{"id":750,"date":"2025-12-05T10:37:26","date_gmt":"2025-12-05T02:37:26","guid":{"rendered":"https:\/\/jeez-semicon.com\/?p=750"},"modified":"2025-12-25T10:47:48","modified_gmt":"2025-12-25T02:47:48","slug":"3c-product-mirror-polishing-solution-pitting-free-sio2-silica-polishing-slurry","status":"publish","type":"post","link":"https:\/\/jeez-semicon.com\/zh\/blog\/3c-product-mirror-polishing-solution-pitting-free-sio2-silica-polishing-slurry\/","title":{"rendered":"3C \u4ea7\u54c1\u955c\u9762\u629b\u5149\u6db2\uff1a\u65e0\u70b9\u8680\u4e8c\u6c27\u5316\u7845\u629b\u5149\u6d46\u6599"},"content":{"rendered":"<p class=\"ds-markdown-paragraph\"><strong>\u4e3a\u4ec0\u4e48\u5728 3C \u4ea7\u54c1\u955c\u9762\u629b\u5149\u4e2d\u9009\u62e9 CMP \u800c\u4e0d\u662f\u7535\u5316\u5b66\u629b\u5149\uff1f<\/strong><\/p>\n<p class=\"ds-markdown-paragraph\">\u5728 3C \u884c\u4e1a\uff08\u624b\u673a\u3001\u7b14\u8bb0\u672c\u7535\u8111\u3001\u667a\u80fd\u53ef\u7a7f\u6234\u8bbe\u5907\u7b49\uff09\u4e2d\uff0c\u7531\u4e8e\u8fb9\u7f18\u8fc7\u8680\u548c\u6750\u6599\u9650\u5236\u7b49\u95ee\u9898\uff0c\u7535\u5316\u5b66\u629b\u5149\u6b63\u9010\u6e10\u88ab CMP\uff08\u5316\u5b66\u673a\u68b0\u629b\u5149\uff09\u6240\u53d6\u4ee3\u3002\u901a\u8fc7\u7eb3\u7c73\u7ea7 SiO2 \u629b\u5149\u6d46\u6599\u7684\u673a\u68b0\u5316\u5b66\u534f\u540c\u4f5c\u7528\uff0c\u96c6\u667a\u7535\u5b50\u5b9e\u73b0\u4e86\u4ee5\u4e0b\u76ee\u6807<\/p>\n<p class=\"ds-markdown-paragraph\">\u2460\u00a0<strong>\u7eb3\u7c73\u7ea7\u7cbe\u5ea6\uff1a<\/strong>\u00a0\u8868\u9762\u7c97\u7cd9\u5ea6 Ra &lt; 2nm\uff0c\u7b26\u5408\u5149\u5b66\u7ea7\u955c\u9762\u8981\u6c42\u3002.<br \/>\n\u2461\u00a0<strong>\u590d\u6742\u7ed3\u6784\u9002\u5e94\u6027\uff1a<\/strong>\u00a0\u9002\u7528\u4e8e\u94dd\u5408\u91d1\u4e2d\u6846\u548c\u4e0d\u9508\u94a2\u6309\u94ae\u7b49\u4e0d\u89c4\u5219\u90e8\u4ef6\u3002.<br \/>\n\u2462\u00a0<strong>\u63d0\u9ad8\u6548\u7387\uff1a<\/strong>\u00a0\u4e0e\u4f20\u7edf\u65b9\u6cd5\u76f8\u6bd4\uff0c\u5904\u7406\u65f6\u95f4\u7f29\u77ed\u4e86 30%\u3002.<\/p>\n<p><img decoding=\"async\" class=\"lazyload alignnone size-full wp-image-751\" src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-9.png\" data-orig-src=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-9.png\" alt=\"\" width=\"750\" height=\"484\" srcset=\"data:image\/svg+xml,%3Csvg%20xmlns%3D%27http%3A%2F%2Fwww.w3.org%2F2000%2Fsvg%27%20width%3D%27750%27%20height%3D%27484%27%20viewBox%3D%270%200%20750%20484%27%3E%3Crect%20width%3D%27750%27%20height%3D%27484%27%20fill-opacity%3D%220%22%2F%3E%3C%2Fsvg%3E\" data-srcset=\"https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-9-200x129.png 200w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-9-300x194.png 