{"id":722,"date":"2025-12-05T10:03:26","date_gmt":"2025-12-05T02:03:26","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=722"},"modified":"2025-12-18T10:19:52","modified_gmt":"2025-12-18T02:19:52","slug":"introduction-to-cmp-technology","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/solution\/introduction-to-cmp-technology\/","title":{"rendered":"CMP \u6280\u672f\u7b80\u4ecb"},"content":{"rendered":"<p class=\"ds-markdown-paragraph\">CMP\uff08\u5316\u5b66\u673a\u68b0\u629b\u5149\uff09\u662f\u76ee\u524d\u73b0\u4ee3\u5de5\u4e1a\u5236\u9020\u4e2d\u552f\u4e00\u7528\u4e8e\u96c6\u6210\u7535\u8def\u5236\u9020\u4e2d\u5de5\u4ef6\u8868\u9762\u629b\u5149\u548c\u6676\u7247\u8868\u9762\u6574\u4f53\u5e73\u9762\u5316\u7684\u6280\u672f\u3002CMP \u5de5\u827a\u901a\u8fc7\u5316\u5b66\u548c\u673a\u68b0\u4f5c\u7528\u5b9e\u73b0\u8868\u9762\u629b\u5149\u3002\u5b83\u5e7f\u6cdb\u5e94\u7528\u4e8e\u96c6\u6210\u7535\u8def\u6280\u672f\u3001\u6676\u5706\u82af\u7247\u5e73\u9762\u5316\u3001\u822a\u7a7a\u822a\u5929\u6750\u6599\u3001\u91d1\u5c5e\u5de5\u4e1a\u4ee5\u53ca\u5149\u7535\u5de5\u4e1a\u6750\u6599\u7684\u955c\u9762\u629b\u5149\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u5409\u4e4b\u5c9b\u7535\u5b50 CMP \u629b\u5149\u5de5\u827a\u793a\u610f\u56fe<\/p>\n<p><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-723\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2.png\" alt=\"\" width=\"700\" height=\"566\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27700%27%20height%3D%27566%27%20viewBox%3D%270%200%20700%20566%27%3E%3Crect%20width%3D%27700%27%20height%3D%27566%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2-177x142.png 177w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2-200x162.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2-300x243.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2-400x323.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2-600x485.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-2.png 700w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 700px) 100vw, 700px\" \/><\/p>\n<p class=\"ds-markdown-paragraph\">\u6839\u636e\u629b\u5149\u6750\u6599\u7684\u7c7b\u578b\uff0cCMP \u53ef\u5206\u4e3a\u4e09\u5927\u7c7b\uff1a<br \/>\n(1) \u57fa\u8d28\uff1a\u4e3b\u8981\u662f\u7845\u6750\u6599\u3002.<br \/>\n(2) \u91d1\u5c5e\uff1a\u5305\u62ec\u94dd\/\u94dc\u91d1\u5c5e\u4e92\u8fde\u5c42\u3001\u6269\u6563\u963b\u6321\u5c42\u548c\u7c98\u9644\u5c42\uff08\u5982 Ta\/Ti\/TiN\/TiNxCy\uff09\u3002.