{"id":744,"date":"2025-12-05T10:32:18","date_gmt":"2025-12-05T02:32:18","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=744"},"modified":"2025-12-05T10:32:18","modified_gmt":"2025-12-05T02:32:18","slug":"cmp-polishing-slurry-for-electronic-silicon-wafers","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/cmp-polishing-slurry-for-electronic-silicon-wafers\/","title":{"rendered":"\u7528\u4e8e\u7535\u5b50\u7845\u6676\u7247\u7684 CMP \u629b\u5149\u6d46\u6599"},"content":{"rendered":"<p class=\"ds-markdown-paragraph\"><strong>I.CMP \u629b\u5149\u6280\u672f\uff1a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u5173\u952e\u5de5\u827a<\/strong><\/p>\n<p class=\"ds-markdown-paragraph\">\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316\uff08CMP\uff09\u662f\u534a\u5bfc\u4f53\u7845\u6676\u7247\u5236\u9020\u7684\u6838\u5fc3\u5de5\u827a\u4e4b\u4e00\uff0c\u76f4\u63a5\u5f71\u54cd\u82af\u7247\u7684\u6027\u80fd\u548c\u4ea7\u91cf\u3002\u5728\u7845\u7247\u52a0\u5de5\u8fc7\u7a0b\u4e2d\uff0cCMP \u901a\u8fc7\u5316\u5b66\u8150\u8680\u548c\u673a\u68b0\u7814\u78e8\u7684\u534f\u540c\u4f5c\u7528\uff0c\u5b9e\u73b0\u539f\u5b50\u7ea7\u7684\u8868\u9762\u5e73\u9762\u5316\uff08\u7c97\u7cd9\u5ea6\u5c0f\u4e8e 0.2nm\uff09\uff0c\u6ee1\u8db3\u5148\u8fdb\u5de5\u827a\u8282\u70b9\u5bf9\u8d85\u51c0\u548c\u8d85\u5e73\u8868\u9762\u7684\u8981\u6c42\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\"><strong>\u96c6\u667a\u7535\u5b50 CMP \u629b\u5149\u6d46\u6599\u7684\u4e09\u5927\u6838\u5fc3\u529f\u80fd<\/strong><\/p>\n<p class=\"ds-markdown-paragraph\">\u2460\u00a0<strong>\u9ad8\u6548\u629b\u5149\uff1a<\/strong>\u00a0\u7eb3\u7c73\u7ea7\u78e8\u6599\uff08\u5982\u80f6\u4f53\u4e8c\u6c27\u5316\u7845\uff09\u53ef\u7cbe\u786e\u53bb\u9664\u8868\u9762\u7a81\u8d77\uff0c\u6539\u5584\u6676\u7247\u5e73\u6574\u5ea6\u5e76\u51cf\u5c11\u5fae\u5212\u75d5\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u2461\u00a0<strong>\u6da6\u6ed1\u548c\u4fdd\u62a4\uff1a<\/strong>\u00a0\u7279\u6b8a\u6dfb\u52a0\u5242\u53ef\u964d\u4f4e\u6469\u64e6\u7cfb\u6570\uff08&lt;0.05\uff09\uff0c\u6700\u5927\u9650\u5ea6\u5730\u51cf\u5c11\u8bbe\u5907\u78e8\u635f\uff0c\u5ef6\u957f\u886c\u57ab\u5bff\u547d\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u2462\u00a0<strong>\u7cbe\u786e\u7684\u6e29\u5ea6\u63a7\u5236<\/strong>\u00a0\u9ad8\u5bfc\u70ed\u6db2\u4f53\u53ef\u5feb\u901f\u6563\u70ed\uff0c\u9632\u6b62\u5c40\u90e8\u8fc7\u70ed\u9020\u6210\u6676\u683c\u635f\u574f\u3002.<\/p>\n<p><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-745\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-7.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-7.png\" alt=\"\" width=\"750\" height=\"422\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27750%27%20height%3D%27422%27%20viewBox%3D%270%200%20750%20422%27%3E%3Crect%20width%3D%27750%27%20height%3D%27422%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-7-200x113.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-7-300x169.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-7-400x225.