u5382\u3001\u8bbe\u5907\u5236\u9020\u5546\u548c\u7814\u7a76\u673a\u6784\u63d0\u4f9b\u786c\u8d28\u805a\u6c28\u916f\u7814\u78e8\u57ab\u548c\u8f6f\u8d28\u5b50\u7814\u78e8\u57ab\u3002\u9009\u62e9\u5efa\u8bae\u57fa\u4e8e\u6211\u4eec\u7684\u5185\u90e8\u5de5\u827a\u8868\u5f81\u6570\u636e\u548c\u5f53\u524d\u7684 2026 \u5e74 4 \u6708\u884c\u4e1a\u5b9e\u8df5\u3002.<\/div>\r\n<\/div>\r\n<!-- TOC -->\r\n<div class=\"jz-toc\">\r\n<div class=\"jz-toc-title\">\ud83d\udccb \u76ee\u5f55<\/div>\r\n<ol>\r\n<li><a href=\"#core-tradeoff\">\u6838\u5fc3\u6743\u8861\uff1a\u5e73\u9762\u6027\u4e0e\u5747\u5300\u6027<\/a><\/li>\r\n<li><a href=\"#hard-pad-deep\">\u786c\u57ab\uff1a\u7279\u6027\u548c\u4f18\u52bf<\/a><\/li>\r\n<li><a href=\"#soft-pad-deep\">\u8f6f\u57ab\uff1a\u7279\u6027\u548c\u4f18\u52bf<\/a><\/li>\r\n<li><a href=\"#head-to-head\">\u6b63\u9762\u6bd4\u8f83\u8868<\/a><\/li>\r\n<li><a href=\"#application-map\">\u9010\u4e2a\u5e94\u7528\u9009\u62e9\u56fe<\/a><\/li>\r\n<li><a href=\"#stacked-strategy\">\u5806\u53e0\u57ab\u6218\u7565<\/a><\/li>\r\n<li><a href=\"#decision-tree\">\u51b3\u7b56\u6846\u67b6\uff1a\u54ea\u4e2a\u57ab\u5b50\u9002\u5408\u60a8\u7684\u53f0\u9636\uff1f<\/a><\/li>\r\n<li><a href=\"#qualification\">\u9274\u5b9a\u65b0\u710a\u76d8\u786c\u5ea6<\/a><\/li>\r\n<li><a href=\"#jizhi-range\">\u5409\u4e4b\u5c9b\u8f6f\u786c\u57ab\u7cfb\u5217<\/a><\/li>\r\n<li><a href=\"#faq\">\u5e38\u89c1\u95ee\u9898<\/a><\/li>\r\n<\/ol>\r\n<\/div>\r\n<!-- Intro -->\r\n<p>\u6bcf\u4e2a CMP \u5de5\u827a\u5de5\u7a0b\u5e08\u6700\u7ec8\u90fd\u4f1a\u9762\u4e34\u540c\u6837\u7684\u57fa\u672c\u51b3\u5b9a\uff1a\u786c\u710a\u76d8\u8fd8\u662f\u8f6f\u710a\u76d8\uff1f\u8fd9\u4e2a\u95ee\u9898\u770b\u4f3c\u7b80\u5355\uff0c\u4f46\u5374\u662f\u63a5\u89e6\u529b\u5b66\u3001\u8868\u9762\u5316\u5b66\u548c\u6676\u5706\u5747\u5300\u6027\u7269\u7406\u5b66\u7684\u4ea4\u53c9\u70b9\u3002\u5982\u679c\u9009\u62e9\u9519\u8bef\uff0c\u53ef\u80fd\u610f\u5473\u7740\u5e73\u9762\u5316\u6548\u679c\u4e0d\u4f73\uff08\u5728\u9700\u8981\u8f6f\u57ab\u7684\u5730\u65b9\u9009\u62e9\u4e86\u786c\u57ab\uff09\uff0c\u6216\u8005\u51fa\u73b0\u8fc7\u591a\u7f3a\u9677\u548c\u5747\u5300\u6027\u504f\u5dee\uff08\u5728\u9700\u8981\u786c\u57ab\u7684\u5730\u65b9\u9009\u62e9\u4e86\u8f6f\u57ab\uff09\u3002.<\/p>\r\n<p>\u672c\u6307\u5357\u63d0\u4f9b\u4e86\u660e\u786e\u7684\u7b54\u6848--\u4e0d\u662f\u4e00\u4e2a\u7b80\u5355\u7684\u89c4\u5219\uff0c\u800c\u662f\u4e00\u4e2a\u7ed3\u6784\u5316\u7684\u6846\u67b6\uff0c\u5c06\u57ab\u7247\u786c\u5ea6\u4e0e\u5de5\u827a\u8981\u6c42\u3001\u8584\u819c\u7c7b\u578b\u3001\u8282\u70b9\u548c\u7f3a\u9677\u9884\u7b97\u8054\u7cfb\u8d77\u6765\u3002\u5982\u679c\u60a8\u60f3\u9996\u5148\u4ece\u673a\u68b0\u5c42\u9762\u4e86\u89e3\u57ab\u7247\u786c\u5ea6\u5982\u4f55\u5f71\u54cd\u6750\u6599\u53bb\u9664\uff0c\u8bf7\u53c2\u9605\uff1a <a class=\"jz-link-chip\" href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-CMP-Polishing-Pads-Work\/\" target=\"_blank\" rel=\"noopener\">CMP \u7814\u78e8\u57ab\u7684\u5de5\u4f5c\u539f\u7406<\/a>. .\u6709\u5173\u9664\u786c\u5ea6\u4ee5\u5916\u7684\u57ab\u7247\u6750\u6599\u7c7b\u522b\u7684\u66f4\u5e7f\u6cdb\u6982\u8ff0\uff0c\u8bf7\u53c2\u89c1\uff1a <a class=\"jz-link-chip\" href=\"https:\/\/jeez-semicon.com\/zh\/blog\/CMP-Pad-Materials-Polyurethane-vs-Other-Options\/\" target=\"_blank\" rel=\"noopener\">CMP \u886c\u57ab\u6750\u6599\uff1a\u805a\u6c28\u916f\u4e0e\u5176\u4ed6\u9009\u62e9<\/a>.<\/p>\r\n<div class=\"jz-stats\">\r\n<div class=\"jz-stat\">\r\n<div class=\"jz-stat-num\">55-65<\/div>\r\n<div class=\"jz-stat-label\">\u751f\u4ea7\u786c\u57ab\uff08IC1000 \u578b\uff09\u7684\u90b5\u6c0f D \u786c\u5ea6\u8303\u56f4<\/div>\r\n<\/div>\r\n<div class=\"jz-stat\">\r\n<div class=\"jz-stat-num\">28-45<\/div>\r\n<div class=\"jz-stat-label\">\u8f6f\u8d28 CMP \u886c\u57ab\/\u526f\u886c\u57ab\u7684\u90b5\u6c0f D \u786c\u5ea6\u8303\u56f4<\/div>\r\n<\/div>\r\n<div class=\"jz-stat\">\r\n<div class=\"jz-stat-num\">&lt;1%<\/div>\r\n<div class=\"jz-stat-label\">\u7528\u4e8e 7 \u7eb3\u7c73\u53ca\u4ee5\u4e0b Cu BEOL CMP \u7684 WIWNU (1\u03c3) \u76ee\u6807<\/div>\r\n<\/div>\r\n<div class=\"jz-stat\">\r\n<div class=\"jz-stat-num\">2-3\u00d7<\/div>\r\n<div class=\"jz-stat-label\">\u5728\u5165\u5c04\u5730\u5f62\u76f8\u540c\u7684\u60c5\u51b5\u4e0b\uff0c\u786c\u57ab\u7684\u5e73\u9762\u5316\u6548\u7387\u4f18\u4e8e\u8f6f\u57ab<\/div>\r\n<\/div>\r\n<\/div>\r\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 1 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<h2 id=\"core-tradeoff\">1.\u6838\u5fc3\u6743\u8861\uff1a\u5e73\u9762\u5316\u6548\u7387\u4e0e\u6676\u5706\u5185\u5747\u5300\u6027<\/h2>\r\n<p>\u786c\u57ab\u8fd8\u662f\u8f6f\u57ab\u7684\u51b3\u5b9a\u53d6\u51b3\u4e8e\u4e00\u4e2a\u4e0d\u53ef\u907f\u514d\u7684\u7269\u7406\u6743\u8861\uff1a <strong>\u8f83\u786c\u7684\u710a\u76d8\u80fd\u66f4\u597d\u5730\u53bb\u9664\u5730\u5f62\u7279\u5f81\uff0c\u800c\u8f83\u8f6f\u7684\u710a\u76d8\u5219\u80fd\u66f4\u597d\u5730\u5728\u6574\u4e2a\u6676\u7247\u4e0a\u5747\u5300\u5206\u5e03\u53bb\u9664\u7269\u3002.<\/strong> \u8fd9\u4e24\u4e2a\u76ee\u6807\u4e4b\u95f4\u5b58\u5728\u7740\u76f4\u63a5\u7684\u77db\u76fe\uff0c\u6ca1\u6709\u4efb\u4f55\u57ab\u7247\u53ef\u4ee5\u540c\u65f6\u5b9e\u73b0\u8fd9\u4e24\u4e2a\u76ee\u6807\u7684\u6700\u5927\u5316\u3002\u4e86\u89e3\u673a\u68b0\u5c42\u9762\u7684\u539f\u56e0\u662f\u660e\u667a\u9009\u62e9\u886c\u57ab\u7684\u57fa\u7840\u3002.<\/p>\r\n<h3>\u4e3a\u4ec0\u4e48\u786c\u57ab\u89c4\u5212\u6548\u679c\u66f4\u597d<\/h3>\r\n<p>\u786c\u57ab\uff08\u90b5\u6c0f D 55-65\uff09\u5177\u6709\u8f83\u9ad8\u7684\u6768\u6c0f\u6a21\u91cf\uff0c\u901a\u5e38\u4e3a 200-500 \u5146\u5e15\u3002\u5f53\u538b\u5728\u5177\u6709\u51f8\u8d77\u5730\u5f62\u7279\u5f81\uff08\u7531\u5e95\u5c42\u8bbe\u5907\u7ed3\u6784\u5f62\u6210\u7684\u5c71\u4e18\uff09\u7684\u6676\u7247\u8868\u9762\u65f6\uff0c\u786c\u57ab\u8868\u9762\u4f1a\u8d8a\u8fc7\u5c71\u8c37\uff0c\u5c06\u63a5\u89e6\u529b\u96c6\u4e2d\u5728\u5c71\u9876\u4e0a\u3002\u8fd9\u79cd\u9009\u62e9\u6027\u52a0\u8f7d\u610f\u5473\u7740\u6750\u6599\u53bb\u9664\u4f18\u5148\u53d1\u751f\u5728\u9ad8\u70b9\uff0c\u4ece\u800c\u9010\u6b65\u964d\u4f4e\u53f0\u9636\u9ad8\u5ea6\u5e76\u63a5\u8fd1\u6574\u4f53\u5e73\u9762\u5316\u3002\u8fd9\u79cd\u73b0\u8c61\u7c7b\u4f3c\u4e8e\u4e00\u628a\u786c\u5c3a\u538b\u8fc7\u51f9\u51f8\u4e0d\u5e73\u7684\u8868\u9762--\u53ea\u6709\u51f9\u51f8\u4e0d\u5e73\u7684\u5730\u65b9\u624d\u4f1a\u63a5\u89e6\u5230\u786c\u5c3a\u3002.<\/p>\r\n<h3>\u4e3a\u4ec0\u4e48\u8f6f\u57ab\u66f4\u5747\u5300<\/h3>\r\n<p>\u8f6f\u57ab\uff08\u90b5\u6c0f D 28-45\uff09\u7684\u6768\u6c0f\u6a21\u91cf\u8f83\u4f4e\uff0c\u901a\u5e38\u4e3a 10-60 \u5146\u5e15\u3002\u5728\u76f8\u540c\u7684\u5411\u4e0b\u4f5c\u7528\u529b\u4e0b\uff0c\u8f6f\u57ab\u4f1a\u53d8\u5f62\u5e76\u4e0e\u6676\u7247\u8868\u9762\u7684\u5730\u5f62\u76f8\u9002\u5e94\uff0c\u800c\u4e0d\u662f\u5728\u6676\u7247\u8868\u9762\u67b6\u6865\u3002\u63a5\u89e6\u529b\u5728\u5c71\u4e18\u548c\u5c71\u8c37\u4e4b\u95f4\u7684\u5206\u5e03\u66f4\u52a0\u5747\u5300\u3002\u5176\u7ed3\u679c\u662f\u6750\u6599\u53bb\u9664\u66f4\u52a0\u5747\u5300\uff0c\u4f46\u4ee3\u4ef7\u662f\u53f0\u9636\u9ad8\u5ea6\u964d\u4f4e\u3002\u6b64\u5916\uff0c\u5728\u6676\u5706\u5c3a\u5ea6\u4e0a\uff0c\u8f6f\u57ab\u7b26\u5408 300 \u6beb\u7c73\u751f\u4ea7\u6676\u5706\u7684\u5f13\u5f62\u548c\u7fd8\u66f2\uff08\u5cf0\u8c37\u95f4\u8ddd\u901a\u5e38\u4e3a 20-80 \u5fae\u7c73\uff09\uff0c\u51cf\u5c11\u4e86\u8fb9\u7f18\u5230\u4e2d\u5fc3\u7684\u538b\u529b\u5dee\uff0c\u800c\u8fd9\u79cd\u538b\u529b\u5dee\u4f1a\u5bfc\u81f4\u786c\u57ab\u7684\u79fb\u9664\u8f6e\u5ed3\u4e0d\u5747\u5300\u3002.