<br \/>\n(3) \u7535\u4ecb\u8d28\uff1a\u5305\u62ec ILD\uff08\u5c42\u95f4\u4ecb\u8d28\uff09\uff0c\u5982 SiO2\/BPSG\/PSG\uff0c\u4ee5\u53ca\u949d\u5316\u5c42\u6216\u963b\u6321\u5c42\uff0c\u5982 Si3N4\/SiOxNy\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u5728 CMP \u52a0\u5de5\u8fc7\u7a0b\u4e2d\uff0c\u629b\u5149\u6d46\u6599\u4e2d\u7684\u5316\u5b66\u5242\u4f1a\u6c27\u5316\u57fa\u5e95\u6750\u6599\u7684\u8868\u9762\uff0c\u5f62\u6210\u76f8\u5bf9\u8f83\u8f6f\u7684\u6c27\u5316\u5c42\u3002\u7136\u540e\u901a\u8fc7\u673a\u68b0\u6469\u64e6\u53bb\u9664\u6c27\u5316\u5c42\u3002\u6c27\u5316\u819c\u5f62\u6210\u548c\u673a\u68b0\u53bb\u9664\u7684\u91cd\u590d\u5faa\u73af\u5b9e\u73b0\u4e86\u6709\u6548\u629b\u5149\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u5728 CMP \u6750\u6599\u9886\u57df\uff0c\u629b\u5149\u6d46\u6599\u548c\u629b\u5149\u57ab\u662f\u6700\u5173\u952e\u7684\u6750\u6599\u3002\u5176\u4ed6\u629b\u5149\u6750\u6599\u5305\u62ec\u629b\u5149\u5934\u3001\u7814\u78e8\u677f\u3001\u68c0\u6d4b\u8bbe\u5907\u548c\u6e05\u6d01\u8bbe\u5907\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u629b\u5149\u6ce5\u6d46<br \/>\n\u629b\u5149\u6d46\u6db2\u662f\u5f71\u54cd\u5316\u5b66\u673a\u68b0\u629b\u5149\u8d28\u91cf\u548c\u6548\u7387\u7684\u5173\u952e\u56e0\u7d20\u3002\u5176\u6027\u80fd\u901a\u5e38\u901a\u8fc7\u6d4b\u91cf\u6750\u6599\u53bb\u9664\u7387 (MRR) \u548c\u8868\u9762\u7c97\u7cd9\u5ea6 (Ra) \u6765\u8bc4\u4f30\u3002\u5176\u6210\u5206\u4e00\u822c\u5305\u62ec\u78e8\u6599\u3001\u6c27\u5316\u5242\u548c\u5176\u4ed6\u6dfb\u52a0\u5242\u3002\u914d\u65b9\u7684\u9009\u62e9\u57fa\u4e8e\u88ab\u629b\u5149\u6750\u6599\u7684\u7269\u7406\u5316\u5b66\u7279\u6027\u548c\u5bf9\u629b\u5149\u6027\u80fd\u7684\u8981\u6c42\u3002.<\/p>\n<ul>\n<li>\n<p class=\"ds-markdown-paragraph\">CeO2\uff08\u6c27\u5316\u94c8\uff09\u629b\u5149\u6d46\u6599\uff1a\u9002\u7528\u4e8e\u8f6f\u91d1\u5c5e\u3001\u7845\u548c\u5176\u4ed6\u6750\u6599\u7684\u629b\u5149\u3002\u5b83\u662f\u5e94\u7528\u6700\u5e7f\u6cdb\u7684\u629b\u5149\u6d46\u6599\uff0c\u5e38\u7528\u4e8e\u624b\u673a\u5c4f\u5e55\u3001\u5149\u5b66\u73bb\u7483\u3001\u6db2\u6676\u663e\u793a\u5668\u548c\u786c\u76d8\u7b49\u4ea7\u54c1\u7684\u5316\u5b66\u673a\u68b0\u629b\u5149\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\">Al2O3\uff08\u6c27\u5316\u94dd\uff09\u629b\u5149\u6d46\u6599\uff1a\u786c\u5ea6\u9ad8\uff0c\u6210\u672c\u4f4e\u3002\u4e3b\u8981\u7528\u4e8e\u94dd\u5408\u91d1\u548c\u4e0d\u9508\u94a2\u7b49\u91d1\u5c5e\u6750\u6599\u4ee5\u53ca\u84dd\u5b9d\u77f3\u57fa\u5e95\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\">SiO2\uff08\u6c27\u5316\u7845\uff09\u629b\u5149\u6d46\u6599\uff1a\u5177\u6709\u7c92\u5ea6\u5c0f\u3001\u7eaf\u5ea6\u9ad8\u7684\u7eb3\u7c73\u7ea7\u7279\u6027\uff0c\u9002\u7528\u4e8e\u534a\u5bfc\u4f53\u96c6\u6210\u7535\u8def\u3001\u84dd\u5b9d\u77f3\u548c\u78b3\u5316\u7845\u57fa\u5e95\u7684\u629b\u5149\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\">\u91d1\u521a\u77f3\u629b\u5149\u6d46\u6599\uff1a\u5177\u6709\u9ad8\u786c\u5ea6\u548c\u89d2\u72b6\u78e8\u7c92\u7684\u7279\u70b9\uff0c\u9002\u7528\u4e8e\u5149\u5b66\u6676\u4f53\u3001\u78c1\u5934\u3001\u786c\u76d8\u3001\u8d85\u786c\u5408\u91d1\u548c\u9676\u74f7\u7b49\u786c\u8d28\u6750\u6599\u3002.