{"id":739,"date":"2025-12-05T10:29:53","date_gmt":"2025-12-05T02:29:53","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=739"},"modified":"2025-12-05T10:29:53","modified_gmt":"2025-12-05T02:29:53","slug":"characteristics-and-selection-guide-for-cmp-wafer-polishing-slurry","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/characteristics-and-selection-guide-for-cmp-wafer-polishing-slurry\/","title":{"rendered":"CMP \u6676\u5706\u629b\u5149\u6d46\u6599\u7684\u7279\u6027\u548c\u9009\u62e9\u6307\u5357"},"content":{"rendered":"<p class=\"ds-markdown-paragraph\">\u5728\u6676\u5706\u5236\u9020\u7684\u5168\u7403\u5e73\u9762\u5316\u9636\u6bb5\uff0c\u5316\u5b66\u673a\u68b0\u629b\u5149 (CMP) \u662f\u4e00\u9879\u5173\u952e\u5de5\u827a\u3002\u4f5c\u4e3a\u6838\u5fc3\u8017\u6750\uff0cCMP \u629b\u5149\u6d46\u6599\u76f4\u63a5\u51b3\u5b9a\u4e86\u6676\u5706\u8868\u9762\u7684\u5e73\u6574\u5ea6\u548c\u7f3a\u9677\u7387\u7b49\u5173\u952e\u6307\u6807\uff0c\u5f71\u54cd\u7740\u6700\u7ec8\u82af\u7247\u7684\u6027\u80fd\u548c\u826f\u7387\u3002\u57fa\u4e8e CMP \u629b\u5149\u6d46\u6599\u7684\u6838\u5fc3\u4f18\u52bf\u548c\u9009\u62e9\u6807\u51c6\uff0c\u96c6\u667a\u7535\u5b50\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u4f01\u4e1a\u63d0\u4f9b\u5b9e\u7528\u53c2\u8003\u3002.<\/p>\n<p><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-740\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-6.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-6.png\" alt=\"\" width=\"750\" height=\"510\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27750%27%20height%3D%27510%27%20viewBox%3D%270%200%20750%20510%27%3E%3Crect%20width%3D%27750%27%20height%3D%27510%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-6-200x136.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-6-300x204.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-6-400x272.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-6-600x408.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-6.png 750w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 750px) 100vw, 750px\" \/><\/p>\n<p class=\"ds-markdown-paragraph\"><strong>I.CMP \u629b\u5149\u6d46\u6599\u7684\u56db\u4e2a\u6838\u5fc3\u7279\u5f81<\/strong><\/p>\n<p class=\"ds-markdown-paragraph\">CMP \u629b\u5149\u6d46\u6599\u7531\u7814\u78e8\u5242\u3001\u6c27\u5316\u5242\u548c\u87af\u5408\u5242\u7b49\u6210\u5206\u914d\u5236\u800c\u6210\uff0c\u9700\u8981\u5728 \u201c\u5316\u5b66\u8150\u8680 \u201d\u548c \u201c\u673a\u68b0\u7814\u78e8 \u201d\u4e4b\u95f4\u53d6\u5f97\u5e73\u8861\u3002\u5176\u6838\u5fc3\u7279\u70b9\u53ef\u5f52\u7eb3\u5982\u4e0b\uff1a<\/p>\n<ol start=\"1\">\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u7cbe\u786e\u53ef\u63a7\u7684\u5316\u5b66\u673a\u68b0\u534f\u540c\u4f5c\u7528<\/strong><br \/>\n\u5728\u629b\u5149\u8fc7\u7a0b\u4e2d\uff0c\u6c27\u5316\u5242\u9996\u5148\u5c06\u6676\u7247\u8868\u9762\u6750\u6599\u6c27\u5316\u6210\u6613\u4e8e\u53bb\u9664\u7684\u6c27\u5316\u7269\u3002\u7136\u540e\uff0c\u87af\u5408\u5242\u4e0e\u8fd9\u4e9b\u6c27\u5316\u7269\u5f62\u6210\u53ef\u6eb6\u6027\u7edc\u5408\u7269\uff0c\u518d\u901a\u8fc7\u7814\u78e8\u53bb\u9664\u3002\u9ad8\u8d28\u91cf\u7684\u629b\u5149\u6d46\u6db2\u53ef\u5b9e\u73b0 \u201c\u8150\u8680\u7387\u2248\u7814\u78e8\u7387 \u201d\u7684\u5e73\u8861\uff0c\u907f\u514d\u51fa\u73b0\u8868\u9762\u51f9\u75d5\u6216\u53bb\u9664\u6548\u7387\u4f4e\u7b49\u95ee\u9898\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u4f4e\u7f3a\u9677 + \u9ad8\u8868\u9762\u8d28\u91cf<\/strong><\/p>\n<ul>\n<li>\n<p class=\"ds-markdown-paragraph\">\u5148\u8fdb\u7684\u5de5\u827a\u8282\u70b9\u5bf9\u6676\u7247\u8868\u9762\u7f3a\u9677\uff08\u5212\u75d5\u3001\u6b8b\u7559\u7269\u7b49\uff09\u63d0\u51fa\u4e86\u6781\u9ad8\u7684\u8981\u6c42\u3002\u629b\u5149\u6d46\u6599\u901a\u8fc7\u91c7\u7528\u8f6f\u78e8\u6599\uff08\u5982\u6709\u673a\u7845\u6eb6\u80f6\uff09\u548c\u4f18\u5316\u8868\u9762\u6d3b\u6027\u5242\u914d\u65b9\uff0c\u6700\u5927\u9650\u5ea6\u5730\u51cf\u5c11\u673a\u68b0\u635f\u4f24\uff0c\u63d0\u9ad8\u6b8b\u7559\u7269\u7684\u53ef\u6e05\u6d01\u6027\uff0c\u786e\u4fdd\u8868\u9762\u7c97\u7cd9\u5ea6\u7b26\u5408\u89c4\u8303\u8981\u6c42\uff08\u5728\u7cbe\u7ec6\u629b\u5149\u9636\u6bb5\uff0cRa \u53ef\u5c0f\u4e8e 0.1nm\uff09\u3002.<\/p>\n<\/li>\n<\/ul>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u7075\u6d3b\u8c03\u8282\u53bb\u9664\u7387\u548c\u9009\u62e9\u6027<\/strong><br \/>\n\u4e0d\u540c\u7684\u629b\u5149\u9636\u6bb5\u6709\u4e0d\u540c\u7684\u9700\u6c42\uff1a\u7845\u886c\u5e95\u629b\u5149\u9700\u8981\u9ad8\u53bb\u9664\u7387\uff08\u4ee5\u5feb\u901f\u6d88\u9664\u6676\u7247\u7fd8\u66f2\uff09\uff0c\u800c\u91d1\u5c5e\/\u7535\u4ecb\u8d28\u5c42\u629b\u5149\u5219\u9700\u8981\u9ad8\u9009\u62e9\u6027\uff08\u4f8b\u5982\uff0cCu\/SiO2 \u9009\u62e9\u6027\u5927\u4e8e 10:1\uff0c\u4ee5\u907f\u514d \u201c\u5265\u79bb\u201d\uff09\u3002\u901a\u8fc7\u8c03\u8282\u6c27\u5316\u5242\u6d53\u5ea6\u548c pH \u503c\uff0c\u53ef\u7cbe\u786e\u5339\u914d\u4e0d\u540c\u7684\u5de5\u827a\u8981\u6c42\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u7a33\u5b9a\u7684\u517c\u5bb9\u6027\u548c\u4fdd\u8bc1<\/strong><br \/>\n\u6d46\u6599\u7b26\u5408\u534a\u5bfc\u4f53\u884c\u4e1a\u7684\u73af\u4fdd\u8981\u6c42\uff0c\u4e0d\u542b\u91cd\u91d1\u5c5e\u548c\u6325\u53d1\u6027\u6709\u673a\u5316\u5408\u7269\uff0c\u523a\u6fc0\u6027\u4f4e\u3002\u6b64\u5916\uff0c\u5b83\u8fd8\u5177\u6709\u51fa\u8272\u7684\u6279\u6b21\u95f4\u7a33\u5b9a\u6027\uff08\u6279\u6b21\u95f4\u53bb\u9664\u7387\u504f\u5dee\u5c0f\u4e8e 5%\uff09\uff0c\u53ef\u9632\u6b62\u5728\u6279\u91cf\u751f\u4ea7\u4e2d\u56e0\u8017\u6750\u53d8\u5316\u800c\u5bfc\u81f4\u4ea7\u91cf\u6ce2\u52a8\u3002.<\/p>\n<\/li>\n<\/ol>\n<p class=\"ds-markdown-paragraph\"><strong>II.