<\/p>\r\n<div class=\"jz-callout info\">\r\n<div class=\"jz-callout-icon\">\u2139\ufe0f<\/div>\r\n<div class=\"jz-callout-body\"><strong>\u5e73\u9762\u5316\u957f\u5ea6\u6807\u5ea6<\/strong> \u786c\u57ab\u5e73\u9762\u5316\u4f18\u52bf\u5728\u7279\u5b9a\u7684\u6a2a\u5411\u957f\u5ea6\u8303\u56f4\u5185\uff08\u7ea6 1-10 \u6beb\u7c73\uff09\u53d1\u6325\u4f5c\u7528\uff0c\u8be5\u8303\u56f4\u4e0e\u786c\u57ab\u53ef\u4ee5\u6865\u63a5\u5730\u5f62\u7279\u5f81\u800c\u4e0d\u53d8\u5f62\u7684\u8ddd\u79bb\u76f8\u5bf9\u5e94\u3002\u5c0f\u4e8e\u8fd9\u4e00\u957f\u5ea6\u8303\u56f4\u7684\u5730\u7269\u5bf9\u4e8e\u786c\u57ab\u7684\u6865\u63a5\u673a\u5236\u6765\u8bf4\u5b9e\u9645\u4e0a\u662f \u201c\u9690\u5f62 \u201d\u7684\uff0c\u65e0\u8bba\u5176\u9ad8\u5ea6\u5982\u4f55\uff0c\u90fd\u4f1a\u88ab\u5747\u5300\u5730\u79fb\u9664\u3002\u5927\u4e8e\u6865\u63a5\u957f\u5ea6\u7684\u7279\u5f81\u5219\u9700\u8981\u591a\u4e2a CMP \u5468\u671f\u6216\u5176\u4ed6\u5e73\u9762\u5316\u65b9\u6cd5\u3002\u4e86\u89e3\u7279\u5b9a\u786c\u710a\u76d8\u548c\u5de5\u827a\u6761\u4ef6\u4e0b\u7684\u8fd9\u4e00\u957f\u5ea6\u8303\u56f4\u5bf9\u4e8e\u9884\u6d4b\u5e73\u9762\u5316\u6548\u7387\u81f3\u5173\u91cd\u8981\u3002.<\/div>\r\n<\/div>\r\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 2 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<h2 id=\"hard-pad-deep\">2.\u786c\u57ab\uff1a\u7279\u6027\u3001\u4f18\u52bf\u548c\u5c40\u9650\u6027<\/h2>\r\n<div class=\"jz-vs-wrap\">\r\n<div class=\"jz-vs-col jz-vs-col-hard\">\r\n<div class=\"jz-vs-label jz-vs-label-hard\">\u786c\u57ab - \u4f18\u52bf<\/div>\r\n<div class=\"jz-vs-title jz-vs-title-hard\">\u6d77\u5cb8 D 55-65<\/div>\r\n<ul class=\"jz-vs-list pros\">\r\n<li>\u5e73\u9762\u5316\u6548\u7387\u9ad8 - \u5178\u578b\u60c5\u51b5\u4e0b\uff0c\u4e00\u6b21\u901a\u8fc7\u53ef\u51cf\u5c11 &gt;80% \u7684\u9636\u68af\u9ad8\u5ea6<\/li>\r\n<li>\u5728\u957f\u65f6\u95f4\u7684\u8c03\u8282\u8fc7\u7a0b\u4e2d\uff0c\u53bb\u9664\u7387\u7a33\u5b9a\u4e14\u53ef\u9884\u6d4b<\/li>\r\n<li>\u5728\u9ad8\u7279\u5f81\u548c\u4f4e\u7279\u5f81\u4e4b\u95f4\u5177\u6709\u66f4\u597d\u7684\u9009\u62e9\u6027--\u662f\u5927\u9a6c\u58eb\u9769\u9636\u68af\u7684\u7406\u60f3\u9009\u62e9<\/li>\r\n<li>\u8868\u9762\u66f4\u575a\u786c\uff0c\u53ef\u9632\u6b62\u51f8\u9762\u53d8\u5e73 - \u5728\u66f4\u957f\u7684\u886c\u57ab\u5bff\u547d\u671f\u95f4\u4fdd\u6301 MRR<\/li>\r\n<li>\u8f83\u9ad8\u7684\u666e\u96f7\u65af\u987f\u7cfb\u6570 Kp - \u6bcf\u538b\u529b\u5355\u4f4d\u8f83\u9ad8\u7684\u541e\u5410\u91cf<\/li>\r\n<li>\u4e0e\u7528\u4e8e STI \u6c27\u5316\u7269 CMP \u7684\u9ad8\u9009\u62e9\u6027\u94c8\u6d46\u6599\u5177\u6709\u66f4\u597d\u7684\u517c\u5bb9\u6027<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jz-vs-col jz-vs-col-soft\">\r\n<div class=\"jz-vs-label jz-vs-label-soft\">\u786c\u57ab - \u9650\u5236<\/div>\r\n<div class=\"jz-vs-title jz-vs-title-soft\">\u5c0f\u5fc3<\/div>\r\n<ul class=\"jz-vs-list cons\">\r\n<li>\u66f4\u9ad8\u7684\u5212\u75d5\u5bc6\u5ea6 - \u575a\u786c\u7684\u8868\u9762\u53ef\u5c06\u66f4\u591a\u7684\u529b\u4f20\u9012\u7ed9\u78e8\u7c92<\/li>\r\n<li>\u5f2f\u66f2\u6216\u7fd8\u66f2\u6676\u7247\u7684\u8fb9\u7f18-\u4e2d\u5fc3\u4e00\u81f4\u6027\u5dee<\/li>\r\n<li>\u9ad8\u526a\u5207\u529b\u4e0b\u7684\u4f4e\u4ecb\u7535\u5206\u5c42\u98ce\u9669<\/li>\r\n<li>\u6321\u5708\u51e0\u4f55\u5f62\u72b6\u5bf9\u538b\u529b\u4e0d\u5747\u5300\u6027\u7684\u654f\u611f\u6027\u66f4\u9ad8<\/li>\r\n<li>\u9700\u8981\u66f4\u79ef\u6781\u7684\u8c03\u8282\u4ee5\u9632\u6b62\u73bb\u7483\u4e0a\u91c9--\u8c03\u8282\u5668\u78e8\u635f\u66f4\u4e25\u91cd<\/li>\r\n<li>\u4e0d\u9002\u7528\u4e8e\u8fc7\u5ea6\u629b\u5149\u98ce\u9669\u8f83\u9ad8\u7684\u8d85\u8584\u8584\u819c<\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<h3>\u5178\u578b\u786c\u57ab\u89c4\u683c\uff08\u751f\u4ea7\u7ea7\uff09<\/h3>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>\u53c2\u6570<\/th>\r\n<th>\u89c4\u683c\u8303\u56f4<\/th>\r\n<th>\u6d4b\u8bd5\u65b9\u6cd5<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td>\u90b5\u6c0f D \u786c\u5ea6<\/td>\r\n<td>55-65\uff08\u5730\u6bb5\u5185\u00b12\uff09<\/td>\r\n<td>ASTM D2240\uff0c5 \u70b9\u6676\u7247\u56fe<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u538b\u7f29\u6027<\/td>\r\n<td>0.5-2.5%<\/td>\r\n<td>% \u539a\u5ea6\u53d8\u5316\uff0c25 \u5343\u5e15\uff0c60 \u79d2<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u5f39\u6027\u6062\u590d<\/td>\r\n<td>&gt;70%<\/td>\r\n<td>% \u79fb\u9664\u8d1f\u8f7d\u540e 60 \u79d2\u6062\u590d<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u5e73\u5747\u5b54\u5f84<\/td>\r\n<td>20-45 \u5fae\u7c73<\/td>\r\n<td>\u5149\u5b66\u622a\u9762\u3001\u56fe\u50cf\u5206\u6790<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u5b54\u5f84 CV\uff08%\uff09<\/td>\r\n<td>&lt;18%<\/td>\r\n<td>\u6807\u51c6\u504f\u5dee \/ \u5e73\u5747\u503c \u00d7 100<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u710a\u76d8\u539a\u5ea6<\/td>\r\n<td>2.0-2.5 \u6beb\u7c73\uff08\u00b10.05 \u6beb\u7c73\uff09<\/td>\r\n<td>5 \u70b9\u89e6\u70b9\u6d4b\u91cf\u4eea<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u6c9f\u69fd\u6df1\u5ea6<\/td>\r\n<td>0.5-0.8 \u6beb\u7c73<\/td>\r\n<td>\u8f6e\u5ed3\u4eea\u6a2a\u622a\u9762<\/td>\r\n<\/tr>\r\n<tr>\r\n<td>\u6c9f\u69fd\u5bbd\u5ea6<\/td>\r\n<td>0.3-0.6 \u6beb\u7c73<\/td>\r\n<td>\u8f6e\u5ed3\u4eea\u6a2a\u622a\u9762<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 3 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<h2 id=\"soft-pad-deep\">3.\u8f6f\u57ab\uff1a\u7279\u6027\u3001\u4f18\u52bf\u548c\u5c40\u9650\u6027<\/h2>\r\n<div class=\"jz-vs-wrap\">\r\n<div class=\"jz-vs-col jz-vs-col-hard\">\r\n<div class=\"jz-vs-label jz-vs-label-hard\">\u8f6f\u57ab - \u4f18\u52bf<\/div>\r\n<div class=\"jz-vs-title jz-vs-title-hard\">\u6d77\u5cb8 D 28-45<\/div>\r\n<ul class=\"jz-vs-list pros\">\r\n<li>\u5353\u8d8a\u7684\u6676\u7247\u5185\u5747\u5300\u6027 - \u7b26\u5408\u6676\u7247\u5f2f\u66f2\u548c\u7fd8\u66f2\u7684\u8981\u6c42<\/li>\r\n<li>\u5bf9\u8106\u5f31\u8584\u819c\u7684\u526a\u5207\u529b\u5c0f - \u5bf9\u4f4e k \u7535\u4ecb\u8d28\uff08k &lt; 2.5\uff09\u5b89\u5168<\/li>\r\n<li>\u66f4\u4f4e\u7684\u5212\u75d5\u548c\u5fae\u5212\u75d5\u5bc6\u5ea6 - \u5bf9\u94dc\u548c\u963b\u6321\u5c42 CMP \u81f3\u5173\u91cd\u8981<\/li>\r\n<li>\u975e\u5e38\u9002\u7528\u4e8e\u8981\u6c42 Ra &lt; 0.5 nm \u7684\u6700\u7ec8\u8868\u9762\u7cbe\u52a0\u5de5\u6b65\u9aa4<\/li>\r\n<li>\u5728\u5e94\u529b\u819c\u4ea7\u751f\u9ad8\u5f13\u5f62\/\u7fd8\u66f2\u7684 300 mm \u6676\u5706\u4e0a\u53d6\u5f97\u66f4\u597d\u7684\u6548\u679c<\/li>\r\n<li>\u53ef\u627f\u53d7\u5fae\u5c0f\u7684\u6ce5\u6d46\u6d41\u52a8\u53d8\u5316\u548c\u914d\u65b9\u6270\u52a8<\/li>\r\n<\/ul>\r\n<\/div>\r\n<div class=\"jz-vs-col jz-vs-col-soft\">\r\n<div