<\/p>\n<\/li>\n<\/ul>\n<p class=\"ds-markdown-paragraph\">\u6839\u636e\u5de5\u827a\u8981\u6c42\uff0c\u629b\u5149\u6d46\u6599\u53ef\u5206\u4e3a\u7c97\u629b\u5149\u6d46\u6599\u3001\u4e2d\u629b\u5149\u6d46\u6599\u548c\u7cbe\u629b\u5149\u6d46\u6599\u3002\u9700\u8981\u6839\u636e\u88ab\u629b\u5149\u6750\u6599\u7684\u7279\u6027\u6765\u8c03\u6574\u548c\u6539\u8fdb\u914d\u65b9\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u629b\u5149\u57ab<br \/>\n\u5728\u5316\u5b66\u673a\u68b0\u629b\u5149\u8fc7\u7a0b\u4e2d\uff0c\u629b\u5149\u57ab\u5177\u6709\u4ee5\u4e0b\u529f\u80fd\uff1a<br \/>\n(1) \u50a8\u5b58\u5e76\u5411\u629b\u5149\u533a\u8f93\u9001\u629b\u5149\u6d46\uff0c\u4ee5\u786e\u4fdd\u629b\u5149\u7684\u8fde\u7eed\u6027\u548c\u5747\u5300\u6027\u3002.<br \/>\n(2) \u8f6c\u79fb\u6750\u6599\u4ee5\u6d88\u9664\u6240\u9700\u7684\u673a\u68b0\u8d1f\u8377\u3002.<br \/>\n(3) \u6e05\u9664\u629b\u5149\u533a\u57df\u7684\u526f\u4ea7\u54c1\uff08\u5982\u6c27\u5316\u4ea7\u7269\u548c\u629b\u5149\u788e\u7247\uff09\u3002.<br \/>\n(4) \u5f62\u6210\u4e00\u5b9a\u539a\u5ea6\u7684\u629b\u5149\u6d46\u6599\u5c42\uff0c\u4e3a\u629b\u5149\u8fc7\u7a0b\u4e2d\u7684\u5316\u5b66\u53cd\u5e94\u548c\u673a\u68b0\u53bb\u9664\u63d0\u4f9b\u573a\u6240\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u6839\u636e\u6750\u6599\u7684\u4e0d\u540c\uff0c\u629b\u5149\u57ab\u53ef\u5206\u4e3a\u786c\u8d28\u548c\u8f6f\u8d28\u4e24\u79cd\u3002\u786c\u8d28\u629b\u5149\u57ab\u53ef\u66f4\u597d\u5730\u786e\u4fdd\u5de5\u4ef6\u8868\u9762\u7684\u5e73\u6574\u5ea6\uff0c\u800c\u8f6f\u8d28\u629b\u5149\u57ab\u53ef\u5b9e\u73b0\u635f\u4f24\u5c42\u8584\u3001\u8868\u9762\u7c97\u7cd9\u5ea6\u4f4e\u7684\u629b\u5149\u8868\u9762\u3002\u5e38\u7528\u7684\u786c\u629b\u5149\u57ab\u5305\u62ec\u7c97\u5e03\u629b\u5149\u57ab\u3001\u7ea4\u7ef4\u629b\u5149\u57ab\u548c\u805a\u4e59\u70ef\u629b\u5149\u57ab\u3002\u8f6f\u629b\u5149\u57ab\u5305\u62ec\u805a\u6c28\u916f\u57ab\u3001\u590d\u5408\u629b\u5149\u57ab\u548c\u7ed2\u5e03\u57ab\u3002\u7cbe\u7ec6\u629b\u5149\u8868\u9762\u901a\u5e38\u4f7f\u7528\u7cbe\u7ec6\u629b\u5149\u57ab\uff0c\u5982\u963b\u5c3c\u5e03\u629b\u5149\u57ab\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u76ee\u524d\uff0c\u5728\u56fd\u5bb6\u653f\u7b56\u7684\u652f\u6301\u4e0b\uff0c\u4e2d\u56fd\u5728\u4e2d\u4f4e\u7aef CMP \u9886\u57df\u5df2\u57fa\u672c\u5b9e\u73b0\u4e86\u5bf9\u56fd\u5916\u6280\u672f\u548c\u4ea7\u54c1\u7684\u56fd\u4ea7\u5316\u66ff\u4ee3\u3002\u4f46\u5728\u9ad8\u7aef\u8bbe\u5907\u548c\u524d\u6cbf\u6280\u672f\u65b9\u9762\uff0c\u4e0e\u56fd\u9645\u5de8\u5934\u76f8\u6bd4\u4ecd\u6709\u8f83\u5927\u5dee\u8ddd\u3002\u7ee7\u7eed\u6df1\u5165\u7814\u7a76 CMP \u6280\u672f\uff0c\u751f\u4ea7\u5177\u6709\u81ea\u4e3b\u77e5\u8bc6\u4ea7\u6743\u7684\u5173\u952e\u6750\u6599\u3001\u8bbe\u5907\u6216\u5de5\u827a\uff0c\u5b9e\u73b0\u9ad8\u7aef CMP \u629b\u5149\u6750\u6599\u7684\u81ea\u4e3b\u6280\u672f\u548c\u4e13\u5229\uff0c\u51cf\u8f7b\u8d2d\u4e70\u56fd\u5916\u629b\u5149\u8017\u6750\u7684\u6210\u672c\u538b\u529b\uff0c\u662f\u629b\u5149\u884c\u4e1a\u6240\u6709\u4ece\u4e1a\u8005\u52aa\u529b\u548c\u53d1\u5c55\u7684\u65b9\u5411\u3002.