\u6309\u5de5\u827a\u9636\u6bb5\u9009\u62e9\u5408\u9002\u7684\u629b\u5149\u6d46\u6599<\/strong><\/p>\n<p class=\"ds-markdown-paragraph\">\u4e0d\u540c\u7684\u6676\u7247\u52a0\u5de5\u9636\u6bb5\u5bf9\u629b\u5149\u6d46\u6599\u7684\u8981\u6c42\u5927\u4e0d\u76f8\u540c\u3002\u6709\u9488\u5bf9\u6027\u7684\u9009\u62e9\u662f\u5173\u952e\uff1a<\/p>\n<ol start=\"1\">\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u7845\u57fa\u7247\u629b\u5149\uff08\u7c97\u629b\u5149 + \u7cbe\u629b\u5149\uff09<\/strong><\/p>\n<ul>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u8981\u6c42\uff1a<\/strong>\u00a0\u7c97\u629b\u5149\u65f6\u53bb\u9664\u7387\u9ad8\uff1b\u7cbe\u629b\u5149\u65f6\u7c97\u7cd9\u5ea6\u4f4e\u4e14\u65e0\u635f\u4f24\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u63a8\u8350\u7c7b\u578b\uff1a<\/strong>\u00a0\u7528\u4e8e\u7c97\u629b\u5149\u7684\u78b1\u6027\u4e8c\u6c27\u5316\u7845\u78e8\u6599\u6d46\u6db2\uff1b\u7528\u4e8e\u7cbe\u629b\u5149\u7684\u8f6f\u6709\u673a\u7845\u6eb6\u80f6\u6d46\u6db2\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u5e94\u7528\u573a\u666f\uff1a<\/strong>\u00a0\u5bf9 8\/12 \u82f1\u5bf8\u7845\u6676\u7247\u8fdb\u884c\u6700\u540e\u629b\u5149\uff0c\u4e3a\u540e\u7eed\u7684\u5149\u523b\u548c\u8584\u819c\u6c89\u79ef\u5960\u5b9a\u57fa\u7840\u3002.<\/p>\n<\/li>\n<li><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-741\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-4.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-4.png\" alt=\"\" width=\"750\" height=\"422\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27750%27%20height%3D%27422%27%20viewBox%3D%270%200%20750%20422%27%3E%3Crect%20width%3D%27750%27%20height%3D%27422%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-4-200x113.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-4-300x169.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-4-400x225.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-4-600x338.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/22-4.png 750w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 750px) 100vw, 750px\" \/><\/li>\n<\/ul>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u4ecb\u8d28\u5c42\u629b\u5149\uff08SiO2\/Si3N4\uff09<\/strong><\/p>\n<ul>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u8981\u6c42\uff1a<\/strong>\u00a0\u76f8\u5bf9\u4e8e\u91d1\u5c5e\u5c42\uff0c\u53bb\u9664\u7387\u9ad8\u3001\u7f3a\u9677\u5c11\u3001\u9009\u62e9\u6027\u9ad8\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u63a8\u8350\u7c7b\u578b\uff1a<\/strong>\u00a0\u78b1\u6027\u4e8c\u6c27\u5316\u7845\u80f6\u4f53\u629b\u5149\u6d46\u6599\uff1b\u7528\u4e8e\u4f4e\u4ecb\u7535\u5e38\u6570\u629b\u5149\u65f6\uff0c\u5e94\u9009\u7528\u4f4e\u786c\u5ea6\u78e8\u6599\u548c\u5f31\u78b1\u6027\u4f53\u7cfb\u7684\u6d46\u6599\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u5e94\u7528\u573a\u666f\uff1a<\/strong>\u00a0\u6d45\u6c9f\u9694\u79bb\uff08STI\uff09\u548c\u5c42\u95f4\u4ecb\u8d28\uff08ILD\uff09\u7684\u5e73\u9762\u5316\u3002.