class=\"jz-vs-label jz-vs-label-soft\">\u8f6f\u57ab - \u9650\u5236<\/div>\r\n<div class=\"jz-vs-title jz-vs-title-soft\">\u5c0f\u5fc3<\/div>\r\n<ul class=\"jz-vs-list cons\">\r\n<li>\u5e73\u9762\u5316\u6548\u7387\u4f4e - \u5728\u7c97\u7cd9\u7684\u5165\u6599\u8868\u9762\u4e0a\u9636\u68af\u9ad8\u5ea6\u964d\u4f4e\u6548\u679c\u5dee<\/li>\r\n<li>\u57ab\u7247\u4e0a\u91c9\u540e MRR \u8870\u51cf\u66f4\u5feb - \u9700\u8981\u66f4\u9891\u7e41\u5730\u8fdb\u884c\u8c03\u8282<\/li>\r\n<li>\u8f83\u4f4e\u7684 Tg - \u5728\u52a0\u5de5\u6e29\u5ea6\u5347\u9ad8\u65f6\u66f4\u5bb9\u6613\u53d1\u751f\u70ed\u8f6f\u5316<\/li>\r\n<li>\u5728\u65e9\u671f\u710a\u76d8\u5bff\u547d\u4e2d\uff0c\u6676\u5706\u5230\u6676\u5706\u4e4b\u95f4\u7684\u53ef\u538b\u7f29\u6027\u53d8\u5316\u66f4\u5927<\/li>\r\n<li>\u4e0d\u9002\u7528\u4e8e STI\u3001PMD \u6216\u4efb\u4f55\u9700\u8981 &gt;50% \u68af\u7ea7\u9ad8\u5ea6\u964d\u4f4e\u7684\u68af\u7ea7<\/li>\r\n<li>\u5bf9\u8c03\u8282\u53c2\u6570\u654f\u611f - \u8fc7\u5ea6\u8c03\u8282\u4f1a\u663e\u8457\u589e\u52a0 MRR<\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/div>\r\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 4 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<h2 id=\"head-to-head\">4.\u6b63\u9762\u6bd4\u8f83\uff1a\u6bcf\u4e2a\u5173\u952e\u6307\u6807<\/h2>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>\u516c\u5236<\/th>\r\n<th class=\"col-hard\">\u786c\u57ab\uff08\u90b5\u6c0f D 55-65\uff09<\/th>\r\n<th class=\"col-soft\">\u8f6f\u57ab\uff08\u90b5\u6c0f D 28-45\uff09<\/th>\r\n<th>\u4f18\u80dc\u8005<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td><strong>\u5e73\u9762\u5316\u6548\u7387<\/strong><\/td>\r\n<td class=\"win\">\u9ad8 - \u6865\u63a5\u5730\u5f62\uff0c\u6709\u9009\u62e9\u6027\u5730\u79fb\u9664\u9ad8\u70b9<\/td>\r\n<td class=\"lose\">\u4f4e - \u7b26\u5408\u5730\u5f62\uff0c\u5747\u5300\u6e05\u9664<\/td>\r\n<td class=\"win\">\u786c\u8d28<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u6676\u7247\u5185\u5747\u5300\u6027 (WIWNU)<\/strong><\/td>\r\n<td class=\"lose\">\u4e2d\u5ea6 - \u5bf9\u6676\u7247\u5f2f\u66f2\u548c\u6321\u73af\u51e0\u4f55\u5f62\u72b6\u654f\u611f<\/td>\r\n<td class=\"win\">\u9ad8 - \u7b26\u5408\u6676\u7247\u5c3a\u5ea6\u7684\u5f62\u72b6\u53d8\u5316<\/td>\r\n<td class=\"win\">\u8f6f\u8d28<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u5212\u75d5\u7f3a\u9677\u5bc6\u5ea6<\/strong><\/td>\r\n<td class=\"lose\">\u66f4\u9ad8 - \u786c\u8d28\u8868\u9762\u4f20\u9012\u66f4\u9ad8\u7684\u5c40\u90e8\u5e94\u529b<\/td>\r\n<td class=\"win\">\u4e0b\u90e8 - \u987a\u5e94\u6027\u8868\u9762\u53ef\u964d\u4f4e\u63a5\u89e6\u5e94\u529b\u5cf0\u503c<\/td>\r\n<td class=\"win\">\u8f6f\u8d28<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u4f4e K \u503c\u8584\u819c\u7684\u5b89\u5168\u6027<\/strong><\/td>\r\n<td class=\"lose\">\u6807\u51c6\u538b\u529b\u4e0b\u7684\u5206\u5c42\u98ce\u9669<\/td>\r\n<td class=\"win\">\u5728\u6807\u51c6\u538b\u529b\uff08&lt;3 psi\uff09\u4e0b\u5b89\u5168\u4f7f\u7528<\/td>\r\n<td class=\"win\">\u8f6f\u8d28<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u6750\u6599\u53bb\u9664\u7387<\/strong><\/td>\r\n<td class=\"win\">\u76f8\u540c P \u00d7 V \u6761\u4ef6\u4e0b\u7684\u66f4\u9ad8 MRR - \u66f4\u597d\u7684\u541e\u5410\u91cf<\/td>\r\n<td class=\"lose\">\u66f4\u4f4e\u7684 MRR - \u9700\u8981\u66f4\u957f\u7684\u629b\u5149\u65f6\u95f4<\/td>\r\n<td class=\"win\">\u786c\u8d28<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u710a\u76d8\u5bff\u547d\uff08\u6676\u7247\/\u710a\u76d8\uff09<\/strong><\/td>\r\n<td class=\"win\">500-2,000 \u4e2a\u6676\u7247 - \u786c\u8d28\u8868\u9762\u8010\u78e8\u635f<\/td>\r\n<td class=\"mid\">300-1,000 \u5757\u6676\u7247--\u8868\u9762\u66f4\u8f6f\uff0c\u4e0a\u91c9\u66f4\u5feb<\/td>\r\n<td class=\"win\">\u786c\u8d28<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u6ce5\u6d46\u5229\u7528<\/strong><\/td>\r\n<td class=\"mid\">\u9002\u5ea6 - \u5c01\u95ed\u5f0f\u6c14\u5b54\u63d0\u4f9b\u826f\u597d\u7684\u4fdd\u6301\u529b<\/td>\r\n<td class=\"win\">\u9ad8--\u5f00\u5b54\u7ed3\u6784\u53ef\u6709\u6548\u5438\u6536\u548c\u91ca\u653e\u6ce5\u6d46<\/td>\r\n<td class=\"win\">\u8f6f\u8d28<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u8c03\u8282\u654f\u611f\u6027<\/strong><\/td>\r\n<td class=\"win\">\u8f83\u4f4e - \u6bcf\u5355\u4f4d\u8c03\u8282\u529b\u7684 MRR \u53d8\u5316\u8f83\u5c0f<\/td>\r\n<td class=\"lose\">\u8f83\u9ad8 - \u6761\u4ef6\u7684\u5fae\u5c0f\u53d8\u5316\u4f1a\u5bfc\u81f4 MRR \u7684\u663e\u8457\u53d8\u5316<\/td>\r\n<td class=\"win\">\u786c\u8d28<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u70ed\u7a33\u5b9a\u6027<\/strong><\/td>\r\n<td class=\"win\">\u66f4\u9ad8\u7684 Tg\uff0890-120\u00b0C\uff09--\u66f4\u9002\u7528\u4e8e\u9ad8\u538b\u5de5\u827a<\/td>\r\n<td class=\"lose\">\u8f83\u4f4e\u7684 Tg\uff0855-80\u00b0C\uff09--\u5728\u70ed\u8d1f\u8377\u4e0b\u8f6f\u5316\u66f4\u5feb<\/td>\r\n<td class=\"win\">\u786c\u8d28<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u6210\u672c\uff08\u5355\u4ef7\uff09<\/strong><\/td>\r\n<td class=\"mid\">\u57fa\u7ebf (1.0\u00d7)<\/td>\r\n<td class=\"win\">\u7565\u4f4e\uff080.8-1.1\u00d7\uff09--\u53d6\u51b3\u4e8e\u914d\u65b9<\/td>\r\n<td class=\"mid\">\u7c7b\u4f3c<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 5 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<h2 id=\"application-map\">5.\u9010\u4e2a\u5e94\u7528\u9009\u62e9\u56fe<\/h2>\r\n<p>\u4ee5\u4e0b\u5e94\u7528\u56fe\u4e3a\u5148\u8fdb\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u6700\u5e38\u89c1\u7684 CMP \u6b65\u9aa4\u63d0\u4f9b\u4e86\u710a\u76d8\u786c\u5ea6\u5efa\u8bae\u3002\u6bcf\u9879\u5efa\u8bae\u90fd\u4ee5\u4e0a\u8ff0\u5de5\u827a\u7269\u7406\u5b66\u4e3a\u57fa\u7840\uff0c\u5e76\u53cd\u6620\u4e86 2026 \u5e74 4 \u6708\u6676\u5706\u5382\u6700\u4f73\u5b9e\u8df5\u3002\u5982\u9700\u66f4\u5e7f\u6cdb\u5730\u4e86\u89e3\u6574\u4e2a\u96c6\u6210\u7535\u8def\u5de5\u827a\u6d41\u7a0b\u4e2d\u5982\u4f55\u4f7f\u7528 CMP \u7814\u78e8\u57ab\uff0c\u8bf7\u53c2\u9605\uff1a <a class=\"jz-link-chip\" href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Semiconductor-CMP-Polishing-Pads\/\" target=\"_blank\" rel=\"noopener\">\u534a\u5bfc\u4f53 CMP \u7814\u78e8\u57ab<\/a>.