300w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-9-400x258.png 400w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-9-600x387.png 600w, https:\/\/jeez-semicon.com\/wp-content\/uploads\/2025\/12\/11-9.png 750w\" data-sizes=\"auto\" data-orig-sizes=\"(max-width: 750px) 100vw, 750px\" \/><\/p>\n<p class=\"ds-markdown-paragraph\"><strong>\u6df1\u5165\u5206\u6790\u7845\u629b\u5149\u6d46\u6599\u7684\u70b9\u8680\u95ee\u9898<\/strong><\/p>\n<p class=\"ds-markdown-paragraph\">\u5ba2\u6237\u62a5\u544a\u7684\u70b9\u8680\u95ee\u9898\u901a\u5e38\u662f\u7531\u4ee5\u4e0b\u539f\u56e0\u9020\u6210\u7684\uff1a<\/p>\n<ul>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u7845\u6eb6\u80f6\u8150\u8680\uff1a<\/strong>\u00a0\u4f4e\u7eaf\u5ea6\u6ce5\u6d46\u4e2d\u7684 Na+\u3001Cl- \u79bb\u5b50\u5f15\u53d1\u91d1\u5c5e\u7684\u7535\u5316\u5b66\u8150\u8680\u3002.<\/p>\n<\/li>\n<li>\n<p class=\"ds-markdown-paragraph\"><strong>\u5de5\u827a\u7f3a\u9677\uff1a<\/strong>\u00a0\u4e4b\u524d\u7c97\u629b\u5149\u9636\u6bb5\u7559\u4e0b\u7684\u5927\u4e8e 0.1 \u5fae\u7c73\u7684\u6b8b\u7559\u5212\u75d5\u5728\u7cbe\u629b\u5149\u65f6\u88ab\u653e\u5927\u3002.<\/p>\n<\/li>\n<\/ul>\n<p class=\"ds-markdown-paragraph\"><strong>\u96c6\u667a\u7535\u5b50\u89e3\u51b3\u65b9\u6848<\/strong><br \/>\n\u2460\u00a0<strong>\u9ad8\u7eaf\u5ea6\u6c28\u7a33\u5b9a\u7845\u6eb6\u80f6<\/strong>\u00a0\u91d1\u5c5e\u6742\u8d28 &lt; 1ppm\uff0cpH \u503c\u63a7\u5236\u7cbe\u786e\uff088-10\uff09\u3002.<br \/>\n\u2461\u00a0<strong>\u8868\u9762\u6539\u6027\u6280\u672f\uff1a<\/strong>\u00a0\u6d82\u6709\u7845\u70f7\u5076\u8054\u5242\u7684\u78e8\u6599\u53ef\u51cf\u5c11\u76f4\u63a5\u63a5\u89e6\u8150\u8680\u3002.<br \/>\n\u2462\u00a0<strong>\u5de5\u827a\u5305\u652f\u6301\uff1a<\/strong>\u00a0\u63d0\u4f9b\u4ece\u7c97\u629b\u5149\uff08Ra 50nm \u2192 10nm\uff09\u5230\u7cbe\u629b\u5149\uff08Ra \u2192 2nm\uff09\u7684\u5b8c\u6574\u53c2\u6570\u96c6\u3002.<\/p>\n<p class=\"ds-markdown-paragraph\"><strong>\u5409\u4e4b\u5c9b\u7535\u5b50\u7845\u629b\u5149\u6d46\u6599\u7684\u6280\u672f\u4f18\u52bf<\/strong><\/p>\n<div class=\"ds-scroll-area _1210dd7 c03cafe9\">\n<div class=\"ds-scroll-area__gutters\">\n<div class=\"ds-scroll-area__horizontal-gutter\"><\/div>\n<div class=\"ds-scroll-area__vertical-gutter\"><\/div>\n<\/div>\n<table>\n<thead>\n<tr>\n<th>\u6280\u672f\u6307\u6807<\/th>\n<th>\u884c\u4e1a\u6807\u51c6\u4ea7\u54c1<\/th>\n<th>\u96c6\u667a\u7535\u5b50\u89e3\u51b3\u65b9\u6848<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td><strong>\u78e8\u6599\u7c92\u5ea6<\/strong><\/td>\n<td>50-200 \u7eb3\u7c73\uff08\u5e7f\u6cdb\u5206\u5e03\uff09<\/td>\n<td>10-150 \u7eb3\u7c73\uff08D50 \u00b15 \u7eb3\u7c73\uff09<\/td>\n<\/tr>\n<tr>\n<td><strong>\u91d1\u5c5e\u6742\u8d28<\/strong><\/td>\n<td>&gt; 10ppm<\/td>\n<td><strong>&lt; 1ppm<\/strong>\u00a0(\u7ecf ICP-MS \u8ba4\u8bc1\uff09<\/td>\n<\/tr>\n<tr>\n<td><strong>\u8150\u8680\u6d4b\u8bd5<\/strong><\/td>\n<td>48 \u5c0f\u65f6\u540e\u51fa\u73b0\u6c27\u5316<\/td>\n<td><strong>96 \u5c0f\u65f6\u540e\u65e0\u8150\u8680<\/strong>\u00a0(ASTM B117)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<p class=\"ds-markdown-paragraph\">\u96c6\u667a\u7535\u5b50\u63d0\u4f9b\u9ad8\u7cbe\u5ea6\u3001\u65e0\u8150\u8680\u6027\u7684 SiO2 \u629b\u5149\u6d46\u6599\/CMP \u629b\u5149\u57ab\uff0c\u4ee5\u89e3\u51b3 3C \u4ea7\u54c1\u955c\u9762\u629b\u5149\u4e2d\u7684\u70b9\u8680\u95ee\u9898\u3002\u6211\u4eec\u7684\u7eb3\u7c73\u7ea7\u78e8\u6599\uff0810-150nm\uff09\u53ef\u5b9e\u73b0 Ra &lt; 2nm \u7684\u8868\u9762\u7cbe\u5ea6\u3002\u51ed\u501f 25 \u5e74\u7684 CMP \u5de5\u827a\u6280\u672f\u4e13\u957f\uff0c\u6211\u4eec\u4e3a\u534a\u5bfc\u4f53\u3001\u91d1\u5c5e\u548c\u7845\u6676\u7247\u7684\u629b\u5149\u5347\u7ea7\u63d0\u4f9b\u4e86\u6709\u529b\u652f\u6301\uff01\u5982\u9700\u8fdb\u4e00\u6b65\u7684\u6280\u672f\u4ea4\u6d41\uff0c\u60a8\u53ef\u4ee5\u8054\u7cfb\u96c6\u667a\u7535\u5b50\u6280\u672f\u56e2\u961f\uff0c\u83b7\u53d6\u00a0<em>\u201c3C\u4ea7\u54c1CMP\u629b\u5149\u767d\u76ae\u4e66\u201d<\/em>\u00a0\u548c\u884c\u4e1a\u89e3\u51b3\u65b9\u6848\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>Why Choose CMP Over Electrochemical Polishing for 3C Product Mirror Polishing? In the 3C industry (mobile phones, laptops, smart wearables, etc.), electrochemical polishing is gradually being replaced by CMP (Chemical  &#8230;<\/p>","protected":false},"author":1,"featured_media":1012,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[9,58],"tags":[],"class_list":["post-750","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-dynamics"],"acf":[],"_links":{"self":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/750","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/comments?post=750"}],"version-history":[{"count":1,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/750\/revisions"}],"predecessor-version":[{"id":752,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/posts\/750\/revisions\/752"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media\/1012"}],"wp:attachment":[{"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/media?parent=750"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/categories?post=750"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jeez-semicon.com\/zh\/wp-json\/wp\/v2\/tags?post=750"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}