<\/p>\n<\/li>\n<\/ul>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u91d1\u5c5e\u5c42\u629b\u5149\uff08\u94dc\/\u74e6\uff09<\/strong><\/p>\n<ul>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u8981\u6c42\uff1a<\/strong>\u00a0\u9ad8\u91d1\u5c5e\u53bb\u9664\u7387\u3001\u9ad8\u9009\u62e9\u6027\u3001\u4f4e\u6b8b\u7559\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u63a8\u8350\u7c7b\u578b\uff1a<\/strong>\u00a0\u7528\u4e8e\u94dc\u629b\u5149\u7684\u9178\u6027 SiO2 \u7814\u78e8\u6db2\uff1b\u7528\u4e8e W \u629b\u5149\u7684\u9178\u6027 Al2O3 \u7814\u78e8\u6db2\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u5e94\u7528\u573a\u666f\uff1a<\/strong>\u00a0\u629b\u5149\u91d1\u5c5e\u4e92\u8fde\u7ebf\u3001\u63a5\u89e6\u5b54\/\u901a\u5b54\u3002.<\/p>\n<\/li>\n<\/ul>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u5148\u8fdb\u8282\u70b9\uff087 \u7eb3\u7c73\u53ca\u4ee5\u4e0b\uff09\u7684\u7279\u6b8a\u629b\u5149<\/strong><\/p>\n<ul>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u8981\u6c42\uff1a<\/strong>\u00a0\u8d85\u4f4e\u7f3a\u9677\u3001\u539f\u5b50\u7ea7\u5e73\u6574\u5ea6\u3001\u4e0e\u6781\u8584\u8584\u819c\u517c\u5bb9\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u63a8\u8350\u7c7b\u578b\uff1a<\/strong>\u00a0\u539f\u5b50\u5c42\u629b\u5149\u6d46\u6599\u3001\u65e0\u78e8\u6599\u629b\u5149\u6d46\u6599\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u5e94\u7528\u573a\u666f\uff1a<\/strong>\u00a0\u5148\u8fdb\u903b\u8f91\u82af\u7247\u548c 3D NAND \u5b58\u50a8\u5668\u82af\u7247\u5173\u952e\u5c42\u7684\u629b\u5149\u3002.<\/p>\n<\/li>\n<li><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-742\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-3.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-3.png\" alt=\"\" width=\"750\" height=\"492\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27750%27%20height%3D%27492%27%20viewBox%3D%270%200%20750%20492%27%3E%3Crect%20width%3D%27750%27%20height%3D%27492%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-3-200x131.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-3-300x197.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-3-400x262.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-3-600x394.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/33-3.png 750w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 750px) 100vw, 750px\" \/><\/li>\n<\/ul>\n<\/li>\n<\/ol>\n<p class=\"ds-markdown-paragraph\"><strong>III.\u9009\u62e9\u6676\u5706\u629b\u5149\u6d46\u6599\u7684 3 \u4e2a\u6280\u5de7<\/strong><\/p>\n<ol start=\"1\">\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u5339\u914d\u5de5\u827a\u8282\u70b9\u548c\u6676\u5706\u5c3a\u5bf8\uff1a<\/strong>\u00a0\u5bf9\u4e8e\u5148\u8fdb\u8282\u70b9\uff08\u5982 5 \u7eb3\u7c73\uff09\uff0c\u5e94\u9009\u62e9\u9ad8\u7eaf\u5ea6\u3001\u7ec6\u9897\u7c92\u5927\u5c0f\u7684\u6d46\u6599\u3002\u5bf9\u4e8e 12 \u82f1\u5bf8\u6676\u5706\uff0c\u5e94\u6ce8\u610f\u5747\u5300\u8986\u76d6\uff0c\u4ee5\u907f\u514d\u8fb9\u7f18\u6548\u5e94\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u5e73\u8861\u6210\u672c\u4e0e\u4f9b\u5e94\u94fe\uff1a<\/strong>\u00a0\u5728\u6279\u91cf\u751f\u4ea7\u65f6\uff0c\u7075\u6d3b\u5730\u5c06\u9ad8\u6027\u4ef7\u6bd4\u7684\u56fd\u4ea7\u7c97\u629b\u5149\u6d46\u6599\u4e0e\u8fdb\u53e3\u6216\u9ad8\u7aef\u56fd\u4ea7 CMP \u7cbe\u629b\u5149\u6d46\u6599\u76f8\u7ed3\u5408\uff08\u76ee\u524d\u56fd\u4ea7\u7cbe\u629b\u5149\u6d46\u6599\u7684\u6027\u80fd\u4e0e\u56fd\u9645\u54c1\u724c\u76f8\u5f53\uff09\u3002\u540c\u65f6\uff0c\u786e\u4fdd\u7a33\u5b9a\u7684\u4f9b\u5e94\u5546\u80fd\u529b\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u7279\u6b8a\u5de5\u827a\u5b9a\u5236<\/strong>\u00a0\u5bf9\u4e8e\u78b3\u5316\u7845\/\u6c2e\u5316\u9553\u7b49\u5bbd\u5e26\u9699\u534a\u5bfc\u4f53\u7684\u629b\u5149\uff0c\u53ef\u4e0e\u4f9b\u5e94\u5546\u5408\u4f5c\u5b9a\u5236\u914d\u65b9\uff08\u4f8b\u5982\uff0c\u7528\u4e8e\u78b3\u5316\u7845\u629b\u5149\u7684\u9ad8\u786c\u5ea6\u91d1\u521a\u77f3\u7814\u78e8\u6d46\uff09\u3002.<\/p>\n<\/li>\n<\/ol>\n<p class=\"ds-markdown-paragraph\">\u4f5c\u4e3a\u4e00\u5bb6\u4e13\u6ce8\u4e8e\u534a\u5bfc\u4f53\u9886\u57df\u7684\u516c\u53f8\uff0c\u6676\u667a\u7535\u5b50\u6df1\u523b\u7406\u89e3 CMP \u629b\u5149\u6d46\u6599\u5bf9\u6676\u5706\u5236\u9020\u826f\u7387\u7684\u5173\u952e\u5f71\u54cd\u3002\u51ed\u501f\u5bf9\u884c\u4e1a\u5de5\u827a\u7684\u6df1\u523b\u6d1e\u5bdf\uff0c\u6211\u4eec\u53ef\u4ee5\u4e3a\u5ba2\u6237\u63d0\u4f9b\u629b\u5149\u6d46\u6599\u9009\u62e9\u54a8\u8be2\u548c\u5de5\u827a\u9002\u5e94\u6027\u6d4b\u8bd5\u7b49\u5b9a\u5236\u5316\u670d\u52a1\u3002\u6211\u4eec\u65e8\u5728\u5e2e\u52a9\u534a\u5bfc\u4f53\u4f01\u4e1a\u7cbe\u51c6\u5339\u914d\u9700\u6c42\uff0c\u4f18\u5316\u751f\u4ea7\u6548\u7387\uff0c\u5728\u5148\u8fdb\u5236\u9020\u7684\u9053\u8def\u4e0a\u7a33\u6b65\u524d\u884c\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>In the global planarization stage of wafer manufacturing, Chemical Mechanical Polishing (CMP) is a critical process. As a core consumable, CMP polishing slurry directly determines key wafer surface metrics such  &#8230;<\/p>","protected":false},"author":1,"featured_media":740,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,58],"tags":[],"class_list":["post-739","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-dynamics"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/739","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=739"}],"version-history":[{"count":1,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/739\/revisions"}],"predecessor-version":[{"id":743,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/739\/revisions\/743"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/740"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=739"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=739"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=739"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}