<\/p>\r\n<div class=\"jz-app-grid\">\r\n<div class=\"jz-app-card\">\r\n<div class=\"jz-app-card-head\"><span class=\"jz-app-badge jz-app-badge-hard\">\u786c\u57ab<\/span> <span class=\"jz-app-title\">STI \u6c27\u5316\u7269 CMP<\/span><\/div>\r\n<div class=\"jz-app-desc\">\u6d45\u6c9f\u69fd\u9694\u79bb\u9700\u8981\u79ef\u6781\u53bb\u9664\u9636\u68af\u9ad8\u5ea6\uff081,000-3,000 \u00c5 \u7684\u5165\u5c04\u6c27\u5316\u9636\u68af\uff09\u3002\u4f7f\u7528\u94c8\u57fa\u6d46\u6599\u7684\u786c\u7814\u78e8\u57ab\u53ef\u5728\u4e00\u4e2a\u629b\u5149\u6b65\u9aa4\u4e2d\u5b9e\u73b0\u5927\u4e8e 90% \u7684\u9636\u8dc3\u9ad8\u5ea6\u964d\u4f4e\u3002\u5bf9\u7845\u2083N\u2084\u963b\u6321\u5c42\u7684\u9009\u62e9\u6027\u81f3\u5173\u91cd\u8981--\u786c\u57ab\u6709\u52a9\u4e8e\u4fdd\u6301\u673a\u68b0\u9009\u62e9\u6027\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-app-card\">\r\n<div class=\"jz-app-card-head\"><span class=\"jz-app-badge jz-app-badge-hard\">\u786c\u57ab<\/span> <span class=\"jz-app-title\">\u9884\u91d1\u5c5e\u4ecb\u8d28\uff08PMD\uff09<\/span><\/div>\r\n<div class=\"jz-app-desc\">\u5728\u7b2c\u4e00\u5c42\u91d1\u5c5e\u4e4b\u524d\u8fdb\u884c BPSG \u6216 USG \u5e73\u9762\u5316\u3002\u6805\u6781\u548c\u63a5\u89e6\u7ed3\u6784\u7684\u9ad8\u4f20\u5165\u5f62\u8c8c\u8981\u6c42\u786c\u57ab\u5e73\u9762\u5316\u7684\u6548\u7387\u3002\u76ee\u6807\u8584\u819c\u662f\u6c27\u5316\u7269--\u4f7f\u7528\u4e8c\u6c27\u5316\u7845\u6216\u94c8\u6d46\u7684\u786c\u710a\u76d8\u662f\u6807\u51c6\u65b9\u6cd5\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-app-card\">\r\n<div class=\"jz-app-card-head\"><span class=\"jz-app-badge jz-app-badge-hard\">\u786c\u57ab<\/span> <span class=\"jz-app-title\">W \u63d2\u5934 CMP<\/span><\/div>\r\n<div class=\"jz-app-desc\">\u94a8\u5316\u5b66\u673a\u68b0\u629b\u5149\u53ef\u53bb\u9664\u6c89\u79ef\u5728\u63a5\u89e6\u5b54\/\u901a\u5b54\u4e2d\u7684\u591a\u4f59\u94a8\uff0c\u5e76\u963b\u6321\u5728 TiN\/TaN \u9694\u79bb\u5c42\u4e0a\u3002\u5e73\u9762\u5316\u9700\u8981\u786c\u57ab\uff0c\u4ee5\u4fdd\u6301\u94a8\u7684\u4e2d\u7b49\u786c\u5ea6\u6240\u9700\u7684\u9ad8\u4e0b\u538b\u529b\u3002\u5bf9\u963b\u6321\u5c42\u7684\u9ad8\u9009\u62e9\u6027\u81f3\u5173\u91cd\u8981\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-app-card\">\r\n<div class=\"jz-app-card-head\"><span class=\"jz-app-badge jz-app-badge-soft\">\u8f6f\u57ab<\/span> <span class=\"jz-app-title\">\u94dc\u7684\u6279\u91cf\u53bb\u9664\uff08BEOL \u6b65\u9aa4 1\uff09<\/span><\/div>\r\n<div class=\"jz-app-desc\">\u94dc\u5927\u9a6c\u58eb\u9769\u7684\u7b2c\u4e00\u4e2a CMP \u6b65\u9aa4\u662f\u53bb\u9664\u7535\u9540\u8fc7\u7a0b\u4e2d\u6c89\u79ef\u7684\u5927\u90e8\u5206\u8986\u94dc\u3002\u786c\u5ea6\u9002\u4e2d\u7684\u8f6f\u57ab\uff08\u90b5\u6c0f D 38-45\uff09\u65e2\u80fd\u8fbe\u5230\u5408\u7406\u7684\u53bb\u9664\u7387\uff0c\u53c8\u80fd\u4fdd\u62a4\u5e95\u5c42\u7684\u4f4e K \u4ecb\u7535\u5c42\uff0c\u9632\u6b62\u5176\u5728\u526a\u5207\u529b\u4f5c\u7528\u4e0b\u5206\u5c42\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-app-card\">\r\n<div class=\"jz-app-card-head\"><span class=\"jz-app-badge jz-app-badge-soft\">\u8f6f\u57ab<\/span> <span class=\"jz-app-title\">\u94dc\/\u963b\u9694\u7f13\u51b2\uff08BEOL \u6b65\u9aa4 2\uff09<\/span><\/div>\r\n<div class=\"jz-app-desc\">\u6700\u540e\u6e05\u9664\u963b\u6321\u91d1\u5c5e\uff08Ta\u3001TaN\uff09\u5e76\u5728\u53bb\u9664\u94dc\u5757\u540e\u8fdb\u884c\u8868\u9762\u5e73\u6574\u3002\u975e\u5e38\u67d4\u8f6f\u7684\u57ab\u5b50\uff08\u90b5\u6c0f D 28-38\uff09\u53ef\u5728\u8fd9\u4e00\u7f3a\u9677\u5173\u952e\u7684\u7cbe\u52a0\u5de5\u6b65\u9aa4\u4e2d\u6700\u5927\u9650\u5ea6\u5730\u51cf\u5c11\u5212\u75d5\u7684\u4ea7\u751f\u3002CMP \u540e\u8868\u9762\u7c97\u7cd9\u5ea6 Ra &lt; 0.5 nm \u662f\u76ee\u6807\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-app-card\">\r\n<div class=\"jz-app-card-head\"><span class=\"jz-app-badge jz-app-badge-soft\">\u8f6f\u57ab<\/span> <span class=\"jz-app-title\">\u4f4e k ILD \u5e73\u9762\u5316<\/span><\/div>\r\n<div class=\"jz-app-desc\">\u591a\u5b54\u4f4e k \u4ecb\u7535\u6750\u6599\uff08k &lt; 2.5\uff0c\u5b54\u9699\u7387 20-50%\uff09\u5728\u673a\u68b0\u6027\u80fd\u4e0a\u975e\u5e38\u8106\u5f31\uff0c\u6768\u6c0f\u6a21\u91cf\u4f4e\u81f3 3-8 GPa\u3002\u53ea\u6709\u5728\u538b\u529b\u8f83\u4f4e\uff08&lt;2 psi\uff09\u7684\u60c5\u51b5\u4e0b\u4f7f\u7528\u8f6f\u57ab\u624d\u80fd\u5728\u4e0d\u4ea7\u751f\u88c2\u7eb9\u7684\u60c5\u51b5\u4e0b\u629b\u5149\u8fd9\u4e9b\u8584\u819c\u3002\u6807\u51c6\u7684\u5806\u53e0\u710a\u76d8\u914d\u7f6e\u5e26\u6709\u975e\u5e38\u67d4\u8f6f\u7684\u526f\u710a\u76d8\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-app-card\">\r\n<div class=\"jz-app-card-head\"><span class=\"jz-app-badge jz-app-badge-stack\">\u5806\u53e0<\/span> <span class=\"jz-app-title\">300 \u6beb\u7c73\u5148\u8fdb\u8282\u70b9\u6c27\u5316\u7269<\/span><\/div>\r\n<div class=\"jz-app-desc\">\u5728 7 \u7eb3\u7c73\u53ca\u4ee5\u4e0b\uff0c\u8fdb\u5165\u7684\u6676\u7247\u5f2f\u66f2\u8d85\u8fc7 100 \u5fae\u7c73\u3002\u5806\u53e0\u5f0f\u914d\u7f6e\uff08\u786c IC1000 \u578b\u9876\u57ab + \u8f6f Suba \u578b\u526f\u57ab\uff09\u53ef\u63d0\u4f9b\u786c\u57ab\u5e73\u9762\u5316\u6548\u7387\uff0c\u800c\u987a\u5e94\u6027\u526f\u57ab\u53ef\u4fee\u6b63\u6676\u7247\u5f2f\u66f2\u3002\u9886\u5148\u5de5\u5382\u7684\u884c\u4e1a\u6807\u51c6\u914d\u7f6e\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-app-card\">\r\n<div class=\"jz-app-card-head\"><span class=\"jz-app-badge jz-app-badge-hard\">\u786c\u8d28\/\u7279\u6b8a<\/span> <span class=\"jz-app-title\">SiC \/ GaN \u57fa\u5e95\u9762<\/span><\/div>\r\n<div class=\"jz-app-desc\">\u5316\u5408\u7269\u534a\u5bfc\u4f53\u9700\u8981\u8010\u5316\u5b66\u6027\u548c\u70ed\u7a33\u5b9a\u6027\u66f4\u5f3a\u7684\u7279\u79cd\u786c\u886c\u57ab\u3002\u6807\u51c6\u786c\u8d28\u805a\u6c28\u916f\u886c\u57ab\u5728\u78b3\u5316\u7845\uff08\u83ab\u6c0f 9.5\uff09\u4e0a\u7684\u6027\u80fd\u8f83\u5dee\u3002\u53c2\u89c1\uff1a <a style=\"color: #0090d4;\" href=\"https:\/\/jeez-semicon.com\/zh\/blog\/SiC-CMP-Polishing-Pads-for-Third-Generation-Semiconductors\/\" target=\"_blank\" rel=\"noopener\">\u78b3\u5316\u7845\u4e13\u7528\u710a\u76d8\u6307\u5357<\/a>.<\/div>\r\n<\/div>\r\n<\/div>\r\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 6 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<h2 id=\"stacked-strategy\">6.\u5806\u53e0\u57ab\u6218\u7565\uff1a\u4e24\u5168\u5176\u7f8e<\/h2>\r\n<p>\u8fc7\u53bb\u5341\u5e74\u4e2d\uff0cCMP \u7814\u78e8\u57ab\u5de5\u7a0b\u9886\u57df\u6700\u91cd\u8981\u7684\u5b9e\u9645\u53d1\u5c55\u662f\u5e7f\u6cdb\u91c7\u7528\u5806\u53e0\u5f0f\u7814\u78e8\u57ab\u914d\u7f6e--\u5c06\u786c\u8d28\u629b\u5149\u9876\u57ab\u4e0e\u987a\u5e94\u6027\u6ce1\u6cab\u5e95\u57ab\u76f8\u7ed3\u5408--\u4ee5\u540c\u65f6\u5b9e\u73b0\u5e73\u9762\u5316\u6548\u7387\u548c\u6676\u5706\u5185\u5747\u5300\u6027\u3002\u8fd9\u79cd\u7b56\u7565\u901a\u8fc7\u5c06\u4e24\u79cd\u529f\u80fd\u5206\u79bb\u5230\u4e0d\u540c\u7684\u5c42\u4e2d\uff0c\u76f4\u63a5\u89e3\u51b3\u4e86\u786c\u4e0e\u8f6f\u4e4b\u95f4\u7684\u6743\u8861\u95ee\u9898\u3002.<\/p>\r\n<h3>\u5806\u6808\u5982\u4f55\u5de5\u4f5c<\/h3>\r\n<p>\u5728\u5806\u53e0\u57ab\u914d\u7f6e\u4e2d\uff0c\u786c\u8d28\u805a\u6c28\u916f\u9876\u57ab\uff08\u90b5\u6c0f D 55-65\uff09\u63d0\u4f9b\u629b\u5149\u8868\u9762\u3002\u5176\u6768\u6c0f\u6a21\u91cf\u8f83\u9ad8\uff0c\u53ef\u786e\u4fdd\u4e0e\u6676\u7247\u8868\u9762\u7684\u63a5\u89e6\u4e3b\u8981\u662f\u7531\u53ef\u63d0\u4f9b\u5e73\u9762\u5316\u6548\u7387\u7684\u975e\u6676\u5c42\u9762\u529b\u5b66\u6240\u4e3b\u5bfc\u3002\u5728\u9876\u57ab\u4e0b\u9762\uff0c\u8f6f\u6ce1\u6cab\u5e95\u57ab\uff08\u901a\u5e38\u4e3a Shore A 30-55\uff0c0.5-1.5 \u6beb\u7c73\u539a\uff09\u76f4\u63a5\u4e0e\u538b\u76d8\u8d34\u5408\u3002\u886c\u57ab\u7684\u4f5c\u7528\u7eaf\u7cb9\u662f\u673a\u68b0\u6027\u7684\uff1a\u5b83\u7684\u4f53\u79ef\u987a\u5e94\u6027\u53ef\u4ee5\u5438\u6536\u6676\u7247\u5c3a\u5ea6\u7684\u5f2f\u66f2\u548c\u7fd8\u66f2\uff0c\u5c06\u8f7d\u7269\u5934\u7684\u63a5\u89e6\u529b\u66f4\u5747\u5300\u5730\u91cd\u65b0\u5206\u914d\u5230\u6676\u7247\u8868\u9762\u3002\u886c\u57ab\u4e0d\u76f4\u63a5\u63a5\u89e6\u6d46\u6599\u6216\u6676\u7247\u3002.