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-7-600x338.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-7.png 750w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 750px) 100vw, 750px\" \/><\/p>\n<p class=\"ds-markdown-paragraph\"><strong>II.\u5409\u4e4b\u5c9b\u7535\u5b50 CMP \u629b\u5149\u6d46\u6599\uff1a\u56fd\u4ea7\u9ad8\u7aef\u66ff\u4ee3\u4ea7\u54c1<\/strong><\/p>\n<p class=\"ds-markdown-paragraph\">\u65e0\u9521\u96c6\u667a\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\u4e13\u6ce8\u4e8e\u534a\u5bfc\u4f53\u6750\u6599\u7814\u53d1\u3002\u5176\u7845\u7247\u629b\u5149\u6d46\u6599\uff08\u7845\u7247\u6d46\u6599\uff09\u53ef\u66ff\u4ee3\u8fdb\u53e3\u6d46\u6599\u3002\u5b83\u9002\u7528\u4e8e 8-12 \u82f1\u5bf8\u7845\u7247\u548c\u518d\u751f\u7845\u7247\u7684\u7c97\u3001\u4e2d\u3001\u7cbe\u629b\u5149\uff0c\u5e2e\u52a9\u5ba2\u6237\u964d\u4f4e\u751f\u4ea7\u6210\u672c\uff0c\u63d0\u9ad8\u5de5\u827a\u7a33\u5b9a\u6027\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\"><strong>\u6280\u672f\u7a81\u7834<\/strong><\/p>\n<p class=\"ds-markdown-paragraph\">\u2460\u00a0<strong>\u9ad8\u7a33\u5b9a\u6027\u7eb3\u7c73\u78e8\u6599\uff1a<\/strong>\u00a0\u91c7\u7528\u8868\u9762\u6539\u6027\u6280\u672f\uff0cZeta \u7535\u4f4d &gt; \u00b130mV\uff0c\u786e\u4fdd\u6ce5\u6d46\u957f\u671f\u50a8\u5b58\u4e0d\u6c89\u6dc0\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u2461\u00a0<strong>\u667a\u80fd\u9178\u78b1\u5ea6\u63a7\u5236<\/strong>\u00a0\u9488\u5bf9\u4e0d\u540c\u7684\u629b\u5149\u9636\u6bb5\uff08\u7c97\u629b \u2192 \u7cbe\u629b\uff09\u4f18\u5316 pH \u503c\uff0c\u51cf\u5c11\u78e8\u8017\uff08\u78e8\u8017 &lt;5nm\uff09\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u2462\u00a0<strong>\u4f4e\u7f3a\u9677\u7387\uff1a<\/strong>\u00a0\u7279\u6b8a\u7684\u87af\u5408\u5242\u53ef\u63a7\u5236\u91d1\u5c5e\u6742\u8d28\uff0c\u4f7f\u7f3a\u9677\u5bc6\u5ea6\u5c0f\u4e8e 0.1\/cm\u00b2\uff0c\u7b26\u5408\u9ad8\u7cbe\u5ea6\u82af\u7247\u5236\u9020\u7684\u8981\u6c42\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\"><strong>III.\u5e94\u7528\u573a\u666f\uff1a\u52a9\u529b\u9ad8\u8d28\u91cf\u534a\u5bfc\u4f53\u5236\u9020<\/strong><\/p>\n<p class=\"ds-markdown-paragraph\">\u5409\u4e4b\u5c9b\u7535\u5b50\u534a\u5bfc\u4f53 CMP \u629b\u5149\u6d46\u6599\u5e7f\u6cdb\u5e94\u7528\u4e8e\u534a\u5bfc\u4f53\u884c\u4e1a\uff1a<\/p>\n<p class=\"ds-markdown-paragraph\">\u2460\u00a0<strong>\u5927\u578b\u6676\u5706\u5236\u9020\uff1a<\/strong>\u00a08-12 \u82f1\u5bf8\u6676\u7247\u7684 CMP \u5e73\u9762\u5316\u5904\u7406\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u2461\u00a0<strong>\u518d\u751f\u5a01\u5316\u997c<\/strong>\u00a0\u629b\u5149\u56de\u6536\u7684\u7845\u6676\u7247\uff0c\u964d\u4f4e\u751f\u4ea7\u6210\u672c\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u2462\u00a0<strong>\u9ad8\u7ea7\u5305\u88c5\uff1a<\/strong>\u00a0TSV \u548c 3D IC \u7b49\u5de5\u827a\u7684\u8868\u9762\u5904\u7406\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\"><strong>IV.