<\/p>\n<p><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-724\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1.png\" alt=\"\" width=\"720\" height=\"548\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27720%27%20height%3D%27548%27%20viewBox%3D%270%200%20720%20548%27%3E%3Crect%20width%3D%27720%27%20height%3D%27548%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1-200x152.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1-300x228.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1-400x304.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1-600x457.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-1.png 720w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 720px) 100vw, 720px\" \/><\/p>\n<p class=\"ds-markdown-paragraph\">\u96c6\u667a\u7535\u5b50\u7814\u53d1\u56e2\u961f--15 \u5e74\u7ecf\u9a8c\u7684 CMP \u629b\u5149\u6d46\u6599\u914d\u65b9\u5de5\u7a0b\u5e08\uff0c\u5e2e\u52a9\u60a8\u514b\u670d\u629b\u5149\u96be\u9898\uff01<\/p>\n<p><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-725\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2.png\" alt=\"\" width=\"720\" height=\"608\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27720%27%20height%3D%27608%27%20viewBox%3D%270%200%20720%20608%27%3E%3Crect%20width%3D%27720%27%20height%3D%27608%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2-200x169.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2-300x253.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2-400x338.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2-600x507.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-2.png 720w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 720px) 100vw, 720px\" \/><\/p>","protected":false},"excerpt":{"rendered":"<p>CMP (Chemical Mechanical Polishing) is currently the only technology used in modern industrial manufacturing for surface polishing of workpieces and global planarization of wafer surfaces in integrated circuit manufacturing. The  &#8230;<\/p>","protected":false},"author":1,"featured_media":987,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[7],"tags":[],"class_list":["post-722","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-solution"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/722","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=722"}],"version-history":[{"count":1,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/722\/revisions"}],"predecessor-version":[{"id":726,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/722\/revisions\/726"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/987"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=722"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=722"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=722"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}