<\/p>\r\n<div class=\"jz-callout tip\">\r\n<div class=\"jz-callout-icon\">\ud83d\udca1<\/div>\r\n<div class=\"jz-callout-body\"><strong>\u8c03\u6574\u5806\u6808\uff1a\u5b50\u677f\u4f5c\u4e3a\u8fdb\u7a0b\u65cb\u94ae<\/strong> \u7ec4\u5408\u57ab\u5c42\u7684\u6709\u6548\u53ef\u538b\u7f29\u6027\u4e3b\u8981\u53d7\u526f\u57ab\u5c42\u539a\u5ea6\u548c\u6ce1\u6cab\u5bc6\u5ea6\u7684\u63a7\u5236\u3002\u8f83\u539a\u6216\u8f83\u8f6f\u7684\u886c\u57ab\u4f1a\u589e\u52a0\u53e0\u5c42\u7684\u5b8f\u89c2\u987a\u5e94\u6027\uff0c\u4ece\u800c\u63d0\u9ad8\u8fb9\u7f18-\u4e2d\u5fc3\u7684\u5747\u5300\u6027\uff0c\u4f46\u540c\u65f6\u4e5f\u4f1a\u727a\u7272\u4e00\u5b9a\u7684\u5e73\u9762\u5316\u6548\u7387\u3002\u800c\u8f83\u8584\u6216\u8f83\u786c\u7684\u886c\u57ab\u5219\u4f1a\u964d\u4f4e\u987a\u5e94\u6027\uff0c\u4ece\u800c\u5c06\u5e73\u8861\u70b9\u8f6c\u56de\u5230\u5e73\u9762\u5316\u6027\u80fd\u4e0a\u3002\u5148\u8fdb\u6676\u5706\u5382\u7684\u5de5\u827a\u5de5\u7a0b\u5e08\u901a\u5e38\u4f1a\u4ee5 5-10 \u90b5\u6c0f A \u4e3a\u589e\u91cf\u5fae\u8c03\u886c\u57ab\u786c\u5ea6\uff0c\u4ee5\u4f18\u5316 WIWNU \u66f2\u7ebf\uff0c\u5c06\u886c\u57ab\u89c6\u4e3a\u53ef\u53d8\u5de5\u827a\u53c2\u6570\u800c\u975e\u56fa\u5b9a\u8017\u6750\u3002.<\/div>\r\n<\/div>\r\n<h3>\u5806\u6808\u914d\u7f6e\u547d\u540d\u7ea6\u5b9a<\/h3>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>\u5806\u6808\u7c7b\u578b<\/th>\r\n<th>\u9876\u57ab<\/th>\r\n<th>\u5e95\u677f<\/th>\r\n<th>\u5e94\u7528\u70ed\u70b9<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td><strong>\u786c\/\u786c<\/strong><\/td>\r\n<td>\u6d77\u5cb8 D 60-65<\/td>\r\n<td>\u90b5\u6c0f D 45-55\uff08\u8f83\u786c\u7684\u6ce1\u6cab\uff09<\/td>\r\n<td>\u6700\u5927\u7a0b\u5ea6\u7684\u5e73\u9762\u5316\uff0c\u6210\u719f\u7684\u8282\u70b9\u6c27\u5316\u7269 - \u6676\u5706\u5f13\u5f62\u4e0d\u5728\u8bdd\u4e0b<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u786c\/\u8f6f\uff08\u6807\u51c6\u5806\u53e0\uff09<\/strong><\/td>\r\n<td>\u6d77\u5cb8 D 55-62<\/td>\r\n<td>\u90b5\u6c0f A 35-50\uff08\u8f6f\u6ce1\u6cab\uff09<\/td>\r\n<td>300 \u6beb\u7c73\u9ad8\u7ea7\u8282\u70b9\u6c27\u5316\u7269\u548c W CMP - \u884c\u4e1a\u6807\u51c6\u914d\u7f6e<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u4e2d \/ \u8f6f<\/strong><\/td>\r\n<td>\u6d77\u5cb8 D 45-55<\/td>\r\n<td>\u90b5\u6c0f A 25-40\uff08\u975e\u5e38\u67d4\u8f6f\u7684\u6ce1\u6cab\uff09<\/td>\r\n<td>\u94dc\u5757\u9636\u8dc3 - MRR \u4e0e\u5747\u5300\u6027\u7684\u5e73\u8861\uff0c\u9002\u5ea6\u7684\u4f4e K \u4fdd\u62a4<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>\u67d4\u8f6f\/\u975e\u5e38\u67d4\u8f6f<\/strong><\/td>\r\n<td>\u6d77\u5cb8 D 28-42<\/td>\r\n<td>\u90b5\u6c0f A 20-30\uff08\u8d85\u8f6f\u6ce1\u6cab\uff09<\/td>\r\n<td>\u8d85\u8584\u4f4e K \u6d82\u5c42\uff0c\u94dc\u5c4f\u969c\u7f13\u51b2 - \u6700\u5927\u9650\u5ea6\u5730\u4fdd\u62a4\u7f3a\u9677<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 7 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<h2 id=\"decision-tree\">7.\u51b3\u7b56\u6846\u67b6\uff1a\u9009\u62e9\u5408\u9002\u7684\u710a\u76d8\u786c\u5ea6<\/h2>\r\n<p>\u4ee5\u4e0b\u51b3\u7b56\u6811\u63d0\u4f9b\u4e86\u4ece\u5de5\u827a\u6b65\u9aa4\u63cf\u8ff0\u5230\u710a\u76d8\u786c\u5ea6\u5efa\u8bae\u7684\u7cfb\u7edf\u8def\u5f84\u3002\u6309\u987a\u5e8f\u5b8c\u6210\u95ee\u9898 - \u7b2c\u4e00\u4e2a\u9002\u7528\u7684\u5206\u652f\u70b9\u7ed9\u51fa\u5efa\u8bae\u3002.<\/p>\r\n<div class=\"jz-tree\">\r\n<div class=\"jz-tree-row\">\r\n<div class=\"jz-tree-q\">\u76ee\u6807\u8584\u819c\u662f\u5426\u8d85\u786c\uff08SiC\u3001GaN\u3001\u84dd\u5b9d\u77f3\uff0c\u83ab\u6c0f\u786c\u5ea6 &gt; 8\uff09\uff1f<\/div>\r\n<div class=\"jz-tree-yes\">\u9700\u8981\u4e13\u7528\u786c\u57ab\u6216\u56fa\u5b9a\u7814\u78e8\u57ab\u3002\u53c2\u89c1 SiC \u6307\u5357\u3002.<\/div>\r\n<div class=\"jz-tree-no\">\u7ee7\u7eed\u4e0b\u4e00\u4e2a\u95ee\u9898\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-tree-row\">\r\n<div class=\"jz-tree-q\">\u8f93\u5165\u9636\u8dc3\u9ad8\u5ea6\u662f\u5426 &gt; 500 \u00c5\uff08\u9700\u8981\u53bb\u9664\u5927\u91cf\u5730\u5f62\uff09\uff1f<\/div>\r\n<div class=\"jz-tree-yes\">\u786c\u57ab\uff08\u90b5\u6c0f D 55-65\uff09\u3002\u4f18\u5148\u8003\u8651\u5e73\u9762\u5316\u6548\u7387\u3002.<\/div>\r\n<div class=\"jz-tree-no\">\u7ee7\u7eed\u4e0b\u4e00\u4e2a\u95ee\u9898\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-tree-row\">\r\n<div class=\"jz-tree-q\">\u76ee\u6807\u8584\u819c\u662f\u8106\u5f31\u7684\u4f4e\u4ecb\u7535\u7cfb\u6570\uff08k &lt; 2.8\uff09\u8fd8\u662f\u8d85\u8584\u91d1\u5c5e\uff08&lt; 50 \u7eb3\u7c73\uff09\uff1f<\/div>\r\n<div class=\"jz-tree-yes\">\u8f6f\u57ab\uff08\u90b5\u6c0f D 28-42\uff09\uff0c\u538b\u529b\u964d\u4f4e\uff08&lt; 2 psi\uff09\u3002\u4f18\u5148\u8003\u8651\u526a\u5207\u4fdd\u62a4\u3002.<\/div>\r\n<div class=\"jz-tree-no\">\u7ee7\u7eed\u4e0b\u4e00\u4e2a\u95ee\u9898\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-tree-row\">\r\n<div class=\"jz-tree-q\">1% \u4ee5\u4e0b\u662f\u5426\u9700\u8981\u6676\u5706\u5185\u4e0d\u5747\u5300\u6027 (WIWNU 1\u03c3)\uff1f<\/div>\r\n<div class=\"jz-tree-yes\">\u8f6f\u57ab\u6216\u53e0\u5c42\uff08\u786c\u9876+\u8f6f\u5e95\u57ab\uff09\u3002\u5747\u5300\u6027\u662f\u9996\u8981\u6761\u4ef6\u3002.<\/div>\r\n<div class=\"jz-tree-no\">\u7ee7\u7eed\u4e0b\u4e00\u4e2a\u95ee\u9898\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-tree-row\">\r\n<div class=\"jz-tree-q\">\u6676\u7247\u5f2f\u66f2\u6216\u7fd8\u66f2\u662f\u5426 &gt; 50 \u00b5m\uff08\u5728 300 \u6beb\u7c73\u5e94\u529b\u819c\u6676\u7247\u4e2d\u5f88\u5e38\u89c1\uff09\uff1f<\/div>\r\n<div class=\"jz-tree-yes\">\u5806\u53e0\u5f0f\u886c\u57ab\u914d\u7f6e\uff08\u786c\u9876+\u8f6f\u57ab\uff09\u53ef\u7ea0\u6b63\u5f13\u5f62\u5f15\u8d77\u7684\u538b\u529b\u4e0d\u5747\u5300\u6027\u3002.<\/div>\r\n<div class=\"jz-tree-no\">\u786c\u57ab\uff08\u90b5\u6c0f D 55-60\uff09\u662f\u6807\u51c6\u6c27\u5316\u7269\u548c\u91d1\u5c5e CMP \u6b65\u9aa4\u7684\u5b89\u5168\u9ed8\u8ba4\u503c\u3002.<\/div>\r\n<\/div>\r\n<\/div>\r\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 8 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<h2 id=\"qualification\">8.