\u4e3a\u4ec0\u4e48\u9009\u62e9\u96c6\u667a\u7535\u5b50\u7845\u7247\u629b\u5149\u6d46\u6599\uff1f<\/strong><\/p>\n<p class=\"ds-markdown-paragraph\">\u2460\u00a0<strong>\u56fd\u5185\u66ff\u4ee3\u65b9\u6848\uff1a<\/strong>\u00a0\u6027\u80fd\u5ab2\u7f8e\u8fdb\u53e3\u54c1\u724c\uff0c\u4ef7\u683c\u4f18\u52bf\u660e\u663e\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u2461\u00a0<strong>\u5b9a\u5236\u670d\u52a1\uff1a<\/strong>\u00a0\u53ef\u6839\u636e\u5ba2\u6237\u5de5\u827a\u8c03\u6574\u914d\u65b9\uff0c\u4ee5\u4f18\u5316\u629b\u5149\u6548\u7387\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u2462\u00a0<strong>\u7a33\u5b9a\u4f9b\u5e94\uff1a<\/strong>\u00a0\u5185\u90e8\u751f\u4ea7\u7ebf\u786e\u4fdd\u4e86\u4ea4\u8d27\u65f6\u95f4\uff0c\u964d\u4f4e\u4e86\u4f9b\u5e94\u4e2d\u65ad\u98ce\u9669\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u968f\u7740\u4e2d\u56fd\u534a\u5bfc\u4f53\u4ea7\u4e1a\u7684\u5feb\u901f\u53d1\u5c55\uff0c\u56fd\u4ea7 CMP \u629b\u5149\u6d46\u6599\u7684\u6280\u672f\u6210\u719f\u5ea6\u548c\u5e02\u573a\u8ba4\u53ef\u5ea6\u4e0d\u65ad\u63d0\u9ad8\u3002\u51ed\u501f\u629b\u5149\u7387\u9ad8\u3001\u7f3a\u9677\u7387\u8d85\u4f4e\u3001\u4f7f\u7528\u5bff\u547d\u957f\u7b49\u4f18\u52bf\uff0c\u5409\u4e4b\u5c9b\u7535\u5b50\u5df2\u6210\u4e3a\u56fd\u5185\u6676\u5706\u5382\u548c\u518d\u751f\u7845\u7247\u4f01\u4e1a\u7684\u5408\u4f5c\u4f19\u4f34\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\">\u6709\u5173 CMP \u7814\u78e8\u6db2\u8fdb\u53e3\u66ff\u4ee3\u3001\u7845\u7247\u7814\u78e8\/\u629b\u5149\u7814\u78e8\u6db2\u3001\u5927\u578b\u7845\u7247\u629b\u5149\u89e3\u51b3\u65b9\u6848\u3001\u4f4e\u7f3a\u9677\u7814\u78e8\u6db2\u6216\u518d\u751f\u7845\u7247 CMP \u5de5\u827a\u7684\u9700\u6c42\uff0c\u60a8\u53ef\u4ee5\u8054\u7cfb\u96c6\u667a\u7535\u5b50\u7684\u5de5\u7a0b\u56e2\u961f\uff0c\u4ed6\u4eec\u5c06\u5168\u5929\u5019\u5e2e\u52a9\u60a8\u89e3\u51b3\u629b\u5149\u96be\u9898\uff01<\/p>","protected":false},"excerpt":{"rendered":"<p>I. CMP Polishing Technology: A Key Process in Semiconductor Manufacturing Chemical Mechanical Planarization (CMP) is one of the core processes in semiconductor silicon wafer manufacturing, directly impacting chip performance and  &#8230;<\/p>","protected":false},"author":1,"featured_media":745,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,58],"tags":[],"class_list":["post-744","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-dynamics"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/744","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=744"}],"version-history":[{"count":1,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/744\/revisions"}],"predecessor-version":[{"id":746,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/744\/revisions\/746"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/745"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=744"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=744"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=744"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}