\u5728\u751f\u4ea7\u4e2d\u9274\u5b9a\u65b0\u710a\u76d8\u786c\u5ea6<\/h2>\r\n<p>\u5373\u4f7f\u662f\u5728\u540c\u4e00\u4ea7\u54c1\u7cfb\u5217\u4e2d\uff0c\u57ab\u7247\u786c\u5ea6\u7684\u6539\u53d8\u4e5f\u662f\u4e00\u4e2a\u91cd\u5927\u7684\u5de5\u827a\u53d8\u5316\uff0c\u9700\u8981\u8fdb\u884c\u7ed3\u6784\u6027\u9274\u5b9a\u3002\u90b5\u6c0f D \u786c\u5ea6\u5373\u4f7f\u53d8\u5316 5 \u4e2a\u70b9\uff0c\u4e5f\u4f1a\u4f7f\u666e\u96f7\u65af\u987f\u7cfb\u6570\u53d1\u751f 8-15% \u7684\u53d8\u5316\uff0c\u4ece\u800c\u9700\u8981\u8c03\u6574\u914d\u65b9\u538b\u529b\u3002\u4ee5\u4e0b\u662f\u6807\u51c6\u9274\u5b9a\u534f\u8bae\uff1a<\/p>\r\n<div class=\"jz-steps\">\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">1<\/div>\r\n<div class=\"jz-step-body\">\r\n<h4>\u5efa\u7acb\u5408\u683c\u710a\u76d8\u7684\u57fa\u51c6\u6307\u6807<\/h4>\r\n<p>\u4ee5\u9501\u5b9a\u7684\u751f\u4ea7\u914d\u65b9\u5728\u5f53\u524d\u5408\u683c\u7684\u710a\u76d8\u4e0a\u8fd0\u884c\u81f3\u5c11 3 \u4e2a\u5408\u683c\u6279\u6b21\uff08\u6bcf\u4e2a\u6279\u6b21 25 \u4e2a\u6676\u5706\uff09\u3002\u8bb0\u5f55\u5e73\u5747\u53bb\u9664\u7387\u3001WIWNU (1\u03c3)\u3001CMP \u540e\u5212\u75d5\u5bc6\u5ea6\uff08\u6765\u81ea KLA\/Hitachi \u68c0\u6d4b\uff09\u548c\u7535\u6c14\u6d4b\u8bd5\u7ed3\u679c\uff08\u5982\u9002\u7528\uff09\u3002\u8fd9\u4e9b\u5c06\u6210\u4e3a\u65b0\u786c\u5ea6\u7684\u9a8c\u6536\u6807\u51c6\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">2<\/div>\r\n<div class=\"jz-step-body\">\r\n<h4>\u8fd0\u884c\u521d\u59cb\u7279\u6027\u5206\u6790\u62c6\u5206<\/h4>\r\n<p>\u6309\u7167\u73b0\u6709\u7684\u751f\u4ea7\u914d\u65b9\u53c2\u6570\uff0c\u5728\u65b0\u786c\u5ea6\u57ab\u4e0a\u629b\u5149\u81f3\u5c11 50 \u4e2a\u76d1\u63a7\u6676\u7247\u3002\u5148\u4e0d\u8981\u8c03\u6574\u914d\u65b9\u3002\u6bd4\u8f83 MRR\uff08\u76ee\u6807\uff1a\u57fa\u7ebf \u00b115% \u4ee5\u5185\uff09\u3001WIWNU\uff08\u76ee\u6807\uff1a\u00b10.5% 1\u03c3 \u4ee5\u5185\uff09\u548c\u5212\u75d5\u5bc6\u5ea6\uff08\u76ee\u6807\uff1a\u00b120% \u4ee5\u5185\uff09\u3002\u9884\u8ba1 MRR \u4f1a\u53d1\u751f\u53d8\u5316 - \u666e\u96f7\u65af\u987f\u7cfb\u6570\u4f1a\u968f\u786c\u5ea6\u53d8\u5316\u800c\u53d8\u5316\u3002\u9700\u8981\u8c03\u6574\u914d\u65b9\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">3<\/div>\r\n<div class=\"jz-step-body\">\r\n<h4>\u8c03\u6574\u914d\u65b9\u4ee5\u5339\u914d\u57fa\u51c6 MRR<\/h4>\r\n<p>\u5982\u679c\u6362\u7528\u8f83\u786c\u7684\u886c\u57ab\uff08MRR \u589e\u52a0\uff09\uff0c\u5219\u6309\u6bd4\u4f8b\u51cf\u5c11\u4e0b\u538b\u529b\u3002\u5982\u679c\u6362\u7528\u8f83\u8f6f\u7684\u886c\u57ab\uff08MRR \u964d\u4f4e\uff09\uff0c\u5219\u589e\u52a0\u538b\u529b\u3002\u4f7f\u7528 Preston \u65b9\u7a0b\uff08MRR = Kp \u00d7 P \u00d7 V\uff09\u4f5c\u4e3a\u4e00\u9636\u6307\u5357 - \u65b0\u886c\u57ab\u76f8\u5bf9\u4e8e\u57fa\u7ebf\u7684 Kp \u53ef\u4ece\u521d\u59cb\u8868\u5f81\u6570\u636e\u4e2d\u4f30\u7b97\u3002\u6309\u7167\u8c03\u6574\u540e\u7684\u914d\u65b9\u91cd\u65b0\u8fd0\u884c 3 \u4e2a\u6279\u6b21\uff0c\u786e\u8ba4 MRR \u5728\u57fa\u7ebf\u7684 \u00b18% \u8303\u56f4\u5185\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">4<\/div>\r\n<div class=\"jz-step-body\">\r\n<h4>\u9a8c\u8bc1\u8c03\u8282\u7a0b\u5e8f<\/h4>\r\n<p>\u53ef\u80fd\u9700\u8981\u8c03\u6574\u9488\u5bf9\u539f\u59cb\u786c\u5ea6\u8fdb\u884c\u4f18\u5316\u7684\u57ab\u7247\u8c03\u8282\u53c2\u6570\uff08\u8c03\u8282\u5668\u4e0b\u538b\u529b\u3001\u626b\u63cf\u901f\u5ea6\u3001\u539f\u4f4d\u4e0e\u975e\u539f\u4f4d\u6bd4\u7387\uff09\u3002\u786c\u5ea6\u8f83\u9ad8\u7684\u710a\u76d8\u9700\u8981\u66f4\u79ef\u6781\u7684\u8c03\u8282\uff0c\u4ee5\u9632\u6b62\u4e0a\u91c9\uff1b\u800c\u8f83\u8f6f\u7684\u710a\u76d8\u5219\u5bf9\u8fc7\u5ea6\u8c03\u8282\u66f4\u654f\u611f\u3002\u5728\u627f\u8bfa\u751f\u4ea7\u5408\u683c\u6279\u6b21\u4e4b\u524d\uff0c\u5e94\u72ec\u7acb\u4f18\u5316\u8c03\u8282\u65b9\u6848\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<div class=\"jz-step\">\r\n<div class=\"jz-step-num\">5<\/div>\r\n<div class=\"jz-step-body\">\r\n<h4>\u8fd0\u884c\u5168\u90e8\u5408\u683c\u6279\u6b21\u548c\u5de5\u7a0b\u7b7e\u6536<\/h4>\r\n<p>\u6309\u4f18\u5316\u914d\u65b9\u8fd0\u884c 3 \u4e2a\u5168\u5c3a\u5bf8\u751f\u4ea7\u6279\u6b21\uff08\u6bcf\u4e2a\u6279\u6b21 25 \u4e2a\u6676\u7247\uff09\u3002\u6240\u6709\u6307\u6807\u5fc5\u987b\u7b26\u5408\u9a8c\u6536\u6807\u51c6\u3002\u83b7\u5f97\u5de5\u7a0b\u548c\u5de5\u827a\u8d1f\u8d23\u4eba\u7684\u7b7e\u5b57\u786e\u8ba4\u3002\u5728\u6295\u5165\u751f\u4ea7\u524d\uff0c\u7528\u65b0\u7684\u710a\u76d8\u786c\u5ea6\u3001\u914d\u65b9\u53c2\u6570\u548c\u8c03\u8282\u534f\u8bae\u66f4\u65b0\u5de5\u827a\u89c4\u8303\uff08\u5de5\u827a\u89c4\u683c\uff09\u3002.<\/p>\r\n<\/div>\r\n<\/div>\r\n<\/div>\r\n<p>\u6709\u5173\u8f6f\u57ab\u548c\u786c\u57ab\u8c03\u8282\u534f\u8bae\u7684\u8be6\u7ec6\u6307\u5bfc\uff0c\u8bf7\u53c2\u89c1\uff1a <a class=\"jz-link-chip\" href=\"https:\/\/jeez-semicon.com\/zh\/blog\/CMP-Pad-Conditioning-and-Lifespan-Management\/\" target=\"_blank\" rel=\"noopener\">CMP \u886c\u57ab\u8c03\u8282\u548c\u5bff\u547d\u7ba1\u7406<\/a>. .\u6709\u5173\u57ab\u7247\u786c\u5ea6\u4e0e\u6750\u6599\u53bb\u9664\u7387\u4e4b\u95f4\u7684\u5b9a\u91cf\u5173\u7cfb\uff0c\u8bf7\u53c2\u9605\uff1a <a class=\"jz-link-chip\" href=\"https:\/\/jeez-semicon.com\/zh\/blog\/CMP-Material-Removal-Rate-and-Pad-Parameters\/\" target=\"_blank\" rel=\"noopener\">CMP \u6750\u6599\u53bb\u9664\u7387\u548c\u7814\u78e8\u57ab\u53c2\u6570<\/a>.<\/p>\r\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 SECTION 9 \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<h2 id=\"jizhi-range\">9.\u5409\u4e4b\u5c9b\u8f6f\u786c\u57ab\u4ea7\u54c1\u7cfb\u5217<\/h2>\r\n<p>\u5409\u4e4b\u5c9b\u7535\u5b50\u79d1\u6280\u91c7\u7528\u5185\u90e8\u7814\u53d1\u7684\u4e13\u6709\u805a\u6c28\u916f\u914d\u65b9\u751f\u4ea7\u786c\u8d28\u548c\u8f6f\u8d28 CMP \u7814\u78e8\u57ab\u3002\u6211\u4eec\u7684\u4ea7\u54c1\u7cfb\u5217\u65e8\u5728\u4e3a IC1000 \u578b\u786c\u629b\u5149\u57ab\u548c Politex \/ Suba \u578b\u8f6f\u629b\u5149\u57ab\u63d0\u4f9b\u5408\u683c\u7684\u66ff\u4ee3\u4ea7\u54c1\uff0c\u5e76\u4e3a\u6bcf\u79cd\u4ea7\u54c1\u63d0\u4f9b\u5b8c\u6574\u7684\u5de5\u827a\u7279\u6027\u6570\u636e\u3002.<\/p>\r\n<div class=\"jz-table-wrap\">\r\n<table class=\"jz-table\">\r\n<thead>\r\n<tr>\r\n<th>\u4ea7\u54c1\u7cfb\u5217<\/th>\r\n<th>\u57ab\u5b50\u7c7b\u578b<\/th>\r\n<th>\u6d77\u5cb8 D<\/th>\r\n<th>\u4e3b\u8981\u5e94\u7528<\/th>\r\n<th>\u53ef\u7528\u6027<\/th>\r\n<\/tr>\r\n<\/thead>\r\n<tbody>\r\n<tr>\r\n<td><strong>JZ-H60 \u7cfb\u5217<\/strong><\/td>\r\n<td>\u786c\u8d28\u805a\u6c28\u916f<\/td>\r\n<td>58-62<\/td>\r\n<td>\u6c27\u5316\u7269 ILD\u3001STI\u3001PMD\u3001W \u63d2\u5934 - IC1000 \u540c\u7b49\u8bbe\u5907<\/td>\r\n<td>\u6709\u5e93\u5b58<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>JZ-H65 \u7cfb\u5217<\/strong><\/td>\r\n<td>\u786c\u8d28\u805a\u6c28\u916f\uff08\u9ad8\u786c\u5ea6\uff09<\/td>\r\n<td>63-67<\/td>\r\n<td>\u9ad8\u5f62\u8c8c\u6c27\u5316\u7269 CMP\u3001\u4fb5\u8680\u6027\u9636\u68af\u9ad8\u5ea6\u5e94\u7528<\/td>\r\n<td>\u6709\u5e93\u5b58<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>JZ-S38 \u7cfb\u5217<\/strong><\/td>\r\n<td>\u67d4\u8f6f\u7684\u805a\u6c28\u916f\u5e95\u57ab<\/td>\r\n<td>35-42<\/td>\r\n<td>\u94dc\u5757\u6279\u91cf\u79fb\u9664\uff08BEOL \u6b65\u9aa4 1\uff09\uff0c\u5806\u53e0\u710a\u76d8\u5b50\u710a\u76d8<\/td>\r\n<td>\u6709\u5e93\u5b58<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>JZ-S28 \u7cfb\u5217<\/strong><\/td>\r\n<td>\u975e\u5e38\u67d4\u8f6f\u7684\u805a\u6c28\u916f<\/td>\r\n<td>26-32<\/td>\r\n<td>\u94dc\/\u963b\u6321\u5c42\u629b\u5149\uff08BEOL \u7b2c 2 \u6b65\uff09\uff0c\u8d85\u8584\u4f4e K \u503c\u629b\u5149<\/td>\r\n<td>\u6709\u5e93\u5b58<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>JZ-SiC \u7cfb\u5217<\/strong><\/td>\r\n<td>\u7279\u79cd\u786c\u8d28\uff08\u78b3\u5316\u7845\u4f18\u5316\uff09<\/td>\r\n<td>60-68<\/td>\r\n<td>SiC \u548c GaN \u886c\u5e95 CMP\uff0c\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53<\/td>\r\n<td>\u73b0\u8d27\/\u5b9a\u5236<\/td>\r\n<\/tr>\r\n<tr>\r\n<td><strong>JZ-\u5b9a\u5236 OEM<\/strong><\/td>\r\n<td>\u5ba2\u6237\u6307\u5b9a<\/td>\r\n<td>\u4efb\u4f55\u8303\u56f4<\/td>\r\n<td>\u6839\u636e\u5ba2\u6237\u8981\u6c42\u5b9a\u5236\u786c\u5ea6\u3001\u51f9\u69fd\u548c\u914d\u65b9<\/td>\r\n<td>3-6 \u5468\u51c6\u5907\u65f6\u95f4<\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<\/div>\r\n<div class=\"jz-callout cta\">\r\n<div class=\"jz-callout-icon\">\ud83c\udfed<\/div>\r\n<div class=\"jz-callout-body\"><strong>\u7533\u8bf7\u5de5\u827a\u7279\u5f81\u6570\u636e<\/strong> \u6bcf\u4e2a\u5409\u4e4b\u5c9b CMP \u7814\u78e8\u57ab\u7cfb\u5217\u90fd\u9644\u5e26\u4e00\u4e2a\u5de5\u827a\u8868\u5f81\u6570\u636e\u5305\uff0c\u5176\u4e2d\u5305\u62ec\u90b5\u6c0f D \u786c\u5ea6\u56fe\u3001\u5b54\u5f84\u5206\u5e03\u3001\u53c2\u8003\u914d\u65b9\u6761\u4ef6\u4e0b\u7684\u57fa\u51c6 MRR \u548c WIWNU \u6570\u636e\u3002\u8bf7\u8054\u7cfb\u6211\u4eec\u7684\u5e94\u7528\u5de5\u7a0b\u56e2\u961f\uff0c\u83b7\u53d6\u60a8\u7684\u7279\u5b9a\u5de5\u827a\u6b65\u9aa4\u548c\u5de5\u5177\u914d\u7f6e\u7684\u6570\u636e\u3002. <a href=\"https:\/\/jeez-semicon.com\/zh\/contact\/\" target=\"_blank\" rel=\"noopener\">\u7533\u8bf7\u6570\u636e\u5305 \u2192<\/a><\/div>\r\n<\/div>\r\n<!-- \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 FAQ \u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550 -->\r\n<h2>10.\u5e38\u89c1\u95ee\u9898<\/h2>\r\n<div class=\"jz-faq\">\r\n<div class=\"jz-faq-item\">\r\n<div class=\"jz-faq-q\">\u5982\u679c\u51cf\u5c11\u4e0b\u538b\u529b\uff0c\u662f\u5426\u53ef\u4ee5\u4e3a Cu CMP \u4f7f\u7528\u786c\u57ab\uff1f<\/div>\r\n<div class=\"jz-faq-a\">\u964d\u4f4e\u538b\u529b\u4ee5\u8865\u507f Cu CMP \u4e2d\u7684\u786c\u886c\u57ab\uff0c\u53ef\u4ee5\u90e8\u5206\u89e3\u51b3\u5212\u75d5\u548c\u526a\u5207\u529b\u95ee\u9898\uff0c\u4f46\u5e76\u4e0d\u80fd\u89e3\u51b3\u6839\u672c\u95ee\u9898\uff1a\u5728\u4efb\u4f55\u7ed9\u5b9a\u7684\u6807\u79f0\u538b\u529b\u4e0b\uff0c\u786c\u886c\u57ab\u7684\u575a\u786c\u8868\u9762\u90fd\u4f1a\u6bd4\u8f6f\u886c\u57ab\u4ea7\u751f\u66f4\u9ad8\u7684\u5c40\u90e8\u63a5\u89e6\u5e94\u529b\u3002\u6b64\u5916\uff0c\u6781\u4f4e\u7684\u538b\u529b\u4f1a\u5c06\u5236\u7a0b\u63a8\u5165\u6d41\u4f53\u52a8\u529b\u6da6\u6ed1\u72b6\u6001\uff08\u65af\u7279\u91cc\u8d1d\u514b\u66f2\u7ebf\uff09\uff0c\u5bfc\u81f4\u4e0d\u7a33\u5b9a\u7684 MRR \u548c\u8f83\u5dee\u7684\u5747\u5300\u6027\u3002\u5bf9\u4e8e Cu BEOL \u800c\u8a00\uff0c\u5728\u6807\u51c6\u538b\u529b\u4e0b\u4f7f\u7528\u8f6f\u57ab\u6bd4\u5728\u8f83\u4f4e\u538b\u529b\u4e0b\u4f7f\u7528\u786c\u57ab\u66f4\u6709\u4f18\u52bf--\u7269\u7406\u539f\u7406\u6709\u5229\u4e8e\u8f6f\u57ab\uff0c\u800c\u4e0d\u662f\u914d\u65b9\u53d8\u901a\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-faq-item\">\r\n<div class=\"jz-faq-q\">\u8f83\u8f6f\u7684\u57ab\u5b50\u662f\u5426\u603b\u662f\u5bf9\u7f3a\u9677\u5bc6\u5ea6\u66f4\u5b89\u5168\uff1f<\/div>\r\n<div class=\"jz-faq-a\">\u5c31\u5212\u75d5\u7f3a\u9677\u800c\u8a00\uff0c\u4e00\u822c\u6765\u8bf4\u662f\u7684\uff0c\u4f46\u5e76\u4e0d\u666e\u904d\u3002\u5982\u679c\u5728\u8c03\u6574\u6216\u629b\u5149\u8fc7\u7a0b\u4e2d\u6ce1\u6cab\u8131\u843d\u788e\u5c51\uff0c\u975e\u5e38\u67d4\u8f6f\u7684\u57ab\u7247\u53ef\u80fd\u4f1a\u4ece\u5176\u5f00\u5b54\u6ce1\u6cab\u7ed3\u6784\u4e2d\u4ea7\u751f\u5fae\u7c92\u6c61\u67d3\u3002\u6b64\u5916\uff0c\u4e0e\u4e0d\u76f8\u5bb9\u7684\u6d46\u6599\u5316\u5b66\u6210\u5206\u4e00\u8d77\u4f7f\u7528\u7684\u8f6f\u886c\u57ab\uff08\u4f8b\u5982\uff0c\u5728\u4f4e Tg \u8f6f\u805a\u6c28\u916f\u4e0a\u4f7f\u7528\u9ad8\u6c27\u5316\u6027\u6d46\u6599\uff09\u4f1a\u52a0\u901f\u964d\u89e3\uff0c\u4ea7\u751f\u805a\u5408\u7269\u788e\u5c51\uff0c\u9020\u6210\u6c61\u67d3\u7f3a\u9677\u3002\u7f3a\u9677\u5bc6\u5ea6\u53d6\u51b3\u4e8e\u6574\u4e2a\u57ab\u7247-\u6d46\u6599-\u8c03\u6574\u7cfb\u7edf\uff0c\u800c\u4e0d\u4ec5\u4ec5\u662f\u57ab\u7247\u786c\u5ea6\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-faq-item\">\r\n<div class=\"jz-faq-q\">\u4ec0\u4e48\u90b5\u6c0f D \u503c\u88ab\u89c6\u4e3a CMP \u886c\u57ab\u7684 \u201c\u4e2d\u7b49\u786c\u5ea6\u201d\uff1f<\/div>\r\n<div class=\"jz-faq-a\">\u4e1a\u754c\u6ca1\u6709\u6b63\u5f0f\u7684 \u201c\u4e2d\u7b49\u786c\u5ea6 \u201d\u7c7b\u522b\uff0c\u4f46\u90b5\u6c0f D 46-54 \u8303\u56f4\u5185\u7684\u57ab\u7247\u7ecf\u5e38\u88ab\u63cf\u8ff0\u4e3a\u4e2d\u7b49\u786c\u5ea6\u3002\u5f53\u5728\u7b80\u5316\u7684\u5de5\u827a\u6d41\u7a0b\u4e2d\uff0c\u5355\u4e2a\u7814\u78e8\u57ab\u5fc5\u987b\u540c\u65f6\u7528\u4e8e\u7c7b\u6c27\u5316\u7269\u548c\u7c7b\u94dc\u6b65\u9aa4\u65f6\uff0c\u8fd9\u4e9b\u7814\u78e8\u57ab\u6709\u65f6\u4f1a\u88ab\u7528\u4f5c\u4e00\u79cd\u6298\u4e2d\u65b9\u6848\u3002\u5b83\u4eec\u5177\u6709\u4e2d\u7b49\u7684\u5e73\u9762\u5316\u6548\u7387\u548c\u4e2d\u7b49\u7684\u5212\u75d5\u6027\u80fd--\u65e2\u4e0d\u5982\u4e13\u7528\u7684\u786c\u886c\u57ab\u597d\uff0c\u4e5f\u4e0d\u5982\u4e13\u7528\u7684\u8f6f\u886c\u57ab\u5b89\u5168\u3002\u5927\u591a\u6570\u9886\u5148\u7684\u6676\u5706\u5382\u90fd\u907f\u514d\u4e86\u8fd9\u79cd\u6298\u8877\uff0c\u4e3a\u6bcf\u4e2a\u5de5\u827a\u6b65\u9aa4\u4fdd\u7559\u4e86\u72ec\u7acb\u7684\u786c\u886c\u57ab\u548c\u8f6f\u886c\u57ab SKU\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-faq-item\">\r\n<div class=\"jz-faq-q\">\u5728\u63a7\u5236\u7f3a\u9677\u65b9\u9762\uff0c\u886c\u57ab\u786c\u5ea6\u4e0e\u6ce5\u6d46\u7c92\u5ea6\u4e4b\u95f4\u662f\u5982\u4f55\u76f8\u4e92\u4f5c\u7528\u7684\uff1f<\/div>\r\n<div class=\"jz-faq-a\">\u7814\u78e8\u57ab\u7684\u786c\u5ea6\u548c\u7814\u78e8\u6db2\u7684\u9897\u7c92\u5927\u5c0f\u5728\u4ea7\u751f\u5212\u75d5\u7f3a\u9677\u65f6\u4f1a\u4ea7\u751f\u500d\u589e\u6548\u5e94\u3002\u9897\u7c92\u5927\uff08d50 &gt; 150 nm\uff09\u7684\u786c\u710a\u76d8\u4ea7\u751f\u5212\u75d5\u7684\u98ce\u9669\u6700\u9ad8\u3002\u9897\u7c92\u5c0f\u7684\u8f6f\u57ab\uff08d50 &lt; 80 nm\uff09\u4ea7\u751f\u7684\u5212\u75d5\u98ce\u9669\u6700\u4f4e\u3002\u710a\u76d8\u786c\u5ea6\u548c\u9897\u7c92\u5c3a\u5bf8\u7684\u7ec4\u5408\u51b3\u5b9a\u4e86\u4e09\u4f53\u754c\u9762\u4e0a\u7684\u6709\u6548\u63a5\u89e6\u5e94\u529b--\u5fc5\u987b\u540c\u65f6\u4f18\u5316\u8fd9\u4e24\u4e2a\u53c2\u6570\u3002\u5bf9\u4e8e\u94dc BEOL \u7f3a\u9677\u5173\u952e\u6b65\u9aa4\uff0c\u8f6f\u57ab\u4e0e\u8d85\u7ec6\u4e8c\u6c27\u5316\u7845\u6d46\u6599\uff08d50 30-60 nm\uff09\u642d\u914d\u4f7f\u7528\u3002\u5bf9\u4e8e\u4ea7\u91cf\u6bd4\u7f3a\u9677\u66f4\u91cd\u8981\u7684\u6c27\u5316\u7269 CMP\uff0c\u786c\u57ab\u53ef\u4ee5\u4f7f\u7528\u66f4\u7c97\u7684\u94c8\u9897\u7c92\uff08d50 100-200 nm\uff09\uff0c\u800c\u4e0d\u4f1a\u5728\u5bf9\u7f3a\u9677\u4e0d\u592a\u654f\u611f\u7684 ILD \u8584\u819c\u4e0a\u4ea7\u751f\u4e0d\u53ef\u63a5\u53d7\u7684\u5212\u75d5\u3002.<\/div>\r\n<\/div>\r\n<div class=\"jz-faq-item\">\r\n<div class=\"jz-faq-q\">\u5728\u627f\u8bfa\u6279\u91cf\u91c7\u8d2d\u4e4b\u524d\uff0c\u5409\u4e4b\u5c9b\u662f\u5426\u63d0\u4f9b\u710a\u76d8\u6837\u54c1\u4f9b\u5de5\u827a\u8bc4\u4f30\uff1f<\/div>\r\n<div class=\"jz-faq-a\">\u53ef\u4ee5\u3002\u5409\u4e4b\u5c9b\u7535\u5b50\u79d1\u6280\u4e3a\u5728\u5176\u5de5\u5382\u8fdb\u884c\u5de5\u827a\u8868\u5f81\u548c\u710a\u76d8\u9274\u5b9a\u7684\u5408\u683c\u5ba2\u6237\u63d0\u4f9b\u8bc4\u4f30\u6837\u54c1\uff08\u901a\u5e38\u4e3a 3-5 \u4e2a\u710a\u76d8\uff09\u3002\u6837\u54c1\u9644\u5e26\u5b8c\u6574\u7684\u8868\u5f81\u6570\u636e\u5305\u3002\u5982\u9700\u9488\u5bf9\u60a8\u7684\u7279\u5b9a\u5e94\u7528\uff08\u786c\u3001\u8f6f\u3001SiC \u7279\u5b9a\u6216\u5b9a\u5236\uff09\u7533\u8bf7\u8bc4\u4f30\u6837\u54c1\uff0c\u8bf7 <a href=\"https:\/\/jeez-semicon.com\/zh\/contact\/\" target=\"_blank\" rel=\"noopener\">\u8054\u7cfb\u6211\u4eec\u7684\u5e94\u7528\u5de5\u7a0b\u56e2\u961f<\/a> \u5e76\u6ce8\u660e\u710a\u76d8\u5c3a\u5bf8\u3001\u76ee\u6807\u5e94\u7528\u548c CMP \u5de5\u5177\u7c7b\u578b\u3002.<\/div>\r\n<\/div>\r\n<\/div>\r\n<!-- Related Articles -->\r\n<div class=\"jz-related\">\r\n<div class=\"jz-related-title\">\ud83d\udcda \u7ee7\u7eed\u9605\u8bfb - CMP \u886c\u57ab\u6df1\u5ea6\u6316\u6398<\/div>\r\n<div class=\"jz-related-grid\">\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">\u652f\u67f1 - \u5b8c\u6574\u6307\u5357<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/CMP-Polishing-Pads-The-Complete-Guide\/\" target=\"_blank\" rel=\"noopener\">CMP \u7814\u78e8\u57ab\uff1a\u5b8c\u5168\u6307\u5357<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">\u57fa\u7840\u77e5\u8bc6<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/What-Is-a-CMP-Polishing-Pad-The-Ultimate-Guide\/\" target=\"_blank\" rel=\"noopener\">\u4ec0\u4e48\u662f CMP \u629b\u5149\u57ab\uff1f\u7ec8\u6781\u6307\u5357<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">\u57fa\u7840\u77e5\u8bc6<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/How-CMP-Polishing-Pads-Work\/\" target=\"_blank\" rel=\"noopener\">CMP \u7814\u78e8\u57ab\u7684\u5de5\u4f5c\u539f\u7406<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">\u6750\u6599<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/CMP-Pad-Materials-Polyurethane-vs-Other-Options\/\" target=\"_blank\" rel=\"noopener\">CMP \u886c\u57ab\u6750\u6599\uff1a\u805a\u6c28\u916f\u4e0e\u5176\u4ed6\u9009\u62e9<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">\u5de5\u7a0b\u5b66<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/CMP-Pad-Groove-Design-and-Slurry-Distribution\/\" target=\"_blank\" rel=\"noopener\">CMP \u57ab\u69fd\u8bbe\u8ba1\u548c\u6ce5\u6d46\u5206\u5e03<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">\u7533\u8bf7<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/Semiconductor-CMP-Polishing-Pads\/\" target=\"_blank\" rel=\"noopener\">\u534a\u5bfc\u4f53 CMP \u7814\u78e8\u57ab<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">\u7533\u8bf7<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/SiC-CMP-Polishing-Pads-for-Third-Generation-Semiconductors\/\" target=\"_blank\" rel=\"noopener\">\u7528\u4e8e\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u7684 SiC CMP \u7814\u78e8\u57ab<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">\u4e1a\u52a1<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/CMP-Pad-Conditioning-and-Lifespan-Management\/\" target=\"_blank\" rel=\"noopener\">CMP \u886c\u57ab\u8c03\u8282\u548c\u5bff\u547d\u7ba1\u7406<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">\u8fc7\u7a0b<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/CMP-Material-Removal-Rate-and-Pad-Parameters\/\" target=\"_blank\" rel=\"noopener\">CMP \u6750\u6599\u53bb\u9664\u7387\u548c\u7814\u78e8\u57ab\u53c2\u6570<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">\u8d28\u91cf<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/CMP-Pad-Defect-Control-Scratches-and-Uniformity\/\" target=\"_blank\" rel=\"noopener\">CMP \u710a\u76d8\u7f3a\u9677\u63a7\u5236\uff1a\u5212\u75d5\u548c\u5747\u5300\u6027<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">\u6765\u6e90<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/CMP-Polishing-Pad-Brands-Comparison\/\" target=\"_blank\" rel=\"noopener\">CMP \u629b\u5149\u57ab\u54c1\u724c\u6bd4\u8f83<\/a><\/div>\r\n<div class=\"jz-related-item\">\r\n<div class=\"jz-related-cat\">\u91c7\u8d2d<\/div>\r\n<a href=\"https:\/\/jeez-semicon.com\/zh\/blog\/CMP-Polishing-Pad-Price-Factors-and-Buying-Guide\/\" target=\"_blank\" rel=\"noopener\">CMP \u7814\u78e8\u57ab\u4ef7\u683c\u56e0\u7d20\u548c\u8d2d\u4e70\u6307\u5357<\/a><\/div>\r\n<\/div>\r\n<\/div>\r\n<!-- CTA -->\r\n<div class=\"jz-cta-banner\">\r\n<h2>\u786c\u57ab\u3001\u8f6f\u57ab\u6216\u5806\u53e0\u5f0f - \u6211\u4eec\u4e3a\u60a8\u7684\u5de5\u827a\u63d0\u4f9b\u652f\u6301<\/h2>\r\n<p>\u5409\u4e4b\u5c9b\u7535\u5b50\u79d1\u6280\u63d0\u4f9b\u5168\u786c\u5ea6\u8303\u56f4\u7684 CMP \u7814\u78e8\u57ab\uff0c\u4ece\u7528\u4e8e\u6c27\u5316\u7269\u548c\u94a8 CMP \u7684\u9ad8\u5e73\u9762\u6548\u7387\u786c\u57ab\u5230\u7528\u4e8e\u94dc BEOL \u548c\u4f4e K \u4fdd\u62a4\u7684\u8d85\u8f6f\u4e9a\u57ab\u3002\u5305\u62ec\u5de5\u827a\u8868\u5f81\u6570\u636e\u548c\u5e94\u7528\u5de5\u7a0b\u652f\u6301\u3002.<\/p>\r\n<a class=\"jz-btn jz-btn-white\" href=\"https:\/\/jeez-semicon.com\/zh\/semi-categories\/polishing-pad\/\" target=\"_blank\" rel=\"noopener\">\u6d4f\u89c8 CMP \u7814\u78e8\u57ab<\/a> <a class=\"jz-btn jz-btn-outline\" href=\"https:\/\/jeez-semicon.com\/zh\/contact\/\" target=\"_blank\" rel=\"noopener\">\u83b7\u5f97\u57ab\u5b50\u63a8\u8350<\/a><\/div>\r\n<!--\r\n  \u2554\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n  \u2551  SEO NOTES \u2014 Cluster 4\r\n  \u2560\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n  \u2551  Title tag:  Hard vs. Soft CMP Polishing Pads: Selection Guide 2026 | Jizhi\r\n  \u2551  Meta desc:  Complete guide to choosing hard or soft CMP polishing pads \u2014\r\n  \u2551              planarization vs uniformity trade-off, application map, stacked\r\n  \u2551              pad strategy, and 5-step qualification protocol.\r\n  \u2551  Focus KW:   hard vs soft CMP polishing pad\r\n  \u2551  Secondary:  CMP pad hardness, Shore D CMP pad, stacked CMP pad,\r\n  \u2551              CMP pad selection, polyurethane CMP pad hardness\r\n  \u2551  Schema:     Article + FAQPage\r\n  \u2551  Intent:     Informational \/ Commercial investigation\r\n  \u255a\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\u2550\r\n--><\/div>\r\n<!-- .jz-art -->","protected":false},"excerpt":{"rendered":"<p>Back to CMP Polishing Pads: The Complete Guide Jizhi Electronic Technology \u2014 Selection Guide Series A rigorous, application-mapped guide to choosing between hard and soft CMP polishing pads \u2014 covering  &#8230;<\/p>","protected":false},"author":1,"featured_media":1809,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,59],"tags":[],"class_list":["post-1767","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-industry"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1767","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=1767"}],"version-history":[{"count":4,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1767\/revisions"}],"predecessor-version":[{"id":1823,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/1767\/revisions\/1823"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/1809"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=1767"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=1767"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=1767"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}